JP2013524445A - レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ - Google Patents
レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ Download PDFInfo
- Publication number
- JP2013524445A JP2013524445A JP2013502852A JP2013502852A JP2013524445A JP 2013524445 A JP2013524445 A JP 2013524445A JP 2013502852 A JP2013502852 A JP 2013502852A JP 2013502852 A JP2013502852 A JP 2013502852A JP 2013524445 A JP2013524445 A JP 2013524445A
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- JP
- Japan
- Prior art keywords
- sample
- fluid
- drawer
- sample chamber
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000095 laser ablation inductively coupled plasma mass spectrometry Methods 0.000 title description 3
- 238000010926 purge Methods 0.000 claims abstract description 44
- 238000012545 processing Methods 0.000 claims abstract description 25
- 238000003780 insertion Methods 0.000 claims abstract description 4
- 230000037431 insertion Effects 0.000 claims abstract description 4
- 239000012530 fluid Substances 0.000 claims description 149
- 239000011261 inert gas Substances 0.000 claims description 19
- 238000011084 recovery Methods 0.000 claims description 16
- 230000006872 improvement Effects 0.000 claims description 10
- 238000000608 laser ablation Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000004891 communication Methods 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 238000009616 inductively coupled plasma Methods 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 238000001840 matrix-assisted laser desorption--ionisation time-of-flight mass spectrometry Methods 0.000 claims description 3
- 238000010183 spectrum analysis Methods 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 claims 1
- 238000013022 venting Methods 0.000 claims 1
- 238000004611 spectroscopical analysis Methods 0.000 abstract description 8
- 230000007246 mechanism Effects 0.000 abstract description 6
- 239000000523 sample Substances 0.000 description 188
- 239000007789 gas Substances 0.000 description 29
- 238000011109 contamination Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000004949 mass spectrometry Methods 0.000 description 3
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000816 matrix-assisted laser desorption--ionisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0409—Sample holders or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/752,788 | 2010-04-01 | ||
| US12/752,788 US8319176B2 (en) | 2010-04-01 | 2010-04-01 | Sample chamber for laser ablation inductively coupled plasma mass spectroscopy |
| PCT/US2011/030757 WO2011123664A2 (en) | 2010-04-01 | 2011-03-31 | Improved sample chamber for laser ablation inductively coupled plasma mass spectroscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013524445A true JP2013524445A (ja) | 2013-06-17 |
| JP2013524445A5 JP2013524445A5 (enExample) | 2014-04-24 |
Family
ID=44708516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013502852A Pending JP2013524445A (ja) | 2010-04-01 | 2011-03-31 | レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8319176B2 (enExample) |
| EP (1) | EP2553709A2 (enExample) |
| JP (1) | JP2013524445A (enExample) |
| KR (1) | KR20130018710A (enExample) |
| CN (1) | CN103098168A (enExample) |
| TW (1) | TW201142270A (enExample) |
| WO (1) | WO2011123664A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021527200A (ja) * | 2018-06-05 | 2021-10-11 | エレメンタル・サイエンティフィック・レーザーズ・リミテッド・ライアビリティ・カンパニーElemental Scientific Lasers, Llc | レーザアシスト分光法でサンプルチャンバをバイパスする装置及び方法 |
| JP2022151404A (ja) * | 2021-03-25 | 2022-10-07 | インスティチュート オブ ジオロジー アンド ジオフィジックス, チャイニーズ アカデミー オブ サイエンシズ | 流体包有物のla-icp-ms分析に用いられるダブルチャンバー冷凍アブレーションセル装置およびそのアブレーション方法 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5771458B2 (ja) * | 2011-06-27 | 2015-09-02 | 株式会社日立ハイテクノロジーズ | 質量分析装置及び質量分析方法 |
