TW201408983A - High-efficiency heat exchanger and high-efficiency heat exchange method - Google Patents

Abstract

To provide a high-efficiency heat exchanger which can be applied to a high-purity fluid to be subjected to heat exchange. A heat exchanger is provided with a flow passage through which fluid to be subjected to heat exchange flows and a heat transmission structure which is in contact with the fluid to be subjected to heat exchange flowing through the flow passage. The heat exchanger performs heat exchange by heat transfer effected through the contact surface where the fluid to be subjected to heat exchange and the heat transmission structure are in contact with each other. The heat exchanger is characterized in that: (1) the surface of the heat transmission structure, which is in contact with the fluid to be subjected to heat exchange, consists of a material stable against the fluid to be subjected to heat exchange; (2) the heat transmission structure is provided with a heat conduction body, and the heat conduction body consists of a material having a good coefficient of heat conductivity; and (3) the heat conduction body is mounted near the contact surface, which is in contact with the fluid to be subjected to heat exchange, at a position not in contact with the fluid. In the heat exchanger, the efficiency of heat conduction through the surface where the heat transmission structure and the fluid to be subjected to heat exchange are in contact with each other is high.

Description

High efficiency heat exchanger and high efficiency heat exchange method

The present invention relates to a heat exchange technique that does not limit the field of application. In particular, it is useful for heat exchange of a gas or a liquid of a corrosive substance such as an acid or a base, or for high-purity water, a high-purity ruthenium compound for producing a semiconductor, etc., and a device for heat exchange can be realized. The problem of corrosion of corrosive or high-purity substances and the improvement of heat exchange rate. That is, the present invention can provide a heat exchanger and a heat exchange method in which corrosion of a device, contamination due to impurities, and high efficiency are required in the entire technical field where cooling, heating or temperature adjustment of a substance is necessary. Further, in the present specification, there is a case where not only a heat source but also a heat source is referred to as a "heat source". Further, the term "fluid" in the present specification also includes a phase change (for example, a phase change from a liquid to a gas) due to heating or rapid heat.

The heat exchanger is a device that heats or cools one object by directly or indirectly contacting two objects having different temperatures, and is used as a boiler, a steam generator, a food manufacturing, a chemical manufacturing, a refrigeration storage, and the like. Used in a cooling step, a heating step, and refrigeration. The heat exchanger usually has a structure corresponding to the characteristics of the substance to be exchanged, for example, a heat exchanger for a liquid medicine that exchanges heat with a highly corrosive chemical liquid such as hydrofluoric acid, nitric acid or sulfuric acid, and must be used. The heat exchanger having chemical resistance heats and cools a fluid such as a strong acid or a strong alkali which is highly corrosive, and in this case, a contact portion containing a resin material which is hard to be attacked by an acid or an alkali is representative. The material is immersed in a heat medium for heat exchange between the joints.

Fig. 1 is a schematic view showing a representative heat exchange between the two, and the temperature is adjusted by the heat source 5 while the heat exchange fluid (acid, alkali, water, etc.) is transferred from the inlet 2 to the outlet 3 through the resin pipe 1. The subsequent heat medium 4 is heat-exchanged via the resin pipe 1. The method can increase the heat exchange efficiency by increasing the surface area of the resin tube 1 on the contact side, for example, lengthening the contact area of the heat medium 4, thereby increasing the heat exchange efficiency, but therefore, including the heat source Temperature-regulating devices or containers are the case for devices that are costly and expensive. Further, a typical example of a direct heating method in which heat exchange with a heat source is directly performed without passing through a heat medium is shown in Fig. 2, and the heat source 5 and the material having good corrosion resistance with respect to the heat exchange fluid are excellent in temperature characteristics. The tube 1 of the material is in direct contact with the heat exchange. In either case, it is necessary that the apparatus such as the transfer pipe is not corroded by the heat exchange fluid or the heat exchange medium, does not contaminate the heat exchange fluid in the heat exchange step, and performs heat exchange efficiently.

Therefore, in order to prevent the transfer tube from being affected by corrosion of the heat exchange medium or the heat exchange fluid, the transfer tube is protected by a resin or a ceramic. For example, there is proposed a heat transfer tube for heat exchange (Patent Document 1) which is disposed in a high-temperature gas environment and exchanges heat from the high-temperature gas to the heated fluid in the heat transfer tube, and the heated fluid flows therethrough. The tube comprises a heat resistant alloy, comprising a heat insulating expansion buffer material, and a cover material comprising the ceramic alloy composite material covers the outer layer of the heat resistant alloy tube. The ceramic alloy composite material constituting the cover material comprises Al and AlN, and the AlN is provided. The total ratio of (Al + AlN + AlON) is 1 wt% or more and 90 wt% or less, and is 50 wt% or more and 100 wt% or less.

It is known that the fluororesin is excellent in corrosion resistance and heat resistance with respect to various chemicals. However, if the transfer tube is composed of only a fluororesin, the fluororesin itself is originally a poor conductor of heat, so heat exchange efficiency is low, and it is necessary to achieve a specific temperature. For a long time, again, special The accuracy of the temperature control at a constant temperature is also inferior. In order to improve these disadvantages, a proposal has been made to form a fluororesin film on the surface of a metal having good thermal conductivity. For example, there is proposed a member for a gas-using device (Patent Document 2), which is a coating film having at least two layers containing a fluororesin on a substrate, and is used as a heat exchanger having a coating film or the like. With the self-coating of the lowermost film to the uppermost film on the substrate, the content of the fluororesin in each layer is sequentially increased and the content of the inorganic filler is sequentially decreased; or the following is proposed (Patent Document 3): Provided An aluminum alloy material excellent in corrosion resistance and a plate-fin heat exchanger or a flat plate heat exchanger using the aluminum alloy material in a heat transfer portion using a corrosive fluid as a medium An organic phosphonic acid underlayer film on the surface of an aluminum alloy material used in a plate-like fin heat exchanger or a plate heat exchanger using a heat transfer portion having a corrosive fluid as a medium, and further The fluororesin coating film having an average thickness of 1 to 100 μm in terms of the film thickness after drying is used to improve the durability of the coating film in close contact with each other, and is excellent in corrosion resistance against a corrosive fluid such as seawater. Thus, the method of resin coating is usually carried out on a metal having better heat conduction. However, since the thermal expansion of the two materials is different, it is difficult to cope with the expansion and contraction and the coating layer is peeled off, which causes corrosion of the metal portion and metal. The problem of pollution caused by the class. Further, in this method, the target fluid is saturated from the pinhole of the resin coating portion, and the same problem cannot be avoided.

