TW201214778A - Substrate for installing semiconductor light emitting component and semiconductor light emitting device using the same - Google Patents

Substrate for installing semiconductor light emitting component and semiconductor light emitting device using the same Download PDF

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Publication number
TW201214778A
TW201214778A TW100132426A TW100132426A TW201214778A TW 201214778 A TW201214778 A TW 201214778A TW 100132426 A TW100132426 A TW 100132426A TW 100132426 A TW100132426 A TW 100132426A TW 201214778 A TW201214778 A TW 201214778A
Authority
TW
Taiwan
Prior art keywords
layer
substrate
semiconductor light
emitting device
silver
Prior art date
Application number
TW100132426A
Other languages
Chinese (zh)
Other versions
TWI514629B (en
Inventor
Mineo Washima
Takao Miwa
Yoshihide Wadayama
Akira Chinda
Kazuhiro Takahata
Tadashi Kawanobe
Norio Okabe
Masanobu Ino
Akira Ohkuma
Original Assignee
Hitachi Cable
Hitachi Cable Prec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable, Hitachi Cable Prec Co Ltd filed Critical Hitachi Cable
Publication of TW201214778A publication Critical patent/TW201214778A/en
Application granted granted Critical
Publication of TWI514629B publication Critical patent/TWI514629B/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

Landscapes

  • Led Device Packages (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Wire Bonding (AREA)

Abstract

The invention provides a substrate for installing a semiconductor light emitting component, which is anti-vulcanized and ensures high reflectance, and the semiconductor light emitting device using the same. The substrate for installing a semiconductor light emitting component includes a substrate (2) comprising a metal portion; and an aluminum reflection layer (4), whose thickness is above 0.02 μm and below 5 μm, disposed at the side of the substrate (2) on which the semiconductor light emitting component is installed.

Description

201214778 六、發明說明: 【發明所屬之技術領域】 本發明財_半導體發光元件絲用基板及使職基板的半導體發 光裝置。 【先前技術】 一般以發光二極體(LED : Light Emitting Diode)、雷射二極體(LD : Laser 表的半導體發光裝置是在以銅為代表的金屬基材、或金屬樹脂複 :二材上安裝LED晶片或LD晶片’並將LED晶片或LD晶片和基材的-心用例如由模具樹脂構成的外包體(envd〇pe)包圍的結構。從基材的外 包體露出的部分成為其中—外部端子’另—外部端子的—端在外包體内, 例如利用接合線與LED晶片或LD晶片電連接。 曰已知如此構造的半導體發光裝置具有以下結構:為了將le〇晶片或⑺ 晶片產生的光有效地發射到外部,在安裝有㈣晶片或LD晶片的基材的 表面形成光反射率高的舰層,將射至到LED晶片或LD晶片的背面(基 材)側的光反射到發射側(專利文獻υ,另夕卜,已知外包體形成有具有所 謂頂斜面的開口部,上述傾斜面在LED晶片或晶片的周圍隨著遠離基 材而遠離LED晶片或LD晶片,在該傾斜面形成選自光反射率高的銀、銀 叙、銀敍的金屬層,雜LED晶片或LD晶片射至到側方的光向開口部的 出口,向進行反射’且將金屬賴氣體阻斷性高的樹脂層包覆,從而防止 硫化氣體等大氣巾軌體進人絲反應而黑化並使反辨下降(專利文獻 2)。 【先前技術文獻】 【專利文獻1】日本特開2007-149823號 【專利文獻2】日本特開2〇1〇_1〇279號 【發明内容】 【發明所欲解決之課題】 &在專利文獻1記_半導紐絲置巾,作為外包觀用的樹脂使疏 化氫等大氣中的氣體穿透’此等氣體和鍍銀層反應而產生硫化等並黑化, 201214778 所以存在綱^層的反射率急劇下降的問題。專利文獻2記載的半導體發光 裝置公開了解決專利文獻1的問題的—種方法,但是如專散獻2記載的 那樣’歸因於外包體雛材料的耐熱性,存在範較限關題。另外,作 為解決專敝獻1關題的其财法,翻了在舰層的表面形成用於防 止硫化的薄有機保護膜。但是,存有在打線接合(* bGnding)前為穩定 打線接合㈣進行電麟洗敎保襲發生劣化或瓣,失讀止硫化之 效果的問題。 本發明的一個目的是提供可未硫化且確保高反射率的半導體發光元件 安裝用基板。 本發明的另一目的是提供可未硫化且確保高反射率的半導體發光 置。 本發明的其他目的通過實施方式和實施例的說明可以明瞭。 【解決課題的方法】 μ 本發明的第1方式為:為了達成上述目的而提供—種半導體發光元件 安裝用基板,料導體發光元件絲縣板具備:紐,錢由金屬部分 形成;以及紹反射層,其厚度為0·02μηι以上5μπι u下,且設在上述基材安 裝有半導體發光元件的面侧。 —本個的第2方式為:為了達壯述目的而提供—種半導體發光元件 安裝用基板’該半導紐光元件絲肖基板賤:紐,其包含金屬部分; 銀層或銀合金層’其厚度為〇 01μιη以上5μιη以下,且設在上述基材安裝有 半導體發光元件的關;以及減射層,其厚麟_6μιη以上_以下, 且设在上述銀層或銀合金層上。 本發明的第3方式為:為了達壯述目的而提供__種半導體發光裝置, 該半導體發絲置具備:上述辭導贿光元件絲贿板;半導體發光 讀,,其安胁上辭導體發光元件安賴基板上;外包體部分,其包圍 上述半導體發光讀安㈣基板的—部分’在上料導體發光元件的周圍 具有,傾斜面或垂直面形成的_,上賴斜轉著雜上述半導體發光 疋件安裝用基㈣雜上述半導體發光元件;以及透紐樹轉,其填充 在上述外包體部分的凹部而密封上述半導體發光元件。 【發明之效果】 201214778 根據本發明,由於在基材表_成了贼騎,軌可 2長期具有高且穩定之反射雛的半導體發光元件絲 ς 導體發光裝置。這是_的反射率在紫外線"達銀的及=^基 具2 &紫外線具有接近銀的反射率’在金射,顏色的均衡良好, 具有僅-人於銀的㊣反射率,並且相比於銀,具有耐藥品 硫化的特性。 _難以弓丨起 【實施方式】 以下,參照圖式對本發明的實施方式進行說明。應予說明,在各圖中, 對實質上具有同-功能的構成要素附註同—舰,省略其重複說明。 (第1〜第10實施方式) 本發明半導體發光元件安裝用基板和半導體發光裝置的實施方式為: 由基材和鋁反射層構成半導體發光元件安裝用基板的實施方式,所述基材 用於安裝半賴發光元件’且細、鋼合金或齡合金構成;所述銘反射 層6¾在基材安裝半導體發光元件的面的至少一部分。 本發明之特點在於由安裝半導體發光元件之至少由金屬構成的基材、 和设在基材之安裝有半導體發光元件的面的至少一部分的鋁反射層所構 成。 從電阻、熱阻的方面考慮,作為基材的金屬較佳為由鋼、或鋼合金構 成的基材。另外,作為基材板的金屬,可以使用42合金等鐵鎳合金、鐵系 框架材。 ' 進而,基材含有金屬部分即可。例如,基材可以使用在樹脂上貼合有 銅的覆銅板。此時,樹脂形成在基材上的形成有鋁反射層的面之相反側的 面。進而,形成有銘反射層的面之相反側的基材的表面可以使用含有與有 機材、無機材進行複合化之物。 〔第1實施方式〕 第1圖是表示本發明第1實施方式的半導體發光元件安裝用基板的示 意刹視圖,符號2是基材,符號4是在基材2的一面包括安裝半導體發光 元件的場所的區域所形成的紹反射層,由此等構成半導體發光元件安裝用 基板。 5 201214778 基材2由金屬或金屬與有機材或無機材的複合材構成。作為金屬的材 料,雖然不限於此,但通用性最高的基材是由銅或銅合金構成的金屬導線 架(lead framed使用銅板作為基材2的情況f,對其厚度沒有限制,可以 參考成本來選定厚度。另外,考慮量產化,則較佳為銅板的環箍材,但也 可以使用短尺寸的片材、以及各種材料。使用複合材作為基材2的情況下, 可以使用樹脂材上貼合有銅板的覆銅板(COpper_cladboard)、該覆銅板的積 層板。作為樹脂,可以使用硬質的板狀的樹脂、薄且具有可撓性的樹脂。 作為代表性樹脂,分別可以舉出玻璃環氧樹脂基板(玻璃布基材樹脂板)、 聚醯亞胺樹脂系等。減射層4的製造方法是用具有減壓壓力調節功能的 蒸鍍裝置通過分批次(batch)處理或連續處理等進行。從反射率的觀點考 慮,鋁反射層4的厚度較佳為〇·〇2μηι以上。 使用銅板作為基材2的情況下,例如長度為i〇〇m、寬度為5〇mm、厚 度為0.2mm ’銘反射層4的厚度例如為〇·〇5μηι。製造時,首先,作為基材 2準備上述尺寸的銅板。接著,使用電阻加熱式的圓筒式的真空蒸鍍裝置形 成鋁反射層4。具體而言,將基材2切割成5〇mmxi5〇mm的短尺寸材料, 將切割後的基材16片以放射狀排列在半徑為3〇〇mm的傘狀的工模夾具 (jig)上,將其在圓筒上配置三組,使用電阻加熱源(輸出功率lkw)作 為銘的蒸鍍源’排氣至真空度為2xl(^Pa,職厚麟⑽一 _反射層 4。作為鋁的蒸鑛源,在負載鎖(i〇ad i〇ck)方式中可以使用電子束方式, 並使用石墨坩堝。通過將耐久性良好的石墨坩堝等適當最佳化,從而可以 連續進行穩定的蒸鍍。在本實施方式中,真空蒸鍍裝置使用了自製機,惟 使用負載鎖方式的蒸鍍機等市售蒸鍍裝置也沒有問題。另外,還可以是能 夠對環箍材進行蒸鍍的連續式蒸鍍裝置。真空蒸鍍裝置只要綜合考慮膜 質、生產率等來適當選擇即可。進而,鋁反射層4的形成方式可以不是蒸 鍍方式。即,可以使用離子鍍法、濺鍍法、金屬包覆法等。 鋁反射層4的膜厚測定是利用二次離子質譜法(SMS : Sec〇ndafy I〇n Mass Spectrometiy)分析來進行。鋁反射層的膜厚為:從表面起到鋁反射層 正下方之基底層的主要構成元件達到該基底層中最大強度的1/2的信號強 度為止的厚度。若上述基材2為鋼時’則使用銅的信號強度。 (本實施方式相關之實施例的評價) 201214778 對銘反射層4,如下碟定硫化特性和反射率。首先,如表1所示,以上 述方法製作改變厚度的紹反射層,測定波長460nm下的初始反射率。在該 波長下,將硫酸鋇的反射率作為100%,將反射率為90%以上作為特別良好 (由◦表示),將小於90%作為差(由X表示)。鋁非常薄時,即厚度為〇 〇1μπι 以下時,受到基底的金屬的反射率(於此是鋼)的影響,反射率降低。接 著,對於硫化特性,對形成了各厚度的鋁反射層4的樣品,將3ppm的HsS (硫化氫)在氣體環境溫度40°C '濕度80%中噴霧96小時(進行按照曰本 工業標準H8502電鍍的耐腐蝕性試驗方法的試驗耐硫化特性是初始反 射率與硫化96小時後的反射率之比。設有紐射層的情況下,沒有相對於 初始反射率下降至小於90%的情形。綜上所述,可以確認作為半導體發光 元件安裝@基板所要求的特性,初始反射率、硫化特性(即,在能夠被硫 化的環境下使驗的反鱗)均良好是減騎的厚度為⑽2μπι以上的情 況。 上應予說明,作為比較例i,確認了在基材上僅設置3μπι的銀層時,確 翻始反射料93%而良好’為。,但在_化試驗後的反射率為29%,大 幅度下降,硫化特性差。作耻較例2,在基材上只設魏雖7μιη)、把 層(0.05μηι)的例子中’峰認了雖然耐硫化特性良好,但初始反射率低至 63%、為 X。 根據本實施方式,由於在基材表面开》成有紹反射層,戶斤以可以獲得未 硫化且長嶋有高且敎的反射雜的轉體發光藉絲縣板及使用 ,基板的半導體發絲置。這是了 _以下特^銘的簡率在紫外 ΐΐϊί銀的3倍以上,並對紫色、紅色、紅外線具有接近銀的反射率, 顏色的_良好’具有僅次於銀的高反射率,且與銀相比難以發 生硫化。 、生冰ϋ上述的半導體發光藉安仙基板進行打線接合,進行氬電槳 :果沒二ΐΐΐ線。對該半發光元件安裝用基板進行硫化試驗, 射::之下虞降:由該結果可知’其對表面細耐性強(抗 述第=:=,的差異’但在後述實施方式中也能得到由上 201214778 〔第2實施方式〕 第2圖是表示本發明第2實施方式的半導體發光裝置的示意剖視圖, 表示使用了第1圖所示半導體發光元件安裝用基板的半導體發光裝置。在 圖中’符號2是基材,4是在基材2的一面形成的鋁反射層,由此等構成半 導體發光元件安裝用基板。在半導體發光裝置中,將此等兩組(2A與4A、 2B與4B)在大致同一面上靠近配置而使用。符號6是安裝在鋁反射層4A 上的半導體發光元件;符號7是將半導體發光元件6與鋁反射層4B電連接 的接合線;符號8是樹脂製的外包體部分,該外包體部分包圍不包括半導 體發光元件6之基材2A、2B靠近的一側,並具有由傾斜面和位於底面的鋁 反射層4A、4B形成的凹部,所述傾斜面在半導體發光元件的周圍隨著遠離 基材而遠離半導體發光元件;符號9是填充在外包體部分8的凹部且密封 半導體發光元件的透光性樹脂部,構成外包體的一部分。在符號9中可以 混合螢光體材料。例如’通過混合釔鋁石榴石(YAG : Yftrium201214778 VI. Description of the Invention: Technical Field of the Invention The present invention relates to a substrate for a semiconductor light-emitting element wire and a semiconductor light-emitting device for a substrate. [Prior Art] Generally, a light emitting diode (LED: Light Emitting Diode) or a laser diode (LD: Laser semiconductor light emitting device is a metal substrate represented by copper, or a metal resin complex: two materials) A structure in which an LED wafer or an LD wafer is mounted and the core of the LED wafer or the LD wafer and the substrate is surrounded by an outer cladding such as a mold resin. The portion exposed from the outer covering of the substrate becomes The external terminal 'the other end of the external terminal is inside the outer casing, for example electrically connected to the LED chip or the LD wafer by means of a bonding wire. 半导体 The semiconductor light-emitting device thus known has the following structure: in order to be a wafer or a (7) wafer The generated light is efficiently emitted to the outside, and a ship layer having a high light reflectance is formed on the surface of the substrate on which the (iv) wafer or the LD wafer is mounted, and light reflected to the back (substrate) side of the LED wafer or the LD wafer is reflected. To the emitting side (Patent Document υ, in addition, it is known that the outer covering body is formed with an opening portion having a so-called top bevel surface which is away from the LED chip or the LD wafer as it moves away from the substrate around the LED wafer or wafer. A metal layer selected from the group consisting of silver, silver, and silver having a high light reflectance is formed on the inclined surface, and the hybrid LED chip or the LD wafer is incident on the exit of the side light toward the opening, and the reflection is performed. The resin layer having a high gas barrier property is coated to prevent the air-conditioner body such as a vulcanized gas from being reacted by the human hair to be blackened and reduced in reverse (Patent Document 2). [Prior Art Document] [Patent Document 1] JP-A-2007-149823 [Patent Document 2] Japanese Patent Laid-Open No. 2〇1〇_1〇279 [Explanation] [Problems to be Solved by the Invention] & Patent Document 1 _ semi-conductive wire towel, as The resin used for the outsourcing is such that the gas in the atmosphere such as deuterated hydrogen penetrates, and the gas reacts with the silver plating layer to cause vulcanization or the like to be blackened, and 201214778 has a problem that the reflectance of the layer is sharply lowered. Patent Document 2 The semiconductor light-emitting device described discloses a method for solving the problem of Patent Document 1, but as described in the exclusive article 2, "the heat resistance of the material of the outer-shelf body is present, and there is a limit." Dedicated to the 1st issue of its financial method , turned over the surface of the ship to form a thin organic protective film to prevent vulcanization. However, there is a stable wire bonding before the wire bonding (* bGnding) (4). A problem of the effect of suppressing vulcanization. An object of the present invention is to provide a substrate for mounting a semiconductor light-emitting device which can be unvulcanized and which ensures high reflectance. Another object of the present invention is to provide a semiconductor light-emitting device which can be unvulcanized and which ensures high reflectance. Other objects of the present invention will be apparent from the description of the embodiments and the examples. [Means for Solving the Problem] μ The first aspect of the present invention provides a semiconductor light-emitting device mounting substrate and a material conductor for the purpose of achieving the above object. The component wire plate includes: a button, the money is formed of a metal portion, and a reflective layer having a thickness of 0·02 μm or more and 5 μm u, and is provided on a surface side of the substrate on which the semiconductor light emitting element is mounted. - The second aspect of the present invention is a semiconductor light-emitting device mounting substrate for providing a semiconductor light-emitting device mounting substrate. The semiconductor light-emitting device has a metal substrate; a silver layer or a silver alloy layer. The thickness is 〇01 μm or more and 5 μm or less, and the semiconductor light-emitting device is mounted on the substrate; and the light-reducing layer is thicker than 6 μm or more and is provided on the silver layer or the silver alloy layer. According to a third aspect of the present invention, in order to achieve the object of the present invention, there is provided a semiconductor light-emitting device comprising: the above-mentioned vocal light brittle plate; semiconductor light-emitting reading; The light-emitting element is disposed on the substrate; the outer package portion surrounding the semiconductor light-emitting read-write (four) substrate has a portion _ surrounding the conductive light-emitting element, and the inclined surface or the vertical surface is formed by _ The semiconductor light-emitting element mounting base (4) is different from the semiconductor light-emitting element; and the through-tree transition is filled in a recess of the outer package portion to seal the semiconductor light-emitting element. [Effects of the Invention] According to the present invention, since the substrate table is a thief rider, the track can be a semiconductor light-emitting element wire 导体 conductor light-emitting device having a high and stable reflection for a long period of time. This is the reflectivity of _ in the ultraviolet " silver and =^ base 2 & ultraviolet light has a near-silver reflectance' in gold, the color is well balanced, with only - human-to-silver positive reflectivity, and Compared with silver, it has the characteristics of resistance to chemical vulcanization. _Easy to make an embodiment [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the respective drawings, constituent elements that have substantially the same function are denoted by the same ship, and the repeated description thereof will be omitted. (First to Tenth Embodiments) An embodiment of a semiconductor light-emitting device mounting substrate and a semiconductor light-emitting device according to the present invention is an embodiment in which a substrate and an aluminum reflective layer are used to form a substrate for mounting a semiconductor light-emitting device, and the substrate is used for A semi-laid light-emitting element is mounted and formed of a fine steel alloy or an aged alloy; the insole reflective layer 63a is at least a portion of a surface on which the semiconductor light-emitting element is mounted on the substrate. The present invention is characterized in that it comprises a substrate made of at least a metal on which a semiconductor light-emitting device is mounted, and an aluminum reflective layer provided on at least a part of a surface of the substrate on which the semiconductor light-emitting element is mounted. The metal as the substrate is preferably a substrate composed of steel or a steel alloy from the viewpoint of electric resistance and thermal resistance. Further, as the metal of the substrate sheet, an iron-nickel alloy such as a 42 alloy or an iron-based frame material can be used. Further, the substrate may contain a metal portion. For example, a copper clad laminate in which copper is bonded to a resin can be used as the substrate. At this time, the resin is formed on the surface of the substrate opposite to the surface on which the aluminum reflective layer is formed. Further, the surface of the substrate on the opposite side to the surface on which the surface of the inscription layer is formed may be one which contains a composite material with a machine material or an inorganic material. [First Embodiment] Fig. 1 is a schematic view showing a semiconductor light-emitting device mounting substrate according to a first embodiment of the present invention, wherein reference numeral 2 denotes a substrate, and reference numeral 4 denotes a semiconductor light-emitting device mounted on one surface of the substrate 2. The reflective layer formed in the region of the place constitutes a substrate for mounting a semiconductor light-emitting element. 5 201214778 Substrate 2 is composed of a composite of metal or metal and organic or inorganic materials. The metal material is not limited thereto, but the most versatile substrate is a metal lead frame made of copper or a copper alloy (lead framed uses a copper plate as the substrate 2), and the thickness thereof is not limited, and the cost can be referred to. In addition, in consideration of mass production, a hoop material of a copper plate is preferable, but a short-sized sheet and various materials may be used. When a composite material is used as the substrate 2, a resin material may be used. A copper clad laminate (COpper_cladboard) and a laminate of the copper clad laminate are attached. As the resin, a hard plate-shaped resin or a thin resin having flexibility can be used. As a representative resin, glass is exemplified. Epoxy resin substrate (glass cloth substrate resin plate), polyimide resin system, etc. The method for producing the light-reducing layer 4 is by batch processing or continuous using a vapor deposition device having a pressure reducing pressure regulating function. The thickness of the aluminum reflective layer 4 is preferably 〇·〇2μηι or more from the viewpoint of reflectance. When a copper plate is used as the substrate 2, for example, the length is i〇〇. m, a width of 5 mm, and a thickness of 0.2 mm. The thickness of the reflective layer 4 is, for example, 〇·〇5μηι. At the time of manufacture, first, a copper plate of the above-described size is prepared as the substrate 2. Next, a resistance-heated cylinder is used. The vacuum evaporation apparatus of the type forms the aluminum reflective layer 4. Specifically, the substrate 2 is cut into a short-sized material of 5 mm mm 5 5 mm, and 16 pieces of the cut substrate are radially arranged at a radius of 3 〇〇. On the umbrella-shaped jig of mm, three sets are placed on the cylinder, and a resistance heating source (output power lkw) is used as the evaporation source of the name. The exhaust gas is 2xl (^Pa,厚厚麟(10)一_Reflective layer 4. As a steam source of aluminum, an electron beam method can be used in the load lock method, and graphite crucible can be used. In the present embodiment, the vacuum vapor deposition apparatus uses a self-made machine, but a commercially available vapor deposition apparatus such as a vapor deposition machine using a load lock method has no problem. It can also be a continuous steaming that can evaporate the hoop material. The vacuum vapor deposition apparatus may be appropriately selected in consideration of film quality, productivity, etc. Further, the aluminum reflection layer 4 may be formed by a vapor deposition method. That is, an ion plating method, a sputtering method, or a metal coating method may be used. The film thickness of the aluminum reflective layer 4 is measured by secondary ion mass spectrometry (SMS: Sec〇ndafy I〇n Mass Spectrometiy). The thickness of the aluminum reflective layer is from the surface to the aluminum reflective layer. The main constituent element of the underlying layer has a thickness up to 1/2 of the maximum intensity of the underlying layer. When the substrate 2 is steel, the signal intensity of copper is used. (In the embodiment of the present embodiment) Evaluation) 201214778 For the reflective layer 4, the vulcanization characteristics and reflectance are determined as follows. First, as shown in Table 1, the above-described method was used to produce a reflective layer having a varying thickness, and the initial reflectance at a wavelength of 460 nm was measured. At this wavelength, the reflectance of barium sulfate is taken as 100%, the reflectance is 90% or more as particularly good (indicated by ◦), and less than 90% is represented as difference (indicated by X). When the aluminum is very thin, that is, when the thickness is 〇 〇 1 μm or less, the reflectance of the metal of the base (in this case, steel) is affected, and the reflectance is lowered. Next, for the vulcanization characteristics, 3 ppm of HsS (hydrogen sulfide) was sprayed for 96 hours at a gas ambient temperature of 40 ° C 'humidity 80% for the sample in which the aluminum reflective layer 4 of each thickness was formed (according to the industrial standard H8502). The test resistance to vulcanization of the corrosion resistance test method for electroplating is the ratio of the initial reflectance to the reflectance after 96 hours of vulcanization. In the case of a contact layer, there is no case where the initial reflectance is reduced to less than 90%. As described above, it is possible to confirm the characteristics required for mounting the substrate as a semiconductor light-emitting element, and the initial reflectance and the vulcanization property (that is, the anti-scale which is tested in an environment capable of being vulcanized) are good, and the thickness of the reduction is (10) 2 μm. In the above case, as a comparative example i, it was confirmed that when only a silver layer of 3 μm was provided on the substrate, it was confirmed that the starting material was 93% and was good. However, the reflectance after the _ test was obtained. 29%, a large drop, and poor vulcanization characteristics. Compared with Example 2, only Wei is set to 7μιη on the substrate, and the layer (0.05μηι) is recognized as the peak. Although the vulcanization resistance is good, the initial Low reflectivity 63% for X. According to the embodiment, since the surface of the substrate is opened to have a reflective layer, the household can be used to obtain an unfluorinated, long-twisted, high-yield, reflective, and reflective substrate. Set. This is _ the following special Ming Ming is more than 3 times the ultraviolet ΐΐϊ 银 silver, and has a reflectivity close to silver for purple, red, infrared, the color _ good 'has a high reflectance after silver, and Vulcanization is less likely to occur than silver. The raw radiant of the above-mentioned semiconductor illuminating wire is bonded by the Anxian substrate, and the argon electric paddle is carried out: there is no second line. The vulcanization test was performed on the substrate for mounting a half-light-emitting element, and the film was observed to have a lower surface resistance (the difference in resistance to the surface =:=, but it can also be described in the later-described embodiment). (2nd Embodiment) FIG. 2 is a schematic cross-sectional view showing a semiconductor light-emitting device according to a second embodiment of the present invention, and shows a semiconductor light-emitting device using the semiconductor light-emitting element mounting substrate shown in Fig. 1. In the semiconductor light-emitting device, two groups (2A and 4A, 2B) are used in the semiconductor light-emitting device, and the symbol "2" is a substrate, and 4 is an aluminum reflective layer formed on one surface of the substrate 2. 4B) is used in close proximity to the configuration. Symbol 6 is a semiconductor light-emitting element mounted on the aluminum reflective layer 4A; reference numeral 7 is a bonding wire electrically connecting the semiconductor light-emitting element 6 and the aluminum reflective layer 4B; An outer cladding portion made of resin, the outer cladding portion enclosing a side close to the substrate 2A, 2B not including the semiconductor light emitting element 6, and having a concave portion formed by the inclined surface and the aluminum reflective layers 4A, 4B located at the bottom surface, The inclined surface is away from the semiconductor light emitting element as it is away from the substrate around the semiconductor light emitting element; the reference numeral 9 is a light transmissive resin portion that fills the concave portion of the outer covering portion 8 and seals the semiconductor light emitting element, and constitutes a part of the outer covering body. The phosphor material can be mixed in symbol 9. For example, 'by mixing yttrium aluminum garnet (YAG: Yftrium)

Garnet)等,LED晶片可使用460nm的GaN系LED而用於擬白色LED裝置。 鋁反射層4可以形成在外包體内側的大致整面、或除去一部分的剩餘 的部分。其理由是因為從發光元件放射的光在外包部分内反射即可。 作為具體方法,有(1)在鋁反射層形成時的成膜裝置中,設置將外包體 區域以外遮蔽的功能;(2)在整面形成鋁反射層後,將外包體部區域通過貼 膜(taping)、或光微影製程等遮蔽,然後,蝕刻除去鋁的方法等各種方法, 可以使用這些中的任意一種。 根據邊結構的半導體發光裝置,透過位於外包體部分8形成的凹部的 底面的銘反射層4A、4B的存在,從半導體發光元件6射至的光藉由銘反射 層4A、4B反射到凹部的開口側,發揮增加來自半導體發光裝置的光量的效 果。如上所述,銘具有良好的耐硫化特性,所以可以長時間維持高反射率。 〔第3實施方式〕 第3圖是表示本發明第3實财式的半導體發光元件安伽基板的示 意剖視圖’其特徵在於’在紐2 _面濕式賴法触軸鎳層Η、 免層18、金_層1〇 ’在基材2的―面的金_層1()上的—部形成銘反 射層4。在基材2上依次形成錄層17、麵層18、金閃鍍層1〇的理由之一是 為了確保基材2與安裝半導體發光裝置的印刷電路基板之間的焊料浸潤 201214778 性,即為了達到焊接接著性的提高。此時,鎳層17的厚度可以為〇 4〜 1·5μηι、鈀層18的厚度可以為〇 〇1〜〇 2μιη、金閃鍍層1〇的厚度可以為〇 以下。此等厚度是本發明人確認了效果的厚度,但可以根據安裝的元件而 進行些微敎。從統雜性峨點考慮,減射層4的厚度較佳為〇 〇2μπι 以上,可以為5μηι左右,但利用乾式電鍍法的情況下,從平坦性的觀點考 慮,較佳為2μπι以下(以下相同)。於此,金閃鍍層不僅是覆蓋基底層的整 面,有時係相對於基底層形成斑點狀。因此,金閃鍍層的反射特性是金層 與其他基底層的混合體。 鋁反射層4的製造方法是用具有減壓功能的蒸鍍裝置,通過分批次處 理或連續處理等來進行。鎳層和鈀層用濕式電鍍法、真空蒸鍍等乾式均可 以仔到本製品所需要的品質的鍍層。濕式電鍍可以在材料的6面整面進行 塗佈,且大多能以低成本製作,所以本發明的鎳層、鈀層較佳以濕式電鍍 來形成。 應予說明,錄層17、把冑18、金閃鋪1〇以濕式電鑛法形成的基底 層的膜厚是通過積算電鍍時的電流值來進行計算。 以防止銅的氧化導致的基材2的變色、通過半導體發光元件安裝用基 板變硬而提高處理特性為目的,該鎳層17的厚度可以取Q 〇降^ 間的值。為了在個焊接安裝元㈣,通過在作為其連接部的部分形絲 層’從而得到良好的焊料浸谢生,可以設置把層。作為把層,大多為〇 〇3哗 〜〇·〇7μπι的厚度’但係根據焊接條件來決定厚度。 本實施方式的效果是通過將鋁用作為反射層,可以確保高反射率。進 而’通過使用G.G2pm以上厚度的減射層4,除了可以得到良好的射久性、 可以維持高反射率的效果以外,還可發揮以下的效果。即,發揮上述數值 =圍的錄層17可以防止基材2的主要材料銅的擴散,上述數值範圍的把層 8可以達絲裝軸無鉛_焊_制性的提高,上縫絲圍的金閃 =10可進-步提高焊接的顏性並可細保料新的效果4卩,通過形 戍這樣的構造’可以得到適合焊接的構造。 〔第4實施方式〕 第4 ®是表林發明第4實财式辭導體發綠置㈣意剖視圖, 疋將第3 ®解辭導體發光元件安朗基板、第2圖的外包體部分8和 201214778 透光性樹脂部9組合後的半導體發光裝置的實施例。第2圖和第3圖的相 同部分用相同符號來表示。 作為基材2A(2A、2B)使用銅板時,準備例如長度為100m、寬度為 50mm、厚度為〇.2mm的銅板,在基材2A、2B的表面通過濕式電鍍法依次 製作厚度為Ιμηι的鎳層17、厚度為Ο.ίμιη的鈀層18、厚度為〇 〇1μηι的金 閃鍍層10。進而’使鋁反射層4(4Α、4Β)殘留金閃鍍層1〇面上之用於焊接 接著的部分,並且在作為反射膜來使用的部分進行部分蒸鍍,得到了在焊 接接著部沒有鋁層、在用於反射的部分有鋁層的材料。然後,利用沖壓機 (press)、触刻製作半導體發光元件安裝用的框架形狀,將兩組(2Α與々a、 2Β與4Β)在大致同一面上靠近配置。然後,形成樹脂製的外包體部分8, 該外包體部分8包圍基材2Α、2Β靠近的部分,並具有將半導體發光元件6 的周邊預先挖通的凹部。接著,用導電性糊料安裝半導體發光元件6,將表 面電極和導線架用金打線接合進行連接。最後,在外包體部分8的凹部内 填充透光性樹脂(矽樹脂等),使其被覆半導體發光元件6,從而形成作為 外包體一部的透光性樹脂部9。 在以上的說明中,製作半導體發光元件安裝用基板後,利用沖壓機、 蝕刻成型為規定形狀,但也可以利用後鍍法。即,可以將基材2Α、2Β成型 為規定形狀後,利用濕式電鍍法在基材上形成各鍍層(1〇、17、18),以真空 蒸鑛法等乾式電鍍法形成铭反射層4。進而,對於基材2八、2Β,對由銅構 成的情況進行說明,但是可以使用在樹脂等上設有銅配線的基材。另外, 從用途、成本等考慮,還可以使用其他的金屬基材,例如鐵系的42合金等。 另外,可以綱印刷電路板、撓性配線板形成步驟來形成配線後形成铭反 射層4(4Α、4Β)而使用。像這樣,根據目的、構造、材料(銅板或具肴可撓 性的撓性樹脂基材)’可以變更形狀的製作(利用沖切加工、彎曲加工、鼓 凸加工等形狀的製作)、電鍍、蒸鍍的順序。 3 所安裝之半導體發光元件6可以安裝例如GaAs_Si_LED、Garnet et al., LED chips can be used for quasi-white LED devices using 460 nm GaN-based LEDs. The aluminum reflective layer 4 may be formed on substantially the entire side of the inner side of the outer package or a portion of the remaining portion. The reason for this is that light emitted from the light-emitting element can be reflected in the outer cladding portion. As a specific method, (1) a film forming apparatus at the time of forming an aluminum reflective layer is provided with a function of shielding the outer covering region; (2) after forming an aluminum reflective layer over the entire surface, the outer covering portion is passed through the film ( Any of these methods, such as masking, or photolithography, and then etching to remove aluminum, may be used. According to the semiconductor light-emitting device having the side structure, the light emitted from the semiconductor light-emitting element 6 is reflected by the insole layer 4A, 4B to the concave portion through the presence of the insole reflective layers 4A, 4B located on the bottom surface of the concave portion formed in the outer package portion 8. The opening side exerts an effect of increasing the amount of light from the semiconductor light-emitting device. As mentioned above, Ming has good resistance to vulcanization, so it can maintain high reflectance for a long time. [THIRD EMBODIMENT] Fig. 3 is a schematic cross-sectional view showing a semiconductor light-emitting device Anga substrate of the third solid-state type of the present invention, which is characterized in that it is a layer of a wet layer of a nickel-plated layer on a New Zealand surface. 18. Gold _ layer 1 〇 'In the portion of the gold layer _ layer 1 () on the surface of the substrate 2 forms the inscription layer 4. One of the reasons for sequentially forming the recording layer 17, the surface layer 18, and the gold flash plating layer 1 on the substrate 2 is to ensure the solder wetting 201214778 property between the substrate 2 and the printed circuit board on which the semiconductor light-emitting device is mounted, that is, in order to achieve Improved solder adhesion. In this case, the thickness of the nickel layer 17 may be 〇 4 to 1·5 μηι, the thickness of the palladium layer 18 may be 〇 〇 1 to 〇 2 μιη, and the thickness of the gold flash plating layer 1 可以 may be 〇 or less. These thicknesses are thicknesses which the inventors have confirmed the effect, but may be slightly entangled depending on the components to be mounted. The thickness of the light-reducing layer 4 is preferably 〇〇2 μm or more and may be about 5 μm, but in the case of the dry plating method, it is preferably 2 μm or less from the viewpoint of flatness (hereinafter). the same). Here, the gold flash plating layer not only covers the entire surface of the underlying layer, but sometimes forms a speckle with respect to the underlying layer. Therefore, the reflective property of the gold flash layer is a mixture of the gold layer and other substrate layers. The method for producing the aluminum reflective layer 4 is carried out by batch processing or continuous treatment using a vapor deposition apparatus having a pressure reducing function. The nickel layer and the palladium layer can be plated by a dry type such as wet plating or vacuum evaporation to obtain the desired quality of the product. The wet plating can be applied to the entire surface of the six faces of the material, and most of them can be produced at low cost. Therefore, the nickel layer and the palladium layer of the present invention are preferably formed by wet plating. Incidentally, the thickness of the underlayer formed by the wet layer method by the recording layer 17, the crucible 18, and the gold flash is calculated by integrating the current value at the time of electroplating. The thickness of the nickel layer 17 can be set to a value of Q 〇 in order to prevent discoloration of the substrate 2 due to oxidation of copper and to improve the processing characteristics by the substrate for mounting a semiconductor light-emitting element. In order to obtain a good solder immersion in a solder mounting element (4) by a portion of the filament layer as its connecting portion, a layer can be provided. The thickness of the layer is usually 〇 〇 3 哗 〇 〇 〇 7 μπι thickness ', but the thickness is determined according to the welding conditions. The effect of the present embodiment is that high reflectance can be ensured by using aluminum as a reflective layer. Further, by using the light-reducing layer 4 having a thickness of G.G2pm or more, in addition to the effect of obtaining good long-term durability and maintaining high reflectance, the following effects can be exhibited. That is, the recording layer 17 having the above numerical value can prevent the diffusion of the main material copper of the substrate 2, and the layer 8 of the above numerical range can be improved by the lead-free soldering of the wire-loaded shaft, and the gold of the upper stitch is surrounded. Flash = 10 can be advanced - step to improve the weldability of the weld and can be used to protect the new effect 4 卩, through the structure of the shape ' can get a suitable structure for welding. [Fourth Embodiment] The fourth embodiment is a cross-sectional view of the greening of the conductor of the fourth embodiment of the invention, and the third embodiment of the conductor light-emitting element Alang substrate, the outer-body portion 8 of the second figure, and 201214778 An embodiment of a semiconductor light-emitting device in which the light-transmitting resin portions 9 are combined. The same portions of the second and third figures are denoted by the same symbols. When a copper plate is used as the base material 2A (2A, 2B), for example, a copper plate having a length of 100 m, a width of 50 mm, and a thickness of 0.2 mm is prepared, and the thickness of the substrate 2A, 2B is sequentially formed by wet plating to a thickness of Ιμηι. A nickel layer 17, a palladium layer 18 having a thickness of Ο. ίμιη, and a gold flash plating layer 10 having a thickness of 〇〇1μηι. Further, 'the aluminum reflective layer 4 (4Α, 4Β) was left on the surface of the gold flash plating layer 1 for soldering the subsequent portion, and the portion used as the reflective film was partially vapor-deposited, and no aluminum was obtained at the solder joint. A layer, a material having an aluminum layer in a portion for reflection. Then, the frame shape for mounting the semiconductor light-emitting device was formed by press and etch, and the two groups (2Α, 々a, 2Β, and 4Β) were placed close to each other on substantially the same surface. Then, a resin-made outer covering portion 8 is formed which surrounds a portion where the base material 2Α, 2Β is close to each other, and has a concave portion for excavating the periphery of the semiconductor light-emitting element 6 in advance. Next, the semiconductor light-emitting device 6 was mounted with a conductive paste, and the surface electrode and the lead frame were joined by gold bonding. Finally, a light-transmissive resin (such as a resin) is filled in the concave portion of the outer covering portion 8 to cover the semiconductor light-emitting element 6, thereby forming a light-transmitting resin portion 9 as one of the outer covering members. In the above description, the semiconductor light-emitting device mounting substrate is produced and then formed into a predetermined shape by a press or etching, but a post-plating method may be used. That is, after the base material 2Α and 2Β are formed into a predetermined shape, each plating layer (1〇, 17, 18) is formed on the substrate by wet plating, and the inscription layer 4 is formed by dry plating such as vacuum distillation. . Further, the case where the base material 2 is eight or two turns and is made of copper is described. However, a base material provided with a copper wire on a resin or the like can be used. Further, other metal substrates such as an iron-based 42 alloy may be used in consideration of use, cost, and the like. Further, it is possible to form a printed circuit board or a flexible wiring board forming step to form a wiring and form an inversion layer 4 (4, 4). In this way, depending on the purpose, structure, and material (copper plate or flexible resin substrate with flexibility), it is possible to change the shape (manufacture by shape such as punching, bending, or bulging), plating, and The order of evaporation. 3 The mounted semiconductor light emitting element 6 can be mounted, for example, GaAs_Si_LED,

