CN202144514U - Heater positioning and adjusting device - Google Patents
Heater positioning and adjusting device Download PDFInfo
- Publication number
- CN202144514U CN202144514U CN201120233208U CN201120233208U CN202144514U CN 202144514 U CN202144514 U CN 202144514U CN 201120233208 U CN201120233208 U CN 201120233208U CN 201120233208 U CN201120233208 U CN 201120233208U CN 202144514 U CN202144514 U CN 202144514U
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- well heater
- cavity
- eyeglass
- adjustment device
- heater
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Abstract
The utility model discloses a heater positioning and adjusting device which is used for adjusting the position of a heater in a cavity; a cavity cover is arranged on the cavity; the heater comprises a heating disc which is horizontally arranged and a support rod which is vertically arranged; the upper end of the support rod is fixedly connected with the bottom center of the heating disc; the lower end of the support rod penetrates through a baseboard of the cavity to form a downward extension section; the heater positioning and adjusting device comprises an alignment mechanism and an adjusting and positioning device; the alignment mechanism comprises an observation mirror and a heater cover which is provided with a center mark at the top center; the observation mirror is arranged at a center through hole of the cavity cover; an alignment mark is arranged at the center of the observation mirror; and the adjusting and positioning mechanism is arranged at the periphery of the extension section. In the utility model, alignment is carried out through the center mark on the heater cover and the alignment mark of the observation mirror at the center of the cavity cover, so that the heater is arranged at the center of the cavity all the time, the evenness of thin films deposited on the surfaces of wafers are increased, and the product yield is improved.
Description
Technical field
The utility model relates to a kind of well heater positioning adjustment device.
Background technology
Chemical vapour deposition (Chemical Vapor Deposition, be called for short CVD) is a kind of chemical technology that is used for producing purity height, solid-state material that performance is good.Semiconductor industry is used this technology to go up at wafer (substrate) and is formed film.Typical C VD processing procedure be with Wafer exposure under one or more different reactive gas, through the atom of reactant gases, intermolecular chemical reaction, make that some composition in the reactant gases decomposes, and on matrix, form film.
As shown in Figure 1, existing process cavity of carrying out the CVD processing procedure comprises well heater 110, cavity 120 and cavity lid 130, and said cavity lid 130 is arranged on the top of said cavity 120, and said cavity lid 130 and said cavity 120 are formed the process cavity of a sealing.Said well heater 110 comprises horizontally disposed heating plate 111 and the support bar 112 that vertically is provided with; The upper end of said support bar 112 is fixedly connected on the bottom centre place of said heating plate 111, and the lower end of said support bar 112 is passed through the base plate 121 of said cavity 120 and formed downward extension.It is fixing that the bottom of said support bar 112 is that screw 140 is passed through in the extension.In use, well heater 110 needs regularly from process cavity, to take out to safeguard, and also need change after well heater 110 damages.But after each the installation; Depart from center frequent and cavity 120, the center of the heating plate 111 of well heater 110; Make the position relation that is fixed in intravital nozzle in chamber (not shown) and heating plate 111 squint; So that nozzle can not be sprayed onto reactant gases equably and be positioned on the heating plate 111, and the uneven film thickness that causes the wafer on the heating plate to form is even, influences the product yield.
Therefore, how to provide a kind of and can realize that it is the technical problem that those skilled in the art need to be resolved hurrily that localized well heater positioning adjustment device is calibrated at the center of well heater and cavity center.
The utility model content
The purpose of the utility model is to provide a kind of well heater positioning adjustment device; Can calibrate through the centre mark on the cover of heater and the alignment mark of the sight glass that is arranged at cavity lid center; Realization is adjusted the position of well heater; Make well heater be installed in the centre of cavity all the time, guarantee technology stability.
In order to reach above-mentioned purpose, the utility model adopts following technical scheme:
This well heater positioning adjustment device; Be used to adjust the position that is positioned at the intravital well heater in chamber; Said cavity is provided with the cavity lid; Said well heater comprises horizontally disposed heating plate and the support bar that vertically is provided with, and the upper end of said support bar is fixedly connected on the bottom centre place of said heating plate, and the lower end of said support bar is passed through the base plate of said cavity and formed downward extension; Said well heater positioning adjustment device comprises aligning guide and adjustment orientation mechanism; Said aligning guide comprises that sight glass and top center place are provided with the cover of heater of centre mark, and said sight glass is arranged on the central through hole place of said cavity lid, and the centre of said sight glass is provided with alignment mark; Said adjustment orientation mechanism is arranged on the periphery of said extension.
Preferable, in above-mentioned well heater positioning adjustment device, said sight glass comprises mirror holder and eyeglass, and said eyeglass is installed in the said mirror holder, and said alignment mark is arranged at the centre of said eyeglass.
