JP2012241922A - Batch type coating film drying furnace - Google Patents

Batch type coating film drying furnace Download PDF

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JP2012241922A
JP2012241922A JP2011109349A JP2011109349A JP2012241922A JP 2012241922 A JP2012241922 A JP 2012241922A JP 2011109349 A JP2011109349 A JP 2011109349A JP 2011109349 A JP2011109349 A JP 2011109349A JP 2012241922 A JP2012241922 A JP 2012241922A
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coating film
workpiece
furnace
stage
drying furnace
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Takeki Fujita
雄樹 藤田
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NGK Insulators Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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    • Y02E60/10Energy storage using batteries

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Abstract

PROBLEM TO BE SOLVED: To provide a batch type coating film drying furnace, which is capable of promptly discharging vapor of an organic solvent to the outside of a furnace and efficiently drying the coating film.SOLUTION: The furnace includes a stage 2 on which a flat workpiece 3 coated with the coating film is put, an infrared heating device 5 to heat the workpiece 3, which is arranged on a ceiling above the stage 2, and a blower 11 and a discharging unit 12 each arranged at both sides of the stage 2. This structure generates a side wind at a height distant from the topside of the workpiece 3 in a space between the infrared heating device 5 and the workpiece 3 and promptly discharges the vapor of the organic solvent emitted from the coating film, to the outside of the furnace.

Description

本発明は、リチウムイオン電池用電極塗膜や太陽光発電用電極塗膜など、塗工装置によりペーストを塗工した膜乾燥に用いられるバッチ式塗膜乾燥炉に関するものである。   The present invention relates to a batch-type coating film drying furnace used for film drying in which a paste is applied by a coating apparatus, such as an electrode coating film for a lithium ion battery and an electrode coating film for photovoltaic power generation.

上記のような塗膜の乾燥炉としては、特許文献1に示されるように天井部に多数の赤外線ヒータを配置した構造の炉が知られている。上記のような塗膜には有機溶媒が含まれており、乾燥工程において塗膜が形成されたワークから大量の有機溶媒蒸気が発生する。この有機溶媒蒸気は所定濃度以上で300℃以上に加熱されると爆発する可能性があるため、速やかに炉外に排出する必要がある。   As a coating film drying furnace as described above, there is known a furnace having a structure in which a large number of infrared heaters are arranged on a ceiling as disclosed in Patent Document 1. The coating film as described above contains an organic solvent, and a large amount of organic solvent vapor is generated from the work on which the coating film is formed in the drying process. Since this organic solvent vapor may explode when heated to a predetermined concentration or higher and 300 ° C. or higher, it is necessary to quickly discharge it to the outside of the furnace.

このため従来から、炉室内に多量の熱風を打ち込んで乾燥を促進すると同時に有機溶媒蒸気を希釈し、熱風とともに炉外に排出することが行なわれている。しかし従来の塗膜乾燥炉においては熱風をワークに直接接触させているため、塗膜は表面から乾燥が進行する。このため塗膜内部の溶媒は表面に向かって移動し、溶媒中に溶けているバインダーも表面側に移動する。この結果、塗膜内部におけるバインダー濃度は表面側が高く、ベースとなるシート例えば金属箔やガラス板側が低くなり、シートとの接着強度が不十分となるという傾向がある。特にリチウムイオン電池用電極は金属シート上に塗膜を形成しており、組立て時に多重に巻いたり、あるいは折り曲げ構造をとるために、シートと塗膜との接着性の低下はシートと塗工膜の剥離の原因となり電池の歩留低下に直結する。   For this reason, conventionally, a large amount of hot air is blown into the furnace chamber to accelerate drying, and at the same time, the organic solvent vapor is diluted and discharged out of the furnace together with the hot air. However, in the conventional coating film drying furnace, hot air is brought into direct contact with the workpiece, so that the coating film is dried from the surface. For this reason, the solvent inside the coating film moves toward the surface, and the binder dissolved in the solvent also moves toward the surface side. As a result, the binder concentration inside the coating film is high on the surface side, and the base sheet such as a metal foil or glass plate side tends to be low, and the adhesive strength with the sheet tends to be insufficient. In particular, the electrode for a lithium ion battery has a coating film formed on a metal sheet, and because of the multiple winding or folding structure at the time of assembly, the decrease in the adhesion between the sheet and the coating film is caused by the sheet and coating film. Cause a peeling of the battery and directly leads to a decrease in the yield of the battery.