AlGaAsiED、GaP_LED、AlGalnP-LED、InGaN-LED 等 LED 晶片。另外, 第4圖所示的半導體發光藉是相對頂面和底面之電極朝縱向的元件,但 不限於此’也可以是在同-面形成-對電極的平面構造的LED(例如,^ 系)。電極在同-面形成的平面構造的情況下,有將電極面朝向表面側(圖 201214778 中為上側)’陰極、陽極均實施打線接合的情況;有電極面朝向下(導線架 側)直接連接之所謂的覆晶(flip chip)安裝方式,可以使用任一安裝方式。 也可以用銅系打線接合、鋁打線接合代替金打線接合。 進而’該實施方式中’係使用施加有金閃鍍層10的基板,關於金,在 較粗的間距(例如〇.5mm間距的情況),即不拘高精密度的情況下,沒有金 閃鍍層10也能獲得高良率,所以可以省略。關於鈀層18,只要是能夠確保 金屬層的厚度,並得到充分的焊料浸潤性,就可以省略鈀。 根據該結構的半導體發光裝置,與第2圖所示的半導體發光裝置同樣, 透過位於在外包體部分8形成的凹部的底面的鋁反射層4A、4B的存在,從 半導體發光元件6射至的光藉由紹反射層4A、4B反射到凹部的開口側,發 揮增加來自半導體發光裝置的光量的效果。另外,由於鋁反射層4a、4b 具有良好的統轉性’所以可以長時間轉高反料。進而,由於在基 材2A、2B與鋁反射層4A、4B之間存在有由鎳層17、鈀層18和金閃鍍層 1〇構成的中間層’所以可以達成安裝時與無船焊接材的浸潤性之提升。 〔第5實施方式〕 第5圖是表示本侧第5實施方式辭導體發光元件安㈣基板的示 意剖視圖。該實施方式是第3 _示半導體發光播安制基板的位置變 化的變化例’第5圖⑻表示僅在基材2的一面形成鎳層17、纪層18和金閃 ,層10在金閃鑛層1〇上的一部分形成銘反射層4的例子;帛$圖⑼表 示在基材2的-面形成的金閃鑛層1〇上的一部分形成紹反射層4,並將一 部分在紙面上向上方彎折大致90度的例子;第5圖⑷表示在基材2的整面 =成錄層π、_ 18和金_層1G ’在形成的侧鍍層ω的整面形成紹 ^層4,將—部分在紙面上向上方料⑽度的例子·第$圖⑹表示在 =2的-面直接形成減制4,在基材2的另—面形成鎳層17、 18和金閃鍍層1〇的例子。 第5圖⑻所示的半導體發光元件安裝用基板可以如下構成,即 面7細_麟一 _17,以電鑛法形 ίίΐί 8,以麵法形成厚度為αι脾的金閃鍍層10, 金閃鍍層1G的_部上綱驗法形雜 例子般在銅基材上依次積祕,、金、辦,除了贿^ 201214778 ί用锻法。對_反射層4 ’現在不能以濕式電鑛法容易地進行電 體中㈣Ζ採用真空驗法,為其他的方法,例如可以在惰性氣 等方法中=°另外’從成本、製程步驟的簡化等觀點考慮,可以使用此 ^ 5 _(_ —半導财光树安㈣基板是依次在基材 2上以電鍍 厚度為1.5卿的鎳層17、以電鍵法形成厚度為〇 2卿軌層18、形 旱又為0·1μιη的金隨層1G後,在__部分形成減射層4而構成。第$ c所不的半導體發光元件安制基板是依次在基材2上以電鑛法形成厚 &為1.5帅的錄層17、以電鑛法形成厚度為0加驗層μ、形成厚度為 Ο.ίμηι的金閃鑛層1〇後,在整面形成銘反射層4而構成。此等例子是假設 將半導體發統件絲於敏騎4的頂面,並在基材2的底面或側面實 施打線接合的使用方法。更具體而言,是基材2彎折時能夠適用的結構。 應予說Θ在本實施例巾,係在基材2的背面實施打線接合,但也可以根 據目的在背面被覆錄層17、紀層18、金閃錢層1〇等。 第5圖(d)所示的半導體發光元件安裝用基板與第5圖的例子同樣, 將鎳層17、鈀層18和金閃鍍層1〇僅施加在基材2的單面,所以可以抑製 此等金屬的使用量。僅對單面進行電鍍時,將兩個基材貼合而進入電鍍步 驟,然後進行分離,從而不需要遮蔽材就可以達成。鋁反射層4如上所述 根據厚度而容易受到基底帶來的反射率的影響,因此較佳為〇〇2μιη以上。 雖然在整面形成有鋁反射層4,但也可以是部分性地形成鋁反射層4的構 造。形成第5圖(d)所示的半導體發光元件安裝用基板後,可以將基材的端 部(也稱為基板連接導線、外導線)加工成規定形狀來使用。例如,將從 基材的外包體露出的部分(外導線)的底面彎曲加工成與印刷電路基板的 頂面接觸’而與基材進行連接時’可以使用該結構。即,基材的中央部分 作為銘反射層使用,基材的端部的底面作為外導線,錄·紅側的面與印刷電 路基板連接。 〔第6實施方式〕 第6圖是表示本發明第6實施方式的半導體發光元件安裝用基板的示 意剖視圖。s亥實施方式的結構如下.在基材2的兩面或一面形成選自把 (Pd)、金(Au)、錫(Sn)、鎳(Ni)、銅(Cu)-錫(Sn)合金、銅(Cu)-錄(Ni)合金中單 12 201214778 金屬層11或基材2上形成減射層4。金屬層11是由 Ag以外的金屬構成的第_金屬層的—個例子。 -却t6 ^⑻表不在基材2的兩面形成金屬層u,在—面的金屬層u上的 一部分形成鋁反射層4的例子.第6_ 11 , J-Asmm, L · 汁第6圖⑻表不在基材2的一面形成金屬層 在金制11上的—部分形成銘反射層4 _子;帛6圖⑷表示在基材 面形成ΐ屬層11,在基材2的另—面形成紐射層4的例子。即, 圖⑻〜(c)疋金屬層η在半導體發光元件安裝用基板的表面的一部分露 出的例子。 把_更具有抗氧化絲,並具有與胁焊涵舰合賴點;錫具 有容易進行焊接且賴的優點,但稍微具有容綠化的缺點。銅錫合金比 鋼難以氧化,與錫和_比,具有容易與聰合的優點。銅·鎳合金具有比 錄容易與祕合的優點。依據鱗方面,可錄舰祕件、製造條件選 擇作為金屬層11最佳的材料。 〔第7實施方式〕 第7圖是表示本發明第7實财式醉導體發光元件安制基板的示 意剖視圖。該實施方式的特徵在於在錢射層4上形成—處或錢鑛金層 12。第7圖⑻表示在銘反射層4上的一部分形成鑛金層12的例子;第7圖 (b)表示在部分碱的減㈣4的相的金随層1G上形成動^層12的 例子;第7圖(c)表示在鋁反射層4上的整面形成鍍金層12的例子;第7圖 (d)表示在鋁反射層4和形成有鋁反射層4的金閃鍍層1〇上的整面形成鍍金 層12的例子·’第7圖(e)是表示使用該半導體發光元件安裝用基板的半導體 發光裝置實施方式的一個例子的示意剖視圖。在此等實施例中,在基材2 的整面依次形成有鎳層17、鈀層18和金閃鍍層10 ’但不限於此等,如上 述各實施例中所述,形成單層的金屬層11的情形、在基材2直接形成鋁反 射層4的情形亦可適用。 s亥實施方式中的鍍金層12可以用於安裝在銘反射層4上的半導體發光 元件的電連接。鍍金層愈厚,短波長(藍色)側的反射率愈低,但金線的 連接性愈良好。根據用途,參考反射率來決定鍍金層12的構造即可。應予 說明,於此各鍍層(1〇、12、17、18)由濕式電鍍法形成,也可以由其他方式 形成。 13 201214778 〔第8實施方式〕 =圖是作林發明第8實财式表科導體發光裝置的代表性使用 狀態的不意圖。本實施方式有關的半導體發光裝置是利用第]〜第 方 ,有關的半導體發光元件安制基板丨,絲摘如印稱路基板而使用。 為了安裝在印路基板13 ’雜轉體發光餅安制基板丨的外包體 部分8向外部延伸的部分(外導線)料,形成與外包體部分S的底面大 _同-面的部分la或位於底面之下方的部分lb、le。將該部分利用谭料 14黏結在印刷電路基板13的配線。第8圖⑻表示形成部分^的例子部 分la是將外導線青折90度朝向下方,再將其向相反方向彎折9〇度朝向水 +方向’由料導線的延伸方向未變,且使水平位置與外包體部分8的底 面為大致同H 8曝)表示形成部分lb的例子,該部分lb是將外導 線外包體部分8弯折90度兩次’從而沿著外包體部分8的底面形成;第 8 _是形成部分le _子,該部分le是將外導線按照與第8 _相反 的方向沿著外包體部分8騎9〇度兩次,從而沿著外包體部分8的頂面形 成。外導線的f折方法不限於此’根據使用半導體發光裝置的每種 決定形狀。 〔第9實施方式〕 在本實财式中’在紐上鄕丨實施方式同樣設魏反射層的方面 /其他實施方式相同。但是,銘反射層的碳濃度& 1><1〇2〇做爪3以下。 人為了-評價與該半導體發光元件安裝用基板的接合性,與由金構成的接 合線,仃打線接合。於此,打線接合是指為了將導線架側的電極焊签和安 裝於s亥導線架的元件上的電極電連接,而用金等線進行連接。 第-接合是指將以放電將線的线製成球狀來預先接合。财鐘於位 置精度、壓接性,大多將元件側的電極進行第—接合。在本實施方式中, 在銅的基材上’以與第1實施方式同樣設有減射層的部分來接合用放雷 將線的尖端製成球狀之物(球狀線)。 ^ 一接合是指上述元件側的電極與要由上述線連接的導線架側的電極 ,疋的位置接合。在本實關巾,在銅的基材上,對鮮i實施方式同 樣&有反射層的部分,將線雜雜瞒的方式進行麼接。 在表2中表示銘反射層中的碳濃度與金線的接合強度的關係。作為實 201214778 施例11,是將在厚度為0.15mm的銅基材上以濕式電鍍法形成〇·7μηι的鎳 層、0·05μιη的纪而得到的製品進行衝壓加工,在厚度為〇.5nim的3層玻璃 環氧樹脂基板上以耐熱丙烯酸系樹脂黏著劑固定,形成發光裝置用電路基 板的實施例。將本材料安裝在上述真空蒸鍍裝置,形成0·2μιη的鋁反射層, 實施SIMS分析。於此,鋁反射層内的碳濃度為該鋁反射層内的碳濃度的最 小濃度。鋁反射層内的碳濃度為3x1〇2()個/cm3。 對於實施例12的基材’其為在厚度為125脾的聚醯亞胺樹脂膜整面以 濕式電鍵法形成70μηι的銅基材、〇_7μηι的錄層、〇·〇5μιτι的Ιε後,將所得 製品用耐熱丙烯酸系樹脂黏著劑與基材貼合所形成的板材。在實施例12 中,在鋁反射層形成後,在衝壓加工中,通過沖切去(作為導線架)不需 要的部分而形成配線材。同樣將實施例12的鋁反射層中的碳濃度進行sjjyjs 分析’結果鋁反射層内的碳濃度為lxl〇2〇個/cm3。 實施例13是在含鐵的銅合金上利用濕式電鍍法形成〇7μιη的鎳層、 0.05μηι的鈀後,只進行衝壓加工,然後將得到的製品在真空蒸鍍裝置中用 不鏽鋼製(SUS304)的工模夾具固定,形成〇 2gm的紹反射層。實施例13的 鋁反射層内的碳濃度為3χΙΟ19個/cm3。 作為評價基準,第-接合強度是將具有G 39N以上的剪切強度的情況 作為〇,將小於0.39Ν者作為X。第二接合強度是將具有〇 〇働卩上的剪切 強度的情況作為〇,將小於0.049Ν者作為X。 從表2可知,鋁反射層的碳濃度為3χ1〇2〇個/cm3以上時,接合強度下 降,較佳為1X102G個/cm3以下。 一應予說明,在本實施方式巾’由於另外使用環氧麟材,所以碳濃度 升高,接合性比其他實施例差。另外,雖然接合性在實雜範圍内,但使 用丙烯酸系黏著解有機材料時’減射層_碳濃度也上升。嚴格要求 接合性時,像實施例13那樣不使用樹脂,在形成半導體發光元件安裝用基 材後,即’銘反射層形成後,使用樹脂即可。應予說明,作為向減射層 的碳的混入源,可以考慮基材的污染、濺鑛時的沖洗氣(师辟牌)、真空 泵油的迚擴散'使用濺鍍法時的濺鍍氣體的雜質等各種因素。 在接合試驗中’打線接合機係使用B_以 獅助_ ’並使«縣25μιη的金線,在超音波缝物灌、超 15 201214778 曰^加Η’間為l〇〇ms的接合條件下實施。在版咖股份有限公司的接合 測試PTR1的剪切試驗模式下實施心祕測定是洲削公司的 ADEPT1G1G ’將作為—次離子源的娜子的加速能量來實施。 如上所述’本發明人得知銘反射層中的碳濃度會對金線與銘反射層的 接合強度帶綠大辟。敝意這適跡上述的全部實施方式。 〔第10實施方式〕 第9 ®是表示本發明第1G實施方式的半導體發絲置的示意剖視圖。 該實施方式的特徵在於半導體發光元件6裝載於做射層4上 ,用於與半 光元件6進行打線接合或内部打線接合的供電㈣子的基材2B、2C 上沒有鋁反射層4: ,打線接合前端也可以有紹反射層4,但是沒有紹反射層4的情況下,通 過使基材2B、2C的表面狀態最佳化,從而接合條件的範_大,裝配速度、 良率k得良好。第9圖表示半導體發光元件6的安裝部分的基材2八和基材 2B、2C上設置的鑛層(1〇、17、18)為同一結構的例子但2a、2b、% 的基材的麟縣構可叫同,也可时㈣作。另外,第9圖表示基材 2A/2B、2C下部由樹脂包覆的情況,但在背面可以露出基材2a、2b、兀 的背面的整面或-部分。露出的部分進—步與金屬製的放熱板等以焊接等 連接,從而可以提高放熱性,並可以增大光輸出功率。另外,使用具有背 面電極的半導體發光元件6時,與上部電極連接所制的供電用端子有一 根以上即可’也可以對與上部電極連接的多根供電用端子進行打線接合配 線。g使用多根端子之際,有容易進行大電流驅動時的配線配置'發光裝 置間的配線配置之情況’而將其分職用。第9圖表示將光發光元件的電 極部分和供電用端子的連接進行打線接合連接的情況,但也可以製作内部 導線’實施利用楔連結(wadge bonding)的連接,所述内部導線利用連接 用之經圖案化的配線材,所述楔連結使用超音波、加熱。 將本發明的半導體發光元件安裝用基板及使用該基板的半導體發光裝 置作為實施方式表示之代表性結構例中說明的本發明不限定於該結構例, 在本發明的技術思想的範圍内可以有各種結構。作為供電用端子,打線接 5戍内。卩打線接合的基材2B、2C的表面的主要構成材料可以為選自^、 銀、鈀、金合金、銀合金、或鈀合金令的一種或其組合。 16 201214778 (苐11〜第21實施方式) 本發明有_典型實施方式的铸歸光元件安制基板、以及半導 體發光裝置的-齡要的基本構献··在基_安裝半導體發光元件的面 的至少-部設置銀層或銀合金層,在該銀層或銀合金層上設置減射層。 4半導體發光元件*裝用基板、以及半導體發光裝置的另—個基本構 成是:在基材安裝有半導體發光元件的面的至少一部分上隔著金屬層設置 銀層或銀合金層,在該銀層或銀合金層上隔著金屬層設置鋁反射層。 作為該銘反機的厚度’較佳為_6μπι以上2μιη町,較^紹反射 層的雜質碳濃度為ΙχΙΟ14個/cm3以上1χΐ〇2〇個/cm3以下。 為了在銘反射層十分薄的情況下也能將光反射,銀層或銀合金層較佳 為Ο.ΟΙμηι以上。 作為介於基材與銀層或銀合金層之間的金屬層,例如較佳選自鈀、金、 錫、鎳、銅-錫合金、銅-鎳合金、鐵-鎳合金中的一種或其組合。作為介於 銀層或銀合金層與鋁反射層之間的金屬層,例如較佳為金,作為其厚度, 較佳為Ο.ίμιη以下。 夂 從電阻、熱阻的方面考慮,作為該基材的材料,較佳由例如鋼或銅合 金構成的基材。作為基材的其他材料,例如可使用42合金等鐵_錄合金、鐵 系框架材等。 ”1" 作為該基材,只要含有金屬部分即可,例如可以使用在樹脂上貼合有 銅的覆銅板。作為該樹脂’例如形成在基材上之形成銀層或銀合金層:鋁 反射層的面之相反側的面。形成該鋁反射層的面之相反側的基材的表面可 以使用含有與有機材、無機材進行複合化後的結構的基材的表面。 〔第11實施方式〕 參照第10圖,在該圖中,表示整體的符號J示意地表示作為第u實 施方式的半導體發光元件安裝用基板。該基板1主要包括基材2、在該基材 2的兩面形成的銀層或銀合金層3、隔著該銀層或銀合金層3形成在基材2 一面包括安裝半導體發光元件的處所的區域的鋁反射層4。 該基材2由金屬、或金屬與有機材或無機材的複合材構成。作為該金 屬材料沒有限製,通用性最高的基材是由銅或銅合金構成的金屬導線架。 使用銅板作為該基材2的情況下,其厚度沒有限製,但可以參考成本 17 201214778 來選定。考慮其量產化,較佳為銅板的環箍材,但也可以使用短尺寸的片 材、以及各種材料。 使用複合材作為該基材2的情況下,可以使用樹脂材上貼合有銅板的 覆鋼板、其積層板。作為該樹脂材料,可以使用硬質的板狀的樹脂、薄且 具有可撓性的樹脂。作為其代表性的一個例子’分別可以舉出玻璃環氧樹 脂基板(玻璃布基材樹脂板)、聚醯亞胺樹脂系等。 該銘反射層4是使用具有減壓壓力調節功能的蒸鍍裝置,通過分批次 處理或連續處理等來製造。從反射率的觀點考慮,作為該鋁反射層4的厚 度,較佳為0.006μιη以上。另外,從經濟性的觀點考慮,2μηι以下較妥當。 以下’對半導體發光元件安裝用的基板1的製造方法進行說明。其製 4時,首先’作為基材2準備銅板。基材2使用鋼板的情況下’基材2的 尺寸為例如長度l〇〇mx寬度5〇mmx厚度〇 2mm,銀層的厚度為〇 〇2μιη、鋁 反射層4的厚度為例如〇 05μιη的尺寸。 接著’在基材2的兩面以濕式電鍍法製作銀層或銀合金層3。鍍銀一般 使用氰化銀電鍍浴,也可以使用無氰浴。電鍍時,可以通過添加有機光澤 材、添加少量的金屬鹽(銻、鎳、鈷、錫、硒等)來提高光澤度。另外, ,過在電翁中加人銀鹽的同時,加人氰化金卸㈣金原料,從而可以進 行銀合金電鍍。同樣地,通過加入鉑、鈀、铑、鎳、銦等的化合物鹽,從 而可以進行銀合金電鍍,用於銀合金層。 〇接著,利用電阻加熱式/圓筒式的真空蒸鍍裝置在銀層或銀合金層3的 單面形成贿射層4。频而言,將紐2切誠版⑽⑼職的短尺寸 材16 >1 ’將切獅基材2以放射狀排列在半徑為3G()mm的傘狀的工模炎 具上,將其在Μ上配置三組。然後,使用電阻加熱源(輸出功率跡) 作為紹的驗源,聽至真线為2xl(r4pa,職厚度為G Ό5μιη的銘反 層4。 作為紹的麟源’在負載鎖方式中可以使用電子束方式,也可以使用 f墨掛禍。通過將耐久性良好的石紐辦適#最佳化,從而可 灯穩疋的蒸鍍。在該第11實施方式巾’真空蒸絲置使用自製機,但也可 以使用負賴方式·鍍_市㈣驗裝置。糾,射以是能 箱材進行驗的連續式級裝置。真空魏裝置只要綜合考慮膜質 '生產 18 201214778 率等來適當選擇即可。進而’減射層4的形財式可料是驗方 可以使用例如離子鍍法、滅锻法、金屬包覆法等。 又’ 銘反射層4的膜厚測定是利用sims分析來進行。將從銘反射層表 紹反射層正下方之基底層的主要構成元件達_基底射的最大強度的 1/2的信號強度為止的厚度作為做射層的膜厚。基底層為銀時 ^ 倥虢強疳。 ν (銘反射層的評價) 進行對該減㈣4的比較和評價。將對於實關21〜25和比較例21 〜24中減㈣4的厚度的初始反射率、以及耐硫化特性整理並表 述的表3中。 欲確認此等的初始反射率和耐硫化特性時,首先,用下述表3所示的 實施例21〜25以及比較例21和22的方式,以上述製造方法來製作如其所 示之這七種改變厚度的銘反射層4,測定波長46〇麵下的初始反射率。在 該波長下,將硫酸鋇的反射率作為100%,冑初始反射率為7〇%以上作為特 別良好,並在下述表3中用符號。表示。另—方面,將初始反射率小於9〇% 作為差,並在下述表3中用符號X表示。 由下述表3可知,鋁反射層4非常薄時,即鋁反射層4的厚度小於 〇.〇〇6μηι的比較例21和22 ’受到基底層的金屬的反射率(於此是銀)的影 響’初始反射率良好。 對於該财硫化特性’對形成有具有下述表3所示的實施例21〜25的厚 度的紹反射層4的樣品,將3ppm的邮(硫化氫)在氣體環境溫度桃、 濕度80/〇的條件下’喷霧%树(進行按照日本工業標準聰〇2電鍵的 耐腐触性試驗方法的試驗)^ !糾硫化特性在下絲3巾以初始反射率與硫 化96小時後的反射率之比表示。 由下述表3可知,鋁反射層4的厚度為〇 〇〇6μιη以上的實施例21〜25 得到相對於初始反射率冑8〇%以上的高耐硫化特性。 、 在下述表3中,代替鋁反射層4,在基材2上僅設置3μπι的銀層的比 較例23的初始反射率為93%,騎好,但對於财硫化特性,耐硫化試驗後 的反射率為29% ’大幅度下降,*驗涵始反射率和耐硫化特性。另一 方面’可知雖然在基材2上設有錦層(〇 7㈣和婦(〇 〇5㈣的比較例24的 19 201214778 耐硫化特性良好,但初贼射率敍63%,姐糊23同樣不能兼具初始 反射率和耐硫化特性。 、 綜上所述’由此等結果可以確認作為半導體發光元件安裝用的基板】 所要求的特性,即初始反射率和耐硫化特性(亦即在能触硫化的環境下 使用後的反射率)二者均良㈣是減㈣4的厚度為議6叫以上者。 可兼具初始反射释耐硫化雖。較佳滿足所謂的初始反射料9〇%以 上、耐硫化特性為80%以上的條件。 為了對該基板1進行打線接合而進行氬賴清洗,絲,接合金線, 對紹反射層4賴料G_G〇6Mm社的基板1進行魏試驗,結果幾乎沒 有看到反射率的下降。由該結果可知,其對表面清洗的耐性強而無劣化'、 剝落之虞。 (第11實施方式的效果) 根據該第11實财式’由於在紐2的表面隔著銀層或銀合金層3而 形成紹反射層4’_可以獲得未硫化且細具有高且穩定的反射特性的半 導體發光元件絲板及使職基板醉導體發絲置。這是利用銘的 以下特性:鋁的反射率在紫外線區域中高達銀的3倍以上,並對紫色、紅 色、外線具有接近銀的反射率,在金屬中顏色的均衡良好,具有僅次於 銀的高反射率,且具有與銀相比難以發生硫化的特性。 應予說明,從上述第11實施方式得到的效果在以下各實施方式中也能 夠得到。以下,參照第π圖〜第19圖、以及表4,對第12〜第21實施方 式進行具體說明。 〔第12實施方式〕 參照第11圖,第11圖示意性地表示作為第12實施方式的半導體發光 裝置。在該圖中,表示整體的符號5表示使用第1〇圖所示半導體發光元件 t裝用的基板1的半導體發光裝置。圖示例的半導體發光裝置5是將第 圖所示的基板1作為二組一對的金屬導線架來使用。該一對基板丨主要由 基材2、銀層或銀合金層3、以及鋁反射層4構成,且在大致同一面上 配置。 在此等基板1中,如第U圖所示,其中一基板丨的鋁反射層4上安裝 有半導體發光元件(LED晶片)6。另-基板1 _反射層4上接合配置有 201214778 與半導體發光元件6連接的接合線7。 如第11圖所示,該半導體發光裝置5除了一對鋁反射層4、4和半導 體發光元件6,形成有將一對基材2、2的側面彼此靠近的部分包圍之樹脂 製的外包體部分8。該外包體部分8具有凹部8a,該凹部8a通過在遠離基 材2的方向形成末端擴大狀的傾斜面8b而開口。在該凹部如内填充有密 封半導體發光元件6的透光性樹脂,形成透光性樹脂部9。該透光性樹脂部 9構成外包體部分8的一部分。通過在該透光性樹脂部9中混合螢光體材 料例如YAG等’半導體發光元件6便作為由460nm的GaN系LED構成 的擬白色LED裝置來使用。 應予說明,外包體部分8具有凹部8a,該凹部8a具有在遠離基材2的 方向形成為末端擴大狀的傾斜面8b,但不限定於圖示例,例如可以是由相 對於基材2立起的垂直面代替傾斜面肋而形成的凹部。另外,鋁反射層4 在外包體部分8内側的大致整面,或除去一部分的剩餘的部分形成即可。 其理由是因為只要從半導體發光元件6放射的光在外包體部分8内反射即 可。 作為形成該鋁反射層4的具體方法,有以下的各種方法,可以使用其 中的任一種。 ' ⑴利用!S反射層4形成時的成臈裝置,^置將外包體8的區域以外遮 蔽的功能的方法。 ⑺在基材2的整面形成銘反射層4後,將外包體部分8的區域通過貼 膜(taping)、或光微影製程等遮蔽,然後蝕刻除去鋁的方法。 (第12實施方式的效果) 該結構的半導體發光裝置5,通過位於外包體部分8的凹部如的底面 的銘反射層4、4的存在,從半導體發光元件6射至的光通舰反射層4、4 的反射作用反射到凹部8a的開口側,發揮增加來自半導體發光元件6的光 量的效果。如上所述,脑反射層4具有良好的耐硫化特性,所以可以 時間維持高反射率。 〔第13實施方式〕 第12圖示意性地表示作為第13實施方式的铸體發光元件安裝狀 板。在該圖中,與上述第U實施方式不同之處在於,在銀層或銀合金層土3 21 201214778 上隔著金閃鑛層10形成有減射層4的基板】。在圖示例中,基板i在基 材2的兩側整面利用濕式電鍍法依次形成有銀層或銀合金層33、以及^ ,鑛層10、1〇,在基材2的一側的金閃鍍層1〇上的—部分上形成紹反射層 在基材2的兩面依次形&銀層或銀合金層3、3、以及金閃鑛層ι〇、1〇 的理由之-是為了確保紐2與絲半導體發光裝置的印刷電路基板之間 的焊料浸潤性,即為了提高焊接接著性。可以根據安裝的元件來適當設定, 但較佳為銀層或銀合金層3的厚度為LG〜5晔的尺寸、金驗層1〇的厚 度為Ο.ίμηι以下的尺寸。從耐硫化特性的觀點考慮, 度,較佳為_6卿以上2哗以下。 对曰4的厚 銘反射層4的製造方法是用具有減壓功能的蒸鍍裝置,通過分批次處 理或連續處理等來進行。銀層或銀合金層3用濕式電鑛法、真空蒸鑛等乾 式均可以知到半導體發光裝置所需要的品質的鑛層^濕式電鑛可以在材料 的6面整面進行塗佈,且大多能以低成本製作,所以作為銀層或銀合金層3 較佳以濕式電鍍來形成。 3' 應予說明,銀層或銀合金層3、以及金閃鍍層10以濕式電鍍法形成的 基底層的膜厚是通過積算電鍍時的電流值來進行計算。 (第13實施方式的效果) 根據該第13實施方式,通過將鋁作為反射層使用,可以確保良好的耐 硫化特性。進而,通過使用具有〇 〇〇6μηι以上的厚度的鋁反射層4,除了可 以得到良好的耐久性、可以維持高反射率的效果以外,亦發揮以下的效果。 即,發揮上述數值範圍的銀層或銀合金層3可以防止基材2的主要材 料鋼的擴散,上述數值範圍的金閃鍍層1〇可以提高焊料浸潤性並可長期保 管等新的效果。通過形成如該第13實施方式之基板構造,可以有效地得到 適合焊接的基板1。 〔第14實施方式〕 參照第13圖,第13圖示意性地表示使用第12圖所示的基板i之第14 實施方式的半導體發光裝置5。在該半導體發光裝置5中,也具有第u圖 所示的第12實施方式中的外包體部分8和透光性樹脂部9。 在製造半導體發光裝置5之際使用鋼板作為基材2時,係準備例如長 22 201214778 度100mx寬度5〇mmx厚度0.2mm的長尺寸的銅板,在基材2的表面通過濕 式電鍵法依次製作厚度為3μίη的銀層或銀合金層3、厚度為0 01μηι的金閃 鑛層10 °進而,留著金閃鍍層10上用於焊接接著的部分,並且在作為反射 膜來使用的部分處部分蒸鍍鋁反射層4。由此,得到了在金閃鍍層1〇的焊 接接著部沒有銘、在金閃鍍層10用於反射的部分存在鋁反射層4的材料。 然後’利用沖壓機、蝕刻,將基材2製成半導體發光元件安裝用的框架形 狀。 接著’將一對基板卜靠近配置在大致同一面上。形成樹脂製的外包 體部分8,該外包體部分8包圍一對基材2、2靠近的部分,並具有挖通半 導體發光元件6的周邊的凹部8a。接著,在鋁反射層4上用導電性糊料安 裝半導體發光元件6,將半導體發光元件6的表面電極與導線架(基板1} 用由金構成的接合線7進行連接。最後,在外包體部分8的凹部8a内填充 透光性樹脂(矽樹脂等),使其被覆半導體發光元件6,從而形成成為外包 體部分8的一部分的透光性樹脂部9。 ^該第14實施方式中,說明了製作基板1後,利用沖壓機、蝕刻成形 為規定形狀的-個例子’但也可以個後鍍法。即,可以將基材2成型為 規定形狀後,侧濕式電麟在基材2上職銀層或銀合金層3、以及金閃 鑛層10的各層,喊空級法等乾式電鍍法形成域織4。進而,對於 基材2,對由銅構成的情職行·,但也可以賴在細旨等上設有銅配線 的基材。另外’從用途、成本等考慮,還可以使用其他的金屬基材,例如 鐵系的42 a金等。另外’可以糊印刷電路板 '撓性配線板形成步驟形成 配線後再形成銘反射層4而使用。像這樣,根據目的、構造、材料(鋼板 或具有可撓性的撓性獅基材),可以變更形狀的製作(利財切加工、彎 曲加工、鼓凸加工等形狀的製作)、電鍍、蒸鍍的順序。 所安裝之半導體發光元件6可以安裝例如⑽舰奶、 AK}aAS_LED、GaP-LED、AlGalnP-LED、InGaN_LED 等哪晶片。, ^圖所示的半導體發光元件6例示了形成有頂面和底面的電極的縱向元 ^但不=此’也可以是在同一面形成_對電㈣平面構造的⑽ ==二電Sit同—面的平面構造的情況下,有將電極面朝向 表面側(第13圖中為上側)’陰極、陽極均實施打線接合的情況;有電極 23 201214778 裝=下j導線架側)直接連接的所謂的覆晶安裝方式,可以使用任一安 裝1。也可以用銅系打線接合或由_成的打線接合代替金打線接合。 而’該第14實施方式中,使用了施加有金閃鍍層1〇的基板,關於 4古^粗的間距(例如Μ"1"1間距的情況),即不拘高精密度的情況下, 'A链層10也能帶來高良率,所以可以省略金閃鑛層10。 (第14實施方式的效果) 根據該、纟。構的轉體發錄置5,透驗於在外包體部分8形成的凹部 a的底面的-對銘反射層4、4的存在,與第Μ圖所示的半導體發光裝置 同樣從半導體發光元件6射至的光藉由紹反射層4、4反射到凹部%的 開口側’發揮增加來自半導體發«置5的光量的效果。另外,由於铭反 射層4具有良好的耐硫化雛,所以可以長時間維持高反射率。進而,由 於在基材2和紹反射層4《間存在有由銀層或銀合錢3、以及金閃鑛層 1〇構成的巾間層,所以可讀高安料與無錯焊減的浸潤性。 〔第15實施方式〕 。第14 ®示意性地表示第15實施方式的半導體發光元件安裝用基板。 -玄第15實施方式是第12圖所示的第13實施方式的基板1的變化例,與上 述第13實施方式有關的基板丨在基本構成上沒有改變。 與上述第13實施方式的最大不同之處在於,如第14圖^)所示,是在 基材2的一面依次形成銀層或銀合金層3和金閃鍍層1〇,在金閃鍍層川上 的一部分上形成有鋁反射層4的結構例;如第14圖作)所示,是將基板i的 一側端部分向金閃鍍層1〇侧彎折大致9〇度的結構例。 作為與上述第13實施方式大不相同的其他結構例,如第14圖以)所示, 在基材2的整面形成銀層或銀合金層3、以及金閃鍍層1〇,在該金閃鍍層 10的整面形成鋁反射層4’將基板1的一側端部分向金閃鍍層1〇側彎折18〇 度的結構例;如第14圖(d)所示,是在基材2的一面直接形成鋁反射層4 , 並在基材2的另一面形成銀層或銀合金層3、以及金閃鍍層10的結構例。 第14圖(a)所示的基板1是在由銅構成的基材2的單面以電鍍法依次形 成厚度為3μιη的銀層或銀合金層3、厚度為〇·ιμιη的金閃鍍層1〇後,在金 閃鍍層10的一部分的頂面利用蒸鍍法形成鋁反射層4。應予說明,像該結 構例這樣,在銅基材2上依次積層銀或銀合金、金、鋁時,除了鋁反射層4 24 201214778 、卜可Hf式電鑛法。對於反射層4,此時並不能以濕式電锻法容 易地進行雜’所以可以_真空驗法。偶其他的方法,例如可以利 用在惰性氣體中的濺鑛法。另外,從成本、製程步驟的簡化等觀點考慮, 可以使用此等方法中的多種。 第14圖⑼所示的基板1 I依次在基材2上以電鑛法形成厚度為2μιη 的銀層或銀合金層3、厚度為α.1μιη的金閃鋪1G後,在金閃鑛層1〇的一 部分的表面上形柄反射層4而構m4 _所福基板】是依次在基 材2上以電鍍法形成厚麟的銀層絲合金層3、厚度為G1㈣的金 閃鍍層ίο後’在金嶋層1G的整面形成減射層4而構成。 第14圖(b)和(C)所示的結構例是假設將半導體發光元件6安裝在鋁反射 層j的β頂面,並在基材2的底面或側面實施打線接合的使用方法。更具體 而疋基材2彎折時能夠適用的結構。應予說明,在該第15實施方式中, 在基材2的背面實施打線接合,但也可以根據目的在背面被覆銀層或銀合 金層3、金閃鍍層1〇等。 第14圖(d)所示的基板!將銀層或銀合金層3、以及金閃鑛層1〇僅施 加在基材2的單面。因此’可以抑制此等金屬的使用量^僅對基材2 面進行電鑛時’將兩基材2、2貼合而進人魏步驟,然後進行分離,從而 不需要遮蔽材就可以達反射層4如上所述根據厚度而料受到 =之^射率的影響,因此較佳為〇⑻6μιη以上細町。軸在基材2的 反賴4,但柯㈣絲材2絲㈣紐财接形成銘 (第15實施方式的效果) 在該第15實施方式令也可以得到與上述第13實施方式同樣的效果。 形成根據圖示例的基板1 *,可以將其端部(也稱為基板連 接導線、外導線)加工成規定形狀來制。作為其-個例子 包體部分8露出的部分(外導線)的底面f曲加工成與印刷電i 基板的頂面铜,可以在與基板1連接時。即,基板1的中央部分作 接絲1賴議面作概線,峨層10側的面 〔第16實施方式〕 25 201214778 參照第I5圖,第I5圖示意性地表示了第1ό實施方式的半導體發光元 件安裝用基板。在刻巾,與上述各實施方式大不㈣之處在於,在基材2 的兩面或-面形成有選自把㈣、金(Au)、錫(Sn)、鎳⑽、銅(c 合金、銅(Cu)_鎳⑽合金的金屬層u,在該金屬層u或基材2上形成銀層 或銀合金層3,在該銀層歧合金層3上形成減㈣4而構成。 作為該基板1的結構例,如第15圖⑻所示,有在基材2的兩面形成金 属層1卜在-面的金屬層n 面形成銀層祕合金層3,在該銀層或銀 合金層3的-部分表面形成銘反射層4的結構例;如第15圖⑼所示,有在 基材2的-面形成金屬層η,在金屬層n的整面形成銀層或銀合金層3, 在該銀層或銀合金層3的-部分表面形成減射層4的結構例。作為該基 板1的其他結構例,如第15圖⑷所示’有在基材2的一面形成金屬層u, 在基材2的另-面職銀層歧合金層3,在該歸或銀合金層3的整面形 成銘反射層4的結構例。 (第16實施方式的效果) 在該第16實施方式中也可以得到與上述第u實施方式同樣的效果。 作為該金屬層11的構成成分的紐銅更具有抗氧化絲,並具有與用於谭 接的錫熔合的優點。另-方面,雖然錫稍微容易被氧化’但具有容易進行 焊接且廉價的優點。作為金屬層u的構成成分的鎳具有能夠抑製銅的擴散 的效果、增加硬度的優點;作為金屬層„的構成成分的銅錫合金比鋼更難 以氧化’與錫和銅相比,具有容易與錫熔合的優點。作為金屬層η的構成 成分的銅·錦合金,具有_容易與錫熔合的優點,據此等特點,可以根 據使用條件、製造條件選擇作為金屬層π最佳的村料。 〔第17實施方式〕 第I6圖示意性地表示了作為帛17實施方式的半導體發力元件安裝用 基板。在該第17實施方式中’與上述第13和第14實施方式有關的基材2、 銀層或銀合金層3、減射層4、以及金閃鍍層Η)在基本結構上沒有改變。 在圖示例中,该基板1的基本結構是在銘反射層4或金閃鑛層丨〇上形成— 處或多處的鍍金層12。 立作為該基板1的一個例子,如第16圖(a)所示’有在鋁反射層4上的— 4刀表面形成It金層12的結構例;如第16 _)所示,有與在金閃鑛層⑺ 26 201214778 的-部分表面部分形成的減射層4在同―面上形鑛金層i2的結構例。 作為該基板1的-個例子,進而’如第16圖⑷所示,有在金閃鑛層1〇 的-部分表面部分形成的銘反射層4上的整面形成鍵金層12的結構例;如 第16圖⑷所示,有在金閃鑛層1〇、以及部分形成在金閃鍍層1〇的一部分 表面上的鋁反射層4的整面上形成鍍金層丨2的結構例。 (第17實施方式的效果) 在該第η實施方式中也可以得到與上述第u實施方式同樣的效果。 〔第18實施方式〕 參照第17圖,第17圖示意性地表示了在作為上述第7實施方式的半 導體發光元件安裝用基板1中使用了第_⑻所示基板i的半導體發光裝 置的一個例子。在第17圖所示的半導體發光裝置5中,一對基板ii ^ 在大致同一面上靠近配置。鍍金層12接合配置有與半導體發^元件6電連 接的接合線7。剩餘結構與上述各實施方式沒有不同之處。 在上述第17和第18實施方式巾,在基材2的整面上依次形成銀層或 銀合金層3、以及金閃鍍層10,但不限定於此。如上述各實施方式所述, 還可以適用於形成單層的金屬層n的情形,在基材2直接形成銘反射層4 的情形。 (第18實施方式的效果) 在該第18實施方式中也可以得到與上述第u實施方式同樣的效果。 上述第17和第18實施方式中的鍍金層12可以利用於安裝於鋁反射層4上 的半導體發光元件6的電連接。在第16圖(c)和第16圖⑷所示的基板結構 中,鍍金層12愈厚,短波長(藍色)側的反射率愈低,但金線的連接性愈 良好。根據用途’參考反射率來決定鍍金層12的構造即可。應予說明,於 此,各鍍層(3、10、12)由濕式電鍍法形成,也可以由其他方式形成。 〔第19實施方式〕 ·· 參照第18圖,第18圖表示了作為第π實施方式的半導體發光裝置的 代表性使用狀態。該半導體發光裝置5是使用了上述第η〜第18實施方式 有關的半導體發光元件安裝用基板1的半導體發光裝置,例如安裝在印刷 電路基板13上使用。為了安裝在印刷電路基板13,基板丨具有··第一彎曲 部21’該第一彎曲部21是將從外包體部分8的側面向外部以直線狀延伸的 27 201214778 部分(外導線)20向印刷電路基板13側彎折形 苐二變曲部22是相對於印刷電路基板】3水平地細第二皆曲部22,該 22形成有與外包體部分8的底面大致成同—面t成。該第二響曲部 底面更*近下方、或比外包體部分8的頂 =❹卜包體部分8的 曲㈣通過浑料14而與印刷電路基板13的配^上方的部分。該第二變 導體發光元件安裳用基板】的一部分。 $ 15 _ °外導線加是半 該外導線20包括各鑛層(3、1〇、u)。作 如第】㈣所示,有如下的結構例:由具有第:=2。的:個例子: 22的外導線構成,並使該外導. ^ <曲和第:f曲部 凹部如的底面側的下面大致同一面外包體部分8的 導線20的令間部向與外包體 ^ ’所述第一弯曲部21是將外 9〇度,所述第-彎曲邙2:> 3二雜部a的開口侧的相反側大致彎折 度。又伙第一f曲部22是朝遠離外包體部分8的水平方向大致弯折如 著與^ L的ί他例子,如第18圖⑼所示,有將第二響曲部22沿 祕道始^有如下的結構例:由具有第一f曲部21和第二彎曲部22 部t並使該外導線20的第二彎曲部22沿著外包體部分8的四 部f折形成;所述第—彎曲部21是將外導㈣的中間 第1曲^22°P是刀向的開口側的同一方向大致彎折90度,所述 (._ 0罪近外匕體部分8的水平方向大致彎折90度。第18圖 的結構例可以用於在印刷電路基板13開出透光孔,從印刷電路基板 貝’ i光的情況;或將賴、透鴨鱗透光蹄湘於印刷電路基板 U,從印刷電路基板13側射出光的情況。 (第19實施方式的效果) 在《亥第19實施方式中也能夠得到與上述第u實施方式同樣的效果,, 二此以外,作為該外導線2〇的彎折方式,不限於圖示例,可以根據半導體 發光裝置5使用的每種辑各種形狀。 〔第20實施方式〕 在該第20實施方式中,在基材2上隔著銀層或銀合金層 3設有鋁反射 « 4的方面與第1〇冑所示的第^實施方式沒有不同之處。該第2〇實施方 28 201214778 式有關的基板1的構成將鋁反射層4的碳濃度設定在1χ1〇2〇個/cm3以 方面,與上述第1實施方式不同。 、 人為了評價與該第2〇實施方式有關的基板丨的接合性,與由金構成的接 合線進行打線接合。於此,打線接合是指為了將導線架側的電極焊塾和安 裝於該導線架的元件上的電極電連接,而用金等線進行連接。通常,在半 ^體7L件触件這樣的導雜材制絲技射,作為電連财式,一般 ^打線,合’近年,在—部分的藉安裝技術中也進行覆晶的球凸塊連^ 等,進行利用以金、銀、銅、鋁等金屬線來接合的連接。 、第一接合是指將以放電將線的尖端製成球狀的線(線球)預先接合。 通常,鑑於位置精度、壓接性,大多將元件側的電極進行第一接合。在該 第20實施方式中,打線接合機使用w^T b〇nd肌的M〇DEL77〇〇D广 並使用直徑為25μιη驗接合線。作為接合條件’線上雜為7()帅、荷重 為io〇g、超音波強度為350mW、超音波施加時間為1〇〇1批的條件下實施。 與上述第11實施方式湖’在觸基板上在設有紐射層4的部分接合通 過放電將線的尖端製成球狀者。 β 第二接合是指在上述元件側的電極實施第一接合後,與要由上述線來 連接的導__電極進行訂合式接著(壓接stitehbQnding)。縫接合是指 由於在連接有線的狀態下,不能進行球形成等線形狀的加工,所以直接壓 接在基材上進行拉伸切割。通過連續實施第一接合和第二接合,從而完成 線連接。,該第10實施方式中,與上述第U實施方式同樣,將線的尖端 以摩擦附著的方式壓接在由銅構成的基板】上設有銘反射層4的部分。 下述表4表示鋁反射層4中的碳濃度與由金構成的接合線7的接合強 度的關係。 下述表4所示的實施例26 s在厚度為12細的聚酿亞胺樹脂膜的整面 以濕式電鑛法形成厚度為7〇μηι的由銅構成的基材2、厚度為2师的銀層或 銀合金層3,再以耐熱丙烯酸系樹脂黏著劑貼合而得到的板材,形成鋁反射 層4後α衝壓加工沖切去不需要的部分而开》成配線材。將該實施例6的 銘反射層4中的碳濃度進行SIMS分析,結綠反射層4内的碳 1 xlO20 個/cm3? 下述表4所示的實侧27是在含賴銅合金上利舰式電鍍法形成厚 29 201214778 度為的銀層或銀合金層3後,只進行衝壓加工,織將得到的製品在 真空蒸鑛裝置中用不細製(SU·4)的工模夾具固定,形成厚度為Μ卿 的銘反射層4。該實施例27的銘反射層4内的碳濃度為3χ1〇19個/cm3。 下述表4所示的實施例28 S在厚度為〇上賴的銅基材上利用濕式電 鍍法形成厚度為3μιη的銀層或銀合金層3後,進行衝壓加工,將其以_^熱 丙烯酸系樹脂黏著_定在厚度為〇 5mm的三層_環氧雛基板上,形 成發光裝Μ電路基板。將該鋪絲在上述真轉鍍裝置,形成〇 2哗 的銘反射層4 ’並實施SIMS分析。於此,!g反射層4内的碳濃度為該銘反 射層4内的碳,農度的最小》農度。其絲,紹反射層4内的碳濃度為如〇2〇 個/cm3。 作為評價基準,第-接合強度是將具有〇39N以上的剪切強度的情況 作為良好,在下述表4巾用符號Q表示。將具有小於0 39N的細強度的情 況作為不良,在下魅4巾賴號X表示。第二接合驗是將具有〇〇49Ν 以上的剪切強度的情況作為良好,在下述表4中用符號。表示。將具有小於 0.049Ν的剪切強度的情況作林良,在下絲4巾㈣號χ表示。 在以上的實施例中,為了將第—和第二接合強度的強度分離測定,實 施剪切試驗’但是謂切試驗來評價線連㈣度非讀要時間和工夫,所 以-般評舰連接強度時大多糊拉力試驗。拉力試驗是指在第—和第二 之間的線上掛上鉤’評價向上提拉而斷裂的荷重、斷裂位置、形狀,但相 同於連接的金_贿或觸連制金線的錢是不能測試。本發明人此 次使用Dage公司的推拉力測試機系列4〇〇〇,實施以下的拉力試驗。 由表4可知,在鋁反射層4的碳濃度為3χ1〇2〇個/cm3以上的實施例% 中’接合強度下降’所以如實施例26和27那樣,使紹反射層4的碳濃度 為lxl02G個/cm3以下’則接合的接合強度良好。 #應予說掷,在該第20實施方式中,通過使用環氧樹脂材、丙烯酸系黏 著劑等有機材料’銘反射層4内的碳濃度上升。其原因,作為碳的浪入源, 可以考慮基材2的污染、沖洗氣、真空泵油的逆擴散、制雜法時的藏 鍍氣體的雜質等各種因素。 另外,在接合試驗中,打線接合機使用B〇ND mc的 MODEL7700D,並使用直徑為25μιη的金接合線。在超音波強度為35〇禮、 201214778 超音波施加時間為100ms的接合條件下實施。在株式會社灿仿⑶的接合測 試儀PTR-1的剪切試驗模式下實施。SIMS測定是利用phi公司 ADEPT1010,作為一次離子源,將绝離子以3keV的加速能量來實施。 (第2〇實施方式的效奉) 根據該第20實施方式,通過將鋁反射層4的碳濃度設定為lxl〇2%@/cm3 以下,除了上述第11實施方式的效果以外,還可以得到接合性優異的半導 體發光元件安裝用基板及使用該基板的半導體發光裝置。 〔第21實施方式〕 參照第19圖,第19圖示意性地表示了作為第21實施方式的半導體發 光元件安裝用基板、以及半導體發光裝置。在該圖中,該第21實施方式中 的基本結構是:半導體發光元件6裝載於獨立的紐2A上,而未裝載於用 於通電的基材2B、2C上,在這-點上與上述各實施方式大不綱。圖示例 中’用於與半導體發光元件6打線接合或彻所謂被稱為㈣導線的配線 材接合配線的供電用端子的基材2B、2C上沒有設置減射層4,所述配線 材使用將銅等金屬fg以廢力等來加工成細線狀而得到的製品。 打線接合尖端也可以有銘反射層4,但是在銘反射層4不存在的情況 下,通過使基材2B、2C的表面狀態最佳化,從而接合條件的範圍擴大 配速度、良率變得良好。 、& 第19圖中在同-結構例中表示了半導體發光元件6的安裝部分的基材 2A和-對基材2B、2C的銀層或銀合金層3、金閃錄層1〇,但基材2a、以 及基材2B、2C的銀層或銀合金層3、金閃鑛層1〇的結構可以不同也可 以分別製作。該接合是鱗、㈣導線的壓接接合,所以接合面的主 料較佳為金、銀、!巴、或以此等為主要;^成元件的合金。 在第19圖中’進-步表示了基材2A、2B、2(:的下部由外包體 的樹脂包覆的結構例’但也可以在背面露出基材2Α、2β、2c的 =分進—步與金屬製的放熱板等以_^接,從而 Ζ以“放熱性,並可以增大光輸出功率。另外,使用具有背面電極 |體發光元件6時,與上部紐連接所使關供電_子有—独上即可, 也可以對與上部電極連接的錄供電用端子進行打線接合 根端子之際,有容_亍大__配線配置、發繼^= 己 31 201214778 置之情況’而將其分開使用。 在第19圖中進一步例示了將半導體發光元件6的電極部分與基材2B、 2C的供電用端子的連接進行打線接合連接的情況,但也可以製作導線,實 施利用換連結的連接,所述導線利用連接用經圖案化的配線材,所述 結使用超音波、加熱。 如上所述’本發明人等得知紹反射層4中的碳濃度會對由金構成的接 合線7與減射層4的接合驗帶錄大影響。應注意這適聽上述的全 部實施方式。 從以上的說明可知,基於上述各實施方式、以及圖示例等說明了本發 明的半導㈣光元件絲用基板及使贱基板的半導體發光裝置的代表性 結構例,但本發明不被上述各實施方式和圖示例等結構例所限定,在本發 明的技術思想的範圍内可以有各種結構。作為供電用端子,打線接合或内 部打線接合的基材2B、2C的表面的主要構成材料可以為選自金、銀、鈀、 金合金、銀合金、或鈀合金中的一種或其組合。 (第22〜第31實施方式) 本發明半導》光元件安裝用基板和半導體發光裝置的實施方式是構 成具有由基材、減射層和在其下之含有鈦的金顧的半導體發光元件安 裝用基板的實施方式,所述基材用於安裝半導體發光元件,且由銅、銅合 金或鐵系合金構成,所述鋁反射層設在基材的安裝半導體發光元件的面側 的至少一部分。 從電阻、熱阻的方面考慮,較佳作為基材的金屬,包含鋼、或銅合金 的基材。另外’作為基材板的金屬,可以使用42合金等鐵錄合金、鐵系框 架材。 進而’基材含有金屬部分即可。例如,基材可以使用在樹脂上貼合有 銅的覆銅板。此時,樹脂形成在基材上之與形成鋁反射層的面相反側的面。 進而’與形成銘反射層的面相反側的基材的表面可以使用包括與有機材、 無機材進行複合化的結構的基材的表面。 〔第22(1)實施方式〕 第2〇圖㈧是表*本發明的帛22⑴實施方式的半導體發光元件安裝用 基板的示賴視圖,2是基材,11是作為第—金屬層的—侧子的金屬層、 32 201214778 符號4是在基材2的-面的包括安裝半導體發光元件的場所的區域中形成 的鋁反射層,符號19是成為鋁反射層的接合層的鈦層’由此等構成半導體 發光元件女裝用基板。欽層19是含有欽的金屬層的一個例子。基材2由金 屬或金屬與有機材或無機材的複合材構成。為了焊接安裝,基材一般的 結構是錄合金的單層、或進-步被魏、金料複合層,在本實施例 令作為其例子記載了金 11 (顯)。作為金屬的材料,軸祕於此, 但通用性最尚的基材是由銅或銅合金構成的金屬導線架。作為基材2使用 銅板的情況下,對其厚度沒有限制,但是可以參考成本來選定厚度。另外, 考慮量產化,較佳銅板的環箍材,但也可以使用短尺寸的片材、以及各種 材料。作絲材2使賴合材的情況下,可峨麟脂材上貼合有銅板的 覆銅板、其積層板。作為樹脂,可以使用硬f的板狀的樹脂、薄且具有可 撓性的樹脂。作為代絲織,分別可以舉出玻魏氧樹脂基板(玻璃布 基材樹脂板)、聚醯亞胺樹脂系等。鋁反射層4、鈦層19的製造方法是用具 有減壓Μ力調節魏的蒸織置通過分批搞理或連觀料進行。從反 射率的觀财慮,減射層4的厚度較佳為上,從平坦性的觀點 考慮,較佳為2μιη以下。 ’ 作為基材2使用銅板的情況下,例如長度為1〇〇m、寬度為5〇顏、厚 度為0.2mm,減射層4的厚度例如為⑽5阿,鈦層19的厚度為〇 _。 製造時,首先’在作為基材2的上述尺寸的峨實施作為金屬層u的錫(㈣ 的電鏡。應予說明,錫的情況下,較佳為卜一左右。接著,使用電阻加 熱式的圓筒式的電子束方式真空蒸難置形成鈦層19、滅射層4。且體 而言,將基材2切割成5〇娜15〇聰的短尺寸材,將切割的16張基^ 放射狀湖在半㈣·mm的桃的工具上,將其在圓筒上配置三 組’使。電子束搶(輸ϋ神6kw)作為銘、鈦的驗源 為2x的a,形成厚度為0·05μηι的銘反射層4。在本實施方式中,二空^ 鍵裝置使用了自製機,使用負載鎖方式的紐機等市㈣驗裝置也沒有 問題。另外,還可岐能觸環歸進行級的 猶、f縣_當_可。轴,^㈣4= 缺工棘/ h可以不疋電子束蒸财式。即’可以湘電阻加熱基鍵法、 離子鍍法、濺鍍法、金屬包覆法等。 33 201214778 〔第22(2)實施方式〕 苐20圖⑻是表示作為本發明第 用基板的示意剖視圖。作為基材2使用銅板的情況下,例如長度為励爪、 寬度為50mm、厚度為0.2mm,铭反射層4的厚度例如為〇 〇5μπι,鈦層19 的厚度為0·_。製造時,首先,在作材2的上述尺寸_板準備錄_ 域層材⑽()·7μΐη、把〇._)。接著,使用電阻加熱式的圓筒式的電子 束方式真空蒸鍍裝置形成鈦層19、魄射層4 ^具體而言,將基材2切巧 成50晒x150mm的短尺寸材,將切割的16張基材以放射狀排列在半徑為 300mm齡狀的ji财具上,將其在_上配置三組,制電子束搶(輸 出功率6kW)作為紹、欽的蒸鑛源,排氣至真空度為2xl〇4Pa,形成厚度 為〇~m _反射層4。在本實施方式令,真空蒸錢裝置使用了自製機, ,用負載射式的驗機等耗的蒸鑛裝置也沒有另外,還可以是 此夠對%箍材進行驗的連續式蒸織置。真空蒸職置是综合考慮模 質、,產性等來適當選擇即可。進而,紹反射層4、鈦層19的形成方式可 以不是電子絲鍍方式。即,可以湘電阻加減麟、軒鍍法、麟 法、金屬包覆法等。 銘反射層4、鈦層19的膜厚測定是利用SMS分析來進行。將從表面 到銘反射層正下錢基底層達職大賊的1/2的信麵麟止的厚度作 為銘反射層的膜厚’鈦層的厚度是到主要構成藉達到該基底層中最大強 度的1/2的信麵縣止的厚度。上述的紐2為靖,使關的信號強度。 (本實施方式有關的實施例的評價) 對紹反射層4,如下確定硫化娜和反鱗^首先,如表5的實施例 33〜實施例37所示’在上述觸〇細、㈣1μιη上,通過賴形成〇 〇5㈣ 的鈦層’社述;ίτ法製作改變厚度的減射層,贼波長腿下的初始 反射率。在該波長下,將硫酸_反射率作為1〇〇%,將反射率為9〇%以上 以下作為特別良好(由。表示),將小於戰作為差(由χ表示)。銘非 常薄時,即厚度為G_m以下時,受到基底的金屬的反射率(此處為把) 的影響:反射率降低。接著’對於硫化特性,對上樣品,將3ppm的邮 (硫化氫)在氣體環境溫度4〇〇c、濕度8〇%下喷霧96 4、時(進行按照曰本 工業標準H85G2紐_腐讎試驗方法的試驗)。财硫化特性是初始反 34 201214778 射率與硫化96小時後的反射率之比。設有銘反射層的情況下,沒有下降至 相對於初始反射率小於90。/。(作為反射率小於81%)的情形。綜上所述, 可以確認作為半導體發光元件安制基板所要求的特性,即初始反射率、 硫化特性(亦即在麟被硫化的環境下制後的反醉)均良好的是紹反 射層的厚度為0·02μιη以上的情況。 應予說明’作為比較例3卜確認了在基材上僅設置3μηι的銀層時初 始反射率為93%而良好、為〇,但在耐硫化試驗後的反射率為⑽,大幅度 下降,硫化特性差。作為比較例32,在基材上只設置錦層(〇 7μη〇、^ (Ο.ί^μπΟ的例子中,確認了雖然耐硫化特性良好,但初始反射率低至63%、 為X。 應予說明,比較例33和34與實施例33同樣設置鎳層17、鈀層18、 鈦層19,其上的減射層料,不具有充分的初始反射特性。 ‘根據本實施方式,由於在基材表面形成有鋁反射層和鈦層,所以可以 獲得未硫化且細具有高且穩定的反射特㈣半導體發光元件安裝用基板 及使用該基板辭導體發絲置。這是湘了朗町雜:㈣反射率 在紫外線中高達銀的3倍以上,並對紫色、紅色、紅外線具有接近銀的反 射率,在金屬t顏色的均衡良好,具有僅次於銀的高反射率,且與銀相比 難以發生硫化。 為了對上述半導體發光元件安裝用基板進行打線接合而進行氮電漿清 洗’然後,接合金線^對該半導體發光元件安裝用基板進行硫化試驗,結 果沒有^到反射率的下降。由該結果可知,其對表面清洗的雜強而無劣 化、剝落之虞。對以上述製作方法形成的半導體發光元件安裝用基板確認 了與金線的接合特性。打線接合機使用K&s公司的4522型,使用直徑25@ 的金線(田中貝金屬製typeC),使用Dage公司之黏結強度試驗機(匕⑽d tester)系列4000來對接合特性的拉力強度進行試驗評價。 基材是電鍍有無壓力加工的銅合金(c_194:厚度〇15mm)、鎳(厚度 〇·7μηι) _把(厚度〇.〇5㈣的基材,形成了單獨的心呂層(厚度〇加)、以 及鈦層(厚度0·1μ„〇 +銘層(厚度〇 1μιη)這兩種。表6中表示膜構造和 金線拉力試驗(樣品數10個)的結果。 如表6所示,可知通過以基材、鎳、鈀鍍層、鈦層、鋁反射層的順序 35 201214778 設置,拉力強度得以大幅度地提高,且變化偏差也小。可知即使沒有鈦層, 也具有實用上沒有問題的轉的接合特性,隔著鈦層的半導體發光元件安 裝用基板的拉力強度增加,接合特性更為良好。在該實施射,作為主要 目的,為了擴大LED元件形成後的電流導入端子的焊接安裝時的良率、焊 接條件,鎳-鈀鍍層可以進一步插入金閃鍍層(厚度換算後相當於〇 〇5μβι以 下)。 應予說明,確認了即使以基材、作為第一金屬層的一個例子的金屬層 11、欽層、鋁反射層的順序形成,也可以得到同樣的效果。 應予說明,雖然有程度差,但在後述的實施方式中也能夠得到由上述 第22(1)(2)實施方式得到的效果。 〔第23實施方式〕 第21圖是表示本發明第23實施方式的半導體發光裝置的示意剖視 圖,表示使用圖20所示的半導體發光元件安裝用基板的半導體發光裝置。 在圖中,符號2是基材、符號23是基材的鍍層、符號4是在基材2的一面 形成的鋁反射層,符號19是鈦層,由此等構成半導體發光元件安裝用基板。 在半導體發光裝置中,將此專兩組(2Α、2Β)在大致同一面上靠近配置而使 用。符號6是安裝於鋁反射層4Α上的半導體發光元件;符號7是將半導體 發光元件6與鋁反射層4Β電連接的接合線。符號8是樹脂製的外包體部 分’該外包體部分包圍不包括半導體發光元件6之基材2Α、2Β靠近之一側, 並具有由傾斜面8b和位於底面的鋁反射層4Α及8形成的凹部,所述傾斜 面8b在半導體發光元件的周圍隨著遠離基材而遠離半導體發光元件;符號 9是填充在外包體部分8的凹部且密封半導體發光元件的透光性樹脂部,構 成外包體的一部分。在符號9中可以混合螢光體材料。例如,通過混合γΑ(} 等’ LED晶片可使用460nm的GaN系LED而用於擬白色LED裝置。 鋁反射層4A、4B、鈦層19A、19B在外包體内側的大致整面、或除去 一部分的剩餘的部分形成即可。其理由是因為從發光元件放射的光在外圍 週邊部内反射即可。 作為具體方法’有(1)在鋁反射層形成時的成膜裝置中,設置將外包體 區域以外遮蔽的功能;(2)在整面形成鋁反射層後,將外包體部區域通過貼 膜(taping)、或光微影製程等遮蔽,然後,蝕刻除去鋁的方法等各種方法, 36 201214778 可以使用此等中的任意—種。 根據灰结構辭導體發絲置,透過位於外包體部分8軸的凹部的 ,面的減射層4A的存在,從轉體發光元件G射至的光藉由銘反射層 A反射到凹部的開σ側,發揮增加來自半導體發光裝置的光量的效果。如 上所述’㉟具有良好的耐硫化雛,所以可以長時_持高反射率。 〔第24實施方式〕 第22圖疋表林發明第24實施方式的半導體發光元件絲用基板的 u視®其特徵在於,在基材2的兩面糊濕式電鑛法依次形成錄層 Π、'把層18、金閃錄層ω,在基材2的_面的金閃鍍層iq上的—部分上 形成鈦層19、銘反射層4。在基材2上依次形成鎳層17、把層18、金閃鍵 層10的理由之-是為了確保基材2與安裝半導體發光裝置的印刷電路基板 之間的焊料β潤性’即為了提高烊接接著性。此時,錄層17的厚度可以為 0.4 1.5μπι⑱層18的厚度可以為〇 〇1〜〇 2陣、金閃鑛層1〇的厚度可以 為Ο.ΐμπι α下。此等厚度是本發明人確認出效果的厚度,但可以根據安裝 的元件而進行些微的變更。從光反射特性的觀財慮,反射層4的厚产 較佳為0_G2Mm以上,,從平坦性的觀財慮,較佳為2啊以下。又 、鋁反射層4、敛層19的製造方法是在具有減壓功能的蒸錄裝置中,通 過分批次處理或連魏理縣断。麟和⑽18賴式電縣、真空蒸 鑛等乾式均可以制本製品所需要的品質賴層。濕式錢可以在材料的 全部面(6面)進行塗佈,且大多能以低成本製作,所以本發明的錄層、把 層18較佳以濕式電鍍來形成。 曰 應予說明’鎳層17、把層18、金閃鍍層10的以濕式電錢法形成的基 底層的膜厚是通過積算電鍍時的電流值來進行計算。 土 以防止鋼的氧化導致的基材的變色、提高半導體發光元件安裝用基 變硬時的可操作特性為目的,該鎳層的厚度可轉α4μηι〜15μιη之^的 值。在利崎接安裝元件時,通過在成為其連接部的部分形雜層i/從 而得到良好的焊料浸潤性,因此可以設置鈀層18。作為鈀層18其厚度大多 為Ο.ΟΙμηι〜0·2μιη,根據焊接條件來決定厚度。 又 本實施方式的效果是通過將鋁作為反射層使用,可以確保高反射率。 進而,通過使用0.02μιη以上厚度的鋁反射層4,除了可以得到良好的耐久 37 201214778 轉狀射率的效果以外,紐揮町的效果。即,發揮上述數 層18可61H、17可續止基材2的主要材料靖舰,上述數值範圍馳 聲層裝時與無料接材的浸潤性的提高,上述數值範_金閃 Γ步提高焊接的制健可長娜料觸絲。即,通過形成 每樣的構造,可以得到適合焊接的構造。 〔第25實施方式〕 圖,示本發日料25實财式辭導體發錄置的示意剖視 $疋將第22圖所示的半導體發光元件安裝用基板、第21圖的外包體 分8和透紐樹脂部9組合的料體發絲置的實關^與第2ι圖和 圖相同的部分用相同符號來表示。 作為基材2使用鋼板時,準備例如長度為1〇〇m、寬度為5〇mm、厚度 為〇.2mm的鋼板,在基材2的表面通過濕式電鍍法依次製作厚度為1师ς 錦層17厚度為〇.ipm的把層μ、厚度為o.oigm的金閃鑛層1〇。進而, 留著用於金閃鍍層1〇面上的焊接接著鈦層19A、19B和鋁反射層々A、 ,部分,並且在作為反射膜來使用的部分進行部分紐,得到了在焊接接 著部沒有!S層、在用於反射的部分有姆的材料。然後,沖壓機、钱 刻製作半導體發光元件安裝用的框架形狀,將兩組(从與从犯與犯) 在大致同一面上靠近配置。然後,形成樹脂製的外包體部分8,該外包體部 分8包圍基材2A、2B靠近的部分,並具有將半導體發光元件6的周邊預先 挖通的凹部。接著,用導電性糊料安裝半導體發光元件6,將表面電極和導 線架用金打線接合進行連接。最後,在外包體部分8的凹部内填充透光性 樹脂(矽樹脂等),使其被覆半導體發光元件6,從而形成作為外包體的一 部分的透光性樹脂部9。 在以上的說明中’製作半導體發光元件安裝用基板後’利用沖壓機、 蝕刻成形為規定形狀,但也可以利用後鍍法。即,可以將基材2成型為規 定形狀後,利用濕式電鍍法在基材上形成各鍍層(10、17、18),以真空蒸鍍 法等乾式電鍍法形成鋁反射層4、鈦層19。進而,對於基材2,對由銅構成 的情況進行說明,但是可以使用在樹脂等上設有銅配線的基材。另外,從 用途、成本等考慮’還可以使用其他的金屬基材,例如鐵系的42合金等。 另外’可以利用印刷電路板、撓性配線板形成步驟形成配線後,形成鋁反 38 201214778 射層4、鈦層19而使用。像這樣,根據目的、構造、材料(銅板或具有可 撓性的撓性樹脂基材)’可以變更形狀的製作(利用沖切加工、彎曲加工、 鼓凸加工等形狀的製作)、電鑛、蒸鑛的順序。 所女裝的半導體發光元件6可以安裝例如GaAs-Si-LED、 AKJaAsiED、GaP_LED、AlGalnP-LED、InGaN-LED 等 LED 晶片。另外, 第13圖所示的半導體發光元件6是頂面和底面的電極朝縱向之元件,但不 限於此,也可以是在同-师成__對電極的平面構造的LED (例如,㈣ 系在電極形成關-面的平面構造的情況下,有將電極面朝絲面側(圖 中為上側)’ 1%極、陽極均實施打線接合的情況;丨電極面朝向下(導線架 側)而直接連接的所謂的覆晶安裝方式,可以使用任一安裝方式。也可以 用銅系打線接合、鋁打線接合代替金打線接合。 進而,該實施方式中係使用施加有金閃鍍層1〇的基板,關於金在較 粗的間距(例如G.5mm間距的情況),即不拘高精密度的情況下,沒有金閃 鍍層10也能帶來高良率,所以可以省略。關於鈀層18,只要是能夠確保金 屬層的厚度,並得到充分的焊料浸潤性,就可以省略鈀。 根據該結構的半導體發光裝置,與第21圖所示的半導體發光裝置同 樣’透過位於在外包體部分8形成的凹部的底面的銘反射層4A的存在,從 半導體發光元件6射至的光藉由銘反射層4A反射到凹部的開口側,發揮增 加來自半導體發光裝置的光量的效果。另外,由於鋁反射層4A具有良好的 光反射特性,所以可以長時間維持高反射率。 〔第26實施方式〕 一第24圖是表示本發明第26實施方式的半導體發光元件安裝用基板的 不意剖視圖。該實施方式列為圖22所示的半導體發光元件安裝用基板的變 化例,第24圖(a)表示僅在基材2的一面形成鎳層17、鈀層18和金閃鍍層 1〇 ’在金閃鑛層10.上的一部分形成鈦層19、铭反射層4的例子;第24圖 (b)表不在基材2的-面形成的金閃鑛層1〇上的一部分形紐層19、铭反 射層4 ’將一部分在紙面上向上方彎折大致9〇度的例子;第24圖⑷表示在 基材2的整面形成錄層17、纪層18矛口金閃鑛層1〇,在形成的金閃鑛層1〇 的整面形成鋁反射層4、鈦層19,將一部分在紙面上向上方彎折18〇度的 例子;第24圖⑷表示在基材2的一面直接形成鋁反射層4、鈦層19,在基 39 201214778 材2的另一面形成鎳層17、鈀層18和金閃鍍層⑴的例子。 第24 ffi(a)所示的半導體航元件安裝用基板可以如下構成,即,在由 鋼構成的基材2的單面以顿法形成厚度為〇細的鎳層w,以電鑛法形 成厚度為Ο.ΟΙμηι _層18,並形成厚度為〇 1μπι的金閃鑛層1〇,進而在 金閃鑛層10的_部分上侧紐法形献層19、減㈣4。應予說明, 像該例子這樣’在_基材上依次積層錄、Ιε、金、辦,除了減射層 以外,可缝舰式電鍍法。躲贼射層4、鈦層19,現在以濕式電鑛 法不能容㈣進行魏’所以可以採用真空驗法。作為其他的方法,例 如可以利用在惰性氣射的錢鍍法。另外,從成本、製程步驟的簡化等觀 點考慮,可以使用此等方法中的多種。 、第24 ®(b)所福半導體發光元件安制基板是依次在基材2上以電鍵 法形成厚度為1.5μηι的騎Π、以驗法形成厚度為Q 2叫_層18、形 成厚度為Ο.ΐμτη的金閃鑛層10後,在一部分上形成鋁反射層4、鈦層19 而構成。圖24(c)所示的半導體發光元件安裝用基板是依次在基材2上以電 鑛法形成厚度為1.5μηι _層17、以電鍍法職厚度為Q 2哗_層18、 形成厚度為Ο.ίμιη的金職層1G後,在整面形雜層19、做射層4而構 成。此等例子是假設將半導體發光元件絲魏層19、|g反射層4的頂面, 並在基材2的底面或侧面實施打線接合的使用方法。更具體而言,是基材2 彎折時能夠1M的結構。舒綱,在本實關巾,在基材2的背面實施 打線接合,但也可以根據目的在背面被覆鎳層17、鈀層18、金閃鍍〇 等。 第24圖(d)所示的半導體發光元件安裝用基板與第24圖(心的例子同 樣將錄層17、纪層18和金閃鑛層10僅施加在基材2的單面,所以可以抑 製此等金屬的使用量。僅對單面進行電锻時,Μ 2個基材貼合而進入電錄 步驟’然後進行分離,從而不需要遮蔽材就可以達成ρ紹反射層4、欽層 19如上所述根據厚度而容易受到基底帶來的反射率的影響,因此較佳^ 0·02μηι以上。雖然在整面形成有鋁反射層4、鈦層19,但也可以是部分性 地形成鋁反射層4、鈦層19的構造。形成第24圖(d)所示的半導體發二元 件安裝用基板後,可以將基材的端部(也稱為基板連接導線、外導線)2 工成規定形狀來使用。例如,將從基材的外包體露出的部分(外導線)的 201214778 底面f曲加工成與印刷電路基板的頂面接觸,在與基材進行連接時,可以 使用該結構。即,基材的巾央部分作為減射層使用,基材的端部的底面 作為外導線,鎳-鈀側的面與印刷電路基板連接。 〔第27實施方式〕 第25圖是表示本發明第27實施方式的半賴發光元件安裝用基板的 不意剖視圖。該實施方式的結構如下:在基材2的兩面或一面形成選自記 (Pd)、金(Au)、錫(Sn)、鎳⑽、鋼(Cu)_錫(Sn)合金、銅(Cu)_鎳⑽合金中的 單層的金屬層11 ’在金屬層U或基材2上形成鈦層19、紹反射層4。⑻ 表示在基材2的兩面形成金屬層u,在一面的金屬層^上的一部分上形成 欽層19、銘反射層4的例子;⑻表示在基材2的一面形成金屬層n,在金 屬層11上的-部分上形成鈦層19、銘反射層4的例子;⑹表示在基材2 的面形成金屬層11,在基材2的另一面形成鈦層19、铭反射層4的例子。 /巴比銅更具有抗氧化絲,並具有細於焊接的舰合的優點;錫具 有容易進行焊接且廉價的優點,但具有略容易氧化的缺點。銅-錫合金比銅 2以氧化,與錫和銅相比,具有容祕錫熔合的優點。銅齡金具有比錄 合易與錫料的優點。依據料特點,可以根據使祕件、製造條件選擇 作為金屬層11最佳的材料。 〔第28實施方式〕 -第26圖是表示本發明的28實施方式的半導體發光元件安裝用基板的 示意口J視圖^玄實施方式的特徵在於在鈥層19、銘反射層4上形成工處或 多處鍍金層12。第26圖(a)表示在鈦層19、鋁反射層4上的一部分上形成 鑛金層12的例子;第26 _表示在部分形成的欽層19、銘反射層4的外 側的金隨層ίο上形成鍍金層12 _子;第26圖⑷表示姐層19、銘反 射層4上的整面形賴金層12 _子;第% _表示在形脑欽層19、 銘反射層4的金隨層1〇上的整面形成鍍金層12的例子;第%圖⑻是表 不使用縣導體發光元件安裝絲板的轉㈣光裝置實施方式的一個例 子的示意剖視圖。在此等實施例中,在基材2的整面依次形成有錄層n、 把層18和金隨層1G ’但不限於鱗,如上述各實關中麟,還可以適 用於形成單層的金屬層U的情形、在基材2上直接形成欽層19、銘反射層 4的情形。 41 201214778 丰導賴金層12可以利胁安裝姐層19、減射層4上的 ΐ=ϊΐΠΓ連接。_轉,域長(藍色)側_率愈低, 。根據職,參考反料祕賴金層12的構造即 I其3=成於此各鑛_、12、17、_由濕式電鑛法形成,也可以 〔第29實施方式〕 第27圖是作為本發明第29實施方式而表示半導體發 Ϊ:=3。本實施方式有關的半導體發光裝置是利用第22〜第% ίΓΪΐίϋ導體發光元件安裝用基板卜安裝在例如印刷電路基板而 外包體部分發光元件安裝用基板1的 底面大致成同一面的部分la或位於底面之下方的LED wafers such as AlGaAsiED, GaP_LED, AlGalnP-LED, InGaN-LED. In addition, the semiconductor light emission shown in FIG. 4 is an element facing the vertical direction with respect to the electrodes of the top surface and the bottom surface, but is not limited thereto, and may be an LED having a planar structure in which the same surface is formed and the counter electrode is formed (for example, ). In the case of a planar structure in which the electrodes are formed on the same surface, the electrode faces are directed toward the surface side (upper side in FIG. 201214778). The cathode and the anode are both wire bonded; the electrode faces are directly connected to the lower side (the lead frame side). In the so-called flip chip mounting method, any mounting method can be used. It is also possible to use copper wire bonding and aluminum wire bonding instead of gold wire bonding. Further, in the "in this embodiment", a substrate to which the gold flash plating layer 10 is applied is used, and in the case of a gold having a relatively large pitch (for example, a case of a pitch of 5 mm), that is, without a high precision, there is no gold flash plating layer 10 Can also get high yield, so it can be omitted. The palladium layer 18 can be omitted as long as the thickness of the metal layer can be ensured and sufficient solder wettability can be obtained. According to the semiconductor light-emitting device of this configuration, similarly to the semiconductor light-emitting device shown in Fig. 2, the semiconductor light-emitting elements 6 are transmitted through the presence of the aluminum reflective layers 4A and 4B located on the bottom surface of the concave portion formed in the outer cladding portion 8. The light is reflected by the reflection layers 4A and 4B to the opening side of the concave portion, and the effect of increasing the amount of light from the semiconductor light-emitting device is exhibited. Further, since the aluminum reflective layers 4a, 4b have good generality, they can be turned upside down for a long time. Further, since the intermediate layer composed of the nickel layer 17, the palladium layer 18, and the gold flash layer 1 存在 exists between the substrates 2A and 2B and the aluminum reflective layers 4A and 4B, it is possible to achieve the installation and the ship-less solder material. Increased invasiveness. [Fifth Embodiment] Fig. 5 is a schematic cross-sectional view showing a fourth substrate of a conductor light-emitting device according to a fifth embodiment of the present invention. This embodiment is a third example of a variation of the positional change of the semiconductor light-emitting broadcast substrate. Fig. 5 (8) shows that only the nickel layer 17, the layer 18 and the gold flash are formed on one surface of the substrate 2, and the layer 10 is in the gold flash. A part of the first layer of the ore layer forms an example of the inscription layer 4; 帛 $ (9) indicates that a part of the gold ore layer formed on the surface of the substrate 2 forms a reflection layer 4, and a part is on the paper surface. An example of bending upward by approximately 90 degrees; Figure 5 (4) shows that the entire surface of the substrate 2 = recording layer π, _ 18 and gold _ layer 1G 'is formed on the entire surface of the formed side plating layer ω An example in which the portion is fed upward (10) degrees on the paper surface. The figure (6) indicates that the subtraction 4 is directly formed on the -2 plane, and the nickel layer 17, 18 and the gold flash layer are formed on the other surface of the substrate 2. 1〇 example. The substrate for mounting a semiconductor light-emitting element shown in Fig. 5 (8) can be configured as follows: a surface 7 is thin, a _17, and a gold flash plating layer 10 having a thickness of a spleen is formed by a surface method. In the case of the flash plating layer 1G, the outline of the method is as follows. On the copper substrate, the secret is accumulated in the order of gold, and the gold is used, except for bribes ^ 201214778 ί. The _reflective layer 4' can not be easily subjected to the vacuum method in the electric body by the wet electric ore method. For other methods, for example, in the method of inert gas, etc., the other parts are simplified from the cost and the process steps. From the viewpoint of consideration, it is possible to use this ^ 5 _ (_ - semi-conducting light tree (4) substrate is sequentially nickel plated 17 on the substrate 2 with a thickness of 1.5 qing, and the thickness of the 轨2 qing layer is formed by a key method. 18, the shape of the drought is 0. 1μιη gold with the layer 1G, and the formation of the subtraction layer 4 in the __ portion is formed. The semiconductor light-emitting element of the $ c is not the substrate is sequentially on the substrate 2 with electricity ore The method forms a thickness of <1.5 for the recording layer 17, and forms a thickness of 0 with the electro-mine method to form a layer of gold, and forms a gold ore layer with a thickness of Ο.ίμηι, and forms a reflective layer 4 on the entire surface. These examples are based on the assumption that the semiconductor hair piece is threaded on the top surface of the sensor 4 and the wire bonding is performed on the bottom surface or the side surface of the substrate 2. More specifically, when the substrate 2 is bent, Applicable structure. It should be noted that in the towel of the present embodiment, the wire bonding is performed on the back surface of the substrate 2, but it is also possible. The semiconductor light-emitting element mounting substrate shown in Fig. 5(d) is the same as the example of Fig. 5, and the nickel layer 17 is placed on the back surface of the recording layer 17, the layer 18, and the gold flash layer. The palladium layer 18 and the gold flash layer 1 〇 are applied only to one side of the substrate 2, so that the amount of use of these metals can be suppressed. When only one side is plated, the two substrates are bonded together to enter the plating step, and then Separation is carried out so that the masking material is not required. The aluminum reflective layer 4 is easily affected by the reflectance of the substrate depending on the thickness as described above, and therefore is preferably 〇〇2 μm or more. Although aluminum reflection is formed on the entire surface. The layer 4 may have a structure in which the aluminum reflective layer 4 is partially formed. After forming the semiconductor light-emitting element mounting substrate shown in Fig. 5(d), the end portion of the substrate (also referred to as a substrate connecting wire) may be used. The outer lead wire is processed into a predetermined shape. For example, the bottom surface of the portion (outer wire) exposed from the outer covering of the substrate is bent to be in contact with the top surface of the printed circuit board and is connected to the substrate. Use this structure. The center portion of the base material is used as the inscription layer, and the bottom surface of the end portion of the base material serves as the outer lead wire, and the surface on the recording and red side is connected to the printed circuit board. [Embodiment 6] FIG. 6 shows the sixth embodiment of the present invention. A schematic cross-sectional view of a semiconductor light-emitting device mounting substrate of the present embodiment. The structure of the embodiment is as follows. On both sides or one surface of the substrate 2, a material selected from the group consisting of (Pd), gold (Au), tin (Sn), and nickel (Ni) is formed. , copper (Cu)-tin (Sn) alloy, copper (Cu)-recorded (Ni) alloy single 12 201214778 metal layer 11 or substrate 2 is formed on the subtractive layer 4. The metal layer 11 is composed of metal other than Ag An example of the first metal layer - but t6 ^ (8) shows an example in which the metal layer u is not formed on both sides of the substrate 2, and a portion of the metal layer u on the surface is formed as the aluminum reflective layer 4. 6_11, J -Asmm, L · Juice Fig. 6 (8) shows that the metal layer is not formed on one side of the substrate 2 on the gold 11 - part forms the inscription layer 4 _ sub; 帛 6 (4) shows that the enamel layer 11 is formed on the substrate surface An example in which the formation layer 4 is formed on the other surface of the substrate 2. That is, (8) to (c) are examples in which the ruthenium metal layer η is exposed on a part of the surface of the semiconductor light-emitting element mounting substrate. The _ has more anti-oxidation wire and has the advantage of matching with the soldering culvert; the tin has the advantage of being easy to weld and has a slight greening disadvantage. Copper-tin alloy is harder to oxidize than steel, and has the advantage of being easy to combine with tin and _. Copper-nickel alloys have the advantage of being easy to combine with. According to the scale, the secrets of the ship can be selected and the manufacturing conditions are selected as the best material for the metal layer 11. [Embodiment 7] Fig. 7 is a schematic cross-sectional view showing a substrate for mounting a seventh-generation rich drunk conductor light-emitting device according to the present invention. This embodiment is characterized in that a layer or a gold ore layer 12 is formed on the money shot layer 4. Fig. 7(8) shows an example in which a portion of the ingot layer 4 is formed to form the gold layer 12; and Fig. 7(b) shows an example in which the layer 12 is formed on the gold layer 1G in the phase of the (4) 4 phase of the partial alkali; Fig. 7(c) shows an example in which the gold plating layer 12 is formed on the entire surface of the aluminum reflective layer 4; and Fig. 7(d) shows the aluminum reflective layer 4 on the aluminum reflective layer 4 and the gold flash layer 1 on which the aluminum reflective layer 4 is formed. In the example of the semiconductor light-emitting device, the semiconductor light-emitting device mounting substrate is used. In these embodiments, the nickel layer 17, the palladium layer 18, and the gold flash plating layer 10' are sequentially formed on the entire surface of the substrate 2, but are not limited thereto, and a single layer of metal is formed as described in the above embodiments. In the case of the layer 11, the case where the aluminum reflective layer 4 is directly formed on the substrate 2 is also applicable. The gold plating layer 12 in the embodiment of the invention can be used for electrical connection of semiconductor light emitting elements mounted on the reflective layer 4. The thicker the gold plating layer, the lower the reflectance on the short wavelength (blue) side, but the better the connectivity of the gold wire. The structure of the gold plating layer 12 may be determined by reference reflectance depending on the application. Incidentally, the respective plating layers (1, 12, 17, and 18) are formed by a wet plating method, and may be formed by other methods. 13 201214778 [Embodiment 8] = The figure is a schematic use state of the eighth embodiment of the invention. In the semiconductor light-emitting device according to the present embodiment, the substrate 丨 is fabricated by using the semiconductor light-emitting elements of the related art, and the substrate is printed as a printed circuit board. A portion (outer wire) extending outwardly from the outer covering portion 8 of the printed circuit board 13' of the printed circuit board mounting substrate , is formed, and a portion la or larger than the bottom surface of the outer covering portion S is formed or The portion lb, le below the bottom surface. This portion is bonded to the wiring of the printed circuit board 13 by the tan material 14. Fig. 8 (8) shows an example portion 1a in which the forming portion is formed by bending the outer wire 90 degrees downward toward the lower side, and then bending it in the opposite direction by 9 degrees toward the water + direction 'unchanged direction of the material wire, and The horizontal position is substantially the same as the bottom surface of the outer casing portion 8 to indicate the formation of a portion lb which is bent 90 degrees twice 'to the outer surface of the outer casing portion 8 Formed; 8th_ is a forming portion le _ sub, which is to ride the outer wire twice along the outer casing portion 8 in the opposite direction to the eighth _, so as to be along the top surface of the outer casing portion 8 form. The f-folding method of the outer conductor is not limited to this, depending on the shape of each of the semiconductor light-emitting devices. [Ninth embodiment] In the present embodiment, the embodiment of the above-described embodiment is similarly the same as the other embodiments. However, the carbon concentration of the reflective layer &1><1〇2〇 Do not be below the claw 3. In order to evaluate the adhesion to the semiconductor light-emitting element mounting substrate, the bonding force is bonded to the bonding wire made of gold. Here, the wire bonding means that the electrode bonding pads on the lead frame side and the electrodes mounted on the components of the s-Hing lead frame are electrically connected, and are connected by gold or the like. The first-joining means that the wires of the wire are formed into a spherical shape by discharge to be previously joined. In the position accuracy and the crimpability, the electrodes on the element side are mostly joined first. In the present embodiment, a portion where the light-reducing layer is provided in the same manner as in the first embodiment is used to bond the tip of the wire to a spherical object (spherical line). ^ One joint means that the electrode on the element side is joined to the electrode on the lead frame side to be connected by the above-mentioned wire. In the actual sealing towel, on the copper substrate, the same embodiment of the fresh i is used, and the portion having the reflective layer is connected to the wire miscellaneous. Table 2 shows the relationship between the carbon concentration in the inscription layer and the bonding strength of the gold wire. As a real example of 201214778, it will be at a thickness of 0. On a 15 mm copper substrate, a nickel layer of 〇·7μηι is formed by wet plating, and a product obtained by 0.05 μm is subjected to press working at a thickness of 〇. An example of a circuit board for a light-emitting device was formed by fixing a 5 nim three-layer glass epoxy resin substrate with a heat-resistant acrylic resin adhesive. This material was attached to the above vacuum vapor deposition apparatus to form an aluminum reflective layer of 0·2 μm, and SIMS analysis was performed. Here, the carbon concentration in the aluminum reflective layer is the minimum concentration of the carbon concentration in the aluminum reflective layer. The carbon concentration in the aluminum reflective layer was 3 x 1 〇 2 () / cm 3 . For the substrate of Example 12, the copper substrate of 70 μm was formed on the entire surface of the polyimide film having a thickness of 125 spleth by wet electric bonding, the recording layer of 〇_7μηι, and the Ιε of 5〇ιτι after 〇·〇5μιτι A plate material formed by bonding a heat-resistant acrylic resin adhesive to a substrate with the obtained product. In the embodiment 12, after the formation of the aluminum reflective layer, in the press working, the wiring member is formed by punching off (as a lead frame) an unnecessary portion. Similarly, the carbon concentration in the aluminum reflective layer of Example 12 was analyzed by sjjyjs. As a result, the carbon concentration in the aluminum reflective layer was lxl〇2〇/cm3. Embodiment 13 is to form a nickel layer of 〇7μηη by wet plating on an iron-containing copper alloy, 0. After the palladium of 05 μηι, only the press working was performed, and the obtained product was fixed in a vacuum vapor deposition apparatus with a stainless steel (SUS304) die clamp to form a 反射 2 gm of a reflective layer. The carbon concentration in the aluminum reflective layer of Example 13 was 3 χΙΟ 19 / cm 3 . As a criterion for evaluation, the first joint strength is a case where the shear strength of G 39N or more is taken as 〇, and will be less than 0. 