201247510 六、發明說明： 【發明所屬之技術領域】 本發明有關一種網膜（We 有 關一種便於網膜的傳送、夾 、統，更特別地 、引導的網膜處理系統< 【先前技術】 柔性顯示器指的是由諸如 的平板顯示器。因為柔性板的可彎曲基板組成 卷而不舍…- 可以弯曲、卷起或纏繞成 代的平杯’、.不特性惡化，因此，柔性顯示器作為下-代的+板顯示器越來越受關注。 此類平板顯示器使用薄 像紙張-樣被表起^製造，該基板可 性亞化不:纏繞成幾羞米而不會使顯示特 干二： 型玻場基板製成的硬顯示器，柔性顯 不器疋纖細的，且右伸έ ό ^ 八有知的重量和报高的衝擊阻力並可以 自由地彎曲。根據應用 r r 刀月b柔性顯不器可以分成加固 U⑽）顯示器、可f曲（―⑷顯示器和軟性 器1e)顯不器。此類輕質的、剛性的和可彎曲顯示 於多種移動設備，諸如DMB電話、WiBro單元、PDA 等並且可以預見此類顯示器將發展為軟性顯示器。 :了通過輥對輥工藝製造柔性液晶顯示器，在靜止狀 :卜網膜的一面上執行包括諸如聚酰亞胺薄膜的定向膜 =成、間隔（Spacer)分配、密封/短分配、液晶分配或 ::曰注入等等的多道工藝。由於此類工藝在網膜的一面上 仃以製造柔性液晶顯示器，故在這些工藝期間，典型的 3 201247510 傳送裝置基本被阻止與網膜 綑眩沾谂这 向接觸，並且用於支撐 型=:域的軋親可致使網膜起伏或傾斜。因此，典 加張力/ &乾輥不適用於網膜的傳送。此外，當在施 ,^ 在時很難獲得上下板的精確對準。因 此’需要便於網膜的值访、+ i 系統。 、專达夾持和引導的改進型網膜處理 【發明内容】 本發月提供-種適用於輥對輥工藝的網膜處理系統。 本發明還提供—種便於網膜的傳送、夹持和引導的網 膜處理系統。 -本發明還提供一種允許在靜止狀態下在網膜的一個表 面輕鬆地執行特定工藝的網膜處理系統。 本發明還提供-種便於製造柔性液晶顯示器的報對報 型網膜處理系統。 根據本發明的一個方面，提供了一種用於處理網膜的 網膜處理系統’該網膜包括彼此相對的一面和另一面。該 系統包括吸引上述網冑的上述另—面或使上述網膜的上述 另-面浮起的多孔夾持板；以及夾持裝置，其包括夹持外 殼，該夾持外殼包圍上述多孔夾持板的側面和底面，並且 該夾持外殼中形成有連接到上述多孔夾持板的通風孔。 上述夾持板可包括多個子夾持板，並且上述通風孔可 包括分別連接到上述多個子夾持板的多個子通風孔。進一 步地，上述多個子夾持板可通過這些子夾持板之間所限定 4 201247510 的分隔空間彼此隔開。 上述夾持外殼可進一步包括：填充上述分隔空間的隔 板’並且上述夾持外殼可進一步包括：形成在與上述多個 子夾持板相對應的位置處的多個子流管，用於通過上述多 個子夾持板真空排氣或吹氣。 上述夾持板可包括多孔碳材料、多孔陶瓷材料和多孔 金屬材料中的至少一種。 上述夾持裝置可進一步包括形成在上述夾持板的局部 表面上的靜電夾頭和用於填充在上述靜電夹頭與上述失持 板之間限定的分隔空間的隔板。 上述夾持板可由單個夾持板組成，並且上述通風孔可 由連接到上述單個夾板的多個子通風孔組成。 上述網膜處理系統可進-步包括：調節上述網膜的張 力的張力調節器。上述張力調節器可包括：向上述網膜施 加張力的張力輥；支撐被上述張力輥擠壓的上述網瞑的支 :輥:和連接至張力輥以調節施加到上述網膜的 壓7L件。201247510 VI. Description of the Invention: [Technical Field] The present invention relates to a web (We relate to a web film processing system that facilitates the transport, clamping, and more particularly, guiding of the web). [Prior Art] Flexible display refers to It is made of a flat panel display such as a flexible display panel because the flexible substrate constitutes a roll...- can be bent, rolled up or wound into a flat cup', without deterioration of characteristics, therefore, the flexible display as a lower-generation + Board displays are gaining more and more attention. Such flat panel displays are fabricated using thin-like paper-like materials that are not as follows: they are wound into a few shy meters without the display of special two: type glass field substrate Made of hard display, flexible display, slim, and right-handed ό ^ Eight known weight and high impact resistance and can be bent freely. According to the application rr knife month b flexible display can be divided into reinforcement U(10)) display, f-curve (-(4) display and softener 1e) display. Such lightweight, rigid and flexible displays are found in a variety of mobile devices, such as DMB phones, WiBro units, PDAs, etc. and it is foreseen that such displays will evolve into soft displays. : A flexible liquid crystal display is manufactured by a roll-to-roll process, and an orientation film including a polyimide film, a spacer, a space distribution, a seal/short distribution, a liquid crystal distribution or the like is performed on one side of a stationary film: : Multi-channel process such as injection. Since such a process is applied to one side of the web to create a flexible liquid crystal display, during these processes, the typical 3 201247510 conveyor is substantially prevented from coming into contact with the reticle and is used for support type =: domain Rolling pro- ing can cause the omentum to undulate or tilt. Therefore, the standard tension / & dry roll is not suitable for the transfer of the omentum. In addition, it is difficult to obtain precise alignment of the upper and lower plates when applied. Therefore, it is necessary to facilitate the visit of the omentum, + i system. , Improved Membrane Treatment for Clamping and Guided [Explanation] This month provides a retina processing system suitable for the roll-to-roll process. The present invention also provides a web processing system that facilitates the transport, clamping and guiding of the web. - The present invention also provides a web processing system that allows a specific process to be easily performed on one surface of the web in a stationary state. The present invention also provides a report type retina processing system that facilitates the manufacture of a flexible liquid crystal display. According to an aspect of the invention, there is provided a retina processing system for treating a web comprising the one side and the other side opposite to each other. The system includes a porous holding plate that attracts the other surface of the mesh or floats the other surface of the mesh film, and a clamping device that includes a clamping housing that surrounds the porous holding plate The side surface and the bottom surface, and the ferrule is formed with a vent hole connected to the porous holding plate. The holding plate may include a plurality of sub-clamping plates, and the venting holes may include a plurality of sub-venting holes respectively connected to the plurality of sub-clamping plates. Further, the plurality of sub-clamping plates may be spaced apart from each other by a partition space defined between the sub-clamping plates 4 201247510. The above-described clamping housing may further include: a partitioning member 'filling the partition space' and the above-described clamping housing may further include: a plurality of sub-flow tubes formed at positions corresponding to the plurality of sub-clamping