TW201331588A - Probe and fixture - Google Patents

Abstract

To provide a probe which effectively suppresses the generation of reactive force from precompression of the probe that occurs when the probe is fitted to the fixture, without impairing the spring properties at the point of connection with the object being tested. In a probe 20, an outer conductive body 22 has conductive properties and a substantially cylindrical shape. An inner conductive body 24 with conductive properties is inserted into the outer conductive body 22 and electrically connected to the outer conductive body 22, and the leading end 24a thereof contacts the point of connection with the object being tested. On the peripheral wall of the outer conductive body 22, first and second spring sections 221 and 222 with different spring constants which expand and contract in the axial direction of the probe 20 are provided such that the first spring section 221 with the smaller spring constant is positioned on the leading end side of the second spring section 222. A securing section 26 is provided which secures the inner conductive body 24 and an intermediate section 22c, which is positioned between the first spring section 221 and the second spring section 222 of the outer conductive body 22.

Description

Probe and connection fixture

The present invention relates to a probe and a connection jig used in a connection jig for electrically connecting to a connection point provided on an inspection object.

Such a connection jig is, for example, an inspection jig or an inspection card, and has a plurality of probes through which a current or electrical signal from an inspection device or the like is supplied to a connection point set in advance on the inspection object, and the connection point is An electrical signal is detected to detect electrical characteristics between the connection points, and an operation test such as a conduction check or a leakage test is performed.

The object to be inspected is, for example, a printed circuit board, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, or a substrate such as a package substrate or a film carrier for a semiconductor package, or Semiconductor devices such as semiconductor wafers, semiconductor wafers, or CSP (Chip size package) (LSI (Large Scale Integration)).

Such a conventional probe is disclosed in Patent Document 1. In the probe disclosed in Patent Document 1, a probe is formed of a conductive extremely thin cylindrical body, and a spring portion that expands and contracts in the axial direction is formed on a peripheral wall surface of the cylindrical body. Therefore, when the tip end portion of the probe abuts against the connection point of the inspection object, a reaction force (load) is received from the connection point, and the spring portion is compressed in the axial direction. Further, when the probe is attached to the connection jig, the spring portion is mounted in a state where the spring portion is compressed in the axial direction, so that the rear end of the probe abuts against the electrode portion by the elastic pressure of the spring portion, and the probe and the probe The electrical contact state of the electrode portion (for example, contact resistance, etc.) is relatively stable.

[Practical Technical Literature] [Patent Literature]

Patent Document 1: Japanese Laid-Open Patent Publication No. 2011-164028

However, in the probe disclosed in Patent Document 1, the reaction force of the probe accompanying the preloading when the jig is attached is difficult to adjust, and the reaction force is likely to increase, which is a problem. The connection jig is provided with hundreds to tens of thousands of probes. Therefore, if the reaction force of the pre-compression is too large, the reaction holding force of the probe holding member on the front end side of the holding probe is fixed against the reaction force of the pre-pressure by the reaction force. Deformation, there will be such defects.

Further, in such a probe, the spring characteristic (for example, a spring constant) of the spring portion tends to be a relationship between the pressing force when the probe abuts the connection point of the inspection target and the compression dimension of the spring portion in the axial direction. Etc. is preferred and tends to be set to a larger spring constant than the spring constant that is best suited for preloading.

Further, in order to reduce the reaction force generated by the pre-compression of the probe, it is conceivable to reduce the compression size in the axial direction of the probe for imparting pressure to the probe. However, in this configuration, due to the influence of the probe length deviation, the probes are biased based on the compression size of the pre-compression, and the pre-pressure of each probe is deviated.

In addition, in recent years, the LSI manufacturing process has been improved, and the LSI has been miniaturized, and the LSI inspection spacer has been narrowed or increased in size. Therefore, the substrate to be inspected is more complicated or miniaturized, and the target set on the substrate is further improved. The dots become narrower or minutely formed, so the probe is formed finer. Therefore, even for a large number of fine probes, it is necessary to surely make electrical connection between the front end portion and the connection point.

Therefore, the problem to be solved by the present invention is to provide a probe and a connection fixture. It does not damage the spring characteristics of the probe when it abuts the connection point of the inspection object, and can effectively suppress the reaction force of the preload of the probe when it is attached to the connection jig.

In order to solve the above problems, the first aspect of the probe according to the present invention is a probe used in a connection jig for electrically connecting to a connection point provided on an inspection object; the method includes: an outer conductor having conductivity The inner conductor is electrically conductive, and the front end portion protrudes from the front end side of the outer conductor, and the rear end portion thereof is not inserted from the rear end side of the outer conductor into the outer side. And electrically connected to the outer conductor, the front end portion abuts the connection point of the inspection object for electrical connection; and the fixing portion fixes the outer conductor and the inner conductor; the peripheral wall of the outer conductor The first and second spring portions that expand and contract in the axial direction of the probe are disposed at intervals in the axial direction so that the first spring portion is located on the distal end side of the second spring portion; An intermediate portion between the first spring portion and the second spring portion of the outer conductor is fixed to the inner conductor.

According to a second aspect of the probe of the present invention, in the first aspect, a spring constant of the first spring portion of the outer conductor is smaller than a spring constant of the second spring portion.

According to a third aspect of the probe of the present invention, in the second aspect, the first spring portion and the second spring portion of the outer conductor have a slight spiral formed on the peripheral wall of the outer conductor a spring in which the spring of the first spring portion is spaced from each other with respect to the axial direction, and is set to be smaller than the spring of the second spring portion with respect to the axial direction. The distance between them.

