TW201443521A - Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece - Google Patents

Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece Download PDF

Info

Publication number
TW201443521A
TW201443521A TW103109738A TW103109738A TW201443521A TW 201443521 A TW201443521 A TW 201443521A TW 103109738 A TW103109738 A TW 103109738A TW 103109738 A TW103109738 A TW 103109738A TW 201443521 A TW201443521 A TW 201443521A
Authority
TW
Taiwan
Prior art keywords
laser light
opening
layer
bonding
optical component
Prior art date
Application number
TW103109738A
Other languages
Chinese (zh)
Other versions
TWI610115B (en
Inventor
Mikio Fujii
Sung-Wook Chae
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Publication of TW201443521A publication Critical patent/TW201443521A/en
Application granted granted Critical
Publication of TWI610115B publication Critical patent/TWI610115B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528Polarisers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133354Arrangements for aligning or assembling substrates

Abstract

A laser light irradiation apparatus includes: a table which includes a holding surface that holds a plate-like object; a laser light oscillation device which oscillates laser light; a scanner which biaxially scans the laser light in a plane parallel to the holding surface; a lighting device which illuminates the object; a first moving device which relatively moves the lighting device to the table; a second moving device which relatively moves the scanner to the table.

Description

檢測裝置、雷射光照射裝置及光學組件貼合體之製造裝置 Detection device, laser light irradiation device, and manufacturing device of optical component bonding body

本發明係關於一種檢測裝置、雷射光照射裝置及光學組件貼合體之製造裝置。 The present invention relates to a manufacturing apparatus for a detecting device, a laser light irradiating device, and an optical component bonding body.

於液晶顯示器等光學顯示設備之生產系統中,偏光板等光學組件係貼合至液晶面板(光學顯示部件)。傳統上,係從光學組件所構成之長條薄膜切割出尺寸符合液晶面板之顯示區域的層片後,貼合至液晶面板(例如,參考日本專利特開第2003-255132號公報)。 In a production system of an optical display device such as a liquid crystal display, an optical component such as a polarizing plate is attached to a liquid crystal panel (optical display member). Conventionally, a film having a size conforming to a display area of a liquid crystal panel is cut out from a long film composed of an optical component, and then bonded to a liquid crystal panel (for example, refer to Japanese Laid-Open Patent Publication No. 2003-255132).

將光學組件貼合至液晶面板之情況中,係使用照明裝置與攝影機檢測液晶面板的四角位置,進行液晶面板與光學組件之位置校準。電視用之液晶面板的尺寸係依規格所決定。因此,照明裝置及攝影機等亦需符合其尺寸,而固定於所決定之位置處。然而,近年來,隨著智慧型手機及平板型終端機等普及,而需要能生產出尺寸及形狀相異之各種液晶面板。其結果,要能於同一生產線上生產該等液晶面板之要求日益增高。然而,於同一生產線上生產液晶面板的情況中,照明裝置及攝影機等必須對應液晶面板尺寸而進行交換,會有 生產率低落的問題。 In the case where the optical component is attached to the liquid crystal panel, the four corner positions of the liquid crystal panel are detected using the illumination device and the camera, and the position alignment of the liquid crystal panel and the optical component is performed. The size of the LCD panel for TV is determined by the specifications. Therefore, the lighting device, the camera, and the like also need to conform to their sizes and be fixed at the determined position. However, in recent years, with the popularization of smart phones and tablet terminals, it is required to produce various liquid crystal panels having different sizes and shapes. As a result, the demand for the production of such liquid crystal panels on the same production line is increasing. However, in the case of producing a liquid crystal panel on the same production line, the lighting device and the camera must be exchanged according to the size of the liquid crystal panel, and there will be The problem of low productivity.

本發明係有鑑於前述問題,目的為提供一種即便對象物體尺寸改變也能照亮對象物體,並可抑制生產率低落的檢測裝置、雷射光照射裝置及光學組件貼合體之製造裝置。 The present invention has been made in view of the above problems, and it is an object of the invention to provide a manufacturing apparatus which can illuminate a target object even if the size of a target object is changed, and can suppress a decrease in productivity, a laser beam irradiation device, and an optical component bonding body.

為達成前述目的,本發明係採用以下作法。 In order to achieve the foregoing objects, the present invention employs the following methods.

本發明第一態樣之雷射光照射裝置係具備:台座,係具有保持板狀對象物體之保持面;雷射光振盪器,係振盪出雷射光;掃瞄器,係以該雷射光在該保持面之平行平面內進行二維掃瞄;照明裝置,係照亮該對象物體;第一移動裝置,係使該台座與該照明裝置進行相對移動;以及第二移動裝置,係使該台座與該掃瞄器進行相對移動。 A laser light irradiation apparatus according to a first aspect of the present invention includes: a pedestal having a holding surface for holding a plate-shaped object; a laser oscillator for oscillating laser light; and a scanner for maintaining the laser light Two-dimensional scanning in a parallel plane of the surface; the illumination device illuminates the object; the first moving device moves the pedestal relative to the illuminating device; and the second moving device causes the pedestal to The scanner moves relative to each other.

該雷射光照射裝置更具備:攝影裝置,係拍攝該對象物體;以及第三移動裝置,係使該台座與該攝影裝置進行相對移動。 The laser light irradiation device further includes: an imaging device that captures the target object; and a third moving device that moves the pedestal relative to the imaging device.

從該保持面之法線方向觀察,該對象物體係為包含有四個角部的矩形;該台座於對應該對象物體各角部位置處形成有貫通開口部;且該照明裝置係對向於該台座之保持面的相反側之面而配置,經由該貫通開口部而照亮各該角部。 Observing from the normal direction of the holding surface, the object system is a rectangle including four corner portions; the pedestal is formed with a through opening at a position corresponding to each corner of the object; and the lighting device is opposite The pedestal is disposed on the opposite side of the holding surface, and each of the corners is illuminated through the through opening.

當該雷射光振盪器振盪出該雷射光時,該第一移動裝置可讓該照明裝置退出至從該保持面之法線方向觀察不會與該貫通開口部相重疊之位置處。 When the laser light oscillates the laser light, the first moving device can cause the illuminating device to exit to a position that does not overlap the through opening when viewed from the normal direction of the holding surface.

該保持面具有第一保持面與鄰接該第一保持面而配置的第二保持面;該照明裝置係位在與該第一保持面及該第二保持面鄰接之鄰接延伸方向上;且該第一移動裝置係使該照明裝置沿該鄰接方向之垂直方向上移動。 The holding surface has a first holding surface and a second holding surface disposed adjacent to the first holding surface; the lighting device is fastened in abutting extension direction adjacent to the first holding surface and the second holding surface; The first mobile device moves the illumination device in a vertical direction of the abutting direction.

該照明裝置係具有:第一照明裝置,係位於該鄰接延伸方向上;以及第二照明裝置,係於該鄰接方向之垂直方向上與該第一照明裝置並排配 置,而位於該鄰接延伸方向上。 The lighting device has: a first illuminating device located in the abutting extension direction; and a second illuminating device juxtaposed with the first illuminating device in a vertical direction of the abutting direction Set in the direction of the abutment extension.

該雷射光照射裝置其中更具備有聚光透鏡,係將該掃瞄器所射出之雷射光朝該保持面聚光。 The laser light irradiation device further includes a condensing lens for concentrating the laser light emitted from the scanner toward the holding surface.

本發明第二態樣之具備光學顯示部件與貼合至該光學顯示部件之光學組件的光學組件貼合體之製造裝置,具備:貼合裝置,係將外徑較該光學顯示部件外形更大的層片貼合至該光學顯示部件,讓該層片會突出至該層片與該光學顯示部件之貼合面外側,以形成層片貼合體;以及切斷裝置,係沿該貼合面端緣,從該層片貼合體將該層片之突出部分切斷,以形成對應該貼合面大小的光學組件;其中,該切斷裝置係由第一態樣之雷射光照射裝置所構成,可藉由該雷射光照射裝置所射出之雷射光,從該對象物體之層片貼合體將該層片之突出部分切斷。 A manufacturing apparatus for an optical component bonding body including an optical display member and an optical component bonded to the optical display member according to a second aspect of the present invention includes: a bonding device having an outer diameter larger than that of the optical display member Laminating the layer to the optical display member such that the layer protrudes to the outside of the bonding surface of the layer and the optical display member to form a layered laminate; and a cutting device is disposed along the bonding surface end Edge, the protruding portion of the layer is cut from the layer laminate to form an optical component corresponding to the size of the bonding surface; wherein the cutting device is constituted by the first aspect of the laser light irradiation device, The protruding portion of the layer can be cut from the layered laminate of the target object by the laser light emitted from the laser beam irradiation device.

本發明第二態樣之檢測裝置係具備:台座,係保持板狀對象物體;照明裝置,係照亮該對象物體;以及第一移動裝置,係使該台座與該照明裝置進行相對移動。 A detecting device according to a second aspect of the present invention includes: a pedestal that holds a plate-shaped object; an illuminating device that illuminates the object; and a first moving device that moves the pedestal relative to the illuminating device.

該檢測裝置更具備:攝影裝置,係拍攝該對象物體;以及第二移動裝置,係使該台座與該攝影裝置進行相對移動。 The detecting device further includes: an imaging device that captures the target object; and a second moving device that moves the pedestal relative to the imaging device.

根據前述本發明之態樣,可提供一種即便對象物體尺寸改變也能照亮對象物體,並可抑制生產率低落的檢測裝置、雷射光照射裝置及光學組件貼合體之製造裝置。 According to the aspect of the invention, it is possible to provide a detection device, a laser beam irradiation device, and an optical component bonding body manufacturing apparatus which can illuminate a target object even if the size of the object is changed, and can suppress the productivity.

1‧‧‧薄膜貼合系統 1‧‧‧Film bonding system

5‧‧‧滾筒輸送機 5‧‧‧Roller conveyor

6‧‧‧上游側輸送機 6‧‧‧Upstream conveyor

7‧‧‧下游側輸送機 7‧‧‧ downstream conveyor

11‧‧‧第一吸附裝置 11‧‧‧First adsorption device

11a‧‧‧面板保持部 11a‧‧‧ Panel Holder

11b‧‧‧校準攝影機 11b‧‧‧calibration camera

12‧‧‧第一集塵裝置 12‧‧‧The first dust collecting device

13‧‧‧第一貼合裝置 13‧‧‧First bonding device

15‧‧‧反轉裝置 15‧‧‧Reversal device

15c‧‧‧校準攝影機 15c‧‧‧calibration camera

16‧‧‧第二集塵裝置 16‧‧‧Second dust collecting device

17‧‧‧第二貼合裝置 17‧‧‧Second fitting device

20‧‧‧第二吸附裝置 20‧‧‧Second adsorption device

22‧‧‧搬送裝置 22‧‧‧Transporting device

22a‧‧‧滾筒保持部 22a‧‧‧Roller Holder

22b‧‧‧導引滾筒 22b‧‧‧Guide roller

22c‧‧‧半切斷裝置 22c‧‧‧Halves cutting device

22d‧‧‧刀刃 22d‧‧‧blade

22e‧‧‧捲取部 22e‧‧‧Winding Department

23‧‧‧夾壓滾筒 23‧‧‧ pinch roller

23a‧‧‧貼合滾筒 23a‧‧‧Adhesive roller

24‧‧‧自由滾筒輸送機 24‧‧‧Free roller conveyor

26‧‧‧吸附盤 26‧‧‧Sucking tray

31‧‧‧第一切斷裝置 31‧‧‧First cut-off device

32‧‧‧第二切斷裝置 32‧‧‧Second cutting device

40‧‧‧控制部 40‧‧‧Control Department

41‧‧‧第一檢測裝置 41‧‧‧First detection device

42‧‧‧第二檢測裝置 42‧‧‧Second detection device

100‧‧‧雷射光照射裝置 100‧‧‧Laser light irradiation device

101,301‧‧‧台座 101,301‧‧‧ pedestal

101s‧‧‧保持面 101s‧‧‧ Keep face

101s1‧‧‧第一保持面 101s1‧‧‧First holding surface

101s2‧‧‧第二保持面 101s2‧‧‧second holding surface

102‧‧‧雷射光振盪器 102‧‧‧Laser light oscillator

103‧‧‧照明裝置 103‧‧‧Lighting device

104‧‧‧第一移動裝置 104‧‧‧First mobile device

105‧‧‧掃瞄器 105‧‧ ‧Scanner

105s‧‧‧雷射光加工區域 105s‧‧‧Laser light processing area

106‧‧‧第二移動裝置 106‧‧‧Second mobile device

107‧‧‧控制裝置 107‧‧‧Control device

108‧‧‧聚光透鏡 108‧‧‧ Concentrating lens

109‧‧‧攝影裝置 109‧‧‧Photographing device

110‧‧‧第一對象物體 110‧‧‧First object

111‧‧‧基台 111‧‧‧Abutment

111a‧‧‧+Y方向側之側邊 Side of the 111a‧‧‧+Y direction side

111b‧‧‧-Y方向側之側邊 Side of the 111b‧‧‧-Y direction side

112,312‧‧‧板片 112,312‧‧‧ plates

112h‧‧‧吸附孔 112h‧‧‧Adsorption holes

112s,312s‧‧‧吸附面 112s, 312s‧‧ ‧ adsorption surface

112s1‧‧‧第一吸附面 112s1‧‧‧First adsorption surface

112s2‧‧‧第二吸附面 112s2‧‧‧second adsorption surface

113‧‧‧開口部 113‧‧‧ openings

113a,213a,313a‧‧‧第一開口部 113a, 213a, 313a‧‧‧ first opening

113b,213b,313b‧‧‧第二開口部 113b, 213b, 313b‧‧‧ second opening

113c,213c,313c‧‧‧第三開口部 113c, 213c, 313c‧‧‧ third opening

113d,213d,313d‧‧‧第四開口部 113d, 213d, 313d‧‧‧ fourth opening

113e,213e,313e‧‧‧第五開口部 113e, 213e, 313e‧‧‧ fifth opening

113f,213f,313f‧‧‧第六開口部 113f, 213f, 313f‧‧‧ sixth opening

113g,213g,313g‧‧‧第七開口部 113g, 213g, 313g‧‧‧ seventh opening

113h,213h,313h‧‧‧第八開口部 113h, 213h, 313h‧‧‧ eighth opening

114‧‧‧吸引孔 114‧‧‧Attraction hole

115‧‧‧第一輸送帶 115‧‧‧First conveyor belt

116‧‧‧第二輸送帶 116‧‧‧Second conveyor belt

117,317‧‧‧導引溝槽 117,317‧‧‧ Guide groove

131‧‧‧第一照明裝置 131‧‧‧First lighting device

132‧‧‧第一光源 132‧‧‧First light source

133‧‧‧第二光源 133‧‧‧second light source

134,138‧‧‧保持部 134,138‧‧‧ Keeping Department

135‧‧‧第二照明裝置 135‧‧‧Second lighting device

136‧‧‧第三光源 136‧‧‧ Third light source

137‧‧‧第四光源 137‧‧‧fourth light source

141‧‧‧第一滑件機構 141‧‧‧First slide mechanism

142‧‧‧第一導軌 142‧‧‧First rail

143‧‧‧第一線性馬達 143‧‧‧First linear motor

144‧‧‧第二滑件機構 144‧‧‧Second slide mechanism

145‧‧‧第二導軌 145‧‧‧Second rail

146‧‧‧第二線性馬達 146‧‧‧Second linear motor

151‧‧‧第一照射位置調整裝置 151‧‧‧First illumination position adjustment device

152,155‧‧‧鏡 152,155‧‧‧Mirror

153,156‧‧‧致動器 153,156‧‧‧ actuator

154‧‧‧第二照射位置調整裝置 154‧‧‧second illumination position adjustment device

161‧‧‧第三滑件機構 161‧‧‧ Third sliding mechanism

162‧‧‧第四滑件機構 162‧‧‧fourth sliding mechanism

171‧‧‧雷射控制部 171‧‧ ‧ Laser Control Department

172‧‧‧掃瞄器控制部 172‧‧ 扫 Scanner Control Department

173‧‧‧移動控制部 173‧‧‧Mobile Control Department

190‧‧‧第三移動裝置 190‧‧‧ third mobile device

210‧‧‧對象物體 210‧‧‧ object

310‧‧‧對象物體 310‧‧‧ object

CL‧‧‧橫切線 CL‧‧‧ transverse line

CP‧‧‧檢查點 CP‧‧‧ checkpoint

EL‧‧‧邊緣線 EL‧‧‧ edge line

F1‧‧‧第一光學組件層 F1‧‧‧First optical component layer

F11‧‧‧第一光學組件 F11‧‧‧First optical component

F12‧‧‧第二光學組件 F12‧‧‧Second optical component

F1a‧‧‧光學組件本體 F1a‧‧‧Optical component body

F2‧‧‧第二光學組件層 F2‧‧‧Second optical component layer

F2a‧‧‧黏著層 F2a‧‧‧Adhesive layer

F3a‧‧‧分離層片 F3a‧‧‧Separation layer

F4a‧‧‧表面保護薄膜 F4a‧‧‧Surface protection film

F5‧‧‧貼合層片 F5‧‧‧Fitting layer

F6‧‧‧偏光鏡 F6‧‧‧ polarizer

F7‧‧‧第一薄膜 F7‧‧‧ first film

F8‧‧‧第二薄膜 F8‧‧‧second film

FX‧‧‧光學組件層 FX‧‧‧ optical component layer

FXm‧‧‧層片 FXm‧‧‧ layer

F1X‧‧‧光學組件 F1X‧‧‧ optical components

G‧‧‧邊框部 G‧‧‧Border Department

Ha1,Ha2‧‧‧間隔 Ha1, Ha2‧‧ ‧ interval

Hb1,Hb2‧‧‧間隔 Hb1, Hb2‧‧‧ interval

L‧‧‧雷射光 L‧‧‧Laser light

L1,L2‧‧‧切割線 L1, L2‧‧‧ cutting line

La1‧‧‧長度 La1‧‧‧ length

La2‧‧‧長度 La2‧‧‧ length

Lb1‧‧‧長度 Lb1‧‧‧ length

Lb2‧‧‧長度 Lb2‧‧‧ length

M1‧‧‧符號 M1‧‧ symbol

N1‧‧‧正交方向 N1‧‧‧Orthogonal direction

R‧‧‧軌道 R‧‧ track

R1‧‧‧料捲滾筒 R1‧‧‧ Roller

R2‧‧‧分離滾筒 R2‧‧‧Separation roller

S‧‧‧止動器 S‧‧‧stop

SA1‧‧‧直線區間 SA1‧‧‧ straight section

SA2‧‧‧彎曲區間 SA2‧‧‧Bending section

Tr‧‧‧雷射光移動軌跡 Tr‧‧‧Laser light movement track

Tr1‧‧‧光源移動軌跡 Tr1‧‧‧Light source movement track

Tr2‧‧‧調整曲線 Tr2‧‧‧ adjustment curve

P‧‧‧液晶面板 P‧‧‧ LCD panel

P1‧‧‧第一基板 P1‧‧‧ first substrate

P2‧‧‧第二基板 P2‧‧‧second substrate

P3‧‧‧液晶層 P3‧‧‧ liquid crystal layer

P4‧‧‧顯示區域 P4‧‧‧ display area

PA1‧‧‧第一光學組件貼合體 PA1‧‧‧First optical component fit

PA2‧‧‧第二光學組件貼合體 PA2‧‧‧Second optical component fit

PA3‧‧‧第三光學組件貼合體 PA3‧‧‧The third optical component fit

PA4‧‧‧第四光學組件貼合體 PA4‧‧‧Four optical component bonding body

W1,W2‧‧‧距離 W1, W2‧‧‧ distance

Wa1‧‧‧最外寬度 Wa1‧‧‧ outer width

Wa2‧‧‧最外寬度 Wa2‧‧‧ outer width

Wa3‧‧‧最外寬度 Wa3‧‧‧ outer width

Wa4‧‧‧最外寬度 Wa4‧‧‧ outer width

θmax‧‧‧最大偏移角 Maxmax‧‧‧maximum offset angle

θmin‧‧‧最小偏移角 Θmin‧‧‧minimum offset angle

θmid‧‧‧平均偏移角 Midmid‧‧‧average offset angle

第1圖係顯示本發明一實施形態之雷射光照射裝置的平面圖。 Fig. 1 is a plan view showing a laser beam irradiation apparatus according to an embodiment of the present invention.

第2圖係顯示雷射光照射裝置與輸送帶之配置關係的平面圖。 Fig. 2 is a plan view showing the arrangement relationship between the laser light irradiation device and the conveyor belt.

第3圖係顯示雷射光照射裝置的立體圖。 Fig. 3 is a perspective view showing a laser light irradiation device.

第4圖係顯示台座的平面圖。 Figure 4 is a plan view showing the pedestal.

第5圖係顯示照明裝置及第一移動裝置的平面圖。 Figure 5 is a plan view showing the lighting device and the first moving device.

第6圖係顯示照明裝置之照明位置及攝影裝置之攝影位置的平面圖。 Fig. 6 is a plan view showing the illumination position of the illumination device and the photographing position of the photographing device.

第7圖係顯示照明裝置及攝影裝置之退出位置的平面圖。 Fig. 7 is a plan view showing the exit position of the lighting device and the photographing device.

第8圖係顯示對象物體尺寸較大情況中照明裝置之照明位置及攝影裝置之攝影位置的平面圖。 Fig. 8 is a plan view showing the illumination position of the illumination device and the photographing position of the photographing device in the case where the size of the object is large.

第9圖係顯示對象物體尺寸較大情況中照明裝置及攝影裝置之退出位置的平面圖。 Fig. 9 is a plan view showing the exit position of the lighting device and the photographing device in the case where the size of the object is large.

第10圖係顯示本實施形態之台座之第一變形例的平面圖。 Fig. 10 is a plan view showing a first modification of the pedestal according to the embodiment.

第11圖係顯示本發明一實施形態之光學組件貼合體之製造裝置的模式圖。 Fig. 11 is a schematic view showing a manufacturing apparatus of an optical component bonding body according to an embodiment of the present invention.

第12圖係液晶面板的平面圖。 Figure 12 is a plan view of a liquid crystal panel.

第13圖係第12圖中A-A線的剖面圖。 Figure 13 is a cross-sectional view taken along line A-A of Figure 12.

