TW201509636A - Dehydrator - Google Patents

Abstract

A dehydrator (10) is provided with a dehydration chamber (14) for dehydrating a solid film (80), and an infrared heater (40). The infrared heater (40) has: a filament (41) for emitting electromagnetic waves including infrared light, the filament (41) being disposed inside the dehydration chamber (14); and an inner tube (42) and an outer tube (44) for absorbing infrared light having a wavelength exceeding 3.5 [mu]m and covering the filament (41). The solid film (80) transmits at least some near-infrared light, and the pre-dehydration moisture content of the solid film (80) is greater than 0% by mass and equal to or less than 1% by mass. In any of a plurality of heater rows (29), any of the infrared heaters (40) constituting the row is disposed so as to be misaligned in the overlapping direction and in the perpendicular direction relative to the infrared heaters (40) constituting an adjacent row.

Description

Dehydration device

The present invention relates to a dewatering device.

In the past, a heat treatment apparatus which performs heat treatment such as dehydration on a film such as a PET film has been known. For example, Patent Document 1 describes that heat treatment of a PET film is performed by using a hot air and a far-infrared heater.

Advanced technical literature

Patent literature

Patent Document 1: Japanese Patent Laid-Open No. 1-275031

However, in the above-described conventional heat treatment apparatus, a little water (for example, 1% by mass) may remain in the inside of the solid film after heat treatment (dehydration), and sufficient dehydration may not be performed. For example, the solid film after dehydration is formed into a transparent conductive film on the surface thereof by a method such as sputtering to form a transparent conductive film for use in a liquid crystal display or an organic electroluminescence (Organic ElectroLuminescence) or the like. In this case, if the amount of moisture in the solid film is large, the surface of the transparent conductive film is adversely affected. Therefore, it is desirable to reduce the moisture content inside the solid film again.

In order to solve the above problems, the present invention aims to reduce the solidity again. The moisture content inside the body membrane.

The dehydration device of the present invention is a dehydration of a solid film which allows at least a portion of the near-infrared rays to pass and the internal moisture content exceeds 0 mass% and is below 1 mass%, and includes: for performing the solid film The dehydration dehydration chamber and the infrared heater include a heating element disposed in the dehydration chamber and emitting electromagnetic waves containing infrared rays, and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element.

The dehydration device of the present invention irradiates infrared rays to a solid film whose internal moisture content exceeds 0 mass% and is 1 mass% or less before dehydration by an infrared heater. This infrared heater has a heat generating body that emits electromagnetic waves containing infrared rays and a tube that absorbs infrared rays having a wavelength of more than 3.5 μm and covers the heat generating body. Therefore, infrared rays (near infrared rays) having a wavelength of 3.5 μm or less are emitted. Infrared rays of this wavelength can selectively impart energy to water molecules, and can efficiently dehydrate the solid film. Further, since at least a part of the near-infrared rays pass through the solid film, the near-infrared rays emitted from the infrared heater easily act directly on the moisture inside the solid film. Thereby, the solid film having an internal moisture content of more than 0% by mass and less than 1% by mass is further dehydrated, whereby the moisture content inside the solid film can be further reduced. In this case, the solid film may be dehydrated to a water content of 100 ppm or less in the dehydration chamber, or may be dehydrated to 10 ppm or less. Further, the solid film may be a dense substance. When the solid film is dense, the moisture inside the solid film is hard to escape to the outside, but since the dehydrating device of the present invention can selectively impart energy to the water molecules for dehydration, the present invention has a high degree of application. significance. In addition, the solid film may be a PET film. The glass transition temperature of the PET film is, for example, a relatively low temperature of 70 ° C. However, since the near-infrared rays are hardly heated, the PET film in dehydration can be easily maintained below the glass transition temperature, so that the present invention has a high significance. .

In the dewatering apparatus of the present invention, the transport unit that transports the solid film in a zigzag shape in the dehydration chamber is included, wherein: the plurality of infrared heaters are arranged in a plurality of columns, and the plurality of columns are arranged side by side in a direction overlapping with the zigzag The solid film is sandwiched by at least one of the plurality of columns, and at least one of the infrared heaters constituting the row is disposed in a direction perpendicular to the overlapping direction of the infrared heaters constituting the adjacent row. Staggered. By transporting the solid film in a zigzag manner, there is an infrared heater configured to be staggered in a direction perpendicular to the direction in which the infrared heaters constituting the adjacent columns are perpendicular to the zigzag overlapping direction, and the infrared ray from the infrared heater is transmitted through the solid The film is easily irradiated to the solid film in front of it. Thereby, the infrared rays emitted from one infrared heater can be more efficiently irradiated onto the solid film, and dehydration can be performed more efficiently. Further, at least one of the plurality of columns, and all of the infrared heaters constituting the column are disposed so as to be shifted from the infrared heaters constituting the adjacent row in a direction perpendicular to the overlapping direction. Further, for any one of the plurality of columns, at least one of the infrared heaters constituting the column is disposed so as to be shifted from the infrared heater constituting the adjacent column in a direction perpendicular to the overlapping direction, and constitutes a column. It is preferable that any one of the infrared heaters is arranged to be staggered in a direction perpendicular to the overlapping direction with the infrared heaters constituting the adjacent columns. Here, the phrase "sending the solid film in a zigzag shape" may be carried out while the solid film is folded back in the thickness direction (transported in a zigzag manner such that the surfaces of the solid film face each other).

In the dewatering apparatus of the present invention, the conveying unit includes the conveying unit that transports the solid film in a zigzag shape in the dehydration chamber, wherein: the plurality of infrared heaters are arranged in a plurality of columns, and the plurality of columns are arranged side by side in a direction overlapping the zigzag Holding the solid film, the plurality of columns have outer rows, wherein the outer rows are disposed on one or both sides of the zigzag portion of the solid film in the overlapping direction, and constitute the infrared heater in the outer row At least one of the reflective layers on the opposite side of the zigzag portion of the solid film when viewed from the heat generating body is provided with a reflection layer that reflects at least a portion of the electromagnetic waves. As a result, the near-infrared rays radiated from the infrared heaters in the outer row are reflected by the reflective layer in a direction opposite to the zigzag portion of the solid film, whereby dehydration of the solid film can be performed more effectively. Here, the reflective layer may be formed on the outer surface of the tube of the infrared heater constituting the outer row, or may be formed on the inner surface. In addition, the reflective layer can be made to be independent of the tube.

In this case, the outer array is disposed on the outer side in the overlapping direction of the zigzag portion of the solid film, and the infrared heater constituting the outer row is located on the solid film when viewed from the heat generating body. On the opposite side of the zigzag portion, a reflective layer that reflects at least a portion of the near-infrared rays among the electromagnetic waves may be provided. In this way, the dehydration of the solid film can be performed more efficiently by the reflective layers on both sides of the zigzag portion.

In the dewatering apparatus of the present invention, the transport unit that transports the solid film in the dehydration chamber is provided, wherein the infrared heater may be disposed to have a dense tendency on the downstream side in the transport direction of the transport unit. On the downstream side in the transport direction, that is, at the end of the dehydration process of the dehydration chamber, the moisture of the solid film has been reduced and the problem of deformation of the solid film or the like is less likely to occur. Therefore, the infrared rays on the downstream side The heater is densely arranged to increase the radiation intensity of the near-infrared rays, thereby effectively improving the function of dehydration. In addition, when the plurality of infrared heaters are arranged in a plurality of rows as described above, the infrared heaters tend to be densely arranged in the row on the downstream side in the transport direction. For example, the column on the downstream side may have a large number of infrared heaters.

In the dewatering apparatus of the present invention, the transport unit that transports the solid film in the dehydration chamber is disposed, wherein the infrared heater is disposed to have a relatively dense tendency on the upstream side in the transport direction of the transport unit. In the upstream side of the transport direction, that is, in the initial stage of the dehydration process of the dehydration chamber, moisture may adhere to the surface of the solid film. However, by arranging the infrared heaters on the upstream side in a dense manner, such water can be used in the initial stage of dehydration. It can evaporate quickly. In the case where the plurality of infrared heaters are arranged in a plurality of rows as described above, the infrared heaters tend to be densely arranged in the column on the upstream side in the transport direction. For example, the column on the upstream side tends to have a large number of infrared heaters. Further, the infrared heater may be arranged to be denser than the center on the upstream side and the downstream side in the transport direction.

In the dewatering apparatus of the present invention, the conveying unit includes: a conveying unit that conveys the solid film in a zigzag shape in the dehydrating chamber; and a reflecting plate disposed in a direction in which the zigzag portion of the zigzag portion of the solid film overlaps One or both of the outer sides reflect at least a portion of the electromagnetic wave at least near infrared rays, wherein the infrared heater is disposed between the reflecting plate and the zigzag portion of the solid film. In this way, the near-infrared rays emitted from the infrared heater to the opposite direction of the zigzag portion of the solid film can be reflected by the reflecting plate, and the solid film can be dehydrated more efficiently.

The dewatering apparatus of the present invention may include a blower unit that blows a fluid into the dehydration chamber. Thereby, when the solid film is dehydrated by the infrared heater, the moisture which is discharged from the inside of the solid film by dehydration is removed by the air blow by the blower unit, and dehydration can be performed more efficiently. In this case, the fluid is blown from the air blowing unit, whereby the cooling of the solid film can also be performed. As a result, the solid film is dehydrated by the infrared heater, and the superheat of the solid film can be suppressed by the air blowing.

In the dehydration apparatus of the present invention having the aspect of the air blowing unit, the nozzle heater may be provided with the infrared heater and one or more nozzles as the air blowing unit that blows the fluid to the solid film. In this case, the attached nozzle heater includes: an outer peripheral portion covering at least a portion of the periphery of the infrared heater, the nozzle and the infrared ray transmitting and exposing surface, wherein the infrared ray is exposed to the outside through the exposed surface At least a part of the electromagnetic wave is transmitted through the near-infrared rays so as to be irradiated to the solid film, and the refrigerant flow path allows the cooling of the infrared rays to pass through the exposed surface. Thereby, it is possible to suppress the superheat of the infrared ray which is exposed to the outside through the exposed surface by the flow of the refrigerant. Further, by further suppressing the superheat of the infrared ray transmitting through the exposed surface, it is possible to further suppress the overheating of the environment in the solid film or the dehydration chamber, or to further reduce the distance between the nozzle heater and the solid film to improve the dehydration efficiency.

