TW201231820A - Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments - Google Patents
Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments Download PDFInfo
- Publication number
- TW201231820A TW201231820A TW100144927A TW100144927A TW201231820A TW 201231820 A TW201231820 A TW 201231820A TW 100144927 A TW100144927 A TW 100144927A TW 100144927 A TW100144927 A TW 100144927A TW 201231820 A TW201231820 A TW 201231820A
- Authority
- TW
- Taiwan
- Prior art keywords
- capacitor
- conductor
- ion
- ionization
- resistor
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 194
- 238000005259 measurement Methods 0.000 title abstract description 21
- 239000004020 conductor Substances 0.000 claims abstract description 169
- 230000000737 periodic effect Effects 0.000 claims abstract description 10
- 150000002500 ions Chemical class 0.000 claims description 311
- 230000008901 benefit Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 3
- 239000002243 precursor Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 16
- 238000012545 processing Methods 0.000 abstract description 3
- 230000003750 conditioning effect Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 15
- 230000005672 electromagnetic field Effects 0.000 description 9
- 230000003068 static effect Effects 0.000 description 9
- 238000013459 approach Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 238000009825 accumulation Methods 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 4
- 239000003574 free electron Substances 0.000 description 4
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005865 ionizing radiation Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013642 negative control Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Elimination Of Static Electricity (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US42062910P | 2010-12-07 | 2010-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201231820A true TW201231820A (en) | 2012-08-01 |
Family
ID=45443148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100144927A TW201231820A (en) | 2010-12-07 | 2011-12-06 | Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9588161B2 (enExample) |
| JP (1) | JP5909785B2 (enExample) |
| CN (1) | CN103250312A (enExample) |
| TW (1) | TW201231820A (enExample) |
| WO (1) | WO2012078403A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101969736A (zh) * | 2010-11-03 | 2011-02-09 | 北京聚星创源科技有限公司 | 离子发生系统及控制离子平衡度的方法 |
| JP5909785B2 (ja) | 2010-12-07 | 2016-04-27 | デスコ インダストリーズ, インコーポレイテッド | イオン平衡測定及び調整のための遮蔽されたコンデンサ回路を有する電離平衡装置 |
| DE102011002447B4 (de) * | 2011-01-04 | 2014-07-10 | Ident Technology Ag | Kapazitiver Annäherungsensor sowie Verfahren zur kapazitiven Annäherungsdetektion |
| WO2013085952A1 (en) * | 2011-12-08 | 2013-06-13 | 3M Innovative Properties Company | An ionization monitoring device and method |
| JP5945970B2 (ja) * | 2013-10-23 | 2016-07-05 | Smc株式会社 | イオナイザ及びその制御方法 |
| JP5945972B2 (ja) * | 2013-11-01 | 2016-07-05 | Smc株式会社 | イオナイザ及びその制御方法 |
| TWI479952B (zh) * | 2013-12-10 | 2015-04-01 | Yi Jing Technology Co Ltd | 離子產生裝置之靜電消散能力自我檢測方法 |
| US9356434B2 (en) * | 2014-08-15 | 2016-05-31 | Illinois Tool Works Inc. | Active ionization control with closed loop feedback and interleaved sampling |
| US9557294B2 (en) | 2014-12-19 | 2017-01-31 | Genia Technologies, Inc. | Nanopore-based sequencing with varying voltage stimulus |
| US9863904B2 (en) | 2014-12-19 | 2018-01-09 | Genia Technologies, Inc. | Nanopore-based sequencing with varying voltage stimulus |
| KR101629915B1 (ko) * | 2015-02-17 | 2016-06-13 | (주)동일기연 | 챠지 플레이트 모니터링 장치 |
| US10126262B2 (en) | 2015-09-24 | 2018-11-13 | Genia Technologies, Inc. | Differential output of analog memories storing nanopore measurement samples |
| US11368000B2 (en) | 2017-07-27 | 2022-06-21 | Naturion Pte. Ltd. | Ion generator device |
