WO2015072509A1

WO2015072509A1 - High-efficiency heat exchanger and high-efficiency heat exchange method

Info

Publication number: WO2015072509A1
Application number: PCT/JP2014/080055
Authority: WO
Inventors: 木村　洋一
Original assignee: 四国計測工業株式会社
Priority date: 2013-11-15
Filing date: 2014-11-13
Publication date: 2015-05-21
Also published as: TW201533418A

Abstract

[Problem] To provide a heat exchange technique with which a highly efficient heat exchange can be achieved without corrosion of the device by the fluid subjected to heat exchange, and a technical means for vaporizing and atomizing a fluid simultaneous with the exchange of heat, and a heat exchanger for which the heat exchange capability can be adjusted in accordance with the use. [Solution] A heat exchanger equipped with: a chamber; a nozzle that sprays a pressurized fluid, supplied from a fluid supply path, into the chamber; a thermal source that imparts heat or cold to the atomized fluid in the chamber; and a orifice that is connected to an outlet through which fluid in the chamber is discharged, and that keeps the interior of the chamber at a higher pressure than atmospheric pressure.

Description

High efficiency heat exchanger and high efficiency heat exchange method

The present invention relates to a heat exchange technique in which the field of application is not limited. It is particularly useful for heat exchange of gases or liquids of corrosive substances such as acids and alkalis, temperature control of high-purity water, high-purity silicon compounds when manufacturing semiconductors, etc. To solve the problems of corrosion of equipment and contamination of high-purity substances and to improve the heat exchange rate.
That is, the present invention can provide a high-efficiency heat exchanger and heat exchange method with less corrosion of the apparatus and contamination by impurities in all technical fields that require cooling, heating, and temperature control of substances.
In this specification, not only a heat source but also a heat absorption source may be referred to as a “heat source”. In addition, the “fluid” in the present specification includes those accompanied by a phase change (for example, a phase change from liquid to gas) by heating or endotherm.

A heat exchanger is a device that heats or cools one object by directly or indirectly contacting two objects with different temperatures, and heats or cools one object. Boilers, steam generators, food production, chemical production, refrigeration For industrial use such as storage, it is used for cooling, heating, and refrigeration.
A heat exchanger usually has a structure corresponding to the characteristics of the heat exchange material. For example, for a chemical solution that performs heat exchange with a highly corrosive chemical solution such as hydrofluoric acid, nitric acid, and sulfuric acid. As a heat exchanger, it is necessary to heat and cool fluids such as highly corrosive strong acids and strong alkalis using chemical resistant heat exchangers. In this case, resin materials that are not easily affected by acids and alkalis. The indirect heating in which the contact portion material made of is immersed in a heat medium to perform heat exchange is typical.

FIG. 1 is a schematic diagram showing a typical indirect heat exchange. While a heat exchange fluid (acid, alkali, water, etc.) is conveyed from the inlet 2 to the outlet 3 in the resin pipe 1, FIG. Heat exchange is performed through the resin pipe 1 by the heat medium 4 whose temperature is adjusted by the heat source 5. This method can increase the surface area of the resin pipe 1 on the contact side, for example, lengthen the pipe 1 in the heat medium 4 to increase the contact area with the heat medium 4 and improve the heat exchange efficiency. However, this may result in a costly device including a device and containers for adjusting the temperature of the fluid with a heat source. A typical example of a direct heating method in which heat is exchanged directly with a heat source without using a heat medium is shown in FIG. 2 and is made of a material having good corrosion resistance with respect to the heat exchange fluid, and has excellent temperature characteristics. The heat source 5 comes into contact with the tube 1 made of the above material to exchange heat directly.
In any method, the heat exchange fluid or the heat exchange medium does not corrode the equipment such as the transfer pipe, the heat exchange process does not contaminate the heat exchange fluid, and the heat exchange is performed efficiently. ,Is required.

Therefore, the transport pipe is protected by being covered with a resin or ceramics so that the transport pipe is not affected by the heat exchange medium or the heat exchange fluid.
For example, fluororesins are known to be excellent in corrosion resistance and heat resistance against various chemicals. However, if the transport tube is made of only fluororesin, the fluororesin itself is a poor conductor of heat. In order to improve the disadvantages of low exchange efficiency, long time to reach the specified temperature, and poor temperature control accuracy at the specified temperature, the fluororesin is used on the surface of metal with good thermal conductivity. Many proposals have been made to form a film.
For example, in a gas-use facility member having at least two layers of a coating film containing a fluorine resin on a substrate, the content of the fluorine resin in each layer is sequentially changed in accordance with the uppermost layer film from the lowermost layer film coated on the substrate. Gas use equipment member (Patent Document 1) used as a heat exchanger or the like having a coating film that is increased and the content of inorganic filler is sequentially reduced,

