TW201602715A - Mask for arrangement and the manufacturing method of the same - Google Patents

Abstract

This invention provides a mask for arrangement that is still suitable even when the external size of the protrusion is minimized along the bumps. The solution is a mask for arrangement, which places solder balls (2) inside the holes (12) corresponding to predetermined pattern arrangement to thereby embark solder balls (2) on predetermined locations of the working piece (3). The feature includes: a mask body (10) with patterns composed of several holes (12); and a protrusion (15) on a side of the mask body (10) opposite to the working piece (3). A covering layer (50) is formed at the bottom of the mask body (10).

Description

Layout mask and manufacturing method thereof

The present invention relates to a mask for arrangement used in order to form solder bumps, and a method of manufacturing the same.

The solder bump is formed by: on the wafer. Flexible substrate. The printing process of the electrode coating flux on the workpiece such as a rigid substrate, the arrangement of the solder balls on the solder, and the solder ball heating. Dissolve the heating process to form the bumps. Further, in the above-described arrangement, the method of arranging the solder balls on the workpiece is a method in which the mask is placed. The placement method is a mask for arranging a through hole for positioning a solder ball (hereinafter referred to as a "mask" as appropriate), and the solder ball is mounted on the electrode of the workpiece. . Specifically, after the through holes and the electrodes are aligned, after the workpiece is aligned, the solder balls supplied to the mask are swept by a doctor blade or a brush, and the solder balls are put into the through holes one by one. in. Further, the solder ball is temporarily placed on the workpiece at a predetermined position by adhering the solder ball to the flux.

This mask is disclosed in Patent Document 1. The mask described in Patent Document 1 is provided with a plurality of roots under the mask body having the through holes. The protrusion for supporting, the protruding size of the protrusion is set to the same size. Thereby, when the mask is provided on the workpiece, the lower ends of all the supporting projections are abutted on the upper surface of the workpiece, and the opposing gap between the mask body having the through holes and the workpiece can be ensured.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-287215

However, in recent years, with the miniaturization of electronic equipment, the miniaturization of bumps has also progressed. That is, as the size of the bumps is miniaturized, the size of the through-holes of the mask or the size of the pattern area is narrowed, and the outer dimensions of the protrusions disposed between the through-holes or between the pattern areas (the outer periphery of the pattern area) also change. Since the inclination is small, the distance between the mask and the workpiece is narrow, and the flux disposed on the electrode of the workpiece is likely to adhere to the mask. In particular, when the flux adheres to the lower surface of the mask body or the inner surface of the through hole, mounting failure of the solder ball is likely to occur. An object of the present invention is to provide a mask for arranging a solder ball without a defect, and a method of manufacturing the same, even when the outer dimensions of the protrusion itself are reduced as the bump is miniaturized.

The present invention is a matching mask, corresponding to a predetermined The solder ball 2 is placed in the through hole 12 of the arrangement pattern, whereby the solder ball 2 is mounted on a predetermined position on the workpiece 3, and is characterized in that the mask body 10 is formed with a plurality of through holes 12 formed therein. The pattern region; and the protrusion 15 are provided on the opposite side of the mask body 10 from the workpiece 3, and at least the coating layer 50 is formed on the underside of the mask body 10.

Further, the mask body 10 and the protruding portion 15 are formed to be non-integral.

Further, the covering layer 50 is formed to cover the lower surface of the mask body 10 and the surface of the protruding portion 15. The coating layer 50 may be formed to have a thickness of 1 μm or less.

Moreover, the present invention is a manufacturing method of a mask for arranging, wherein the mask body includes a mask body 10 in which a plurality of pattern regions formed by the through holes 12 are formed, and a protrusion portion 15 The cover body 50 is disposed on the opposite side of the mask body 10 from the workpiece 3, and at least the cover layer 50 is formed on the underside of the mask body 10.

First, a primary pattern resist 41 having a photoresist body 41a is formed on the master mold 40. Next, the primary electrode layer 42 is formed on the mother die 40 by the photoresist 41a. Next, a secondary pattern photoresist 44 having a photoresist body 44a is formed on the primary electric layer 42. Next, a coating layer 50 is formed on the surface of the primary electric layer 42.

The coating layer 50 is formed on the primary electro-deposition layer 42 and has a secondary pattern. The surface of the side of the photoresist 44 and the surface of the secondary pattern resist 44 may be used.