plates for The sub-clamping plates are vacuumed or blown. The above holding plate may include at least one of a porous carbon material, a porous ceramic material, and a porous metal material. The above holding device may further include an electrostatic chuck formed on a partial surface of the holding plate and a partition for filling a partition space defined between the electrostatic chuck and the above-mentioned holding plate. The above holding plate may be composed of a single holding plate, and the above-mentioned vent hole may be composed of a plurality of sub-vent holes connected to the above-mentioned single plate. The above-mentioned web treatment system may further include: a tension adjuster that adjusts the tension of the above-mentioned web. The tension adjuster may include: a tension roller that applies tension to the web; a support roller that supports the mesh that is pressed by the tension roller: and a roller that is connected to the tension roller to adjust the pressure applied to the web.
上述網膜處理系統可推 JK A g , 一步匕括網膜輸送器，上述網 膜輸送态包括：網膜保持單 苴 /、在傳送上述網膜期簡尤 上述網膜的邊緣或非處理㈣㈣u 期間在 , °°域保持上述網膜；探測上述網 膜的位置的感測器；和雷 捭覃开枉k 機，其移動或旋轉由上述網膜伴 持早兀保持的上述網膜。 、保 上述網膜保持單元 上述網膜處理系統 可以是夾具、輥或真空夹頭 可進一步包括網膜保持裝置 該網 201247510 …、持裝置包括.支標上述網膜的上述另—面的驅動輕； 和固定輥，其位於上述網膜的上述一面的上方，並且可在 豎直方向上移動。 述”周膜保持裝置可進—步包括位於上述網膜的右側 和左側以調節上述網膜的位置的第一引導輥。 上述網膜處理系統可進-步包括：位於上述網膜的右 侧和左側以引導上述網膜的傳送方向的第二引導親，並且 上述第二引導輥可由聚四氟乙烯或PEEK形成。 上述網膜處理系統可進一步包括：真空夾頭，其吸引 上述網膜的上述另—面以調節上述網膜的位置。 上述網膜可以是用於柔性顯示器的柔性基板。 【實施方式】 現在將參考附圖詳細說明本發明的實施例。需要注意 的是附圖並未精確地按比例繪製’而是可以僅為了便於描 述和清楚起見而誇大線條的粗度或部件的尺寸。此外，此 處所用的術語是考慮本發明的功能進行定義的，且可以根 據用戶或操作者的習慣或意圖進行改變。因此，術語是根 據此處所述的整個公開内容進行定義的。 圖1是根據本發明的一個實施例的用於網膜處理系統 的網膜的平面圖。 參照圖1’網膜W有兩個彼此相對的面，並且在網膜w 的一面執行包括定向膜的施加、間隔分配、密封分配、短 分配、TFT(薄膜電晶體）形成、渡色器的形成等等的多道 6 201247510 工藝以形成柔性液晶顯示器。可替代地，柔性印刷電路板 (FPCB )可通過繞旋轉觀纏繞柔性覆銅薄層壓板（FCCL ) 而不切斷柔性覆銅薄層壓板來製造。可替代地，可以執行 多道工藝以製造電子紙。 網膜V/可由任何柔性材料製成。例如，網膜w可由塑 膠、金屬、紙、橡膠或它們的組合組成.塑膠材料的例子 包括聚對苯二甲酸乙二醇酯（PET )、聚萘二曱酸（pEN )、 聚鱗砜（PES)、聚丙烯（PAR)、聚碳酸酯（PC)、環稀 烴共聚物（C0C )和聚酰亞胺（p〗），且並不限於此。 此處，網膜中經受了上述的包括定向膜施加等等的多 道工藝的區域將被稱為處理區域Wp，在處理區域Wp之間的 空間將被稱為非處理區域。具體地，在圖丨中，處理區 域WP可由矩形ABCD限定且非處理區域…可由矩形EFGH 限疋。另-方面，網膜在其縱向方向上的邊緣稱為邊緣區 域WE。非處理區域Wq和邊緣區域心可彼此重疊。例如， 矩形DIGH可同時限定為非處理區域Wq和邊緣區域 圆2和圖3是根據本發明的本實施例的網膜處理系統 的不意性側截面圖，分別顯示了網膜處理系統上處於靜止 狀態和處㈣送狀態的㈣。此處’需要注意的是料截 =圖還顯示了嚴格意義上不能在截面圖中顯示的部件（裝 括夾持^根據本實施例的網膜處理系統包 膜轸送：SO:並且可進一步包括網膜保持裝置100、網 、輸运盗300和張力調節器4〇〇。進—步地 括位於網膜的傳送方向上的引導輥（未顯。、、匕 201247510 網膜W包括-面Wl (圖中的頂面）和另一面w2 (圖 中的底面），兩個面彼此相對。網膜的一面t將經受多道 藝，進步地，由夾持裝置2〇〇、網膜保持裝置ι〇〇、網 膜輸送器3。〇和張力調節器4〇〇組成的網膜處理系统可安 ^在每個處理單元卜❹，由线裝置200、網膜保持 置1〇0、網膜輸送器300和張力調節器_組成的網膜 處理系統可安裝在定向膜敷貼器的内側或外側。進一步 地，由失持裝置200、網膜保持裝置1〇〇、網膜輸送器3〇〇 和張力調郎器400組成的網膜處理系統可安裝在密封分配 器的内/外側。顯然，所有的失持裝置2。。、網膜保持裝置 100、網膜輸送器30。和張力調節器4。。沒 個處理單元内且上述裝置中的至少一個可以略去每 當在網膜的一面w，執行工藝時，網膜w由網膜保持裝 置100保持且吸引在夾持裝置200上，張力調節器侧向 網膜w施加張力。 當傳送網膜時’網膜保持裝置1〇〇釋放網膜w，且 網膜輸送器300保持㈤d)網膜的邊緣區域W非處理 區域we以使網膜移動預定的距離。此時，夹持裝置_可 吹空氣或惰性氣體以使網臈浮起，且張力調㈣_可與 網膜W分離以避免向網膜施加張力。 ' 圖4是根據一個實施例的網膜保持裝置的橫截面圖。 本實施例中的網膜保持裝置100可包括驅動輥u 樓網膜的另一面（底面），4π Μ底面）’和固定輥12〇，其位於網膜— 面（頂面）的上方並可在&亩古a 直方向上移動。網膜保持裝置 8 201247510 可進一步包括第一引導輥130,其引導網膜w的側表面以 控制網膜的傳送方向或位置。 驅動輥no連接至電機（未顯示）以在網^移動時 旋轉。可替代地，驅動輥110可配置為在軸承上旋轉（用 於空载旋轉）以代替連接至電機。當然，驅動輥可配置為 不旋轉。然而，在此情況下，網膜w的底面經受摩擦力， 這會損壞網膜W或致使對網膜的傳送方向或位置的控制失 敗。因此，最好將驅動輥110配置為旋轉的。 固定輥120可配置為在豎直方向上移動。當網膜"亭 止時，固定輥120向下移動以擠壓和固定網膜當網膜w 傳送時，固定輥120向上移動以允許網膜w更高效地移動。 當固定輥120擠壓和固定網膜评時，網膜的邊緣區域趴或 非處理區域WQ因此將被擠壓（見圖1 )。 網膜保持裝置100可進-步包括引導網膜w的右側和 左側的第一 51導輥130。帛一引導輥13〇可用於在傳送網 膜w期間提供對網膜w的位置的精確控制。第一引導輥 可由聚四氟乙烯或聚醚醚酮（PEEK)組成，但並不限於此。 儘管網膜保持裝置1〇0被示出為採用輥來固定網膜， 但需要理解的是本發明並不限於此。例如，固定輥12〇可 以是條形輥，其具有橢圓形的、矩形的或三角形的橫截面 來取代BI形的橫截面，且第—引導輥13()也可能是條形親。 圖5和圖6分別是根據一個實施例的夾持裝置的平面 圖和側截面圓。根據本實施例的夾持裝置200可包括：多 孔夾持板21 〇 ’其吸引網膜的另一面（底面）或使網膜的 201247510 另一面（底面）浮起；以及夹持外殼220，其包圍多孔夾 持板210的側面和底面，並且夾持外殼22〇中形成有通風 孔Η ’用於連接多孔夾持板21〇。 多孔夾持板21 0可以是沒有分割成塊的單個夾持板。 可替代地’多孔夹持板21 〇可由分割成塊的多個子夾持板 21〇a ' 210b、…210i組成，如圖5所示。當夾持板21〇由 多個子夾持板210a、21〇b、…210i組成從而可針對吸引和 吹氣分別控制多個子夾持板21〇a、21〇b、…21〇i時可精 確地進行柔性網膜的固定。 夾持板210可由任何具有透氣性的多孔材料形成。例 如，夾持板可包括多孔碳板、多孔陶瓷板和多孔金屬板中 的至少-種。在-個實施例中，央持m可以是陶究夹 持板，其由，例如諸如氧化鋁（A1203 )、二氧化鈦（Ti02)、 一氧化矽（Si〇2)、氧化鍅（Zr〇2)和沸石的熱壓和燒結 陶究粉製成。在另-個實施例中，夾持板12〇可以是多孔 石厌石墨板’其通過形成和燃燒諸如石《由焦或從#炭提取的 歷青焦的主材料與諸如煤焦油、瀝青、齡酸樹脂等等的粘 合劑來製備》 通風孔Η可在失持外殼220内形成且有分別對應於子 失持板210a、210b、 ...210i的多個子通風孔He、 Hb、… :組成。® 6巾’僅顯示三個子通風孔Hb、&、Hh。儘 s如此，由於在本圖中未顯示的其他幾個子通風孔的附圖 ^可輕易地獲取，故將根據需要對其進行陳述，且將以 同樣的方式對其他部件進行描述。 201247510 子通風孔Ha、Hb、 ··· Hi可連接至子通風管230a、 23〇b 、230丨且關斷閥24〇3、2401)、〜24〇1可被提 供給子通風管230a、230b..... 230i以分別通過控制 器（未顯示）自動地開啟或關閉。當網膜由柔性材料形成 時，吸引或浮起將順序地進行。為此目的，關斷閥24〇a、 240b、…240i可被控制器（未顯示）控制為順序地開啟 或關閉。此處，開啟或關閉關斷閥的程度可被控制以調節 壓力。 卞通風孔Ha、 Hb、…Hi可通過單個管道連接至止 回閥250、真空泵260和吹風機270。當網膜吸引到夹持板 時，真空泵260可被操作為使空氣可通過在通風管23〇、 通風孔Η和多孔夹持板21 0内的流管被吸入。在傳送網膜 期間’吹風機2 7 0被操作為吹空氣或惰性氣體以使網膜浮 起。止回閥250可用於選擇真空泵260和吹風機270之一， 並自動地由控制器（未顯示）進行控制。 夾持外殼220可進一步包括隔板222。具體地，隔板 222可與夾持外殼220整體地形成以組成夾持外殼22〇的 一部分。可替代地，隔板222可製備成單獨的部件，其將 裝配到或附接到夾持外殼220上。如上所述，子失持板 210a、 210b、…210i可通過在它們之間限定的分隔空間 彼此隔開。此處，分隔空間可以是空的或具有填充分隔空 間的隔板222。隔板222可以阻止空氣流入彼此相鄰的子 夾持板210a、 210b、…21 0 i，從而便於對每個子夹持 板210a、 210b、…210 i的吸引或浮起操作進行控制。 201247510 圖7是根據本另一個實施例的夾持裝置的側截面圖。 在參照圖7對本實施例的夾持裝置的描述中，將略去或簡 要提供對重複部件的描述。在本實施例中的夾持裝置2⑽ 中，用於吸引網膜的另一面（底面）或使網膜的另一面（底 面）浮起的多孔夾持板210可由單個夹持板構成，並且， 連接至多孔夾持板21〇的通風孔Η可由多個子通風孔組成 以允許在每一個區域進行真空排氣或吹氣操作。 換言之，夾持外殼220中的通風孔Η可由多個子通風 孔Ha、 Hb、…Hi組成。儘管圖7中僅顯示三個通風孔Hb、 He ' Hh ’但本發明並不限於此。 圖8是根據本發明的一個實施例的夾持外殼的透視 圖。圖8中，夾持外殼220不包括隔板❶夾持板21〇可由 ^個子失持板21〇a、 210b、…210i組成’或者可以是 單個夾持板。通風孔H可由多個子通風孔Ha、 Hb、…L 組成’且失持外殼220可具有包括多個子流管Ra、 Rb、… R·的流管，以用於通過子通風孔Ha、 Hb、…1進行高效 的真空排氣或吹氣操作。 