The above-described dewatering apparatus of the present invention having the nozzle heater attached thereto includes a transport unit that transports the solid film in a zigzag shape in the dehydration chamber, the attached nozzle heater having one of the infrared heaters, and A plurality of nozzles having a solid film configured to be sandwiched by the zigzag portion can blow the fluid for each of the solid films sandwiching itself. In this way, it can be equipped The nozzle heater attached to one infrared heater applies near-infrared rays and air to the solid film sandwiching both sides of the infrared heater, and can be provided with, for example, a nozzle heater attached to the solid film on both sides. A small number of infrared heaters are used for dehydration. In this case, when the above-described nozzle heater is configured to have the outer peripheral portion, the outer peripheral portion may have a plurality of the infrared ray transmitting and exposing surfaces, so that the solid film can be sandwiched from the infrared heater Irradiation near infrared rays.

In the dewatering apparatus of the present invention, the dehydration chamber may be an environment other than vacuum. In the dehydration device of the present invention, the water content in the solid film can be further reduced even in an environment other than vacuum, and the present invention can be dehydrated with a simple device configuration as compared with a case where the dehydration chamber is in a vacuum environment. In this case, the dehydration chamber may have an environment where the dew point temperature is -60 ° C or lower. Thereby, the moisture content inside the solid film is easily dehydrated to a lower value. Further, in the dehydration chamber, an atmosphere having a dew point temperature of -60 ° C or lower may be used.

10‧‧‧Dehydration device

14‧‧‧Dehydration room

15‧‧‧ front end

16‧‧‧ rear end face

17, 18‧‧‧ openings

19‧‧‧punching plate

20‧‧‧Air supply nozzle

22a, 22b‧‧‧ reflector

25‧‧‧Exhaust device

26‧‧‧Exhaust fan

27‧‧‧Tubular structures

28‧‧‧Exhaust port

29‧‧‧heater column

29a~29g‧‧‧1st heater column~7th heater column

30‧‧‧With nozzle heater

31a‧‧‧The outer part

31b‧‧‧The outer part

32~35‧‧‧1st to 4th members

36a‧‧‧Tubular members

37‧‧‧Infrared through the exposed surface

38‧‧‧reflective layer

39a~39f‧‧‧ nozzle

40‧‧‧Infrared heater

41‧‧‧ filament

41a‧‧‧Electrical wiring

42‧‧‧Inside

43‧‧‧ heater body

44‧‧‧External management

49‧‧‧Refrigerant flow path

50‧‧‧Cap

52‧‧‧Cylinder

54‧‧‧ Cover

57‧‧‧Wiring lead

58‧‧‧ Fluid inlet and outlet

59‧‧‧Temperature Sensor

60‧‧‧Power supply

65‧‧‧Refrigerant supply

67‧‧‧Opening and closing valve

68‧‧‧Flow adjustment valve

84, 86‧‧‧ reel

87‧‧‧Transport roller

70‧‧‧ Controller

80‧‧‧solid film

81‧‧‧ zigzag part

90a, 90b‧‧‧ Sealed materials

91‧‧‧ Space

92‧‧‧ Space

110‧‧‧Dehydration unit

129‧‧‧heater column

129a~129g‧‧‧1st heater column~7th heater column

144‧‧‧External management

144a‧‧‧Nozzle

210‧‧‧Dehydration unit

310‧‧‧Dehydration device

Fig. 1 is a longitudinal sectional view showing the dewatering apparatus 10 of the first embodiment.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

Fig. 3 is a longitudinal sectional view showing the dewatering apparatus 110 of the second embodiment.

Fig. 4 is an enlarged cross-sectional view showing the nozzle heater 30a.

Fig. 5 is a BB view showing the nozzle heater 30a attached to Fig. 4 as viewed from the B-B plane.

Fig. 6 is an enlarged cross-sectional view showing the nozzle heater 30d.

Fig. 7 is a longitudinal sectional view showing a dewatering apparatus 210 of a modification.

Fig. 8 is a longitudinal sectional view showing a nozzle heater 130 according to a modification.

Fig. 9 is a longitudinal sectional view showing the dewatering apparatus 310 of the embodiment.

(First embodiment)

Hereinafter, a first embodiment of the present invention will be described using the drawings. Fig. 1 is a longitudinal sectional view showing the dewatering apparatus 10 of the first embodiment. The dehydration device 10 is a device that performs dehydration of the solid film 80 using infrared rays and cold air, and includes a dehydration chamber 14, an exhaust device 25, a plurality of infrared heaters 40, a transport roller 87, and a controller 70. . Further, the dehydration device 10 includes a reel 84 that is disposed in front of the dehydration chamber 14 (on the left side of FIG. 1), and a reel 86 that is disposed behind the dehydration chamber 14 (on the right side of FIG. 1). The dewatering apparatus 10 is configured as a roll-to-roll type dewatering apparatus in which the solid film 80 to be dehydrated is continuously conveyed by the reels 84 and 86 and the plurality of conveyance roller shafts 87 in the conveyance direction. Further, in the present embodiment, the front and rear directions (the horizontal direction in the first drawing) are the conveyance directions, and the solid film 80 is conveyed from the front to the rear.

The dehydration chamber 14 is a device for performing dehydration of the solid film 80. The dehydration chamber 14 is a heat insulating structure formed into a substantially rectangular parallelepiped, and has openings 17 and 18 on the front end surface 15 and the rear end surface 16, respectively. The dehydration chamber 14 has a length from the front end surface 15 to the rear end surface 16 of, for example, 2 to 10 meters. In the dehydration chamber 14, a punching plate 19, a plurality of blow nozzles 20, reflectors 22a and 22b, a plurality of infrared heaters 40, and a plurality of transport roller shafts 87 are disposed.

In the dehydration chamber 14, the first transport roller shaft 87a to the seventh transport roller shaft 87g are disposed as a plurality of transport roller shafts 87. The first transport roller shaft 87a, The third transport roller shaft 87c, the fifth transport roller shaft 87e, and the seventh transport roller shaft 87g are disposed below the dewatering chamber 14, and the second transport roller shaft 87b, the fourth transport roller shaft 87d, and the sixth transport roller shaft 87f are disposed. On the upper side of the dehydration chamber 14. The plurality of transport roller shafts 87 are configured as non-contact roller shafts, and a fluid (for example, air at normal temperature or 50° C.) flows out from a plurality of holes of the cylindrical body to the periphery, thereby supporting the solid film 80 from the transport. The roller shaft 87 is simultaneously transported while being floated. The solid film 80 is conveyed slightly from the reel 84 through the opening 17 to the first transport roller shaft 87a, and is hung on the upper transport roller shaft 87 and under the order of the first transport roller shaft 87a to the seventh transport roller shaft 87g. The side transport roller shaft 87 is horizontally transported from the seventh transport roller shaft 87g through the opening 18 to the reel 86. By vertically arranging the first transport roller shaft 87a to the seventh transport roller shaft 87g in a staggered manner, the solid film 80 is transported so as to form a zigzag portion 81 that goes up and down in the dehydrating chamber 14. Further, the transport roller shaft 87 may be configured as a contact roller shaft.

The air blowing nozzle 20 is a device that can blow a fluid into the dehydrating chamber 14. A total of twelve air blowing nozzles 20 are disposed, and are arranged one by one to sandwich the solid film 80 suspended from the upper and lower sides of the zigzag portion 81 from the front-rear direction. Further, the air blowing nozzle 20 is disposed on the upper side of the zigzag portion 81 and slightly below the second transport roller shaft 87b, the fourth transport roller shaft 87d, and the sixth transport roller shaft 87f. The air blowing nozzle 20 is connected to an air supply fan or a pipe (not shown), and the fluid flowing from the air supply fan through the pipe is blown into the dehydrating chamber 14. The fluid is a cold air that can cool the solid film 80, and is, for example, air at normal temperature or below 50 °C. The lower the dew point of the fluid blown by the air blowing nozzle 20, the better. In the present embodiment, the air blowing nozzle 20 is a device that blows air (dry air) having a dew point of -60 ° C or lower. Each of the air blowing nozzles 20 is formed in a direction in which the opening portion faces the exhaust port 28 of the exhaust device 25 (in FIG. 1 In the downward direction), the fluid is blown downward from the upper side of the zigzag portion 81 of the solid film 80. Thereby, the wind blown from the air blowing nozzle 20 flows in the downward direction along the surface of the solid film 80 of the zigzag portion 81, and flows to the bottom of the dehydrating chamber 14 through the punching plate 19 attached to the lower side of the dehydrating chamber 14. In addition, although the drawings are omitted, the air blowing nozzles 20 are attached so that the longitudinal direction and the horizontal direction (the direction perpendicular to the paper surface of the first drawing) are parallel, and the opening of the air blowing nozzle 20 is a slit parallel to the left and right direction. shape. Further, the punching plate 19 is a plate-shaped member in which a plurality of holes are opened.

The exhaust device 25 is a device that discharges the ambient gas in the dehydration chamber 14. The exhaust device 25 includes an exhaust fan 26, a tubular structure 27, and a plurality of exhaust ports 28. A plurality of (five in the present embodiment) exhaust ports 28 are provided at the bottom of the dehydration chamber 14 and open toward the solid film 80 or the direction of the transport roller shaft 87 (upward direction in FIG. 1). The exhaust port 28 is attached to the tubular structure 27, and the ambient gas in the dehydration chamber 14 (mainly the gas which is blown by the air blow nozzle 20 along the surface of the sheet 50) is sucked into the tubular structure. Within 27. The tubular structure 27 is a structure that serves as a flow path of the ambient gas from the exhaust port 28 to the exhaust fan 26. The tubular structure 27 forms a passage through the exhaust port 28 that penetrates the bottom of the dewatering chamber 14 and reaches the outside of the dehydration chamber 14 by the exhaust fan 26. The exhaust fan 26 is attached to the tubular structure 27 such that the ambient gas inside the tubular structure 27 is discharged.

The plurality of infrared heaters 40 are means for irradiating electromagnetic waves including near-infrared rays (infrared rays having a wavelength of 0.7 to 3.5 μm) to dehydrate the solid film 80. The infrared heater 40 is arranged in a plurality of rows (in the present embodiment, seven columns: the first heater row 29a to the seventh heater row 29g). In addition, The first heater row 29a to the seventh heater row 29g are also collectively referred to as a heater row 29. Each row of the heater row 29 is composed of three infrared heaters 40 arranged in the vertical direction (a total of 21 infrared heaters 40). The first heater row 29a, the third heater row 29c, the fifth heater row 29e, and the seventh heater row 29g are disposed on the first transport roller shaft 87a, the third transport roller shaft 87c, and the fifth transport roller shaft, respectively. 87e and directly above the seventh transport roller shaft 87g. The second heater row 29b, the fourth heater row 29d, and the sixth heater row 29f are disposed directly below the second transport roller shaft 87b, the fourth transport roller shaft 87d, and the sixth transport roller shaft 87f. The heater column 29 is configured to interact side by side with the solid film 80 of the zigzag portion 81. That is, the columns of the heater row 29 are arranged side by side in the zigzag overlapping direction (the front-rear direction of FIG. 1) such that the solid film 80 of the zigzag portion 81 is sandwiched between the adjacent rows. Further, the air blowing nozzles 20 are disposed between the heater row 29 and the solid film 80 in the front-rear direction, so that the fluid blown from the air blowing nozzles 20 is blown to the respective rows of the heater row 29 and the solid film 80 of the zigzag portion 81. Space between.

