TW201603900A - Coating apparatus and coating method - Google Patents

Abstract

This invention provides for a coating apparatus and coating method capable of both of an appropriate application by securing a proper running speed of a nozzle (an application velocity) and an adequate adjustment of a starting time of a curing process by a curing means, and further capable of adjusting a speed of a curing process (a curing process time), in case of a unit for forming a coating layer being constructed by connecting the nozzle with the curing means in a connecting part. A coating apparatus 1 in which a unit 6 for forming a coating layer moves in a longitudinal direction of a substrate 2, the unit being constructed by connecting a nozzle 8 for discharging a coating liquid with a curing means 10 for curing the coating liquid in a connecting part 9, and the curing means conducting a curing process to the coating liquid coated on the substrate after the nozzle conducting an application to the substrate includes a sliding mechanism 11 being provided with the connecting part as an adjusting mechanism for adjusting a horizontal interval D between the nozzle and curing means, and the sliding mechanism is constituted by a screw rod 11a and a nut 11b.

Description

Coating device and coating method

According to the present invention, in a coating apparatus and a coating method, when a coating film forming unit in which a nozzle and a curing means are connected by a connecting portion is formed, the nozzle moving speed (coating processing speed) can be appropriately ensured. A suitable coating treatment can be carried out at the same time as the adjustment of the start time of the hardening treatment, and the adjustment of the hardening treatment speed (hardening treatment time) can be appropriately performed.

There is a coating device for a substrate (for example, a table coater (Japanese registered trademark)), which is supported by a nozzle that can be lifted and supported to move on a nozzle for a nozzle. The coating liquid sprayed from the nozzle of the column coats the substrate placed on the table (surface plate). As such a coating device, there are known coating apparatuses of Patent Documents 1 to 3, which are provided with a curing means for curing a coating liquid applied to a substrate.

In the "pattern forming method and pattern forming apparatus" of Patent Document 1, the coating liquid is ejected from the ejection opening at the tip end of the ejection nozzle toward the substrate, and the coating liquid immediately after application to the substrate is irradiated with a wavelength of 365 nm from the first irradiation source. UV light. Thereby, the surface of the coating liquid is hardened. Next, the coating liquid irradiated with the preceding UV light is irradiated with UV light of a longer wavelength (for example, 385 nm or 395 nm) from the second irradiation source. Since the long-wavelength light penetrates into the inside of the coating liquid, internal hardening is promoted. The illumination source is coupled to the ejection nozzle via a base of the head and a syringe pump.

The "slit coating type coating apparatus" of Patent Document 2 includes a holding table for holding a substrate, and a coating surface facing the coating surface of the substrate held on the opposite side of the holding surface of the holding table. a coating head having a slit-shaped nozzle opening flowing out, wherein the substrate and the coating head are relatively moved in a direction of a surface of the coating surface, and a liquid is applied to the coated surface of the substrate, and The slit coating type coating apparatus is provided with a heating means which applies a liquid to the substrate by the coating head on the one hand, and heats the liquid which has just been applied to the substrate.

In the "film forming apparatus and film forming method" of the patent document 3, the adsorption|suction station which adsorb|sucks and apply|coated the object of adsorption|coating is attached, and the coating material of the coating object which adsorbed and hold|maintained on the adsorption- A plurality of coating heads for forming a film; and a holder for moving the coating head above the object to be coated, and further comprising a heat source device for heating the surface of the object to be coated on the holder. The heat source device is coupled to the coating head via a holder.

In any of the patent documents, an irradiation light source, a heating means, a heat source device, and a discharge device that cure the liquid to the surface of the liquid or the object to be coated are connected and fixed at regular intervals.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2012-143691

Patent Document 2: Japanese Patent Laid-Open Publication No. 2005-218969

Patent Document 3: Japanese Patent Laid-Open Publication No. 2013-000656

In the same manner as the above-mentioned patent document, as shown in FIG. 8, the nozzle f which performs the coating process by the discharge coating liquid e, the hardening means g which hardens the coating liquid e by irradiation of the UV light i, etc. In the space (in the figure, the interval LX: the same), the connection portion h that is fixed to the nozzle f by the curing means g is formed to form a coating film for moving the coating film c on the substrate b placed on the flat plate a. In the case of the unit d, first, the interval LX between the hardening means g and the nozzle f cannot be changed and adjusted.

