TW201520365A - Support member and connector of heating member on CVD reactor - Google Patents

Abstract

An apparatus for heating a base (4) of a CVD reactor (1) comprises at least one heating elements (9, 19), wherein zones of the heating elements (9, 19) or the different heating elements (9, 19) are extended side by side and positioned relative to a support plate through the support members (10, 20), wherein the support members (10, 20) are respectively provided with legs (15,16,17; 25,26,27) having a shape engageable for insertion into in a fixed opening of the support plate (29), and a head portion (11,12,13; 21,22,23) connected with a shank portion (14, 24) extending transversely to the extension surface of the support plate (29); the heating elements (9,19) are fixed on the head portion (11,12,13; 21, 22,23). In order to improve the fixation of the support members and the connectors on the heating apparatus, it is recommended that the legs (15,16,17; 25,26,27) be fixed within the fixed opening (38) of the support plate (29) through the shape-engageable members (15,16,17; 25,26,27), so that the support members (10, 20) may be bound on the support plate (29) along the extension direction of the shank portion (14, 24) by the shape-engageable members (15,16,17; 25,26,27).

Description

Support member and connecting member on heating member of CVD reactor

The invention relates to a device, in particular for heating a susceptor of a CVD (Chemical Vapor Deposition) reactor, having at least one heating element, wherein a section of the heating element or a different heating element extends side by side and by means of a support Positioned relative to the support plate, wherein the support members respectively have legs that are form-fittingly and securely inserted into the fixed opening of the support plate, and wherein the handles are connected to the handle extending transversely to the extension surface of the support plate The head is fixed to the neck member.

The invention further relates to a device, in particular for heating a susceptor of a CVD reactor, having at least one heating element connected to at least one contact plate, the contact plate being positioned relative to the support plate by means of a connector.

The CVD reactor has a reactor housing with a processing chamber within the reactor housing. The reactor housing hermetically isolates the process chamber from the surrounding environment. The intake member is located within the reactor housing and the gaseous feedstock is introduced into the process chamber by the intake member. The substrate to be coated is placed on the susceptor. The susceptor constitutes the bottom plate of the processing chamber, and the gaseous material is input into the processing chamber. In order to deposit a layer on the substrate, the substrate surface must be heated to a processing temperature in the range of 1000 °C. This is achieved by a heating device placed under the susceptor. The intake member located a few centimeters above the base is often cooled, for example, by a coolant. As a result, a severe vertical temperature difference is produced within the process chamber which results in an increased heat release from the susceptor to the intake member. Therefore, in order to reach the processing temperature, heating is required. Input with a large thermal conductivity. The heating element of the heating device must heat the temperature to about 2000 °C. In addition, a large area of heating is required.

No. 7,645,342 B2 describes a heating device having a heating wire arranged around a central arc. The heating wire is connected to the support plate by a support member.

A heating element extending along a helix is described in DE 26 30 466 A1 or US Pat. No. 3,345,498. US 7,573,004 also shows a heating element extending on a circular arc. A corrugated shaped extension heating element is known from US Pat. No. 3,567,906.

For example, DE 10 2009 043 960 A1, DE 10 2007 009 145 A1, DE 103 29 107 A1, DE 10 2005 056 536 A1, DE 10 2006 018 515 A1 or DE 10 2007 027 704 A1 shows a heating CVD reactor The device of the pedestal.

The heating element of the device according to the invention is heated by switching on the current. Both ends of the respective heating members are connected to the contact plates. The heating element is disposed in at least one plane. However, it is also possible for the heating elements to be arranged in mutually parallel planes. The heating elements extend in a corresponding plane along a circular or spiral line. In particular, it is provided that the heating element is arranged in a spiral manner. This allows different heaters or different sections of the same heater to extend side by side. In order to fix the positions of the heaters extending side by side such that the components of the heating device do not come into contact even when heated or cooled, they are provided with a support member which places the heating elements in a plurality of positions. In particular, they are connected to the support plate at locations that are evenly spaced from each other. Furthermore, a connector is provided, and the one or more contact plates are connected to the support plate by means of a connector. The connector also has the function of preventing different contact plates from contacting each other when the heating device is heated and cooled.

The technical problem to be solved by the present invention is to improve the fixing of the support or the connecting member on the heating device.

The technical problem is solved by a device according to the invention, in particular for heating a susceptor of a CVD reactor.

