201229520 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於如液晶顯示面板之被檢查體之 電氣測試之探針組裝體。 【先前技術】 作為用於如液晶顯示面板之平板狀被檢查體之電氣測 試之探針組裝體之一，存在專利文獻丨所記載者。 專利文獻1所記載之探針組裝體包含：支承片；複數 個铋針，其係具備分別向帶狀之安裝區域之前後方向（y方 向）延伸之前部區域及後部區域者，且於安裝區域之寬度 了向（Z方向）為上下方向之狀態下於支承片之下側使安裳 區，相對向而並列地配置；細長之支承條，其將該等探^ 之女裝區域於其厚度方向（x方向）貫通而延伸並於兩端部 乂支承片支承，及一對狹縫條’其配置於支承片上並向探 針之排列方向（X方向）延伸。 各狹縫條具備於其長度方向（X方向）空開間隔而向前 ^向延伸且於下方開放之複數條狹縫。支承條於以螺釘 =針之排列方向之支承片（塊體）之各端 =二上收納長度方向之端部。藉此，探針藉由支承條及 側蓋、，且裝於支承片上。 各探針於其一個面上 膜，又，將自前邱ϋ盍&面之—部分之絕緣 冑自刖Μ域之前端部向下方突 壓至被檢查體之電^㈣ =作為推 邶+… 且肿目後部區域之前端 ° χ出之部分作為推壓至薄片狀連接具之配線之後 201229520 端針尖。 探針中’進一步將前部區域及後部區域之一部分分別 收納於一個及另一個狹縫條之狹縫。藉此，可防止各探針 之針尖區域於狹縫條之長度方向位移，從而防止於左右方 向相鄰之探針電氣接觸。 然而’於機械強度之關係上，使狹縫條之狹縫之間距 變小具有限度。然而，於上述先前之探針組裝體中，因探 針之前部區域收納於共通之狹縫條之狹缝，故必需將與探 針之數量為相同數量之狹缝設置於狹縫條中。因此，於上 述先前之探針組裝體中，狹窄間距之狹縫無法形成於狹縫 條中，且無法以狹窄間距配置探針。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開2007-303969號公報 【發明内容】 [發明所欲解決之課題] 本發明之目的在於不使狹縫條之狹縫之間距變小而可 以狹窄間距配置探針。 [解決課題之手段] 本發明之探針組裝體包含：支承片；複數個探針，里 係具備帶狀之安裝區域、自 區域、及自該前部區域向下 述安裝區域之寬度方向為上 之下側使上述安裝區域對向 該安裝區域向前方延伸之前部 方突出之前端針尖者，且於上 下方向之狀態下於上述支承片 而並列地配置；及狹縫條，其201229520 VI. Description of the Invention: [Technical Field] The present invention relates to a probe assembly for electrical testing of an object to be inspected such as a liquid crystal display panel. [Prior Art] One of the probe assemblies for electrical testing of a flat object to be inspected as a liquid crystal display panel is described in the patent document. The probe assembly described in Patent Document 1 includes a support piece, and a plurality of cymbals provided with a front region and a rear region extending in a front-rear direction (y direction) in a strip-shaped mounting region, respectively, and in the mounting region. The width direction (Z direction) is in the up-and-down direction, and the Anshang area is disposed side by side on the lower side of the support piece, and the elongated support strips are used for the thickness of the women's clothing area. The direction (x direction) penetrates and extends and supports the support piece at both end portions, and the pair of slit strips 'are disposed on the support piece and extend in the direction in which the probes are arranged (X direction). Each of the slit strips has a plurality of slits which are spaced apart in the longitudinal direction (X direction) and extend forward and open downward. The support strips are received at the ends of the support sheets (blocks) in the direction in which the screws = the needles are arranged. Thereby, the probe is attached to the support piece by the support strip and the side cover. Each probe has a film on one side of the surface, and the insulating layer from the front part of the surface is protruded downward from the front end of the field to the electric body of the object to be inspected (4) = as a push + ... and the part of the front end of the swollen rear area is pulled out as the end of the 201229520 end needle after pushing the wiring of the sheet-like connector. In the probe, a part of the front region and the rear region are further accommodated in the slits of one and the other slit strips. Thereby, the tip end region of each probe can be prevented from being displaced in the longitudinal direction of the slit strip, thereby preventing electrical contact between adjacent probes in the right and left directions. However, in terms of mechanical strength, there is a limit to making the distance between the slits of the slit strips small. However, in the above-described probe assembly, since the probe front region is accommodated in the slit of the common slit strip, it is necessary to provide the same number of slits as the probe in the slit strip. Therefore, in the above-described probe assembly, slits having a narrow pitch cannot be formed in the slit strip, and the probes cannot be arranged at a narrow pitch. [Prior Art Document] [Patent Document 1] [Patent Document 1] JP-A-2007-303969 SUMMARY OF INVENTION [Problem to be Solved by the Invention] The object of the present invention is to prevent the slits from being slit. Small and can be configured with probes at narrow intervals. [Means for Solving the Problem] The probe assembly of the present invention includes: a support piece; a plurality of probes having a strip-shaped mounting region, a self-region, and a width direction from the front region to the mounting region described below The upper and lower sides are arranged such that the front end of the mounting area extends forwardly toward the mounting area, and the front end needles are arranged side by side in the up-and-down direction on the support piece; and the slit strip is provided.
S 201229520 係配置於上述支承片之前端部τ側者，且具備於左右方向 隔著間隔且於下方開放之複數條狹縫。於左右方向相鄰之 至少2個探針之前部區域之至少_部分收納於共通之狹縫。 收納於上述共通之狹縫之探針之至少丨個之前部區域 亦可相對於上述安裝區域於左右方向及前後方向產生 形。 伸 各狹縫亦可相對於左右方向及前後方向具有角度地延 前部區域之至少一部分收納於上述共通之狹縫之至少 2個探針可具有於前後方向隔著間隔之針尖，亦可具有於前 後方向及左纟方向之兩個方向隔著間隔之針尖。 收納於上料通《上述狹縫之探針之前部區域之至少 一部分亦可於上下方向隔著間隔。 探針組裝體進-步可包含第2狹縫條，其係配置於上 述支承片之後端部下側者，且具備於左右方向隔著間隔且 於下方開放之複數條第2狹縫。於此情形時，各探針進— 步可具備：後部區域，纟自上述安裝區域向後方延伸；及 後端針尖，其自該後部區域向上方突出；上述複數個探針 可屬於具備上述後部區域之至少一部分收納於上述第2狹 縫之複數個第丨探針之帛丨探針群、及具備位於左右方向 相鄰之上述第丨探針之間之複數個第2探針之第2探針群 者。Ϊ第1探針進—步可具備突部，其自上述後 °下方犬出，又，亦可將上述後部區域之至少一部 分收納於上述第2狹縫。各第2探針之上述後部區域亦可 201229520 於位於該第2探針之左方及右方 之第1探針之上述突部之S 201229520 is disposed on the side of the end portion τ before the support piece, and has a plurality of slits which are opened at intervals in the left-right direction and are opened at the lower side. At least a portion of at least two probe front regions adjacent in the left-right direction are accommodated in a common slit. At least one of the front regions of the probes accommodated in the common slit may be formed in the left-right direction and the front-rear direction with respect to the mounting region. The slits may have at least two probes that are angularly extended in the left-right direction and the front-rear direction, and at least two of the probes that are accommodated in the common slit may have a needle tip spaced apart from each other in the front-rear direction, or may have A needle tip is spaced between the front and rear directions and the left and right directions. At least a part of the front region of the probe accommodated in the upper slit may be spaced apart in the vertical direction. The probe assembly further includes a second slit strip which is disposed on the lower side of the end portion of the support sheet and includes a plurality of second slits which are open at intervals in the left-right direction and are open at the lower side. In this case, each probe further includes: a rear region, the cymbal extending rearward from the mounting region; and a rear end needle protruding upward from the rear region; the plurality of probes may belong to the rear portion a second probe group of a plurality of second probes accommodated in the second slit, and a second probe having a plurality of second probes disposed between the second probes adjacent to each other in the left-right direction Probe group. The first probe advancement step may include a projection that is pulled out from the lower rear portion, and at least a portion of the rear region may be accommodated in the second slit. The rear region of each of the second probes may be 201229520 on the protrusion of the first probe located to the left and right of the second probe.