When the interval LX is constant, the time interval between the coating liquid ejection timing of the nozzle f and the position at which the curing agent g reaches the position of the coating liquid e which is ejected at the timing and starts the hardening treatment at the start of the hardening treatment is based on the coating film forming unit. The shift speed VX of d (the movement speed of the nozzle f and the hardening means g is also the same) is determined by a certain time (interval LX / travel speed VX).

The traveling speed VX of the coating film forming unit d is usually set according to the coating process. The coating treatment has an optimum coating treatment speed (transition speed VX) depending on, for example, the type of the coating liquid e (viscosity, material, etc.) and the film thickness. On the other hand, the hardening treatment is the same as the coating treatment. For example, depending on the type of the coating liquid e and the thickness of the coating liquid, the curing treatment of the coating liquid e to be applied is preferably started. time.

When the nozzle f and the curing means g are connected by the connecting portion h and the intervals LX are constant, as described above, since the time interval from the coating liquid ejection timing to the curing processing start timing is determined by the transition speed VX, When the curing process is performed at a predetermined transition speed VX, the curing process start time is too early or too late, and the hardening process cannot be started at the correct curing process start time, and the curing process cannot be performed properly. .

Conversely, if it is set to match the hardening process, it can be appropriately advanced. The traveling speed VX at the time interval of the hardening treatment requires the ejection of the coating liquid e from the nozzle f by the migration speed VX based on the hardening treatment, which further complicates the control of the discharge amount and the like, and the coating treatment cannot be suitably performed. The problem.

Next, the moving speed of the nozzle f and the moving speed of the curing means g are the same speed VX, and the coating processing speed and the hardening processing speed cannot be changed and adjusted. Regarding the coating treatment, there is a preferable coating treatment speed as described above. On the other hand, in the same manner, the hardening treatment has a desired curing treatment speed depending on the type of the coating liquid, the film thickness, and the like.

When the hardening treatment per unit time is constant, in the case where the hardening treatment speed is slow, the hardening treatment time becomes long, and the hardening treatment for the coating liquid e can be increased, and in the case of faster, the hardening treatment time becomes shorter. , causing the hardening treatment to be reduced.

When the coating process is prioritized to set the moving speed (the traveling speed VX of the coating film forming unit), the curing means g can only move at the same speed. Therefore, the curing process speed (hardening treatment time) cannot be appropriately ensured, and hardening is possible. Dealing with the problem of excessive or insufficient energy, it is not possible to properly perform hardening treatment. On the other hand, when the hardening treatment is prioritized, there is a problem that the coating treatment cannot be performed as appropriate in the same manner as in the first case.

According to the above, in the coating film forming unit d in which the curing means g and the nozzle f are connected and fixed at a constant interval LX between the connecting portions h, it is difficult to form a film thickness and a uniform quality and high quality. The problem of coating film.

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a coating apparatus and a coating method capable of properly securing a coating film forming unit in which a nozzle and a curing means are connected by a connecting portion. The coating speed (coating processing speed) of the nozzle is appropriately applied, and the adjustment of the start time of the hardening treatment can be suitably performed, and the curing treatment speed (hardening treatment) can be suitably performed. Time) adjustment.

In the coating apparatus of the present invention, the coating film forming unit is moved in the longitudinal direction of the substrate, and the coating film forming unit is connected to the nozzle for spraying the coating liquid and the curing means for curing the coating liquid via the connecting portion, and After the substrate is subjected to coating treatment by the nozzle, the coating liquid applied to the substrate is cured by the curing means, and the connection portion is provided with a level for adjusting the nozzle and the hardening means. Directional adjustment mechanism.