Preferable; In above-mentioned well heater positioning adjustment device; Said sight glass comprises mirror holder, goes up eyeglass and following eyeglass, and said upward eyeglass and following eyeglass are separately positioned on the upper/lower terminal of said mirror holder, and said alignment mark is arranged at the said centre of eyeglass down.
Preferable, in above-mentioned well heater positioning adjustment device, also comprise enlarging lens, said enlarging lens is arranged in the said mirror holder, and said enlarging lens is on said between eyeglass and the following eyeglass.
Preferable, in above-mentioned well heater positioning adjustment device, said adjustment orientation mechanism is a screw adjustment orientation mechanism.
Preferable; In above-mentioned well heater positioning adjustment device; Said screw adjustment orientation mechanism comprises supporting sleeve and some screws, and the upper end of said supporting sleeve is fixedly connected with the base plate of said cavity, and said extension is arranged in the said supporting sleeve; Said supporting sleeve is along circumferentially all establishing some through holes, and said some screw correspondences are arranged in said some through holes.
The beneficial effect of the utility model is following:
The utility model well heater positioning adjustment device, through on well heater, setting up cover of heater, and the top center position of said cover of heater is provided with centre mark; And the central through hole place through at the cavity lid is provided with sight glass; The center of said sight glass is provided with alignment mark, makes operator in the installing and locating process of well heater, on one side can observe on the cover of heater centre mark whether with sight glass in alignment mark center (center that is equivalent to cavity) overlap; Can mediate to the position of the support bar of well heater through the adjustment orientation mechanism on one side; Overlap the back until the center of two marks and the position of the support bar of well heater is fixed, thereby fixing to well heater so makes through the adjustment orientation mechanism; The central position of the well heater after each the installation overlaps with the central position that cavity covers all the time; Guarantee each stable process conditions property, can improve the homogeneity of the sedimentary film of crystal column surface, and then improve the product yield.
In addition, the utility model can amplify the influence of alignment mark and centre mark through in sight glass, setting up enlarging lens, so that operator's observation, thereby can improve alignment precision and aim at efficient.
Description of drawings
The well heater positioning adjustment device of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation in existing processes chamber;
Fig. 2 is the structural representation of embodiment with well heater positioning adjustment device of the utility model;
Fig. 3 is the structural representation of the sight glass of present embodiment.
Embodiment
Below will do further to describe in detail to the well heater positioning adjustment device of the utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented the preferred embodiment of the utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the advantageous effects of the utility model.Therefore, following description is appreciated that extensively knowing to those skilled in the art, and not as the restriction to the utility model.
For clear, whole characteristics of practical embodiments are not described.In following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize pioneer's specific objective.In addition, will be understood that this development possibly be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose, the characteristic that make the utility model is more obviously understandable, be further described below in conjunction with the embodiment of accompanying drawing to the utility model.What need explanation is, accompanying drawing all adopts the form of simplifying very much and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 2, Fig. 2 is the structural representation of embodiment with well heater positioning adjustment device of the utility model.This well heater positioning adjustment device is used to adjust well heater 210 positions that are positioned at cavity 220, and said cavity 220 is provided with cavity lid 230.Said cavity 220 is the chambers that made progress by the opening that base plate 221 and perisporium surround.Said well heater 210 comprises horizontally disposed heating plate 211 and the support bar 212 that vertically is provided with; The upper end of said support bar 212 is fixedly connected on the bottom centre place of said heating plate 211, and the lower end of said support bar 212 is passed through the base plate 221 of said cavity 220 and formed downward extension.
Said well heater positioning adjustment device comprises aligning guide and adjustment orientation mechanism; Said aligning guide comprises that sight glass 240 and top center place are provided with the cover of heater 250 of centre mark; Said sight glass is arranged on the central through hole place of said cavity lid 230, and the centre of said sight glass 240 is provided with alignment mark; Said adjustment orientation mechanism is arranged on the periphery of said extension.In position fixing process to well heater 210; Operator can observe on one side on the cover of heater 250 centre mark whether with sight glass 240 in the alignment mark center overlap; Can mediate to the position of the support bar 212 of well heater 210 on one side, after making the center of two marks overlap, well heater 210 fixed through the adjustment orientation mechanism.Thereby the central position of the well heater 210 after feasible each the installation is covered 230 central position coincidence all the time with cavity, guarantee each stable process conditions, the homogeneity of the sedimentary film of raising crystal column surface, and then improve yield.
