WO2015072509A1 - Échangeur de chaleur à haut rendement et procédé d'échange de chaleur à haut rendement - Google Patents

Échangeur de chaleur à haut rendement et procédé d'échange de chaleur à haut rendement Download PDF

Info

Publication number
WO2015072509A1
WO2015072509A1 PCT/JP2014/080055 JP2014080055W WO2015072509A1 WO 2015072509 A1 WO2015072509 A1 WO 2015072509A1 JP 2014080055 W JP2014080055 W JP 2014080055W WO 2015072509 A1 WO2015072509 A1 WO 2015072509A1
Authority
WO
WIPO (PCT)
Prior art keywords
heat
chamber
heat exchanger
heat exchange
fluid
Prior art date
Application number
PCT/JP2014/080055
Other languages
English (en)
Japanese (ja)
Inventor
木村 洋一
Original Assignee
四国計測工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 四国計測工業株式会社 filed Critical 四国計測工業株式会社
Publication of WO2015072509A1 publication Critical patent/WO2015072509A1/fr

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22STEAM GENERATION
    • F22BMETHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00Methods of steam generation characterised by form of heating method
    • F22B1/28Methods of steam generation characterised by form of heating method in boilers heated electrically
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28CHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION
    • F28C3/00Other direct-contact heat-exchange apparatus
    • F28C3/06Other direct-contact heat-exchange apparatus the heat-exchange media being a liquid and a gas or vapour
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/06Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
    • F28F13/12Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F19/00Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F19/00Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
    • F28F19/02Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
    • F28F19/04Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings of rubber; of plastics material; of varnish
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/02Header boxes; End plates
    • F28F9/026Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
    • F28F9/028Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits by using inserts for modifying the pattern of flow inside the header box, e.g. by using flow restrictors or permeable bodies or blocks with channels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28CHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION
    • F28C3/00Other direct-contact heat-exchange apparatus
    • F28C3/06Other direct-contact heat-exchange apparatus the heat-exchange media being a liquid and a gas or vapour
    • F28C3/08Other direct-contact heat-exchange apparatus the heat-exchange media being a liquid and a gas or vapour with change of state, e.g. absorption, evaporation, condensation