The adjustment mechanism is provided with a driving means for relatively moving the curing means with respect to the nozzle.

The adjustment mechanism is a sliding mechanism that slidable the curing means along the longitudinal direction of the substrate.

The adjustment mechanism is a rotation mechanism that rotates the curing means along a substrate surface.

In the above-described curing means, a plurality of the curing means are arranged in the width direction of the substrate, and the connecting portion is provided for connecting the curing means to the nozzles in a plurality of ways.

In the coating method of the present invention, the coating film forming unit is configured by setting a distance between the nozzle and the curing means in the horizontal direction by the adjusting means using a coating device including the adjusting means. The migration process is performed, and the coating process performed by the nozzle and the hardening process performed by the hardening means are performed.

The coating method of the present invention is characterized in that the coating film forming unit is moved by using a coating device provided with an adjustment mechanism having the above-described driving means When the coating process performed by the nozzle is performed, the curing means is relatively moved with respect to the nozzle by the driving means, and the curing process is performed on the one hand.

In the case of forming a coating film forming unit in which a nozzle and a curing means are connected by a connecting portion, the coating device and the coating method of the present invention can appropriately ensure the moving speed of the nozzle (coating processing speed). The coating treatment can be appropriately adjusted at the start of the hardening treatment, and the curing treatment speed (hardening treatment time) can be appropriately adjusted.

1‧‧‧ Coating device

2‧‧‧Substrate

2a‧‧‧ coating start

2b‧‧‧ Coating terminal

3‧‧‧ tablet

4‧‧‧Abutment

5‧‧‧Move track

6‧‧‧ Coating film forming unit

7‧‧‧Transition body

7a‧‧‧ pillar

7b‧‧‧ Beam Department

7c‧‧‧ Forward direction of travel

7d‧‧‧Sliding slit

7e‧‧‧After the direction of travel

8‧‧‧ nozzle

9‧‧‧Connecting Department

10‧‧‧ hardening means

11‧‧‧Sliding mechanism

11a‧‧‧ screw shaft

11b‧‧‧ nuts

12‧‧‧ motor

13‧‧‧Rotating mechanism

14‧‧‧Support components

14a‧‧‧ Backend

15‧‧‧ swing arm

15a‧‧‧End

16‧‧‧Rotary axis

C‧‧‧coating solution

D‧‧‧ horizontal interval

F‧‧‧UV light

L‧‧‧The length of the substrate

V‧‧‧Transition speed of the moving body (coating speed)

Va‧‧‧ moving speed of hardening means

A‧‧‧ tablet

b‧‧‧Substrate

C‧‧·coating film

D‧‧·coating film forming unit

E‧‧‧coating solution

f‧‧‧Nozzle

G‧‧‧hardening means

h‧‧‧Connecting Department

i‧‧‧UV light

LX‧‧‧ interval

VX‧‧‧Transition speed

θ ‧‧‧ angle of the swing arm

Fig. 1 is a perspective view showing a first embodiment of a coating apparatus of the present invention.

Figure 2 is a plan view of the coating apparatus shown in Figure 1.

Fig. 3 is a side view showing a state in which a coating film is formed on a substrate by using the coating device shown in Fig. 1.

Fig. 4 is a schematic explanatory view for explaining a preferred embodiment of the coating method of the present invention.

Fig. 5 is a plan view showing a coating apparatus according to a modification of the first embodiment.

Fig. 6 is a plan view showing a second embodiment of the coating apparatus of the present invention.

Figure 7 is an enlarged view of a portion of the arrow in the direction A of Figure 6;

Fig. 8 is an explanatory diagram for explaining the background art.

Hereinafter, preferred embodiments of the coating apparatus and the coating method of the present invention will be described in detail with reference to the accompanying drawings. Figure 1 is a view showing the coating device of the present invention 1 is a perspective view of a coating apparatus shown in FIG. 1, and FIG. 3 is a side view showing a state in which a coating film is formed on a substrate by the coating apparatus shown in FIG.