The present invention provides a plate fin type heat exchanger and a plate type heat exchanger using the aluminum alloy material in a heat transfer part using an aluminum alloy material having excellent corrosion resistance and a corrosive fluid as a medium. It has an organic phosphonic acid undercoat on the aluminum alloy material surface used in plate fin type heat exchangers, plate type heat exchangers, etc. using a heat transfer part with a fluid as a medium, and further after drying It has a fluorine resin paint film with an average thickness of 1 to 100 μm and improves the durability of the adhesion of the paint film, and has excellent corrosion resistance against corrosive fluids such as seawater (Patent Literature) 2) has been proposed.
As described above, there is a general method of resin coating on a metal having good thermal conductivity. However, since the two materials have different thermal expansion, the coating layer may peel off in response to expansion and contraction. Problems that cause corrosion of parts and contamination by metals may occur. Furthermore, in this method, the target fluid from the pinhole in the resin coating portion permeates and the same problem cannot be avoided.

JP 2004-283699 A JP 2008-156748 A

In a conventional heat exchanger, when heat exchange is performed on a heat exchange fluid, a method of exchanging heat by bringing a member in contact with the fluid into contact with a heat medium such as a heat source or a refrigerant is generally used. It was selected according to. However, the material of the selected contact member is not necessarily excellent in heat conduction. In this case, for example, a large number of electric heaters that are heat sources or a large-capacity electric heater can be used. It may be necessary to compensate for the disadvantages of low members. As a result, it was often encountered that the energy efficiency of heat exchange was low and the equipment was large.

It is an object of the present invention to provide a heat exchange technique that does not cause corrosion of equipment due to a heat exchange fluid and that can realize highly efficient heat exchange.
Another object of the present invention is to provide technical means for vaporizing or atomizing a liquid simultaneously with heat exchange.
Furthermore, it aims at providing the heat exchanger which can adjust heat exchange capability according to a use.

The present invention is composed of the technical matters described below.
1st invention discharges the fluid in a chamber, the nozzle which sprays the pressurized fluid supplied from the fluid supply path in the chamber, the heat source which gives heat or cold to the fluid sprayed to the chamber, and the chamber The heat exchanger includes an orifice that communicates with an outlet and maintains an interior of the chamber at a higher pressure than atmospheric pressure.
According to a second invention, in the first invention, heat exchange is performed by generating convection in a chamber. The third invention is the second invention, wherein the flow rate of the nozzle is the orifice. It is characterized in that it is substantially directly proportional to the square of the aperture diameter.
According to a fourth invention, in the first invention, the pressurized fluid supplied from the fluid supply path is a pressurized liquid, and the nozzle sprays the pressurized liquid using a mist having a diameter of 20 to 60 μm. It is characterized by being a nozzle.
According to a fifth invention, in any one of the first to fourth inventions, the inner wall surface of the chamber has a zigzag structure.

A sixth invention is the invention according to any one of the first to fourth inventions, comprising: an inner wall member constituting the inner wall surface of the chamber; and a heat conductor that transfers heat from a heat source to the inner wall member. Is made of a material having a higher thermal conductivity than the inner wall member.
According to a seventh aspect, in the sixth aspect, the surface of the heat conductor in contact with the inner wall member is a surface of a zigzag structure, and the surface of the inner wall member in contact with the heat conductor is a surface of a zigzag structure. It is characterized by.
According to an eighth invention, in any one of the first to fourth inventions, the nozzle is a diffusion nozzle that sprays so that a part of the fluid supplied from the fluid supply path collides with the inner wall surface of the chamber. And
A ninth invention is characterized in that, in the eighth invention, a heat conductor having a vertical length shorter than that of the heat source is arranged at a portion where the fluid sprayed from the nozzle collides.
A tenth invention is characterized in that, in any one of the first to fourth inventions, the chamber is constituted by connecting a plurality of hollow blocks.
An eleventh invention is characterized in that, in the tenth invention, the block is a pipe having a dimension defined by an industry standard.
According to a twelfth aspect, in the eleventh aspect, the block includes a pair of flanges provided at end portions, and the flanges have dimensions defined by an industry standard.

A thirteenth aspect of the present invention is a heat exchange method for performing heat transfer type heat exchange with a fluid jetted from a nozzle into a chamber using the heat exchanger according to any one of the first to fourth aspects.
A fourteenth aspect of the invention is a heat exchange method that uses the heat exchanger according to the fourth aspect of the invention to vaporize the fluid ejected from the nozzle into the chamber and to exchange heat.

According to the present invention, there is no corrosion of equipment due to a heat exchange fluid, and highly efficient heat exchange can be realized.
Further, the present invention can provide technical means for vaporizing or atomizing a liquid simultaneously with heat exchange.
Furthermore, it is possible to provide a heat exchanger in which the length and inner diameter can be easily adjusted according to the application.

