KR20150020578A - High-efficiency heat exchanger and high-efficiency heat exchange method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high efficiency heat exchanger which can be applied to a high purity heat exchange fluid. A heat exchanger comprising a heat exchanging fluid and a heat transfer structure contacting the heat exchanging fluid flowing through the heat exchanging fluid, wherein the heat exchanging fluid is heat exchanged through a contact surface between the heat exchanging fluid and the heat transfer structure, (2) the heat transfer structure is provided with a heat conductor, the heat conductor is made of a material having a good thermal conductivity, (3) the heat transfer fluid is a heat exchange fluid And the heat transfer structure is mounted at a position in the vicinity of the contact surface with the heat exchange fluid and not in contact with the heat exchange fluid.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a high-efficiency heat exchanger and a high-

The present invention is directed to heat exchange techniques that are not limited in application. Particularly, it is useful for heat exchange of a gas or a liquid of a corrosive substance such as an acid or an alkali, high purity water, high purity silicon compound in manufacturing a semiconductor, and the like. And the improvement of the heat exchange ratio can be realized.

That is, the present invention can provide a highly efficient heat exchanger and a heat exchange method which are less susceptible to corrosion of the apparatus, contamination by impurities, and the like, throughout the technical field requiring cooling, heating and temperature control of the material.

In this specification, not only a heating source but also a heat absorbing source may be referred to as a " heat source ". The term " fluid " in this specification also includes a phase change (for example, a phase change from liquid to gas) by heating or a sudden heating.

A heat exchanger is a device that directly or indirectly contacts two different temperature objects to transfer heat to heat or cool one object. It is used for industrial purposes such as boilers, steam generators, food manufacturing or chemical manufacturing, Process, heating process, and refrigeration.

The heat exchanger generally has a structure according to the characteristics of a heat exchanging material to be heated. For example, as a heat exchanger for chemical liquids which performs heat exchange with a corrosive chemical liquid such as hydrofluoric acid, nitric acid, sulfuric acid, It is necessary to heat and cool fluids such as strong acids and strong alkalis which are highly corrosive by using a heat exchanger having a high corrosivity. In this case, a contact material made of a resin material that is hardly invaded by acid or alkali is immersed in a heating medium to indirectly heat Heating is typical.

1 is a schematic view showing a typical indirect heat exchange and is a schematic view of a heat source 5 while the heat exchanging fluid (acid, alkali, water, etc.) is conveyed from the inlet 2 to the outlet 3 through the resin pipe 1. [ Heat exchange is carried out through the resin pipe 1 by the heating medium 4 whose temperature is adjusted by the heating medium 4. This method improves the heat exchange efficiency by increasing the surface area of the resin pipe 1 on the contact side, for example, by increasing the contact area with the heating medium 4 by lengthening the tube 1 in the heating medium 4 However, there is a case that the apparatus is expensive in terms of cost, including a device for controlling the temperature of the fluid by a heat source or a container. 2 shows a typical example of a direct heating system in which heat exchange is performed directly with a heat source without passing through a heating medium. A tube made of a material having good corrosion resistance against the heat exchange fluid and made of a material having excellent temperature characteristics The heat source 5 is brought into contact with the heat exchanger 1 to perform direct heat exchange.

In any of these methods, it is necessary that the apparatus such as the conveyance pipe is not corroded by the heat exchange fluid or the heat exchange medium, the heat exchange fluid is not contaminated in the heat exchange step, and heat exchange is efficiently performed.

In order to prevent the influence of corrosion or the like on the conveyance pipe by the heat exchange medium or the heat exchange fluid, the conveyance pipe is covered with ceramic or ceramics to protect the conveyance pipe.

For example, in a heat transfer tube for heat exchange installed in a high temperature gas atmosphere and performing heat exchange from the high temperature gas to a fluid to be heated in a heat transfer tube, the tube through which the heating fluid flows is made of a heat resistant alloy, Layer structure in which the outer side of the tube is covered with a cover material made of a ceramics alloy composite material through a thermal expansion cushion material, and the ceramic material alloy composite material constituting the cover material contains Al and AlN, 90 wt% or less, and (Al + AlN + AlON) is 50 wt% or more and 100 wt% or less (Patent Document 1).

The fluororesin is known to have excellent corrosion resistance and heat resistance to various kinds of medicines. For example, if the transfer tube is composed only of fluororesin, since the fluororesin itself is inherently a heat-poor conductor, the heat exchange efficiency is low, Many proposals have been made for forming a film on the surface of a metal or the like having a good thermal conductivity with a fluororesin in order to improve defects in which the precision of temperature control at a predetermined temperature is also poor. For example, in a gas utilization facility member having at least two coating layers containing a fluororesin on a gas, the gas utilization facility member may be provided with at least two coating layers from the lowest layer to the uppermost layer coated on the substrate, (Patent Document 2) for use as a heat exchanger having a coating film in which the content of the fluororesin is sequentially increased and the content of the inorganic filler is sequentially decreased,

By providing a plate pin type heat exchanger and a plate type heat exchanger using the aluminum alloy material in an aluminum alloy material excellent in corrosion resistance and a heat transfer portion made of a medium having a corrosive property as a medium, A plate-type heat exchanger, a plate-type heat exchanger or the like using a heat transfer part having a medium as a medium, an organic phosphonic acid base part coating film is formed on the surface of the aluminum alloy material and an average of 1 to 100 m (Japanese Patent Application Laid-open No. 2001-3257) proposes a fluororesin coating film having a thickness of about 10 to 20 μm, which improves the durability of the coating film adhesion and improves corrosion resistance to corrosive fluids such as seawater.

As described above, a method of resin coating a metal having good thermal conductivity is generally used. However, since the two types of materials have different thermal expansions, it is difficult to cope with expansion and contraction, and the coating layer may peel off, causing corrosion of the metal portion and contamination There is a possibility that a problem occurs. Further, in this method, the object fluid from the pinhole of the resin coating portion penetrates, and the above-described problem can not be avoided.

Further, carbon having excellent thermal conductivity and excellent corrosion resistance may be employed. For example, in a method capable of heating or cooling a large amount of a hydrogen chloride aqueous solution containing chlorine without changing the heat conduction surface by using a heat exchanger, the heat transfer surface of the heat exchanger is composed of a fluorocarbon impregnated carbon , And this heat exchanger is a block composed of a fluorine resin impregnated carbon in the housing and proposed a block heat exchanger in which a block provided with a hydrogen chloride aqueous solution flow passage through which a hydrogen chloride aqueous solution flows and a heat medium flow passage through which the heating medium flows is arranged (Patent Document 4).

Further, a heat exchanger made of stainless steel can be used for the heat exchanging material in which the liquid contacting portion can correspond to the metal. However, stainless steel has a low thermal conductivity among metals and it is necessary to use a heat source having a large capacity in order to obtain a constant heat exchanging ability. Therefore, there is a problem that an increase in the size of the main body and an increase in power consumption are required.

As described above, attempts have been made to use various materials in heat exchangers in order to obtain high corrosion resistance and increase heat exchange efficiency. However, the development of a heat exchange technology capable of coping with a heat exchange material, .