As shown in FIG. 1 to FIG. 3, the coating apparatus 1 of the first embodiment is mainly composed of a table (surface flat plate) 3, a pair of right and left travel rails 5, and a coating film forming unit 6, and the flat plate 3 is In the exchange place, the substrate 2 to be coated is placed, and the pair of left and right travel rails 5 are attached to the base 4 outside the flat plate 3, and the substrate 2 is sandwiched from both sides in the width direction, along the length of the substrate 2. Further, the coating film forming unit 6 is moved on the traveling rail 5 in the longitudinal direction of the substrate 2.

The coating film forming unit 6 is composed of a moving body 7, a nozzle 8, a connecting portion 9, and a curing means 10, and the moving body 7 is moved and moved on the traveling rail 5, and the nozzle 8 is provided on the moving body 7, and is used for spraying and spraying. The liquid C, the connecting portion 9 is provided in the moving body 7, and the curing means 10 is supported by the moving body 7 via the connecting portion 9, and the coating liquid C is hardened.

The moving body 7 is formed in a gate shape by a pair of left and right column portions 7a and a beam portion 7b that is stretched in the width direction of the substrate 2 between the column portions 7a. The moving body 7 is moved to the traveling rail 5 by a known linear motor, a ball screw mechanism or the like. The transfer body 7 is reciprocally moved between the one end (application start end 2a) side and the other end (coating end 2b) side of the substrate 2 in the longitudinal direction of the substrate 2.

Both ends of the nozzle 8 in the longitudinal direction are supported by one of the pair of column portions 7a of the transfer body 7, whereby the nozzle 8 is provided on the transfer body 7 with its longitudinal direction directed in the width direction of the substrate 2. In the illustrated example, the nozzle 8 is disposed to face the front side 7c of the moving body 7 in the forward direction. The nozzle 8 is movably provided on the column portion 7a via the elevating slit 7d formed in the column portion 7a so that the gap between the nozzle 8 and the substrate 2 can be adjusted. Separate. The mechanism for raising and lowering the nozzle 8 is constituted by a known ball screw mechanism or the like.

In order to supply the coating liquid C to the nozzle 8, a coating liquid supply means (not shown) is connected to the nozzle 8. The coating liquid C is supplied to the nozzle 8 by the coating liquid supply means, and the nozzle 8 ejects the coating liquid C toward the substrate 2. The substrate 2 is subjected to a coating process (shown in a pearskin portion in Fig. 3) by ejecting the coating liquid C from the nozzle 8 supported by the moving body 7 for traveling.

The connecting portion 9 is composed of a slide bar (or a screw shaft 11a instead of the screw shaft 11a) and a slider (or a nut 11b instead), and the slide bar is attached to the rear side 7e of the moving direction before the moving body 7, and is later than the rear side. 7e is formed to extend horizontally rearward along the longitudinal direction of the substrate 2, and the slider is slidably disposed along the longitudinal direction of the substrate 2 on the slide bar. That is, the connecting portion 9 is provided with the sliding mechanism 11.

Alternatively, the slide mechanism 11 provided in the coupling portion 9 may be configured by a ball screw mechanism or the like. In other words, the screw shaft 11a may be used instead of the slide bar, and the nut 11a may be used instead of the slider, and the screw shaft 11a may be driven by the motor 12 provided as a driving means at any portion of the coating film forming unit 6. The joint portion 9 that slides the nut 11b.

In the example of the drawing, the screw shaft 11a is provided in a pair of left and right in the width direction of the substrate 2 (the direction in which the beam portion 7b of the transition body 7 is laid). Thereby, the nut 11b is also attached to each of the screw shafts 11a, and two of them are provided on the left and right sides in the width direction of the substrate 2.

In the case of a slider and a slider, the slider is attached to the slider by using a manually operated fastening member or the like. The slider is fixed to the slider by locking the fastening member or the like, and by loosening, the slider can be slid relative to the slider. Hereinafter, a case where the ball screw mechanism is used as the connecting portion 9 will be described.