According to the arrangement mask of the present invention, since the coating layer is formed on the lower surface of the mask body, it is possible to prevent the flux from adhering to the underside of the mask body as it is. Further, the coating layer is formed to cover the lower surface of the mask body and the surface of the protrusion portion, whereby the coating layer functions as a protective layer for the protrusion portion, and the protrusion portion can be prevented from falling off, deformed, and damaged.

1‧‧‧ mask

2‧‧‧ solder balls

3‧‧‧Workpiece

6‧‧‧Electrode

10‧‧‧mask body

12‧‧‧through hole

15‧‧‧Protruding

15a‧‧‧Frame

15b‧‧‧ pillar

15c‧‧‧ pillar

15d‧‧‧ convex

15’‧‧‧ front end

15"‧‧‧ root

30, 40‧‧‧ mother model

31, 36, 43‧‧‧ photoresist layer (solderproof paint layer)

34, 41‧‧‧ Once patterned photoresist

34a, 41a‧‧‧ photoresist

35, 42‧‧‧ Once electroformed layer

38, 44‧‧‧ secondary pattern photoresist

38a, 44a‧‧‧ photoresist

39‧‧‧Second electroforming layer

50‧‧‧covered layer

Fig. 1 is a perspective view showing the overall configuration of a mask and a workpiece according to the present invention.

Fig. 2 is a longitudinal sectional side view showing a mask for arrangement according to the first embodiment of the present invention.

3 is a plan view showing a mask for arrangement according to the first embodiment of the present invention.

Fig. 4 is a longitudinal sectional side view showing another embodiment of the arrangement mask according to the first embodiment of the present invention.

Fig. 5 is a plan view showing another embodiment of the arrangement mask according to the first embodiment of the present invention.

Fig. 6 is a longitudinal sectional side view showing another embodiment of the arrangement mask according to the first embodiment of the present invention.

Fig. 7 is a view showing the manufacture of the mask for arrangement according to the first embodiment of the present invention; An illustration of the law.

FIG. 8 is an explanatory view showing a method of manufacturing the mask for arrangement according to the first embodiment of the present invention.

Fig. 9 is a longitudinal sectional side view showing a mask for arrangement according to a second embodiment of the present invention.

FIG. 10 is an explanatory view showing a method of manufacturing the mask for arrangement according to the second embodiment of the present invention.

FIG. 11 is an explanatory view showing a method of manufacturing the mask for arrangement according to the second embodiment of the present invention.

Fig. 12 is a partially enlarged plan view showing a mask for arrangement according to another embodiment of the present invention.

(First embodiment)

A mask for arranging solder balls according to the first embodiment of the present invention is shown in FIG. 1 to FIG. This arrangement mask (hereinafter referred to as mask) 1 is a user for the arrangement of the solder balls 2 formed in the solder bumps. In FIG. 2, reference numeral 3 denotes a workpiece to be mounted on the solder ball 2 to be the mask 1. In the workpiece 3, for example, a plurality of semiconductor wafers 5 are mounted on the base 4 of the glass epoxy substrate, and the wires are bonded by wire bonding, and then molded and sealed. The semiconductor wafer 5 is surrounded by the semiconductor wafer 5 so as to surround the workpiece 3. The pattern forms the electrode 6 that is output to the terminal. Further, the workpiece 3 is cut into small pieces after the formation of the bumps, and becomes an individual LSI wafer.

As shown in FIG. 1, the mask 1 is composed of a mask body 10 formed of a nickel alloy such as nickel or nickel cobalt, copper or other metal, and the mask body 10 can be mounted in a surrounding manner. Frame 11. In the central portion of the disk surface of the mask body 10, a plurality of pattern fields formed by a plurality of independent through holes 12 for feeding the solder balls 2 are formed for each of the semiconductor wafers 5. As shown in FIG. 2, the through holes 12 correspond to an arrangement pattern which corresponds to the arrangement position of the electrodes 6 of the respective semiconductor wafers 5 on the workpiece 3. The solder ball 2 has a radius of 50 μm or less. In combination, each of the through holes 12 is formed into a circular shape having an inner diameter which is slightly larger than the radius of the ball 2.