It is the schematic which shows the heat exchange by the conventional typical indirect heating. It is the schematic which shows the heat exchange by the conventional typical direct heating. It is a side schematic sectional drawing of the heat exchanger which concerns on the example of 1st Embodiment. It is a schematic cross section explaining the zigzag structure of the inner peripheral wall of a heat exchange chamber, Comprising: It is a figure explaining the case where a surface area is doubled. It is a graph which shows the difference in the heating capability when not providing with the unevenness | corrugation in the inner peripheral wall of a heat exchange chamber. It is a graph which shows the relationship between an orifice aperture diameter and a spray nozzle flow rate. It is a side schematic sectional drawing explaining the structure of the heat exchanger which concerns on the example of 2nd Embodiment. It is a figure explaining the vaporization performance test method of the heat exchanger which concerns on the example of 2nd Embodiment. It is a side schematic sectional drawing which shows the structure of the heat exchanger which concerns on the example of 3rd Embodiment. It is a side view of the heat exchanger which concerns on the example of 4th Embodiment. It is a figure which shows the structure of one block, Comprising: (a) is a top view, (b) is a sectional side view.

Below, the embodiment of the heat exchanger of this invention is described.
<< First Embodiment >>
FIG. 3 is a schematic side sectional view of the heat exchanger 10 according to the first embodiment of the present invention.
As shown in FIG. 3, the heat exchanger 10 of the present invention includes a spray nozzle 15 serving as a fluid inlet, an outlet pipe 16 serving as a fluid outlet, and a cylindrical chamber 17.
The spray nozzle 15 is in fluid communication with the fluid supply pipe 14 and sprays fluid into the chamber 17. When the fluid to be sprayed is a liquid, it is preferable to increase the surface area of the misted fluid by reducing the mist diameter of the fluid passing through the spray nozzle 15, for example, the mist diameter is 20 to 60 μm (preferably 20 μm). To 40 μm). The total surface area when the mist diameter is 30 μm is about 2.6 times the total surface area when the mist diameter is 80 μm. Further, the spray nozzle 15 is preferably made of a material such as a resin having a low thermal conductivity. This is because when the spray nozzle 15 is heated, there is a problem that a reaction occurs in the nozzle portion and a blockage occurs. The spray nozzle 15 can be selectively used as a one-fluid nozzle or a two-fluid nozzle depending on the application.
The outlet pipe 16 having an orifice maintains the internal pressure of the chamber 17 at a higher pressure (for example, atmospheric pressure + 0.15 to 0.25 atm) than the atmospheric pressure by restricting the outlet of the chamber 17.

The heat source 13 installed around the side of the chamber 17 exchanges heat with the inner space of the chamber 17 via the cylindrical inner wall member 11 and the heat transfer member 12. The heat source 13 may be a heating source (for example, a stainless steel heater plate having a nichrome wire with a capacity of 2 kW) or a heat absorbing source (for example, a cooler plate having a flow path through which an antifreeze liquid or a gas refrigerant circulates). In some cases. The inner wall member 11 is made of, for example, a metal (including an inner wall surface coated with a resin) or a resin. As will be described later, the heat transfer member 12 is made of a material having better thermal conductivity than the inner wall member 11.
The cylindrical chamber 17 is configured with a length sufficient to cause convection in the internal space, and is closed by an upper flange portion 18 and a lower flange portion 19. In the preferred embodiment of the present invention, a plurality of chambers can be connected by a flange portion.

Subsequently, the heat exchange mechanism of the heat exchanger 10 of the present invention will be described. There are (1) a collision method, (2) an air contact method, and (3) a physical contact method (see FIG. 3). The heat exchanger of the present invention is an atomizer type heat exchanger that realizes highly efficient heat exchange using all the methods (1) to (3). The fluids to be heat exchanged by the heat exchanger are liquid and gas. Here, heat exchange may or may not involve phase change. Specifically, liquid is introduced and gas is discharged, liquid is introduced and liquid is discharged, liquid is introduced and steam is discharged, and gas is introduced. It is disclosed that the heat exchange is performed in such a manner that the liquid is discharged, the gas is introduced, and the gas is discharged. In this mode, the liquid is introduced and the liquid is discharged.