また、塗膜表面から乾燥が進行すると表面にバインダーが析出して膜が形成されてしまい、塗膜内部からの溶媒の移動を妨げるという問題もある。このような状態となると塗膜乾燥速度が低下し、乾燥終了までに長時間を要するため生産性の低下を招くこととなる。   Moreover, when drying progresses from the coating film surface, a binder will precipitate on the surface and a film | membrane will be formed, and there also exists a problem that the movement of the solvent from the inside of a coating film is prevented. In such a state, the coating film drying speed is reduced, and it takes a long time to complete the drying, leading to a reduction in productivity.

特許第3953911号公報Japanese Patent No. 3953911

従って本発明の目的は上記した従来の問題点を解決し、有機溶媒蒸気を速やかに炉外に排出することができ、シートとの接着強度を低下させることなく塗膜を効率的に乾燥させることができるバッチ式塗膜乾燥炉を提供することである。   Therefore, the object of the present invention is to solve the above-mentioned conventional problems, to quickly discharge organic solvent vapor to the outside of the furnace, and to efficiently dry the coating film without reducing the adhesive strength with the sheet. It is to provide a batch type coating film drying furnace capable of performing the following.

上記の課題を解決するためになされた本発明は、塗膜が形成された平面状のワークが載せられるステージと、その上方の天井部に配置されワークを加熱する赤外線加熱装置と、この赤外線加熱装置とワークとの間の空間内に、ワークの上面から離隔した高さの横風を形成するために前記ステージを挟んで設置された送風手段及び排気手段とを備えたことを特徴とするものである。   The present invention made to solve the above problems includes a stage on which a planar workpiece on which a coating film is formed is placed, an infrared heating device that is disposed on the ceiling portion above the workpiece and heats the workpiece, and this infrared heating In the space between the apparatus and the workpiece, there is provided a blower unit and an exhaust unit that are installed across the stage in order to form a cross wind with a height separated from the upper surface of the workpiece. is there.

なお、送風手段は送風用スリットを備え、排気手段は吸引用スリットを備えたものであることが好ましい。また、ワークが載せられるステージが高さ調節可能なものであり、ワークの上面からの横風の離隔距離を可変とした構造が好ましく、ワークの上面からの横風の離隔距離は、10〜500mmの範囲とすることが好ましい。さらに赤外線加熱装置が、フィラメントが封入された石英管を、冷却流体が供給される外側管の内部に封入した二重管式ヒータであることが好ましい。   In addition, it is preferable that a ventilation means is provided with the slit for ventilation, and an exhaust means is provided with the slit for suction. Further, the stage on which the workpiece is placed is adjustable in height, and a structure in which the separation distance of the cross wind from the upper surface of the workpiece is variable is preferable, and the separation distance of the cross wind from the upper surface of the workpiece is in the range of 10 to 500 mm. It is preferable that Further, the infrared heating device is preferably a double tube heater in which a quartz tube in which a filament is enclosed is enclosed in an outer tube to which a cooling fluid is supplied.

本発明によれば、ワークが載せられるステージを挟んで設置された送風手段及び排気手段とによって、ワークの上面から離隔した高さに横風を形成する。このため赤外線加熱装置により加熱されたワークの塗膜から発生する有機溶媒蒸気は、この横風によって速やかに炉外に排出される。しかもこの横風は直接ワークに接触することがないため、ワーク表面の塗膜は専ら赤外線によって乾燥される。赤外線は波長をコントロールすることによって塗膜の内部にも浸透させることができるので、ワークの表面に直接熱風を当てて乾燥させる場合よりも塗膜全体を均等に乾燥させることが可能となり、シートとの接着強度を低下させることなく塗膜を効率的に乾燥させることができる。   According to the present invention, the cross wind is formed at a height separated from the upper surface of the workpiece by the blowing unit and the exhaust unit installed across the stage on which the workpiece is placed. For this reason, the organic solvent vapor | steam generated from the coating film of the workpiece | work heated by the infrared heating apparatus is rapidly discharged | emitted out of a furnace with this cross wind. Moreover, since the cross wind does not directly contact the workpiece, the coating film on the workpiece surface is exclusively dried by infrared rays. Infrared rays can penetrate the inside of the coating film by controlling the wavelength, so that it is possible to dry the entire coating film more evenly than when the hot air is directly applied to the surface of the workpiece to dry it. The coating film can be efficiently dried without reducing the adhesive strength.