39 作为 as X. The second joint strength is a case where the shear strength on the crucible is taken as 〇, which will be less than 0. 049 作为 as X. As is clear from Table 2, when the carbon concentration of the aluminum reflective layer is 3 χ 1 〇 2 〇 / cm 3 or more, the bonding strength is lowered, preferably 1 X 102 G / cm 3 or less. It should be noted that in the present embodiment, since the epoxy lining material is additionally used, the carbon concentration is increased, and the bondability is inferior to the other examples. Further, although the bondability is within the range of the impurities, the "reduction layer" carbon concentration also increases when the acrylic-based adhesive organic material is used. When the bonding property is strictly required, the resin is not used as in the case of the first embodiment, and after the substrate for mounting the semiconductor light-emitting device is formed, that is, after the formation of the reflective layer, the resin may be used. In addition, as a source of carbon to the light-reduction layer, contamination of the substrate, flushing gas during sputtering, and diffusion of the vacuum pump oil can be considered as the sputtering gas when the sputtering method is used. Various factors such as impurities. In the joint test, the 'wire bonding machine uses B_ lion _ _ ' and the gold line of the county 25μιη, in the supersonic stitch filling, super 15 201214778 曰 ^ plus Η 'between l〇〇ms joint conditions Implemented below. The centripetal measurement was carried out in the shear test mode of the joint test PTR1 of the company. The ADEPT1G1G of the company was implemented as the acceleration energy of the sub-ion source. As described above, the inventors have learned that the carbon concentration in the reflective layer of the inscription is green in the bonding strength between the gold wire and the reflective layer. This is all about the above embodiments. [10th embodiment] The ninth embodiment is a schematic cross-sectional view showing a semiconductor hairpin according to the first embodiment of the present invention. This embodiment is characterized in that the semiconductor light-emitting element 6 is mounted on the radiation-emitting layer 4, and the substrate 2B, 2C for supplying the wire (4) for wire bonding or internal wire bonding with the semi-light element 6 does not have the aluminum reflective layer 4: The wire bonding front end may also have the reflective layer 4, but in the case where the reflective layer 4 is not provided, by optimizing the surface state of the substrates 2B and 2C, the bonding condition is large, the assembly speed, and the yield k are obtained. good. Fig. 9 is a view showing an example in which the base material 2 of the mounting portion of the semiconductor light-emitting device 6 and the ore layers (1, 17, 18) provided on the substrates 2B and 2C have the same structure, but the substrate of 2a, 2b, and % Lin County can be called the same, but also (4). Further, Fig. 9 shows a case where the lower portions of the base materials 2A/2B and 2C are covered with a resin, but the entire surface or the portion of the back surface of the base materials 2a, 2b and 兀 can be exposed on the back surface. The exposed portion is connected to a metal heat release plate or the like by soldering or the like, whereby the heat dissipation property can be improved and the light output power can be increased. Further, when the semiconductor light-emitting element 6 having the back electrode is used, one or more power supply terminals for connection to the upper electrode may be used. Alternatively, a plurality of power supply terminals connected to the upper electrode may be wire-bonded. When a plurality of terminals are used, there is a case where it is easy to perform a wiring arrangement when a large current is driven, and a wiring arrangement between the light-emitting devices is used. Fig. 9 shows a case where the connection between the electrode portion of the light-emitting element and the power supply terminal is wire-bonded. However, the internal lead wire may be formed to be connected by wadge bonding, and the internal lead wire may be used for connection. The patterned wiring material is ultrasonically heated by the wedge connection. The present invention described in the representative configuration example of the semiconductor light-emitting device mounting substrate of the present invention and the semiconductor light-emitting device using the same is not limited to the configuration example, and may be within the scope of the technical idea of the present invention. Various structures. As a power supply terminal, the wire is connected within 5 turns. The main constituent material of the surface of the tapping wire bonded substrates 2B, 2C may be one selected from the group consisting of: silver, palladium, gold alloy, silver alloy, or palladium alloy, or a combination thereof. 16 201214778 (苐11~21st embodiment) The present invention has a basic structure of a cast-in-light element mounting substrate and a semiconductor light-emitting device according to an exemplary embodiment. A silver layer or a silver alloy layer is provided at least in part, and a subtractive layer is provided on the silver layer or the silver alloy layer. 4 semiconductor light-emitting device * mounting substrate and another basic configuration of the semiconductor light-emitting device: a silver layer or a silver alloy layer is provided on at least a part of a surface on which the semiconductor light-emitting element is mounted on the substrate, and the silver layer is provided in the silver layer An aluminum reflective layer is provided on the layer or the silver alloy layer via a metal layer. The thickness ‘the thickness of the erector is preferably _6μπι or more and 2μιη, and the impurity carbon concentration of the reflective layer is ΙχΙΟ14/cm3 or more and 1χΐ〇2〇/cm3 or less. In order to reflect light even when the reflective layer is very thin, the silver layer or the silver alloy layer is preferably Ο. ΟΙμηι above. As a metal layer interposed between the substrate and the silver layer or the silver alloy layer, for example, preferably selected from the group consisting of palladium, gold, tin, nickel, copper-tin alloy, copper-nickel alloy, iron-nickel alloy or combination. As the metal layer between the silver layer or the silver alloy layer and the aluminum reflective layer, for example, gold is preferable, and as its thickness, it is preferably Ο. Ίμιη below.夂 From the viewpoint of electric resistance and thermal resistance, a material composed of, for example, steel or a copper alloy is preferable as the material of the substrate. As another material of the substrate, for example, an iron-based alloy such as a 42 alloy or an iron-based frame material can be used. "1" As the substrate, a metal portion may be used. For example, a copper clad laminate in which copper is bonded to a resin may be used. As the resin, for example, a silver layer or a silver alloy layer is formed on a substrate: aluminum reflection The surface on the opposite side of the surface of the layer. The surface of the substrate on the side opposite to the surface on which the aluminum reflective layer is formed may be a surface of a substrate containing a structure in which the organic material or the inorganic material is composited. With reference to Fig. 10, the entire symbol J is schematically shown as a semiconductor light-emitting element mounting substrate according to the first embodiment. The substrate 1 mainly includes a substrate 2 and is formed on both surfaces of the substrate 2. A silver layer or a silver alloy layer 3 is formed with an aluminum reflective layer 4 formed on a side of the substrate 2 including a region on which the semiconductor light emitting element is mounted, via the silver layer or the silver alloy layer 3. The substrate 2 is made of metal or metal. A composite material of a machine material or an inorganic material. The metal material is not limited, and the most versatile substrate is a metal lead frame made of copper or a copper alloy. When a copper plate is used as the substrate 2, the thickness is not However, it can be selected with reference to the cost of 17 201214778. Considering the mass production, it is preferably a hoop material of a copper plate, but a short-sized sheet and various materials can also be used. When a composite material is used as the substrate 2 A steel plate and a laminated plate to which a copper plate is bonded to a resin material can be used. As the resin material, a hard plate-shaped resin and a thin resin having flexibility can be used. As a representative example thereof Each of them may be a glass epoxy resin substrate (glass cloth substrate resin plate), a polyimide resin system, etc. The inscription layer 4 is a batch processing using a vapor deposition device having a pressure reducing pressure regulating function. It is manufactured by continuous processing, etc. From the viewpoint of reflectance, as the thickness of the aluminum reflective layer 4, it is preferably 0. 006μιη or more. In addition, from the viewpoint of economy, 2μηι or less is appropriate. Hereinafter, a method of manufacturing the substrate 1 for mounting a semiconductor light emitting element will be described. In the case of the production of 4, first, a copper plate was prepared as the substrate 2. When the base material 2 is a steel sheet, the size of the base material 2 is, for example, a length l〇〇mx width 5〇mmx thickness 〇2 mm, a thickness of the silver layer is 〇〇2 μm, and a thickness of the aluminum reflective layer 4 is, for example, a size of 〇05 μm. . Next, a silver layer or a silver alloy layer 3 was formed by wet plating on both surfaces of the substrate 2. Silver plating is generally performed using a silver cyanide plating bath, and a cyanide-free bath can also be used. When plating, the gloss can be improved by adding an organic luster and adding a small amount of a metal salt (yttrium, nickel, cobalt, tin, selenium, etc.). In addition, while adding silver salt to the electrician, adding gold cyanide gold (4) gold raw material, so that silver alloy plating can be performed. Similarly, by adding a compound salt of platinum, palladium, rhodium, nickel, indium or the like, silver alloy plating can be performed for the silver alloy layer. Next, the brittle layer 4 is formed on one side of the silver layer or the silver alloy layer 3 by a resistance heating/cylindrical vacuum evaporation apparatus. In terms of frequency, the short-cut material 16 > 1 ' of the 2nd cut (10) (9) is placed on the umbrella-like mold with a radius of 3G () mm. Configure three groups on the raft. Then, using the resistance heating source (output power trace) as the source of the test, the true line is 2xl (r4pa, the thickness of the thickness is G Ό5μιη, the inversion layer 4. As the Lin source of the Shao] can be used in the load lock mode In the electron beam method, it is also possible to use the f ink to hang it. By optimizing the Durus, which is excellent in durability, the lamp can be vaporized stably. In the eleventh embodiment, the vacuum wire is used in a vacuum. Machine, but it is also possible to use the negative-difference-plating_shi (four) inspection device. Correction, shooting is a continuous-stage device that can be tested with a box. The vacuum Wei device can be appropriately selected by considering the film quality 'production 18 201214778 rate, etc. Further, the shape of the subtractive layer 4 may be, for example, an ion plating method, a forging method, a metal coating method, or the like. The film thickness measurement of the inscription layer 4 is performed by sims analysis. The thickness of the main constituent element of the underlying layer directly under the reflective layer from the surface of the reflective layer to the signal intensity of 1/2 of the maximum intensity of the base shot is taken as the film thickness of the shot layer. When the underlayer is silver, 倥虢 疳 铭The comparison and evaluation of the subtraction (4) 4 were carried out, and the initial reflectances of the thicknesses of the subtracted (four) 4 and the vulcanization resistance of the comparative examples 21 to 24 were summarized and shown in Table 3. In the initial reflectance and the vulcanization resistance resistance, first, the seven modified thicknesses as shown therein were produced by the above-described manufacturing methods by the methods of Examples 21 to 25 and Comparative Examples 21 and 22 shown in Table 3 below. In the reflective layer 4, the initial reflectance at a wavelength of 46 Å is measured. At this wavelength, the reflectance of barium sulfate is taken as 100%, and the initial reflectance of yttrium is preferably 7% or more, and is particularly good in Table 3 below. In other words, the initial reflectance is less than 9〇% as a difference, and is represented by the symbol X in Table 3. As shown in Table 3 below, when the aluminum reflective layer 4 is very thin, that is, the aluminum reflective layer The thickness of 4 is less than 〇. Comparative Examples 21 and 22' of 〇〇6μηι were affected by the reflectance of the metal of the underlayer (here, silver), and the initial reflectance was good. For the sample having the thickness of the reflection layer 4 having the thicknesses of the examples 21 to 25 shown in Table 3 below, 3 ppm of postal (hydrogen sulfide) in a gas atmosphere temperature, humidity 80/〇 Under the conditions of 'spray % tree (tested according to the Japanese industrial standard Cong 2 switch of the corrosion resistance test) ^! Correction of the vulcanization characteristics in the lower wire 3 towel with initial reflectivity and 96 hours after vulcanization reflectivity Than said. As is apparent from the following Table 3, in Examples 21 to 25 in which the thickness of the aluminum reflective layer 4 was 〇6 μm or more, high vulcanization resistance with respect to the initial reflectance of 胄8 〇% or more was obtained. In Table 3 below, in Comparative Example 23 in which only the aluminum layer of 3 μm was provided on the substrate 2 instead of the aluminum reflective layer 4, the initial reflectance was 93%, which was good for the vulcanization property. The reflectivity is 29% 'substantially decreased, * the initial reflectance and the vulcanization resistance. On the other hand, it can be seen that although the vulcanization resistance of 19, 201214778 of Comparative Example 24 in which the ruthenium layer (〇7(4) and 妇5(4) are provided on the substrate 2 is good, the initial thief rate is 63%, and the sister paste 23 cannot. Both the initial reflectance and the vulcanization resistance are combined. In summary, the characteristics required for the substrate to be mounted as a semiconductor light-emitting device, that is, the initial reflectance and the vulcanization resistance (that is, in the touch can be confirmed) The reflectance after use in a vulcanized environment) Both are good (4) is the thickness of the minus (4) 4 is more than the above. It can be combined with the initial reflection and release vulcanization. It preferably satisfies the so-called initial reflector of more than 9〇%. The vulcanization resistance is 80% or more. In order to perform wire bonding on the substrate 1 and perform argon cleaning, the wire is bonded to the gold wire, and the substrate 1 of the G_G〇6Mm company of the reflective layer 4 is subjected to a Wei test, and the result is almost As a result, it was found that the resistance to the surface cleaning was strong, and there was no deterioration or the peeling. (Effect of the eleventh embodiment) Silver or silver layer on the surface The layer 3 is formed to form the reflective layer 4'. The semiconductor light-emitting element wire board which is unvulcanized and has high and stable reflection characteristics can be obtained, and the fuselage of the substrate is used. This is the following characteristic of the use of: the reflection of aluminum The rate is up to 3 times higher than that of silver in the ultraviolet region, and has a reflectance close to silver for purple, red, and outer lines, a good color balance in the metal, high reflectance after silver, and compared with silver. In addition, the effects obtained by the eleventh embodiment are also obtained in the following embodiments. Hereinafter, reference is made to the πth to the 19th and the [Twelfth Embodiment] Referring to Fig. 11 and Fig. 11 is a view schematically showing a semiconductor light-emitting device as a twelfth embodiment. In the figure, the entire symbol 5 indicates that the first frame is used. The semiconductor light-emitting device of the substrate 1 for mounting the semiconductor light-emitting device t is shown. The semiconductor light-emitting device 5 of the illustrated example uses the substrate 1 shown in the figure as a pair of metal lead frames. The pair of substrates 丨 are mainly composed of a base material 2, a silver layer or a silver alloy layer 3, and an aluminum reflective layer 4, and are disposed on substantially the same surface. In the substrate 1, as shown in FIG. A semiconductor light-emitting element (LED wafer) 6 is mounted on the aluminum reflective layer 4 of the substrate 。. The bonding line 7 connected to the semiconductor light-emitting element 6 is bonded to the substrate 1 _reflecting layer 4 as shown in Fig. 11. In addition to the pair of aluminum reflective layers 4 and 4 and the semiconductor light-emitting element 6, the semiconductor light-emitting device 5 is formed with a resin-made outer covering portion 8 surrounded by a portion where the side surfaces of the pair of base materials 2 and 2 are close to each other. 8 has a recessed portion 8a that is opened by forming an inclined surface 8b whose end is enlarged in a direction away from the base material 2. The light-transmissive resin that seals the semiconductor light-emitting element 6 is filled in the concave portion, and the light-transmitting resin portion 9 is formed. The light transmissive resin portion 9 constitutes a part of the outer cladding portion 8. By mixing a phosphor material such as YAG or the like semiconductor light-emitting element 6 in the light-transmitting resin portion 9, it is used as a pseudo white LED device composed of a GaN-based LED of 460 nm. The outer covering portion 8 has a concave portion 8a having an inclined surface 8b which is formed to have a distal end shape in a direction away from the base material 2, but is not limited to the illustrated example, and may be, for example, opposed to the base material 2. The rising vertical surface replaces the concave portion formed by the inclined surface rib. Further, the aluminum reflective layer 4 may be formed on substantially the entire inner surface of the outer cladding portion 8 or by removing a part of the remaining portion. The reason for this is because light emitted from the semiconductor light emitting element 6 is reflected in the outer cladding portion 8. As a specific method of forming the aluminum reflective layer 4, there are various methods as follows, and any of them can be used. ' (1) Use! A method of forming a S-reflecting layer 4, and a function of shielding the outside of the region of the outer covering 8. (7) After the insole layer 4 is formed on the entire surface of the substrate 2, the region of the outer cladding portion 8 is shielded by a tapping or photolithography process, and then the aluminum is removed by etching. (Effect of the twelfth embodiment) The semiconductor light-emitting device 5 of this configuration is a light-passing ship reflection layer that is emitted from the semiconductor light-emitting element 6 by the presence of the in-reflective layers 4 and 4 located on the bottom surface of the concave portion of the outer package portion 8. The reflection action of 4 and 4 is reflected on the opening side of the concave portion 8a, and the effect of increasing the amount of light from the semiconductor light-emitting element 6 is exerted. As described above, the brain reflection layer 4 has good resistance to vulcanization, so that high reflectance can be maintained over time. [Thirteenth embodiment] Fig. 12 is a view schematically showing a cast light-emitting device mounting panel as a thirteenth embodiment. In the figure, the difference from the above-described Uth embodiment is that a substrate in which the light-reducing layer 4 is formed on the silver layer or the silver alloy layer 3 21 201214778 via the gold flash layer 10 is formed. In the illustrated example, the substrate i is sequentially formed on both sides of the substrate 2 by a wet plating method with a silver layer or a silver alloy layer 33, and a layer 10, 1 〇 on one side of the substrate 2 The reason why the gold flash plating layer 1 is formed on the surface of the substrate 2 in the order of the silver layer or the silver alloy layer 3, 3, and the gold flash layer ι〇, 1〇 In order to ensure solder wettability between the New 2 and the printed circuit board of the silk semiconductor light-emitting device, that is, to improve solder adhesion. It can be appropriately set according to the components to be mounted, but it is preferable that the thickness of the silver layer or the silver alloy layer 3 is LG 〜5 晔, and the thickness of the gold layer 1 Ο is Ο. Ίμηι The following dimensions. From the viewpoint of the resistance to vulcanization, the degree is preferably -6 or more and 2 or less. The method for producing the thick reflective layer 4 of the crucible 4 is carried out by batch processing or continuous treatment using a vapor deposition apparatus having a pressure reducing function. The silver layer or the silver alloy layer 3 can be known by the wet type ore method, vacuum distillation or the like, and the mineral layer of the semiconductor light-emitting device can be coated on the entire surface of the material. Most of them can be produced at low cost, so that the silver layer or the silver alloy layer 3 is preferably formed by wet plating. 3' It should be noted that the thickness of the base layer formed by the wet plating method of the silver layer or the silver alloy layer 3 and the gold flash layer 10 is calculated by integrating the current value at the time of plating. (Effect of the thirteenth embodiment) According to the thirteenth embodiment, by using aluminum as a reflective layer, it is possible to ensure good vulcanization resistance. Further, by using the aluminum reflective layer 4 having a thickness of 〇 6 μm or more, in addition to the effect of obtaining excellent durability and maintaining high reflectance, the following effects are exhibited. That is, the silver layer or the silver alloy layer 3 exhibiting the above numerical range can prevent the diffusion of the main material steel of the base material 2, and the gold flash plating layer 1 of the above numerical range can improve the solder wettability and can maintain a new effect such as long-term maintenance. By forming the substrate structure of the thirteenth embodiment, the substrate 1 suitable for soldering can be efficiently obtained. [Fourteenth embodiment] Referring to Fig. 13, Fig. 13 is a view schematically showing a semiconductor light-emitting device 5 of a fourteenth embodiment using the substrate i shown in Fig. 12. In the semiconductor light-emitting device 5, the outer covering portion 8 and the translucent resin portion 9 in the twelfth embodiment shown in Fig. u are also provided. When a steel sheet is used as the substrate 2 at the time of manufacturing the semiconductor light-emitting device 5, it is prepared to have, for example, a length of 22 201214778 degrees 100 mx width 5 〇 mm x thickness 0. 2mm long-sized copper plate, on the surface of the substrate 2, a silver layer or a silver alloy layer 3 having a thickness of 3 μηη, a gold amphibole layer having a thickness of 0 01 μη 10 is sequentially formed by wet electric bonding method, and then a gold flash plating layer is left. The upper portion is used for welding, and the aluminum reflective layer 4 is partially vapor-deposited at a portion used as a reflective film. As a result, a material in which the aluminum reflective layer 4 is present in the portion where the gold flash plating layer 10 is used for reflection is obtained. Then, the substrate 2 was formed into a frame shape for mounting a semiconductor light-emitting device by a press machine or etching. Then, a pair of substrates are arranged close to each other on substantially the same surface. A resin-made outer envelope portion 8 is formed which surrounds a portion where the pair of base materials 2, 2 are adjacent, and has a recessed portion 8a which is cut through the periphery of the semiconductor light-emitting element 6. Next, the semiconductor light-emitting element 6 is mounted on the aluminum reflective layer 4 with a conductive paste, and the surface electrode of the semiconductor light-emitting element 6 and the lead frame (substrate 1} are connected by a bonding wire 7 made of gold. Finally, in the outer cladding The concave portion 8a of the portion 8 is filled with a translucent resin (such as a resin) so as to cover the semiconductor light-emitting device 6 to form a translucent resin portion 9 which is a part of the outer cladding portion 8. [In the fourteenth embodiment, After the substrate 1 is produced, an example of a predetermined shape is formed by a press or etching, but a post-plating method may be used. That is, after the substrate 2 is molded into a predetermined shape, the side wet type electric lining is used in the substrate. 2, the upper layer of the silver layer or the silver alloy layer 3, and the layers of the gold ore layer 10, the dry plating method such as the empty level method forms the domain weave 4. Further, for the substrate 2, the erotic line composed of copper, However, it is also possible to use a substrate having copper wiring for the purpose of the purpose, etc. In addition, other metal substrates such as iron-based 42 a gold may be used in consideration of use, cost, etc. Board 'flexible wiring board forming step formation After wiring, the insole reflective layer 4 is formed and used. Thus, depending on the purpose, structure, material (steel plate or flexible lion substrate with flexibility), the shape can be changed (profit cutting, bending, drum) The order of the shape of the convex processing, the plating, and the vapor deposition. The mounted semiconductor light-emitting element 6 can be mounted with, for example, (10) ship milk, AK}aAS_LED, GaP-LED, AlGalnP-LED, InGaN_LED, etc. The illustrated semiconductor light-emitting element 6 exemplifies a longitudinal element of an electrode having a top surface and a bottom surface. However, it may be a plane of (10) == two-electric Sit-surface on the same surface. In the case of the structure, there is a case where the electrode surface faces the surface side (upper side in FIG. 13), and both the cathode and the anode are wire-bonded; the so-called flip chip which is directly connected by the electrode 23 201214778 = lower j lead frame side) The installation method can be used with either installation 1. It is also possible to use a copper wire bonding or a wire bonding instead of a gold wire bonding. In the fourteenth embodiment, the substrate to which the gold flash plating layer 1 is applied is used, and when the pitch is 4 (for example, Μ "1"1 pitch), that is, when the precision is not high, The A chain layer 10 can also bring about a high yield, so the gold flash layer 10 can be omitted. (Effects of the Fourteenth Embodiment) According to this, 纟. The rotating body of the structure is 5, and the presence of the in-reflecting layers 4 and 4 on the bottom surface of the concave portion a formed in the outer covering portion 8 is the same as that of the semiconductor light-emitting device shown in FIG. The light emitted by the 6 reflections is reflected by the reflection layers 4 and 4 to the opening side of the recess %, and the effect of increasing the amount of light from the semiconductor device 5 is exerted. In addition, since the reflective layer 4 has good resistance to vulcanization, high reflectance can be maintained for a long time. Further, since there is an inter-sheet layer composed of a silver layer or a silver coin 3 and a gold glitter layer 1 基材 between the substrate 2 and the reflective layer 4, the readable high-ampere material and the non-error-welded infiltration are immersed. Sex. [15th embodiment]. The 14th ® is a schematic representation of the semiconductor light-emitting device mounting substrate of the fifteenth embodiment. The ninth embodiment is a modification of the substrate 1 of the thirteenth embodiment shown in Fig. 12, and the substrate 与 according to the thirteenth embodiment is not changed in the basic configuration. The greatest difference from the above-described thirteenth embodiment is that, as shown in Fig. 14), a silver layer or a silver alloy layer 3 and a gold flash layer 1 are sequentially formed on one surface of the substrate 2, on the gold flash plating layer. A configuration example in which the aluminum reflective layer 4 is formed on a part thereof is shown in Fig. 14 and is a configuration example in which one end portion of the substrate i is bent toward the side of the gold flash plating layer by approximately 9 degrees. As another configuration example different from the above-described thirteenth embodiment, as shown in FIG. 14 , a silver layer or a silver alloy layer 3 and a gold flash layer 1 are formed on the entire surface of the substrate 2, and the gold is formed. The entire surface of the flash plating layer 10 is formed with an aluminum reflective layer 4'. The one end portion of the substrate 1 is bent to the side of the gold flash plating layer by 18 turns; as shown in Fig. 14(d), the substrate is The aluminum reflective layer 4 is directly formed on one surface of the second surface, and the silver layer or the silver alloy layer 3 and the gold flash plating layer 10 are formed on the other surface of the substrate 2. The substrate 1 shown in Fig. 14(a) is a gold flash layer 1 having a thickness of 3 μm, a silver layer or a silver alloy layer 3, and a thickness of 〇·ιμιη, on one surface of a substrate 2 made of copper. After the crucible, the aluminum reflective layer 4 is formed by vapor deposition on the top surface of a part of the gold flash layer 10. Incidentally, when silver or a silver alloy, gold or aluminum is sequentially laminated on the copper base material 2 as in the configuration example, in addition to the aluminum reflective layer 4 24 201214778, the Buf Hf type electric ore method. For the reflective layer 4, at this time, it is not possible to carry out the impurity by wet electric forging, so that it can be vacuum-tested. Even other methods, such as splashing in an inert gas, can be utilized. Further, many of these methods can be used from the viewpoints of cost, simplification of the process steps, and the like. The substrate 1 shown in Fig. 14 (9) is sequentially formed on the substrate 2 by a method of electro-minening to form a silver layer or a silver alloy layer 3 having a thickness of 2 μm and a thickness of α. After 1μιη of gold flashing 1G, the handle reflective layer 4 is formed on the surface of a part of the gold flash layer, and the m4_bf substrate is formed by sequentially forming a thick layer of silver on the substrate 2. The alloy layer 3 and the gold flash plating layer having a thickness of G1 (four) are formed by forming a light-reducing layer 4 on the entire surface of the gold-plated layer 1G. The structural examples shown in Figs. 14(b) and (C) are a method of using the semiconductor light-emitting element 6 on the β top surface of the aluminum reflective layer j and performing wire bonding on the bottom surface or the side surface of the substrate 2. More specifically, the structure in which the base material 2 is bendable can be applied. In the fifteenth embodiment, the wire bonding is performed on the back surface of the substrate 2. However, the silver layer, the silver alloy layer 3, the gold flash layer 1 or the like may be coated on the back surface depending on the purpose. The substrate shown in Figure 14 (d)! The silver layer or the silver alloy layer 3 and the gold glitter layer 1 are applied only to one side of the substrate 2. Therefore, 'the amount of use of these metals can be suppressed. ^When only the surface of the substrate 2 is subjected to electro-mineralization, the two substrates 2 and 2 are bonded together to enter the Wei step, and then separated, so that the reflection can be achieved without the masking material. Since the layer 4 is affected by the thickness according to the thickness as described above, it is preferably 〇(8)6μηη or more. When the shaft is in the base material 2, the same effect as in the thirteenth embodiment can be obtained by the fifteenth embodiment. . The substrate 1* according to the illustrated example can be formed by processing the end portions (also referred to as substrate connection wires and outer wires) into a predetermined shape. As an example thereof, the bottom surface f of the exposed portion (outer wire) of the package portion 8 is curved to be tanned with the top surface of the printed circuit board, and can be connected to the substrate 1. In other words, the central portion of the substrate 1 serves as a line for the wire 1 and the surface of the layer 10 (the 16th embodiment). 25 201214778 Referring to FIG. 5, the first embodiment schematically shows the first embodiment. A substrate for mounting a semiconductor light emitting element. In the etched towel, it is different from the above-described embodiments in that (4), gold (Au), tin (Sn), nickel (10), copper (c alloy, etc.) are formed on both sides or surfaces of the substrate 2. A metal layer u of a copper (Cu)-nickel (10) alloy is formed on the metal layer u or the substrate 2, and a silver layer or a silver alloy layer 3 is formed thereon, and a minus (4) 4 is formed on the silver layer alloy layer 3. As the substrate In the structural example of 1, as shown in Fig. 15 (8), a metal layer 1 is formed on both surfaces of the substrate 2, and a silver layer alloy layer 3 is formed on the n-plane of the metal layer, and the silver layer or the silver alloy layer 3 is formed. a portion of the surface forming the reflective layer 4; as shown in Fig. 15 (9), a metal layer η is formed on the surface of the substrate 2, and a silver layer or a silver alloy layer 3 is formed on the entire surface of the metal layer n. A configuration example in which the light-reducing layer 4 is formed on the surface of the silver layer or the portion of the silver alloy layer 3. As another configuration example of the substrate 1, as shown in Fig. 15 (4), a metal layer is formed on one surface of the substrate 2. A configuration example in which the inscription layer 4 is formed on the entire surface of the ore-silver alloy layer 3 in the other-surface silver layer alloy layer 3 of the substrate 2. (Effect of the sixteenth embodiment) In the way The same effect as the above-described first embodiment can be obtained. The bronze as a constituent component of the metal layer 11 has an antioxidant wire and has an advantage of being fused with tin for tandem bonding. On the other hand, although tin is slightly easier It is oxidized', but has the advantage of being easy to weld and inexpensive. Nickel, which is a constituent component of the metal layer u, has an effect of suppressing the diffusion of copper and an advantage of increasing hardness; and a copper-tin alloy which is a constituent of the metal layer is more than steel. It is difficult to oxidize. Compared with tin and copper, it has the advantage of being easily fused with tin. The copper alloy as a constituent of the metal layer η has the advantage of being easily fused with tin, and according to the characteristics, it can be manufactured according to the use conditions. [Embodiment 17] FIG. 16 is a view schematically showing a semiconductor power-generating element mounting substrate as an embodiment of the 帛17. In the seventeenth embodiment, The base material 2, the silver layer or the silver alloy layer 3, the light-reducing layer 4, and the gold flash plating layer according to the above-described thirteenth and fourteenth embodiments are not changed in the basic structure. The basic structure of the substrate 1 is a gold plating layer 12 formed at or above the inscription layer 4 or the gold miner layer. As an example of the substrate 1, as shown in Fig. 16(a) An example of a structure in which the It gold layer 12 is formed on the surface of the 4-knife on the aluminum reflective layer 4; as shown in the 16th_), there is a subtraction from the surface portion of the gold-flash layer (7) 26 201214778 An example of the structure of the layer 4 in the same-surface shaped gold layer i2. As an example of the substrate 1, further, as shown in Fig. 16 (4), there is a portion of the surface portion of the gold ore layer. An example of the structure in which the entire surface of the reflective layer 4 forms the bond gold layer 12; as shown in Fig. 16 (4), there is an aluminum reflection on the surface of the gold flash layer and a portion of the surface formed on the gold flash layer 1 An example of the structure in which the gold plating layer 2 is formed on the entire surface of the layer 4 is shown. (Effects of the Seventh Embodiment) In the n-th embodiment, the same effects as those of the above-described fifth embodiment can be obtained. [Embodiment 18] FIG. 17 is a view schematically showing a semiconductor light-emitting device using the substrate i shown in the (8)th aspect of the semiconductor light-emitting element mounting substrate 1 of the seventh embodiment. one example. In the semiconductor light-emitting device 5 shown in Fig. 17, the pair of substrates ii ^ are arranged close to each other on substantially the same plane. The gold plating layer 12 is bonded to a bonding wire 7 electrically connected to the semiconductor element 6. The remaining structure is no different from the above embodiments. In the above-described seventeenth and eighteenth embodiments, the silver layer, the silver alloy layer 3, and the gold flash layer 10 are sequentially formed on the entire surface of the substrate 2, but the invention is not limited thereto. As described in each of the above embodiments, it is also possible to apply to the case where the metal layer n of a single layer is formed, and the inscription layer 4 is directly formed on the substrate 2. (Effects of the Eighteenth Embodiment) In the eighteenth embodiment, the same effects as those of the above-described fifth embodiment can be obtained. The gold plating layer 12 in the above-described seventeenth and eighteenth embodiments can be used for electrical connection of the semiconductor light emitting element 6 mounted on the aluminum reflective layer 4. In the substrate structure shown in Figs. 16(c) and 16(4), the thicker the gold plating layer 12, the lower the reflectance on the short wavelength (blue) side, but the better the connectivity of the gold wires. The structure of the gold plating layer 12 may be determined according to the use 'reference reflectance. Incidentally, the plating layers (3, 10, 12) may be formed by a wet plating method or may be formed by other methods. [19th embodiment] - Referring to Fig. 18, Fig. 18 shows a typical use state of the semiconductor light-emitting device as the πth embodiment. The semiconductor light-emitting device 5 is a semiconductor light-emitting device using the semiconductor light-emitting element mounting substrate 1 according to the above-described first to eighteenth embodiments, and is used, for example, on a printed circuit board 13. In order to be mounted on the printed circuit board 13, the substrate has a first curved portion 21'. The first curved portion 21 is a portion that extends linearly from the side surface of the outer covering portion 8 to the outside. The bent circuit portion 22 on the side of the printed circuit board 13 is a second thin portion 22 that is horizontally thin with respect to the printed circuit board. The 22 is formed substantially in the same plane as the bottom surface of the outer package portion 8. . The bottom surface of the second bellows portion is more near or below, or a portion above the upper surface of the outer envelope portion 8 than the curved portion (4) of the outer peripheral portion 8 and the printed circuit board 13 through the material 14. A part of the substrate for the second variable conductor light-emitting device. $15 _ ° outer wire plus half This outer wire 20 includes each layer (3, 1 〇, u). As shown in the fourth paragraph (4), there is the following structural example: It has the following: =2. An example: 22 outer conductors make up and make the outer guide.  ^ <The curved portion of the concave portion of the f-curved portion is substantially the same as the outer peripheral portion of the outer surface of the outer covering portion 8 of the outer surface of the outer surface of the outer surface of the outer surface of the outer portion The opposite side of the opening side of the first bending 邙 2: > 3 dimer a is substantially bent. The first f-curved portion 22 is substantially bent toward the horizontal direction away from the outer-body portion 8, as shown in Fig. 18 (9), and the second squall portion 22 is along the secret path. There is a structural example in which the second curved portion 22 having the first f curved portion 21 and the second curved portion 22 and the second curved portion 22 of the outer lead 20 are folded along the four portions f of the outer covering portion 8; The first curved portion 21 is bent substantially 90 degrees in the same direction in the middle of the opening side of the outer guide (four) in which the first first 22°P is the knife direction. _ 0 The horizontal direction of the sin near the outer body part 8 is roughly bent by 90 degrees. The configuration example of Fig. 18 can be used to open a light-transmissive hole in the printed circuit board 13 from the printed circuit board, or to illuminate the printed circuit board U from the printed circuit board U. The case where light is emitted from the side of the circuit board 13 is shown. (Effect of the nineteenth embodiment) The same effect as the above-described first embodiment can be obtained in the nineteenth embodiment, and the bending method of the outer lead 2〇 is not limited to the example of the drawing. It can be various shapes according to each of the semiconductor light-emitting devices 5. [Twentyth Embodiment] In the twentieth embodiment, the aluminum substrate is disposed on the substrate 2 via the silver layer or the silver alloy layer 3, and the second embodiment is different from the first embodiment shown in the first aspect. Where. In the second embodiment, the configuration of the substrate 1 is different from that of the first embodiment in that the carbon concentration of the aluminum reflective layer 4 is set to 1χ1〇2〇/cm3. In order to evaluate the bondability of the substrate 有关 related to the second embodiment, the wire bonding is performed with a bonding wire made of gold. Here, the wire bonding means that the electrode pads on the lead frame side and the electrodes mounted on the elements of the lead frame are electrically connected, and are connected by gold or the like. Usually, in the half-body 7L pieces of the guide material such as wire-making technology, as the electric connection type, generally ^ line, in recent years, in the part of the installation technology also carried out the flip-chip ball bump A connection using a metal wire such as gold, silver, copper, or aluminum is performed. The first joining means that the wire (the wire ball) in which the tip end of the wire is made into a ball by discharge is previously joined. Generally, in view of positional accuracy and pressure contact property, the electrode on the element side is often first joined. In the twentieth embodiment, the wire bonding machine uses M〇DEL77〇〇D of w^T b〇nd muscle and uses a bonding wire having a diameter of 25 μm. It is carried out under the condition that the bonding condition 'line is 7 () handsome, the load is io 〇 g, the ultrasonic intensity is 350 mW, and the ultrasonic application time is 1 〇〇 1 batch. In the above-described eleventh embodiment of the lake, the tip of the wire is formed into a spherical shape by being electrically connected to the contact substrate on the portion where the plating layer 4 is provided. The second bonding means that after the first bonding is performed on the electrode on the element side, the bonding is performed next to the conductive electrode to be connected by the above-mentioned wire (crimping stitehbQnding). The seam bonding means that the wire shape processing cannot be performed in a state where the wire is connected, so that the film is directly pressed and stretched and cut. The wire connection is completed by continuously performing the first bonding and the second bonding. In the tenth embodiment, as in the above-described U-th embodiment, a portion in which the tip end of the wire is pressure-bonded to the substrate made of copper is provided with the insole reflective layer 4. Table 4 below shows the relationship between the carbon concentration in the aluminum reflective layer 4 and the bonding strength of the bonding wires 7 made of gold. Example 26, shown in Table 4 below, was formed into a base material composed of copper having a thickness of 7 μm by a wet electric ore method on the entire surface of a 12-thick polyimide resin film having a thickness of 12, and having a thickness of 2 The silver layer or the silver alloy layer 3 of the division, and the sheet obtained by laminating the heat-resistant acrylic resin adhesive is formed into an aluminum reflective layer 4, and the metal is punched and cut to an unnecessary portion. The carbon concentration in the inscription layer 4 of Example 6 was subjected to SIMS analysis, and the carbon in the green reflecting layer 4 was 1×10 20 pieces/cm 3 . The solid side 27 shown in Table 4 below was favorable for the copper-containing alloy. After the ship plating method forms a silver layer or a silver alloy layer 3 with a thickness of 201214778, it is only subjected to stamping processing, and the obtained product is fixed in a vacuum steaming device by a die-free (SU·4) tool holder. , forming a reflective layer 4 of thickness Μ 的. The carbon concentration in the reflective layer 4 of this Example 27 was 3χ1〇19/cm3. In Example 28, shown in Table 4 below, a silver layer or a silver alloy layer 3 having a thickness of 3 μm was formed by wet plating on a copper substrate having a thickness of 〇, and then subjected to press working, and _^ The thermal acrylic resin is adhered to a three-layer epoxy substrate having a thickness of 〇5 mm to form a light-emitting device circuit substrate. The wire was placed on the above-mentioned true transfer apparatus to form a reflective layer 4' of 〇 2 并 and SIMS analysis was carried out. herein,! The carbon concentration in the g-reflecting layer 4 is the minimum degree of agronomy of the carbon in the reflecting layer 4 of the inscription. The carbon concentration in the reflective layer 4 is, for example, 〇2〇/cm3. As a criterion for evaluation, the first joining strength is a case where the shear strength of 〇39N or more is good, and the following Table 4 is indicated by the symbol Q. The case of having a fine strength of less than 0 39 N is regarded as a bad, and is indicated by the lower X of the next charm. The second bonding test is a case where the shear strength of 〇〇49 Ν or more is used as a good condition, and the symbols are given in Table 4 below. Said. Will have less than 0. The case of the shear strength of 049 作 is made by Lin Liang, which is indicated by the number 4 (4) of the lower wire. In the above embodiment, in order to separate and measure the strength of the first and second joint strengths, a shear test is performed, but the cut test is used to evaluate the time and effort of the non-reading of the line (four degrees), so the connection strength of the ship is generally evaluated. Most of the time is the pull test. The tensile test refers to the hook on the line between the first and the second, which evaluates the load, the fracture position and the shape of the fracture that is pulled up, but the money equivalent to the connected gold-bribery or touch-up gold wire cannot be tested. . The inventors of the present invention used Dage's push-pull tester series 4〇〇〇 to perform the following tensile test. As is clear from Table 4, in the example % of the aluminum reflective layer 4 having a carbon concentration of 3χ1〇2〇/cm3 or more, the 'bonding strength is lowered'. Therefore, as in Examples 26 and 27, the carbon concentration of the reflective layer 4 is made lxl02G/cm3 or less 'the joint strength of the joint is good. In the twentieth embodiment, the carbon concentration in the reflective layer 4 is increased by using an organic material such as an epoxy resin or an acrylic adhesive. The reason for this is that various factors such as contamination of the substrate 2, flushing gas, reverse diffusion of the vacuum pump oil, and impurities of the plating gas during the doping method can be considered as the source of the wave of carbon. Further, in the bonding test, the wire bonding machine used MODEL 7700D of B〇ND mc, and a gold bonding wire having a diameter of 25 μm was used. It is carried out under a bonding condition in which the ultrasonic intensity is 35 〇 and the 201214778 ultrasonic wave application time is 100 ms. It was carried out in the shear test mode of the bonding tester PTR-1 of Kanno (3). The SIMS measurement was carried out using the phi company ADEPT1010 as a primary ion source with an absolute energy of 3 keV. (Effects of the second embodiment) According to the twentieth embodiment, by setting the carbon concentration of the aluminum reflective layer 4 to 1×10 〇 2% @/cm 3 or less, in addition to the effects of the above-described eleventh embodiment, A semiconductor light-emitting device mounting substrate having excellent bonding properties and a semiconductor light-emitting device using the same. [21st embodiment] Referring to Fig. 19, Fig. 19 is a view schematically showing a semiconductor light-emitting element mounting substrate and a semiconductor light-emitting device according to a twenty-first embodiment. In the figure, the basic configuration of the twenty-first embodiment is such that the semiconductor light-emitting device 6 is mounted on the independent neon 2A and is not mounted on the substrates 2B and 2C for energization, at this point and above. Each embodiment is largely non-existent. In the example of the drawing, the light-reducing layer 4 is not provided on the base materials 2B and 2C for the power supply terminal for wire bonding with the semiconductor light-emitting element 6 or the wire bonding wire called the (four) wire, and the wiring material is used. A product obtained by processing a metal fg such as copper into a fine line shape by waste or the like. The wire bonding tip may have the inscription layer 4, but when the insole layer 4 is not present, the surface conditions of the substrates 2B and 2C are optimized, so that the range of the bonding conditions is increased, and the yield is good. . In Fig. 19, in the same-structure example, the substrate 2A of the mounting portion of the semiconductor light-emitting element 6 and the silver layer or the silver alloy layer 3 of the substrate 2B, 2C, and the gold flash layer 1 are shown. However, the structure of the base material 2a, the silver layer of the base materials 2B and 2C, the silver alloy layer 3, and the gold glitter layer 1〇 may be different or may be separately produced. The joint is a crimp joint of the scale and the (four) wire, so the main material of the joint surface is preferably gold, silver, and! Ba, or such as the main; ^ into the alloy of the component. In Fig. 19, the steps of the substrate 2A, 2B, and 2 (the lower portion of the base material is covered with the resin of the outer covering body) are shown, but the base material 2Α, 2β, 2c may be exposed on the back surface. - The step is connected with a metal heat release plate, etc., so that it is "exothermic and can increase the light output power. In addition, when the back electrode|body light-emitting element 6 is used, the power supply is connected to the upper button. _子有—It can be used alone, or when the recording power supply terminal connected to the upper electrode is wire-bonded to the root terminal, there is a capacity _亍大__Wiring configuration, and the succession ^= 己31 201214778 Further, in the case of Fig. 19, the connection between the electrode portion of the semiconductor light-emitting device 6 and the power supply terminals of the base materials 2B and 2C is performed by wire bonding, but a wire can be produced and used for replacement. In the connected connection, the wire is connected by a patterned wiring member, and the junction is ultrasonically heated. As described above, the inventors have learned that the carbon concentration in the reflective layer 4 is composed of gold. Bonding tape 7 and the bonding layer 4 It should be noted that all of the above-described embodiments are suitable for the above-described embodiments. From the above description, the semi-conductive (four) optical element wire substrate and the ruthenium substrate of the present invention have been described based on the above-described respective embodiments, examples, and the like. A typical configuration example of the semiconductor light-emitting device, but the present invention is not limited to the configuration examples such as the above-described respective embodiments and the illustrated examples, and various configurations are possible within the scope of the technical idea of the present invention. The main constituent material of the surface of the inner wire bonded base materials 2B, 2C may be one selected from the group consisting of gold, silver, palladium, gold alloy, silver alloy, or palladium alloy, or a combination thereof (22nd to 31st embodiments) Embodiments of the semi-conductive optical element mounting substrate and the semiconductor light-emitting device of the present invention are embodiments in which a semiconductor light-emitting element mounting substrate having a base material, a light-reducing layer, and a titanium-containing semiconductor thereon is formed. The substrate is used to mount a semiconductor light emitting element and is made of copper, a copper alloy or an iron-based alloy, and the aluminum reflective layer is provided on the surface side of the substrate on which the semiconductor light emitting element is mounted. At least a part of the metal, which is preferably a substrate, includes a steel or a copper alloy substrate. In addition, as the metal of the substrate plate, a metal alloy such as 42 alloy or iron can be used. Further, the base material may have a metal portion. For example, a copper clad laminate in which copper is bonded to the resin may be used as the substrate. In this case, the resin is formed on the opposite side of the substrate from the surface on which the aluminum reflective layer is formed. Further, 'the surface of the base material on the side opposite to the surface on which the inscription layer is formed may be a surface of a base material including a structure in which the organic material or the inorganic material is composited. [22nd (1) embodiment] 2nd (8) is a view showing a semiconductor light-emitting device mounting substrate according to the embodiment of the 帛22(1) of the present invention, 2 is a substrate, 11 is a metal layer as a side of the first metal layer, 32 201214778 symbol 4 is An aluminum reflective layer formed in a region including a region where the semiconductor light emitting element is mounted on the surface of the substrate 2, and a symbol 19 is a titanium layer which serves as a bonding layer of the aluminum reflective layer, thereby constituting a substrate for a semiconductor light emitting device. The layer 19 is an example of a metal layer containing a chin. The substrate 2 is composed of a metal or a composite material of a metal or an organic material or an inorganic material. For the solder mounting, the general structure of the substrate is a single layer of the alloy, or a composite layer of the Wei and gold materials. The gold 11 (display) is described as an example in this embodiment. As a material of metal, the shaft is the secret, but the most versatile substrate is a metal lead frame made of copper or a copper alloy. In the case where a copper plate is used as the substrate 2, the thickness thereof is not limited, but the thickness can be selected with reference to the cost. Further, in consideration of mass production, a hoop material of a copper plate is preferable, but a short-sized sheet and various materials can also be used. In the case of the wire material 2, a copper clad laminate having a copper plate and a laminated plate can be bonded to the unicorn grease. As the resin, a plate-shaped resin of hard f can be used, and a resin which is thin and flexible can be used. Examples of the synthetic yarns include a glass-oxygen resin substrate (glass cloth base resin sheet) and a polyimide resin line. The aluminum reflective layer 4 and the titanium layer 19 are produced by means of a steam woven fabric having a pressure-reducing force regulating Wei by batch processing or continuous viewing. The thickness of the light-reduction layer 4 is preferably from the viewpoint of the reflectance, and is preferably 2 μm or less from the viewpoint of flatness. When a copper plate is used as the substrate 2, for example, the length is 1 〇〇 m, the width is 5 〇, and the thickness is 0. 2 mm, the thickness of the light-reduction layer 4 is, for example, (10) 5 Å, and the thickness of the titanium layer 19 is 〇 _. At the time of manufacture, first, the tin of the metal layer u (the magnetic mirror of (4) is implemented as the ruthenium of the above-mentioned size of the base material 2. As for the case of tin, it is preferable that it is about one. Next, the resistance heating type is used. The cylindrical electron beam method is vacuum-decomposed to form the titanium layer 19 and the shot-off layer 4. In terms of the body, the substrate 2 is cut into a short-sized material of 5 〇娜15〇聪, and 16 pieces of the cut are cut. The radial lake is placed on the tool of the half (four)·mm peach, and it is placed in the cylinder three sets of 'electron beam grab (transmission god 6kw) as the name, the source of the titanium is 2x a, the thickness is In the present embodiment, the two-air ^ key device uses a self-made machine, and the city (four) inspection device using a load lock type is also no problem. The level of the june, f county _ when _ can. axis, ^ (four) 4 = lack of work spine / h can not be e-beam steaming type. That is, 'can be resistance heating base key method, ion plating method, sputtering method, metal [Claim method, etc.] 33 201214778 [Embodiment 22 (2)] Fig. 20 (8) is a schematic cross-sectional view showing a first substrate of the present invention. When a copper plate is used as the substrate 2, for example, the length is a claw, the width is 50 mm, and the thickness is 0. 2 mm, the thickness of the reflective layer 4 is, for example, 〇 5 μm, and the thickness of the titanium layer 19 is 0·_. At the time of manufacture, first, in the above-mentioned dimensions of the material 2, the plate is prepared to record _ domain layer (10) () · 7 μ ΐ η, 〇. _). Next, a titanium layer 19 and a sputtering layer 4 are formed using a resistance-heated cylindrical electron beam type vacuum vapor deposition apparatus. Specifically, the substrate 2 is chopped into a short-length material of 50 to 150 mm, which is cut. 16 substrates were arranged radially on the ji rig with a radius of 300 mm, and three groups were placed on the _, and the electron beam grab (output power 6 kW) was used as the steam source of Shao and Qin. It is 2xl〇4Pa, and the thickness is 〇~m_reflective layer 4. In the present embodiment, the vacuum evaporation device uses a self-made machine, and the steam-extraction device that is consumed by a load-fired inspection machine or the like is not additionally used, and may be a continuous steaming method capable of inspecting the % hoop material. . Vacuum steaming is a proper choice considering the quality, productivity, etc. Further, the formation of the reflective layer 4 and the titanium layer 19 may not be an electron wire plating method. That is, it is possible to add and subtract Lin, Xuan, Lin, and metal coating methods. The film thickness measurement of the inscription layer 4 and the titanium layer 19 was performed by SMS analysis. From the surface to the surface of the reflection layer, the thickness of the 1/2 plaque of the basal layer is used as the thickness of the reflective layer. The thickness of the titanium layer is the main component to reach the maximum in the basal layer. The thickness of the letter 1/2 of the strength of the county. The above New 2 is Jing, the signal strength of the off. (Evaluation of Examples Related to the Present Embodiment) For the reflective layer 4, the sulphide and the anti-scale are determined as follows. First, as shown in Example 33 to Example 37 of Table 5, on the above-mentioned contact thin, (four) 1 μιη, Through the formation of 钛5 (four) of the titanium layer's description; ίτ method to make the thickness of the reduction layer, the initial reflectivity under the thief wavelength leg. At this wavelength, the sulfuric acid_reflectance is 1%, the reflectance is 9% or more, which is particularly good (indicated by y), and the less than war is a difference (indicated by χ). When the thickness is very thin, that is, when the thickness is G_m or less, the reflectance of the metal of the substrate (here, the handle) is affected: the reflectance is lowered. Then, for the vulcanization characteristics, 3 ppm of postal (hydrogen sulfide) was sprayed at a gas ambient temperature of 4 〇〇c and a humidity of 8 〇% at a rate of 96 、 (according to the industrial standard H85G2 _ 雠 雠Test method test). The vulcanization property is the ratio of the initial reflectance to the reflectance after 96 hours of vulcanization. In the case of a reflective layer, there is no drop to less than 90 relative to the initial reflectance. /. (as a case where the reflectance is less than 81%). In summary, it can be confirmed that the characteristics required for the substrate to be mounted as a semiconductor light-emitting element, that is, the initial reflectance and the vulcanization property (that is, the anti-drunk after the environment in which the lining is vulcanized) are good. The case where the thickness is 0·02 μmη or more. In addition, as a comparative example 3, it was confirmed that the initial reflectance was 93% when the silver layer of only 3 μm was provided on the substrate, and it was good, but the reflectance after the sulfurization resistance test was (10), and it was drastically lowered. Poor vulcanization characteristics. As Comparative Example 32, only a layer of gold was provided on the substrate (〇 7μη〇, ^ (Ο. In the example of ί^μπΟ, it was confirmed that although the vulcanization resistance was good, the initial reflectance was as low as 63% and was X. Incidentally, in Comparative Examples 33 and 34, a nickel layer 17, a palladium layer 18, and a titanium layer 19 were provided in the same manner as in Example 33, and the light-reducing layer thereon did not have sufficient initial reflection characteristics. According to the present embodiment, since the aluminum reflective layer and the titanium layer are formed on the surface of the substrate, it is possible to obtain an unvulcanized, fine, and stable reflective semiconductor device for mounting a semiconductor light-emitting device, and a substrate for using the substrate. . This is Xianglang Langcho Miscellaneous: (4) The reflectivity is more than three times that of silver in ultraviolet light, and has a reflectivity close to silver for purple, red, and infrared rays, and a good balance in color of metal t, which is second only to silver. Reflectivity and difficulty in vulcanization compared to silver. In order to perform wire bonding on the semiconductor light-emitting element mounting substrate, the plasma cleaning was performed. Then, the gold wire was bonded to the semiconductor light-emitting device mounting substrate, and the vulcanization test was performed. As a result, the reflectance was not lowered. From the results, it was found that the surface cleaning was strong and there was no deterioration or peeling. The bonding property with the gold wire was confirmed for the semiconductor light-emitting element mounting substrate formed by the above-described production method. The wire bonding machine uses the Model 4522 of K&s, using a gold wire of diameter 25@ (type C in Tanaka Bay), and using Dage's bond strength testing machine (匕(10)d tester) series 4000 to carry out the tensile strength of the joint characteristics. Test evaluation. The substrate is a copper alloy plated with or without pressure processing (c_194: thickness 〇15mm), nickel (thickness 〇·7μηι) _ (thickness 〇. The base material of 〇5 (4) forms a separate core layer (thickness) and a titanium layer (thickness: 0·1 μ 〇 + 铭 layer (thickness 〇 1 μιη). Table 6 shows the film structure and gold wire The results of the tensile test (10 samples). As shown in Table 6, it is understood that the tensile strength is greatly improved and changed by the order of the substrate, nickel, palladium plating, titanium layer, and aluminum reflective layer 35 201214778. In the case of the titanium layer, the bonding property of the semiconductor light-emitting element mounting substrate with the titanium layer interposed therebetween is improved, and the bonding property is further improved. The main purpose is to increase the yield and soldering conditions at the time of solder mounting of the current introduction terminal after the formation of the LED element, and the nickel-palladium plating layer can be further inserted into the gold flash plating layer (corresponding to 〇〇5 μβι or less after thickness conversion). It was confirmed that the same effect can be obtained even in the order of forming the metal layer 11, the enamel layer, and the aluminum reflective layer which are examples of the base material and the first metal layer. The effect obtained by the above-described 22nd (1) and (2) embodiments can be obtained in the embodiment described later. [23rd embodiment] FIG. 21 is a view showing a semiconductor according to a 23rd embodiment of the present invention. A schematic cross-sectional view of the light-emitting device shows a semiconductor light-emitting device using the semiconductor light-emitting element mounting substrate shown in Fig. 20. In the figure, reference numeral 2 is a substrate, reference numeral 23 is a plating layer of a substrate, and reference numeral 4 is a substrate 2. The aluminum reflective layer formed on one side, and the symbol 19 is a titanium layer, thereby forming a substrate for mounting a semiconductor light-emitting element. In the semiconductor light-emitting device, the two groups (2, 2, 2) are placed close to each other on the same surface. Reference numeral 6 is a semiconductor light-emitting element mounted on the aluminum reflective layer 4A; reference numeral 7 is a bonding wire electrically connecting the semiconductor light-emitting element 6 and the aluminum reflective layer 4? The symbol 8 is a resin-made outer covering portion 'the outer covering portion is not surrounded The substrate 2 Α, 2 包括 including the semiconductor light-emitting element 6 is adjacent to one side, and has a concave portion formed by the inclined surface 8b and the aluminum reflective layers 4 and 8 located at the bottom surface, the inclined surface 8b being formed in the semiconductor The periphery of the element is away from the semiconductor light-emitting element away from the substrate; the symbol 9 is a light-transmissive resin portion filled in the concave portion of the outer package portion 8 and sealing the semiconductor light-emitting element, constituting a part of the outer package. A light-emitting material, for example, can be used for a pseudo white LED device by mixing γ Α (} etc. 'LED wafers with 460 nm GaN-based LEDs. The aluminum reflective layers 4A, 4B, and the titanium layers 19A, 19B are substantially the entire inner side of the outer cladding. The reason for this is that the light emitted from the light-emitting element is reflected in the peripheral peripheral portion. As a specific method, (1) in the film forming apparatus at the time of forming the aluminum reflective layer, (2) a function of shielding the outer surface of the outer covering body; (2) after forming an aluminum reflective layer over the entire surface, masking the outer covering body region by a tapping or photolithography process, and then etching and removing aluminum. Method, 36 201214778 Any of these can be used. According to the gray structure, the conductor hair is placed, and the light incident from the rotating light-emitting element G is reflected by the reflective layer A to the opening of the concave portion through the presence of the surface-reducing layer 4A located in the concave portion of the outer casing portion 8 axis. The σ side exerts an effect of increasing the amount of light from the semiconductor light-emitting device. As described above, '35 has good resistance to vulcanization, so it can be used for a long time_high reflectance. [24th Embodiment] Fig. 22 is a view showing a substrate for a semiconductor light-emitting device wire according to a twenty-fourth embodiment of the invention, characterized in that a recording layer is formed in turn on the two sides of the substrate 2 by a paste-type electrowinning method. The titanium layer 19 and the insole layer 4 are formed on the portion of the layer 18 and the gold flash layer ω on the gold flash layer iq of the surface of the substrate 2. The reason why the nickel layer 17 and the layer 18 and the gold flash bond layer 10 are sequentially formed on the substrate 2 is to ensure the solder-solenability between the substrate 2 and the printed circuit board on which the semiconductor light-emitting device is mounted, that is, to improve烊 接着 。. At this time, the thickness of the recording layer 17 may be 0. 4 1. The thickness of the layer 5μπι18 may be 〇 〇1~〇 2 array, and the thickness of the gold nucleus layer may be Ο. Ϊ́μπια under. These thicknesses are thicknesses which the inventors have confirmed, but may be slightly modified depending on the components to be mounted. The thickness of the reflective layer 4 is preferably 0_G2Mm or more from the viewpoint of light reflection characteristics, and is preferably 2 or less from the viewpoint of flatness. Further, the aluminum reflecting layer 4 and the collecting layer 19 are produced by a batch processing or a Weili county in a steaming apparatus having a pressure reducing function. Linhe (10) 18 Lai-style electric county, vacuum steaming and other dry types can be used to make the quality layer required for this product. Wet money can be applied to all sides (6 sides) of the material, and most of them can be produced at low cost. Therefore, the recording layer and the layer 18 of the present invention are preferably formed by wet plating.曰 It should be noted that the film thickness of the base layer formed by the wet-banking method of the nickel layer 17, the layer 18, and the gold flash layer 10 is calculated by integrating the current value at the time of plating. The thickness of the nickel layer can be changed to a value of α4μηι to 15μηη for the purpose of preventing discoloration of the substrate due to oxidation of steel and improving the operability of the semiconductor light-emitting element mounting base when it is hardened. When the component is mounted on the Rizaki, a good solder wettability is obtained by the partial impurity layer i/ which becomes the connection portion, so that the palladium layer 18 can be provided. As the palladium layer 18, its thickness is mostly Ο. ΟΙμηι~0·2μιη, the thickness is determined according to the welding conditions. Further, the effect of the present embodiment is that by using aluminum as a reflective layer, high reflectance can be secured. Further, by using 0. The aluminum reflective layer 4 having a thickness of 02 μm or more has good durability. In addition to the effect of the transition rate, the effect of the New Wave. In other words, the plurality of layers 18, 61H, and 17 can be used to continue the main material of the substrate 2, and the above numerical range improves the wettability of the sound-absorbing layer and the material-free material, and the numerical value is increased. The welding of the health can be long. That is, by forming each of the configurations, a structure suitable for welding can be obtained. [25th embodiment] Fig. 25 is a schematic cross-sectional view showing the conductor registration of the present invention. The semiconductor light-emitting device mounting substrate shown in Fig. 22 and the outer casing of Fig. 21 are divided into 8 The same parts as those of the second embodiment and the same reference numerals are denoted by the same reference numerals. When a steel sheet is used as the substrate 2, for example, the length is 1 μm, the width is 5 mm, and the thickness is 〇. 2mm steel plate, on the surface of the substrate 2 by wet plating method, the thickness is 1 ς ς 锦 layer 17 thickness 〇. The layer μ and thickness of ipm are o. Oigm's gold flash layer is 1 〇. Further, the portion for the surface of the gold flash plating layer 1 followed by the titanium layer 19A, 19B and the aluminum reflective layer 々A, is used, and the portion used as the reflective film is partially bonded, and no solder joint is obtained. !S layer, material in the part used for reflection. Then, the punching machine and the frame shape for mounting the semiconductor light-emitting element were fabricated, and the two groups (from the accomplice and the guilty) were arranged close to each other. Then, a resin-made outer covering portion 8 which surrounds the portion where the base materials 2A, 2B are close to each other and which has a recess in which the periphery of the semiconductor light-emitting element 6 is previously excavated is formed. Next, the semiconductor light-emitting device 6 was mounted with a conductive paste, and the surface electrode and the lead frame were joined by gold bonding. Finally, a light-transmissive resin (such as enamel resin) is filled in the concave portion of the outer covering portion 8 to cover the semiconductor light-emitting element 6, thereby forming a translucent resin portion 9 as a part of the outer covering. In the above description, the "semiconductor light-emitting element mounting substrate is produced" and then formed into a predetermined shape by a press machine, but a post-plating method may be used. That is, after the base material 2 is molded into a predetermined shape, each plating layer (10, 17, 18) is formed on the substrate by wet plating, and the aluminum reflective layer 4 and the titanium layer are formed by dry plating such as vacuum deposition. 19. Further, the case where the base material 2 is made of copper will be described, but a base material provided with a copper wire on a resin or the like can be used. Further, other metal substrates such as an iron-based 42 alloy may be used in view of use, cost, and the like. Further, it is possible to form a wiring by using a printed circuit board or a flexible wiring board forming step, and then forming an aluminum flip 38 201214778 shot layer 4 and a titanium layer 19 to be used. In this way, depending on the purpose, structure, material (copper plate or flexible flexible resin substrate), the shape can be changed (made by shapes such as punching, bending, and bulging), and electric ore, The order of steaming. The semiconductor light-emitting element 6 of the women's wear can be mounted with an LED chip such as GaAs-Si-LED, AKJaAsiED, GaP_LED, AlGalnP-LED, InGaN-LED or the like. Further, the semiconductor light-emitting element 6 shown in Fig. 13 is an element in which the electrodes of the top surface and the bottom surface face in the longitudinal direction, but is not limited thereto, and may be an LED having a planar structure of the same electrode (for example, (4) In the case of a planar structure in which the electrodes form a closed-surface, there is a case where the electrode faces the wire surface side (upper side in the drawing) and the anode is wire-bonded; the 丨 electrode surface faces downward (the lead frame side) In the so-called flip chip mounting method of direct connection, any mounting method can be used. Copper wire bonding and aluminum wire bonding can be used instead of gold wire bonding. Further, in this embodiment, a gold flash plating layer is applied. The substrate, about gold at a coarser pitch (eg G. In the case of a 5 mm pitch, that is, in the case where the precision is not high, the gold flash plating layer 10 can also bring a high yield, so it can be omitted. The palladium layer 18 can be omitted as long as the thickness of the metal layer can be ensured and sufficient solder wettability can be obtained. According to the semiconductor light-emitting device having such a configuration, similarly to the semiconductor light-emitting device shown in Fig. 21, the light emitted from the semiconductor light-emitting element 6 is transmitted through the presence of the insole reflective layer 4A located on the bottom surface of the concave portion formed in the outer cladding portion 8. The reflection from the inscription layer 4A to the opening side of the concave portion exerts an effect of increasing the amount of light from the semiconductor light-emitting device. Further, since the aluminum reflective layer 4A has good light reflection characteristics, it is possible to maintain high reflectance for a long period of time. [Embodiment 26] FIG. 24 is a cross-sectional view showing a semiconductor light-emitting device mounting substrate according to a twenty-sixth embodiment of the present invention. This embodiment is a modification of the semiconductor light-emitting element mounting substrate shown in FIG. 22, and FIG. 24(a) shows that the nickel layer 17, the palladium layer 18, and the gold flash layer 1' are formed only on one surface of the substrate 2. Gold flash deposit layer 10. A part of the upper portion forms an example of the titanium layer 19 and the insole reflective layer 4; and FIG. 24(b) shows a part of the shaped gold layer 19 on the gold flash ore layer 1 formed on the surface of the substrate 2, and the inscription layer 4' An example in which a portion is bent upward by approximately 9 degrees on the paper surface; Figure 24 (4) shows the formation of the recording layer 17 on the entire surface of the substrate 2, and the layer 18 of the spear gold amphibole layer 1 The aluminum reflective layer 4 and the titanium layer 19 are formed on the entire surface of the layer 1 , and a part is bent upward by 18 degrees on the paper surface. FIG. 24 ( 4 ) shows that the aluminum reflective layer 4 and titanium are directly formed on one surface of the substrate 2 . Layer 19, an example of forming a nickel layer 17, a palladium layer 18, and a gold flash layer (1) on the other side of the base 39 201214778 material 2. The semiconductor flying element mounting substrate shown in the 24th ffi (a) may be configured by forming a nickel layer w having a thickness of a thin layer on one surface of the substrate 2 made of steel by an electric ore method. The thickness is Ο. ΟΙμηι _ layer 18, and a gold amphibole layer having a thickness of 〇 1 μm is formed, and then a layer 19 is formed on the upper portion of the gold flash layer 10, and the layer 4 is subtracted (4). Incidentally, as in this example, the layered recording, Ιε, gold, and the like are sequentially deposited on the substrate, and the sewable plating method can be sewed in addition to the light-reducing layer. The thief shot layer 4, the titanium layer 19, and now the wet type electric ore method can not accommodate (4) Wei' so vacuum test can be used. As another method, for example, a money plating method using an inert gas jet can be utilized. In addition, many of these methods can be used from the viewpoints of cost, simplification of the process steps, and the like. The semiconductor substrate of the semiconductor light-emitting device of the 24th (b) is sequentially formed on the substrate 2 by a key method to have a thickness of 1. 5μηι's riding raft, by the test method to form a thickness of Q 2 called _ layer 18, forming a thickness of Ο. After the gold ore layer 10 of ΐμτη, an aluminum reflective layer 4 and a titanium layer 19 are formed on a part thereof. The substrate for mounting a semiconductor light-emitting device shown in Fig. 24(c) is sequentially formed on the substrate 2 by a mineralization method to have a thickness of 1. 5μηι _ layer 17, with the thickness of the plating method is Q 2 哗 _ layer 18, forming a thickness of Ο. After the gold layer 1G of ίμιη, the entire surface layer 19 is formed as the shot layer 4. These examples are a method of using a top surface of the semiconductor light-emitting element filament layer 19, |g reflective layer 4, and performing wire bonding on the bottom surface or side surface of the substrate 2. More specifically, it is a structure which can be 1 M when the base material 2 is bent. Shu Gang, in the actual sealing towel, is bonded to the back surface of the substrate 2, but the nickel layer 17, the palladium layer 18, the gold flash ruthenium or the like may be coated on the back surface depending on the purpose. The semiconductor light-emitting element mounting substrate shown in Fig. 24(d) is similar to Fig. 24 (in the case of the core, the recording layer 17, the layer 18, and the gold flash layer 10 are applied only to one side of the substrate 2, so The amount of use of these metals is suppressed. When only one side is subjected to electric forging, the two substrates are bonded together and enter the electro-recording step 'and then separated, so that the reflective layer 4 and the layer can be achieved without the masking material. Since the thickness is easily affected by the reflectance of the substrate as described above, it is preferably 0. 02 μm or more. Although the aluminum reflective layer 4 and the titanium layer 19 are formed over the entire surface, they may be partially formed. The structure of the aluminum reflective layer 4 and the titanium layer 19. After the semiconductor-emitting two-element mounting substrate shown in Fig. 24(d) is formed, the end portion of the substrate (also referred to as a substrate connecting lead and an external lead) can be used. It is used in a predetermined shape. For example, the bottom surface of the portion of the outer surface of the substrate (external wire) is bent to be in contact with the top surface of the printed circuit board, and the structure can be used when it is connected to the substrate. That is, the central portion of the substrate is used as a subtractive layer The bottom surface of the end portion of the base material is an outer lead wire, and the surface on the nickel-palladium side is connected to the printed circuit board. [27th embodiment] FIG. 25 is a view showing a substrate for mounting a semi-laid light-emitting element according to a twenty-seventh embodiment of the present invention. The structure of this embodiment is as follows: on both sides or one surface of the substrate 2, an alloy selected from the group consisting of (Pd), gold (Au), tin (Sn), nickel (10), steel (Cu)-tin (Sn), A single-layer metal layer 11' in a copper (Cu)-nickel (10) alloy forms a titanium layer 19 and a reflective layer 4 on the metal layer U or the substrate 2. (8) indicates that a metal layer u is formed on both surfaces of the substrate 2, An example of forming the smear layer 19 and the smear layer 4 on a portion of the metal layer of one side; (8) means forming a metal layer n on one side of the substrate 2, and forming a titanium layer 19 on the portion of the metal layer 11, and reflecting An example of the layer 4; (6) shows an example in which the metal layer 11 is formed on the surface of the substrate 2, and the titanium layer 19 and the reflective layer 4 are formed on the other surface of the substrate 2. The Barbie copper has an antioxidant wire and has a fine Advantages of welding for welding; tin has the advantage of being easy to weld and inexpensive, but has the disadvantage of being slightly oxidized. Copper-tin Gold is more oxidized than copper 2, and has the advantage of dense tin fusion compared with tin and copper. Copper age gold has the advantages of easier than recording and tin. According to the characteristics of the material, it can be selected as metal according to the secret parts and manufacturing conditions. [Embodiment of the layer 11] [Embodiment 28] - Fig. 26 is a schematic view showing a semiconductor light-emitting device mounting substrate according to a twenty-eighth embodiment of the present invention. A working place or a plurality of gold plating layers 12 are formed on the reflective layer 4. Fig. 26(a) shows an example in which a gold deposit layer 12 is formed on a portion of the titanium layer 19 and the aluminum reflective layer 4; and 26th_ indicates a partial formation The gold layer 12 on the outer side of the layer of the reflection layer 4 is formed with a gold plating layer 12 _ sub; the figure 26 (4) represents the entire surface layer of the glazed layer 12 on the layer 19 and the surface of the reflection layer 4; _ indicates an example in which the gold plating layer 12 is formed on the entire surface of the gold layer 1 of the shape of the brain layer 19 and the reflective layer 4; the (fifth) figure (8) is a rotating (four) optical device for mounting the silk plate without using the county conductor light-emitting element. A schematic cross-sectional view of an example of an embodiment. In these embodiments, a recording layer n, a layer 18, and a gold layer 1G are sequentially formed on the entire surface of the substrate 2, but are not limited to scales, as described above, and may also be applied to form a single layer. In the case of the metal layer U, the case layer 19 and the surface reflection layer 4 are directly formed on the substrate 2. 41 201214778 The Fengshui Laijin layer 12 can be used to install the ΐ=ϊΐΠΓ connection on the sister layer 19 and the subtraction layer 4. _ turn, the domain length (blue) side _ rate is lower,. According to the position, the structure of the anti-material layer 12, that is, I 3 = is formed in the respective mines _, 12, 17, _ by the wet electric ore method, or may be [the 29th embodiment] As a twenty-ninth embodiment of the present invention, a semiconductor hairpin:=3 is shown. In the semiconductor light-emitting device according to the present embodiment, the substrate for mounting the conductor light-emitting element is mounted on, for example, a printed circuit board, and the bottom surface of the outer surface of the light-emitting element mounting substrate 1 is substantially flush with the surface of the printed circuit board. Below the bottom

