TW201411136A - Anisotropic conductive member - Google Patents

Abstract

As an anisotropic conductive member provided with an electric penetration part capable of achieving all of contact stabilization, density growth, and decrease in thickness at high levels, provided is an anisotropic conductive member provided with a plate-shaped elastic socket, and a plurality of electric penetration parts which are individually held in the elastic socket and each pass an electric current in the thickness direction of the elastic socket. The electric penetration part is provided with first and second movable members the relative positions of which are changeable in the thickness direction of the elastic socket while the movable members are electrically connected, the movable members are disposed so as to be able to compress part of the elastic socket at least in the state in which the movable members are close to each other such that, when the movable members come close to each other by the application of external force thereto, elastic restoring force for moving the movable members away from each other is generated in the elastic socket, and a sliding contact structure which enables the change of the relative positions of the movable members is provided with a means for preventing a shaft body part with which the second movable member is provided from undergoing plastic deformation when the first movable member is inclined.

Description

Heterogeneous conductive parts

The present invention relates to an anisotropic conductive member for use in an IC inspection or the like.

When inspecting an IC with a large number of terminals, it is necessary to use an isotropic conductive member to connect the IC terminals to the inspection device for checking the IC while suppressing the electrical connection between adjacent terminals in the IC. The electrodes corresponding to the respective terminals of the inspection substrate (IC tester) are electrically connected.

The dissimilar conductive member has a substantially plate shape as a whole shape, and has a characteristic that the conductivity of the main surface in the normal direction is sufficiently high to allow an electric signal to pass, but is insulated in the in-plane direction of the main surface. Not powered. Based on this characteristic, the anisotropic conductive member has a configuration in which a portion in which a current passes through the normal direction of the principal surface corresponds to a terminal of the IC to be inspected. In the present invention, a portion that passes a current in the normal direction of the principal surface corresponding to the terminal of the IC is referred to as an electrical penetration portion.

The specific structure of the electrical penetration portion is arbitrary, and for example, a structure in which conductive thin wires such as metal embedded in the member are exposed from the main surfaces of the opposite-side conductive members, and is filled between the main faces of both sides. a structure of one set of conductive microparticles; a closed end portion, an open tubular body and a coil spring disposed inside the tubular body and attached to the coil spring and the above portion A probe formed by two contact members protruding from the tubular body portion in a state in which the closing portion is locked.

In the electrical penetration portion at the time of use, the terminal of the IC and the end portion of the main surface of the electrical penetration portion on the inspection substrate and the anisotropic conductive member are stabilized by the electrical contact between the electrodes. Pressure contact. In order to generate the contact pressure for realizing the above-described degree of electrical contact stabilization, in many cases, the electrical penetration portion is provided with a structure for generating contact pressure by an elastic restoring force.

For example, the electrical penetration portion of the conductive thin wire and the electrical penetration portion using a set of conductive fine particles are provided with the structure embedded in the elastic body, and the components and the IC terminal and the inspection substrate are generated. Contact pressure. Further, on the probe, the two contact members are attached to each other by the coil spring, and the contact members are brought into contact with the IC terminal and the inspection substrate.

In addition to the above-described example, Patent Document 1 discloses a probe device for inspecting a semiconductor wafer, which comprises an elastic plate of a non-conductive material in which a through hole is formed at a position corresponding to a contact terminal of the inspection object; The upper side of the through hole is coupled to the plunger head which is elastically supported by the elastic plate and the plunger body extending from the center of the lower surface of the plunger head; at the center portion and the plunger The receiving portion of the body contact is recessed to form a contact pin that is coupled to the lower side of the through hole.

[Patent Document 1] JP-A-2008-180689

The semiconductor wafer inspection probe disclosed in Patent Document 1 is mounted (corresponding to the "inside conductive member" in the present specification), an elastic plate made of a non-conductive material is used as an electrical penetration portion composed of a movable member composed of a plunger and a contact pin (also referred to in this specification) The elastic restoring force for the "elastic socket" is variably disposed in the thickness direction of the elastic plate.

In such a distorted conductive member, in addition to the complicated structure of the through hole provided in the elastic socket, it is difficult to process, and the inner diameter of the through hole is larger than the maximum outer diameter of the movable member, and it is difficult to be fine.

In other words, at least one of the two movable members is an anisotropic conductive member having a structure in which a through hole is penetrated, and the semiconductor element is highly integrated and refined. The IC terminal of the object has a narrow pitch and an increased number of terminals, which causes the following problems.

(Problem 1) The outermost portion of the outer diameter of the movable member is insufficient in strength, and the foreign conductive member is bent during use.

(Problem 2) When the movable member that penetrates the through hole expands the inner diameter of the through hole, the elastic body between the adjacent through hole is compressed, and the distance between the through holes is expanded by the elastic repulsive force. The terminal pitch and the through hole are misaligned.

(Problem 3) The protruding amount of the protruding portion of the movable member of the compression elastic socket is relatively small with respect to the inner diameter of the through hole, and when the elastic socket is compressed, the movable member is buried in the through hole.

The problem 1 of the above problem will be described in detail using the probe device for semiconductor wafer inspection (inverse conductive member) disclosed in Patent Document 1.

FIG. 19 is a conceptual diagram showing a cross section of a movable member described in Patent Document 1. Figure 20 is a view showing that the movable member of Figure 19 is in contact with the terminal of the IC, that is, the solder ball. status. Cross sections other than the movable member such as the elastic socket are omitted.

As shown in Fig. 20, it is preferable that the front end of the IC terminal (the solder ball in Fig. 20) is disposed on the central axis of the movable member on the IC side, and the IC side is based on the contact between the IC terminal and the movable member on the IC side, and the IC side. The movable member is pressed into the direction of the other movable member. However, such contact is extremely rare, and the center of the terminal of the IC is misaligned with the center of the movable member on the IC side, usually by the positional tolerance of the terminal of the IC, the positional deviation of the IC on the inspection device, the misalignment of the anisotropic conductive member, and the like. The state (the state of the offset) is in contact. Figure 21 is the contact in this offset state.

In the case of contact in the offset state, if the anisotropic conductive member shown in FIG. 21 is a structure in which the movable member on the IC side cannot be tilted with respect to the other movable member, the movable member on the IC side will be biased. A transverse load is applied in the direction of the movement. For this lateral load, if there is sufficient strength to prevent plastic deformation, the movable member on the IC side will not be bent. However, when the movable member on the IC side is thin and weak, the movable member on the IC side will be bent. Will cause two movable parts to slip badly.

Among the above problems, both of the problems 2 and 3 are problems in that the terminal pitch of the IC is narrowed and surfaced. The heteroconductive member disclosed in the above Patent Document 1 does not surface when the terminal pitch of the IC is sufficiently large. However, after the terminal pitch of the IC is narrow, the terminal pitch of the IC expanded by the through hole is relatively increased with respect to the misalignment of the through hole, or the movable member is buried in the elastic body even if the contact between the terminal of the IC and the movable member on the IC side is released. The problems of the ministry will be superficial.

The present invention solves the above problems and provides an anisotropic conductive member that can inspect an IC having a fine pitch.

The present invention provided to solve the above problems is as follows.

(1) An anisotropic conductive member comprising: an elastic socket having an elastic plate shape; and a plurality of through holes provided in the elastic socket, respectively, and having a through hole a portion of the plurality of electrical penetration portions passing through the thickness direction of the elastic socket, wherein the electrical penetration portion is electrically connected to the first movable member and the first position of the elastic socket in a thickness direction In the second movable member, the first movable member has an electrode contact portion at an end portion facing the inspection target object in contact with the electrode attached to the inspection object, and the second movable member is in contact with the inspection substrate of the inspection device. Further, a substrate contact portion is provided at an end portion on the side opposite to the inspection substrate, and the elastic socket is caused to be applied when the electrode contact portion and the substrate contact portion are biased in the thickness direction of the elastic socket. The elastic restoring force in the direction of the separation, the first and second movable members are configured to compressably configure the elasticity In one of the seats, the electrical penetration portion has a sliding contact structure in which the first sliding surface provided on the first movable member and the second sliding surface provided on the second movable member slide in the thickness direction of the elastic socket According to the sliding contact structure, the distance between the electrode contact portion and the substrate contact portion can be varied in the thickness direction of the elastic socket while maintaining the electrical connection of the contact portions, and the first movable member has the above-described The electrode contact portion has a hollow cylindrical body portion extending in a thickness direction of the elastic socket, and an end portion of the cylindrical portion opposite to the electrode contact portion side has an opening, and the end portion of the cylindrical portion having the opening At least a part of the inner side surface of the side constitutes the first sliding surface, and the cylindrical body has The end surface on the opening side is in contact with the main surface of the elastic socket on the electrode contact portion side, and the first movable member is placed on the main surface of the elastic socket on the electrode contact portion side, and the second movable member is provided. The shaft body portion extending from the substrate contact portion in the thickness direction of the elastic socket, at least a part of the outer surface of the shaft body portion opposite to the end portion on the side of the substrate contact portion side constitutes the second sliding surface, a portion including an end portion of the shaft body portion constituting the side of the second sliding surface having the outer side surface, protruding from a main surface of the elastic socket on the electrode contact portion side, and inserted into the hollow portion of the first movable member The other portion of the shaft portion is disposed in the through hole of the elastic socket, and the length of the elastic socket in the sliding direction of the second sliding surface on the first sliding surface is the first a length of the sliding surface and a length of the thickness direction of the elastic socket slidably contacting the first sliding surface on the second sliding surface Either shorter length than the other surface of the first movable member need not cause plastic deformation of the shaft body portion, may be inclined to the thickness direction of the elastic receptacle.

