TW201531711A - Inspection probe, inspection fixture, and manufacturing method for inspection probe - Google Patents

Abstract

The present invention provides an inspection probe which reduces the dents formed at the inspection points, can suppress pseudo defects that occur when the inspection end section deviates, and can also suppress increases in manufacturing costs. A wire-like inspection probe 1 used in an inspection fixture for electrically connecting an inspection point C and an inspection device, containing an inspection end section 2 positioned on the side of the inspection point C and an electrode end section positioned on the side of the electrode section connected to the inspection device, wherein the shape of the inspection end section 2 is a circular truncated cone that narrows in diameter with increasing proximity to the inspection point C. Because the inspection end section 2 and the inspection point C make surface contact, the dent formed at the inspection point C can be reduced, and the occurrence of pseudo defects (false disconnection defects) can be suppressed. Because the surface area of the end surface 2A of the inspection end section that contacts the inspection point is reduced, the occurrence of other pseudo defects (false insulation defects) can also be suppressed. Because the diameter D of the majority of the inspection probe excluding the inspection end section can be kept comparatively large, increases in manufacturing costs due to very fine diameters can be avoided.

Description

Contact for detecting member, detecting jig having the same, and manufacturing method of detecting contact

The present invention relates to a detecting contact used in a detecting jig for electrically connecting a detecting point set in advance on a detecting target portion of a test object to a detecting device.

A detection jig used in a state in which a detecting contact (also referred to as a probe, a probe, a contact pin, etc., hereinafter sometimes simply referred to as a "contact") is mounted for the object to be detected The detection target unit supplies electric power from the detection device to the predetermined detection position via the contact, and detects an electric signal from the detection target unit, thereby performing detection of the electrical characteristics of the detection target portion, implementation of the operation test, and the like (for example, refer to the patent document) 1 to 3). Here, as the object to be detected, various substrates such as a printed wiring board, a flexible board, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display and a plasma display, and a package substrate and a film carrier for a semiconductor package are used. And semiconductor devices such as semiconductor wafers and semiconductor wafers or CSP (Chip Size Package) are compatible. In the present specification, the above-mentioned objects to be detected are collectively referred to as "subjects to be detected". Further, a detection point for actually detecting the electrical characteristics of the detection target portion is set in advance on the detection target portion formed on the object to be detected, and the detection point and the detection device are caused by pressing the contact member against the detection point. Electrical connection.

In recent years, the wiring pattern of the circuit board is complicated, the integrated circuit is highly dense, and the arrangement pitch of the contacts is reduced. Therefore, a wire-shaped contact member having high space efficiency and flexible elasticity is often used. (For example, refer to Patent Documents 1 to 3). When the contact member is in use, since the detecting end portion as one end portion of the contact member is crimped on the detecting point, the electrode end portion as the other end portion of the contact member is crimped on the electrode portion, so that the detecting is performed by the detecting The axial load acting on the point and the electrode portion is pressed, and the intermediate portion becomes a curved deflection state. Therefore, by the elastic restoring force of the contact member thus deformed, the contact state of the detecting end portion of the contact member with the detecting point and the contact state of the electrode end portion of the contact member with the electrode portion are maintained. In this state, a current and a voltage for measuring an electrical characteristic of the detection target portion are supplied from the detecting device via the contact, and the detected electrical signal is transmitted from the detection target portion to the detection device. [Prior Art Literature] [Patent Literature]

[Patent Document 1] JP-A-2005-106832 (Patent Document 3) JP-A-2001-203280

[Problems to be solved by the invention]

The shape of the detecting end portion of the conventional wire-shaped contact member having the bendable elasticity is a conical shape like the detecting end portion 12A of the contact piece 11A of FIG. 6, and the detecting end portion 12B of the contact piece 11B of FIG. A partial spherical shape such as a hemispherical shape or a flat shape like the detection end portion 12C of the contact 11C of Fig. 8 .