Further, each of the rows of the heater arrays 29 and the three infrared heaters 40 constituting each row are disposed in a direction perpendicular to the overlapping direction of the infrared heater 40 constituting the adjacent row (the first row) 1) The upper and lower directions are staggered. In the present embodiment, the infrared heaters 40 of the respective rows of the heater rows 29 are disposed so as to be vertically shifted from the adjacent rows of the infrared heaters 40, and are arranged in a staggered shape when viewed from the side. For example, the first infrared heater 40 of the second heater row 29b is disposed in the middle of the first and second infrared heaters 40 in the vertical direction of the first heater row 29a. Therefore, as shown in Fig. 1, the second heater row 29b is The first infrared heater 40 is disposed at a distance d (≧0) from the first and second infrared heaters 40 that are counted upward from the first heater row 29a in the vertical direction. . Similarly, the other infrared heaters 40 are disposed at a distance d (≧0) from the infrared heater 40 that is closest in the vertical direction among the adjacent columns in the vertical direction. In the respective rows of the first heater row 29a, the third heater row 29c, the fifth heater row 29e, and the seventh heater row 29g, the arrangement of the infrared heaters 40 in the vertical direction is the same. In each of the second heater row 29b, the fourth heater row 29d, and the sixth heater row 29f, the arrangement of the infrared heaters 40 in the vertical direction is the same.

The plurality of infrared heaters 40 constituting the heater row 29 have the same configuration. Further, a plurality of infrared heaters 40 are mounted such that their longitudinal directions are perpendicular to the transport direction (front-rear direction) of the solid film 80. The configuration of one infrared heater 40 will be described below. Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1. As shown in the enlarged portion of Fig. 1 and Fig. 2, the infrared heater 40 includes a heater body 43 formed with an inner tube 42 surrounding a tungsten filament 41 as a heating element, and an outer tube 44 formed. The inner tube 42 is surrounded by the heater body 43; and a cap 50 is attached to both ends of the above-mentioned member. The space between the inner tube 42 and the outer tube 44 is a refrigerant flow path 49 through which a refrigerant (for example, air) can flow. Further, the infrared heater 40 has a temperature sensor 59 that detects the surface temperature of the outer tube 44 (see FIG. 2). In the present embodiment, the temperature sensor 59 is disposed on the lower side of the outer tube 44 as shown in Fig. 2, but may be disposed on the side of the outer tube 44 closest to the solid film 80. The inner tube 42 and the outer tube 44 are arranged concentrically, and the filament 41 is located at the center of the circle.

The heater body 43 is supported at both ends by a fixing seat 55 disposed inside the cap 50. The heater body 43 is supplied to the filament 41 by a power supply source 60 (see FIG. 2) disposed outside the dehydration chamber 14, and emits infrared rays when the filament 41 is heated to a predetermined temperature (for example, 1200 to 1700 ° C). Electromagnetic waves. The electromagnetic wave radiated from the filament 41 is not particularly limited, and may be, for example, a peak wavelength of an infrared region (a region having a wavelength of 0.7 μm to 8 μm) or a near-infrared region (a region having a wavelength of 0.7 μm to 3.5 μm). In the present embodiment, it is an electromagnetic wave having a radiation peak wavelength of around 3 μm. The inner tube 42 is a tube having a circular cross section that surrounds the filament 41. The inner tube 42 is made of a material that absorbs infrared rays having a wavelength exceeding 3.5 μm among electromagnetic waves radiated from the filament 41 and transmits at least infrared rays that transmit near infrared rays. Such infrared ray transmissive materials for the inner tube 42 are, for example, germanium, samarium, sapphire, calcium fluoride, barium fluoride, zinc selenide, zinc sulfide, sulfide glass, and transparent alumina ceramics. Etc. There are also quartz glass that can pass near infrared rays. In the present embodiment, the inner tube 42 is formed of quartz glass which absorbs infrared rays having a wavelength of more than 3.5 μm and transmits infrared rays of 3.5 μm or less among the infrared ray transmissive materials. In addition, the inside of the inner tube 42 is a vacuum environment or a halogen environment. The electric wiring 41a connected to the filament 41 is airtightly drawn to the outside through the wiring lead portion 57 provided in the cap 50, and is connected to the power supply source 60. As shown in FIG. 2, the cap 50 is integrally formed by a disk-shaped cover 54 and a cylindrical portion 52 that is erected on the cover 54. The left and right ends of the outer tube 44 are fixed to the cylindrical portion 52.

The outer tube 44 is a tube formed of the above-described infrared ray transmissive material. In the present embodiment, like the inner tube 42, it has an absorption wavelength exceeding 3.5 μm. Infrared rays are formed by quartz glass that passes infrared rays of 3.5 μm or less. Further, the outer tube 44 can be cooled to, for example, 200 ° C or lower by the refrigerant flowing through the refrigerant flow path 49.

The refrigerant flow path 49 is a space between the inner tube 42 and the outer tube 44, and the refrigerant can flow through the fluid inlet and outlet 58 provided in the cap 50. The refrigerant is a fluid such as air. The fluid inlet and outlet 58 is connected to a refrigerant supply source 65 disposed outside the dehydration chamber 14. The refrigerant supplied from the refrigerant supply source 65 flows into the refrigerant flow path 49 from the fluid inlet and outlet port 58 in one side, flows through the refrigerant flow path 49, and flows out from the other fluid inlet and outlet port 58. The refrigerant that has flowed through the refrigerant flow path 49 functions to directly lower the temperature of the outer tube 44 outside the infrared heater 40.

The reflection plates 22a and 22b (see FIG. 1) are plate-shaped members that reflect at least a part of the near-infrared rays among the electromagnetic waves radiated from the infrared heater 40. The reflecting plates 22a and 22b are disposed on both outer sides (both outer sides) of the zigzag portion 81 of the solid film 80 in the zigzag overlapping direction, and are disposed such that the plate surfaces face each other. Specifically, the reflecting plate 22a is disposed further forward than the zigzag portion 81 and located further forward of the first heater row 29a at the foremost side among the heater rows 29. The reflecting plate 22b is disposed rearward of the zigzag portion 81 and located further rearward of the seventh heater row 29g among the heater columns 29. Further, the upper ends of the reflecting plates 22a and 22b are further above the infrared heater 40 (for example, the uppermost infrared heater 40 of the first heater row 29a) located at the uppermost side of the heater row 29, and the reflecting plate The lower ends of 22a and 22b are located further below the infrared heater 40 (for example, the lowermost infrared heater 40 of the second heater row 29b) located at the lowest position of the heater row 29. The material of the reflecting plates 22a, 22b may be, for example, SUS304 or aluminum. metal. Further, the reflecting plates 22a and 22b may be coated with an infrared reflecting material that reflects at least near-infrared rays among the electromagnetic waves radiated from the infrared heater 40 on the surface of the plate-shaped member (the surface on the zigzag portion 81 side). The infrared reflective material is, for example, gold, platinum, aluminum or the like. For the coating, for example, a film forming method such as sputtering or CVD or thermal spraying can be used.

The solid film 80 is a dense substance that transmits at least a portion of near-infrared rays. Further, when the solid film 80 is before being dehydrated before being carried into the dehydration chamber 14, the moisture content inside thereof exceeds 0 mass% and is below 1 mass%. After the dehydration chamber 14 is dehydrated, the solid film 80 is formed into a transparent conductive film on its surface by sputtering or the like to form a transparent conductive film for use in a liquid crystal display or organic electroluminescence. The solid film 80 is a material used for such a transparent conductive film, and is, for example, a resin film such as a PET film. In the present embodiment, the solid film 80 is a PET film. Further, although not particularly limited, the solid film 80 has a thickness of, for example, 10 to 100 μm and a width of 200 to 1000 mm.

The controller 70 is constructed as a CPU-centered microprocessor. The controller 70 outputs a control signal to the air supply fan or exhaust fan 26 not shown in the figure of the nozzle 20, controls the temperature and air volume of the fluid blown from the nozzle 20, or controls the environment of the dehydration chamber 14 to be exhausted from the exhaust port 28. The amount of exhaust. Further, the controller 70 inputs the temperature of the outer tube 44 detected by the temperature sensor 59 of the thermocouple, or outputs a control signal to the on-off valve 67 provided in the middle of the piping connecting the refrigerant supply source 65 and the fluid inlet and outlet 58 and The flow rate adjustment valve 68 individually controls the flow rate of the refrigerant flowing through the refrigerant flow path 49 of the infrared heater 40 (see FIG. 2). Moreover, the controller 70 outputs a control signal for controlling the magnitude of the power supplied from the power supply source 60 to the filament 41 to the power supply source 60 to individually control the infrared heater. The temperature of the filament of 40 (refer to Figure 2). Further, the controller 70 controls the rotational speed of the reels 84, 86 or the flow rate of the fluid flowing out from the transport roller shaft 87, whereby the passage time of the solid film 80 in the dehydration chamber 14 or the tension applied to the solid film 80 can be adjusted. .

Next, the case where the solid film 80 is dehydrated using the dehydration device 10 having the above configuration will be described. First, a solid film 80 having an internal moisture content exceeding 0 mass% and being 1 mass% or less is prepared and attached to the reel 84. Here, the solid film 80 having a moisture content of more than 0% by mass and less than 1% by mass can be obtained by a method described later: for example, a film having a moisture content of more than 1% by mass is produced by a biaxial stretching method (in the present embodiment) The film made of PET is dried by a known drying device such as a drying oven which performs hot air drying. In the present embodiment, the solid film 80 having an internal moisture content of more than 0.1% by mass and less than 1% by mass is prepared by such a drying device.

