JP2016022471A - Coating device and coating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating device and a coating method capable of performing an appropriate coating treatment while properly securing travelling speed (coating processing speed) of the nozzle, at the same time, capable of appropriately performing adjustment of a curing treatment starting time and, further, capable of also properly performing adjustment of curing treatment speed (curing treatment time), when constituting a coated film forming unit by connecting a nozzle and a curing means with a connection part.SOLUTION: A coating device 1 in which a coated film forming unit 6 made by connecting a nozzle 8 for ejecting coating liquid and a curing means 10 for curing the coating liquid via a connection part 9 is travelled and moved in the length direction of a substrate 2, thereby, the substrate is subjected to coating processing by means of the nozzle and, thereafter, the coating liquid applied on the substrate is cured by the curing means is provided with a sliding mechanism 11 comprising a screw shaft 11a and a nut 11b as an adjustment mechanism for adjusting a horizontal direction interval D between the nozzle and the curing means on the connection part.SELECTED DRAWING: Figure 1

Description

  In the present invention, when forming a coating film forming unit in which the nozzle and the curing means are connected by a connecting portion, it is possible to appropriately ensure the traveling speed (application processing speed) of the nozzle and perform an appropriate application process. In addition, the present invention relates to a coating apparatus and a coating method that can appropriately adjust the curing processing start time and that can also appropriately adjust the curing processing speed (curing processing time).

  Conventionally, a substrate coating apparatus for coating a substrate placed on a table (surface plate) with a coating liquid discharged from a nozzle supported by a nozzle support post that travels on a nozzle traveling rail (movable up and down). For example, a table coater (registered trademark of Japan) is known. Patent Documents 1 to 3 are known as a coating apparatus provided with a curing means for curing a coating liquid applied to a substrate in this type of coating apparatus.

  The “pattern forming method and pattern forming apparatus” disclosed in Patent Document 1 discharges a coating liquid from a discharge port at the tip of a discharge nozzle toward a substrate, and also applies a first irradiation light source to the coating liquid immediately after being applied to the substrate. To UV light having a wavelength of 365 nm. As a result, the surface of the coating solution is cured. Subsequently, UV light having a longer wavelength (for example, 385 nm or 395 nm) is irradiated from the second irradiation light source onto the coating liquid that has been irradiated with the previous UV light. Long wavelength light penetrates more into the interior of the coating solution, so that internal curing is promoted. The irradiation light source is connected to the discharge nozzle via the base of the head unit and the syringe pump.

  In the “slit coat type coating apparatus” of Patent Document 2, a liquid flows out oppositely to a holding table that holds a substrate and an application surface of the substrate opposite to the holding surface held by the holding table. A coating head provided with a slit-like nozzle opening, and applying the liquid to the coating surface of the substrate by moving the substrate and the coating head relative to each other in the surface direction of the coating surface. In the slit coating type coating apparatus, a heating means is provided for heating the liquid immediately after being applied to the substrate while applying the liquid to the substrate by the application head.

  Patent Document 3 discloses a “thin film forming apparatus and thin film forming method” which includes a suction table for sucking and holding a coating object, and a thin film while discharging a coating material from an inkjet nozzle onto the surface of the coating object sucked and held by the suction table. A thin film forming apparatus comprising: a plurality of coating heads for forming; and a gantry that moves the coating heads above the object to be coated, the gantry further comprising a heat source device that heats the surface of the object to be coated. Yes. The heat source device is connected to the coating head via a gantry.

  In any patent document, the irradiation light source, the heating means, the heat source device, and the discharge nozzle that cure the coating liquid or heat the surface of the liquid or the object to be coated are connected and fixed at a certain interval. Has been.

JP 2012-143691 A JP 2005-218969 A JP 2013-000656 A

  Similarly to the above-mentioned patent document, as shown in FIG. 8, a coating liquid forming unit d that travels and moves to form a coating film c on a substrate b placed on a table a is discharged. The nozzle f for coating treatment, the curing means g for irradiating the coating liquid e by irradiating UV light i, etc., and the curing means g and the nozzle f are separated by a certain interval (interval LX: unchanged). If the connecting portion h is connected and fixed, the distance LX between the curing means g and the nozzle f cannot be changed and adjusted.