第14圖係光學組件層的剖面圖。 Figure 14 is a cross-sectional view of the optical component layer.

第15圖係顯示切斷裝置之動作的示意圖。 Fig. 15 is a schematic view showing the operation of the cutting device.

第16A圖係顯示相對液晶面板之層片貼合位置的決定方法一例的示意圖。 Fig. 16A is a schematic view showing an example of a method of determining the bonding position of the layer of the liquid crystal panel.

第16B圖係顯示相對液晶面板之層片貼合位置的決定方法一例的示意圖。 Fig. 16B is a schematic view showing an example of a method of determining the bonding position of the layer of the liquid crystal panel.

第17圖係顯示以雷射光描繪特定軌跡用之控制方法的示意圖。 Figure 17 is a schematic diagram showing a control method for depicting a specific trajectory by laser light.

以下,參考圖式並說明本發明之實施形態,但本發明並不限定於以下之實施形態。 Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments.

另外,以下所有圖式中,為了圖式清楚起見,各結構元件之尺寸或比例等係加以適當變更。又,以下之說明及圖式中,相同或相對應之元件 則賦予相同元件符號,省略重複說明。 In addition, in the following drawings, the dimensions, ratios, and the like of the respective structural elements are appropriately changed for the sake of clarity of the drawings. In the following description and drawings, the same or corresponding components The same component symbols are given, and overlapping descriptions are omitted.

(雷射光照射裝置) (laser light irradiation device)

第1圖係顯示使用來作為對象物體之切斷裝置的雷射光照射裝置100一例的平面圖。 Fig. 1 is a plan view showing an example of a laser beam irradiation device 100 used as a cutting device for a target object.

於以下說明中,係對應需求並設定XYZ正交座標系,參考該XYZ正交座標系並說明各組件之位置關係。於本實施形態中,X方向係作為與保持對象物體之保持面平行的方向,Y方向係在保持面面內與第一方向(X方向)正交之方向,Z方向則為與X方向及Y方向正交之方向。 In the following description, the XYZ orthogonal coordinate system is set according to the requirements, and the positional relationship of each component is described with reference to the XYZ orthogonal coordinate system. In the present embodiment, the X direction is a direction parallel to the holding surface of the holding target object, the Y direction is a direction orthogonal to the first direction (X direction) in the holding surface, and the Z direction is the X direction and The direction in which the Y direction is orthogonal.

如第1圖所示,雷射光照射裝置100係具備:台座101、雷射光振盪器102、掃瞄器105、照明裝置103、攝影裝置109、第一移動裝置104、第二移動裝置106(參考第2圖)、第三移動裝置190以及對前述裝置進行整體控制之控制裝置107(參考第3圖)。 As shown in Fig. 1, the laser beam irradiation apparatus 100 includes a pedestal 101, a laser oscillator 102, a scanner 105, an illumination device 103, an imaging device 109, a first mobile device 104, and a second mobile device 106 (refer to Fig. 2), a third mobile device 190, and a control device 107 for overall control of the above device (refer to Fig. 3).

於Y方向上複數並排配置有(例如,本實施形態中為三個)台座101。台座101具有保持對象物體(第一對象物體)110之保持面101s。從保持面101s之法線方向觀察,台座101為矩形。保持面101s具備:於第一方向(X方向)為長邊的長方形第一保持面101s1、以及鄰接配置於第一保持面101s1且與第一保持面101s1呈相同形狀的第二保持面101s2。 A pedestal 101 (for example, three in the present embodiment) is arranged in parallel in the Y direction. The pedestal 101 has a holding surface 101s that holds a target object (first object) 110. The pedestal 101 is rectangular when viewed from the normal direction of the holding surface 101s. The holding surface 101s includes a rectangular first holding surface 101s1 having a long side in the first direction (X direction), and a second holding surface 101s2 disposed adjacent to the first holding surface 101s1 and having the same shape as the first holding surface 101s1.

從保持面101s之法線方向觀察,對象物體110為矩形。台座101於對應對象物體110角部位置處形成有開口部113(貫通開口部)。第一保持面101s1及第二保持面101s2係各自配置於對應對象物體110之四個角部位置處,形成有四個開口部113。另外,Y方向上所並排配置之三個台座101中,於中央處的一個台座101,為了方便起見,係省略開口部113、台座101上方之攝影裝置109及第三移動裝置190的圖式。 The object object 110 is a rectangle as viewed from the normal direction of the holding surface 101s. The pedestal 101 is formed with an opening portion 113 (through opening portion) at a position of a corner portion of the corresponding object 110. Each of the first holding surface 101s1 and the second holding surface 101s2 is disposed at four corner positions of the corresponding target object 110, and four opening portions 113 are formed. Further, among the three pedestals 101 arranged side by side in the Y direction, one pedestal 101 at the center omits the pattern of the opening 113, the photographing device 109 above the pedestal 101, and the third moving device 190 for the sake of convenience. .

雷射光振盪器102係振盪出雷射光L的組件。例如,雷射振盪 器102可使用CO2雷射振盪器(二氧化碳雷射振盪器)、紫外線(UV)雷射振盪器,半導體雷射振盪器、釔鋁石榴石(YAG)雷射振盪器、準分子雷射振盪器等振盪器。然而,具體結構並無特殊限制。於該例示之振盪器中,CO2雷射振盪器係可振盪出例如適用於偏光薄膜等光學組件之切斷加工的高輸出雷射光,故較其它振盪器更佳。 The laser light oscillator 102 is a component that oscillates the laser light L. For example, the laser oscillator 102 can use a CO 2 laser oscillator (carbon dioxide laser oscillator), an ultraviolet (UV) laser oscillator, a semiconductor laser oscillator, a yttrium aluminum garnet (YAG) laser oscillator, An oscillator such as an excimer laser oscillator. However, the specific structure is not particularly limited. In the exemplified oscillator, the CO 2 laser oscillator can oscillate high-output laser light suitable for cutting processing of optical components such as a polarizing film, and is therefore better than other oscillators.

第2圖係顯示雷射光照射裝置100與輸送帶(第一輸送帶115、第二輸送帶116)之配置關係的平面圖。於第2圖中,為了方便起見,台座101係以鏈線表示,第二移動裝置106係以實線表示。 Fig. 2 is a plan view showing the arrangement relationship between the laser beam irradiation apparatus 100 and the conveyor belts (the first conveyor belt 115 and the second conveyor belt 116). In the second drawing, for the sake of convenience, the pedestal 101 is indicated by a chain line, and the second moving device 106 is indicated by a solid line.

如第2圖所示,係沿複數個台座101之排列方向而設置有第一輸送帶115及第二輸送帶116。第一輸送帶115及第二輸送帶116係隔著複數個台座101而對向地配置。 As shown in Fig. 2, the first conveyor belt 115 and the second conveyor belt 116 are provided along the direction in which the plurality of pedestals 101 are arranged. The first conveyor belt 115 and the second conveyor belt 116 are disposed to face each other across a plurality of pedestals 101.

第一輸送帶115係將對象物體110從-Y方向側朝+Y方向側進行搬送,或者,從+Y方向側朝-Y方向側進行搬送。第一輸送帶115所搬送之對象物體110係經由圖中未顯示之傳遞機構而配置到保持面101s。 The first conveyor belt 115 transports the target object 110 from the −Y direction side to the +Y direction side, or from the +Y direction side to the −Y direction side. The target object 110 conveyed by the first conveyor belt 115 is disposed on the holding surface 101s via a transmission mechanism not shown.

於保持面101s經特定處理後之對象物體110係經由圖中未顯示之傳遞機構而配置到第二輸送帶116。第二輸送帶116係經由圖中未顯示之傳遞機構,將所接收之對象物體110從-Y方向側朝+Y方向側進行搬送,或者,從+Y方向側朝-Y方向側進行搬送。第二輸送帶116所搬送之對象物體110則被引導至次一工程。 The target object 110 subjected to the specific treatment on the holding surface 101s is disposed to the second conveyor belt 116 via a transmission mechanism not shown. The second conveyor belt 116 transports the received target object 110 from the -Y direction side to the +Y direction side via a transmission mechanism (not shown), or conveys it from the +Y direction side to the -Y direction side. The object 110 transported by the second conveyor belt 116 is guided to the next project.

第3圖係顯示雷射光照射裝置100的立體圖。另外,於第3圖中,為了方便起見,僅繪出複數個攝影裝置109中的一個攝影裝置109。 FIG. 3 is a perspective view showing the laser light irradiation device 100. In addition, in FIG. 3, for the sake of convenience, only one of the plurality of photographing devices 109 is depicted.

如第3圖所示,掃瞄器105以雷射光在保持面101s之平行平面內(XY平面內)進行二維掃瞄。即,掃瞄器105係相對台座101讓雷射光在X方向與Y方向上獨立相對地進行移動。藉此,可讓雷射光以良好精度照射到保 持於台座101上之對象物體110的任意位置處。 As shown in Fig. 3, the scanner 105 performs two-dimensional scanning with laser light in a parallel plane (in the XY plane) of the holding surface 101s. That is, the scanner 105 moves the laser light independently of the pedestal 101 in the X direction and the Y direction. In this way, the laser light can be irradiated with good precision. It is held at any position of the object 110 on the pedestal 101.

掃瞄器105具備第一照射位置調整裝置151與第二照射位置調整裝置154。 The scanner 105 includes a first irradiation position adjusting device 151 and a second irradiation position adjusting device 154.

第一照射位置調整裝置151及第二照射位置調整裝置154係由讓雷射光振盪器102所射出之雷射光在保持面101s之平行平面內進行二維掃瞄的掃瞄元件所構成。可使用例如電流掃瞄器作為第一照射位置調整裝置151及第二照射位置調整裝置154。另外,掃瞄元件不限於使用電流掃瞄器,亦可使用萬向支架。 The first irradiation position adjusting device 151 and the second irradiation position adjusting device 154 are constituted by scanning elements that cause the laser light emitted from the laser oscillator 102 to perform two-dimensional scanning in parallel planes of the holding surface 101s. For example, a current scanner can be used as the first irradiation position adjusting device 151 and the second irradiation position adjusting device 154. In addition, the scanning element is not limited to the use of a current scanner, and a gimbal can also be used.

第一照射位置調整裝置151具備鏡152與調整鏡152之設置角度的致動器153。致動器153具有平行Z方向之迴轉軸。致動器153係根據控制裝置107之控制,使鏡152繞Z軸迴轉。 The first irradiation position adjusting device 151 is provided with an actuator 153 that sets the angle between the mirror 152 and the adjusting mirror 152. The actuator 153 has a rotary axis parallel to the Z direction. The actuator 153 rotates the mirror 152 about the Z axis in accordance with the control of the control unit 107.

第二照射位置調整裝置154具備鏡155與調整鏡155之設置角度的致動器156。致動器156具有平行Y方向之迴轉軸。致動器156係根據控制裝置107之控制,使鏡155繞Y軸迴轉。 The second irradiation position adjusting device 154 is provided with an actuator 156 that sets the angle between the mirror 155 and the adjusting mirror 155. The actuator 156 has a rotary axis parallel to the Y direction. The actuator 156 rotates the mirror 155 about the Y axis in accordance with the control of the control unit 107.

於掃瞄器105與台座101之間的光學路徑上,係配置有使經由掃瞄器105之雷射光朝向保持面101s聚光的聚光透鏡108。 A condensing lens 108 that condenses the laser light passing through the scanner 105 toward the holding surface 101s is disposed on the optical path between the scanner 105 and the pedestal 101.

例如,可使用fθ透鏡作為聚光透鏡108。藉此,使得來自鏡155而於聚光透鏡108平行射出之雷射光可平行地聚光在對象物體110處。 For example, an fθ lens can be used as the collecting lens 108. Thereby, the laser light from the mirror 155 and emitted in parallel by the collecting lens 108 can be concentrated in parallel at the object object 110.

另外,於掃瞄器105與台座101之間的光學路徑上,亦可為不配置有聚光透鏡108的結構。 Further, the optical path between the scanner 105 and the pedestal 101 may be a configuration in which the condensing lens 108 is not disposed.

雷射振盪器102所振盪出之雷射光L係經由鏡152、鏡155及聚光透鏡108而照射在保持於台座101的對象物體110處。 The laser light L oscillated by the laser oscillator 102 is irradiated onto the object object 110 held by the pedestal 101 via the mirror 152, the mirror 155, and the condensing lens 108.

第一照射位置調整裝置151、第二照射位置調整裝置154係根據控制裝置107之控制,來調整自雷射振盪器102朝向保持於台座101之對象物 體110進行照射的雷射光照射位置。 The first irradiation position adjusting device 151 and the second irradiation position adjusting device 154 adjust the object from the laser oscillator 102 toward the pedestal 101 according to the control of the control device 107. The body 110 irradiates the laser light irradiation position.

以掃瞄器105控制之雷射光加工區域105s(以下,稱為掃瞄區域)從保持面101s法線方向觀察時係呈矩形。本實施形態中,掃瞄區域105s之面積較第一保持面101s1及第二保持面101s2之各面積更小。 The laser beam processing region 105s (hereinafter referred to as a scanning region) controlled by the scanner 105 has a rectangular shape when viewed from the normal direction of the holding surface 101s. In the present embodiment, the area of the scanning area 105s is smaller than the area of the first holding surface 101s1 and the second holding surface 101s2.

如第1圖所示,照明裝置103係對向台座101之保持面101s的相反側之面而配置。照明裝置103係位在與第一保持面101s1及第二保持面101s2鄰接之鄰接延伸方向(Y方向)上。照明裝置103係從台座101之保持面101s的相反側之面,經由開口部113而照亮對象物體110之角部。 As shown in Fig. 1, the illuminating device 103 is disposed facing the opposite side of the holding surface 101s of the pedestal 101. The illuminating device 103 is positioned in the adjacent extending direction (Y direction) adjacent to the first holding surface 101s1 and the second holding surface 101s2. The illuminating device 103 illuminates the corner portion of the target object 110 via the opening 113 from the surface opposite to the holding surface 101s of the pedestal 101.

攝影裝置109係配置於台座101之保持面101s上方。攝影裝置109係配置有複數個(例如,本實施形態中,於第一保持面101s1和第二保持面101s2各為四個)。攝影裝置109係各自配置於對應第一保持面101s1及第二保持面101s2的各開口部113位置處。攝影裝置109係拍攝對象物體110之角部的影像。 The photographing device 109 is disposed above the holding surface 101s of the pedestal 101. The plurality of imaging devices 109 are arranged (for example, in the present embodiment, each of the first holding surface 101s1 and the second holding surface 101s2 is four). The imaging devices 109 are disposed at positions corresponding to the respective opening portions 113 of the first holding surface 101s1 and the second holding surface 101s2. The photographing device 109 is an image of a corner portion of the subject object 110.

第一移動裝置104係使台座101與照明裝置103進行相對移動。第一移動裝置104如第5圖所示具有:使照明裝置103沿第一保持面101s1及第二保持面101s2鄰接方向之垂直方向(X方向)移動的第一滑件機構141與第二滑件機構144。第一移動裝置104讓第一滑件機構141及第二滑件機構144各自內藏之馬達進行作動,而使照明裝置103朝X方向進行移動。 The first mobile device 104 moves the pedestal 101 and the illuminating device 103 relative to each other. As shown in FIG. 5, the first moving device 104 has a first slider mechanism 141 and a second slider that move the illumination device 103 in the vertical direction (X direction) of the adjacent direction of the first holding surface 101s1 and the second holding surface 101s2. Mechanism 144. The first moving device 104 operates the motor built in each of the first slider mechanism 141 and the second slider mechanism 144 to move the illumination device 103 in the X direction.

如第3圖所示,第二移動裝置106係使台座101與掃瞄器105進行相對移動。第二移動裝置106具有:第三滑件機構161,讓台座101沿與保持面101s平行之第一方向(X方向)上進行移動;以及第四滑件機構162,讓第三滑件機構161沿與保持面101s平行且與第一方向垂直之第二方向(Y方向)上進行移動。第二移動裝置106讓第三滑件機構161及第四滑件機構162各自內藏之線性馬達進行作動,而使台座101朝XY各方向進行移動。 As shown in FIG. 3, the second moving device 106 relatively moves the pedestal 101 and the scanner 105. The second moving device 106 has a third slider mechanism 161 that moves the pedestal 101 in a first direction (X direction) parallel to the holding surface 101s; and a fourth slider mechanism 162 that allows the third slider mechanism 161 The movement is performed in a second direction (Y direction) parallel to the holding surface 101s and perpendicular to the first direction. The second moving device 106 operates the linear motor incorporated in each of the third slider mechanism 161 and the fourth slider mechanism 162 to move the pedestal 101 in all directions of XY.

滑件機構內脈衝驅動的線性馬達可透過供給至該線性馬達之脈衝信號來精細地進行輸出軸之迴轉角度控制。因此,可以較高精度控制滑件機構所支撐之台座101在XY各方向上的位置。另外,台座101之位置控制並不限於使用脈衝馬達之位置控制,亦可透過使用伺服馬達之反饋控制,或其它任意控制方法來實現。 The pulse-driven linear motor in the slider mechanism finely controls the rotation angle of the output shaft through the pulse signal supplied to the linear motor. Therefore, the position of the pedestal 101 supported by the slider mechanism in the XY directions can be controlled with higher precision. Further, the position control of the pedestal 101 is not limited to the position control using a pulse motor, and may be realized by feedback control using a servo motor or any other control method.

第三移動裝置190係使台座101與攝影裝置109進行相對移動。第三移動裝置190係使攝影裝置109朝與保持面101s平行之第一方向(X方向)、及與保持面101s平行且與第一方向垂直之第二方向(Y方向)的各方向進行移動。第三移動裝置190內藏有馬達,藉由使該馬達進行作動,讓攝影裝置109朝X方向進行移動。 The third moving device 190 moves the pedestal 101 and the photographing device 109 relative to each other. The third moving device 190 moves the imaging device 109 in the first direction (X direction) parallel to the holding surface 101s and in the second direction (Y direction) parallel to the holding surface 101s and perpendicular to the first direction. . The third moving device 190 has a motor incorporated therein, and the imaging device 109 is moved in the X direction by operating the motor.

控制裝置107具有:控制雷射光振盪器102之雷射控制部171;控制掃瞄器105之掃瞄器控制部172;以及控制第一移動裝置104、第二移動裝置106及第三移動裝置190之移動控制部173。 The control device 107 has: a laser control unit 171 that controls the laser light oscillator 102; a scanner control unit 172 that controls the scanner 105; and controls the first mobile device 104, the second mobile device 106, and the third mobile device 190. The movement control unit 173.

具體而言,雷射控制部171係進行:雷射振盪器102之ON/OFF、雷射振盪器102所振盪出之雷射光的輸出之控制。 Specifically, the laser control unit 171 controls the ON/OFF of the laser oscillator 102 and the output of the laser light oscillated by the laser oscillator 102.

掃瞄器控制部172係進行:第一照射位置調整裝置151之致動器153與第二照射位置調整裝置154之致動器156各別驅動控制。 The scanner control unit 172 performs drive control of the actuator 153 of the first irradiation position adjusting device 151 and the actuator 156 of the second irradiation position adjusting device 154.

移動控制部173係進行:使第一滑件機構141及第二滑件機構144各自內藏之馬達作動、使第三滑件機構161及第四滑件機構162各自內藏之線性馬達作動、使及第三移動裝置190內藏之馬達作動的各別控制。 The movement control unit 173 performs a motor operation of each of the first slider mechanism 141 and the second slider mechanism 144, and operates a linear motor incorporated in each of the third slider mechanism 161 and the fourth slider mechanism 162. The respective controls that act on the motor housed in the third mobile device 190.

控制裝置107可包含有顯示雷射光照射裝置100之各部位動作狀況的液晶顯示器等顯示裝置,亦可與顯示裝置進行連接。 The control device 107 may include a display device such as a liquid crystal display that displays an operation state of each portion of the laser light irradiation device 100, and may be connected to the display device.

當完成初始設定後,係根據控制裝置107之移動控制部173的控制,讓設置於滑件機構(第一滑件機構141、第二滑件機構144)(參考第5 圖)之馬達及設置於第三移動裝置190之馬達進行作動。藉此,使照明裝置103及攝影裝置109雙方移動至從保持面101s之法線方向觀察會與開口部113(參考第1圖)相重疊之位置。因此,可將照明裝置103及攝影裝置109雙方配置在適合對象物體110之尺寸的位置處。 When the initial setting is completed, it is provided to the slider mechanism (the first slider mechanism 141 and the second slider mechanism 144) according to the control of the movement control unit 173 of the control device 107 (refer to the fifth The motor of FIG. 3 and the motor disposed in the third moving device 190 are actuated. Thereby, both the illuminating device 103 and the imaging device 109 are moved to a position overlapping the opening 113 (refer to FIG. 1) as viewed from the normal direction of the holding surface 101s. Therefore, both the illumination device 103 and the imaging device 109 can be disposed at a position suitable for the size of the target object 110.

其次,根據控制裝置107之移動控制部173的控制,讓設置於滑件機構(第一滑件機構141、第二滑件機構144)(參考第1圖)之馬達及設置於第三移動裝置190之馬達進行作動。藉此,使照明裝置103及攝影裝置109雙方退出至從保持面101s之法線方向觀察不會與開口部113(參考第1圖)相重疊之位置處。 Next, the motor provided in the slider mechanism (the first slider mechanism 141 and the second slider mechanism 144) (refer to FIG. 1) and the third mobile device are controlled by the movement control unit 173 of the control device 107. The 190 motor is actuated. Thereby, both the illuminating device 103 and the imaging device 109 are evacuated to a position that does not overlap the opening 113 (refer to FIG. 1) when viewed from the normal direction of the holding surface 101s.

其後,根據控制裝置107之雷射控制部171的控制,從雷射光振盪器102振盪出雷射光。此時,根據控制裝置107之掃瞄器控制部172的控制,開始讓構成掃瞄器105的鏡進行迴轉驅動。於此同時,根據控制裝置107之移動控制部173的控制,透過旋轉編碼器等感測器來檢測設置於滑件機構(第三滑件機構161、第四滑件機構162)之馬達等驅動軸的轉速。 Thereafter, the laser light is oscillated from the laser oscillator 102 in accordance with the control of the laser control unit 171 of the control device 107. At this time, the mirror constituting the scanner 105 is started to be rotationally driven by the control of the scanner control unit 172 of the control device 107. At the same time, according to the control of the movement control unit 173 of the control device 107, the motor or the like provided to the slider mechanism (the third slider mechanism 161 and the fourth slider mechanism 162) is detected by a sensor such as a rotary encoder. The speed of the shaft.

