TW201142270A - Improved sample chamber for laser ablation inductively coupled plasma mass spectroscopy - Google Patents
Improved sample chamber for laser ablation inductively coupled plasma mass spectroscopy Download PDFInfo
- Publication number
- TW201142270A TW201142270A TW100111225A TW100111225A TW201142270A TW 201142270 A TW201142270 A TW 201142270A TW 100111225 A TW100111225 A TW 100111225A TW 100111225 A TW100111225 A TW 100111225A TW 201142270 A TW201142270 A TW 201142270A
- Authority
- TW
- Taiwan
- Prior art keywords
- sample
- fluid
- drawer
- outlet
- inlet
- Prior art date
Links
- 238000000095 laser ablation inductively coupled plasma mass spectrometry Methods 0.000 title description 2
- 238000010926 purge Methods 0.000 claims abstract description 29
- 238000012545 processing Methods 0.000 claims abstract description 17
- 239000012530 fluid Substances 0.000 claims description 149
- 239000007789 gas Substances 0.000 claims description 35
- 239000011261 inert gas Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 230000006872 improvement Effects 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 238000000608 laser ablation Methods 0.000 claims description 8
- 238000009616 inductively coupled plasma Methods 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 238000003795 desorption Methods 0.000 claims description 3
- 208000014674 injury Diseases 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000010183 spectrum analysis Methods 0.000 claims description 2
- 230000008733 trauma Effects 0.000 claims 2
- 241000219112 Cucumis Species 0.000 claims 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 claims 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 claims 1
- 238000005401 electroluminescence Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 238000005096 rolling process Methods 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract description 8
- 238000004611 spectroscopical analysis Methods 0.000 abstract 1
- 238000011084 recovery Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 201000005569 Gout Diseases 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002996 emotional effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000011389 fruit/vegetable juice Nutrition 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0409—Sample holders or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/752,788 US8319176B2 (en) | 2010-04-01 | 2010-04-01 | Sample chamber for laser ablation inductively coupled plasma mass spectroscopy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201142270A true TW201142270A (en) | 2011-12-01 |
Family
ID=44708516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100111225A TW201142270A (en) | 2010-04-01 | 2011-03-31 | Improved sample chamber for laser ablation inductively coupled plasma mass spectroscopy |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8319176B2 (enExample) |
| EP (1) | EP2553709A2 (enExample) |
| JP (1) | JP2013524445A (enExample) |
| KR (1) | KR20130018710A (enExample) |
| CN (1) | CN103098168A (enExample) |
| TW (1) | TW201142270A (enExample) |
| WO (1) | WO2011123664A2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5771458B2 (ja) * | 2011-06-27 | 2015-09-02 | 株式会社日立ハイテクノロジーズ | 質量分析装置及び質量分析方法 |
| US8664589B2 (en) | 2011-12-29 | 2014-03-04 | Electro Scientific Industries, Inc | Spectroscopy data display systems and methods |
| AU2014214888B2 (en) * | 2013-02-09 | 2018-04-05 | Elemental Scientific Lasers, Llc | In-chamber fluid handling system and methods handling fluids using the same |
| ES2669524T3 (es) | 2013-04-08 | 2018-05-28 | Allnex Netherlands B.V. | Composición reticulable por reacción de adición de Michael Real (RMA) |
| WO2015103492A1 (en) * | 2014-01-06 | 2015-07-09 | Teledyne Instruments, Inc. | Laser-ablation-based material analysis system with a power/energy detector |
| JP2015148572A (ja) * | 2014-02-07 | 2015-08-20 | 株式会社ルケオ | 歪検査器 |
