CN114311952B - Diaphragm stripping platform - Google Patents
Diaphragm stripping platform Download PDFInfo
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- CN114311952B CN114311952B CN202111541651.8A CN202111541651A CN114311952B CN 114311952 B CN114311952 B CN 114311952B CN 202111541651 A CN202111541651 A CN 202111541651A CN 114311952 B CN114311952 B CN 114311952B
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Abstract
The invention discloses a membrane stripping platform which comprises a guide rail, a connecting plate, a stripping plate and a linear driving mechanism, wherein the guide rail extends along the front-back direction and is used for being connected with laminating equipment; the connecting plate is vertically arranged and connected with the laminating equipment; the left end of the stripping plate is connected with the side face of the connecting plate in a sliding manner, and the right end of the stripping plate is connected with a guide wheel matched with the guide rail; the output end of the linear driving mechanism is connected with the stripping plate. The left end of the stripping plate can be connected with the side face of the connecting plate in a sliding mode, the right end of the stripping plate is connected with the guide rail through the guide wheel, the cutting mechanism and the adsorption plate have an acting force for pressing the stripping plate downwards, the stripping plate is balanced in stress under the support of the guide rail and the connecting plate, the stripping plate is arranged in a non-cantilever supporting mode, the situation that the stripping plate is deformed, inclined or loosened is avoided, and therefore reliability of the stripping plate is improved.
Description
Technical Field
The invention relates to the technical field of capacitor production equipment, in particular to a diaphragm stripping platform.
Background
MLCC (Multi-layer Ceramic Capacitors) is a chip type multilayer Ceramic capacitor, which is abbreviated as English, and is formed by overlapping Ceramic dielectric diaphragms (Ceramic diaphragms) printed with electrodes (inner electrodes) in a staggered mode, sintering at high temperature once to form a Ceramic chip, and sealing metal layers (outer electrodes) (electrode films) at two ends of the chip to form a monolithic structure body, namely a monolithic capacitor.
In the lamination equipment of the chip type multilayer ceramic capacitor, a diaphragm consisting of an electrode film and a base film is absorbed and drawn to a diaphragm stripping platform through a vacuum roller, the electrode film on the diaphragm stripping platform is cut into required squares by a cutting mechanism, and the electrode film cut on the diaphragm stripping platform is stripped from the base film by an adsorption plate. The diaphragm of present stage strips the platform, and the diaphragm strips the platform and often appears warping, crooked or not hard up the condition, just needs maintenance and change after using a period, and the reliability is lower.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides the membrane stripping platform which is balanced in stress and high in reliability.
The membrane stripping platform comprises a guide rail, a connecting plate, a stripping plate and a linear driving mechanism, wherein the guide rail extends along the front-back direction and is used for being connected with laminating equipment; the connecting plate is vertically arranged and connected with the laminating equipment; the left end of the stripping plate is connected with the side face of the connecting plate in a sliding manner, and the right end of the stripping plate is connected with a guide wheel matched with the guide rail; the output end of the linear driving mechanism is connected with the stripping plate.
The method has at least the following beneficial effects: the left end of the stripping plate is connected with the side face of the connecting plate in a sliding mode, the right end of the stripping plate is connected with the guide rail through the guide wheel, and the output end of the linear driving mechanism is connected with the stripping plate, so that the linear driving mechanism can drive the stripping plate to move back and forth on the guide rail and the connecting plate along the front-back direction, and the stripping plate is located at an initial stripping station or a finishing stripping station. The membrane is pressed against the upper surface of the stripping plate, so that the cutting mechanism and the adsorption plate can conveniently cut and strip the electrode film on the stripping plate. When the electrode film is stripped from the base film, the cutting mechanism and the adsorption plate have acting force for pressing the stripping plate downwards, the stripping plate is balanced in stress under the support of the guide rail and the connecting plate, and the stripping plate is in non-cantilever support arrangement, so that the situation that the stripping plate is deformed, inclined or loosened is avoided, and the reliability of the stripping plate is improved.
