JP2013524445A - レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ - Google Patents

レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ Download PDF

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JP2013524445A
JP2013524445A JP2013502852A JP2013502852A JP2013524445A JP 2013524445 A JP2013524445 A JP 2013524445A JP 2013502852 A JP2013502852 A JP 2013502852A JP 2013502852 A JP2013502852 A JP 2013502852A JP 2013524445 A JP2013524445 A JP 2013524445A
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sample
fluid
drawer
sample chamber
outlet
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JP2013524445A5 (enExample
Inventor
ハッチンソン,ロバート
サマーフィールド,リーフ
ヒリアード,シェーン
ウィルキンス,ジェイ
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エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
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Publication of JP2013524445A publication Critical patent/JP2013524445A/ja
Publication of JP2013524445A5 publication Critical patent/JP2013524445A5/ja
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0409Sample holders or containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/105Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Electron Tubes For Measurement (AREA)
JP2013502852A 2010-04-01 2011-03-31 レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ Pending JP2013524445A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/752,788 2010-04-01
US12/752,788 US8319176B2 (en) 2010-04-01 2010-04-01 Sample chamber for laser ablation inductively coupled plasma mass spectroscopy
PCT/US2011/030757 WO2011123664A2 (en) 2010-04-01 2011-03-31 Improved sample chamber for laser ablation inductively coupled plasma mass spectroscopy

Publications (2)

Publication Number Publication Date
JP2013524445A true JP2013524445A (ja) 2013-06-17
JP2013524445A5 JP2013524445A5 (enExample) 2014-04-24

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JP2013502852A Pending JP2013524445A (ja) 2010-04-01 2011-03-31 レーザアブレーション誘導結合プラズマ質量分析のための改良された試料チャンバ

Country Status (7)

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US (2) US8319176B2 (enExample)
EP (1) EP2553709A2 (enExample)
JP (1) JP2013524445A (enExample)
KR (1) KR20130018710A (enExample)
CN (1) CN103098168A (enExample)
TW (1) TW201142270A (enExample)
WO (1) WO2011123664A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021527200A (ja) * 2018-06-05 2021-10-11 エレメンタル・サイエンティフィック・レーザーズ・リミテッド・ライアビリティ・カンパニーElemental Scientific Lasers, Llc レーザアシスト分光法でサンプルチャンバをバイパスする装置及び方法
JP2022151404A (ja) * 2021-03-25 2022-10-07 インスティチュート オブ ジオロジー アンド ジオフィジックス, チャイニーズ アカデミー オブ サイエンシズ 流体包有物のla-icp-ms分析に用いられるダブルチャンバー冷凍アブレーションセル装置およびそのアブレーション方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5771458B2 (ja) * 2011-06-27 2015-09-02 株式会社日立ハイテクノロジーズ 質量分析装置及び質量分析方法
US8664589B2 (en) 2011-12-29 2014-03-04 Electro Scientific Industries, Inc Spectroscopy data display systems and methods
AU2014214888B2 (en) * 2013-02-09 2018-04-05 Elemental Scientific Lasers, Llc In-chamber fluid handling system and methods handling fluids using the same
ES2669524T3 (es) 2013-04-08 2018-05-28 Allnex Netherlands B.V. Composición reticulable por reacción de adición de Michael Real (RMA)
WO2015103492A1 (en) * 2014-01-06 2015-07-09 Teledyne Instruments, Inc. Laser-ablation-based material analysis system with a power/energy detector
JP2015148572A (ja) * 2014-02-07 2015-08-20 株式会社ルケオ 歪検査器
US11293872B2 (en) * 2014-09-18 2022-04-05 Universiteit Gent Laser ablation probe
KR102766510B1 (ko) 2016-01-11 2025-02-13 엘레멘탈 사이언티픽 레이저스 엘엘씨 샘플 가공 동안 동시 패턴 스캔 배치
GB201810219D0 (en) * 2018-06-21 2018-08-08 Micromass Ltd Ion source
CN109297800B (zh) * 2018-11-05 2021-02-02 中国工程物理研究院材料研究所 一种激光剥蚀吹扫池
CN110864959A (zh) * 2019-10-28 2020-03-06 散裂中子源科学中心 一种用于低温环境设备的换样方法、系统及应用
US20230408542A1 (en) * 2022-06-09 2023-12-21 Elemental Scientific, Inc. Automated inline nanoparticle standard material addition

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001085342A (ja) * 1999-09-17 2001-03-30 Sony Corp ガスライン自動パージシステム
JP2005114384A (ja) * 2003-10-03 2005-04-28 Hitachi High-Technologies Corp 欠陥の元素分析方法およびその装置
WO2009054064A1 (ja) * 2007-10-26 2009-04-30 Shimadzu Corporation 基板ロード装置
WO2010025777A1 (en) * 2008-09-08 2010-03-11 Agilent Technologies, Inc. Method transfer between fluidic devices considering deviations from ideal behavior