應當理解的是’圖8中所示的子流管Ra、 Rb、…Ri 的形狀僅以例不的方式提供，也可使用其他形狀的流管。 流€ 了從子通風孔Ha、 Hb、…Hi徑向地延伸而非 形成矩形。進一步地，管的形狀可以修改成包括多邊形 在内的夕種形狀’諸如三角形和五角星形、圓％、橢圓形 等等’而非矩形。 圖9疋根據另一個實施例的夾持外殼的透視圖。在真 12 201247510 空條件下進行用於在網膜的一面上形成多個結構或特定圖 案的工藝。在此情況下’網膜可以通過真空排氣被失持而 被不充分地固定。如圖9所示，系統可進一步包括靜電夾 頭（ESC) 280’用於當在真空或在正常壓力下執行該工蓺 時進行更精確地夹持。 靜電夾頭280是配置為用靜電力（即，在平板型電容 器中的帶電平板間產生的吸引力）保持網膜的裝置。靜電 夾頭280可以是單極或雙極靜電夾頭。雙極靜電夾頭包括 兩個通過介電層與網膜分離的電極，從而當向兩個電極施 加電壓時，在每個電極與網膜之間產生靜電吸引力。因為 網膜不是電路部^ 牛’故雙極靜電夾頭具有等離子體不用作 電連接的介質的優點。 儘管夾持板210在圖9中示出為包括9個靜電夹頭 280，但本發明並不限於靜電夾頭的上述數量 '形狀和位 置。進一步地，可在每個靜電夾頭28〇與多孔夾持板 之間限定分隔空間，並用隔板填充該分隔空間 隔板填充 分隔空間以抑制網膜在夾持期間變形。 圖10和圖11分別是根據一個實施例的網膜輸送器的 示意性側截面圖和正視圖。參照圖ίο和圖u，根據本實 施例的網膜輸送器300可包括感測器31〇 320和電機330。 網膜保持單元 在根據本實施例的網膜輸送器300中，感測器31 〇探 測網膜W或網膜的邊续F p w 、 联旳遠緣£域We，網膜保持單元32〇在邊緣 £ 域 We 或非處理區 Wn 4^： Ακη η** <3保持或固疋網膜，且電機33〇產生 201247510 移動或旋轉網膜的力。在圖10和圖11中，配置為通過失 住邊緣區域wE或非處理區域來固定網膜的夾具被示出為 網膜保持單元320的一個例子。 ” 當被網膜固定單元32〇固定時，網膜w通過可由執道 實現的網膜傳送單元34〇進行傳送。網膜傳送單元可 在電機330的作用下移動或旋轉。因此，當網膜脫離期望 的軌跡時’網膜傳送單A 340纟傳送網膜的同_將校正或 控制網膜的位置。 圖12是根據另一個實施例的網膜輸送器的示意性側 截面圖圖13是根據又一個實施例的網膜輸送器的示意性 側截面圖。在參照圖12和圖13對根據這些實施例的網膜 輸送器的也述中，將略去或簡要提供對重複部件的描述。 根據本實施例的網膜輸送器300中，網膜保持單元32〇 可=疋輥（見圖12)。具體地，網膜保持單元32〇可通過 匕3上輕和下輥的一對輥來實現。因為在網膜w的一面或 另面上執订多道工藝，故輕可設置為與網膜W的非處理 區域…而非與網膜界的其上已經完成工藝或將執行 工藝的區域接觸°可替代地，輥可設置為僅與網膜的邊緣 =拉因此’當在網膜的一面或另一面形成特定的結構或 圖案時，輥不可能與網膜的已處理區域接觸。此處，當在 味膜的邊緣區$ WE由乾輥固定的情況下移動或傳送網膜 二網膜可能遭受起伏或傾斜。因此，期望將輥設置為與 =網膜的非處理區…整個表面進行直線（iinear) 14 201247510 網膜輸送器300的網膜保持單元32〇可包括真空夾頭 (見=13)。真冑夾頭可包括多孔夾持板，該多孔夹持板 可由單個夹持板或多個子夾持板組成。網膜保持單元 可進一步包括靜電夾頭和真空夾頭。 網膜輸送器300可安裝在處理設備内或可作為單獨的 裝置提供。網膜輸送器可通過夾住或真$夾持網膜的空白 區域（例如網膜的邊緣或非處理區域）來傳送網膜。系統 具=多個網膜輸送器。在此情況下，所有的網膜輸送器將 由單個控制程式同步或被單獨控制以允許在處理設備内進 行張力調節。 圆14是根據一個實施例的張力調節器的示意性側截 面圖參照圓14，根據本實施例的張力調節胃4〇〇可包括 張力親410、支撐親42〇、測塵元件（i〇adce⑴ 致動器440。 張力報41〇可在致動器44〇的作用下在暨直方向上移 動。具體地，當在處於靜止狀態的網膜的一面執行某個工 藝時，致動器440向上移動張力輥410以㈣網膜的底面。 張力報410與位於網膜兩側的支㈣42()合作以向_& 加張力，1張力可由測壓元件信進行測量以控制張力。 支樓輥420可配置為在豎直方向上移動’或固定在特 定位置。可替代地’支樓輕420可配置為旋轉的或非旋轉 的。張力輥420還可配置為旋轉的或非旋轉的。 張力輕4H)和支撑輥42〇可通過其他結構實現而非通 過輥的結構來實現。例如，張力輕41〇和支撐觀似可以 15 201247510 通過可向網膜施加張力或支撐網臈的杆來實現。 圖15是根據另一個實施例的張力調節器的示意性側 截面圓參照圖15，根據本實施例的張力調節器4 〇 〇可包 括張力輥410、支律輥420、測壓元件430和致動器440。 在本實施例中，張力輥4丨〇可位於網膜的上方。 根據本實施例的張力調節器的張力輥41 0、支撐輥 420、測壓几件43G和致動器權可與根據上述實施例的張 力調節器的張力輥410、支撐輥42〇、測盧元件43〇和致動 :440基本相同。《而，在本實施例中，當不在網琪的另 :面（底面）執行工藝時’支撑輥420可在特定位置上進 行旋轉’而不向上或向下移動。 圖1 6和圖1 7分別是根據一個實施例的網膜引導裝置 (工藝）的平面圖和側截面圖。通常，邊緣位置控制器"Μ) 或中心位置控制器（cpc)用於校正網膜的傾斜。然而，儘 管EPC或CPC在網膜持續移動的情形下是有利的，但它 們在網膜由於特定工藝而間歇性移動或停止的情形下是不 破期望的。進一步地’因為燃燒工藝在網膜頂面執行，因 此不期望與網膜頂面接觸且很難調節張力。因此，EM或 cpc不能適用。 一 在本發明的一個實施例中，系統可進-步包括用於引 ^網膜的第二引導棍5〇0。即，多個第二引導輕500在網 、的傳送方向上沿網膜的任—側佈置以防止網膜脫離預設 :-預定的距離。第二引導輥5。。可由聚四氟乙稀或聚 —’綱（PEEK )形成，但不限於此。 201247510 ^ 步地’在間歇工藝或處於靜止狀態期間，在網膜 的位ϋ或傳送方向嚴重脫離期望軌跡的情形下，僅通過第 引導報5〇〇很難調節網膜的位置，纟系統可進一步包括 用於調_網膜的位置的真空爽頭510。真空爽頭510可在 電機520的作用下在置直方向上（ζ方向）、水平方向上 (X方向）、傳送方向上方向）或旋轉方向上（Θ方 向）移動。進-步地，真空夾頭51。可通過多孔夾持板或 其他部件實現，m步地包括靜電夾頭。此處，夾持 板可由單個夾持板或多個子夾持板組成。 在根據本實施例的網膜處理系統中，因為通過多孔夾 持板進仃夾持和吹氣’外來物質可附著於網膜，從而提供 ^染或工藝故障源。因& ’網膜處理系統可進—步包括在 周=傳送方向上位於夾持裝置的内側或外側的預定位置處 :硐潔器。清潔器的例子包括uv (或vuv)清潔器、⑽ ’月潔器、收縮（contract)輥清潔器、ϋν/〇3清潔器，等 $很據實^列’網膜處s系統便於網膜的傳送、夹持和 二丨導。特別地，該系統便於輥對輥工藝，其中預定的工藝 祠膜的一個面上執行。進一步地’該系統便於諸如柔性 夜晶顯示器的柔性顯示器的製造。 s儘管已提供了 -些實施例以闡述本發明，應當理解的 :、由這些實施例僅以例示的方式給出，在不背離本發明的 範圍的前提下可進行多種修改、變形和替換。本發 的粑圍僅由附屬的申請專利範圍及申請專利範圍的等同 17 201247510 物來限定。 【圖式簡單說明】 本發月上述和其他方面、特徵和優點將通過以下結合 附圖給出的實施例的分― η四％们描述中變得明顯，在附圖中： 圖1是根據本發明的一個實施例的用於網膜處理系統 的網膜的平面圖； 圖2和圖3疋根據本發明的該實施例的網膜處理系統 的U生側截面圖，分別顯示了網膜處理系統上的處於靜 止狀態和處於傳送狀態的網膜； 圖4疋根據本發明的一個實施例的網膜保持裝置的撗 截面圖； 圖5和圖6分別是根據本發明的一個實施例的夾持裝 置的平面圖和側戴面圖； 圖7是根據本發明的另一個實施例的夾持裝置的側截 面圖； 圖8是根據本發明的一個實施例的夾持外殼的透視 圖； 圖9是根據本發明的另一個實施例的夾持外殼的平面 回 · 原]， 圖1 〇和圖11分別是根據本發明的一個實施例的網膜 輪送器的示意性侧戴面圖和正視圖； 圖12是根據本發明的另一個實施例的網膜輸送器的 示意性側截面圖； 18 201247510 圖13疋根據本發 令赞明的又一實施例的網膜輸送器 意性侧截面圖； 圖14是根據木絡 發月的—個實施例的張力調節器的 意性側截面圖；The above-mentioned web processing system can push JK A g , and the step of conveying the web film includes: the web film maintains a single 苴 /, during the transport of the net film period, the edge of the web film or the non-process (4) (four) u period, ° ° domain Maintaining the above-mentioned mesh film; a sensor for detecting the position of the above-mentioned mesh film; and a Thunder opening machine that moves or rotates the above-mentioned mesh film held by the above-mentioned mesh film. The above-mentioned web film holding unit may be a jig, a roller or a vacuum chuck, and may further comprise a web retaining device, the web 201247510, the holding device comprises: the above-mentioned other surface of the web, the driving light; and the fixing roller It is located above the above-mentioned side of the above-mentioned web and can be moved in the vertical direction. The "peripheral membrane retaining device" may further include a first guide roller located on the right and left sides of the mesh membrane to adjust the position of the web. The web treatment system may further include: positioning on the right and left sides of the mesh membrane to guide The second guiding guide of the web film in the conveying direction, and the second guiding roller may be formed of polytetrafluoroethylene or PEEK. The web processing system may further include: a vacuum chuck that attracts the other surface of the web to adjust the above The position of the omentum. The above-mentioned web film may be a flexible substrate for a flexible display. [Embodiment] Embodiments of the present invention will now be described in detail with reference to the drawings. The thickness of the line or the size