Japanese Patent No. 3674401 Japanese Patent Application Laid-Open No. 2004-283699 Japanese Patent Application Laid-Open No. 2008-156748 Japanese Patent Application Laid-Open No. 2006-289799 Japanese Patent Application Laid-Open No. 9-280786

SUMMARY OF THE INVENTION In view of the above-described prior arts, the present invention provides a heat exchanger having both heat exchange performance and corrosion resistance for a heat exchange fluid.

In a conventional heat exchanger, when heat exchange fluid is exchanged with a fluid to be heat-exchanged, a method of bringing a fluid-contacting member into contact with a heat medium such as a heat source or a refrigerant and heat-exchanging the fluid is generally used. However, the material of the contact member has been selected in accordance with the characteristics of the fluid. However, the material of the selected contact member does not necessarily have a good thermal conductivity. In this case, for example, it is necessary to use a large number of heat-generating heaters as heat sources, or to supplement the defects of low- In some cases. In this case, the energy efficiency in heat exchange is low, and the equipment is often large-sized.

The present invention is characterized in that high efficiency heat exchange can be performed even if the material of the contact portion is selected by paying attention only to the characteristics of the heat exchange fluid. However, the present invention can be made into a compact product at a low cost, . An object of the present invention is to provide a high-efficiency heat exchanger which can be applied in a wide field without selecting a fluid to be heat-exchanged. It is another object of the present invention to provide a heat exchanger which is free from corrosion of the device by the heat exchange fluid and which does not contaminate the heat exchanged fluid. The present invention also provides a heat exchanger excellent in thermal conductivity characteristics in heating or cooling an aqueous solution such as hydrofluoric acid or hydrogen chloride, which is highly corrosive, or an alkali aqueous solution such as gas or sodium hydroxide. Further, the present invention provides a heat exchange technique that enables highly efficient heat exchange while maintaining high purity of the heat exchange fluid.

The present invention consists of the technical matters described below.

[1] A heat exchanger comprising: a heat source; a heat transfer structure in contact with the heat exchange fluid; and a heat transfer member for transferring heat from the heat source to the heat transfer structure, wherein the heat transfer fluid is heat- Wherein the heat transfer structure comprises a body having an inlet, an outlet and a heat exchange fluid flow path, and a plurality of heat conductors mounted on the body, wherein an inner wall surface of the heat exchange fluid flow path constituting a contact surface with the heat exchange fluid The heat conductor is made of a material having a higher thermal conductivity than that of the material of the body and the heat conductor is mounted in the vicinity of the heat exchange fluid passage and not in contact with the heat exchange fluid Features a heat exchanger.

[2] A heat exchanger according to [1], wherein the plurality of heat conductors sandwich the heat exchanging fluid flow path and include a plurality of heat conductors arranged opposite to each other.

[3] The heat exchanger according to [1] or [2], wherein the heat transfer member comprises two heat transfer members sandwiching the body, and at least one heat transfer member extends from each of the two heat transfer members. Here, the aspect in which the thermally conductive member is extended includes not only a case where the heat conductive member and the heat conductor are integrally formed, but also a case where a separate heat conductor is mounted on the heat conductive member.

[4] The heat exchanger according to any one of [1] to [3], wherein the heat conductor has a pin-type structure.

[5] The heat exchanger according to [4], wherein at least a part of the plurality of heat conductors is formed integrally with the plate-like heat transfer member.

[6] A heat exchanger according to [4] or [5], wherein at least a part of the plurality of heat conductors has an outer surface of a zigzag structure. Preferably, a majority of the plurality of heat conductors has an outer surface of a zigzag structure.

[7] The heat exchanger according to [6], wherein the surface area of the outer surface is 1.5 to 3 times larger than that of the outer surface without the convex portion.

[8] A heat exchanger according to [6] or [7], wherein the heat conductor having the outer surface of the zigzag structure is a screw.

[9] A heat exchanger according to [8], wherein the thermally conductive body having the outer surface of the zigzag structure is a flat head screw.

[10] The heat exchanger according to any one of [1] to [9], wherein the heat exchange fluid flow path has a plurality of bent portions.

[11] The heat exchanger according to [10], wherein the heat exchange fluid flow path has a return bend portion which is diverted toward the inlet side.

[12] The heat exchanger according to any one of [1] to [11], wherein at least a part of the heat conductors disposed on the side closer to the inlet port is made of a material having a higher thermal conductivity than the heat conductor disposed on the farther side from the inlet port. Here, the term closer to the inlet port means, for example, 1/2, 1/3 or 1/4 of the total length of the flow passage from the inlet port, and the same applies to the inlet port.

[13] The heat exchanger according to any one of [1] to [12], wherein the number of the heat conductors is larger on the side close to the inlet than on the side farther from the inlet, and the heat conductors are disposed in a higher density.

[14] The heat exchanger according to [12] or [13], wherein the outlet is an outlet communicating with the outside world.

[15] A heat exchanger comprising a plurality of heat exchangers according to any one of [1] to [13].

[16] The heat exchanger according to any one of [1] to [15], wherein the inner wall surface of the heat exchange fluid channel is a resin.

[17] The heat exchanger according to any one of [1] to [15], wherein the inner wall surface of the heat exchange fluid channel is metal or carbon.

[18] The heat exchanger according to any one of [1] to [17], wherein the plurality of thermally conductive bodies comprises a thermally conductive body made of copper and a thermally conductive body made of aluminum.

[19] The heat exchanger according to any one of [1] to [18], wherein the heat source is a heating source.

[20] The heat exchanger according to any one of [1] to [18], wherein the heat source is a heat absorption source.

[21] A heat exchange method for performing electrothermal heat exchange with a fluid by using the heat exchanger according to any one of [1] to [20].

[22] A heat exchange method for performing electrothermal heat exchange with a fluid using the heat exchanger according to [12], wherein a heat conductor made of a material having a relatively high thermal conductivity as compared with the side farther from the inlet is disposed near the inlet, A heat conduction member made of a material having a relatively low thermal conductivity as compared with a side closer to the inflow port is disposed on the side far from the inflow port to suppress unevenness in the temperature distribution occurring on the upstream side and the downstream side of the heat exchange fluid channel.

[23] A heat exchange method for performing heat exchange with a fluid using the heat exchanger according to [13], wherein a heat conductor made of a material having a relatively high thermal conductivity as compared with the side far from the inlet is disposed near the inlet, A heat conduction member made of a material having a relatively low thermal conductivity as compared with a side closer to the inflow port is disposed on the side far from the inflow port to suppress unevenness in the temperature distribution occurring on the upstream side and the downstream side of the heat exchange fluid channel.

[24] A heat exchange method for performing electrothermal heat exchange with a corrosive fluid using the heat exchanger according to [16].

In another aspect, the present invention is made up of the technical matters described below.