控制裝置107係即時修正各座標值以使雷射光射出至與加工資訊一致的座標地,控制第二移動裝置106與掃瞄器105。即,讓雷射光能根據對象物體110(參考第1圖)之形狀描繪出特定軌跡地,使控制裝置107控制移動裝置106與掃瞄器105。例如,以控制裝置107進行之具體控制方法係:主要透過第二移動裝置106來進行雷射光之掃瞄,並以掃瞄器105來調整第二移動裝置106所無法良好控制精度之雷射光照射位置的區域。 The control device 107 controls the second mobile device 106 and the scanner 105 by correcting the coordinate values in real time to cause the laser light to be emitted to the coordinates corresponding to the processing information. That is, the laser light is allowed to draw a specific trajectory according to the shape of the target object 110 (refer to FIG. 1), and the control device 107 controls the mobile device 106 and the scanner 105. For example, the specific control method performed by the control device 107 is to perform scanning of the laser light mainly through the second mobile device 106, and adjust the laser light irradiation with the control precision of the second mobile device 106 by the scanner 105. The area of the location.

第4圖係顯示台座101的平面圖。 Fig. 4 is a plan view showing the pedestal 101.

如第4圖所示,台座101具有:吸附保持對象物體110之板片112,以及保持板片112之基台111。 As shown in FIG. 4, the pedestal 101 has a plate 112 that adsorbs and holds the object 110, and a base 111 that holds the plate 112.

板片112在平面視圖呈矩形,板片112之尺寸與保持面101s之 尺寸相同。板片112係可拆卸地固定至基台111。板片112具有能吸附對象物體110之吸附面112s。板片112處吸附保持有複數個(例如,本實施形態中為二個)對象物體110。例如,板片112之構成材料可使用鋁(Al)、鐵(Fe)及不鏽鋼(SUS)等金屬。 The plate 112 has a rectangular shape in plan view, and the size of the plate 112 and the holding surface 101s The same size. The plate 112 is detachably fixed to the base 111. The plate 112 has an adsorption surface 112s capable of adsorbing the object 110. A plurality of (for example, two in the present embodiment) object objects 110 are adsorbed and held at the sheet 112. For example, a metal such as aluminum (Al), iron (Fe), or stainless steel (SUS) can be used as the constituent material of the sheet 112.

於板片112處,沿吸附面112s之外周緣,形成有矩形框狀之導引溝槽117。導引溝槽117係為接收雷射光振盪器102所振盪出之雷射光的凹部。導引溝槽117之外周緣較對象物體110之外周緣更大。 At the plate piece 112, a rectangular frame-shaped guide groove 117 is formed along the outer periphery of the adsorption surface 112s. The guiding groove 117 is a recess that receives the laser light oscillated by the laser oscillator 102. The outer circumference of the guide groove 117 is larger than the outer circumference of the object 110.

對象物體110之外周緣係配置於吸附面112s之外周緣與導引溝槽117之外周緣之間。藉由照射至導引溝槽117之雷射光,可抑制雷射光於保持面101s產生漫射。 The outer peripheral edge of the target object 110 is disposed between the outer periphery of the adsorption surface 112s and the outer periphery of the guide groove 117. By irradiating the laser light to the guiding groove 117, it is possible to suppress the laser light from being diffused on the holding surface 101s.

於第一保持面101s1處,在對應對象物體110之四個角部位置處形成有四個開口部113(第一開口部113a、第二開口部113b、第三開口部113c、第四開口部113d)。第一開口部113a係配置於對象物體110之右上角部。第二開口部113b係配置於對象物體110之左上角部。第三開口部113c係配置於對象物體110之左下角部。第四開口部113d係配置於對象物體110之右下角部。 Four opening portions 113 (first opening portion 113a, second opening portion 113b, third opening portion 113c, and fourth opening portion) are formed at the four corner portions of the corresponding target object 110 at the first holding surface 101s1. 113d). The first opening 113a is disposed at the upper right corner of the target object 110. The second opening 113b is disposed at the upper left corner of the target object 110. The third opening 113c is disposed at a lower left corner of the target object 110. The fourth opening 113d is disposed at a lower right corner of the target object 110.

第一開口部113a之+Y方向側端緣與第二開口部113b之-Y方向側端緣之間的距離(以下,稱為第一開口部113a及第二開口部113b之最外寬度Wa1)係與第三開口部113c之-Y方向側端緣與第四開口部113d之+Y方向側端緣之間的距離(以下,稱為第三開口部113c及第四開口部113d之最外寬度Wa2)概略相等。 The distance between the +Y-direction side end edge of the first opening portion 113a and the Y-direction side end edge of the second opening portion 113b (hereinafter referred to as the outermost width Wa1 of the first opening portion 113a and the second opening portion 113b) The distance between the Y-direction side end edge of the third opening portion 113c and the +Y-direction side end edge of the fourth opening portion 113d (hereinafter referred to as the maximum of the third opening portion 113c and the fourth opening portion 113d) The outer width Wa2) is roughly equal.

於第二保持面101s2處,在對應對象物體110之四個角部位置處形成有四個開口部113(第五開口部113e、第六開口部113f、第七開口部113g、第八開口部113h)。第五開口部113e係配置於對象物體110之右上角部。第六開口部113f係配置於對象物體110之左上角部。第七開口部113g係配置於對象 物體110之左下角部。第八開口部113h係配置於對象物體110之右下角部。 At the second holding surface 101s2, four opening portions 113 (a fifth opening portion 113e, a sixth opening portion 113f, a seventh opening portion 113g, and an eighth opening portion) are formed at four corner portions of the corresponding target object 110. 113h). The fifth opening 113e is disposed at the upper right corner of the target object 110. The sixth opening 113f is disposed at the upper left corner of the target object 110. The seventh opening portion 113g is disposed on the object The lower left corner of the object 110. The eighth opening portion 113h is disposed at a lower right corner portion of the target object 110.

第五開口部113e之+Y方向側端緣與第六開口部113f之-Y方向側端緣之間的距離(以下,稱為第五開口部113e及第六開口部113f之最外寬度Wa3)係與第七開口部113g之-Y方向側端緣與第八開口部113h之+Y方向側端緣之間的距離(以下,稱為第七開口部113g及第八開口部113h之最外寬度Wa4)概略相等。 The distance between the +Y-direction side end edge of the fifth opening portion 113e and the Y-direction side end edge of the sixth opening portion 113f (hereinafter referred to as the outermost width Wa3 of the fifth opening portion 113e and the sixth opening portion 113f) The distance between the Y-direction side end edge of the seventh opening portion 113g and the +Y-direction side end edge of the eighth opening portion 113h (hereinafter referred to as the seventh opening portion 113g and the eighth opening portion 113h) The outer width Wa4) is roughly equal.

吸附面112s具有:形成於第一保持面101s1之中央部的第一吸附面112s1,以及形成於第二保持面101s2之中央部的第二吸附面112s2。第一吸附面112s1及第二吸附面112s2係各自形成有複數個吸附孔112h。 The adsorption surface 112s has a first adsorption surface 112s1 formed at a central portion of the first holding surface 101s1, and a second adsorption surface 112s2 formed at a central portion of the second holding surface 101s2. Each of the first adsorption surface 112s1 and the second adsorption surface 112s2 is formed with a plurality of adsorption holes 112h.

於板片112之保持面101s的相反側之面處,形成有經由複數個吸附孔112h來吸引對象物體110之吸引孔114(參考第5圖)。第5圖中,僅於第一吸附面112s1與第二吸附面112s2之間處配置有一個吸引孔114。另外,吸引孔114之配置數量不限於一個,亦可為複數個。 At a surface opposite to the holding surface 101s of the sheet piece 112, a suction hole 114 for sucking the target object 110 via a plurality of adsorption holes 112h is formed (refer to Fig. 5). In Fig. 5, only one suction hole 114 is disposed between the first adsorption surface 112s1 and the second adsorption surface 112s2. In addition, the number of the arrangement of the suction holes 114 is not limited to one, and may be plural.

第一吸附面112s1及第二吸附面112s2係各自在平面視圖中呈矩形。第一吸附面112s1及第二吸附面112s2之各尺寸係較對象物體110之尺寸更小。第一吸附面112s1之四個角部係配置於對應四個開口部113(第一開口部113a、第二開口部113b、第三開口部113c、第四開口部113d)位置處。第二吸附面112s2之四個角部係配置於對應四個開口部113(第五開口部113e、第六開口部113f、第七開口部113g、第八開口部113h)位置處。 The first adsorption surface 112s1 and the second adsorption surface 112s2 are each rectangular in plan view. The respective sizes of the first adsorption surface 112s1 and the second adsorption surface 112s2 are smaller than the size of the object 110. The four corner portions of the first adsorption surface 112s1 are disposed at positions corresponding to the four openings 113 (the first opening 113a, the second opening 113b, the third opening 113c, and the fourth opening 113d). The four corner portions of the second adsorption surface 112s2 are disposed at positions corresponding to the four openings 113 (the fifth opening 113e, the sixth opening 113f, the seventh opening 113g, and the eighth opening 113h).

基台111係在平面視圖中呈矩形,基台111之尺寸較板片112之尺寸更大。例如,基台111之短邊方向的長度(X方向之長度)約為350mm,長邊方向之長度(Y方向之長度)約為450mm。基台111內部配置有照明裝置103及第一移動裝置104(參考第5圖)。照明裝置103之配置結構係可照亮尺寸為4英吋至10英吋之對象物體。 The base 111 is rectangular in plan view, and the size of the base 111 is larger than the size of the plate 112. For example, the length of the base 111 in the short side direction (the length in the X direction) is about 350 mm, and the length in the longitudinal direction (the length in the Y direction) is about 450 mm. The illuminating device 103 and the first moving device 104 are disposed inside the base 111 (refer to FIG. 5). The illuminating device 103 is configured to illuminate a target object having a size of 4 inches to 10 inches.

第5圖係顯示照明裝置103及第一移動裝置104的平面圖。 FIG. 5 is a plan view showing the illumination device 103 and the first mobile device 104.

如第5圖所示,照明裝置103具有:第一照明裝置131;以及第二照明裝置135,係於X方向上隔著吸引孔114而與第一照明裝置131並排配置。第一照明裝置131及第二照明裝置135係各自於Y方向上進行延伸地設置。 As shown in FIG. 5, the illuminating device 103 includes a first illuminating device 131 and a second illuminating device 135 which are arranged side by side with the first illuminating device 131 via the suction hole 114 in the X direction. The first illuminating device 131 and the second illuminating device 135 are each provided to extend in the Y direction.

第一照明裝置131具有:第一光源132;於Y方向上與第一光源132並排配置的第二光源133;以及保持第一光源132及第二光源133的保持部134。 The first illumination device 131 has a first light source 132, a second light source 133 arranged in parallel with the first light source 132 in the Y direction, and a holding portion 134 that holds the first light source 132 and the second light source 133.

如第4圖及第5圖所示,第一光源132係從第一保持面101s1的相反側之面經由第一開口部113a及第二開口部113b,照亮吸附保持於第一吸附面112s1的對象物體110角部。第一光源132之長邊方向的長度La1係較第一開口部113a及第二開口部113b之最外寬度Wa1更大。另外,從適度照亮對象物體110角部的觀點來看,第一光源132之長邊方向的長度La1亦可與第一開口部113a及第二開口部113b之最外寬度Wa1概略相等。 As shown in FIGS. 4 and 5, the first light source 132 is illuminating and adsorbed on the first adsorption surface 112s1 from the surface on the opposite side of the first holding surface 101s1 via the first opening 113a and the second opening 113b. The corner of the object object 110. The length La1 of the first light source 132 in the longitudinal direction is larger than the outermost width Wa1 of the first opening 113a and the second opening 113b. Further, from the viewpoint of appropriately illuminating the corner portion of the target object 110, the length La1 of the first light source 132 in the longitudinal direction may be substantially equal to the outermost width Wa1 of the first opening 113a and the second opening 113b.

第二光源133係從第二保持面101s2的相反側之面經由第五開口部113e及第六開口部113f,照亮吸附保持於第二吸附面112s2的對象物體110角部。第二光源133之長邊方向的長度La2係較第五開口部113e及第六開口部113f之最外層度Wa3更大。另外,從適度照亮對象物體110角部的觀點來看,第二光源133之長邊方向的長度La2亦可與第五開口部113e及第六開口部113f之最外層度Wa3概略相等。 The second light source 133 illuminates the corner portion of the target object 110 held by the second adsorption surface 112s2 from the surface on the opposite side of the second holding surface 101s2 via the fifth opening 113e and the sixth opening 113f. The length La2 of the second light source 133 in the longitudinal direction is larger than the outermost layer Wa3 of the fifth opening 113e and the sixth opening 113f. Further, from the viewpoint of appropriately illuminating the corner portion of the target object 110, the length La2 of the second light source 133 in the longitudinal direction may be substantially equal to the outermost layer Wa3 of the fifth opening portion 113e and the sixth opening portion 113f.

如第5圖所示,第二照明裝置135具有:第三光源136;於Y方向上與第三光源136並排配置的第四光源137;以及保持第三光源136及第四光源137的保持部138。 As shown in FIG. 5, the second illumination device 135 has a third light source 136, a fourth light source 137 arranged in parallel with the third light source 136 in the Y direction, and a holding portion for holding the third light source 136 and the fourth light source 137. 138.

如第4圖及第5圖所示,第三光源136係從第一保持面101s1的相反側之面經由第三開口部113c及第四開口部113d,照亮吸附保持於第一吸 附面112s1的對象物體110角部。第三光源136之長邊方向的長度Lb1係較第三開口部113c及第四開口部113d之最外寬度Wa2更大。另外,從適度照亮對象物體110角部的觀點來看,第三光源136之長邊方向的長度Lb1亦可與第三開口部113c及第四開口部113d之最外寬度Wa2概略相等。 As shown in FIGS. 4 and 5, the third light source 136 is illuminating and holding the first suction from the surface on the opposite side of the first holding surface 101s1 via the third opening 113c and the fourth opening 113d. The corner of the object object 110 of the surface 112s1. The length Lb1 of the third light source 136 in the longitudinal direction is larger than the outermost width Wa2 of the third opening 113c and the fourth opening 113d. Further, from the viewpoint of appropriately illuminating the corner portion of the target object 110, the length Lb1 of the third light source 136 in the longitudinal direction may be substantially equal to the outermost width Wa2 of the third opening 113c and the fourth opening 113d.

第四光源137係從第二保持面101s2的相反側之面經由第七開口部113g及第八開口部113h,照亮吸附保持於第二吸附面112s2的對象物體110角部。第四光源137之長邊方向的長度Lb2係較第七開口部113g及第八開口部113h之最外寬度Wa4更大。另外,從適度照亮對象物體110角部的觀點來看,第四光源137之長邊方向的長度Lb2亦可與第七開口部113g及第八開口部113h之最外寬度Wa4概略相等。 The fourth light source 137 illuminates the corner portion of the target object 110 held by the second adsorption surface 112s2 from the surface on the opposite side of the second holding surface 101s2 via the seventh opening 113g and the eighth opening 113h. The length Lb2 of the fourth light source 137 in the longitudinal direction is larger than the outermost width Wa4 of the seventh opening 113g and the eighth opening 113h. Further, from the viewpoint of appropriately illuminating the corner portion of the target object 110, the length Lb2 of the fourth light source 137 in the longitudinal direction may be substantially equal to the outermost width Wa4 of the seventh opening portion 113g and the eighth opening portion 113h.

如第5圖所示,第一移動裝置104具有:第一滑件機構141;以及第二滑件機構144,係於Y方向上隔著吸引孔114而與第一滑件機構141並排配置。 As shown in Fig. 5, the first moving device 104 has a first slider mechanism 141 and a second slider mechanism 144 which is arranged in parallel with the first slider mechanism 141 via the suction hole 114 in the Y direction.

第一滑件機構141係配置於第一保持面101s1的相反側之面。第一滑件機構141具有:第一導軌142;以及第一線性馬達143,係於Y方向上與第一導軌142並排配置。 The first slider mechanism 141 is disposed on the opposite side of the first holding surface 101s1. The first slider mechanism 141 has a first rail 142 and a first linear motor 143 arranged side by side with the first rail 142 in the Y direction.

第一導軌142係沿基台111之一側邊(+Y方向側之側邊111a)進行延伸。例如,第一導軌142之長度為270mm。 The first rail 142 extends along one side of the base 111 (the side 111a on the +Y direction side). For example, the first rail 142 has a length of 270 mm.

第一導軌142係配置在與保持部134及保持部138之+Y方向側端部有部分重疊的位置處。第一導軌142係引導保持部134及保持部138朝X方向進行移動。 The first rail 142 is disposed at a position partially overlapping the end portion of the holding portion 134 and the holding portion 138 on the +Y direction side. The first guide rail 142 moves the guide holding portion 134 and the holding portion 138 in the X direction.

第一線性馬達143係於第一導軌142之平行方向上延伸設置。 The first linear motor 143 is extended in a parallel direction of the first rail 142.

第一線性馬達143之長度係較第一導軌142之長度更短。例如,第一線性馬達143之長度為72mm(行程)。 The length of the first linear motor 143 is shorter than the length of the first rail 142. For example, the length of the first linear motor 143 is 72 mm (stroke).

第一線性馬達143係配置在與保持於保持部138之第三光源136的-Y方向側端部有部分重疊的位置處。藉由第一線性馬達143,使保持部138朝X方向進行移動。 The first linear motor 143 is disposed at a position partially overlapping the end portion on the −Y direction side of the third light source 136 held by the holding portion 138. The holding portion 138 is moved in the X direction by the first linear motor 143.

第二滑件機構144係配置於第二保持面101s2的相反側之面。第二滑件機構144具有:第二導軌145;以及於Y方向上與第二導軌145並排配置的第二線性馬達146。 The second slider mechanism 144 is disposed on the opposite side of the second holding surface 101s2. The second slider mechanism 144 has a second rail 145 and a second linear motor 146 disposed side by side with the second rail 145 in the Y direction.

第二導軌145係沿基台111之一側邊(-Y方向側之側邊111b)延伸設置。第二導軌145之長度係與第一導軌142之長度概略相等。 The second guide rail 145 is extended along one side of the base 111 (the side 111b on the -Y direction side). The length of the second rail 145 is substantially equal to the length of the first rail 142.

第二導軌145係配置在與保持部134及保持部138之-Y方向側端部有部分重疊的位置處。第二導軌145係引導保持部134及保持部138朝X方向進行移動。 The second guide rail 145 is disposed at a position partially overlapping the end portion on the -Y direction side of the holding portion 134 and the holding portion 138. The second guide rail 145 moves the guide holding portion 134 and the holding portion 138 in the X direction.

第二線性馬達146係於第二導軌145之平行方向上延伸設置。 The second linear motor 146 is extended in a parallel direction of the second rail 145.

第二線性馬達146之長度係與第一線性馬達143之長度概略相等。 The length of the second linear motor 146 is substantially equal to the length of the first linear motor 143.

第二線性馬達146係配置在與保持於保持部134之第二光源133的+Y方向側端部有部分重疊的位置處。藉由第二線性馬達146,使保持部134朝X方向進行移動。 The second linear motor 146 is disposed at a position partially overlapping the end portion of the second light source 133 held by the holding portion 134 at the +Y direction. The holding portion 134 is moved in the X direction by the second linear motor 146.

例如,藉由使第一線性馬達143及第二線性馬達146同步作動,讓保持部134及保持部138可於X方向上同步進行移動。本實施形態中,係同步進行第一照明裝置131之退出移動(朝-X方向之移動)與第二照明裝置135之退出移動(朝+X方向之移動)。 For example, by moving the first linear motor 143 and the second linear motor 146 in synchronization, the holding portion 134 and the holding portion 138 can be moved in synchronization in the X direction. In the present embodiment, the exit movement (movement in the -X direction) of the first illumination device 131 and the exit movement (movement in the +X direction) of the second illumination device 135 are simultaneously performed.

以下,係使用第6圖至第9圖,說明第一移動裝置104及第三移動裝置190之作用。 Hereinafter, the roles of the first mobile device 104 and the third mobile device 190 will be described using Figs. 6 to 9.

第6圖係顯示照亮對象物體110時的照明裝置103之配置位置 (以下,稱為照明裝置103之照明位置),以及拍攝對象物體110時的攝影裝置109之配置位置(以下,稱為攝影裝置109之攝影位置)的平面圖。 Fig. 6 is a view showing the arrangement position of the illumination device 103 when the target object 110 is illuminated. (hereinafter, referred to as an illumination position of the illumination device 103), and a plan view of an arrangement position of the imaging device 109 (hereinafter, referred to as an imaging position of the imaging device 109) when the target object 110 is imaged.

於第6圖中,係使用開口部113a~113h之照明裝置103及攝影裝置109的配置關係,以說明照明裝置103之照明位置及攝影裝置109之攝影位置。又,為了方便起見,係省略第一移動裝置104、第三移動裝置190及吸引孔114等圖式。 In the sixth drawing, the arrangement relationship between the illumination device 103 and the imaging device 109 of the openings 113a to 113h is used to explain the illumination position of the illumination device 103 and the imaging position of the imaging device 109. Moreover, for the sake of convenience, the drawings of the first moving device 104, the third moving device 190, and the suction hole 114 are omitted.

如第6圖所示,第一照明裝置131係配置在與第一開口部113a、第二開口部113b、第五開口部113e及第六開口部113f有部分重疊的位置處。第一照明裝置131係經由第一開口部113a、第二開口部113b、第五開口部113e及第六開口部113f,照亮各對象物體110之-X方向側角部。 As shown in FIG. 6, the first illuminating device 131 is disposed at a position partially overlapping the first opening 113a, the second opening 113b, the fifth opening 113e, and the sixth opening 113f. The first illuminating device 131 illuminates the -X direction side corner portion of each of the target objects 110 via the first opening portion 113a, the second opening portion 113b, the fifth opening portion 113e, and the sixth opening portion 113f.