Further, there is a case where carbon having excellent thermal conductivity and corrosion resistance is used. For example, in a method in which a heat exchanger can be used to heat or cool a large amount of a chlorine-containing aqueous hydrogen chloride solution without deteriorating a heat transfer surface, characterized in that the heat transfer surface of the heat exchanger contains carbon impregnated with a fluororesin, and In the heat exchanger, there is proposed a block type heat exchanger in which a block body is disposed in a casing, the block system comprising carbon impregnated with a fluororesin and provided with a hydrogen chloride aqueous solution. Hydrogen chloride aqueous solution flow path and heating medium A heat medium flow path that flows (Patent Document 4). Further, a heat exchanger including stainless steel can be used as the heat exchange material that can be treated by the metal in the liquid contact portion. However, there is a problem in that stainless steel has a low thermal conductivity even in a metal, and in order to obtain a fixed heat exchange capacity, it is necessary to use a heat source having a large capacity, thereby requiring an increase in size of the main body and an increase in power consumption. Thus, in order to obtain high corrosion resistance and increase heat exchange efficiency, attempts have been made to use various materials for heat exchangers, and it is particularly desired to develop heat exchange efficiency which is high in corrosion resistance to heat exchange materials. Heat exchange technology.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 3674401

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-283699

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2008-156748

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2006-289799

[Patent Document 5] Japanese Patent Laid-Open No. Hei 9-280786

The present invention provides a heat exchanger having high heat exchange performance and corrosion resistance with respect to a heat exchange fluid in view of the above-described conventional techniques. In a conventional heat exchanger, when heat exchange is performed on a heat exchange fluid, a method is generally used to contact a member in contact with a heat medium such as a heat source or a refrigerant to exchange heat, but the material of the contact member is based on the characteristics of the fluid. And choose. However, the material of the selected contact member is not necessarily excellent in heat conduction. In this case, for example, it is necessary to compensate for the component having a lower heat conduction by using a plurality of electric heaters as a heat source or using an electric heater having a large capacity. Disadvantage condition. As a result, the energy efficiency in the heat exchange has been repeatedly encountered and the machine has become large.

The present invention is characterized in that high-efficiency heat exchange can be performed even when attention is paid to the material of the contact portion by the characteristics of the heat exchange fluid. Further, the device can be made large-scale and low-cost. Made into miniaturized products. SUMMARY OF THE INVENTION An object of the present invention is to provide a high efficiency heat exchanger which can be applied to a wide range of fields without selecting a fluid for heat exchange. Further, it is an object of the present invention to provide a heat exchanger which does not have corrosion of a machine caused by a heat exchange fluid and which is free from contamination by a heat exchange fluid. Further, the present invention provides a heat exchanger which is excellent in heat conduction characteristics in heating or cooling of an aqueous solution or gas such as fluoric acid or hydrogen chloride which is highly corrosive, or an aqueous alkali solution such as sodium hydroxide. Further, the present invention provides a heat exchange technique capable of performing high-efficiency heat exchange while maintaining high purity of a heat exchange fluid.

The present invention includes the technical matters described below.

[1] A heat exchanger comprising a heat source, a heat transfer structure in contact with the heat exchange fluid, and a heat transfer member that transfers heat from the heat source to the heat transfer structure, and is exchanged by the heat exchange fluid a heat transfer type heat exchanger formed by a contact surface of the heat transfer structure; wherein the heat transfer structure system includes a body having an inflow port, an outflow port, and a heat exchange fluid flow path, and a plurality of heat conduction devices mounted on the body The inner wall surface of the heat exchange fluid flow path constituting the contact surface with the heat exchange fluid is formed of a material stable with respect to the heat exchange fluid, and the heat conduction system is formed of a material having a thermal conductivity higher than that of the body material. The heat transfer system is installed in the vicinity of the flow path of the heat exchange fluid and is not in contact with the heat exchange fluid.

[2] The heat exchanger according to [1], wherein the plurality of heat conductors comprise a clamped heat exchange stream A plurality of thermal conductors disposed opposite each other in the body flow path.

[3] The heat exchanger according to [1] or [2] wherein the heat transfer member is formed by two heat transfer members that sandwich the body, and one or more of the two heat transfer members extend from each of the two heat transfer members. Thermal conductor. Here, the aspect in which the heat conductor is extended includes not only the aspect in which the heat transfer member and the heat conductor are integrally formed, but also the aspect in which the heat transfer member is provided with a heat conductor of a separate individual.

[4] The heat exchanger according to [1] or [2] wherein the heat conductor is a pin-shaped structure.

[5] The heat exchanger according to [4], wherein at least a part of the plurality of heat conductors are integrally formed with the plate-shaped heat transfer member.

[6] The heat exchanger according to [4], wherein at least a part of the plurality of heat conductors has a side surface having a sawtooth configuration. Preferably, a majority of the plurality of thermal conductors have a side surface having a sawtooth configuration.

[7] The heat exchanger according to [6], wherein the surface area of the outer side surface is 1.5 to 3 times the sawtooth structure when there is no side surface other than the convex portion.

[8] The heat exchanger according to [6], wherein the heat conductor having the outer side of the sawtooth structure is a screw.

[9] The heat exchanger according to [8], wherein the heat conductor having the outer side of the sawtooth structure is a screw having a flat head.

[10] The heat exchanger according to [1] or [2] wherein the heat exchange fluid flow path has a plurality of curved portions.

[11] The heat exchanger according to [10], wherein the heat exchange fluid flow path has a folded back portion that is directionally shifted toward the inlet side.

[12] The heat exchanger according to [1] or [2] wherein at least a part of the heat conductor disposed on a side closer to the inlet is compared with a heat conductor disposed on a side farther from the inlet. A heat conductor formed of a material having a high thermal conductivity. Here, the side closer to the inlet means that, for example, the entire length of the flow path is 1/2, 1/3 or 1/4 of the inlet, and the side farther from the inlet is also the same.

[13] The heat exchanger according to [1] or [2], wherein the number of the heat conductors closer to the inlet is larger and is arranged at a higher density than the side farther from the inlet. .

[14] The heat exchanger according to [12], wherein the outflow port is a discharge port that communicates with the outside.

[15] A heat exchanger comprising a plurality of heat exchangers according to any one of [1] to [13].

[16] The heat exchanger according to [1] or [2] wherein the inner wall surface of the heat exchange fluid flow path is a resin.

[17] The heat exchanger according to [1] or [2] wherein the inner wall surface of the heat exchange fluid flow path is metal or carbon.

[18] The heat exchanger according to [1] or [2], wherein the plurality of heat conductors include a heat conductor formed of copper and a heat conductor formed of aluminum.

[19] The heat exchanger according to [1] or [2] wherein the heat source is a heat source.

[20] The heat exchanger according to [1] or [2] wherein the heat source is a heat absorbing source.

[21] A heat exchange method for performing heat transfer type heat exchange with a fluid using a heat exchanger such as [1] or [2].

[22] A heat exchange method for heat transfer type heat exchange with a fluid using a heat exchanger according to [12], disposed on a side closer to the flow inlet than on the side farther from the inlet Compared with a heat conductor formed of a material having a relatively high thermal conductivity, a heat conductor formed of a material having a relatively low thermal conductivity is disposed on a side farther from the inlet than a side closer to the inlet. Thereby suppressing the production on the upstream side and the downstream side of the flow path of the heat exchange fluid The temperature distribution of the birth is uneven.

[23] A heat exchange method for heat transfer type heat exchange with a fluid using a heat exchanger according to [13], disposed on a side closer to the flow inlet than on the side farther from the flow inlet Compared with a heat conductor formed of a material having a relatively high thermal conductivity, a heat conductor formed of a material having a relatively low thermal conductivity is disposed on a side farther from the inlet than a side closer to the inlet. Thereby, the unevenness of the temperature distribution generated on the upstream side and the downstream side of the heat exchange fluid flow path is suppressed.

[24] A heat exchange method which uses a heat exchanger such as [16] to perform heat transfer type heat exchange with a corrosive fluid.

From other points of view, the present invention includes the technical matters described below.