First and at all, it is proposed that the support has a foot which is engageably and securely inserted into the fixed opening of the support plate. The support has a handle that extends transverse to the plane of extension of the support plate. There is a head on the end of the handle on which the heating element is attached. A shape engaging fixing member is provided, and the leg is fixed to the support plate by the shape engaging fixing member. The shape engagement fixture binds the support member to the support plate in the direction in which the handle extends. The support thus has a movement gap that is minimized, preferably reduced to zero, along the direction of extension of the handle. Here, a shape engagement fixing member that sandwiches the support plate from above and a shape engagement fixing member that clamps the support plate from below is provided. The shape engaging fixing member may be constituted by a holding projection or a fixing projection that protrudes from the handle portion transverse to the extending direction of the handle portion. Preferably, the at least one retaining projection is designed such that the retaining projection can pass through the fixed opening of the support plate. At least one of the fixing projections can be placed in the restraining position by the rotating and/or bending operation. For example, the above operation can be realized by rotating the support member by 90° after being inserted into the fixing opening. However, it is also possible to bend only at least one of the retaining projections so that the section of the retaining projection can be supported on the underside of the support plate. The fixing projection is placed on the upper side of the support plate. Preferably, two holding projections and two fixing projections are provided respectively. The two pairs of projections can be designed as tabs that project from the sides of the handle. A neck extends between the retaining projection and the fixing projection, the neck being located in the fixed opening in the fixed state of the support. The fixing projections and/or the retaining projections can also be supported on the insert. The insert can be an insulator. In this case, the support plate can be made of a metal material. In particular, the support plate can be composed of tungsten or molybdenum. But it can also be specified, the support plate Made of ceramic material. In particular, the support plate is insulated. At least the legs of the support can be designed as flat pieces. The fixed opening can be a long hole. The elongated hole may have a narrow bore segment having a width equal to the material thickness of the support or leg. The support member may be made of a metal flat member made of, for example, tungsten or molybdenum. This can be a stamped part. Furthermore, the fixed opening has a wide bore segment having a width equal to the width of the neck such that the neck can be rotated 90° inside the wider fixed bore section so that the laterally projecting retaining projection can be from below Hold the bottom side of the support plate. The head of the support may have at least one arcuately extending bearing surface. The side arms are laterally disposed on either side of the support surface. The bearing surface can be designed as a curved recess (Mulde). However, it can also be provided that the bearing surface consists of the edge of the opening which is closed at the periphery. The opening may have a circular cross section. The support surface preferably has a tooth pattern. The heating element abuts against the bearing surface in contact. The heating element can be a spirally wound heating wire. Preferably, there are two heating wires arranged side by side and designed as double helix. The heating wire designed as a heating element is fixed to the support by means of a fixing line. In order to fix the fixing line, the support and in particular the head of the support have at least one groove. However, it is also possible to provide a plurality of grooves in which the fixing wires are placed in a fixed state.

Furthermore, the invention relates to an improvement to the connector, the one or more contact plates being connected to the support plate by means of a connector. The contact plate is positioned by the connector. The contact plates arranged in two parallel planes can also be connected to each other by means of a connecting piece. Thereby, the connecting piece can also jointly connect the plates (ie the support plate and the two contact plates) arranged in three parallel planes to each other. Also provided here is a shape-engaging fastener that holds the sections of the connector in the opening of the support or the opening of the contact plate, respectively. The shape joint fixing member can also be fitted to the insulator inserted into the opening. This is especially advantageous when the support plate is made of metal or when the two contact plates are connected to each other. The shape engagement fixture is designed such that the shape engagement fixture will support the support plate or at least one contact The plate is bound to the connector along the direction of extension of the connector (i.e., transverse to the plane of extension of the contact plate or support plate). The connector is tied to the contact plate or support plate with minimal movement clearance in accordance with the present invention. In order to connect the two contact plates to each other, at least spacers are provided. In this case, the spacer can be a sleeve-shaped component which is passed through by the connecting piece. The shape engagement fixture may be a support protrusion that fits over the support plate or contact plate or on an insulator that is inserted into the opening. However, it can also be provided that the shape-bonding fastening element is embodied as a transverse opening of the connecting element into which the pin of the fastening element is inserted. The fastener can be a disc-shaped assembly that forms a securing pin that is inserted into the opening of the connector by a tab. In particular, the two ends of the connector each have a lateral opening into which the pin is inserted. The assembly of the connector is achieved by inserting or penetrating the opening. The opening has a sufficient opening size such that the support projections can pass therethrough. However, in order to be able to support the support, the support can be supported on the spacer. The gasket may have a slit such that the gasket can then be placed below the support projection. The insert (especially the insulator) can be divided into two components so that the insert can also be assembled through the opening after passing through the connector. In particular, the two-component form of the insulator has a section of smaller diameter which can be inserted into the opening of the contact plate. The larger diameter section of the insert is supported on the upper surface of the contact plate.