(1) A heat exchanger having a flow path of a heat exchange fluid and a heat transfer structure contacting with a heat exchange fluid flowing through the flow path, and performing heat transfer type heat exchange through a contact surface between the heat exchange fluid and the heat transfer structure,

(a) the heat transfer structure is made such that the surface constituting the contact surface with the heat exchange fluid is made of a material which is stable with respect to the heat exchange fluid,

(b) a heat conductor is mounted on the heat transfer structure, the heat conductor is made of a material having a higher thermal conductivity than the material of the heat transfer structure,

(c) the heat conductor is mounted at a position in the vicinity of the contact surface with the heat exchange fluid and not in contact with the heat exchange fluid,

Wherein the heat transfer structure has a heat conduction efficiency at a surface where the heat exchange fluid is in contact with the heat transfer structure.

(2) The heat exchanger according to (1), wherein the heat conductor has a pin-type structure. Here, the pin-type structure includes, for example, a cylindrical shape, a polygonal columnar shape, and a zigzag structure on the outer surface.

(3) The heat exchanger according to (1) or (2), wherein the heat conductor has a surface of a zigzag structure.

(4) The heat exchanger according to any one of (1) to (3), wherein a contact surface of the heat transfer structure with the heat exchange fluid has a zigzag structure.

(5) The heat exchanger according to any one of (1) to (4) above, wherein the flow path of the heat exchange fluid is a folding structure that turbulently converts the heat exchange fluid into an efficient heat transfer rate.

(6) The heat exchanger according to any one of (1) to (5), wherein the flow path is configured to be able to change a diameter and / or an overall length.

(7) The heat exchanger according to any one of (1) to (6), wherein the heat exchange fluid is a gas or a liquid.

(8) The heat exchanger according to any one of (1) to (7), wherein the material of the heat transfer structure is resin or metal.

(9) The heat exchanger according to any one of (1) to (8), wherein the heat conductor is a metal having a higher thermal conductivity than the material of the heat transfer structure.

(10) A heat exchange method for bringing a heat transfer structure into contact with a fluid to be heat-exchanged and performing heat transfer type heat exchange through a contact surface between the heat exchange fluid and the heat transfer structure,

(a) the heat transfer structure is made such that the surface constituting the contact surface with the heat exchange fluid is made of a material which is stable with respect to the heat exchange fluid,

(b) a heat conductor is mounted on the heat transfer structure, the heat conductor is made of a material having a higher thermal conductivity than the material of the heat transfer structure,

(c) the heat conductor is mounted at a position in the vicinity of the contact surface with the heat exchange fluid and not in contact with the heat exchange fluid,

Wherein a heat conduction efficiency at a surface where the heat transfer structure and the heat exchange fluid are in contact with each other is increased.

(11) The heat exchange method according to (10), wherein the heat conductor has a pin-type structure.

(12) The heat exchange method according to (10) or (11) above, wherein the heat conductor has a surface of a zigzag structure.

(13) The heat exchange method according to any one of (10) to (12) above, wherein the contact surface of the heat transfer structure with the heat exchange fluid is a zigzag structure.

(14) The heat exchange method according to any one of (10) to (13), wherein the flow path of the heat exchange fluid is a folding structure in which the heat exchange fluid is turbulent to improve the heat transfer efficiency.

(15) The heat exchange method according to any one of (10) to (14), wherein the flow path is configured to change the diameter and / or the total length.

(16) The heat exchange method according to any one of (10) to (15), wherein the heat exchange fluid is a gas or a liquid.

(17) The heat exchange method according to any one of (10) to (16), wherein the material of the heat transfer structure is resin or metal.

(18) The heat exchange method according to any one of (10) to (17) above, wherein the heat conductor is a metal having a higher thermal conductivity than the material of the heat transfer structure.

The following effects can be obtained by the present invention.

Since acids and alkalis react violently with respect to metals, it is not possible to use metals for their contact areas. Therefore, conventionally, a heat exchanger using a resin as the contact portion is used, but since the thermal conductivity is low, the thermal efficiency is not good, and the structure of the apparatus becomes large and complicated. According to the present invention, it is possible to provide a heat exchanger having a compact structure with a high heat exchange efficiency, and furthermore, the reaction between the heat exchanger and a heat exchange fluid such as acid or alkali is avoided, Without being contaminated by < / RTI > In addition, acidic materials such as high-purity water, and substances other than alkali can be applied irrespective of their form such as liquid form and gas form.

Further, according to the present invention, by adopting a direct heating method by using fluid dynamics and thermodynamics, even when all of the contact portions with the heat exchange fluid are made of resin, power saving, space saving, Technology can be provided.

Further, the present invention can provide a heat exchanger having a performance superior to that of the conventional technology even in a structure in which direct contact with the fluid to be heated is performed in a metal-free manner to perform heat exchange, I can say that.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing heat exchange by a conventional indirect heating method; FIG.
2 is a schematic view showing a conventional heat exchange by a typical direct heating.
3 is a schematic cross-sectional view showing an example of an electrothermal heat exchanger using a plurality of independent heat conductors.
4 is a schematic cross-sectional view showing an example of an electrothermal heat exchanger in which a plurality of heat conductors are integrated with a heat transfer plate.
5 is a schematic sectional view showing an example of an electrothermal heat exchanger using a heat conductor having a zigzag surface structure.
6 is a schematic cross-sectional view showing an example of an electrothermal heat exchanger in which a flow path of a heat exchange fluid has a zigzag shape.
Fig. 7 is a sectional view of a heat exchanger according to Embodiment 1 of the present invention. Fig. 7-1 shows a vertical plane (vertical direction), and Fig. 7-2 shows a plane in a plane (horizontal direction).
8 is a view showing the arrangement of a device for testing heat exchange capability.
Fig. 9 is a view showing the temperature distribution by thermography. In the thick portion, a heat conductor is provided to indicate that the temperature is higher than the ambient temperature.
10 is a graph showing the relationship between the outlet gas temperature and the measurement value of the set temperature in the test result.
11 is a view for comparing heat exchange ability between heat exchange through the resin of the present invention and heat exchange through the metal surface.
Fig. 12 is a schematic cross-sectional view for explaining a zigzag structure of a flow path of heat exchange fluid, wherein (a) is a view for explaining a case where the surface area is doubled, and (b) is a view for explaining adjustment of the pitch depth.
13 is a schematic cross-sectional view showing a change in arrangement of the heat conductor. (a) shows an arrangement example in which two heat conductors sandwiching a heat exchange fluid passage extend from above. (b) shows an arrangement example in which two heat conductors sandwiching the heat exchange fluid channel extend from above and below. (c) shows an arrangement example in which four heat conductors sandwiching the heat exchange fluid channel extend from above and below. (d) is a configuration example in which the outer surface of the heat conductor has a zigzag structure in the example of the arrangement of the heat conductor in (a). (e) is a configuration example in which the outer surface of the heat conductor has a zigzag structure in the example of the arrangement of the heat conductor in (b). (f) is a configuration example in which the outer surface of the heat conductor has a zigzag structure in the example of the arrangement of the heat conductor in (c).
Fig. 14 is a configuration example in which the heat transfer plate and a plurality of heat conductors are integrally formed in Fig. 13; (a) shows an arrangement example in which two heat conductors sandwiching a heat exchange fluid passage extend from above. (b) shows an arrangement example in which two heat conductors sandwiching the heat exchange fluid channel extend from above and below. (c) shows an arrangement example in which four heat conductors sandwiching the heat exchange fluid channel extend from above and below. (d) is a configuration example in which the outer surface of the heat conductor has a zigzag structure in the example of the arrangement of the heat conductor in (a). (e) is a configuration example in which the outer surface of the heat conductor has a zigzag structure in the example of the arrangement of the heat conductor in (b). (f) is a configuration example in which the outer surface of the heat conductor has a zigzag structure in the example of the arrangement of the heat conductor in (c).
Fig. 15 is a view for explaining a temperature distribution when heat conductors of different materials are arranged. Fig. 15 (a) is a plan view and a temperature distribution diagram when the same type of heat conductor is arranged, and Fig. 15 Fig. 5 is a plan view and a temperature distribution diagram in the case where the heat sink is mounted.
16 is a plan view of a heat exchanger in which heat conductors are arranged at different densities on the upstream side and the downstream side.
Fig. 17 is a view showing a cross-sectional structure of a heat exchanger equipped with a showerhead according to the present invention, wherein (a) shows a plane (horizontal direction) and Fig. 17 (b) shows a section in a vertical plane (vertical direction).
Fig. 18 is a side view of the heat exchanger shown in Fig. 7 stacked to form a multi-stage heat exchanger.
19 is a configuration diagram of the temperature control supply device according to Embodiment 2 of the present invention.