Both ends of the hardening means 10 in the longitudinal direction are supported by the left and right nuts 11, whereby the curing means 10 has its longitudinal direction directed toward the width direction of the substrate 2. It is connected to the connecting portion 9. The joint portion 9 provided with the hardening means 10 can slide the nut 11b and the slider regardless of the ball screw mechanism or the structure of the slider and the slider described above.

Thereby, the connection portion 9 is provided with an adjustment mechanism for adjusting the horizontal interval D between the nozzle 8 and the curing means 10 in the traveling movement direction of the transfer body 7 (the longitudinal direction of the substrate 2). In the case of the ball screw mechanism, the nut 11b can be slid by rotating the screw shaft 11a by the driving means, that is, the motor 12, so that the nut 11b can be along the screw shaft 11a during the moving movement of the moving body 7. slide. Thereby, the hardening means 10 can be relatively moved with respect to the nozzle 8. Of course, the connecting portion 9 has a function of connecting the curing means 10 to the nozzles 8 of the moving body 7.

As long as the coating liquid C is a UV curing type, a UV irradiation body can be used as the curing means 10, and if the coating liquid C is a heat curing type, a heating element can be used as the curing means 10, and if it is a natural drying type, A blower that uses a drying gas such as air.

The curing means 10 emits UV light F to the substrate 2 by electric power supplied via an electric wiring (not shown) connected thereto, or radiates heat to the substrate 2 by heat generation, or ejects drying air toward the substrate 2. Of course, various types of persons can be employed as the hardening means 10 depending on the kind of the coating liquid C. The coating liquid C applied to the substrate 2 by the nozzle 8 is subjected to curing treatment (shown in black in FIG. 3) by emitting UV light F or the like from the curing means 10 connected to the moving body 7 via the connecting portion 9.

Next, a coating method using the coating device 1 of the first embodiment will be described. Fig. 4 is a schematic explanatory view showing the coating method. When the coating film is formed on the substrate 2, the moving body 7 of the coating film forming unit 6 is moved along the longitudinal direction of the substrate 2 to the traveling rail 5. The nozzle 8 first reaches the coating start end 2a of the substrate 2, and will be coated. After the liquid C is ejected, the coating treatment is started.

As the nozzle 8 advances on the substrate 2, the curing means 10 of the nut 11b of the ball screw mechanism provided in the coupling portion 9 is supported, and reaches the coating start end 2a of the substrate 2. When the coating treatment and the hardening treatment at the application start end 2a are described as an example, the coating liquid ejection timing from the nozzle 8 toward the application start end 2a and the application to the coating start end 2a are started. The time interval at which the hardening treatment start time of the hardening treatment of the liquid C is based on the traveling speed V of the coating film forming unit 6 is determined by the horizontal direction interval D between the nozzle 8 and the hardening means 10.

In the present embodiment, since the connecting portion 9 includes an adjusting mechanism (ball screw mechanism) for adjusting the horizontal interval D, the horizontal interval D can be increased or decreased, and unlike the background art, the self-coating liquid can be ejected to the time. The time interval from the start of the hardening process is changed and adjusted.

For example, in the case where the traveling speed V of the coating film forming unit 6 is 20 mm/sec and the horizontal interval D is 80 mm and fixed, the time interval is constant for 4 seconds (= D/V), but since it can be borrowed The horizontal direction interval D is adjusted by the adjustment mechanism, so the horizontal direction interval D can be increased to 100 mm and the time interval can be set to 5 seconds, or reduced to 60 mm and the time interval is set to 3 seconds, after the coating liquid C is applied, Freely adjust the time until the hardening process begins.

In the coating apparatus 1 of the first embodiment and the coating method using the same, even in the case where the coating film is formed by the coating process as the preferential transition speed V, for example, the horizontal direction is spaced by D. The adjustment can be started at the start of the appropriate hardening treatment, so that the hardening treatment can be suitably performed. The adjustment of the horizontal interval D is automatically performed by driving the ball screw mechanism by the motor 12.