When the solid film 80 is prepared to be attached to the reel 84, first, the inside of the dehydration chamber 14 is set to a predetermined environment during dehydration. In the present embodiment, the dehydration chamber 14 is an atmospheric environment having a dew point of -60 ° C or lower. For example, air having a dew point of -60 ° C or less may be blown out from the air blowing nozzle 20, or the ambient gas during dehydration may be supplied to the air supply device not shown in the other drawings to adjust the environment in the dehydrating chamber 14. Next, the controller 70 operates the reels 84 and 86 and the transport roller shaft 87 to start the transport of the solid film 80. Thereby, the solid film 80 is taken up from the reel 84 disposed in front of the dewatering apparatus 10 in the first drawing, and is conveyed into the dehydration chamber 14 through the opening 17 of the dehydration chamber 14. Subsequently, the solid film 80 is shaped like a zigzag by means of a plurality of conveying rollers 87 in a zigzag portion 81. Transported in a shape. Thereafter, the solid film 80 is carried out from the dehydration chamber 14 through the opening 18 of the dehydration chamber 14, and is wound up on the reel 86 disposed behind the dehydration chamber 14.

In this manner, while the continuous conveyance of the solid film 80 is being performed, the controller 70 controls the intake fan, the opening and closing valve 67, the flow rate adjusting valve 68, the electric power supply source 60, and the exhaust fan 26 which are not shown in the air blowing nozzle 20. Thereby, during the period in which the solid film 80 passes through the dehydration chamber 14 (especially during the period in which the solid film 80 is in the zigzag portion 81), near-infrared rays are irradiated from the infrared heaters 40 of the respective columns of the heater array 29 to the zigzag portion 81. The solid film 80 dehydrates the moisture inside the solid film 80. Further, as described above, the infrared heater 40 covers the filament 41 with the inner tube 42 and the outer tube 44 which absorb infrared rays having a wavelength exceeding 3.5 μm and allow infrared rays of 3.5 μm or less to penetrate. Therefore, electromagnetic waves including infrared rays (near-infrared rays) having a wavelength of 3.5 μm or less are radiated from the infrared heater 40 to the solid film 80. In other words, by providing the inner tube 42 and the outer tube 44, electromagnetic waves having an increased ratio of infrared rays having a wavelength of 3.5 μm or less among the electromagnetic waves radiated from the filament 41 are radiated to the solid film 80. Further, the near-infrared rays radiated from the infrared heater 40 in the opposite direction to the zigzag portion 81 are reflected by the reflecting plates 22a and 22b so as to face the zigzag portion 81 side. For example, the near-infrared rays radiated forward by the first heater row 29a (to the left in the first drawing) are reflected by the reflector 22a so as to face rearward (to the right in FIG. 1). The near-infrared rays radiated rearward by the seventh heater row 29g are reflected by the reflector 22b so as to face forward. Further, the moisture released from the inside of the solid film 80 by dehydration is removed by the wind blown by the air blowing nozzle 20. The moisture containing the moisture from the air blowing nozzle 20 passes through the punching plate 19 and is discharged by the exhaust device 25. Further, the wind blown by the air blowing nozzle 20 is cold air, which also cools the solid film 80. In this embodiment, the controller 70 controls the slave to send The flow rate of the wind blown by the air nozzle 20 is a predetermined value, and the flow rate of the wind blown from the air blowing nozzle 20 is controlled so as to be a predetermined value (for example, 60 ° C, which is a glass transition temperature (about 70 ° C) of the solid film 80 (PET). 50 ° C, 45 ° C, etc.). Not limited to this, the flow rate may be adjusted based on, for example, the temperature detected by the temperature sensor provided in the dehydration chamber 14 in the vicinity of the solid film 80, so that the temperature of the solid film 80 is maintained below the glass transition temperature.

By dehydrating the solid film 80 as described above, the moisture content of the solid film 80 in the state of being transported from the opening 18 (that is, after dehydration) is from 0.1 mass% before dehydration and below 1 mass%. It becomes a state in which the water content is lower. In the present embodiment, the controller 70 causes the output of the infrared heater 40, the air blowing amount of the air blowing nozzle 20, the conveying speed of the solid film 80, and the like to be values determined in advance by experiments, so that the moisture content of the dehydrated solid film 80 is contained. The amount is below a predetermined target value (for example, 100 ppm) which is less than 0.1 mass%. The solid film 80 dehydrated by the dehydration device 10 is formed into a transparent conductive film by a method such as sputtering to form a transparent conductive film for use in a liquid crystal display or organic electroluminescence.

In the dehydration device 10 of the first embodiment described above, the infrared heater 40 has a radiation containing a wavelength of 3.5 in a solid film having a moisture content of more than 0% by mass and less than 1% by mass. Infrared (near-infrared) electromagnetic waves of less than μm. Infrared rays of this wavelength can selectively impart energy to water molecules, and can efficiently dehydrate the solid film 80. Further, since at least a part of the near-infrared rays pass through the solid film 80, the infrared rays emitted from the infrared heater 40 easily act on the moisture inside the solid film 80. Thereby, the internal moisture content exceeds 0 mass% and The solid film 80 under 1% by mass is further dehydrated, and the moisture content in the solid film can be further reduced, for example, the moisture content in the solid film 80 is 100 ppm or less. Further, since the solid film 80 is dense, moisture is hard to escape to the outside, but since the dehydration device of the present invention can selectively impart energy to water molecules for dehydration, the present invention has a high significance. Further, the solid film 80 is a PET film having a glass transition temperature of, for example, a relatively low temperature of 70 ° C. However, since the PET film is hardly heated by near infrared rays, the solid film 80 in dehydration can be easily maintained below the glass transition temperature. Therefore, the application of the present invention has a high degree of significance.

Further, a transport roller shaft 87 for transporting the solid film 80 in a zigzag shape in the dehydration chamber 14 is provided, and a plurality of infrared heaters 40 are disposed as a plurality of heater rows 29, and the plurality of heater rows 29 are arranged side by side in a direction overlapping with the zigzag The solid film 80 is sandwiched, and one or more columns of the plurality of heater rows 29 are arranged, and at least one of the infrared heaters 40 constituting each row of the heater rows 29 is arranged to be adjacent to the infrared rays constituting the adjacent columns. The heater 40 is staggered in a direction perpendicular to the overlapping direction. Therefore, the infrared rays emitted from the infrared heater 40 disposed in the staggered manner pass through the solid film 80 and are easily irradiated to the solid film in front of the solid film 80. For example, the infrared rays emitted from the infrared heater 40 of the first heater row 29a are not only irradiated to the solid film 80 which is hung between the first transport roller shaft 87a and the second transport roller shaft 87b among the zigzag portions 81, but also easily The solid film 80 is hung between the zigzag portion 81 and the second transport roller shaft 87b and the third transport roller shaft 87c. Thereby, the infrared rays emitted from the one infrared heater 40 can be more efficiently irradiated onto the solid film 80, and dehydration can be performed more efficiently. In addition, the infrared heater 40 is disposed so as to overlap the infrared heater 40 constituting the adjacent row. When it is shifted in the vertical direction, the region in which the near-infrared rays are absorbed in the solid film 80 is easily dispersed, and the temperature distribution unevenness of the solid film 80 can be further suppressed. Further, in the present embodiment, in any one of the plurality of heater rows 29, any one of the infrared heaters 40 constituting the row is disposed in the overlapping direction with the infrared heater 40 constituting the adjacent row. The vertical direction is staggered, so this effect can be further improved.

Further, on both outer sides in the overlapping direction of the zigzag portion of the zigzag portion 81 of the solid film 80, reflection plates 22a and 22b reflecting at least a part of the electromagnetic waves emitted from the infrared heater 40 are provided, and infrared rays are provided. The heater 40 is disposed between the reflecting plates 22a and 22b and the zigzag portion 81 of the solid film 80. Therefore, the near-infrared rays radiated from the infrared heater 40 to the opposite direction of the zigzag portion 81 of the solid film 80 can be reflected by the reflecting plates 22a and 22b, and the dehydration of the solid film 80 can be performed more efficiently.

Further, it includes a blowing nozzle 20 that blows a fluid into the dehydrating chamber 14. As a result, when the solid film 80 is dehydrated by the infrared heater 40, the moisture that has escaped from the inside of the solid film 80 by dehydration is removed by the air blow of the air blowing nozzle 20, and dehydration can be performed more efficiently. Further, the solid film 80 can be cooled by blowing the fluid from the air blowing nozzle 20. As a result, dehydration of the solid film 80 by the infrared heater 40 can suppress the overheating of the solid film 80 by air blowing.

Further, the inside of the dehydration chamber 14 may be an environment other than a vacuum. In the dehydration device 10 of the present embodiment, by irradiating the near-infrared rays, the moisture content in the solid film 80 can be further reduced even in an environment other than vacuum, and the vacuum chamber can be made in a vacuum environment. The implementation can be simple The device is configured to perform dehydration. Further, in the dehydration chamber 14, since the dew point temperature is in the range of -60 ° C or lower during dehydration, the moisture content inside the solid film 80 is easily dehydrated to a lower value.

(Second embodiment)

Next, a second embodiment of the present invention will be described. Fig. 3 is a longitudinal sectional view showing the dewatering apparatus 110 of the second embodiment. The dehydration device 110 differs from the first embodiment only in the configuration described below, and the rest of the configuration is the same as that of the first embodiment: the air blowing nozzle 20 and the reflecting plates 22a and 22b are not provided; and the plurality of nozzle heaters 30 having the infrared heater are provided. Instead of the plurality of infrared heaters 40, a plurality of heater rows 129 including nozzle heaters 30 are provided instead of the plurality of heater rows 29. Therefore, the same components as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and the description thereof will be omitted, and the differences from the first embodiment will be described.

The nozzle heater 30 is a device that can perform infrared irradiation and fluid blowing, and is mounted such that the longitudinal direction is perpendicular to the transport direction (front-rear direction) of the solid film 80. There are two types of nozzle heaters 30: a nozzle heater 30a that can supply air from one side, a nozzle heater 30b, an attached nozzle heater 30c, and a nozzle heater 30d that can blow air from both sides. The nozzle heater 30 is disposed in the dehydration chamber 14 to form a plurality of columns (in the present embodiment, seven columns: the first heater row 129a to the seventh heater row 129g). Further, the first heater row 129a to the seventh heater row 129g are collectively referred to as a heater row 129. Each row of the heater row 129 is composed of three nozzle heaters 30 that are evenly arranged in the vertical direction. The first heater row 129a located at the forefront of the heater row 129 is blown by the solid film 80 disposed to face rearward The three blower heaters 30a are provided. The seventh heater row 129g located at the last of the heater rows 129 is constituted by three nozzle heaters 30b that are disposed to blow the wind toward the solid film 80 on the front side. Each of the second heater row 129b to the sixth heater row 129f other than the above is constituted by three nozzle heaters 30d that are arranged to blow air toward the front and rear solid films 80. The arrangement of the columns of the heater row 129 and the arrangement of the nozzle heaters 30 constituting each row are the same as those of the heater row 29 of the first embodiment and the arrangement of the infrared heater 40. For example, as shown in Fig. 3, the first nozzle heater 30d from the top of the second heater row 129b is disposed in the first heater row 129a and is heated by the first and second nozzles provided above. The distance 30 (≧0) in the vertical direction of the device 30a. Further, in the dehydration chamber 14, in addition to the nozzle heater 30 constituting the heater row 129, a nozzle heater 30 to which infrared rays are irradiated and air is supplied to a portion other than the zigzag portion 81 of the solid film 80 is disposed. Specifically, one nozzle heater 30c that can blow air toward the lower solid film 80 is disposed between the opening 17 and the transport roller shaft 87a and between the opening 18 and the transport roller shaft 87g.