請求項2のように送風手段は送風用スリットを備え、排気手段は吸引用スリットを備えたものとしておけば、横風を高さ方向の幅が薄い帯状とすることができ、ワークの塗膜から発生する有機溶媒蒸気を確実に排気できるとともに、横風のワークとの接触を確実に防止することができる。   If the blowing means is provided with a blowing slit and the exhaust means is provided with a suction slit as in claim 2, the cross wind can be formed into a strip shape with a thin width in the height direction, The generated organic solvent vapor can be reliably exhausted, and contact with the crosswind work can be reliably prevented.

なお塗膜やワークの種類によっては横風とワークの上面との最適な離隔距離が変わるため、ワークが載せられるステージを高さ調節可能としておけば、容易に最適距離に設定することができる。最適距離は10〜500mmの範囲である。   The optimum separation distance between the cross wind and the upper surface of the workpiece changes depending on the type of the coating film or the workpiece. Therefore, if the height of the stage on which the workpiece is placed can be adjusted, the optimum distance can be easily set. The optimum distance is in the range of 10 to 500 mm.

また赤外線加熱装置が、フィラメントが封入された石英管を、冷却流体が供給される外側管の内部に封入した二重管式ヒータとすれば、フィラメント温度を700℃程度の高温として塗膜乾燥に適した近赤外線を照射しながら、ヒータの外表面温度を150℃以下の低温に維持することが可能となり、炉内温度の上昇を抑制することができるので、有機溶媒蒸気による爆発をより確実に防止することが可能となる。   In addition, if the infrared heating device uses a double tube heater in which the filament tube is enclosed in an outer tube to which a cooling fluid is supplied, the filament temperature is increased to about 700 ° C. to dry the coating film. The outer surface temperature of the heater can be maintained at a low temperature of 150 ° C. or lower while irradiating a suitable near infrared ray, and the rise in the furnace temperature can be suppressed. It becomes possible to prevent.

本発明の実施形態を示す断面図である。It is sectional drawing which shows embodiment of this invention. 二重管式ヒータの説明図である。It is explanatory drawing of a double tube | pipe type heater.

以下に本発明の好ましい実施形態を示す。
図1は本発明のバッチ式塗膜乾燥炉の断面図であり、1はボックス状の炉体である。炉体1の中央下方部には、ワーク3が載せられるステージ2が設けられている。本実施形態ではワーク3はリチウムイオン電池用の電極シートであり、アルミニウム等のシート上に厚さが100〜300μmの塗膜が形成されたものである。この塗膜は、正極活物質であるコバルト酸リチウム、導電物質であるカーボン粉末、バインダーであるPVDF(ポリフッ化ビニリデン)などが有機溶媒であるNMP(N−メチル-ピロリドン)と混練されたペースト状のものである。なおこのステージ2は、炉底を貫通する昇降ロッド4により水平を保ったまま昇降可能に支持され、高さ調節することができる。
Preferred embodiments of the present invention are shown below.
FIG. 1 is a sectional view of a batch type coating film drying furnace of the present invention, and 1 is a box-shaped furnace body. A stage 2 on which the work 3 is placed is provided at the lower center of the furnace body 1. In this embodiment, the workpiece 3 is an electrode sheet for a lithium ion battery, and a coating film having a thickness of 100 to 300 μm is formed on a sheet of aluminum or the like. This coating film is a paste in which lithium cobaltate as a positive electrode active material, carbon powder as a conductive material, PVDF (polyvinylidene fluoride) as a binder and the like are kneaded with NMP (N-methyl-pyrrolidone) as an organic solvent. belongs to. The stage 2 is supported by a lifting rod 4 penetrating the furnace bottom so that the stage 2 can be moved up and down, and the height can be adjusted.

ステージ2の上方の炉体1の天井部には、ワーク3を加熱するための赤外線加熱装置5が設けられている。本発明において赤外線加熱装置5の種類は特に限定されるものではないが、本実施形態では二重管式ヒータが用いられている。   An infrared heating device 5 for heating the workpiece 3 is provided on the ceiling of the furnace body 1 above the stage 2. In the present invention, the type of the infrared heating device 5 is not particularly limited, but a double tube heater is used in the present embodiment.