According to some embodiments of the invention, the connecting plate is hinged to the stacking device through a hinge shaft, the hinge shaft extends in the left-right direction, the connecting plate is fixedly connected to the stacking device through a first adjusting assembly, the guide rail is fixedly connected to the stacking device through a second adjusting assembly, and the inclination angle of the guide rail is adjustable.
According to some embodiments of the present invention, the first adjusting assembly includes a first mounting block, and a first screw and two first nuts that are matched with the first mounting block, the first mounting block is configured to be connected to the lamination device, the first mounting block is provided with a first through hole that extends in an up-down direction, the diameter of the first through hole is larger than the diameter of the first screw, an end of the first screw faces downward and is hinged to an upper portion of a front end of the connection plate, one of the first nuts abuts against a lower surface of the first mounting block, a threaded section of the first screw faces upward and is disposed in the first through hole, the threaded section of the first screw is exposed above the first mounting block and is connected to the other first nut, and the other first nut abuts against an upper surface of the first mounting block.
According to some embodiments of the invention, the stacking device further comprises a first jacking assembly which is connected with or abutted against the stacking device and the lower end front part of the connecting plate so as to drive the connecting plate to rotate around the hinge shaft.
According to some embodiments of the invention, the first jacking assembly comprises a second mounting block and a jacking rod, the second mounting block is used for being connected with the stacking equipment, the jacking rod is vertically arranged and is in threaded connection with the second mounting block, and the upper end of the jacking rod abuts against the front part of the lower end of the connecting plate.
According to some embodiments of the invention, the stripping plate is provided with an air passage, the upper surface of the stripping plate is provided with a plurality of adsorption ports communicated with the air passage, and the air passage is communicated with a first negative pressure device.
According to some embodiments of the invention, a water channel is provided in the stripping plate, the water channel being in communication with a circulating cooling water supply.
According to some embodiments of the invention, the front end of the stripping plate is provided with a smoothing plate which is flush with the upper surface of the stripping plate and is used for smoothing the membrane.
According to some embodiments of the invention, the stripping plate is connected with the side surface of the connecting plate and the guide wheel through the sliding bottom plate.
According to some embodiments of the invention, the lifting device further comprises four second lifting assemblies distributed in a rectangular shape, and the second lifting assemblies are connected with the sliding bottom plate and the stripping plate to drive the stripping plate to lift.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The invention is further described with reference to the following figures and examples, in which:
FIG. 1 is a first schematic structural diagram according to an embodiment of the present invention;
FIG. 2 is a second schematic structural diagram according to an embodiment of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2;
FIG. 4 is a schematic side view of the slide base and the stripper plate according to the embodiment of the invention.
Reference numerals: the device comprises a guide rail 100, a second adjusting component 110, a connecting plate 200, a stripping plate 300, a guide wheel 310, a film smoothing plate 320, a linear driving mechanism 400, a first adjusting component 500, a first mounting block 510, a first screw 520, a first nut 530, a first jacking component 600, a sliding bottom plate 700, a static removing device 710, a dust removing device 720 and a second jacking component 800.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, if there are first and second descriptions for distinguishing technical features, they are not interpreted as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the precedence of the indicated technical features.
In the description of the present invention, unless otherwise specifically limited, terms such as set, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention by combining the specific contents of the technical solutions.
Referring to fig. 1 and 2, the present invention discloses a film peeling platform, which comprises a guide rail 100, a connecting plate 200, a peeling plate 300 and a linear driving mechanism 400, wherein the guide rail 100 extends in a front-back direction, and the guide rail 100 is used for connecting with a laminating device; the connecting plate 200 is vertically arranged and connected with the laminating equipment; the left end of the stripping plate 300 is connected with the side surface of the connecting plate 200 in a sliding manner, and the right end of the stripping plate 300 is connected with a guide wheel 310 matched with the guide rail 100; the output end of the linear driving mechanism 400 is connected to the peeling plate 300.