第二照明裝置135係配置在與第三開口部113c、第四開口部113d、第七開口部113g及第八開口部113h有部分重疊的位置處。第二照明裝置135係經由第三開口部113c、第四開口部113d、第七開口部113g及第八開口部113h,照亮各對象物體110之+X方向側角部。 The second illuminating device 135 is disposed at a position partially overlapping the third opening 113c, the fourth opening 113d, the seventh opening 113g, and the eighth opening 113h. The second illumination device 135 illuminates the +X direction side corner portions of the respective target objects 110 via the third opening portion 113c, the fourth opening portion 113d, the seventh opening portion 113g, and the eighth opening portion 113h.

攝影裝置109係配置在與第一開口部113a、第二開口部113b、第三開口部113c、第四開口部113d、第五開口部113e、第六開口部113f、第七開口部113g及第八開口部113h有部分重疊的位置處。攝影裝置109係在以照明裝置103照亮各對象物體110角部的狀態下,拍攝各對象物體110角部之影像。 The imaging device 109 is disposed in the first opening 113a, the second opening 113b, the third opening 113c, the fourth opening 113d, the fifth opening 113e, the sixth opening 113f, the seventh opening 113g, and the The eight opening portions 113h have partially overlapped positions. The photographing device 109 captures an image of a corner portion of each of the target objects 110 in a state where the illumination device 103 illuminates the corners of the respective target objects 110.

第7圖係顯示雷射光振盪器102振盪出雷射光時,即,針對對象物體110進行切斷加工時的照明裝置103之配置(以下,稱為照明裝置103之退出位置)及攝影裝置109之配置(以下,稱為攝影裝置109之退出位置)的平面圖。 Fig. 7 is a view showing the arrangement of the illumination device 103 when the laser light 102 is oscillated by the laser oscillator 102, that is, the arrangement of the illumination device 103 when the target object 110 is cut (hereinafter referred to as the exit position of the illumination device 103) and the photographing device 109. A plan view of the configuration (hereinafter, referred to as an exit position of the photographing device 109).

於第7圖中,係使用開口部113a~113h之照明裝置103及攝影 裝置109的配置關係,來說明照明裝置103之退出位置及攝影裝置109之退出位置。又,為了方便起見,係省略第一移動裝置104、第三移動裝置190及吸引孔114等圖式。 In Fig. 7, the illumination device 103 using the openings 113a to 113h and photography are used. The arrangement relationship of the device 109 is used to explain the exit position of the illumination device 103 and the exit position of the photographing device 109. Moreover, for the sake of convenience, the drawings of the first moving device 104, the third moving device 190, and the suction hole 114 are omitted.

如第7圖所示,第一照明裝置131係配置在不會與第一開口部113a、第二開口部113b、第五開口部113e及第六開口部113f相重疊的位置處。即,第一照明裝置131係配置於第一開口部113a、第二開口部113b、第五開口部113e及第六開口部113f各自-X方向側端緣更-X方向側。該情況中,第一照明裝置131所射出之光線可被板片112(參考第4圖)及基台111所遮蔽。另外,亦可關閉第一照明裝置131。 As shown in FIG. 7, the first illuminating device 131 is disposed at a position that does not overlap the first opening 113a, the second opening 113b, the fifth opening 113e, and the sixth opening 113f. In other words, the first illuminating device 131 is disposed on the -X direction side of the first opening portion 113a, the second opening portion 113b, the fifth opening portion 113e, and the sixth opening portion 113f on the -X direction side edge. In this case, the light emitted by the first illumination device 131 can be shielded by the plate 112 (refer to FIG. 4) and the base 111. In addition, the first lighting device 131 can also be turned off.

第二照明裝置135係配置在不會與第三開口部113c、第四開口部113d、第七開口部113g及第八開口部113h相重疊的位置處。即,第二照明裝置135係配置於第三開口部113c、第四開口部113d、第七開口部113g及第八開口部113h各自+X方向側端緣更+X方向側。該情況中,第二照明裝置135所射出之光線可被板片112(參考第4圖)及基台111所遮蔽。另外,亦可關閉第二照明裝置135。 The second illuminating device 135 is disposed at a position that does not overlap the third opening 113c, the fourth opening 113d, the seventh opening 113g, and the eighth opening 113h. In other words, the second illuminating device 135 is disposed on the +X direction side of each of the third opening portion 113c, the fourth opening portion 113d, the seventh opening portion 113g, and the eighth opening portion 113h on the +X direction side end edge. In this case, the light emitted by the second illumination device 135 can be shielded by the plate 112 (refer to FIG. 4) and the base 111. In addition, the second illumination device 135 can also be turned off.

攝影裝置109係配置在不會與第一開口部113a、第二開口部113b、第三開口部113c、第四開口部113d、第五開口部113e、第六開口部113f、第七開口部113g及第八開口部113h相重疊的位置處。具體而言,在八個攝影裝置109中,-X方向側的四個攝影裝置109係配置在第一開口部113a、第二開口部113b、第五開口部113e及第六開口部113f各自-X方向側端緣更-X方向側。在八個攝影裝置109中,+X方向側的四個攝影裝置109係配置在第三開口部113c、第四開口部113d、第七開口部113g及第八開口部113h各自+X方向側端緣更+X方向側。 The imaging device 109 is disposed not in the first opening 113a, the second opening 113b, the third opening 113c, the fourth opening 113d, the fifth opening 113e, the sixth opening 113f, and the seventh opening 113g. And a position where the eighth opening portion 113h overlaps. Specifically, in the eight imaging devices 109, the four imaging devices 109 on the -X direction side are disposed in the first opening 113a, the second opening 113b, the fifth opening 113e, and the sixth opening 113f - The X-direction side end edge is more - X direction side. In the eight imaging devices 109, four imaging devices 109 on the +X direction side are disposed on the +X direction side ends of the third opening 113c, the fourth opening 113d, the seventh opening 113g, and the eighth opening 113h. The edge is more + X direction side.

第8圖係顯示當對象物體210(第二對象物體)之尺寸較對象物 體110(第一對象物體)之尺寸更大的情況(即,將保持著尺寸相對較小之對象物體110的板片112交換成保持著尺寸相對較大之對象物體210的板片(交換板片後)),照明裝置103之照明位置及攝影裝置109之攝影位置的平面圖。 Figure 8 shows the size of the object object 210 (second object) compared to the object The case where the size of the body 110 (first object) is larger (that is, the sheet 112 holding the object 110 having a relatively small size is exchanged to hold the sheet of the object 210 having a relatively large size (switch board) After the film)), a plan view of the illumination position of the illumination device 103 and the imaging position of the imaging device 109.

另外,本實施形態中,雖以板片交換前後:係將保持尺寸相對較小之對象物體110的板片112交換成保持尺寸相對較大之對象物體210的板片為例來進行說明,但不限定於此。例如,板片交換前後:係將保持尺寸相對較大之對象物體的板片交換成保持尺寸相對較小之對象物體的板片,亦可適用於本發明。 In the present embodiment, the front and back of the sheet exchange are described as an example in which the sheet 112 of the target object 110 having a relatively small size is exchanged to hold the sheet of the target object 210 having a relatively large size. It is not limited to this. For example, before and after the sheet exchange: a sheet in which a sheet of a target object having a relatively large size is kept to be exchanged to a target object having a relatively small size is also applicable to the present invention.

如第8圖所示,於保持對象物體210之板片處,形成有第一開口部213a、第二開口部213b、第三開口部213c、第四開口部213d、第五開口部213e、第六開口部213f、第七開口部213g及第八開口部213h。各開口部(第一開口部213a~第八開口部213h)係分別相當於上述之第一開口部113a、第二開口部113b、第三開口部113c、第四開口部113d、第五開口部113e、第六開口部113f、第七開口部113g及第八開口部113h。但是,各開口部(第一開口部213a~第八開口部213h)之尺寸及配置係適合於對象物體210之尺寸。 As shown in FIG. 8, the first opening 213a, the second opening 213b, the third opening 213c, the fourth opening 213d, the fifth opening 213e, and the first opening 213a are formed in the sheet holding the target object 210. The sixth opening 213f, the seventh opening 213g, and the eighth opening 213h. Each of the openings (the first opening 213a to the eighth opening 213h) corresponds to the first opening 113a, the second opening 113b, the third opening 113c, the fourth opening 113d, and the fifth opening, respectively. 113e, a sixth opening 113f, a seventh opening 113g, and an eighth opening 113h. However, the size and arrangement of the respective opening portions (the first opening portion 213a to the eighth opening portion 213h) are suitable for the size of the target object 210.

於第8圖中,係使用開口部(第一開口部213a~第八開口部213h)之照明裝置103及攝影裝置109的配置關係,以說明照明裝置103之照明位置及攝影裝置109之攝影位置。又,為了方便起見,係省略第一移動裝置104、第三移動裝置190及吸引孔114等圖式。 In the eighth diagram, the arrangement relationship between the illumination device 103 and the imaging device 109 using the openings (the first opening portion 213a to the eighth opening portion 213h) is used to explain the illumination position of the illumination device 103 and the imaging position of the imaging device 109. . Moreover, for the sake of convenience, the drawings of the first moving device 104, the third moving device 190, and the suction hole 114 are omitted.

如第8圖所示,第一照明裝置131係配置在與第一開口部213a、第二開口部213b、第五開口部213e及第六開口部213f有部分重疊的位置處。第一照明裝置131係經由第一開口部213a、第二開口部213b、第五開口部213e及第六開口部213f,照亮各對象物體210之-X方向側角部。 As shown in FIG. 8, the first illuminating device 131 is disposed at a position partially overlapping the first opening 213a, the second opening 213b, the fifth opening 213e, and the sixth opening 213f. The first illuminating device 131 illuminates the -X direction side corner portion of each of the target objects 210 via the first opening portion 213a, the second opening portion 213b, the fifth opening portion 213e, and the sixth opening portion 213f.

第二照明裝置135係配置在與第三開口部213c、第四開口部 213d、第七開口部213g及第八開口部213h有部分重疊的位置處。第二照明裝置135係經由第三開口部213c、第四開口部213d、第七開口部213g及第八開口部213h,照亮各對象物體210之+X方向側角部。 The second illumination device 135 is disposed in the third opening portion 213c and the fourth opening portion 213d, the seventh opening portion 213g and the eighth opening portion 213h have partially overlapped positions. The second illumination device 135 illuminates the +X direction side corner portions of the respective target objects 210 via the third opening portion 213c, the fourth opening portion 213d, the seventh opening portion 213g, and the eighth opening portion 213h.

攝影裝置109係配置在與第一開口部213a、第二開口部213b、第三開口部213c、第四開口部213d、第五開口部213e、第六開口部213f、第七開口部213g及第八開口部213h有部分重疊的位置處。攝影裝置109係在以照明裝置103照亮各對象物體210角部的狀態下,拍攝各對象物體210角部之影像。 The imaging device 109 is disposed in the first opening 213a, the second opening 213b, the third opening 213c, the fourth opening 213d, the fifth opening 213e, the sixth opening 213f, the seventh opening 213g, and the The eight opening portions 213h have partially overlapping positions. The photographing device 109 captures an image of a corner portion of each of the target objects 210 in a state where the illumination device 103 illuminates the corners of the respective target objects 210.

如第6圖及第8圖所示,第一照明裝置131之+X方向側端緣與第二照明裝置135之-X方向側端緣之間的距離(以下,稱為第一照明裝置131及第二照明裝置135之間隔)於板片交換前後會改變。具體而言,板片交換後(設置尺寸相對較大之對象物體210用的板片時)的第一照明裝置131及第二照明裝置135之間隔Hb1較板片交換前(設置尺寸相對較小之對象物體110用的板片112時)的第一照明裝置131及第二照明裝置135之間隔Ha1更大。 As shown in FIGS. 6 and 8, the distance between the +X direction side end edge of the first illumination device 131 and the -X direction side end edge of the second illumination device 135 (hereinafter referred to as the first illumination device 131) The spacing between the second illumination device 135 and the second illumination device 135 will change before and after the exchange of the plates. Specifically, the interval Hb1 between the first illuminating device 131 and the second illuminating device 135 after the sheet exchange (when the sheet for the target object 210 having a relatively large size is set) is earlier than the sheet exchange (the setting size is relatively small) The interval Ha1 between the first illuminating device 131 and the second illuminating device 135 at the time of the sheet 112 for the target object 110 is larger.

第9圖係顯示板片交換後的照明裝置103之退出位置及攝影裝置109之退出位置的平面圖。 Fig. 9 is a plan view showing the exit position of the illumination device 103 after the exchange of the sheets and the exit position of the photographing device 109.

於第9圖中,係使用開口部(第一開口部213a~第八開口部213h)之照明裝置103及攝影裝置109的配置關係,以說明照明裝置103之退出位置及攝影裝置109之退出位置。又,為了方便起見,係省略第一移動裝置104、第三移動裝置190及吸引孔114等圖式。 In the ninth diagram, the arrangement relationship between the illumination device 103 and the imaging device 109 using the openings (the first opening portion 213a to the eighth opening portion 213h) is used to explain the exit position of the illumination device 103 and the exit position of the photographing device 109. . Moreover, for the sake of convenience, the drawings of the first moving device 104, the third moving device 190, and the suction hole 114 are omitted.

如第9圖所示,第一照明裝置131係配置在不會與第一開口部213a、第二開口部213b、第五開口部213e及第六開口部213f相重疊的位置處,即,係配置於第一開口部213a、第二開口部213b、第五開口部213e及第六開口部213f各自-X方向側端緣更-X方向側。該情況中,第一照明裝置131所射 出之光線可被板片(圖式中省略)及基台111所遮蔽。另外,亦可關閉第一照明裝置131。 As shown in FIG. 9, the first illuminating device 131 is disposed at a position that does not overlap the first opening 213a, the second opening 213b, the fifth opening 213e, and the sixth opening 213f, that is, The first opening portion 213a, the second opening portion 213b, the fifth opening portion 213e, and the sixth opening portion 213f are disposed on the -X direction side end side in the -X direction side. In this case, the first illumination device 131 shoots The light emitted can be obscured by the plate (omitted in the drawing) and the base 111. In addition, the first lighting device 131 can also be turned off.

第二照明裝置135係配置在不會與第三開口部213c、第四開口部213d、第七開口部213g及第八開口部213h相重疊的位置處,即,係配置於第三開口部213c、第四開口部213d、第七開口部213g及第八開口部213h各自+X方向側端緣更+X方向側。該情況中,第二照明裝置135所射出之光線可被板片(圖式中省略)及基台111所遮蔽。另外,亦可關閉第二照明裝置135。 The second illuminating device 135 is disposed at a position that does not overlap the third opening 213c, the fourth opening 213d, the seventh opening 213g, and the eighth opening 213h, that is, is disposed in the third opening 213c. The fourth opening portion 213d, the seventh opening portion 213g, and the eighth opening portion 213h are each on the +X direction side end edge in the +X direction side. In this case, the light emitted by the second illumination device 135 can be shielded by the plate (omitted from the drawing) and the base 111. In addition, the second illumination device 135 can also be turned off.

攝影裝置109係配置在不會與第一開口部213a、第二開口部213b、第三開口部213c、第四開口部213d、第五開口部213e、第六開口部213f、第七開口部213g及第八開口部213h相重疊的位置處。具體而言,在八個攝影裝置109中,-X方向側的四個攝影裝置109係配置在第一開口部213a、第二開口部213b、第五開口部213e及第六開口部213f各自-X方向側端緣更-X方向側。在八個攝影裝置109中,+X方向側的四個攝影裝置109係配置在第三開口部213c、第四開口部213d、第七開口部213g及第八開口部213h各自+X方向側端緣更+X方向側。 The imaging device 109 is disposed not in the first opening 213a, the second opening 213b, the third opening 213c, the fourth opening 213d, the fifth opening 213e, the sixth opening 213f, and the seventh opening 213g. And a position where the eighth opening portion 213h overlaps. Specifically, in the eight imaging devices 109, the four imaging devices 109 on the -X direction side are disposed in the first opening 213a, the second opening 213b, the fifth opening 213e, and the sixth opening 213f - The X-direction side end edge is more - X direction side. In the eight imaging devices 109, four imaging devices 109 on the +X direction side are disposed on the +X direction side ends of the third opening 213c, the fourth opening 213d, the seventh opening 213g, and the eighth opening 213h. The edge is more + X direction side.

如第7圖及第9圖所示,在板片交換前後,第一照明裝置131及第二照明裝置135之間隔係概略相等。具體而言,板片交換後的第一照明裝置131及第二照明裝置135之間隔Hb2係與板片交換前的第一照明裝置131及第二照明裝置135之間隔Ha2概略相等。 As shown in Figs. 7 and 9, the interval between the first illumination device 131 and the second illumination device 135 is substantially equal before and after the plate exchange. Specifically, the interval Hb2 between the first illuminating device 131 and the second illuminating device 135 after the sheet exchange is substantially equal to the interval Ha2 between the first illuminating device 131 and the second illuminating device 135 before the sheet exchange.

如第6圖至第9圖所示,藉由以第一移動裝置104將照明裝置103沿X方向上移動,能在板片交換前後,照射適合於每個對象物體110,210尺寸的光量。且,由於在板片交換前後可共用照明裝置103,故不需要為了符合對象物體110,210尺寸而交換照明裝置103。 As shown in FIGS. 6 to 9, by moving the illumination device 103 in the X direction by the first moving device 104, it is possible to illuminate the amount of light suitable for each target object 110, 210 before and after the exchange of the sheets. Moreover, since the illuminating device 103 can be shared before and after the exchange of the slabs, it is not necessary to exchange the illuminating device 103 in order to conform to the size of the target object 110, 210.

又,藉由以第三移動裝置190將攝影裝置109沿X方向上移動, 能在板片交換前後,在適合於每對象物體110,210尺寸的位置處拍攝對象物體110,210。且,在板片交換前後,不需要為了符合對象物體110,210尺寸而交換攝影裝置109,故可共用攝影裝置109。 Further, by moving the photographing device 109 in the X direction by the third moving device 190, The object objects 110, 210 can be photographed at positions suitable for the size of each object 110, 210 before and after the exchange of the sheets. Further, before and after the sheet exchange, it is not necessary to exchange the photographing device 109 in order to conform to the size of the target object 110, 210, so that the photographing device 109 can be shared.

如以上說明,根據本實施形態之雷射光照射裝置100,即便對象物體110尺寸改變,也能明亮地照亮對象物體110,可抑制生產率低落。 As described above, according to the laser light irradiation apparatus 100 of the present embodiment, even if the size of the target object 110 is changed, the target object 110 can be brightly illuminated, and productivity can be suppressed from being lowered.

又,即便對象物體110尺寸改變,也能在適當位置處拍攝對象物體110,可抑制生產率低落。 Further, even if the size of the target object 110 is changed, the target object 110 can be photographed at an appropriate position, and productivity can be suppressed from being lowered.

又,當雷射光振盪器102振盪出雷射光時,以第一移動裝置104使照明裝置103退出至不會與開口部113相重疊的位置處。因此,可抑制雷射光照射至照明裝置103。因此,可避免因雷射光之照射所造成的照明裝置103損傷。 Further, when the laser oscillator 102 oscillates the laser light, the first moving device 104 causes the illuminating device 103 to exit to a position where it does not overlap the opening portion 113. Therefore, it is possible to suppress the irradiation of the laser light to the illumination device 103. Therefore, damage to the illumination device 103 caused by the irradiation of the laser light can be avoided.

又,照明裝置103係位在與第一保持面101s1及第二保持面101s2之鄰接延伸方向(Y方向)上,以第一移動裝置104使照明裝置103沿X方向上移動。因此,能於廣範圍內以良好效率照亮各自保持於第一保持面101s1及第二保持面101s2之對象物體110。因此,即便各自保持於第一保持面101s1及第二保持面101s2之對象物體110的尺寸改變,也能輕易地照亮對象物體110。 Further, the illumination device 103 is positioned in the adjacent extending direction (Y direction) of the first holding surface 101s1 and the second holding surface 101s2, and the first moving device 104 moves the illumination device 103 in the X direction. Therefore, the object objects 110 each held by the first holding surface 101s1 and the second holding surface 101s2 can be illuminated with good efficiency over a wide range. Therefore, even if the size of the object 110 held by each of the first holding surface 101s1 and the second holding surface 101s2 is changed, the object 110 can be easily illuminated.

又,照明裝置103具有沿X方向上相互並排配置之第一照明裝置131與第二照明裝置135。因此,能於廣範圍內以良好效率照亮保持於保持面101s之對象物體110。因此,即便保持於保持面101s之對象物體110的尺寸改變,也能輕易地照亮對象物體110。 Further, the illuminating device 103 has a first illuminating device 131 and a second illuminating device 135 which are arranged side by side in the X direction. Therefore, the object object 110 held by the holding surface 101s can be illuminated with good efficiency over a wide range. Therefore, even if the size of the object 110 held on the holding surface 101s is changed, the object 110 can be easily illuminated.

又,聚光透鏡108係配置於掃瞄器105與台座101之間的光學路徑上。因此,可使經由掃瞄器105之雷射光平行地聚光在對象物體110處。因此,能以良好精度切斷對象物體110。 Further, the condensing lens 108 is disposed on the optical path between the scanner 105 and the pedestal 101. Therefore, the laser light passing through the scanner 105 can be concentrated in parallel at the object object 110. Therefore, the target object 110 can be cut with good precision.

又,本實施形態之雷射光照射裝置100中,主要透過第二移動 裝置106來進行雷射光之掃瞄,並以掃瞄器105來調整第二移動裝置106所無法良好控制精度之雷射光照射位置的區域。因此,與只以第二移動裝置106或只以掃瞄器105中其中一者進行雷射光掃瞄的情況相比,能於廣範圍內以良好精度控制雷射光照射位置。 Further, in the laser beam irradiation apparatus 100 of the present embodiment, the second movement is mainly transmitted. The device 106 performs scanning of the laser light, and the scanner 105 adjusts the region of the laser light irradiation position at which the second mobile device 106 cannot control the accuracy. Therefore, the laser light irradiation position can be controlled with good precision over a wide range as compared with the case where the laser scanning is performed only by one of the second moving device 106 or only the scanner 105.