of the component is exaggerated only for convenience of description and clarity. Further, the terminology used herein is defined in consideration of the function of the present invention, and may be changed according to the habit or intention of the user or the operator. Therefore, the terms are defined in accordance with the entire disclosure as described herein. Figure 1 is in accordance with the present invention. A plan view of a web for an omentum treatment system of one embodiment. Referring to Figure 1 'the web W has two faces opposite each other, and performing the application of the oriented film, spacing distribution, seal dispensing, short dispensing, on one side of the web w Multi-channel 6 201247510 process of TFT (thin film transistor) formation, color former formation, etc. to form a flexible liquid crystal display. Alternatively, a flexible printed circuit board (FPCB) can be wound around a flexible copper-clad thin laminate by rotating view (FCCL) is manufactured without cutting a flexible copper clad laminate. Alternatively, multiple passes can be performed to make electronic paper. The web V/ can be made of any flexible material. For example, the web w can be made of plastic, metal, paper. , rubber or a combination of them. Examples of plastic materials include polyethylene terephthalate (PET), polynaphthalene (pEN), polysulfone (PES), polypropylene (PAR), polycarbonate The ester (PC), the cycloaliphatic copolymer (C0C), and the polyimide (p) are not limited thereto. Here, the above-mentioned region of the web which is subjected to the above-described multi-pass process including orientation film application or the like is used. will be To process the area Wp, the space between the processing areas Wp will be referred to as a non-processing area. Specifically, in the figure, the processing area WP may be defined by a rectangle ABCD and the non-processing area... may be limited by a rectangle EFGH. The edge of the web in its longitudinal direction is referred to as an edge region WE. The non-treated region Wq and the edge region core may overlap each other. For example, the rectangular DIGH may be simultaneously defined as the non-processed region Wq and the edge region circle 2 and FIG. 3 is according to the present invention. The unintentional side cross-sectional view of the retina processing system of the present invention respectively shows (4) in the state of the reticular processing and the (four) delivery state of the retina processing system. Here, it should be noted that the material cut-off = the figure also shows the strict meaning. A component that cannot be shown in a cross-sectional view (including a clamping device) according to the mesh processing system of the present embodiment: SO: and may further include a mesh holding device 100, a mesh, a transport thief 300, and a tension adjuster 4 Hey. The guide roller located in the conveying direction of the web is further inserted (not shown., 匕201247510 web W includes - face W1 (top surface in the figure) and the other surface w2 (bottom surface in the figure), the two faces are mutually In contrast, one side of the omentum will undergo multiple techniques, progressively, the web treatment system consisting of the clamping device 2〇〇, the retentate holder ι〇〇, the omentum conveyor 3. The crucible and the tension adjuster 4〇〇 ^ At each processing unit, the web processing system consisting of the line device 200, the web retaining device 1, the omentum conveyor 300, and the tension adjuster can be mounted inside or outside the oriented film applicator. Further The web treatment system consisting of the lost device 200, the mesh holding device 1〇〇, the omentum conveyor 3〇〇 and the tension adjusting device 400 can be installed inside/outside of the sealed dispenser. Obviously, all the holding devices 2 The mesh film holding device 100, the mesh film conveyor 30, and the tension adjuster 4. The inner film w is omitted from the processing unit and at least one of the above devices can be omitted whenever the process is performed on one side w of the web. Omentum retaining device 1 00 is held and attracted to the clamping device 200, and the tension adjuster laterally applies tension to the omentum w. When the omentum is transported, the oment retaining device 1 〇〇 releases the omentum w, and the retina transporter 300 holds (5) d) the edge region of the omentum W The area we are treated to move the omentum a predetermined distance. At this time, the holding device _ can blow air or an inert gas to float the net, and the tension adjustment (4) can be separated from the web W to avoid applying tension to the web. Figure 4 is a cross-sectional view of a web retaining device in accordance with one embodiment. The web retaining device 100 in this embodiment may include the other side (bottom surface) of the driving roll u floor film, 4π Μ bottom surface '' and the fixed roller 12〇, which is located above the web-surface (top surface) and may be & Mu ancient a moves in the straight direction. The omentum retaining device 8 201247510 may further include a first guide roller 130 that guides the side surface of the web w to control the conveying direction or position of the web. The drive roller no is connected to a motor (not shown) to rotate as the net moves. Alternatively, the drive roller 