Next, the nozzle heater 30a is attached. Fig. 4 is an enlarged cross-sectional view showing the nozzle heater 30a. Fig. 5 is a BB view showing the nozzle heater 30a attached to Fig. 4 as viewed from the B-B plane. In addition, the nozzle heater 30b including the seventh heater row 129g has a configuration opposite to that of the nozzle heater 30a constituting the first heater row 129a. In addition, the nozzle heater 30c provided between the opening 17 and the transport roller shaft 87a and between the opening 18 and the transport roller shaft 87g has the attached nozzle heater 30a constituting the first heater row 129a in Fig. 4 The middle is rotated 90 degrees to the right. As shown in Figure 4 As shown in the figure, the nozzle heater 30a includes an infrared heater 40 and an outer peripheral portion 31a that covers the infrared heater 40.

As shown in Fig. 4, the outer peripheral portion 31a includes a first member member 32 to a fourth member member 35, a tubular member member 36a having an infrared ray transmitting and exposing surface 37, a reflecting layer 38, nozzles 39a and 39b, and a sealing member 90a. 90b. The first member member 32 is a member constituting the outermost circumference of the nozzle heater 30a, and has an opening at the rear (the right side in FIG. 4). The rear ends of the second member 33 and the third member 34 and the infrared ray transmitting the exposed surface 37 are exposed from the opening at the rear of the first member 32. The second member member 33 and the third member member 34 are curved plate-shaped members, and are disposed between the first member member 32 and the tubular member member 36a, and are disposed between the second member member 33 and the third member member 34. The tubular member 36a is sandwiched from above and below. The fourth member member 35 is a plate-like member that is bent to open rearward, and covers the front side of the tubular member 36a and covers the front side and the upper and lower sides of the infrared heater 40. The fourth member member 35 has a rear end on the upper side joined to the front end of the second member member 33, and a rear side on the lower side thereof joined to the front end of the third member member 34. The fourth member member 35, the second member member 33, and the third member member 34 are joined by, for example, soldering. Thereby, the space 91 surrounded by the inner peripheral surface of the first member member 32, the second member member 33, the third member member 34, and the outer peripheral surface of the fourth member member 35 is formed. The first member member 32 is connected to a gas supply fan or a pipe which is not shown in the drawing of the air blowing nozzle 20 of the first embodiment, and the space 91 serves as a flow path for blowing air from the air supply fan to the nozzles 39a and 39b. In addition, the first member 32 has a side portion at the end portion in the left-right direction (the horizontal direction in FIG. 5), and the inner space of the first member 32 is sealed by the side portion (the space 91, 92) The end in the left-right direction. In addition, the end portions of the second member member 33, the third member member 34, and the fourth member member 35 in the left-right direction are in contact with the side portions. The material of the first member member 32 to the fourth member member 35 is, for example, metal. In addition, it is preferable that the first member member 32 to the fourth member member 35 are formed of a material capable of reflecting at least a part of the near infrared ray, like the reflectors 22a and 22b of the first embodiment, for example, SUS304 or aluminum.

The nozzle 39a is formed of the first member 32 and the second member 33. The nozzle 39b is formed of the first member member 32 and the third member member 34. In other words, the first member member 32 and the second member member 33 are nozzle forming members that form the nozzle 39a, and the first member member 32 and the third member member 34 are nozzle forming members that form the nozzle 39b. Specifically, the rear upper end of the first member 32 and the rear end of the second member 33 are separated, whereby as shown in FIG. 5, the long side direction and the left and right direction are formed on the upper side of the infrared ray transmitting surface 37. (the left-right direction of Fig. 5) A slit-shaped nozzle 39a that is parallel. Similarly, the rear lower end of the first member 32 and the rear end of the third member 34 are separated, whereby as shown in FIG. 5, the long side direction and the left and right direction are formed on the lower side of the infrared light transmitting surface 37. (the left-right direction of Fig. 5) A slit-shaped nozzle 39b that is parallel. In addition, the surface of the rear upper end portion of the first member 32 that faces the rear end portion of the second member member 33 and the rear end portion of the second member member 33 are opposite to the rear upper end portion of the first member member 32. It is inclined from the horizontal direction (front-rear direction) so that the infrared ray is transmitted toward the side (downward) of the exposed surface 37 as it approaches the rear. Thereby, the fluid flowing through the space 91 from the nozzle 39a flows mainly downward toward the rear (the lower right of the third and fourth figures) along this inclination. Similarly, the surface of the rear lower end portion of the first member 32 that faces the rear end portion of the third member member 34 and the rear end portion of the third member member 34 are opposed to the rear lower end portion of the first member member 32. The surface is inclined from the horizontal direction (front-rear direction) so as to be closer to the infrared ray through the exposed surface 37 side (upward) as it approaches rearward. Thereby, the fluid flowing through the space 91 from the nozzle 39b is mainly oriented rearward along this inclination. The side goes up (the top right of Figures 3 and 4). The fluid blown by the nozzle 39a and the nozzle 39b is the same as the fluid blown from the air blowing nozzle 20 of the first embodiment. In addition, the first member member 32 to the third member member 34 of the nozzle forming member are disposed so as not to cover the infrared ray transmitting and exposed surface 37.

The tubular member 36a is a tubular member covering the periphery of the infrared heater 40. The tubular member 36a allows the infrared heater 40 to transmit at least a portion of the electromagnetic waves that are at least near-infrared, which is a member integrally formed of the above-described infrared-transmitting material. In the present embodiment, the tubular member 36a and the outer tube 44 of the infrared heater 40 are formed of quartz glass that absorbs infrared rays having a wavelength exceeding 3.5 μm and allows infrared rays of 3.5 μm or less to pass, like the inner tube 42. The tubular member 36a has an infrared ray transmitting surface 37 at the rear. The infrared ray transmitting surface 37 is formed in a planar shape, and its plane is a surface parallel to the vertical direction (the vertical direction in FIGS. 3 and 4). The infrared ray transmitting surface 37 and the rear ends of the first to third members 32 to 34 are located on the same plane. Further, the front side of the tubular member 36a has a curved shape such as a parabola, an elliptical arc, or an arc. In the present embodiment, it is a parabolic member. Although not shown in the drawings, the tubular member 36a has a side portion at the end portion in the left-right direction (the horizontal direction in FIG. 5), and the side portion almost seals the end portion of the space inside the tubular member 36a in the left-right direction. Further, the cap 50 (second drawing) of the infrared heater 40 penetrates the side portion of the tubular member 36a, and the side portion supports the infrared heater 40. Further, the tubular member 36a has the side portions at both ends thereof sandwiched by the side portions of both ends of the first member 32, and the tubular member 36a is held by the side portion of the first member 32. A reflective layer 38 is formed on the outer surface of the front side of the tubular member 36a. The reflective layer 38 is disposed on the side opposite to the infrared ray transmitting the exposed surface 37 when viewed by the filament 41, and can be reflected by the filament 41 as described above. Among the electromagnetic waves emitted, at least a portion of the infrared ray reflecting material is formed. The reflective layer 38 can be formed by forming a film of an infrared reflective material by a film formation method such as coating drying, sputtering, CVD, or thermal spraying on the surface of the tubular member 36a. The reflective layer 38 is formed on the front side surface of the tubular member 36a, so that its cross section is a curved shape along the front side of the tubular member 36a. Further, the infrared heater 40 (filament 41) is disposed at a focus or a center position of the curved shape. Therefore, a part of the near-infrared rays emitted from the filament 41 is reflected by the reflective layer 38, and transmitted through the exposed surface 37 through the infrared rays, and is efficiently irradiated to the solid film 80 at the rear. In the present embodiment, since the tubular member 36a and the reflective layer 38 have a parabolic shape, the near-infrared rays reflected by the reflective layer 38 travel horizontally rearward, and are irradiated into the solid film 80 and the infrared ray transmitting and exposing surface 37 in the front-rear direction. Opposite area. In addition, the refrigerant that flows through the refrigerant flow path 49 of the infrared heater 40 with the nozzle heater 30a not only has a function of directly lowering the temperature of the outer tube 44 outside the infrared heater 40, but also reduces the outer tube 44. The temperature of the infrared ray passing through the exposed surface 37 is indirectly lowered by the temperature. Further, a space between the tubular member 36a and the outer tube 44 may be used as a refrigerant flow path, and the temperature at which the refrigerant passes through the refrigerant flow path to directly transmit the infrared rays to the exposed surface 37 may be lowered.

The sealing members 90a and 90b are members for sealing the space 92 surrounded by the second member member 33 to the fourth member member 35. The sealing member 90a is a rod-shaped member parallel to the longitudinal direction and the left-right direction, and seals the rear end portion of the second member 33 and the rear upper side of the tubular member 36a having the infrared ray transmitting surface 37 (upper right in FIG. 4) A slit-like opening between the sides). The sealing member 90b is a rod-shaped member parallel to the longitudinal direction and the left-right direction, and seals the rear end portion of the third member 34 and has infrared rays. The line passes through a slit-like opening between the rear lower side (the lower right side of FIG. 4) of the tubular member 36a of the exposed surface 37. Thereby, the sealing members 90a and 90b suppress the wind that is blown from the nozzles 39a and 39b into the space 92. The sealing members 90a and 90b are elastomers such as resins. Further, the sealing members 90a and 90b may be solid members that are filled in the middle, or may be, for example, tubular hollow members.

Next, the nozzle heater 30d is attached. Fig. 6 is an enlarged cross-sectional view showing the nozzle heater 30d. As shown in Fig. 6, the infrared heater 40 and the outer peripheral portion 31b covering the infrared heater 40 are provided.