| US10794863B1 (en) * | 2018-04-16 | 2020-10-06 | Nrd Llc | Ionizer monitoring system and ion sensor |
| EP3620786B1 (en) * | 2018-09-10 | 2022-11-16 | Nrd Llc | Ion sensor |
| US11385263B2 (en) * | 2018-10-18 | 2022-07-12 | S&C Electric Company | Capacitive voltage sensor with a hidden sensing electrode |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3908164A (en) | 1974-10-03 | 1975-09-23 | Xerox Corp | Corona current measurement and control arrangement |
| US4035720A (en) * | 1975-12-31 | 1977-07-12 | Harvey Philip C | Ion gauge system |
| US4757422A (en) * | 1986-09-15 | 1988-07-12 | Voyager Technologies, Inc. | Dynamically balanced ionization blower |
| US4740862A (en) | 1986-12-16 | 1988-04-26 | Westward Electronics, Inc. | Ion imbalance monitoring device |
| US4829398A (en) * | 1987-02-02 | 1989-05-09 | Minnesota Mining And Manufacturing Company | Apparatus for generating air ions and an air ionization system |
| US4872083A (en) * | 1988-07-20 | 1989-10-03 | The Simco Company, Inc. | Method and circuit for balance control of positive and negative ions from electrical A.C. air ionizers |
| US5008594A (en) * | 1989-02-16 | 1991-04-16 | Chapman Corporation | Self-balancing circuit for convection air ionizers |
| US5422573A (en) * | 1990-04-11 | 1995-06-06 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| JPH11159430A (ja) | 1997-11-26 | 1999-06-15 | Mitsubishi Electric Corp | 内燃機関用のイオン電流検出装置 |
| US6252756B1 (en) | 1998-09-18 | 2001-06-26 | Illinois Tool Works Inc. | Low voltage modular room ionization system |
| KR100653256B1 (ko) | 1998-12-22 | 2006-12-01 | 일리노이즈 툴 워크스 인코포레이티드 | 자기-평형 이오나이저 모니터, 및 장애 검출 방법 |
| US6433552B1 (en) * | 1999-04-21 | 2002-08-13 | Bruce T. Williams | Floating plate voltage monitor |
| JP3667186B2 (ja) * | 2000-02-29 | 2005-07-06 | キヤノン株式会社 | 信号転送装置及びそれを用いた固体撮像装置 |
| US6850403B1 (en) | 2001-11-30 | 2005-02-01 | Ion Systems, Inc. | Air ionizer and method |
| US20030218855A1 (en) * | 2002-05-22 | 2003-11-27 | Semtronics | Ionization system with reduced power supply |
| JP2004111310A (ja) * | 2002-09-20 | 2004-04-08 | Nissin Ion Equipment Co Ltd | 基板の帯電電圧計測装置およびイオンビーム照射装置 |
| US6985346B2 (en) | 2003-01-29 | 2006-01-10 | Credence Technologies, Inc. | Method and device for controlling ionization |
| JP3880945B2 (ja) * | 2003-04-15 | 2007-02-14 | アルプス電気株式会社 | 被測定物の帯電電位の評価方法及び評価装置 |
| US7091672B2 (en) * | 2003-06-10 | 2006-08-15 | Lutron Electronics Co., Inc. | High efficiency off-line linear power supply |
| US7197913B2 (en) * | 2003-09-04 | 2007-04-03 | Visteon Global Technologies, Inc. | Low cost circuit for IC engine diagnostics using ionization current signal |
| US7427864B2 (en) | 2004-10-29 | 2008-09-23 | Trek, Inc. | Ion balance monitor |
| DE502005009411D1 (de) | 2005-05-06 | 2010-05-27 | Siemens Building Tech Ag | Verfahren und Vorrichtung zur Flammenüberwachung |
| JP4910207B2 (ja) | 2005-11-25 | 2012-04-04 | Smc株式会社 | イオンバランス調整方法及びそれを用いたワークの除電方法 |
| US7560948B2 (en) | 2006-01-11 | 2009-07-14 | Thermo Keytek LLC | Circuit for minimizing or eliminating pulse anomalies in human body model electrostatic discharge tests |
| JP2008041345A (ja) | 2006-08-03 | 2008-02-21 | Fujitsu Ltd | スポット型イオナイザの評価方法及びスポット型イオナイザ |
| JP2008060429A (ja) * | 2006-08-31 | 2008-03-13 | Toshiba Corp | 基板のプラズマ処理装置及びプラズマ処理方法 |
| US7456634B2 (en) * | 2006-10-26 | 2008-11-25 | Brooks Automation, Inc. | Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments |
| US7729101B2 (en) | 2006-12-04 | 2010-06-01 | Mks, Ion Systems | Method and apparatus for monitoring and controlling ionizing blowers |
| US7649728B2 (en) | 2006-12-20 | 2010-01-19 | Keyence Corporation | Electricity removal apparatus |
| JP5156993B2 (ja) | 2007-02-09 | 2013-03-06 | 独立行政法人産業技術総合研究所 | イオン発生器及び除電器 |
| US7768267B2 (en) * | 2007-07-11 | 2010-08-03 | Brooks Automation, Inc. | Ionization gauge with a cold electron source |