The aforementioned support member can be made not only from a conductive material. It is also provided that the support or the connection is made of a ceramic material or that the support or the connection has an insulating layer, for example coated with a layer thickness of 30 to 40 μm. That is, the insulated support/connector can be coated, or the conductive support/connector can be coated. An advantage of using an insulating support or connector is that the support plate can be made of a conductive material such as molybdenum and there is no need to provide an insulator in order to connect the contact plates.

It is also suggested that the support plate is made of metal and has a size of 30 to 40 μm. coating. In the coating of the aforementioned support plate, the support or the connecting member may be a tantalum carbide. The metal support or connector is preferably coated with a tantalum carbide coating because this protective layer prevents the support plate made of a ceramic material (such as boron nitride) from being made of metal (which can be composed of molybdenum). The reaction between the support or the connector.

1‧‧‧ CVD reactor

2‧‧‧Processing room

3‧‧‧Intake components

4‧‧‧Base

5‧‧‧ heating device

6‧‧‧heater

7‧‧‧heater

8‧‧‧heater

9‧‧‧ heating element

10‧‧‧Support

11‧‧‧ Arm

12‧‧‧ Arm

13‧‧‧ support surface

14‧‧‧ handle

15‧‧‧Support bulges

16‧‧‧ holding bulge

17‧‧‧ neck

18‧‧‧ Groove

18’‧‧‧ Groove

19‧‧‧ heating elements

20‧‧‧Support

21‧‧‧ Arm

22‧‧‧ Arm

23‧‧‧ recesses

24‧‧‧ handle

25‧‧‧Support bumps

26‧‧‧ holding bulge

27‧‧‧ neck

28‧‧‧ Groove

28’‧‧‧ Groove

29‧‧‧Support board

30‧‧‧Connecting parts

31‧‧‧Support bulges

32‧‧‧Flanking

33‧‧‧ lateral opening

34‧‧‧lateral opening

35‧‧‧Insulator

36‧‧‧Fixed parts

37‧‧‧ spacers

38‧‧‧Insert hole, fixing hole, fixed opening

38’‧‧‧Narrow section

38”‧‧‧ Wide section

39‧‧‧Contact plate

40‧‧‧Contact plate

41‧‧‧ openings

42‧‧‧ openings

43‧‧‧ openings

44‧‧‧ line

45‧‧‧Contact pin

46‧‧‧shims

47‧‧‧ Cover

Embodiments of the present invention will be described below with reference to the accompanying drawings. In the drawings: FIG. 1 shows a schematic structural view of a CVD reactor, FIG. 2 shows a side view of a multi-zone heater, FIG. 3 shows a plan view of a multi-zone heater, and FIG. 4 shows a section along a section line IV-IV. A cross-sectional view of the first embodiment of the support member, FIG. 5 is a perspective view showing the first support member inserted in the first stage of the insertion hole, and FIG. 6 is a view showing the first embodiment of fixing the insert member in the insertion hole according to FIG. FIG. 7 is a schematic view showing the support member 10 according to FIG. 5 bounded on the support plate 29 in a form-fitting manner, and FIG. 8 shows the fixing of the heating element 9 on the support member 10 by the fixing wire 44. 9 shows a second embodiment of the support 10, FIG. 10 shows a third embodiment of the support 10, FIG. 11 shows a fourth embodiment of the support 10, and FIG. 12 shows a fifth embodiment of the support 10. Figure 13 shows the fixing of the support in the view according to Figure 5, but with varying insertion holes 38, Figure 14 shows a sixth embodiment of the support member 10, Figure 15 shows a seventh embodiment of the support member in the view taken along the section line XV-XV of Figure 3, and Figure 16 shows the support member shown in Figure 15. 20 is a perspective view, FIG. 17 is a cross-sectional view taken along the line XVII-XVII of FIG. 3, FIG. 18 is a perspective view of the cross-sectional area of FIG. 17, and FIG. 19 is a view according to FIG. The spacer 37, the insulator 35 and the fixing member 36, Fig. 20 shows a cross-sectional view taken along the section line XX-XX of Fig. 17, and Fig. 21 shows a second embodiment of the connecting member 30.