(1) A heat exchanger in which a heat transfer structure is improved in heat transfer efficiency in a surface in contact with a heat exchange fluid, which is provided with a flow path of a heat exchange fluid, and a heat exchange fluid flowing through the flow path a heat transfer structure that is in contact with the heat exchange type heat exchanger by a contact surface of the heat exchange fluid and the heat transfer structure; characterized in that: (a) the heat transfer structure is in contact with the heat exchange fluid The surface of the surface includes a material that is stable with respect to the heat exchange fluid; (b) the heat transfer body is provided with a heat conductor comprising a material having a thermal conductivity better than that of the heat transfer structure; (c) a heat transfer system It is disposed near the contact surface with the heat exchange fluid and is not in contact with the heat exchange fluid.

(2) The heat exchanger according to (1) above, wherein the heat conductor is a structure having a pin shape. Here, examples of the pin-shaped structure include a cylindrical shape and a polygonal column shape, and the outer surface is also a sawtooth structure.

(3) The heat exchanger according to (1) or (2) above, wherein the heat conductor is a surface having a sawtooth structure.

(4) The heat exchanger according to any one of (1) to (3) above, wherein the contact surface of the heat transfer structure with the heat exchange fluid has a sawtooth structure.

(5) The heat exchanger according to any one of (1) to (4), wherein the flow path of the heat exchange fluid is a folded structure that causes the heat exchange fluid to be fluidized to achieve heat transfer efficiency. .

(6) The heat exchanger according to any one of (1) to (5), wherein the flow path is configured to be variable in caliber and/or full length.

(7) The heat exchanger according to any one of (1) to (6) above wherein the heat exchange fluid is a gas or a liquid.

(8) The heat exchanger according to any one of (1) to (7) above, wherein the material of the heat transfer structure is a resin or a metal.

(9) The heat exchanger according to any one of the above (1) to (8) wherein the heat conductor is a metal having a thermal conductivity higher than that of the heat transfer structure.

(10) A heat exchange method in which a heat transfer structure is brought into contact with a heat exchange fluid and heat exchange type heat exchange is performed by a contact surface of a heat exchange fluid and a heat transfer structure, which is characterized by the following operation And improving the heat transfer efficiency of the heat transfer structure in contact with the heat exchange fluid: (a) the surface of the heat transfer structure and the surface of the contact surface of the heat exchange fluid contain a material that is stable with respect to the heat exchange fluid; b) mounting a heat conductor on the heat transfer structure, the heat conductor comprising a material having a thermal conductivity better than that of the heat transfer structure; (c) the heat transfer system being disposed adjacent to the contact surface with the heat exchange fluid and not Being heated Exchange the location of the fluid contact.

(11) The heat exchange method according to (10) above, wherein the heat conductor is a structure having a pin shape.

(12) The heat exchange method according to (10) or (11) above, wherein the heat conductor is a surface having a sawtooth structure.

(13) The heat exchange method according to any one of (10) to (12) above, wherein the contact surface of the heat transfer structure with the heat exchange fluid has a sawtooth structure.

(14) The heat exchange method according to any one of the above (10) to (13), wherein the flow path of the heat exchange fluid is a folded structure that causes the heat exchange fluid to be fluidized to achieve heat transfer rate efficiency .

(15) The heat exchange method according to any one of (10) to (14) above, wherein the flow path is configured to be variable in caliber and/or full length.

(16) The heat exchange method according to any one of (10) to (15) above, wherein the heat exchange fluid is a gas or a liquid.

(17) The heat exchange method according to any one of (10) to (16) above, wherein the material of the heat transfer structure is a resin or a metal.

(18) The heat exchange method according to any one of the above (10) to (17) wherein the heat conductor is a metal having a thermal conductivity higher than that of the heat transfer structure.

According to the present invention, the effects described below can be exhibited. Since acids and bases react violently with respect to metals, metals cannot be used at the contact portions. Therefore, it is conventionally used for a heat exchanger using a resin in a contact portion, but since the thermal conductivity is low, the thermal efficiency is inferior, and the configuration as a device is also greatly complicated. According to the present invention, it is possible to provide a heat exchanger having a high heat exchange efficiency and a miniaturized structure, and further, since heat is avoided Since the exchanger reacts with a heat exchange fluid such as an acid or an alkali, the temperature adjustment of a high-purity acid, alkali, or the like can be carried out without being contaminated by a trace component. Further, even a substance other than an acid or a base such as high-purity water may be applied regardless of the form such as a liquid or a gas. Furthermore, the present invention can provide a power saving and space saving by using fluid mechanics and thermodynamics and using direct heating, even when the contact portions with the heat exchange fluid are all made of resin, and the conversion efficiency is higher. Good heat exchange technology. Further, even if the contact portion with the fluid to be heated is made to be metal-free and directly exchanges heat, 80% or more of heat exchange capacity can be achieved, and it is considered that the present invention can provide a technique which is self-study. Performance heat exchanger.

1‧‧‧Resin tube

2‧‧‧ heating object entrance

3‧‧‧ Heating object outlet

4‧‧‧Heat media

5‧‧‧heat source

6‧‧‧Heat transfer structure

7‧‧‧Heat exchange fluid flow path

8‧‧‧Connector

9‧‧‧ Air

10‧‧‧Flow Control Machine

11‧‧‧Foaming device for air in water

12‧‧‧ heat exchanger

13‧‧‧Electrical panel temperature control. Measuring device

14‧‧‧Internal temperature measuring device

15‧‧‧Export gas temperature measuring device

51, 51a, 51b‧‧‧ heating plate

52, 52a, 52b‧‧‧ heat transfer plates (heat transfer members)

53, 53a, 53b‧‧‧Insulation materials

54, 54a, 54b‧‧‧ Cooling plate

61‧‧‧Ontology

62, 62a, 62b‧‧‧ heat conductor

63‧‧‧Contact surface

71‧‧‧Bending of the heat exchange fluid flow path

72‧‧‧Returned bend of the heat exchange fluid flow path

73‧‧‧Heat exchange fluid

74‧‧‧ gap

75‧‧‧Export

81‧‧‧inlet connector (inflow port)

82‧‧‧Export connector (outlet)

83, 83a, 83b, 83c‧‧‧ piping

101~104‧‧‧ heat exchanger

105‧‧‧ Heat exchanger with showerhead

106‧‧‧Cooling heat exchanger

110‧‧‧Temperature supply device

111‧‧‧Cooling device

112, 112a, 112b, 113, 113a, 113b‧‧‧ piping

A, B‧‧‧ flow system

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a conventional heat exchange by indirect heating.

Fig. 2 is a schematic view showing a conventional heat exchange by direct heating.

Fig. 3 is a schematic cross-sectional view showing an example of a heat transfer type heat exchanger using a plurality of independent heat conductors.

Fig. 4 is a schematic cross-sectional view showing an example of a heat transfer type heat exchanger in which a plurality of heat conductors and a heat transfer plate are integrated.

Fig. 5 is a schematic cross-sectional view showing an example of a heat transfer type heat exchanger using a heat conductor having a sawtooth surface structure.

Fig. 6 is a schematic cross-sectional view showing an example of a heat transfer type heat exchanger in which a shape of a sawtooth is formed by a flow path of a heat exchange fluid.

Fig. 7 is a view showing a cross-sectional structure of a heat exchanger according to a specific example 1 of the present invention, Fig. 7-1 showing a cross section in a vertical plane (vertical direction), and Fig. 7-2 showing a cross section in a plane (horizontal direction).

Fig. 8 is a view showing the configuration of a device for testing the heat exchange capacity.

Fig. 9 is a diagram for confirming the temperature distribution by the temperature recorder, and the thicker portion indicates that the heat conductor is provided and the temperature rises compared with the surroundings.