  When the interval LX is constant, the time between the coating liquid discharge time from the nozzle f and the curing processing start time when the curing means g reaches the position of the coating liquid e discharged at that time and starts the curing process. The interval is a fixed time determined according to the traveling speed VX of the coating film forming unit d (the moving speeds of the nozzle f and the curing means g are the same) (interval LX / traveling speed VX).

  The traveling speed VX of the coating film forming unit d is usually set based on the coating process. As for the coating process, there is a preferable coating process speed (running speed VX) based on conditions such as the type of coating liquid e (viscosity, material, etc.) and film thickness. On the other hand, the curing process has a preferable curing process start timing for starting the curing process of the applied coating liquid e from conditions such as the type and film thickness of the coating liquid e, as in the coating process.

  When the nozzle f and the curing means g are connected by the connecting part h and the interval LX is constant, the time interval from the coating liquid discharge time to the curing processing start time is determined by the traveling speed VX as described above. Therefore, if the curing process is performed at the traveling speed VX giving priority to the coating process, the curing process start time is too early or too late, and the curing process cannot be started at an accurate curing process start time. There was a problem that the curing treatment could not be performed properly.

  On the other hand, if the traveling speed VX is set to a time interval at which the curing process can be appropriately performed with priority on the curing process, it is necessary to discharge the coating liquid e from the nozzle f according to the traveling speed VX based on the curing process. In addition, there are problems that the control of the discharge amount and the like becomes complicated and that the coating process cannot be performed appropriately.

  Second, the moving speed of the nozzle f and the moving speed of the curing means g become the same speed VX, and the coating processing speed and the curing processing speed cannot be changed and adjusted. As for the coating treatment, there is a preferable coating treatment speed as described above. On the other hand, the curing process similarly has a preferable curing process speed depending on the type of coating liquid and the film thickness.

  When the curing processing energy per unit time is constant or slow, the curing processing time is long and the curing processing energy for the coating liquid e is large. When the curing processing speed is fast, the curing processing time is short. Thus, the curing process energy is reduced.

  If the moving speed (running speed VX of the coating film forming unit) is set with priority on the coating process, the curing means g can move only at the same speed, so that the curing speed (curing time) can be ensured appropriately. However, there is a problem that the curing process cannot be performed properly due to excessive or insufficient curing energy. On the other hand, when the curing process is given priority, there is a problem that the coating process cannot be appropriately performed as in the first case.

  From the above, in the coating film forming unit d in which the curing means g and the nozzle f are connected and fixed by the connecting portion h with a constant and constant interval LX, a high-quality coating film having a uniform film thickness and film quality is formed. There was a problem that it was difficult.

  The present invention was devised in view of the above conventional problems, and when a coating film forming unit in which the nozzle and the curing means are connected by a connecting portion is configured, the nozzle traveling speed (coating processing speed) is appropriately set. It is possible to ensure proper application processing and at the same time adjust the curing process start time appropriately, and further adjust the curing process speed (curing process time) properly. An object is to provide an apparatus and a coating method.

  A coating apparatus according to the present invention is configured to travel a coating film forming unit in which a nozzle that discharges a coating liquid and a curing unit that cures the coating liquid are connected via a connecting portion in the length direction of the substrate. An application mechanism that cures the coating liquid applied to the substrate by the curing means, and adjusts a horizontal interval between the nozzle and the curing means at the connecting portion. It is provided with.

  The adjusting mechanism includes a driving unit for moving the curing unit relative to the nozzle.

  The adjusting mechanism is a slide mechanism that allows the curing means to slide along the length direction of the substrate.

  The adjustment mechanism is a turning mechanism that enables the hardening means to turn along the substrate surface.

  A plurality of the curing means are arranged in the width direction of the substrate, and a plurality of the connecting portions are provided to individually connect the curing means to the nozzle.

  A coating method according to the present invention uses a coating apparatus including the adjustment mechanism, sets a horizontal interval between the nozzle and the curing means by the adjustment mechanism, travels and moves the coating film forming unit, and A coating process using a nozzle and a curing process using the curing unit are performed.