(1) The fluid of a ° C. introduced into the spray nozzle is injected from the spray nozzle 15 into the heat exchange chamber 17, collides with the inner wall of the heat exchange chamber 17, and is heat exchanged. (2) Next, the fluid that has just been sprayed from the spray nozzle 15 and has not reached the desired b ° C. undergoes heat exchange with the gas (including mist) that has reached the desired temperature near b ° C. by air contact. . Here, the heat exchange chamber 17 is a closed space provided with an orifice opening. A swirling flow is generated in the heat exchange chamber 17 by the action of the orifice, and heat exchange is performed with high efficiency (swirl effect). The swirl effect is particularly effective in an aspect in which liquid is introduced and gas is discharged, and an aspect in which liquid is introduced and vapor is discharged. (3) Furthermore, the fluid swirling in the heat exchange chamber 17 is subjected to heat exchange by making physical contact with the inner wall of the heat exchange chamber 17.
The fluid that has reached the desired temperature b ° C. through the above process flows out from the outlet of the outlet pipe 16 having an orifice.

[Heat transfer member]
A heat transfer member 12 that transfers heat from the heat source 13 to the inner wall member 11 is disposed on the inner surface of the cylindrical heat source 13. That is, the heat transfer member 12 is disposed so that the zigzag surface is in contact with the space and the flat surface is in contact with the heat source 13. Here, the zigzag shape refers to a structure in which annular peaks are continuous in the longitudinal direction of the outer surfaces of the inner wall member 11 and the heat transfer member 12 (that is, a structure in which peaks and valleys are alternately continued). The structure in which the annular ridges are continuous includes a case where ridges and grooves are formed in a spiral shape like a thread ridge and a groove. Preferably, the zigzag structure is used so that the surface areas of the outer surface of the inner wall member 11 and the heat transfer member 12 are, for example, 1.5 to 3 times the surface area of the outer surface of a cylindrical body having the same diameter without a mountain (convex portion). Form. By making the zigzag shape with an increased contact surface area, the heat exchange efficiency on the surface is improved.

The heat transfer member 12 is made of a material having a better thermal conductivity than the inner wall member 11. The better heat conductivity is a relative comparison of the values of both materials, and an absolute value is specified. It is not something. For example, the thermal conductivity of plastic is about 0.2 W / (m · K), about 0.25 fluorine resin, about 47 carbon steel, about 15 stainless steel, aluminum 237, pure copper 386, Pyrex glass (PYREX: A value of about 1 is usually indicated. Of these, the material may be selected in consideration of the relative thermal conductivity. Since the fluororesin has a low value, the material of any material is used when the fluororesin is used as the inner wall member 11. Even if the heat transfer member 12 is adopted, the thermal efficiency is improved. Further, when the material of the inner wall member 11 is a metal, for example, when stainless steel is used as the inner wall member, the heat transfer member is made of a metal having a higher thermal conductivity than the material of the inner wall member 11, such as carbon steel, aluminum, or pure copper The heat transfer member 12 can be selected. However, the material (material) of the heat transfer member 12 is preferably as the heat conductivity is higher.

For example, a heat exchanger in which the contact surface of the inner wall member 11 is coated with fluorine resin and the inner wall member 11 itself is made of stainless steel is known. However, a plate having a corrosion-resistant coating made of 8 mm stainless steel and fluorine resin is known. In the example where the overall heat transfer coefficient is measured, it is 1070 W / (m ² · K) for stainless steel alone, but when the 500 μm corrosion resistant coating is provided, the coefficient is 291 and the heat transfer amount is 1/3. It has been. It has also been reported that when a 50 μm corrosion resistant coating is provided, the heat transfer coefficient is 845. Therefore, it is preferable to make the distance between the heat transfer member 12 and the heat exchange fluid as close as possible.

[Inner wall member]
The inner wall member 11 is made of a material that is stable with respect to the heat exchange fluid 7. That is, a material that does not react with the inner surface of the inner wall member 11 and the heat exchange fluid or a material that does not elute components of the inner wall member 11 from the inner surface is selected in a temperature range where heat exchange is performed. The reactivity (corrosiveness) of the heat exchange fluid varies depending on the material of the surface of the heat transfer structure and the contact temperature, and the allowable range of purity after heat exchange also depends on the application and properties of the heat exchange fluid 7. Because they are different, it is not possible to specify them in general. For example, a metal halide or an etching agent used for manufacturing a semiconductor device uses a high-purity substance, so that a decrease in purity due to heat exchange treatment is not allowed. However, in the case of a heat exchanger for turbines, changes in the purity of the heat exchange fluid due to the heat exchange process are often not a problem.

The material (material) of the inner wall member 11 is appropriately selected from metals such as iron, carbon steel, stainless steel, aluminum and titanium, synthetic resins such as fluorine resin and polyester, ceramics, etc. In the case of exchanging heat with highly corrosive acids, it is preferable that at least the inner surface portion is made of a fluorine resin. Examples of the fluorine resin include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polychlorotrifluoroethylene ( PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinyl fluoride (PVF), fluorinated polypropylene (FLPP), polyvinylidene fluoride (PVDF), etc. Can be illustrated.