The casing 11 is a flat plate made of a material such as aluminum, 42 alloy, Invar or SUS430, and has a rectangular opening corresponding to the mask body 10 at the center of the disk surface. This embodiment is a frame. The body 11 holds a mask body 10. The casing 11 is a molded article thicker than the mask body 10, and is integrally joined to the outer periphery of the mask body 10. Here, the thickness of the casing 11 is, for example, about 0.05 to 1.0 mm, and is set to 0.5 mm in the present embodiment. Further, the thickness of the mask main body 10 is preferably 10 μm or more, and is set to 200 μm in the present embodiment.

On the lower surface side of the mask body 10 (mask 1), that is, on the side of the facing surface of the workpiece 3, a projection 15 that protrudes in the downward direction can be provided. As shown in detail in FIG. 2 and FIG. 3, the protrusion 15 (frame 15a) can be provided so as to surround the pattern area between the pattern areas (outer circumference of the pattern area). This protrusion 15 (frame 15a) is also like FIG. It can be set discontinuously or intermittently. Moreover, as shown in FIG. 4, the protrusion 15 (pillar 15b) can be provided in the position where the through-hole 12 in the pattern area is not formed. Further, the shape of the protrusion 15 provided between the adjacent pattern areas (outer circumference of the pattern area) so as to surround the pattern area is not limited to the frame 15a, and may be the pillar 15c as shown in FIG. When such a projection 15 is provided, it is possible to abut against the upper surface of the workpiece 3 during the alignment operation to secure the opposing gap between the mask body 10 and the workpiece 3. As shown in FIGS. 3 and 5, each of the projections 15 (the frame 15a and the pillar 15b) is preferably formed to have a truncated cone shape from the lower surface of the mask body 10 toward the front end of the projection 15.

As shown in FIG. 6, the shape of the protrusion 15 may be an end-expanded shape in which the root size of the protrusion 15 becomes larger toward the lower surface of the mask body 10 (as the root portion of the protrusion 15 faces the front end). The narrowed front end has a narrow shape, and the side surface is formed into an arc shape. Thereby, it is possible to prevent the stress from being concentrated on the protrusion 15 and particularly the root portion 15", and when the mask 1 is placed on the workpiece 3, even if the flux 17 is attached to the protrusion 15, the protrusion can be used. The side surface of the 15 is formed as an arc to prevent the flux 17 from being wound around the through hole 12. Therefore, it is possible to eliminate the adhesion of the solder ball 2 to the through hole 12 and cause the mounting failure of the solder ball 2. Further, the terminal portion of the root portion 15" of the protrusion portion 15 The position is preferably located in the vicinity of the through hole 12 below the mask body 10, and can be considered in the form of the intersection of the lower surface 10a of the mask body and the inner surface 12a of the through hole, and the gap is located in the through hole 12 from the lower surface 10a of the mask body. The form of the place. Moreover, the side surface of the protrusion 15 may be a convex arc or a concave arc, and if it is a convex arc, a strong strength is formed, if a concave circle The arc does not have a portion close to the electrode 6 to which the flux 17 is attached, that is, a state in which the electrode 6 adhering to the flux 17 is kept at a certain distance from the position on the side surface of the protrusion 15. Further, the front end portion 15' and/or the root portion 15" of the projection portion 15 may be formed in an arc shape, whereby the adhesion of the flux 17 to the projection portion 15 can be reduced as much as possible.

In the present mask 1, the ratio of the height of the protrusion 15 to the thickness of the mask body 10 is preferably two to one or more, and more preferably, the thickness of the mask body 10 is in the range of 10 to 300 μm. Further, the projection 15 is preferably an aspect ratio (ratio of the height of the projection 15 to the tip end dimension), and is preferably an aspect ratio 3 in the present embodiment. Further, the root portion size L2 of the projection portion 15 is preferably 1.0 to 1.5 times the front end dimension L1 of the projection portion 15, and is preferably set to 1.2 times in the present embodiment. Further, the ratio of the tip end dimension L1 of the projection portion 15 to the width dimension L3 between the root portion dimension L2 and the through hole 12 is preferably 1.2 to 1.4 or more. In addition, it is preferable that the dimension L4 from the pattern region to the root portion of the projection 15 (the frame 15a, the support 15c (described later), and the convex portion 15d (described later)) is set to 0.01 mm or more, and is 0.02 mm in the present embodiment. . According to such conditions, the adhesion of the flux can be prevented as much as possible. At this time, by the relationship between the ratio of the tip end dimension L1 of the projection 15 and the root dimension L2 and the relationship of the dimension L4 from the pattern region to the root of the projection 15, the damage of the projection 15 and the flux can be prevented. Adhesion prevents coexistence. In addition, when the dimension from the pattern area to the center of the front end of the protrusion 15 (the frame 15a, the pillar 15c (described later), and the convex portion 15d (described later)) is L5, the ratio of L1, L2, and L5 is set to 1 to 3 pairs of 2.5 or more, which can coexist The effect is maximized.