(2) The foreign conductive member according to (1) above, wherein the length of the second sliding surface is shorter than a length of the first sliding surface.

(3) The anisotropic conductive member according to the above (2), wherein the shaft portion of the second movable member has a large diameter portion that is larger in diameter than the other portion, and the outer surface of the large diameter portion constitutes the second portion Sliding surface.

(4) The foreign conductive member according to the above (3), wherein the large diameter portion is provided to include an end portion of the shaft portion that is inserted into the cylindrical portion.

(5) The heteroconductive member according to (3) above, wherein The diameter of the large diameter portion is larger than the inner diameter of the through hole of the elastic socket, and the through hole is deformed by contact with the large diameter portion, and the large diameter portion penetrates through the deformation of the through hole. The through hole is inserted into the cylindrical body portion.

(6) The anisotropic conductive member according to the above (4), wherein the shaft portion includes a metal thin wire, and the large diameter portion is formed of a portion of the metal thin wire and a plating layer formed on a part of the outer surface.

(7) The foreign conductive member according to (5) or (6), wherein the step of the large diameter portion and the other portion of the shaft portion is locked to the through-hole of the elastic socket The opening edge portion of the hole prevents the second movable member from being detached from the through hole toward the substrate contact portion side.

(8) The foreign conductive member according to the above (1), wherein the length of the second sliding surface is shorter than the length of the first sliding surface.

(9) The foreign conductive member according to the above (8), wherein the hollow portion of the cylindrical portion of the first movable member has a reduced diameter portion having an inner diameter smaller than that of the other portion, and an inner side surface of the reduced diameter portion The first sliding surface is formed.

(10) The foreign conductive member according to the above (9), wherein the reduced diameter portion is provided to include an end portion of the cylindrical portion having the opening side.

(11) The anisotropic conductive member according to any one of the above (8), wherein the shaft portion is provided with a thin metal wire.

(12) The heteroconductive member according to the above (11), wherein the substrate contact portion is formed of one of the metal thin wires and a member separated from the metal thin wires, and the member separated from the metal thin wires is fixed to the member One part of the thin metal wire.

(13) The foreign conductive member according to any one of the above (1) to (12), wherein the main surface of the elastic socket on the electrode contact portion side is provided with an opening including the through hole In the hole portion, an end portion of the first movable member on the elastic socket side is placed in the bore portion.

The foreign conductive member according to any one of the above aspects, wherein the portion of the shaft portion disposed in the through hole does not have an outer diameter exceeding the through hole. Part of the trail.

(15) The foreign conductive member according to the above (14), wherein a portion of the shaft portion that is disposed in the through hole has a larger outer diameter than an outer portion of the end portion of the substrate contact portion side Part of the big part.

(16) The foreign conductive member according to any one of the above (1), wherein at least a part of the portion of the shaft portion disposed in the through hole has an outer diameter that is continuous Above the inner diameter of the hole, it is pressed into the through hole.

(17) The foreign conductive member according to any one of the above (1) to (16), wherein at least a part of an end surface of the substrate contact portion on the side of the shaft portion and the substrate of the elastic socket The main surface of the contact portion is in contact with each other, and the substrate contact portion has a portion that protrudes in the in-plane direction of the main surface of the elastic socket on the substrate contact portion side.

(18) The anisotropic conductive member according to any one of the above (1), wherein the anisotropic conductive member further includes an electrode side plate member made of a rigid material, and one of the main surfaces and the main surface The main surface of the electrode contact portion on the elastic socket is opposed to each other, and the electrode side plate member has a through hole corresponding to the electrode contact portion, and the electrode contact portion is provided in order to The electrode side plate member protrudes from a main surface opposite to the opposite side of the elastic socket, and the first movable member penetrates and is attached to the through hole of the electrode side plate member.

(19) The foreign conductive member according to the above (18), wherein the first movable member is inserted through the through hole of the electrode side plate member, and the main surface of the elastic socket on the electrode contact portion side And a locking protrusion protruding from one of the outer side surfaces of the electrode-side plate-like member, wherein the first movable member is on a surface including the locking protrusion with the thickness direction of the elastic socket as a normal line The diameter of the outer circumference of the cross-sectional shape is larger than the diameter of the opening on the elastic socket side end portion of the through hole of the electrode side plate member.

(20) The foreign conductive member according to the above (18), wherein the electrode-side plate-shaped member has a hole on the main surface of the elastic socket side, and the opening is provided in the main surface of the electrode-side plate-like member The first movable member on the through hole of the electrode side plate member has a portion protruding from one of the outer side surfaces of the main surface of the elastic socket on the electrode contact portion side and the end surface of the bore portion on the through hole side. a locking protrusion having a diameter larger than a cross-sectional shape of the first movable member on a surface including the locking protrusion and a diameter larger than a through hole of the electrode side plate member; The diameter of the opening on the end portion of the pupil portion is smaller than the inner diameter of the pupil portion.

(21) The anisotropic conductive member according to (19) or (20), wherein the first movable member is inserted through the through hole of the electrode side plate member, and the electrode contact portion and the cylindrical body Connection part has a step portion that constitutes the locking projection.

The heteroconductive member according to any one of the above (19), wherein the electrode contact portion is in contact with the electrode attached to the object to be inspected, a peripheral portion of the through hole of the electrode-side plate-like member that is opposite to the elastic socket, the locking projection is press-fitted toward the center of the elastic socket in the thickness direction, and the elastic socket is connected to the electrode contact portion and the substrate contact portion. The elastic restoring force corresponding to the press-in is imparted.

The foreign conductive member according to any one of the above-mentioned (17), wherein the electrode contact portion and the substrate contact portion are provided in a thickness direction of the elastic socket. When the external force is approached, the elastic socket is variably attached to the thickness direction of the elastic socket for the inspection substrate in order to change the center of the elastic socket in the thickness direction of the elastic socket in the direction of the electrode contact portion and the substrate contact portion. .

(24) The anisotropic conductive member according to (9) or (10), wherein the reduced diameter portion of the first movable member protrudes from an inner side of the cylindrical portion toward a central axis side of the tubular portion. One or more protrusions are formed, and a surface of the protrusion that protrudes from the tip end portion constitutes the first sliding surface.

According to the invention, since the length of the sliding surface of one of the movable members is different from the length of the sliding surface of the other movable member, the movable member having the short sliding surface can be slid to the movable member having the long sliding surface. Therefore, even if the electrode contact portion of the first movable member comes into contact with the electrode of the IC in an offset state, the first movable member and the second movable member can still slide. Therefore, with the present invention, An anisotropic conductive member capable of inspecting fine pitch ICs can be provided.

100‧‧‧Interracial conductive parts

101‧‧‧Flexible socket

102‧‧‧through hole for elastic socket

103‧‧‧Electrical penetration

104‧‧‧First movable part

105‧‧‧Second movable parts

106‧‧‧Electrode contact

107‧‧‧Substrate contact

108‧‧‧Flange part of the second movable part

109‧‧‧First sliding surface

110‧‧‧Second sliding surface

Fig. 1 is a conceptual view showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member according to the first embodiment of the present invention.

2 is a view showing an example in which the electrode contact portion of the foreign conductive member of FIG. 1 is in contact with the electrode to be inspected, that is, the solder ball which is attached to the inspection target, and the external force is applied to the anisotropic conductive member in order to approach the inspection target substrate. A conceptual view showing a cross-sectional view of the electrode contact portion in ideal contact with the solder ball.

3 is a view showing an example in which the electrode contact portion of the foreign conductive member of FIG. 1 is in contact with the electrode to be inspected, that is, the solder ball which is attached to the inspection target, and the external force is applied to the anisotropic conductive member in order to approach the inspection target substrate. A conceptual view showing a cross-sectional view of the electrode contact portion in contact with the solder ball in an offset state.

Fig. 4 is a conceptual view showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member according to the second embodiment of the present invention.

FIG. 5 is a view showing an example in which the electrode contact portion of the foreign conductive member of FIG. 4 is in contact with the electrode to be inspected, and the external force is applied to the anisotropic conductive member in order to approach the inspection target substrate. A conceptual view showing a cross-sectional view of the electrode contact portion in ideal contact with the solder ball.

6 is a view showing an example in which the electrode contact portion of the foreign conductive member of FIG. 5 is in contact with the electrode to be inspected, and the external force is applied to the anisotropic conductive member in order to approach the inspection target substrate. A conceptual view showing a cross-sectional view of the electrode contact portion in contact with the solder ball in an offset state.

Figure 7 is a view showing the second embodiment of the isotropic conductive member of the second embodiment of the present invention; A conceptual diagram of a portion of a cross section of a specific example of the structure of the movable member.

Fig. 8 is a view showing another specific example of the structure of the second movable member of the foreign conductive member according to the second embodiment of the present invention, and showing a conceptual view of a part of the (a) pre-use state and (b) the in-use state. .

