JP4699964B2 - Heat exchanger for chemicals - Google Patents

Heat exchanger for chemicals Download PDF

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JP4699964B2
JP4699964B2 JP2006242884A JP2006242884A JP4699964B2 JP 4699964 B2 JP4699964 B2 JP 4699964B2 JP 2006242884 A JP2006242884 A JP 2006242884A JP 2006242884 A JP2006242884 A JP 2006242884A JP 4699964 B2 JP4699964 B2 JP 4699964B2
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heat
heat exchange
heat transfer
block
transfer block
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JP2008064383A (en
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浩幸 村石
文彦 小山
知仁 安井
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Orion Machinery Co Ltd
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Orion Machinery Co Ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/06Constructions of heat-exchange apparatus characterised by the selection of particular materials of plastics material
    • F28F21/062Constructions of heat-exchange apparatus characterised by the selection of particular materials of plastics material the heat-exchange apparatus employing tubular conduits
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/08Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag
    • F28D7/082Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag with serpentine or zig-zag configuration
    • F28D7/085Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag with serpentine or zig-zag configuration in the form of parallel conduits coupled by bent portions
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00Tubular elements; Assemblies of tubular elements
    • F28F1/10Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
    • F28F1/12Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element
    • F28F1/14Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and extending longitudinally
    • F28F1/22Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and extending longitudinally the means having portions engaging further tubular elements

Description

本発明は、伝熱ブロック内に埋設して内部に流通する薬液に対して熱交換を行う熱交換管を備える薬液用熱交換装置に関する。   The present invention relates to a chemical liquid heat exchange device including a heat exchange pipe that performs heat exchange with respect to a chemical liquid that is embedded in a heat transfer block and circulates inside the heat transfer block.

従来、外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材により形成した伝熱ブロック及びこの伝熱ブロック内に埋設して内部に流通する薬液に対して熱交換を行う熱交換管を備える薬液用熱交換装置は知られており、既に、本出願人もこの種の薬液用熱交換装置に用いて好適な薬液温度調節用熱交換器を、特開平8−193766号公報により提案した。   Conventionally, heat exchange is performed with respect to a heat transfer block formed of a heat transfer material having heat transfer properties in which a heat exchange surface formed on the outer surface is cooled or heated, and a chemical solution embedded in the heat transfer block and distributed inside. A heat exchanger for a chemical solution provided with a heat exchange pipe is known, and the applicant of the present invention has already proposed a heat exchanger for adjusting the temperature of a chemical solution suitable for this kind of heat exchanger for a chemical solution, as disclosed in JP-A-8-193766. Proposed by the gazette.

この薬液温度調節用熱交換器(薬液用熱交換装置)は、熱電変換素子を挟んで、その両側に、熱良導性素材から成る伝熱ブロック体と放熱体とを、熱電変換素子と熱授受可能に配設し、伝熱ブロック体には、複数のフッ素樹脂製薬液導管を伝熱ブロック体と熱授受可能に貫通して設けて、薬液導管の一側開口を、温度調節すべき薬液の流入口を持つ薬液分流室に連通させるとともに、薬液導管の他側開口を、薬液の流出口を備えた薬液合流室に連通させ、放熱体には、冷却液流路を設けたものである。
特開平8−193766号
This chemical solution temperature control heat exchanger (chemical solution heat exchange device) has a thermoelectric conversion element sandwiched between both sides, and a heat transfer block body and a heat radiator made of a heat-conducting material on both sides. The heat transfer block body is provided with a plurality of fluororesin pharmaceutical liquid conduits penetrating the heat transfer block body so as to be able to transfer heat, and the one side opening of the chemical liquid conduit is the temperature of the chemical liquid whose temperature is to be adjusted. The other side opening of the chemical solution conduit is communicated with the chemical solution merge chamber provided with the chemical solution outlet, and the radiator is provided with a cooling liquid flow path. .
JP-A-8-193766

しかし、上述した従来の薬液用熱交換装置(薬液温度調節用熱交換器)は、次のような問題点があった。   However, the above-described conventional heat exchanger for chemical liquid (heat exchanger for adjusting chemical liquid temperature) has the following problems.

第一に、複数(8本程度)のフッ素樹脂製薬液導管を、薬液流入側の薬液分流室及び薬液流出側の薬液合流室に接合する構成のため、部品点数の増加を招くとともに、製造工程の煩雑化、更には製造工数の増加を招く。したがって、熱交換装置における小型コンパクト化の阻害要因となるとともに、部品コスト及び製造コストに係わるコストアップ要因となる。   First, because the configuration is such that multiple (about 8) fluororesin pharmaceutical fluid conduits are joined to the chemical flow inflow chamber and the chemical flow outflow chamber, the manufacturing process increases. Complicating and further increasing the number of manufacturing steps. Therefore, it becomes an obstacle to miniaturization and miniaturization in the heat exchange device, and an increase factor related to the component cost and the manufacturing cost.

第二に、伝熱ブロック体に薬液導管を貫通して設けることに伴う接触熱抵抗が発生するとともに、薬液導管の流出側に薬液合流室を追加することに伴う外乱影響要因が発生する。したがって、熱交換装置における熱交換効率の無視できない低下要因となり、熱交換効率を高めるにも限界がある。   Secondly, a contact thermal resistance is generated due to the penetration of the chemical conduit in the heat transfer block body, and a disturbance influence factor is generated due to the addition of the chemical confluence chamber on the outflow side of the chemical conduit. Therefore, the heat exchange efficiency in the heat exchange device is a factor that cannot be ignored, and there is a limit to increasing the heat exchange efficiency.

本発明は、このような背景技術に存在する課題を解決した薬液用熱交換装置の提供を目的とするものである。   An object of the present invention is to provide a heat exchanger for chemicals that solves the problems existing in the background art.