| US8664589B2 (en) | 2011-12-29 | 2014-03-04 | Electro Scientific Industries, Inc | Spectroscopy data display systems and methods |
| AU2014214888B2 (en) * | 2013-02-09 | 2018-04-05 | Elemental Scientific Lasers, Llc | In-chamber fluid handling system and methods handling fluids using the same |
| ES2669524T3 (es) | 2013-04-08 | 2018-05-28 | Allnex Netherlands B.V. | Composición reticulable por reacción de adición de Michael Real (RMA) |
| WO2015103492A1 (en) * | 2014-01-06 | 2015-07-09 | Teledyne Instruments, Inc. | Laser-ablation-based material analysis system with a power/energy detector |
| JP2015148572A (ja) * | 2014-02-07 | 2015-08-20 | 株式会社ルケオ | 歪検査器 |
| US11293872B2 (en) * | 2014-09-18 | 2022-04-05 | Universiteit Gent | Laser ablation probe |
| KR102766510B1 (ko) | 2016-01-11 | 2025-02-13 | 엘레멘탈 사이언티픽 레이저스 엘엘씨 | 샘플 가공 동안 동시 패턴 스캔 배치 |
| GB201810219D0 (en) * | 2018-06-21 | 2018-08-08 | Micromass Ltd | Ion source |
| CN109297800B (zh) * | 2018-11-05 | 2021-02-02 | 中国工程物理研究院材料研究所 | 一种激光剥蚀吹扫池 |
| CN110864959A (zh) * | 2019-10-28 | 2020-03-06 | 散裂中子源科学中心 | 一种用于低温环境设备的换样方法、系统及应用 |
| US20230408542A1 (en) * | 2022-06-09 | 2023-12-21 | Elemental Scientific, Inc. | Automated inline nanoparticle standard material addition |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001085342A (ja) * | 1999-09-17 | 2001-03-30 | Sony Corp | ガスライン自動パージシステム |
| JP2005114384A (ja) * | 2003-10-03 | 2005-04-28 | Hitachi High-Technologies Corp | 欠陥の元素分析方法およびその装置 |
| WO2009054064A1 (ja) * | 2007-10-26 | 2009-04-30 | Shimadzu Corporation | 基板ロード装置 |
| WO2010025777A1 (en) * | 2008-09-08 | 2010-03-11 | Agilent Technologies, Inc. | Method transfer between fluidic devices considering deviations from ideal behavior |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3628213A (en) * | 1969-10-13 | 1971-12-21 | Abington Textile Mach Works | Vacuum cleaning apparatus to remove industrial waste from machinery |
| FR2256354B2 (enExample) * | 1973-12-26 | 1978-11-10 | Monserie Philippe | |
| US4640617A (en) * | 1985-02-28 | 1987-02-03 | Laser Precision Corporation | Spectrometers having purge retention during sample loading |
| US5135870A (en) | 1990-06-01 | 1992-08-04 | Arizona Board Of Regents | Laser ablation/ionizaton and mass spectrometric analysis of massive polymers |
| US5177561A (en) | 1990-06-29 | 1993-01-05 | Harrick Scientific Corp. | Purging of optical spectrometer accessories |
| US5558697A (en) * | 1992-12-08 | 1996-09-24 | Notetry Limited | Dual cyclonic vacuum cleaner |
| US5526110A (en) | 1994-07-08 | 1996-06-11 | Iowa State University Research Foundation, Inc. | In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy |
| US5543621A (en) | 1995-05-15 | 1996-08-06 | San Jose State University Foundation | Laser diode spectrometer for analyzing the ratio of isotopic species in a substance |
| US5724669A (en) * | 1996-10-15 | 1998-03-03 | Snyder; Thomas S. | Metal decontamination process and systems for accomplishing same |
| KR100767762B1 (ko) | 2000-01-18 | 2007-10-17 | 에이에스엠 저펜 가부시기가이샤 | 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치 |
| US7274450B1 (en) | 2000-03-21 | 2007-09-25 | J.A. Woollam Co., Inc | Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems |
| US6670623B2 (en) * | 2001-03-07 | 2003-12-30 | Advanced Technology Materials, Inc. | Thermal regulation of an ion implantation system |
| AUPS229802A0 (en) * | 2002-05-07 | 2002-06-13 | Bremauer, Ben | Apparatus for mixing and/or testing small volumes of fluids |
| GB0305796D0 (en) * | 2002-07-24 | 2003-04-16 | Micromass Ltd | Method of mass spectrometry and a mass spectrometer |
| US7052615B2 (en) * | 2002-12-10 | 2006-05-30 | King Technology | Dispensing system |
