TW201432397A - 對氣候變化之敏感度降低之共振器 - Google Patents
對氣候變化之敏感度降低之共振器 Download PDFInfo
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Abstract
本發明關於一種包括由至少一種非金屬材料(11,11b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f)所形成之核心(9a,9b,9c,9c,9e,9f)之熱補償彈簧平衡共振器的補償平衡彈簧(1)。根據本發明,核心(9a,9b,9c,9d,9e,9f)係經防潮之層(7)完全塗覆,以使該平衡彈簧(1)對氣候變化較不敏感。本發明關於時計之領域。
Description
本發明關於一種熱補償彈簧平衡共振器,其中該補償平衡彈簧對氣候變化之敏感度降低。
在對於時計機芯(movement)進行嚴重凝結測試期間,很明顯地該等機芯的運作會被影響。
本發明目的係藉由提供對氣候變化之敏感度降低的非金屬平衡彈簧來克服所有或部分上述缺點。
因此本發明係關於一種熱補償彈簧平衡共振器的補償平衡彈簧,其包含由包括石英或經摻雜之矽(或未經摻雜之矽)的至少一種非金屬材料,且其上至少部分形成二氧化矽之塗層所形成的核心,其特徵在於該核心係經防潮且不透潮之層完全塗覆,以使該補償平衡彈簧對氣候變化較不敏感。
因此清楚看出,即使在嚴重凝結情況下,補償平衡彈
簧之運作不會中斷,以使得與平衡輪協同運作而形成之共振器不受影響或幾乎不受影響。
根據本發明其他有利特徵:- 該防潮且不透潮之層具有小於50nm之厚度;- 該防潮且不透潮之層包含鉻、鈦或鉭。
此外,本發明關於一種用於時計之包括平衡輪的熱補償共振器,其特徵在於該平衡輪與根據前述變體中任一者之補償平衡彈簧協同運作。
1‧‧‧補償平衡彈簧
3‧‧‧內樁
5‧‧‧條
7‧‧‧層
9a,9b,9c,9d,9e,9f‧‧‧核心
11a,11 b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11 e,13e,15e,17e,19e,11f,21f‧‧‧材料
l‧‧‧長度
e‧‧‧厚度
h‧‧‧高度
從下文以非限制性例證提供的描述並參考附圖將清楚的表示其他特徵及優點,該等附圖中:-圖1顯示根據本發明之補償平衡彈簧;-圖2至7顯示根據本發明之補償平衡彈簧的一部分之變體。
進行研究以測定與嚴重凝結密切相關之時計機芯的表現。該研究係藉由使測濕率維持高於80%並藉由將溫度降低至少15℃而迫使大幅超過露點來進行。
其顯示時計之運作會受影響,特別是當彈簧平衡共振器之補償平衡彈簧係至少部分由結晶氧化矽或非晶形氧化矽形成時。該類型之補償平衡彈簧可例如由其上至少部分形成二氧化矽塗層之經摻雜或未經摻雜結晶矽或由石英所
形成。
該研究亦顯示嚴重凝結之影響可藉由在包含結晶或非晶形氧化矽之補償平衡彈簧上形成抗潮之障壁而最小化。
因此,本發明關於一種包含由包括至少一種非金屬材料所形成之核心的熱補償彈簧平衡共振器之補償平衡彈簧。根據本發明有利的是,該核心完全塗覆防潮(即防潮且不透潮)層以使該補償平衡彈簧對氣候變化較不敏感。
根據本發明,該防潮層具有小於50nm之厚度,較佳為約10nm以防止機械性影響該平衡彈簧的運作。然而,該防潮層之厚度可至高達數微米,但在該情況下必須考慮彈簧平衡共振器的熱補償。
此外,較佳係該防潮層為導電性且對於磁場具有低敏感度,諸如例如反磁層或順磁層。
舉例來說,該防潮層因而可包括鉻、鈦、鉭、鋁、鋯、氧化鋁、氧化鉻、鉻鎢、PTFE或氮化矽(Si3N4)。然而,因鉻、鈦、鉭或其合金之一展現最佳結果,故以彼等為佳。
圖1至7根據本發明所獲得且目的係熱補償與平衡輪協同運作而形成之共振器的平衡彈簧1之變體。補償平衡彈簧1較佳包括與纏繞成數個線圈之條5形成一體的內樁3。根據本發明,補償平衡彈簧1之至少一個條5係塗覆形成抗潮障壁的層7。
條5具有長度l,厚度e及高度h。其包括由至少一種材料11a,11b,13b,15b,11c,17c,19c,11d,
13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f所形成的核心9a,9b,9c,9d,9e,9f。
根據圖2至7之變體,核心9a,9b,9c,9d,9e,9f可由單一材料11a,諸如例如石英,或由數種材料11b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f所形成。
當核心9b,9c,9d,9e,9f係由數種材料形成時,其可為在平衡彈簧1之條5塗覆防潮(即防潮且不透潮)層7之前經數種材料完全塗覆之11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f或部分塗覆之11b,13b,15b,11c,17c,19c。各塗層13b,15b,17c,19c,13d,15d,17d,19d,13e,15e,17e,19e可為或可不為相同類型及相同厚度。舉例來說,核心9b,9c,9d,9e,9f可包括經摻雜或未經摻雜之矽11b,11c,11d,11e,11f,且其上至少部分形成二氧化矽塗層13b,15b,17c,19c,13d,15d,17d,19d,13e,15e,17e,19e,21f。
本發明亦關於製造熱補償彈簧平衡共振器之補償平衡彈簧1的方法,其包括以下步驟:
a)形成包括由至少一種材料11a,11b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f所形成之熱補償核心9a,9b,9c,9d,9e,9f的平衡彈簧;
b)以防潮之層7完全塗覆核心9a,9b,9c,9d,
9e,9f以使平衡彈簧1對氣候變化較不敏感。
根據本發明,步驟a)可藉由在所希望之板中蝕刻該平衡彈簧之所希望圖案以形成核心9a,9b,9c,9d,9e,9f之所有或部分11a,11b,11c,11d,11e,11f。在結晶矽及石英之實例中,可預想以深反應性離子蝕刻(DRIE)來完成步驟a)。
當然,步驟a)亦包括部分或完全塗覆從在第一階段中蝕刻所獲得之平衡彈簧的至少一個第二階段13b,15b,17c,19c,13d,15d,17d,19d,13e,15e,17e,19e,21f以完成核心9b,9c,9d,9e,9f。當在步驟a)之第一階段中蝕刻經摻雜或未經摻雜的結晶矽晶圓時,該第二階段可例如由目的係用以形成二氧化矽之熱氧化組成。
步驟b)使得能沉積具有小於50nm且較佳為約10nm之厚度的防潮層7。步驟b)可藉由例如任何薄層沉積方法(諸如氣相沉積)以沉積亦為對磁場不敏感之有利的導電材料的鉻、鈦或鉭或其合金之一來完成。
當然,本發明不局限於所說明實例,而是能具有熟悉本技術之人士將遇到的各種不同變體及變化。特別是,可預想任何能形成抗潮障壁的材料且不局限於鉻、鈦或鉭或其合金中之一者或甚至本說明中提及的其他材料。