According to the fourth aspect of the probe of the present invention, in the second aspect, the outer guide The width of the spring of the first spring portion of the body in a direction perpendicular to the direction in which the spring extends is smaller than the width of the spring of the second spring portion in a direction perpendicular to the direction in which the spring extends.

According to a fifth aspect of the probe of the present invention, in the second aspect to the third aspect, the front end portion of the inner conductor abuts against the connection point of the inspection target, and the inner side The conductor is pressed to the rear end side, and the second spring portion of the outer conductor is compressed in the axial direction while the intermediate portion of the outer conductor is integrally rotated with the inner conductor around the axis of the probe.

According to a first aspect of the connection jig of the present invention, the connection jig of the probe according to any one of the above first to fifth aspects is used, comprising: a probe according to any one of the above first to fifth aspects; a probe; an electrode portion that is electrically connected to a rear end portion of the outer conductor of the probe; and a first probe holding member provided with a portion on the front end side of the inner conductor of the probe to face the inspection The first through hole penetrating and holding the object side is protruded, and the front end side of the outer conductor for the probe is provided on the inner surface of the first through hole or the opening on the opposite side of the inspection target The abutting portion that abuts the end portion holds the outer conductor in a state of being compressed in the axial direction between the electrode portion, and the second probe holding member is provided with a portion on the rear end side of the probe. a second through hole to be held; and an electrode holding member that holds the electrode portion.

According to a sixth aspect of the probe of the present invention, a probe used in a connection jig for electrically connecting to a connection point provided on an inspection object; the method includes: an outer conductor having conductivity and a substantially cylindrical shape The inner conductor is electrically conductive and has a substantially cylindrical shape, and the front end portion and the rear end portion are inserted into the outer conductor from the front end side and the rear end side of the outer conductor, and the outer conductor is inserted into the outer conductor. The conductor is electrically connected, and the front end portion thereof abuts against the inspection object The connection point is electrically connected; and the fixing portion fixes the outer conductor and the inner conductor; and the portion of the outer wall of the outer conductor located on the front end side of the fixing portion is provided on the axis of the probe a first spring portion that is expanded and contracted in the direction; at least one of a portion on the front end side of the fixing portion and a portion on the rear end side of the inner wall of the inner conductor is provided with a spring constant larger than the first spring portion and stretched in the axial direction The second spring portion.

According to the first aspect of the probe according to the present invention, the first and second spring portions are spaced apart from each other in the axial direction so that the first spring portion is located on the distal end side of the second spring portion on the peripheral wall of the outer conductor. Settings. Therefore, when the probe is mounted on the connection jig and the outer conductor of the probe is compressed in the axial direction to receive the preload, the combined spring constant of the first spring portion and the second spring portion and the compression size of the outer conductor are used. The pre-compressed reaction force acts on the probe holding member or the like of the connection jig. In this case, the combined spring constant of the first spring portion and the second spring portion is smaller than the spring constant of the first spring portion and the spring constant of the second spring portion, so that the compression probe can be reduced during pre-compression compression (herein The spring constant of the outer conductor). Therefore, the reaction force of the preload of the probe when the probe is attached to the connection jig can be effectively suppressed, and defects such as deformation of the probe holding member due to the reaction force of the preload can be prevented.

Further, the portion on the rear end side of the inner conductor is fixed by the intermediate portion between the first spring portion and the second spring portion of the outer conductor and the fixing portion in a state of being inserted into the outer conductor and electrically connected to the outer conductor. live. Therefore, in the state in which the probe is attached to the connection jig and subjected to the preload during the inspection, the front end portion of the inner conductor of the probe is brought into contact with the connection point of the inspection object; the front end portion of the inner conductor is pushed in by the pressing force. The compression displacement of the probe on the end side corresponds to the compression of the second spring portion provided on the rear end side of the outer conductor. At this time, the spring constant of the probe is larger than the spring constant (composite spring constant) at the time of the pre-compression compression. Therefore, in the spring characteristic of the probe when the tip end portion of the probe abuts on the connection point of the inspection object during the inspection, the non-setting can be set. Constant spring constant.

As a result, it is possible to provide a probe which does not impair the spring characteristic of the probe when the probe abuts the connection point of the inspection object, and can effectively suppress the reaction force of the preload of the probe attached to the connection jig. .

According to the second aspect of the probe according to the present invention, the spring constant of the first spring portion provided on the distal end side of the outer conductor is set to be smaller than the spring constant of the second spring portion provided on the rear end side. Therefore, as described above, the spring constant (synthesis spring constant) when the outer conductor of the probe is compressed in the axial direction during the pre-compression compression can suppress the spring constant of the first spring portion which is smaller than the smaller spring constant. . On the other hand, as described above, the spring characteristic of the probe when the tip end portion of the inner conductor is pushed to the rear end side during the inspection is the spring constant of the second spring portion having a larger spring constant. As specified, a large spring constant can be set. As a result, the spring characteristic of the probe when the probe abuts on the connection point of the inspection target is not impaired, and the reaction force of the preload of the probe attached to the connection jig can be more effectively suppressed.

According to the third aspect of the probe according to the present invention, the first spring portion and the second spring portion of the outer conductor have a slightly spiral spring formed on the peripheral wall of the outer conductor; in the free state, the first The distance between each of the springs of the spring portion with respect to the axial direction is set to be smaller than the distance between the springs of the second spring portion and the axial direction. Therefore, the first and second spring portions having different spring constants can be easily and reliably formed on the outer conductor, and the difference in spring constant between the first and second spring portions can be easily adjusted.

According to the fourth aspect of the probe according to the present invention, the width of the spring of the first spring portion of the outer conductor in a direction perpendicular to the direction in which the spring extends is smaller than the length of the spring of the second spring portion. The spring extends in a direction perpendicular to the width of the direction. Therefore, the first and second spring portions having different spring constants can be formed more easily and reliably on the outer conductor, and the difference in spring constant between the first and second spring portions can be more easily adjusted.