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628213A (en) * 1969-10-13 1971-12-21 Abington Textile Mach Works Vacuum cleaning apparatus to remove industrial waste from machinery
FR2256354B2 (enExample) * 1973-12-26 1978-11-10 Monserie Philippe
US4640617A (en) * 1985-02-28 1987-02-03 Laser Precision Corporation Spectrometers having purge retention during sample loading
US5135870A (en) 1990-06-01 1992-08-04 Arizona Board Of Regents Laser ablation/ionizaton and mass spectrometric analysis of massive polymers
US5177561A (en) 1990-06-29 1993-01-05 Harrick Scientific Corp. Purging of optical spectrometer accessories
US5558697A (en) * 1992-12-08 1996-09-24 Notetry Limited Dual cyclonic vacuum cleaner
US5526110A (en) 1994-07-08 1996-06-11 Iowa State University Research Foundation, Inc. In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy
US5543621A (en) 1995-05-15 1996-08-06 San Jose State University Foundation Laser diode spectrometer for analyzing the ratio of isotopic species in a substance
US5724669A (en) * 1996-10-15 1998-03-03 Snyder; Thomas S. Metal decontamination process and systems for accomplishing same
KR100767762B1 (ko) 2000-01-18 2007-10-17 에이에스엠 저펜 가부시기가이샤 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치
US7274450B1 (en) 2000-03-21 2007-09-25 J.A. Woollam Co., Inc Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
US6670623B2 (en) * 2001-03-07 2003-12-30 Advanced Technology Materials, Inc. Thermal regulation of an ion implantation system
AUPS229802A0 (en) * 2002-05-07 2002-06-13 Bremauer, Ben Apparatus for mixing and/or testing small volumes of fluids
GB0305796D0 (en) * 2002-07-24 2003-04-16 Micromass Ltd Method of mass spectrometry and a mass spectrometer
US7052615B2 (en) * 2002-12-10 2006-05-30 King Technology Dispensing system
US7875245B2 (en) * 2003-05-14 2011-01-25 Dako Denmark A/S Method and apparatus for automated pre-treatment and processing of biological samples
DE10303736B4 (de) * 2003-01-30 2007-05-10 Thermo Electron Led Gmbh Klimaschrank und insbesondere Klimakühlschrank
US20100205992A1 (en) * 2003-04-07 2010-08-19 Dna Holdings Pty Ltd Refrigerated cabinet
AU2003901561A0 (en) * 2003-04-07 2003-05-01 Dna Holdings Pty Ltd Refrigerated cabinet
US6959599B2 (en) * 2003-04-10 2005-11-01 Robert Feldstein Level detector for storage tanks for fluids
US7217351B2 (en) 2003-08-29 2007-05-15 Beta Micropump Partners Llc Valve for controlling flow of a fluid
JP2005106688A (ja) * 2003-09-30 2005-04-21 Tdk Corp レーザーアブレーション装置及びレーザーアブレーション方法
JP4539311B2 (ja) * 2004-11-30 2010-09-08 Tdk株式会社 レーザアブレーション装置、レーザアブレーション試料分析システム及び試料導入方法
KR101292938B1 (ko) 2005-10-11 2013-08-02 아비자 테크놀로지 리미티드 정 변위 펌핑 챔버
US8026477B2 (en) * 2006-03-03 2011-09-27 Ionsense, Inc. Sampling system for use with surface ionization spectroscopy
US7546848B2 (en) 2006-11-03 2009-06-16 Gm Global Technology Operations, Inc. Cartridge valve with integrated ceramic ring heater
US20080264090A1 (en) * 2007-04-24 2008-10-30 Scotsman Ice Systems Llc Ice machine with drain
WO2009032640A2 (en) * 2007-08-28 2009-03-12 Thermo Niton Analyzers Llc Contactless memory information storage for sample analysis and hand-holdable analyzer for use therewith
US8274735B2 (en) 2007-09-14 2012-09-25 Fry Robert C Analytical laser ablation of solid samples for ICP, ICP-MS, and FAG-MS analysis
FR2938062B1 (fr) * 2008-11-05 2014-02-28 Biomerieux Sa Dispositif de preparation et/ou de traitement d'un echantillon biologique

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001085342A (ja) * 1999-09-17 2001-03-30 Sony Corp ガスライン自動パージシステム
JP2005114384A (ja) * 2003-10-03 2005-04-28 Hitachi High-Technologies Corp 欠陥の元素分析方法およびその装置
WO2009054064A1 (ja) * 2007-10-26 2009-04-30 Shimadzu Corporation 基板ロード装置
WO2010025777A1 (en) * 2008-09-08 2010-03-11 Agilent Technologies, Inc. Method transfer between fluidic devices considering deviations from ideal behavior

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021527200A (ja) * 2018-06-05 2021-10-11 エレメンタル・サイエンティフィック・レーザーズ・リミテッド・ライアビリティ・カンパニーElemental Scientific Lasers, Llc レーザアシスト分光法でサンプルチャンバをバイパスする装置及び方法
JP7365058B2 (ja) 2018-06-05 2023-10-19 エレメンタル・サイエンティフィック・レーザーズ・リミテッド・ライアビリティ・カンパニー レーザアシスト分光法でサンプルチャンバをバイパスする装置及び方法
JP2022151404A (ja) * 2021-03-25 2022-10-07 インスティチュート オブ ジオロジー アンド ジオフィジックス, チャイニーズ アカデミー オブ サイエンシズ 流体包有物のla-icp-ms分析に用いられるダブルチャンバー冷凍アブレーションセル装置およびそのアブレーション方法

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Publication number Publication date
US20110240839A1 (en) 2011-10-06
EP2553709A2 (en) 2013-02-06
US8710435B2 (en) 2014-04-29
CN103098168A (zh) 2013-05-08
TW201142270A (en) 2011-12-01
US20130042703A1 (en) 2013-02-21
WO2011123664A3 (en) 2012-02-23
US8319176B2 (en) 2012-11-27
WO2011123664A2 (en) 2011-10-06
KR20130018710A (ko) 2013-02-25

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