長度方向之各端部之板狀者，且 度方向隔著間隔之部位於該部 及側蓋，其係收納該棒構件之 ，且可拆卸地組裝於上述支承 片之側部。 、_各探針之上述前部區域亦可藉由彈性變形而相對於上 、厂女震區域產生變形。於上述前部區域之中，至少收納於 狹縫之部分電氣絕緣亦可。 、、 [發明之效果] 於本發明之探針組裝體中，因於左右方向鄰接之至少2 個探針之前部區域之至少一部分收納於相同狹縫，故將總 探針數的2分之1以下之狹縫設置於狹縫條中即可，且狹 縫之間之壁之數量變少。因此，可以適當之程度使狹縫之 間距變小’其結果與先前相比可以狹窄間距配置探針。 若收納於上述相同之狹縫之探針之至少1個之前部區 域相對於上述安裝區域於左右方向及前後方向產生變形， 則將此探針之前部區域推壓至狹缝之間之壁上。其結果， 相對於狹縫條之此探針之前部區域之前端（針尖）的位置 維持為固定。 sr* C3；. 7 201229520 右各狹縫相對於左右方向及前後方向具有角度地延 伸，則各探針之前部區域亦根據相對於左右方向及前後方 向=狹縫之角纟而相對於安裝區域對於左；^向及前後方 ^ 而延伸。如此，若前部區域相對於安裝區域因彈性 良形而^曲，則於將前部區域收納於相同之狹縫之探針之 中’ 1個探針將前部區域推壓至狹縫之間之壁上，且其他探 針將則。卩區域推壓至上述1個探針之前部區域。其結果， 即便於狹縫條與前部區域之間存在間隙，亦可使相對於狹 缝條之各前部區域之前端（針尖）之位置維持為固定。 【實施方式】 [關於術語] 於本發明中，於圖丨中，將上下方向稱作上下方向或2 方向，將左右方向稱作將探針之前部區域之側作為前方之 前後方向或γ方向，將紙f方向稱作左右方向& X方向。 然而，該等方向根據接收於如工作台之平板接收裝置上之 被檢查體之姿勢而不同。 因此，將探針單元及探針組裝體於本發明中所謂上下 方向（Z方向）實際為上下方向之狀態 '上下相反之狀態、 傾斜方向之狀態等任一方向之狀態下安裝於測試裝置而使 用0 [探針單元之實施例] 參照圖1 ’探針單it 1G係將-部分用於圖i及圖5所 不之被檢查體12之點亮檢查。被檢查體丨2係封入有液晶 之液晶顯示面板’且具有長方形之形狀，X，至少於與: 201229520 方形之2個邊對應之緣部以特定之間距形成複數個電極 4各電極14具有向與配置有其之緣部正交之X方向或γ 方向延伸之帶狀之形狀。 探針單7L 1 0包含：板狀之探針基座丨6，其安裝於測試 裝置之本體框架（未圖示）中；支承台18,其於向左右方 向延伸之狀慼下配置於探針基座丨6之前端部上側；複數個 冗十裝置20 (於圖1中表示丨個），其於左右方向隔著間 隔而載置於支承台18上；板狀之轉接基座22，其配置於探 針基座16之上；及轉接基板24，其配置於轉接基座22之 上。 探針基座16於向配置有被檢查體12之電極14之1個 緣部之長度方肖（於圖示之例中為左右方向）延伸且厚度 方向為上下方向《狀態了，純或介隔如板狀基座之適當 之構件安裝於上述之本體框架上。 支承台18藉由向左右方向延伸之板狀之主體部18&、 自體°卩之左右方向之端部向下方延伸之一對腳部 ⑽、18b形成為門型。藉此，支承台18具有於前方、後方 及下方開放之空間26(參照圖υ 。支承台18自下方向方 貫通於探針基座16之左右方向相隔之部位，而藉由螺合於 腳部18b、18b上之-對螺釘構件（未圖示），安裝於探針 基座1 6之上。 於圖不之例中，支承台18於複數個探針裝置20中為 共通。因此，探針裝置20於左右方向相隔而安裝於主體部 18a之上。然巾，亦可於每i個、2個或3個探針裝置2〇 201229520 上设置支承台1 8。 各探針裝置2G包含：探針組裝體3();支承塊體^ , 八對探針組裝體30進行支承；連結錢34，其對支承 3且2:打支承;結合塊體36，其支承於支承塊體32之下側， 裝體Μ組裝於支承塊體32上；及連接塊體38， 具配置於支承塊體32與结人M麯μ夕„ 塊體32之下侧。…塊體％之間，且安裝於支承 如圖2至圖4所示，探針組裝體3〇 =作為板狀之複數個第⑽及複數個= 、方向隔者間隔而向前後方向延伸之狀態τ，交 配置於塊體狀之支承片44之 装之第^及第2狹縫…I: 4方向隔德^ 至少外周面具有電氣絕緣性之棒構件5〇 態下插通於第i及第2之探針4〇及4…第： 針4〇及42藉由棒構件50及52、收納該等棒構件5〇及:2 :各端部之板狀之側蓋54、及位於側蓋Μ之外側之板狀之 '、他側蓋56而組裝於支承片44中。 卜各第1探針糾如® 13⑻所示，具備：針主體部， 即：裝區域4〇a，其為矩形之板狀；前部區域，其自安 :區：40a向前方一體地延伸為懸臂梁狀；後部區域恢， 化自女襄區域4〇a向後方一體地延伸為懸臂梁狀；前端針尖 小其自則邛區域40b之前端向下方—體地延伸；後端針 尖恢其自後部區域術之後端向上方一體地延伸；及舌 片狀之大部40f，其自後部區域4〇c向下方突出並且向前後 201229520 方向延伸。 各第2探針42如圖13 ( c )所示，係刀片型之針，其 具備：板狀之針主體部，即安裝區域42a，其為矩形；前部 區域42b’其自安裝區$仏向前方一體地延伸為懸臂梁 後σ卩區域42c ’其自安裝區域42a向後方一體地延伸為 懸臂梁狀’·前端針尖42d ’其自前部區域4孔之前端向下方 一體地延及後端針尖42e，其自後部㈣仏之後端向 上方體地延伸。然而，各第2探針42不具備與第！探針 40之突部40f對應之突部。 前部區域40b、42b與後部區域4〇c、42c具有較安裝區 域術、42a之寬度尺寸小之寬度尺寸，又，自安裝區域術、 42a之對應之前端下部或後端中央部延伸為懸臂梁狀。前端 針尖40d、42d及後端針尖4〇e、42e形成為三角形，且較尖 銳。 第1探針40及第2探針42之各自於安裝區域術或 42a之中央部具有棒構件5〇貫通之圓形之貫通孔心或 42g，並且於安裝區域術&仏之前部具有棒構件η貫通 且較貫通孔4Gg、42g小之圓形之貫通孔.或心。 第1及第2探針40及42具有相同厚度尺寸，又，於 左右方向之各面具有電氣絕緣膜。至少前部區域―、似 及後部區域術、42e相對於相對應之安裝區域術或仏 可產生彈性變形。 有 如圖2至圖4、圖9至圖11等所示 電氣絕緣性之陶瓷、合成樹脂等製作 支承片44藉由具 又’於後端部下 11 201229520 側具有於下方'左方及右方開放夕播 7网取：之槽，即凹部64 (參as圖 2) ° … 第1及第2狹縫條46及48藉由具有電氣絕緣性之陶 瓷、合成樹脂等製作。位於前方之第！狹縫條46及位於後 方之第2狭縫條48分別藉由螺合固定、接著等適當之方法 安裝於支承片44之前端部下側及後端部下側。 第1狹縫條46具有自其前端部上表面向上方突出且向 左右方向延伸之抵接部66 (參照圖2、圖9及圖ι〇 )，且 將抵接部66抵接於支承片44之前面下部。藉此，第i狹 縫條46與支承片44定位於前後方向。 第2狹縫條48具有自其後端部上表面向上方突出且向 左右方向延伸之抵接部68 (參照圖2、圖9及圖ι〇)，且 將抵接部68插入至支承片44之凹部64，而使抵接部68抵 接於形成凹部64之朝向前面之面。藉此，第2狹縫條48 與支承片44定位於前後方向。 如圖5至圖11等所示’第1狹縫條46具備於左右方 向隔著間隔而相對於前後方向及左右方向具有角度地傾斜 地延伸之複數條第1狹縫6〇 (參照圖丨丨（b ))。第2狹 縫條48具備於左右方向隔著間隔而向前後方向延伸之複數 條第2狹缝6 2 (參照圖11 ( C ))。第1及第2狹縫6 0及 62分別作為於前後方向兩側及下方開放之槽。 各第1狹縫60以於使第1及第2探針40及42之前部 區域40b及42b於上下方向位移之狀態下可收納之方式， 具有與第1及第2探針40及42之前部區域40b及42b之 12 201229520 厚度尺寸幾乎相同之於左右方向之寬度尺寸。 各第2狹縫62以可收納第1探針40之後部區域4〇c 之方式’具有與第1探針40之後部區域4〇c之左右後方之 厚度尺寸幾乎相同之於左右方向之寬度尺寸。第丨及第2 狹縫60及62形成於以相同間距對應之狹縫條46或48。 棒構件50及52於圖示之例中具有圓形之剖面形狀， 又’藉由如陶瓷之硬質之電氣絕緣性材料而形成。然而， 該等棒構件50、52亦可為以電氣絕緣性材料覆蓋導電氣材 料者，又，亦可具有如矩形、六角形等多角形之其他之橫 剖面形狀。於後者之情形時，該等棒構件貫通之各探針及 各側蓋之貫通孔亦具有與該等棒構件之剖面形狀相同之形 狀。 棒構件50插通於探針40及42之貫通孔40g、42g中， 並且將各端部收納於設置於内側之側蓋54上之孔(來 照圖2 )中，而以此側蓋54支承。棒構件52亦插通於探針 4〇及42之貫通孔40h、42h中，並且將各端部收納於設置 於内側之側蓋54上之孔54b (參照圖2)中，而以此側蓋 5 4支承。 第1及第2探針40及42於安裝區域4〇a及42a之厚度 方向為左右方向且交替地位於左右方向之狀態下，與第丄 及第2狹縫條46及48並列地配置。 各第1狹縫60如圖5、圖6(A)、圖7所示，於使1 組第1及第2探針40及42之前部區域4〇b及42b之一部 分於上下方向相隔之狀態下收納該等。各第2狹縫62收納The plate shape of each end portion in the longitudinal direction is located at the portion and the side cover at intervals in the longitudinal direction, and the rod member is housed and detachably assembled to the side portion of the support piece. The front region of each of the probes may also be deformed relative to the upper and the factory female earthquake regions by elastic deformation. At least the portion of the front portion that is accommodated in the slit may be electrically insulated. [Effects of the Invention] In the probe assembly of the present invention, at least a part of the front region of at least two probes adjacent to each other in the left-right direction is accommodated in the same slit, so that the total number of probes is 2 points. The slits of 1 or less may be disposed in the slit strips, and the number of walls between the slits is reduced. Therefore, the pitch of the slits can be made small to an appropriate extent. As a result, the probes can be arranged at a narrow pitch as compared with the prior art. When at least one front region of the probe accommodated in the same slit is deformed in the left-right direction and the front-rear direction with respect to the mounting region, the front region of the probe is pushed to the wall between the slits. . As a result, the position of the front end (tip) of the front region of the probe with respect to the slit strip is maintained constant. Sr* C3;. 7 201229520 The right slits extend angularly with respect to the left and right direction and the front and rear direction, and the front regions of the probes are also relative to the mounting area according to the left and right direction and the front and rear direction = the corner angle of the slit. For the left; ^ and the front and rear ^ extend. In this way, if the front region is curved with respect to the mounting region due to the elastic shape, the probe is placed in the probe of the same slit in the front region, and one probe pushes the front region to the slit. On the wall, and other probes will be. The 卩 area is pushed to the front area of the above one probe. As a result, there is a gap between the slit strip and the front portion, and the position of the front end (needle tip) of each of the front regions of the slit strip can be maintained constant. [Embodiment] In the present invention, in the drawings, the vertical direction is referred to as the up-down direction or the 2 direction, and the left-right direction is referred to as the front side of the probe front side as the front front-back direction or the γ-direction. The paper f direction is referred to as the left and right direction & X direction. However, the directions are different depending on the posture of the object to be inspected received on the tablet receiving device such as the workbench. Therefore, in the present invention, the probe unit and the probe assembly are attached to the test device in a state in which the vertical direction (Z direction) is actually in the up and down direction, the state of the up and down direction, and the state of the tilt direction. Use 0 [Example of probe unit] Referring to Fig. 1 'The probe single it 1G system-- portion is