When the adjustment mechanism is configured by the slide bar and the slider, the slider is slid along the slide bar to adjust the horizontal interval D by manual operation in the state where the coating film forming unit 6 is stopped, and then the fastening is performed by tightening. The member or the like can lock the slider to the slider. In this manner, after the horizontal direction interval D is set, the coating film forming unit 6 is moved, and the coating process performed by the nozzle 8 and the hardening process performed by the curing means 10 are performed.

Moreover, in the coating method using the coating apparatus of the first embodiment, the adjustment means is configured by the ball screw mechanism, and the curing means 10 can be made along the longitudinal direction of the substrate 2 with respect to the nozzle in the coating process. 8 for relative movement.

For example, when the coating film forming unit 6 set to the traveling speed V=20 mm/sec. is formed by coating a substrate 2 having a length L of 1000 mm, when the curing means 10 is not relatively moved relative to the nozzle 8, The hardening speed of the hardening means 10 is the same as that of the moving body 7, and becomes 20 mm/sec. The hardening treatment time in this case was 50 seconds.

On the other hand, when the coating process is performed by the nozzle 8 that is moved, the nut 11b, that is, the curing means 10 is moved toward the coating film forming unit 6 at a moving speed Va = 10 mm/sec with respect to the screw shaft 11a. The direction of relative movement of the hardening means 10 with respect to the substrate 2 is 10 mm/sec., and the hardening treatment time is 100 seconds.

In this case, when the time interval from the coating liquid ejection timing at the coating start end 2a to the curing processing start timing is set to, for example, 20 seconds (the horizontal interval D between the nozzle 8 and the curing means 10 is 400 mm), Using a length of at least 900 mm ((100-50) seconds × 10 mm/sec. + 400 mm) as the screw shaft 11a can.

On the other hand, when the coating process is performed by the nozzle 8 for the shifting movement, the curing means 10 is moved in the same direction as the moving direction of the coating film forming unit 6 at a moving speed Va = 5 mm/sec. with respect to the screw shaft 11a. The relative movement speed of the hardening means 10 with respect to the substrate 2 is 25 mm/sec., and the hardening treatment time is 40 seconds.

When the curing means 10 is relatively moved so as to be close to the nozzle 8, the distance between the hardening means 10 and the hardening process is completed (200 mm = 5 mm) so as not to interfere with the collision of the nozzle 8 and the hardening means 10 or the like. /sec. × 40 seconds), in a horizontal direction interval D between the nozzle and the curing means 10 at a time interval from the coating liquid ejection timing at the coating start end 2a to the curing processing start timing, for example, the above-described method of 400 mm is shorter. Make settings.

In the first embodiment, the coating film forming unit 6 further includes the motor 12 that relatively moves the curing device 10 relative to the nozzle 9. Therefore, the curing process start timing can be freely adjusted, and the coating process can be freely adjusted and coated. The curing treatment speed at which the treatment speed V is different is the hardening treatment time, and the coating liquid C can be hardened by a suitable hardening treatment.

Therefore, even in the case where the coating film is formed by, for example, applying the coating treatment as a preferential traveling speed, since the relative moving speed of the movable hardening means 10 can be adjusted, the hardening treatment speed (hardening treatment time) can be suitably ensured. Thereby, the hardening treatment can be suitably performed.

As described above, in the coating apparatus and the coating method according to the first embodiment, when the coating film forming unit 6 in which the nozzle 8 and the curing means 10 are connected by the connecting portion 9 is formed, the nozzle can be adjusted by the adjusting mechanism. 8 with hardening means 10 water Since the adjustment is performed in the flat direction interval D, the adjustment of the start time of the hardening treatment can be appropriately performed, and further, the motor 12 that relatively moves the curing means 10 can be appropriately adjusted in the curing processing speed (hardening processing time). A film having a uniform film thickness and a high quality such as a film quality can be formed.