| US7875245B2 (en) * | 2003-05-14 | 2011-01-25 | Dako Denmark A/S | Method and apparatus for automated pre-treatment and processing of biological samples |
| DE10303736B4 (de) * | 2003-01-30 | 2007-05-10 | Thermo Electron Led Gmbh | Klimaschrank und insbesondere Klimakühlschrank |
| US20100205992A1 (en) * | 2003-04-07 | 2010-08-19 | Dna Holdings Pty Ltd | Refrigerated cabinet |
| AU2003901561A0 (en) * | 2003-04-07 | 2003-05-01 | Dna Holdings Pty Ltd | Refrigerated cabinet |
| US6959599B2 (en) * | 2003-04-10 | 2005-11-01 | Robert Feldstein | Level detector for storage tanks for fluids |
| US7217351B2 (en) | 2003-08-29 | 2007-05-15 | Beta Micropump Partners Llc | Valve for controlling flow of a fluid |
| JP2005106688A (ja) * | 2003-09-30 | 2005-04-21 | Tdk Corp | レーザーアブレーション装置及びレーザーアブレーション方法 |
| JP4539311B2 (ja) * | 2004-11-30 | 2010-09-08 | Tdk株式会社 | レーザアブレーション装置、レーザアブレーション試料分析システム及び試料導入方法 |
| KR101292938B1 (ko) | 2005-10-11 | 2013-08-02 | 아비자 테크놀로지 리미티드 | 정 변위 펌핑 챔버 |
| US8026477B2 (en) * | 2006-03-03 | 2011-09-27 | Ionsense, Inc. | Sampling system for use with surface ionization spectroscopy |
| US7546848B2 (en) | 2006-11-03 | 2009-06-16 | Gm Global Technology Operations, Inc. | Cartridge valve with integrated ceramic ring heater |
| US20080264090A1 (en) * | 2007-04-24 | 2008-10-30 | Scotsman Ice Systems Llc | Ice machine with drain |
| WO2009032640A2 (en) * | 2007-08-28 | 2009-03-12 | Thermo Niton Analyzers Llc | Contactless memory information storage for sample analysis and hand-holdable analyzer for use therewith |
| US8274735B2 (en) | 2007-09-14 | 2012-09-25 | Fry Robert C | Analytical laser ablation of solid samples for ICP, ICP-MS, and FAG-MS analysis |
| FR2938062B1 (fr) * | 2008-11-05 | 2014-02-28 | Biomerieux Sa | Dispositif de preparation et/ou de traitement d'un echantillon biologique |
-
2010
- 2010-04-01 US US12/752,788 patent/US8319176B2/en active Active
-
2011
- 2011-03-31 KR KR1020127025086A patent/KR20130018710A/ko not_active Withdrawn
- 2011-03-31 TW TW100111225A patent/TW201142270A/zh unknown
- 2011-03-31 CN CN2011800175301A patent/CN103098168A/zh active Pending
- 2011-03-31 JP JP2013502852A patent/JP2013524445A/ja active Pending
- 2011-03-31 EP EP11763447A patent/EP2553709A2/en not_active Withdrawn
- 2011-03-31 WO PCT/US2011/030757 patent/WO2011123664A2/en not_active Ceased
-
2012
- 2012-10-23 US US13/658,062 patent/US8710435B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001085342A (ja) * | 1999-09-17 | 2001-03-30 | Sony Corp | ガスライン自動パージシステム |
| JP2005114384A (ja) * | 2003-10-03 | 2005-04-28 | Hitachi High-Technologies Corp | 欠陥の元素分析方法およびその装置 |
| WO2009054064A1 (ja) * | 2007-10-26 | 2009-04-30 | Shimadzu Corporation | 基板ロード装置 |
| WO2010025777A1 (en) * | 2008-09-08 | 2010-03-11 | Agilent Technologies, Inc. | Method transfer between fluidic devices considering deviations from ideal behavior |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021527200A (ja) * | 2018-06-05 | 2021-10-11 | エレメンタル・サイエンティフィック・レーザーズ・リミテッド・ライアビリティ・カンパニーElemental Scientific Lasers, Llc | レーザアシスト分光法でサンプルチャンバをバイパスする装置及び方法 |
| JP7365058B2 (ja) | 2018-06-05 | 2023-10-19 | エレメンタル・サイエンティフィック・レーザーズ・リミテッド・ライアビリティ・カンパニー | レーザアシスト分光法でサンプルチャンバをバイパスする装置及び方法 |
| JP2022151404A (ja) * | 2021-03-25 | 2022-10-07 | インスティチュート オブ ジオロジー アンド ジオフィジックス, チャイニーズ アカデミー オブ サイエンシズ | 流体包有物のla-icp-ms分析に用いられるダブルチャンバー冷凍アブレーションセル装置およびそのアブレーション方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20110240839A1 (en) | 2011-10-06 |
| EP2553709A2 (en) | 2013-02-06 |
| US8710435B2 (en) | 2014-04-29 |
| CN103098168A (zh) | 2013-05-08 |
| TW201142270A (en) | 2011-12-01 |
| US20130042703A1 (en) | 2013-02-21 |
| WO2011123664A3 (en) | 2012-02-23 |
| US8319176B2 (en) | 2012-11-27 |
| WO2011123664A2 (en) | 2011-10-06 |
| KR20130018710A (ko) | 2013-02-25 |
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