Fig. 9 is a conceptual view showing a part of another cross section of a specific example of the structure of the second movable member of the foreign conductive member according to the second embodiment of the present invention.

Fig. 10 is a conceptual view showing a part of another cross section of a specific example of the structure of the second movable member of the foreign conductive member according to the second embodiment of the present invention.

Fig. 11 is a conceptual diagram showing a part of a cross section of a specific example of the structure of the second movable member of the foreign conductive member according to the first embodiment of the present invention.

Fig. 12 is a conceptual view showing a part of a cross section of a structural modification of the heteroconductive member which can be applied to the present invention.

Fig. 13 is a conceptual view showing a part of another cross section of a structural modification of the heteroconductive member which can be applied to the present invention.

Fig. 14 is a conceptual view showing a part of another cross section of a structural modification of the heteroconductive member which can be applied to the present invention.

Fig. 15 is a conceptual diagram showing a part of a cross section of (a) a pre-use state and (b) an in-use state, in another structural modification of the dissimilar conductive member applicable to the present invention.

Fig. 16 is a conceptual view showing a part of a cross section of a preferred example of the heteroconductive member shown in Fig. 15.

Fig. 17 is a conceptual view showing a part of a cross section of another structural modification which can be applied to the heteroconductive member of the present invention.

Figure 18 is a view showing another junction of an anisotropic conductive member applicable to the present invention. A conceptual diagram of a section of a section of a structural variant.

FIG. 19 is a conceptual diagram showing a cross section of a movable member described in Patent Document 1.

Fig. 20 is a view showing a state in which the movable member of Fig. 19 is in contact with the terminal of the IC, that is, the solder ball in an ideal state.

Fig. 21 is a view showing a state in which the movable member of Fig. 19 is in contact with the terminal of the IC, that is, the solder ball is in an offset state.

The heteroconductive member of the present invention will be described below with reference to the drawings.

Fig. 1 is a conceptual view showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member according to the first embodiment of the present invention.

The dissimilar conductive member 100 of the present embodiment includes an elastic socket 101 having an elastic plate shape and formed of an insulator. The material of the elastic socket is not particularly limited. If the material is exemplified, an elastic insulating material such as silicone rubber, fluororubber or acrylate elastomer is used.

The elastic socket 101 has a plurality of through holes 102. The method of forming the through hole is not particularly limited. The through hole may be formed at the same time in the elastic socket forming stage (for example, forming process), or may be formed on the plate-shaped elastic member by using a micro-diameter drill or the like.

The foreign conductive member 100 of the present embodiment includes a plurality of electrical penetration portions 103, which are provided correspondingly to the plurality of through holes 102 included in the elastic socket 101, and have a portion through which the through holes 102 are penetrated. The current passes through the thickness direction of the elastic socket 101.

The electrical penetration portion 103 is electrically connected to each other in an elastic socket The thickness direction of 101 can change the relative positions of the first movable member 104 and the second movable member 105. Among the movable members, the first movable member 104 is provided at an end portion on the side opposite to the inspection object (upward side in FIG. 1) and attached to the inspection object (specifically, an IC is taken as an example). The electrode contact portion 106 is contacted by an electrode (specifically, a solder ball and a metal block as an example). On the other hand, the second movable member 105 is located at an end portion of the substrate contact portion 107 facing the inspection substrate (the lower side in FIG. 1) in contact with the inspection substrate of the inspection device.

The first movable member 104, the second movable member 105, and the elastic socket 101 are arranged to satisfy the following relationship. In other words, when the electrode contact portion 106 and the substrate contact portion 107 are brought close to each other in the thickness direction of the elastic socket 101 (specifically, in the use state, the foreign conductive member 100 placed on the inspection substrate is placed. The electrode contact portion 106, the electrode of the IC such as a solder ball, is provided with an approaching force to the inspection substrate, and is an example when the electrode is in contact with the substrate, and the elastic restoring force is applied to the elastic socket 101 in the direction in which the electrode contact portion 106 and the substrate contact portion 107 are separated from each other. The first movable member 104 and the second movable member 105 are configured to compress one portion of the elastic socket 101.

Specifically, in Fig. 1, the end surface 104a of the first movable member 104 opposite to the electrode contact portion 106 is in contact with the main surface 101a of the elastic socket 101 facing the inspection object. Further, the portion of the second movable member 105 having the largest outer diameter (hereinafter also referred to as "flange portion") 108 is in contact with the main surface 101b of the elastic socket 101 facing the inspection substrate. Therefore, the end face 104a of the first movable member 104 and the flange portion 108 of the second movable member 105 can cause the elastic socket 101 to elasticize the direction in which the electrode contact portion 106 and the substrate contact portion 107 are separated by compressing the elastic socket 101 therebetween. Resilience.

The electrical penetration portion 103 includes a sliding contact structure in which the first sliding surface 109 of the first movable member 104 and the second sliding surface 110 of the second movable member 105 slide toward each other in the thickness direction of the elastic socket 101. With the sliding contact structure, the distance between the electrode contact portion 106 and the substrate contact portion 107 can be varied in the thickness direction of the elastic socket 101 while maintaining the electrical connection of the contact portions 106, 107.

The first movable member 104 has a cylindrical portion 111 having a hollow 111a extending from the electrode contact portion 106 toward the center side of the elastic socket 101 in the thickness direction of the elastic socket 101. An end portion of the cylindrical portion 111 on the side opposite to the electrode contact portion 106 side has an opening 111b, and at least a part of the inner side surface of the cylindrical portion having the end portion side of the opening 111b constitutes the first sliding surface 109. In the present embodiment, the inner side surface of the hollow portion 111a of the cylindrical portion 111 has no particular step, the diameter of the inner side surface (the inner diameter of the hollow portion 111a) is fixed, and the inner side surface thereof (to the electrode contact portion 106) constitutes the first sliding. Face 109.

Further, in order to bring the end surface 104a of the cylindrical portion having the opening 111b into contact with the main surface 101a of the elastic socket 101 on the electrode contact portion 106 side, the first movable member 104 is placed on the electrode contact portion 106 side of the elastic socket 101. On the main surface 101a.

The second movable member 105 includes a shaft portion 112 that extends from the substrate contact portion 107 toward the center side of the elastic socket 101 in the thickness direction of the elastic socket 101. At least a part of the outer side surface of the end portion of the shaft body portion 112 opposite to the end portion on the substrate contact portion 107 side (that is, the end portion close to the electrode contact portion 106) constitutes the second sliding surface 110. Further, a portion of the end portion of the shaft portion 112 that constitutes the second sliding surface 110 including the side having the outer side surface is connected from the electrode of the elastic socket 101. The main surface 101a on the side of the contact portion 106 protrudes and is inserted into the hollow 111a of the first movable member 104. Further, the other portion of the shaft portion 112 (that is, the portion including the end portion close to the substrate contact portion 107) is disposed in the through hole 102 of the elastic socket 101.

The length of the thickness direction d1 of the first sliding surface 109 and the second sliding surface of the elastic conductive member 101 of the first sliding surface 109 which is in sliding contact with the second sliding surface 110 in the first sliding surface 109 of the present embodiment. One of the lengths in the thickness direction of the elastic socket 101 which is slidably contactable with the first sliding surface 109 on 110, that is, the length d2 of the second sliding surface 110 is shorter than the other. Since the length d1 of the first sliding surface 109 and the length d2 of the second sliding surface 110 have this relationship, the first movable member 104 can be inclined in the thickness direction of the elastic socket 101 without plastically deforming the shaft portion 112.

In the anisotropic conductive member according to the first embodiment of the present invention shown in FIG. 1, the length d2 of the second sliding surface 110 is shorter than the length d1 of the first sliding surface 109. Specifically, the shaft portion 112 of the second movable member 105 has a large diameter portion 113 having a larger diameter than the other portions in order to include the end portion 112a far from the substrate contact portion 107. Further, the outer surface of the large diameter portion 113 constitutes the second sliding surface 110. As shown in FIG. 1, the large diameter portion 113 may include an end portion 112a that is far from the substrate contact portion 107, but is not limited thereto. The end portion 112a located far from the substrate contact portion 107 may be provided in the near position.

In addition, when the outer diameter of the large-diameter portion 113 of the second sliding surface 110 is excessively distant from the substrate contact portion 107 at the distal end portion 112a, the gap between the end portion 112a and the electrode contact portion 106 is narrow, first Since the movable range of the movable member 104 is narrowed, it is preferable that the large diameter portion 113 is provided to include the insertion shaft. An end portion of the body portion 112 on the inner side of the cylindrical portion 111 (that is, an end portion distant from the substrate contact portion 107) 112a.

Further, it is preferable that the diameter of the large diameter portion 113 is larger than the inner diameter of the through hole 102 of the elastic socket 101, and the through hole 102 can be deformed by contact with the large diameter portion 113. At this time, it is preferable that the large diameter portion 113 is deformed by contact with the large diameter portion 113 of the through hole 102, and the through hole 102 is penetrated and inserted into the cylindrical portion 111. At this time, when the large diameter portion 113 of the shaft portion 112 and the step portion 112b of the other portion are locked to the opening edge portion of the through hole 102 of the elastic socket 101, the second movable member 105 is in a state where no special load is applied. In this case, the main surface 101b side of the side opposite to the inspection substrate of the elastic socket 101 (the side on which the substrate contact portion 107 protrudes) may not fall off. Further, it is not necessary to arrange a plate-like member corresponding to the substrate-side plate-like member 207 to be described later on the inspection substrate side, and the entire anisotropic conductive member can be made thinner. Further, in the step portion 112b, a tapered portion as shown in Fig. 1 may be provided due to processing constraints. The tapered portion may all protrude from the through hole, or at least one of the tapered portions may be disposed in the through hole.