Fig. 5 is a plan view showing a modification of the first embodiment. In the first embodiment, the curing means 10 is provided in the width direction of the substrate 2. However, in the present modification, the single curing means 10 is divided into a plurality of layers, and the plurality of hardening means 10 are arranged in the width direction of the substrate 2 to form a plurality of hardenings. Means 10. In order to connect these plurality of hardening means 10 individually to the nozzle 8, specifically the moving body 7 which supports the nozzle 8, the connection part 9 is provided in plural. The configuration of the connecting portion 9 is the same as that of the first embodiment.

According to this configuration, it is possible to set different horizontal direction intervals D with respect to the respective curing means 10 arranged in the width direction of the substrate 2, or to move the respective relative movements in different operations.

When the coating liquid C is applied to the substrate 2, since the central region of the substrate 2 is less likely to be naturally dried than the peripheral edge region of the substrate 2, the hardening treatment (hardening treatment) is performed on the peripheral edge region and the central region of these outer ends. When the start time, the hardening treatment time, and the like are the same, there is a possibility that a uniform coating film cannot be formed on the substrate 2 .

In the present modification, since each of the curing means 10 arranged in the width direction of the substrate 2 can be individually set, for example, any of the hardening means 10 for hardening the central region can be used with respect to The other hardening means 10 for hardening the outer peripheral edge region can accelerate or slow down the relative moving speed in advance or delay setting the start of the hardening treatment, thereby making it possible to use various regions on the substrate 2 which are different in natural drying. Each of them is subjected to a suitable hardening treatment corresponding to each region, and a coating film having a uniform film thickness and a high quality such as a film quality can be formed.

Further, in the case where a plurality of the curing means 10 are arranged in a line, the coating film formation similar to the case of the single curing means 10 of the first embodiment described above can be performed.

6 and 7 show a coating device according to a second embodiment. Fig. 6 is a plan view showing a second embodiment of the coating apparatus of the present invention, and Fig. 7 is an enlarged view of a portion taken along the line A in Fig. 6. In the second embodiment, the rotation mechanism 13 is used as an adjustment mechanism instead of the slide mechanism 11 of the first embodiment. The other configurations are the same as those of the first embodiment.

The connecting portion 9 is composed of a supporting member 14 and a pair of right and left swing arms 15, and the supporting member 14 is attached to the rearward direction 7e before the moving body 7, and is moved rearward from the center of the rear surface 7e along the longitudinal direction of the substrate 2. The horizontally extending one, the pair of right and left swing arms 15 are one end 15a rotatably supported by the rear end 14a of the support member 14 by the rotating shaft 16. That is, the connecting portion 9 is provided with a rotating mechanism 13 having a swinging arm 15 for rotation.

The swing arm 15 is attached to the support member 14 by using a manually operated fastening member or the like. The swing arm 15 is fixed to the support member 14 or loosened by locking the fastening member or the like so as to be rotatable relative to the support member 14.

The swing arm 15 may be coupled to the support member 14 so as to be rotatablely coupled to a motor (not shown) provided as a driving means of the support member 14 instead of the fastening member or the like. The motor may be provided to drive the pair of left and right swing arms 15 together, or two may be provided for driving separately.

Further, in order to rotate the pair of left and right swing arms 15 at the same rotation angle, one end 15a of each of the swing arms 15 rotatably supported by the support member 14 may be coupled to each other by a gear coupling or the like. The rotatable swing arm 15 can adjust the angle θ with respect to the support member 14 in a range from the direction toward the transfer body 7 or the nozzle 8 to the separation direction.

The curing means 10 is attached to each of the swing arms 15 and is provided in two in the width direction of the substrate 2. The hardening means 10 is directed to the direction parallel to the nozzle 8 by adjusting the angle θ of the swing arm 15 to move toward or away from the nozzle 8 as it moves toward the end edge side of the substrate 2, or by setting the angle θ to 90 degrees. It is also possible to change the angle θ of the pair of left and right swing arms 15 to change the direction of the two hardening means 10.