According to the fifth aspect of the probe according to the present invention, the front end portion of the inner conductor abuts against the connection point of the inspection object, and the inner conductor is pressed to the rear end side by the load, while the intermediate portion of the outer conductor and the inner conductor are formed. The unit rotates around the axis of the probe. Therefore, when the front end portion of the inner conductor of the probe abuts against the connection point of the inspection object, the front end portion of the inner conductor of the rotation is cut by the oxide film or the like on the surface of the connection point, thereby being reliably removed. The pin is electrically connected to the connection point.

According to the first aspect of the connection jig according to the present invention, it is possible to provide a connection jig that does not damage the spring characteristics of the probe when the probe abuts the connection point of the inspection object, and can effectively suppress the installation of the connection jig. The reaction force of the pre-pressure of the probe.

According to the sixth aspect of the probe according to the present invention, it is possible to provide a probe which does not damage the spring characteristics at the connection point of the inspection object, and can effectively suppress the probe attached to the connection jig. The reaction force of preloading.

[Best Mode for Carrying Out the Invention]

According to the connection jig and the probe of the present invention, in the inspection target portion having the inspection target, electric power or an electric signal is supplied from the inspection device to the connection point, which is a predetermined inspection position, and the electrical signal is detected from the inspection target portion by the connection point. Therefore, the electrical characteristics of the inspection target portion can be detected or an operation test can be performed.

In addition, in each of the following additional drawings, the thickness, the length, the shape, and the interval between the members of each member are appropriately enlarged, reduced, deformed, simplified, and the like for the sake of easy understanding.

<First embodiment> <Summary structure of connection jig>

A schematic configuration of a connection jig using the probe according to the first embodiment of the present invention will be described with reference to Fig. 1 . The connection jig 10 includes a first probe holding member 12, a second probe holding member 14, an electrode portion 15 (see FIG. 5), and an electrode holding member 16. The first and second probe holding members 12 and 14 are made of an insulating plate member such as resin or ceramic. The first and second probe holding members 12 and 14 are held by a predetermined distance between the rod-shaped supporting member 11 and the spacer 11s provided around the rod.

The first probe holding member 12 is formed with a plurality of through holes 12h corresponding to the first through holes according to the present invention, and guides the front end portion of the probe 20 inserted and held therein to a predetermined position. The second probe holding member 14 is formed with a plurality of through holes 14h corresponding to the second through holes according to the present invention, and the end portions of the probes 20 inserted and held therein are guided to the electrode portions 15. Since the object to be inspected is fine and the distance between the connection points is extremely small, the inner diameter of each of the through holes 12h and 14h and the interval between the adjacent through holes 12h and 14h are also extremely small.

The rear end portion of the probe 20 is in contact with the surface of the inspection target side of the electrode portion 15 which is held (fixed) on the electrode holding member 16 to be described later. In the present embodiment, for example, the electrode portion 15 is constituted by an end portion of the lead wire 18 fixed to the electrode holding member 16, and the lead wire 18 is connected to an inspection device (not shown). In addition, in FIG. 1, only a part of the probe 20 is shown in order to simplify the drawing.

Further, as shown in FIG. 1, at the time of inspection of the inspection object, an inspection object 30 (for example, a substrate) to be inspected is placed below the connection jig 10, and the connection jig 10 is lowered to allow the front end portion of the probe 20 to be predetermined. The connection point is, for example, 30 dn contact, whereby the inspection of the electrical characteristics of the inspection target portion is performed.

<Configuration of probe>

Next, the configuration of the probe 20 according to the present embodiment will be described with reference to Figs. 2 and 3 . As shown in FIGS. 2 and 3, the probe 20 includes an outer conductor 22, an inner conductor 24, and a fixing portion 26.

The outer conductor 22 has a conductivity and a substantially cylindrical shape (in the present embodiment, a cylindrical shape). The inner conductor 24 is a member having a conductively elongated and slightly rod-like shape (in the present embodiment, a columnar shape), and a distal end portion 24a is provided with a sharp abutting end 24c that abuts against a connection point to be inspected. The inner conductor 24 protrudes from the front end side of the outer conductor 22 with its front end portion 24a, and the rear end portion 24b is inserted into the outer conductor 22 without protruding from the rear end side of the outer conductor 22, and the outer conductor 22 electrical connections. The fixing portion 26 fixes the outer conductor 22 and the inner conductor 24. In the present embodiment, the electrical connection between the outer conductor 22 and the inner conductor 24 is performed by the contact between the two sides when the inner conductor 24 is inserted into the outer conductor 22, and the fixing portion 26.

In the cylindrical peripheral wall of the outer conductor 22, the first and second spring portions 221 and 222 having different spring constants that expand and contract in the axial direction of the probe 20 are provided as the first spring portion 221 having a smaller spring constant. Located on the front end side of the second spring portion 222. The first and second spring portions 221 and 222 are springs which are formed in a substantially spiral shape (more specifically, a shape in which a thin plate spring is wound into a spiral shape) formed on a peripheral wall of the outer conductor 22. 221a, 222a. Further, in the first and second spring portions 221 and 222, the springs 221a and 222a may be continuously formed in the axial direction across the entire length of the spring portions 221 and 222, and the spring 221a may not be formed at one or a plurality of places. Part of 222a (non-stretched part).