本発明に係る薬液用熱交換装置1は、上述した課題を解決するため、外面に形成した熱交換面Cu,Cdが冷却又は加熱される伝熱性を有する伝熱材Sにより形成した伝熱ブロック2及びこの伝熱ブロック2内に埋設して内部に流通する薬液Lに対して熱交換を行う熱交換管3を備える薬液用熱交換装置であって、フッソ系樹脂素材Fにより形成した熱交換管3を所定間隔おきに順次湾曲することによりジグザグ状の流通経路Rgを設けた熱交換管ユニットUと、この熱交換管ユニットUの一部又は全部を内部に埋設した伝熱ブロック2と、伝熱ブロック2の熱交換面Cu,Cdに付設したサーモモジュール21u…,21d…と、このサーモモジュール21u…,21d…の放熱面に付設した冷却部22u,22dと、サーモモジュール21u…,21d…を伝熱ブロック2及び冷却部22u,22dにより加圧し、かつサーモモジュール21u…,21d…の端辺を規制する位置に配した、スプリング及びボルトナットを用いた複数の加圧部31…と、を備えてなることを特徴とする。   In order to solve the above-described problem, the chemical liquid heat exchange device 1 according to the present invention is formed by a heat transfer block S formed of a heat transfer material S having heat transfer properties in which heat exchange surfaces Cu and Cd formed on the outer surface are cooled or heated. 2 and a heat exchange device for a chemical solution provided with a heat exchange pipe 3 for exchanging heat with respect to the chemical solution L embedded in the heat transfer block 2 and distributed in the heat transfer block 2. A heat exchange pipe unit U provided with a zigzag flow path Rg by sequentially bending the pipe 3 at predetermined intervals, and a heat transfer block 2 in which a part or all of the heat exchange pipe unit U is embedded, The thermo modules 21u ..., 21d ... attached to the heat exchange surfaces Cu, Cd of the heat transfer block 2, the cooling units 22u, 22d attached to the heat radiation surfaces of the thermo modules 21u, ..., 21d, and the thermo module 2 .., 21d... are pressed by the heat transfer block 2 and the cooling units 22u, 22d, and a plurality of pressurizations using springs and bolts and nuts arranged at positions where the end sides of the thermo modules 21u. Units 31... Are provided.

一方、本発明の他の形態に係る薬液用熱交換装置1は、上述した課題を解決するため、外面に形成した熱交換面Cu,Cdが冷却又は加熱される伝熱性を有する伝熱材Sにより形成した伝熱ブロック2及びこの伝熱ブロック2内に埋設して内部に流通する薬液Lに対して熱交換を行う熱交換管3を備える薬液用熱交換装置であって、フッソ系樹脂素材Fにより形成した熱交換管3を所定間隔おきに順次湾曲することによりジグザグ状の流通経路Rgを設けた熱交換管ユニットUと、この熱交換管ユニットUの一部又は全部を内部に埋設した伝熱ブロック2と、伝熱ブロック2の熱交換面Cu,Cdに付設したサーモモジュール21u…,21d…と、このサーモモジュール21u…,21d…の放熱面に付設した冷却部22u,22dと、サーモモジュール21u…,21d…を伝熱ブロック2及び冷却部22u,22dにより加圧し、かつサーモモジュール21u…,21d…の端辺を規制する位置に配した、スプリング及びボルトナットを用いた複数の加圧部31…と、熱交換管ユニットUの上流側に接続した、薬液Lを循環させる送液ポンプ13と、を備えてなることを特徴とする。   On the other hand, in order to solve the above-described problems, the chemical heat exchange device 1 according to another embodiment of the present invention has a heat transfer material S having a heat transfer property in which the heat exchange surfaces Cu and Cd formed on the outer surface are cooled or heated. A heat exchanger for a chemical solution comprising the heat transfer block 2 formed by the above and a heat exchange pipe 3 for exchanging heat with respect to the chemical solution L embedded in the heat transfer block 2 and circulated in the heat transfer block 2. A heat exchange pipe unit U provided with a zigzag flow path Rg by sequentially bending the heat exchange pipe 3 formed by F at predetermined intervals, and a part or all of the heat exchange pipe unit U was embedded inside. The heat transfer block 2, the thermo modules 21u... 21d attached to the heat exchange surfaces Cu and Cd of the heat transfer block 2, and the cooling units 22u and 22d attached to the heat dissipation surfaces of the thermo modules 21u. S A plurality of modules using springs and bolts and nuts that are pressed by the heat transfer block 2 and the cooling sections 22u, 22d and arranged at positions where the end sides of the thermo modules 21u, 21d,. It is characterized by comprising pressurization units 31 and a liquid feed pump 13 connected to the upstream side of the heat exchange pipe unit U for circulating the chemical liquid L.

いずれの場合も、発明の好適な態様により、熱交換管ユニットUにおける少なくとも非直線部Ue…は、断熱性を有する断熱材Mにより形成した断熱ブロック11a,11bにより覆うことができる。また、熱交換管ユニットUにおける少なくとも非直線部Ue…は、外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材Sにより形成した伝熱補助ブロック12a,12bにより覆うこともできる。   In any case, according to a preferred aspect of the invention, at least the non-linear portions Ue... In the heat exchange pipe unit U can be covered with the heat insulating blocks 11a and 11b formed by the heat insulating material M having heat insulating properties. Further, at least the non-linear portion Ue... In the heat exchange pipe unit U is covered with heat transfer auxiliary blocks 12a and 12b formed by a heat transfer material S having a heat transfer property in which a heat exchange surface formed on the outer surface is cooled or heated. You can also.

このような構成を有する本発明に係る薬液用熱交換装置1によれば、次のような顕著な効果を奏する。   According to the chemical liquid heat exchange device 1 according to the present invention having such a configuration, the following remarkable effects can be obtained.

(1) フッソ系樹脂素材Fにより形成した熱交換管3を所定間隔おきに順次湾曲させることによりジグザグ状の流通経路Rgを有する熱交換管ユニットUを構成し、この熱交換管ユニットUを伝熱ブロック2内に埋設したため、部品点数及び製造工数の大幅な削減、更には製造工程の単純化により、熱交換装置1の小型コンパクト化を実現できるとともに、部品コスト及び製造コストに係わるコストダウンを図ることができる。しかも、薬液合流室などの外乱影響要因が排除されるため、熱交換効率の向上に寄与できる。   (1) A heat exchange pipe unit U having a zigzag flow path Rg is formed by sequentially bending the heat exchange pipe 3 formed of the fluorine-based resin material F at predetermined intervals, and the heat exchange pipe unit U is transmitted through the heat exchange pipe unit U. Since it is embedded in the heat block 2, the heat exchange device 1 can be made smaller and more compact by reducing the number of parts and the number of manufacturing steps, and by simplifying the manufacturing process. You can plan. Moreover, since disturbance influence factors such as the chemical solution merging chamber are eliminated, it is possible to contribute to the improvement of the heat exchange efficiency.