110 can be configured to rotate on the bearing (for no-load rotation) instead of being coupled to the motor. Of course, the drive roller can be configured to not rotate. However, in this case, the bottom surface of the web w is subjected to friction, which may damage the web W or cause control failure of the conveying direction or position of the web. Therefore, it is preferable to configure the driving roller 110 to be rotated. The fixed roller 120 can be configured to move in the vertical direction. When the omentum is stopped, the fixed roller 120 is moved downward to press and fix the web. When the web w is conveyed, the fixed roller 120 moves upward to allow the web w to move more efficiently. When the fixed roller 120 presses and fixes the web, the edge region of the web or the non-treated region WQ will therefore be squeezed (see Fig. 1). The omentum retaining device 100 can further include a first 51 guide roller 130 that guides the right side and the left side of the web w. The first guide roller 13A can be used to provide precise control of the position of the web w during transport of the web w. The first guide roller may be composed of polytetrafluoroethylene or polyetheretherketone (PEEK), but is not limited thereto. Although the web retaining device 100 is shown as a roller for fixing the web, it is to be understood that the invention is not limited thereto. For example, the fixed roller 12A may be a strip roll having an elliptical, rectangular or triangular cross section instead of the BI-shaped cross section, and the first guide roller 13() may also be a strip-shaped parent. Figures 5 and 6 are a plan view and a side cross-section circle, respectively, of a clamping device in accordance with one embodiment. The clamping device 200 according to the present embodiment may include: a porous holding plate 21 〇 'which attracts the other side (bottom surface) of the web or floats the other side (bottom surface) of the 201247510 of the web; and a clamping shell 220 that surrounds the porous The side surface and the bottom surface of the holding plate 210 are sandwiched, and a venting opening Η is formed in the clamping housing 22 for connecting the porous holding plate 21A. The perforated holding plate 210 may be a single holding plate that is not divided into pieces. Alternatively, the perforated holding plate 21 may be composed of a plurality of sub-clamping plates 21〇a '210b, ... 210i divided into blocks, as shown in Fig. 5. When the holding plate 21 is composed of a plurality of sub-clamping plates 210a, 21〇b, ... 210i, it is possible to accurately control the plurality of sub-clamping plates 21〇a, 21〇b, ... 21〇i for suction and blowing, respectively. The fixation of the flexible omentum is performed. The clamping plate 210 can be formed of any porous material having gas permeability. For example, the holding plate may include at least one of a porous carbon plate, a porous ceramic plate, and a porous metal plate. In one embodiment, the central holding m may be a ceramic holding plate composed of, for example, alumina (A1203), titanium dioxide (Ti02), cerium oxide (Si〇2), cerium oxide (Zr〇2). It is made of hot pressed and sintered ceramic powder of zeolite. In another embodiment, the clamping plate 12A may be a porous stone graphite plate which is formed and burned by a main material such as coal tar, asphalt, such as stone, which is extracted from coke or from charcoal. The adhesive of the aged acid resin or the like is prepared. The vent hole can be formed in the lost holding case 220 and has a plurality of sub-vent holes He, Hb, ... corresponding to the sub-stack plates 210a, 210b, ... 210i, respectively. :composition. ® 6 towel' only shows three sub-vents Hb, & Hh. As such, since the drawings of several other sub-vents not shown in this figure are readily available, they will be stated as needed, and other components will be described in the same manner. 201247510 sub vents Ha, Hb, ··· Hi can be connected to the sub vents 230a, 23〇b, 230丨 and the shutoff valves 24〇3, 2401), 〜24〇1 can be supplied to the sub vent 230a, 230b..... 230i is automatically turned on or off by a controller (not shown), respectively. When the web is formed of a flexible material, the attraction or lifting will proceed sequentially. For this purpose, the shut-off valves 24A, 240b, ... 240i can be controlled by the controller (not shown) to be sequentially turned "on" or "off". Here, the degree to which the shut-off valve is opened or closed can be controlled to adjust the pressure. The vent holes Ha, Hb, ... Hi may be connected to the check valve 250, the vacuum pump 260, and the blower 270 through a single pipe. When the web is attracted to the holding plate, the vacuum pump 260 can be operated such that air can be drawn through the flow tubes in the vent tube 23, the vent hole, and the perforated holding plate 210. The blower 210 is operated to blow air or an inert gas during the transport of the web to float the web. Check valve 250 can be used to select one of vacuum pump 260 and blower 270 and is automatically controlled by a controller (not shown). The clamping housing 220 can further include a partition 222. Specifically, the partition 222 may be integrally formed with the clamp housing 220 to constitute a portion of the clamp housing 22''. Alternatively, the spacer 222 can be fabricated as a separate component that will be assembled or attached to the clamping housing 220. As described above, the child holding plates 210a, 210b, ... 