Specifically, in the present embodiment, in the free state, the distance 221 between the spring 221a of the first spring portion 221 and the axial direction of the first spring portion 221 is set to be smaller than the spring 222a of the second spring portion 222. P2 between each turn in the axial direction. Further, the width W1 of the spring 221a of the first spring portion 221 in the direction perpendicular to the direction in which the spring 221a extends is set to be smaller than the direction of the spring 222a of the second spring portion 222 in the direction perpendicular to the direction in which the spring 222a extends. The width is W2. The method of forming such an outer conductor 22 will be described later.

The fixing portion 26 fixes the intermediate portion 22c between the first spring portion 221 and the second spring portion 222 of the outer conductor 22 and the portion facing the inner conductor 24 of the intermediate portion 22c. Therefore, the first and second spring portions 221 and 222 of the outer conductor 22 expand and contract, and the inner conductor 24 and the intermediate portion 22c of the outer conductor 22 move together in the axial direction. Further, the position of the rear end portion 24b of the inner conductor 24 inserted in the outer conductor 22 is set such that when the inner conductor 24 is pushed to the rear end side to compress the second spring portion 222 in the axial direction, the rear end portion 24b It does not protrude from the rear end of the outer conductor 22 to the outside.

In the present embodiment, the fixing portion 26 is fixed by, for example, electric welding, but may be formed by various welding such as laser welding, caulking, and fixing by an adhesive.

Further, as described above, the first and second spring portions 221 and 222 of the outer conductor 22 are formed by the slightly spiral springs 221a and 222a formed on the peripheral wall of the outer conductor 22, so that they expand and contract in the axial direction. At the same time, the relationship between the two ends of the spring portions 221 and 222 in the axial direction is curved (rotated) around the circumference of the shaft. Therefore, when the rotation of the rear end portion 22b of the outer conductor 22 is stopped, the second spring portion 222 is expanded and contracted in the axial direction, and the intermediate portion 22c of the inner conductor 24 and the outer conductor 22 is simultaneously expanded and contracted. Rotate around the axis together. Therefore, when the front end portion 24a of the inner conductor 24 abuts against the connection point of the inspection target, the inner conductor 24 is pressed to the rear end side (inside the outer conductor 22), and the second spring portion 222 of the outer conductor 22 is caused. The shaft portion is compressed while the intermediate portion 22c of the outer conductor 22 and the inner conductor 24 are integrally rotated about the circumference of the shaft.

In addition, when the inner conductor 24 is pressed against the inner conductor 24, the rotation of the inner conductor 24 is supplemented, and the front end portion 24a and the joint point of the inner conductor 24 when the inner conductor 24 is pressed are compared. The abutting area is such that the abutting area of the rear end portion 22b of the outer conductor 22 abutting on the electrode portion 15 or the like is large. Therefore, the front end portion 24a of the inner conductor 24 and the connection point are made with respect to the inner conductor 24 being pushed. The frictional force applied between the rear end portion 22b of the outer conductor 22 and the electrode portion 15 against which the outer conductor 22 abuts is large. Therefore, as the second spring portion 222 is compressed in the axial direction, the rear end portion 22b of the outer conductor 22 does not rotate, but the intermediate portion 22c of the outer conductor 22 and the inner conductor 24 rotate.

Further, in the inner conductor 24 according to the present embodiment, the abutting end 24c of the distal end portion 24a may be provided at a position (eccentric position) offset from the central axis A of the inner conductor 24 and the outer conductor 22. In this configuration, when the inner conductor 24 is pushed into the outer conductor 22 and the inner conductor 24 is rotated as described above, the abutting end 24c of the inner conductor 24 is swirled around the central axis A. Therefore, when the abutting end 24c of the inner conductor 24 abuts against the connection point of the inspection object, the abutting end 24c cuts the oxide film or the like on the surface of the joint point and slides it to the joint point to form an oxide film on the surface of the joint point. Etc. Effectively removed.

Here, the size of the probe 20 and each part thereof will be described. The total length L1 of the probe 20 is set to, for example, about 2 to 12 mm, and the outer diameter R1 of the probe 20 and the outer conductor 22 is set to, for example, about 30 to 100 μm. The total length L2 of the outer conductor 22 is set, for example, to about 1 to 10 mm, and the inner diameter R2 is set to, for example, about 20 to 80 μm. The total length L3 of the inner conductor 24 is set to, for example, about 1 to 10 mm, and the outer diameter thereof is set to be slightly smaller than the inner diameter R2 of the outer conductor 22 so that the inner conductor 24 can slide in the outer conductor 22.

also. The length L4 of the first spring portion 221 of the outer conductor 22 in the axial direction is set to, for example, about 0.5 to 4 mm. The length L5 of the second spring portion 222 in the axial direction is set, for example, to about 1 to 8 mm. The pitch P1 of the spring 221a of the first spring portion 221 is set, for example, to about 50 to 150 μm, and the width W1 is set to, for example, about 20 to 100 μmm. The pitch P2 of the spring 222a of the second spring portion 222 is set to, for example, about 100 to 300 μm, and the width W2 is set to, for example, about 50 to 300 μmm.

Further, the spring constant ratio of the first and second spring portions 221 and 222 is set, for example, to The spring constant of the second spring portion 222 is about 2 to 10 times the spring constant of the first spring portion 221 . Moreover, more specifically, the spring constant of the first spring portion 221 is set to, for example, about 1 to 5 gf/mm. The spring constant of the second spring portion 222 is set, for example, to about 4 to 20 gf/mm.

Further, as the material of the outer conductor 22, for example, a nickel or a nickel alloy tube (for example, an electroformed tube or the like) can be used. Further, the outer surface of the front end portion 22a of the side conductor 22 and the end surface of the rear end portion 22b are excluded, and the circumferential surface may be insulated and coated as needed. Examples of the material of the inner conductor 24 include tungsten, carbon tool steel (SK material), beryllium copper, and the like.