  The coating method according to the present invention uses a coating apparatus provided with an adjustment mechanism having the driving means, and when the coating film forming unit travels and performs the coating treatment by the nozzle, the driving means causes the curing means to move the curing means. The curing process is performed while moving relative to the nozzle.

  In the coating apparatus and the coating method according to the present invention, when configuring a coating film forming unit in which the nozzle and the curing means are connected by the connecting portion, the nozzle traveling speed (coating processing speed) is appropriately secured and appropriate. Thus, it is possible to appropriately adjust the curing process start time, and it is also possible to appropriately adjust the curing process speed (curing process time).

It is a perspective view which shows 1st Embodiment of the coating device which concerns on this invention. It is a top view of the coating device shown in FIG. It is a side view which shows a mode that a coating film is formed in a board | substrate with the coating device shown in FIG. It is a schematic explanatory drawing explaining suitable embodiment of the coating method which concerns on this invention. It is a top view of the coating device which shows the modification of 1st Embodiment. It is a top view which shows 2nd Embodiment of the coating device which concerns on this invention. FIG. 7 is a partially enlarged view taken in the direction of arrow A in FIG. 6. It is explanatory drawing explaining background art.

  Hereinafter, preferred embodiments of a coating apparatus and a coating method according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a perspective view showing a first embodiment of a coating apparatus according to the present invention, FIG. 2 is a plan view of the coating apparatus shown in FIG. 1, and FIG. 3 is a plan view of the coating apparatus shown in FIG. It is a side view which shows a mode that a film | membrane is formed.

  As shown in FIGS. 1 to 3, the coating apparatus 1 according to the first embodiment mainly includes a table (surface plate) 3 on which a substrate 2 that is a coating target is placed so as to be replaceable, and an outer side of the table 3. A pair of left and right traveling rails 5 provided along the length direction of the substrate 2, and the traveling rails 5 travel in the length direction of the substrate 2, with the substrate 2 being sandwiched from both sides in the width direction. It is comprised from the coating-film formation unit 6 moved.

  The coating film forming unit 6 includes a traveling body 7 that travels on the traveling rail 5, a nozzle 8 that is provided on the traveling body 7 and that discharges the coating liquid C, a connecting portion 9 that is provided on the traveling body 5, and a connecting portion. 9 and a curing means 10 that is supported by the traveling body 5 and cures the coating liquid C.

  The traveling body 7 is formed in a portal shape from a pair of left and right column portions 7a and a beam portion 7b laid between the column portions 7a along the width direction of the substrate 2. The traveling body 7 is moved on the traveling rail 5 by a known linear motor, a ball screw mechanism, or the like. The traveling body 7 travels back and forth between one end (application start end 2 a) side and the other end (application end 2 b) side of the substrate 2 in the length direction of the substrate 2.

  Both ends of the nozzle 8 in the length direction are supported by a pair of pillars 7 a of the traveling body 7, whereby the nozzle 8 is provided in the traveling body 7 with the length direction directed in the width direction of the substrate 2. . In the illustrated example, the nozzle 8 is provided to face the front traveling direction front surface 7 c of the traveling body 7. The nozzle 8 is provided so as to be movable up and down in the column portion 7a through an elevation slit 7d formed in the column portion 7a so that the gap interval with the substrate 2 can be adjusted. The mechanism for raising and lowering the nozzle 8 is constituted by a known ball screw mechanism or the like.

  A coating liquid supply means (not shown) is connected to the nozzle 8 in order to supply the coating liquid C thereto. When the coating liquid C is supplied from the coating liquid supply means to the nozzle 8, the nozzle 8 discharges the coating liquid C toward the substrate 2. When the coating liquid C is discharged from the nozzle 8 supported by the traveling body 7 that is traveling, the substrate 2 is subjected to a coating process (indicated by a satin portion in FIG. 3).

  The connecting portion 9 includes a slide bar (or an alternative screw shaft 11a) extending horizontally from the rear surface 7e toward the rear along the length direction of the substrate 2 on the rear surface 7e in the forward traveling direction of the traveling body 7. The slide bar includes a slide block (or a nut 11b instead thereof) provided on the slide bar so as to be slidable along the length direction of the substrate 2. That is, the connecting portion 9 includes a slide mechanism 11.