この二重管式ヒータは図2に示すように、フィラメント6が封入された石英管7を、冷却流体が供給される外側管8の内部に封入した構造である。石英管7も外側管8もともに石英ガラスからなる。外側菅8の端部付近には冷却流体供給口9と冷却流体排出口10とが設けられており、冷却流体である冷却エアを流して外側菅8を冷却する。   As shown in FIG. 2, this double tube heater has a structure in which a quartz tube 7 in which a filament 6 is enclosed is enclosed in an outer tube 8 to which a cooling fluid is supplied. Both the quartz tube 7 and the outer tube 8 are made of quartz glass. A cooling fluid supply port 9 and a cooling fluid discharge port 10 are provided in the vicinity of the end portion of the outer rod 8, and the outer rod 8 is cooled by flowing cooling air that is a cooling fluid.

石英ガラスはローパスフィルタとしての機能を有するものであり、フィラメント6から放射される赤外線のうち波長が3.5μm以上の赤外線をほぼ完全に吸収する。このためフィラメント6の温度を700℃以上の高温とすれば、有機溶媒や水の分子中の水素結合を切断する能力に優れた波長が3.5μm以下の近赤外線のみを透過させ、ワーク3に照射することができる。   Quartz glass has a function as a low-pass filter, and almost completely absorbs infrared rays having a wavelength of 3.5 μm or more among infrared rays emitted from the filament 6. For this reason, if the temperature of the filament 6 is set to a high temperature of 700 ° C. or higher, only near infrared rays having a wavelength of not more than 3.5 μm, which is excellent in the ability to cut hydrogen bonds in the organic solvent and water molecules, are transmitted to the workpiece 3. Can be irradiated.

長波長の赤外線を吸収した石英管7と外側管8は温度が上昇するため、冷却流体を流さない場合にはそれ自体が赤外線の放射体となり、炉壁等を加熱して炉内温度の上昇を招く。しかし本実施形態では冷却エアを流すことにより、外側管8の表面温度を150℃未満に維持することができるので、炉内温度の上昇を抑制しつつ、波長が3.5μm以下の近赤外線による効率的な塗膜乾燥が可能となる。   Since the temperature of the quartz tube 7 and the outer tube 8 that absorbs long-wavelength infrared light rises, when no cooling fluid is flowed, the quartz tube 7 itself becomes an infrared radiator, and the furnace wall is heated to raise the temperature inside the furnace. Invite. However, in this embodiment, since the surface temperature of the outer tube 8 can be maintained at less than 150 ° C. by flowing cooling air, the near-infrared light having a wavelength of 3.5 μm or less is suppressed while suppressing an increase in the furnace temperature. Efficient coating drying is possible.

なお、図2に示す実施形態ではフィラメント6が封入された石英管7はU字状であり、片側のみから電源が供給できる構造となっているが、石英管7を直線状として両側から電源を供給してもよい。本発明においては赤外線加熱装置5は必ずしも二重管式ヒータのみに限定されるものではなく、二重管式ヒータとともに一般的なセラミック製赤外線ヒータや温風ヒータを併用することもできる。   In the embodiment shown in FIG. 2, the quartz tube 7 in which the filament 6 is enclosed is U-shaped and has a structure in which power can be supplied from only one side. You may supply. In the present invention, the infrared heating device 5 is not necessarily limited to a double tube heater, and a general ceramic infrared heater or warm air heater can be used in combination with the double tube heater.

本発明では、この赤外線加熱装置5とワーク3との間の空間内に、ワーク3の上面から離隔した高さの横風が形成される。そのためにステージ2を挟んだ左右の位置に、ボックス状の送風手段11と排気手段12とが形成されている   In the present invention, a cross wind having a height separated from the upper surface of the work 3 is formed in the space between the infrared heating device 5 and the work 3. For this purpose, box-shaped air blowing means 11 and exhaust means 12 are formed at the left and right positions across the stage 2.

送風手段11は先端に送風用スリット13を備え、奥部の給気ダクト14から供給される空気を送風用スリット13から吹き出す。なお15は送風手段11の内部に配置された圧力分散用のパンチングメタル、16は風量調整用ダンパーである。送風用スリット13は高さ方向の幅が狭く、紙面に垂直方向の幅が広い扁平なスリットである。   The blowing means 11 has a blowing slit 13 at the tip, and blows out air supplied from the air supply duct 14 at the back from the blowing slit 13. Reference numeral 15 is a punching metal for pressure dispersion disposed inside the blowing means 11, and 16 is a damper for adjusting the air volume. The blowing slit 13 is a flat slit having a narrow width in the height direction and a wide width in the direction perpendicular to the paper surface.

