TWI646297B - Heater support device - Google Patents

Abstract

A heater supporting device is installed on an inner circumference of a heat insulator around a vertical furnace, and a plurality of axially and spaced engaging portions are disposed on an inner circumference of the surrounding heat insulator; and the heater supporting device includes A plurality of limit members and a plurality of support members. Wherein, the limiting members are loosely engaged with the corresponding engaging portions, so that the limiting members and the engaging portions are not separated; and a corresponding one of the limiting members and the engaging portion has a diameter To the space, the limiting member has a sufficient radial moving distance in the engaging portion; and the supporting members are respectively located at one end of the limiting members, the supporting members respectively have a positioning groove for receiving and supporting the heat insulation with the periphery One coil type heating element of the body concentric.

Description

Heater support

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a heater support device, and more particularly to a vertical furnace that can be used in semiconductor manufacturing equipment without allowing the support members to be detached from the surrounding insulation during thermal expansion/contraction.

In the diffusion process of a semiconductor process and a chemical vapor deposition (CVD) process, a vertical furnace mainly uses a coil type heating element in a furnace to heat a reaction gas, thereby forming a film on a substrate such as a wafer. Wherein, the coil type heating element is supported by a plurality of axially arranged support members, the plurality of support members are supported by the component holder, and the heat insulator is wrapped around the component holder. In the above structure, during the thermal expansion/contraction of the wafer during film formation, the support members are liable to reduce the heating efficiency due to the damage or to shorten the expected service life of the coil type heating element.

For example, the "heater support device, heater, semiconductor manufacturing equipment, semiconductor manufacturing method, and support member" of the Republic of China Patent Publication No. I555959 provides a heater support device that solves the above problems, and includes: a coil type heating An element having a coil shape and disposed around an object to be heated; and a plurality of vertically connected support members, wherein a plurality of hollow bodies having an elliptical shape elongated in a radial direction are respectively formed on Between the support members, the coil-type heating element is inserted into the hollow bodies and respectively Supported by the supporting members, a plurality of concave fitting portions are respectively disposed on a plurality of upper surfaces of the supporting members in a direction crossing the coil type heating elements, and the plurality of convex fitting portions are respectively disposed at The plurality of lower surfaces of the support members, and the concave of the one of the support members and the other of the support members adjacent to one of the support members The insert is inserted into the fit, and the plurality of support members are vertically connected by the insertion of the recessed portions with the insertion of the projections. a plurality of component brackets are vertically connected to support the support members; and a peripheral insulator disposed around the coil-type heating element to support the component brackets, wherein the component brackets control the support members in a horizontal direction Move on. With the above structure, the relative displacement of the support members in the radius and the circumferential direction of the vertical furnace is respectively restricted, and the movement of the member holder connected to the respective support members toward the center of the vertical furnace is restricted.

As shown in Fig. 8, the desired effect can be achieved by the above-described heater supporting device 9. However, the support members 91 are mainly made of a high alumina material, and the heat absorption and heat dissipation time required for heating to about 800 ° C and then cooling to remove the substrate is long, and there is still room for improvement in shortening the entire operation time; In order to prevent the support members 91 from being deviated or deformed or short-circuited due to thermal expansion/contraction of the coil-type heating element 92, two layers are formed on the periphery of the member holders 93 of the above-described heater supporting device 9 and the coil-type heating elements 92 are formed. The surrounding thermal insulators (94, 95) are axially and equidistantly engraved along the inner peripheral insulating body 94 to support the component brackets 93, respectively, so that any one of the component brackets 93 The lateral sides abut against the grooves 941; and the upper and lower portions of the plurality of component brackets 93 are respectively inserted into and supported by the upper and lower bracket support recesses to control the member brackets 93 from the surrounding insulators. 94 is disengaged and moved to the axial position of the vertical furnace.

In view of the above, in order to provide a structure different from the conventional technology and to improve the above disadvantages, the inventors have accumulated many years of experience and continuous development and improvement, and the present invention has been produced.

SUMMARY OF THE INVENTION One object of the present invention is to provide a heater supporting device which can solve the conventional component brackets in three grooves laterally abutting in the grooves of a surrounding heat insulator, and the upper and lower portions of the plurality of component brackets respectively Restricted in the upper and lower bracket support recesses to control the problem that the component brackets do not detach from the surrounding insulators, and can be formed by directly forming the shape of the component brackets and the grooves by another method. The same benefits simplify the processing and reduce production costs.

