CN202175711U - Fixed support for preventing high temperature deformation and furnace tube - Google Patents
Fixed support for preventing high temperature deformation and furnace tube Download PDFInfo
- Publication number
- CN202175711U CN202175711U CN2011202789165U CN201120278916U CN202175711U CN 202175711 U CN202175711 U CN 202175711U CN 2011202789165 U CN2011202789165 U CN 2011202789165U CN 201120278916 U CN201120278916 U CN 201120278916U CN 202175711 U CN202175711 U CN 202175711U
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- Prior art keywords
- boiler tube
- anchor
- high temperature
- temperature deformation
- spray
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Abstract
The utility model discloses a fixed support for preventing high temperature deformation, which is positioned in a furnace tube chamber and used for supporting an injection tube extending into the furnace tube chamber. The furnace tube chamber is vertically defined by a furnace tube body and a furnace tube seat; the fixed support is fixedly connected with a side wall of the furnace tube seat; and the fixed support is used for independently supporting the single injection tube. The utility model also discloses a furnace tube adopting the fixed support for preventing high temperature deformation. The fixed support is independent and used for supporting the single injection tube, and the fixed support and the injection tube are assembled one by one. Therefore, each fixed support can be closely attached to the corresponding injection tube. The size of the fixed support is obviously reduced, therefore, the deformation influence of high temperature on the fixed support can be effectively reduced, the fixed support and the injection tube are ensured to be closely attached, and a gap is avoided. Furthermore, the tilting and shaking of the injection tube are avoided, and the stable chemical vapor deposition process is ensured.
Description
Technical field
The utility model relates to a kind of anchor and boiler tube.
Background technology
In the semiconductor production workshop, need to use a large amount of boiler tubes wafer is carried out chemical vapor deposition method.
Specifically see also Fig. 1～Fig. 3, wherein, Fig. 1 is the structural representation of existing boiler tube; Figure is the A-A sectional view of Fig. 1; Fig. 3 is the assembling synoptic diagram of existing fixed frame and spray tube.Visible by Fig. 1～Fig. 3, existing boiler tube comprises that boiler tube body 110, boiler tube seat 120, three spray tubes 130 and one are used to support the anchor 140 of the double-ring of all spray tubes 130.
Wherein, Said boiler tube body 110 is arranged at said boiler tube seat 120 tops; Said boiler tube body 110 surrounds with said boiler tube seat 120 forms an airtight boiler tube chamber; Said spray tube 130 1 ends stretch in the said boiler tube chamber through the sidewall 121 of said boiler tube seat 120, another termination sealing connection 160 of said spray tube 130.
But on the one hand, because the restriction of ME and assembly precision, not all spray tube 130 can both be close to said lower annular plate 142; On the other hand, because the temperature of boiler tube is very high, high temperature makes easily and upper and lower annular plate 141,142 distortion causes some spray tubes 130 not to be close to lower annular plate 142, also has the space.And when having the space between spray tube 130 and the lower annular plate 142; Spray tube 130 can't receive effective support of lower annular plate 142, and under vacuum environment, this spray tube 130 can tilt and rock; Tilt when serious; One spray tube 130 may the grazing phenomenon occur with the spray tube 130 on its next door, and rocks when serious, spray tube 130 even fracture can occur.When the grazing phenomenon appearred in the spray tube 130 on a spray tube 130 and next door, a large amount of particulate matters appearred in grazing easily.And when spray tube 130 fractures, also can produce a large amount of particulate matters.These particulate matters can have a strong impact on the quality product in the boiler tube, cause the product yield significantly to reduce.In addition, when spray tube 130 fractures, spray tube 130 can only spray reactant gases by its part jet orifice, promptly can not spray reactant gases according to jet orifice 150 directions of original design, thereby cause sedimentary film thickness and uniformity coefficient on the wafer undesirable.
Therefore, how to provide a kind of can be effectively, the firm support anchor and the boiler tube of living the anti-high temperature deformation of spray tube be the technical problem that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of the utility model is to provide a kind of anchor and boiler tube of anti-high temperature deformation; Through anchor independently is provided with; Make it support single spray tube separately, not only can guarantee the applying of anchor and said spray tube, but also can reduce the deformation effect of high temperature anchor; Thereby make that anchor can this one spray tube of firm support, prevent the spray tube fracture or and other spray tube the grazing phenomenon appears.