The left end of the peeling plate 300 is slidably connected with the side surface of the connecting plate 200, the right end of the peeling plate 300 is connected with the guide rail 100 through the guide wheel 310, and the output end of the linear driving mechanism 400 is connected with the peeling plate 300, so that the linear driving mechanism 400 can drive the peeling plate 300 to move back and forth on the guide rail 100 and the connecting plate 200 along the front-back direction, so that the peeling plate 300 is at the peeling initial station or the peeling completion station. The membrane abuts on the upper surface of the peeling plate 300, thereby facilitating the cutting mechanism and the adsorption plate to cut and peel the electrode film on the peeling plate 300. When the electrode film is peeled from the base film, the cutting mechanism and the adsorption plate have acting force for pressing the peeling plate 300 downwards, the peeling plate 300 is balanced in stress under the support of the guide rail 100 and the connecting plate 200, the peeling plate 300 is in non-cantilever support arrangement, the situation that the peeling plate 300 is deformed, inclined or loosened is avoided, and therefore the reliability of the peeling plate 300 is improved.
It can be understood that the connection plate 200 is hinged to the stacking apparatus by a hinge shaft extending in the left and right directions, the connection plate 200 is fixedly connected to the stacking apparatus by the first adjusting unit 500, one end of the guide rail 100 is fixedly connected to the stacking apparatus by the second adjusting unit 110, and the other end of the guide rail 100 is hinged to the stacking apparatus. Due to the arrangement of the hinge shaft and the adjustable inclination angle of the guide rail 100, the connecting plate 200 rotates with the left and right directions as the rotation central axis, so that the front and rear ends of the connecting plate 200 and the stripping plate 300 have a height difference, that is, the connecting plate 200 and the stripping plate 300 rotate to make the connecting plate 200 and the stripping plate 300 have an inclination angle.
When the connecting plate 200 and the stripping plate 300 are at a proper inclination angle, the connecting plate 200 is fixedly connected with the laminating device through the first adjusting assembly 500, one end of the guide rail 100 is fixedly connected with the laminating device through the second adjusting assembly 110, and the other end of the guide rail 100 is hinged with the laminating device, so that the relative positions of the connecting plate 200, the stripping plate 300, the laminating device and the guide rail 100 are fixed. When the inclination angles of the connection plate 200 and the peeling plate 300 need to be adjusted, the inclination angles of the connection plate 200 and the guide rail 100 may be adjusted by the first adjusting member 500 and the second adjusting member 110, respectively. It should be understood that the first regulation member 500 and the hinge shaft are distributed in front and rear of the center of gravity of the link plate 200.
The stripping plate 300 has a certain inclination angle, and the adsorption plate is horizontal, that is, the stripping plate 300 and the adsorption plate form an included angle, and when the included angle is smaller, the adsorption plate is convenient to adsorb the electrode film, and the electrode film is convenient to strip from the base film. Experiments prove that when the height difference of the front end and the rear end of the stripping plate 300 is 50um to 100um, the adsorption plate is most favorable for adsorbing and stripping the electrode film.
Referring to fig. 3, the first adjusting assembly 500 includes a first mounting block 510, and a first screw 520 and two first nuts 530 that are engaged with the first mounting block 510, the first mounting block 510 is configured with a first through hole extending in an up-down direction, the diameter of the first through hole is larger than that of the first screw 520, an end of the first screw 520 faces downward and is hinged to an upper portion of a front end of the connecting plate 200, one first nut 530 abuts against a lower surface of the first mounting block 510, a thread section of the first screw 520 faces upward and is disposed through the first through hole, the thread section of the first screw 520 is exposed above the first mounting block 510 and is connected to the other first nut 530, and the other first nut 530 abuts against an upper surface of the first mounting block 510. The up-down position of the first screw 520 can be adjusted by rotating the two first nuts 530, so that the upper part of the front end of the connecting plate 200 is lifted or lowered, thereby realizing the rotation of the connecting plate 200 around the hinge shaft.
It should be understood that the diameter of the first through hole is larger than that of the first screw 520, and the first screw 520 can rotate in the first through hole by a certain angle, so that the front end of the connection plate 200 can swing, and the inner wall of the first through hole does not interfere with the first screw 520. Meanwhile, the outer diameter of the end of the first screw 520 and the outer diameters of the two first nuts 530 are larger than the diameter of the first through hole, so that the end of the first screw 520 and the two first nuts 530 are prevented from entering the first through hole.