一方、排気手段12も同様な形状の吸引用スリット17を備えたものである。この構造によって、送風用スリット13と吸引用スリット17との間に扁平な横風18を安定して形成することができる。この横風18は高さ方向の広がりが小さいため、ワーク3の上面から横風18までの離隔距離を正確に設定することができる。なお19は排気手段12に接続された排気ダクトである。   On the other hand, the exhaust means 12 is also provided with a suction slit 17 having a similar shape. With this structure, a flat cross wind 18 can be stably formed between the blowing slit 13 and the suction slit 17. Since the lateral wind 18 has a small spread in the height direction, the separation distance from the upper surface of the work 3 to the lateral wind 18 can be set accurately. Reference numeral 19 denotes an exhaust duct connected to the exhaust means 12.

この横風18はワーク3に直接風を当てることなく、加熱されたワーク3から発生する有機溶媒蒸気を炉外に排出する役割を持つ。このためにはワーク3の上面からの横風18の離隔距離は、10〜500mmの範囲とすることが好ましい。離隔距離が10mm未満であると横風18がワーク3に直接当たる可能性があり、塗膜の表面乾燥が促進されるので好ましくない。逆に500mmを超えるとワーク3から発生する有機溶媒蒸気の除去能力が低下するので好ましくない。   The cross wind 18 has a role of discharging the organic solvent vapor generated from the heated work 3 to the outside of the furnace without directing the work 3 with the wind. For this purpose, the separation distance of the cross wind 18 from the upper surface of the workpiece 3 is preferably in the range of 10 to 500 mm. If the separation distance is less than 10 mm, there is a possibility that the cross wind 18 directly hits the work 3, which is not preferable because surface drying of the coating film is promoted. On the contrary, if it exceeds 500 mm, the ability to remove the organic solvent vapor generated from the work 3 is lowered, which is not preferable.

この離隔距離はワーク3や塗膜の種類に応じて変更できることが好ましい。そこで前述したようにワーク3が載せられるステージ2を昇降ロッド4により高さ調節可能とし、離隔距離を可変としておくことが好ましい。   It is preferable that this separation distance can be changed according to the type of the workpiece 3 or the coating film. Therefore, as described above, it is preferable that the height of the stage 2 on which the workpiece 3 is placed can be adjusted by the lifting rod 4 and the separation distance can be made variable.

このように構成された本発明のバッチ式塗膜乾燥炉は、塗膜が形成されたワーク3をステージ2の上に載せ、赤外線加熱装置5から放射される近赤外線によってワーク3を加熱することにより塗膜を乾燥させるものである。赤外線加熱装置5として二重管式ヒータを用いれば、炉内温度の上昇を抑制しつつ、波長が3.5μm以下の近赤外線による効率的な塗膜乾燥が可能となることは前述したとおりである。   The batch type coating film drying furnace of the present invention configured as described above places the workpiece 3 on which the coating film is formed on the stage 2 and heats the workpiece 3 with near infrared rays emitted from the infrared heating device 5. To dry the coating film. As described above, if a double tube heater is used as the infrared heating device 5, it is possible to efficiently dry the coating film with near infrared rays having a wavelength of 3.5 μm or less while suppressing an increase in the temperature in the furnace. is there.

この塗膜乾燥に伴い有機溶媒蒸気が発生するが、ワーク3の上面から離隔した高さの横風18によって速やかに炉外に排出されるため、炉内の有機溶媒蒸気濃度は低いレベルに抑制される。このため有機溶媒蒸気による爆発の危険はない。しかもこの横風18はワーク3の上面に直接接触しないので、塗膜の表面乾燥を促進するおそれがない。   Although the organic solvent vapor is generated as the coating film is dried, the organic solvent vapor concentration in the furnace is suppressed to a low level because the organic solvent vapor is quickly discharged to the outside by the cross air 18 having a height separated from the upper surface of the work 3. The Therefore, there is no risk of explosion due to organic solvent vapor. Moreover, since the cross wind 18 does not directly contact the upper surface of the work 3, there is no possibility of promoting the surface drying of the coating film.

なお本発明のバッチ式塗膜乾燥炉は温度や離隔距離などの乾燥条件を比較的自由に設定することができるので、塗膜の種類に応じた最適乾燥条件を得るための試験炉として使用することも可能である。   In addition, since the batch type coating film drying furnace of the present invention can set drying conditions such as temperature and separation distance relatively freely, it is used as a test furnace for obtaining optimum drying conditions according to the type of coating film. It is also possible.