As shown in Fig. 6, in the case where the detecting end portion 12A is a conical contact member 11A, as shown in Fig. 6(a), the detecting end portion 12A is in point contact with the detecting point C of the detecting target portion B of the object A to be detected. Therefore, the load pressed by the elastic restoring force of the contact 11A is concentrated, so that the scratch formed on the detection point C is large. Further, as shown by the solid line in FIG. 6(b), when the detection end portion 12A is displaced in the horizontal direction, it is easy to cause a virtual defect (broken line) caused by the detection end portion 12A leaving the pattern P1 as the detection target portion B. The defective dummy (see the circle portion a in FIG. 6(b)) requires a high-precision device, so the manufacturing cost of the detecting jig using such a contact 11A is increased.

Further, as shown in Fig. 7, when the detecting end portion 12B is a partial spherical contact member 11B, as shown in Fig. 7(a), the detecting end portion 12B and the detecting target portion B of the object A are detected. Since the detection point C is in contact with each other, the load pressed by the elastic restoring force of the contact 11B is concentrated, so that the scratch formed on the detection point C becomes large. Further, as shown by the solid line in FIG. 7(b), when the detection end portion 12B is displaced in the horizontal direction, the detection end portion 12B is likely to come into contact with the pattern P2 adjacent to the pattern P1 as the detection target portion B. The resulting virtual defect (false report of poor insulation) (refer to the circled portion b in FIG. 7(b)) requires a highly accurate device, so the manufacturing cost of the detecting jig using such a contact 11B is increased.

On the other hand, in the case where the detecting end portion 12C is the flat contact member 11C, as shown in FIG. 8(a), the detection end portion 12C and the detection target portion B of the object A are detected. Since the point C is in contact with the surface, the load pressed by the elastic restoring force of the contact 11C is dispersed, so that the scratch formed on the detection point C can be reduced. Further, since the detection end portion 12C is in surface contact with the detection point C, it is difficult to cause a virtual defect (a false report of a disconnection failure) as shown in Fig. 6(b). Further, by reducing the diameter of the contact 11C and using the thinner contact 11C, as shown in FIG. 8(b), it is also possible to suppress the pattern adjacent to the pattern P1 as the detection target portion B by the detection end portion 12C. The occurrence of virtual defects (false reports of poor insulation) caused by P2 contact.

However, when a thinner contact member 11C is used, for example, with a contact having a diameter of 130 μm as a reference, when the diameter is 90 μm, the manufacturing cost becomes about 3 times, and when the diameter is 50 μm, the manufacturing cost is It becomes about 10 times, which causes a significant increase in manufacturing costs. In particular, since hundreds to thousands of contacts are used on the detecting jig, when the contact member as shown in FIG. 8 is used, the manufacturing cost and maintenance cost of the detecting jig including such a contact member are greatly increased. .

Then, the present invention has been made in view of the above problems, and it is an object of the invention to provide a virtual defect (a disconnection failure) which can reduce a scratch formed on a detection point of a detected object and can prevent a horizontal offset in the detection end portion. In addition, it is possible to suppress the occurrence of an increase in manufacturing cost, a detection contact having an increase in manufacturing cost, a detection jig having the above-described detection contact, and a method of manufacturing the detection contact. [Means for solving the problem]

In order to solve the above problem, the detecting contact according to the present invention is used in a detecting jig for electrically connecting a detecting point previously set on the detecting target portion of the object to be detected with the detecting device, at both ends. The wire-shaped detecting contact having a bendable elasticity at a detection end portion on the detection point side and an electrode end portion on the electrode portion side connected to the detection device, wherein the detection end is The shape of the portion is formed into a truncated cone shape whose radius is smaller as the radius of the detection point is smaller.