Definitions

  • the present invention relates to a heat exchange technique in which the field of application is not limited. It is particularly useful for heat exchange of gases or liquids of corrosive substances such as acids and alkalis, temperature control of high-purity water, high-purity silicon compounds when manufacturing semiconductors, etc. To solve the problems of corrosion of equipment and contamination of high-purity substances and to improve the heat exchange rate. That is, the present invention can provide a high-efficiency heat exchanger and heat exchange method with less corrosion of the apparatus and contamination by impurities in all technical fields that require cooling, heating, and temperature control of substances.
  • a heat source not only a heat source but also a heat absorption source may be referred to as a “heat source”.
  • the “fluid” in the present specification includes those accompanied by a phase change (for example, a phase change from liquid to gas) by heating or endotherm.
  • a heat exchanger is a device that heats or cools one object by directly or indirectly contacting two objects with different temperatures, and heats or cools one object.
  • Boilers, steam generators, food production, chemical production, refrigeration For industrial use such as storage, it is used for cooling, heating, and refrigeration.
  • a heat exchanger usually has a structure corresponding to the characteristics of the heat exchange material. For example, for a chemical solution that performs heat exchange with a highly corrosive chemical solution such as hydrofluoric acid, nitric acid, and sulfuric acid.
  • a heat exchanger it is necessary to heat and cool fluids such as highly corrosive strong acids and strong alkalis using chemical resistant heat exchangers. In this case, resin materials that are not easily affected by acids and alkalis.
  • the indirect heating in which the contact portion material made of is immersed in a heat medium to perform heat exchange is typical.
  • FIG. 1 is a schematic diagram showing a typical indirect heat exchange. While a heat exchange fluid (acid, alkali, water, etc.) is conveyed from the inlet 2 to the outlet 3 in the resin pipe 1, FIG. Heat exchange is performed through the resin pipe 1 by the heat medium 4 whose temperature is adjusted by the heat source 5.
  • This method can increase the surface area of the resin pipe 1 on the contact side, for example, lengthen the pipe 1 in the heat medium 4 to increase the contact area with the heat medium 4 and improve the heat exchange efficiency.
  • this may result in a costly device including a device and containers for adjusting the temperature of the fluid with a heat source.
  • a typical example of a direct heating method in which heat is exchanged directly with a heat source without using a heat medium is shown in FIG.
  • the heat source 5 comes into contact with the tube 1 made of the above material to exchange heat directly.
  • the heat exchange fluid or the heat exchange medium does not corrode the equipment such as the transfer pipe, the heat exchange process does not contaminate the heat exchange fluid, and the heat exchange is performed efficiently. ,Is required.
  • the transport pipe is protected by being covered with a resin or ceramics so that the transport pipe is not affected by the heat exchange medium or the heat exchange fluid.
  • fluororesins are known to be excellent in corrosion resistance and heat resistance against various chemicals.
  • the transport tube is made of only fluororesin, the fluororesin itself is a poor conductor of heat.
  • the fluororesin is used on the surface of metal with good thermal conductivity. Many proposals have been made to form a film.
  • Patent Document 1 used as a heat exchanger or the like having a coating film that is increased and the content of inorganic filler is sequentially reduced
  • the present invention provides a plate fin type heat exchanger and a plate type heat exchanger using the aluminum alloy material in a heat transfer part using an aluminum alloy material having excellent corrosion resistance and a corrosive fluid as a medium. It has an organic phosphonic acid undercoat on the aluminum alloy material surface used in plate fin type heat exchangers, plate type heat exchangers, etc. using a heat transfer part with a fluid as a medium, and further after drying It has a fluorine resin paint film with an average thickness of 1 to 100 ⁇ m and improves the durability of the adhesion of the paint film, and has excellent corrosion resistance against corrosive fluids such as seawater (Patent Literature) 2) has been proposed.
  • a method of exchanging heat by bringing a member in contact with the fluid into contact with a heat medium such as a heat source or a refrigerant is generally used. It was selected according to. However, the material of the selected contact member is not necessarily excellent in heat conduction. In this case, for example, a large number of electric heaters that are heat sources or a large-capacity electric heater can be used. It may be necessary to compensate for the disadvantages of low members. As a result, it was often encountered that the energy efficiency of heat exchange was low and the equipment was large.
  • the present invention is composed of the technical matters described below. 1st invention discharges the fluid in a chamber, the nozzle which sprays the pressurized fluid supplied from the fluid supply path in the chamber, the heat source which gives heat or cold to the fluid sprayed to the chamber, and the chamber
  • the heat exchanger includes an orifice that communicates with an outlet and maintains an interior of the chamber at a higher pressure than atmospheric pressure.
  • heat exchange is performed by generating convection in a chamber.
  • the third invention is the second invention, wherein the flow rate of the nozzle is the orifice. It is characterized in that it is substantially directly proportional to the square of the aperture diameter.
  • the pressurized fluid supplied from the fluid supply path is a pressurized liquid
  • the nozzle sprays the pressurized liquid using a mist having a diameter of 20 to 60 ⁇ m. It is characterized by being a nozzle.
  • the inner wall surface of the chamber has a zigzag structure.
  • a sixth invention is the invention according to any one of the first to fourth inventions, comprising: an inner wall member constituting the inner wall surface of the chamber; and a heat conductor that transfers heat from a heat source to the inner wall member. Is made of a material having a higher thermal conductivity than the inner wall member.