The end of the first nut 530 is provided with a ring, a first bolt is movably inserted into the ring, the end of the first bolt abuts against the circumferential wall of the ring, and the thread section of the first bolt is in threaded connection with the connecting plate 200. The first screw 520 can be conveniently and quickly detached from the connecting plate 200 by unscrewing the first bolt, and the first screw 520 and the connecting plate 200 can be conveniently and quickly connected together by screwing the first bolt.
It is to be understood that the second adjustment assembly 110 is identical in construction and installation to the first adjustment assembly 500 and will not be redundantly described here.
The membrane peeling platform further comprises a first jacking assembly 600, and the first jacking assembly 600 is connected with or abutted against the laminating equipment and the lower end front part of the connecting plate 200 so as to drive the connecting plate 200 to rotate around the hinge shaft. Can drive connecting plate 200 and rotate around the hinge through the lower extreme front portion of first jacking subassembly 600 jacking connecting plate 200, after first jacking subassembly 600 rotated connecting plate 200 suitable inclination, the rethread first adjusting part 500 was with connecting plate 200 and lamination equipment relatively fixed.
It can be understood that an air passage is arranged in the peeling plate 300, the upper surface of the peeling plate 300 is provided with a plurality of adsorption ports communicated with the air passage, and the air passage is communicated with a first negative pressure device. The first negative pressure device is a negative pressure source and forms negative pressure at the outlet of the adsorption port through the air passage, so that the stripping plate 300 can adsorb the membrane.
Specifically, the lower surface and any one of the front, rear, left and right end surfaces of the peeling plate 300 are provided with air pipe ports communicated with the air passages, and the air pipe ports are communicated with the first negative pressure device through air pipes.
A water channel is arranged in the stripping plate 300 and is communicated with a circulating cooling water supply device which supplies cooling water to the water channel, and the cooling water keeps the stripping plate 300 warm, so that the stripping plate 300 is prevented from being heated or cooled by the influence of the external environment, and finally the stripping plate 300 is kept at a stable temperature. Since the peeling electrode film is quickly peeled off from the base film, the temperature of the adsorption plate needs to be high, e.g., 65 ℃. When the temperature difference between the adsorption plate and the stripping plate 300 changes before and after, the electrode films stripped before and after are stripped differently, which affects the stripping effect and adsorption consistency of the adsorption plate and further affects the quality of the capacitor, so the temperature of the stripping plate 300 needs to be stabilized. It should be understood that the peeling plate 300 is made of a material having a good thermal conductivity, such as metal.
It should be understood that the lower surface and any two surfaces of the front, rear, left and right end surfaces of the peeling plate 300 are respectively provided with a water inlet port and a water outlet port, the water inlet port is communicated with the water channel inlet, the water inlet port is communicated with the water outlet of the circulating cooling water supply device through a first pipeline, the water outlet port is communicated with the water channel outlet, and the water outlet port is communicated with the water inlet of the circulating cooling water supply device through a second pipeline.
It is understood that the front end of the peeling plate 300 is provided with a smoothing plate 320 flush with the upper surface of the peeling plate 300, and the smoothing plate 320 serves to smooth the membrane. When the diaphragm removed the diaphragm and peels off the platform, the diaphragm supported earlier on stroking the lamina membranacea 320, when the diaphragm removed, the diaphragm took place relative movement with stroking the lamina membranacea 320, and then made to strove the lamina membranacea 320 and smooth the diaphragm for the diaphragm is flattened on peeling board 300. Specifically, two of the film-smoothing plates 320 are provided, the two film-smoothing plates 320 are connected with the front end face of the peeling plate 300, and the two film-smoothing plates 320 are located on the left and right sides of the front end face of the peeling plate 300.