Further, the shape of the distal end portion 24a of the inner conductor 24, in particular, the shape of the abutting end 24c, for example, as shown in Fig. 2, the inner side of the inner conductor 24 is obliquely intersecting the inner side of the inner conductor 24 The front end portion 24a of the conductor 24 is cut into a general shape.

Here, as a modification of the shape of the distal end portion 24a of the inner conductor 24, the following configuration can be employed. The first modification is a shape in which the distal end, that is, the abutting end 24c is eccentric with respect to the central axis A, and is cut by four faces that obliquely intersect the central axis of the inner conductor 24. In the second modification, the shape of the tip end of the inline screw driver (screwdriver) can be mentioned.

<Configuration of connection jig>

Next, a detailed configuration of the connection jig 10 will be described with reference to Figs. 4 to 6 . As shown in FIG. 4, the end surface of the distal end portion 22a of the outer conductor 22 of the probe 20 is abutted on the inner surface of the through hole 12h of the first probe holding member 12 or the opening opposite to the inspection target. The abutting portion (the configuration of FIG. 4 is a step portion in the boundary portion where the inner diameter changes). In the probe 20, when the distal end portion 24a of the inner conductor 24 penetrates from the opposite side of the inspection target toward the inspection target side in the through hole 12h, the end surface of the distal end portion 22a of the outer conductor 22 abuts against the contact portion 121. When the end surface of the outer conductor 22 abuts against the contact portion 121, the distal end portion 24a of the inner conductor 24 protrudes from the surface of the first probe holding member 12 on the inspection target side by a predetermined protruding size through the through hole 12h. Out.

On the other hand, the rear end portion 22b of the outer end side conductor 22 constituting the rear end portion of the probe 20 is inserted and guided to the second probe holding member 14h of the second probe holding member 14 as shown in FIG. The electrode portion 15 held by the electrode holding member 16 is electrically connected.

The interval between the contact portion 121 of the first probe holding member 12 and the electrode portion 15 is set to be smaller than the outer conductor 22 of the probe 20 when the first and second spring portions 221 and 222 are in a free state. The length L2 is smaller than the predetermined pre-compression size. Therefore, when the probe 20 is attached to the connection jig 10, the outer conductor 22 is compressed in the axial direction by a predetermined pre-compression size between the contact portion 121 and the electrode portion 15. At this time, both the first and second spring portions 221 and 222 of the outer conductor 22 are compressed in the axial direction. Therefore, the rear end portion 22b of the outer conductor 22 is pressed against the electrode portion 15 with a predetermined pressing force to receive the preload, and the electrical connection between the rear end portion 22b of the outer conductor 22 and the electrode portion 15 is relatively stable.

The spring characteristic of the compression displacement of the outer conductor 22 in this preloading state is determined by the combined spring constant of the spring constants of the first and second spring portions 221 and 222. Here, if the combined spring constant is K, the spring constant of the first spring portion 221 is k1, and the spring constant of the second spring portion 222 is k2, the relationship between K, k1, and k2 is 1/K = 1/. The relationship between k1+1/k2 is determined.

The combined spring constant K in this preloading state is smaller than the spring constant k1 of the first spring portion 221 having a smaller spring constant, so that it can be used as a preloading compression size for compressing the outer conductor 22 for preloading. It ensures a sufficient size and effectively suppresses the reaction force of the preload. As a result, it is possible to prevent defects such as deformation of the first probe holding member 12 due to the reaction force of the preload. Here, the size (preload compression size) at which the outer conductor 22 is compressed for preloading is set, for example, to about 10 to 100 μm. Further, the load at the time of pre-compression compression is set, for example, to about 0.05 to 0.5 gf.

In the inspection of the inspection object such as the substrate, as shown in FIG. 6, the connection jig 10 is lowered, and the distal end portion 24a of the probe 20 abuts against the predetermined connection point 30d1 on the target portion such as the wiring of the inspection object 30. When the connection jig 10 is further lowered, the inner conductor 24 of the probe 20 is pushed up and enters the through hole 12h of the first probe holding member 12. At this time, since the inner conductor 24 of the probe 20 and the intermediate portion 22c of the outer conductor 22 are fixed, the inner conductor 24 is pushed in, and the second spring portion 222 of the outer conductor 22 is compressed in the axial direction, and the inner conductor 24 is made. Pushed into the outer conductor 22.

The inspection compression size of the probe 20 in the axial direction during the inspection (that is, the size of the inner conductor 24 pushed into the through hole 12h of the first probe holding member 12 by the load from the connection point 30d1) is set. The phase is larger than the predetermined compression size of the first spring portion 221 in the preloaded state. Therefore, after the distal end portion 24a of the inner conductor 24 abuts on the connection point 30d1 of the test object 30, the probe 20 compresses the pre-compression compression size of the first spring portion 221 with respect to the length in the axial direction of the preloaded state. Before the component, the probe 20 is compressed, and the first spring portion 221 is extended, and the end surface of the distal end portion 22a of the outer conductor 22 is kept in contact with the contact portion 121. The spring constant of the compression of the probe 20 at this stage is obtained by subtracting the value of the spring constant k1 of the first spring portion 221 from the spring constant k2 of the second spring portion 222. Here, the above-described inspection compression size is set to, for example, about 10 to 100 μm, and the above-described compression size is set to, for example, about 20 to 200 μm. Moreover, the load applied to the distal end portion 24a of the probe 20 at the time of inspection is set to, for example, about 1 to 10 gf.