Here, the basic operation of the anisotropic conductive member 100 of the present embodiment will be described in detail with reference to Figs. 2 and 3 based on Fig. 1 .

2, the electrode contact portion 106 of the foreign conductive member 100 of FIG. 1 is in contact with the electrode attached to the inspection target, and the external force is applied to the anisotropic conductive member 100 for the inspection object to be close to the inspection substrate. One example of the state is a conceptual view showing a cross-sectional view of the electrode contact portion 106 in ideal contact with the solder ball. Here, the ideal means that the tip end of the solder ball is located on the central axis extension line of the movable direction of the first movable member 104, and the external force applied to the first movable member 104 by the solder ball is parallel to the thickness direction of the elastic socket 101. At this time, the first movable part The movable direction of the member 104 is substantially parallel to the movable direction of the second movable member 105, and the first sliding surface 109 and the second sliding surface 110 are also substantially parallel to each other and are in sliding contact. However, in reality, it is rare that the first sliding surface 109 and the second sliding surface 110 are in contact with such an ideal state, and are usually contacted by the offset state shown in FIG. 3 below.

3 is a solder ball which is an electrode which is attached to the inspection target in the electrode contact portion 106 of the foreign conductive member 100 of FIG. 1, and further applies an external force to the anisotropic conductive member 100 in order to approach the inspection target and the inspection substrate. One example of the state is a conceptual view showing a cross-sectional view of the electrode contact portion 106 in contact with the solder ball in an offset state. As described above, in order to include the end portion 112a, the dissimilar conductive member 100 of the present embodiment has the shaft portion 112 of the second movable member 105 having the large diameter portion 113 from the opening provided at one end of the first movable member 104. The 111b is inserted into the hollow 111a of the cylindrical portion 111. Therefore, since the diameter of the opening 111b is equal to the inner diameter of the first sliding surface 109, and the second sliding surface 110 constituting the outer surface of the large diameter portion 113 is electrically contacted and slidable, the outer diameter of the larger diameter portion 113 is larger than Large about 10μm. On the other hand, since the outer diameter of the portion other than the large diameter portion 113 of the shaft portion 112 is thinner than the outer diameter of the large diameter portion 113, when the contact is made in the ideal state shown in Fig. 2, the first movable member 104 is The inner side surface of the opening 111b and the shaft portion 112 of the second movable member 105 are sufficiently spaced apart. Further, when contacting in the offset state shown in FIG. 3, if the inner side surface of the opening 111b of the first movable member 104 is spaced apart from the shaft portion 112 of the second movable member 105, the first movable member The state in which the second movable member 105 is tilted can be maintained. In addition, when there is no such interval, that is, the first sliding surface 109 and the second sliding surface 110 have almost the same length, in other words, the first insertion When the outer surface of the shaft portion 112 of the second movable member 105 in the movable member 104 is almost entirely configured to constitute the second sliding surface 110, when the first movable member 104 is inclined with respect to the second movable member 105, the first movable member 104 is The contact point between the inner side surface of the opening 111b and the shaft portion 112 of the second movable member 105 is a fulcrum, and the shaft portion 112 of the second movable member 105 located in the first movable member 104 is bent and plastically bent. The electrical penetration portion 103 will not be usable.

The material of the first movable member 104 and the second movable member 105 may be any one as long as it can constitute the electrical penetration portion 103. Generally, the surface that is in contact with the electrode on the electrode contact portion 106 and the surface that is in contact with the substrate on the first sliding surface 109, the second sliding surface 110, and the substrate contact portion 107 are preferably made of a metal having conductivity. The material composition. From the viewpoint of easiness of processing, as shown in FIG. 1, the electrode contact portion 106 and the cylindrical portion 111 are formed of different members, and it is preferable to fix them in an electrically connected state by means of caulking or welding. As shown in FIG. 1, the second movable member 105 may be a single body, or the second movable member 301 shown in FIG. 7 which will be described later, the substrate contact portion 303 and the shaft portion 302 are separated and electrically The sexual connection status is fixed. Regarding the material used for forming the electrode contact portion 106, for example, in addition to beryllium copper having high conductivity and workability and high hardness, there is also a steel material which is higher in hardness than copper metal and has good workability, that is, SK material. Transfer palladium alloy with less solder from the solder ball. Regarding the material used for forming the cylindrical portion 104, for example, in addition to beryllium copper, there are phosphorous copper or the like having the same characteristics. As shown in FIG. 1, when the second movable member 105 is a single body, the material used for forming the second movable member 105 is, for example, beryllium copper, phosphor bronze or the like. As shown in Fig. 7, when the substrate contact portion and the shaft portion are separated, the materials used for these will be described later.

Next, the electrode side plate member 114 and the locking projection 116 will be described with reference to Fig. 1 .

The anisotropic conductive member 100 has an electrode side plate member 114 made of a rigid material, and one of the main faces 114a is disposed to face the main surface 101a of the elastic socket 101 on the side where the electrode contact portion 106 is provided. In addition, in the present specification, the term "rigid material" means a material which is more rigid than an elastic socket having elasticity, that is, a material which is hard to be deformed by an external force. The electrode side plate member 114 has a through hole 115 in a position corresponding to the electrode contact portion 106 of the first movable member 104. The first movable member 104 penetrates through the through hole of the electrode side plate member 114 so that the electrode contact portion 106 of the first movable member 104 protrudes from the opposite main surface 114b of the electrode side plate member 114 opposite to the elastic socket 101. 115 on.

Here, the through hole 115 of the electrode side plate member 114 is generally formed by a micro-diameter drill, and the surface roughness of the inner side surface thereof is slightly thick, and the slidability is not so good, so the outer surface and the electrode of the first movable member 104 penetratingly mounted are provided. A proper interval is required between the inner sides of the through holes 115 of the side plate members 114. On the other hand, when the interval is large, the inner diameter of the through hole 115 is larger than the outer diameter of the locking projection 116. Therefore, the interval is preferably about 10 to 30 μm.

The electrode side plate member 114 has a certain degree of rigidity, and the material thereof is not particularly limited. Since the first movable member 104 may come into contact with the inner side surface of the through hole 115 of the electrode side plate member 114, it is usually formed of an insulating material. Specific examples of the material thereof include a thermosetting resin such as an epoxy resin or a benzene resin, or a resin material containing a thermoplastic resin such as polyarylene, a polyether quinone, or a liquid crystal polymer as a main component, and glass and ceramics. An inorganic material as a main component, and a glass filler and ceramic particles are dispersed in the resin material. Composite material of machine components.

The relative positional relationship between the electrode side plate member 114 and the elastic socket 101 is arbitrary. For example, as shown in FIG. 1, the electrode side plate member 114 and the elastic socket 101 can also change the relative position of the elastic socket 101 in the thickness direction. At this time, the electrode side plate member 114 can also fix the relative position to the inspection substrate. The fixing method is arbitrary. When the electrode side plate member 114 is fixed to the inspection substrate, the electrode attached to the inspection object is used in the direction in which the first movable member 104 is pressed into the inspection substrate, in order to avoid the electrode and the electrode. When the side plate member 114 is in contact with each other, it is preferable that the first movable member 104 protrudes from the main surface 114b of the inspection side of the electrode side plate member 114 by a movable length or more in a no-load state before the electrode contact portion 106 comes into contact with the electrode. Further, the position of the electrode side plate member 114 in the thickness direction of the elastic socket 101 of the inspection substrate can be varied, and the thickness direction of the first movable member 104 and the elastic socket 101 can also be interlocked. In this configuration, the first movable member 104 protrudes from the main surface 114b on the inspection target side of the electrode side plate member 114, and the first movable member is suppressed in a no-load state before the electrode contact portion 106 comes into contact with the electrode. The inclination of 104 can improve the positional accuracy of the electrode contact portion 106 and the electrode attached to the inspection object.

In the foreign conductive member 100 of the present embodiment, the first movable member 104 that is inserted through the through hole 115 of the electrode side plate member 114 is provided on the main surface 101a and the electrode on the side of the electrode contact portion 106 on the elastic socket 101. Between the side plate members 114, there are locking projections 116 projecting from one of the outer side surfaces thereof. Further, the thickness direction of the elastic socket 101 is normal, and the cross-sectional shape of the first movable member 104 including the surface of the locking protrusion 116 is externally connected. The diameter of the circle (the locking projection 116 shown in Fig. 1 is equal to the outer diameter thereof) is larger than the opening diameter on the side of the elastic socket 101 side of the through hole 115 of the electrode side plate member 114.

With this configuration, the first movable member 104 is separated from the elastic socket 101, and the first movable member 104 is detached from the second movable member 105, and the first movable member 104 and the second movable member 105 are prevented from being able to maintain the electrical penetration portion. The possibility of composition. Further, the locking projection 116 shown in Fig. 1 protrudes in a flange shape, and the area of the end surface 104a of the first movable member 104 is increased to cooperate with the substrate-side contact portion 107 of the second movable member 105. A large elastic restoring force is generated in the elastic socket 101 to contribute. Further, since the first movable member 104 including the electrode contact portion 106 can be detached from the elastic socket, it can be easily replaced.