used for the lighting inspection of the object 12 to be inspected in Figs. The object to be inspected 2 is a liquid crystal display panel in which a liquid crystal is sealed and has a rectangular shape, and X has at least a plurality of electrodes 4 formed at a predetermined distance from the edge portion corresponding to two sides of the 201229520 square. A strip-like shape extending in the X direction or the γ direction orthogonal to the edge portion. The probe sheet 7L 1 0 includes a plate-shaped probe base 丨6 that is attached to a body frame (not shown) of the test device, and a support table 18 that is disposed under the squatting direction extending in the left-right direction. The upper end of the front end of the needle base 丨6; a plurality of redundant devices 20 (shown in FIG. 1) are placed on the support table 18 at intervals in the left-right direction; the plate-shaped adapter base 22 And disposed on the probe base 16; and the adapter substrate 24 disposed on the adapter base 22. The probe base 16 extends in the longitudinal direction of one edge of the electrode 14 on which the test object 12 is placed (in the illustrated example, the left-right direction), and the thickness direction is the up-and-down direction. A suitable member, such as a plate-like base, is attached to the body frame described above. The support base 18 is formed in a gate shape by one of the pair of leg portions (10) and 18b extending downward from the end portion of the plate-shaped main body portion 18& extending in the left-right direction. Thereby, the support base 18 has a space 26 which is open at the front, the rear, and the lower side (see FIG. 。. The support base 18 penetrates the left and right direction of the probe base 16 from the bottom direction, and is screwed to the foot. The pair of screw members (not shown) on the portions 18b and 18b are attached to the probe base 16. In the example, the support table 18 is common to the plurality of probe devices 20. Therefore, The probe device 20 is attached to the main body portion 18a so as to be spaced apart from each other in the left-right direction. Alternatively, the support table 18 may be provided on every i, 2 or 3 probe devices 2 〇 201229520. Each probe device 2G The invention comprises: a probe assembly 3 (); a support block ^, eight pairs of probe assemblies 30; a connection money 34, which supports the support 3 and 2: a support; a joint block 36 supported by the support block The lower side of the 32 is assembled on the support block 32; and the connecting block 38 is disposed between the support block 32 and the lower side of the block 32. And mounted on the support as shown in FIG. 2 to FIG. 4, the probe assembly 3 〇 = a plurality of (10) and plural = as the plate shape, and the direction of the spacer is The state τ extending in the front-rear direction intersects with the second and second slits of the block-shaped support piece 44. I: 4 direction barriers ^ at least the outer peripheral surface of the rod member 5 having electrical insulation is inserted The probes 4 and 4 of the i-th and the second are: the needles 4 and 42 are accommodated by the rod members 50 and 52, and the rod members 5 are accommodated: 2: the plate-like side cover of each end 54. The plate-shaped side of the side cover 、 and the side cover 56 are assembled in the support piece 44. Each of the first probes is as shown in Fig. 13 (8), and includes a needle main body portion, that is, a mounting region. 4〇a, which is a rectangular plate shape; the front region, its self-safety: zone: 40a extends integrally into a cantilever beam shape toward the front; the rear region is restored, and the rearward region is extended from the son-in-law region 4〇a to the rear. a cantilever beam shape; the front end needle tip is small and extends from the front end of the sacral region 40b downwardly to the body; the rear end needle tip retracts from the rear region and extends rearward integrally; and the tongue-shaped portion 40f is self- The rear region 4〇c protrudes downward and extends forward and backward in the direction of 201229520. Each of the second probes 42 is a blade type needle as shown in Fig. 13(c), which has a needle. The plate-shaped needle main body portion, that is, the mounting portion 42a, which is rectangular; the front portion 42b' integrally extends from the mounting region $仏 toward the front to the cantilever beam rear σ卩 region 42c' which is integrated from the mounting region 42a toward the rear. Extending into a cantilever beam shape, the front end needle tip 42d is integrally extended downward from the front end of the front region 4 hole and the rear end needle tip 42e, and extends from the rear end of the rear portion (four) to the upper body. However, each second probe The needle 42 does not have a projection corresponding to the projection 40f of the first probe 40. The front regions 40b, 42b and the rear regions 4〇c, 42c have a width dimension smaller than the width of the mounting region 42a, and The cantilever beam shape extends from the mounting area, 42a corresponding to the front lower end or the rear end central portion. The leading end tips 40d, 42d and the trailing end tips 4〇e, 42e are formed in a triangular shape and are sharp. Each of the first probe 40 and the second probe 42 has a circular through-hole or 42g through which the rod member 5〇 penetrates in the central portion of the mounting region or 42a, and has a rod in the front portion of the mounting region & The member η penetrates and is smaller than the through holes 4Gg and 42g, and has a circular through hole or a core. The first and second probes 40 and 42 have the same thickness and an electrically insulating film on each of the left and right directions. At least the anterior region, and the posterior region, 42e may be elastically deformed relative to the corresponding mounting region or sputum. The support sheet 44 made of an electrically insulating ceramic or synthetic resin as shown in FIG. 2 to FIG. 4, FIG. 9 to FIG. 11 or the like is opened on the left side and the right side of the lower end portion 11 201229520 side. The shovel 7 is taken as a groove, that is, the concave portion 64 (see FIG. 2). The first and second slit strips 46 and 48 are made of ceramics, synthetic resin, or the like having electrical insulation properties. Located in front of the first! The slit strip 46 and the second slit strip 48 located at the rear are respectively attached to the lower side of the front end portion and the lower end portion of the front end portion of the support piece 44 by screwing and fixing, and the like. The first slit strip 46 has an abutting portion 66 that protrudes upward from the upper surface of the front end portion and extends in the left-right direction (see FIGS. 2, 9 and 9), and abuts the abutting portion 66 against the supporting piece. 