Further, when the probe 20 is compressed by the pre-compression compression size component of the first spring portion 221 based on the length of the pre-stressed state, the first spring portion 221 is completely deployed from the compressed state, and only the second spring portion 222 is provided. compression. At this stage, the spring constant at the time of compression of the probe 20 is equal to the spring constant of the second spring portion 222. Therefore, a sufficiently large spring constant can be set in the spring characteristic of the probe 20 when the distal end portion 24a of the probe 20 abuts on the connection point 30d1 of the test object 30 at the time of inspection. Also, at Finally, the probe 20 is in a state in which the pre-compressed compression size component of the first spring portion 221 is compressed in the above-described compression size based on the length of the pre-stressed state (in the state where the inspection object 30 is inspected). As shown in FIG. 6, the end surface of the front end portion 22a of the outer conductor 22 faces away from the abutting portion 121 toward the rear end side of the probe 20.

As a result, it is possible to provide a spring characteristic that does not impair the contact point 30d1 when the probe 20 abuts against the test object 30, and can effectively suppress the reaction of the preload of the probe 20 mounted on the connection jig 10. The force probe 20 and the connection jig 10.

Further, as described above, the distal end of the probe 20 abuts against the connection point 30d1 of the test object 30, and the probe 20 is compressed from the preloaded state, and the second spring portion 222 of the outer conductor 22 is compressed, as shown in FIG. As shown by the arrow B1, the inner conductor 24 rotates around the central axis A together with the intermediate portion 22c of the outer conductor 22. At the same time, the abutting end 24c of the inner conductor 24 which is eccentric with respect to the central axis A is rotated around the central axis A to be slidably connected to the connection point 30d1. Therefore, the oxide film or the like on the surface of the connection point 30d1 can be effectively removed, and the electrical connection between the probe 20 and the connection point 30d1 can be stably performed.

Further, as described above, in the free state of the probe 20, the distance P1 between the springs 221a of the first spring portion 221 is set to be smaller than the distance P2 between the springs 222a of the second spring portion 222, and the first spring portion 221 is provided. The width W1 of the spring 221a is also set to be smaller than the width W2 of the spring 222a of the second spring portion 222. Therefore, the first and second spring portions 221 and 222 having different spring constants can be easily and surely formed on the outer conductor 22 of the probe 20, and the difference in spring constant between the first and second spring portions 221 and 222 can be easily adjusted. .

Further, in the present embodiment, the spring constant of the first spring portion 221 of the outer conductor 22 is made smaller than the spring constant of the second spring portion 222, but the spring constant of the first spring portion 221 and the second spring portion 222 may be made. The spring constants are the same. In this case as well, the spring constant at the time of pushing the inner conductor 24 to the rear end side at the time of inspection to compress the probe 20 can be maintained, and the spring when the outer conductor 22 is compressed in the pre-compression compression can be effectively suppressed. constant.

<Method for Making Outer Conductor 22>

Next, a method of manufacturing the outer conductor 22 of the probe 20 will be described. First, a gold plating layer is formed on the outer peripheral surface of a predetermined core material, and a nickel plating layer is formed thereon to fabricate an electroformed tube. As the core material, for example, a metal wire or a resin wire having an outer diameter of 5 μm to 300 μm can be used. For the metal wire, for example, a SUS wire can be used, and as the resin wire, for example, a synthetic resin wire such as a nylon resin or a polyethylene resin can be used. Further, the thickness of the gold plating layer is, for example, about 0.1 μm to 1 μm; and the thickness of the nickel plating layer is, for example, about 5 μm to 50 μm. The length of the electroforming tube is preferably 50 cm or less from the viewpoint of convenience in transportation work, etc., but is not limited thereto, and may be continuously produced without cutting.

Next, an insulating film is formed on the outer peripheral surface of the nickel plating layer of the electroformed tube. When the insulating film is formed in a predetermined groove to be described later, it can also function as a photoresist. The thickness of the insulating film is, for example, about 2 μm to 50 μm. The insulating film can be formed, for example, by a fluorine coating method or a silicone resin material.

Next, a part of the insulating film is removed in a spiral shape to form a spiral groove. At this time, a part of the insulating film is partially removed in a peripheral manner, thereby forming a surrounding groove for dividing the electroforming tube into parts. On the portion where the grooves are formed, a nickel plating layer is exposed. In forming such a groove, a method of irradiating the insulating film with laser light to remove the insulating film may be employed. At this time, the core material is rotated in the circumferential direction, and the position of the groove is directly irradiated with the laser light, and the insulating film is removed by the irradiation.

Next, using an insulating film as a mask, the nickel plating layer exposed through the trench is etched away to expose the gold plating layer. At this time, a gold plating layer exists between the nickel plating layer and the core material, so that the nickel etching liquid can be prevented from reaching the core material during etching.

Next, ultrasonic cleaning is performed to remove the gold plating layer exposed through the trench. Connect Tension is applied to both ends of the core material so as to extend and deform so that the sectional area thereof becomes small. When the core material is extended and the cross-sectional area thereof is small, the gold plating layer covering the outer peripheral surface of the core material is peeled off from the outer peripheral surface and remains on the inner side of the electroformed tube, and a space is formed between the core material and the gold plating layer. Next, when the core material is removed, the electroformed tube is separated into the respective unit units by the surrounding grooves, and a plurality of outer conductors 22 having the first and second spring portions 221 and 222 are obtained.

The outer conductor 22 thus formed has a nickel plating layer of a cylindrical tube having a conductive material, and an insulating layer is formed on the outer circumference of the nickel plating layer. In this method, an insulating film is formed, and if necessary, it is used as a photoresist film. However, an insulating film is not necessarily required, and a photoresist film may be used during etching.