  Or you may comprise the slide mechanism 11 with which the connection part 9 is provided with a ball screw mechanism. That is, the slide bar is replaced with the screw shaft 11a, the slide block is replaced with the nut 11b, and the screw shaft 11a is driven by the motor 12 as a drive means provided at any location of the coating film forming unit 6, thereby the nut You may comprise the connection part 9 which can slide 11b.

  In the illustrated example, two screw shafts 11a are provided in a pair of left and right in the width direction of the substrate 2 (the direction in which the beam portion 7b of the traveling body 7 is installed). Therefore, two nuts 11b are also provided on the left and right sides in the width direction of the substrate 2 by being attached to each screw shaft 11a.

  In the case of a slide bar and a slide block, the slide block is attached to the slide bar by a fastening member or the like operated by hand. By tightening the fastening member or the like, the slide block is fixed to the slide bar, and by loosening, the slide block can be slid. Hereinafter, a case where a ball screw mechanism is employed as the connecting portion 9 will be described.

  Both ends of the curing means 10 in the length direction are supported by the left and right nuts 11 b, whereby the curing means 10 is connected to the connecting portion 9 with the length direction directed in the width direction of the substrate 2. The connecting portion 9 provided with the curing means 10 can slide the nut 11b and the slide block, regardless of whether it is a ball screw mechanism or a structure constituted by the above-described slide bar and slide block.

  Accordingly, the connecting portion 9 includes an adjustment mechanism that adjusts the horizontal distance D between the nozzle 8 and the curing means 10 in the traveling direction of the traveling body 5 (the length direction of the substrate 2). In the case of the ball screw mechanism, the nut 11b can be slid by rotating the screw shaft 11a with the motor 12 as the driving means. Therefore, the nut 11b can be slid along the screw shaft 11a while the traveling body 7 is traveling. Thus, the curing means 10 can be moved relative to the nozzle 8. Of course, the connecting portion 9 has a function of connecting the curing means 10 to the nozzle 8 of the traveling body 7.

  As the curing means 10, if the coating liquid C is a UV curing type, a UV irradiation body is used, if the coating liquid C is a thermosetting type, a heating element is used, and if the coating liquid C is a natural drying type, it is used for drying such as air. A dryer that ejects gas is used.

  The curing means 10 emits UV light F toward the substrate 2 by power supplied via an electric wiring (not shown) connected to the curing means 10, releases heat to the substrate 2, dissipates heat toward the substrate 2, and drying gas. Is sprayed toward the substrate 2. Of course, various types of curing means 10 may be employed depending on the type of coating liquid C. The UV light F or the like is emitted from the curing means 10 connected to the traveling body 7 via the connecting portion 9, whereby the coating liquid C applied to the substrate 2 by the nozzle 8 is cured (black in FIG. 3). (Shown in part).

  Next, a coating method using the coating apparatus 1 according to the first embodiment will be described. FIG. 4 shows a schematic explanatory diagram of the present coating method. When the coating film is formed on the substrate 2, the traveling body 7 of the coating film forming unit 6 travels on the traveling rail 5 in the length direction of the substrate 2. The nozzle 8 first reaches the coating start end 2a of the substrate 2 and discharges the coating liquid C to start the coating process.

  As the nozzle 8 advances on the substrate 2, thereafter, the curing means 10 supported by the nut 11 b of the ball screw mechanism provided in the connecting portion 9 reaches the coating start end 2 a of the substrate 2. The application process and the curing process at the application start end 2a will be described as an example. The coating liquid discharge time from the nozzle 8 to the application start end 2a and the curing process start time for starting the curing process of the coating liquid C applied to the application start end 2a. Is determined by the horizontal interval D between the nozzle 8 and the curing means 10 based on the traveling speed V of the coating film forming unit 6.

  In this embodiment, since the connecting portion 9 includes an adjustment mechanism (ball screw mechanism) that adjusts the horizontal interval D, the horizontal interval D can be widened or narrowed. Unlike the background art, The time interval from the coating liquid discharge time to the curing processing start time can be changed and adjusted.