不過,本實施形態中,雖以包含有台座101、雷射光振盪器102、掃瞄器105、照明裝置103、攝影裝置109、第一移動裝置104、第二移動裝置106以及第三移動裝置190的雷射光照射裝置100作為一例來進行說明,但不限定於此。例如,雷射光照射裝置亦可為不包含有攝影裝置109與第三移動裝置190的結構,即,亦可為包含有台座101、雷射光振盪器102、掃瞄器105、照明裝置103、第一移動裝置104以及第二移動裝置106的結構。 However, in the present embodiment, the pedestal 101, the laser oscillator 102, the scanner 105, the illumination device 103, the imaging device 109, the first mobile device 104, the second mobile device 106, and the third mobile device 190 are included. The laser light irradiation device 100 will be described as an example, but is not limited thereto. For example, the laser light irradiation device may not include the imaging device 109 and the third mobile device 190, that is, the pedestal 101, the laser oscillator 102, the scanner 105, the illumination device 103, and the The structure of a mobile device 104 and a second mobile device 106.

又,本實施形態中,雖以雷射光照射裝置為例來說明,但不限定於此。例如,對於包含有保持對象物體之台座、照亮對象物體之照明裝置、拍攝對象物體之攝影裝置、使台座與照明裝置進行相對移動之第一移動裝置、以及使台座與攝影裝置進行相對移動之第二移動裝置的檢測裝置之情況,亦可適用於本發明。 Further, in the present embodiment, the laser light irradiation device is described as an example, but the invention is not limited thereto. For example, the pedestal including the pedestal holding the object to be held, the illuminating device that illuminates the object, the imaging device that photographs the object, the first moving device that relatively moves the pedestal and the illuminating device, and the relative movement of the pedestal and the photographic device The case of the detecting device of the second mobile device can also be applied to the present invention.

又,檢測裝置亦可為不包含有攝影裝置與第二移動裝置的結構,即,亦可為包含有台座、照明裝置以及第一移動裝置的結構。 Further, the detecting device may be configured not to include the photographing device and the second moving device, that is, a configuration including the pedestal, the illuminating device, and the first moving device.

(台座之第一變形例) (The first variant of the pedestal)

第10圖係顯示本實施形態之台座之第一變形例的平面圖。 Fig. 10 is a plan view showing a first modification of the pedestal according to the embodiment.

於前述實施形態中,如第4圖所示,係以台座101具有能吸附保持二個對象物體110的板片112為例來說明。對此,如第10圖所示,本變形例之台座301具有吸附保持一個對象物體310(第三對象物體)的板片312。本變形例之對象物體310的尺寸係較前述實施形態之對象物體110的尺寸更大。 In the above-described embodiment, as shown in FIG. 4, the pedestal 101 has a plate piece 112 capable of adsorbing and holding the two target objects 110 as an example. On the other hand, as shown in Fig. 10, the pedestal 301 of the present modification has a plate piece 312 that sucks and holds one object object 310 (third object object). The size of the target object 310 of the present modification is larger than the size of the target object 110 of the above embodiment.

於保持對象物體310之板片312處,沿吸附面312s之外周緣, 形成有矩形框狀之導引溝槽317。於板片312處,形成有第一開口部313a、第二開口部313b、第三開口部313c及第四開口部313d。各開口部(第一開口部313a~第四開口部313d)之尺寸及配置位置係適於對象物體310之尺寸。 At the periphery of the adsorption surface 312s at the sheet 312 of the object object 310, A guide groove 317 having a rectangular frame shape is formed. The first opening 313a, the second opening 313b, the third opening 313c, and the fourth opening 313d are formed in the plate 312. The size and arrangement position of each of the openings (the first opening portion 313a to the third opening portion 313d) is adapted to the size of the object object 310.

關於本變形例之台座301,即便對象物體310尺寸改變,也能照亮對象物體310,並可抑制生產率低落。 With respect to the pedestal 301 of the present modification, even if the size of the target object 310 is changed, the target object 310 can be illuminated, and productivity can be suppressed from being lowered.

(光學組件貼合體之製造裝置) (Manufacturer of optical component bonding body)

以下,參考圖式並說明本發明一實施形態中光學組件貼合體之製造裝置的薄膜貼合系統1。本實施形態之薄膜貼合系統1中係由上述雷射光照射裝置100來構成切斷裝置。 Hereinafter, a film bonding system 1 for manufacturing an optical component bonding body according to an embodiment of the present invention will be described with reference to the drawings. In the film bonding system 1 of the present embodiment, the laser light irradiation device 100 constitutes a cutting device.

第11圖係顯示本實施形態之薄膜貼合系統1的概略結構之示意圖。 Fig. 11 is a schematic view showing a schematic configuration of a film bonding system 1 of the present embodiment.

薄膜貼合系統1係例如將偏光薄膜或抗反射薄膜、光擴散薄膜等薄膜狀光學組件貼合至液晶面板或有機電致發光(OEL,organic electro-luminescence)面板等面板狀光學顯示部件。 In the film bonding system 1 , for example, a film-shaped optical component such as a polarizing film, an antireflection film, or a light diffusing film is bonded to a panel-shaped optical display member such as a liquid crystal panel or an organic electroluminescence (OEL) panel.

以下說明中,係依據需求並設定XYZ正交座標系,參考該XYZ正交座標系並說明各組件之位置關係。於本實施形態中,X方向係光學顯示部件的液晶面板之搬送方向,Y方向係液晶面板面內與X方向正交之方向(液晶面板之寬度方向),Z方向則為與X方向與Y方向正交之方向。 In the following description, the XYZ orthogonal coordinate system is set according to requirements, and the positional relationship of each component is described with reference to the XYZ orthogonal coordinate system. In the present embodiment, the X direction is the transport direction of the liquid crystal panel of the optical display member, and the Y direction is the direction orthogonal to the X direction in the plane of the liquid crystal panel (the width direction of the liquid crystal panel), and the Z direction is the X direction and the Y direction. The direction of the direction is orthogonal.

如第11圖所示,係設置有本實施形態之薄膜貼合系統1,以作為液晶面板P之製造生產線的一製程。薄膜貼合系統1之各部位係透過電子控制裝置的控制部40進行整體控制。 As shown in Fig. 11, the film bonding system 1 of the present embodiment is provided as a process for manufacturing a production line of the liquid crystal panel P. Each part of the film bonding system 1 is integrally controlled by the control unit 40 of the electronic control unit.

第12圖係從液晶面板P之液晶層P3的厚度方向觀察液晶面板P的平面圖。液晶面板P具備有:第一基板P1,平面視圖呈長方形;第二基板P2,係對向第一基板P1而配置的較小長方形;以及液晶層P3,係封入第一基板P1 與第二基板P2之間。液晶面板P於平面視圖中沿第一基板P1外形呈長方形,平面視圖中位於液晶層P3外周之內側的區域為顯示區域P4。 Fig. 12 is a plan view of the liquid crystal panel P as viewed from the thickness direction of the liquid crystal layer P3 of the liquid crystal panel P. The liquid crystal panel P includes a first substrate P1 having a rectangular shape in plan view, a second substrate P2 having a small rectangular shape disposed opposite to the first substrate P1, and a liquid crystal layer P3 enclosing the first substrate P1. Between the second substrate P2 and the second substrate. The liquid crystal panel P has a rectangular shape along the outer shape of the first substrate P1 in plan view, and a region located inside the outer periphery of the liquid crystal layer P3 in plan view is the display region P4.

第13圖係第12圖中A-A線的剖面圖。於液晶面板P之正/反面,適當地貼合有從長條形之第一光學組件層F1及第二光學組件層F2(參考第11圖,以下總稱為光學組件層FX)各自切割出的第一光學組件F11及第二光學組件F12(以下,總稱為光學組件F1X)。本實施形態中,液晶面板P之背光側及顯示面側的雙面係各自貼合有作為偏光薄膜的第一光學組件F11及第二光學組件F12。 Figure 13 is a cross-sectional view taken along line A-A of Figure 12. On the front/rear side of the liquid crystal panel P, the first optical component layer F1 and the second optical component layer F2 (refer to FIG. 11 and hereinafter collectively referred to as the optical component layer FX) are respectively bonded to each other. The first optical component F11 and the second optical component F12 (hereinafter, collectively referred to as optical component F1X). In the present embodiment, the first optical unit F11 and the second optical unit F12 which are polarizing films are bonded to each other on both the backlight side and the display surface side of the liquid crystal panel P.

顯示區域P4之外側處設置有配置接合液晶面板P之第一及第二基板的密封劑等特定寬度之邊框部G。 A frame portion G having a specific width such as a sealant that bonds the first and second substrates of the liquid crystal panel P is disposed on the outer side of the display region P4.

另外,從後述之第一層片F1m及第二層片F2m(以下,總稱為層片FXm),藉由各自切斷其貼合面外側之剩餘部分,以形成第一光學組件F11及第二光學組件F12。關於貼合面係於後述。 Further, the first layer F1m and the second layer sheet F2m (hereinafter, collectively referred to as a layer sheet FXm) which will be described later are formed by cutting the remaining portions on the outer side of the bonding surface to form the first optical component F11 and the second. Optical component F12. The bonding surface is described later.

第14圖係貼合至液晶面板P之光學組件層FX的部分剖面圖。光學組件層FX係具有:薄膜狀光學組件本體F1a;設置於光學組件本體F1a之一側之面(第14圖的上側面)的黏著層F2a;隔著黏著層F2a而能分離地層積於光學組件本體F1a之一側之面的分離層片F3a;以及層積於光學組件本體F1a之另一側之面(第14圖的下側面)的表面保護薄膜F4a。光學組件本體F1a具有偏光板之功能,橫跨貼合於液晶面板P之顯示區域P4全區及其周邊區域。另外,為了圖式方便起見,省略第14圖中各層之剖面線。 Fig. 14 is a partial cross-sectional view of the optical component layer FX attached to the liquid crystal panel P. The optical component layer FX has a film-like optical module body F1a, an adhesive layer F2a provided on one side of the optical component body F1a (upper side of FIG. 14), and a layer detachable from the optical layer F2a. A separation sheet F3a on the one side of the module body F1a; and a surface protection film F4a laminated on the other side (the lower side of FIG. 14) of the optical unit body F1a. The optical module body F1a has a function of a polarizing plate across the entire area of the display area P4 of the liquid crystal panel P and its peripheral area. In addition, the hatching of each layer in Fig. 14 is omitted for the sake of convenience of the drawings.

光學組件本體F1a係於其一側之面保持有黏著層F2a且與分離層片F3a分離之狀態下,隔著黏著層F2a貼合至液晶面板P。以下,將從光學組件層FX去除分離層片F3a後的部分稱作貼合層片F5。 The optical module main body F1a is bonded to the liquid crystal panel P via the adhesive layer F2a while the adhesive layer F2a is held on one surface thereof and separated from the separation layer F3a. Hereinafter, a portion from which the separation layer sheet F3a is removed from the optical module layer FX is referred to as a bonding layer sheet F5.

從黏著層F2a處分離前之期間,分離層片F3a係可保護黏著層 F2a及光學組件本體F1a。表面保護薄膜F4a係與光學組件本體F1a一同貼合至液晶面板P。表面保護薄膜F4a係相對光學組件本體F1a而配置於液晶面板P之相反側,以保護光學組件本體F1a。表面保護薄膜F4a會在特定時點從光學組件本體F1a處分離。另外,光學組件層FX亦可為不包含表面保護薄膜F4a之結構,表面保護薄膜F4a亦可為無法從光學組件本體F1a處分離之結構。 The separation layer F3a protects the adhesive layer from the time of separation from the adhesive layer F2a. F2a and optical component body F1a. The surface protective film F4a is bonded to the liquid crystal panel P together with the optical module body F1a. The surface protective film F4a is disposed on the opposite side of the liquid crystal panel P with respect to the optical module body F1a to protect the optical module body F1a. The surface protective film F4a is separated from the optical module body F1a at a specific time point. Further, the optical component layer FX may be a structure that does not include the surface protective film F4a, and the surface protective film F4a may be a structure that cannot be separated from the optical component body F1a.

光學組件本體F1a具有:層片狀之偏光鏡F6;於偏光鏡F6之一側之面以接著劑等接合的第一薄膜F7;以及於偏光鏡F6之另一側之面以接著劑等接合的第二薄膜F8。第一薄膜F7及第二薄膜F8係為保護例如偏光鏡F6的保護薄膜。 The optical module body F1a has a sheet-like polarizing mirror F6, a first film F7 joined by an adhesive or the like on one side of the polarizing mirror F6, and a bonding agent or the like on the other side of the polarizing mirror F6. The second film F8. The first film F7 and the second film F8 are protective films that protect the polarizing mirror F6, for example.

另外,光學組件本體F1a可由一層之光學層所構成的單層構造,亦可為由複數個光學層相互層積的層積構造。除了偏光鏡F6之外,光學層亦可為相位差薄膜或輝度增加薄膜等。第一薄膜F7與第二薄膜F8中至少任一者亦可施以表面處理,以獲得包含保護液晶顯示單元最外層之硬塗層處理或防眩光處理之防眩等效果。光學組件本體F1a亦可不包含有第一薄膜F7與第二薄膜F8中至少任一者。例如省略第一薄膜F7之情況,亦可將分離層片F3a隔著黏著層F2a而貼合至光學組件本體F1a之一側之面。 Further, the optical module body F1a may have a single layer structure composed of one optical layer, or may be a laminated structure in which a plurality of optical layers are laminated to each other. In addition to the polarizer F6, the optical layer may be a retardation film or a luminance increasing film. At least one of the first film F7 and the second film F8 may be subjected to a surface treatment to obtain an anti-glare effect including a hard coat treatment or an anti-glare treatment for protecting the outermost layer of the liquid crystal display unit. The optical module body F1a may not include at least one of the first film F7 and the second film F8. For example, when the first film F7 is omitted, the separation layer sheet F3a may be bonded to the surface on one side of the optical module body F1a via the adhesive layer F2a.

其次,詳細說明本實施形態之薄膜貼合系統1。 Next, the film bonding system 1 of the present embodiment will be described in detail.

如第11圖所示,本實施形態之薄膜貼合系統1具備有從圖中右側的液晶面板P之搬送方向上游側(+X方向側)到圖中左側的液晶面板P之搬送方向下游側(-X方向側)為止,將液晶面板P以水平狀態進行搬送的驅動式滾筒輸送機5。 As shown in Fig. 11, the film bonding system 1 of the present embodiment includes the upstream side (+X direction side) of the liquid crystal panel P in the transport direction on the right side in the drawing, and the downstream side of the liquid crystal panel P in the transport direction on the left side in the drawing. The drive type roller conveyor 5 which conveys the liquid crystal panel P in the horizontal state until the (-X direction side).

滾筒輸送機5以後述之反轉裝置15為邊界,分為上游側輸送機6與下游側輸送機7。上游側輸送機6中,液晶面板P係沿顯示區域P4之短邊作為搬送方向來進行搬送。另一方面,下游側輸送機7中,液晶面板P係沿顯 示區域P4之長邊作為搬送方向來進行搬送。相對該液晶面板P之正/反面,將從條狀光學組件層FX切割出特定長度的貼合層片F5之層片FXm(相當於光學組件F1X)進行貼合。 The reversing device 15 described later on the roller conveyor 5 is divided into an upstream conveyor 6 and a downstream conveyor 7. In the upstream conveyor 6, the liquid crystal panel P is conveyed along the short side of the display area P4 as a conveyance direction. On the other hand, in the downstream side conveyor 7, the liquid crystal panel P is along the display The long side of the display area P4 is transported as a transport direction. The layer FXm (corresponding to the optical component F1X) of the bonding layer sheet F5 of a specific length cut out from the strip-shaped optical component layer FX is bonded to the front/rear surface of the liquid crystal panel P.

另外,於後述之第一吸附裝置11中,上游側輸送機6係具備有獨立於下游側的自由滾筒輸送機24。另一方面,於後述之第二吸附裝置20中,下游側輸送機7係具備有獨立於下游側的自由滾筒輸送機24。 Further, in the first adsorption device 11 to be described later, the upstream conveyor 6 is provided with a free roller conveyor 24 that is independent of the downstream side. On the other hand, in the second adsorption device 20 to be described later, the downstream conveyor 7 is provided with a free roller conveyor 24 that is independent of the downstream side.

本實施形態之薄膜貼合系統1,係具備:第一吸附裝置11、第一集塵裝置12、第一貼合裝置13、第一檢測裝置41、第一切斷裝置31、反轉裝置15、第二集塵裝置16,第二貼合裝置17,第二檢測裝置42,第二切斷裝置32及控制部40。 The film bonding system 1 of the present embodiment includes a first adsorption device 11, a first dust collecting device 12, a first bonding device 13, a first detecting device 41, a first cutting device 31, and a reversing device 15. The second dust collecting device 16, the second bonding device 17, the second detecting device 42, the second cutting device 32, and the control unit 40.

第一吸附裝置11係對液晶面板P進行吸附並搬送至上游側輸送機6,且進行液晶面板P之位置校準(決定位置)。第一吸附裝置11係具備:面板保持部11a、校準攝影機11b及軌道R。 The first adsorption device 11 adsorbs the liquid crystal panel P and transports it to the upstream conveyor 6, and performs position calibration (determination of position) of the liquid crystal panel P. The first adsorption device 11 includes a panel holding portion 11a, a calibration camera 11b, and a rail R.

面板保持部11a係可朝垂直方向及水平方向移動地,保持著藉由上游側輸送機6抵接至下游側之止動器S的液晶面板P,並進行液晶面板P之校準。面板保持部11a係藉由真空吸附對抵接於止動器S的液晶面板P上側面進行吸附保持。面板保持部11a係在液晶面板P吸附保持狀態下,在軌道R上移動並搬送液晶面板P。面板保持部11a於搬送完成時解除吸附保持並將液晶面板P傳遞至自由滾筒輸送機24。 The panel holding portion 11a is movable in the vertical direction and the horizontal direction, and holds the liquid crystal panel P of the stopper S on the downstream side by the upstream conveyor 6, and aligns the liquid crystal panel P. The panel holding portion 11a sucks and holds the upper surface of the liquid crystal panel P that is in contact with the stopper S by vacuum suction. The panel holding portion 11a moves on the rail R while the liquid crystal panel P is in the state of being sucked and held, and conveys the liquid crystal panel P. The panel holding portion 11a releases the suction holding when the conveyance is completed, and transmits the liquid crystal panel P to the free roller conveyor 24.

校準攝影機11b係當面板保持部11a保持著抵接至止動器S的液晶面板P而上升狀態下,拍攝液晶面板P之校準標記或前端形狀等。校準攝影機11b之攝影資料係傳送至控制部40,根據該攝影資料,使面板保持部11a作動,而對目的地之自由滾筒輸送機24進行液晶面板P之校準。換言之,液晶面板P係相對自由滾筒輸送機24,在調整了搬送方向上、搬送方向之正交方向 上,及繞液晶面板P垂直軸之旋轉方向上的偏差量之狀態下,搬送至自由滾筒輸送機24。 The calibration camera 11b captures a calibration mark or a front end shape of the liquid crystal panel P when the panel holding portion 11a is held in contact with the liquid crystal panel P of the stopper S. The photographic data of the calibration camera 11b is transmitted to the control unit 40, and the panel holding unit 11a is activated based on the photographic data, and the liquid crystal panel P is calibrated to the destination free roller conveyor 24. In other words, the liquid crystal panel P is opposed to the free roller conveyor 24, and the orthogonal direction of the conveyance direction and the conveyance direction are adjusted. The upper roller conveyer 24 is conveyed in a state in which the amount of deviation in the direction of rotation of the vertical axis of the liquid crystal panel P is rotated.

此處,由面板保持部11a而沿軌道R上搬送的液晶面板P係在被吸附於吸附盤26之狀態下,與層片FXm一同地使前端部夾持於夾壓滾筒23處。 Here, the liquid crystal panel P conveyed along the rail R by the panel holding portion 11a is attached to the nip roller 23 together with the layer FXm in a state of being adsorbed to the suction tray 26.

第一集塵裝置12係設置於第一貼合裝置13之貼合位置之夾壓滾筒23的液晶面板P之搬送上游側。第一集塵裝置12係進行靜電消除及集塵,以去除引導至貼合位置之前的液晶面板P周邊灰塵,尤其是液晶面板P下面側之灰塵。 The first dust collecting device 12 is disposed on the upstream side of the liquid crystal panel P of the nip roller 23 at the bonding position of the first bonding device 13. The first dust collecting device 12 performs static elimination and dust collection to remove dust around the liquid crystal panel P before being guided to the bonding position, in particular, dust on the lower side of the liquid crystal panel P.

第一貼合裝置13係設置於第一吸附裝置11的面板搬送下游側。第一貼合裝置13係相對引導至貼合位置之液晶面板P下側面,進行切斷成特定尺寸之貼合層片F5(相當於第一層片F1m)的貼合。 The first bonding apparatus 13 is provided on the downstream side of the panel conveyance of the first adsorption device 11. The first bonding apparatus 13 is bonded to the lower side surface of the liquid crystal panel P that is guided to the bonding position, and is bonded to the bonding layer sheet F5 (corresponding to the first layer sheet F1m) of a specific size.

第一貼合裝置13係具備:搬送裝置22與夾壓滾筒23。 The first bonding apparatus 13 includes a conveying device 22 and a nip roller 23 .

搬送裝置22係從捲繞有光學組件層FX之料捲滾筒R1將光學組件層FX捲出,並沿光學組件層FX之長邊方向搬送光學組件層FX。搬送裝置22係以分離層片F3a作為載體來搬送貼合層片F5。搬送裝置22具有:滾筒保持部22a、複數個導引滾筒22b、半切斷裝置22c、刀刃22d及捲取部22e。 The transport device 22 winds up the optical component layer FX from the roll drum R1 around which the optical component layer FX is wound, and conveys the optical component layer FX along the longitudinal direction of the optical component layer FX. The conveying device 22 conveys the bonding layer sheet F5 with the separation layer sheet F3a as a carrier. The conveying device 22 has a drum holding portion 22a, a plurality of guide rollers 22b, a half cutting device 22c, a blade 22d, and a winding portion 22e.

滾筒保持部22a係為保持捲繞有條狀光學組件層FX之料捲滾筒R1,並沿光學組件層FX之長邊方向捲出光學組件層FX。 The roller holding portion 22a holds the roll drum R1 around which the strip-shaped optical component layer FX is wound, and winds up the optical component layer FX in the longitudinal direction of the optical component layer FX.