An object of the present invention is to provide a heater supporting device which can solve the problem of long heat absorption and heat dissipation time required for conventionally used supporting members to be heated and re-cooled to remove the substrate, thereby effectively shortening the entire working time and improving production. effectiveness.

For the above purpose, the heater supporting device of the present invention is installed on the inner circumference of one of the surrounding heat insulators for supporting a coil type heating element concentric with the surrounding heat insulator; The technical feature is that: a plurality of axially spaced apart engaging portions are disposed on an inner circumference of the surrounding thermal insulator; and the heater supporting device includes a plurality of limiting members and a plurality of supporting members. Wherein, the limiting member is loosely engaged with the corresponding engaging portion, so that the limiting member and the engaging portion are not separated, and a radial space is formed between the limiting member and the engaging portion, so that the limiting member There is sufficient radial movement distance in the engaging portion; and the supporting member is located at one end of the limiting member, and the supporting member has a positioning groove for accommodating the coil type heating element.

In practice, the support member has a plate body, and the positioning groove is formed at the other end of the plate body, and the plate body on the periphery of the positioning groove has a convex portion adjacent to the same shape as the positioning groove. The thickness of the projection is greater than the thickness of the plate.

In one embodiment, one end of the limiting member has a limiting slot, and the limiting slot has at least one first engaging portion; one end of the plate body is inserted into the limiting slot, and the two sides of the end of the plate body have at least one second card The connecting portion is configured to receive the corresponding at least one first engaging portion.

In the implementation, the first engaging portion is an axial groove formed in the limiting groove of the limiting member, and the second engaging portion is an axial protruding rib protruding outward from the two sides of the plate body. .

In implementation, the present invention further includes an extension portion that abuts a top surface of the other end of the plate body, and the extension portion extends from one end of the protrusion portion, the thickness of the extension portion being greater than the thickness of the plate body.

In implementation, the top surface and the bottom surface of the plate body have the same shape and may be connected to one of the first connecting portion and the second connecting portion.

In practice, the first connecting portion is a 鸠-shaped block located on the top surface of the plate body, and the second connecting portion is a 鸠-shaped groove located on the bottom surface of the plate body and having the same shape as the 鸠-shaped block.

In implementation, the engaging portion is an elongated axial groove recessed radially by the inner circumference of the surrounding thermal insulator, the limiting member is elongated, and the cross section of the engaging portion and the cross section of the limiting member They are tapered or trapezoidal, or T-shaped.

In order to further understand the present invention, the specific embodiments of the present invention and the effects achieved thereby are described in detail below with reference to the drawings and drawings.

1‧‧‧heater support

11‧‧‧Environmental insulation

12‧‧‧ heating elements

13‧‧‧Care Department

131‧‧‧Limited

14‧‧‧ radial space

2‧‧‧Limited parts

21‧‧‧ small end face

22‧‧‧ Large end face

23‧‧‧Limited slot

24‧‧‧First card joint

3‧‧‧Support

31‧‧‧ board

32‧‧‧Second card joint

33‧‧‧First connection

34‧‧‧Second connection

35‧‧‧ positioning slot

36‧‧‧Protruding

37‧‧‧Extension

9‧‧‧Heater support device

91‧‧‧Support members

92‧‧‧Coil type heating element

93‧‧‧Component bracket

94, 95‧‧‧ surrounding insulation

941‧‧‧U-shaped groove

Figure 1 is a perspective view of the present invention installed in a vertical furnace.

Figure 2 is a plan view of the present invention installed in a vertical furnace.

Figure 3 is a perspective cross-sectional view of the present invention installed in a vertical furnace.

Figure 4 is a perspective view of a preferred embodiment of the present invention.

Figure 5 is a perspective view of another embodiment of the preferred embodiment of the present invention.

6 and 7 are schematic views showing the state of use of the preferred embodiment of the present invention.

Figure 8 is a schematic view showing the state of use of the conventional heater supporting device.

