TW201502070A - 氧化矽的製造裝置及製造方法 - Google Patents

氧化矽的製造裝置及製造方法 Download PDF

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Publication number
TW201502070A
TW201502070A TW103111463A TW103111463A TW201502070A TW 201502070 A TW201502070 A TW 201502070A TW 103111463 A TW103111463 A TW 103111463A TW 103111463 A TW103111463 A TW 103111463A TW 201502070 A TW201502070 A TW 201502070A
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TW
Taiwan
Prior art keywords
cerium oxide
substrate
chamber
raw material
powder
Prior art date
Application number
TW103111463A
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English (en)
Chinese (zh)
Inventor
Nobuo Kawada
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of TW201502070A publication Critical patent/TW201502070A/zh

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
TW103111463A 2013-03-29 2014-03-27 氧化矽的製造裝置及製造方法 TW201502070A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013073002 2013-03-29

Publications (1)

Publication Number Publication Date
TW201502070A true TW201502070A (zh) 2015-01-16

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ID=51624130

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103111463A TW201502070A (zh) 2013-03-29 2014-03-27 氧化矽的製造裝置及製造方法

Country Status (3)

Country Link
JP (1) JP5971406B2 (ja)
TW (1) TW201502070A (ja)
WO (1) WO2014157159A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112689612A (zh) * 2018-08-27 2021-04-20 株式会社大阪钛技术 SiO粉末的制造方法及球形颗粒状SiO粉末
CN114040808A (zh) * 2019-03-13 2022-02-11 梅托克斯技术公司 用于薄膜沉积的固体前体进料系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3865033B2 (ja) * 2000-02-04 2007-01-10 信越化学工業株式会社 酸化珪素粉末の連続製造方法及び連続製造装置
JP2012132522A (ja) * 2010-12-22 2012-07-12 Asahi Glass Co Ltd 高温用バルブ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112689612A (zh) * 2018-08-27 2021-04-20 株式会社大阪钛技术 SiO粉末的制造方法及球形颗粒状SiO粉末
CN112689612B (zh) * 2018-08-27 2024-04-19 株式会社大阪钛技术 SiO粉末的制造方法及球形颗粒状SiO粉末
CN114040808A (zh) * 2019-03-13 2022-02-11 梅托克斯技术公司 用于薄膜沉积的固体前体进料系统

Also Published As

Publication number Publication date
WO2014157159A1 (ja) 2014-10-02
JP5971406B2 (ja) 2016-08-17
JPWO2014157159A1 (ja) 2017-02-16

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