The present invention provides a heat exchanger having a passageway through which a heat exchange fluid passes and a heat transfer structure in contact with a heat exchange fluid passing through the passageway and performing heat transfer type heat exchange through a contact surface between the heat exchange fluid and the heat transfer structure,

(1) In the heat transfer structure, the surface constituting the contact surface with the heat exchange fluid is made of a material which is stable with respect to the heat exchange fluid,

(2) A heat conductor is mounted on the heat transfer structure, and the heat conductor is made of a material having a higher thermal conductivity than the material of the heat transfer structure,

(3) The heat conductor is mounted at a position near the contact surface with the heat exchange fluid and not in contact with the heat exchange fluid,

And a heat exchanging method and a heat exchange method in which heat conduction efficiency at a surface where a heat exchange fluid is in contact is increased.

The present invention is characterized in that a heat conductor made of a material having a higher thermal conductivity than that of a material of a heat transfer structure (in particular, a portion in contact with a heat exchange fluid) is contacted with a fluid And the heat transfer structure body is heated or cooled to transfer heat from the heat source to the heat exchange fluid, whereby the fluid can be efficiently heated and cooled.

BACKGROUND ART [0002] In general, a liquid or gas having various characteristics is subjected to a heat exchange fluid to be heated or cooled by a heat exchanger. For example, although an acid or an aqueous solution of an alkali is used for a chemical reaction or an etching treatment, since they react violently with respect to a metal, a metal can not be used at a contact portion with an acid or an alkali in many cases. Although there is a product using a resin in the heat exchanger used for heat exchange of the heat-exchange fluid having such a reactivity, the resin has a low heat conductivity, and therefore heat exchange efficiency is not good, power required is also increased, There are many.

The heat exchanger of the present invention is not limited as long as it employs a direct heating system and the surface constituting the contact surface with the heat exchange fluid is made of a stable material with respect to the heat exchange fluid. For example, , Saves space, and makes it possible to provide heat exchange with good efficiency of thermal efficiency of 80% or more.

[Heat exchange fluid]

The heat exchanging fluid in the present invention is not particularly limited and includes, for example, hydrochloric acid, sulfuric acid, corrosive acids such as hydrochloric acid, hydrobromic acid, Alkalis such as potassium hydroxide and sodium hydroxide, and metal salts such as silicon chlorides, and the like, and there can be a high purity. These heat exchange fluids are used as a raw material for reaction with other materials, or as a chemical solution used in a reaction process such as an etching solution, and controlled at a proper temperature by a heat exchanger and used for the purpose. The heat exchanger of the present invention can perform heating, cooling, or temperature control of these heat exchange fluids with high efficiency and without contamination of trace impurities.

[Heat transfer structure]

The heat transfer structure of the present invention has a surface to be a contact surface with the heat exchange fluid and a heat conductor. The contact surface of the heat transfer structure in contact with the heat exchange fluid is made of a material which is stable with respect to the heat exchange fluid. That is, a material that does not react with the surface of the heat transfer structure and a material to which the heat exchange fluid does not react or a material that does not dissolve the components of the heat transfer structure from the surface is selected in a temperature region where heat exchange is performed. The reactivity (corrosiveness) of the heat exchange fluid differs depending on the material of the surface of the heat transfer structure, the contact temperature, etc. Also, depending on the use and properties of the heat exchange fluid, the permissible range of purity after heat exchange differs, Can not be specified. For example, since a metal halide or an etching agent used for manufacturing a semiconductor device uses a high-purity material, the purity can not be lowered by the heat exchange treatment. However, in many cases, the change in the purity of the heat exchange fluid by the heat exchange treatment is not a problem in the case of a heat exchanger for a turbine.

Examples of the material (material) of the member to be the surface of the heat transfer structure in contact with the heat exchange fluid include metals such as iron, carbon steel, stainless steel, aluminum and titanium, synthetic resins such as fluororesin and polyester, and ceramics But it is preferable to use a fluororesin in the case of exchanging heat with corrosive acids. Examples of the fluororesin include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), poly (PTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinyl fluoride (PVF), fluorinated polypropylene Vinylidene fluoride (PVDF), and the like.

The heat transfer structure of the heat exchanger of the present invention has a heat conductor inside, and the heat conductor is made of a material having a higher thermal conductivity than the material of the heat transfer structure (in particular, the portion contacting the heat exchange fluid) (Heat exchanging fluid channel) and is mounted at a position that does not contact the heat exchange fluid.

The structure of the heat transfer structure will be described with reference to FIG. The heat exchanger 101 of FIG. 3 includes a heat transfer structure 6 having a body 61, a heat conductor 62, a heater plate 51 serving as a heat source, heat transfer plates 52a and 52b, And the heat from the heater plate 51 is diffused into the heat transfer structure 6 (the body 61 and the heat conductor 62) through the heat transfer plates 52a and 52b. The body 61 and the heat conductor 62 are heated by the diffused heat and the heat heats the heat exchange fluid passing through the flow path 7 through the contact surface 63. [ A dotted line arrow in Fig. 3 shows a state in which heat is transmitted from the body 61. Fig. Since the heat conductor 62 has a higher thermal conductivity than the material of the body 61, the temperature rises faster than the body 61, and heat exchange to the heat exchange fluid can be efficiently performed. The heat conductor 62 is embedded in the body 61 and is in contact with the heat transfer plate 52a or the heater plate 51. [ It is preferable that the heat conductor 62 and the flow path 7 approach each other as much as possible in order to effect efficient heat exchange. From the viewpoint of maintenance, the inner wall surface of the flow path 7 preferably has a flat or curved surface free from unevenness, but it is preferable that it has a zigzag structure from the viewpoint of enhancing heat exchange ability.