44 before the lower part. Thereby, the i-th slit 46 and the support piece 44 are positioned in the front-rear direction. The second slit strip 48 has an abutting portion 68 that protrudes upward from the upper surface of the rear end portion and extends in the left-right direction (see FIGS. 2, 9 and 9), and inserts the abutting portion 68 into the supporting piece. The recess 64 of the 44 abuts the abutting portion 68 against the front surface of the recess 64. Thereby, the second slit strip 48 and the support piece 44 are positioned in the front-rear direction. As shown in FIG. 5 to FIG. 11 and the like, the first slit strip 46 includes a plurality of first slits 6 倾斜 extending obliquely with respect to the front-rear direction and the left-right direction at intervals in the left-right direction (see FIG. (b)). The second slit 48 has a plurality of second slits 6 2 extending in the front-rear direction at intervals in the left-right direction (see Fig. 11(C)). The first and second slits 60 and 62 are respectively grooves which are open on both sides and the lower side in the front-rear direction. Each of the first slits 60 has a state before the first and second probes 40 and 42 so that the first and second probes 40 and 42 can be accommodated in a state in which the front regions 40b and 42b are displaced in the vertical direction. 12 of the portion regions 40b and 42b 201229520 The thickness dimension is almost the same as the width dimension in the left and right direction. Each of the second slits 62 has a width which is almost the same as a thickness dimension of the left and right rear sides of the rear portion 4c of the first probe 40 so as to accommodate the rear portion 4c of the first probe 40. size. The second and second slits 60 and 62 are formed in slit strips 46 or 48 corresponding to the same pitch. The rod members 50 and 52 have a circular cross-sectional shape in the illustrated example, and are formed by a hard electrically insulating material such as ceramic. However, the rod members 50, 52 may be made of an electrically insulating material covering the conductive gas material, or may have other cross-sectional shapes such as a rectangular shape, a hexagonal shape or the like. In the latter case, the probes through which the rod members pass and the through holes of the side covers also have the same shape as the cross-sectional shape of the rod members. The rod member 50 is inserted into the through holes 40g and 42g of the probes 40 and 42, and the respective end portions are housed in the holes (see FIG. 2) provided on the inner side cover 54, and the side cover 54 is used. Support. The rod member 52 is also inserted into the through holes 40h and 42h of the probes 4A and 42, and the respective end portions are housed in the holes 54b (refer to FIG. 2) provided on the inner side cover 54, and the side is The cover 54 is supported. The first and second probes 40 and 42 are arranged side by side with the second and second slit strips 46 and 48 in a state in which the thickness directions of the mounting regions 4a and 42a are in the left-right direction and alternately in the left-right direction. As shown in FIGS. 5, 6(A) and 7 , each of the first slits 60 is formed such that one of the first and second probes 40 and 42 in the front region 4 〇 b and 42 b is separated from each other in the vertical direction. Store these in the state. Each of the second slits 62 is received
13 S 201229520 1個第1探針40 之後部區域42c 延伸。 之後部區域4〇c之一部分。各第2探針42 '鄰之兩個第1探針40之突部4〇f之間 各第1探針40夕a# 於左右方6 刖。區域40b於第1狹縫60内相對 歹、左右方向及前後方向 耵 後部區域40c於第2狹縫角度地延伸。各第1探針40之 Λ, 狹縫Μ内於前後方向延伸。各第丨探 針4〇之前端針尖40d於鉍哲 合弟 方延伸。各第！搲斜/ 狹縫60更前方之位置向下 第 〇之後端針尖40e及突部40f分別自 第2狹縫62向後方及下方突出。 1 # Γ第2彳木針42之前部區域42b於其前端針尖42d自第 二:縫6。之前後方向之中途向前方突出之狀態下第 丨 狹縫60内並較第丨_ 木十〇之前部區域40b之高度位置更 前後方向延伸。各第2探針42之後部區域42c以後 '仏自第2狹縫62向後方突出而向上方延伸之方 Χ ’於相鄰之第1探針40之突部仙之間向前後方向延伸。 第1探針40之前端針尖4〇d及後端針纟他之位置分 另位於較第2探針42之前端針尖似及後端針尖42e更前 2 °因此’第1探針4G之前端針尖_及後端針尖他、 、第2探針42之前端針央42d及後端針尖a雖於前後方 向隔著間隔，但可使第i及第2探針4()及42之前後方向 之長度尺寸’尤其是有效電氣長度相同。 兄第1及第2探針4〇及42之前端針尖4〇d及㈣因以 ”引鳊針穴40d對於前後方向之第j狹縫6〇之角度0 (參 照圖U (B))相同之角度而相對於前後方向傾斜地延伸、 201229520 42d更前方，故於左右方 及前端針尖40d位於較前端針尖 向亦空開間隔。 貝蓋54、56纟電氣絕緣材料或導電氣材料製作為板 。如圖2所示，位於内側之各侧蓋M將通過探針之貫通 孔 40g 、 42g 及 4〇h 、 42h 舟 之榉構件50及52之端部收納於 貝通孔54a及54b中，從而可仿狡上丄+ 7， 攸叩·J位移地支承探針40、42。 側盖5 4、5 6貫通於兮笼jn,\ c Λ 卜 逋於°玄4側盍54、56之前後方向隔著 間隔之部位，並藉由如螺人 ^ 磲σ於支承片44上之螺栓之銷狀之 複數個螺釘構件65 (參昭圖1另圖1^ …團1及圖2)，而可拆卸地安裝 於支承片44之左右方向之側面。 'J蓋5 4又，貫通於前後方向隔著間隔而設置於側蓋 及支承片44上之複數個貫通孔70 (參照圖2 )，而藉由 到達至另一側之側蓋54上於前後方向隔著間隔而設置之其 他複數個貝通孔7〇 (參照圖2 )之定位銷72 (參照圖。， 對支承片44進行定位。 上述之結果，第1及第2探針4G及42可藉由棒構件 5〇及52 '側蓋54及56、螺釘構件65、定位銷72等，間 隔地組裝於支承片44卜，作&玉+丄丄一 t 入上’從而決疋左右方向及前後方向之 位置。 各探針藉由將棒構件50及52組裝於側蓋54及56上、 將第1及第2狹縫條w及48組裝於支承片44上、且將側 蓋54、56組裝於支承片44上，而組裝並保持於支承片44 上0 於圖中，以相鄰之探針於左右方向空開較大間隔之方 •3v 15 201229520 式表示’但實際上探針之排列間距較小。探針之數量、厚 度尺寸及排列間距、以及狹縫條之狹縫之數量'配置間距 及寬度尺寸根據被檢查體之種類尤其電極之配置間距與寬 度尺寸而不同。 探針組裝體3〇可藉由將第1及第2探針40及42於上 述之狀態下安裝於狭縫條46及48上，並與其並行或於其 前後將兩個狹縫條46、48於上述之狀態下安裝於支承片44 上，且將該後側蓋54、56以螺釘構件75於上述之狀態下 安裝於支承片44上而組裝。 再人參照圖1 ’將支承塊體3 2藉由板狀之2個支承部 32a及32b製作為l字狀之剖面形狀。連結塊體34藉由安 裝於支承台18上之主體部34a、及自主體部3牦之上部向 前方延伸之延長部34b，而具有倒L字狀之形狀。 結合塊體36藉由適當之結合具78安裝於支承塊體32 承P 3 2 b之下側，且探針組裝體3 〇藉由如將結合塊體 ^自上方至下方貫通而螺合於支承片44上之螺釘構件之適 當的結合具（未圖示）而組裝於結合塊體36之下側。 於圖不之例中表示了例如日本專利特願2009-174248 所記載者作為結合具78’但亦可係將支承塊體32之支承部 32b於上下方向貫通而螺合於結合塊體％上之螺釘構件。 將支承塊體32藉由於左右方向隔著間隔而向上下方向 延伸之-對導執80、及於兩導軌8〇之間向上下方向延伸之 滑軌82,而可向上下方向移動地連結於連結塊體μ之主體 P a之刖面’並且藉由螺釘84可調整上下方向之位置地 16 201229520 連結於連結塊體34之延長部34b上。 兩導軌80及滑軌82分別為線性導執及線性滑執。兩 導軌80安裝於支承塊體32之支承部32a之後端面。與此相 對，滑軌82以兩導軌80可相對於滑轨82向上下方向移動 之方式配置於左右方向之兩導軌8〇之間，又，安裝於連結 塊體34之主體部34a之前端面。 螺釘84自上方向下方貫通連結塊體34之延長部3外， 又，螺合於形成於支承塊體32中之螺釘孔86中。支承塊 體32藉由於左右方向隔著間隔而配置之一對壓縮線圈彈簧 88 (於圖1中表示其中’ 1個）向下方施力。 各壓縮線圈彈簧88配置於藉由複數個螺釘構件9〇 (於 圖1中表不其中，1個）而安裝於連結塊體34之延長部 之上的板狀之彈簧擠壓件92與支承塊體32之支承部32& 之間。藉此，可藉由調整對連結塊體34之延長部34b之螺 釘84之擰入量，而調整支承塊體32甚至探針組裝體之 南度位置。 彈簀擠壓件92具有自上方插入如螺絲刀之工具之前端 部從而調整螺釘84之旋轉量之貫通孔92a。藉此，因可不 自連結塊體34拆卸彈簧擠壓件92即可進行支承塊體32甚 至探針組裝體30之高度位置之調整，故如此之高度位置之 調整作業變得容易。 連結塊體34藉由將連結塊體34之主體部34a自上方向 下方貝通而螺合於支承台丨8之主體部丨8a上之複數個螺釘 94 (於圖1中表示1個），而可拆卸地安裝於支承台18上。13 S 201229520 One first probe 40 The rear region 42c extends. One part of the rear area 4〇c. Each of the first probes 40 adjacent to each of the second probes 42' is in the left and right sides of the first probe 40. The region 40b extends in the first slit 60 in the horizontal direction, the left-right direction, and the front-rear direction. The rear region 40c extends in the second slit angle. In each of the first probes 40, the slits extend in the front-rear direction. The needle tip 40d at the front end of each of the third probes is extended on the side of the 铋哲. Each! The skew/slot 60 is positioned further forward. The second end needle tip 40e and the projection 40f protrude rearward and downward from the second slit 62, respectively. 