[Zigzag structure of inner wall member]
As shown in FIG. 4, the inner wall member 11 has a zigzag structure on the inner peripheral wall of the heat exchange chamber 17. That is, the inner surface of the inner wall member 11 has a structure in which an annular crest is continuous in the longitudinal direction. In FIG. 4, a configuration example is disclosed in which the inner surface of the inner wall member 11 in contact with the heat exchange fluid 7 has a zigzag structure in which an equilateral triangle with a cross section of 2 mm is continuous, and the surface area is doubled. Yes. According to this zigzag structure, the surface area of the inner surface of the inner wall member 11 is twice that of the flat inner surface without the zigzag structure, so that the heat exchange efficiency can be doubled. The zigzag structure of the inner wall member 11 is not limited to that shown in FIG. 4, and the zigzag structure is such that the surface area of the inner surface of the inner wall member 11 is, for example, 1.5 to 3 times that of the inner surface without peaks (convex parts). Is disclosed. The heat exchange chamber 17 may be constituted by a detachable cylindrical member, and a plurality of cylindrical members having different pitches may be prepared.

FIG. 5 is a graph showing the difference in heating ability between when the unevenness (zigzag structure) is provided on the inner peripheral wall of the heat exchange chamber 17 and when it is not provided. The heat exchange fluid 7 is water, the temperature of the heater as the heat source 13 is set to 150 ° C., and the water temperature at the chamber outlet is measured. When the unevenness is provided, the temperature increase rate is 54.3 to 58.5%. On the other hand, it was confirmed that the temperature increase rate was 45.0 to 48.5% when the unevenness was not provided. The test results in FIG. 5 are for the case where the inner wall member 11 is of a metal type (SUS316), but generally the difference in temperature rise rate when the inner wall member is of a metal free type (PTFE) is about 10%. However, the temperature rise rate when the inner wall member is a metal-free type is estimated to be about 45 to 50%.

[Relationship between orifice diameter and flow rate]
In the present invention, the internal pressure in the chamber 17 is increased by restricting the outlet of the chamber 17 with the orifice 16. Here, constricting the outlet of the chamber 17 with the orifice 16 leads to an increase in internal pressure, which is disadvantageous for atomizing or vaporizing the liquid, but on the other hand, convection is generated, thereby increasing the heating efficiency. In the present invention, in order to increase the heating efficiency, the outlet of the chamber 17 is appropriately narrowed by the orifice 16 to realize high-efficiency heat exchange in harmony with atomization or vaporization performance reduction and heating efficiency improvement.
FIG. 6 is a graph showing the relationship between orifice orifice diameter and spray nozzle flow rate. In the chamber 17 having an inner diameter of 77 mm, the relationship between the flow rate of the spray nozzle and the orifice throttle diameter, which achieves a differential pressure of about 0.2 atm (= 20000 Pa) between the chamber internal pressure and the atmospheric pressure, which is considered preferable when water is vaporized, is measured. is there. From FIG. 6, it was confirmed that the flow rate suitable for realizing the differential pressure of about 0.2 atm is substantially directly proportional to the square of the throttle diameter. The relationship between the spray nozzle flow rate and the orifice throttle diameter is presumed not to change even when the chamber inner diameter or the differential pressure changes.

[Heat exchange fluid]
The heat exchange fluid 7 in the present invention is not particularly limited, and examples thereof include hydrochloric acid, sulfuric acid, nitric acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, and fluorination. Examples include solutions or gases such as corrosive acids such as silicic acid and boric acid, alkalis such as ammonia, potassium hydroxide and sodium hydroxide, and metal salts such as chlorinated silicon, and high-purity water. . These heat exchange fluids are used as raw materials for reaction with other substances or as chemicals used in reaction processes such as etching liquids, and are used for purposes that are controlled to an appropriate temperature by a heat exchanger. Is done. The heat exchanger of the present invention can heat, cool, or control the temperature of these heat exchange fluids with high efficiency and without contamination by trace impurities.
For example, tin tetrachloride (SnCl ₄ ) used in the TCO (transparent electrode film) SiO ₂ film forming process is difficult to control ON / OFF because the vaporization is controlled by the conventional bubbling method, and the concentration also changes over time. However, according to the heat exchanger 10 of the present invention, the problem can be solved and the yield can be improved, although the purity of SnCl ₄ is unstable and the product is deposited inside the injector. It becomes possible.