Next, the anisotropic conductive member according to the second embodiment of the present invention will be described with reference to Figs. In the description of the dissimilar conductive member according to the second embodiment of the present invention, when the elements constituting the dissimilar conductive member are described, the elements constituting the dissimilar conductive member of the first embodiment are structurally common. In the case of the features, the symbols used in describing the elements constituting the anisotropic conductive member of the first embodiment are directly attached.

Fig. 4 is a conceptual view showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member according to the second embodiment of the present invention.

The anisotropic conductive member 200 according to the second embodiment differs in the relationship between the length d1 of the first sliding surface and the length d2 of the second sliding surface in the anisotropic conductive member 100 of the first embodiment. That is, in the anisotropic conductive member 100, the length d2 of the second sliding surface 110 is shorter than the length d1 of the first sliding surface 109, but is anisotropically conductive. In the member 200, the length d1 of the first sliding surface is shorter than the length d2 of the second sliding surface.

Specifically, the structures of the first movable member 201 and the second movable member 202 on the anisotropic conductive member 200 and the structures of the first movable member 104 and the second movable member 105 on the corresponding anisotropic conductive member 100 different. The hollow portion 204 of the cylindrical portion 203 of the first movable member 201 has a reduced diameter portion 205 having an inner diameter smaller than that of the other portion, and the inner side surface 205a of the reduced diameter portion 205 constitutes a first sliding surface. In the present embodiment, the reduced diameter portion 205 is provided to include an end portion of the tubular portion 203 having an opening side. The reduced diameter portion 205 may be provided in any region of the thickness direction of the elastic socket of the cylindrical portion 203, but if it is excessively disposed in the proximal position of the electrode contact portion, the tube is inserted into the shaft portion 206 of the second movable member 202. The gap between the end portion of the body portion 203 (i.e., the end portion of the distal end of the substrate contact portion 209) and the electrode contact portion is narrow, and the movable range of the first movable member 201 is narrowed, so that the reduced diameter portion is preferable. 205 is provided to include an end portion of the cylindrical portion 203 having an opening side.

On the other hand, the shaft portion 206 on the second movable member 202 constitutes a second sliding surface from the entire outer side surface 206a thereof. When the foreign conductive member 201 of the present embodiment is used, as shown in FIG. 5, the first sliding surface composed of the inner side surface 205a of the reduced diameter portion 205 of the first movable member 201 and the shaft body of the second movable member 202 are used. A portion of the second sliding surface formed by the outer surface 206a of the portion 206 faces the surface. At this time, in the hollow portion 204 of the first movable member 201, the inner side surface of the portion other than the reduced diameter portion 205 of the hollow portion 204 and the shaft portion 206 are inserted at the front end of the shaft portion 206 of the second movable member 202 inserted into the hollow portion 204. The spacing between the outside sides is large enough.

Therefore, the electrodes (such as solder balls) attached to the inspection object and When the electrode contact portion 106 is in contact in the offset state shown in FIG. 6, the front end of the shaft portion 206 does not have to be other than the reduced diameter portion 205 of the hollow portion 204 in the range of the interval between the shaft portion 206 and the reduced diameter portion 205. The first movable member 201 can be inclined with respect to the second movable member 202 with a side contact therebetween.

Further, in the foreign conductive member 200 of the second embodiment, the shaft portion 206 of the second movable member 202 is smaller than the inner diameter of the through hole 102 of the elastic socket 101, and is not particularly provided in the first embodiment. The large-diameter portion 113 on the dissimilar conductive member 100 is disengaged. Therefore, in order to prevent the self-weight from falling off from the elastic socket 101 toward the inspection substrate side, a substrate-side plate-like member 207 made of a rigid material in which one of the main surfaces faces each other is added to the main surface of the elastic substrate 101 on the inspection substrate side. A portion of the substrate contact portion 209 of the second movable member 202 may also be inserted into the through hole 208 provided in the substrate side plate member 207. In the specific example shown in FIG. 4, the substrate side plate member 207 is placed on the inspection substrate 210, and the substrate contact portion 209 of the second movable member 202 is disposed on the substrate side plate member by including one of the end portions thereof. The through hole 208 in the 207 and the inside of the recess formed in the inspection substrate 210.

According to the configuration of the above-described foreign conductive member 200 according to the second embodiment of the present invention, even if the large diameter portion 113 is not provided, the second movable member 202 can be prevented from being bent during use of the foreign conductive member 200, and Since the first movable member 201 having the electrode contact portion 106 can be detached from the elastic socket, it can be easily replaced.

The method for producing the second movable member 202 of the foreign conductive member 200 according to the second embodiment of the present invention is not particularly limited. Similar to the second movable member 105 of the dissimilar conductive member 100 of the first embodiment, It is processed by lathe. When the second movable member 202 is manufactured by lathe machining, the material constituting the second movable member 202 is, for example, beryllium copper, phosphor bronze or the like as described above. However, when the second movable member 202 is machined by a lathe, if the diameter of the shaft portion 206 is small, the risk of defects such as bending of the shaft portion during processing is increased. In this case, a thin metal wire may be used in the shaft portion.

7 to 11 are conceptual views each showing a part of a cross section of a specific example of the structure of the second movable member of the anisotropic conductive member of the second embodiment. The second movable member in these examples is common in that the shaft portion is formed of a thin metal wire.

In the dissimilar conductive member 300 illustrated in FIG. 7, the second movable member 301 of the dissimilar conductive member 300 is composed of a thin metal wire 302 and a hole capable of accommodating a portion including one end portion of the metal thin wire 302. The tubular member 303 is configured. The tubular member 303 and a portion of the tubular member 303 inserted into the metal thin wire 302 constitute a substrate contact portion 209, and a portion of the tubular member 303 which is not inserted into the metal thin wire 302 constitutes a shaft portion of the second movable member 301.

Here, an advantage of forming the shaft portion of the second movable member 301 by the thin metal wires 302 will be described. The lower limit of the shaft diameter of the machined shaft portion by the above lathe machining is about 80 μm. When the diameter of the shaft portion is 80 μm (0.08 mm) or less, the risk of bending the shaft portion 206 during the plating process at the time of processing or after processing increases. Since the lathe machining cuts the outer circumference while rotating the metal rod, when the bending elastic modulus of the workpiece is low, when the workpiece is brought into contact with the machining tool during machining, the workpiece is bent to retreat from the cutting tool. Cutting will not be possible. Therefore, the parts to be machined used for lathe processing should use a high flexural modulus. However, the part to be machined with a high flexural modulus has elasticity The deformation range of the deformation is narrow, and if the shaft diameter is small, the risk of plastic deformation (bending) of the shaft body during the plating process at the time of processing or after processing increases.

On the other hand, when the shaft portion of the second movable member 301 is composed of the thin metal wires 302, the shaft portion 206 can be obtained by cutting the metal wire processed along the axial diameter in advance. Therefore, at this time, even if the diameter is 80 μm or less, the shaft portion 206 can be easily obtained.

Here, the material (metal wire) constituting the metal thin wire 302 is not particularly limited, but a metal wire material is often made of a material having a wide deformation range (large elasticity) such as a coil spring material. The reason is as follows. In general, the metal wire is gradually thinned while extending the material, and finally processed into a metal wire of a predetermined diameter. Due to such a processing process, it is of course necessary to wind a metal wire around a reel, a bobbin, or the like in a manufacturing process. Therefore, the metal wire should be composed of at least an elastic material which does not undergo plastic deformation even when wound on a reel and a bobbin.

In the metal wire, the spring material and the superelastic wire are particularly elastic, and plastic deformation does not occur even if it is bent to some extent. Specifically, as the wire for a coil spring, for example, a piano wire, a stainless steel wire, a phosphor bronze wire, a copper alloy wire, or the like, a superelastic wire material such as a metal wire of a shape memory alloy containing NiTi as a main component. Superelastic wires are mainly used as fishing lines. Other tungsten and molybdenum metal wires are also elastic and are used as springs.

Since these metal wires have elasticity, they can be manufactured to have a relatively small diameter, and spring materials and superelastic wires have a thickness of about 30 μm, and are easily available on the market. The shaft portion of the second movable member 301 in this example is a metal movable wire 302 obtained by cutting the metal wire as the second movable portion The member 301 is provided with an anisotropic conductive member 300 having a shaft portion having a diameter of at least 30 μm.

Here, the material of the elastic metal wire such as the spring material and the super elastic wire is generally high in hardness. In particular, the superelastic wire is mainly composed of NiTi and has a relatively high hardness. If the metal wire having such a high hardness is cut, burrs are often generated on the cut surface. Moreover, the edge of the cut surface is also a sharp edge. Even when such a wire is used, the shaft portion of the second movable member 301 in this example is also prevented from being in contact with the first sliding surface 205a by avoiding the end portion of the second movable portion 203 side. The possibility of burrs and sharp edges hurting the first sliding surface 205a.