1 # Γ 2nd eucalyptus needle 42 front portion 42b is at the front end of the needle tip 42d from the second: slit 6. In the state in which the front and rear directions are protruded forward, the first slit 60 is extended in the front-rear direction from the height position of the front portion 40b. After the rear portion 42c of each of the second probes 42, the side 仏' which protrudes rearward from the second slit 62 and extends upward is extended in the front-rear direction between the projections of the adjacent first probes 40. The position of the tip end 4〇d and the rear end of the first probe 40 is further located at the front end of the second probe 42 and the front end of the second probe 42 is 2° earlier than the rear end needle 42e. Therefore, the front end of the first probe 4G The needle tip _ and the trailing edge tip, the second probe 42 distal end needle 42d and the rear end needle tip a are spaced apart from each other in the front-rear direction, but the i-th and second probes 4() and 42 can be oriented forward and backward. The length dimension 'especially the effective electrical length is the same. Brothers 1st and 2nd probes 4〇 and 42 front end tips 4〇d and (4) because “the angle of the needle pin 40d is the same as the angle 0 of the j-th slit 6〇 in the front-rear direction (refer to Figure U (B)) The angle is inclined obliquely with respect to the front-rear direction, and 201229520 42d is further forward. Therefore, the left and right side and the front end needle tip 40d are spaced apart from each other at the tip end. The bead covers 54, 56, electrical insulating material or conductive gas material are formed as plates. As shown in FIG. 2, the side covers M located on the inner side are accommodated in the through-holes 40a, 42g, and the end portions of the boat members 50 and 52, and the end portions of the boat members 50 and 52 are accommodated in the beacon holes 54a and 54b. The probes 40 and 42 can be supported by the 狡 狡 7,, 7, 攸叩·J displacement. The side covers 5 4, 5 6 are connected to the j cage jn, \ c Λ 逋 逋 ° ° ° 玄 玄 玄 盍 盍 、 、 、 The direction is separated by a portion of the gap, and by a plurality of screw members 65 of a pin shape such as a screw on the support piece 44 (see Fig. 1 and Fig. 1 and Fig. 1 and Fig. 2) Removably attached to the side surface of the support piece 44 in the left-right direction. The 'J cover 514 is further provided on the side cover and the support piece 44 at intervals in the front-rear direction. The through hole 70 (see FIG. 2), and the positioning pin 72 of the other plurality of beacon holes 7 (see FIG. 2) provided at intervals in the front-rear direction by the side cover 54 reaching the other side (refer to The support piece 44 is positioned. As a result of the above, the first and second probes 4G and 42 can be spaced apart by the rod members 5 and 52' side covers 54 and 56, the screw member 65, the positioning pin 72, and the like. It is assembled on the support piece 44, and is placed in the left and right direction and the front-rear direction. Each probe is assembled on the side covers 54 and 56 by the rod members 50 and 52. The first and second slit strips w and 48 are assembled on the support piece 44, and the side covers 54, 56 are assembled on the support piece 44, and assembled and held on the support piece 44 in the figure. The neighboring probes are open at large intervals in the left and right direction. • 3v 15 201229520 The expression indicates 'but the spacing of the probes is actually small. The number of probes, the thickness and arrangement spacing, and the slits of the slit strips The number 'arrangement pitch and width dimension' differ depending on the type of the object to be inspected, in particular, the arrangement pitch and width dimension of the electrodes. The needle assembly 3 can be attached to the slit strips 46 and 48 by the first and second probes 40 and 42 in the above-described state, and the slit strips 46 and 48 can be placed in parallel with or before and after the slits 46 and 48. In the above state, the support piece 44 is attached, and the rear side covers 54, 56 are attached to the support piece 44 by the screw member 75 in the above-described state, and assembled. Referring to FIG. 2 The cross-sectional shape of the L shape is formed by the two support parts 32a and 32b of a plate shape. The connecting block 34 has an inverted L shape by a main body portion 34a attached to the support base 18 and an extended portion 34b extending forward from the upper portion of the main body portion 3''. The bonding block 36 is mounted on the lower side of the support block 32 by the appropriate bonding tool 78, and the probe assembly 3 is screwed by, for example, connecting the bonding block from above to below. A suitable joint (not shown) of the screw member on the support piece 44 is assembled to the lower side of the joint block 36. In the example shown in the drawings, for example, as described in Japanese Patent Application No. 2009-174248, the support portion 32b of the support block 32 may be penetrated in the vertical direction and screwed onto the bonded block %. Screw member. The support block 32 is extended in the up-and-down direction by the space in the left-right direction, and the guide rail 80 and the slide rail 82 extending in the up-down direction between the two guide rails 8 are movable in the vertical direction. The front surface of the main body P a of the block μ is connected and the position of the vertical direction 16 is adjusted by the screw 84. 201229520 is connected to the extension 34b of the connecting block 34. The two guide rails 80 and the slide rails 82 are linear guides and linear slides, respectively. The two guide rails 80 are attached to the rear end surface of the support portion 32a of the support block 32. On the other hand, the slide rails 82 are disposed between the two guide rails 8'' in the left-right direction so that the two guide rails 80 can move in the up-down direction with respect to the slide rails 82, and are attached to the front end surface of the main-body part 34a of the connection block body 34. The screw 84 passes through the extension portion 3 of the connection block 34 from the upper side to the lower side, and is screwed into the screw hole 86 formed in the support block 32. The support block 32 is biased downward by a pair of compression coil springs 88 (in which one of them is shown in Fig. 1) by being disposed at intervals in the left-right direction. Each of the compression coil springs 88 is disposed on a plate-like spring extrusion 92 and supported on a portion of the connection block 34 by a plurality of screw members 9 (one in FIG. 1) Between the support portions 32 & Thereby, the southward position of the support block 32 or even the probe assembly can be adjusted by adjusting the amount of screwing of the screw 84 to the extension portion 34b of the joint block 34. The magazine extruding member 92 has a through hole 92a into which the front end portion of the tool such as a screwdriver is inserted from above to adjust the amount of rotation of the screw 84. Thereby, since the height adjustment of the support block 32 or even the probe assembly 30 can be performed without removing the spring pressing member 92 from the connecting block 34, the adjustment work of such a height position becomes easy. The connecting block 34 is screwed to the plurality of screws 94 (one in FIG. 1) of the main body portion 8a of the support base 8 by connecting the main body portion 34a of the connecting block 34 from the upper side to the lower side. It is detachably mounted on the support table 18.