當時計包括使得能看見平衡彈簧的部件(諸如例如「機構骨架型」時計時具有透明背蓋之時計)時,亦可能依防潮材料之特別顏色來選擇該防潮材料以改善其外觀美觀。
1‧‧‧補償平衡彈簧
3‧‧‧內樁
5‧‧‧條
Claims (16)
- 一種熱補償彈簧平衡共振器的補償平衡彈簧(1),其包含由包括石英之至少一種非金屬材料(11a,11b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f)所形成的核心(9a,9b,9c,9d,9e,9f),其特徵在於該核心(9a,9b,9c,9d,9e,9f)係經防潮且不透潮之層(7)完全塗覆,以使該補償平衡彈簧(1)對氣候變化較不敏感。
- 如申請專利範圍第1項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)具有小於50nm之厚度。
- 如申請專利範圍第1項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鉻。
- 如申請專利範圍第1項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鈦。
- 如申請專利範圍第1項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鉭。
- 一種熱補償彈簧平衡共振器的補償平衡彈簧(1),其包含由包括矽之至少一種非金屬材料(11a,11b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f),且其上至少部分形成二氧化矽之塗層所形成的核心(9a,9b,9c,9d,9e,9f),其特徵在於該核心(9a,9b,9c,9d,9e,9f)係經防潮且不透潮之層(7)完全塗覆,以使該補償平衡彈簧(1)對氣候變化較不敏感。
- 如申請專利範圍第6項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)具有小於50nm之厚度。
- 如申請專利範圍第6項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鉻。
- 如申請專利範圍第6項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鈦。
- 如申請專利範圍第6項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鉭。
- 一種熱補償彈簧平衡共振器的補償平衡彈簧(1),其包含由包括經摻雜之矽的至少一種非金屬材料(11a,11b,13b,15b,11c,17c,19c,11d,13d,15d,17d,19d,11e,13e,15e,17e,19e,11f,21f),且其上至少部分形成二氧化矽的塗層所形成之核心(9a,9b,9c,9d,9e,9f),其特徵在於該核心(9a,9b,9c,9d,9e,9f)係經防潮且不透潮之層(7)完全塗覆,以使該補償平衡彈簧(1)對氣候變化較不敏感。
- 如申請專利範圍第11項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)具有小於50nm之厚度。
- 如申請專利範圍第11項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鉻。
- 如申請專利範圍第11項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鈦。
- 如申請專利範圍第11項之補償平衡彈簧(1),其中該防潮且不透潮之層(7)包含鉭。
- 一種用於時計之包括平衡輪的熱補償共振器,其特徵在於該平衡輪與根據前述申請專利範圍中任一項之補償平衡彈簧(1)協同運作。
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CN (1) | CN104797989B (zh) |
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US20170285573A1 (en) * | 2016-11-30 | 2017-10-05 | Firehouse Horology, Inc. | Crystalline Compounds for Use in Mechanical Watches and Methods of Manufacture Thereof |
EP3543796A1 (fr) | 2018-03-21 | 2019-09-25 | Nivarox-FAR S.A. | Procede de fabrication d'un spiral en silicium |
EP3608728B1 (fr) * | 2018-08-08 | 2022-02-16 | Nivarox-FAR S.A. | Spiral thermocompensé coloré et son procédé de fabrication |
EP3667433B1 (fr) * | 2018-12-12 | 2023-02-01 | Nivarox-FAR S.A. | Spiral et son procede de fabrication |
US11429008B1 (en) * | 2022-03-03 | 2022-08-30 | Lumotive, LLC | Liquid crystal metasurfaces with cross-backplane optical reflectors |
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US10001749B2 (en) | 2018-06-19 |
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JP6209220B2 (ja) | 2017-10-04 |
KR20150082572A (ko) | 2015-07-15 |
WO2014075859A1 (fr) | 2014-05-22 |
CN104797989A (zh) | 2015-07-22 |
KR20170020545A (ko) | 2017-02-22 |
HK1212784A1 (zh) | 2016-06-17 |
TWI615690B (zh) | 2018-02-21 |
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US20150301502A1 (en) | 2015-10-22 |
KR101846802B1 (ko) | 2018-04-06 |
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