210i can be separated from each other by a partition space defined therebetween. Here, the partition space may be empty or have a partition 222 that fills the partition space. The partition 222 can prevent air from flowing into the sub-clamping plates 210a, 210b, ... 21 0 i adjacent to each other, thereby facilitating control of the suction or floating operation of each of the sub-clamping plates 210a, 210b, ... 210 i. 201247510 Figure 7 is a side cross-sectional view of a clamping device in accordance with another embodiment of the present invention. In the description of the holding device of the present embodiment with reference to Fig. 7, a description of the repeated members will be omitted or simply provided. In the holding device 2 (10) in the present embodiment, the other side (bottom surface) for attracting the web or the porous holding plate 210 for floating the other side (bottom surface) of the web may be constituted by a single holding plate, and is connected to The venting opening of the perforated holding plate 21 can be composed of a plurality of sub-venting holes to allow vacuum evacuation or blowing operation in each area. In other words, the vent hole 夹持 in the clamp housing 220 can be composed of a plurality of sub vent holes Ha, Hb, ... Hi. Although only three vent holes Hb, He ' Hh ' are shown in Fig. 7, the present invention is not limited thereto. Figure 8 is a perspective view of a clamp housing in accordance with one embodiment of the present invention. In Fig. 8, the clamping housing 220 does not include a spacer, the clamping plate 21 can be composed of a sub-stacked plates 21a, 210b, ... 210i' or can be a single clamping plate. The vent H may be composed of a plurality of sub-vents Ha, Hb, . . . L and the lost casing 220 may have a flow tube including a plurality of sub-flow tubes Ra, Rb, . . . R· for passing through the sub-vents Ha, Hb, ...1 for efficient vacuum evacuation or blowing operation. It should be understood that the shapes of the sub-flow tubes Ra, Rb, ... Ri shown in Fig. 8 are provided by way of example only, and flow tubes of other shapes may also be used. The flow has been extended radially from the sub-vents Ha, Hb, ... Hi instead of forming a rectangle. Further, the shape of the tube may be modified to include a shape of a polygon such as a triangle and a pentagram, a circle %, an ellipse, etc. instead of a rectangle. Figure 9 is a perspective view of a clamping housing in accordance with another embodiment. A process for forming a plurality of structures or specific patterns on one side of the web is performed under the condition of 2012 20121010. In this case, the web may be insufficiently fixed by being evacuated by vacuum evacuation. As shown in Figure 9, the system can further include an electrostatic chuck (ESC) 280' for more precise clamping when the work is performed under vacuum or under normal pressure. The electrostatic chuck 280 is a device configured to hold the web by electrostatic force (i.e., attractive force generated between charged plates in a flat type capacitor). The electrostatic chuck 280 can be a monopolar or bipolar electrostatic chuck. The bipolar electrostatic chuck includes two electrodes separated from the web by a dielectric layer such that when a voltage is applied to the two electrodes, an electrostatic attraction is generated between each of the electrodes and the web. Since the omentum is not a circuit part, the bipolar electrostatic chuck has the advantage that the plasma is not used as a medium for electrical connection. Although the clamping plate 210 is illustrated in Figure 9 as comprising nine electrostatic chucks 280, the invention is not limited to the above-described number & shape of the electrostatic chucks. Further, a partition space may be defined between each of the electrostatic chucks 28'' and the perforated holding plates, and the partition space may be filled with a partition to fill the partition space to suppress deformation of the web during the clamping. 10 and 11 are schematic side cross-sectional and front views, respectively, of a retina conveyor in accordance with one embodiment. Referring to Figures ίο and u, the omentum conveyor 300 according to the present embodiment may include a sensor 31 〇 320 and a motor 330. Oment Retaining Unit In the retina conveyor 300 according to the present embodiment, the sensor 31 〇 detects the edge of the web W or the web F Fw , the edge of the web, the web holding unit 32 〇 at the edge of the domain We or The non-treatment zone Wn 4^: Ακη η** <3 holds or fixes the omentum, and the motor 33〇 produces the force of the 201247510 moving or rotating the omentum. In Figs. 10 and 11, a jig configured to fix the oment by the missing edge region wE or the non-treated region is shown as an example of the retina holding unit 320. When being fixed by the omentum fixing unit 32, the omentum w is transported by the omentum transfer unit 34〇 which can be realized by the obstruction. The omentum transfer unit can be moved or rotated by the action of the motor 330. Therefore, when the omentum is separated from the desired trajectory The position of the omentum transport