Fig. 1 schematically shows a schematic structure of a CVD reactor. The CVD reactor has a housing that is outwardly airtight, such as stainless steel, into which a gas supply conduit, not shown, is engaged. The gas supply duct is engaged in the cavity of the intake member 3, and the intake member 3 has an exhaust surface which constitutes a covering surface of the processing chamber 2. The process gas flows into the process chamber 2 through an air outlet hole in the exhaust plate. The bottom plate of the processing chamber 2 is constituted by a susceptor 4 on which a substrate to be coated, for example, a ruthenium substrate, is placed, but it can also be a substrate composed of Group III and IV elements. The susceptor 4 made of graphite is heated from the bottom side by the heating device 5.

Figure 2 shows a side view of a heating device according to the invention. Figure 3 shows a top view thereof. The heating device 5 is composed of three heaters 6, 7, 8 which are separated from each other. The central heater 6 is central and constitutes a first heating zone. The first heating zone is surrounded by an annular heater 7 surrounding the central heater 6, which constitutes a second heating zone. The third heating zone is formed by a peripheral ring which forms the heater 8 on the outside. Each of the heaters 6, 7, 8 has heating elements 9, 19 arranged in a spiral curve. A plurality of heating elements are arranged one after the other on a spiral curve.

The heating elements of the heaters 6, 7, 8 are electrically connected in parallel. Each heating element 9, 19 is connected to the contact plates 39, 40 by a connection end. In the two inner heaters 6, 7, the two contact plates 39, 40 are placed in the same plane. In the outer heater 8, the contact plates 39, 40 are arranged on two different horizontal planes, that is to say in two mutually spaced planes. The energization of the contact plates 39, 40 or the heating elements 9, 19 is achieved by a downwardly projecting contact pin 45.

The heating elements 9, 19 are shown in Figures 2 to 7 as solid cylinders extending on a spiral curve for the sake of brevity. Figure 8 shows a detailed view of the heating element. Each of the heating elements 9, 19 is formed by a spirally wound heating wire. This wire is composed of tungsten. The heating element 9 shown in Figure 8 is made of a single and spirally wound tungsten wire. However, it is also possible to form the spiral coil from two or more heating wires. These heater wires extend side by side.

Figure 4 shows a first embodiment of the support member 10, with the heating element 9 (especially the heating spiral coil) being held at a defined distance from the support plate 29 by the support member 10. The support plate 29 is made of a non-thermally conductive material such as ceramic and extends over the entire surface of the load bearing heaters 6, 7, 8. The support plate of the center heater 6 has a disk shape. The support plates of the two outer heaters 7, 8 have a circular ring shape. The support plate 29 can also be assembled from a plurality of individual panels.

The support 10 has a head formed by two arms 11, 12 with an arcuate bearing surface 13 extending between the two arms. The support member 10 is made of a flat metal member such as a tungsten member or a molybdenum member. The bearing surface 13 has a tooth pattern which is produced by a groove which is machined in an arcuate bearing surface. The arc of the bearing surface 13 extends towards the spiral coil of the heating element 9 The curvature changes are consistent.

Hook-shaped recesses 18, 18' are provided in the head region. These grooves are provided for fixing the heating element 9 to the head of the support 10 by means of a fixing wire.

The support 10 has a handle 14 with one end extending into the head and the other end extending into the leg. The legs of the support member 10 are fixedly engaged with the support plate 29 in a form-fitting manner. A shaped joint fixing member is provided for this purpose. The shape engagement fixture includes two support projections 15 that face away from each other. The support protrusion 15 protrudes from the support member 10 transversely to the extending direction of the shank portion 14 for supporting itself on the upper side of the support plate 29. The end of the support 10 opposite the head is formed by two holding projections 16 facing away from each other. The retaining projections 16 are also tabs projecting from the support member 10 transversely to the direction of extension of the shank 14. A neck portion 17 is extended between the two holding projections 16 and the support projections 15, the length of the neck portion 17 being identical to the material thickness of the support plate 29, so that in the assembled state, the support plate 29 is held by the projections 16 from The lower end is clamped and clamped by the support projection 15 from the upper end.

It can also be seen from Figure 4 that the support plate 29 extends in a plane parallel to the cover plate 47 and the contact plate 40 placed under the cover plate.