See also Fig. 3, Fig. 3 is the structural representation of the sight glass 240 of present embodiment.In the present embodiment; Said sight glass 240 comprises mirror holder 241, goes up eyeglass 242 and following eyeglass 243; Said upward eyeglass 242 and following eyeglass 243 are separately positioned on the upper/lower terminal of said mirror holder 241, and said alignment mark is arranged at the said centre of eyeglass 243 down.
Preferably, said well heater positioning adjustment device also comprises enlarging lens 244, and said enlarging lens 244 is arranged in the said mirror holder 241, and said enlarging lens is on said between eyeglass 242 and the following eyeglass 243.Through setting up enlarging lens 244, can amplify the influence of alignment mark and centre mark, so that operator's observation, thereby can improve alignment precision and aim at efficient.Certainly, said sight glass also can only comprise mirror holder and eyeglass, and said eyeglass is installed in the said mirror holder, and said alignment mark is arranged at the centre of said eyeglass.This structure is simple relatively, and cost is lower.
In the present embodiment, said adjustment orientation mechanism is a screw adjustment orientation mechanism, and said screw adjustment orientation mechanism is not only simple in structure, and adjusts easy.Said screw adjustment orientation mechanism can adopt following structure: said screw adjustment orientation mechanism comprises some screws 260 and supporting sleeve 270; The upper end of said supporting sleeve 270 is fixedly connected with the base plate 221 of said cavity 220; Said extension is arranged in the said supporting sleeve 270; Said supporting sleeve 270 is circumferentially all established some through holes along it, and said some screw 260 correspondences are arranged in said some through holes.Certainly, said adjustment orientation mechanism also can adopt other common adjustment structures, does not give unnecessary details one by one at this.
The method of use of the utility model well heater positioning adjustment device is following, please continue to consult Fig. 2 and Fig. 3:
When needs carry out regular maintenance with well heater 210 or need to change well heater 210, at first to open cavity lid 230, turn on the screw 260 in the screw adjustment fixed mechanism simultaneously, thereby well heater 210 is taken out in cavity 220.By the time after maintenance service is accomplished or got new well heater 210, just begin to carry out the installation and the alignment work of well heater 210.
Concrete installing and aligning work comprises the steps:
At first, open cavity lid, well heater 210 is moved in the said cavity 220, make the lower end of support bar 212 of well heater 210 behind the base plate 221 of cavity 220, penetrate in the said supporting sleeve 270;
Then, cover of heater 250 is installed on the heating plate 211 of said well heater 210;
Then, cavity lid 230 is installed on the said cavity 220;
Then, sight glass 240 is installed in the central through hole place of said cavity lid 230;
Then; Check the position relation between the centre mark at top center place of alignment mark and said cover of heater 250 through sight glass 240; Through screw adjustment fixed mechanism, adjust the position of the support bar 212 of said well heater 210, overlap up to the alignment mark of said sight glass 240 and the centre mark of said cover of heater 250; Thereby said well heater 210 is accomplished positioned centrally work.
Then, promptly the support bar 212 of said well heater 210 is fixed on the desired position through screw adjustment fixed mechanism through tightening screw 260;
At last, open said cavity lid 230 once more, after pulling down said cover of heater 250, cover cavity lid 230 again, at this moment, this process cavity can be carried out the wafer procedure for processing, as carries out chemical vapor deposition process.
In sum, the utility model well heater positioning adjustment device is through setting up cover of heater on well heater; And the top center position of said cover of heater is provided with centre mark, and through the central through hole place at the cavity lid sight glass is set, and the center of said sight glass is provided with alignment mark; Make operator in the installing and locating process of well heater; Can observe on one side on the cover of heater centre mark whether with sight glass in alignment mark center (center that is equivalent to cavity) overlap, on one side can mediate to the position of the support bar of well heater through the adjustment orientation mechanism, overlap the back until the center of two marks and the position of the support bar of well heater fixed through the adjustment orientation mechanism; Thereby to fixing of well heater; Make that so the central position of the well heater after each the installation overlaps with the central position that cavity covers all the time, guarantees each stable process conditions property; Can improve the homogeneity of the sedimentary film of crystal column surface, and then effectively improve the product yield.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the utility model claim and the equivalent technologies scope thereof if these of the utility model are revised with modification, then the utility model also comprises these changes and modification interior.
Claims (6)
1. well heater positioning adjustment device; Be used to adjust the position that is positioned at the intravital well heater in chamber, said cavity is provided with the cavity lid, and said well heater comprises horizontally disposed heating plate and the support bar that vertically is provided with; The upper end of said support bar is fixedly connected on the bottom centre place of said heating plate; The lower end of said support bar is passed through the base plate of said cavity and is formed downward extension, it is characterized in that, said well heater positioning adjustment device comprises aligning guide and adjustment orientation mechanism; Said aligning guide comprises that sight glass and top center place are provided with the cover of heater of centre mark, and said sight glass is arranged on the central through hole place of said cavity lid, and the centre of said sight glass is provided with alignment mark; Said adjustment orientation mechanism is arranged on the periphery of said extension.