According to this configuration, since the shape of the detection end portion is in the shape of a truncated cone whose radius is smaller as the radius of the detection point is smaller, the detection end portion and the detection point surface are in contact with each other, so that the load pressed by the elastic restoring force of the detection contact member is dispersed. Thereby, the scratch formed on the detection point of the object to be detected can be reduced. In addition, since the shape of the detection end portion is in the shape of a truncated cone whose radius is smaller as the radius of the detection point is smaller, the detection end portion and the detection point surface are in contact with each other, so that occurrence of virtual failure (false report of disconnection failure) can be suppressed. In addition, since the shape of the detection end portion is a truncated cone shape in which the radius of the detection point is smaller, the area of the top surface of the detection end portion that is in contact with the detection point is reduced, so that the virtual failure (insulation failure) can be suppressed. The occurrence of false reports. Further, since the shape of the detecting end portion is a truncated cone shape in which the radius of the detecting point is smaller, the diameter of substantially all portions of the detecting contact member other than the detecting end portion is not like the top surface of the detecting end portion. Since the diameter is small and remains relatively large, it is possible to suppress an increase in manufacturing cost due to the reduction in diameter.

Here, it is preferable that the diameter of the top surface of the detection end portion that is in contact with the detection point is equal to or smaller than the distance between the pattern of the detection target portion and the adjacent pattern. According to this configuration, in a state where the detection end portion of the detecting contact member is in contact with the predetermined pattern, the adjacent pattern is not in contact with each other, so that occurrence of a virtual defect (false alarm of insulation failure) can be reliably suppressed.

Further, it is preferable that the diameter of the top surface is formed to be the same as the distance between the pattern of the detection target portion and the adjacent pattern. According to this configuration, it is possible to reliably suppress the occurrence of the virtual defect (false report of poor insulation), and it is possible to reduce the amount of processing for forming the shape of the detection end into a truncated cone shape (the amount of removal in polishing), so the processing time Shorten, which can reduce manufacturing costs.

Further, the diameter D of the intermediate portion other than the detection end portion and the electrode end portion is 100 μm or less, and the ratio d/D of the diameter d of the top surface of the detection end portion to the diameter D of the intermediate portion is preferably set to 0.1 to 0.5. In the range in which the above-described ratio d/D is set in such a range, it is preferable to form the detection end of the truncated cone-shaped detection end portion from a relatively thin wire having a diameter of 100 μm or less.

The detecting jig according to the present invention has the above-described detecting contact. According to the configuration of the detecting jig, the detecting jig having the detecting contact has the same operational effects as the detecting contact, and since a plurality of the detecting contacts are used, the detecting jig can be reduced. Manufacturing costs and maintenance costs.

In order to solve the above problem, the manufacturing method of the detecting contact according to the present invention is used in a detecting jig for electrically connecting a detecting point set in advance on the detecting target portion of the object to be detected with the detecting device. A method of manufacturing a wire-shaped detecting contact having a bendable elasticity at a detection end portion on the detection point side and an electrode end portion on the electrode portion side connected to the detection device, characterized in that the end portion has a detection end portion Including: an insulating film forming process for forming an insulating film on a wire having a desired thickness of bendable elasticity; and a cutting process for cutting the wire through the insulating film forming process to a desired length; The polishing program polishes a portion of the wire member that has passed through the cutting process as the detection end portion into a truncated cone shape that decreases toward the radius of the detection point, and removes the insulating film of the portion.

According to such a manufacturing method, the insulating film is formed by the insulating film forming process for the wire having the required thickness corresponding to the diameter of substantially all the portions other than the detecting end of the detecting contact, and is used only as the detecting end. The portion of the portion is polished into a truncated cone-shaped polishing process, and the insulating film of the above portion is also removed. Therefore, the manufacturing process is simplified, and the increase in manufacturing cost can be suppressed. [Effects of the Invention]