Γ^^Τ!"^ 13 ° ^ - «(a) ^ .I I SI疋將外導線_ 9〇度朝向下方,再將其向相反方向彎折9〇 由此外導線的延伸方向未變,且使水平位置與外包體部 刀的底面為大致同-面;第27 _)表示形成部分化的例子,Γ^^Τ!"^ 13 ° ^ - «(a) ^ .II SI疋The outer wire _ 9 turns downward, and then bends it in the opposite direction 9〇, so that the extension direction of the outer wire does not change. And the horizontal position is substantially the same as the bottom surface of the outer-body blade; the 27th_) indicates an example of forming a partial.

1b疋將外導線沿外包體部分8 f折90度兩次 J 面形成;第27 _是形成部分le的例子,分== = = 3 =相反的方向沿著外_分8彎㈣度兩次,從而 體f 光裝置的每__^_財林限槪,躲賴合半導體發 應予說明’相比於設有第—金屬層„的半導體發光 較佳===面側蝴純層㈣峨元件絲《板。 轉,上與第22實施方式同樣設置紹反射層的方面 ;、其他實施方式相同。但疋,喊射層的碳濃 _ 簡該半導體發光元件安裝用基板的接合性,與由金構::線ί =線接合。於此,打雜合是指為了料線_’ 導線架的元件上的電極電連接,用金等線進行連接。¥細女裝於違 第-接合是指將以放電將線的尖端製成球狀的線預先接合的接合。通 42 201214778 常鑑於位置精度、壓接性,大多將元件側的電極進行第一接合。在本實施 方式中’在_基材上’對與第丨實施方式同樣設有減射層的部分接合 了以放電將線的尖端製成球狀者。 第二接合是指上述元件側的電極與應由上述線連接的導線架側的電極 在規疋的位置接合。在本實施例中,在銅的基材上,對與第22實施方式同 樣設有鋁反射層的部分,將線端以摩擦附著的方式進行壓接。 在表8中表示鋁反射層中的碳濃度與金線的接合強度的關係。作為實 施例38,是將在厚度為〇.15mm的鋼基材上以濕式電鑛法形成有〇加的 鎳1、0.05nm的鈀而得到的製品進行衝壓加工,在厚度為〇 5mm的3層玻 璃環氧樹脂基板上以耐熱丙烯酸系樹脂黏著劑固定,形成發光裝置用電路 基板的實施例。將本材料安裝在上述真空驗裝置,形成G _的欽層、 0.2μηι的銘反射;f,實施SIMS分析。於此,銘反射層内的碳濃度為該鋁反 射層内的碳濃度的最小濃度。減騎内的碳紐為3xlG2〇紙m3。在厚 度為125μιη的聚醯亞胺樹脂膜整面以濕式電鍍法形成7(^m的銅基材、 0·7μηι的鎳層、〇.〇5μηι _後’將所得製品用耐熱丙稀酸系樹脂黏著劑與 實施例39的基材貼合而形成板材。在實施例39中,在形成鋁反射層後, 以衝壓加工沖切去不需要的部分而形成配線材。同樣將實施例39的銘反射 層中的碳濃度1%行SIMS純,絲!g域層_碳驗為1x1g2G個/cm3。 實施例40是在含鐵的銅合金上利用濕式電鑛法形成〇 7μιη的錄層、〇 〇5_ 的把後’只進行衝壓加卫’然後將得到的製品在真空蒸鍍裝置中用不錯鋼 製(SUS304)的工模夾具固定’形成〇 1μιη的鈦層19、〇 2邮的铭反射層*。 實施例40的鋁反射層内的碳濃度為3χ1〇19個/cm3。 在實施例38中,⑽的厚度為〇_1μηι,但鈦層的厚度若為α叫①以上, 也能夠得卿樣的絲。但是’考慮到賴時製程㈣定性,朗的厚度 較佳為〇.〇5师以上。另外,欽層的厚度為〇 2μηι以上時,平坦性緩慢下降, 所以鈦層的厚度較佳為0.2哗以下。 作為評價鱗,第-接合強度是將具有G39N以上㈣切強度的情況 作為〇 ’將小於0.39N者作為X。第二接合強度是將具有〇 〇_以上的剪切 強度的情況作為〇,將小於0.049N者作為X。 從表8可知’銘反射層的碳濃度為3_2。個w以上時,接合強度下 43 201214778 降,較佳S lxio20個W以下。應予說明,在本實施方式中,由於使用環 氧樹脂材、丙烯酸系黏著劑等有機材料,所以鋁反射層内的碳濃度上升, 作為碳的混人源’可財慮基材的污染、沖洗氣真空泵油的逆擴散、使 用濺鍍法時的濺鍍氣體的雜質等各種因素。 在接合試驗中,打線接合機係使用WEST bond INC.的 MODEL77GGD,並使用直徑為25μιη的金線,在超音波強度為35QmW、超 音波施加時間為lGGms的接合餅下實施。在版咖股份有限公司的接合 測試儀PTR-1的剪切試驗模式下實施。SMS測定是利用pm公司 ADEPT1G1G,將作為1讀子源的絲子以3keV的加速能量來實施。 〔第31實施方式〕 第28圖是表示本發明第31實施方式的半導體發光裝置的示意剖視 圖、。该實施方式的特徵在於半導體發光元件6裝載於減射層4上,用於 與半導體發光元件6進行打線接合或㈣打線接合的供電㈣子的基材 2B、2C上沒有铭反射層4。 打線接合前端也可以有铭反射層4,但是沒有紹反射層4的情況下,通 過使基材2B、2C的表面狀態最佳化,從而接合條件的範圍擴大,裝配速度、 良率變付良好。第28圖表示了半導體發光元件6的安裝部分的基材2A和 基材2B、2C的鑛層(3、1〇)為同一結構的例子,但2A、2B、2C的基材的 鍍層的結構可以不同,也可以分職作。另外,第28圖表示了基材2A、 2B、2C下部由樹脂包覆的情況,但在背面可以露出基材2A、2B、$的背 :的整面或-部分。露出的部分進—步與金屬製的放熱板等以焊接等連 從而可以提㊉放熱性’並可以增大光輸出功率。另外,使用具有背面 電極的半導體發光元件6時,與上部電極連接所使㈣供電用端子有^根 =上即可’也可輯與上部電極連接的多根供電用端子進行打線接合配 使用多根知子之際’有容易進行大電流驅動時的配線配置、發光裝 置間的配線配置之情況,而將其分開使用。 第28圖表不了將光發光元件的電極部分和供電用端子的連接進行打線 。連接的情況’但也可以製仙部導線,實施顧楔連結的連接,所述 導線利用連接祕随化的崎材,職楔連結使用超音波、加熱。 >上所述,本發明人得知|g反射層中的碳濃度會對金線與㉟反射層的 201214778 接合強度帶來很大影響。應注意這適用於上述的全部實施方式。 將本發明的半導體發光元件安裝用基板及使用該基板的半導體發光裝 置作為實施方式表示的代表性結構财說_本發明不限餘該結構例, 在本發明的技術思想的範圍内可以有各種結構。作為供電用端子,打線接 合或内部打線接合的基材2B、2C的表面駐要構成材料可以為選自金、 銀、鈀、金合金、銀合金、或鈀合金中的一種或其組合。另外,可以在本 發明的主旨的範圍内任意組合上述各實施方式的構成要素。 (第32〜第38實施方式) 本發明半導體發光元件安裝用基板和半導體發光裝置的實施方式是構 成具有基材、鋁反射層和在其下的銀層或銀合金層的半導體發光元件安裝 用基板的實財式’職基湘於安裝半導體發光元件,且由銅、銅合金 或鐵系合金構成,所脑反射層設在紐的絲半導歸光元件的面二的 至少一部分。 〔第32實施方式〕 一第29圖是表示本發明第32實施方式的半導體發光元件安裝用基板的 不意剖視圖,符號2是基材、符號4是在基材2的一面的包括安裝半導體 發光元件的處所的區域形成的鋁反射層,符號19是作為 層的欽層’自蝴Μ機総細輸^ 基材2由金屬或金屬與有機材或無機材的複合材構成。主要為了焊接 安裝’基材2被覆有銀層或銀合金層3。 對於基材2 ’作為該基材2的金屬的材料不限於此,但通用性最高的基 材2是由銅或銅合金構成的金屬導線架。作為基材2使用銅板的情況下, 對其厚度沒有限制,但是可以參考成本來選定厚度。另外,考慮量產化, 較佳鋼板的環紐,但也可贿用短尺寸的#材、以及各種材料^作為基 材2使用複合材的情況下,可以使用樹脂材上貼合有鋼板的覆銅板、其積 層板。作為樹脂,可以使用硬質的板狀的樹脂、薄且具有可撓性的樹脂。 作為代表性樹脂,分別可以舉出玻璃環氧樹脂基板(玻璃布基材樹脂板)、 聚醯亞胺樹脂系等。 鋁反射層4、鈦層19的製造方法是用具有減壓壓力調節功能的蒸鍍裝 置通過分批次處理或連續處理等進行。從反射率的觀點考慮,鋁反射層4 45 201214778 的厚度較佳0.02μηι以上。 作為基材2使用鋼合金材C_194的情況下,例如長度為1〇〇m、寬度為 50mm、厚度為0.15mm,鋁反射層4的厚度例如為〇 05μιη,鈦層19的厚 度為Ο.ίμηι。製4:8夺’首先’在作為基材2的上述尺寸的銅板以濕式電鑛法 準備銀層或銀合金層(厚度3μιη) 3。接著,使用電阻加熱式的圓筒式的電 子束方式真空蒸鑛裝置形成鋁反射層4、鈦層19。具體而言,將基材2切 割成50mmxl50mm的短尺寸材,將切割的基材16張以放射狀排列在半徑 為300mm的傘狀的工模夾具上,將其在圓筒上配置3組,使用電子束搶(輸 出功率6kW)作為銘、鈦的蒸鍍源,排氣至真空度為2xl〇4pa,形成厚度 為0·05μιη的銘反射層4。在本實施方式中,真空蒸鍍裝置使用了自製機, 使用負載鎖方式的驗機等市f的蒸鑛裝置也沒有問題。另外,還可以是 能夠對環騎進行驗的_式蒸鍍裝置m财置是综合考慮膜 質、,產率等來適當選擇即可。進而,!g反騎4、鈦層19的形成方式可 以不疋電子束驗方式^即,可以糊電阻加熱驗法、離子鑛法、滅鍛 法、金屬包覆法等。 銘反射層4、鈦層19的膜厚測定利用SIMS分析來進行。將從表面到 紹反射層4正下方的基底鈦層19達到最大強度的1/2的信號強度時的厚度 作為銘反賴4 _厚,關19的厚度是_主要構成元件在該基底層中 的最大強度的1/2的信號強度時的厚度。若為上述的銀層或銀合金層3的情 況下,則使用銀的信號強度比。 (本實施方式有關的實施例的評價) 對銘反射層4,如下確定硫化特性和反射率。首先,如表9所示,在鋼 土材上實施有鍍銀的材料’以上述方法製倾反射層4,此韻大 烘I目DT」1型’在大氣中進行丨贼、3小時,隨後丨贼、4小時的熱處 理。熱處理後,測定波長46〇nm下的初始反射率。在該波長下,將硫酸鎖 t i’將反射率為9〇%以上作為特別良好(由。表示),將小 於90/。作為差(由χ表示)。 ,著,對於硫化特性,對形成有厚度為Ο.ίμιη的銘反射層4、欽層19 Γ 3_的邮(硫化氮)在氣體環境溫度4〇t、濕度80%中暴 露小時(進行按照日本工業標準刪)2電鑛的_錄試驗方法的試 46 201214778 驗)。耐硫化特性是初始反射率與硫化48小時後的反射率之比。其於果, 可知相對於初始反射率為92%,耐硫化試驗後的反射率為87%,為良好β 應予說明’作為實施例44,確認了在基材2上的厚度為3卿的^層或 銀合金層3上設置厚度Ο.ΐμπι的鋁反射層4的基板在沒有進行熱處理二, 初始反射率為91%而良好、為〇,耐碌化試驗後的反射率比為98%,硫化特 性良好。作為比較例45,確認了將在基材2上的厚度為3μπι的銀層^銀合 金層3上設置厚度為0.1μπι的鋁反射層4的基板(即實施例44)在上述^ 件下實施熱處理的情況下,初始反射率下降至62%,為><,硫化特 二 反射率比)下降至55%。 ° 由實施例44和比較例45可知,實施例熱處理的情況下,銅向半導體 發光元件女裝用基板的表面擴散,使初始反射率和耐硫化特性惡化(使耐 熱性惡化),設有鈦層的情況下,通過形成鋼的擴散障礙,可以維持高耐熱 性。 .…、 根據本實施方式,由於在基材2表面形成有鋁反射層4和鈦層19,所 以可以獲得未硫化且長期具有高且穩定的反射特性的半導體發光元件安裝 用基板及使用該基板的半導體發光裝置。這是利用了鋁的以下特性:鋁的 反射率在紫外線中高達銀的3倍以上,並對紫色、紅色、紅外線具有接近 銀的反射率’在金屬中顏⑽均衡良好,具有僅:欠於銀的高反射率,且與 銀相比難以發生硫化。 、 為了對上述半導體發光元件安裝用基板進行打線接合而進行氬電漿清 洗’然後’接合金線。職半導體發光元件安㈣基板進行魏試驗社 果沒有看,反射率的下降。由該結果可確認,其對表面清洗的耐性強而無 劣化、剝落之虞。對以上述製作方法形成的半導體發光元件安裝用基板 3忍出與金線的接合特性。 打線接合機使用K&S公司的4522型,使用直徑25μιη的金線(田中貴 金屬製’ typeC)來對接合特性的拉力強度進行試驗評價。基村是在鼓沖壓 加工的銅合金(C-194 ··厚度〇.15mm)上的基材,以及形成了 ‘〇 _ 的鈦層19 + 0.1哗的铭反射層4。表7表示了膜構造和金線拉力試驗的結果。 如表7所示’可知通過將鈦層19插人銅基材上的銀層或銀合金層3與 鋁反射層4的中間,拉力強度顯示實用上充分的強度。 47 201214778 應予說明,雖然有程度差,但在後述的實施方式中也能夠得到由上述 第32實施方式得到的效果。 〔第33實施方式〕 第30圖是表示本發明第33實施方式的半導體發光裝置的示意剖視 圖,表示使用了第29圖所示的半導體發光元件安裝用基板的半導體發光裝 置。在圖中’符號2是基材、符號3是基材2的銀層或銀合金層、符號4 是在基材2的一面形成的鋁反射層,符號19是鈦層,由此等構成半導體發 光元件安裝用基板1。 在半導體發光裝置5中,將此等兩組(2A、2B)在大致同一面上靠近配 置而使用。符號6是安裝於鋁反射層4上的半導體發光元件;符號7是將 半導體發光元件6與鋁反射層4電連接的接合線。符號8是樹脂製外包體 部分,該外包體部分包圍不包括半導體發光元件6之基材2A、2B靠近之一 侧,並具有由傾斜面8b和位於底面的鋁反射層4形成的凹部8a,所述傾斜 面8b在半導體發光元件6的周圍隨著遠離基材2而遠離半導體發光元件6; 符號9是以填充在外包體部分8的凹部如且密封半導體發光元件6的透光 性樹脂部,來構成外包體的一部分。外包體部分8中可以混合螢光體材料。 例如,通過混合YAG等,LED晶片可使用460nm的GaN系LED而用於 擬白色LED裝置。 鋁反射層4、鈦層19在外包體内側的大致整面、或除去一部分的剩餘 的部分形成即可。其理由是因為從半導體發光元件6放射的光在外包體部 分8内反射即可。 。作為具體方法,有(1)在鋁反射層形成時的成膜裝置中,設置將外包體 區域以外賴的功能;(2)在整面形成做射層後,將外包體部區域通過貼 臈(taping)、或光微影製程等遮蔽,然後,蝕刻除去鋁的方法等各種方法, 可以使用此等中的任意一種。 > 根據該結構的半導體發光裝置5,通敬於外包體部分8形成的凹部 8a的底面_反射層4的存在,從半導體發光元件6射至的光通過紹反射 層4反射到凹部8a的開口側,發揮增加來自半導體發光装置5的光量的效 果。如上所述,具有良好的耐硫化特性,所以可以長時間維持高反射率。 在以上的說明中,製作半導體發光元件安裝用基板1後,利用沖機、 48 201214778 蝕刻而成形為規定形狀’但也可以利用後鍍法。即,可以將基材2A、2B 成形為規定形狀後,利用濕式電鍍法在基材2A、2B上形成銀層或銀合金層 3後’以真空蒸鍍法等乾式電鍍法形成鋁反射層4、鈦層19。銀層或銀合金 層3 —般也可以促採用濕式法,而通過真空蒸鍍法等乾式電鍍法來形成。 進而’對於基材2A、2B ’對由銅構成的情況進行說明,但也可以使用在樹 脂等上設有鋼配線的基材。另外,從用途、成本等考慮,還可以使用其他 的金屬基材’例如鐵系的42合金等。另外’可以利用印刷電路板、撓性配 線板形成步驟形成配線後,形成鈦層19、鋁反射層4而使用。如此,根據 目的、構造、材料(鋼板或具有可撓性的撓性樹脂基材),可以變更形狀的 製作(利用沖切加工、彎曲加工、鼓凸加工等形狀的製作)、電鍍、蒸鍍的 順序。 所安裝之半導體發光元件6可以安裝例如GaAs-Si-LED、 、GaP_LED、AlGalnP-LED、InGaN-LED 等 LED 晶片。另外, 第30圖所示的半導體發光元件6是頂面和底面的電極的縱向元件,但不限 於此,也可以是在同一面形成一對電極的平面構造的LED (例如GaN系)。 在電極形成於同-面的平面構造的情況下,有將電極面朝向表面側(圖中 為上側),陰極、陽極均實施打線接合的情況;有電極面朝向下(導線架側) 而直接連接的所謂的覆晶安裝方式,可以使祕—安裝方式。也可以用銅 系打線接合、鋁打線接合代替金打線接合。 根據該結構的半導體發絲置5,通触射卜包體部分8形成的凹部 8a的底面的減射層4的存在,從半導體發光元件6射至的光通過銘反射 層4反射到凹部8a的開口側,發揮增加來自半導體發光裝置$的光量的效 ,。另外,滅射層4具有良好的光反雜,所以可以斜間維持高反射 '〔第34實施方式〕 第3!圖是表示本發明第34實施方式的半導體發光元件安裝用基板的 該實施為第29圖所示之半導體發光元件安裝用基板的 3 /相思"^化例’第31圖⑻表不僅在基材2的一面形成銀層或銀合金層 層或銀合金層3上的一部分上形成鈦層19、銘反射層4的例子·第 圖()表不在基材2的-面形成的銀層或銀合金層3上的一部分上形成 49 201214778 鈦層19、鋁反射層4,將一部分在紙面上向上方彎折大致9〇度的例子;第 31圖(c)表不在基材2的銀層或銀合金層3的整面形成鈦層19、鋁反射層4, 將一部分在紙面上向上方彎折180度的例子;第31圖^)表示在基材2的一 面直接形成鈦層19、鋁反射層4,在基材2的另一面形成鎳層17、鈀層18 和金閃鍍層10的例子。 第31圖(a)所示的半導體發光元件安裝用基板可以如下構成,即,在由 銅構成的基材2的單面以電鍍法形成厚度為3μιη的銀層或銀合金層3,在 銀層或銀合金層3的,分上以舰法形成鈦層19、舦射層4。應予說 明,像該例子這樣,在銅的基材2上依次形成銀、鈦、鋁時,銀層或銀合 金層3可以利用乾式,但也可以使用濕式電鍍法。對於銀層或銀合金層3、 鈦層19、鋁反射層4,此時以濕式電鍍法不能容易地進行電鍍,所以可以 採用真空碰法。作為其他的方法,例如可以糊惰性氣射的麵法。 另外,從成本、製程步驟的簡化等觀點考慮,可以使用此等方法中的多種。 第31圖(b)所示的半導體發光元件安裝用基板是依次在基材2上以電鍍 法形成厚度為3.0μηι的銀層或銀合金層3後,在一部分上形成鈦層19、鋁 反射層4而構成。第31圖(c)所示的半導體發光元件安裝用基板是在基材2 上以電鍍法形成厚度為3·0μιη的銀層或銀合金層3後,在一部分上形成鈦 層19、鋁反射層4而構成。此等例子是假設將半導體發光元件安裝於鈦層 19、紹反射層4的頂面’並在基材2的底面或側面實施打線接合的使用方 法。更具體而言’是基材2彎折時能夠適用的結構。應予說明,在本實施 例中’在基材2的背面實施打線接合,但也可以根據目力在背面被覆銀層、 或鎳層17、把層18、金閃鑛層1〇等。 〔第35實施方式〕 一第32圖是表示本發明第35實施方式的半導體發光元件安裝用基板的 示意剖視圖。該實施方式的特徵在於在銀層或銀合金層3、欽層19、銘反 射層4上形成-處或线鍍麵U。第Μ _表示在銀層或銀合金層3、 鈦層19、滅射層4上的—部分形成鍍金層12的例子;帛32剛表示 在部分械祕層I9、ig反射層4的外綱銀層絲合金層3上形成鑛金 層12的例子;帛32圖(c)表示在鈦層19、銘反射層4上的整面形成鑛金層 U的例子;第32 ®(d)麵麵成有鈦層19、趾騎4的銀層或銀合金 50 201214778 層3上的整面形成鍍金層12的例子。 3玄實施方式中的鍍金層12可以利用於安裝在鈦層19、鋁反射層4上的 "導,發光το件的電連接。鑛金層u愈厚,短波長(藍色)綱反射率愈 ^金線的連雛愈良好。根_途,參考反射率來決定齡層12的構 &即可。應予酬’於此錄金層12自濕式電鍍法形成,也可以由其他 形成。 〔苐36實施方式〕 作為本發明的帛%實施方式,對半導體發光裝置進行說明。本實施方 式的代表性使用狀態與第27 _同。本發明半導體發光裝置可以安裝在例 如P刷電路基板上來使用。為了安裝在印刷電路基板^上,將從以第幻 〜35實施方為代表的轉體發統件安㈣基板丨的外包體部分8向外 的部分(外導線)彎折,形成與外包體部分8的底面大致成同一面 的。P刀la或位於底面之下方的部分2b、2c。將該部分到用焊料14與印刷 電路基板13的配線黏結。$ 27 gj⑻表示升》成部分ia的例子,部分la是 將外導線f折9G度朝向下方,再將其向相反方向騎%度朝向水平方向, 由j外導線的延伸方向未變,且使水平位置與外包體部分8的底面為大致 同面,第27 ®(b)表示形成部分lb的例子,該部分lb是將外導線 ,體。P分8彎折9G度2次,從而沿著外包體部分8的底面形成;第27圖⑷ 疋形,部分k的例子’該部分le是將外導線按照與第27剛相反的方 t著外包體部分8彎折9〇度2次,從而沿著外包體部分8的頂面形成。 外導線的彎折方法不限於此,係·符合使时導體發絲置的每種 的形狀。 ' 〔第37實施方式〕 本實施方式中’其為與第32實施方式同樣地在基材2上設有銀或銀合 金層、鈦層、銘反射層之結構。惟,銘反射層4的碳濃度為ΐχΐ〇2〇個^ 以下。 接入2評導體發光元件安裝用基板的接合性,而與由金構成的 線進曲線接合。於此,打線接合是指為了將導線架側的電極 女裝於該導線㈣元件上的電極電連接,用金#線進行連接。第 指將以放電將線的尖端製成球狀的線贱接合的接合。通常鏗於位= 51 201214778 度'壓接性’大多將元件側的電極進行第一接合。在本實施方式中,在銅 的基材上,對與第32實施方式同樣設有紐射層4的部分接合以放電將線 的尖端製成球狀的線。 第二接合是指上述元件側的電極與要由上述線連接的導線架側的電極 在規定的位置接合。在本實補t,在_紐上,對與第32實施方式同 樣設有鋁反射層4的部分,將線端以摩擦附著的方式進行壓接。 在表10中表示了鋁反射層4中的碳濃度與金線的接合強度的關係。作 為實施例47,是將在厚度為〇.15麵的銅基材上以濕式電鍍法形成3 〇μιη 的銀層而彳f到的製品進行衝壓加j!,在厚度為Q 5mm的三層玻璃環氧樹脂 基板上以耐熱丙烯酸系樹脂黏著劑固定,形成發光裝置用電路基板的實施 例。將本材料安裝在上述真空蒸鍍裝置,形成〇 1μιη的鈦層、〇 2μηι的鋁反 射層,實施SIMS分析。於此,鋁反射層内的碳濃度為該鋁反射層内的碳濃 度的最小濃度。鋁反射層内的碳濃度為3xl〇20個/cm3。 在厚度為125μηι的聚醯亞胺樹脂膜整面以濕式電鍍法形成7〇μηι的鋼 基材、3·0μιη的銀層後,用耐熱丙烯酸系樹脂黏著劑與實施例48的基材2 貼合而形成板材。在實施例48中,形成鋁反射層4後,以衝壓加工沖切去 不需要的部分而形成配線材。同樣將實施例48的鋁反射層4中的碳濃度進 行SIMS分析,結果鋁反射層4内的碳濃度為ΐχ102〇個/cm3。 實施例49是在含鐵的銅合金上利用濕式電鍍法形成〇7μιη的鎳層、 0.05μηι的鈀後,只進行衝壓加工,然後將得到的製品在真空蒸鍍裝置中用 不錄鋼製(SUS304)的工模夾具固定’形成〇.ipm的鈦層19、〇·2μπι的銘反 射層4。實施例49的鋁反射層4内的碳濃度為3χ1〇19個/cm3。 作為評價基準,第一接合強度是將具有0.39N以上的剪切強度的情況 作為〇 ’將小於0.39N者作為X。第二接合強度是將具有〇 049N以上的剪切 強度的情況作為〇,將小於0.049N者作為X。 從表10可知’铭反射層4的碳濃度為3χ1〇2()個/cm3以上時,接合強度 下降,較佳為lxl02G個/cm3以下。 應予說明’在本實施方式中,由於使用環氧樹脂材、丙烯酸系黏著劑 等有機材料,所以鋁層内的碳濃度上升,作為碳的混入源,可以考慮基材 的污染、沖洗氣、真空泵油的逆擴散、使用濺鍍法時的濺鍍氣體的雜質等 52 201214778 各種因素。 在接合試驗中,打線接合機係使用Kulicke&Soffa Industries公司的 MODEL4522 ’並使用直經為25μιη的金線,在超音波強度為lw、超音波 施加時間為25ms $接合條件下實施。在版咖股份有限公司的接合測試 儀PTR-1的剪切試驗模式下實施。SIMS測定是利用pffl公司 將作為一次離子源的绝離子以3keV的加速能量來實施。 〔第38實施方式〕 第33圖是表示本發明第38實施方式的半導體發光裝置的示意剖視 圖、。,該實财式哺徵是半導雜光元件6裝載在減射層4 ±,且用於 與半導體發光元件6打線接合或内部打線接合配線的供電用端子部的基材 2B、2C上沒有鋁反射層4。 打線接合前端也可以有鋁反射層4,但是沒有鋁反射層4的情況下,通 過將基材2B、2C的表面狀態最佳化,從而接合條件的範圍擴大,裝配速度、 良率更佳。第33圖表示了基材2A、2B、2C下部由樹脂覆蓋的情況,但是 在背面也可以露出基材2的背面的整面或—部分。露出的部分進一步與金 屬製的放熱板等焊接等連接,從而可以提高放熱性,並可明大光輸出功 率另外,使用具有背面電極的半導體發光元件6時,與上部電極連接所 使用的供電用端子有-根以上即可,也可以對與上部電極連接的多根供電 用端子進行打線接合配線。當使用多根端子之際,有容易進行大電流驅動 時的配線配置、發光裝置間的配線配置之情況,而將其分開使用。 第33圖表示了將光發光元件的電極部分和供電用端子的連接進行打線 接合連接的情況’但也可以製作内部導線,實施利用楔連結的連接,所述 内部導線_連接用之經圖案化的配線材,所述楔連結使用超如皮、加熱。 本發明人得知:如上所述,銀層或銀合金層3層與減射層4之間的 鈦層19提高了本材料_對於反射率的耐熱性,即祕理後的反射特性和 耐硫化特性,並在硫化《環境下也能保持良好的反射率^應注意這適用 於上述的全部實施方式。 將本發明的半導體發光元件安裝用基板及使用該基板的半導體發光裝 置作為實财如所餘之代練結_來朗 構例’在本發_技術思想的範_可以有各種構成。不以… 53 201214778 【表1】 \ 比較 例1 比較 例2 比較 例3 比較 例4 實施 例3 實施 例4 實施 例5 實施 例6 實施 例7 銘反射 層厚度 (μηι) 無Α1 Ag3.0 無A1 基材 側起 NiO.7 Pd0.05 0.006 0.010 0.02 0.05 0.1 1 5 初始反 射率暨 判定 93 〇 63 X 74 X 86 X 90 〇 91 〇 91 〇 91 〇 90 〇 耐硫化 特性 (初始 反射率 與硫化 96小時 後的反 射率之 比(%)) 29 93 99 95 94 98 98 96 97 【表2】 實施例11 實施例12 實施例13 碳濃度(個/cm3) 3χ1020 ΙχΙΟ20 3χ1019 第一接合強度 X 〇 〇 第二接合強度 X 〇 〇 【表3】 \ 實施 例21 實施 例22 實施 例23 實施 例24 實施 例25 比較 例21 比較 例22 比較 例23 比較 例24 紹反射 層厚度 0.006 0.02 0.1 0.5 1 0.001 0.003 無Α1 Ag3.0 無A1 基材 54 201214778 (μιη) 側起 NiO.7 Pd0.05 初始反 射率 〇 〇 〇 〇 〇 〇 〇 〇 X 耐硫化 特性 (初始 反射率 與硫化 96小時 後的反 射率之 比(%)) 80 89 98 96 97 29 50 29 931b疋 The outer wire is folded 90 degrees twice along the outer surface of the outer body portion 8f; the 27th _ is an example of forming the part le, the sub-====3=the opposite direction is along the outer_minute 8 bends (four) degrees two Secondly, the limit of each __^_ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ (4) 峨 丝 《 《 板 板 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上, and the wire is joined by the gold:: line ί = line. Here, the hybrid means that the electrode is electrically connected to the component of the wire _' lead frame, and is connected by gold or the like. The bonding refers to a bonding in which a wire having a tip end of a wire is formed into a ball by discharge. The bonding is generally performed in the first embodiment in the present embodiment in view of positional accuracy and pressure contact property. On the _substrate 'the same as the third embodiment is provided with a portion of the subtractive layer bonded to discharge the line The tip is formed into a spherical shape. The second joint means that the electrode on the element side is joined to the electrode on the lead frame side to be connected by the above-mentioned wire at a predetermined position. In the present embodiment, on the substrate of copper, The portion in which the aluminum reflective layer is provided in the same manner as in the twenty-second embodiment is bonded to the wire end by frictional adhesion. Table 8 shows the relationship between the carbon concentration in the aluminum reflective layer and the bonding strength of the gold wire. 38. A product obtained by forming a nickel with a thickness of 0.05 nm and a palladium of 0.5 nm on a steel substrate having a thickness of 〇15 mm by a wet electric ore method, and a 3-layer glass having a thickness of 〇5 mm. An epoxy resin substrate is fixed with a heat-resistant acrylic resin adhesive to form an embodiment of a circuit board for a light-emitting device. The material is mounted on the vacuum inspection device to form a G-th layer and a 0.2μηι reflection; f, SIMS analysis. Here, the carbon concentration in the reflective layer is the minimum concentration of carbon in the aluminum reflective layer. The carbon in the riding is 3xlG2 m paper m3. The polyimide film is 125 μm thick. The surface is formed by wet plating 7 (^m A copper substrate, a nickel layer of 0·7 μηι, and a crucible of a heat-resistant acrylic resin adhesive of the obtained product were bonded to the substrate of Example 39 to form a sheet material. In Example 39, After forming the aluminum reflective layer, the wiring material was formed by punching out unnecessary portions by press working. Similarly, the carbon concentration in the inscription layer of Example 39 was 1%, SIMS pure, and the wire!g domain layer_carbon was 1x1g2G. Example 40 is a method of forming a recording layer of 〇7μηη on a copper-containing copper alloy by wet electro-minening, and then splicing and curing the 〇〇5_ and then vacuum-depositing the obtained product. In the apparatus, a good steel (SUS304) mold jig was used to fix 'the titanium layer 19 of the 〇1μηη, and the etched layer* of the 〇2 post. The carbon concentration in the aluminum reflective layer of Example 40 was 3 χ 1 〇 19 / cm 3 . In Example 38, the thickness of (10) was 〇_1μηι, but if the thickness of the titanium layer was α or more, it was possible to obtain a clear-like yarn. However, considering the qualitative (4) nature of the Lai process, the thickness of Lang is preferably more than 5 divisions. Further, when the thickness of the enamel layer is 〇 2 μηι or more, the flatness is gradually lowered, so the thickness of the titanium layer is preferably 0.2 Å or less. As the evaluation scale, the first joint strength is a case where G39N or more (four) cut strength is used as 〇 ', and less than 0.39N is taken as X. The second joining strength is a case where the shear strength of 〇 〇 or more is taken as 〇, and a case of less than 0.049 N is taken as X. It can be seen from Table 8 that the carbon concentration of the reflective layer is 3_2. When w or more, the joint strength is lowered at 23 201214778, preferably S lxio is 20 or less. In the present embodiment, since an organic material such as an epoxy resin material or an acrylic pressure-sensitive adhesive is used, the carbon concentration in the aluminum reflective layer increases, and as a mixed source of carbon, contamination of the substrate can be considered. Various factors such as reverse diffusion of the flushing gas vacuum pump oil and impurities of the sputtering gas when using the sputtering method. In the bonding test, the wire bonding machine was carried out using a MODEL77GGD of WEST bond INC. using a gold wire having a diameter of 25 μm, and a bonded cake having a supersonic intensity of 35 QmW and an ultrasonic application time of 1 GGms. It was carried out in the shear test mode of the joint tester PTR-1 of the company. The SMS measurement was carried out using the pm company ADEPT1G1G, and the filament as a 1-read source was implemented with an acceleration energy of 3 keV. [31st embodiment] Fig. 28 is a schematic cross-sectional view showing a semiconductor light emitting device according to a 31st. embodiment of the present invention. This embodiment is characterized in that the semiconductor light-emitting element 6 is mounted on the light-reduction layer 4, and the substrate 2B, 2C for supplying the wire (4) to the semiconductor light-emitting element 6 for wire bonding or (4) wire bonding is not provided with the insulating layer 4. In the case of the wire bonding tip, the inscription layer 4 may be provided. However, when the reflecting layer 4 is not provided, the surface conditions of the substrates 2B and 2C are optimized, and the range of bonding conditions is expanded, and the assembly speed and the yield are good. . Fig. 28 shows an example in which the base material 2A of the mounting portion of the semiconductor light-emitting element 6 and the ore layer (3, 1) of the base materials 2B and 2C have the same structure, but the structure of the plating layer of the base material of 2A, 2B, and 2C is shown. It can be different or it can be divided. Further, Fig. 28 shows a case where the lower portions of the base materials 2A, 2B, and 2C are covered with a resin, but the entire surface or the portion of the back surface of the base material 2A, 2B, and $ can be exposed on the back surface. The exposed portion is further connected to a metal heat release plate or the like by soldering or the like so that the heat release property can be increased and the light output power can be increased. Further, when the semiconductor light-emitting element 6 having the back surface electrode is used, the (four) power supply terminal is connected to the upper electrode, and the plurality of power supply terminals connected to the upper electrode can be used for wire bonding. At the time of the root, it is easy to perform wiring arrangement at the time of large current drive and wiring arrangement between light-emitting devices, and it is used separately. The 28th diagram does not align the connection between the electrode portion of the light-emitting element and the power supply terminal. In the case of the connection, it is also possible to manufacture a sacred wire, and to perform a connection of a wedge-wound connection, which uses ultrasonic waves to connect the shackles, and uses a supersonic wave to heat the connection. > As described above, the inventors have learned that the carbon concentration in the |g reflective layer greatly affects the bonding strength of the gold wire and the 35 reflective layer of 201214778. It should be noted that this applies to all of the embodiments described above. The representative structure of the substrate for mounting a semiconductor light-emitting device of the present invention and the semiconductor light-emitting device using the same is not limited to the configuration example of the present invention, and various modifications are possible within the scope of the technical idea of the present invention. structure. As the terminal for power supply, the surface constituting material of the base material 2B, 2C for wire bonding or internal wire bonding may be one selected from the group consisting of gold, silver, palladium, gold alloy, silver alloy, or palladium alloy, or a combination thereof. Further, the constituent elements of the above-described respective embodiments may be arbitrarily combined within the scope of the gist of the invention. (32th to 38th Embodiment) The semiconductor light-emitting device mounting substrate and the semiconductor light-emitting device according to the embodiment of the present invention are configured to mount a semiconductor light-emitting device having a substrate, an aluminum reflective layer, and a silver layer or a silver alloy layer therebelow. The solid-state type of the substrate is mounted on a semiconductor light-emitting element and is made of copper, a copper alloy or an iron-based alloy, and the brain reflection layer is provided on at least a part of the surface 2 of the wire-conducting light-returning element of the wire. [32nd embodiment] FIG. 29 is a cross-sectional view showing a substrate for mounting a semiconductor light-emitting device according to a 32nd embodiment of the present invention, wherein reference numeral 2 denotes a substrate, and reference numeral 4 denotes a semiconductor light-emitting device mounted on one surface of the substrate 2. The aluminum reflective layer formed in the area of the space, the symbol 19 is the layer of the layer, which is composed of a metal or a composite material of an organic material or an inorganic material. Mainly for soldering, the substrate 2 is coated with a silver layer or a silver alloy layer 3. The material of the substrate 2' as the metal of the substrate 2 is not limited thereto, but the most versatile substrate 2 is a metal lead frame made of copper or a copper alloy. In the case where a copper plate is used as the substrate 2, the thickness thereof is not limited, but the thickness can be selected with reference to the cost. In addition, in consideration of mass production, a ring of a steel plate is preferable, but a short material of #材 and various materials can be used for the case of using a composite material as the base material 2, and a steel plate can be bonded to the resin material. CCL, its laminated board. As the resin, a hard plate-shaped resin and a resin which is thin and flexible can be used. Examples of the representative resin include a glass epoxy resin substrate (glass cloth substrate resin plate) and a polyimide resin substrate. The aluminum reflective layer 4 and the titanium layer 19 are produced by a batch processing or a continuous treatment using a vapor deposition apparatus having a pressure reducing pressure regulating function. The thickness of the aluminum reflective layer 4 45 201214778 is preferably 0.02 μηι or more from the viewpoint of reflectance. When the steel alloy material C_194 is used as the substrate 2, for example, the length is 1 μm, the width is 50 mm, the thickness is 0.15 mm, the thickness of the aluminum reflective layer 4 is, for example, 〇05 μm, and the thickness of the titanium layer 19 is Ο.ίμηι. . In the case of a copper plate of the above-described size as the substrate 2, a silver layer or a silver alloy layer (thickness: 3 μm) 3 was prepared by a wet ore method. Next, the aluminum reflective layer 4 and the titanium layer 19 were formed using a resistance heating type cylindrical electron beam type vacuum evaporation apparatus. Specifically, the substrate 2 is cut into a short size material of 50 mm×150 mm, and 16 pieces of the cut substrate are radially arranged on an umbrella-shaped mold jig having a radius of 300 mm, and three groups are arranged on the cylinder. An electron beam grab (output power of 6 kW) was used as a vapor deposition source for the inscription and titanium, and the exhaust gas was evacuated to a degree of vacuum of 2 x 10 〇 4 Pa to form a reflective layer 4 having a thickness of 0·05 μm. In the present embodiment, the vacuum vapor deposition apparatus uses a self-made machine, and the use of a load lock type inspection machine or the like also has no problem. In addition, the _ vapor deposition apparatus m which can be inspected for the ring ride may be appropriately selected in consideration of the film quality, the productivity, and the like. and then,! g anti-riding 4, the formation of the titanium layer 19 can be carried out without the electron beam inspection method, that is, the paste resistance heating test, the ion ore method, the forging method, the metal coating method, and the like. The film thickness measurement of the inscription layer 4 and the titanium layer 19 was performed by SIMS analysis. The thickness of the base titanium layer 19 immediately below the surface from the surface to the reflective layer 4 reaches a signal intensity of 1/2 of the maximum intensity as a reflection of the thickness of the gate 19, and the thickness of the gate 19 is the main constituent element in the base layer. The maximum intensity of 1/2 of the signal strength when thickness. In the case of the above silver layer or silver alloy layer 3, the signal intensity ratio of silver is used. (Evaluation of Examples Related to the Present Embodiment) For the insole layer 4, the vulcanization characteristics and the reflectance were determined as follows. First, as shown in Table 9, a silver-plated material was applied to the steel material to make the reflective layer 4 by the above method, and the rhyme was dried in the atmosphere for 3 hours. Then the thief, 4 hours of heat treatment. After the heat treatment, the initial reflectance at a wavelength of 46 〇 nm was measured. At this wavelength, the sulfuric acid lock t i' has a reflectance of 9 % or more as particularly good (indicated by . ) and will be less than 90 /. As a difference (represented by χ). , for the vulcanization characteristics, the formation of the thickness of the 反射. ίμιη of the reflective layer 4, the layer of 19 Γ 3 _ (sulphur nitrogen) exposed to gas ambient temperature 4 〇 t, humidity 80% (according to Japanese Industrial Standards Delete) 2 Tests for the test method of the electric ore mine 46 201214778). The vulcanization resistance is the ratio of the initial reflectance to the reflectance after 48 hours of vulcanization. As a result, it was found that the initial reflectance was 92%, and the reflectance after the sulfurization resistance test was 87%, which was a good β. As the example 44, it was confirmed that the thickness on the substrate 2 was 3 qing. The substrate of the aluminum reflective layer 4 having a thickness of Ο.ΐμπι is not subjected to heat treatment. The initial reflectance is 91%, which is good, and the reflectance ratio after the resistance test is 98%. , good vulcanization characteristics. As a comparative example 45, it was confirmed that the substrate (i.e., Example 44) in which the aluminum reflective layer 4 having a thickness of 0.1 μm was provided on the silver layer/silver alloy layer 3 having a thickness of 3 μm on the substrate 2 was carried out under the above-mentioned conditions. In the case of heat treatment, the initial reflectance decreased to 62%, and was ><>, and the sulfuric acid reflectance ratio was lowered to 55%. According to Example 44 and Comparative Example 45, in the case of heat treatment in the examples, copper was diffused on the surface of the semiconductor light-emitting device base material substrate, and the initial reflectance and the sulfurization resistance were deteriorated (heat resistance was deteriorated), and titanium was provided. In the case of a layer, high heat resistance can be maintained by forming a diffusion barrier of steel. According to the present embodiment, since the aluminum reflective layer 4 and the titanium layer 19 are formed on the surface of the substrate 2, a semiconductor light-emitting device mounting substrate which is unvulcanized and has high and stable reflection characteristics for a long period of time can be obtained and the substrate can be used. Semiconductor light emitting device. This is the use of the following characteristics of aluminum: the reflectivity of aluminum is up to 3 times higher than that of silver in ultraviolet light, and has a reflectivity close to silver for purple, red, and infrared rays. 'In the metal, the color (10) is well balanced, with only: Silver has a high reflectance and is less susceptible to vulcanization than silver. In order to wire-bond the substrate for mounting a semiconductor light-emitting element, argon plasma is cleaned and then the gold wire is bonded. The semiconductor light-emitting element (4) substrate was tested by Wei Test, and the reflectance decreased. From this result, it was confirmed that the resistance to surface cleaning was strong without deterioration or peeling. The semiconductor light-emitting element mounting substrate 3 formed by the above-described production method is subjected to bonding characteristics with gold wires. The wire bonding machine was subjected to a test evaluation of the tensile strength of the joint characteristics using a gold wire of 25 μmη (manufactured by Tanaka Kiyoshi's typeC) using a model No. 4522 of K&S. The base village is a base material on a drum-processed copper alloy (C-194 ··thickness 〇.15 mm), and an inscription layer 4 in which a titanium layer 19 + 0.1 〇 of 〇 _ is formed. Table 7 shows the results of the film construction and the gold wire tensile test. As shown in Table 7, it is understood that the tensile strength shows practically sufficient strength by inserting the titanium layer 19 between the silver layer or the silver alloy layer 3 on the copper substrate and the aluminum reflective layer 4. 47 201214778 It should be noted that although the degree is poor, the effects obtained by the above-described 32nd embodiment can be obtained also in the embodiment described later. [Thirty-third embodiment] FIG. 30 is a schematic cross-sectional view showing a semiconductor light-emitting device according to a thirty-third embodiment of the present invention, and shows a semiconductor light-emitting device using the semiconductor light-emitting element mounting substrate shown in FIG. In the figure, 'the symbol 2 is a substrate, the symbol 3 is a silver layer or a silver alloy layer of the substrate 2, the symbol 4 is an aluminum reflective layer formed on one surface of the substrate 2, and the reference numeral 19 is a titanium layer, thereby forming a semiconductor. The light-emitting element mounting substrate 1. In the semiconductor light-emitting device 5, two sets (2A, 2B) are used in close proximity to each other. Reference numeral 6 is a semiconductor light emitting element mounted on the aluminum reflective layer 4; and reference numeral 7 is a bonding wire for electrically connecting the semiconductor light emitting element 6 and the aluminum reflective layer 4. Reference numeral 8 is a resin outer covering portion which surrounds one side of the base material 2A, 2B not including the semiconductor light emitting element 6, and has a concave portion 8a formed of the inclined surface 8b and the aluminum reflective layer 4 located at the bottom surface, The inclined surface 8b is away from the semiconductor light emitting element 6 as it goes away from the substrate 2 around the semiconductor light emitting element 6; the symbol 9 is a light transmissive resin portion which is filled in the concave portion of the outer covering portion 8, for example, and seals the semiconductor light emitting element 6. To form part of the outer body. The phosphor material can be mixed in the outer body portion 8. For example, by mixing YAG or the like, an LED wafer can be used for a pseudo white LED device using a 460 nm GaN-based LED. The aluminum reflective layer 4 and the titanium layer 19 may be formed on substantially the entire inner surface of the outer cladding or by removing a part of the remaining portion. The reason for this is that the light emitted from the semiconductor light emitting element 6 is reflected in the outer envelope portion 8. . As a specific method, (1) a film forming apparatus at the time of forming an aluminum reflective layer is provided with a function of externally covering the outer covering region; (2) after forming an entire surface as an emitting layer, the outer covering portion is pasted. Any method such as masking or photolithography, and then etching and removing aluminum may be used. > According to the semiconductor light-emitting device 5 of this configuration, the presence of the bottom surface_reflection layer 4 of the concave portion 8a formed by the outer cladding portion 8 is passed, and the light emitted from the semiconductor light-emitting element 6 is reflected by the reflection layer 4 to the concave portion 8a. The opening side exerts an effect of increasing the amount of light from the semiconductor light-emitting device 5. As described above, it has good resistance to vulcanization, so that high reflectance can be maintained for a long period of time. In the above description, the semiconductor light-emitting element mounting substrate 1 is formed, and then formed into a predetermined shape by etching using a punch or 48 201214778. However, a post-plating method may be used. In other words, after the base materials 2A and 2B are formed into a predetermined shape, the silver layer or the silver alloy layer 3 is formed on the base materials 2A and 2B by wet plating, and the aluminum reflective layer is formed by a dry plating method such as vacuum deposition. 4. Titanium layer 19. The silver layer or the silver alloy layer 3 can also be formed by a dry plating method such as a vacuum deposition method by a wet method. Further, the case where the base material 2A, 2B' is made of copper will be described, but a base material provided with a steel wire on a resin or the like may be used. Further, other metal substrates such as an iron-based 42 alloy or the like can be used from the viewpoint of use, cost, and the like. Further, the wiring layer can be formed by a printed circuit board or a flexible wiring board forming step, and then the titanium layer 19 and the aluminum reflective layer 4 can be formed and used. In this way, depending on the purpose, structure, and material (steel plate or flexible resin substrate having flexibility), the shape can be changed (by the shape of punching, bending, or bulging), plating, and evaporation. order of. The mounted semiconductor light emitting element 6 can be mounted with an LED chip such as GaAs-Si-LED, GaP_LED, AlGalnP-LED, InGaN-LED or the like. Further, the semiconductor light-emitting element 6 shown in Fig. 30 is a vertical element of the electrodes of the top surface and the bottom surface. However, the present invention is not limited thereto, and may be an LED (e.g., GaN-based) having a planar structure in which a pair of electrodes are formed on the same surface. In the case where the electrode is formed on the same plane structure, the electrode surface faces the surface side (upper side in the drawing), and both the cathode and the anode are wire-bonded; the electrode surface faces downward (on the lead frame side) and directly The so-called flip-chip mounting method of the connection can make the secret-installation method. It is also possible to use copper wire bonding and aluminum wire bonding instead of gold wire bonding. According to the semiconductor hairpin 5 of this configuration, the light emitted from the semiconductor light-emitting element 6 is reflected by the reflective layer 4 to the concave portion 8a by the presence of the light-reducing layer 4 on the bottom surface of the concave portion 8a formed by the contact-coated portion 8. The opening side exerts an effect of increasing the amount of light from the semiconductor light-emitting device $. In addition, since the shot-preventing layer 4 has good light-reflecting, the high-reflection can be maintained between the oblique portions. [34th Embodiment] FIG. 3 is a view showing the semiconductor light-emitting device mounting substrate according to the 34th embodiment of the present invention. In the semiconductor light-emitting device mounting substrate shown in Fig. 29, the 3/Acacia<^>> FIG. 31 (8) table not only forms a silver layer or a silver alloy layer or a part of the silver alloy layer 3 on one surface of the substrate 2. An example in which the titanium layer 19 and the insole reflective layer 4 are formed thereon. The graph () shows that the titanium layer 19 and the aluminum reflective layer 4 are formed on a portion of the silver layer or the silver alloy layer 3 formed on the surface of the substrate 2, An example in which a portion is bent upward by approximately 9 degrees on the paper surface; and in the 31st (c) table, the titanium layer 19 and the aluminum reflective layer 4 are not formed on the entire surface of the silver layer or the silver alloy layer 3 of the substrate 2, and a part thereof An example in which the paper surface is bent 180 degrees upward; the 31st image shows that the titanium layer 19 and the aluminum reflective layer 4 are directly formed on one surface of the substrate 2, and the nickel layer 17 and the palladium layer 18 are formed on the other surface of the substrate 2. And examples of gold flash plating 10. The semiconductor light-emitting element mounting substrate shown in Fig. 31 (a) may be configured such that a silver layer or a silver alloy layer 3 having a thickness of 3 μm is formed on one surface of a substrate 2 made of copper by plating. For the layer or the silver alloy layer 3, the titanium layer 19 and the ruthenium layer 4 are formed by a ship method. It should be noted that when silver, titanium or aluminum is sequentially formed on the copper base material 2 as in this example, the silver layer or the silver alloy layer 3 may be dry, but a wet plating method may be used. The silver layer or the silver alloy layer 3, the titanium layer 19, and the aluminum reflective layer 4 cannot be easily plated by wet plating at this time, so that a vacuum collision method can be employed. As another method, for example, a surface method in which an inert gas jet can be applied can be used. In addition, many of these methods can be used from the viewpoints of cost, simplification of the process steps, and the like. The semiconductor light-emitting element mounting substrate shown in Fig. 31(b) is formed by sequentially forming a silver layer or a silver alloy layer 3 having a thickness of 3.0 μm on the substrate 2 by electroplating, and then forming a titanium layer 19 and aluminum reflection on a portion thereof. Layer 4 is formed. The semiconductor light-emitting device mounting substrate shown in Fig. 31(c) is formed by forming a silver layer or a silver alloy layer 3 having a thickness of 3.0 μm on the substrate 2 by electroplating, and then forming a titanium layer 19 and aluminum reflection on a portion thereof. Layer 4 is formed. These examples are a method of attaching a semiconductor light-emitting device to the titanium layer 19, the top surface of the reflective layer 4, and performing wire bonding on the bottom surface or side surface of the substrate 2. More specifically, it is a structure which can be applied when the base material 2 is bent. In the present embodiment, the wire bonding is performed on the back surface of the substrate 2. However, the silver layer or the nickel layer 17, the layer 18, the gold glitter layer, or the like may be coated on the back surface depending on the visual force. [35th embodiment] Fig. 32 is a schematic cross-sectional view showing a semiconductor light emitting element mounting substrate according to a 35th embodiment of the present invention. This embodiment is characterized in that a - or a plated surface U is formed on the silver layer or the silver alloy layer 3, the seed layer 19, and the inversion layer 4. The third _ indicates an example in which the gold plating layer 12 is formed on the silver layer or the silver alloy layer 3, the titanium layer 19, and the shot layer 4; the 帛32 just indicates the outer layer of the partial protective layer I9, the ig reflective layer 4. An example of the formation of the gold layer 12 on the silver layer alloy layer 3; (c) shows an example in which the gold layer U is formed on the entire surface of the titanium layer 19 and the inscription layer 4; the 32®(d) surface An example in which the gold plating layer 12 is formed on the entire surface of the titanium layer 19, the silver layer of the toe ride 4 or the silver alloy 50 201214778 layer 3 is formed. The gold plating layer 12 in the 3 embodiment can be used for the electrical connection of the light-emitting member mounted on the titanium layer 19 and the aluminum reflective layer 4. The thicker the gold layer u, the better the reflection rate of the short-wavelength (blue) class is. Root _ way, the reference reflectance to determine the structure of the age layer 12 & It should be paid. The gold layer 12 is formed by a wet plating method, and may be formed by others. [苐36 Embodiment] A semiconductor light-emitting device will be described as an embodiment of the present invention. The representative use state of this embodiment is the same as that of the 27th. The semiconductor light-emitting device of the present invention can be mounted on, for example, a P-brush circuit substrate. In order to be mounted on the printed circuit board, the outer portion (outer wire) of the outer casing portion 8 of the substrate of the rotating body member represented by the third embodiment is bent to form an outer covering body. The bottom surfaces of the portions 8 are substantially identical. The P blade la or the portions 2b, 2c located below the bottom surface. This portion is bonded to the wiring of the printed circuit board 13 by the solder 14. $27 gj(8) is an example of the rise of the part ia. The part la is that the outer wire f is folded 9G toward the lower side, and then it is pulled in the opposite direction to the horizontal direction, and the direction of the extension of the outer wire of j is not changed, and The horizontal position is substantially the same as the bottom surface of the outer cladding portion 8, and the 27th (b) shows an example of forming a portion lb which is an outer conductor, body. P minute 8 is bent 9G degrees twice, so as to be formed along the bottom surface of the outer casing portion 8; Fig. 27 (4) 疋 shape, part k example 'this part is the outer conductor is opposite to the 27th square The outer body portion 8 is bent 9 times twice to form along the top surface of the outer casing portion 8. The method of bending the outer wire is not limited to this, and it conforms to the shape of each of the conductor wires. [37th Embodiment] In the present embodiment, a silver or silver alloy layer, a titanium layer, and a reflective layer are provided on the substrate 2 in the same manner as in the 32nd embodiment. However, the carbon concentration of the reflective layer 4 is ΐχΐ〇2〇^ or less. The bonding property of the conductor light-emitting element mounting substrate was evaluated by the access 2, and was joined to the line-shaped curve composed of gold. Here, the wire bonding means that the electrodes on the lead frame side are electrically connected to the electrodes on the wire (four) component, and are connected by a gold # wire. The first finger will be a wire-twisted joint in which the tip end of the wire is made to discharge. Usually, the position is 51 = 14, 2012,778 degrees. 'Crimping property' Mostly, the electrode on the element side is first joined. In the present embodiment, a portion of the copper substrate which is provided with the bonding layer 4 in the same manner as in the 32nd embodiment is joined to discharge a line in which the tip end of the wire is formed into a spherical shape. The second bonding means that the electrode on the element side is joined to the electrode on the lead frame side to be connected by the above-mentioned wire at a predetermined position. In the present invention, the portion in which the aluminum reflective layer 4 is provided in the same manner as in the 32nd embodiment is bonded to the wire, and the wire ends are pressure-bonded so as to be friction-attached. Table 10 shows the relationship between the carbon concentration in the aluminum reflective layer 4 and the bonding strength of the gold wires. In the embodiment 47, a silver layer having a thickness of 〇.15 is formed by wet plating to form a silver layer of 3 〇μηη, and the product is stamped and added, and the thickness is Q 5 mm. An embodiment in which a circuit board for a light-emitting device is formed by fixing a layered glass epoxy resin substrate with a heat-resistant acrylic resin adhesive. This material was mounted on the above vacuum vapor deposition apparatus to form a titanium layer of 〇1 μm and an aluminum reflective layer of 〇 2 μm, and subjected to SIMS analysis. Here, the carbon concentration in the aluminum reflective layer is the minimum concentration of the carbon concentration in the aluminum reflective layer. The carbon concentration in the aluminum reflective layer was 3 x 10 〇 20 / cm 3 . After forming a 7 〇μη steel substrate and a 3.0 μm silver layer by wet plating on the entire surface of the polyimide film having a thickness of 125 μm, the heat-resistant acrylic resin adhesive and the substrate 2 of Example 48 were used. Fit to form a sheet. In Example 48, after the aluminum reflective layer 4 was formed, an unnecessary portion was punched out by press working to form a wiring member. Also, the carbon concentration in the aluminum reflective layer 4 of Example 48 was subjected to SIMS analysis, and as a result, the carbon concentration in the aluminum reflective layer 4 was ΐχ102〇/cm3. In the embodiment 49, after forming a nickel layer of 〇7 μm and a palladium of 0.05 μm on the iron-containing copper alloy by wet plating, only the press working is performed, and then the obtained product is made of a non-recorded steel in a vacuum evaporation apparatus. The mold jig of (SUS304) is fixed to form a titanium layer 19 of 〇.ipm, and a reflection layer 4 of 〇·2μm. The carbon concentration in the aluminum reflective layer 4 of Example 49 was 3χ1〇19/cm3. As a criterion for evaluation, the first bonding strength is a case where a shear strength of 0.39 N or more is taken as 〇 ', and a value of less than 0.39 N is taken as X. The second bonding strength is a case where the shear strength of 〇 049 N or more is taken as 〇, and a case of less than 0.049 N is taken as X. As is clear from Table 10, when the carbon concentration of the reflective layer 4 is 3 χ 1 〇 2 ()/cm 3 or more, the joint strength is lowered, and preferably l x 10 2 G/cm 3 or less. In the present embodiment, since an organic material such as an epoxy resin material or an acrylic pressure-sensitive adhesive is used, the carbon concentration in the aluminum layer increases, and as a carbon source, contamination of the substrate, flushing gas, and Reverse diffusion of vacuum pump oil, impurities of sputtering gas when using sputtering method, etc. 52 201214778 Various factors. In the bonding test, the wire bonding machine was carried out using Kulcick & Soffa Industries' MODEL4522' and using a gold wire of 25 μm straight, with a supersonic intensity of lw and an ultrasonic application time of 25 ms. It was carried out in the shear test mode of the bonding tester PTR-1 of the company. The SIMS measurement was carried out by using pffl Corporation as a primary ion source of absolute ions at an acceleration energy of 3 keV. [Embodiment 38] Figure 33 is a schematic cross-sectional view showing a semiconductor light-emitting device according to a thirty-eighthth embodiment of the present invention. The solid-fed type is such that the semi-conductive stray light element 6 is mounted on the light-reduction layer 4±, and the base material 2B, 2C for the power supply terminal portion for wire bonding or internal wire bonding wiring with the semiconductor light-emitting element 6 is not present. Aluminum reflective layer 4. The wire bonding tip may have the aluminum reflective layer 4, but in the case where the aluminum reflective layer 4 is not provided, by optimizing the surface states of the substrates 2B and 2C, the range of bonding conditions is expanded, and the assembly speed and yield are further improved. Fig. 33 shows a case where the lower portions of the base materials 2A, 2B, and 2C are covered with a resin, but the entire surface or the portion of the back surface of the base material 2 may be exposed on the back surface. The exposed portion is further connected to a metal such as a heat radiating plate or the like, and the heat radiation property can be improved, and the light output can be increased. When the semiconductor light emitting element 6 having the back electrode is used, the power supply for connection to the upper electrode can be used. The terminal may have more than one or more wires, and the plurality of power supply terminals connected to the upper electrode may be wire-bonded. When a plurality of terminals are used, it is easy to perform wiring arrangement at the time of driving a large current and wiring arrangement between the light-emitting devices, and they are used separately. Fig. 33 shows a case where the connection between the electrode portion of the light-emitting element and the power supply terminal is wire-bonded and joined. However, an internal lead wire may be formed and a connection by a wedge connection may be performed, and the internal lead wire is patterned. The wiring material, the wedge connection is used as a skin and heated. The inventors have learned that, as described above, the titanium layer 19 between the silver layer or the silver alloy layer 3 layer and the light-reducing layer 4 enhances the heat resistance of the material to the reflectance, that is, the reflection characteristics and resistance after the secret treatment. Vulcanization characteristics, and good reflectance in the environment of vulcanization. It should be noted that this applies to all of the above embodiments. The substrate for mounting a semiconductor light-emitting device of the present invention and the semiconductor light-emitting device using the same can be used as a practical example of the present invention. Not... 53 201214778 [Table 1] \ Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Example 3 Example 4 Example 5 Example 6 Example 7 Thickness of the reflective layer (μηι) No Α 1 Ag3.0 No A1 The side of the substrate is NiO.7 Pd0.05 0.006 0.010 0.02 0.05 0.1 1 5 Initial reflectance and judgment 93 〇63 X 74 X 86 X 90 〇91 〇91 〇91 〇90 〇Vulcanization resistance (initial reflectance and vulcanization) Ratio of reflectance after 96 hours (%)) 29 93 99 95 94 98 98 96 97 [Table 2] Example 11 Example 12 Example 13 Carbon concentration (pieces/cm3) 3χ1020 ΙχΙΟ20 3χ1019 First joint strength X 〇 〇Second joint strength X 〇〇 [Table 3] \ Example 21 Example 22 Example 23 Example 24 Example 25 Comparative Example 21 Comparative Example 22 Comparative Example 23 Comparative Example 24 Thickness of the reflective layer 0.006 0.02 0.1 0.5 1 0.001 0.003 无Α1 Ag3.0 No A1 Substrate 54 201214778 (μιη) Side NiO.7 Pd0.05 Initial reflectance 〇〇〇〇〇〇〇〇X Vulcanization resistance (initial reflectance and reflectance after 96 hours of vulcanization) Ratio (%)) 80 89 98 96 97 29 50 29 93