| US11293872B2 (en) * | 2014-09-18 | 2022-04-05 | Universiteit Gent | Laser ablation probe |
| KR102766510B1 (ko) | 2016-01-11 | 2025-02-13 | 엘레멘탈 사이언티픽 레이저스 엘엘씨 | 샘플 가공 동안 동시 패턴 스캔 배치 |
| US11183378B2 (en) | 2018-06-05 | 2021-11-23 | Elemental Scientific Lasers, Llc | Apparatus and method to bypass a sample chamber in laser assisted spectroscopy |
| GB201810219D0 (en) * | 2018-06-21 | 2018-08-08 | Micromass Ltd | Ion source |
| CN109297800B (zh) * | 2018-11-05 | 2021-02-02 | 中国工程物理研究院材料研究所 | 一种激光剥蚀吹扫池 |
| CN110864959A (zh) * | 2019-10-28 | 2020-03-06 | 散裂中子源科学中心 | 一种用于低温环境设备的换样方法、系统及应用 |
| CN113063643B (zh) * | 2021-03-25 | 2022-02-25 | 中国科学院地质与地球物理研究所 | 用于流体包裹体la-icp-ms分析的双体积冷冻剥蚀池装置及其剥蚀方法 |
| US20230408542A1 (en) * | 2022-06-09 | 2023-12-21 | Elemental Scientific, Inc. | Automated inline nanoparticle standard material addition |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3628213A (en) * | 1969-10-13 | 1971-12-21 | Abington Textile Mach Works | Vacuum cleaning apparatus to remove industrial waste from machinery |
| FR2256354B2 (enExample) * | 1973-12-26 | 1978-11-10 | Monserie Philippe | |
| US4640617A (en) * | 1985-02-28 | 1987-02-03 | Laser Precision Corporation | Spectrometers having purge retention during sample loading |
| US5135870A (en) | 1990-06-01 | 1992-08-04 | Arizona Board Of Regents | Laser ablation/ionizaton and mass spectrometric analysis of massive polymers |
| US5177561A (en) | 1990-06-29 | 1993-01-05 | Harrick Scientific Corp. | Purging of optical spectrometer accessories |
| US5558697A (en) * | 1992-12-08 | 1996-09-24 | Notetry Limited | Dual cyclonic vacuum cleaner |
| US5526110A (en) | 1994-07-08 | 1996-06-11 | Iowa State University Research Foundation, Inc. | In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy |
| US5543621A (en) | 1995-05-15 | 1996-08-06 | San Jose State University Foundation | Laser diode spectrometer for analyzing the ratio of isotopic species in a substance |
| US5724669A (en) * | 1996-10-15 | 1998-03-03 | Snyder; Thomas S. | Metal decontamination process and systems for accomplishing same |
| JP2001085342A (ja) * | 1999-09-17 | 2001-03-30 | Sony Corp | ガスライン自動パージシステム |
| KR100767762B1 (ko) | 2000-01-18 | 2007-10-17 | 에이에스엠 저펜 가부시기가이샤 | 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치 |
| US7274450B1 (en) | 2000-03-21 | 2007-09-25 | J.A. Woollam Co., Inc | Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems |
| US6670623B2 (en) * | 2001-03-07 | 2003-12-30 | Advanced Technology Materials, Inc. | Thermal regulation of an ion implantation system |
| AUPS229802A0 (en) * | 2002-05-07 | 2002-06-13 | Bremauer, Ben | Apparatus for mixing and/or testing small volumes of fluids |
| GB0305796D0 (en) * | 2002-07-24 | 2003-04-16 | Micromass Ltd | Method of mass spectrometry and a mass spectrometer |
| US7052615B2 (en) * | 2002-12-10 | 2006-05-30 | King Technology | Dispensing system |
| US7875245B2 (en) * | 2003-05-14 | 2011-01-25 | Dako Denmark A/S | Method and apparatus for automated pre-treatment and processing of biological samples |
| DE10303736B4 (de) * | 2003-01-30 | 2007-05-10 | Thermo Electron Led Gmbh | Klimaschrank und insbesondere Klimakühlschrank |
| US20100205992A1 (en) * | 2003-04-07 | 2010-08-19 | Dna Holdings Pty Ltd | Refrigerated cabinet |
| AU2003901561A0 (en) * | 2003-04-07 | 2003-05-01 | Dna Holdings Pty Ltd | Refrigerated cabinet |
| US6959599B2 (en) * | 2003-04-10 | 2005-11-01 | Robert Feldstein | Level detector for storage tanks for fluids |
| US7217351B2 (en) | 2003-08-29 | 2007-05-15 | Beta Micropump Partners Llc | Valve for controlling flow of a fluid |
| JP2005106688A (ja) * | 2003-09-30 | 2005-04-21 | Tdk Corp | レーザーアブレーション装置及びレーザーアブレーション方法 |
| JP2005114384A (ja) * | 2003-10-03 | 2005-04-28 | Hitachi High-Technologies Corp | 欠陥の元素分析方法およびその装置 |
| JP4539311B2 (ja) * | 2004-11-30 | 2010-09-08 | Tdk株式会社 | レーザアブレーション装置、レーザアブレーション試料分析システム及び試料導入方法 |