As described above, according to the detecting contact of the present invention, since the shape of the detecting end portion is a truncated cone shape whose radius is smaller as the radius of the detecting point is smaller, the following effects are obtained. (a) Since the detection end and the detection point are in surface contact, it is possible to reduce the scratch formed on the detection point of the object to be detected, and it is possible to suppress the occurrence of virtual defects (false reports of poor insulation); The area of the top surface of the detecting end portion in contact with the detecting point, so that the occurrence of virtual defects (false reporting of poor insulation) can be suppressed; (C) the diameters of substantially all portions of the detecting contact members other than the detecting end portion are still compared Since it is large, it is possible to suppress an increase in manufacturing cost due to the reduction in diameter. Moreover, the detection jig according to the present invention has the same operational effects as the above-described detection contact, and uses a plurality of the above-described detection contacts, so that the manufacturing cost and the maintenance cost of the detection jig can be reduced. Further, according to the method for producing a detecting contact according to the present invention, after the insulating film is formed on the wire material having the required thickness, only the portion as the detecting end portion is polished into a truncated cone shape to manufacture the detecting device according to the present invention. Since the contact member is provided, the manufacturing process is simplified, and the effect of increasing the manufacturing cost can be suppressed.

Hereinafter, embodiments of the present invention will be described based on the drawings. In the present specification, a view in which the detecting contact 1 is viewed from the front side is a front view in a state where the detecting end portion 2 is on the upper side and the electrode end portion 3 is on the lower side.

As shown in the schematic longitudinal cross-sectional front view of FIG. 1, the top view of FIG. 2, and the schematic longitudinal cross-sectional front view of FIG. 3, the detecting jig 4 using the detecting contacts 1, 1 ... according to the embodiment of the present invention is mounted on The detection device (not shown) that electrically detects the object A such as a printed wiring board or a semiconductor integrated circuit is used, and the electrode unit 9 and the detecting device are connected by a cable (not shown). Further, the detection end portion 2 of one end portion of the conductive contact 1 is in contact with the detection point C (see FIG. 5(a)), and the electrode end portion 3 at the other end portion is in contact with the electrode portion 9. According to this, the detection point C provided on the object A to be detected can be electrically connected to the detection device that detects the object A.

The detecting jig 4 has a frame 4A as a base, an electrode body 8 having electrode portions 9, 9, ..., contacts 1, 1, ..., a support block E, a biasing portion 10, and the like. Here, the support block E is composed of the detection side support 5 and the electrode side support body 6, and the connection members 7, 7, and ... which hold the detection side support body 5 and the electrode side support body 6 in parallel by a predetermined distance. The detecting side support 5 has detection detecting holes 5A, 5A, ... (see Fig. 2) for guiding the detecting end portions 2, 2, ... of the contacts 1, 1, ... to the detecting point C. Further, the electrode-side support body 6 also has an electrode guide hole (not shown) that guides the electrode end portions 3, 3, ... of the contacts 1, 1, ... to the electrode portions 9, 9, .

In the case of FIG. 1 showing the state at the time of non-detection, the object A is placed in contact with the opposing surface F of the support block E facing the object A as shown in FIG. 3 showing the state at the time of detection, and is utilized. When the test object A presses the support block E, the support block E (the detection side support body 5, the electrode side support body 6, and the connection members 7, 7, ...) opposes the biasing force of the biasing portions 10, 10, ... toward the electrode body 8 mobile. Along with this, since the electrode end portion 3 of the contact 1 is relatively pressed by the electrode 9 in the direction toward the detecting end portion 2, the detecting end portion 2 of the contact 1 protrudes from the opposing surface F. In addition, in FIG. 3, for the convenience of description, the state in which the detection end portion 2 of the contact 1 protrudes from the opposing surface F is shown.

By the action of such a force, the detection end portion 2 of the contact 1 abuts against the detection point C (see FIG. 5( a )) of the object A, and is prevented, so that the detection side support 5 and the electrode side support are The middle portion of the contact member 1 in an inclined posture between 6 is deflected (bent). According to this, with the elastic restoring force of the contact member 1 thus deformed, the detecting end portion 2 of the contact member 1 comes into contact with the detecting point C with a predetermined contact pressure, and the electrode end portion 3 of the contact member 1 has a predetermined contact pressure and electrode portion. Since the contact is made, the contact state of the end portion 2 with the detection point C and the contact state of the electrode end portion 3 with the electrode portion 9 are maintained. In this state, the current and voltage for measuring the electrical characteristics of the detection target portion B (refer to FIG. 5(a)) are supplied from the detecting device via the contact 1, and the detected electrical signal is detected from the detection target portion B. Device delivery.