(2) ジグザグ状の流通経路Rgを有する熱交換管ユニットUを伝熱ブロック2内に埋設するとともに、熱交換管ユニットUの上流側に薬液Lを循環させる送液ポンプ13を接続したため、送液ポンプ13から付与される液圧は、フッソ系樹脂素材Fにより形成した熱交換管3を拡げる(膨らます)方向に作用し、熱交換管ユニットUと伝熱ブロック2間における接触熱抵抗を低減することができる。これにより、更なる熱交換効率の向上に寄与できる。   (2) Since the heat exchange pipe unit U having the zigzag distribution channel Rg is embedded in the heat transfer block 2 and the liquid feed pump 13 for circulating the chemical liquid L is connected to the upstream side of the heat exchange pipe unit U, The liquid pressure applied from the liquid pump 13 acts in the direction of expanding (swelling) the heat exchange pipe 3 formed of the fluorine resin material F, and reduces the contact thermal resistance between the heat exchange pipe unit U and the heat transfer block 2. can do. Thereby, it can contribute to the improvement of the further heat exchange efficiency.

(3) サーモモジュール21u…,21d…を伝熱ブロック2及び冷却部22u,22dにより加圧し、かつサーモモジュール21u…,21d…の端辺を規制する位置に配した、スプリング及びボルトナットを用いた複数の加圧部31…を備えるため、加圧部31…は、サーモモジュール21u…,21d…に対する圧力設定機能と位置ズレ防止機能を兼用する。したがって、様々な使用環境下であってもサーモモジュール21u…,21d…の位置ズレを防止でき、無用な能力低下を回避できる。   (3) Using the springs and bolts and nuts that pressurize the thermo modules 21u ..., 21d ... by the heat transfer block 2 and the cooling units 22u, 22d, and place the thermo modules 21u ..., 21d ... in a position that regulates the edges. Are provided with a pressure setting function and a position shift prevention function for the thermo modules 21u, 21d,. Therefore, even if it is under various use environment, position shift of thermo module 21u ..., 21d ... can be prevented, and unnecessary capability fall can be avoided.

(4) 好適な態様により、熱交換管ユニットUにおける少なくとも非直線部Ue…を、断熱性を有する断熱材Mにより形成した断熱ブロック11a,11bにより覆うようにすれば、外乱に伴う無用な放熱(吸熱)を防止できるとともに、熱交換管ユニットUの傷付きを防止することができる。   (4) If at least the non-linear part Ue ... in the heat exchange pipe unit U is covered with the heat insulating blocks 11a and 11b formed by the heat insulating material M according to a preferred embodiment, useless heat dissipation due to the disturbance. (Heat absorption) can be prevented, and the heat exchange pipe unit U can be prevented from being damaged.

(5) 好適な態様により、熱交換管ユニットUにおける少なくとも非直線部Ue…を、外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材Sにより形成した伝熱補助ブロック12a,12bにより覆うようにすれば、外乱に伴う無用な放熱(吸熱)を防止できることに加え、熱交換面積を増加させることにより熱交換能力をより高めることができる。   (5) A heat transfer auxiliary block formed by a heat transfer material S having heat transfer property in which at least the non-linear portion Ue... In the heat exchange tube unit U is cooled or heated by a suitable mode. If covered with 12a and 12b, in addition to preventing unnecessary heat dissipation (heat absorption) due to disturbance, the heat exchange capacity can be further increased by increasing the heat exchange area.

次に、本発明に係る最良の実施形態を挙げ、図面に基づき詳細に説明する。   Next, the best embodiment according to the present invention will be given and described in detail with reference to the drawings.

まず、本実施形態に係る薬液用熱交換装置1の基本部分を構成する構成部品(構成部材)について、図1〜図4を参照して説明する。   First, components (constituent members) constituting the basic part of the chemical liquid heat exchange apparatus 1 according to the present embodiment will be described with reference to FIGS.

3は断面を円形に形成した熱交換管である。この熱交換管3は、フッソ系樹脂素材Fにより一体形成するとともに、図3に示すように、所定間隔(一定間隔)おきに、180〔゜〕に折り返した湾曲部(非直線部)Ue…を形成することにより、ジグザグ状の流通経路Rgを有する熱交換管ユニットUを構成する。このため、順次形成される湾曲部Ue…の湾曲方向は、交互に反対方向となる。フッソ系樹脂素材Fとしては、侵食性の強い弗化アンモニウムや弗化水素酸などを含む薬液Lに対しても侵食されることのないPTFE,PFA等を用いることができる。なお、フッソ系樹脂素材Fは、必ずしも伝熱性が良好な素材ではないため、この観点からはできるだけ薄いことが望ましいが、湾曲部Ue…を形成するには、皺の発生などを防止するため、ある程度の厚さが必要となる。したがって、熱交換管3に対する実際の厚さ選定は、これら双方の条件を満たすように選定する必要がある。また、熱交換管3に湾曲部Ue…を形成する際には、湾曲部Ue…の潰れを防止するため、充填材(インサート材)を使用し、高温に加熱しながらベンダー加工機により曲げ加工を行えばよい。   Reference numeral 3 denotes a heat exchange tube having a circular cross section. The heat exchange tube 3 is integrally formed of a fluorine-based resin material F, and as shown in FIG. 3, a curved portion (non-linear portion) Ue folded back at 180 ° at predetermined intervals (fixed intervals). The heat exchange pipe unit U having the zigzag flow path Rg is formed. For this reason, the bending directions of the bending portions Ue... That are sequentially formed are alternately opposite to each other. As the fluorine-based resin material F, PTFE, PFA, or the like that is not eroded even by a chemical solution L containing ammonium fluoride or hydrofluoric acid having strong erosion properties can be used. In addition, since the fluororesin material F is not necessarily a material having good heat conductivity, it is desirable to be as thin as possible from this viewpoint. However, in order to prevent the generation of wrinkles, etc., in order to form the curved portion Ue, A certain amount of thickness is required. Therefore, it is necessary to select the actual thickness for the heat exchange tube 3 so as to satisfy both of these conditions. Further, when forming the curved portions Ue in the heat exchange pipe 3, in order to prevent the curved portions Ue from being crushed, a filler (insert material) is used and bent by a bender processing machine while being heated to a high temperature. Just do.