複數個導引滾筒22b係沿特定搬送路線引導從料捲滾筒R1捲出之光學組件層FX,以捲繞光學組件層FX。 The plurality of guide rollers 22b guide the optical component layer FX unwound from the take-up reel R1 along a specific conveyance path to wind the optical component layer FX.

半切斷裝置22c對搬送路線上之光學組件層FX施以半切斷。 The half cutting device 22c applies a half cut to the optical component layer FX on the transport path.

刀刃22d使得施以半切斷後之光學組件層FX呈銳角地捲繞過,以使貼合層片F5從分離層片F3a處分離並將該貼合層片F5供給至貼合位置。 The blade 22d winds the half-cut optical component layer FX at an acute angle so that the bonding layer sheet F5 is separated from the separation layer sheet F3a and the bonding layer sheet F5 is supplied to the bonding position.

捲取部22e係為保持捲取通過刀刃22d後獨自存在之分離層片F3a的分離滾筒R2。又,分離滾筒R2係捲曲通過刀刃22d後獨自存在之分離層片F3a。 The take-up portion 22e is a separation roller R2 that holds the separation layer sheet F3a that is individually wound after being passed through the blade edge 22d. Further, the separation roller R2 is a separate separation sheet F3a which is individually formed after being passed through the blade 22d.

位於搬送裝置22起點之滾筒保持部22a與位於搬送裝置22終點之捲取部22e例如為相互同步驅動。藉此,滾筒保持部22a係朝光學組件層FX之搬送方向捲出光學組件層FX,且捲取部22e則捲取通過刀刃22d後的分離層片F3a。以下,於搬送裝置22中,光學組件層FX(分離層片F3a)之搬送方向上游側稱作層片搬送上游側,搬送方向下游側稱作層片搬送下游側。 The roller holding portion 22a located at the beginning of the conveying device 22 and the winding portion 22e located at the end of the conveying device 22 are driven in synchronization with each other, for example. Thereby, the roller holding portion 22a winds up the optical component layer FX in the conveyance direction of the optical component layer FX, and the winding portion 22e winds up the separation layer sheet F3a which passes through the blade edge 22d. In the conveyance device 22, the upstream side in the conveyance direction of the optical component layer FX (separation layer sheet F3a) is referred to as the layer conveyance upstream side, and the downstream side in the conveyance direction is referred to as the layer conveyance downstream side.

各導引滾筒22b係沿搬送路線改變搬送中光學組件層FX之行進方向,且複數個導引滾筒22b之至少一部分為可調整搬送中光學組件層FX之張力的結構。 Each of the guide rollers 22b changes the traveling direction of the optical component layer FX during transport along the transport path, and at least a part of the plurality of guide rollers 22b is configured to adjust the tension of the optical component layer FX during transport.

另外,在滾筒保持部22a與半切斷裝置22c之間處,可配置圖中未顯示之張力滾筒。張力滾筒可在以半切斷裝置22c對光學組件層FX進行加工期間,將滾筒保持部22a所搬送而來之光學組件層FX儲存在半切斷裝置22c前方。 Further, a tension roller (not shown) may be disposed between the roller holding portion 22a and the half cutting device 22c. The tension roller can store the optical component layer FX conveyed by the roller holding portion 22a in front of the half cutting device 22c while the optical module layer FX is being processed by the half cutting device 22c.

第15圖係顯示本實施形態之半切斷裝置22c動作的示意圖。 Fig. 15 is a schematic view showing the operation of the half cutting device 22c of the present embodiment.

如第15圖所示,半切斷裝置22c在捲出特定長度之光學組件層FX後,橫跨與光學組件層FX長邊方向正交之寬度方向上的整體寬度,進行將光學組件層FX厚度方向之一部分切斷的半切斷。本實施形態之半切斷裝置22c係從設置有光學組件層FX之分離層片F3a之面的相反側朝光學組件層FX移動,以進行光學組件層FX之半切斷。又,半切斷裝置22c可在進行半切斷後,朝遠離光學組件層FX之相反面的方向進行移動。 As shown in Fig. 15, the half-cutting device 22c performs the thickness of the optical component layer FX after the optical component layer FX of a specific length is wound up across the entire width in the width direction orthogonal to the longitudinal direction of the optical component layer FX. One half of the direction is cut off by a half cut. The half cutting device 22c of the present embodiment moves toward the optical component layer FX from the side opposite to the surface on which the separation layer sheet F3a of the optical component layer FX is provided, and performs half cutting of the optical component layer FX. Further, the half cutting device 22c can be moved in a direction away from the opposite surface of the optical component layer FX after the half cutting.

半切斷裝置22c係設定為藉由光學組件層FX搬送中的張力,而不使得光學組件層FX(分離層片F3a)破損斷裂(殘留有特定厚度之分離層片 F3a)。換言之,係設定為調整相對光學組件層FX之半切斷裝置22c之切斷刀片的前後位置,切入達到黏著層F2與分離層片F3a交界面附近位置為止。另外,亦可使用雷射裝置代替切斷刀片。 The half cutting device 22c is set to be tensioned by the optical component layer FX, without causing the optical component layer FX (separating layer F3a) to be broken and broken (the separation layer having a specific thickness remains) F3a). In other words, it is set to adjust the front-rear position of the cutting blade of the half-cutting device 22c of the opposite optical component layer FX, and cut into a position near the interface between the adhesive layer F2 and the separation layer F3a. Alternatively, a laser device can be used instead of cutting the blade.

於半切斷後之光學組件層FX中,依其厚度方向切斷光學組件本體F1a及表面保護薄膜F4a,以形成橫跨光學組件層FX之寬度方向上之整體寬度的切割線L1,L2。切割線L1,L2在條狀光學組件層FX之長邊方向上形成有複數條並排。例如在搬送相同尺寸之液晶面板P的貼合步驟情況下,複數個切割線L1,L2係於光學組件層FX之長邊方向上以等間隔地形成。光學組件層FX係藉由複數個切割線L1,L2,在長邊方向上劃分出複數個分區。於光學組件層FX之長邊方向上,由相鄰的一對切割線L1,L2所夾分區係各自為貼合層片F5中的一個層片FXm。層片FXm係設定為尺寸突出(超出)液晶面板P外側。換言之,層片FXm之外形較液晶面板P之外形更大。 In the half-cut optical component layer FX, the optical module body F1a and the surface protective film F4a are cut in the thickness direction to form cutting lines L1, L2 which span the entire width in the width direction of the optical component layer FX. The cutting lines L1, L2 are formed in a plurality of side by side in the longitudinal direction of the strip-shaped optical component layer FX. For example, in the case of a bonding step of transporting the liquid crystal panel P of the same size, a plurality of cutting lines L1, L2 are formed at equal intervals in the longitudinal direction of the optical component layer FX. The optical component layer FX divides a plurality of partitions in the longitudinal direction by a plurality of cutting lines L1, L2. In the longitudinal direction of the optical component layer FX, the partitions sandwiched by the adjacent pair of cutting lines L1, L2 are each one of the laminated layers F5. The layer FXm is set to protrude in size (beyond) outside the liquid crystal panel P. In other words, the shape of the layer FXm is larger than that of the liquid crystal panel P.

於第11圖中,刀刃22d係配置於上游側輸送機6下方,於光學組件層FX之寬度方向上至少延伸其整體寬度而形成。半切斷後之光學組件層FX的分離層片F3a側會呈滑動接觸地捲繞過刀刃22d。 In Fig. 11, the blade 22d is disposed below the upstream conveyor 6, and is formed to extend at least the entire width of the optical module layer FX in the width direction. The side of the separation layer sheet F3a of the optical component layer FX after the half cutting is wound in a sliding contact with the blade edge 22d.

刀刃22d具有:第一面,係配置成從光學組件層FX之寬度方向(上游側輸送機6之寬度方向)觀察呈面朝下的狀態;第二面,係在第一面上方從光學組件層FX之寬度方向觀察呈相對第一面夾銳角而配置;及前端部,位於第一面及第二面相交處。 The blade 22d has a first surface that is disposed to face downward from the width direction of the optical module layer FX (the width direction of the upstream conveyor 6); and a second surface that is above the first surface from the optical component The width direction of the layer FX is arranged at an acute angle with respect to the first surface; and the front end portion is located at the intersection of the first surface and the second surface.

於第一貼合裝置13中,刀刃22d係於其前端部使第一光學組件層F1呈銳角捲繞經過。第一光學組件層F1因刀刃22d之前端部而呈銳角折返時,使貼合層片F5之層片(第一層片F1m)從分離層片F3a處分離。刀刃22d之前端部係配置於接近夾壓滾筒23之面板搬送下游側。藉由刀刃22d而從分離層片F3a分離的第一層片F1m係重疊至吸附於第一吸附裝置11之狀態的液晶面 板P下側面,且被引導至夾壓滾筒23的一對貼合滾筒23a之間。第一層片F1m係具有突出液晶面板P外側的尺寸。換言之,第一層片F1m之外形較液晶面板P外形更大。 In the first bonding apparatus 13, the blade 22d is wound around the front end portion of the first optical component layer F1 at an acute angle. When the first optical component layer F1 is folded back at an acute angle due to the front end portion of the blade 22d, the layer sheet (the first layer sheet F1m) of the bonding layer sheet F5 is separated from the separation layer sheet F3a. The front end portion of the blade 22d is disposed on the downstream side of the panel conveyance close to the nip roller 23. The first layer sheet F1m separated from the separation layer sheet F3a by the blade edge 22d is superposed on the liquid crystal surface adsorbed to the first adsorption device 11 The lower side of the plate P is guided between the pair of bonding rolls 23a of the nip roller 23. The first layer sheet F1m has a size that protrudes outside the liquid crystal panel P. In other words, the outer shape of the first layer sheet F1m is larger than that of the liquid crystal panel P.

另一方面,藉由刀刃22d而與貼合層片F5分離之分離層片F3a係朝向捲取部22e。捲取部22e則捲取與貼合層片F5分離之分離層片F3a,進行回收。 On the other hand, the separation layer sheet F3a separated from the bonding layer sheet F5 by the blade edge 22d faces the winding portion 22e. The winding unit 22e winds up the separated layer sheet F3a separated from the bonding layer sheet F5 and collects it.

夾壓滾筒23使搬送裝置22將從第一光學組件層F1分離之第一層片F1m貼合至上游側輸送機6所搬送的液晶面板P下側面。 The nip roller 23 causes the conveying device 22 to bond the first layer sheet F1m separated from the first optical unit layer F1 to the lower side surface of the liquid crystal panel P conveyed by the upstream side conveyor 6.

夾壓滾筒23具有於軸線方向相互平行地配置的一對貼合滾筒23a(上方之貼合滾筒23a可上下移動)。一對貼合滾筒23a,23a之間形成有指定間隙,於該間隙內進行第一貼合裝置13之貼合處理。 The nip roller 23 has a pair of bonding rolls 23a which are arranged in parallel with each other in the axial direction (the upper bonding roll 23a can move up and down). A predetermined gap is formed between the pair of bonding rolls 23a and 23a, and the bonding process of the first bonding apparatus 13 is performed in the gap.

將液晶面板P及第一層片F1m重合導入間隙內。該等液晶面板P及第一層片F1m係於各貼合滾筒23a之間受夾壓,並送往上游側輸送機6之面板搬送下游側。本實施形態中,藉由夾壓滾筒23,便可將第一層片F1m貼合至液晶面板P之背光側之面,以形成第一光學組件貼合體PA1。 The liquid crystal panel P and the first layer sheet F1m are superposed and introduced into the gap. The liquid crystal panel P and the first layer sheet F1m are pinched between the respective bonding drums 23a, and are sent to the downstream side of the panel conveyance of the upstream conveyor 6. In the present embodiment, the first layer sheet F1m can be bonded to the surface on the backlight side of the liquid crystal panel P by the nip roller 23 to form the first optical component bonding body PA1.

第一檢測裝置41係設置於第一貼合裝置13的面板搬送下游側。第一檢測裝置41係檢測液晶面板P與第一層片F1m之貼合面(以下,稱為第一貼合面)的端緣。第一檢測裝置41所檢測的端緣資料係儲存於圖中未顯示之記憶部。 The first detecting device 41 is provided on the downstream side of the panel conveyance of the first bonding device 13. The first detecting device 41 detects the edge of the bonding surface of the liquid crystal panel P and the first layer sheet F1m (hereinafter referred to as the first bonding surface). The edge data detected by the first detecting device 41 is stored in a memory portion not shown in the drawing.

第一層片F1m之切斷位置係根據第一貼合面端緣之檢測結果來調整。控制部40(參考第11圖)係取得儲存於記憶部的第一貼合面之端緣資料,以決定第一層片F1m之切斷位置,使第一光學組件F11不會超出液晶面板P外側(第一貼合面外側)的大小。第一切斷裝置31(切斷裝置)係於控制部40所決定之切斷位置處將第一層片F1m切斷。 The cutting position of the first layer F1m is adjusted according to the detection result of the edge of the first bonding surface. The control unit 40 (refer to FIG. 11) obtains the edge data of the first bonding surface stored in the memory unit to determine the cutting position of the first layer F1m so that the first optical component F11 does not exceed the liquid crystal panel P. The size of the outer side (outside of the first bonding surface). The first cutting device 31 (cutting device) cuts the first layer sheet F1m at a cutting position determined by the control unit 40.

第一切斷裝置31係設置於第一檢測裝置41的面板搬送下游側。第一切斷裝置31係沿端緣進行雷射切斷,以將從第一光學組件貼合體PA1超出第一貼合面外側部分的第一層片F1m(第一層片F1m的剩餘部分)切斷,以形成對應於第一貼合面大小的光學組件(第一光學組件F11)。 The first cutting device 31 is provided on the downstream side of the panel conveyance of the first detecting device 41. The first cutting device 31 performs laser cutting along the end edge to extend the first ply F1m (the remaining portion of the first ply F1m) from the first optical component bonding body PA1 beyond the outer portion of the first bonding surface. The cutting is performed to form an optical component (first optical component F11) corresponding to the size of the first bonding surface.

此處,「對應於第一貼合面大小」係顯示第一基板P1外形之大小。但是,為較顯示區域P4大並較液晶面板P外形小的區域,且包含了電子部件安裝部等功能部分的區域。 Here, "corresponding to the size of the first bonding surface" indicates the size of the outer shape of the first substrate P1. However, it is a region that is larger than the display region P4 and smaller than the outer shape of the liquid crystal panel P, and includes a functional portion such as an electronic component mounting portion.

藉由第一切斷裝置31,從第一光學組件貼合體PA1將第一層片F1m之剩餘部分切斷,將第一光學組件F11貼合至液晶面板P之背光側之面而形成第二光學組件貼合體PA2。從第一層片F1m切斷之剩餘部分係透過圖式中省略之剝離裝置,從液晶面板P進行剝離回收。 By the first cutting device 31, the remaining portion of the first layer sheet F1m is cut from the first optical unit bonding body PA1, and the first optical unit F11 is bonded to the surface of the backlight side of the liquid crystal panel P to form a second portion. The optical component is bonded to the body PA2. The remaining portion cut from the first layer sheet F1m is peeled off from the liquid crystal panel P through a peeling device omitted in the drawings.

反轉裝置15係針對液晶面板P之顯示面側朝向上側面之第二光學組件貼合體PA2進行正/反面反轉,使液晶面板P之背光側朝向上側面,並對第二貼合裝置17進行液晶面板P之校準。 The inversion device 15 reverses the front/back surface of the second optical component bonding body PA2 facing the upper side on the display surface side of the liquid crystal panel P, and causes the backlight side of the liquid crystal panel P to face the upper side, and the second bonding device 17 Perform calibration of the liquid crystal panel P.

反轉裝置15具有與第一吸附裝置11之面板保持部11a相同的校準功能。反轉裝置15處設置有與第一吸附裝置11之校準攝影機11b相同的校準攝影機15c。 The inverting device 15 has the same calibration function as the panel holding portion 11a of the first adsorption device 11. The reversing device 15 is provided with the same calibration camera 15c as the calibration camera 11b of the first adsorption device 11.

反轉裝置15係根據儲存於控制部40的光軸方向檢查資料及校準攝影機15c的攝影資料,以決定相對第二貼合裝置17的第二光學組件貼合體PA2之部件寬度方向及迴轉方向上的位置。在該狀態中,第二光學組件貼合體PA2被引導至第二貼合裝置17之貼合位置。 The inverting device 15 determines the width direction and the direction of rotation of the second optical component bonding body PA2 of the second bonding device 17 based on the optical axis direction inspection data stored in the control unit 40 and the imaging data of the calibration camera 15c. s position. In this state, the second optical component bonding body PA2 is guided to the bonding position of the second bonding device 17.

由於第二吸附裝置20具備與第一吸附裝置11相同的結構,因此相同部分賦予相同元件符號加以說明。第二吸附裝置20係對第二光學組件貼合體PA2進行吸附並搬送至下游側輸送機7,且進行第二光學組件貼合體PA2 之校準(決定位置)。第二吸附裝置20係具備:面板保持部11a、校準攝影機11b及軌道R。 Since the second adsorption device 20 has the same configuration as that of the first adsorption device 11, the same components are denoted by the same reference numerals. The second adsorption device 20 adsorbs and transports the second optical component bonding body PA2 to the downstream side conveyor 7, and performs the second optical component bonding body PA2. Calibration (determination of position). The second adsorption device 20 includes a panel holding portion 11a, a calibration camera 11b, and a rail R.

面板保持部11a係可朝垂直方向及水平方向移動地,保持著藉由下游側輸送機7抵接至下游側之止動器S的第二光學組件貼合體PA2,並進行第二光學組件貼合體PA2之校準。面板保持部11a係藉由真空吸附對抵接於止動器S的第二光學組件貼合體PA2上側面進行吸附保持。面板保持部11a係在第二光學組件貼合體PA2吸附保持狀態下,在軌道R上移動並搬送第二光學組件貼合體PA2。面板保持部11a於該搬送完成時解除該吸附保持,並將第二光學組件貼合體PA2傳遞至自由滾筒輸送機24。 The panel holding portion 11a is movable in the vertical direction and the horizontal direction, and holds the second optical component bonding body PA2 that is in contact with the downstream side stopper S by the downstream conveyor 7, and performs the second optical component bonding. Calibration of the fitted PA2. The panel holding portion 11a sucks and holds the upper surface of the second optical component bonding body PA2 that abuts against the stopper S by vacuum suction. The panel holding portion 11a moves on the rail R while the second optical unit bonding body PA2 is being sucked and held, and conveys the second optical unit bonding body PA2. The panel holding portion 11a releases the suction holding when the conveyance is completed, and transmits the second optical component bonding body PA2 to the free roller conveyor 24.

校準攝影機11b係當面板保持部11a保持著抵接至止動器S的第二光學組件貼合體PA2而上升狀態下,拍攝第二光學組件貼合體PA2之校準標記或前端形狀等。校準攝影機11b之攝影資料係傳送至控制部40,根據該攝影資料,使面板保持部11a作動,而對目的地之自由滾筒輸送機24進行第二光學組件貼合體PA2之校準。換言之,第二光學組件貼合體PA2係相對自由滾筒輸送機24,在調整了搬送方向上、搬送方向之正交方向上,及繞第二光學組件貼合體PA2垂直軸之旋轉方向上的偏差量之狀態下,搬送至自由滾筒輸送機24。 The calibration camera 11b picks up a calibration mark or a front end shape of the second optical component bonding body PA2 when the panel holding portion 11a is held in contact with the second optical component bonding body PA2 that abuts against the stopper S. The photographic data of the calibration camera 11b is transmitted to the control unit 40, and the panel holding unit 11a is actuated based on the photographic data, and the second optical unit bonding body PA2 is calibrated to the destination free roller conveyor 24. In other words, the second optical component bonding body PA2 is opposed to the free roller conveyor 24 in the direction in which the conveying direction is adjusted, the direction in which the conveying direction is orthogonal, and the amount of deviation in the direction of rotation about the vertical axis of the second optical component bonding body PA2. In this state, it is conveyed to the free roller conveyor 24.

第二集塵裝置16係相對於第二貼合裝置17之貼合位置的夾壓滾筒23而設置於液晶面板P之搬送方向上游側。第二集塵裝置16係進行靜電消除及集塵,以去除引導至貼合位置之前的第二光學組件貼合體PA2周邊灰塵,尤其是下面側之灰塵。 The second dust collecting device 16 is provided on the upstream side in the conveying direction of the liquid crystal panel P with respect to the nip roller 23 at the bonding position of the second bonding device 17 . The second dust collecting device 16 performs static elimination and dust collection to remove dust around the second optical component bonding body PA2 before the bonding position, particularly the dust on the lower side.

第二貼合裝置17係設置於第二集塵裝置16的面板搬送下游側。第二貼合裝置17係相對引導至貼合位置之第二光學組件貼合體PA2下側面,進行切斷成特定尺寸之貼合層片F5(相當於第二層片F2m)的貼合。第二貼合裝置17係具備與第一貼合裝置13相同的搬送裝置22及夾壓滾筒23。 The second bonding apparatus 17 is provided on the downstream side of the panel conveyance of the second dust collecting device 16. The second bonding apparatus 17 is bonded to the lower side surface of the second optical component bonding body PA2 that is guided to the bonding position, and is bonded to the bonding layer sheet F5 (corresponding to the second layer sheet F2m) of a specific size. The second bonding apparatus 17 includes the same conveying device 22 and the nip roller 23 as the first bonding device 13 .

將第二光學組件貼合體PA2及第二層片F2m重合導入夾壓滾筒23之一對貼合滾筒23a之間隙內(第二貼合裝置17之貼合位置)。第二層片F2m係為較液晶面板P之顯示區域P4更大尺寸的第二光學組件層F2之層片。 The second optical component bonding body PA2 and the second layer sheet F2m are superposed and introduced into the gap between one of the nip rollers 23 and the bonding roller 23a (the bonding position of the second bonding device 17). The second layer F2m is a layer of the second optical component layer F2 having a larger size than the display region P4 of the liquid crystal panel P.