Fig. 10 is a graph showing the relationship between the outlet gas temperature and the measured value of the set temperature in the test results.

Figure 11 is a graph comparing the heat exchange capability of the resin of the present invention with the heat exchange capability via heat exchange through the metal face.

Fig. 12 is a schematic cross-sectional view for explaining a sawtooth structure of a flow path of a heat exchange fluid, wherein (a) is a view for explaining a case where the surface area is twice, and (b) is a description for adjusting the pitch depth. Figure.

Fig. 13 is a schematic cross-sectional view showing a change in arrangement of a heat conductor. (a) An arrangement example in which two heat conductors sandwiching a heat exchange fluid flow path are protruded from above. (b) An arrangement example in which two heat conductors sandwiching the heat exchange fluid flow path are protruded from above and below. (c) An arrangement example in which four heat conductors sandwiching the heat exchange fluid flow path are protruded from above and below. (d) In the arrangement example of the heat conductor of (a), a configuration example in which the outer surface of the heat conductor is a sawtooth structure is used. (e) In the arrangement example of the heat conductor of (b), a configuration example in which the outer surface of the heat conductor is a sawtooth structure is used. (f) In the arrangement example of the heat conductor of (c), a configuration example in which the outer surface of the heat conductor is a sawtooth structure is used.

Fig. 14 is a view showing an example of a configuration in which a heat transfer plate and a plurality of heat conductors are integrally formed in Fig. 13; (a) An arrangement example in which two heat conductors sandwiching a heat exchange fluid flow path are protruded from above. (b) An arrangement example in which two heat conductors sandwiching the heat exchange fluid flow path are protruded from above and below. (c) An arrangement example in which four heat conductors sandwiching the heat exchange fluid flow path are protruded from above and below. (d) In the arrangement example of the heat conductor of (a), a configuration example in which the outer surface of the heat conductor is a sawtooth structure is used. (e) In the arrangement example of the heat conductor of (b), a configuration example in which the outer surface of the heat conductor is a sawtooth structure is used. (f) heat is applied to the arrangement of the heat conductor of (c) The outer surface of the conductor is a configuration example of a sawtooth structure.

Fig. 15 is a view for explaining a temperature distribution in a case where heat conductors of different materials are arranged, (a) a plan view and a temperature profile when the same type of heat conductor is disposed, and (b) a different material. Top view and temperature profile for the case of a thermal conductor.

Fig. 16 is a plan view showing a heat exchanger in which heat conductors are disposed at different densities on the upstream side and the downstream side.

Fig. 17 is a view showing a cross-sectional structure of a heat exchanger with a shower head according to the present invention, wherein (a) shows a cross section in a plane (horizontal direction), and (b) shows a cross section in a vertical plane (vertical direction).

Fig. 18 is a side view showing a state in which a heat exchanger shown in Fig. 7 is laminated to form a heat exchanger having a plurality of stages.

Fig. 19 is a view showing the configuration of a temperature adjustment supply device according to a second specific example of the present invention.

The present invention relates to a heat exchanger and a heat exchange method in which heat transfer efficiency in a surface in contact with a heat exchange fluid is improved, the heat exchanger having a passage through which a heat exchange fluid passes, and passing through the passage a heat transfer structure in contact with the heat exchange fluid, and a heat transfer type heat exchanger formed by a contact surface of the heat exchange fluid and the heat transfer structure; wherein: (1) the heat transfer structure is configured The surface of the contact surface of the heat exchange fluid includes a material that is stable with respect to the heat exchange fluid; (2) the heat transfer body is provided with a heat conductor, and the heat conductor includes a material having a thermal conductivity better than that of the heat transfer structure; (3) The heat transfer system is installed in the vicinity of the contact surface with the heat exchange fluid and is not in contact with the heat exchange fluid.

The invention can realize: comprising materials (materials) which do not interact with the heat exchange fluid a heat transfer structure in which a heat conductor including a material having a thermal conductivity higher than that of a heat transfer structure (particularly a portion in contact with a heat exchange fluid) is placed at a position not in contact with a fluid, by heat transfer The structure is heated or cooled to transfer heat from the heat source to the heat exchange fluid, thereby efficiently heating and cooling the fluid.

Generally, a liquid or gas having various characteristics is targeted to a heat exchange fluid that is heated or cooled by a heat exchanger. For example, an aqueous solution of an acid or a base is used for a chemical reaction or an etching treatment, etc., but since these react violently with respect to a metal, in many cases, a metal cannot be used in contact with an acid or a base. The heat exchanger used in the heat exchange of the heat exchange fluid having such reactivity has a resin-based product, but since the thermal conductivity of the resin is low, the heat exchange efficiency is inferior in many cases, and the necessary electric power is also It becomes large and its shape configuration is greatly complicated. The heat exchanger of the present invention adopts a direct heating method, and the surface constituting the contact surface with the heat exchange fluid is not limited as long as it contains a material which is stable with respect to the heat exchange fluid. For example, although the contact portion is entirely resin, It can provide energy-saving and space-saving, heat efficiency of 80% or more with better heat exchange.

[heat exchange fluid]

The heat exchange fluid in the present invention is not particularly limited, and examples thereof include hydrochloric acid, sulfuric acid, nitric acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, fluorinated acid, and boric acid. Examples of the solution or gas such as a corrosive acid, an alkali such as ammonia, potassium hydroxide or sodium hydroxide, and a metal salt such as cerium chloride include high purity water. These heat exchange fluid systems are used as a chemical liquid used in a reaction step with other materials, such as a reaction material or an etching solution, and are used purposefully by a heat exchanger to adjust to a moderate temperature. The heat exchanger of the present invention can be heat-treated in a state of high efficiency and in the absence of contamination of trace impurities. Change fluid for heating, cooling or temperature control.

[heat transfer structure]

The heat transfer structure of the present invention has a surface to be in contact with the heat exchange fluid and a heat conductor. The contact surface of the heat transfer structure in contact with the heat exchange fluid contains a material that is stable with respect to the heat exchange fluid. That is, it is selected that the surface of the heat transfer structure in the temperature region where heat exchange is performed does not react with the material to be exchanged by the heat exchange fluid or the material of the heat transfer structure does not elute from the surface. The reactivity (corrosiveness) of the heat exchange fluid varies depending on the material of the surface of the heat transfer structure, the contact temperature, and the like, and the allowable range of purity after heat exchange varies depending on the use and properties of the heat exchange fluid. Therefore, it cannot be determined by all. For example, since a high-purity substance is used in a metal halide or an etchant used in the manufacture of a semiconductor device, a decrease in purity due to heat exchange treatment is not allowed. However, in the case of a heat exchanger for a turbine, the change in the purity of the heat exchange fluid caused by the heat exchange treatment is not a problem in many cases.

The material (material) which is a member of the surface of the heat transfer structure that is in contact with the heat exchange fluid can be made of a metal such as iron, carbon steel, stainless steel, aluminum or titanium, a synthetic resin such as a fluororesin or a polyester, or a ceramic. It is preferably used in the class or the like, but in the case of heat exchange with a highly corrosive acid, a fluororesin is preferred. Examples of the fluororesin include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), and polychlorotrifluoroethylene. (PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinyl fluoride (PVF), fluorinated polypropylene (FLPP), polyvinylidene fluoride (PVDF) Wait.