5 to 7 show a first variant of the insertion hole 38 which is provided in the support plate 29 for restraining the support 10. A plurality of such insertion holes 38 are provided in the support plate 29, each of which is correspondingly assembled with a support member 10 such that the heating elements 9, 19 can be restrained on the support plate 29 at a plurality of circumferential positions.

The insertion hole 38 has a narrow section 38' and a wide section 38". The narrow section 38' has a slit width approximately equal to the material thickness of the legs of the support 10. The length of the insertion hole 38 is sufficiently sized such that The legs of the support member 10 together with the retaining projections 16 of the support member can be inserted through the insertion holes 38. This is illustrated in detail by Figure 5. If solid With the projection 16 inserted through the insertion hole 38, the support member 10 can be moved laterally into the position shown in Figure 6, where the neck 17 is located in the wider, circularly contoured region of the insertion aperture 38. Within the segment 38", the diameter of the wider circular section 38" is equal to the width of the neck 17, such that the neck 17 can be rotated within the aperture section 38" until it reaches the position shown in Figure 7, at which position The support protrusion 15 and the retaining projection 16 extend transversely to the extension of the narrow section of the insertion hole 38. The insertion hole 38 currently has the function of the fixing hole 38 because the insertion hole is fixedly positioned and transverse to the direction of extension of the shank 14. The support member 10 is tethered to the support plate 29. The rotational position of the support member 10 is fixed by the heating member 9 supported by the support member 10.

Figure 8 shows the restraining member in the form of a wire 44 by which the heating helical coil 9 is clamped on the head of the support member 10. The support 10 has two arms 11, 12 of different lengths. Furthermore, the shorter arm 12 is designed to be narrower than the longer arm 11. This reduced lateral extent allows the radial spacing of two adjacently extending heating elements 9 to be minimized.

In the embodiment shown in Figure 9, the bearing surface 13 is designed as an annular opening edge surface of a circular closed opening in the head of the support 10. Figure 9 also shows that the attachment of the additional shape engagement can be achieved by bending the support projections 15 and the retention projections 16 outwardly from the plane of extension of the support member 10.

Figure 10 shows a third embodiment of the support 10 in which the two arms 11 are designed to have the same length. The bearing surface 13 forms the bottom surface of the U-shaped opening, which is also formed here by ribs which are divided by the grooves.

Figure 11 shows a fourth embodiment of the support and Figure 12 shows a fifth embodiment of the support. Here, the support member is also formed by a planar assembly and is essentially distinguished from the aforementioned support member by the structural design of the short arm 12.

FIG. 13 shows a variant of the fixing opening or the insertion opening 38. In this case, the fastening opening 38 has two narrow sections 38 ′ which are opposite one another with respect to the wide section 38 ′. In this case, the support 10 can also be connected to the plug-in connection of the support plate 29 with the insertion opening 38 . However, here, no lateral displacement is required after the support 10 is inserted.

Figure 14 shows a sixth embodiment of the support member in which the retaining projection 16 is formed by a spring arm which can be resiliently clamped in the support position after the foot of the support member 10 is inserted. In this embodiment, the support plate 29 is made of metal. An insulator 35 is placed in the insertion hole 38. The insulators 35 each have a flange that abuts against the upper or bottom side of the support plate 29. A support protrusion 15 or a holding protrusion 16 is supported on the flange. The support 10 made of metal is thus insulated from the support plate 29.

Figure 15 shows a seventh embodiment of the support member 20 and a connector member 30 in the background, the support plate 29 being connected to the two contact plates 39, 40 by means of a connector member 30. The support members shown in Figs. 1 to 14 are assigned to the inner heaters 6, 7, while the support members 20 shown in Fig. 15 are assigned to the outer heaters 8. The heating element 19 is here also shown as a cylinder. However, the actual structural design of the heating element is consistent with that shown in FIG. The heating element can be a spirally wound tungsten wire. Here, the spiral coil can also be composed of a tungsten wire or a plurality of heating wires extending parallel to each other. The support 20 here supports a total of five heating elements 19 . The heating elements 19 can be in contact with each other. The heating elements 19 are situated in different, mutually spaced planes which extend parallel to the plane of the support plate 29. Thereby, the head of the support 20 is designed as a plurality of recesses 23 arranged one above the other to accommodate the heating element 19. In this case, the fixing of the heating element 19 in the recess 23 can also be effected by means of a fastening line. In order to tie the fixing line, the support 20 has a recess 28.