17 S 201229520 轉接基座22於將厚度方向作為上下方向之狀態下藉由 未圖示之複數個螺釘構件配置於探針基座16上。轉接 24為具有分㈣探針裝置心探針對應之複數根配線（未 圖不）之配線基板。轉接基板24之配線藉由每個探針裝置 2〇均具備之薄片狀之電氣連接具刚而電氣連接於對應之 連接塊體38於支承塊體32之下側向左右方向延伸， 又’配置於結合塊體36之後端部上側與支承塊體32之後 端部下侧之間。連接塊體38藉由於左右方向隔著間隔之複 數個螺釘構件（未圖示）而可分離地安裝於支承塊體Μ之 下側。 電氣連接具1 〇〇具有向前後方向延伸之複數根配線， 又，包含自探針裝置20向後方延伸之薄片狀之第i配線區 域102與自第1配線區域102向後方延伸之薄片狀之第2_ 配線區域104。第i及第2配線區域1〇2及1〇4分別具有於 左右方向隔著間隔而向前後方向延伸之複數根第1 .配線（未 圖示）及複數根第2配線（未圖示）。 第1配線區域102為可撓性印刷配線電路（Fpc (Flexible Printed Circuit))、捲帶式自動接合（TAB( Tape Automated Bonding ))、或將該等組合之複合電路薄片。 第2配線區域為可撓性印刷配線電路（FPC )。第1配線區 域102位於結合塊體36之下侧，又，將驅動被檢查體12 之積體電路（未圖示）配置於中間區域，進一步於結合塊 體3 6之下側向後方延伸。 201229520 如圖 1所示，楚1 , 弟1配線區域102之前端部於第1配線 之前端部於下方露出之狀態下維持於結合塊體36之下表 面、藉此於組裝探針裝置2()之狀態下，將各探針之後端 針尖6推墨至第1配線之前端部而電氣連接（參照圖5 )。 圖1所不，帛1配線區域1 〇2之後端部於藉由將第1 配線區域102於結合塊體36之後端部中向上方及前方翻折 為橫U字狀，而使第1配線區域1G2之配線之後端部 於上方露出之態下，維持於結合塊體36之上表面。 1所示，於第2配線區域丨〇4之前端部位於第丄 配線區域1 〇 2之翻拼邮八+ u + 、 及翎折邛刀之上方之狀態下、及於第2配線 區域104之第2配線之前端部為下方之狀態下，將第2配 線區域104之前端部位維持於連接塊體38之下表面。藉 此，於組裝探針裝置20之狀態下，第2配線區域ι〇2之第 1配線之後端部與帛2配線區域104之帛2配線之前端部相 互推壓而電氣連接。 將第2配線區域104自連接塊體％之後端與探針基座 16之前端之間，向探針基座16之上側引導，又，通過支承 台18之空間26,進一步於探針基座16之上向後方延伸。 第2配線區域1〇4藉由設置於其後端之連接器（未圖 不），而結合於轉接基板24上。該連接器具備經由電氣連 接具100之配線而連接於對應之探針裝置2〇之探針的複數 個端子。該等端子連接於轉接基板24之上述之配線上。 轉接基板24之配線連接於產生測試信號之電氣電路 (未圖示）。測試信號自如此之電氣電路經由電氣連接具 201229520 9 6而供給至探針’使被檢查體12驅動（點意） 於探針組裝體30中 40 ' 42之前部區域40b、42b之至少一 因使於左右方向相鄰之2個探針 部分於前端針尖40d 及42d於前後方向隔著間隔之狀態下，收納於相對於左右 方向及前後方向傾斜地延伸之第i狹縫6G中，故將總探針 數之2分之！以下之第i狹縫60設置於帛】狹縫條牝中 即可。因此，第1狹縫60之間之壁之數量變少，從而可以 適當之程度使第1狹縫60之間距變小。 同樣地’因使各第2探針42之後邹區域42d位於相鄰 之2個探針40之凸部40f之間，故將總探針數之2分之丄 以下之第2狹縫62設置於第2狹縫條48中即可。因此， 第2狹縫02之間之壁的數量變少’從而可使此數量之第2 狹縫62之間距變小。 上述之結果，根據探針組裝體30,與先前相比，可不 使狹縫之間距變小而以狹窄間距配置探針4〇、42。 於探針組裝體30中，又，因各第丨狹縫6〇相對於左 右方向及前後方向具有角度地延伸，故探針4〇、42之前部 區域40b、42b亦相對於安裝區域4〇a、42a於左右方向及前 後方向產生彈性變形而彎曲地延伸。因此，前部區域4〇b、 42b之至少一部分收納於相同第}狹縫6〇中之探針4〇、42 之前端針尖40d、d2d與該等前端針尖4〇d、d2d於前後方 向隔著間隔之情形相互作用而於左右方向相隔。 若前部區域40b、42b藉由相對於安裝區域4〇a、42& 產生彈性變形而彎曲，則於將前部區域收納於相同之第丄 20 201229520 狹縫60中之探針4〇、42之中，1個探針將前部區域推壓至 第1狹縫60之間之壁上，則其他探針將前部區域㈣至上 述1個探針之前部區域。其結果，即 P便於第1狹縫條46與 前部區域之間存在間隙，亦可使相對 了於第1狹縫條46之各 前部區域之前端（針尖）之位置維持為固定。 若相對於前後方向之第1狹縫6〇之& 吃〇υ之角度0(參照圖丨i〕 過小，則相對於安裝區域之前部區域 I A之彈性變形量變少， 且對第1狹縫60之間之壁之1個於石丄 個探針之前部區域的推壓 力、及對該1個探針之前部區域之其 ^〜丹他知針之前部區域的 推壓力變得過小。其結果，相對於第 仰打仏弟1狹縫條46之各前端 針尖之位置變得不穩定。相反地， 右用度Θ過大，則相對 於安裝區域之前部區域之變形量變 〜置雯侍過大，則前部區域有 折損之虞。 其結果’相對於前後方向之第1狹縫60之角度"為 又至60度較佳為5度至3〇度。然而，角度㈣根據分 右方向及前後方向之中之前端針尖40d& 42d之目 :位置、甚至根據分別於左右方向及前後方向中之被檢查 體之電極之位置而決定。 於探針組裝體3 0中 緣性藉由各探針具有電 氣絕緣膜設置於各探針 緣薄片配置於相鄰探針 相鄰之探針接觸之範圍 上。 ’於左右方向相鄰之探針之電氣絕 氣絕緣膜而維持。然而，代替將電 之厚度方向中之兩面，可將電氣絕 之間，亦可將電氣絕緣膜僅設置於 ，例如前部區域、後部區域及突部17 S 201229520 The adapter base 22 is placed on the probe base 16 by a plurality of screw members (not shown) in a state where the thickness direction is the vertical direction. The transfer 24 is a wiring board having a plurality of wirings (not shown) corresponding to the (four) probe device core probes. The wiring of the interposer substrate 24 is electrically connected to the corresponding connecting block 38 and extends in the left-right direction on the lower side of the supporting block 32 by the sheet-like electrical connector provided in each of the probe devices 2', and It is disposed between the upper side of the end after the joint block 36 and the lower side of the rear end of the support block 32. The connecting block 38 is detachably attached to the lower side of the supporting block body by a plurality of screw members (not shown) spaced apart in the left-right direction. The electrical connector 1 has a plurality of wires extending in the front-rear direction, and includes a sheet-shaped i-th wiring region 102 extending rearward from the probe device 20 and a sheet extending rearward from the first wiring region 102. 2nd wiring area 104. Each of the i-th and second wiring areas 1〇2 and 1〇4 has a plurality of first wirings (not shown) and a plurality of second wirings (not shown) extending in the front-rear direction at intervals in the left-right direction. . The first wiring region 102 is a flexible printed wiring circuit (Fpc (Flexible Printed Circuit)), a tape automated bonding (TAB), or a composite circuit sheet in which these are combined. The second wiring area is a flexible printed wiring circuit (FPC). The first wiring region 102 is located below the bonding block 36, and an integrated circuit (not shown) for driving the inspection object 12 is disposed in the intermediate portion, and further extends rearward from the lower side of the bonding block 36. 201229520, as shown in FIG. 1, the front end portion of the wiring area 102 is held in the lower surface of the bonding block 36 in a state where the front end portion of the wiring area 102 is exposed to the lower side, thereby assembling the probe device 2 ( In the state of the probe, the tip end of each probe 6 is pushed to the end before the first wiring to be electrically connected (see FIG. 5). In the case of the first wiring region 102 after the first wiring region 102 is folded upward and forward in the end portion of the bonding block 36, the first wiring region is folded into a U-shape, and the first wiring is formed. After the wiring of the region 1G2 is exposed at the upper side, it is maintained on the upper surface of the bonded block 36. As shown in FIG. 1, in the state in which the end portion of the second wiring region 丨〇4 is located above the 丄 丄 + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + 104 104 In a state where the end portion before the second wiring is below, the front end portion of the second wiring region 104 is maintained on the lower surface of the connection block 38. As a result, in the state in which the probe device 20 is assembled, the end portion after the first wiring of the second wiring region ι2 is pressed and electrically connected to the end portion of the 帛2 wiring region 104 before the wiring. The second wiring region 104 is guided from the rear end of the connection block % to the front end of the probe base 16 to the upper side of the probe base 16, and further passes through the space 26 of the support base 18 to further the probe base. 16 extends upwards. The second wiring area 1〇4 is bonded to the interposer substrate 24 by a connector (not shown) provided at the rear end thereof. The connector includes a plurality of terminals that are connected to the probe of the corresponding probe device 2 via the wiring of the electrical connector 100. The terminals are connected to the above-described wiring of the interposer substrate 24. The wiring of the interposer substrate 24 is connected to an electrical circuit (not shown) that generates a test signal. The test signal is supplied from the electrical circuit to the probe via the electrical connector 201229520 9 6 to drive the object 12 to be inspected (intentionally) at least one of the 40' 42 front regions 40b, 42b of the probe assembly 30. The two probe portions adjacent to each other in the left-right direction are accommodated in the i-th slit 6G extending obliquely with respect to the left-right direction and the front-rear direction in a state in which the distal end needle tips 40d and 42d are spaced apart from each other in the front-rear direction. 