| JP5201958B2 (ja) * | 2007-11-22 | 2013-06-05 | 国立大学法人東京工業大学 | 圧電トランス電極を用いたイオナイザ及びそれによる除電用イオン発生方法 |
| US8686733B2 (en) * | 2007-12-19 | 2014-04-01 | Brooks Automation, Inc. | Ionization gauge having electron multiplier cold emission source |
| EP2252869B1 (en) * | 2008-02-21 | 2018-12-12 | MKS Instruments, Inc. | Ionization gauge with operational parameters and geometry designed for high pressure operation |
| US9887069B2 (en) * | 2008-12-19 | 2018-02-06 | Lam Research Corporation | Controlling ion energy distribution in plasma processing systems |
| US8324905B2 (en) * | 2010-03-01 | 2012-12-04 | Woodward, Inc. | Automatic variable gain amplifier |
| US20120043972A1 (en) * | 2010-08-20 | 2012-02-23 | Arun Jayaraman | Method and circuit for reducing noise in a capacitive sensing device |
| JP5909785B2 (ja) | 2010-12-07 | 2016-04-27 | デスコ インダストリーズ, インコーポレイテッド | イオン平衡測定及び調整のための遮蔽されたコンデンサ回路を有する電離平衡装置 |
| US9437093B2 (en) | 2011-10-06 | 2016-09-06 | Microchip Technology Incorporated | Differential current measurements to determine ION current in the presence of leakage current |
| WO2013085952A1 (en) | 2011-12-08 | 2013-06-13 | 3M Innovative Properties Company | An ionization monitoring device and method |
| US9189940B2 (en) | 2011-12-14 | 2015-11-17 | Microchip Technology Incorporated | Method and apparatus for detecting smoke in an ion chamber |
-
2011
- 2011-11-29 JP JP2013543206A patent/JP5909785B2/ja active Active
- 2011-11-29 WO PCT/US2011/062367 patent/WO2012078403A1/en not_active Ceased
- 2011-11-29 CN CN2011800588499A patent/CN103250312A/zh active Pending
- 2011-11-29 US US13/991,926 patent/US9588161B2/en active Active
- 2011-12-06 TW TW100144927A patent/TW201231820A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US20130271164A1 (en) | 2013-10-17 |
| CN103250312A (zh) | 2013-08-14 |
| JP2014502026A (ja) | 2014-01-23 |
| WO2012078403A1 (en) | 2012-06-14 |
| US9588161B2 (en) | 2017-03-07 |
| JP5909785B2 (ja) | 2016-04-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW201231820A (en) | Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments | |
| US9404945B2 (en) | Ionization monitoring device | |
| US7177133B2 (en) | Method and apparatus for bipolar ion generation | |
| US9125284B2 (en) | Automatically balanced micro-pulsed ionizing blower | |
| JP2016502117A (ja) | ツール内esd事象監視方法および装置 | |
| JP2015526697A (ja) | オフセット回路を有する容量性トランスインピーダンス増幅器 | |
| US11867480B2 (en) | Methods and apparatus for detecting a voltage of a stimulus signal of a conducted electrical weapon | |
| JP6489335B2 (ja) | チャージプレートモニター及びその運用方法 | |
| US20170079125A1 (en) | Control System of a Balanced Micro-Pulsed Ionizer Blower | |
| CN118202254A (zh) | 用于阻抗测量的电路 | |
| CN117665087A (zh) | 采用时分模式在同一物理区执行分离和检测的光电离检测器传感器 | |
| JP6074792B2 (ja) | プラズマ評価装置 | |
| CN103245837B (zh) | 一种支持任意点输出电压的绝缘电阻测量方法及测量装置 | |
| JP6688257B2 (ja) | 帯電プレートモニタ装置 | |
| JP5700261B2 (ja) | 電子機器の変動電界耐性検査装置、電子機器の変動電界耐性検査方法 | |
| JPH09145843A (ja) | 3端子イオンチャンバ | |
| Lo et al. | A wide dynamic range portable 60-Hz magnetic dosimeter with data acquisition capabilities | |
| ILHAN et al. | Determination of corona inception voltages of rod-plane electrode systems | |
| Davies et al. | A composite probe for simultaneous electric field and conducted charge measurements | |
| Kim et al. | Output Voltage Characteristics of HVDC Electric Field Mill Sensor for Different Speed Variables of Rotating Electrode | |
| EP2237058A1 (en) | Corona effluent sensing device | |
| SU1222273A1 (ru) | Измеритель токового воздействи электрического пол на биологически активные точки кожи | |
| Florkowska et al. | Distribution and phase-resolved patterns of partial discharges form in non-uniform electric field in air | |
| TW202045918A (zh) | 包含電離裝置的氣體檢測儀 | |
| Ji et al. | Design of a Control System for Signal Examination for Ion Mobility Spectrometer |