The heat transfer structure of the heat exchanger of the present invention has a heat conductor inside, and the heat conductor includes a heat transfer structure (especially with a heat exchange fluid) The material of the touch is a good material and is installed in the vicinity of the contact surface with the heat exchange fluid (by the heat exchange fluid flow path) and not in contact with the heat exchange fluid. The structure of the heat transfer structure will be described with reference to Fig. 3 as an example. The heat exchanger 101 of Fig. 3 includes a heat transfer structure 6 having a body 61, a heat conductor 62, a heating plate 51 serving as a heat source, heat transfer plates 52a and 52b, and a heat exchange fluid flow path 7 from the heating plate 51. Heat is diffused to the heat transfer structure 6 (the body 61 and the heat conductor 62) via the heat transfer plates 52a and 52b. The body 61 and the heat conductor 62 are heated by the heat of diffusion, and heat is heated by the heat exchange fluid passing through the flow path 7 through the contact surface 63. The dotted arrow in Fig. 3 indicates the case where heat is transferred from the body 61. Since the thermal conductivity of the heat conductor 62 is better than that of the body 61, the temperature can be raised faster than the body 61, and heat exchange to the heat exchange fluid can be performed efficiently. The heat conductor 62 is embedded in the body 61 and is in contact with the heat transfer plate 52a or the heating plate 51. For efficient heat exchange, it is preferred that the heat conductor 62 and the flow path 7 are as close as possible. From the viewpoint of the maintenance property, the inner wall surface of the flow path 7 is preferably a flat surface or a curved surface where no unevenness is present, but from the viewpoint of improving heat exchange capability, it is preferably a sawtooth structure.

As shown in FIG. 3, the cylindrical heat conductor 62 can be disposed by being individually inserted into a hole provided in the body 61. Further, as shown in FIG. 4, the heat transfer plate 52 is integrally formed with a plurality of heat conductors 62, and the heat conductor 62 is inserted into a hole provided in the body 61. The installation position and the number of the heat conductors 62 are determined in consideration of the efficiency of heat exchange and the like. Further, the diffusion of heat from the heat conductor 62 can be uniformly and efficiently performed by increasing the surface area of the heat conductor 62. For the enlarged surface area, it is preferable that the outer surface of the heat conductor 62 has a sawtooth structure as shown in FIG. In other words, it is preferable to adopt a structure in which a mountain having a ring shape in the longitudinal direction of the outer surface of the heat conductor 62 is continuous (that is, a structure in which mountains and valleys are alternately continuous). The continuous structure of the Ring Mountain here also includes such as threaded teeth and The case where the teeth and the grooves are formed in a spiral shape like a groove. More preferably, the sawtooth structure is formed such that the surface area of the outer surface of the heat conductor 62 becomes, for example, 1.5 to 3 times the surface area of the outer surface of the cylinder having the same diameter as the mountain (protrusion). The heat conductor 62 having a sawtooth structure is provided when the body 61 is made of a resin, and can be hardened by being placed in a soft state before curing of the resin, or hardened by a drill or the like after the resin is hardened, and the heat conduction of the sawtooth structure is performed. The body is screwed in and the like. When the body 61 is made of metal, the punching process is mainly used.

Fig. 13 is a schematic cross-sectional view showing a change in arrangement of the heat conductor 62. (a) is an arrangement example in which two heat conductors 62 sandwiching the heat exchange fluid flow path 7 are protruded from above. (b) An arrangement example in which two heat conductors 62 sandwiching the heat exchange fluid flow path 7 are protruded from above and below. (c) An arrangement example in which four heat conductors 62 sandwiching the heat exchange fluid flow path 7 are protruded from above and below. (d) In the arrangement example of the heat conductor 62 of (a), a configuration example in which the outer surface of the heat conductor 62 is a sawtooth structure is used. (e) In the arrangement example of the heat conductor 62 of (b), a configuration example in which the outer surface of the heat conductor 62 is a sawtooth structure is used. (f) In the arrangement example of the heat conductor 62 of (c), a configuration example in which the outer surface of the heat conductor 62 is a sawtooth structure is used. In any of the configurations of FIGS. 13(a) to (f), a plurality of heat conductors 62 are sandwiched by the heat exchange fluid flow path 7 and disposed opposite to each other.

In any of the configurations of FIGS. 13(a) to (f), the heating plates 51a and 51b, the heat transfer plates 52a and 52b, the main body 61, and the heat exchange fluid flow path 7 are provided. These elements have the same configuration as the heat exchanger 101 of FIGS. 3 and 5 except that the heating plate has two sheets, and thus the description thereof is omitted. Further, in FIGS. 13(a) and (d), the lower heating plate 51b may not be provided.

Fig. 14 is a view showing an example of a configuration in which the heat transfer plate 52 and the plurality of heat conductors 62 are integrally formed in Fig. 13 . In any of the configurations of FIGS. 14(a) to (f), the plurality of heat conductors 62 are sandwiched by the heat exchange fluid flow path 7 and disposed opposite to each other. In addition to the heat transfer plate 52 and a plurality of The heat conductors 62 are formed in the same manner as those of FIGS. 4 and 13 except that they are integrally formed, and thus the description thereof is omitted.

Fig. 15 is a view for explaining a temperature distribution in a case where heat conductors of different materials are arranged, (a) a plan view and a temperature profile when the same type of heat conductor 62 is disposed, and (b) a different material. The top view and temperature profile of the case of the thermal conductor 62. In any of the heat exchangers 104 of FIGS. 15(a) and 15(b), 135 mountings for inserting the heat conductor 62 are provided at substantially equal intervals between the heat transfer plate 52 and the body 61 (not shown). hole. Each of the heat conductors 62 is detachably attached to the mounting holes of the heat transfer plates 52 and the main body 61. For example, each of the heat conductors 62 may be formed by a flat head screw and screwed into the mounting hole. A plurality of heat conductors 62 including a plurality of materials may be combined to form a plurality of heat conductors 62. By combining the heat conductors 62 including a plurality of materials, the temperature distribution unevenness generated on the upstream side and the downstream side of the flow path 7 can be eliminated. Further, by disposing the heat conductor 62 including the expensive material only at a necessary position and arranging the heat conductor 62 including an inexpensive material at other positions, the manufacturing cost can be reduced.

In Fig. 15(a), all of the heat conductors 62 are made of aluminum pins, and in Fig. 15(b), the heat conductors 62 from the left to the fifth row are formed of pins made of aluminum, and the number of copper pins is from the left. The heat conductor 62 after the sixth row. That is, 135 aluminum pins are provided as the heat conductor 62 in Fig. 15(a), and 45 copper pins are mounted on the upstream side of the heat conductor 62 in Fig. 15(b), and aluminum pins are mounted on the downstream side. . The right diagrams of Figs. 15(a) and 15(b) are diagrams showing temperature distribution images. In Fig. 15 (a), the left half portion is relatively low temperature, and the right half portion is relatively high temperature. In contrast, in Fig. 15 (b), temperature distribution unevenness is substantially eliminated. By disposing the heat conductor 62 including the material having a high thermal conductivity on the upstream side and the heat conductor 62 including the material having a relatively low thermal conductivity on the downstream side, the temperature distribution on the upstream side and the downstream side can be reduced. Uneven. Moreover, by reducing the uneven temperature distribution, the body can be suppressed, The deformation of the heat transfer plate and the like can prevent the short life of the heater. Further, it is conventionally known that when a temperature difference (ΔT) when passing through an inflow port and a temperature difference (ΔT) passing through the outflow port become large, a heat-denatured fluid is generated, and it is necessary to reduce the output and heat so that ΔT does not become large. However, according to the heat exchanger of the present invention which lowers the temperature distribution unevenness, high-efficiency heat exchange can be performed.