【表4】 實施例26 實施例27 實施例28 碳濃度(個/cm3) ΙχΙΟ20 3χ1019 3 χΙΟ20 第一接合強度 〇 〇 X 第二接合強度 〇 〇 X 【表5】 比較例 31 比較例 32 比較 例33 比較 例34 實施 例33 實施 例34 實施 例35 實施 例36 實施 例37 銘反射 層厚度 (μιη) (銀) 3.0 (鎳) 0.7 (把) 0.05 0.006 0.010 0.02 0.05 0.1 1 5 初始反 射率暨 判定 93 〇 63 X 74 X 86 X 90 〇 91 〇 91 〇 91 〇 90 〇 耐硫化 29 93 99 95 94 98 98 96 97 55 201214778 特性 (初始 反射率 與硫化 96小時 後的反 射率之 比(%)) 【表6】 無Ti層 Ο-194/ΝίΡά/Α10.1μιη 有Ή層 Ο-194/ΝΐΡά/Τΐ0.1μπι /ΑΙΟ.Ιμηι 拉力試驗結果 (mN) 平均 54.4 99.1 最大 78 110 最小 34 90 標準差 18 6.5 【表7】 有Ti層 C-194/Ag3.0pm /ΤίΟ.Ιμπι /ΑΙΟ.Ιμιη 拉力試驗結果 (mN) 平均 93.8 最大 102 最小 80 標準差 7.0 【表8】 實施例38 實施例39 實施例40 碳濃度(個/cm3) 3χ1020 ΙχΙΟ20 3χ1019 第一接合強度 X 〇 〇 第二接合強度 X 〇 〇 【表9】 56 201214778 實施例44 實施侧45 實施例46 鋁反射層厚度 (μιη) 0.1 0.1 0.1 鈦層(Ο.ίμιη)之 有無 X 〇 0 鑛銀層厚度(μιη) 3.0 3.0 3.0 熱處理之有無 X 〇 〇 初始反射率暨判 91 62 92 定 〇 X 0 而會硫化特性(初 始反射率與硫化 98 48小時後的反射 55 87 率之比(%))暨 〇 X 〇 判定 【表10】 碳濃度(個/cm3) 第一接合強度 實施例47 實施例48 實施例49 3 χΙΟ20 ΐχίο20 3χ1019 X 〇 〇 第二接合強度 X 〇 〇 【圖式簡單說明】 第1圖是表林發卿i實·式的铸體發光元件安裝帛基板的示 意剖視圖; 第2圖是表示本發明第2實施方式的铸體發絲置的示意剖視圖; 第j圖是表示本發明第3實施方式的半導體發光元件安裝用基 意刳視圖; Ϊ = 是、表Γ本發明第4實施方式的半導體發光裝置的示意剖視圖; 板的Lr圖)是表示本發明第5實施方式的半導體發光元件安裝用基 第6圖⑻〜(e)是表示本發明第6實施方式的半導體發光秘安裝用基 57 201214778 板的不意剖視圖; 第7圖⑻〜(e)是表示本發明第7實施方式的半導體發光元件安裝用基 板和半導體發光裝置的示意剖視圖; 第8圖是表示作為本發明f 8實施方式辭導體發絲置的代表性使 用狀態的示意圖; 第9圖是表tf本翻第1()實施方式辭導體發絲置的示意剖視圖; 第10圖是表示本發明第u實施方式的半導體發光元件安裝用基板的 示意剖視圖; 第11圖^表二本發明帛12實施方式的半導體發光裝置的示意剖視圖; 第12圖是表示本發明第13實施方式的半導體發光元件安裝用基板的 示意剖視圖; 第13圖是表示本發明第M實施方式的半導體發光裝置的示意剖視圖; 第14圖⑻〜⑼是表示本發明的第15實施方式的半導體發光元件安裝 用基板的示意剖視圖; 第15圖(a)〜(c)是表示本發明第16實施方式的半導體發光元件安裝用 基板的示意剖視圖; 第16圖(a)〜(d)是表示本發明第17實施方式的半導體發光元件安裝用 基板的示意剖視圖; 第Π圖是表示本發明第18實施方式的半導體發光裝置的示意剖視圖; 第18圖⑻〜(c)是表示本發明第19實施方式的半導體發光裝置的代表 性使用狀態的示意圖; 第19圖是作為本發明第21實施方式的半導體發光元件安裝用基板和 半導體發光裝置的示意剖視圖; 第20圖(A)是表示本發明第22(1)實施方式的半導體發光元件安裝用基 板的示意繼圖’⑼是表示本發明第叫2)實施方式的半導體發光元件安裝 用基板的示意剖視圖; 第21圖是表示本發明第23實施方式的半導體發光裝置的示意剖視圖; 第22圖是表示本發明第24實施方式的半導體發光元件安裝用基板的 示意剖視圖; 第23圖是表示本發明第25實施方式的半導體發光裝置的示意剖視圖; 58 201214778 基板(峡絲本卿第26實财式醉導體贱元件安裝用 基板圖⑷是表林判第27實财摘料體發光元件安裝用 第26圖(a) (e)疋表示本發明第 基板和半賴吻响侧;撕wa件女裝用 代表=使=2^姆_ 29衡树恤光裝置的 Γ289圖圖^示ΐ發明第31實施方式的半導體發光裝置的示意剖娜 示意L圖本發明第32實施方式的半導體發光元件安裝用基板的 ί 表I本發明第33實施方式的半導體發光裝置的示意剖視圖; 基板的示;)是麵本鶴34實财撕導峨元件安裝用 第32圖⑷〜(Φ是表示本發明第 基板的示意剖視圖;以及 35實施方式的半導體發光元件安裝用 第33圖是表示本發明帛38實施方式的半導體發光裝置的示意剖視圖。 【主要元件符號說明】 1基板 la〜lc基板的部分 2、2A、2B、2C基材(導線基材) 3銀層或銀合金層 4、4A ' 4B鋁反射層 5半導體發光裝置 6半導體發光元件(LED晶片) 7 接合線 8 外包體部分 8a 凹部 8b傾斜面 59 201214778 9 透光性樹脂部 10金閃鍍層 11金屬層 12鍍金層 13印刷電路基板 14焊料 15 配線 17鎳層 18 I巴層 19、19A、19B 鈦層 20 外導線 21 第一彎折部 22 第二彎折部 23 鍍層[Table 4] Example 26 Example 27 Example 28 Carbon concentration (pieces/cm3) ΙχΙΟ20 3χ1019 3 χΙΟ20 First joint strength 〇〇X Second joint strength 〇〇X [Table 5] Comparative Example 31 Comparative Example 32 Comparative Example 33 Comparative Example 34 Example 33 Example 34 Example 35 Example 36 Example 37 Thickness of the reflective layer (μιη) (silver) 3.0 (nickel) 0.7 (put) 0.05 0.006 0.010 0.02 0.05 0.1 1 5 Initial reflectance and determination 93 〇63 X 74 X 86 X 90 〇91 〇91 〇91 〇90 〇Resistance-resistant 29 93 99 95 94 98 98 96 97 55 201214778 Characteristics (ratio of initial reflectance to reflectance after 96 hours of vulcanization (%)) [Table 6] Ti-free layer Ο-194/ΝίΡά/Α10.1μιη Ή layer Ο-194/ΝΐΡά/Τΐ0.1μπι /ΑΙΟ.Ιμηι Tensile test results (mN) Average 54.4 99.1 Maximum 78 110 Minimum 34 90 Standard deviation 18 6.5 [Table 7] Ti layer C-194/Ag3.0pm /ΤίΟ.Ιμπι /ΑΙΟ.Ιμιη Tensile test result (mN) Average 93.8 Maximum 102 Minimum 80 Standard deviation 7.0 [Table 8] Example 38 Example 39 Example 40 carbon thick Degree (cm/cm3) 3χ1020 ΙχΙΟ20 3χ1019 First joint strength X 〇〇 second joint strength X 〇〇 [Table 9] 56 201214778 Example 44 Implementation side 45 Example 46 Aluminum reflective layer thickness (μιη) 0.1 0.1 0.1 Titanium layer (Ο.ίμιη) with or without X 〇0 thickness of mineral silver layer (μιη) 3.0 3.0 3.0 Heat treatment with or without X 〇〇 initial reflectance and judgment 91 62 92 〇X 0 and vulcanization characteristics (initial reflectance and vulcanization 98 48 The ratio of the reflection after 55 hours (%)) 〇X 〇 determination [Table 10] Carbon concentration (pieces/cm3) First joint strength Example 47 Example 48 Example 49 3 χΙΟ20 ΐχίο20 3χ1019 X 〇〇 2nd joint strength X 〇〇 [Simplified description of the drawings] Fig. 1 is a schematic cross-sectional view showing a substrate of a cast light-emitting device mounted on the surface of the watch, and Fig. 2 is a view showing the hair of the cast body according to the second embodiment of the present invention. Fig. j is a schematic view showing the mounting of the semiconductor light emitting element according to the third embodiment of the present invention; Ϊ = Yes, the semiconductor light emitting device according to the fourth embodiment of the present invention is shown. The semiconductor light-emitting device mounting base according to the fifth embodiment of the present invention is shown in FIG. 6 (8) to (e) showing the semiconductor light-emitting secret mounting base 57 according to the sixth embodiment of the present invention. 7(8) to 8(e) are schematic cross-sectional views showing a semiconductor light emitting element mounting substrate and a semiconductor light emitting device according to a seventh embodiment of the present invention; and Fig. 8 is a view showing a conductor of the present invention as a f8 embodiment FIG. 9 is a schematic cross-sectional view showing the hairpin of the first embodiment of the present invention, and FIG. 10 is a view showing the mounting of the semiconductor light-emitting device of the first embodiment of the present invention. FIG. 12 is a schematic cross-sectional view showing a semiconductor light-emitting device mounting substrate according to a thirteenth embodiment of the present invention; and FIG. 12 is a schematic cross-sectional view showing a semiconductor light-emitting device mounting substrate according to a thirteenth embodiment of the present invention; FIG. 14 is a schematic cross-sectional view showing a semiconductor light-emitting device according to an embodiment of the present invention; and FIGS. 14(8) to (9) are semi-conductive members showing a fifteenth embodiment of the present invention; (a) to (c) of FIG. 15 are schematic cross-sectional views showing a semiconductor light-emitting device mounting substrate according to a sixteenth embodiment of the present invention; and FIGS. 16(a) to (d) are diagrams showing FIG. 18 is a schematic cross-sectional view showing a semiconductor light-emitting device according to a seventeenth embodiment of the present invention; and FIGS. 18(8) to (c) are views showing a nineteenth aspect of the present invention. 19 is a schematic cross-sectional view showing a semiconductor light-emitting device mounting substrate and a semiconductor light-emitting device according to a twenty-first embodiment of the present invention; and FIG. 20(A) is a view showing the present invention. (S9) is a schematic cross-sectional view of a substrate for mounting a semiconductor light-emitting device according to an embodiment of the present invention, and FIG. 21 is a view showing a second embodiment of the present invention. A schematic cross-sectional view of a semiconductor light-emitting device according to a twenty-fourth embodiment of the present invention; Fig. 23 is a schematic cross-sectional view showing a semiconductor light-emitting device according to a twenty-fifthth embodiment of the present invention; 58 201214778 substrate (the blade of the installation of the shoji shoji 26th solid fuel type drunk conductor element) (4) is the table judgment Fig. 26 (a) (e) of the real money picking body light-emitting element is mounted on the side of the substrate and the half-kissing side of the present invention; the tearing wa piece is used for women's clothing = making = 2^m _ 29 Hengshu glasses light device Γ 图 图 Γ Γ Γ Γ 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体Fig. 32 is a schematic cross-sectional view showing the substrate of the present invention; and 316 is a schematic view showing the mounting of the semiconductor light-emitting device of the embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. is a schematic cross-sectional view showing a semiconductor light emitting device according to an embodiment of the present invention. [Description of main component symbols] 1 substrate 1 to 2, 2A, 2B, 2C substrate (wire substrate) 3 silver layer or silver alloy layer 4, 4A '4B aluminum reflective layer 5 semiconductor light-emitting device 6 semiconductor light-emitting Element (LED wafer) 7 Bonding wire 8 Outer body portion 8a Concave portion 8b inclined surface 59 201214778 9 Translucent resin portion 10 Gold flash plating layer 11 Metal layer 12 Gold plating layer 13 Printed circuit substrate 14 Solder 15 Wiring 17 Nickel layer 18 I Bar layer 19, 19A, 19B Titanium layer 20 Outer wire 21 First bent portion 22 Second bent portion 23 Plating