1 炉体
2 ステージ
3 ワーク
4 昇降ロッド
5 赤外線加熱装置
6 フィラメント
7 石英管
8 外側管
9 冷却流体供給
10 冷却流体排出口
11 送風手段
12 排気手段
13 送風用スリット
14 給気ダクト
15 パンチングメタル
16 風量調整用ダンパー
17 吸引用スリット
18 横風
19 排気ダクト
DESCRIPTION OF SYMBOLS 1 Furnace 2 Stage 3 Work 4 Lifting rod 5 Infrared heating device 6 Filament 7 Quartz tube 8 Outer tube 9 Cooling fluid supply 10 Cooling fluid discharge port 11 Blower unit 12 Exhaust unit 13 Blower slit 14 Air supply duct 15 Punching metal 16 Air volume Adjustment damper 17 Suction slit 18 Cross wind 19 Exhaust duct

Claims (5)

塗膜が形成された平面状のワークが載せられるステージと、その上方の天井部に配置されワークを加熱する赤外線加熱装置と、この赤外線加熱装置とワークとの間の空間内にワークの上面から離隔した高さの横風を形成するために、前記ステージを挟んで設置された送風手段及び排気手段とを備えたことを特徴とするバッチ式塗膜乾燥炉。   A stage on which a planar workpiece with a coating film is placed, an infrared heating device that is placed on the ceiling above the workpiece and heats the workpiece, and a space between the infrared heating device and the workpiece from the upper surface of the workpiece A batch-type coating film drying furnace comprising a blowing unit and an exhaust unit installed across the stage in order to form a cross-air with a separated height. 送風手段は送風用スリットを備え、排気手段は吸引用スリットを備えたものであることを特徴とする請求項1記載のバッチ式塗膜乾燥炉。   The batch type coating film drying furnace according to claim 1, wherein the blowing means includes a blowing slit, and the exhaust means includes a suction slit. ワークが載せられるステージが高さ調節可能なものであり、ワークの上面からの横風の離隔距離を可変としたことを特徴とする請求項1記載のバッチ式塗膜乾燥炉。   2. The batch type coating film drying furnace according to claim 1, wherein the stage on which the workpiece is placed is adjustable in height, and the separation distance of the cross wind from the upper surface of the workpiece is variable. ワークの上面からの横風の離隔距離を、10〜500mmとしたことを特徴とする請求項1記載のバッチ式塗膜乾燥炉。   The batch type coating film drying furnace according to claim 1, wherein the separation distance of the cross wind from the upper surface of the workpiece is 10 to 500 mm. 赤外線加熱装置が、フィラメントが封入された石英管を、冷却流体が供給される外側管の内部に封入した二重管式ヒータであることを特徴とする請求項1記載のバッチ式塗膜乾燥炉。   2. The batch type coating film drying furnace according to claim 1, wherein the infrared heating device is a double tube heater in which a quartz tube in which a filament is enclosed is enclosed in an outer tube to which a cooling fluid is supplied. .
JP2011109349A 2011-05-16 2011-05-16 Batch type coating film drying furnace Withdrawn JP2012241922A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014163175A1 (en) * 2013-04-04 2014-10-09 日本碍子株式会社 Dehydrator
CN113262947A (en) * 2021-05-18 2021-08-17 长园泽晖新能源材料研究院(珠海)有限公司 Air suspension type coating device for oily PVDF coating system
JP2022145486A (en) * 2021-03-17 2022-10-04 芝浦メカトロニクス株式会社 Organic film formation device and cleaning method of the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014163175A1 (en) * 2013-04-04 2014-10-09 日本碍子株式会社 Dehydrator
JP6072900B2 (en) * 2013-04-04 2017-02-01 日本碍子株式会社 Dehydrator
TWI583540B (en) * 2013-04-04 2017-05-21 Ngk Insulators Ltd Dehydration device
JP2022145486A (en) * 2021-03-17 2022-10-04 芝浦メカトロニクス株式会社 Organic film formation device and cleaning method of the same
JP7312235B2 (en) 2021-03-17 2023-07-20 芝浦メカトロニクス株式会社 Organic film forming apparatus and cleaning method for organic film forming apparatus
CN113262947A (en) * 2021-05-18 2021-08-17 长园泽晖新能源材料研究院(珠海)有限公司 Air suspension type coating device for oily PVDF coating system

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