As shown in Fig. 3, the cylindrical heat conductors 62 can be provided by inserting them into the holes provided in the body 61 individually. 4, the heat transfer plate 52 and the plurality of heat conductors 62 are integrally formed and the heat conductors 62 are inserted into the holes provided in the body 61, as shown in Fig. The mounting position and the number of the heat conductors 62 are determined in consideration of the heat exchange efficiency and the like. In addition, by increasing the surface area of the heat conductor 62, heat can be diffused from the heat conductor 62 uniformly and efficiently. In order to enlarge the surface area, it is preferable that the outer surface of the heat conductor 62 has a zigzag structure as shown in Fig. In other words, it is preferable that the structure in which annular mountains are continuous in the longitudinal direction of the outer surface of the heat conductor 62 (that is, a structure in which mountains and valleys are alternately continuous). The structure in which the annular acid sequence is referred to includes a case in which an acid and a groove are formed in a spiral shape like an acid and a groove of a screw. More preferably, a zigzag structure is formed so that the surface area of the outer surface of the heat conductor 62 is, for example, 1.5 to 3 times the surface area of the outer surface of the cylindrical body of the same diameter without the acid (convex portion) . When the body 61 is made of a resin, it is installed in a flexible state before the resin is cured and then cured, or after the resin is hardened, a hole is drilled or the like to form a thermoconductor 62 of a zigzag structure, For example, by inserting a screw. When the body 61 is made of metal, drilling is the main factor.

13 is a schematic cross-sectional view showing a change in arrangement of the heat conductor 62. Fig. (a) shows an arrangement example in which two heat conductors 62 sandwiching the heat exchange fluid channel 7 extend from above. (b) shows an arrangement example in which the two heat conductors 62 sandwiching the heat exchange fluid channel 7 are extended from above and below. (c) shows an example of arrangement in which the four heat conductors 62 sandwiching the heat exchange fluid channel 7 are extended from above and below. (d) is a configuration example in which the outer surface of the heat conductor 62 has a zigzag structure in the example of the arrangement of the heat conductor 62 in (a). (e) is a configuration example in which the outer surface of the heat conductor 62 has a zigzag structure in the example of the arrangement of the heat conductor 62 in (b). (f) shows a configuration example in which the outer surface of the heat conductor 62 has a zigzag structure in the example of the arrangement of the heat conductor 62 in (c). 13 (a) to 13 (f), a plurality of heat conductors 62 are disposed opposite to each other with the heat exchange fluid channel 7 interposed therebetween.

13A to 13F are provided with heater plates 51a and 51b, heat transfer plates 52a and 52b, a body 61 and a heat exchange fluid flow path 7 . These elements are the same as those of the heat exchanger 101 shown in Figs. 3 and 5, except that there are two heater plates, and a description thereof will be omitted. 13 (a) and 13 (d), the lower heater plate 51b may not be provided.

Fig. 14 is a configuration example in which the heat transfer plate 52 and the plurality of heat conductors 62 are integrally formed as shown in Fig. 14 (a) to 14 (f), a plurality of heat conductors 62 are disposed opposite to each other with the heat exchange fluid channel 7 interposed therebetween. 4 and 13, except that the heat transfer plate 52 and the plurality of heat conductors 62 are integrally formed, and therefore the description thereof will be omitted.

15A and 15B are diagrams for explaining the temperature distribution in the case where heat conductors of different materials are arranged. Fig. 15A is a plan view and a temperature distribution chart when the same type of heat conductor 62 is arranged, and Fig. 15B is a diagram And a temperature distribution diagram of the case where the heat conductor 62 made of a material is mounted.

In all of the heat exchangers 104 shown in Figs. 15A and 15B, 135 heat-conducting bodies 62 for inserting the heat conductor 62 into the heat-transfer plate 52 and the body 61 (not shown) The mounting holes are provided at substantially equal intervals. Each of the heat conductors 62 is detachably mounted on the mounting plate of the heat transfer plate 52 and the body 61. For example, each of the heat conductors 62 may be formed by a screw having a flat head portion and screwed to the mounting hole. The plurality of heat conductors 62 may be formed by combining a plurality of heat conductors 62 made of a plurality of materials. By combining the heat conductors 62 made of a plurality of materials, the temperature distribution irregularity occurring on the upstream side and the downstream side of the flow path 7 can be solved. In addition, it is possible to reduce the manufacturing cost by disposing the heat conductor 62 made of an expensive material only at a necessary place and disposing the heat conductor 62 made of an inexpensive material at another place.

15 (a), all of the heat conductors 62 are made of aluminum-made fin, and in FIG. 15 (b), the heat conductors 62 from the left to the fifth column are made of aluminum And the sixth and subsequent heat conductors 62 from the left side are made of copper pins. That is, in FIG. 15A, 135 aluminum pins are mounted as the heat conductor 62, while in FIG. 15B, 45 copper pins are mounted on the upstream side of the heat conductor 62 And an aluminum pin is mounted on the downstream side.

15 (a) and 15 (b) are views showing an image of the temperature distribution. In FIG. 15A, the left half is relatively low temperature and the right half is relatively high temperature, whereas in FIG. 15B, the temperature distribution irregularity is once eliminated. Thus, by disposing the heat conductor 62 made of a material having a high thermal conductivity on the upstream side and disposing the heat conductor 62 made of a material having a relatively low thermal conductivity on the downstream side, the temperature distribution on the upstream side and the downstream side Can be reduced. By reducing the temperature distribution unevenness, it is possible to suppress deformation of the body, the heat transfer plate, and the like, and to prevent the life of the heater from becoming short. In addition, it has been conventionally required to lower the output so as to prevent the ΔT from increasing in the fluid in which heat denaturation occurs when the temperature at the time of passing through the inlet and the temperature difference ΔT at the time of passing through the outlet are increased. However, According to the heat exchanger, high-efficiency heat exchange can be performed.

16 is a plan view of the heat exchanger 104 in which the heat conductor 62 is arranged at different densities on the upstream side and the downstream side. The heat exchanger 104 includes all of the heat conductors 62 made of aluminum and the structure of the heat transfer plate 52 and the body 61 is the same as that of the heat exchanger 104 of FIG. . In Fig. 16, nine heat conductors 62 are arranged in the vertical direction from the left to the fifth column, and four or five heat conductors 62 are arranged in the vertical direction from the left to the sixth columns. As described above, even when the heat conductor 62 is arranged at a high density on the upstream side and the heat conductor 62 is arranged on the downstream side with a low density, temperature distribution irregularities on the upstream side and the downstream side can be reduced. In the heat exchanger 104 of Fig. 16, the heat conductor 62 made of a material having a different thermal conductivity is disposed on the upstream side and the downstream side, so that the temperature distribution irregularities on the upstream side and the downstream side can be controlled more precisely It is possible.