Referring to Figures 1 to 3, the present heater support device 1 is mounted on the inner periphery of a heat insulator 11 surrounding one of the vertical furnaces for supporting a coil type coaxial with the surrounding insulator 11 Heating element 12. The above vertical furnace can be used in a semiconductor manufacturing process such as diffusion and chemical vapor deposition (CVD), and the vertical furnace can heat the reaction gas inside the furnace through the above procedure to make the surface of the substrate such as a wafer A film is formed. The peripheral insulating body 11 has a circular tubular shape, and the inner peripheral edge thereof is provided with a plurality of axially spaced long axial grooves, which are used as the engaging portions 13 and the grooves are formed by the surrounding thermal insulators 11 The inner circumference is radially recessed, and the cross section of the groove is a trapezoidal trapezoid, and the opening position has a width portion smaller than the inner width of the recess portion 131; when implemented, the cross section of the groove may also be It is T-shaped. The creative heater supporting device 1 includes a plurality of limiting members 2 and a plurality of supporting members 3. The plurality of limiting members 2 are respectively connected to the plurality of engaging portions 13 of the inner circumference of the surrounding heat insulator 11 , and the plurality of supporting members 3 are respectively connected to the plurality of limiting members 2 to support the coil-shaped heating element 12 .

FIG. 4 is a preferred embodiment of the present invention, wherein the limiting member 2 is elongated, and the cross section of the limiting member 2 and the engaging portion 13 are respectively tapered. When implemented, when the cross-section of the engaging portion 13 is T-shaped, the cross-section of the limiting member 2 is also T-shaped, and the cross-section of the limiting member 2 is different from the cross-sectional size of the engaging portion 13, so that the limiting member 2 is The loosely engaged card is engaged with the corresponding engaging portion 13 so that the limiting member 2 does not disengage from the engaging portion 13 and between the limiting member 2 and the engaging portion 13 A radial space 14 is formed (as shown in Figure 6). The limiting member 2 has a small end surface 21 and a large end surface 22 opposite to the small end surface 21, and the small end surface 21 of the limiting member 2 has a rectangular limiting slot 23 recessed toward the large end surface 22, and the rectangular limiting slot Each of the two opposite side walls of the 23 has an axial arc-shaped cross-section groove, and the groove serves as the first engaging portion 24.

The support member 3 has a rectangular plate body 31. The plate body 31 has a right end, a left end, a top surface, a bottom surface and two side surfaces. The right end of the plate body 31 is inserted into the rectangular limiting slot 23 of the limiting member 2 from the top to the bottom. The two sides of the right end of the plate body 31 respectively protrude outwardly from an axial rib, and the rib is used as the second engaging portion. 32, correspondingly inserted into the first engaging portion 24 of the limiting member 2. In addition, a top end portion of the upper end of the plate body 31 extends upwardly, and the 鸠-shaped block is used as the first connecting portion 33. The bottom surface of the right end of the plate body 31 is upwardly recessed by a 鸠-shaped groove, and the 鸠-shaped groove is used as the second connection. Part 34. In practice, the first connecting portion 33 may also be a 槽-shaped groove, and the second connecting portion 34 is a 鸠-shaped block, and the first connecting portion 33 and the second connecting portion 34 have the same shape to allow two supports to be stacked on top of each other. Pieces 3 are connected to each other.

The left end of the plate body 31 has a U-shaped positioning groove 35 open at the top for accommodating the coil-type heating element 12, and the plate body 31 on the periphery of the positioning groove 35 has a protrusion which is adjacent to the U-shape of the positioning groove 35. 36, the thickness of the protruding portion 36 is greater than the thickness of the plate body 31; and an extending portion 37 is adjacent to the top surface of the left end of the plate body 31, and extends to the left by the top of the left end of the protruding portion 36, and the thickness of the extending portion 37 is greater than the plate The thickness of the body 31. In the implementation, the support member 3 and the limiting member 2 can also be integrally formed as shown in FIG. 5, and the group of support members 3 and the limiting member 2 can be stacked on top of each other.

Therefore, as shown in FIGS. 6 and 7, when a plurality of the limiting members 2 are axially inserted into the plurality of engaging portions 13 of the inner circumference of the surrounding heat insulator 11, respectively, the upper and lower support members are provided in the same axial direction (3, 3') when the limit member 2 is coupled to each other and the coil type heating element 12 is positioned in the U-shaped positioning groove 35 of the support member 3, during the thermal expansion/contraction of the coil type heating element 12 and the support member 3, Limiter There is a radial space 14 between the engaging portion 13 and the engaging portion 13, so that the limiting member 2 is limited to the inside of the engaging portion 13, so that the limiting member 2 can move radially toward the axis of the surrounding thermal insulator 11, or The stopper 2 moves radially away from the axis of the surrounding insulator 11.