2は伝熱ブロックである。この伝熱ブロック2は、図2及び図1に示すように、熱交換管ユニットUの一部を埋設する機能を有し、外面となる上面と下面には、偏平な熱交換面Cu,Cdを形成する。この熱交換面Cu,Cdが後述するサーモモジュール21u…,21d…により冷却又は加熱される。伝熱ブロック2は、熱交換管ユニットUを埋設するため、上下に二分割したブロック半体2u,2dにより構成する。ブロック半体2dは、図4に示すように、偏平な直方体形をなすプレート状に成形し、上面(衝合面)には、熱交換管ユニットUにおける湾曲部Ue…を除く直線部が嵌合する断面半円形の直線嵌合溝21…を熱交換管ユニットUに対応させて形成する。ブロック半体2dの形成素材としては、伝熱性を有する、例えば、カーボングラファイト,アモルファスカーボン,アルミニウム,銅,炭化珪素等を用いることができる。そして、このようなブロック半体2dを二枚用意し、一方をブロック半体2uとし、他方をブロック半体2dとして用いる。   2 is a heat transfer block. 2 and 1, the heat transfer block 2 has a function of embedding a part of the heat exchange pipe unit U, and has flat heat exchange surfaces Cu, Cd on the upper and lower surfaces serving as outer surfaces. Form. The heat exchange surfaces Cu and Cd are cooled or heated by thermo modules 21u. The heat transfer block 2 is constituted by block halves 2u and 2d that are divided into two parts in the vertical direction in order to embed the heat exchange pipe unit U. As shown in FIG. 4, the block half body 2d is formed into a flat rectangular parallelepiped plate shape, and the upper surface (abutting surface) is fitted with a straight portion excluding the curved portion Ue in the heat exchange pipe unit U. The mating semicircular straight fitting grooves 21 are formed so as to correspond to the heat exchange pipe unit U. As a material for forming the block half 2d, for example, carbon graphite, amorphous carbon, aluminum, copper, silicon carbide, or the like having heat conductivity can be used. Two such block halves 2d are prepared, one being the block half 2u and the other being the block half 2d.

11a,11bは断熱ブロックである。断熱ブロック11a,11bは、断熱性を有する断熱材Mにより形成することができ、例えば、ウレタン素材等の安価な断熱素材であってもよい。伝熱ブロック2に熱交換管ユニットUを埋設した場合、伝熱ブロック2からは、湾曲部Ue…(及び直線部の一部)が外部に露出する。断熱ブロック11a,11bは、伝熱ブロック2から露出した熱交換管ユニットUを覆うものであり、これら断熱ブロック11a,11bも伝熱ブロック2と同様に、ブロック半体11au,11ad,11bu,11bdにより構成する(図5参照)。したがって、各ブロック半体11au,11ad,11bu,11bdにおける衝合面には、熱交換管ユニットUの形状に対応する断面半円形の嵌合溝を設ける。なお、断熱ブロック11a,11bに柔らかい素材を用いれば、嵌合溝は不要であり、貼り合わせるだけでよい。このような断熱ブロック11a,11bを用いることにより、外乱に伴う無用な放熱(吸熱)を防止できるとともに、熱交換管ユニットUの傷付きを防止することができる。   11a and 11b are heat insulation blocks. The heat insulating blocks 11a and 11b can be formed of a heat insulating material M having heat insulating properties, and may be an inexpensive heat insulating material such as a urethane material. When the heat exchange pipe unit U is embedded in the heat transfer block 2, the curved portion Ue (and a part of the straight portion) is exposed to the outside from the heat transfer block 2. The heat insulation blocks 11a and 11b cover the heat exchange pipe unit U exposed from the heat transfer block 2, and the heat insulation blocks 11a and 11b are also block half bodies 11au, 11ad, 11bu, and 11bd in the same manner as the heat transfer block 2. (See FIG. 5). Accordingly, a fitting groove having a semicircular cross section corresponding to the shape of the heat exchange tube unit U is provided on the abutting surface of each block half 11au, 11ad, 11bu, 11bd. In addition, if a soft material is used for the heat insulation blocks 11a and 11b, the fitting groove is unnecessary and it is only necessary to bond them together. By using such heat insulation blocks 11a and 11b, unnecessary heat dissipation (heat absorption) associated with disturbance can be prevented, and damage to the heat exchange pipe unit U can be prevented.

次に、このような構成部品(構成部材)を含む本実施形態に係る薬液用熱交換装置1の組付方法について、図1〜図6を参照して説明する。   Next, an assembling method of the chemical liquid heat exchange device 1 according to the present embodiment including such components (components) will be described with reference to FIGS.

まず、予め製造した熱交換管ユニットUに対して伝熱ブロック2を装着する。この場合、ブロック半体2u,2dにおける各直線嵌合溝21…に、熱交換管ユニットUにおける湾曲部Ue…を除く直線部を嵌合し、図2に示すように、ブロック半体2u,2dを衝き合わせて組付ける。この際、各直線嵌合溝21…には、必要により、シリコングリース等の不定形性伝熱媒体を塗布することができる。また、伝熱ブロック2と同様に、熱交換管ユニットUに対して断熱ブロック11a,11bを装着する。   First, the heat transfer block 2 is attached to the heat exchange pipe unit U manufactured in advance. In this case, the straight portions except the curved portions Ue in the heat exchange pipe unit U are fitted into the straight fitting grooves 21 in the block halves 2u and 2d, and as shown in FIG. Assemble 2d and assemble. At this time, an amorphous heat transfer medium such as silicon grease can be applied to each of the linear fitting grooves 21. Further, similarly to the heat transfer block 2, the heat insulating blocks 11 a and 11 b are attached to the heat exchange pipe unit U.

