TW201517989A - 塗布裝置 - Google Patents

塗布裝置 Download PDF

Info

Publication number
TW201517989A
TW201517989A TW103117776A TW103117776A TW201517989A TW 201517989 A TW201517989 A TW 201517989A TW 103117776 A TW103117776 A TW 103117776A TW 103117776 A TW103117776 A TW 103117776A TW 201517989 A TW201517989 A TW 201517989A
Authority
TW
Taiwan
Prior art keywords
substrate
coating
chamber
unit
processing chamber
Prior art date
Application number
TW103117776A
Other languages
English (en)
Chinese (zh)
Inventor
Futoshi Shimai
Akihiko Sato
Masaki Chiba
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW201517989A publication Critical patent/TW201517989A/zh

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
TW103117776A 2013-05-23 2014-05-21 塗布裝置 TW201517989A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013108857A JP6148900B2 (ja) 2013-05-23 2013-05-23 塗布装置

Publications (1)

Publication Number Publication Date
TW201517989A true TW201517989A (zh) 2015-05-16

Family

ID=52129353

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103117776A TW201517989A (zh) 2013-05-23 2014-05-21 塗布裝置

Country Status (2)

Country Link
JP (1) JP6148900B2 (ja)
TW (1) TW201517989A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101958111B1 (ko) * 2017-09-29 2019-03-14 씨디에스(주) 경사구조를 이용한 기판 부상 이송장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001213517A (ja) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置
JP4452033B2 (ja) * 2003-05-22 2010-04-21 芝浦メカトロニクス株式会社 基板の搬送装置及び搬送方法
JP2006013156A (ja) * 2004-06-25 2006-01-12 Hoya Corp 基板処理装置及び基板処理方法並びにパターン形成方法
JP2011035168A (ja) * 2009-07-31 2011-02-17 Kowa Dennetsu Keiki:Kk 回転塗布装置
JP5617440B2 (ja) * 2010-08-30 2014-11-05 澁谷工業株式会社 無菌作業装置
JP2012170846A (ja) * 2011-02-18 2012-09-10 Tokyo Ohka Kogyo Co Ltd 塗布装置
JP2012216535A (ja) * 2011-03-31 2012-11-08 Mitsubishi Chemicals Corp 金属ナノワイヤー含有透明導電膜及びその塗布液

Also Published As

Publication number Publication date
JP6148900B2 (ja) 2017-06-14
JP2014229774A (ja) 2014-12-08

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