  For example, when the traveling speed V of the coating film forming unit 6 is 20 mm / sec. And the horizontal interval D is fixed at 80 mm, the time interval becomes constant at 4 seconds (= D / V). However, since the horizontal interval D can be adjusted by the adjusting mechanism, the horizontal interval D is increased to 100 mm and the time interval is set to 5 seconds, or the time interval is reduced to 60 mm and the time interval is set to 3 seconds. The time from the application of the coating liquid C to the start of the curing process can be freely adjusted.

  As described above, in the coating apparatus 1 according to the first embodiment and the coating method using the same, for example, even when the coating film is formed at the traveling speed V giving priority to the coating process, by adjusting the horizontal interval D, The curing process can be started at an appropriate curing process start time, and the curing process can be performed appropriately. The horizontal distance D can be adjusted automatically by driving the ball screw mechanism with the motor 12.

  When the adjustment mechanism is configured with a slide bar and a slide block, the horizontal distance D is adjusted by manually operating the coating film forming unit 6 while the coating film forming unit 6 is stopped and sliding the slide block along the slide bar. Then, the slide block may be fastened and fixed to the slide bar with a fastening member or the like. After setting the horizontal interval D in this way, the coating film forming unit 6 is moved and moved, and the coating process by the nozzle 8 and the curing process by the curing means 10 are performed.

  Furthermore, in the coating method using the coating apparatus according to the first embodiment, the adjusting unit is configured by a ball screw mechanism, so that the curing unit 10 is moved along the length direction of the substrate 2 during the coating process. Can be moved relative to each other.

  For example, when a coating film is formed on the substrate 2 having a length L = 1000 mm by the coating film forming unit 6 set at the traveling speed V = 20 mm / sec., The curing means 10 is cured when it does not move relative to the nozzle 8. The curing processing speed of the means 10 is 20 mm / sec. In this case, the curing processing time is 50 seconds.

  On the other hand, when the coating process is performed by the nozzle 8 that is moved and moved, the nut 11b, that is, the curing means 10 is moved with respect to the screw shaft 11a at a moving speed Va = 10 mm / sec. When the relative movement is performed in the direction opposite to the forward traveling direction and gradually away from the nozzle 8, the relative moving speed of the curing means 10 with respect to the substrate 2 becomes 10 mm / sec., And the curing processing time in this case is 100 seconds. become.

  In this case, when the time interval from the coating liquid discharge time to the curing process start time at the coating start end 2a is set to 20 seconds (the horizontal distance D between the nozzle 8 and the curing means 10 is 400 mm), the screw shaft 11a is And a length of at least 900 mm ((100-50) seconds × 10 mm / sec. + 400 mm) may be used.

  On the other hand, when the coating process is performed by the nozzle 8 that is moved and moved, the curing means 10 is moved at the moving speed Va = 5 mm / sec. With respect to the screw shaft 11a and is the same as the forward traveling direction of the coating film forming unit 6. When the relative movement is made in the direction gradually approaching the nozzle 8, the relative moving speed of the curing means 10 with respect to the substrate 2 is 25 mm / sec., And the curing processing time in this case is 40 seconds.

  When the curing unit 10 is moved relative to the nozzle 8, the nozzle 8 and the curing unit 10 collide with each other so that interference does not occur and the coating liquid discharge time at the coating start end 2a to the curing process start time. More than the horizontal distance D between the nozzle 8 and the curing means 10 for setting the time interval of, for example, 400 mm, the distance by which the curing means 10 moves relative to the completion of the curing process (200 mm = 5 mm / sec. × 40 seconds) ) Is set to be shorter.

  As described above, in the first embodiment, since the coating film forming unit 6 is further provided with the motor 12 that moves the curing means 10 relative to the nozzle 9, not only can the curing processing start time be adjusted freely, The curing processing speed different from the processing speed V, that is, the curing processing time can be freely adjusted, and the coating liquid C can be cured with suitable curing processing energy.

  Therefore, for example, even when the coating film is formed at a traveling speed V that prioritizes the coating process, the relative moving speed of the movable curing means 10 can be adjusted, so that the curing process speed (curing process time) is reduced. It can be ensured appropriately, whereby the curing process can be performed properly.