As shown in Fig. 6, the outer peripheral portion 31b includes an upper first member member 32a, a lower first member member 32b, a front second member member 33a, a rear second member member 33b, a front side third member member 34a, and a rear portion. The third third member member 34b, the upper fourth member member 35a, and the lower fourth member member 35b. Further, the outer peripheral portion 31b includes a tubular member 36b having infrared rays transmitted through the surfaces 37a and 37b, nozzles 39c to 39f, and sealing members 90c to 90f. The upper first member member 32a and the lower first member member 32b constitute a member constituting the outermost periphery of the nozzle heater 30d, and an opening is formed in front and rear (left and right of Fig. 6). The front side second member member 33a, the front end of the front side third member member 34a, and the infrared ray transmitting surface 37a are exposed from the front opening of the upper first member member 32a and the lower first member member 32b. The rear second member member 33b, the rear end of the rear third member member 34b, and the infrared ray transmitting surface 37b are exposed from the opening of the upper first member member 32a and the lower first member member 32b. The front side second member member 33a and the front side third member member 34a are curved plate-shaped members, and are disposed between the upper first member member 32a and the tubular member member 36b, and the lower first member member 32b and the tubular member. The tubular member 36a is sandwiched between the material 36b and the front side second member member 33a and the front side third member member 34a. About the rear side second member member 33b and the rear side member member 3b 34b is symmetrical with respect to the front side second member member 33a and the front side third member member 34a (the left-right symmetry in Fig. 6), and the other configurations are the same. The upper fourth member member 35a and the lower fourth member member 35b are plate-shaped members which are disposed above and below the tubular member member 36b and the infrared heater 40. The upper fourth member member 35a is joined to the front side second member member 33a and the rear side second member member 33b. The lower fourth member member 35b is joined to the front side third member member 34a and the rear side third member member 34b. Thereby, the space 91a surrounded by the upper first member member 32a, the front second member member 33a, the rear second member member 33b, and the upper fourth member member 35a is formed, and the lower first member member 32b and the front side are formed. The space 13b surrounded by the third member member 34a, the rear third member member 34b, and the lower fourth member member 35b. The upper first member member 32a and the lower first member member 32b are connected to the air supply fan or the pipe not shown in the same manner as the air blowing nozzle 20 of the first embodiment, and the spaces 91a and 91b serve as the slave air supply fan to the nozzle 39c. The flow path of the 39f air supply. The upper first member member 32a, the lower first member member 32b, the front side second member member 33a, the rear side second member member 33b, the front side third member member 34a, the rear side third member member 34b, and the upper fourth member member For the material of the lower third member member 35b, the same material as the first member member 32 to the fourth member member 35 to which the nozzle heater 30a is attached can be used.

The nozzle 39c is formed by the front end of the upper first member member 32a and the front end of the front second member member 33a. The nozzle 39d is formed by the front end of the lower first member member 32b and the front end of the front side third member member 34a. The nozzle 39e is formed by the rear end of the upper first member member 32a and the rear end of the rear second member member 33b. The nozzle 39f is formed by the rear end of the lower first member member 32b and the rear end of the rear third member member 34b. In other words, the upper first member member 32a, the lower first member member 32b, the front second member member 33a, the rear second member member 33b, the front third member member 34a, and the rear third member member 34b are formed as nozzles. The nozzles of 39c to 39f form a member. These nozzles 39c~39f, and the accompanying spray Similarly to the nozzles 39a and 39b of the nozzle heater 30a, a nozzle having a slit shape in which the longitudinal direction and the horizontal direction are parallel is formed. In addition, the front and rear ends of the upper first member member 32a, the front and rear ends of the lower first member member 32b, the front end of the front second member member 33a, the rear end of the rear second member member 33b, and the front side third member member 34a are provided. Each surface of the rear end of the front end and the rear third member member 34b is inclined from the horizontal direction. Thereby, the fluid that has flowed out from the nozzles 39c and 39d through the spaces 91a and 91b flows out along the obliquely near infrared rays through the exposed surface 37a. Similarly, the fluid that has flowed out through the spaces 91a and 91b from the nozzles 39e and 39f flows out along the obliquely near infrared rays through the exposed surface 37b. Specifically, the fluid flowing out from the nozzle 39c flows downward toward the front, and the fluid flowing out from the nozzle 39d flows upward in the forward direction. The fluid flowing out from the nozzle 39e flows downward toward the rear, and the fluid flowing out from the nozzle 39f flows out in the backward direction. The fluid blown from the nozzles 39c to 39f is the same as the fluid blown from the air blowing nozzle 20 in the first embodiment. In addition, the first member member 32a, the lower first member member 32b, the front second member member 33a, the rear second member member 33b, the front side third member member 34a, and the rear side third member member are formed as a nozzle. The material 34b is disposed so as not to cover the infrared ray transmitting surface 37a, 37b.

The tubular member 36b is a tubular member covering the periphery of the infrared heater 40. The tubular member 36b is a member integrally formed of an infrared ray transmissive material like the tubular member 36a with the nozzle heater 30a. In the present embodiment, the tubular member 36b is formed of quartz glass like the tubular member 36a. The tubular member 36b has an infrared ray transmitting surface 37a on the front side and an infrared ray transmitting surface 37b on the rear side. The infrared ray transmitting and exposing surfaces 37a and 37b are formed in a planar shape, and the plane is a plane parallel to the vertical direction (the vertical direction in FIGS. 3 and 6). The infrared ray transmits the exposed surface 37a, and the upper first member member 32a, the lower first member member 32b, and the front side The front ends of the second member member 33a and the front side third member member 34a are located on the same plane. Similarly, the infrared ray transmitting surface 37b is located on the same plane as the rear end of the upper first member member 32a, the lower first member member 32b, the rear second member member 33b, and the rear third member member 34b. The electromagnetic wave containing near-infrared rays emitted from the infrared heater 40 is transmitted through the exposed surfaces 37a and 37b, and is irradiated into the solid film 80 and the region where the infrared rays are transmitted through the exposed surfaces 37a and 37b in the front-rear direction. Further, in the nozzle heater 30d, the refrigerant flowing through the refrigerant flow path 49 of the infrared heater 40 not only has a function of directly lowering the temperature of the outer tube 44 outside the infrared heater 40, but also reduces the outer tube 44. The temperature of the infrared rays transmitted indirectly through the exposed surfaces 37a and 37b is indirectly lowered. Further, the space between the tubular member 36b and the outer tube 44 may be used as a refrigerant flow path, and the temperature at which the refrigerant passes through the refrigerant flow path to directly transmit the infrared rays to the exposed surfaces 37a and 37b may be lowered.

The sealing members 90c to 90f seal the space 92a surrounded by the front side second member member 33a, the rear side second member member 33b, the upper fourth member member 35a, and the tubular member member 36b, or the front side third member member 34a. The member of the space 92b surrounded by the rear third member member 34b, the lower fourth member member 35b, and the tubular member member 36b. The sealing members 90c to 90f are rod-shaped members parallel to the longitudinal direction and the left-right direction, and seal the slit-like openings of the spaces 91a and 91b. Thereby, the sealing members 90c to 90f suppress the wind entering the spaces 92a and 92b blown from the nozzles 39c to 39f. The sealing members 90c to 90f can use the same members as the sealing members 90a and 90b to which the nozzle heater 30a is attached.

The dewatering device 110 adjusts the environment of the dehydration chamber 14 in the same manner as the dehydration device 10 described above, and transports the solid film 80, with the nozzle heater 30 from the infrared The line heater 40 is irradiated with near-infrared rays and blown by the nozzles 39a to 39f, whereby the solid film 80 is dehydrated in the same manner as the dehydrating device 10 until the water content thereof is 100 ppm or less.

In the dehydration device 110 of the second embodiment described above, the heater column 129 is disposed on the outer side of the zigzag portion 81 of the solid film 80 in the outer direction of the zigzag overlap direction (that is, the first heating) The infrared heater 40 with the nozzle heaters 30a and 30b of the heater row 129a and the seventh heater row 129g) has a reflection layer 38 formed on the tubular member 36a as shown in Fig. 4 . The reflective layer 38 is disposed on the side opposite to the zigzag portion 81 of the solid film 80 when viewed by the filament 41. Therefore, the near-infrared rays radiated from the infrared heater 40 of the first heater row 129a and the infrared heater 40 of the seventh heater row 129g in the opposite direction of the zigzag portion 81 are reflected by the reflective layer 38 toward the zigzag portion 81 side. . Thereby, the near-infrared rays emitted from the infrared heater 40 can be more efficiently irradiated onto the solid film 80, and the dehydration of the solid film can be performed more efficiently.

Further, the nozzle heaters 30a to 30c include nozzles 39a and 39b that can blow the infrared heater 40 and the solid film 80, and the nozzle heater 30d includes a nozzle 39c that can blow the infrared heater 40 and the solid film 80. 39f. Therefore, the dehydration of the solid film 80 is performed by the infrared heater 40, and the water discharged from the inside of the solid film 80 by dehydration is removed by the air blowing from the nozzles 39a to 39f, whereby dehydration can be performed more efficiently. Further, by blowing the fluid from the nozzles 39a to 39f to cool the solid film 80, the infrared heater 40 can perform dehydration of the solid film 80, and the overheating of the solid film 80 can be suppressed by air blowing.

Further, in the nozzle heater 30a, the nozzle 39a blows the fluid toward the lower rear side (the lower right side in Fig. 4), and the nozzle 39b blows the fluid toward the upper rear side (the upper right side of Fig. 4), and the fluid is directly blown by the nozzles 39a and 39b. The region in which the near-infrared rays are transmitted from the infrared heater 40 through the infrared ray transmitting surface 37 (the region facing the infrared ray transmitting surface 37 and the region around it in FIG. 4). In other words, in the present embodiment, the inclination angle of the rear end portion of the first member member 32 to the third member member 34 or the distance between the nozzle heater 30a and the solid film 80 is adjusted in advance so that the solid film 80 is surrounded by near infrared rays. The irradiated area and the area directly blown by the fluid (the area on the extension line of the outflow direction in which the air is blown from the nozzles 39a and 39b) overlap. Thereby, the moisture dehydrated by the near-infrared rays can be efficiently removed by blowing air. The same applies to the attached nozzle heaters 30b, 30c or the attached nozzle heater 30d.