Fig. 17 is a view showing a sectional structure of a heat exchanger 105 in which a showerhead is formed, in which (a) shows a plane (horizontal direction) and (b) shows a section in a vertical plane (vertical direction). The heat exchanger 105 having the showerhead formed therein is provided with a heater plate 51, a heat transfer plate 52, a plurality of heat conductors 62 and a body 61 having a heat exchange fluid flow path 7 And a plurality of discharge ports 75 communicating with the flow path 7 are formed in the body 61. [ The heat exchanger 105 in which the shower head is formed has two inlets 83a and 83b and the heat exchanging fluid 73 is heated from the inlet to the flow passage 7 and discharged from the outlet 75. That is, in the heat exchanger 105 in which the shower head is formed, the discharge port 75 communicating with the outside world becomes an outlet.

15B, the plurality of heat conductors 62 are made of a copper-made pin-shaped member disposed on the upstream side close to the inlet ports 83a and 83b and an aluminum-made pin-shaped member disposed on the downstream side , And the temperature distribution irregularity over the entire length of the flow path 7 is minimized. In other words, a pin-shaped member made of copper is disposed mainly on the side close to both the left and right sides, and a pin-shaped member made mainly of aluminum is disposed on the center portion. A plurality of bent portions 71 are formed in the flow path 7. In the bent portions 71, the heat exchange fluid collides against the flow path walls to generate turbulent flow, thereby relieving uneven heating. Therefore, a fluid having substantially the same temperature is discharged from each of the plurality of discharge ports 75. The heat exchanger 105 in which the shower head is formed is mainly used for a gas shower which discharges gas, but may also discharge liquid.

The heat exchanger 105 in which the showerhead is formed is provided with a heat exchanger in which one or more showerheads are not formed at the upper end thereof and the two outlets of the heat exchanger 105 and the outlet of the upper heat exchanger are connected to the branch pipe (See Fig. 18 to be described later).

6 is a sectional view of a main portion of a cylindrical heat exchanger 102 embodying the present invention. A heat transfer structure 6 composed of a heat conductor 62 and a body 61 is provided on the inner surface of the cylindrical heat source 5. The heat conductor 62 has a zigzagged surface on the flow path side and a flat surface The body 61 is brought into contact with the heat source 5 so as to cover the surface of the heat conductor 62 and to form a flow path 7 to be in contact with the heat exchange fluid. It is preferable that the body 61 is a thin film formed on the surface of the heat conductor 62 and that the surface in contact with the heat exchange fluid has a zigzag shape like the heat conductor 62. [ The zig-zag shape in which the contact surface area is increased increases the heat exchange efficiency on the surface.

Fig. 12 is a schematic cross-sectional view for explaining the zigzag structure of the flow path of the heat exchange fluid, wherein (a) is a view for explaining a case where the surface area is doubled, and (b) is a view for explaining adjustment of the pitch depth.

12A is an example in which the inner surface of the heat transfer structure 6 in contact with the heat exchange fluid 73 is a zigzag structure in which the cross section of the inner surface is a continuous triangle having a side of 2 mm. That is, the inner surface of the heat transfer structure 6 has a structure in which annular mountains are continuous in the longitudinal direction thereof. According to this zigzag structure, since the surface area of the inner surface of the heat transfer structure 6 is twice as large as that of the flat inner surface without the zigzag structure, it is possible to double the heat exchange efficiency. The zigzag structure of the heat transfer structure 6 is not limited to that shown in Fig. 12, and a zigzag structure is formed so that the surface area of the inner surface of the heat transfer structure 6 is, for example, 1.5 to 3 times .

The heat exchange efficiency is improved as the surface area of the inner surface of the heat transfer structure 6 is increased. However, depending on the properties such as flow rate and viscosity of the heat exchange fluid 73, it may not be desirable to increase the surface area. 12 (b) shows a state in which a gap 74 is formed between the inner surface of the heat transfer structure 6 and the fluid 73. As shown in Fig. In this state, since the non-contact portion is formed on the inner surface of the heat transfer structure 6 and the fluid 73, the heat exchange efficiency is lowered. Therefore, when the occurrence of the non-contact portion due to the gap 74 is expected, it is necessary to adjust the pitch (groove) of the zigzag structure so as to prevent the non-contact portion from occurring. The cylindrical heat exchanger 102 may be configured to be detachable and a plurality of cylindrical heat exchangers 102 having different pitches may be prepared.

[Distance between the material of the heat conductor and the heat exchange fluid]

The material of the heat conductor 62 that has a higher thermal conductivity than that of the body 61 is used, but a good thermal conductivity is a relative contrast of the values of both materials, and an absolute value is not specified. For example, the thermal conductivity is about 0.2 W / (m 占 플라스틱) for plastics, about 0.25 for fluororesin, about 47 for carbon steel, about 15 for stainless steel, 237 for aluminum, 386 for pure copper, about 1 for PYREX Is usually expressed. Among them, the material may be selected in consideration of the relative thermal conductivity, and since the fluororesin has a low value among them, when the fluororesin is used as the body 61, the thermal efficiency is improved even if the material is made of a heat conductor. When the material of the heat transfer structure 6 (body 61) is a metal, for example, stainless steel is used as a body, the heat conductor is made of a material having a higher thermal conductivity than the material of the heat transfer structure 6 (body 61) A metal having a good thermal conductivity, for example, carbon steel, aluminum, and pure copper can be selected as a thermal conductor. However, the material (material) of the heat conductor is preferable as the thermal conductivity is higher.

For example, a heat exchanger in which the contact surface 63 of the heat exchange fluid and the heat transfer structure 6 is coated with a fluorine resin to make the body 61 stainless steel is known. However, a heat exchanger made of stainless steel and fluororesin The total heat transfer coefficient is 1070 W / (m ² · K) in stainless steel only, whereas when the corrosion resistant coating is formed at 500 μm, the total heat transfer coefficient is 291 and the total heat amount is 1/3 . It is reported that the heat transfer coefficient of 845 is obtained when a 50 mu m thick corrosion-resistant coating is formed.

Therefore, it is preferable that the distance between the heat conductor and the heat exchange fluid is as close as possible.

[Specific Example 1 of Heat Exchanger]

The structure of the heat exchanger according to the first embodiment of the present invention is specifically shown. The heat exchanger 103 shown in Fig. 7 is made of a rectangular parallelepiped having a size of 150 mm x 195 mm x 34 mm in height. The heat exchange fluid enters the inlet connector (inlet port) 81 and flows out from the outlet connector Heat exchange fluid is passed through the flow path 7 of the heat exchange fluid having many bending points (bent portions) 71 and 72 until it is heated. The flow path 7 is formed by forming a groove-like space in a body 61 made of a block made of a fluororesin. On both sides of the flow path 7, 172 heat conducting bodies 62 are provided at intervals of 600 mu m. The heat conductor 62 is composed of a dish-shaped small screw (a screw with a flat head portion) having a diameter of 3 mm and a length of 18 mm formed of a copper cruciform and has a hole formed in the body 61 of the heat transfer structure, And is screwed through the through-hole 52a. Since the upper surface of the screw is flat, the upper surface of the heat transfer plate 52a can be flush with one another. It is preferable that the body portion of the screw in which the groove is formed is a cylindrical shape having the same diameter and the tip is not narrow. By using standard screws for the heat conductor 62, it is possible to remarkably reduce the manufacturing cost of the heat exchanger. For example, it is disclosed that a JIS standard screw M3 x 20 mm pitch 0.5 mm (copper) and M4 x 12 mm pitch 0.7 mm (aluminum) are used.