  As described above, in the coating apparatus and the coating method according to the first embodiment, when the coating film forming unit 6 in which the nozzle 8 and the curing unit 10 are connected by the connecting portion 9 is configured, the nozzle is adjusted by the adjustment mechanism. 8 and the horizontal distance D between the curing means 10 can be adjusted, the start time of the curing process can be adjusted appropriately, and the curing process speed (curing process) can be adjusted by the motor 12 that relatively moves the curing means 10. Time) can be adjusted appropriately, and a coating film having a uniform film thickness and film quality can be formed.

  FIG. 5 is a plan view showing a modification of the first embodiment. In the first embodiment, one curing unit 10 is provided in the width direction of the substrate 2. However, in this modification, the plurality of curing units 10 are divided into a plurality of the curing units 10. , And arranged in the width direction of the substrate 2. A plurality of connecting portions 9 are provided in order to individually connect the plurality of curing means 10 to the nozzle 8, specifically, the traveling body 7 that supports the nozzle 8. The structure of the connection part 9 is the same as that of 1st Embodiment.

  If comprised in this way, the different horizontal direction space | interval D can be set with respect to each hardening means 10 arranged in the width direction of the board | substrate 2, or each can be relatively moved by a different motion.

  When the coating liquid C is applied to the substrate 2, the central region of the substrate 2 is more difficult to dry naturally than the outer peripheral edge region of the substrate 2, so that the curing process (curing) to the outer peripheral edge region and the central region is performed. If the processing start time and the curing processing time are the same, a uniform coating film may not be formed over the entire surface of the substrate 2.

  In this modified example, individual setting can be made for each of the curing means 10 arranged in the width direction of the substrate 2. For example, one of the curing means 10 for curing the central region is connected to the outer peripheral edge. With respect to the other curing means 10 for curing the region, the curing processing start time can be set earlier or later, and the relative movement speed can be increased or decreased. An appropriate curing process corresponding to each region on the substrate 2 having different easiness of treatment can be performed, and a high-quality coating film having a uniform film thickness and film quality can be formed.

  In addition, when the some hardening means 10 is arranged in a straight line, the same coating-film formation as the case of the single hardening means 10 of the said 1st Embodiment can be performed.

  6 and 7 show a coating apparatus according to the second embodiment. FIG. 6 is a plan view showing a second embodiment of the coating apparatus according to the present invention, and FIG. 7 is a partially enlarged view in the direction of arrow A in FIG. The second embodiment is a case where the adjustment mechanism is a turning mechanism 13 instead of the slide mechanism 11 of the first embodiment. Other configurations are the same as those of the first embodiment.

  The connecting portion 9 includes a support member 14 extending horizontally from the center of the rear surface 7e toward the rear along the length direction of the substrate 2 on the rear surface 7e in the forward travel direction of the traveling body 7, and the support member 14 The rear end 14 a is composed of a pair of left and right swing arms 15 having one end 15 a rotatably supported by a rotating shaft 16. That is, the connecting portion 9 includes a turning mechanism 13 having a swing arm 15 that is turned.

  The swing arm 15 is attached to the support member 14 by a fastening member or the like operated by hand. By tightening the fastening member or the like, the swing arm 15 is fixed to the support member 14 and loosened, so that the support member 14 can be turned.

  The swing arm 15 may be connected to a motor (not shown) as drive means provided on the support member 14 in place of the fastening member or the like, and attached to the support member 14 so as to be able to be driven to rotate. One motor may be provided to drive the pair of left and right swing arms 15 at once, or two motors may be provided to individually drive the motor.

  Further, in order to turn the pair of left and right swing arms 15 at the same turning angle, one end 15a of each swing arm 15 rotatably supported by the support member 14 may be coupled by a gear coupling or the like. . The swivelable swing arm 15 can adjust the angle θ with respect to the support member 14 in a range from a direction approaching the traveling body 7 and the nozzle 8 to a direction separating from the direction.

  Two curing means 10 are attached below each swing arm 15 and provided in the width direction of the substrate 2. The curing means 10 adjusts the angle θ of the swing arm 15 so as to approach or separate from the nozzle 8 or move away from the nozzle 8 by moving the angle θ to 90 ° toward the edge of the substrate 2. Directed in parallel orientation. The angles θ of the pair of left and right swing arms 15 may be different to change the directions of the two curing means 10.