<< Second Embodiment >>
FIG. 7 is a side schematic cross-sectional view illustrating the configuration of the heat exchanger 20 according to the second embodiment of the present invention. The heat exchanger 20 is an atomizer type heat exchanger, and includes a cylindrical chamber portion 24, a spray nozzle 25, and an orifice 26 provided at the lower end of the chamber portion 24 as main components.
The spray nozzle 25 is a two-fluid nozzle. A pressurized gas such as nitrogen gas is supplied from a gas supply pipe 61 communicating with the gas supply apparatus 60, and a liquid supply pipe 62 communicating with a liquid reservoir (not shown). Pressurized liquid is supplied. This liquid is vaporized or atomized and sprayed when passing through the spray nozzle, and is convected in the heat exchange chamber 27 by the effect of the orifice 26. The inner wall of the heat exchange chamber 27 is constituted by a heat transfer inner wall 21 having a zigzag structure. This zigzag structure is preferably provided in a portion that occupies half or more of the total area of the inner surface of the heat exchange chamber 27, and more preferably in a portion that occupies 2/3 or more of the total area of the inner surface. The heat transfer inner wall 21 may be made of a single material, or, as in the first embodiment, the chamber side is made of a first material that is highly corrosive, and the side in contact with the heat source 22 is the first material. In some cases, the second material may have a higher thermal conductivity than the material. The length of the heat exchange chamber 27 in the vertical direction is preferably 50 cm or less.

The heat transfer inner wall 21 is covered with a heat source 22, and the liquid vaporized or atomized in the heat exchange chamber exchanges heat with the heat transfer inner wall 21 while convection. The heat source 22 is a heater or a cooler that covers the heat transfer inner wall 21, for example, a curved plate-like heat source configured by a heating wire or Peltier, and a spiral flow path in a cylindrical member having a convection space. And a structure in which a gas or liquid for heat exchange flows and a tube in which a gas or liquid for heat exchange flows are spirally wound around the cylindrical member. The length of the heat source 22 in the vertical direction is preferably set to a length that covers the entire heat exchange chamber 27 or substantially the whole. The outer surface of the heat source 22 is covered with a heat insulating material 23 so as not to be affected by the outside air temperature.
The spray nozzle 25 and the orifice 26 are provided so as to face each other at the center of the chamber portion 24 in the vertical direction. As the spray nozzle 25, for example, a spray nozzle made of metal or Teflon (registered trademark) with a flow rate of several tens g / min is used. As the orifice 26, for example, one having a diameter of about 10 mm is used.

Using the heat exchanger 20 of this embodiment, the liquid vaporization performance was verified. The heat exchanger 20 used for verification has the configuration shown in FIG. 7, and the heat transfer inner wall 21 is made of stainless steel. Comparative Example 1 has the same configuration as that of the second embodiment except that the heat transfer inner wall 21 does not have a zigzag structure on the inner wall surface.
FIG. 8 is a diagram illustrating a vaporization performance test method for the heat exchanger 20 according to the second embodiment. In the vaporization performance test, pressurized nitrogen gas and water are supplied to the spray nozzle 25 of the second embodiment and the comparative example 1, sprayed into the heat exchange chamber 27, and glass is discharged from the outlet pipe 16 communicating with the orifice 26. The fluid was jetted onto the plate, and the glass surface was visually determined. Judgment criteria are as follows.

[Criteria]
○ = Steam is not visible at the discharge port. The glass surface is cloudy.
Δ = Steam is confirmed at the discharge port. Condensation on the glass surface.
X = Liquid droplets are observed at the discharge port.

The vaporization performance test was performed under the verification conditions A to C shown in Table 1 below, and the results shown in Table 2 below were obtained.

[Table 1]

[Table 2]

From the above verification results, it was confirmed that the heat exchanger 20 of the present embodiment example having a zigzag structure on the inner wall surface of the chamber has high vaporization performance.

<< Third Embodiment >>
FIG. 9 is a schematic side cross-sectional view showing the configuration of the heat exchanger 30 according to the third embodiment. In the following, differences from the second embodiment will be mainly described.
In the heat exchanger 30 of the third embodiment, the heat transfer member 32 that transfers the heat from the heat source 33 into the chamber 37 is disposed above the heat exchange chamber 37 (near the discharge port of the spray nozzle 35). Yes. In the present embodiment, unlike the first and second embodiments, the vertical length of the heat transfer member 32 is configured to be shorter than the length of the heat source 33. The length of the heat source 33 is not limited to the illustrated mode. For example, the vertical length of the heat transfer member 32 is provided so as to cover 1/5 to 1/2 of the vertical length of the heat exchange chamber 37. Is disclosed.
Further, the heat transfer member 32 is made of a material having a higher thermal conductivity than the inner wall member 31. For example, it is disclosed that the inner wall member 31 is made of stainless steel and the heat transfer member 32 is made of copper.
Also in the present embodiment, the inner wall surface of the inner wall member 31 has a zigzag structure to increase the surface area, thereby increasing the heat exchange capability. In FIG. 9, the contact surface between the inner wall member 31 and the heat transfer member 32 is a flat surface. However, as in the first embodiment, the contact surface between the inner wall member 31 and the heat transfer member 32 has a zigzag structure. This is preferable from the viewpoint of replacement.