A heat source (not shown) is provided so as to be in contact with at least a region of the heat transfer plate 52a where the heat conductor 62 is provided. It is preferable that the heat source is provided so as to be in contact with both surfaces of the heat transfer plates 52a and 52b. Examples of the heat source include a plate made of stainless steel having a heater capacity of 1600 W as a heat source and a mica plate having a nickel alloy having a heater capacity of 4000 W as a heat source. The exposed surface of the heat source is preferably covered with a heat insulating material, and more preferably, the entire surface of the outermost surface of the heat exchanger 103 is covered with a heat insulating material.

The heat transfer plate 52b is physically connected to the heat transfer plate 52a and the heat from the heat source is transmitted to the heat conductor 62 and the body 61 through the heat transfer plates 52a and 52b. In the configuration example of Fig. 7, a hollow rectangular parallelepiped structure having a heat transfer plate 52a as an upper surface and a heat transfer plate 52b as a bottom surface and a frame body connecting them is formed. The heat conductive plates 52a and 52b (and the frame body) may be made of the same material as the heat conductor 62, or may be made of a material having a higher thermal conductivity than the heat conductor 62. [

Since the distance between the heat conductor 62 and the flow path 7 (heat exchange fluid) approaches 600 占 퐉, the heat conduction is good. The flow path 7 through which the heat exchange fluid passes has a width of 6 mm, a depth of 20 mm, and a length of 1795 mm, and has curved points (curved portions) several times in the middle. In order to increase the bent portion, it is preferable not only to provide a bent portion for changing the traveling direction of the flow path by 180 占 but also to provide a return bending portion for returning the traveling direction of the flow path. That is, in the configuration example of Fig. 7, the return bending portion 72 for changing the traveling direction of the flow path by 90 degrees to the inlet side (IN direction) is provided and the two flow path systems of A and B are constituted to increase the bending portion . This flow path system is not limited to two in Fig. 7, but may be three or more. In this bending point (bent portion), the heat exchange fluid flowing through the flow path collides with the flow path wall to form a turbulent flow, so that heat exchange at the flow path wall (contact surface) becomes efficient. It is preferable to provide a plurality of heat conductors between the two flow paths 7 arranged in parallel. Here, the two parallel flow paths indicate, for example, that they are in the same arrangement relationship as the two flow paths to which "7, 7" is assigned in FIG. In another aspect, it is preferable that the flow path 7 is formed so as to run diagonally so as to escape to the gap of the heat conductor 62 arranged at substantially equal intervals.

The heat exchange efficiency can be improved by joining a plurality of the heat exchangers 103 of the present invention shown in Fig. 7 by the connectors 81 and 82. Fig. In addition, it is possible to install the heat conductor 62 while observing the heat exchange efficiency of the heat transfer body 62 and the number of the installation layers. When the temperature of the heat exchange fluid is too low, The mounting hole of the heat conductor 62 can be newly installed so that the heat conductor 62 can be installed.

Fig. 18 is a side view of the heat exchanger 103 shown in Fig. 7 stacked and made into a multi-stage heat exchanger. The inlet connector 81 of the upper heat exchanger 103 and the outlet connector 82 serving as the lower end are connected by the pipes 83a to 83c. In the example shown in Fig. 18, a four-stage structure is adopted, but the present invention is not limited to this structure, and any two or more stages can be used. When the heat exchanger has a multi-stage structure, the flow path 7 is heated not only by the upper heat source but also by the lower heat source. That is, in the example of Fig. 18, the heat transfer plate 52b is also heated from the heat source (heater plate) located below the heat transfer plate 52b. In the case of a multi-stage construction, the surface to be the laminated surface is not covered with the heat insulating material, but the heat source at the lower end directly contacts the heat conductive plate at the upper end.

As described above, in the heat exchanger of the present invention, by providing a multi-stage structure, the length of the flow path can be easily extended. Further, in the heat exchanger of the present invention, it is possible to cope with a change from a large flow rate (large flow rate) to a small flow rate by changing the caliber dimension and the total length of the flow channel without changing the internal structure in accordance with the flow rate of the heat exchange fluid.

For example, when a flow rate of 10 L / min or less in terms of nitrogen gas is thermally converted, a heat exchange performance of 80% or more can be obtained even if the size of the body is 1/2. In the case of exchanging heat at a flow rate of 50 L / min or more, it is possible to cope by increasing the body dimension.

[Specific example 2 of heat exchanger]

19 is a configuration diagram of the temperature control supply device 110 according to the second embodiment of the present invention. The temperature regulating supply device 110 is constituted by a cooling heat exchanger 106, a cooling device 111 and pipes 112a and 112b and 113a and 113b.

The cooling heat exchanger (106) is constituted by a heat transfer structure (6) and cooler plates (54a, 54b). As the heat transfer structure 6, the same heat exchanger as the heat exchangers 101 to 104 can be used. All of the cooler plates 54a, 54b are surrounded by a flow path through which refrigerant circulates. The refrigerant is, for example, an antifreeze or gas refrigerant. The refrigerant cooled by the cooling device 111 is supplied to the cooling heat exchanger 106 through the pipe 112a and absorbs the heat when passing through the cooling heat exchanger 106 and flows through the pipe 112b Returns to the cooling device 111, and is supplied to the cooling heat exchanger 106 through the pipe 112a again. The cooling heat exchanger 106 is supplied with the heat exchanging fluid 73 (for example, pure water) from the pipe 113a and cooled when passing through the cooling heat exchanger 106 and discharged from the pipe 113b do.

Hereinafter, specific examples of the present invention will be described as examples. However, the present invention is not limited to these examples.

Example 1

The heat exchanging efficiency of the present invention is improved by using the heat exchanger 12 having the same structure as the heat exchanger 103 of Fig. 7 described in the concrete example of the above-mentioned heat exchanger.

The test was carried out by arranging the apparatus shown in Fig. The air 9 whose flow rate was controlled by the flow controller 10 was made to contain water in the bubbling device 11 and then passed through the heat exchanger 12. [ The heat exchanger 12 is provided with an electric heating panel temperature control device 13, a PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) internal temperature measuring device 14 and an outlet gas temperature measuring device 15 Thereby monitoring the heat exchange. The temperature distribution on the surface of the body 61 was measured by thermography. The measurement results by thermography are shown in Fig. It was confirmed that the portion where the color is dark is the portion with the high temperature and the portion with the high temperature coincides with the portion where the heat conductor 62 is installed. Further, it was found that there is no deviation in the temperature distribution of the entire heat exchanger, and uniform heating can be performed.

Example 2

In this embodiment, the same apparatus as in Example 1 was used, and the outlet temperature was measured by testing at a set temperature of 40 to 160 DEG C and a flow rate of 10 to 50 L / min in a wide range. The results are shown in Fig. It has been found that the heat exchange rate is 80% or more in a wide range of set temperature and flow rate. It has been found that the heat exchanger of the present invention can flexibly cope with a wide range of flow rates in the same apparatus.