In the second movable member 301 of the foreign conductive member 300 of the present embodiment, the method of fixing the tubular member 303 and the thin metal wire 302 is not particularly limited as long as it is a method of maintaining the electrical contact and is not easily detached during use. . In the example shown in Fig. 7, the tubular member 303 and the thin metal wire 302 are fixed by caulking one of the outer sides of the tubular member 303. As another example, for example, a method of fixing the tubular member 303 and the fine metal wires 302 by brazing and a method of fixing by a conductive adhesive.

In the foreign conductive member 300 illustrated in FIG. 7, the end portion on the side opposite to the opening on the hole in the tubular member 303 is configured to be in contact with the inspection substrate, which is different from that illustrated in FIG. Similarly to the square conductive member 200, a substrate side plate member made of a rigid material is provided, and the substrate side plate member can easily position the second movable member 301. Further, at the end portion of the tubular member 303 on which the thin metal wire 302 is inserted, a flange portion 304 which protrudes in a direction perpendicular to the central axis of the metal thin wire 302 (in a direction parallel to the main surface of the elastic socket) is provided. When used, it is easy to produce elastic restoring force in the elastic socket.

In the dissimilar conductive member 400 illustrated in Fig. 8, the second movable member 401 is composed of a thin metal wire 402, and the thin metal wires 402 are pressed into the through holes of the elastic socket. In the pre-use state, as shown in Fig. 8(a), the portion 402a protruding from the main surface of the inspection substrate side of the elastic socket on the metal thin wire 402 constitutes the substrate contact portion 107, and the portion of the metal thin wire 402 other than the portion 402a. The shaft portion 206 is formed. In the use state, as shown in FIG. 8(b), the main surface of the inspection substrate side of the elastic socket is deformed to come into contact with the inspection substrate, and the elastic restoring force is generated in the elastic socket by the deformation. At this time, since the metal thin wire 402 is pressed into the through hole of the elastic socket, the metal is pressed by the frictional force of the outer side surface of the through hole portion of the elastic socket on the metal thin wire 402 and the inner side surface of the through hole opposed thereto. The thin wire 402 is held in the elastic socket, reducing the possibility that the substrate contact portion is buried in the through hole.

As described above, the second movable member can be obtained by using a thin metal wire to obtain a shaft portion having a thickness of about 30 μm. The through hole of the elastic socket through which the second movable member is so thin may have a diameter of, for example, about 35 μm, but it is not easy to process such a fine through hole on the elastic socket. Therefore, when it is not easy to process the through hole of the fine diameter on the elastic socket, for example, the lower hole is formed in the elastic socket by the thin needle, and by pressing the metal thin wire 402 into the lower hole, the elastic socket can be installed through the socket. The anisotropic conductive member 400 of the second movable member 401. In addition, in the dissimilar conductive member 400 illustrated in FIG. 8, since the second movable member 401 is pressed into the elastic socket, it is immovable to the elastic socket, but since the relative position can be changed for the first movable member, This is also referred to as the second movable member 401 at this time.

And even if the shaft portion is formed by the thin metal wires, The metal thin wire is pressed into the through hole of the elastic socket, and the substrate contact portion is composed of the tubular member 303 and the flange portion 304 of the dissimilar conductive member 300 illustrated in FIG. 7, and the substrate contact portion can be further reduced. The possibility of passing through the hole.

In the foreign conductive member 500 illustrated in FIG. 9, the second movable member 501 is plated with a thin metal wire 502 and a portion protruding from the main surface of the elastic substrate on the inspection substrate side of the metal thin wire 502, covering the portion. A plating layer 503 formed by protruding portions is formed. That is, in this example, the substrate contact portion is constituted by the protruding portion and the plating layer 503 formed on the protruding portion. Further, by thickening the plating layer 503, the area in which the plating layer 503 is in contact with the main surface of the inspection substrate side of the elastic socket can be increased. By increasing this area, the elastic restoring force generated in the elastic socket can be increased during use.

In the foreign conductive member 600 illustrated in FIG. 10, the second movable member 601 is composed of a thin metal wire 602. In this example, the end portion of the metal thin wire 602 on the inspection substrate side is inserted into the through hole 603 provided in the inspection substrate, and is fixed to the through hole 603 of the inspection substrate by soldering. That is, in this example, the inspection substrate and the substrate contact portion are integrated.

Further, even in the rectangular conductive member 100 of the first embodiment shown in FIG. 1, the shaft portion is formed by the thin metal wires, and the large diameter portion 113 can be formed by the plating layer. In the foreign conductive member 700 illustrated in FIG. 11, the second movable member 701 is composed of a thin metal wire 702, an inspection-side plating layer 703, and a substrate-side plating layer 704, and the inspection-side plating layer 703 is paired with the metal thin wire. A portion of the elastic surface of the elastic socket on the inspection object side is plated to cover the protruding portion, and the substrate side plating layer 704 is paired with the metal thin layer. A portion of the elastic socket on the inspection wire 702 that protrudes from the main surface of the substrate is plated to cover the protruding portion. In other words, in the present example, the large-diameter portion 113 is composed of a portion protruding from the main surface of the elastic socket on the inspection target side of the elastic wire 702 and an inspection-side plating layer 703 formed on the protruding portion thereof, and the substrate contact portion is composed of A portion protruding from the main surface of the metal thin wire 702 on the inspection substrate side and a substrate-side plating layer 704 formed on the protruding portion thereof are formed. Further, in addition to the present example, the large diameter portion 113 is constituted by the inspection target side plating layer 703, and the substrate contact portion may be constituted by the cylindrical member 303 shown in FIG.

Next, a structural modification of both the foreign conductive member according to the first embodiment and the foreign conductive member according to the second embodiment can be applied as a specific example of the foreign conductive member according to the first embodiment.

Fig. 12 is a conceptual view showing a part of a cross section of a structural modification of the heteroconductive member which can be applied to the present invention.

In the dissimilar conductive member 800 shown in FIG. 12, a pupil portion 803 is provided on the main surface 801a on the electrode contact portion side of the elastic socket 801 so as to include an opening of the through hole 802 of the elastic socket 801. In the bore portion 803, the end portion of the first movable member on the elastic socket side is placed. In FIG. 12, as a specific example, the locking protrusion 804 provided at the end of the elastic member side of the first movable member is housed in the pupil portion 803. The inner diameter of the boring portion 803 is larger than the outer diameter of the end portion of the first movable member on the elastic socket side (specifically, the locking protrusion 804), or is almost equal, and the boring portion 803 is substantially incapable of It is preferable to expand by placing the first movable member. By providing the pupil portion 803, it is possible to reduce the possibility that the first movable member is in contact with the adjacent first movable member in the use state, particularly when in contact with the offset state.

The dissimilar conductive member of the present invention is the same as the dissimilar conductive member 100 of the first embodiment, the dissimilar conductive member 200 of the second embodiment, the dissimilar conductive member 300 shown in FIG. 7, and FIG. Any one of the isotropic conductive members 800, and the portion of the shaft portion of the second movable member disposed in the through holes 102, 802 of the elastic sockets 101, 801 has an outer diameter that does not exceed the inner diameter of the through holes 102, 802. Part of it. Since the second movable member has such a structure, the portion disposed on the shaft body portion in the elastic socket expands the inner side surface of the through hole, thereby reducing the possibility of misalignment of the through holes 102, 802 of the elastic sockets 101, 801. . The shaft portion 502 of the dissimilar conductive member 500 shown in Fig. 9, the shaft portion 602 of the dissimilar conductive member 600 shown in Fig. 10, and the shaft portion of the dissimilar conductive member 700 shown in Fig. 11 702, the relationship between the outer diameter of the shaft portions 502, 602, and 702 and the inner diameter of the through hole of the elastic socket may be the same as that of the anisotropic conductive member 100 or the like.

Fig. 13 is a conceptual view showing a part of another cross section of a structural modification of the heteroconductive member which can be applied to the present invention.

In the same manner as the above-described anisotropic conductive member 100 and the like, the portion of the shaft portion 902 of the second movable member 901 disposed in the through hole of the elastic socket does not have an outer diameter exceeding the elasticity. a portion of the inner diameter of the through hole of the socket, but a portion of the through hole of the elastic socket that is inserted through the shaft portion 902 of the second movable member 901 has a larger outer diameter than the other portion at the end portion of the substrate contact portion side. Part 903. When the shaft portion 902 of the second movable member 901 is passed through the through hole of the elastic socket by the portion 903 having the large outer diameter, the portion 903 having the large outer diameter is fitted into the through hole of the elastic socket, thereby reducing The shaft portion 902 of the second movable member 901 is in the through hole of the elastic socket The possibility of misalignment. From the viewpoint of satisfying the object, the outer diameter of the portion 903 having the large outer diameter is preferably substantially equal to the inner diameter of the through hole of the elastic socket.

Further, the dissimilar conductive member of the present invention is the same as the dissimilar conductive member 400 shown in FIG. 8, and at least a part of the portion of the shaft portion disposed in the through hole of the elastic socket has an outer diameter of an elastic socket. The inner diameter of the through hole may be pressed into the through hole of the elastic socket. However, it should be noted at this time that the misalignment of the through hole of the elastic socket generated by expanding the inner side surface of the through hole of the elastic socket by the shaft portion should be within an allowable range.

Fig. 14 is a conceptual view showing a part of another cross section of a structural modification of the heteroconductive member which can be applied to the present invention.