Referring to fig. 4, the film peeling platform further includes a sliding base plate 700, and the peeling plate 300 is connected to the side surface of the connection plate 200 and the guide wheel 310 through the sliding base plate 700. The sliding bottom plate 700 plays a role of transitional connection, and when the stripping plate 300 needs to be overhauled and replaced, the stripping plate 300 can be directly detached from the sliding bottom plate 700.
It should be understood that the slide base 700 includes a vertical portion and a horizontal portion connected thereto, the peeling plate 300 is provided on the horizontal portion, the vertical portion is parallel to the connection plate 200, and the vertical portion and the connection plate 200 are connected by a sliding mechanism. The sliding mechanism comprises a sliding rail and a sliding block which are matched with each other, one of the sliding rail and the sliding block is connected with the vertical part, and the other one is connected with the connecting plate 200. Specifically, the two sliding mechanisms are arranged, and the two sliding mechanisms are distributed up and down.
The membrane peeling platform further comprises four second jacking assemblies 800 which are distributed in a rectangular shape, the second jacking assemblies 800 are connected with the sliding bottom plate 700 and the peeling plate 300 to drive the peeling plate 300 to lift, and the inclination angle of the peeling plate 300 can be adjusted through the four second jacking assemblies 800.
The second jacking assembly 800 comprises a first connecting piece and a second connecting piece, a threaded hole is formed in the sliding bottom plate 700, a second through hole is formed in the stripping plate 300, the threaded hole of the first connecting piece is arranged in a penetrating mode and exposed at the upper end of the sliding bottom plate 700, the second connecting piece is arranged in a penetrating mode and connected with the end of the threaded hole of the first connecting piece, and the stripping plate 300 is fixed on the first connecting piece through the second connecting piece. Since the first link can change the up-down position of the first link by rotating, the height of the peeling plate 300 can be changed by rotating the first link.
It should be understood that the first and second connectors are both bolts. The linear driving mechanism 400 is a screw pair or an air cylinder or an oil cylinder.
The electrostatic precipitator 710 and the dust precipitator 720 are disposed behind the stripping plate 300. The static electricity removing device 710 can remove static electricity in each area of the membrane to prevent the membrane from being damaged by static electricity, such as electrostatic adsorption. The dust removing device 720 can remove the scraps and dust generated after cutting the stripping electrode film, and prevent the electrode film from being contaminated by the scraps and dust, thereby preventing the quality of the capacitor from being affected.
It is understood that the static charge removing device 710 is electrically connected to the peeling plate 300 or the sliding base 700. Dust collector 720 includes the cell body and the second negative pressure device of intercommunication each other, and the cell body is connected with stripping plate 300 or sliding bottom plate 700, and the cell body is arranged in the rear of stripping plate 300, and the notch of cell body is not higher than the upper surface of stripping plate 300 up, and the length direction and the left and right directions of notch are parallel to each other, and the length of notch is greater than the width of diaphragm.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The present invention is not limited to the above-described embodiments, and those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are included in the scope defined by the claims of the present application.
Claims (8)
1. Platform is peeled off to diaphragm, its characterized in that includes:
the guide rail extends along the front-back direction, is fixedly connected with the laminating equipment through a second adjusting assembly, and has an adjustable inclination angle;
the connecting plate is vertically arranged, the connecting plate is hinged to the lamination device through a hinge shaft, the hinge shaft extends in the left-right direction, the connecting plate is fixedly connected with the lamination device through a first adjusting assembly, the first adjusting assembly comprises a first mounting block, a first screw rod and two first nuts, the first mounting block is used for being connected with the lamination device, a first through hole extending in the up-down direction is formed in the first mounting block, the diameter of the first through hole is larger than that of the first screw rod, the end of the first screw rod faces downwards and is hinged to the upper portion of the front end of the connecting plate, one first nut abuts against the lower surface of the first mounting block, the thread section of the first screw rod faces upwards and penetrates through the first through hole, the thread section of the first screw rod is exposed above the first mounting block and is connected with the other first nut, and the other first nut abuts against the upper surface of the first mounting block;
the left end of the stripping plate is connected with the side face of the connecting plate in a sliding manner, and the right end of the stripping plate is connected with a guide wheel matched with the guide rail;
and the output end of the linear driving mechanism is connected with the stripping plate.