2. well heater positioning adjustment device according to claim 1 is characterized in that said sight glass comprises mirror holder and eyeglass, and said eyeglass is installed in the said mirror holder, and said alignment mark is arranged at the centre of said eyeglass.
3. well heater positioning adjustment device according to claim 1; It is characterized in that; Said sight glass comprises mirror holder, goes up eyeglass and following eyeglass, and said upward eyeglass and following eyeglass are separately positioned on the upper/lower terminal of said mirror holder, and said alignment mark is arranged at the said centre of eyeglass down.
4. well heater positioning adjustment device according to claim 3 is characterized in that, also comprises enlarging lens, and said enlarging lens is arranged in the said mirror holder, and said enlarging lens is on said between eyeglass and the following eyeglass.
5. according to any described well heater positioning adjustment device among the claim 1-4, it is characterized in that said adjustment orientation mechanism is a screw adjustment orientation mechanism.
6. well heater positioning adjustment device according to claim 5; It is characterized in that; Said screw adjustment orientation mechanism comprises supporting sleeve and some screws, and the upper end of said supporting sleeve is fixedly connected with the base plate of said cavity, and said extension is arranged in the said supporting sleeve; Said supporting sleeve is along circumferentially all establishing some through holes, and said some screw correspondences are arranged in said some through holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120233208U CN202144514U (en) | 2011-07-04 | 2011-07-04 | Heater positioning and adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120233208U CN202144514U (en) | 2011-07-04 | 2011-07-04 | Heater positioning and adjusting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202144514U true CN202144514U (en) | 2012-02-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120233208U Expired - Fee Related CN202144514U (en) | 2011-07-04 | 2011-07-04 | Heater positioning and adjusting device |
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| Country | Link |
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| CN (1) | CN202144514U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367194A (en) * | 2012-03-26 | 2013-10-23 | 上海宏力半导体制造有限公司 | Device and method for correcting transmission position of wafer |
| CN104674194A (en) * | 2013-11-26 | 2015-06-03 | 艾克斯特朗欧洲公司 | Supporting members and connecting members of heating mechanism for CVD reactor |
| CN104965291A (en) * | 2015-07-21 | 2015-10-07 | 哈尔滨理工大学 | Small-caliber long-barrel optical lens installation tool and installation method |
| CN113832449A (en) * | 2020-06-24 | 2021-12-24 | 拓荆科技股份有限公司 | Deposition apparatus and deposition method for semiconductor thin film |
| CN116240528A (en) * | 2023-05-10 | 2023-06-09 | 无锡金源半导体科技有限公司 | Thin film deposition equipment with heating plate leveling function |
-
2011
- 2011-07-04 CN CN201120233208U patent/CN202144514U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367194A (en) * | 2012-03-26 | 2013-10-23 | 上海宏力半导体制造有限公司 | Device and method for correcting transmission position of wafer |
| CN103367194B (en) * | 2012-03-26 | 2016-08-24 | 上海华虹宏力半导体制造有限公司 | A kind of device and method transmitting position correction for wafer |
| CN104674194A (en) * | 2013-11-26 | 2015-06-03 | 艾克斯特朗欧洲公司 | Supporting members and connecting members of heating mechanism for CVD reactor |
| CN104965291A (en) * | 2015-07-21 | 2015-10-07 | 哈尔滨理工大学 | Small-caliber long-barrel optical lens installation tool and installation method |
| CN104965291B (en) * | 2015-07-21 | 2017-04-26 | 哈尔滨理工大学 | Small-caliber long-barrel optical lens installation tool and installation method |
| CN113832449A (en) * | 2020-06-24 | 2021-12-24 | 拓荆科技股份有限公司 | Deposition apparatus and deposition method for semiconductor thin film |
| CN113832449B (en) * | 2020-06-24 | 2023-10-20 | 拓荆科技股份有限公司 | Deposition apparatus and deposition method for semiconductor thin film |
| CN116240528A (en) * | 2023-05-10 | 2023-06-09 | 无锡金源半导体科技有限公司 | Thin film deposition equipment with heating plate leveling function |
| CN116240528B (en) * | 2023-05-10 | 2023-08-08 | 无锡金源半导体科技有限公司 | Thin film deposition equipment with heating plate leveling function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130419 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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| TR01 | Transfer of patent right |
Effective date of registration: 20130419 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120215 Termination date: 20180704 |
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| CF01 | Termination of patent right due to non-payment of annual fee |