2 points of the probe! The following i-th slit 60 is provided in the slit strip 。. Therefore, the number of walls between the first slits 60 is reduced, and the distance between the first slits 60 can be made small to an appropriate extent. Similarly, since the second region 42 after the second probe 42 is located between the convex portions 40f of the adjacent two probes 40, the second slit 62 having a total probe number of 2 or less is set. It is sufficient in the second slit strip 48. Therefore, the number of walls between the second slits 02 becomes small, so that the distance between the second slits 62 of this number can be made small. As a result of the above, according to the probe assembly 30, the probes 4, 42 can be arranged at a narrow pitch without making the distance between the slits smaller than before. In the probe assembly 30, since each of the second slits 6'' is angularly extended with respect to the left-right direction and the front-rear direction, the front portions 40b, 42b of the probes 4, 42 are also opposed to the mounting area 4 a and 42a are elastically deformed in the left-right direction and the front-rear direction, and are curvedly extended. Therefore, at least a part of the front regions 4〇b and 42b are accommodated in the same first slit 6〇, and the distal end tips 40d and d2d are separated from the front end needle tips 4〇d and d2d in the front-rear direction. The interval is separated and separated in the left and right direction. If the front regions 40b and 42b are bent by elastic deformation with respect to the mounting regions 4a, 42&, the probes 4, 42 are accommodated in the same second 20 201229520 slit 60. Among them, one probe pushes the front region to the wall between the first slits 60, and the other probes move the front region (four) to the front region of the one probe. As a result, P allows a gap between the first slit strip 46 and the front portion to be maintained, and the position of the front end (tip) of each of the front regions of the first slit strip 46 can be maintained constant. When the angle 0 (see FIG. 丨i) of the first slit 6 相对 with respect to the front-rear direction is too small, the amount of elastic deformation with respect to the front region IA of the mounting region is small, and the first slit is formed. The pressing force of one of the walls between the 60s in the front region of the probe and the pressing force in the front region of the probe in the front region of the probe is too small. As a result, the position of the tip end of each of the front slits 46 becomes unstable relative to the first slit strip 46. Conversely, if the right-hand width is too large, the amount of deformation relative to the front region of the mounting region becomes too large. The front region has a defect. The result 'the angle of the first slit 60 with respect to the front-rear direction is preferably 5 degrees to 3 degrees to 60 degrees. However, the angle (four) is based on the right direction. And the position of the front end tip 40d & 42d in the front-rear direction: the position is determined based on the position of the electrode of the test object in the left-right direction and the front-rear direction, respectively. The probe has an electrical insulating film disposed on each probe edge sheet configuration The range of the probe adjacent to the adjacent probe is in the range of 'the electrical insulating film adjacent to the probe in the left-right direction. However, instead of the two sides in the thickness direction of the electric, the electrical connection between the two The electrical insulating film can also be disposed only in, for example, the front region, the rear region, and the protrusion
21 S 201229520 於上述實施例中，將2個探針4〇、42之前部區域·、 42b配置於各第！狹縫6〇中，但亦可將！個探針之前 域配置於1條第1狹縫，亦可如P、第2、b探針、第 1第2帛1、第2探針般將3個以上之探針之前部區域 配置於各第1狹縫。 代替使各第2料42之後部區域42c通過突部撕之 間，亦可使各第2探針42之後部區域仏之一部分 應之第2狹縫62令。亦可使第2狹縫62與第i狹縫6"目 同地以相對於左右方向及前後方向具有角度之方式延伸。 參照圖14至圖18，探針組裝體11〇使用圖i3 (c)所 示之複數個第2探針42、與圖15所示之複數個第3探針 112。各第3探針112除了於前部區域112b中設置有倒U 字狀之f曲部112i這-點以外，以與圖13(b)所示之第i 探針40相同之方式形成。 因此，各第3探針112具備：板狀之針主體部，即安 裝區域112a，其為矩形；前部區域lm，其自安裝區域山& 向前方一體地延伸為懸臂梁狀；後部區域U2c，其自安裝 區域112a向後方一體地延伸為懸臂梁狀；前端針尖， 其自前部區域U2b之前端向下方一體地延伸；後端針尖 112e，其自後部區域U2c之後端向上方一體地延伸；舌片 狀之突部112f，其自後部區域112_下方突出並且向前後 方向延伸；貫通孔U2g、112h;及電氣絕緣膜（未圖示）。 探針組裝體110除了第2及第3探針42及112之前部 區域42d及112d於第1狹縫6〇内相對於左右方向及前後 22 201229520 方向具有角度地延伸、及前部區域112d藉由f .曲部mi 於前端側中於前部區域42d之上方延伸以外，與使用第i 及第2探針40及42之探針組裝體3〇為相同構造。 前端針尖112d及後端針尖1126之位置分別位於較前端 針尖42d及後端針尖42e更前方。因此，前端針尖42d及後 端針尖42e、與前端針尖Ud及後端針尖U2e於前後方向 隔著間隔。 根據探針組裝體1 10，亦與探針組裝體3〇同樣地，與 先前相比可不使狹縫之間距變小而以狹窄間距配置探針 4〇、42,又，可使第2及第3探針42及ιΐ2之前後方向之 長度尺寸，尤其是有效電氣長度相同。 ▲上述之實施例中，均為第【狹縫6〇相對於左右方向及 前後方向具有角度，但亦可為如圖19及圖2〇所示之探針 組裝體12〇般使第i狹縫6〇為僅於前後方向延伸之構造。 於，針組裝體120中’使第！探針4〇之前部區域楊相對 ;安裝^ $ 4Ga產生彈性變形，而使其與相鄰之第2探針 42之前部區域42b —併配置於相同第j狹縫6〇中。 又’上述之實施例中’均為使2個探針4〇、42或42、 ⑴之前部區域傷、42b或42b、im酉己置於相同之第i 狹縫60中，但亦可以圖21及圖22所示之探針組裝體i3〇 方式使3個以上之探針1;32、134、136之前部區域un、 U4b、136b配置於相同之第i狹缝6〇中。 於圖21及圖22所示之探針組裝體130中，探針132、 134及136係於前部區域⑽及⑽以及後部區域132c21 S 201229520 In the above embodiment, the two probes 4A and 42 are arranged in the front region and 42b. The slit is 6 inches, but it can also be! The probe front domain is disposed in one first slit, and the front region of three or more probes may be disposed in the same manner as P, second, b probe, first second, and second probes. Each first slit. Instead of the tearing of the rear portion 42c of each of the second materials 42 by the projections, the second slits 62 of one of the rear regions of the second probes 42 may be used. The second slit 62 and the i-th slit 6" may be extended so as to have an angle with respect to the left-right direction and the front-rear direction. Referring to Figs. 14 to 18, the probe assembly 11 uses a plurality of second probes 42 shown in Fig. i3 (c) and a plurality of third probes 112 shown in Fig. 15. Each of the third probes 112 is formed in the same manner as the i-th probe 40 shown in FIG. 13(b) except that the inverted U-shaped curved portion 112i is provided in the front region 112b. Therefore, each of the third probes 112 includes a plate-shaped needle main body portion, that is, a mounting region 112a which is rectangular, and a front region lm which integrally extends from the mounting region mountain & forward to a cantilever beam shape; the rear region U2c, which extends integrally to the rear from the mounting region 112a in a cantilever beam shape; the front end needle tip integrally extends downward from the front end of the front region U2b; the rear end needle tip 112e integrally extends upward from the rear end portion of the rear region U2c The tongue-like projection 112f protrudes from the rear region 112_ and extends in the front-rear direction; the through holes U2g and 112h; and an electrical insulating film (not shown). In addition to the second and third probes 42 and 112, the front region 42d and the 112d extend in the first slit 6A with respect to the left and right direction and the front and rear 22 201229520 directions, and the front region 112d is borrowed from the probe assembly 110. The f-curved portion mi has the same structure as the probe assembly 3A using the i-th and second probes 40 and 42 except that the curved portion mi extends above the front region 42d on the distal end side. The positions of the leading end tip 112d and the trailing end tip 1126 are located further forward than the leading end tip 42d and the trailing end tip 42e, respectively. Therefore, the distal end needle tip 42d and the rear end needle tip 42e are spaced apart from the distal end needle tip Ud and the rear end needle tip U2e in the front-rear direction. According to the probe assembly 1 10, similarly to the probe assembly 3, the probes 4, 42 can be arranged at a narrow pitch without narrowing the distance between the slits, and the second and second The length dimensions of the third probe 42 and the ι 2 in the front and rear directions are particularly the same as the effective electrical length. ▲ In the above embodiments, the first slit [6] has an angle with respect to the left-right direction and the front-rear direction, but may be the same as the probe assembly 12 shown in FIG. 19 and FIG. The slit 6 is a structure that extends only in the front-rear direction. In the needle assembly 120, the first is made! The front portion of the probe 4 is opposed to the yang; the mounting ^ 4 4Ga is elastically deformed so as to be disposed in the same j-th slit 6 与 with the adjacent front portion 42 b of the second probe 42 . In the above-mentioned embodiments, the two probes 4〇, 42 or 42, (1) the front region is injured, 42b or 42b, and the im is placed in the same i-th slit 60, but it is also possible to 21 and the probe assembly i3 shown in Fig. 22, three or more probes 1; 32, 134, 136 front regions un, U4b, and 136b are disposed in the same i-th slit 6A. In the probe assembly 130 shown in FIGS. 21 and 22, the probes 132, 134, and 136 are attached to the front regions (10) and (10) and the rear region 132c.