In the above embodiment, the mask body 10 and the protrusion 15 are integrally formed. However, the mask body 10 and the protrusion 15 may be integrally formed by other members. In the above-described mask 1, when the mask body 10 is formed of a magnetic body and the protrusions 15 are formed of a non-magnetic material, the magnetic field can be attracted to the workpiece 3 by the magnetic attraction of the magnet. Since the mask 1 acts uniformly, the mask 1 can be tightly bonded to the workpiece without any inadvertent bending, and the alignment accuracy of the through hole 12 with respect to the electrode 6 can be improved. Further, when the mask 1 is removed, since the workpiece 3 and the protruding portion 15 are not directly magnetically coupled, they can be separated well. The mask 1 is obtained by forming the mask body 10 by a magnetic metal (nickel, iron, or the like), for example, and forming the protrusion 15 by a non-magnetic metal (copper, aluminum, or the like).

Further, the protrusion 15 is formed of a non-magnetic material, and is not limited to the above metal, and may be formed of a resin or a photoresist. Thereby, in addition to the above effects, the elastic cushioning action from the resin can be exerted, and when the projections 15 abut against the workpiece 3, the damage of the workpiece 3 is reduced. Further, in order to remarkably obtain this effect, in the mask 1, not only the projections 15, but also the portion that abuts against the workpiece 3 is entirely formed of a resin. Further, when the projections 15 are formed of a resin, it is possible to produce them efficiently by using the same photoresist as that used when the mask body 10 is formed by electroforming.

Further, in the present mask 1, as shown in FIGS. 2, 4, and 6, a coating layer 50 is provided on the lower surface of the mask body 10 or on the inner surface of the through hole 12. The coating layer 50 is preferably water-repellent, and is made of fluororesin. Antimony resin, emulsion, photoresist (liquid), etc. By providing the covering layer 50, even if the flux adheres to the underside of the mask body 10 or the inner surface of the through hole 12, the flux can be bounced off, and the flux can be prevented from adhering to the underside of the mask body 10 or the inner surface of the through hole 12 as it is. . Further, the covering layer 50 may be formed on the mask body 10 or may be formed under the mask body 10 between the protrusions 15 (frame 15a) between the pattern areas. In short, it is preferable to form a portion where the solder ball is poorly loaded when the flux adheres, and when the mask 1 is placed on the workpiece, it is preferably formed on the mask body 10 opposite to the flux 17 applied to the electrode 6. And the surface of the protrusion 15.

Further, each of the drawings is not a view of the actual mask 1, but is displayed in a pattern. Further, the opening size of the through hole 12 of each drawing, the thickness dimension of the mask body 10, and the like are displayed on the basis of the convenience of the drawing surface, and such a size is displayed. Further, in FIGS. 3 and 5, the lower end surface (front end surface) of the projection 15 is indicated by reference numeral 15, and the root portion of the projection 15 is not shown. Further, in FIGS. 3 and 5, the covering layer 50 is not shown.

The arrangement of the solder balls 2 using the mask 1 is performed in the following procedure. In addition, this arrangement work is performed by a dedicated arrangement device (refer to FIG. 1 and FIG. 5 of Patent Document 1). First, the application flux 17 is printed on the electrode 6 of the workpiece 3 (refer to FIG. 2). Next, the mask 1 is fixed after the alignment mask 1 is aligned on the workpiece 3 so that the through hole 12 and the electrode 6 can match each other. Such alignment work is actually performed under the outer periphery of the alignment frame 11 and the workpiece 3. Once the alignment operation is finished, in such a fixed state, the lower end surface of the protrusion 15 will abut The mask body 10 is held on the surface of the workpiece 3, and the mask body 10 is held in a separated posture from the opposing gap of the workpiece 3 as shown in Figs. 2, 4, and 6. At this time, the magnet may be disposed below the workpiece 3, and the shield 1 may be adsorbed on the workpiece 3 side by the magnetic force of the magnet.