unit A 340 纟 transport web will correct or control the position of the web. Fig. 12 is a schematic side sectional view of a web transporter according to another embodiment. Fig. 13 is a web transporter according to still another embodiment. Illustrative side cross-sectional view. In the description of the web transporter according to these embodiments, the description of the repetitive components will be omitted or briefly provided with reference to Figs. 12 and 13. The web transporter 300 according to the present embodiment The web retaining unit 32 can be a roll (see Fig. 12). Specifically, the web retaining unit 32 can be realized by a pair of rollers of the lower and lower rolls of the crucible 3, because on one side or the other side of the web w By setting a plurality of processes, it is lightly set to be in contact with the non-treated area of the web W... not with the area of the web boundary on which the process has been completed or the process will be performed. Alternatively, the roll can be set to only Edge of the omentum = pull so 'When a specific structure or pattern is formed on one side or the other side of the web, the roll is unlikely to come into contact with the treated area of the web. Here, when the edge area of the film is fixed by a dry roll The moving or transporting omentum may be subjected to undulations or tilting. Therefore, it is desirable to set the roller to be aligned with the entire surface of the non-treated area of the omentum (iinear) 14 201247510 Retaining film holding unit 32 of the retina conveyor 300 A vacuum chuck is included (see = 13). The true jaw can include a porous clamping plate that can be comprised of a single clamping plate or a plurality of sub-clamping plates. The mesh holding unit can further include an electrostatic chuck and vacuum The mesh transporter 300 can be mounted in a processing device or can be provided as a separate device. The omentum transporter can transport the omentum by gripping or blanking a blank area of the omentum (eg, the edge of the omentum or the non-treated area). System with = multiple web transporters. In this case, all web transporters will be synchronized by a single control program or individually controlled to allow in the processing equipment Line tension adjustment. Circle 14 is a schematic side cross-sectional view of a tension adjuster according to one embodiment with reference to a circle 14. The tension adjustment stomach 4 according to the present embodiment may include tension pro 410, support pro 42 〇, dust measuring element (i〇adce(1) Actuator 440. The tension report 41〇 can be moved in the aligning direction by the action of the actuator 44. Specifically, when a certain process is performed on one side of the reticulated film at rest, the actuator The 440 moves the tension roller 410 upward to the bottom surface of the (4) web. The tension report 410 cooperates with the branch (four) 42 () on both sides of the web to apply tension to the _& 1 tension can be measured by the load cell to control the tension. The 420 can be configured to move 'in a vertical direction' or to be fixed at a particular location. Alternatively, the abutment light 420 can be configured to be rotatable or non-rotating. The tension roller 420 can also be configured to be rotatable or non-rotating. The tension light 4H) and the support roller 42〇 can be realized by other structures rather than by the structure of the roller. For example, a tension of 41 〇 and a support can be achieved by 15 201247510 by a rod that can apply tension to the web or support the mesh. 15 is a schematic side cross-sectional circle of a tension adjuster according to another embodiment. Referring to FIG. 15, the tension adjuster 4 according to the present embodiment may include a tension roller 410, a branch roller 420, a load cell 430, and a Actuator 440. In this embodiment, the tension roller 4丨〇 may be located above the web. The tension roller 41 0 of the tension adjuster according to the present embodiment, the support roller 420, the pressure measuring pieces 43G, and the actuator weight can be combined with the tension roller 410, the support roller 42 of the tension adjuster according to the above embodiment, and the measuring roller Element 43 and actuation: 440 are substantially identical. <<In the present embodiment, however, the support roller 420 can be rotated at a specific position when the process is not performed on the other side of the mesh (the bottom surface) without moving up or down. Fig. 16 and Fig. 17 are respectively a plan view and a side sectional view of a web guiding device (process) according to an embodiment. Typically, the edge position controller "Μ" or the center position controller (cpc) is used to correct the tilt of the omentum. However, although EPC or CPC is advantageous in the case of continuous movement of the omentum, they are not desirable in the case where the omentum is intermittently moved or stopped due to a specific process. Further, since the combustion process is performed on the top surface of the web, it is not desirable to contact the top surface of the web and it is difficult to adjust the tension. Therefore, EM or cpc cannot be applied. In one embodiment of the invention, the system can further include a second guide bar 5〇0 for guiding the omentum. That is, a plurality of second guiding light 500 are arranged along the either side of the web in the conveying direction of the web to prevent the web from coming off the preset: - a predetermined distance. The second guide roller 5. . It may be formed of polytetrafluoroethylene or poly-' (PEEK), but is not limited thereto. 