Further, the nozzle heaters 30a to 30c include an outer peripheral portion 31a having nozzles 39a and 39b, and an infrared ray that illuminates the solid film 80 through a portion of the electromagnetic waves emitted from the filament 41 that is exposed to the outside and transmitted through the solid film 80. The exposed surface 37 covers at least a portion of the periphery of the infrared heater 40, and a refrigerant flow path 49 through which the refrigerant that transmits the infrared ray through the exposed surface 37 flows. Similarly, the nozzle heater 30d includes an outer peripheral portion 31b having nozzles 39c to 39f and infrared light transmitting the exposed surfaces 37a and 37b, and a refrigerant flow path 49. Therefore, it is possible to suppress the superheat of the infrared ray transmitting the exposed surfaces 37, 37a, 37b as the surface exposed to the outside by the circulation of the refrigerant. Further, by further suppressing the superheat of the infrared rays transmitted through the exposed surfaces 37, 37a, 37b, it is possible to further suppress the overheating of the environment in the solid film 80 or the dehydration chamber 14, for example. Further, the distance between the nozzle heater 30 and the solid film 80 is transmitted (infrared rays are transmitted through the exposed surfaces 37, 37a, The distance between 37b and the solid film 80 is shorter and more efficiently irradiated to the near infrared rays, and the dehydration efficiency can be improved.

Further, the nozzle heater 30d is provided with one infrared heater 40, and has a plurality of nozzles 39c which are disposed so as to be sandwiched by the solid film 80 of the zigzag portion 81 and which can respectively blow the fluid to the solid film 80 sandwiching itself. ~39f. That is, the nozzle heater 30d includes nozzles 39c to 39d that blow fluid to the front solid film 80, and nozzles 39e to 39f that blow the fluid toward the rear solid film 80. In this manner, near-infrared rays can be irradiated and blown from the solid film 80 sandwiching both sides of the nozzle heater 30d having one infrared heater 40. Therefore, the nozzle heaters 30a and 30b are disposed in a back-to-back manner instead of the nozzle heaters 30d and the like, and the nozzle heaters 30a and 30b are disposed in the front and rear solid films 80, respectively, and a small number of infrared heaters can be used. 40 is dehydrated.

Here, the correspondence between the constituent elements of the first to second embodiments and the constituent elements of the present invention will be described. The dehydration chamber 14 of the first to the second embodiment corresponds to the dehydration chamber of the present invention, and the filament 41 of the first to second embodiments corresponds to the heating element of the present invention, and the inner tube 42 and the outer tube of the first to second embodiments. The tube 44 and the tubular members 36a and 36b of the second embodiment correspond to the tube of the present invention, and the infrared heater 40 of the first to second embodiments corresponds to the infrared heater of the present invention. In addition, the transport roller shaft 87 of the first to the second embodiment corresponds to the transport unit of the present invention, and the reflective layer 38 of the second embodiment corresponds to the reflective layer of the present invention, and the reflectors 22a and 22b of the first embodiment are equivalent to each other. In the reflector of the present invention, the air blowing nozzle 20 of the first embodiment and the nozzles 39a to 39f of the second embodiment correspond to the air blowing unit of the present invention. Further, the nozzle 39a of the second embodiment 39f corresponds to a nozzle, and the nozzle heater 30 of the second embodiment corresponds to a nozzle heater, and the infrared ray transmitting exposed surfaces 37, 37a, and 37b of the second embodiment correspond to an infrared ray transmitting exposed surface, and the outer peripheral portion of the second embodiment. 31a and 31b correspond to the outer peripheral portion, and the refrigerant flow path 49 of the second embodiment corresponds to the refrigerant flow path.

Further, the present invention is not limited to the above-described embodiments, and as long as it is within the technical scope of the present invention, it can of course be implemented in various forms.

For example, in the above-described first embodiment, the number of the infrared heaters 40 provided in each row of the heater row 29 is the same, but is not limited thereto. For example, the infrared heater 40 may be disposed to have a relatively dense tendency on the downstream side in the transport direction (front-rear direction), or the infrared heater 40 may be disposed to have a denser tendency on the upstream side in the transport direction (front-rear direction). . Fig. 7 is a longitudinal sectional view showing a dewatering apparatus 210 of a modification. As shown in Fig. 7, in the dehydration device 210, the infrared heater 40 of the seventh heater row 29g on the rearmost side in the transport direction is denser than the second heater row 29b to the sixth heater row 29f. It is composed of six infrared heaters 40. Here, on the downstream side in the transport direction, that is, at the end of the dehydration process of the dehydration chamber 14, the moisture of the solid film 80 has been reduced, and the problem of deformation of the solid film 80 or the like is less likely to occur. Therefore, the infrared heater 40 on the downstream side is densely arranged to increase the radiation intensity of the near-infrared rays, whereby the function of dehydration can be effectively enhanced and the dehydration time can be shortened. Further, in the dehydration device 210, the infrared heater 40 of the first heater row 29a in the transport direction is denser than the second heater row 29b to the sixth heater row 29f, and is composed of six infrared rays. The heater 40 is constructed. Here, the upstream side in the transport direction, that is, in the initial stage of the dehydration process of the dehydration chamber 14, sometimes in the solid film The surface of 80 has moisture adhesion. Therefore, by densely arranging the infrared heaters 40 on the upstream side, such moisture can be quickly evaporated at the initial stage of dehydration, and the dehydration time can be shortened. Further, the infrared heater 40 may be disposed to be denser only on one of the upstream side and the downstream side in the transport direction. Further, in Fig. 7, the infrared heater 40 is densely disposed only in the first front heater row 29a and the rearmost seventh heater row 29g, but is not limited thereto. For example, when the infrared heater 40 is disposed such that the downstream side is dense, the density of the infrared heater 40 can be gradually increased toward the downstream side (the number of the infrared heaters 40 in each row is gradually increased). Similarly, when the infrared heater 40 is disposed so as to be dense on the upstream side, the density of the infrared heater 40 can be gradually increased toward the upstream side (the number of the infrared heaters 40 in each row is gradually increased). Further, in FIG. 7, the infrared heater 40 is disposed to be dense in the vertical direction, but the infrared heater 40 may be disposed to be dense in the front-rear direction. In addition, in the seventh embodiment, a modification of the first embodiment is shown, but the arrangement of the nozzle heater 30 according to the second embodiment is also the same.

In the second embodiment, the reflective layer 38 is formed on the outer surface of the tubular member 36a, but it may be formed on the inner surface. Alternatively, the reflective layer 38 may be formed on the outer or inner surface of the outer tube 44 or may be formed on the outer surface of the inner tube 42. Further, the object formed on the surface may be a reflective layer in which the infrared heater 40 is provided with an independent member. Similarly to the infrared heater 40 of the first embodiment, a reflective layer or a reflective layer having an independent member may be formed in the outer tube 44 or the inner tube 42. In this case, the infrared heating of the outer row arranged in the outer side in the overlapping direction of the zigzag portion of the zigzag portion 81 of the solid film 80 is formed. The reflector 40 is preferably provided with a reflective layer. Specifically, the infrared heater 40 constituting the first heater row 29a of Fig. 1 or the infrared heater 40 constituting the seventh heater row 29g is preferably provided with a reflective layer, and the infrared heaters 40 of the two rows have The reflective layer is especially good.

In the first embodiment, the heater row 29 is such that the infrared heaters 40 constituting each row are arranged such that the infrared heater 40 closest to the vertical direction of the adjacent row is apart from the distance d in the vertical direction. Not limited to this. For example, the infrared heater 40 closest to the vertical direction of the adjacent column may be partially overlapped in the vertical direction. The same applies to the nozzle heater 30 of the second embodiment.

In the first embodiment, any one of the plurality of heater rows 29 is arranged such that the infrared heaters 40 constituting the row are arranged in the overlapping direction with respect to the infrared heater 40 constituting the adjacent row. They are staggered from each other in the vertical direction, but are not limited to this. For example, among any one or more of the plurality of heater columns 29, the infrared heater 40 which is not disposed to be shifted from each other in the overlapping direction and the vertical direction with respect to the infrared heater 40 constituting the adjacent column may be included. Further, the heater array 29 that is disposed so as not to be adjacent to the infrared heater 40 constituting the adjacent row in the overlapping direction and the vertical direction may be included in one or more rows. The same applies to the nozzle heater 30 of the second embodiment.

In the first and second embodiments, the dehydration chamber 14 is an atmospheric environment having a dew point of -60 ° C or less during dehydration, but is not limited thereto. For example, the dew point is not -60 ° C or less. Further, it is not limited to the atmospheric environment, and may be an environment other than a vacuum (for example, an inert gas atmosphere). In addition, dehydration The air pressure in the chamber 14 is not limited to the atmospheric pressure, and may be a state in which the pressure is reduced from the atmospheric pressure. Alternatively, the dehydration chamber 14 may be in a vacuum environment.

In the first embodiment, the air blowing nozzle 20 blows the fluid in the downward direction of the first drawing, but is not limited thereto. For example, it may be blown obliquely downward toward the solid film 80. Further, in the second embodiment, the air blowing nozzle 20 may be provided.

In the first and second embodiments, the transport roller shaft 87 is suspended from the solid film 80 in the dehydration chamber 14 and transported in a zigzag manner, but is not limited thereto. For example, the solid film 80 may be suspended in the dehydration chamber 14 and transported in a zigzag manner. Alternatively, the solid film 80 may not be conveyed in a zigzag manner in the dehydration chamber 14, but may be linearly transported from the opening 17 to the opening 18.

In the second embodiment, the nozzle heater 30a is provided with the infrared ray transmitting and exposing surface 37. However, the infrared ray heater 40 may be exposed to the outside of the nozzle heater 30a without the infrared ray transmitting the surface 37. The same applies to the attached nozzle heaters 30b to 30d.

In the second embodiment, the outer peripheral portion 31a of the nozzle heater 30a includes the first to third members 32 to 34 as the nozzle forming members, and is independent of the tubular member 36a having the infrared ray transmitting exposed surface 37. However, it is also possible to form the nozzle by using a member having infrared rays transmitted through the exposed surface 37. For example, the configuration of the nozzle heater 130 according to the modification of Fig. 8 can be employed. The attached nozzle heater 130 includes an infrared heater 140 including a heater body 43 composed of a filament 41 and an inner tube 42, and an inner tube 42 formed to surround the heater body 43. Outer tube 144. The outer tube 144, like the tubular member 36a described above, allows the filament 41 to emit electromagnetic waves to A portion of the near-infrared rays are transmitted through, and the outer peripheral surface thereof is transmitted through the exposed surface 137. In addition, the outer tube 144 forms a plurality of nozzles 144a. In the nozzle heater 130 attached thereto, a space between the inner tube 42 and the outer tube 144 serves as a refrigerant flow path 49. The refrigerant that has flowed through the refrigerant flow path 49 flows out from the nozzle 144a to the outside of the nozzle heater 130, and this causes air to be blown to the solid film 80. In other words, in the nozzle heater 130, the refrigerant from the refrigerant flow path 49 can also serve as both the cooling itself and the blowing of the solid film 80. In the attached nozzle heater 130, it is also possible to simultaneously irradiate near-infrared rays and blow air.