In the dissimilar conductive member 1000 of the present embodiment, the pre-existing conductive member 100 of the first embodiment is in a state before use, that is, before the electrode contact portion is in contact with an electrode (for example, a solder ball) attached to the inspection object. The relationship between the thickness of the elastic socket and the elastic socket of the electrode side plate member is different.

In the foreign conductive member 1000 of the present embodiment, the elastic socket 1001 and the electrode side plate member 1002 are closer to each other than the foreign conductive member 100 of the first embodiment. Therefore, the locking projection of the first movable member is pressed into the center side in the thickness direction of the elastic socket at the peripheral edge portion of the through hole of the electrode side plate member 1002 facing the elastic socket 1001. When the electrode-side plate-like member 1002 presses the locking projection, the elastic socket 1001 is compressed in the thickness direction thereof, and the elastic restoring force for the press-fitting is given from the elastic socket 1001 at the electrode contact portion and the substrate contact portion. In such a state before use, the elastic restoring force is given to the electrode contact portion and the substrate contact portion as a preload.

By providing the pre-loaded structure, the substrate contact portion contacts the inspection substrate at a constant pressure or more at a predetermined pressure or more, thereby preventing foreign matter from entering between the substrate contact portion and the inspection substrate. A contact failure occurs between the substrate contact portion and the inspection substrate.

Fig. 15 is a conceptual diagram showing a part of a cross section of (a) a pre-use state and (b) an in-use state, in another structural modification of the dissimilar conductive member applicable to the present invention.

The foreign conductive member 1100 of the example shown in Fig. 15 is characterized by a method of fixing the position of the substrate for inspection of the elastic socket. In other words, as shown in FIG. 15(b), when the electrode contact portion and the substrate contact portion 1101 are brought closer to the thickness direction of the elastic socket and an external force is applied to the electrode contact portion, specifically, an electrode attached to the inspection target (for example, welding) When the electrode contact portion is press-fitted toward the center side in the thickness direction of the elastic socket, the elastic socket can be changed for the inspection substrate in order to change both the electrode contact portion and the substrate contact portion 1101 toward the center of the elastic socket in the thickness direction of the elastic socket. The ground is mounted in the thickness direction of the elastic socket. In this configuration, the main surface on the electrode contact portion side of the elastic socket and the main surface on the substrate contact portion 1101 side can be compressed to the same extent. Therefore, the substrate contact portion 1101 included in the dissimilar conductive member 1100 is longer than the substrate contact portion on the substrate of the elastic socket from the main surface of the elastic socket in the thickness direction of the elastic socket. Prominent.

The rubber constituting the elastic socket, that is, the rubber such as rubber and elastomer, is substantially inversely proportional to the hardness of the elastic body, and the compression amount is proportional to the compression amount (hereinafter referred to as "linear region"), if the compression exceeds the linear region. , the amount of compression and elasticity will vary nonlinearly, in the nonlinear region, with the amount of compression Correspondingly, the elasticity increases sharply. Therefore, if an elastic socket is used in a non-linear region, the load applied between the electrode contact portion 1101 and an electrode (for example, a solder ball) attached thereto to be inspected may increase sharply, and at the worst, an electrode damage or the like may occur. .

When the elastic conductive member of the present invention is capable of being compressed from the main surface side of both sides as in the case where the elastic conductive member 1100 shown in Fig. 15 is compressed, it can be compressed from only one main surface side. In comparison, the linear region can be expanded by a maximum of 2 times.

Further, in the dissimilar conductive member 1100 illustrated in FIG. 15, the main surface of the substrate contact portion 1101 side may be compressed by the elastic socket, and the relative position of the substrate for inspection of the substrate contact portion 1101 may be unstable. Doubt. Therefore, as shown in FIG. 16, a substrate side plate member 1102 made of a rigid material may be provided between the elastic socket and the inspection substrate 1104. The substrate-side plate member 1102 has a through hole 1103 disposed in correspondence with the substrate contact portion 1101, and at least a part of the substrate contact portion 1101 is disposed in the through hole 1103 of the substrate-side plate-like member 1102. Therefore, the misalignment and inclination of the inspection substrate 1104 for the substrate contact portion 1101 are less likely to occur. In FIG. 16, the substrate-side plate-shaped member 1102 is placed on the inspection substrate 1104, and the end portion of the substrate-contacting portion 1101 is located in the through-hole 1103. However, this is only an example, and the substrate-side plate-like member 1102 may be provided in the elastic state. Any position between the socket and the inspection substrate 1104.

Fig. 17 is a conceptual view showing a part of a cross section of another structural modification which can be applied to the heteroconductive member of the present invention. The dissimilar conductive member 1200 illustrated in FIG. 17 is in the first movable member 1201 and the electrode side plate member. There are features on the 1202.

In the heteroconductive member of the present invention, the electrode contact portion constituting the first movable member is formed separately from the other portion (the tubular portion or the like), and the first movable member can be processed by caulking or the like. In one. Further, as illustrated in Fig. 1, when the locking projection of the first movable member is not easily formed from one of the outer side surfaces of the tubular portion, as in the case of the anisotropic conductive member 1200 shown in Fig. 17, A movable member 1201 may be a structure that does not have a locking protrusion that partially protrudes from one of the outer side faces of the cylindrical portion. At this time, the electrode contact portion 1203 is provided with a step portion 1205 at a portion where the other portion (the cylindrical portion 1204 in FIG. 17) is connected, and the step portion 1205 can also function as a locking protrusion. At this time, in the specific conductive member 1200 shown in FIG. 17, as a specific example, since the first movable member 1201 is long, the electrode side plate member 1202 is provided with an opening on the elastic socket side of the through hole 1206. A pupil portion 1207 is provided. Further, the step portion 1205 of the first movable member 1201 constituting the locking projection is formed in contact with the bottom portion 1208 of the boring portion 1207, and the first movable member 1201 is locked. In this configuration, the thickness direction of the elastic socket is the normal line, and the diameter of the circle is formed by the cross-sectional shape of the first movable member on the surface including the locking protrusion (the first movable member shown in FIG. 17 Since the step portion 1207 constitutes the locking projection portion, the diameter is equal to the outer diameter of the cylindrical portion, and is larger than the opening diameter of the end portion of the through hole 1206 of the electrode side plate member 1202, which is larger than the diameter of the pupil portion 1207. The inner diameter is smaller.

Fig. 18 is a conceptual view showing a part of a cross section of another structural modification of the heteroconductive member which can be applied to the present invention. The dissimilar conductive member 1300 illustrated in FIG. 18 is on the first sliding surface 1302 of the first movable member 1301. Has characteristics. In the first movable member 1301 of the dissimilar conductive member 1300 in this example, one or more protrusions protruding from the inner side of the hollow portion 1303 toward the central axis side of the cylindrical portion 1305 are provided in the vicinity of the end portion on the elastic socket side. In the portion 1304 (two in the example shown in FIG. 18), the protruding portion 1304 constitutes a reduced diameter portion, and the surface of the protruding portion 1304 that protrudes from the front end portion constitutes the first sliding surface 1302. In the example shown in Fig. 18, since a plurality of projections 1304 are formed in the thickness direction of the elastic socket, the first sliding surface 1302 of the first movable member 1301 is constituted by a plurality of discontinuous surfaces in the thickness direction of the elastic socket. In addition, the length of the first sliding surface at this time means the elasticity of the elastic socket side end portion and the surface farthest from the elastic socket in the surface of the plurality of faces constituting the first sliding surface 1302 from the closest position of the elastic socket. The length of the elastic socket between the ends of the opposite side of the socket side in the thickness direction.

In the example shown in FIG. 18, the protrusion 1304 is formed by caulking the outer side surface of the cylindrical portion 1305. When the projection 1304 is formed by caulking in this manner, the first movable member 1301 can be easily provided with the reduced diameter portion.

The specific shape of the protrusion 1304 is arbitrary. The protrusion 1304 may be formed by partially deforming one of the inner sides of the hollow 1303 of the first movable member 1301 (entirely), or by partially forming one of the inner sides of the hollow 1303 of the first movable member 1301. It is formed by protruding or arc-shaped. Here, the arc shape means that the shape of the protrusion 1304 is curved in an arc shape that is gentler than the block shape. As illustrated in FIG. 18, when the projection 1304 is formed by caulking, it may be caulked in a ring shape or may be caulked at a plurality of points (for example, three points, four points, or the like). When the protrusion 1304 is formed by deforming one of the inner side surfaces of the hollow portion 1303 of the first movable member 1301 into a block shape or an arc shape, the thickness direction of the elastic socket is normal, and the surface of the protrusion portion 1304 is included. The shape of the section of the reduced diameter portion It is not particularly limited, but the surface including the arbitrary protrusions 1304 is formed so that the center of the inscribed circle of the cross-sectional shape on the surface thereof substantially coincides with the center of the cylindrical portion 1305, and the central axis of the first movable member 1300 is reduced and the first The deviation of the movable direction of the movable member 1300 is preferable.

In Fig. 18, the reduced diameter portion 1304 is formed by caulking the cylindrical portion 1305 of the first movable member 1301, but the inner side surface of the hollow portion 1303 of the first movable member 1301 is attached by, for example, partial plating. The member protruding from the inner side thereof can also constitute the reduced diameter portion 1304 by the member.