Fig. 16 is a plan view showing the heat exchanger 104 in which the heat conductors 62 are disposed at different densities on the upstream side and the downstream side. The heat exchanger 104 is composed of an aluminum pin and constitutes all of the heat conductors 62. The heat transfer plate 52, the body 61 and the like have the same configuration as the heat exchanger 104 of Fig. 15 . In Fig. 16, nine heat conductors 62 are arranged in the vertical direction from the left to the fifth row, and four or five heat conductors 62 are arranged in the vertical direction from the sixth to fifteenth rows from the left. In this manner, the heat conductor 62 is disposed at a high density on the upstream side, and the heat conductor 62 is disposed at a low density on the downstream side, whereby the temperature distribution unevenness on the upstream side and the downstream side can be reduced. Further, in the heat exchanger 104 of Fig. 16, the heat conductors 62 including materials having different thermal conductivities may be disposed on the upstream side and the downstream side to more precisely adjust the temperature distribution unevenness on the upstream side and the downstream side.

Fig. 17 is a view showing a cross-sectional structure of a heat exchanger 105 with a shower head, wherein (a) shows a cross section in a plane (horizontal direction), and (b) shows a cross section in a vertical plane (vertical direction). The heat exchanger 105 with a shower head includes a heating plate 51, a heat transfer plate 52, a plurality of heat conductors 62, and a body 61 having a heat exchange fluid flow path 7, and the body 61 is formed with a flow path. A large number of 7 connected outlets 75. The heat exchanger 105 with the shower head has two inflow ports 83a and 83b, and is heated by the heat exchange fluid 73 from the inflow port 7 and is discharged from the discharge port 75. In other words, in the heat exchanger 105 with the shower head, the discharge port 75 that communicates with the outside becomes an outflow port. Similarly to FIG. 15(b), the plurality of heat conductors 62 include a pin member made of copper disposed on the upstream side of the inflow ports 83a and 83b, and a pin member made of aluminum disposed on the downstream side so as to extend over the flow path. The temperature distribution of 7 is the lowest The way of the limit. In other words, a pin member made of copper is mainly disposed on the side closer to the left and right sides, and a pin member made of aluminum is mainly disposed at the center portion. Further, a plurality of curved portions 71 are provided in the flow path 7, and in the curved portion 71, the heat exchange fluid collides with the flow path walls to cause turbulent flow, thereby eliminating uneven heating. Therefore, each of the plurality of discharge ports 75 discharges a fluid having substantially the same temperature. Further, although the heat exchanger 105 with the shower head is mainly used for the gas shower of the gas to be discharged, there is also a case where the liquid is discharged. The heat exchanger 105 with the shower head may also be provided with one or a plurality of non-clustered head heat exchangers in the upper stage and the two flow inlets of the heat exchanger 105 and the upper heat exchanger by the branch piping. The outflow port is connected to each other and has a multi-stage configuration (see FIG. 18 below).

Fig. 6 is a cross-sectional view showing the main part of a cylindrical heat exchanger 102 embodying the present invention. The heat transfer structure 6 including the heat conductor 62 and the body 61 is provided on the inner surface of the cylindrical heat source 5. The heat conductor 62 is in contact with the flow path side on the surface having the zigzag shape, and the flat surface is in contact with the heat source 5. The body 61 covers the surface of the heat conductor 62 and forms a flow path 7 to be in contact with the heat exchange fluid. Here, the body 61 is preferably a film formed on the surface of the heat conductor 62, and the surface in contact with the heat exchange fluid is preferably in the same zigzag shape as the heat conductor 62. The heat exchange efficiency of the surface is improved by setting the zigzag shape of the contact surface area.

Fig. 12 is a schematic cross-sectional view for explaining a sawtooth structure of a flow path of a heat exchange fluid, wherein (a) is a view for making a surface area twice, and (b) is for adjusting a pitch depth. Figure. Fig. 12 (a) shows an example in which the inner side surface of the heat transfer structure 6 which is in contact with the heat exchange fluid 73 is a zigzag structure in which the equilateral triangle is one side and 2 mm in cross section. In other words, the inner side surface of the heat transfer structure 6 has a structure in which the mountain in the longitudinal direction is continuous. According to the sawtooth structure, the surface area of the inner side surface of the heat transfer structure 6 is twice as large as the flat inner side surface of the non-serrated structure, so that heat exchange efficiency can be achieved. The rate doubled. The sawtooth structure of the heat transfer structure 6 is not limited to that shown in FIG. 12, and it is disclosed that the surface area of the inner side surface of the heat transfer structure 6 is formed to have a sawtooth structure, for example, 1.5 to 3 times.

Although the surface area of the inner side surface of the heat transfer structure 6 is increased, the heat exchange efficiency is improved. However, depending on the flow rate and viscosity of the heat exchange fluid 73, the surface area may be arbitrarily increased. The left diagram of Fig. 12(b) shows a state in which a gap 74 is formed between the inner side surface of the heat transfer structure 6 and the fluid 73. In this state, since the inner side surface of the heat transfer structure 6 generates a non-contact portion with the fluid 73, the heat exchange efficiency is lowered. Therefore, in the case where the occurrence of the non-contact portion caused by the void 74 is foreseen, it is necessary to adjust in such a manner that the non-contact portion is not generated by increasing the distance (groove) between the sawtooth structures. The cylindrical heat exchanger 102 can also be detachably constructed, and a plurality of cylindrical heat exchangers 102 having different pitches can be prepared.

[The distance between the material of the heat conductor and the heat exchange fluid]

The thermal conductor 62 is made of a material having a thermal conductivity higher than that of the main body 61. However, the term "good thermal conductivity" refers to the comparison of the relative values of the materials of the two materials, and is not specific to an absolute value. For example, the thermal conductivity is about 0.2 W/m in plastic. K generally shows a value of about 0.25 for fluororesin, about 47 for carbon steel, about 15, for stainless steel, 237 for aluminum, 386 for pure copper, and PYREX glass (PYREX: registered trademark). It is only necessary to select a material from these in consideration of the relative thermal conductivity. Since the fluororesin has a low value among these, when a fluororesin is used as the body 61, any one of the materials is used as the heat conductor. Improve thermal efficiency. Further, when the material of the heat transfer structure 6 (body 61) is made of metal, for example, when stainless steel is used as the body, the heat conductor may select a metal having a better thermal conductivity than the heat transfer structure 6 (body 61). For example, carbon steel, aluminum, and pure copper are used as heat conductors. but Therefore, the material (material) of the heat conductor is preferably the higher the thermal conductivity.

For example, a heat exchanger in which the contact surface 63 of the heat exchange fluid and the heat transfer structure 6 is coated with a fluororesin and the body 61 is made of stainless steel is known, and a stainless steel of 8 mm thick is applied and a fluororesin is used. In the example in which the total heat transfer coefficient of the corrosion-resistant coated sheet was measured, it was 1070 W/m ² in the case of only stainless steel. On the other hand, when a corrosion-resistant coating of 500 μm is provided, the coefficient is 291 and the amount of heat transfer is 1/3. Further, the report has a heat transfer coefficient of 845 when a 50 μm corrosion resistant coating is provided. Therefore, the distance between the heat conductor and the heat exchange fluid is preferably as close as possible.