  • the surface of the heat conductor in contact with the inner wall member is a surface of a zigzag structure, and the surface of the inner wall member in contact with the heat conductor is a surface of a zigzag structure. It is characterized by.
  • the nozzle is a diffusion nozzle that sprays so that a part of the fluid supplied from the fluid supply path collides with the inner wall surface of the chamber.
  • a ninth invention is characterized in that, in the eighth invention, a heat conductor having a vertical length shorter than that of the heat source is arranged at a portion where the fluid sprayed from the nozzle collides.
  • a tenth invention is characterized in that, in any one of the first to fourth inventions, the chamber is constituted by connecting a plurality of hollow blocks.
  • An eleventh invention is characterized in that, in the tenth invention, the block is a pipe having a dimension defined by an industry standard. According to a twelfth aspect, in the eleventh aspect, the block includes a pair of flanges provided at end portions, and the flanges have dimensions defined by an industry standard.
  • a thirteenth aspect of the present invention is a heat exchange method for performing heat transfer type heat exchange with a fluid jetted from a nozzle into a chamber using the heat exchanger according to any one of the first to fourth aspects.
  • a fourteenth aspect of the invention is a heat exchange method that uses the heat exchanger according to the fourth aspect of the invention to vaporize the fluid ejected from the nozzle into the chamber and to exchange heat.
  • the present invention there is no corrosion of equipment due to a heat exchange fluid, and highly efficient heat exchange can be realized. Further, the present invention can provide technical means for vaporizing or atomizing a liquid simultaneously with heat exchange. Furthermore, it is possible to provide a heat exchanger in which the length and inner diameter can be easily adjusted according to the application.
  • FIG. 3 is a schematic side sectional view of the heat exchanger 10 according to the first embodiment of the present invention.
  • the heat exchanger 10 of the present invention includes a spray nozzle 15 serving as a fluid inlet, an outlet pipe 16 serving as a fluid outlet, and a cylindrical chamber 17.
  • the spray nozzle 15 is in fluid communication with the fluid supply pipe 14 and sprays fluid into the chamber 17.
  • the fluid to be sprayed is a liquid
  • the total surface area when the mist diameter is 30 ⁇ m is about 2.6 times the total surface area when the mist diameter is 80 ⁇ m.
  • the spray nozzle 15 is preferably made of a material such as a resin having a low thermal conductivity. This is because when the spray nozzle 15 is heated, there is a problem that a reaction occurs in the nozzle portion and a blockage occurs.
  • the spray nozzle 15 can be selectively used as a one-fluid nozzle or a two-fluid nozzle depending on the application.
  • the outlet pipe 16 having an orifice maintains the internal pressure of the chamber 17 at a higher pressure (for example, atmospheric pressure + 0.15 to 0.25 atm) than the atmospheric pressure by restricting the outlet of the chamber 17.
  • the heat source 13 installed around the side of the chamber 17 exchanges heat with the inner space of the chamber 17 via the cylindrical inner wall member 11 and the heat transfer member 12.
  • the heat source 13 may be a heating source (for example, a stainless steel heater plate having a nichrome wire with a capacity of 2 kW) or a heat absorbing source (for example, a cooler plate having a flow path through which an antifreeze liquid or a gas refrigerant circulates).
  • a heating source for example, a stainless steel heater plate having a nichrome wire with a capacity of 2 kW
  • a heat absorbing source for example, a cooler plate having a flow path through which an antifreeze liquid or a gas refrigerant circulates.
  • the inner wall member 11 is made of, for example, a metal (including an inner wall surface coated with a resin) or a resin.
  • the heat transfer member 12 is made of a material having better thermal conductivity than the inner wall member 11.
  • the cylindrical chamber 17 is configured with a length sufficient to cause convection in the internal space, and is closed by an upper flange portion 18 and a lower flange portion 19.
  • a plurality of chambers can be connected by a flange portion.
  • the heat exchanger of the present invention is an atomizer type heat exchanger that realizes highly efficient heat exchange using all the methods (1) to (3).
  • the fluids to be heat exchanged by the heat exchanger are liquid and gas.
  • heat exchange may or may not involve phase change. Specifically, liquid is introduced and gas is discharged, liquid is introduced and liquid is discharged, liquid is introduced and steam is discharged, and gas is introduced. It is disclosed that the heat exchange is performed in such a manner that the liquid is discharged, the gas is introduced, and the gas is discharged. In this mode, the liquid is introduced and the liquid is discharged.
  • the fluid of a ° C. introduced into the spray nozzle is injected from the spray nozzle 15 into the heat exchange chamber 17, collides with the inner wall of the heat exchange chamber 17, and is heat exchanged.
  • the fluid that has just been sprayed from the spray nozzle 15 and has not reached the desired b ° C. undergoes heat exchange with the gas (including mist) that has reached the desired temperature near b ° C. by air contact.
  • the heat exchange chamber 17 is a closed space provided with an orifice opening. A swirling flow is generated in the heat exchange chamber 17 by the action of the orifice, and heat exchange is performed with high efficiency (swirl effect).
  • the swirl effect is particularly effective in an aspect in which liquid is introduced and gas is discharged, and an aspect in which liquid is introduced and vapor is discharged.
  • the fluid swirling in the heat exchange chamber 17 is subjected to heat exchange by making physical contact with the inner wall of the heat exchange chamber 17.
  • the fluid that has reached the desired temperature b ° C. through the above process flows out from the outlet of the outlet pipe 16 having an orifice.
  • a heat transfer member 12 that transfers heat from the heat source 13 to the inner wall member 11 is disposed on the inner surface of the cylindrical heat source 13. That is, the heat transfer member 12 is disposed so that the zigzag surface is in contact with the space and the flat surface is in contact with the heat source 13.