| KR101292938B1 (ko) | 2005-10-11 | 2013-08-02 | 아비자 테크놀로지 리미티드 | 정 변위 펌핑 챔버 |
| US8026477B2 (en) * | 2006-03-03 | 2011-09-27 | Ionsense, Inc. | Sampling system for use with surface ionization spectroscopy |
| US7546848B2 (en) | 2006-11-03 | 2009-06-16 | Gm Global Technology Operations, Inc. | Cartridge valve with integrated ceramic ring heater |
| US20080264090A1 (en) * | 2007-04-24 | 2008-10-30 | Scotsman Ice Systems Llc | Ice machine with drain |
| WO2009032640A2 (en) * | 2007-08-28 | 2009-03-12 | Thermo Niton Analyzers Llc | Contactless memory information storage for sample analysis and hand-holdable analyzer for use therewith |
| US8274735B2 (en) | 2007-09-14 | 2012-09-25 | Fry Robert C | Analytical laser ablation of solid samples for ICP, ICP-MS, and FAG-MS analysis |
| WO2009054064A1 (ja) * | 2007-10-26 | 2009-04-30 | Shimadzu Corporation | 基板ロード装置 |
| EP2324348B1 (en) * | 2008-09-08 | 2018-07-04 | Agilent Technologies, Inc. | Method transfer between fluidic devices considering deviations from ideal behavior |
| FR2938062B1 (fr) * | 2008-11-05 | 2014-02-28 | Biomerieux Sa | Dispositif de preparation et/ou de traitement d'un echantillon biologique |
-
2010
- 2010-04-01 US US12/752,788 patent/US8319176B2/en active Active
-
2011
- 2011-03-31 KR KR1020127025086A patent/KR20130018710A/ko not_active Withdrawn
- 2011-03-31 TW TW100111225A patent/TW201142270A/zh unknown
- 2011-03-31 CN CN2011800175301A patent/CN103098168A/zh active Pending
- 2011-03-31 JP JP2013502852A patent/JP2013524445A/ja active Pending
- 2011-03-31 EP EP11763447A patent/EP2553709A2/en not_active Withdrawn
- 2011-03-31 WO PCT/US2011/030757 patent/WO2011123664A2/en not_active Ceased
-
2012
- 2012-10-23 US US13/658,062 patent/US8710435B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20110240839A1 (en) | 2011-10-06 |
| EP2553709A2 (en) | 2013-02-06 |
| US8710435B2 (en) | 2014-04-29 |
| CN103098168A (zh) | 2013-05-08 |
| US20130042703A1 (en) | 2013-02-21 |
| WO2011123664A3 (en) | 2012-02-23 |
| JP2013524445A (ja) | 2013-06-17 |
| US8319176B2 (en) | 2012-11-27 |
| WO2011123664A2 (en) | 2011-10-06 |
| KR20130018710A (ko) | 2013-02-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW201142270A (en) | Improved sample chamber for laser ablation inductively coupled plasma mass spectroscopy | |
| JP2013524445A5 (enExample) | ||
| KR102744667B1 (ko) | 샘플 핸들링 시스템들, 질량 분석계들 및 관련된 방법들 | |
| US6806468B2 (en) | Capillary ion delivery device and method for mass spectroscopy | |
| KR102616763B1 (ko) | 반도체 웨이퍼의 통합된 분해 및 스캐닝을 위한 시스템 | |
| JP2016530680A (ja) | 平均流量の減少を可能にする質量分析計の入口 | |
| US6216548B1 (en) | Method for sampling particles present in a processing chamber | |
| JP2001291655A (ja) | 疎水化処理の評価方法、レジストパターンの形成方法及びレジストパターン形成システム | |
| WO2008120628A1 (ja) | 真空処理装置、真空処理装置の運転方法及び記憶媒体 | |
| US20180033601A1 (en) | Apparatus and Methods for an Atmospheric Sampling Inlet for a Portable Mass Spectrometer | |
| US20140250977A1 (en) | Chemical analysis instrument with multi-purpose pump | |
| US20070207625A1 (en) | Semiconductor processing apparatus with multiple exhaust paths | |
| JP6857584B2 (ja) | 質量分析装置 | |
| TWI344392B (enExample) | ||
| US20110239738A1 (en) | Apparatus and method for analyzing out-gassing of molecular contaminants from a sample | |
| US11387089B2 (en) | Direct sample introduction device and method for cooling sample introduction probe | |
| JP3348511B2 (ja) | X線発生装置 | |
| CN113748488B (zh) | 离子分析装置 | |
| JP2507518B2 (ja) | 真空排気装置 | |
| JPH03159049A (ja) | イオン注入装置 | |
| JP4539311B2 (ja) | レーザアブレーション装置、レーザアブレーション試料分析システム及び試料導入方法 | |
| JP3659944B2 (ja) | 拡散材料の表面反応過程分析装置 | |
| King et al. | Oxidation Behavior of Thin Copper Films on a Mercaptoundecanoic Acid Organized Molecular Assembly | |
| JP5069061B2 (ja) | 荷電粒子ビーム装置 | |
| US20110027905A1 (en) | Systems and Methods for Collection and Analysis of Analytes |