Example 3

In the present embodiment, the heat transfer panel used in the first embodiment is used to compare the performance of the heat exchanger of the present invention through the resin with the heat exchange fluid and the conventional heat exchanger through the stainless steel. In the present invention, similar to the first embodiment, the humidifying air was heat-exchanged. On the other hand, in the conventional heat exchanger, dry nitrogen was heat-exchanged. The results are shown in Fig. The metal 30 L is the measurement result of the heat exchanger using stainless steel, and the resin 30 L is the measurement result of the heat exchanger of the present invention. From Fig. 11, it is recognized that the heat exchanger of the present invention exhibits performance equivalent to that of a conventional product made of stainless steel, although the contact portion is made of resin.

Further, the heat exchanger of the present invention was tested for the mist of H ₂ O, and in the conventional product, dry nitrogen was used. Since the air containing the mist of water requires heat corresponding to latent heat of water, it can be seen that the present invention has higher performance than that shown in FIG.

[Industrial applicability]

INDUSTRIAL APPLICABILITY The heat exchanger of the present invention makes it possible to prevent contamination of a heat exchange fluid due to corrosion and corrosion of a heat exchanger caused by a heat exchange fluid and to improve the purity of a corrosive medicine and a high purity substance Heating, cooling and temperature control can be performed efficiently by heat exchange. For example, it is useful for heating and cooling chemicals used in a semiconductor manufacturing process for handling a high-purity substance. INDUSTRIAL APPLICABILITY The heat exchanger and the heat exchange method of the present invention are widely used as high-efficiency heat exchangers such as a heating / evaporating apparatus and a cooling / condensing apparatus requiring chemical resistance, purity of products such as chemical, medicine, food, fiber, It becomes possible to use it.

1: Tubes made of resin
2: inlet of the object to be heated
3: Heating object outlet
4: heat medium
5: Heat source
51: heater plate
52: Heat transfer plate (heat transfer member)
53: Insulation
54: Cooler plate
6: Heat transfer structure
61: Body
62: thermoconductor
63: contact surface
7: Heat exchanging fluid channel
71: bent portion of the heat exchanging fluid channel
72: Return bend portion of the heat exchanging fluid channel
73: Heat exchange fluid
74: Pore
75: Outlet
8: Connector
81: Inlet connector (inlet)
82: outlet connector (outlet)
83: Piping
9: Air
10: Flow control device
11: Air bubbling device in the water
12: Heat exchanger
13: Heating panel temperature control · Measuring device
14: Internal temperature measuring device
15: Exit gas temperature measuring device
101 to 104: Heat exchanger
105: Heat exchanger formed with showerhead
106: cooling heat exchanger
110: Temperature control supply
111: cooling device
112 to 113: Piping

Claims (24)

A heat transfer structure for contacting a heat source and a heat exchange fluid and a heat transfer member for transferring heat from the heat source to the heat transfer structure, In a heat exchanger for conducting electrothermal heat exchange through a contact surface,
Wherein the heat transfer structure comprises a body having an inlet, an outlet, and a heat exchange fluid flow path, and a plurality of heat conductors mounted on the body,
The inner wall surface of the heat exchange fluid channel constituting the contact surface with the heat exchange fluid is made of a material which is stable with respect to the heat exchange fluid,
Wherein the heat conductor is made of a material having a higher thermal conductivity than the material of the body,
Wherein the heat conductor is mounted at a position in the vicinity of the heat exchange fluid passage and not in contact with the heat exchange fluid,
heat transmitter. The method according to claim 1,
Wherein a plurality of heat conductors sandwich the heat exchanging fluid flow path and include a plurality of heat conductors arranged opposite to each other. 3. The method according to claim 1 or 2,
Wherein the heat transfer member is composed of two heat transfer members sandwiching the body, and at least one heat transfer member extends from each of the two heat transfer members. 4. The method according to any one of claims 1 to 3,
Wherein the heat conductor has a pin-type structure. 5. The method of claim 4,
And at least a part of the plurality of heat conductors is formed integrally with the plate-like heat transfer member. The method according to claim 4 or 5,
Wherein at least some of the plurality of heat conductors have an outer surface of a zig-zag structure. The method according to claim 6,
Wherein the surface area of the outer surface is 1.5 to 3 times as large as that of the outer surface without the convex portion. 8. The method according to claim 6 or 7,
Wherein the thermally conductive body having the outer surface of the zigzag structure is a screw. 9. The method of claim 8,
Wherein the thermally conductive body having the outer surface of the zigzag structure is a flat head screw. 10. The method according to any one of claims 1 to 9,
Wherein the heat exchanging fluid channel includes a plurality of bent portions. 11. The method of claim 10,
Wherein the heat exchanging fluid channel includes a return bend portion that changes direction toward the inlet side. 12. The method according to any one of claims 1 to 11,
Wherein at least a part of the heat conductor disposed on a side closer to the inlet is made of a material having a higher thermal conductivity than a heat conductor disposed on a side farther from the inlet. 13. The method according to any one of claims 1 to 12,
Wherein a number of heat conductors is larger on the side closer to the inlet than on the side far from the inlet, and the heat conductors are disposed at a higher density. The method according to claim 12 or 13,
Wherein the outlet is an outlet communicating with the outside world. A heat exchanger comprising a plurality of heat exchangers according to any one of claims 1 to 13. 16. The method according to any one of claims 1 to 15,
Wherein an inner wall surface of the heat exchange fluid channel is a resin. 16. The method according to any one of claims 1 to 15,
And the inner wall surface of the heat exchange fluid channel is metal or carbon. 18. The method according to any one of claims 1 to 17,
Wherein the plurality of heat conductors include a heat conductor made of copper and a heat conductor made of aluminum. 19. The method according to any one of claims 1 to 18,
The heat source causes heating. 19. The method according to any one of claims 1 to 18,
The heat source causes heat absorption, the heat exchanger. 20. A heat exchange method for performing electrothermal heat exchange with a fluid by using the heat exchanger according to any one of claims 1 to 20. A heat exchange method for performing heat exchange with a fluid by using the heat exchanger according to claim 12,
A heat conductor made of a material having a relatively high thermal conductivity as compared with the side far from the inlet is disposed near the inlet and a heat conductor made of a material having a relatively low thermal conductivity as compared with the side closer to the inlet, Thereby suppressing unevenness in the temperature distribution occurring on the upstream side and the downstream side of the heat exchange fluid channel. 14. A heat exchange method for performing electrothermal heat exchange with a fluid by using the heat exchanger according to claim 13,
A heat conductor made of a material having a relatively high thermal conductivity as compared with the side far from the inlet is disposed near the inlet and a heat conductor made of a material having a relatively low thermal conductivity as compared with the side closer to the inlet, Thereby suppressing unevenness in the temperature distribution occurring on the upstream side and the downstream side of the heat exchange fluid channel. A heat exchange method for performing electrothermal heat exchange with a corrosive fluid by using the heat exchanger according to claim 16.

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