Here, the contact 1 is formed of a tough metal or other electrical conductor such as tungsten (W), high speed steel (SKH), beryllium copper (BeCu), and is formed to have bendable elasticity (flexibility). Wire-like (rod-like). Further, as shown in the front view of FIG. 4(a), the contact member 1 has both end portions as the detecting end portion 2 and the electrode end portion 3, and the shape of the detecting end portion 2 is toward the front end side (closer to the detecting point C). The smaller the radius, the smaller the truncated cone shape. Further, the shape of the electrode end portion 3 is not limited to the flat shape as shown in Fig. 4(a), and may be other shapes such as a partial spherical shape.

The present invention is preferably applied to the diameter of the portion other than the detection end portion 2 shown in the enlarged front view of Fig. 4(b) (or the diameter of the intermediate portion other than the detection end portion 2 and the electrode end portion 3) D is 100 μm or less. Case. As shown in the enlarged front view of Fig. 4(b), the detecting end portion 2 of the contact 1 is composed of the top surface 2A and the inclined side surface 2B of the truncated cone. When the diameter D is, for example, 20 to 70 μm, the top is formed. The diameter d of the surface 2A is, for example, in the range of 5 to 30 μm. When the diameter D is 20 μm, the diameter d of the top surface 2A can be set to about 10 μm (in the above case, d/D ≒ 0.5). When the diameter D is 70 μm, the diameter d of the top surface 2A can be formed to be about 20 μm (in the above case, d/D ≒ 0.29). Here, the ratio (d/D) of the diameter d of the top surface 2A to the diameter D is 0.1 to 0.5, and the detection end portion 2 of the truncated cone shape is formed from a relatively thin wire having a diameter D of 100 μm or less. The above ratio is preferred in terms of processing accuracy. Further, when the axial length L of the side surface 2B is short, the d/D may be set to about 0.7 to 0.8. Further, in order to shorten the processing time of the polishing procedure described below, the axial length L of the side face 2B is preferably a short length within a possible range.

Further, the "slanted surface of the truncated cone" of the side surface 2B of the detecting end portion 2 is not limited to the inclined surface which is mainly regarded as a straight line as shown in FIG. 4(b), and may include a bevel which is mainly regarded as a curved shape. That is, as long as the top surface 2A is a flat surface and (the diameter d of the top surface 2A) < (the diameter D of the portion other than the end portion 2), the side surface 2B is as long as the outer circumference of the top surface 2A The surface of the portion of the diameter D on the side of the detection end portion 2 may be connected to each other.

In the production of the contact 1 , first, a wire having a desired thickness formed of the above-described material such as tungsten (W) is formed by a coating process using a coating film of a fluororesin (PTFE) or the like to form a wire (not shown). A thickness of insulating film is required. Then, the above-mentioned wire which has passed through the above-described insulating film forming procedure is cut into a desired length by a cutting program. Then, each of the wires that have passed through the cutting process is polished as a tip end portion of the detecting end portion 2 by a polishing program, whereby the insulating film is removed from the front end. The side (closer to the detection point) has a smaller truncated cone shape. Here, the polishing may be a process that can perform an operation of removing the insulating film and the surface of the wire, and may be a process including precision polishing, chemical processing (etching), electrolytic processing, or the like. According to the manufacturing method of the contact 1 described above, the insulating film is formed by the insulating film forming process for the wire having the required thickness corresponding to the diameter D of substantially all the portions other than the detecting end portion of the contact 1 , and then only By polishing the portion of the detecting end portion 2 into a truncated cone shape and removing the insulating film of the above portion, the manufacturing process is simplified, and the increase in manufacturing cost can be suppressed. Further, the insulating film may not be removed in the polishing process, and the insulating film as the tip end portion of the detecting end portion 2 may be removed in another program, and then polished by a polishing program to form the above-mentioned truncated cone-shaped detecting end. Department 2.