23 S 201229520 及134c中產生彈性變形，而使前部區域n2b、n4b及i36b 收納於相同之第1狹縫60中，且使後部區域132c、ΐ34〇 及136c收納於相同之第2狹縫之狀態下配置。 前部區域132b、134b及136b分別位於上段、中段及 下段，且後部區域13 2 c、13 4 c及13 6 c分別位於上段 '中段 及下&。前端針尖132d及134d分別位於較前端針尖i34d 及136d更前方，且後端針尖132e及134e分別位於較後端 針尖134e及136e更後方。 根據探針組裝體120及130，亦與探針組裝體3〇、u〇 同樣地，與先前相比，可不使狹缝之間距變小而以狹窄間 距配置探針40、42，又’可使第2及第3探針42及112之 前後方向之長度尺寸’尤其是有效電氣長度相同。 [產業上之可用性] 本發明不僅可應用於封入有液晶之液晶顯示面板，亦 可應用於如液晶顯示面板用之玻璃基板之其他平板狀被檢 查體之電氣測試使用之探針組裝體。 本發明並不限定於上述實施例，只要不脫離申請專利 範圍所記載之主旨則可進行各種變更。 【圖式簡單說明】 圖1係表示使用本發明之探針組裝體之第1實施例之 探針單元之一實施例的圖。 圖2係將圖1所示探針組裝體分解表示之分解立體圖。 圖3係於卸除侧蓋之狀態下自斜前方觀察圖1所示之 探針組裝體之圖。 24 201229520 所示之 圖4係於卸除側蓋之狀態下自斜後方觀察圖 探針組裝體之圖。 2種探針之位置關係 圖5係表示第1及第2狹縫條與 之圖。23 S 201229520 and 134c are elastically deformed, and the front regions n2b, n4b, and i36b are housed in the same first slit 60, and the rear regions 132c, ΐ34〇, and 136c are housed in the same second slit. Configured in the state. The front regions 132b, 134b, and 136b are located in the upper, middle, and lower sections, respectively, and the rear regions 13 2 c, 13 4 c, and 13 6 c are located in the upper section 'the middle section and the lower section', respectively. The front end tips 132d and 134d are located further forward than the front end tips i34d and 136d, respectively, and the rear end tips 132e and 134e are located further rearward than the rear end tips 134e and 136e. According to the probe assemblies 120 and 130, the probes 40 and 42 can be arranged at a narrow pitch without narrowing the distance between the slits as in the case of the probe assemblies 3A and 〇. The length dimension 'in the front and rear directions of the second and third probes 42 and 112 is the same as the effective electrical length. [Industrial Applicability] The present invention can be applied not only to a liquid crystal display panel in which a liquid crystal is sealed, but also to a probe assembly used for electrical testing of other flat-shaped objects to be inspected, such as a glass substrate for a liquid crystal display panel. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an embodiment of a probe unit of a first embodiment using a probe assembly of the present invention. Fig. 2 is an exploded perspective view showing the probe assembly shown in Fig. 1 in an exploded manner. Fig. 3 is a view showing the probe assembly shown in Fig. 1 as seen from the oblique front side in a state where the side cover is removed. 24 201229520 Figure 4 is a view of the probe assembly viewed from the oblique rear side with the side cover removed. Positional relationship between the two types of probes Fig. 5 is a view showing the first and second slit strips.
圖6 ( A )係沿著圖5中之6 A - 6 A綠；π , 令Ui τ之&Α_6Α線而得之剖視圖，（B 係沿著圖5中之6B-6B線而得之剖視圖。 圖7係圖3中之7部分之放大圖。 圖8係圖4中之8部分之放大圖。 >圖9係表示第丨及第2狹縫條與—者之探針之位置關 係之圖。 圖10係表示第1及第2狹縫條與另一者之探針之位置 關係之圖。 ^圖η(Α)係表示支承片以及第1及第2狹縫條之一實 也例之圖’ （Β )係第1狹縫條之仰視圖，（C )係第2狹 縫條之仰視圖。 圖12係表不2種探針之位置關係之圖。 圖13 ( A )係探針之俯視圖，（β )係表示第1探針之 實知例之圖’（C )係表示第2探針之一實施例之圖。 圖14係表示於探針組裝體之第2實施例中之兩探針之 位置關係之圖。 圖1 5係表示於第2實施例中使用之第3探針之一實施 例之圖。 圖16係於圖14中之16部分之放大圖。 圖17係圖14之左側視圖。Figure 6 (A) is a cross-sectional view taken along line 6B-6B of Figure 6 in 6 A - 6 A green; π , Ui τ & Α _6 Α line. Fig. 7 is an enlarged view of a portion 7 of Fig. 3. Fig. 8 is an enlarged view of a portion 8 of Fig. 4. > Fig. 9 shows the positions of the probes of the second and second slit strips Fig. 10 is a view showing the positional relationship between the first and second slit strips and the other probe. Fig. η(Α) shows the support piece and one of the first and second slit strips. The figure of the actual example '(Β) is a bottom view of the first slit strip, and (C) is a bottom view of the second slit strip. Fig. 12 is a diagram showing the positional relationship of the two types of probes. A) is a plan view of the probe, and (β) is a view showing a practical example of the first probe. (C) is a view showing an example of the second probe. Fig. 14 is a view showing the probe assembly. Fig. 1 is a view showing an embodiment of a third probe used in the second embodiment. Fig. 16 is a view showing a portion of the third probe used in the second embodiment. Figure 17 is a left side view of Figure 14.
S 25 201229520 圖1 8係第2實施例之仰視圖。 圖19係表示於探針組裝體之第3實施例 位置關係之圖。 圖20係第3實施例之仰視圖。 圖2丨係表示探針組裝體之第4實施例之 置關係的圖。 圖22係第4實施例之仰視圖。 【主要元件符號說明】 之兩探針之 個探針之位 10 探針單元 12 被檢查體 14 被檢查體之電極 16 探針基座 18 支承台 18a ' 34a 主體部 18b 腳部 20 探針裝置 22 轉接基座 24 轉接基板 26 空間 30 、 110、 120 、 130 探針組裝體 32 支承塊體 32a ' 32b 支承部 34 連結塊體 34b 延長部 26 201229520 36 結合塊體 38 連接塊體 40、42 第1及第2探針 40a ' 42a ' 112a、132a、134a、136a 安裝區域 40b 、 42b 、 112b、132b、134b、136b 前部區域 40c 、 42c 、 112c、132c、134c、136c 後部區域 40d 、 42d 、 112d、132d、134d、136d 前端針尖 40e 、 42e 、 1 12e > 132e、134e、136e 後端針尖 40f、112f 突部 40g、42g、40h、42h、70、92a、112g、112h 貫通孔 44 支承片 46、48 第1及第2狹缝條 50 > 52 棒構件 54 ' 56 側蓋 54a ' 54b 子L 60 ' 62 第1及第2狹縫 64 凹部 65 ' 90 螺釘構件 66、68 抵接部 72 定位銷 78 結合具 80 導軌 82 滑軌 84、94 螺釘 s 27 201229520 86 螺釘孔 88 壓縮線圈彈簧 92 彈簧擠壓件 96 電氣連接具 100 電氣連接具 102 第1配線區域 104 第2配線區域 112、130、132、134、136 探針 112i 彎曲部 28S 25 201229520 Fig. 1 8 is a bottom view of the second embodiment. Fig. 19 is a view showing the positional relationship of the third embodiment of the probe assembly. Figure 20 is a bottom plan view of the third embodiment. Fig. 2 is a view showing the relationship between the fourth embodiment of the probe assembly. Figure 22 is a bottom view of the fourth embodiment. [Description of main component symbols] Position of the probes of the two probes 10 Probe unit 12 Test object 14 Electrode of the test object 16 Probe base 18 Support table 18a ' 34a Main body 18b Foot 20 Probe device 22 adapter base 24 adapter substrate 26 space 30, 110, 120, 130 probe assembly 32 support block 32a ' 32b support portion 34 connection block 34b extension 26 201229520 36 bonding block 38 connecting block 40, 42 first and second probes 40a '42a' 112a, 132a, 134a, 136a mounting regions 40b, 42b, 112b, 132b, 134b, 136b front regions 40c, 42c, 112c, 132c, 134c, 136c rear region 40d, 42d, 112d, 132d, 134d, 136d front end tips 40e, 42e, 1 12e > 132e, 134e, 136e rear end tips 40f, 112f projections 40g, 42g, 40h, 42h, 70, 92a, 112g, 112h through holes 44 Supporting piece 46, 48 First and second slit strips 50 > 52 Rod member 54 ' 56 Side cover 54a ' 54b Sub L 60 ' 62 First and second slits 64 Recessed portion 65 ' 90 Screw members 66, 68 Joint 72 positioning pin 78 joint 80 Rails 82 Slide rails 84, 94 Screws s 27 201229520 86 Screw holes 88 Compression coil springs 92 Spring extrusions 96 Electrical connectors 100 Electrical connectors 102 First wiring area 104 Second wiring areas 112, 130, 132, 134, 136 Probe 112i bend 28