  The connecting portion 9 provided with the curing means 10 can be swiveled by the swing arm 15 regardless of whether the connecting portion 9 is a motor-driven type or attached by a fastening member or the like. Accordingly, the connecting portion 9 includes an adjustment mechanism that adjusts the horizontal distance D between the nozzle 8 and the curing means 10 in the traveling movement direction of the traveling body 7 (the length direction of the substrate 2).

  In the case of the motor drive type, since the swing arm 15 can be turned by the motor 16, the curing means 10 can be moved relative to the nozzle 8 during the traveling movement of the traveling body 6. Of course, the connecting portion 9 has a function of connecting the curing means 10 to the nozzle 8 of the traveling body 7.

  In the coating apparatus and the coating method according to the second embodiment, by arranging the curing means 10 to be inclined with respect to the nozzle 8, the central region and the outer peripheral edge of the substrate 2 are the same as in the modification of the first embodiment. It is possible to change and adjust the curing process for the edge region, and similarly to the first modified example, an appropriate curing process according to the situation such as the coating liquid thickness on the substrate 2 can be performed for each region. A coating film having a uniform film thickness and film quality can be formed.

  On the other hand, by disposing the nozzle 8 and the curing means 10 in parallel, the same curing process as in the first embodiment can be performed, and the same effects as those in the first embodiment can be achieved.

  Although the ball screw mechanism has been described as an example of the mechanism for moving the curing means 10 relative to the nozzle 8 in a sliding manner by the motor drive, the present invention is not limited to this, and other known movements such as a linear motor mechanism and a rack and pinion mechanism. Of course, the mechanism may be adopted.

DESCRIPTION OF SYMBOLS 1 Application | coating apparatus 2 Substrate 2a Application | coating start end 2b Application | coating end 3 Table 4 Base 5 Traveling rail 6 Coating film forming unit 7 Traveling body 7a Pillar part 7b Beam part 7c Forward travel direction front 7d Lifting slit 7e Forward travel direction rear face 8 Nozzle 9 Connecting portion 10 Curing means 11 Slide mechanism 11a Screw shaft 11b Nut 12 Motor 13 Turning mechanism 14 Support member 14a Rear end 15 Swing arm 15a One end 16 Rotating shaft C Coating liquid D Horizontal interval F UV light L Length of substrate V Running body Traveling speed (coating speed)
Va Curing means moving speed a Table b Substrate c Coating d Coating unit e Coating liquid f Nozzle g Curing means h Connecting part i UV light LX interval VX Traveling speed θ Swing arm angle

Claims (7)

  After the coating film forming unit in which the nozzle for discharging the coating liquid and the curing means for curing the coating liquid are connected via the connecting portion travels in the length direction of the substrate, the substrate is applied by the nozzle, A coating apparatus for curing a coating liquid applied to a substrate by the curing means, wherein the connecting portion includes an adjustment mechanism for adjusting a horizontal interval between the nozzle and the curing means. Coating device.   The coating apparatus according to claim 1, wherein the adjustment mechanism includes a driving unit that moves the curing unit relative to the nozzle.   The coating apparatus according to claim 1, wherein the adjustment mechanism is a slide mechanism that allows the curing unit to slide along the length direction of the substrate.   The coating apparatus according to claim 1, wherein the adjustment mechanism is a turning mechanism that enables the curing unit to turn along the substrate surface.   The said hardening means is arranged in multiple numbers by the width direction of a board | substrate, The said connection part is provided in multiple numbers in order to connect these hardening means separately to the said nozzle, The claim in any one of Claims 1-4 characterized by the above-mentioned. The coating apparatus as described.   The coating apparatus according to any one of claims 1 to 5, wherein a horizontal interval between the nozzle and the curing means is set by the adjustment mechanism, and then the coating film forming unit is moved and moved, and the nozzle A coating method characterized by carrying out a coating treatment by the method and a curing treatment by the curing means.   When the coating apparatus according to any one of claims 2 to 5 is used to perform the coating process using the nozzle by traveling and moving the coating film forming unit, the driving unit causes the curing unit to be relative to the nozzle. A coating method characterized in that a curing process is performed while moving.

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