201247510 ^ Step by step during the intermittent process or during the quiescent state, in the case where the position or transport direction of the omentum is severely deviated from the desired trajectory, it is difficult to adjust the position of the omentum only by the first guide, and the system may further include A vacuum head 510 for adjusting the position of the omentum. The vacuum head 510 can be moved by the motor 520 in the straightening direction (ζ direction), the horizontal direction (X direction), the conveying direction (direction), or the rotation direction (Θ direction). Step by step, vacuum chuck 51. This can be achieved by a perforated clamping plate or other component, including an electrostatic chuck in m steps. Here, the clamping plate may consist of a single clamping plate or a plurality of sub-clamping plates. In the retina processing system according to the present embodiment, since the foreign matter can be adhered to the web by the porous holding plate, the foreign matter can be attached to the web, thereby providing a source of dyeing or process failure. The &' omental processing system can further include a predetermined position on the inside or the outside of the holding device in the circumferential=transport direction: the cleaner. Examples of cleaners include uv (or vuv) cleaners, (10) 'month cleaners, shrink roller cleaners, ϋν/〇3 cleaners, etc. $ is very reliable. The system at the omentum facilitates the transport of the omentum. , clamping and two guides. In particular, the system facilitates a roll-to-roll process in which a predetermined process is performed on one side of the diaphragm. Further the system facilitates the manufacture of flexible displays such as flexible night crystal displays. The present invention has been described in detail with reference to the preferred embodiments of the invention. The scope of the present invention is limited only by the scope of the appended patent application and the equivalent of the patent application scope 17 201247510. BRIEF DESCRIPTION OF THE DRAWINGS The above and other aspects, features, and advantages of the present invention will become apparent from the following description of the embodiments of the embodiments set forth in the accompanying drawings in which: FIG. A plan view of a web for a web processing system in accordance with one embodiment of the present invention; FIGS. 2 and 3B are cross-sectional views of the web of the web processing system according to the embodiment of the present invention, respectively showing the web processing system Figure 7 is a cross-sectional view of a web retaining device in accordance with an embodiment of the present invention; Figures 5 and 6 are plan and side views, respectively, of a gripping device in accordance with an embodiment of the present invention Figure 7 is a side cross-sectional view of a clamping device in accordance with another embodiment of the present invention; Figure 8 is a perspective view of a clamping housing in accordance with one embodiment of the present invention; Figure 9 is another perspective in accordance with the present invention. Fig. 1A and Fig. 11 are respectively a schematic side view and a front view of a retina carrier according to an embodiment of the present invention; Fig. 12 is a view according to an embodiment of the present invention; A schematic side cross-sectional view of a retina conveyor of another embodiment of the invention; 18 201247510 FIG. 13A isometric side cross-sectional view of a retina conveyor according to yet another embodiment of the present invention; FIG. 14 is a -a side cross-sectional view of a tension adjuster of an embodiment;
® 15疋根據太路bBajL 發月的另一個實施例的張力調節器的 杀意性側截面圖；和 0 1 6和圖1 7公&丨β 乃J疋根據本發明的一個實施例的網膜 弓I導裝置（工藝）的伞石、 7的十面圖和側截面圖。 H* ' Hb ' …Hi〜子通風孔； We〜邊緣區域； Wq〜非處理區域； 110〜驅動輥； 130〜第一引導輥； 21 0〜多孔夾持板； z i u 1〜卞火符敬； 2 3 0〜通J 、230卜子通風管 240卜關斷閥； 【主要元件符號說明】 Η〜通風孔； W〜網膜； L ~處理區域； 100〜網膜保持裝置 120〜固定輥； 200〜夾持裝置； 210a、210b、. 2 2 0〜夹持外殼； 230a、230b、. 240a、240b、. 250〜止回閥； 270〜吹風機； 280〜靜電夾頭； 31 〇 ~感測器； 260〜真空泵； 222〜隔板； 300〜網膜輸送器； 320〜網膜保持單元； 19 201247510 330〜電機； 400~張力調節器； 420〜支撐輥； 440~致動器。 340〜網膜傳送單元； 410〜張力輥； 4 3 0〜測壓元件； 20® 15 杀 杀 疋 杀 杀 杀 杀 b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b b Umbrella arch I guide device (process) of the stone, 7 unilateral and side cross-sectional view. H* 'Hb ' ...Hi~ sub vents; We~ edge area; Wq~ non-processing area; 110~ drive roll; 130~first guide roll; 21 0~ porous holding plate; ziu 1~ 卞火符敬; 2 3 0~通J, 230布子通风管240布关关阀; [Main component symbol description] Η~ venting hole; W~mesh film; L~ processing area; 100~mesh film holding device 120~fixing roller; ~ clamping device; 210a, 210b, . 2 2 0~ clamping housing; 230a, 230b, 240a, 240b, 250~ check valve; 270~ hair dryer; 280~ electrostatic chuck; 31 〇~ sensor 260~vacuum pump; 222~baffle; 300~mesh conveyor; 320~mesh holding unit; 19 201247510 330~ motor; 400~ tension adjuster; 420~support roll; 440~ actuator. 340~mesh transfer unit; 410~ tension roll; 4 3 0~ load cell; 20