一方、図5に示すように、伝熱ブロック2の一方の熱交換面Cuに、ペルチェ素子を用いたサーモモジュール21u…を付設するとともに、さらに、このサーモモジュール21u…の放熱面(吸熱面)に冷却部22uを付設する。同様に、伝熱ブロック2の他方の熱交換面Cdに、ペルチェ素子を用いたサーモモジュール21d…を付設するとともに、さらに、このサーモモジュール21d…の放熱面(吸熱面)に冷却部22dを付設する。冷却部22u,22dは、水冷式クーラを用いることができる。図5中、23u,23dは、冷却部22u,22dに冷却水を循環させる配水管を示す。   On the other hand, as shown in FIG. 5, one heat exchange surface Cu of the heat transfer block 2 is provided with a thermo module 21 u using a Peltier element, and further, a heat radiating surface (heat absorbing surface) of the thermo module 21 u. A cooling unit 22u is attached to the above. Similarly, a thermo module 21d using Peltier elements is attached to the other heat exchange surface Cd of the heat transfer block 2, and a cooling part 22d is attached to the heat radiating surface (heat absorbing surface) of the thermo module 21d. To do. The cooling units 22u and 22d can use water-cooled coolers. In FIG. 5, reference numerals 23u and 23d denote water distribution pipes that circulate cooling water through the cooling units 22u and 22d.

そして、伝熱ブロック2とサーモモジュール21u…,21d…と冷却部22u,22dは、スプリング及びボルトナットを用いた複数の加圧部31…(図6)を付設して固定する。この場合、伝熱ブロック2…と各冷却部22u,22dに挟まれるサーモモジュール21u…,21d…に対して適度な接触圧力が付加されるように維持されている。この加圧部31…は、後述する図7に示すように、スプリング32…及びボルトナット33…を用いている。   The heat transfer block 2, the thermo modules 21u, 21d, and the cooling units 22u, 22d are fixed by attaching a plurality of pressurizing units 31 (FIG. 6) using springs and bolts and nuts. In this case, an appropriate contact pressure is maintained to be applied to the heat transfer blocks 2 and the thermo modules 21u and 21d sandwiched between the cooling units 22u and 22d. As shown in FIG. 7, which will be described later, the pressurizing sections 31... Use springs 32.

ところで、本実施形態に係る薬液用熱交換装置1は、シールレス型として構成されるため、温度制御範囲を広くすることができ、この結果、伝熱ブロック2…の膨張又は収縮の繰り返しによりサーモモジュール21u…,21d…に位置ズレを生じる虞れがある。このため、図6に示すように、加圧部31…を、少なくともサーモモジュール21u…,21d…の端辺を規制して位置ズレを阻止する位置に配した。これにより、様々な使用環境下であってもサーモモジュール21u…,21d…の位置ズレを防止でき、無用な能力低下を回避することができる。このように、加圧部31…は、サーモモジュール21u…,21d…に対する圧力設定機能と位置ズレ防止機能を兼用する。   By the way, since the chemical liquid heat exchange device 1 according to the present embodiment is configured as a sealless type, it is possible to widen the temperature control range, and as a result, the thermal transfer block 2. There is a possibility that the modules 21u..., 21d. For this reason, as shown in FIG. 6, the pressurizing units 31 are arranged at positions where at least the end sides of the thermo modules 21u, 21d,. Thereby, even if it is under various use environment, position shift of thermo module 21u ..., 21d ... can be prevented, and unnecessary capability fall can be avoided. As described above, the pressurizing units 31... Share both the pressure setting function and the position shift prevention function for the thermo modules 21u.

以上の組付により、薬液用熱交換装置1が得られる。このような薬液用熱交換装置1によれば、フッソ系樹脂素材Fにより形成した熱交換管3を所定間隔おきに順次湾曲することにより、ジグザグ状の流通経路Rgを有する熱交換管ユニットUが構成し、この熱交換管ユニットUの一部を伝熱ブロック2内に埋設したため、部品点数及び製造工数の大幅な削減、更には製造工程の単純化により、熱交換装置1の小型コンパクト化を実現できるとともに、部品コスト及び製造コストに係わるコストダウンを図ることができる。しかも、薬液合流室などの外乱影響要因が排除されるため、熱交換効率の向上に寄与できる。なお、熱交換管ユニットUは、一本の管部材のみで形成されることから薬液Lの液溜まり(淀み)を生じることがなく、ゴミ等が溜まりにくくなる利点もある。   The chemical solution heat exchange device 1 is obtained by the above assembly. According to such a heat exchanger 1 for chemicals, the heat exchange pipe unit U having the zigzag flow path Rg is obtained by sequentially bending the heat exchange pipe 3 formed of the fluorine resin material F at predetermined intervals. Since the heat exchange pipe unit U is partially embedded in the heat transfer block 2, the heat exchange device 1 can be made compact and compact by greatly reducing the number of parts and the number of manufacturing steps and simplifying the manufacturing process. This can be realized, and cost reduction related to component costs and manufacturing costs can be achieved. Moreover, since disturbance influence factors such as the chemical solution merging chamber are eliminated, it is possible to contribute to the improvement of the heat exchange efficiency. In addition, since the heat exchange pipe unit U is formed by only one pipe member, there is an advantage that the liquid L (stagnation) of the chemical liquid L is not generated and dust or the like is not easily collected.