According to the contact member 1 described above, since the shape of the detecting end portion 2 is a truncated cone shape whose radius is smaller as the radius of the detecting point C is smaller, the detecting end portion 2 and the detecting portion are as shown in the enlarged front view of Fig. 5(a). Since the point C surface contacts, the load pressed by the elastic restoring force of the contact 1 is dispersed, so that the scratch formed on the detection point C of the object A can be reduced. Further, since the shape of the detecting end portion 2 is a truncated cone shape whose radius is smaller as the radius of the detecting point C is smaller, since the detecting end portion 2 is in surface contact with the detecting point C, it is possible to suppress the virtual defect (false report of the disconnection failure) )happened. Further, since the shape of the detecting end portion 2 is a truncated cone shape whose radius is smaller as it approaches the detecting point C, since the area of the top surface 2A of the detecting end portion 2 which is in contact with the detecting point C is reduced, it is possible to suppress the virtual Bad occurrence (false report of poor insulation).

Further, since the shape of the detecting end portion 2 is a truncated cone shape whose radius is smaller as the radius of the detecting point C is smaller, the diameter D of substantially all portions of the detecting contact member 1 other than the end portion 2 is detected (refer to FIG. 4(b). In the case where the diameter d of the top surface 2A of the detecting end portion 2 is as small as that of the detecting end portion 2, the manufacturing cost can be suppressed from increasing due to the reduction in diameter. Further, as shown in an enlarged front view of FIG. 5(b), the diameter d of the top surface 2A of the detecting end portion 2 of the contact 1 is formed as the distance between the pattern P1 of the detecting target portion B and the adjacent pattern P2. In the state in which the detection end portion 2 is in contact with the predetermined pattern P1, the adjacent end portion P2 is not in contact with the adjacent pattern P2. Therefore, it is possible to reliably suppress the occurrence of virtual defects (false alarms of insulation failure). Further, by forming the diameter d of the top surface 2A of the detecting end portion 2 of the contact 1 to be equal to the distance S between the pattern P1 of the detecting target portion B and the adjacent pattern P2 (d=S), it is possible to be reliable. The amount of processing for forming the shape of the detecting end portion 2 into a truncated cone shape (the amount of removal processing in the polishing) is reduced while suppressing the occurrence of the virtual defect (false report of the insulation failure), so that the processing time is shortened. Can reduce manufacturing costs. Further, the diameter d of the top surface 2A of the detecting end portion 2 may be formed to be substantially the same as the width of the pattern P1 of the detecting target portion B.

1‧‧‧Contacts for testing
2‧‧‧Detection end
2A‧‧‧ top surface
2B‧‧‧ side
3‧‧‧electrode end
4‧‧‧Detection fixture
4A‧‧‧Frame (base)
5‧‧‧Detecting side support
5A‧‧‧Detection guide hole
6‧‧‧electrode side support
7‧‧‧Connecting components
8‧‧‧Electrode body
9‧‧‧Electrode
10‧‧‧ biasing department
11A, 11B, 11C‧‧‧ Known contacts
12A, 12B, 12C‧‧‧ detection end
A‧‧‧Tested object
B‧‧‧Detection target department
C‧‧‧Checkpoint
d‧‧‧Detecting the diameter of the top surface of the end
D‧‧‧Detecting the diameter of the part outside the end
E‧‧‧Support block
F‧‧‧ facing
L‧‧‧Detecting the axial length of the side of the end
P1, P2‧‧‧ pattern
S‧‧‧Detecting the distance between the pattern of the target part and the adjacent pattern