Therefore, the present invention has the following advantages:

1. The two sides of the right end of the support member of the present invention respectively protrude outwardly from the axial ribs to be restrained in the limiting member, and the left end of the plate body is provided with a protruding portion and an extending portion to strengthen the structure of the plate body. Moreover, the thickness of the protruding portion and the extending portion is greater than the thickness of the plate body, so that the thickness of the supporting member can be reduced, the time for heat absorption and heat dissipation can be shortened, and the entire working time can be effectively shortened, thereby improving work efficiency and saving part of energy. .

2. The invention designs the engaging portion of the limiting member and the peripheral edge of the surrounding thermal insulation body into a corresponding shape, and allows the limiting member to be located in the engaging portion of the periphery of the surrounding thermal insulation body, so that the limiting member and the engaging portion are not Will be detached; and has a radial space between the limiting member and the engaging portion, and the limiting member has sufficient radial movement in the engaging portion during thermal expansion/contraction of the coil-type heating element and the supporting member The distance can therefore reduce the short-circuit burn caused by the thermal expansion and compression deformation of the coil to ensure safe use.

In summary, according to the above disclosure, the present invention can achieve the intended purpose, and provide a heater supporting device capable of effectively shortening the working time to improve the working efficiency and simplifying the processing procedure to reduce the production cost. With the value of industrial use, 提出 file an invention patent application according to law.

Claims (9)

A heater supporting device is mounted on an inner circumference of a circular tubular surrounding thermal insulator in a vertical melting furnace for supporting a coil type heating element concentric with the surrounding thermal insulator; the improvement is: inside the surrounding thermal insulator a plurality of axially spaced apart engaging portions are disposed on the periphery; and the heater supporting device includes a plurality of limiting members and a plurality of supporting members, wherein the limiting member is a loosely engaged card corresponding to the engaging portion, The limiting member and the engaging portion are not disengaged, and a radial space is formed between the limiting member and the engaging portion, so that the limiting member has a sufficient radial moving distance in the engaging portion; The support member is located at one end of the limiting member, and the support member has a positioning groove for receiving the coil type heating element. The heater support device of claim 1, wherein the support member has a plate body, the positioning groove is formed at the other end of the plate body, and the plate body of the positioning groove has an abutment on the plate body. And a protrusion similar to the shape of the positioning groove, the protrusion having a thickness greater than a thickness of the plate body. The heater support device of claim 2, wherein one end of the limiting member has a limiting slot, and the limiting slot has at least one first engaging portion; one end of the plate body is inserted into the In the limiting slot, the two sides of the end of the plate body have at least one second engaging portion for engaging the corresponding at least one first engaging portion. The heater support device of claim 3, wherein the first latching portion is an axial groove formed in the limiting slot of the limiting member, and the second latching portion is It is an axial rib protruding outward from the both sides of the plate body. The heater support device of claim 2, further comprising an extension portion that is adjacent to a top surface of the other end of the plate body, and the extension portion extends from one end of the protrusion portion The thickness of the extension is greater than the thickness of the plate. The heater support device of claim 2, wherein the top surface and the bottom surface of the plate body have the same shape and can be connected to one of the first connecting portion and the second connecting portion. The heater support device of claim 6, wherein the first connecting portion is a 块-shaped block located on a top surface of the plate body, and the second connecting portion is located at a bottom surface of the plate body and The dome-shaped groove has the same shape. The heater supporting device according to any one of claims 1 to 7, wherein the engaging portion is an elongated axial groove recessed radially by an inner circumference of the surrounding heat insulator, and The cross section of the engaging portion and the cross section of the limiting member are trapezoidal in a tapered shape. The heater supporting device according to any one of claims 1 to 7, wherein the engaging portion is an elongated axial groove recessed radially by an inner circumference of the surrounding heat insulator, and The cross section of the engaging portion and the cross section of the limiting member are respectively T-shaped.