Next, a plurality of solder balls 2 are supplied to the mask 1, and the solder balls 2 are dispersed on the mask 1 by a doctor blade, and the solder balls 2 are placed one by one in the through holes 12. Thereby, the solder ball 2 is temporarily fixedly adhered to the flux 17. In the operation of the solder ball 2 using the doctor blade in this manner, even if the blade pressure is applied to the mask 1, the protrusion 15 can be prevented from being bent by the protrusion 15, and the operation can be smoothly progressed with high work efficiency.

As described above, according to the mask 1 of the present embodiment, since the protrusion 15 which forms the opposing gap between the mask body 10 and the workpiece 3 is provided, the protrusion 15 can surely ensure the opposing gap with the workpiece 3. The operation of the solder ball 2 into the through hole 12 can be performed efficiently and without leakage.

The frame body 11 for reinforcement can be provided on the outer periphery of the mask body 10, and the mask body 10 can be formed in a state in which a stress in a direction in which the inner side is contracted is applied to a tension like itself. The expanded portion of the mask body 10 as a function of ambient temperature is absorbed by the tension in the contraction direction. Thereby, the occurrence of displacement of the mask body 10 with respect to the workpiece 3 can be prevented. Moreover, since the uniform tension of the entire body of the mask body 10 can be provided, the position of the solder ball 2 with respect to the workpiece 3 can be accurately mounted.

Next, a manufacturing method of the mask 1 for arrangement of such a configuration is shown in FIGS. 7 and 8. First, for example, a photoresist layer 31 is formed on the surface of a mother die 30 made of stainless steel or brass having conductivity. The photoresist layer 31 is formed by laminating one or even a plurality of negative-type photosensitive dry photoresists with a predetermined height by heat pressing. Next, as shown in FIG. 7(a), after the pattern film (glass mask) 32 having the light-transmissive holes 32a corresponding to the protrusions 15 is tightly bonded to the photoresist layer 31, it is irradiated with the ultraviolet lamp 33. The ultraviolet light is exposed, and each process of development and drying is performed, and the unexposed portion is removed by dissolution, and as shown in FIG. 7(b), the photoresist body 34a having the protrusion 15 corresponding to the narrow front end is formed. The primary pattern photoresist 34 is formed on the master mold 30. At this time, it is preferable to use a photoresist which is hard to transmit by ultraviolet rays, or to reduce the amount of exposure, and a taper is attached to the photoresist body 34a. Next, the master mold 30 is placed in an electroforming bath which is bathed under predetermined conditions, as shown in Fig. 7(c), in the range of the height of the previous photoresist body 34a, the master mold 30 is not The surface covered by the photoresist 34a electroforms an electroforming metal such as nickel or copper to form a primary electroformed layer 35. Here, the electroformed layer 35 (first electroforming process) is formed substantially throughout the master mold 30. Next, as shown in Fig. 7(d), the pattern resist 34 is removed once. Here, the surface of the primary electroformed layer 35 may be subjected to a polishing treatment.

Next, as shown in FIG. 8(a), after the photoresist layer 36 is formed on the entire surface of the primary electroformed layer 35 and the mother mold 30, a pattern film having the light-transmissive holes 37a corresponding to the through holes 12 is formed ( After the glass mask 37 is tightly bonded to the surface of the photoresist layer 36, the ultraviolet light 33 is irradiated with ultraviolet light to perform exposure, and each process of development and drying is performed. The unexposed portion is removed by dissolution, and as shown in FIG. 8(b), a secondary pattern resist 38 having a photoresist 38a corresponding to the mask body 10 is formed on the surface of the primary electroformed layer 35. Next, an electroforming bath in which the bath is set to a predetermined condition is placed, as shown in Fig. 8(c), in the range of the height of the previous photoresist 38a, the photoresist 30a is not provided in the master mold 30. The surface of the primary electroformed layer 35 covered is electroformed with an electroforming metal such as nickel or copper to form a secondary electroformed layer 39 (second electroforming process). Next, the secondary pattern resist 38 is dissolved and removed, and the secondary electroformed layer 39 is peeled off from the master 30 and the primary electroformed layer 35. Finally, the opposite side of the secondary pattern resist 38 is formed on the side of the mother mold face corresponding to the secondary electroformed layer 39 under the mask body 10 and the secondary electroformed layer 39 corresponding to the inner surface of the through hole 12. The cover layer 50 can thereby obtain the mask 1 as shown in Fig. 8(e) and Fig. 2 .