<Second embodiment>

Next, a configuration of a probe according to a second embodiment of the present invention will be described with reference to Figs. 7 and 8 . As shown in FIGS. 7 and 8, the probe 40 includes an outer conductor 41, an inner conductor 42, and a fixing portion 43.

The outer conductor 41 has a conductivity and a substantially cylindrical shape (in the present embodiment, a cylindrical shape). The inner conductor 42 is electrically conductive and has a substantially cylindrical shape (in the form of a cylindrical shape in the present embodiment), and the tip end portion 42a is provided with a sharp contact at a connection point of the inspection target. The terminal 42c. The inner conductor 42 protrudes from the front end side of the outer conductor 41 with its front end portion 42a, and the rear end portion 42b does not protrude from the rear end side of the outer conductor 41, and is inserted into the outer conductor 41, and the outer conductor 41. Electrical connection. The fixing portion 43 fixes the outer conductor 41 and the inner conductor 42. In the present embodiment, the electrical connection between the outer conductor 41 and the inner conductor 42 is performed by the contact between the two sides when the inner conductor 42 is inserted into the outer conductor 41, and the fixing portion 43.

A first spring portion 411 that expands and contracts in the axial direction of the probe 40 is provided on a peripheral wall of the outer conductor 41 at a portion closer to the distal end side than the fixed portion 43. Further, on the peripheral wall of the inner conductor 42, the portion on the front end side of the fixed portion 43 and the portion on the rear end side thereof are The other one (in both of the embodiments) is provided with a second spring portion 421 having a spring constant larger than that of the first spring portion 411 of the outer conductor 41 and expanding and contracting in the axial direction. The first and second spring portions 411 and 421 are slightly spirally formed on the outer wall of the outer conductor 41 or the inner conductor 42 (more specifically, the elongated plate spring is wound into a spiral shape). The springs 411a and 421a of the shape are formed. The adjustment of the spring constant of the first and second spring portions 411 and 421 may be almost the same as in the case of the first and second spring portions 221 and 222 according to the first embodiment, and the pitch of the springs 411a and 421a may be adjusted. And the above width and the like are performed.

The fixing portion 43 is located between the second spring portion 421 located on the distal end side of the inner conductor 42 and the second spring portion 421 located on the distal end side of the inner conductor 42 at the rear end side of the outer conductor 41. The part (middle part) is fixed. The fixing portion 43 is fixed by, for example, electric welding, as in the case of the fixing portion 26 of the first embodiment. However, various welding such as laser welding, caulking fixing, and fixing by an adhesive may be employed. .

Further, in the distal end portion 42a of the inner conductor 42, a sharp abutting end 42c located at a position (eccentric position) offset from the central axis A can be formed.

Such a probe 40 is attached to the connection jig 10 in almost the same manner as the probe 20 according to the first embodiment. However, in the mounting state, the end surface of the distal end portion 41a of the outer conductor 41 abuts against the abutting portion 121 in the through hole 12h of the first probe holding member 12, but the point is the same, but the probe 40 is used here. The end surface of the rear end portion 42b of the inner conductor 42 is not in contact with the electrode portion 15 instead of the outer conductor 41. In this installation state, the first spring portion 411 of the outer conductor 41 and the second spring portion 421 on the rear end side of the inner conductor 42 are compressed to receive the preload. The probe 40 is based on the spring characteristic of the pre-compression compression, and is determined by the combined spring constant of the spring constant of the first spring portion 411 of the outer conductor 41 and the spring constant of the second spring portion 421 of the rear end side of the inner conductor 42. This combined spring constant is smaller than the first spring portion 411 whose spring constant is smaller. Therefore, the reaction force of the preload applied to the first probe holding member 12 is effectively suppressed.

Therefore, at the time of inspection, the distal end portion 42a of the probe 40 abuts against the connection point 30d1 of the test object 30, and the distal end portion 41a of the inner conductor 42 exceeds the pre-compression compression size component of the first spring portion 411 of the outer conductor 41. The spring characteristic of the probe 40 when pushed to the rear end side is determined by the combined spring constant of the spring constant of the second spring portion 421 on the front end side and the rear end side of the inner conductor 42, so that a very large spring constant can be set. .

As a result, it is possible to provide a spring characteristic that does not impair the contact point 30d1 when the probe 40 abuts against the test object 30, and can effectively suppress the reaction of the preload of the probe 40 when mounted on the connection jig 10. Force probe 40.

Further, in the probe 40, the distal end of the probe 40 is in contact with the connection point 30d1 of the test object 30, and the probe 40 is compressed from the preloaded state, and the front end side and the rear end side of the inner conductor 42 are the same. The spring portion 421 is compressed while the front end portion 42a of the inner conductor 42 rotates around the center axis A with respect to the rear end portion 42b. At the same time, the sharp abutting end 42c of the inner conductor 42 which is eccentric with respect to the central axis A is rotated around the central axis A to be slidably connected to the connection point 30d1.

Further, the outer conductor 41 and the inner conductor 42 of the probe 40 according to the present embodiment can be manufactured by almost the same manufacturing method as the outer conductor 22 of the probe 20 according to the first embodiment.