By setting it as such a structure, since the heat exchange capability of the inner wall surface of the part which the mist ejected from the spray nozzle 35 collides increases, it is possible to perform heat exchange efficiently. That is, compared with the bottom part of the heat exchange chamber 37, the upper part of the heat exchange chamber 37 has a large temperature difference from the desired temperature (a heat exchange is necessary), and thus the heat exchange capacity of the upper part of the heat exchange chamber 37 is increased. This makes it possible to distribute a large amount of heat to the necessary places. Moreover, at the time of cooling, the synergistic effect with the natural cooling by the heat of vaporization when a fluid turns into a mist form can be expected. That is, it contributes to a reduction in operating energy of the heat exchanger.
An orifice 36 is provided at the outlet of the heat exchange chamber 37 to cause convection in the sprayed fluid to be heated. The heated fluid that has undergone heat exchange in the heat exchange chamber 37 is sent out from the outlet pipe 38.

<< Fourth Embodiment >>
FIG. 10 is a side view of the heat exchanger 100 according to the fourth embodiment.
The heat exchanger 100 of the fourth embodiment is a connected heat exchanger that can adjust the length of the heat exchange chamber 47. The 1st block 110, the 2nd block 120, and the 3rd block 130 are being fixed by the connecting rod 53 which penetrates the flange part of each block. The upper part of the first block 110 is closed by a plate flange 111, and the lower part of the third block 130 is closed by a plate flange 131. In FIG. 10, the heat exchange chamber is configured by connecting three blocks. However, the present invention is not limited to this, and the number of blocks may be one or more.

FIG. 11 is a diagram showing the configuration of one block (110, 120, 130), where (a) is a plan view and (b) is a side sectional view. The upper flange 48 is an industrial standard product including JIS, JPI, ANSI, and ISO provided with twelve bolt holes 112. The length in the vertical direction of one block is, for example, 20 to 40 cm. The upper flange 48 is fixed to the upper end portion of the side wall 41 of the heat exchange chamber by welding. The corrugated resin pipe constituting the side wall 41 is a pipe having dimensions of industrial standards including JIS, ANSI, and ISO, and the manufacturing cost can be remarkably suppressed while the inner peripheral wall of the heat exchange chamber 47 has a zigzag structure. . Similarly, a lower flange 49 of a JIS 5K type is fixed to the lower end portion of the side wall 41 by welding. In this embodiment, the side wall 41 and the

flanges

48 and 49 are both made of PVC (polyvinyl chloride), and the inner diameter of the heat exchange chamber 47 defined by the side wall 41 is φ253 mm. As described above, in the fourth embodiment, the side wall 41 and the

flanges

48 and 49 can be made of industrial standard size products, so that the length and the inner diameter can be easily adjusted according to the application.

A large number of annular grooves are formed in the length direction on the outer periphery of the side wall 41, and these annular grooves are filled with a heat transfer member 42. As the heat transfer member 42, for example, use of a heat transfer cement or a heat conductive adhesive is disclosed. The outer peripheral surfaces of the side wall 41 and the heat transfer member 42 are covered with a cylindrical heat conduction jacket 43 so as to be in surface contact. The heat conduction jacket 43 is made of a metal having good heat conductivity, such as carbon steel, aluminum, or pure copper. A spiral groove is formed in the heat conduction jacket 43, and the heat medium pipe 44 is wound at a high density along the spiral groove. The heat medium pipe 44 is pressed against the heat conduction jacket 43 by the cylindrical pressing member 45, and even if expansion due to heat occurs, the contact between the heat conduction jacket 43 and the heat medium pipe 44 is maintained. ing. In this embodiment, the heat medium pipe 44 is made of copper, and the pressing member 45 is made of SUS. The heat medium pipe 44 is connected to a supply pipe 51 that supplies the refrigerant or the heat medium and a delivery pipe 52 that sends the refrigerant or the heat medium to the next place. In the present embodiment example, the heat medium pipe 44 that performs heat exchange in each block is configured by a single pipe connected between the blocks, but is not limited thereto, and is connected to an independent heat exchange medium supply source. You may comprise, and you may comprise so that it may connect with the independent heat exchange medium supply source in multiple units.

The first block 110 located at the uppermost stage is provided with a drill-type spray nozzle extending in the vertical direction. The spray nozzle has a tapered shape, and has a discharge channel that is a tapered space communicating with the fluid supply channel at the center, and includes a discharge port that opens spirally.