When the frame 11 is attached to the mask 1 thus obtained, the mask 1 for arrangement as shown in FIG. 1 can be obtained. The mask 1 (the secondary electroformed layer 39) is held by the frame 11 in a state in which the stress in the direction in which the contraction is applied to the inner side is applied to the tension itself. The stress is applied, for example, by the difference in thermal expansion coefficient between the frame 11 and the mask 1. In the high-temperature environment, the frame 11 is attached to the outer periphery of the mask 1, and the mask 1 is shrunk at normal temperature. On the inner side, this is achieved.

According to the manufacturing method of the mask 1 as described above, the mask for arrangement can be produced with high precision by the electroforming method. Therefore, the solder ball 2 can be mounted on the workpiece 3 with high positional accuracy.

Further, if the mask body 10 and the protrusion 15 are integrally formed without any separation by one-time electroforming (second electroforming process), the cover having the protrusion 15 is formed. In the case of the cover 1, the damage of the protrusion 15 is reduced as compared with the case where the mask body 10 and the protrusion 15 are formed separately, and the point of the mask 1 having high reliability can be obtained with high precision. Further, when the projection portion 15 is formed to have a narrow front end so as to become close to the lower surface of the mask main body 10, the stress can be concentrated on the projection portion 15, particularly the root portion, so that the projection portion 15 can be firmly reinforced on one surface. The strength of the protrusion 15 can be abutted between the electrodes 6 while leaving the electrode 6 coated with the flux 17, so that the solder adhered to the electrode 6 can be prevented from adhering to the mask body 10. Poor loading of the ball 2. In this case, the ratio of the size of the distal end portion 15' of the protruding portion 15 to the size of the root portion 15" is set to be 1 or more, and the aspect ratio of the protruding portion 15 is set to 3 or more, which is more effective. The size and aspect ratio of the protrusions 15 can be easily obtained by adjusting the shape of the photoresist pattern 35.

Further, in the mask 1 having such a configuration, the shape of the through hole 12 and the protruding portion 15 can be straight or tapered. Here, in the case where the through hole 12 or the protruding portion 15 is tapered, the narrowing of the front end side of the mask body 10 facing the workpiece 3 is provided in the through hole 12 . The taper can easily attract the solder ball 2 into the through hole 12, and the solder can be prevented from being attached to the mask body 10 by providing a tapered taper toward the opposite side of the mask body 10 and the workpiece 3. The periphery of the through hole 12 on the opposite surface side of the workpiece 3. Further, in the protruding portion 15, by providing a taper having a narrow front end toward the opposite surface side of the mask body 10 with respect to the workpiece 3, the mounting of the mask on the workpiece 3 can be made firm, and by facing the mask The front side of the body 10 and the opposite side of the workpiece 3 are provided with a tapered front end, even if When the electrodes 6 of the workpiece 3 are arranged at a narrow pitch, the strength of the protrusions 15 can be ensured while the protrusions 15 are properly abutted against the workpiece 3. Such a shape can be easily obtained by changing the sensitivity or exposure conditions of the photoresist layer 31.36.

(Second embodiment)

Next, a mask for arrangement according to the second embodiment will be described. In the present embodiment, as shown in FIG. 9, the covering layer 50 is formed not only on the lower surface of the mask body 10 but also on the surface of the protruding portion 15. The other points are substantially the same as those in the first embodiment. Therefore, the same members as those in the first embodiment are denoted by the same reference numerals and will not be described.

According to the arrangement mask of the present embodiment, since the coating layer 50 is also formed on the surface of the protrusion 15, the adhesion of the flux can be prevented with respect to the protrusion 15. Further, by forming the covering layer 50 on the lower surface of the mask body 10, the inner surface of the through hole 12, and the surface of the protruding portion 15, even if the flux adheres to the inner surface of the through hole 12, the flux can be removed, passing under the mask body 10 And the surface of the protrusion 15 flows onto the workpiece. Also, it is possible to more reliably prevent the flux 17 from being wound into the through hole 12.