[Specific example 1 of heat exchanger]

Specifically, the structure of the heat exchanger of Specific Example 1 of the present invention is shown. The heat exchanger 103 shown in Fig. 7 includes a rectangular parallelepiped of 150 mm × 195 mm × 34 mm in height, and is exchanged by a heat exchange fluid system by a flow path 7 through a heat exchange fluid, and the flow path 7 of the heat exchange fluid is There are a large number of bending points (bending portions) 71, 72 between the inlet connector (inflow port) 81 and the outlet from the outlet connector (flow port) 82. The flow path 7 is provided by forming a groove-like space by the body 61 including the block containing the fluororesin. 172 heat conductors 62 are provided on both sides of the flow path 7 at intervals of 600 μm. The heat conductor 62 includes a countersunk head screw (head flat screw) made of copper having a diameter of 3 mm and a length of 18 mm and fixed to the hole of the body 61 provided in the heat transfer structure by the heat transfer plate 52a. Since the upper surface of the screw is flat, the upper surface of the heat transfer plate 52a can be made the same plane. The main body portion of the screw forming the groove is preferably a cylindrical shape having the same diameter as the non-front end. By using standard screws for the heat conductor 62, the manufacturing cost of the heat exchanger can be significantly reduced. For example, a case where a screw having an M3 × 20 mm pitch of 0.5 mm (copper) and a pitch of M4 × 12 mm of 0.7 mm (aluminum) using a screw as a JIS standard is disclosed.

The heat source (not shown) is provided in contact with the region of the heat transfer plate 52a where at least the heat conductor 62 is provided. The heat source is preferably provided in contact with both surfaces of the heat transfer plates 52a and 52b. As the heat source, for example, a stainless steel plate having a heater capacity of 1600 W and a nichrome wire as a heat source, and a mica plate having a heater capacity of 4000 W and a nickel alloy as a heat source can be exemplified. The exposed surface of the heat source is preferably covered with a heat insulating material, and more preferably covers the entire outer surface of the heat exchanger 103 with a heat insulating material. The heat transfer plate 52b is physically coupled to the heat transfer plate 52a, and heat from the heat source is transmitted to the heat conductor 62 and the body 61 via the heat transfer plates 52a and 52b. In the configuration example of Fig. 7, the heat transfer plate 52a is an upper surface, and the heat transfer plate 52b is a bottom surface, and includes a hollow rectangular parallelepiped structure that connects the casings. The heat transfer plates 52a and 52b (and the casing) may be made of the same material as the heat conductor 62, or may be made of a material having a thermal conductivity higher than that of the heat conductor 62.

Since the interval between the heat conductor 62 and the flow path 7 (by the heat exchange fluid) is close to 600 μm, heat conduction is good. The flow path 7 through which the heat exchange fluid passes is a width of 6 mm, a depth of 20 mm, and a length of 1795 mm, and has several bending points (bending portions) in the middle. In order to increase the bending portion, it is preferable to provide not only a curved portion that rotates the flow path in the forward direction by 180 degrees, but also a curved portion that turns the flow path forward in the forward direction. In other words, in the configuration example of FIG. 7, the two curved flow systems of A and B are formed by bending the curved portion 72 which is rotated by 90 degrees toward the inlet side (IN direction) in the flow path forward direction, thereby bending The ministry has increased. The flow path system is not limited to two in Fig. 7, and may be three or more. In the bending point (bending portion), the heat exchange fluid flowing through the flow path collides with the flow path wall to form a turbulent flow, so that heat exchange in the flow path wall (contact surface) becomes efficient. Further, it is preferable to provide a plurality of heat conductors between the two flow paths 7 arranged in parallel. Here, the two parallel flow paths mean, for example, a configuration in which two flow paths are attached as shown in FIG. 7 with symbols 7 and 7. In other respects, it is preferable that the flow path 7 is bent to pass through the gap of the heat conductor 62 disposed at substantially equal intervals. The way to set it.

The heat exchange efficiency can be improved by combining the plurality of heat exchangers 103 of the present invention shown in Fig. 7 by means of connectors 81, 82. Further, the position of the heat conductor 62 and the number of layers to be placed can be set while actually studying the efficiency of heat exchange, and the temperature of the heat exchange fluid can be made lower than the predetermined temperature. The machining is performed in such a manner that the heat conduction body 62 is provided by repositioning the installation hole of the heat conductor 62.

Fig. 18 is a side view showing a state in which a heat exchanger 103 shown in Fig. 7 is laminated to form a heat exchanger having a plurality of stages. The inlet connector 81 of the upper heat exchanger 103 and the outlet connector 82 which is the lower stage are connected by the pipes 83a to 83c, thereby forming a multi-stage configuration. Although the configuration of Fig. 18 is a four-stage configuration, the configuration is not limited thereto, and any number of stages can be obtained as long as it is two or more. In the case where the heat exchanger is configured in a plurality of stages in this manner, in the heat exchanger other than the lowermost layer, the flow path 7 is heated not only from the heat source located above but also from the heat source located below. That is, in the example of Fig. 18, the heat transfer plate 52b is also heated from a heat source (heating plate) located below it. In the case of a multi-stage configuration, the surface which becomes the layer is not covered by the heat insulating material, and the heat source located in the lower stage is in direct contact with the heat transfer plate located in the upper stage. As described above, in the heat exchanger of the present invention, the length of the flow path can be easily extended by the multi-stage configuration. Further, in the heat exchanger of the present invention, the internal structure is not changed according to the flow rate of the heat exchange fluid, and the flow rate from the large flow rate to the small flow rate can be handled by changing the size and total length of the flow path. For example, when heat conversion is performed at a flow rate of 10 L/min or less in terms of nitrogen gas, even if the body size is 1/2, a heat exchange performance of 80% or more can be obtained. When heat exchange is performed for a flow rate of 50 L/min or more, it can be handled by increasing the size of the body.

[Specific example 2 of heat exchanger]

Fig. 19 is a view showing the configuration of a temperature adjustment supply device 110 according to a second specific example of the present invention. The temperature adjustment supply device 110 is configured to include a cooling heat exchanger 106, a cooling device 111, and pipes 112a, 112b and 113a and 113b. The cooling heat exchanger 106 is configured to include a heat transfer structure 6 and cooling plates 54a and 54b. The heat transfer structure 6 can be the same as the heat exchangers 101 to 104. The inside of the cooling plates 54a, 54b is filled with a flow path for circulating refrigerant. The refrigerant is, for example, an antifreeze or a gas refrigerant. The refrigerant that has been cooled by the cooling device 111 is supplied to the cooling heat exchanger 106 through the pipe 112a, absorbs heat when passing through the cooling heat exchanger 106, returns to the cooling device 111 through the pipe 112b, and is again supplied to the cooling through the pipe 112a. A heat exchanger 106 is used. The heat exchange fluid 73 (for example, pure water) is supplied from the piping 113a to the cooling heat exchanger 106, is cooled when passing through the cooling heat exchanger 106, and is discharged from the piping 113b.

Hereinafter, specific examples of the present invention are described as examples, but the examples are specific examples, and thus the present invention is not limited by the examples.