他方、図1に示すように、熱交換管ユニットUの上流側には、薬液Lを循環させる送液ポンプ13を接続する。この構成が本発明の他の形態に係る薬液用熱交換装置1となる。このような構成、即ち、ジグザグ状の流通経路Rgを有する熱交換管ユニットUの一部を伝熱ブロック2内に埋設するとともに、熱交換管ユニットUの上流側に薬液Lを循環させる送液ポンプ13を接続すれば、送液ポンプ13から付与される液圧は、フッソ系樹脂素材Fにより形成した熱交換管3を拡げる(膨らます)方向に作用し、熱交換管ユニットUと伝熱ブロック2間における接触熱抵抗を低減できる。この結果、更なる熱交換効率の向上に寄与できる。なお、熱交換管ユニットUの下流側に送液ポンプ13を接続した場合には、熱交換管3を縮める方向に液圧が作用するため、長時間運転を行う際などには反って接触熱抵抗を増加させてしまう。   On the other hand, as shown in FIG. 1, a liquid feed pump 13 for circulating the chemical liquid L is connected to the upstream side of the heat exchange pipe unit U. This configuration is the chemical heat exchanger 1 according to another embodiment of the present invention. In such a configuration, that is, a part of the heat exchange pipe unit U having the zigzag flow path Rg is embedded in the heat transfer block 2 and the liquid supply liquid is circulated upstream of the heat exchange pipe unit U. If the pump 13 is connected, the liquid pressure applied from the liquid feed pump 13 acts in the direction of expanding (swelling) the heat exchange pipe 3 formed of the fluorine resin material F, and the heat exchange pipe unit U and the heat transfer block. The contact thermal resistance between the two can be reduced. As a result, the heat exchange efficiency can be further improved. When the liquid feed pump 13 is connected to the downstream side of the heat exchange pipe unit U, the hydraulic pressure acts in the direction in which the heat exchange pipe 3 is contracted. Increases resistance.

次に、本実施形態に係る薬液用熱交換装置1の機能について、図1〜図6を参照して説明する。   Next, functions of the chemical liquid heat exchange device 1 according to the present embodiment will be described with reference to FIGS.

薬液用熱交換装置1により薬液Lを冷却する場合には、サーモモジュール21u…,21d…に通電して伝熱ブロック2の熱交換面Cu,Cdを冷却する。この際、サーモモジュール21u…,21d…の放熱面からの放熱は、冷却部22u,22dにより吸収される。   When the chemical liquid L is cooled by the chemical liquid heat exchange device 1, the thermo modules 21u, 21d, ... are energized to cool the heat exchange surfaces Cu, Cd of the heat transfer block 2. At this time, the heat radiation from the heat radiation surfaces of the thermo modules 21u, 21d,... Is absorbed by the cooling units 22u, 22d.

また、送液ポンプ13を作動させ、図1に示すように、薬液Lを熱交換管ユニットUの上流側となる流入口Uiに供給する。流入口Uiに供給された薬液Lは、熱交換管ユニットUの流通経路Rgをジグザグ状に流通し、熱交換管ユニットUの流出口Uoに至る。そして、流出口Uoに至った薬液Lは、供給配管31を介して薬液Lの使用される機器等に供給(循環)される。この際、熱交換管ユニットUを流通する薬液Lは、熱交換面Cu,Cdを介して熱交換、即ち、冷却される。   Further, the liquid feeding pump 13 is operated to supply the chemical liquid L to the inlet Ui on the upstream side of the heat exchange pipe unit U as shown in FIG. The chemical liquid L supplied to the inflow port Ui flows in a zigzag manner through the flow path Rg of the heat exchange tube unit U and reaches the outflow port Uo of the heat exchange tube unit U. And the chemical | medical solution L which reached the outflow port Uo is supplied (circulated) to the apparatus etc. in which the chemical | medical solution L is used via the supply piping 31. FIG. At this time, the chemical liquid L flowing through the heat exchange pipe unit U is heat exchanged, that is, cooled through the heat exchange surfaces Cu and Cd.

このように、本実施形態に係る薬液用熱交換装置1の場合、薬液Lは、接合部分が存在しない熱交換管ユニットUを流通するため、Oリング等のシールリングを排除できる。通常、この種のシールリングは、薬液Lに強いフッソ系樹脂素材により形成されるため、シールリングが排除されることにより熱膨張率の転移点の考慮が不要となる。したがって、本実施形態に係る薬液用熱交換装置1では、−20〜200〔℃〕程度の広い調温範囲を確保できるとともに、液圧の使用圧力範囲を3〔MPa〕程度(ただし、正圧のみ)まで高めることができる。   Thus, in the case of the chemical liquid heat exchange device 1 according to the present embodiment, the chemical liquid L flows through the heat exchange pipe unit U in which no joint portion exists, and therefore, a seal ring such as an O-ring can be eliminated. Normally, this type of seal ring is made of a fluorine-based resin material that is strong against the chemical liquid L, and therefore the transition point of the thermal expansion coefficient need not be considered by eliminating the seal ring. Therefore, in the chemical liquid heat exchange device 1 according to the present embodiment, a wide temperature control range of about −20 to 200 ° C. can be secured, and the working pressure range of the hydraulic pressure is about 3 MPa (however, positive pressure) Only).

次に、本発明の変更実施形態に係る薬液用熱交換装置1について、図7及び図8を参照して説明する。   Next, the chemical liquid heat exchange device 1 according to the modified embodiment of the present invention will be described with reference to FIGS. 7 and 8.

図7は薬液用熱交換装置1の全体構成の変更例であり、二つの熱交換管ユニットU…を重ね合わせて用いる態様を示す。この場合、上側の熱交換管ユニットUの伝熱ブロック2における上面の熱交換面Cuに、サーモモジュール21u…を付設するとともに、下側の熱交換管ユニットUの伝熱ブロック2における下面の熱交換面Cdに、サーモモジュール21d…を付設する。これにより、熱交換管ユニットU…の使用数量が倍増するため、処理能力を高めることができるとともに、二つの熱交換管ユニットU…を並列接続することにより、圧力損失を低減できる。なお、31…は、スプリング32…及びボルトナット33…を用いた複数の加圧部を示し、伝熱ブロック2…と各冷却部22u,22dに挟まれるサーモモジュール21u…,21d…に対する圧力管理(圧力調節)を行う。   FIG. 7 shows an example of a change in the overall configuration of the chemical liquid heat exchange device 1 and shows a mode in which two heat exchange pipe units U are used in an overlapping manner. In this case, the thermo module 21u is attached to the upper heat exchange surface Cu of the heat transfer block 2 of the upper heat exchange tube unit U, and the heat of the lower surface of the heat transfer block 2 of the lower heat exchange tube unit U is added. Thermo modules 21d are attached to the exchange surface Cd. As a result, the quantity of heat exchange pipe units U ... doubled, so that the processing capacity can be increased, and pressure loss can be reduced by connecting the two heat exchange pipe units U ... in parallel. In addition, 31 ... shows the several pressurization part using the spring 32 ... and the bolt nut 33 ..., and pressure management with respect to the thermomodule 21u ..., 21d ... sandwiched between the heat-transfer block 2 ... and each cooling part 22u, 22d. Perform (pressure adjustment).