Further, when the cover layer 50 is formed to cover the entire surface of the mask body 10 and the surface of the protrusion 15 in a comprehensive manner, for example, when the mask body 10 and the protrusion portion 15 are formed in separate configurations, the joint strength between the two is weak. (This is because the size of the via hole or the size of the pattern area is narrowed as the bump is miniaturized, and the outer shape of the protrusion 15 disposed between the through holes or between the pattern areas (outer circumference of the pattern area) is also small. Tend, so The joint area between the protrusion 15 and the mask body 10 is reduced. There is a fear that the protrusion 15 may be accidentally peeled off, deformed, or broken when the mask 1 is used. However, the cover layer 50 has the above configuration. Since it functions as a protective layer of the protrusion part 15, it can help prevent fall, deformation, and damage of the protrusion part 15. Further, when it is desired to prevent the protrusion 15 from being detached, deformed, or damaged, the coating layer 50 may be formed by forming a metal layer (Ni, Cu, or the like) by sputtering or electroless plating.

A method of manufacturing the mask for arrangement according to the present embodiment is shown in Figs. 10 and 11 . First, as shown in Fig. 10 (a), the master mold 40 is prepared. The master mold 40 is any one as long as it has conductivity. In the present embodiment, stainless steel is used. Next, a photoresist layer is formed on the surface of the master mold 40, and each process of exposure, development, and drying is performed by a known method, and the unexposed portion is removed by dissolution, and as shown in FIG. 10(b), the light is provided. The primary pattern resist 41 of the resistor 41a is formed on the master mold 40. The photoresist layer is formed by laminating one or more sheets of a negative-type photosensitive dry film photoresist at a predetermined height. Next, the electroforming groove in which the above-mentioned master mold 40 is bathed to a predetermined condition is as shown in Fig. 10(c) to the same extent as the height of the previous photoresist body 41a, and no photoresist is applied to the master mold 40. The surface covered by the body 41a is electroformed with a metal to form an electric layer 42. In this embodiment, the primary electroless layer 42 is formed by Ni-Co electroforming. Further, it is preferable to perform mechanical polishing and/or electrolytic polishing such as abrasive belt polishing on the surface of the primary electroless layer 42 after forming the primary electroconductive layer 42. Next, as shown in Fig. 10 (d), the photoresist 41a is dissolved and removed.

Second, as shown in Figure 11 (a), in an electric layer A solder resist layer 43 is formed on the surface of 42. The solder resist layer 43 is formed by laminating one or even a plurality of sheets in accordance with a predetermined height. Next, each treatment of exposure, development, and drying is performed, and the unexposed portion is removed by dissolution, and as shown in FIG. 11(b), the secondary pattern resist 44 having the photoresist body 44a is integrally formed at one time. On layer 42. Further, it is preferable to perform the fall prevention treatment such as prebaking after the secondary pattern resist 44 is formed. Thereby, the close bonding of the secondary pattern photoresist 44 having the photoresist body 44a to the primary electroless layer 42 can be made stronger. Next, as shown in Fig. 11(c), the primary electroconductive layer 42 and the secondary pattern photoresist 44 formed on the surface thereof are peeled off from the mother die 40. Finally, the coating layer 50 is formed on the surface of the primary layer 42 having the secondary pattern resist 44 and the surface of the secondary pattern resist 44, whereby the arrangement shown in FIGS. 11(d) and 9 can be obtained. Use mask 1. Further, the coating layer 50 is formed before the primary electrode layer 42 and the secondary pattern photoresist 44 are peeled off from the master mold 40. Further, the covering layer 50 is not limited to the surface of the primary electroconductive layer 42 having the secondary pattern resist 44, and may be formed on the entire surface of the primary electroless layer 42. Of course, the coating layer 50 may also be formed on the inner surface of the through hole 12.

In the above embodiment, the projections 15 (pillars 15b) and the through holes 12 are disposed such that the projections 15 (struts 15b) surround one of the through holes 12, or the one projection 15 is surrounded by the through holes 12. Configuration. Moreover, the shape of the protrusion 15 is not limited to the frame 15a or the cylinder, and may also be a diamond shape. Polygonal or rounded hexagons. Further, in these shapes, as shown in Fig. 10, it is preferable that the shape is an elongated shape and/or a corner band. In such a length direction of the shape. Long diameter direction is blended In a certain direction, for example, when the back surface of the mask 1 is washed, the cleaning means (cloth or sponge, etc.) can be eliminated as much as possible to cause the cleaning means or the protruding portion 15 to be broken, and Wash it smoothly. Therefore, it is preferable to adjust the longitudinal direction and the long diameter direction of all the projections 15 in one direction. Further, the elongated shape is always the lower end surface (front end surface) of the protruding portion 15, and the surface of the root portion 15b of the protruding portion 15 does not necessarily have to be an elongated shape based on the point of strength or the like.