In the second embodiment, the nozzle heater 30d is provided with near-infrared rays and air blown to the solid film 80 sandwiching both sides of the nozzle heater 30d. However, the nozzle heaters 30a and 30b may be placed back to back in place of the attached nozzle. Heater 30d. Further, the nozzle heater 30d is provided with one infrared heater 40, but a plurality of infrared heaters 40 may be provided. For example, the nozzle heater 30d may include two infrared heaters 40, and an infrared heater 40 that illuminates one of the solid films 80 on both sides of the solid film 80 and an infrared heater that irradiates the other side with near infrared rays. 40.

In the first and second embodiments, the transport roller shaft 87 allows the fluid to flow out to the surroundings, thereby supporting the solid film 80 while being transported from the transport roller shaft 87 itself, but it may also be carried out. The fluid of the conveying roller shaft 87 is utilized as air blowing to the solid film 80.

In the above-described embodiment, the material of the filament 41 using tungsten as the heating element is exemplified, but it is not particularly limited as long as it is a material that emits electromagnetic waves containing infrared rays during heating. For example, molybdenum (Mo), tantalum (Ta), iron-chromium-aluminum (Fe-Cr-Al) alloy, or nickel-chromium (Ni-Cr) alloy may be used.

In the above embodiment, air is used as the refrigerant or cold air flowing through the refrigerant flow path 49, but an inert gas such as nitrogen may be used.

(Example 1)

The dehydration device 310 shown in Fig. 9 was produced and used as the first embodiment. The dehydration device 310 includes a dehydration chamber 14, three infrared heaters 40, an exhaust device 25, and a gas supply device 29. The dehydration chamber 14 is provided with openings 17, 18 at its front end surface and rear end surface, respectively. The infrared heater 40 has the same configuration as the infrared heater 40 of the first embodiment. The filament 41 of the infrared heater 40 uses a 100% output of 750W. The three infrared heaters 40 are arranged at equal intervals in the front-rear direction. The exhaust device 25 discharges the ambient gas of the dehydration chamber 14 through the opening 17. The air supply device 29 supplies hot air (air) to the dehydration chamber 14 through the opening 18. The solid film 80 is a 175 mm × 145 mm PET film having a thickness of 38 μm, which is placed on a stage in the dehydration chamber 14. The moisture content of the solid film 80 is 1% by mass or less.

(Comparative Example 1)

The dehydration apparatus was produced as Comparative Example 1, and its configuration was substantially the same as that of the dehydration apparatus 310. The infrared dehydration apparatus 40 was not provided, and the infrared heater 40 was not provided, and only the hot air from the air supply unit 29 was dehydrated.

(evaluation test)

In Example 1 and Comparative Example 1, dehydration of the solid film 80 placed in the dehydration chamber 14 was performed, and the water content of the solid film 80 after dehydration was compared. In the first embodiment, the hot air temperature supplied to the air supply unit 29 was 30 ° C, the air volume was 37.6 m ³ /h, and the wind speed was 1.9 m/s. Further, the amount of air (exhaust amount) exhausted from the exhaust device 25 was 29.2 m ³ /h. The output of the infrared heater 40 is 78%, and the flow rate of the air flowing through the refrigerant flow path 49 is 300 L/min (each infrared heater 40). Further, when dehydration was performed under these conditions, the temperature of the exhaust gas of the exhaust unit 25 was 70 ° C, and the surface temperature of the outer tube 44 of the infrared heater 40 was 184 °C. In Comparative Example 1, the hot air temperature supplied to the gas supply device 29 was 82 ° C, the air volume was 37.6 m ³ /h, and the wind speed was 1.9 m / s. Further, the amount of air (exhaust amount) exhausted from the exhaust device 25 was 28.6 m ³ /h. Further, when dehydration was performed under these conditions, the temperature of the exhaust gas of the exhaust device 25 was 64 °C. The dehydration conditions of Example 1 and Comparative Example 1 were as shown in Table 1. Under the dehydration conditions, the dehydration time was changed to 30 minutes, 60 minutes, and 90 minutes to carry out an experiment, and the moisture content of the solid film 80 at each dehydration time was measured.

As a result of the above evaluation test, in the first embodiment, when the water content of the solid film 80 before dehydration is 100, the water content of the solid film 80 is 30 minutes, 60 minutes, and 90 minutes, respectively. It is about 35, about 20, and about 20. In Comparative Example 1, when the water content of the solid film 80 before dehydration is a value of 100, the moisture content of the solid film 80 is about 70, about 45, respectively, when the dehydration time is 30 minutes, 60 minutes, and 90 minutes. About 45. As a result, it was found that the dehydration device of Example 1 which was dehydrated by the infrared heater 40 had a low moisture content of the solid film 80 at a dehydration time of 30 minutes, 60 minutes, and 90 minutes. Further, in Example 1, even if the dehydration time was 30 minutes, the moisture content of the solid film 80 was lower than that in Comparative Example 1 by 30 minutes and 60 minutes. Any one of 90 points. In addition, in any of Example 1 and Comparative Example 1, when the dehydration time is 60 minutes or more, the moisture content of the solid film 80 is substantially constant. According to this, in Comparative Example 1, even if the dehydration time is set to be long, the moisture content of the solid film 80 cannot be reduced to the same level as in the first embodiment. In the dehydration apparatus of the first embodiment, the infrared heater 40 is used to absorb infrared rays exceeding 3.5 μm and the near-infrared rays are irradiated onto the solid film 80, whereby the moisture content inside the solid film can be further reduced.

The present application is based on the priority of Japanese Patent Application No. 2013-078339, filed on Apr. 4, 2013, the entire disclosure of which is incorporated herein.

The present invention can be utilized in a dehydration apparatus that performs heat treatment such as dehydration on a film of a PET film or the like for a liquid crystal display or organic electroluminescence.

10‧‧‧Dehydration device

14‧‧‧Dehydration room

15‧‧‧ front end

16‧‧‧ rear end face

17, 18‧‧‧ openings

19‧‧‧punching plate

20‧‧‧Air supply nozzle

22a, 22b‧‧‧ reflector

25‧‧‧Exhaust device

26‧‧‧Exhaust fan

27‧‧‧Tubular structures

28‧‧‧Exhaust port

29‧‧‧heater column

29a~29g‧‧‧1st heater column~7th heater column

40‧‧‧Infrared heater

41‧‧‧ filament

42‧‧‧Inside

43‧‧‧ heater body

44‧‧‧External management

49‧‧‧Refrigerant flow path

70‧‧‧ Controller

80‧‧‧solid film

81‧‧‧ zigzag part

84, 86‧‧‧ reel

87‧‧‧Transport roller

87a~87g‧‧‧1st transport roller shaft~7th transport roller shaft

Claims (13)

A dehydration device for dehydrating a solid film that passes at least a portion of near-infrared rays and has an internal moisture content exceeding 0 mass% and below 1 mass percent, and includes: dehydrating the solid film The dehydration chamber and the infrared heater include a heating element disposed in the dehydration chamber and emitting electromagnetic waves containing infrared rays, and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element. The dewatering apparatus of claim 1, comprising: a transport unit that transports the solid film in a zigzag shape in the dehydration chamber, wherein: the plurality of infrared heaters are configured in a plurality of columns, the plurality of columns being arranged side by side The solid film is sandwiched in a direction overlapping the zigzag, at least one of the plurality of columns, and at least one of the infrared heaters constituting the column is disposed to be in contact with an infrared heater constituting the adjacent column. The overlapping direction is shifted in the direction perpendicular to the vertical. The dewatering apparatus of claim 1 or 2, comprising: a transport unit that transports the solid film in a zigzag shape in the dehydration chamber, wherein: the plurality of infrared heaters are configured in a plurality of columns, the plurality of columns being side by side Arranging in a direction overlapping the zigzag to sandwich the solid film, the plurality of columns having outer rows, wherein the outer rows are disposed on one or both sides of the zigzag portion of the solid film in the overlapping direction, constituting the outer layer At least one of the infrared heaters of the outer row is located in the solid film when viewed from the heat generating body On the opposite side of the glyph portion, there is provided a reflective layer that reflects at least a portion of the electromagnetic wave that is at least near infrared. The dehydration device according to claim 3, wherein the outer row is disposed on both outer sides of the zigzag portion of the solid film in the overlapping direction, and the infrared heaters constituting the outer row are viewed from the heat generating body. On the opposite side of the zigzag portion of the solid film, there is provided a reflective layer that reflects at least a portion of the electromagnetic wave. A dewatering apparatus according to claim 1 or 2, comprising a transport unit that transports the solid film in the dehydration chamber, wherein the infrared heater is configured to be denser on a downstream side in a transport direction of the transport unit Propensity. A dewatering apparatus according to claim 1 or 2, comprising a transport unit that transports the solid film in the dehydration chamber, wherein the infrared heater is configured to be denser on an upstream side in a transport direction of the transport unit Propensity. The dewatering apparatus according to claim 1 or 2, further comprising: a transport unit that transports the solid film in a zigzag shape in the dehydration chamber; and a reflection plate disposed in a zigzag portion of the solid film One or both of the outer sides in the direction in which the zigzags overlap, reflecting at least a portion of the electromagnetic wave at least near infrared rays, wherein the infrared heater is disposed between the reflecting plate and the zigzag portion of the solid film. A dewatering apparatus according to claim 1 or 2, which comprises a blower unit that blows a fluid into the dehydration chamber. The dehydration device of claim 8, comprising: a nozzle heater having: the infrared heater, and as the solid film One or more nozzles of the air blowing unit that blow the fluid. The dehydration device of claim 9, wherein the incidental nozzle heater comprises: an outer peripheral portion covering at least a portion of a periphery of the infrared heater, the nozzle, and the infrared ray transmitting exposed surface, wherein The infrared ray is exposed to the outside through the exposed surface, and at least a portion of the electromagnetic wave is transmitted through the near-infrared ray so as to be irradiated to the solid film, and the refrigerant flow path allows the refrigerant to cool the infrared ray to pass through the exposed surface. The dewatering apparatus of claim 9, comprising: a transport unit that transports the solid film in a zigzag shape in the dehydration chamber, the attached nozzle heater having one of the infrared heaters, and having a configuration to be The plurality of nozzles sandwiched by the solid film of the zigzag portion can blow the fluid for each of the solid films sandwiching itself. The dehydration device according to claim 1 or 2, wherein the dehydration chamber is an environment other than a vacuum. The dehydration device according to claim 12, wherein the dehydration chamber has an environment having a dew point temperature of -60 ° C or lower.