該等第二光學組件貼合體PA2及第二層片F2m係於各貼合滾筒23a之間受夾壓,並送往下游側輸送機7之面板搬送下游側。本實施形態中,藉由夾壓滾筒23,便可將第二層片F2m貼合至液晶面板P之顯示面側之面(貼合有第二光學組件貼合體PA2之第一光學組件F11之面的相反側之面),以形成第三光學組件貼合體PA3。 The second optical component bonding body PA2 and the second layer sheet F2m are pinched between the bonding rollers 23a, and are sent to the downstream side of the panel conveyance of the downstream conveyor 7. In the present embodiment, the second layer sheet F2m can be bonded to the surface on the display surface side of the liquid crystal panel P by the nip roller 23 (the first optical component F11 to which the second optical component bonding body PA2 is bonded) The opposite side of the face) to form the third optical component bonding body PA3.

第二檢測裝置42係設置於第二貼合裝置17的面板搬送下游側。第二檢測裝置42係檢測液晶面板P與第二層片F2m之貼合面(以下,稱為第二貼合面)的端緣。第二檢測裝置42所檢測的端緣資料係儲存於圖中未顯示之記憶部。 The second detecting device 42 is provided on the downstream side of the panel conveyance of the second bonding device 17. The second detecting device 42 detects the edge of the bonding surface of the liquid crystal panel P and the second layer sheet F2m (hereinafter referred to as a second bonding surface). The edge data detected by the second detecting device 42 is stored in a memory portion not shown in the drawing.

第二層片F2m之切斷位置係根據第二貼合面端緣之檢測結果來調整。控制部40(參考第11圖)係取得儲存於記憶部的第二貼合面端緣之資料,以決定第二層片F2m之切斷位置,使第二光學組件F12不會超出液晶面板P外側(第二貼合面外側)的大小。第二切斷裝置32係於控制部40所決定之切斷位置將第二層片F2m切斷。 The cutting position of the second layer F2m is adjusted according to the detection result of the edge of the second bonding surface. The control unit 40 (refer to FIG. 11) acquires the data of the edge of the second bonding surface stored in the memory unit to determine the cutting position of the second layer F2m so that the second optical component F12 does not exceed the liquid crystal panel P. The size of the outer side (outside of the second bonding surface). The second cutting device 32 cuts the second layer sheet F2m at the cutting position determined by the control unit 40.

第二切斷裝置32係設置於第二檢測裝置42的面板搬送下游側。第二切斷裝置32係沿第二貼合面端緣進行雷射切斷。藉此,將從第三光學組件貼合體PA3超出第二貼合面外側部分的第二層片F2m切斷,以形成對應於第二貼合面大小的光學組件(第二光學組件F12)。從第二層片F2m切斷後之剩餘部分係藉由圖式中省略之剝離裝置從液晶面板P剝離並進行回收。 The second cutting device 32 is provided on the downstream side of the panel conveyance of the second detecting device 42. The second cutting device 32 performs laser cutting along the edge of the second bonding surface. Thereby, the second ply F2m of the third optical component pasting body PA3 beyond the outer side of the second bonding face is cut to form an optical component (second optical component F12) corresponding to the size of the second bonding face. The remaining portion cut from the second layer sheet F2m is peeled off from the liquid crystal panel P by the peeling device omitted in the drawing and recovered.

藉由第二切斷裝置32,從第三光學組件貼合體PA3將第二層片F2m之剩餘部分切斷,以形成第四光學組件貼合體PA4(光學組件貼合體)。第 四光學組件貼合體PA4具有:貼合至液晶面板P之顯示面側之面的第二光學組件F12;以及貼合至液晶面板P之背光側之面的第一光學組件F11。 The remaining portion of the second ply F2m is cut from the third optical component bonding body PA3 by the second cutting device 32 to form the fourth optical component bonding body PA4 (optical component bonding body). First The four optical component bonding body PA4 has a second optical component F12 that is bonded to the surface on the display surface side of the liquid crystal panel P, and a first optical component F11 that is bonded to the backlight side of the liquid crystal panel P.

此處,第一切斷裝置31及第二切斷裝置32係由上述雷射光照射裝置100所構成。第一切斷裝置31及第二切斷裝置32係沿貼合面之外周緣不間斷地切斷貼合至液晶面板P的層片FXm。 Here, the first cutting device 31 and the second cutting device 32 are constituted by the above-described laser light irradiation device 100. The first cutting device 31 and the second cutting device 32 cut the layer sheet FXm bonded to the liquid crystal panel P without interruption along the outer periphery of the bonding surface.

於第二貼合裝置17的面板搬送下游側處,設置有圖式中省略的貼合檢查裝置。貼合檢查裝置係對貼合有薄膜之加工件(液晶面板P)以圖式中省略之檢查裝置進行檢查,例如,判斷光學組件F1X之位置是否適當(位置偏差是否在公差範圍內)等檢查)。相對液晶面板P之光學組件F1X的位置被判斷為不正確的加工件,便透過圖中未顯示之排除部而送出系統外。 A bonding inspection device omitted in the drawings is provided on the downstream side of the panel conveyance of the second bonding apparatus 17. The bonding inspection device inspects the workpiece to which the film is bonded (the liquid crystal panel P) with an inspection device omitted in the drawing, for example, determines whether the position of the optical component F1X is appropriate (whether the positional deviation is within the tolerance range), etc. ). When the position of the optical module F1X of the liquid crystal panel P is judged to be an incorrect workpiece, it is sent out of the system through the exclusion portion not shown in the drawing.

另外,於本實施形態中,作為對薄膜貼合系統1之各部位進行整體控制的電子控制裝置之控制部40係包含於電腦系統。該電腦系統具備中央處理單元(CPU,central processing unit)等運算處理部、與記憶體或硬碟等記憶部。 Further, in the present embodiment, the control unit 40 as an electronic control unit that integrally controls each part of the film bonding system 1 is included in a computer system. The computer system includes an arithmetic processing unit such as a central processing unit (CPU) and a memory unit such as a memory or a hard disk.

本實施形態之控制部40係包含可與電腦系統外部裝置進行通訊的介面。於控制部40處,可連接有能輸入輸入訊號的輸入裝置。上述之輸入裝置係包含:鍵盤、滑鼠等輸入機器,或者可從電腦系統外部裝置輸入資料之通訊裝置等。控制部40亦可包含顯示薄膜貼合系統1之各部位動作狀況的液晶顯示器等顯示裝置,亦可與顯示裝置相連接。 The control unit 40 of the present embodiment includes an interface that can communicate with an external device of the computer system. An input device capable of inputting an input signal can be connected to the control unit 40. The above input device includes an input device such as a keyboard or a mouse, or a communication device that can input data from an external device of the computer system. The control unit 40 may include a display device such as a liquid crystal display that displays the operation state of each part of the film bonding system 1, and may be connected to the display device.

控制部40之記憶部處安裝有控制電腦系統的操作系統(OS,operating system)。於控制部40之記憶部處,透過於運算處理部控制薄膜貼合系統1之各部位,儲存有執行將光學組件層FX精確地搬送至薄膜貼合系統1之各部位用之處理的程式。包含儲存於記憶部之程式的各種資訊可由控制部40之運算處理部進行讀取。控制部40亦可包含執行薄膜貼合系統1之各部位控制所 需之各種處理的特定應用積體電路(ASIC,application specific integrated circuit)等邏輯迴路。 An operating system (OS, operating system) that controls the computer system is installed in the memory unit of the control unit 40. At the memory unit of the control unit 40, the arithmetic processing unit controls each part of the film bonding system 1 to store a program for executing the process of accurately transporting the optical unit layer FX to each part of the film bonding system 1. Various pieces of information including a program stored in the memory unit can be read by the arithmetic processing unit of the control unit 40. The control unit 40 may also include a control unit for executing each part of the film bonding system 1. A logic circuit such as an application specific integrated circuit (ASIC) that requires various processes.

記憶部係包含:隨機存取記憶體(RAM,random access memory)、唯讀記憶體(ROM,read only memory)等半導體記憶體,或硬碟、光碟唯讀記憶體(CD-ROM)讀取裝置、圓盤型記憶媒體等外部儲存裝置等的概念。就功能性而言,記憶部設定有:儲存可寫入有第一吸附裝置11、第一集塵裝置12、第一貼合裝置13、第一檢測裝置41、第一切斷裝置31、反轉裝置15、第二吸附裝置20、第二集塵裝置16、第二貼合裝置17、第二檢測裝置42動作之控制順序之程式軟體的記憶區域;及其它各種記憶區域。 The memory system includes: semiconductor memory such as random access memory (RAM), read only memory (ROM), or hard disk, CD-ROM read (CD-ROM) The concept of an external storage device such as a device or a disk type memory medium. In terms of functionality, the memory unit is configured to: store the first adsorption device 11, the first dust collection device 12, the first bonding device 13, the first detection device 41, the first cutting device 31, and the reverse The memory area of the program software of the control sequence of the operation of the rotating device 15, the second adsorption device 20, the second dust collecting device 16, the second bonding device 17, and the second detecting device 42; and other various memory regions.

以下,參考第16A圖及第16B圖,說明相對液晶面板P之層片FXm的貼合位置(相對貼合位置)決定方法之一例。 Hereinafter, an example of a method of determining the bonding position (relative bonding position) of the layer sheet FXm of the liquid crystal panel P will be described with reference to FIGS. 16A and 16B.

首先,如第16A圖所示,於光學組件層FX之寬度方向上設定有複數個檢查點CP,於各檢查點CP處檢測光學組件層FX之光軸方向。檢測光軸的時點可為料捲滾筒R1製造時,亦可為從料捲滾筒R1捲出光學組件層FX進行半切斷前之期間。光學組件層FX之光軸方向的資料係與光學組件層FX位置(光學組件層FX之長邊方向位置及寬度方向位置)資料連結地儲存於圖式中省略之記憶裝置。 First, as shown in FIG. 16A, a plurality of checkpoints CP are set in the width direction of the optical component layer FX, and the optical axis direction of the optical component layer FX is detected at each checkpoint CP. The time at which the optical axis is detected may be the time when the roll drum R1 is manufactured, or may be the period before the half of the optical unit layer FX is unwound from the roll drum R1. The data in the optical axis direction of the optical component layer FX and the position of the optical component layer FX (the position in the longitudinal direction and the width direction of the optical component layer FX) are stored in association with the memory device omitted in the drawing.

控制部40係從記憶裝置取得各檢查點CP之光軸資料(光軸面內分佈之檢查資料),以檢測切割出層片FXm之部分的光學組件層FX(以橫切線CL所劃分之區域)之平均光軸方向。 The control unit 40 acquires the optical axis data (inspection data distributed in the in-plane of the optical axis) of each of the inspection points CP from the memory device to detect the optical component layer FX (the region divided by the transverse line CL) that cuts out the portion of the layer FXm. The average optical axis direction.

例如,如第16B圖所示,每次於檢查點CP檢測光軸方向與光學組件層FX之邊緣線EL所夾角度(偏移角),以偏移角中最大角度(最大偏移角)作為θmax,最小角度(最小偏移角)作為θmin時,檢測最大偏移角θmax與最小偏移角θmin的平均值θmid(=(θmax+θmin)/2)作為平均偏移角。 且,檢測相對光學組件層FX之邊緣線EL的平均偏移角θmid方向作為光學組件層FX之平均光軸方向。另外,偏移角係例如以相對光學組件層FX之邊緣線EL,逆時針方向為正角度,順時針方向為負角度而加以算出。 For example, as shown in FIG. 16B, the angle (offset angle) between the optical axis direction and the edge line EL of the optical component layer FX is detected at the checkpoint CP each time to offset the maximum angle (maximum offset angle). As θmax, when the minimum angle (minimum offset angle) is θmin, the average value θmid (=(θmax+θmin)/2) of the maximum offset angle θmax and the minimum offset angle θmin is detected as the average offset angle. Further, the average offset angle θmid direction of the edge line EL of the optical component layer FX is detected as the average optical axis direction of the optical component layer FX. Further, the offset angle is calculated, for example, by the edge line EL of the optical component layer FX, the counterclockwise direction being a positive angle, and the clockwise direction being a negative angle.

且,依上述方法所檢測之光學組件層FX的平均光軸方向係相對液晶面板P之顯示區域P4的長邊或短邊呈期望角度地,決定相對液晶面板P之層片FXm的貼合位置(相對貼合位置)。例如,根據設計規格將光學組件F1X之光軸方向設定為相對顯示區域P4的長邊或短邊呈90°之方向的情況中,光學組件層FX之平均光軸方向係相對顯示區域P4的長邊或短邊呈90°地,將層片FXm貼合液晶面板P。 Moreover, the average optical axis direction of the optical component layer FX detected by the above method is at a desired angle with respect to the long side or the short side of the display region P4 of the liquid crystal panel P, and the bonding position of the layer FXm with respect to the liquid crystal panel P is determined. (relatively fitting position). For example, in the case where the optical axis direction of the optical component F1X is set to be 90° with respect to the long side or the short side of the display region P4 according to the design specification, the average optical axis direction of the optical component layer FX is longer than the display region P4. The layer FXm is bonded to the liquid crystal panel P with the side or the short side at 90°.

前述之切斷裝置(第一切斷裝置31、第二切斷裝置32)係以攝影機等檢測機構檢測液晶面板P之顯示區域P4外周緣,沿貼合面外周緣不間斷地切斷貼合至液晶面板P之層片FXm。透過拍攝貼合面之端緣,以檢測貼合面外周緣。 The cutting device (the first cutting device 31 and the second cutting device 32) detects the outer peripheral edge of the display region P4 of the liquid crystal panel P by a detecting means such as a camera, and cuts the bonding continuously along the outer peripheral edge of the bonding surface. To the layer FXm of the liquid crystal panel P. The outer edge of the bonding surface is detected by photographing the edge of the bonding surface.

本實施形態中,係沿貼合面外周緣以各切斷裝置(第一切斷裝置31、第二切斷裝置32)進行雷射切斷。 In the present embodiment, the laser cutting is performed by each of the cutting devices (the first cutting device 31 and the second cutting device 32) along the outer periphery of the bonding surface.

雷射加工機之切斷線的振動幅度(公差)較切斷刀片的振動幅度(公差)更小。因此,於本實施形態中,與使用切斷刀片切斷光學組件層FX的情況相比,可更容易沿貼合面外周緣進行切斷,可達成液晶面板P之小型化及(或)顯示區域P4之大型化。這可有效地適用於近年來之智慧型手機或平板型終端機等,需要在機殼尺寸之限制下將顯示畫面放大的高機能行動裝置。 The vibration amplitude (tolerance) of the cutting line of the laser processing machine is smaller than the vibration amplitude (tolerance) of the cutting blade. Therefore, in the present embodiment, it is easier to cut along the outer periphery of the bonding surface than in the case where the optical module layer FX is cut by the cutting blade, and the liquid crystal panel P can be downsized and/or displayed. The size of the area P4 is large. This can be effectively applied to a high-performance mobile device that requires a display screen to be enlarged under the limitation of the size of the casing, such as a smart phone or a tablet terminal in recent years.

又,對將光學組件層FX整合至液晶面板P之顯示區域P4的層片進行切斷後,再貼合至液晶面板P的情況中,層片及液晶面板P各自的尺寸公差、以及該等之相對貼合位置的尺寸公差會疊加。因此,使得液晶面板P之邊框部G的寬度難以變窄(使得顯示區域難以擴大)。 Moreover, in the case where the layer on which the optical component layer FX is integrated in the display region P4 of the liquid crystal panel P is cut and then bonded to the liquid crystal panel P, the dimensional tolerances of the layer and the liquid crystal panel P, and the like The dimensional tolerances of the relative fit positions are superimposed. Therefore, it is difficult to narrow the width of the frame portion G of the liquid crystal panel P (so that the display region is difficult to expand).

另一方面,從光學組件層FX切割出尺寸超出液晶面板P外側(外形較液晶面板P之外形更大)的層片FXm,將該切割出之層片FXm貼合至液晶面板P之後,依據貼合面進行切割的情況中,僅須考慮切斷線之振動公差。因此,可縮小邊框部G之寬度的公差(±0.1mm以下)。此點亦可使得液晶面板P之邊框部G的寬度變窄(可使得顯示區域擴大)。 On the other hand, the layer FXm whose size exceeds the outer side of the liquid crystal panel P (the outer shape is larger than the liquid crystal panel P) is cut out from the optical component layer FX, and the cut layer FXm is attached to the liquid crystal panel P, In the case where the bonding surface is cut, only the vibration tolerance of the cutting line must be considered. Therefore, the tolerance (±0.1 mm or less) of the width of the frame portion G can be reduced. This also makes it possible to narrow the width of the frame portion G of the liquid crystal panel P (which can enlarge the display area).

且,以非利刃之雷射來切斷層片FXm,故於切斷時不會對液晶面板P施加應力,使得液晶面板P之基板端緣處難以產生裂痕或破裂。因此,可提高光學組件貼合體對於熱循環等的耐久性。同樣地,與液晶面板P為非接觸加工,故對電子部件安裝部P5之損傷亦較小。 Further, since the layer sheet FXm is cut by a laser of a non-profit blade, stress is not applied to the liquid crystal panel P at the time of cutting, so that cracks or cracks are less likely to occur at the edge of the substrate of the liquid crystal panel P. Therefore, the durability of the optical component bonding body to thermal cycling or the like can be improved. Similarly, since the liquid crystal panel P is non-contact-processed, damage to the electronic component mounting portion P5 is also small.

第17圖係顯示使用第1圖所示之雷射光照射裝置100作為切斷裝置對層片FXm切斷成特定尺寸之光學組件F1X時,在層片FXm上以雷射光進行矩形掃瞄用之控制方法的示意圖。 Fig. 17 is a view showing a rectangular scanning using laser light on the layer FXm when the laser light emitting device 100 shown in Fig. 1 is used as the cutting device to cut the layer FXm into a specific size optical module F1X. Schematic diagram of the control method.

另外,於第17圖中,符號Tr係表示雷射光之移動軌跡(特定軌跡。以下,稱為雷射光移動軌跡)。符號Tr1為台座101與掃瞄器105進行相對移動時之移動軌跡投影於層片FXm處的軌跡(以下,稱為光源移動軌跡)。光源移動軌跡Tr1為使得具矩形外形之雷射光移動軌跡Tr的四個角部呈彎曲的外形。又,符號SA1係雷射光移動軌跡Tr之角部以外之直線區間,符號SA2係雷射光移動軌跡Tr之角部之彎曲區間。符號Tr2係顯示掃瞄器105於光源移動軌跡Tr1上相對移動時,藉由第一照射位置調整裝置151及第二照射位置調整裝置154使雷射光照射位置於光源移動軌跡Tr1之正交方向的偏移程度(是否已經過調整)曲線(以下,稱為調整曲線)。雷射照射位置之偏差量(調整量)表示為光源移動軌跡Tr1之正交方向的調整曲線Tr2與雷射光移動軌跡Tr之間的距離。 Further, in Fig. 17, the symbol Tr indicates the movement trajectory of the laser light (a specific trajectory. Hereinafter, it is referred to as a laser light trajectory). The symbol Tr1 is a trajectory (hereinafter, referred to as a light source movement trajectory) in which the movement trajectory when the pedestal 101 and the scanner 105 are relatively moved is projected on the layer FXm. The light source moving locus Tr1 is such that the four corner portions of the laser light moving locus Tr having a rectangular shape have a curved shape. Further, the symbol SA1 is a linear section other than the corner of the laser light trajectory Tr, and the symbol SA2 is a curved section of the corner of the laser light trajectory Tr. When the symbol Tr2 indicates that the scanner 105 relatively moves on the light source movement trajectory Tr1, the first irradiation position adjusting means 151 and the second irradiation position adjusting means 154 cause the laser light irradiation position to be orthogonal to the light source movement trajectory Tr1. The degree of offset (whether it has been adjusted) curve (hereinafter referred to as the adjustment curve). The amount of deviation (adjustment amount) of the laser irradiation position is expressed as the distance between the adjustment curve Tr2 of the orthogonal direction of the light source movement trajectory Tr1 and the laser light movement trajectory Tr.

如第17圖所示,光源移動軌跡Tr1係讓角部呈彎曲的略為矩形 之移動軌跡。光源移動軌跡Tr1與雷射光移動軌跡Tr係概略一致,僅角部狹窄區域處的兩者外形相異。光源移動軌跡Tr1為矩形外形時,矩形角部處的掃瞄器105移動速度會變緩,角部可能因雷射光熱量而呈膨脹或波浪形。因此,第17圖中,讓光源移動軌跡Tr1之角部呈彎曲,並使掃瞄器105之移動速度於光源移動軌跡Tr1整體約略為常數。 As shown in Fig. 17, the light source movement trajectory Tr1 is a slightly rectangular shape in which the corner portion is curved. The movement track. The light source movement trajectory Tr1 and the laser light movement trajectory Tr are substantially identical, and only the shape of the narrow portion at the corner portion is different. When the light source movement trajectory Tr1 has a rectangular outer shape, the scanning speed of the scanner 105 at the rectangular corner portion becomes slow, and the corner portion may be expanded or undulated due to the heat of the laser light. Therefore, in Fig. 17, the corner portion of the light source moving locus Tr1 is curved, and the moving speed of the scanner 105 is approximately constant as a whole of the light source moving locus Tr1.