The legs of the support member 20 are here also fixed in the holes 38 of the support plate 29, which can be structurally designed in accordance with the above embodiments. From the handle 24 of the support member 20 A support protrusion 25 and a holding protrusion 26 are protruded from above. The support protrusions 25 coincide with the support protrusions 15 in the foregoing embodiment. The retaining projections 26 conform to the retaining projections 16 of the previous embodiment, so that the attachment of the legs of the support member 20 within the insertion aperture 38 can be implemented with reference to the above-described related design. This fixing is also achieved here by a plug-and-turn operation.

17 to 20 show a first embodiment of a connector 30 by which the support plate 29 is connected to the contact plate 39 or 40. A plurality of connecting members 30 extending at mutually different positions on the base surface of the heater 8 are provided. The outer heater 8 has contact plates 39, 40 disposed on two different planes. In order to maintain a constant spacing of the two contact plates 39, 40, a spacer 37 in the shape of a sleeve and made of a ceramic material is provided. Within the cavity of the sleeve-shaped spacer 37, a connector 30 is correspondingly extended. The binding of the connector 30 to the two contact plates 39, 40 is achieved by a form-fitting fastener. Two support projections 31 pointing away from each other are supported on an insulator 35 which is partially inserted into the opening 42 of the contact plate 39 on the side opposite the spacer 37. The insulator 35 can be composed of two halves which are complementary to a cylinder. The support projection 31 can be supported on a spacer 46 that is not embossed laterally on the connector 30 or inserted through the opening 42.

The axial length of the sleeve-like spacer 37 defines the spacing of the two contact plates 39,40. The end edge of the spacer 37 is supported on the upper side of the lower contact plate 40. The upper end edge of the spacer 37 supports the upper contact plate 39.

Two side flaps 32 project from the section of the connector 30 placed in the cavity of the spacer 37, the wings 32 centering the spacers in a concentric position relative to the opening 42.

The end section of the connector 30 passes through the opening 43 of the lower contact plate 40. An insulator 35 is inserted into the opening 43 of the contact plate 40. Here, the insulator 35 is partially It protrudes from the opening side opposed to the spacer 37. On the end side of the insulator 35, a spacer 46 is placed, on which the fixing member 36 is supported. The fastening element 36 has a tongue designed as a pin which passes through the transverse opening 34 of the connection piece 30. The connecting member 30 is axially bound to the two contact plates 40 by the supporting projection 31 and the fixing member 36.

The support plate 29 extends away from the upper contact plate 39. The support plate 29 has an opening 41 through which an end section of the connector 30 passes. In the bottom side region of the support plate 29, there is a support projection 31 of the connecting member 30, on which the support plate 29 is supported with a spacer interposed therebetween.

The end of the connecting member 30 projecting from the upper side of the support plate 29 is bound to the support plate 29 by a fixing member 36. The fixing member 36 constitutes a tongue which passes through the lateral opening 33 of the connecting member 30. A spacer 46 is provided between the upper side of the support plate 29 and the fixing member 36.

The stable fixing of the fixing member 36 is achieved by bending the end of the tongue inserted into the opening 33 or 34.

Figure 21 shows a cross-sectional view of the connector 30 for the two inside heaters 6, 7. Since the two contact plates 39, 40 extend in one plane in this embodiment, the connecting member 30 is provided in order to connect the contact plate 40 with the support plate 29. In this case, the underside of the support plate 29 is also supported on the support projection 31, wherein a spacer 46 is also provided here. The fastening of the connecting piece 30 to the upper side of the support plate 29 is also effected by the tongue of the fastening element 36 which passes through the transverse opening of the connecting element 30.

The downwardly directed support projections are supported on a spacer 46 which is placed on an insulator 35 which is embedded in the opening of the cover plate 47. The insulator 35 inserted into the opening of the cover also functions as a spacer because the insulator 35 maintains the cover 47 at a certain distance from the contact plate 40. Another insulator 35 is inserted into the contact plate 40 from the bottom side In the opening, the other insulator is fixed by the fixing member 36. Here, the tongue of the fastening element 36 also passes through the lateral opening of the connector 30.

The foregoing embodiments are used to describe the invention contained in the present application as a whole, which is independently and independently improved with respect to the prior art by the following combination of technical features, and the features include:

A device, characterized in that the legs 15, 16, 17; 25, 26, 27 are fixed in a fixed opening 38 of the support plate 29 by means of a form-fitting fastener 15, 16, 17, 27, the shape The joint fixing members 15, 16, 17; 25, 26, 27 bind the support members 10, 20 to the support plate 29 in the extending direction of the shanks 14, 24.