In order to reach above-mentioned purpose, the utility model adopts following technical scheme:
A kind of anchor of anti-high temperature deformation; Be positioned at the boiler tube chamber; Be used to support the spray tube that stretches in the boiler tube chamber; Said boiler tube chamber is surrounded up and down by boiler tube body and boiler tube seat to be formed, and said anchor is fixedly connected with the sidewall of said boiler tube seat, the one said spray tube of said anchor independent support.
In the anchor of above-mentioned anti-high temperature deformation; Said spray tube is the vertical tube that is connected to form by level pipe and vertical pipe; Said level pipe stretches in the said boiler tube chamber through the sidewall of said boiler tube seat; Said vertical pipe is positioned at said boiler tube chamber, and said level pipe and said boiler tube seat are tightly connected.
In the anchor of above-mentioned anti-high temperature deformation; Said anchor comprises retaining plate and bolt assembly; Said retaining plate is fixedly connected with the sidewall of said boiler tube seat; Said bolt assembly vertically is connected with said retaining plate, and said retaining plate is fitted in the downside of said level pipe, and said bolt assembly is fitted in the outside of said vertical pipe.
In the anchor of above-mentioned anti-high temperature deformation, said bolt assembly comprises the screw bolt and nut that matches, and said retaining plate has the threaded hole that supplies said bolt to pass through, and said bolt is provided with said retaining plate is vertical.
In the anchor of above-mentioned anti-high temperature deformation, the surface of said retaining plate scribbles high-temperature-resistant layer.
In the anchor of above-mentioned anti-high temperature deformation, the vertical pipe of said spray tube is provided with some jet orifices from top to bottom.
The invention also discloses a kind of boiler tube of anti-high temperature deformation; A kind of boiler tube of anti-high temperature deformation; Comprise boiler tube body, boiler tube seat and some spray tubes, said boiler tube body is arranged at said boiler tube seat top, and said boiler tube body and said boiler tube seat surround forms an airtight boiler tube chamber; Said spray tube stretches in the said boiler tube chamber through the sidewall of said boiler tube seat; Said boiler tube also comprises some as above-mentioned anchor, and said anchor and said spray tube are corresponding one by one, and said anchor is fixedly connected with the sidewall of said boiler tube seat respectively
In the boiler tube of above-mentioned anti-high temperature deformation, said boiler tube seat also comprises a boiler tube seat bottom, and said boiler tube seat bottom is located at the sidewall below of said boiler tube seat and is connected with the sidewall of said boiler tube seat is detachable.
In the boiler tube of above-mentioned anti-high temperature deformation, said boiler tube comprises 3-6 root spray tube.
The beneficial effect of the utility model is following:
The anchor and the boiler tube of the anti-high temperature deformation of the utility model; Through anchor independently is provided with, make it support single spray tube separately, the anchor of comparing an existing shared double-ring supports all spray tubes; On the one hand; Because the corresponding one by one assembling of anchor and spray tube, therefore, each anchor can both fit tightly with each self-corresponding spray tube; On the other hand, owing to the size of anchor is obviously dwindled, therefore; Can effectively reduce the deformation effect of high temperature, thereby effectively prevent the anchor distortion, further guarantee to fit tightly between anchor and the spray tube anchor; There is not the space, and then, avoid spray tube to occur and rock; Prevent particulate matter to occur, guarantee that finally the reliable and stable of chemical vapor deposition method carries out, and effectively improves the product yield because of spray tube fracture or grazing.
Description of drawings
The anchor of the anti-high temperature deformation of the utility model and boiler tube are provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of existing boiler tube;
Fig. 2 is the A-A sectional view of Fig. 1;
Fig. 3 is the assembling synoptic diagram of existing fixed frame and spray tube;
Fig. 4 is the structural representation of boiler tube of the anti-high temperature deformation of the utility model one embodiment;
Fig. 5 is anchor and the assembling synoptic diagram of spray tube of the anti-high temperature deformation of the utility model one embodiment;
Embodiment
Below will do further to describe in detail to the anchor and the boiler tube of the anti-high temperature deformation of the utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented the preferred embodiment of the utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the advantageous effects of the utility model.Therefore, following description is appreciated that extensively knowing to those skilled in the art, and not as the restriction to the utility model.