使掃瞄器105在直線區間SA1移動時,由於控制裝置107之光源移動軌跡Tr1與雷射光移動軌跡Tr係一致,所以不藉由第一照射位置調整裝置151及第二照射位置調整裝置154來調整雷射光照射位置,而直接將雷射光從掃瞄器105照射至層片FXm。另一方面,掃瞄器105在彎曲區間SA2移動時,由於光源移動軌跡Tr1與雷射光移動軌跡Tr不一致,所以係藉由第一照射位置調整裝置151及第二照射位置調整裝置154來控制雷射光照射位置,而使雷射光照射位置配置於雷射光移動軌跡Tr上。例如,掃瞄器105移動到以符號M1表示之位置時,係藉由第一照射位置調整裝置151及第二照射位置調整裝置154,使雷射光照射位置於光源移動軌跡Tr1之正交方向N1上偏移了距離W1處。距離W1係與光源移動軌跡Tr1之正交方向N1上調整曲線Tr2和雷射光移動軌跡Tr之距離W2相同。光源移動軌跡Tr1雖配置於雷射光移動軌跡Tr內側,但可藉由第一照射位置調整裝置151及第二照射位置調整裝置154使雷射光照射位置偏移至雷射光移動軌跡Tr外側,故抵銷該等偏差而使雷射光照射位置配置於雷射光移動軌跡Tr上。 When the scanner 105 is moved in the linear section SA1, since the light source movement trajectory Tr1 of the control device 107 coincides with the laser light movement trajectory Tr, the first irradiation position adjustment device 151 and the second irradiation position adjustment device 154 are not used. The laser light irradiation position is adjusted, and the laser light is directly irradiated from the scanner 105 to the layer FXm. On the other hand, when the scanner 105 moves in the bending section SA2, since the light source movement trajectory Tr1 does not coincide with the laser light movement trajectory Tr, the first irradiation position adjusting device 151 and the second irradiation position adjusting device 154 control the lightning. The light irradiation position is set, and the laser light irradiation position is disposed on the laser light movement track Tr. For example, when the scanner 105 moves to the position indicated by the symbol M1, the first irradiation position adjusting device 151 and the second irradiation position adjusting device 154 cause the laser light to be irradiated in the orthogonal direction N1 of the light source moving locus Tr1. The upper side is offset by the distance W1. The distance W2 between the adjustment curve Tr2 and the laser light moving locus Tr in the orthogonal direction N1 of the W1 system and the light source movement locus Tr1 is the same. The light source movement trajectory Tr1 is disposed inside the laser light movement trajectory Tr, but the first irradiation position adjustment device 151 and the second irradiation position adjustment device 154 can shift the laser light irradiation position to the outside of the laser light movement trajectory Tr, so that These deviations are pinned so that the laser light irradiation position is placed on the laser light trajectory Tr.

如以上說明,根據本實施形態之薄膜貼合系統1,第一切斷裝置31及第二切斷裝置32係由上述雷射光照射裝置所構成,所以可銳利地切斷層片(第一層片F1m、第二層片F2m),可抑制切割品質低落問題。 As described above, according to the film bonding system 1 of the present embodiment, since the first cutting device 31 and the second cutting device 32 are constituted by the above-described laser beam irradiation device, the layer sheet can be sharply cut (the first layer sheet) F1m and the second layer F2m) can suppress the problem of low cutting quality.

又,透過控制裝置107之控制,可控制第二移動裝置106與掃瞄器105,用以在層片FXm處描繪出特定軌跡(雷射光移動軌跡Tr)。於該結 構中,藉由第一照射位置調整裝置151及第二照射位置調整裝置154所調整之雷射光照射區間係僅在狹窄之彎曲區間SA2處。此外較寬的直線區間SA1則利用第二移動裝置106藉由台座101之移動,以雷射光在層片FXm上進行掃瞄。本實施形態中,主要藉由第二移動裝置106來進行雷射光掃瞄,第一照射位置調整裝置151及第二照射位置調整裝置154僅用於調整第二移動裝置106所無法良好控制精度之雷射光照射位置的區域。因此,與只以第二移動裝置106或只以掃瞄器105進行雷射光掃瞄的情況相比,能於廣範圍內以良好精度控制雷射光照射位置。 Further, the second mobile device 106 and the scanner 105 can be controlled by the control of the control device 107 to draw a specific trajectory (laser light moving trajectory Tr) at the layer FXm. At the knot In the configuration, the laser light irradiation interval adjusted by the first irradiation position adjusting device 151 and the second irradiation position adjusting device 154 is only at the narrow bending portion SA2. In addition, the wider linear section SA1 scans the layer FXm with laser light by the movement of the pedestal 101 by the second moving means 106. In the present embodiment, the laser beam scanning is mainly performed by the second moving device 106, and the first irradiation position adjusting device 151 and the second irradiation position adjusting device 154 are only used to adjust the precision of the second mobile device 106 that cannot be controlled well. The area where the laser light illuminates the position. Therefore, the laser light irradiation position can be controlled with good precision over a wide range as compared with the case where the laser scanning is performed only by the second moving device 106 or only the scanner 105.

又,於本實施形態中,將尺寸超出液晶面板P外側之層片(第一層片F1m、第二層片F2m)貼合至液晶面板P後,切斷層片(第一層片F1m、第二層片F2m)的剩餘部分。藉此,可在液晶面板P之面上形成對應於貼合面尺寸的光學組件(第一光學組件F11、第二光學組件F12)。因此,可以良好精度設置光學組件(第一光學組件F11、第二光學組件F12)直至貼合面邊緣,可縮小顯示區域P4外側之邊框部G,並達成顯示區域之擴大及機器之小型化目的。 Further, in the present embodiment, the layer sheet (the first layer sheet F1m and the second layer sheet F2m) having a size beyond the outer side of the liquid crystal panel P is bonded to the liquid crystal panel P, and then the layer sheet is cut (the first layer sheet F1m, the first layer) The remaining part of the two-layer film F2m). Thereby, an optical component (the first optical component F11 and the second optical component F12) corresponding to the size of the bonding surface can be formed on the surface of the liquid crystal panel P. Therefore, the optical components (the first optical component F11 and the second optical component F12) can be provided with good precision up to the edge of the bonding surface, and the frame portion G outside the display region P4 can be reduced, and the display region can be enlarged and the device can be miniaturized. .

又,於本實施形態中,將尺寸超出液晶面板P外側(外徑較液晶面板P之外徑更大)的層片(第一層片F1m、第二層片F2m)貼合至液晶面板P。藉此,即使是其光軸方向因層片(第一層片F1m、第二層片F2m)的位置而改變的情況,亦可配合該光軸方向來校準液晶面板P並進行貼合。因此,可改善相對液晶面板P之光學組件(第一光學組件F11、第二光學組件F12)的光軸方向之精度,可提高光學顯示設備之色彩度及對比。 Further, in the present embodiment, the layer sheets (the first layer sheet F1m and the second layer sheet F2m) having a size exceeding the outer side of the liquid crystal panel P (the outer diameter is larger than the outer diameter of the liquid crystal panel P) are bonded to the liquid crystal panel P. . Thereby, even if the optical axis direction changes due to the position of the layer sheets (the first layer sheet F1m and the second layer sheet F2m), the liquid crystal panel P can be aligned and bonded in accordance with the optical axis direction. Therefore, the accuracy of the optical axis direction of the optical components (the first optical component F11 and the second optical component F12) with respect to the liquid crystal panel P can be improved, and the color degree and contrast of the optical display device can be improved.

切斷裝置(第一切斷裝置31、第二切斷裝置32)以雷射切斷層片(第一層片F1m、第二層片F2m)的情況,與使用利刃來切斷層片(第一層片F1m、第二層片F2m)的情況相比,不會對液晶面板P施加應力,因此難以產生裂痕或破裂,可獲得液晶面板P的安定性和耐久性。 The cutting device (the first cutting device 31 and the second cutting device 32) cuts the layer (the first layer F1m and the second layer F2m) by laser, and cuts the layer with a sharp edge (first In the case of the layer F1m and the second layer sheet F2m), stress is not applied to the liquid crystal panel P, so that cracks or cracks are less likely to occur, and the stability and durability of the liquid crystal panel P can be obtained.

另外,於本實施形態中,將雷射光照射至對象物體並進行特定加工之結構,雖例舉有將層片切斷之結構來說明,但並不限定於此。亦可例如為,將層片分割成至少二個、以裂口貫穿層片及於層片形成指定深度之溝部(切割)等的結構。更具體而言,於實施形態中,有例如層片端部之切斷(切削)、半切斷及標示加工等。 Further, in the present embodiment, the configuration in which the laser beam is irradiated onto the target object and the specific processing is performed is described as a configuration in which the layer sheet is cut, but the invention is not limited thereto. For example, the layer may be divided into at least two layers, a layer that penetrates the layer by a slit, and a groove portion (cut) formed at a predetermined depth in the layer. More specifically, in the embodiment, for example, cutting (cutting), half cutting, marking processing, and the like of the end portions of the plies are performed.

又,於本實施形態中,雖例舉有雷射光照射裝置所照射之雷射光描繪軌跡在平面視圖中呈矩形外形(正方形)的情況來說明,但並不限定於此。例如,雷射光照射裝置所照射之雷射光描繪軌跡在平面視圖中可呈三角形外形,在平面視圖中亦可呈五角形以上之多角形外形。又,不限定於此,平面視圖中亦可為星型外形、幾何外形等。該等描繪軌跡均可適用於本發明。 Further, in the present embodiment, the case where the laser light drawing trajectory irradiated by the laser beam irradiation device has a rectangular outer shape (square shape) in plan view is described, but the present invention is not limited thereto. For example, the laser light trajectory illuminated by the laser light irradiation device may have a triangular shape in plan view, and may also have a polygonal shape above a pentagon shape in plan view. Further, the present invention is not limited thereto, and the star shape, the geometric shape, and the like may be used in the plan view. These depicted traces can be adapted to the present invention.

又,於本實施形態中,雖例舉出從料捲滾筒將光學組件層FX捲出,將尺寸超出液晶面板P外側之層片FXm貼合至液晶面板P後,從層片FXm切割出對應於液晶面板P之貼合面大小的光學組件F1X情況來說明,但並不限定於此。例如,不使用料捲滾筒,而將切割出超出液晶面板P外側尺寸的單片狀光學薄膜切片貼合至液晶面板的情況亦可適用於本發明。 Further, in the present embodiment, the optical component layer FX is unwound from the roll drum, and the layer FXm having a size beyond the outer side of the liquid crystal panel P is bonded to the liquid crystal panel P, and the corresponding layer is cut out from the layer FXm. The optical module F1X of the size of the bonding surface of the liquid crystal panel P is described, but is not limited thereto. For example, a case where a single-piece optical film slice cut out beyond the outer dimension of the liquid crystal panel P is bonded to the liquid crystal panel without using a roll cylinder can also be applied to the present invention.

以上,參考所添附之圖式說明了本實施形態之適當實施形態例,但本發明並不限定於該等範例。上述範例所顯示之各構成組件的各外形或組合等僅為一例,在不脫離本發明主旨之範圍中,可根據設計要求等來進行各種變更。 Although the preferred embodiments of the present embodiment have been described above with reference to the attached drawings, the present invention is not limited to the examples. The respective shapes, combinations, and the like of the respective components shown in the above examples are merely examples, and various modifications can be made according to design requirements and the like without departing from the gist of the invention.

100‧‧‧雷射光照射裝置 100‧‧‧Laser light irradiation device

101‧‧‧台座 101‧‧‧ pedestal

101s‧‧‧保持面 101s‧‧‧ Keep face

101s1‧‧‧第一保持面 101s1‧‧‧First holding surface

101s2‧‧‧第二保持面 101s2‧‧‧second holding surface

102‧‧‧雷射光振盪器 102‧‧‧Laser light oscillator

103‧‧‧照明裝置 103‧‧‧Lighting device

104‧‧‧第一移動裝置 104‧‧‧First mobile device

105‧‧‧掃瞄器 105‧‧ ‧Scanner

109‧‧‧攝影裝置 109‧‧‧Photographing device

110‧‧‧第一對象物體 110‧‧‧First object

113‧‧‧開口部 113‧‧‧ openings

142‧‧‧第一導軌 142‧‧‧First rail

143‧‧‧第一線性馬達 143‧‧‧First linear motor

190‧‧‧第三移動裝置 190‧‧‧ third mobile device

Claims (10)

一種雷射光照射裝置,係具備:台座,係具有保持板狀對象物體之保持面;雷射光振盪器,係振盪出雷射光;掃瞄器,係以該雷射光在該保持面之平行平面內進行二維掃瞄;照明裝置,係照亮該對象物體;第一移動裝置,係使該台座與該照明裝置進行相對移動;以及第二移動裝置,係使該台座與該掃瞄器進行相對移動。 A laser light irradiation device includes: a pedestal having a holding surface for holding a plate-shaped object; a laser oscillator for oscillating laser light; and a scanner for aligning the laser light in a parallel plane of the holding surface Performing a two-dimensional scan; illuminating the device to illuminate the object; the first moving device moves the pedestal relative to the illuminating device; and the second moving device aligning the pedestal with the illuminator mobile. 如申請專利範圍第1項所述之雷射光照射裝置,其更具備:攝影裝置,係拍攝該對象物體;以及第三移動裝置,係使該台座與該攝影裝置進行相對移動。 The laser light irradiation device according to claim 1, further comprising: a photographing device that photographs the object; and a third moving device that moves the pedestal relative to the photographing device. 如申請專利範圍第1項或第2項所述之雷射光照射裝置,其中,從該保持面之法線方向觀察,該對象物體係為包含有四個角部的矩形;該台座於對應該對象物體各角部位置處形成有貫通開口部;且該照明裝置係對向於該台座之保持面的相反側之面而配置,經由該貫通開口部而照亮各該角部。 The laser light irradiation device according to the first or second aspect of the invention, wherein the object system is a rectangle including four corners as viewed from a normal direction of the holding surface; the pedestal corresponds to A through opening is formed at each corner of the target object, and the illuminating device is disposed facing the opposite side of the holding surface of the pedestal, and each of the corners is illuminated through the through opening. 如申請專利範圍第3項所述之雷射光照射裝置,其中,當該雷射光振盪器振盪出該雷射光時,該第一移動裝置可讓該照明裝置退出至從該保持面之法線方向觀察不會與該貫通開口部相重疊之位置處。 The laser light irradiation device of claim 3, wherein when the laser light oscillates the laser light, the first moving device can cause the illumination device to exit to a normal direction from the holding surface It is observed that it does not overlap the through opening. 如申請專利範圍第1項至第4項中任一項所述之雷射光照射裝置,其中,該保持面具有第一保持面與鄰接該第一保持面而配置的第二保持面;該照明裝置係位在與該第一保持面及該第二保持面鄰接之鄰接延伸方向上;且該第一移動裝置係使該照明裝置沿該鄰接方向之垂直方向上移動。 The laser light irradiation device according to any one of the preceding claims, wherein the holding surface has a first holding surface and a second holding surface disposed adjacent to the first holding surface; the illumination The device is positioned in an abutting extension direction adjacent to the first holding surface and the second holding surface; and the first moving device moves the lighting device in a vertical direction of the abutting direction. 如申請專利範圍第5項所述之雷射光照射裝置,其中,該照明裝置係具有:第一照明裝置,係位於該鄰接延伸方向上;以及第二照明裝置,係於該鄰接方向之垂直方向上與該第一照明裝置並排配置,而位於該鄰接延伸方向上。 The laser light irradiation device of claim 5, wherein the illumination device has: a first illumination device located in the adjacent extension direction; and a second illumination device disposed in a vertical direction of the adjacent direction The upper portion is disposed side by side with the first illumination device and is located in the abutting extension direction. 如申請專利範圍第1項至第6項中任一項所述之雷射光照射裝置,其中更具備有聚光透鏡,係將該掃瞄器所射出之雷射光朝該保持面聚光。 The laser light irradiation device according to any one of claims 1 to 6, further comprising a collecting lens for collecting the laser light emitted from the scanner toward the holding surface. 一種光學組件貼合體之製造裝置,係具備光學顯示部件與貼合至該光學顯示部件之光學組件,該製造裝置具備:貼合裝置,係將外徑較該光學顯示部件外形更大的層片貼合至該光學顯示部件,讓該層片會突出至該層片與該光學顯示部件之貼合面外側,以形成層片貼合體;以及切斷裝置,係沿該貼合面端緣,從該層片貼合體將該層片之突出部分切斷,以形成對應該貼合面大小的光學組件;其中,該切斷裝置係由如申請專利範圍第1項至第7項中任一項所束之雷射光照射裝置所構成,藉由該雷射光照射裝置所射出之雷射光,從該對象物體之層片貼合體將該層片之突出部分切斷。 An optical component bonding body manufacturing apparatus comprising: an optical display member and an optical component bonded to the optical display component, the manufacturing apparatus comprising: a bonding device, wherein the outer diameter is larger than a shape of the optical display component Bonding to the optical display member such that the layer protrudes to the outside of the bonding surface of the layer and the optical display member to form a layered laminate; and the cutting device is along the edge of the bonding surface. Cutting the protruding portion of the layer from the layer laminate to form an optical component corresponding to the size of the bonding surface; wherein the cutting device is obtained by any one of items 1 to 7 of the patent application scope The laser light irradiation device of the item is configured to cut the protruding portion of the layer from the layered laminated body of the target object by the laser light emitted from the laser light irradiation device. 一種檢測裝置,係具備:台座,係保持板狀對象物體;照明裝置,係照亮該對象物體;以及第一移動裝置,係使該台座與該照明裝置進行相對移動。 A detecting device includes a pedestal for holding a plate-shaped object, an illuminating device for illuminating the object, and a first moving device for relatively moving the pedestal and the illuminating device. 如申請專利範圍第9項所述之檢測裝置,其中更具備:攝影裝置,係拍攝該對象物體;以及第二移動裝置,係使該台座與該攝影裝置進行相對移動。 The detecting device according to claim 9, further comprising: a photographing device that photographs the object; and a second moving device that moves the pedestal relative to the photographing device.
TW103109738A 2013-03-21 2014-03-14 Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece TWI610115B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013058978A JP6199585B2 (en) 2013-03-21 2013-03-21 Laser light irradiation apparatus and optical member bonding body manufacturing apparatus
JPJP2013-058978 2013-03-21

Publications (2)

Publication Number Publication Date
TW201443521A true TW201443521A (en) 2014-11-16
TWI610115B TWI610115B (en) 2018-01-01

Family

ID=51580020

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103109738A TWI610115B (en) 2013-03-21 2014-03-14 Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece

Country Status (3)

Country Link
JP (1) JP6199585B2 (en)
TW (1) TWI610115B (en)
WO (1) WO2014148333A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI716611B (en) * 2016-06-30 2021-01-21 日商日本電產三協股份有限公司 Transport system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204301688U (en) * 2014-12-16 2015-04-29 日东电工株式会社 Bonding position testing fixture

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0832369B2 (en) * 1990-05-21 1996-03-29 エヌティエヌ株式会社 Laser processing equipment
US5171963A (en) * 1990-05-21 1992-12-15 Ntn Corporation Laser processing device and laser processing method
JP2509595Y2 (en) * 1991-07-05 1996-09-04 大日本スクリーン製造株式会社 Table type measuring device
JP2732230B2 (en) * 1994-10-21 1998-03-25 株式会社篠崎製作所 Coaxial observation device in laser beam machining
JP3523927B2 (en) * 1995-01-10 2004-04-26 株式会社ソキア Length measuring device
JPH1099985A (en) * 1996-09-30 1998-04-21 Komatsu Ltd Work cutting and collecting method of heat cutting machine, and cutting table device
JP2001047280A (en) * 1999-08-03 2001-02-20 Niigata Eng Co Ltd Device and method for conveying work for metal plate finishing machine
JP2003071581A (en) * 2001-08-30 2003-03-11 Central Glass Co Ltd Positioning method for resin film
JP2003107452A (en) * 2001-09-17 2003-04-09 Internatl Business Mach Corp <Ibm> Method of manufacturing liquid crystal display panel, method of manufacturing liquid crystal display device, and device for manufacturing the liquid crystal display device
JP2003255132A (en) * 2002-03-05 2003-09-10 Sumitomo Chem Co Ltd Manufacturing method for optical film chip
JP2005014012A (en) * 2003-06-24 2005-01-20 Pentax Corp Drawing aparatus and drawing method
JP2005125339A (en) * 2003-10-21 2005-05-19 Hitachi Via Mechanics Ltd Laser beam machining device
TWI307929B (en) * 2005-05-12 2009-03-21 Olympus Corp Substrate inspection apparatus
JP4951271B2 (en) * 2005-05-12 2012-06-13 オリンパス株式会社 Board inspection equipment
JP4800939B2 (en) * 2006-01-06 2011-10-26 三菱電機株式会社 Laser processing apparatus, program creation apparatus, and laser processing method
JP2007203302A (en) * 2006-01-30 2007-08-16 Sumitomo Heavy Ind Ltd Working device for substrate
JP4800114B2 (en) * 2006-05-31 2011-10-26 ミヤチテクノス株式会社 Laser marking method and apparatus
JP5759811B2 (en) * 2011-07-11 2015-08-05 日本車輌製造株式会社 Position correcting apparatus and laser processing machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI716611B (en) * 2016-06-30 2021-01-21 日商日本電產三協股份有限公司 Transport system

Also Published As

Publication number Publication date
JP2014186056A (en) 2014-10-02
JP6199585B2 (en) 2017-09-20
TWI610115B (en) 2018-01-01
WO2014148333A1 (en) 2014-09-25

Similar Documents

Publication Publication Date Title
TWI523721B (en) Laser light irradiation apparatus, manufacturing apparatus of optical display device, laser light irradiation method, and manufacturing method of optical display device
TWI574082B (en) Production apparatus for optical member affixed body
TW201334952A (en) Manufacturing system of optical display device, and manufacturing method of optical display device
KR20160022297A (en) Production system for optical display device
TW201444670A (en) Optical display device production system
TWI607815B (en) Laser beam irradiation apparatus and apparatus for manufacturing optical member affixed body
JP2016013557A (en) Manufacturing apparatus for laser beam irradiation device and optical member adhered body
TWI630115B (en) Production system for optical display device and production method for optical display device
TWI629132B (en) Manufacturing apparatus of optical member affixed body
KR102207122B1 (en) Apparatus and method for manufacturing optical member-bonded body
TWI630439B (en) Optical display device production system
TWI610115B (en) Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece
TWI600544B (en) Optical display device production system
WO2013165013A1 (en) System for producing and method for manufacturing optical display device
WO2015029998A1 (en) Film bonding device, optical-display-device production system, and optical-display-device production method
TWI609202B (en) Production system of optical display device
TW201440941A (en) Cutting apparatus, cutting method, and apparatus for manufacturing optical member affixed body
TWI582492B (en) Detecting apparatus and production apparatus for optical member affixed body
TWI537113B (en) Manufacturing system of optical display device and manufacturing method of optical display device
TW201510511A (en) Defect inspection apparatus and optical display device production system
TW201406489A (en) Production method for optical display device and production system for optical display device
JP2015036730A (en) Apparatus for manufacturing optical member laminate
WO2014024803A1 (en) System for producing optical display device and method for producing optical display device
JP5724146B2 (en) Manufacturing system, manufacturing method and recording medium for optical member bonded body