10‧‧‧Connecting fixture

11‧‧‧Support components

11S‧‧‧ spacers

12‧‧‧1st probe holding member

12h, 14h‧‧‧through holes

14‧‧‧2nd probe holding member

15‧‧‧Electrode

16‧‧‧Electrode holding member

18‧‧‧Wire

20‧‧‧ probe

22‧‧‧Outer conductor

22a‧‧‧ front end

22b‧‧‧ back end

22c‧‧‧ middle part

24‧‧‧Inside conductor

24a‧‧‧ front end

24b‧‧‧ back end

24c‧‧‧Abutment

26‧‧‧ Fixed Department

30‧‧‧Inspected objects

30d1...30dn‧‧‧ connection point

40‧‧‧ probe

41‧‧‧Outer conductor

41a‧‧‧ front end

42‧‧‧Inside conductor

42a‧‧‧ front end

42b‧‧‧ back end

42c‧‧‧Abutment

43‧‧‧ Fixed Department

121‧‧‧Apartment

221‧‧‧1st spring part

222‧‧‧2nd spring part

221a, 222a‧ ‧ spring

411‧‧‧1st spring part

421‧‧‧2nd spring part

411a, 421a‧ ‧ spring

A‧‧‧ center axis

B1‧‧‧ arrow

L1~L5‧‧‧ length

P1, P2‧‧‧ spacing

R1‧‧‧ OD

R2‧‧‧ inside diameter

W1, W2‧‧‧ width

Fig. 1 is a partial cross-sectional front view showing a schematic configuration of a connection jig having a probe according to a first embodiment of the present invention.

Fig. 2 is a view showing a schematic configuration of a probe according to a first embodiment of the present invention.

Fig. 3 is a partially broken view showing a schematic configuration of an outer side conductor provided in the probe of Fig. 1.

Fig. 4 is a cross-sectional view showing the configuration of the distal end side of the probe in the connecting jig of Fig. 1.

Fig. 5 is a cross-sectional view showing the configuration of the rear end side of the probe in the connecting jig of Fig. 1.

Fig. 6 is a view showing a state in which the distal end side of the probe abuts on the connection point of the substrate in the connection jig of Fig. 1;

Fig. 7 is a view showing a schematic configuration of a probe according to a second embodiment of the present invention.

Fig. 8 is a partially broken view showing the schematic configuration of the inner conductor provided in the probe of Fig. 7.

20‧‧‧ probe

22‧‧‧Outer conductor

22a‧‧‧ front end

22b‧‧‧ back end

22c‧‧‧ middle part

24‧‧‧Inside conductor

24a‧‧‧ front end

24b‧‧‧ back end

24c‧‧‧Abutment

26‧‧‧ Fixed Department

221‧‧‧1st spring part

222‧‧‧2nd spring part

221a, 222a‧ ‧ spring

A‧‧‧ center axis

L1, L3‧‧‧ length

Claims (7)

A probe for use in a connection fixture for electrically connecting to a connection point provided on an inspection object; characterized by comprising: an outer conductor having electrical conductivity and a substantially cylindrical shape; and an inner conductor having electrical conductivity The front end portion protrudes from the front end side of the outer conductor, and the rear end portion thereof is inserted into the outer conductor so as not to protrude from the rear end side of the outer conductor, and is electrically connected to the outer conductor, and the front end portion thereof is abutted And electrically connected to the connection point of the inspection object; and fixing the outer conductor and the inner conductor; and first and third of the outer wall of the outer conductor that expands and contracts in the axial direction of the probe The spring portion is provided at intervals in the axial direction so that the first spring portion is located on the distal end side of the second spring portion; the fixing portion is configured to be the first spring portion located on the outer conductor 2 The intermediate portion between the spring portions is fixed to the inner conductor. The probe according to claim 1, wherein a spring constant of the first spring portion of the outer conductor is smaller than a spring constant of the second spring portion. The probe according to claim 2, wherein the first spring portion and the second spring portion of the outer conductor have a slightly spiral spring formed on the peripheral wall of the outer conductor; in a free state The distance between each of the springs of the first spring portion with respect to the axial direction is set to be smaller than the distance between the springs of the second spring portion and the axial direction. The probe according to claim 2, wherein the spring of the first spring portion of the outer conductor has a width in a direction perpendicular to a direction in which the spring extends, and is smaller than a spring of the second spring portion. A width along a direction perpendicular to the direction in which the spring extends. The probe according to any one of claims 1 to 4, wherein the inner conductor is pressed to the rear end due to a load when the front end portion of the inner conductor abuts against the connection point of the inspection object Side, and let the second bullet of the outer conductor The spring is compressed in the axial direction while the intermediate portion of the outer conductor is integrally rotated with the inner conductor about the axis of the probe. A connection jig, using the probe according to any one of claims 1 to 5, characterized in that it comprises: a probe according to any one of claims 1 to 5; The electrode portion is electrically connected to the rear end portion of the outer conductor of the probe, and the first probe holding member is provided with a first through hole, and a portion of the probe on the front end side of the inner conductor is And the abutting portion is provided on the inner surface of the first through hole or the opening on the opposite side of the inspection target, and the front end side of the outer conductor of the probe is provided. The end portion abuts; and the outer conductor is held in a state of being compressed in the axial direction between the electrode portion; and the second probe holding member is provided with a second through hole, and a portion on the rear end side of the probe is provided And being held through; and an electrode holding member that holds the electrode portion. A probe for use in a connection fixture for electrically connecting to a connection point provided on an inspection object; characterized by comprising: an outer conductor having electrical conductivity and a substantially cylindrical shape; and an inner conductor having electrical conductivity Further, in a substantially cylindrical shape, the front end portion and the rear end portion are inserted into the outer conductor so as to protrude from the front end side and the rear end side of the outer conductor, and are electrically connected to the outer conductor, and the front end portion thereof abuts The connection point of the inspection object is electrically connected; and the fixing portion fixes the outer conductor and the inner conductor; and the peripheral wall of the outer conductor is located at a front end side of the fixing portion, and is provided in the probe a first spring portion that expands and contracts in the axial direction of the needle; at least one of a portion on the front end side of the fixing portion and a portion on the rear end side of the inner wall of the inner conductor is provided with a spring constant larger than the first spring portion The second spring portion that expands and contracts in the axial direction.