For clear, whole characteristics of practical embodiments are not described.In following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize pioneer's specific objective.In addition, will be understood that this development possibly be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose, the characteristic that make the utility model is more obviously understandable, be further described below in conjunction with the embodiment of accompanying drawing to the utility model.What need explanation is, accompanying drawing all adopts the form of simplifying very much and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 4 and Fig. 5, wherein, Fig. 4 is the structural representation of boiler tube of the anti-high temperature deformation of the utility model one embodiment; Fig. 5 is anchor and the assembling synoptic diagram of spray tube of the anti-high temperature deformation of the utility model one embodiment.
Visible by Fig. 4 and Fig. 5; The boiler tube of this anti-high temperature deformation comprises boiler tube body 210, boiler tube seat 220 and Duo Gen spray tube 230 (being generally 3-6 root spray tube, is 5 in the present embodiment); Said boiler tube body 210 is arranged at said boiler tube seat 220 tops; Said boiler tube body 210 is formed an airtight boiler tube chamber with said boiler tube seat 220, that is to say, said boiler tube chamber is surrounded up and down by boiler tube body 210 and boiler tube seat 220 to be formed; Said spray tube 230 stretches in the said boiler tube chamber through the sidewall of said boiler tube seat 220, and said boiler tube also comprises a plurality of (being 5 in the present embodiment) independently is used for supporting respectively the anchor 240 of each said spray tube.That is to say that each said anchor 240 supports a spray tube 230.Said anchor 240 is fixedly connected with the sidewall 222 of said boiler tube seat 220 respectively, and said anchor 240 is corresponding one by one with said spray tube 230.
That is to say; Each spray tube 230 adopts independently, and anchor 240 supports; The anchor of comparing existing employing double-ring supports the structure formation of all spray tubes simultaneously; On the one hand, because anchor 240 and the corresponding one by one assembling of spray tube 230 it is hereby ensured that each anchor 240 can both fit tightly with each self-corresponding spray tube 230 when mounted; On the other hand, owing to the size of anchor 240 is obviously dwindled, therefore; Can effectively reduce in the use high temperature to the deformation effect of anchor 240, promptly effectively prevent anchor 240 distortion, thereby further guarantee to fit tightly between anchor 240 and the spray tube 230; There is not the space; And then, avoid spray tube 230 to occur tilting and rock, thereby prevent a large amount of particulate matters to occur because of spray tube 230 fractures or grazing; Guarantee that finally the reliable and stable of chemical vapor deposition method carries out, and effectively improves the product yield.
Wherein, Said spray tube 230 is the vertical tubes that are connected to form by level pipe 231 and vertical pipe 232; Said level pipe 231 stretches in the said boiler tube chamber through the sidewall of said boiler tube seat 220; Said vertical pipe 232 is positioned at said boiler tube chamber, and said level pipe 231 is tightly connected with said boiler tube seat 232.The vertical pipe 232 of said spray tube 230 is provided with some jet orifices 250 from top to bottom.
Wherein, Said anchor 240 comprises retaining plate 241 and bolt assembly 242; The sidewall of said retaining plate 241 and said boiler tube seat 220 is fixedly connected; Said bolt assembly 242 vertically is connected with said retaining plate 241, and said retaining plate 241 is fitted in the downside of said level pipe 231, and said bolt assembly 242 is fitted in the outside of said vertical pipe 232.Wherein said bolt assembly 242 comprises the screw bolt and nut that matches, and has the threaded hole (not shown), said bolt and retaining plate 241 fixed-link that supply said bolt to pass through on the said retaining plate.
Preferably, in the present embodiment, said boiler tube seat 220 also comprises a boiler tube seat bottom 222, said boiler tube seat bottom 222 be located at said boiler tube seat 220 sidewall 221 belows and with 221 detachable connections of sidewall of said boiler tube seat 220.After having dismantled said boiler tube seat bottom 222, operator can stretch in the said boiler tube chamber from the bottom, and each bolt assembly 242 is adjusted and fixing each spray tube 230 through adjusting.
Preferably, in the present embodiment, the surface of said retaining plate 241 scribbles high-temperature-resistant layer.At least 800 ℃ of the heat resisting temperatures of high-temperature-resistant layer are to adapt to the hot environment of boiler tube.