The joint portion 9 of the hardening means 10 is provided, and the swing arm 15 is rotatable regardless of whether it is a motor-driven type or a fastening member or the like. Thereby, the connection portion 9 is provided with an adjustment mechanism for adjusting the horizontal interval D between the nozzle 8 and the curing means 10 in the traveling movement direction of the transfer body 7 (the longitudinal direction of the substrate 2).

In the case of the motor-driven type, since the swing arm 15 can be rotated by the motor 16, the hardening means 10 can be relatively moved with respect to the nozzle 8 during the moving movement of the transfer body 7. Of course, the connecting portion 9 has a function of connecting the curing means 10 to the nozzle 8 of the moving body 7.

In the coating apparatus and the coating method according to the second embodiment, the direction of the curing means 10 is inclined with respect to the nozzle 8, and the central region of the substrate 2 can be changed and adjusted in the same manner as the modification of the first embodiment. And the hardening treatment of the outer peripheral edge region, and in the same manner as in the first modification, the curing treatment according to the thickness of the coating liquid on the substrate 2 can be performed for each region, and the film thickness and film quality can be formed. A uniform and high quality coating.

On the other hand, by arranging the nozzle 8 and the curing means 10 in parallel, the curing process can be performed in the same manner as in the first embodiment, and the same operational effects as those of the first embodiment can be obtained.

As a mechanism for slidingly moving the curing means 10 relative to the nozzle 8 by the motor drive, the ball screw mechanism has been described as an example. However, the present invention is not limited thereto, and a linear motor mechanism or a rack and pinion (rock may of course be used. And pinion) Other well-known mobile agencies such as institutions.

1‧‧‧ Coating device

2‧‧‧Substrate

2a‧‧‧ coating start

2b‧‧‧ Coating terminal

3‧‧‧ tablet

4‧‧‧Abutment

5‧‧‧Move track

6‧‧‧ Coating film forming unit

7‧‧‧Transition body

7a‧‧‧ pillar

7b‧‧‧ Beam Department

7c‧‧‧ Forward direction of travel

7d‧‧‧Sliding slit

8‧‧‧ nozzle

9‧‧‧Connecting Department

10‧‧‧ hardening means

11‧‧‧Sliding mechanism

11a‧‧‧ screw shaft

11b‧‧‧ nuts

12‧‧‧ motor

Claims (9)

A coating apparatus that moves a coating film forming unit in a longitudinal direction of a substrate, wherein the coating film forming unit is connected to a nozzle for spraying a coating liquid and a hardening means for hardening the coating liquid via a connecting portion, and is borrowed After coating the substrate with the nozzle, the coating liquid applied to the substrate is cured by the curing means, and the connecting portion is provided with a horizontal interval between the nozzle and the curing means. Adjustment mechanism. The coating device according to claim 1, wherein the adjustment mechanism includes a driving means for relatively moving the curing means relative to the nozzle. The coating device according to claim 1, wherein the adjustment mechanism is a sliding mechanism that slidable the curing means along a longitudinal direction of the substrate. The coating device according to claim 2, wherein the adjustment mechanism is a sliding mechanism that slidable the curing means along a longitudinal direction of the substrate. The coating device according to claim 1, wherein the adjustment mechanism is a rotation mechanism that rotates the curing means along a substrate surface. The coating device according to claim 2, wherein the adjustment mechanism is a rotation mechanism that rotates the curing means along a substrate surface. The coating device according to any one of claims 1 to 6, wherein the curing means is arranged in plural in the width direction of the substrate, and the connecting portion is used for individually curing the hardening means. A plurality of methods are attached to the above nozzles. A coating method using the coating device according to any one of claims 1 to 7, wherein the nozzle is spaced apart from the horizontal direction of the curing means by the adjusting mechanism, and then The coating film forming unit moves and moves, and the coating process performed by the nozzle and the hardening performed by the hardening means are performed. Reason. A coating method according to any one of claims 2 to 7, wherein the coating film forming unit is moved to perform coating processing by the nozzle On the other hand, the above-described driving means causes the above-mentioned curing means to relatively move with respect to the nozzle, and on the other hand, the hardening process is performed.