  • the zigzag shape refers to a structure in which annular peaks are continuous in the longitudinal direction of the outer surfaces of the inner wall member 11 and the heat transfer member 12 (that is, a structure in which peaks and valleys are alternately continued).
  • the structure in which the annular ridges are continuous includes a case where ridges and grooves are formed in a spiral shape like a thread ridge and a groove.
  • the zigzag structure is used so that the surface areas of the outer surface of the inner wall member 11 and the heat transfer member 12 are, for example, 1.5 to 3 times the surface area of the outer surface of a cylindrical body having the same diameter without a mountain (convex portion). Form.
  • the heat exchange efficiency on the surface is improved.
  • the heat transfer member 12 is made of a material having a better thermal conductivity than the inner wall member 11.
  • the better heat conductivity is a relative comparison of the values of both materials, and an absolute value is specified. It is not something.
  • the thermal conductivity of plastic is about 0.2 W / (m ⁇ K), about 0.25 fluorine resin, about 47 carbon steel, about 15 stainless steel, aluminum 237, pure copper 386, Pyrex glass (PYREX: A value of about 1 is usually indicated.
  • the material may be selected in consideration of the relative thermal conductivity. Since the fluororesin has a low value, the material of any material is used when the fluororesin is used as the inner wall member 11. Even if the heat transfer member 12 is adopted, the thermal efficiency is improved.
  • the heat transfer member is made of a metal having a higher thermal conductivity than the material of the inner wall member 11, such as carbon steel, aluminum, or pure copper
  • the heat transfer member 12 can be selected.
  • the material (material) of the heat transfer member 12 is preferably as the heat conductivity is higher.
  • a heat exchanger in which the contact surface of the inner wall member 11 is coated with fluorine resin and the inner wall member 11 itself is made of stainless steel is known.
  • a plate having a corrosion-resistant coating made of 8 mm stainless steel and fluorine resin is known.
  • the overall heat transfer coefficient is measured, it is 1070 W / (m 2 ⁇ K) for stainless steel alone, but when the 500 ⁇ m corrosion resistant coating is provided, the coefficient is 291 and the heat transfer amount is 1/3. It has been. It has also been reported that when a 50 ⁇ m corrosion resistant coating is provided, the heat transfer coefficient is 845. Therefore, it is preferable to make the distance between the heat transfer member 12 and the heat exchange fluid as close as possible.
  • the inner wall member 11 is made of a material that is stable with respect to the heat exchange fluid 7. That is, a material that does not react with the inner surface of the inner wall member 11 and the heat exchange fluid or a material that does not elute components of the inner wall member 11 from the inner surface is selected in a temperature range where heat exchange is performed.
  • the reactivity (corrosiveness) of the heat exchange fluid varies depending on the material of the surface of the heat transfer structure and the contact temperature, and the allowable range of purity after heat exchange also depends on the application and properties of the heat exchange fluid 7. Because they are different, it is not possible to specify them in general.
  • a metal halide or an etching agent used for manufacturing a semiconductor device uses a high-purity substance, so that a decrease in purity due to heat exchange treatment is not allowed.
  • a heat exchanger for turbines changes in the purity of the heat exchange fluid due to the heat exchange process are often not a problem.
  • the material (material) of the inner wall member 11 is appropriately selected from metals such as iron, carbon steel, stainless steel, aluminum and titanium, synthetic resins such as fluorine resin and polyester, ceramics, etc. In the case of exchanging heat with highly corrosive acids, it is preferable that at least the inner surface portion is made of a fluorine resin.
  • fluorine resin examples include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polychlorotrifluoroethylene ( PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinyl fluoride (PVF), fluorinated polypropylene (FLPP), polyvinylidene fluoride (PVDF), etc. Can be illustrated.
  • PTFE polytetrafluoroethylene
  • PFA tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer
  • FEP tetrafluoroethylene-hexafluoropropylene copolymer
  • PCTFE polychlorotrifluoroethylene
  • ECTFE ethylene-ch
  • the inner wall member 11 has a zigzag structure on the inner peripheral wall of the heat exchange chamber 17. That is, the inner surface of the inner wall member 11 has a structure in which an annular crest is continuous in the longitudinal direction.
  • FIG. 4 a configuration example is disclosed in which the inner surface of the inner wall member 11 in contact with the heat exchange fluid 7 has a zigzag structure in which an equilateral triangle with a cross section of 2 mm is continuous, and the surface area is doubled.
  • the surface area of the inner surface of the inner wall member 11 is twice that of the flat inner surface without the zigzag structure, so that the heat exchange efficiency can be doubled.
  • the zigzag structure of the inner wall member 11 is not limited to that shown in FIG. 4, and the zigzag structure is such that the surface area of the inner surface of the inner wall member 11 is, for example, 1.5 to 3 times that of the inner surface without peaks (convex parts). Is disclosed.
  • the heat exchange chamber 17 may be constituted by a detachable cylindrical member, and a plurality of cylindrical members having different pitches may be prepared.
  • FIG. 5 is a graph showing the difference in heating ability between when the unevenness (zigzag structure) is provided on the inner peripheral wall of the heat exchange chamber 17 and when it is not provided.
  • the heat exchange fluid 7 is water
  • the temperature of the heater as the heat source 13 is set to 150 ° C.
  • the water temperature at the chamber outlet is measured.
  • the temperature increase rate is 54.3 to 58.5%.
  • the temperature increase rate was 45.0 to 48.5% when the unevenness was not provided.
  • the test results in FIG. 5 are for the case where the inner wall member 11 is of a metal type (SUS316), but generally the difference in temperature rise rate when the inner wall member is of a metal free type (PTFE) is about 10%.
  • the temperature rise rate when the inner wall member is a metal-free type is estimated to be about 45 to 50%.