[Example 1]

The heat exchanger 12 having the same configuration as the heat exchanger 103 of Fig. 7 described in the specific example of the heat exchanger described above was used to confirm that the heat exchange efficiency was improved according to the present invention. The test was carried out using the configuration of the apparatus shown in FIG. The air 9 that controls the flow rate thereof by the flow controller 10 contains water in the bubbling device 11 and then passes through the heat exchanger 12. The heat exchanger 12 is provided with an electric panel temperature control device 13, a PFA (Tetrafluoroetylene-Perfluoroalkylvinylether Copolymer) internal temperature measuring device 14, and an outlet gas temperature measuring device 15 to monitor heat exchange. . Further, the temperature distribution of the surface of the body 61 was measured using a temperature recorder. The measurement results by the temperature recorder are shown in Fig. 9. In the figure, the part with a stronger color is higher in temperature. In the portion, it has been confirmed that the portion where the temperature is higher coincides with the position at which the heat conductor 62 is disposed. Further, it is understood that the temperature distribution of the entire heat exchanger can be uniformly heated without deviation.

[Embodiment 2]

In this example, the same apparatus as in Example 1 was used, and the outlet temperature was measured by conducting a test in a wide range of a set temperature of 40 to 160 ° C and a flow rate of 10 to 50 L/min. The results are shown in Fig. 10. It has been clarified that the heat conversion rate is 80% or more in the range of the set temperature and the flow rate. It has been clarified that the heat exchanger of the present invention is capable of flexibly coping with a wide range of flows with the same apparatus.

[Example 3]

In the present embodiment, the electrothermal panel used in Example 1 was used to compare the performance of the heat exchanger of the present invention via heat transfer of a resin with a heat exchange fluid with a conventional heat exchanger via stainless steel. In the present invention, heat exchange is performed on the humidified air in the same manner as in the first embodiment. On the other hand, conventional heat exchangers exchange heat with dry nitrogen. The result is shown in FIG. The metal 30L is a measurement result of a heat exchanger using stainless steel, and the resin 30L is a measurement result of the heat exchanger of the present invention. As can be seen from Fig. 11, although the contact portion of the heat exchanger of the present invention is made of a resin, it exhibits performance equivalent to that of a conventional stainless steel product. Further, in the heat exchanger of the present invention, the test for the mist of H ₂ O is carried out, and the conventional product is made of dry nitrogen. Since the air containing the mist of water must cope with the heat of latent heat of water, it is understood that the present invention is higher than the high performance represented by the following formula 11.

(industrial availability)

The heat exchanger of the present invention is excellent in heat exchange property and can prevent corrosion of a heat exchanger caused by a heat exchange fluid and contamination by a heat exchange fluid accompanying corrosion, and can prevent corrosive chemicals and high-purity substances. Reduced purity and efficient Heat exchange performs heating, cooling, and temperature control. For example, it is useful for heating and cooling a drug used in a process for manufacturing a semiconductor material that processes a high-purity substance. The heat exchanger and the heat exchange method of the invention can be widely used as heating for chemical, pharmaceutical, food, fiber, electric power, nuclear energy industries, etc., requiring purity and corrosion resistance of the product. Evaporation device, cooling. High efficiency heat exchanger such as condensing unit.

6‧‧‧Heat transfer structure

7‧‧‧Heat exchange fluid flow path

51‧‧‧heating plate

52a‧‧‧ Heat transfer plate (heat transfer member)

52b‧‧‧heat transfer plate (heat transfer member)

61‧‧‧Ontology

62‧‧‧heat conductor

63‧‧‧Contact surface

101‧‧‧ heat exchanger

Claims (24)

A heat exchanger comprising a heat source, a heat transfer structure in contact with the heat exchange fluid, and a heat transfer member that transfers heat from the heat source to the heat transfer structure, and is configured by the heat exchange fluid and the heat transfer structure a heat transfer type heat exchanger formed by the contact surface of the body; the heat transfer structure system includes a body having an inflow port, an outflow port, and a heat exchange fluid flow path, and a plurality of heat conductors mounted on the body; The inner wall surface of the heat exchange fluid flow path with the contact surface of the heat exchange fluid is formed by a material which is stable with respect to the heat exchange fluid; the heat conduction system is formed of a material having a thermal conductivity better than that of the body material; heat conduction The system is installed in the vicinity of the flow path of the heat exchange fluid and is not in contact with the heat exchange fluid. A heat exchanger according to claim 1, wherein the plurality of heat conductors comprise a plurality of heat conductors disposed opposite to each other by the heat exchange fluid flow path. The heat exchanger according to claim 1 or 2, wherein the heat transfer member is formed by two heat transfer members that sandwich the body, and one or more heat conductors extend from each of the two heat transfer members. . A heat exchanger according to claim 1 or 2, wherein the heat conductor is a pin-shaped structure. A heat exchanger according to claim 4, wherein at least a part of the plurality of heat conductors are integrally formed with the plate-shaped heat transfer member. A heat exchanger according to claim 4, wherein at least a part of the plurality of heat conductors has a side surface having a sawtooth configuration. For example, in the heat exchanger of claim 6 of the patent scope, the surface area of the outer side is 1.5 to 3 times the sawtooth structure in the case where there is no outer side of the convex portion. A heat exchanger according to claim 6 wherein the heat conductor having the outer side of the sawtooth structure is a screw. A heat exchanger according to claim 8 wherein the heat conductor having the outer side of the sawtooth structure is a flat head screw. A heat exchanger according to claim 1 or 2, wherein the heat exchange fluid flow path has a plurality of curved portions. The heat exchanger according to claim 10, wherein the heat exchange fluid flow path has a folded back portion that is directionally shifted toward the inlet side. The heat exchanger according to claim 1 or 2, wherein at least a part of the heat conductor disposed on a side closer to the inlet is thermally conductive than a heat conductor disposed on a side farther from the inlet. A heat conductor formed by a higher rate material. The heat exchanger according to claim 1 or 2, wherein the number of the heat conductors on the side closer to the inlet is larger than that on the side farther from the inlet, and is disposed at a high density. The heat exchanger of claim 12, wherein the outflow port is a spout outlet that communicates with the outside. A heat exchanger formed by laminating a plurality of heat exchangers of claim 1 or 2. The heat exchanger according to claim 1 or 2, wherein the inner wall surface of the heat exchange fluid flow path is a resin. The heat exchanger according to claim 1 or 2, wherein the inner wall surface of the heat exchange fluid flow path is metal or carbon. A heat exchanger according to claim 1 or 2, wherein a plurality of heat exchanger packages A heat conductor formed of copper and a heat conductor formed of aluminum are included. A heat exchanger according to claim 1 or 2, wherein the heat source is a heat source. A heat exchanger according to claim 1 or 2, wherein the heat source is a heat absorbing source. A heat exchange method for performing heat transfer type heat exchange with a fluid using the heat exchanger of claim 1 or 2. A heat exchange method for heat transfer type heat exchange with a fluid using the heat exchanger of claim 12; and disposed on a side closer to the flow inlet than to the side of the flow inlet Compared with a heat conductor formed of a material having a relatively high thermal conductivity, a heat conductor formed of a material having a relatively low thermal conductivity is disposed on a side farther from the inlet than a side closer to the inlet. Thereby, the unevenness of the temperature distribution generated on the upstream side and the downstream side of the heat exchange fluid flow path is suppressed. A heat exchange method for heat transfer type heat exchange with a fluid using the heat exchanger of claim 13; and disposed on a side closer to the flow inlet than to the side of the flow inlet Compared with a heat conductor formed of a material having a relatively high thermal conductivity, a heat conductor formed of a material having a relatively low thermal conductivity is disposed on a side farther from the inlet than a side closer to the inlet. Thereby, the unevenness of the temperature distribution generated on the upstream side and the downstream side of the heat exchange fluid flow path is suppressed. A heat exchange method for performing heat transfer type heat exchange with a corrosive fluid using the heat exchanger of claim 16 of the patent application.