Table 3 shows the results of measuring the outlet temperature by using the apparatus of this embodiment and testing at a set temperature of −5 ° C. and a flow rate of 15 to 30 L / min. Although ethylene glycol is used as the refrigerant, other refrigerants (Galden or the like) may be used. When a chiller with a maximum cooling capacity of 3000 W was used, the amount of heat taken from the fluid to be cooled was found to be 1500 W or more in the entire flow rate range, and the heat conversion rate was 50% or more.

[Table 3]

The use which can use the heat exchanger of this invention effectively is illustrated below.
(1) A heat exchanger that mainly performs heat exchange of liquids such as chemicals and pure water.
(2) A heated steam generator for generating steam having a boiling point or higher, which is used for sterilization, cooking, and drying in the food field and the like.
(3) A vaporizer that efficiently vaporizes a precursor in a semiconductor / solar cell material or the like.
(4) A device for producing ozone water, hydrogen water or the like that creates the most active condition (temperature) of the material to be mixed and efficiently mixes two kinds of fluids.
(5) A heavy metal concentrator for wastewater treatment or the like that creates a state in which heavy metal and water are easily separated by raising the temperature to water vapor and efficiently recovers heavy metal by passing water vapor through the separator.

1: resin pipe, 2: heated object inlet, 3: heated object outlet, 4: heat medium, 5: heat source, 7: heat exchange fluid, 8: air gap, 10: heat exchanger, 11: inner wall Member: 12: heat transfer member, 13: heat source, 14: fluid supply pipe, 15: spray nozzle, 16: outlet pipe (orifice), 17: heat exchange chamber, 18: upper flange part, 19: lower flange part, 20 : Heat exchanger, 21: heat transfer inner wall, 22: heat source, 23: heat insulating material, 24: chamber part, 25: spray nozzle, 26: orifice, 27: heat exchange chamber, 30: heat exchanger, 31: inner wall member 32: heat transfer member, 33: heat source, 35: spray nozzle, 36: orifice, 37: heat exchange chamber, 38: outlet pipe, 41: side wall, 42: heat transfer member, 43: heat transfer jacket, 44: heat Medium tube, 45: holding part 47: heat exchange chamber, 48: upper flange, 49: lower flange, 51: supply pipe, 52: delivery pipe, 53: connecting rod, 60: gas supply device, 61: gas supply pipe, 62: liquid supply pipe, 100: heat exchanger, 110: first block, 111: plate flange, 112: bolt hole, 120: second block, 130: third block, 131: plate flange

Claims

A chamber;
A nozzle that sprays pressurized fluid supplied from a fluid supply path into the chamber;
A heat source that applies heat or cold to the fluid sprayed into the chamber;
A heat exchanger that includes an orifice that communicates with an outlet that discharges fluid in the chamber and maintains a high pressure in the chamber as compared to atmospheric pressure.
The heat exchanger according to claim 1, wherein heat exchange is performed by causing convection in the chamber.
The heat exchanger according to claim 2, wherein the flow rate of the nozzle is substantially directly proportional to the square of the diameter of the orifice.
The pressurized fluid supplied from the fluid supply path is a pressurized liquid,
The heat exchanger according to claim 3, wherein the nozzle is a nozzle for spraying the pressurized liquid in a mist having a diameter of 20 to 60 µm.
The heat exchanger according to any one of claims 1 to 4, wherein the inner wall surface of the chamber has a zigzag structure.
An inner wall member constituting the inner wall surface of the chamber, and a heat conductor that transfers heat from a heat source to the inner wall member,
The heat exchanger according to any one of claims 1 to 4, wherein the heat conductor is made of a material having better heat conductivity than the inner wall member.
The surface of the heat conductor that contacts the inner wall member is the surface of the zigzag structure,
The heat exchanger according to claim 6, wherein the surface of the inner wall member in contact with the heat conductor is a surface of a zigzag structure.
The heat exchanger according to any one of claims 1 to 4, wherein the nozzle is a diffusion nozzle that sprays so that a part of the fluid supplied from the fluid supply path collides with the inner wall surface of the chamber.
The heat exchanger according to claim 8, wherein a heat conductor whose vertical length is shorter than that of the heat source is disposed at a portion where the fluid sprayed from the nozzle collides.
The heat exchanger according to any one of claims 1 to 4, wherein the chamber is configured by connecting a plurality of hollow blocks.
The heat exchanger according to claim 10, wherein the block is a pipe having a dimension defined by an industrial standard.
The heat exchanger according to claim 11, wherein the block includes a pair of flanges provided at end portions, and the flanges have dimensions defined by industry standards.
A heat exchange method for performing heat transfer type heat exchange with the fluid sprayed from the nozzle into the chamber using the heat exchanger according to any one of claims 1 to 4.
A heat exchange method for vaporizing a fluid sprayed from a nozzle into a chamber using the heat exchanger according to claim 4 and performing heat exchange.