図8は、薬液用熱交換装置1のサイズ変更例を示す。この薬液用熱交換装置1は、伝熱ブロック2の長手方向に沿って五列のサーモモジュール21u…を配したサイズを示す。このように、本実施形態に係る薬液用熱交換装置1を用いれば、熱交換管ユニットU及び伝熱ブロック2のサイズ変更のみで薬液用熱交換器1の能力を容易に変更でき、コストメリットを得ることができる。   FIG. 8 shows a size change example of the chemical liquid heat exchange device 1. The chemical liquid heat exchange device 1 has a size in which five rows of thermo modules 21 u are arranged along the longitudinal direction of the heat transfer block 2. Thus, if the chemical heat exchanger 1 according to this embodiment is used, the ability of the chemical heat exchanger 1 can be easily changed only by changing the size of the heat exchange pipe unit U and the heat transfer block 2, and the cost merit is improved. Can be obtained.

なお、図7及び図8において、他の構成及び機能等は、図1〜図6に示した実施形態に準じて実施することができる。このため、図7及び図8の実施形態において、図1〜図6に示した実施形態と同一部分には同一符号を付してその構成を明確にするとともに、その詳細な説明は省略する。   7 and 8, other configurations and functions can be implemented according to the embodiment shown in FIGS. 1 to 6. Therefore, in the embodiment of FIGS. 7 and 8, the same reference numerals are given to the same parts as those of the embodiment shown in FIGS. 1 to 6 to clarify the configuration, and detailed description thereof is omitted.

以上、最良の実施形態について詳細に説明したが、本発明は、このような実施形態に限定されるものではなく、細部の構成,形状,数量,数値等において、本発明の要旨を逸脱しない範囲で、任意に変更,追加,削除することができる。   Although the best embodiment has been described in detail above, the present invention is not limited to such an embodiment, and the detailed configuration, shape, quantity, numerical value, and the like do not depart from the spirit of the present invention. It can be changed, added, or deleted arbitrarily.

例えば、熱交換管ユニットUにおける少なくとも非直線部Ue…を、断熱材Mにより形成した断熱ブロック11a,11bにより覆った場合を示したが、少なくとも非直線部Ue…を、外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材Sにより形成した伝熱補助ブロック12a,12bにより覆ってもよい。伝熱材Sとしては、伝熱ブロック2と同一の素材を用いることが望ましい。また、断熱ブロック11a,11bの場合と同様、上下に二分割したブロック半体12au,12ad,12bu,12bdにより構成することができる(図5参照)。したがって、伝熱補助ブロック12a,12bは、伝熱ブロック2に対して一体形成し、熱交換管ユニットUの全部を伝熱ブロック2内に埋設するようにしてもよい。これにより、図5に示したサーモモジュール21u…,21d…に対する熱交換面積を伝熱補助ブロック12a,12bにおける熱交換面まで拡大させることができるため、外乱に伴う無用な放熱(吸熱)を防止できることに加え、熱交換面積の増加による熱交換能力をより高めることができる。なお、薬液Lには、例示した弗化アンモニウムや弗化水素酸などを含む薬液Lをはじめ、各種薬液を適用できるとともに、必要により水等の薬液以外の溶液にもそのまま利用することができる。   For example, although the case where at least the non-linear part Ue ... in the heat exchange pipe unit U is covered with the heat insulating blocks 11a, 11b formed by the heat insulating material M is shown, the heat exchange in which at least the non-linear part Ue ... is formed on the outer surface. You may cover with the heat-transfer auxiliary | assistant block 12a, 12b formed with the heat-transfer material S which has the heat-transfer property by which the surface is cooled or heated. It is desirable to use the same material as the heat transfer block 2 as the heat transfer material S. Further, as in the case of the heat insulating blocks 11a and 11b, the block halves 12au, 12ad, 12bu, and 12bd that are divided into upper and lower parts can be used (see FIG. 5). Therefore, the heat transfer auxiliary blocks 12 a and 12 b may be formed integrally with the heat transfer block 2 so that the entire heat exchange pipe unit U is embedded in the heat transfer block 2. As a result, the heat exchange area for the thermo modules 21u, 21d,... Shown in FIG. 5 can be expanded to the heat exchange surfaces of the heat transfer auxiliary blocks 12a, 12b, thereby preventing unnecessary heat dissipation (heat absorption) due to disturbance. In addition to being able to do so, it is possible to further increase the heat exchange capacity by increasing the heat exchange area. In addition, as the chemical solution L, various chemical solutions including the exemplified chemical solution L containing ammonium fluoride, hydrofluoric acid, and the like can be applied, and if necessary, the chemical solution L can be used as it is for a solution other than the chemical solution such as water.

本発明の最良の実施形態に係る薬液用熱交換装置における熱交換管ユニット及び伝熱ブロックの一部を破断した平面構成図、The plane block diagram which fractured | ruptured a part of heat exchange pipe unit and the heat-transfer block in the heat exchanger for chemical | medical solutions which concerns on the best embodiment of this invention, 同薬液用熱交換装置における熱交換管ユニット及び伝熱ブロックを示す断面正面図、A cross-sectional front view showing a heat exchange pipe unit and a heat transfer block in the chemical liquid heat exchange device, 同薬液用熱交換装置における熱交換管ユニットの一部断面平面図、A partial cross-sectional plan view of a heat exchange tube unit in the chemical liquid heat exchange device, 同薬液用熱交換装置における伝熱ブロック半体を示す斜視図、The perspective view which shows the heat-transfer block half body in the heat exchanger for chemical | medical solutions, 同薬液用熱交換装置の全体を示す外観側面図、External side view showing the whole of the chemical liquid heat exchange device, 同薬液用熱交換装置の全体を示す平面図、A plan view showing the whole of the chemical liquid heat exchange device, 本発明の変更実施形態に係る薬液用熱交換装置の主要部の正面図、The front view of the principal part of the heat exchanger for chemicals concerning the change embodiment of the present invention, 本発明の変更実施形態に係る薬液用熱交換装置の主要部の平面図、The top view of the principal part of the heat exchanger for chemical | medical solutions which concerns on the modified embodiment of this invention,