A device, characterized in that the shape-engaging fixing members 15, 16, 17; 25, 26, 27 have at least one holding projection 16, 26 extending transversely to the extending direction of the shanks 14, 24, in the mounting support 10, At 20 o'clock, the retaining projections 16, 26 can pass through the fixed opening 38 and engage the insertion plate 29 or the insertion into the fixed opening 38 from the lower end after the rotational support 10, 20 and/or the retaining projections 16, 26 are deformed. The member 35 and the shape-engaging fasteners 15, 16, 17; 25, 26, 27 also have at least one fixing projection 15, 25 extending transversely to the direction in which the shanks 14, 24 extend.

A device characterized in that the insert 35 is an insulator and the support plate 29 is made of metal.

A device, characterized in that the legs 15, 16, 17; 25, 26, 27 are at least designed as planar components, and the fixed opening 38 is at least designed as a long hole having a narrow section 38' and a wide area Segment 38", the width of the narrow section 38' is substantially equal to the material thickness of the retaining projection 16, which is substantially equal to the neck 17 extending between the support projection 15 and the retaining projection 16. width.

A device characterized by heads 11, 12, 13; 21, 22, The bearing elements 13 , 23 , which are formed by the heating elements of the spirally wound heating lines 9 , 23 , abut on the bearing surfaces 13 , 23 , wherein the bearing surface 13 is embodied as a recess. The pocket 23 or the annular closed bore and in particular has a flank surface that abuts against the heating elements 9, 19.

A device, characterized in that the support members 10, 20 have at least one recess 18, 18', 28, 28', the line 44 being disposed in the recess 18, 18', 28, 28', the heating elements 9, 19 borrowing It is fixed to the support members 10, 20 by grooves 18, 18', 28, 28'.

A device, characterized in that the support members 10, 20 are made of a flat metal component, in particular of tungsten or molybdenum, and are in particular designed as stampings.

A device characterized in that the connecting members 30 are respectively inserted into the openings 41 of the support plate 29 and into the openings 42, 43 of the contact plates 39, 40, and are here fixed by the shape-fitting fixing members 31, 32, 34, 36. .

A device characterized in that the shape-engaging fasteners 32, 34, 36 are fixed to the insulator 35 inserted into the openings 42, 43.

A device, characterized in that at least one contact plate 39, 40, a support plate 29 and at least one heating element 9, 19 extend in three planes extending parallel to each other, and the support plate 29 supports the support members 10, 20, at least A heating element 9, 19 is positioned relative to the support plate 29 by the supports 10, 20.

A device, characterized in that the connecting piece 30 interconnects two contact plates 39, 40 which are arranged at a distance from each other in a parallel plane, wherein in particular the connecting piece 30 passes through a spacer 37 made of an insulating material.

A device characterized in that the connecting member 30 is a flat body composed of metal (especially tungsten or molybdenum), and the shape engaging members 31, 32 are designed as projections, the convex Supported on the surface of the support member 29 or the contact plates 39, 40 or on the insert 35 inserted into one of the openings 41, 42, 43 and/or the form-fitting fastener by the lateral openings 33, 34 of the connector 30 and The pin of the fixing member 36 inserted therein is constituted.

All of the disclosed features (as such and in combination with each other) have inventive or inventive value. In the publication of the present application, the disclosure of the attached/affiliated priority document (prior application document) is also fully included, and the features in the priority document are also included in the patent application scope of the present application. . The features of the patent application scope are all improved designs with independent invention significance or value for the prior art, and in particular, the divisional application can be filed on the basis of the subsidiary items of the patent application scope.