  • the internal pressure in the chamber 17 is increased by restricting the outlet of the chamber 17 with the orifice 16.
  • constricting the outlet of the chamber 17 with the orifice 16 leads to an increase in internal pressure, which is disadvantageous for atomizing or vaporizing the liquid, but on the other hand, convection is generated, thereby increasing the heating efficiency.
  • the outlet of the chamber 17 is appropriately narrowed by the orifice 16 to realize high-efficiency heat exchange in harmony with atomization or vaporization performance reduction and heating efficiency improvement.
  • FIG. 6 is a graph showing the relationship between orifice orifice diameter and spray nozzle flow rate.
  • the relationship between the spray nozzle flow rate and the orifice throttle diameter is presumed not to change even when the chamber inner diameter or the differential pressure changes.
  • the heat exchange fluid 7 in the present invention is not particularly limited, and examples thereof include hydrochloric acid, sulfuric acid, nitric acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, and fluorination.
  • Examples include solutions or gases such as corrosive acids such as silicic acid and boric acid, alkalis such as ammonia, potassium hydroxide and sodium hydroxide, and metal salts such as chlorinated silicon, and high-purity water.
  • These heat exchange fluids are used as raw materials for reaction with other substances or as chemicals used in reaction processes such as etching liquids, and are used for purposes that are controlled to an appropriate temperature by a heat exchanger.
  • the heat exchanger of the present invention can heat, cool, or control the temperature of these heat exchange fluids with high efficiency and without contamination by trace impurities.
  • tin tetrachloride (SnCl 4 ) used in the TCO (transparent electrode film) SiO 2 film forming process is difficult to control ON / OFF because the vaporization is controlled by the conventional bubbling method, and the concentration also changes over time.
  • the heat exchanger 10 of the present invention the problem can be solved and the yield can be improved, although the purity of SnCl 4 is unstable and the product is deposited inside the injector. It becomes possible.
  • FIG. 7 is a side schematic cross-sectional view illustrating the configuration of the heat exchanger 20 according to the second embodiment of the present invention.
  • the heat exchanger 20 is an atomizer type heat exchanger, and includes a cylindrical chamber portion 24, a spray nozzle 25, and an orifice 26 provided at the lower end of the chamber portion 24 as main components.
  • the spray nozzle 25 is a two-fluid nozzle.
  • a pressurized gas such as nitrogen gas is supplied from a gas supply pipe 61 communicating with the gas supply apparatus 60, and a liquid supply pipe 62 communicating with a liquid reservoir (not shown). Pressurized liquid is supplied.
  • the inner wall of the heat exchange chamber 27 is constituted by a heat transfer inner wall 21 having a zigzag structure.
  • This zigzag structure is preferably provided in a portion that occupies half or more of the total area of the inner surface of the heat exchange chamber 27, and more preferably in a portion that occupies 2/3 or more of the total area of the inner surface.
  • the heat transfer inner wall 21 may be made of a single material, or, as in the first embodiment, the chamber side is made of a first material that is highly corrosive, and the side in contact with the heat source 22 is the first material. In some cases, the second material may have a higher thermal conductivity than the material.
  • the length of the heat exchange chamber 27 in the vertical direction is preferably 50 cm or less.
  • the heat transfer inner wall 21 is covered with a heat source 22, and the liquid vaporized or atomized in the heat exchange chamber exchanges heat with the heat transfer inner wall 21 while convection.
  • the heat source 22 is a heater or a cooler that covers the heat transfer inner wall 21, for example, a curved plate-like heat source configured by a heating wire or Peltier, and a spiral flow path in a cylindrical member having a convection space. And a structure in which a gas or liquid for heat exchange flows and a tube in which a gas or liquid for heat exchange flows are spirally wound around the cylindrical member.
  • the length of the heat source 22 in the vertical direction is preferably set to a length that covers the entire heat exchange chamber 27 or substantially the whole.
  • the outer surface of the heat source 22 is covered with a heat insulating material 23 so as not to be affected by the outside air temperature.
  • the spray nozzle 25 and the orifice 26 are provided so as to face each other at the center of the chamber portion 24 in the vertical direction.
  • a spray nozzle made of metal or Teflon (registered trademark) with a flow rate of several tens g / min is used.
  • FIG. 8 is a diagram illustrating a vaporization performance test method for the heat exchanger 20 according to the second embodiment.
  • pressurized nitrogen gas and water are supplied to the spray nozzle 25 of the second embodiment and the comparative example 1, sprayed into the heat exchange chamber 27, and glass is discharged from the outlet pipe 16 communicating with the orifice 26.
  • the fluid was jetted onto the plate, and the glass surface was visually determined.
  • Judgment criteria are as follows.
  • the heat exchanger 20 of the present embodiment example having a zigzag structure on the inner wall surface of the chamber has high vaporization performance.
  • FIG. 9 is a schematic side cross-sectional view showing the configuration of the heat exchanger 30 according to the third embodiment.
  • the heat transfer member 32 that transfers the heat from the heat source 33 into the chamber 37 is disposed above the heat exchange chamber 37 (near the discharge port of the spray nozzle 35). Yes.
  • the vertical length of the heat transfer member 32 is configured to be shorter than the length of the heat source 33.
  • the length of the heat source 33 is not limited to the illustrated mode.
  • the vertical length of the heat transfer member 32 is provided so as to cover 1/5 to 1/2 of the vertical length of the heat exchange chamber 37. Is disclosed.
  • the heat transfer member 32 is made of a material having a higher thermal conductivity than the inner wall member 31.
  • the inner wall member 31 is made of stainless steel and the heat transfer member 32 is made of copper.