Further, in each of the above embodiments, the thickness of the coating layer 50 may be different between the inner surface of the through hole 12 and the surfaces of the mask body 10 and the protrusion portion 15. Specifically, when the thickness of the coating layer 50 on the inner surface of the through hole 12 is T1 and the thickness of the coating layer 50 on the surface of the mask body 10 and the protrusion 15 is T2 (see FIG. 9), When T1>T2, it is possible to more reliably prevent adhesion of the solder which causes the solder ball to be mounted on the inner surface of the through hole 12. Further, when the coating layer 50 is formed of a material that is easy to slide (small friction), only the thickness portion of T1 appears as a field of easy sliding on the upper surface of the mask body 10 and the inner surface of the through hole 12, and the thickness of T1 is thicker. In this case, when the solder ball 2 is swept by the doctor blade, the blade brush or the solder ball 2 can be smoothly moved, and productivity or work efficiency can be expected to be improved. Further, when T1 < T2, when the protrusions 15 are formed on the lower surface of the mask body 10, it is possible to more reliably prevent the protrusions 15 from falling off, being deformed, or being damaged. Further, the method of forming the coating layer 50 may be various methods such as a dipping method or a spraying method. However, when the coating layer 50 is formed, it is preferable to cover the portion other than the desired formation portion with a protective sheet. Moreover, when it is desired to form the coating layer 50 thick, it is possible to locally spray the desired thick portion or The impregnation direction of the mask 1 is different (for example, when the thickness of the mask body 10 is desired to be thick, the lower surface of the mask body 10 may be immersed in a state parallel to the dip surface, and when the inner surface of the through hole 12 is thick, This can be achieved by immersing the underside of the mask body 10 in a state perpendicular to the impregnation surface.

1‧‧‧ mask

2‧‧‧ solder balls

3‧‧‧Workpiece

6‧‧‧Electrode

12‧‧‧through hole

15‧‧‧Protruding

15a‧‧‧Frame

15’‧‧‧ front end

15"‧‧‧ root

17‧‧‧Solder

50‧‧‧covered layer

Claims (6)

A matching mask for placing a solder ball (2) in a through hole (12) corresponding to a predetermined arrangement pattern, whereby the solder ball (2) is mounted at a predetermined position on the workpiece (3), and its characteristics A mask body (10) having a plurality of pattern regions formed by the through holes (12); and a protrusion portion (15) attached to the mask body (10) and the foregoing On the opposite side of the workpiece (3), a coating layer (50) is formed at least under the mask body (10). The mask for arrangement according to claim 1, wherein the mask body (10) and the protrusion (15) are formed in a non-integral manner. The mask for arrangement according to claim 1 or 2, wherein the covering layer (50) is formed to cover the entire surface of the mask body (10) and the surface of the protrusion (15). The mask for arrangement according to any one of claims 1 to 3, wherein the coating layer (50) is formed to have a thickness of 1 μm or less. A manufacturing method for arranging a mask, comprising: a mask body (10) having a plurality of pattern regions formed by the through holes (12); and a protrusion portion (15) It is disposed on the opposite side of the mask body (10) and the workpiece (3), Further, at least under the mask body (10), a coating layer (50) having a feature of forming a primary pattern photoresist (41) having a photoresist body (41a) on the master mold (40) is provided. Using the photoresist body (41a) to form a primary electrode layer (42) on the mother die (40); forming a second photoresist layer (44a) on the primary electrode layer (42) The construction of the patterned photoresist (44); and the construction of the aforementioned coating layer (50) on the surface of the primary electro-depositive layer (42). The manufacturing method of the mask for arranging according to claim 5, wherein in the process of forming the coating layer (50), the primary pattern layer (42) has the secondary pattern photoresist (44) The surface of the side and the surface of the secondary pattern resist (44) form the aforementioned coating layer (50).