2. The film strip platform of claim 1, wherein: the hinge shaft is connected with the connecting plate through a hinge shaft, and the hinge shaft is connected with the connecting plate through a hinge shaft.
3. The film strip platform of claim 2, wherein: the first jacking assembly comprises a second mounting block and a jacking rod, the second mounting block is used for being connected with the laminating equipment, the jacking rod is vertically arranged and is in threaded connection with the second mounting block, and the upper end of the jacking rod abuts against the front portion of the lower end of the connecting plate.
4. The film strip platform of claim 1, wherein: the stripping plate is internally provided with an air passage, the upper surface of the stripping plate is provided with a plurality of adsorption ports communicated with the air passage, and the air passage is communicated with a first negative pressure device.
5. The film strip platform of claim 1, wherein: a water channel is arranged in the stripping plate and communicated with a circulating cooling water supply device.
6. The film strip platform of claim 1, wherein: the front end of the stripping plate is provided with a smoothing plate which is parallel to the upper surface of the stripping plate, and the smoothing plate is used for smoothing the diaphragm.
7. The film strip platform of claim 1, wherein: the stripping plate is connected with the side face of the connecting plate and the guide wheel through the sliding bottom plate.
8. The film strip platform of claim 7, wherein: still include four second jacking subassemblies that are the rectangle and distribute, the second jacking subassembly with sliding bottom plate peel off the board and connect in order to order about peel off the board and go up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111541651.8A CN114311952B (en) | 2021-12-16 | 2021-12-16 | Diaphragm stripping platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111541651.8A CN114311952B (en) | 2021-12-16 | 2021-12-16 | Diaphragm stripping platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114311952A CN114311952A (en) | 2022-04-12 |
| CN114311952B true CN114311952B (en) | 2022-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111541651.8A Active CN114311952B (en) | 2021-12-16 | 2021-12-16 | Diaphragm stripping platform |
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| CN (1) | CN114311952B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116313569A (en) * | 2023-02-03 | 2023-06-23 | 珠海市奥德维科技有限公司 | MLCC lamination high-speed high accuracy pay-off cutting lamination mechanism |
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| WO2013005589A1 (en) * | 2011-07-04 | 2013-01-10 | 旭硝子株式会社 | Method for peeling glass substrate, and apparatus for peeling glass substrate |
| CN105291545A (en) * | 2014-06-03 | 2016-02-03 | 旭硝子株式会社 | Stripping device and stripping method of multilayer body and manufacture method of electronic device |
| CN105793957A (en) * | 2013-12-12 | 2016-07-20 | 株式会社半导体能源研究所 | Peeling method and peeling apparatus |
| CN206870554U (en) * | 2017-07-05 | 2018-01-12 | 深圳市精运达自动化设备有限公司 | Film-removing device |
| CN112743963A (en) * | 2020-12-29 | 2021-05-04 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Diaphragm stripping off device |
| CN112873137A (en) * | 2020-12-29 | 2021-06-01 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Stripping workbench |
-
2021
- 2021-12-16 CN CN202111541651.8A patent/CN114311952B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013005589A1 (en) * | 2011-07-04 | 2013-01-10 | 旭硝子株式会社 | Method for peeling glass substrate, and apparatus for peeling glass substrate |
| CN105793957A (en) * | 2013-12-12 | 2016-07-20 | 株式会社半导体能源研究所 | Peeling method and peeling apparatus |
| CN105291545A (en) * | 2014-06-03 | 2016-02-03 | 旭硝子株式会社 | Stripping device and stripping method of multilayer body and manufacture method of electronic device |
| CN206870554U (en) * | 2017-07-05 | 2018-01-12 | 深圳市精运达自动化设备有限公司 | Film-removing device |
| CN112743963A (en) * | 2020-12-29 | 2021-05-04 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Diaphragm stripping off device |
| CN112873137A (en) * | 2020-12-29 | 2021-06-01 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Stripping workbench |
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| CN114311952A (en) | 2022-04-12 |
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