100‧‧‧Interracial conductive parts

101‧‧‧Flexible socket

101a, 101b‧‧‧ main faces

102‧‧‧through hole for elastic socket

103‧‧‧Electrical penetration

104‧‧‧First movable part

104a‧‧‧ end face

105‧‧‧Second movable parts

106‧‧‧Electrode contact

107‧‧‧Substrate contact

108‧‧‧Flange part of the second movable part

109‧‧‧First sliding surface

110‧‧‧Second sliding surface

111‧‧‧Cylinder Department

111a‧‧‧ hollow

111b‧‧‧ openings

112‧‧‧Axis body

112a‧‧‧End

112b‧‧

113‧‧‧Rough path

114‧‧‧Electrode side plate parts

114a, 114b‧‧‧ main face

115‧‧‧through holes

116‧‧‧Clocking protrusion

Claims (24)

An anisotropic conductive member comprising an elastic socket formed of an insulator and having an elastic plate shape, and corresponding to a plurality of through holes of the elastic socket, and having a portion penetrating through the through hole to allow current to pass The electrically conductive member of the plurality of electrical penetration portions in the thickness direction of the elastic socket is characterized in that the electrical penetration portion has a first movable member that is electrically connected and can change a relative position in a thickness direction of the elastic socket And the second movable member, wherein the first movable member has an electrode contact portion for contacting the electrode attached to the inspection object at an end portion facing the inspection target object, and the second movable member is in contact with the inspection A substrate contact portion for contacting the inspection substrate of the inspection device is provided at an end portion of the opposite side of the substrate, and when the electrode contact portion and the substrate contact portion are biased in the thickness direction of the elastic socket, The elastic socket generates an elastic restoring force in the direction of the separation, the first and second movable portions One portion of the elastic socket is compressibly disposed, and the electrical penetration portion includes a first sliding surface provided on the first movable member and a second sliding surface disposed on the second movable member in a thickness direction of the elastic socket a sliding sliding contact structure, wherein the distance between the electrode contact portion and the substrate contact portion is variable in a thickness direction of the elastic socket while maintaining the electrical connection between the contact portions, the first The movable member is provided from the electrode contact portion to the elastic socket a hollow tubular body portion having a hollow portion, the end portion of the tubular portion opposite to the electrode contact portion side having an opening, and the cylindrical portion having at least an inner side surface of the end portion side of the opening One of the first sliding surfaces is configured such that an end surface of the cylindrical portion having the opening side is in contact with a main surface of the elastic socket on the electrode contact portion side, and the first movable member is placed on the elastic socket. On the main surface of the electrode contact portion side, the second movable member includes a shaft portion extending from the substrate contact portion in the thickness direction of the elastic socket, and the shaft portion is opposite to the end portion on the substrate contact portion side. At least a part of the outer side surface of the end portion constitutes the second sliding surface, and includes one of the end portions of the shaft body portion constituting the second sliding surface on one side of the outer side surface from the electrode contact portion of the elastic socket The main surface of the side protrudes and is inserted into the hollow of the first movable member, and the other portion of the shaft portion is disposed in the through hole of the elastic socket. a length of a thickness direction of the elastic socket slidably contacting the second sliding surface on the first sliding surface, that is, a length of the first sliding surface and a sliding contact with the first sliding surface of the second sliding surface One of the lengths of the elastic sockets, that is, the length of the second sliding surface, is shorter than the other, and the first movable member is not required to plastically deform the shaft portion, and is inclined in the thickness direction of the elastic socket. The heteroconductive member according to claim 1, wherein the length of the second sliding surface is shorter than the length of the first sliding surface. Such as the patented conductive component of the second item of the patent scope, wherein the second The shaft body portion of the movable member has a large diameter portion that is larger in diameter than the other portion, and the outer surface portion of the large diameter portion constitutes the second sliding surface. The foreign conductive member according to claim 3, wherein the large diameter portion is provided to include an end portion of the shaft body portion that is inserted into the inner side of the cylindrical portion. The heteroconductive member according to claim 3, wherein the diameter of the large diameter portion is larger than an inner diameter of the through hole of the elastic socket, and the through hole is deformed by contact with the large diameter portion The large diameter portion penetrates the through hole through the deformation of the through hole, and is inserted into the cylindrical portion. The heteroconductive member according to claim 4, wherein the shaft portion includes a metal thin wire, and the large diameter portion is formed of a part of the metal thin wire and a plating layer formed on a part of the outer surface. The heteroconductive member according to claim 5 or 6, wherein the stepped portion of the large diameter portion and the other portion on the shaft portion is locked to an opening edge of the through hole of the elastic socket The second movable member is prevented from being detached from the through hole toward the substrate contact portion side. The heteroconductive member according to claim 1, wherein the length of the first sliding surface is shorter than the length of the second sliding surface. The heteroconductive member according to claim 8, wherein the hollow portion of the cylindrical portion of the first movable member has a reduced diameter portion having an inner diameter smaller than that of the other portion, and the inner side surface of the reduced diameter portion constitutes the above The first sliding surface. The foreign conductive member according to claim 9, wherein the reduced diameter portion is provided to include an end portion of the cylindrical portion having the opening side. The heteroconductive member according to any one of claims 8 to 10, wherein the shaft portion is provided with a thin metal wire. The heteroconductive member according to claim 11, wherein the substrate contact portion is composed of one of the metal thin wires and a member separated from the metal thin wires, and the member separated from the metal thin wires is fixed to the metal thin wires. Part of it. The foreign conductive member according to any one of the first aspect, wherein the main surface of the elastic socket on the electrode contact portion side is provided with a hole including an opening of the through hole. In the boring portion, an end portion of the first movable member on the elastic socket side is placed. The heteroconductive member according to any one of the above-mentioned claims, wherein the portion of the shaft portion disposed in the through hole does not have an outer diameter exceeding an inner diameter of the through hole. section. The heteroconductive member according to claim 14, wherein the portion of the shaft portion disposed in the through hole has a larger outer diameter than the other portion at the proximal end of the substrate contact portion side. Part of it. The foreign conductive member according to any one of the first aspect, wherein the outer diameter of the portion of the shaft portion disposed in the through hole is at least a part of the through hole. Above the inner diameter, it is pressed into the through hole. The heteroconductive member according to any one of the above-mentioned items, wherein at least a part of an end surface of the substrate contact portion on the side of the shaft portion is in contact with the substrate of the elastic socket. Contacting the main surface of the side, the substrate contact portion has a contact with the substrate of the elastic socket The portion of the main surface of the side that protrudes in the plane. The heteroconductive member according to claim 1, wherein the anisotropic conductive member further includes an electrode side plate member made of a rigid material, and one of the main surfaces and the electrode contact portion side of the elastic socket The main surface is opposed to each other, and the electrode side plate member has a through hole corresponding to the electrode contact portion, and the electrode contact portion is opposite to the opposite side of the electrode side plate member from the elastic socket. The surface of the first movable member is inserted through the through hole of the electrode side plate member. The foreign conductive member according to claim 18, wherein the first movable member penetrating through the through hole of the electrode side plate member is on the main surface of the elastic socket on the electrode contact portion side and The electrode side plate-like members have a locking protrusion protruding from one of the outer side surfaces thereof, and the cross-sectional shape of the first movable member on the surface including the locking protrusion is normal to the thickness direction of the elastic socket The diameter of the circumscribed circle is larger than the diameter of the opening on the elastic socket side end portion of the through hole of the electrode side plate member. The heteroconductive member according to claim 18, wherein a hole is provided in the main surface of the electrode side plate member on the main surface of the elastic socket, and a hole is provided in the main surface of the electrode side plate member. The first movable member on the through hole of the side plate member has a card protruding from one of the outer side surfaces of the main surface of the elastic socket on the electrode contact portion side and the end surface of the bore portion on the through hole side. The protruding portion is normal to the thickness direction of the elastic socket, and is on the surface including the locking protrusion The diameter of the outer circumference of the cross-sectional shape of the first movable member is larger than the diameter of the opening on the end portion of the through-hole of the electrode-side plate-like member, which is smaller than the inner diameter of the bore portion. The foreign conductive member according to claim 19 or 20, wherein the first movable member penetrating through the through hole of the electrode side plate member has a portion where the electrode contact portion and the cylindrical portion are connected a step portion that constitutes the locking projection. The heteroconductive member according to claim 19 or 20, wherein the electrode contact portion is in contact with the electrode attached to the inspection object, and the through hole is formed in the electrode side plate member The peripheral portion of the elastic socket facing the one side presses the locking projection toward the center side in the thickness direction of the elastic socket, and the elastic socket is provided to the electrode contact portion and the substrate contact portion corresponding to the press-fit Elastic resilience. The opposite-side conductive member of the seventeenth aspect of the invention, wherein the electrode contact portion is provided such that the electrode contact portion and the substrate contact portion are close to each other in a thickness direction of the elastic socket, so that the electrode is contacted The elastic portion of the flexible socket is variably attached to the center of the elastic socket in the thickness direction of the elastic socket, and the elastic socket is variably attached to the thickness direction of the elastic socket. The foreign conductive member according to the ninth or tenth aspect of the invention, wherein the reduced diameter portion of the first movable member protrudes from the inner side of the cylindrical portion toward the central axis side of the tubular portion. The protruding portion is configured such that a surface of the protruding portion that protrudes from the front end portion constitutes the first sliding surface.