1 is a schematic longitudinal cross-sectional front view showing an example of a detecting jig using a detecting contact according to an embodiment of the present invention, and shows a state at the time of non-detection. FIG. 2 is a plan view showing an example of a detecting jig using the detecting contact according to the embodiment of the present invention. 3 is a schematic longitudinal cross-sectional front view showing an example of a detecting jig using the detecting contact according to the embodiment of the present invention, and shows a state at the time of detection. 4 is a front view showing the detecting contact according to the embodiment of the present invention, wherein (a) is an overall view, and (b) is an enlarged view of the periphery of the detecting end. Fig. 5 is an enlarged front elevational view showing the vicinity of the detection end portion at the time of detection, wherein (a) shows a state in which the detection end portion is in contact with the detection point, and (b) shows a state in which the detection end portion is shifted in the horizontal direction. . Fig. 6 is an enlarged front elevational view showing the vicinity of a conical detecting end portion of a conventional detecting contact member at the time of detection, wherein (a) shows a state in which the conical detecting end portion is in contact with the detecting point, and (b) shows A state in which the conical detecting end portion is shifted in the horizontal direction. Fig. 7 is an enlarged front elevational view showing a portion around a spherical detecting end portion of a conventional detecting contact member at the time of detection, and (a) shows a state in which a partial spherical detecting end portion is in contact with a detecting point, (b) A state in which the partial spherical detecting end portion is shifted in the horizontal direction is shown. Fig. 8 is an enlarged front elevational view showing the vicinity of a flat detecting end portion of a conventional detecting contact member at the time of detection, wherein (a) shows a state in which the flat detecting end portion is in contact with the detecting point, and (b) shows A state in which the flat detecting end portion is shifted in the horizontal direction.

1‧‧‧Contacts for testing

2‧‧‧Detection end

2A‧‧‧ top surface

2B‧‧‧ side

A‧‧‧Tested object

B‧‧‧Detection target department

C‧‧‧Checkpoint

d‧‧‧Detecting the diameter of the top surface of the end

P1, P2‧‧‧ pattern

S‧‧‧Detecting the distance between the pattern of the target part and the adjacent pattern

Claims (6)

A detecting contact member, which is in the form of a wire, is used in a detecting jig for electrically connecting a detecting point previously set on a detecting target portion of a test object to a detecting device, at both ends of the detecting contact member The detecting portion has a detecting end portion on the side of the detecting point and an electrode end portion on the electrode portion side connected to the detecting device, and the detecting contact member has a bendable elasticity, and the shape of the detecting end portion is formed. It is a truncated cone shape whose radius is smaller as it approaches the detection point. The contact for detecting of the first aspect of the invention, wherein a diameter of a top surface of the detecting end portion in contact with the detecting point is formed to be equal to or less than a distance between a pattern of the detecting target portion and an adjacent pattern. The contact for detecting of the second aspect of the invention, wherein the diameter of the top surface is formed to be the same as the distance between the pattern of the detection target portion and the adjacent pattern. The contact for detecting according to any one of claims 1 to 3, wherein a diameter (D) of the detecting end portion and an intermediate portion other than the end portion of the electrode is 100 μm or less, and a top surface of the detecting end portion The ratio (d/D) of the diameter (d) to the diameter (D) of the intermediate portion is formed to be 0.1 to 0.5. A detecting jig having the detecting contact member according to any one of claims 1 to 3. A manufacturing method of a detecting contact member which is formed in a wire shape and used in a detecting jig for electrically connecting a detecting point set in advance on a detecting target portion of a test object to a detecting device, The detection end portion on the detection point side and the electrode end portion on the side of the electrode portion connected to the detection device are provided at both end portions of the detection contact member, and the detection contact member has bendable elasticity, and the detection is performed. The manufacturing method of the contact member is characterized by comprising: an insulating film forming program for forming an insulating film on a wire having a desired thickness having bendable elasticity; and a cutting process for forming the wire through the insulating film forming process Cutting into a desired length; and a polishing process of polishing the portion of the wire passing through the cutting process as the detecting end portion into a truncated cone shape having a smaller radius toward the detecting point, and removing the portion Insulating film.