In sum, the anchor and the boiler tube of the anti-high temperature deformation of the utility model are through independently being provided with anchor; Make it support single spray tube separately; The anchor of comparing an existing shared double-ring supports all spray tubes, on the one hand, because the corresponding one by one assembling of anchor and spray tube; Therefore, each anchor can both fit tightly with each self-corresponding spray tube; On the other hand, owing to the size of anchor is obviously dwindled, therefore; Can effectively reduce the deformation effect of high temperature, thereby effectively prevent the anchor distortion, thereby further guarantee to fit tightly between anchor and the spray tube anchor; There is not the space, and then, avoid spray tube to occur and rock; Prevent particulate matter to occur, guarantee that finally the reliable and stable of chemical vapor deposition method carries out, and effectively improves the product yield because of spray tube fracture or grazing.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.
Claims (9)
1. the anchor of an anti-high temperature deformation; Be positioned at the boiler tube chamber; Be used to support the spray tube that stretches in the boiler tube chamber, said boiler tube chamber is surrounded up and down by boiler tube body and boiler tube seat to be formed, and it is characterized in that; Said anchor is fixedly connected with the sidewall of said boiler tube seat, the single said spray tube of said anchor independent support.
2. the anchor of anti-high temperature deformation according to claim 1; It is characterized in that; Said spray tube is the vertical tube that is connected to form by level pipe and vertical pipe; Said level pipe stretches in the said boiler tube chamber through the sidewall of said boiler tube seat, and said vertical pipe is positioned at said boiler tube chamber, and said level pipe and said boiler tube seat are tightly connected.
3. the anchor of anti-high temperature deformation according to claim 2; It is characterized in that; Said anchor comprises retaining plate and bolt assembly, and said retaining plate is fixedly connected with the sidewall of said boiler tube seat, and said bolt assembly vertically is connected with said retaining plate; Said retaining plate is fitted in the downside of said level pipe, and said bolt assembly is fitted in the outside of said vertical pipe.
4. the anchor of anti-high temperature deformation according to claim 3 is characterized in that, said bolt assembly comprises the screw bolt and nut that matches, and said retaining plate has the threaded hole that supplies said bolt to pass through, and said bolt is provided with said retaining plate is vertical.
5. the anchor of anti-high temperature deformation according to claim 3 is characterized in that, the surface of said retaining plate is provided with high-temperature-resistant layer.
6. the anchor of anti-high temperature deformation according to claim 3 is characterized in that, the vertical pipe of said spray tube is provided with some jet orifices from top to bottom.
7. the boiler tube of an anti-high temperature deformation; Comprise boiler tube body, boiler tube seat and some spray tubes; Said boiler tube body is arranged at said boiler tube seat top, and said boiler tube body and said boiler tube seat surround forms an airtight boiler tube chamber, and said spray tube stretches in the said boiler tube chamber through the sidewall of said boiler tube seat; It is characterized in that; Also comprise somely like any described anchor among the claim 1-6, said anchor and said spray tube are corresponding one by one, and said anchor is fixedly connected with the sidewall of said boiler tube seat respectively.
8. the boiler tube of anti-high temperature deformation according to claim 7 is characterized in that, said boiler tube seat also comprises a boiler tube seat bottom, and said boiler tube seat bottom is located at the sidewall below of said boiler tube seat and is connected with the sidewall of said boiler tube seat is detachable.
9. the boiler tube of anti-high temperature deformation according to claim 7 is characterized in that, said boiler tube comprises 3-6 root spray tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202789165U CN202175711U (en) | 2011-08-02 | 2011-08-02 | Fixed support for preventing high temperature deformation and furnace tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202789165U CN202175711U (en) | 2011-08-02 | 2011-08-02 | Fixed support for preventing high temperature deformation and furnace tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202175711U true CN202175711U (en) | 2012-03-28 |
Family
ID=45865605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202789165U Expired - Fee Related CN202175711U (en) | 2011-08-02 | 2011-08-02 | Fixed support for preventing high temperature deformation and furnace tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202175711U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102938389A (en) * | 2012-11-20 | 2013-02-20 | 上海宏力半导体制造有限公司 | Depositing device |
-
2011
- 2011-08-02 CN CN2011202789165U patent/CN202175711U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102938389A (en) * | 2012-11-20 | 2013-02-20 | 上海宏力半导体制造有限公司 | Depositing device |
| CN102938389B (en) * | 2012-11-20 | 2016-09-07 | 上海华虹宏力半导体制造有限公司 | Precipitation equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130507 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130507 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120328 Termination date: 20180802 |