  • the inner wall surface of the inner wall member 31 has a zigzag structure to increase the surface area, thereby increasing the heat exchange capability.
  • the contact surface between the inner wall member 31 and the heat transfer member 32 is a flat surface.
  • the contact surface between the inner wall member 31 and the heat transfer member 32 has a zigzag structure. This is preferable from the viewpoint of replacement.
  • the heat exchange capability of the inner wall surface of the part which the mist ejected from the spray nozzle 35 collides increases, it is possible to perform heat exchange efficiently. That is, compared with the bottom part of the heat exchange chamber 37, the upper part of the heat exchange chamber 37 has a large temperature difference from the desired temperature (a heat exchange is necessary), and thus the heat exchange capacity of the upper part of the heat exchange chamber 37 is increased. This makes it possible to distribute a large amount of heat to the necessary places. Moreover, at the time of cooling, the synergistic effect with the natural cooling by the heat of vaporization when a fluid turns into a mist form can be expected. That is, it contributes to a reduction in operating energy of the heat exchanger.
  • An orifice 36 is provided at the outlet of the heat exchange chamber 37 to cause convection in the sprayed fluid to be heated. The heated fluid that has undergone heat exchange in the heat exchange chamber 37 is sent out from the outlet pipe 38.
  • FIG. 10 is a side view of the heat exchanger 100 according to the fourth embodiment.
  • the heat exchanger 100 of the fourth embodiment is a connected heat exchanger that can adjust the length of the heat exchange chamber 47.
  • the 1st block 110, the 2nd block 120, and the 3rd block 130 are being fixed by the connecting rod 53 which penetrates the flange part of each block.
  • the upper part of the first block 110 is closed by a plate flange 111, and the lower part of the third block 130 is closed by a plate flange 131.
  • the heat exchange chamber is configured by connecting three blocks.
  • the present invention is not limited to this, and the number of blocks may be one or more.
  • FIG. 11 is a diagram showing the configuration of one block (110, 120, 130), where (a) is a plan view and (b) is a side sectional view.
  • the upper flange 48 is an industrial standard product including JIS, JPI, ANSI, and ISO provided with twelve bolt holes 112. The length in the vertical direction of one block is, for example, 20 to 40 cm.
  • the upper flange 48 is fixed to the upper end portion of the side wall 41 of the heat exchange chamber by welding.
  • the corrugated resin pipe constituting the side wall 41 is a pipe having dimensions of industrial standards including JIS, ANSI, and ISO, and the manufacturing cost can be remarkably suppressed while the inner peripheral wall of the heat exchange chamber 47 has a zigzag structure. .
  • a lower flange 49 of a JIS 5K type is fixed to the lower end portion of the side wall 41 by welding.
  • the side wall 41 and the flanges 48 and 49 are both made of PVC (polyvinyl chloride), and the inner diameter of the heat exchange chamber 47 defined by the side wall 41 is ⁇ 253 mm.
  • the side wall 41 and the flanges 48 and 49 can be made of industrial standard size products, so that the length and the inner diameter can be easily adjusted according to the application.
  • a large number of annular grooves are formed in the length direction on the outer periphery of the side wall 41, and these annular grooves are filled with a heat transfer member 42.
  • a heat transfer member 42 for example, use of a heat transfer cement or a heat conductive adhesive is disclosed.
  • the outer peripheral surfaces of the side wall 41 and the heat transfer member 42 are covered with a cylindrical heat conduction jacket 43 so as to be in surface contact.
  • the heat conduction jacket 43 is made of a metal having good heat conductivity, such as carbon steel, aluminum, or pure copper.
  • a spiral groove is formed in the heat conduction jacket 43, and the heat medium pipe 44 is wound at a high density along the spiral groove.
  • the heat medium pipe 44 is pressed against the heat conduction jacket 43 by the cylindrical pressing member 45, and even if expansion due to heat occurs, the contact between the heat conduction jacket 43 and the heat medium pipe 44 is maintained. ing.
  • the heat medium pipe 44 is made of copper
  • the pressing member 45 is made of SUS.
  • the heat medium pipe 44 is connected to a supply pipe 51 that supplies the refrigerant or the heat medium and a delivery pipe 52 that sends the refrigerant or the heat medium to the next place.
  • the heat medium pipe 44 that performs heat exchange in each block is configured by a single pipe connected between the blocks, but is not limited thereto, and is connected to an independent heat exchange medium supply source. You may comprise, and you may comprise so that it may connect with the independent heat exchange medium supply source in multiple units.
  • the first block 110 located at the uppermost stage is provided with a drill-type spray nozzle extending in the vertical direction.
  • the spray nozzle has a tapered shape, and has a discharge channel that is a tapered space communicating with the fluid supply channel at the center, and includes a discharge port that opens spirally.
  • Table 3 shows the results of measuring the outlet temperature by using the apparatus of this embodiment and testing at a set temperature of ⁇ 5 ° C. and a flow rate of 15 to 30 L / min.
  • ethylene glycol is used as the refrigerant
  • other refrigerants may be used.
  • the amount of heat taken from the fluid to be cooled was found to be 1500 W or more in the entire flow rate range, and the heat conversion rate was 50% or more.
  • a heat exchanger that mainly performs heat exchange of liquids such as chemicals and pure water.
  • a heated steam generator for generating steam having a boiling point or higher, which is used for sterilization, cooking, and drying in the food field and the like.
  • a vaporizer that efficiently vaporizes a precursor in a semiconductor / solar cell material or the like.
  • a device for producing ozone water, hydrogen water or the like that creates the most active condition (temperature) of the material to be mixed and efficiently mixes two kinds of fluids.
  • a heavy metal concentrator for wastewater treatment or the like that creates a state in which heavy metal and water are easily separated by raising the temperature to water vapor and efficiently recovers heavy metal by passing water vapor through the separator.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Abstract