1:薬液用熱交換装置,2:伝熱ブロック,3:熱交換管,11a:断熱ブロック,11b:断熱ブロック,12a:伝熱補助ブロック,12b:伝熱補助ブロック,13:送液ポンプ,21u…:サーモモジュール,21d…:サーモモジュール,22u:冷却部,22d:冷却部,31…:加圧部,Cu:熱交換面,Cd:熱交換面,Cue:熱交換面,Cde:熱交換面,L:薬液,F:フッソ系樹脂素材,Rg:流通経路,U:熱交換管ユニット,Ue…:熱交換管ユニットの非直線部,M:断熱材,S:伝熱材   1: Heat exchange device for chemical liquid, 2: Heat transfer block, 3: Heat exchange pipe, 11a: Heat insulation block, 11b: Heat insulation block, 12a: Heat transfer auxiliary block, 12b: Heat transfer auxiliary block, 13: Liquid feed pump, 21u ...: Thermo module, 21d ...: Thermo module, 22u: Cooling unit, 22d: Cooling unit, 31 ...: Pressure unit, Cu: Heat exchange surface, Cd: Heat exchange surface, Cue: Heat exchange surface, Cde: Heat Exchange surface, L: Chemical solution, F: Fluoro resin material, Rg: Distribution channel, U: Heat exchange pipe unit, Ue ...: Non-linear part of heat exchange pipe unit, M: Heat insulating material, S: Heat transfer material

Claims (4)

外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材により形成した伝熱ブロック及びこの伝熱ブロック内に埋設して内部に流通する薬液に対して熱交換を行う熱交換管を備える薬液用熱交換装置において、フッソ系樹脂素材により形成した熱交換管を所定間隔おきに順次湾曲することによりジグザグ状の流通経路を設けた熱交換管ユニットと、この熱交換管ユニットの一部又は全部を内部に埋設した前記伝熱ブロックと、前記伝熱ブロックの熱交換面に付設したサーモモジュールと、このサーモモジュールの放熱面に付設した冷却部と、前記サーモモジュールを前記伝熱ブロック及び前記冷却部により加圧し、かつ前記サーモモジュールの端辺を規制する位置に配した、スプリング及びボルトナットを用いた複数の加圧部と、を備えてなることを特徴とする薬液用熱交換装置。   A heat exchange block formed of a heat transfer material having a heat transfer property that cools or heats the heat exchange surface formed on the outer surface, and heat exchange that exchanges heat with a chemical solution embedded in the heat transfer block and circulating inside In a heat exchange device for chemicals comprising a tube, a heat exchange tube unit provided with a zigzag flow path by sequentially bending a heat exchange tube formed of a fluorine-based resin material at predetermined intervals, and the heat exchange tube unit The heat transfer block partially or wholly embedded therein, a thermo module attached to the heat exchange surface of the heat transfer block, a cooling unit attached to the heat radiating surface of the thermo module, and the heat transfer to the thermo module A plurality of pressurizing units using springs and bolts and nuts, which are arranged to be pressurized by a block and the cooling unit and which regulate the end side of the thermo module; Chemical heat exchange apparatus characterized by including the. 前記熱交換管ユニットにおける少なくとも非直線部は、断熱性を有する断熱材により形成した断熱ブロックにより覆うことを特徴とする請求項1記載の薬液用熱交換装置。   The chemical heat exchanger according to claim 1, wherein at least the non-linear portion in the heat exchange pipe unit is covered with a heat insulating block formed of a heat insulating material having heat insulating properties. 前記熱交換管ユニットにおける少なくとも非直線部は、外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱材により形成した伝熱補助ブロックにより覆うことを特徴とする請求項1記載の薬液用熱交換装置。   The at least non-linear part in the said heat exchange pipe unit is covered with the heat-transfer auxiliary | assistant block formed with the heat-transfer material which has the heat-transfer property in which the heat exchange surface formed in the outer surface is cooled or heated. Heat exchanger for chemicals. 外面に形成した熱交換面が冷却又は加熱される伝熱性を有する伝熱ブロック及びこの伝熱ブロック内に埋設して内部に流通する薬液に対して熱交換を行う熱交換管を備える薬液用熱交換装置において、フッソ系樹脂素材により形成した熱交換管を所定間隔おきに順次湾曲することによりジグザグ状の流通経路を設けた熱交換管ユニットと、この熱交換管ユニットの一部又は全部を内部に埋設した前記伝熱ブロックと、前記伝熱ブロックの熱交換面に付設したサーモモジュールと、このサーモモジュールの放熱面に付設した冷却部と、前記サーモモジュールを前記伝熱ブロック及び前記冷却部により加圧し、かつ前記サーモモジュールの端辺を規制する位置に配した、スプリング及びボルトナットを用いた複数の加圧部と、前記熱交換管ユニットの上流側に接続した、薬液を循環させる送液ポンプと、を備えてなることを特徴とする薬液用熱交換装置。   Heat for a chemical solution provided with a heat transfer block having a heat transfer property in which a heat exchange surface formed on the outer surface is cooled or heated, and a heat exchange pipe that is embedded in the heat transfer block and performs heat exchange with the chemical solution flowing inside. In an exchange device, a heat exchange pipe unit formed with a zigzag flow path by sequentially bending a heat exchange pipe formed of a fluorine resin material at predetermined intervals, and a part or all of the heat exchange pipe unit The heat transfer block embedded in the heat transfer block, a thermo module attached to the heat exchange surface of the heat transfer block, a cooling unit attached to the heat dissipation surface of the thermo module, and the thermo module by the heat transfer block and the cooling unit A plurality of pressurizing parts using springs and bolts and nuts arranged at positions where pressure is applied and the end of the thermo module is regulated; and the heat exchange pipe unit. Of was connected to the upstream side, the chemical liquid heat exchanger apparatus characterized in that it comprises a liquid feed pump for circulating the chemical solution, the.
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