Claims (1)

201214778 七、申請專利範園: 1. 一種半導體發光元件安裝用基板,具備: 基材’其包含金屬部分;以及 鋁反射層,其厚度為〇.〇2μηι以上5μιη以下,且設在所述基材安裝有半 導體發光元件的面側。 2. 如申請專利範圍第1項所述的半導體發光元件安裝用基板,其中, 所述基材和所述鋁反射層之間設有含有鈦的金屬層。 3. 如申s青專利範圍第1項或第2項所述的半導體發光元件安裝用基 板,其中, 土 在所述基材和所述鋁反射層之間設有由Ag以外的金屬構成的第一金 屬層, 所述第一金屬層由選自鈀、金、錫、鎳、銅-錫合金、銅_鎳合金、鐵_ 鎳合金中的一種構成, 所述鋁反射層設在所述第一金屬層的至少一部分。 4. 如申請專利範圍第1項或第2項所述的半導體發光元件安裝用基 板,其中,在所述基材和所述鋁反射層之間從所述基材侧起依次設有鎳層 和纪層。 5. 如申請專利範圍第4項所述的半導體發光元件安裝用基板,其中, 在所述鈀層和所述鋁反射層之間設有金閃鍍層。 6. —種半導體發光元件安裝用基板,具備: 基材,其包含金屬部分; 銀層或銀合金層’其厚度為Ο.ΟΙμηι以上5吨以下,且設在所述基材安 裝有半導體發光元件的面側; 銘反射層,其厚度為〇·〇〇6μιη以上2μιη以下,且設在所述銀層或銀合 金層上。 7·如申請專利範圍第6項所述的半導體發光元件安裝用基板,其中, 在所述基材和所述銀層或銀合金層之間設有由Ag以外的金屬構成的 第一金屬層, 所述第一金屬層由選自鈀、金、錫、鎳、銅_錫合金、銅-鎳合金、鐵_ 鎳合金中的一種構成, 61 201214778 而設在所述第一金屬層的至少 所述紹反射層隔著所魏層或銀合金層 公。 &,b =、利範圍第6項或第7項所述的半導體發光元件安裝用基 所述銀層或銀合金層與所述鋁反射層之間設有金閃鍍層。 ,如、明專利範圍第6項所述的半導體發光元件安裝用基板,其中, m述銀層或銀合金層與㈣贿射狀間設有含賴金屬層, 所述!呂反射層具有〇 02μπι以上2卿以下的厚度。 壯1如巾μ專利範㈣1項至第9項*任—項所述的半導體發光元件安 裝用基板,其巾,在最靠表面設有链金層。 —11.如申β月專利範圍帛j項至第1〇項中任一項所述的半導體發光元件 安裝,基板’其中,所述銘反射層的雜質碳濃度為lxl〇14個/cm3以上ΐχΐ〇20 個/cm3以下。 12. 如申凊專利紅圍第】項至第1〇項中任一項所述的半導體發光元件 安裝用基板,其中,所述銘反射層的反射率為以上以下。 13. —種半導體發光裝置,具備: 如申凊專利範SI第1項至第12項中任—項所述的半導體發光元件 用基板; 半導體發光元件’其絲摘辭導光元件安㈣基板上; 外包體部分’其包圍所述半導體發光元件安裝用基板的一部分,在所 述半導體發光7G件的周圍具有由傾斜面或垂直面形成的凹部,所述傾斜面 隨著遠離所述半導體發光元件安裝用基板而遠離所述半導體發光元件; 透光性樹脂部,其填充在所述外包體部分的所述凹部而密封所述半導 體發光元件。 14. 如申請專利範圍第13項所述的半導體發光裝置,其中, 所述半導體發光70件係絲在所絲材上形成騎述減射層上,並 與形成有所述銘反射層的所述基材電絕緣,且與作為供電用端子之未形成 有所述鋁反射層的所述基材打線接合或内部打線接合。 15. 如申請專利範圍第13項所述的半導體發光裝置,其巾,所述紹反 射層的雜質碳濃度為1χ1014個/cm3以上ΐχΐ〇2〇個/cm3以下。 16. 如申請專利範圍第13項所述的半導體發光裝置,其中,作為所述 62 201214778 供電用端子而打線接合或内部打線接合的所述基材之表面的主要的構成材 料是選自金、銀、把、金合金、銀合金或纪合金中的一種、或其組合。 63201214778 VII. Patent application garden: 1. A substrate for mounting a semiconductor light-emitting device, comprising: a substrate comprising a metal portion; and an aluminum reflective layer having a thickness of 〇.〇2μηι or more and 5 μm or less and provided on the base The surface side of the semiconductor light emitting element is mounted on the material. 2. The semiconductor light-emitting device mounting substrate according to claim 1, wherein a metal layer containing titanium is provided between the substrate and the aluminum reflective layer. 3. The substrate for mounting a semiconductor light-emitting device according to the first or second aspect of the invention, wherein the soil is made of a metal other than Ag between the substrate and the aluminum reflective layer. a first metal layer, the first metal layer being composed of one selected from the group consisting of palladium, gold, tin, nickel, a copper-tin alloy, a copper-nickel alloy, and an iron-nickel alloy, wherein the aluminum reflective layer is provided At least a portion of the first metal layer. The substrate for mounting a semiconductor light-emitting device according to the first or second aspect of the invention, wherein a nickel layer is provided between the substrate and the aluminum reflective layer in order from the substrate side. And the layer. 5. The semiconductor light-emitting device mounting substrate according to claim 4, wherein a gold flash plating layer is provided between the palladium layer and the aluminum reflective layer. 6. A substrate for mounting a semiconductor light-emitting device, comprising: a substrate comprising a metal portion; a silver layer or a silver alloy layer having a thickness of not more than 5 tons, and a semiconductor light-emitting layer provided on the substrate The surface side of the element; the reflective layer having a thickness of 〇·〇〇6 μm or more and 2 μm or less and provided on the silver layer or the silver alloy layer. The substrate for mounting a semiconductor light-emitting device according to claim 6, wherein a first metal layer made of a metal other than Ag is provided between the substrate and the silver layer or the silver alloy layer. The first metal layer is composed of one selected from the group consisting of palladium, gold, tin, nickel, copper-tin alloy, copper-nickel alloy, and iron-nickel alloy, and 61 201214778 is provided on at least the first metal layer. The reflective layer is separated by a layer of a Wei or a silver alloy. And a semiconductor light-emitting device mounting base according to item 6 or item 7, wherein the silver layer or the silver alloy layer and the aluminum reflective layer are provided with a gold flash plating layer. The semiconductor light-emitting device mounting substrate according to the sixth aspect of the invention, wherein the silver layer or the silver alloy layer and the (iv) brittle-like layer are provided with a metal-containing layer, and the ? 02μπι or more and 2 sec. The semiconductor light-emitting device mounting substrate according to the above-mentioned item, wherein the towel has a gold layer on the outermost surface. The mounting of the semiconductor light-emitting device according to any one of the items of the present invention, wherein the substrate has an impurity carbon concentration of lxl〇14/cm3 or more. Ϊ́χΐ〇20 / cm3 or less. The substrate for mounting a semiconductor light-emitting device according to any one of the preceding claims, wherein the reflectance of the insole layer is equal to or less than the above. A semiconductor light-emitting device comprising: a substrate for a semiconductor light-emitting device according to any one of the items of the present invention, wherein the semiconductor light-emitting device has a semiconductor light-emitting device An outer covering portion that surrounds a portion of the semiconductor light emitting element mounting substrate, and has a concave portion formed by an inclined surface or a vertical surface around the semiconductor light emitting 7G member, the inclined surface emitting light away from the semiconductor The element mounting substrate is separated from the semiconductor light emitting element, and the translucent resin portion is filled in the recessed portion of the outer package portion to seal the semiconductor light emitting element. 14. The semiconductor light-emitting device of claim 13, wherein the semiconductor light-emitting 70-piece wire forms a riding resistive layer on the wire and is formed with the reflective layer. The substrate is electrically insulated and is wire-bonded or internally bonded to the substrate on which the aluminum reflective layer is not formed as a terminal for power supply. 15. The semiconductor light-emitting device according to claim 13, wherein the impurity carbon concentration of the reflective layer is 1χ1014/cm3 or more and 2〇/cm3 or less. 16. The semiconductor light-emitting device according to claim 13, wherein the main constituent material of the surface of the substrate which is wire bonding or internal wire bonding as the terminal for power supply of 62 201214778 is selected from the group consisting of gold, One of silver, handle, gold alloy, silver alloy or alloy, or a combination thereof. 63
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8945959B2 (en) 2012-07-06 2015-02-03 Advanced Optoelectronic Technology, Inc. LED with thin package struture and method for manufacturing the same
TWI621232B (en) * 2016-03-15 2018-04-11 Toshiba Memory Corp Semiconductor device