La présente invention vise à fournir une technique d'échange de chaleur avec laquelle un échange de chaleur à haut rendement peut être réalisé sans corrosion du dispositif par le fluide soumis à l'échange de chaleur, et un moyen technique pour vaporiser et pulvériser un fluide simultanément avec l'échange de chaleur, et un échangeur de chaleur dont la capacité d'échange de chaleur peut être réglée en fonction de l'utilisation. À cet effet, l'invention concerne un échangeur de chaleur comprenant : une chambre; une buse qui pulvérise un fluide mis sous pression, provenant d'un trajet d'alimentation en fluide, dans la chambre; une source thermique qui confère de la chaleur ou du froid au fluide pulvérisé dans la chambre; et un orifice qui est relié à une sortie à travers laquelle le fluide de la chambre est évacué, et qui maintient l'intérieur de la chambre à une pression supérieure à la pression atmosphérique.
PCT/JP2014/080055 2013-11-15 2014-11-13 Échangeur de chaleur à haut rendement et procédé d'échange de chaleur à haut rendement WO2015072509A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013236525 2013-11-15
JP2013-236525 2013-11-15

Publications (1)

Publication Number Publication Date
WO2015072509A1 true WO2015072509A1 (fr) 2015-05-21

Family

ID=53057443

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/080055 WO2015072509A1 (fr) 2013-11-15 2014-11-13 Échangeur de chaleur à haut rendement et procédé d'échange de chaleur à haut rendement

Country Status (2)

Country Link
TW (1) TW201533418A (fr)
WO (1) WO2015072509A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114060785A (zh) * 2020-07-31 2022-02-18 广东美的环境电器制造有限公司 蒸汽发生器和家用设备