9‧‧‧ heating element

10‧‧‧Support

11‧‧‧ Arm

12‧‧‧ Arm

13‧‧‧ support surface

14‧‧‧ handle

15‧‧‧Support bulges

16‧‧‧ holding bulge

17‧‧‧ neck

18‧‧‧ Groove

18’‧‧‧ Groove

29‧‧‧Support board

38‧‧‧Insert hole, fixing hole, fixed opening

40‧‧‧Contact plate

47‧‧‧ Cover

Claims (13)

A device, in particular for heating a susceptor (4) of a CVD reactor (1), having at least one heating element (9, 19), wherein a section of the heating element (9, 19) or a different heating element ( 9, 19) extending side by side and being positioned relative to the support plate by the support members (10, 20), wherein the support members (10, 20) respectively have a shape-fittingly and securely inserted into the support plate (29) a leg (15, 16, 17; 25, 26, 27) in the opening and a head (11, 12) connected to the handle (14, 24) extending transversely to the extended surface of the support plate (29) 13; 21, 22, 23), the heating element (9, 19) is fixed on the head (11, 12, 13; 21, 22, 23), characterized in that: the leg (15, 16, 17) ; 25, 26, 27) is fixed in the fixing opening (38) of the support plate (29) by a shape joint fixing member (15, 16, 17, 25, 26, 27), the shape engaging the fixing member (15, 16, 17; 25, 26, 27) The support member (10, 20) is bound to the support plate (29) along the extending direction of the handle (14, 24). The device of claim 1, wherein the shape joint fixing member (15, 16, 17; 25, 26, 27) has at least one holding convex extending transversely to the extending direction of the shank (14, 24) Starting (16, 26), the retaining projections (16, 26) can pass through the fixing opening (38) and rotate the support member (10, 20) and/or when the support member (10, 20) is mounted. Or the retaining protrusion (16, 26) is deformed to clamp the support plate (29) or the insert (35) inserted into the fixed opening (38) from the lower end, and the shape engages the fixing member (15, 16, 17) ; 25, 26, 27) also has at least one fixing projection (15, 25) extending transversely to the extending direction of the shank (14, 24). The device of claim 2, wherein the insert (35) is an insulator and the support plate (29) is made of metal. The device of claim 2, wherein at least the leg (15, 16, 17; 25, 26, 27) is designed as a planar component, and at least the fixed opening (38) is designed as a long hole having a narrow section (38') and a wide section (38"), which is narrow The width of the segment (38') is substantially equal to the material thickness of the retention projection (16), the wide segment (38") being substantially equal to between the support projection (15) and the retention projection (16) Extend the width of the neck (17). The device of claim 1 wherein the head (11, 12, 13; 21, 22, 23) has at least one arcuate running bearing surface (13, 23), in particular a spirally wound heating wire. The heating element (9, 19) is formed on the bearing surface (13, 23), wherein it is provided in particular that the bearing surface (13) is embodied as a recess (23) or an annular closed bore and/or has Abut against the scalloped surface on the heating element (9, 19). The device of claim 1, wherein the support member (10, 20) has at least one groove (18, 18', 28, 28'), and the wire (44) is disposed in the groove (18, 18) Within ', 28, 28'), the heating element (9, 19) is secured to the support (10, 20) by the wire (44). The device according to claim 1 , wherein in particular the support ( 10 , 20 ) is made of a flat metal component made of tungsten or molybdenum and is in particular designed as a stamped part. A device, in particular for heating a susceptor (4) of a CVD reactor (1), having at least one heating element (9, 19), which is associated with at least one contact plate (39, 40) Connecting, the contact plate (39, 40) is positioned relative to the support plate (29) by the connecting member (30), characterized in that the connecting member (30) is respectively inserted into the opening (41) of the supporting plate (29) The openings (42, 43) of the contact plates (39, 40) are neutralized and fixed here by shape-fitting fasteners (31, 32, 34, 36). The device of claim 8, wherein the shape is joined to the fixing member (32, 34, 36) is fixed in the insulator (35) inserted into the opening (42, 43). The device of claim 8, wherein the at least one contact plate (39, 40), the support plate (29) and the at least one heating element (9, 19) extend in three planes extending parallel to each other And the support plate (29) supports the support members (10, 20), the at least one heating element (9, 19) being positioned relative to the support plate (29) by the support members (10, 20). The device of claim 8 wherein the connector (30) interconnects two contact plates (39, 40) spaced apart from each other in a parallel plane, wherein the connector (30) passes in particular A spacer (37) made of an insulating material. The device of claim 8, wherein the connecting member (30) is in particular a flat body of metal composed of tungsten or molybdenum, and the shape engaging member (31, 32) is designed as a projection which supports the projection On the surface of the support plate (29) or the contact plate (39, 40) or on the insert (35) inserted into one of the openings (41, 42, 43), and/or the shape engagement fastener is The lateral opening (33, 34) of the connector (30) and the pin of the fixing member (36) inserted therein are formed. A device characterized by one or more of any of the preceding claims.