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9726357B2 (en) 2013-02-06 2017-08-08 Sharp Kabushiki Kaisha Light-emitting device
JP6191224B2 (en) * 2013-05-10 2017-09-06 日亜化学工業株式会社 WIRING BOARD AND LIGHT EMITTING DEVICE USING THE SAME
JP5859050B2 (en) * 2014-03-31 2016-02-10 株式会社ソディック Light emitting diode module
JP2016111299A (en) * 2014-12-10 2016-06-20 株式会社ソディック Light-emitting diode module
US9711700B2 (en) 2014-12-26 2017-07-18 Nichia Corporation Light emitting device and method for producing the same
JP6888296B2 (en) * 2016-12-26 2021-06-16 日亜化学工業株式会社 Manufacturing method of light emitting device
JP7142080B2 (en) * 2018-02-26 2022-09-26 京セラ株式会社 Packages for mounting electronic components, electronic devices and electronic modules
CN113424311A (en) * 2019-02-15 2021-09-21 罗姆股份有限公司 Semiconductor device and method for manufacturing semiconductor device
WO2023063085A1 (en) * 2021-10-14 2023-04-20 株式会社ジャパンディスプレイ Display device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261732A (en) * 1987-04-17 1988-10-28 Hitachi Cable Ltd Surface mounting board
JP3251600B2 (en) * 1990-09-27 2002-01-28 株式会社東芝 Organic metal growth method
JP2002164387A (en) * 2000-11-29 2002-06-07 Nitto Denko Corp Method for mounting semiconductor device
JP2004031587A (en) * 2002-06-25 2004-01-29 Sharp Corp Semiconductor device and its manufacturing method
JP4228303B2 (en) * 2004-04-12 2009-02-25 住友電気工業株式会社 Semiconductor light emitting element mounting member and semiconductor light emitting device using the same
JP2006093486A (en) * 2004-09-27 2006-04-06 Kyocera Corp Light emitting element mounting board and light emitting device
JP2007266343A (en) * 2006-03-29 2007-10-11 Toyoda Gosei Co Ltd Light emitting device
JP2008091818A (en) * 2006-10-05 2008-04-17 Matsushita Electric Ind Co Ltd Lead frame for optical semiconductor device, optical semiconductor device using it, and these manufacturing methods
KR100877881B1 (en) * 2007-09-06 2009-01-08 엘지이노텍 주식회사 Lighting emitting diode package and fabrication method thereof
US8288785B2 (en) * 2008-12-03 2012-10-16 Seoul Semiconductor Co., Ltd. Lead frame having light-reflecting layer, light emitting diode having the lead frame, and backlight unit having the light emitting diode
CN102257647B (en) * 2008-12-19 2014-07-23 古河电气工业株式会社 Optical semiconductor device lead frame and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8945959B2 (en) 2012-07-06 2015-02-03 Advanced Optoelectronic Technology, Inc. LED with thin package struture and method for manufacturing the same
TWI621232B (en) * 2016-03-15 2018-04-11 Toshiba Memory Corp Semiconductor device

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