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2505170A (en) * 1947-10-28 1950-04-25 Frank Pitterman Steam generating apparatus
US2790428A (en) * 1952-12-23 1957-04-30 Buttler John Allen Instantaneous steam generators
US4724824A (en) * 1986-08-22 1988-02-16 The Lucks Company Instantaneous steam generator
JPH02258017A (ja) * 1989-03-31 1990-10-18 Babcock Hitachi Kk 固体還元剤を用いた排ガス脱硝装置
GB2309071A (en) * 1996-01-10 1997-07-16 Ngai Shing Dev Limited Steam generator
JP2000513428A (ja) * 1996-06-18 2000-10-10 テーエスペー メディカル アーベー 蒸気発生器
JP2000317213A (ja) * 1999-05-14 2000-11-21 Samson Co Ltd 高純度蒸気の生成設備
JP2004340466A (ja) * 2003-05-15 2004-12-02 Miura Co Ltd 排熱ボイラ
US20050058571A1 (en) * 2003-09-16 2005-03-17 George Yin Method and apparatus for steam sterilization of articles
JP2009030963A (ja) * 2007-07-26 2009-02-12 Kook Hyun Cho スチーム発生装置及びその発生方法
US20130279890A1 (en) * 2010-10-15 2013-10-24 Strix Limited Electric steam generation

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2505170A (en) * 1947-10-28 1950-04-25 Frank Pitterman Steam generating apparatus
US2790428A (en) * 1952-12-23 1957-04-30 Buttler John Allen Instantaneous steam generators
US4724824A (en) * 1986-08-22 1988-02-16 The Lucks Company Instantaneous steam generator
JPH02258017A (ja) * 1989-03-31 1990-10-18 Babcock Hitachi Kk 固体還元剤を用いた排ガス脱硝装置
GB2309071A (en) * 1996-01-10 1997-07-16 Ngai Shing Dev Limited Steam generator
JP2000513428A (ja) * 1996-06-18 2000-10-10 テーエスペー メディカル アーベー 蒸気発生器
JP2000317213A (ja) * 1999-05-14 2000-11-21 Samson Co Ltd 高純度蒸気の生成設備
JP2004340466A (ja) * 2003-05-15 2004-12-02 Miura Co Ltd 排熱ボイラ
US20050058571A1 (en) * 2003-09-16 2005-03-17 George Yin Method and apparatus for steam sterilization of articles
JP2009030963A (ja) * 2007-07-26 2009-02-12 Kook Hyun Cho スチーム発生装置及びその発生方法
US20130279890A1 (en) * 2010-10-15 2013-10-24 Strix Limited Electric steam generation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114060785A (zh) * 2020-07-31 2022-02-18 广东美的环境电器制造有限公司 蒸汽发生器和家用设备

Also Published As

Publication number Publication date
TW201533418A (zh) 2015-09-01

Similar Documents

Publication Publication Date Title
US20150159958A1 (en) High-efficiency heat exchanger and high-efficiency heat exchange method
Zhu et al. Superlyophilic interfaces and their applications
US8554064B1 (en) Method and apparatus for generating vapor at high rates
US20030094265A1 (en) Heat exchanger
KR101502415B1 (ko) 액체 전구물질 분무 방법 및 장치
US20090263649A1 (en) Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product
US20130195432A1 (en) Trichlorosilane vaporization system
Li et al. Experimental investigation of pool boiling heat transfer on pillar-structured surfaces with different wettability patterns
US20200232708A1 (en) Heat exchanger
Kim et al. Effects of hydrophilic surface treatment on evaporation heat transfer at the outside wall of horizontal tubes
US20200370840A1 (en) On-demand Sweating-Boosted Air Cooled Heat-Pipe Condensers
WO2015072509A1 (fr) Échangeur de chaleur à haut rendement et procédé d'échange de chaleur à haut rendement
JP2007520682A (ja) 熱交換器のためのフィンと複数のこのようなフィンを備えた熱交換器
TWI649414B (zh) 熱轉換介質
CN101248324A (zh) 低温空气分离
CN101448559A (zh) 形成腐蚀性冷凝物的冷却气体的装置(骤冷器)
RU107960U1 (ru) Испаритель
JP7495334B2 (ja) 気化器
CN102226665A (zh) 一种提高管式间接蒸发冷却器热湿交换效率的方法
CN105351745A (zh) 液氯汽化装置
KR101694751B1 (ko) 박막 형성을 위한 전구체 공급 장치 및 이를 포함하는 박막 형성 장치
KR100631719B1 (ko) 플라즈마 중합장치의 가스 공급 구조
CN212198572U (zh) 蒸发装置
KR102497303B1 (ko) 액화 석유가스용 자연대류식 기화장치
KR102497304B1 (ko) 액화 암모니아용 자연대류식 기화장치

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14862115

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14862115

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP