201128194 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種旋轉式三維動態測試設備，尤指一 種適用於檢測動態感應器之旋轉式三維動態測試設備。 【先前技術】 近幾年來，隨著微機電系統的日新月異，各種小型化、 咼性能且成本低廉之感應器紛紛問世，使得感應器由關鍵 元件進一步提升成為產生創新價值的主要元件，例如：蘋 果公司的iPhone、新世代iPod、任天堂的wn所使用的三軸 加速度感應器’大部分採用微機電系統技術運用在感測器 上’常見的動態感應器有可檢測出迴轉或是振動的角速度 感應’也被稱為陀螺儀（Gyr〇sc〇pe)。 有鑑於此’有必要設計一種可大規模測試動態感應器 之二轴運動訊號的設備’以提高測試之產能及降低測試成 本 【發明内容】 本發明為一種旋轉式三維動態測試設備，包括一旋轉 台、一二維翻轉裝置 '複數測試座、―第一無線傳輸模組、 以及一主控制器。其中，三維翻轉裝置包括有一固定座、 一翻轉架 '及一承載台。固定座組設於旋轉台上，翻轉架 樞設於固定座上並沿一第一軸旋轉，承載台樞設於翻轉架 上並沿一第二軸旋轉。而第一軸、及第二輛為彼此垂直正 201128194 • 交。另外’複數測試座佈設於承載台上。此外，第一無線 傳輸模組設置於三維翻轉裝置並電性耦接至複數測試座， 第一無線傳輸模組用以發射複數測試座之測試資訊。主控 制器則包括有一第二無線傳輸模組，其用以接收第一無線 傳輸模組所發射之測試資訊。因此，本發明能提供陀螺儀、 或其他動態感測器三個軸向的動態測試，並進一步測試其 角加速度、及向心加速度。 其中，本發明之承載台可包括有相對應之一第一表 • 面、及一第二表面，而複數測試座可分別佈設於第一表面、 及第二表面。據此，本發明可進行雙面測試，亦即於承載 台兩面皆可進行測試待測感測器，以增加測試規模，降低 測試成本。當然不以雙面測試為限，承載台亦可為其他幾 何多邊形，來構成更大的測試規模。 較佳的是，本發明之三維翻轉裝置可更包括有一控制 器、及一電源模組。而控制器可電性連接複數測試座、第 一無線傳輸模組、及電源模組。其中，控制器主要用以控 • 制複數測試座、及第一無線傳輸模組，其包括資訊傳輸控 制、及測試流程控制'甚至資料的編碼轉碼等。而電源模 組則用以供給複數測試座、及第一無線傳輸模組電源。據 此，本發明之三維翻轉裝置可達到全面無線化，亦即完全 热須任何有線的电性連接，如此更有利於檢測過程中旋轉 台之旋轉。 此外’本發明之主控制器可控制翻轉架相對於固定座 沿第一軸旋轉，又可控制承載台相對於翻轉架沿第二軸旋 201128194 轉。亦即，翻轉架、及承載 器控制進行翻轉1到完全自動化°::亦可藉由主控制 之固定座可為一υ形固定座，去炒.’、中，三維翻轉裝置 他等效構造。而三維翻轉裝置 =可為框形固定架、或其 設於u形固定座上，旋轉馬達可用旋轉馬達’可組 轉。 乂顧動翻轉架沿第一軸旋 另外，本發明之三維翻轉 三維翻轉裝置可更包括有另—二他/效：造。同樣地’ 翻轉架上，而另—旋轉…疋轉馬達，其可組設於框形 馬達可用以駆動承載台沿第二軸旋 1。據此’切明可㈣旋轉馬達進行全自動化的翻轉以 到進行二個維度的測試。 再者，本發明之旋轉台可開設有至少一離心半徑調整 槽’而三維翻轉裝置之較座可滑移並組設固定於至少一 離^半徑調整槽内。抑或，本發明之旋轉台可開設有複數 離心半徑調整孔，三維翻轉裝置之固定座可組設於複數離 〜半fe調整孔其中一。據此，本發明可藉由離心半徑調整 槽、或離心半徑調整孔調整三維翻轉裝置距圓心之距離參 數’可更進一步改變向心力、向心加速度、或其他檢測參 數。 再且’本發明每一測試座可包括有一座體、一旋轉扣 件 '及一扭簧，其扭簧連結於座體、與旋轉扣件之間。亦 即’利用扭簧之恢復彈力，提供一扣緊預力予旋轉扣件， 來緊扣待測感測器於座體内，以避免承載台於翻轉過程或 201128194 旋轉台旋轉之測试過裎中，造成待測感測器掉落。此外， 本發明之第一無線傳輸模組'及第二無線傳輸模組可為藍 芽傳輸模組、射頻傳輸模組、或其他等效之無線傳輸模組 亦可。 再者，本發明之旋轉式三維動態測試設備可更包括有 一進料裝置，其包括有一旋轉輪、及至少一升降吸取頭。 至少一升降吸取踔可組設於旋轉輪上並選擇式地移動至測 試座上方，升降吸取頭係用以取放待測感測器於測試座 内，旋轉輪會旋轉帶動升降吸取頭移動，以利檢測之進行e 抑或，進料裝置亦可再包括一進料平台、及一機器手 臂’。至少一升降吸取頭可選擇式地移動至進料平台上方而 機器手臂可選擇式地移動於進料平台與複數測試座之間。 其中，升降吸取頭係用以取放待測感測 器於進料平台上， 而機is手臂再將待測感測器從進料平台取出並置於複數測 试座内。其中，進料平台可為旋轉平台輸送帶、或兑他 等效裝置。 又或者’本發明之旋轉式三維動態測試設備可更包括 有-分料裝置。其分料裝置包括有至少一晶片承載盤 (tray)及至）一取放裝置。其中，至少一取放裝置可選擇 式地移動於至少-晶片承載盤與複數測試座之間。亦即， 至；-取放裝置主要係將待測感測器從晶片承載盤中取出 置於複數測试座内。另夕卜於檢測完畢後至少一取放裝置 又將待測感測器從複數測試座中取出並置於晶片承載盤 内。據此’本發明之旋轉式三維動態測試設備可依據實際 201128194 需求使用不同之進料裝置或分料裝置，以達到最佳之測試 產能。 【實施方式】 請同時參閱圖丨與圖2，圖1係本發明第一實施例之整體 設備的立體圖，圖2為本發明第一實施例之三維翻轉裝置設 置於旋轉台之示意圖。圖1中顯示旋轉式三維動態測試設備 包括一旋轉台2、一三維翻轉裝置3、一主控制器5、一測試 頭6、及分料裝置7 »其中，旋轉台2組設於測試頭6上，測 試頭6包括有一驅動馬達6丨，用以驅動旋轉台2旋轉。而分 料裝置7 sx置於二維翻轉裝置3上方，分料裝置7主要用以進 料、及測試完畢後篩選分類。 圖2中顯示三維翻轉裝置3包括有一固定座3丨、一翻轉 架32、及一承載台33。固定座3 1係組設於旋轉台2上，翻轉 架32係枢設於固定座31上並可沿一第—軸χ旋轉。承載台” 係樞設於翻轉架32上並可沿一第二軸γ旋轉。並且，第一轴 X、及第二軸Y係彼此垂直正交，亦即藉由二個正交垂直之 第一軸X、及第一軸Y間的相對運動，來形成三個維度間之 翻轉測試。其中’本實施例之固定座3丨為一U形固定座3丨〇， 而翻轉架32為一框形翻轉架320。而且，於u形固定座3 1 〇、 及框形翻轉架320上分別設置有一旋轉馬達34 35。然而旋 轉馬達34,35可以是伺服馬達’其主要用以協助枢形翻轉架 3 2 0、及承載台3 3進行翻轉。 201128194 另外’本實施例之旋轉台2開設有二個離心半徑調整槽 2 1、及複數離心半徑調整孔22，而三維翻轉裝置3之固定座 31可滑移且固定於離心半徑調整槽21内、或組設於複數離 心半徑調整孔22其中一内。據此，可藉由離心半徑調整槽 21、或離心半徑調整孔22調整三維翻轉裝置3距圓心〇之距 離參數’也就是半徑r，可更進一步改變向心力、向心加速 度、或其他檢測參數。 詳5之’根據專速率圓周運動（unjf〇rrn cjrcuiar moti〇n) 之物理公式，亦即如式1所示。當物體以一定速率繞著圓形 路徑運轉的運動，雖然物體的速率保持固定，但因速度的 方向一直在改變’故此一質點實際上是在作變加速度運 動’且加速度的方向恆指向圓周運動轨跡的圓心，故稱之 為向心加速度a。此加速度大小a和速率ν及圓周半徑[間的關 係為： V2 ·、 a =— (式 1) r 再根據牛頓第二運動定律，物體有加速度，則必有一 向心力作用在此物體質點上，向心力F的方向與向心加速度 a的方向相同。因作用力恆指向圓周運動的圓心故稱之為 向心力（Centripetal Force)。向心力F的大小與運動物體的質 量m、速率ν(=Γω)、旋轉半徑1_及角速率①間的關係如下列 式2所示： F = iiXl = mr02 (式 2) 201128194 因此，本實施例可藉由改變三維翻轉裝置3距圓心〇之半徑 Γ ’來改變向心加速度a、及向心力F的大小。據此，本實施 例更具彈性’可依實際需要改變檢測參數。 此外，圖2中亦顯示本實施例之承載台33包括有相對應 表面3 3 1、及一第二表面3 3 2。而複數測試座4係分 別佈設於第—表面33】、及該第二表面332。據此’本實施 ^可進行雙面測試’以增加測試規模降低測試成本。當201128194 VI. Description of the Invention: [Technical Field] The present invention relates to a rotary three-dimensional dynamic test device, and more particularly to a rotary three-dimensional dynamic test device suitable for detecting a dynamic sensor. [Prior Art] In recent years, with the rapid development of MEMS, various sensors with small size, low performance and low cost have come out, which has further enhanced the sensor from key components into the main components of innovative value, such as: Apple The company's iPhone, the new generation iPod, and the three-axis acceleration sensor used by Nintendo's wn 'mostly use MEMS technology on the sensor'. Common dynamic sensors have angular velocity sensing that can detect rotation or vibration. 'Also known as gyroscope (Gyr〇sc〇pe). In view of the fact that it is necessary to design a device capable of testing the two-axis motion signal of the dynamic sensor on a large scale to improve the productivity of the test and reduce the test cost. SUMMARY OF THE INVENTION The present invention is a rotary three-dimensional dynamic test device including a rotation A two-way inverting device, a plurality of test sockets, a first wireless transmission module, and a main controller. Wherein, the three-dimensional turning device comprises a fixing base, a turning frame 'and a carrying platform. The fixing base is arranged on the rotating table, and the rotating frame is pivoted on the fixing base and rotates along a first axis, and the carrying platform is pivoted on the rotating frame and rotates along a second axis. The first axis and the second one are perpendicular to each other. 201128194 • Hand in. In addition, the 'multiple test sockets are placed on the carrying platform. In addition, the first wireless transmission module is disposed on the three-dimensional inversion device and electrically coupled to the plurality of test sockets, and the first wireless transmission module is configured to transmit test information of the plurality of test sockets. The main controller includes a second wireless transmission module for receiving test information transmitted by the first wireless transmission module. Therefore, the present invention can provide three axial dynamic tests of a gyroscope, or other dynamic sensor, and further test its angular acceleration and centripetal acceleration. Wherein, the carrying platform of the present invention may include a corresponding one of the first surface and a second surface, and the plurality of test seats may be respectively disposed on the first surface and the second surface. Accordingly, the present invention can perform double-sided testing, that is, the sensor to be tested can be tested on both sides of the carrying platform to increase the test scale and reduce the testing cost. Of course, it is not limited to double-sided testing, and the carrier can also be other geometric polygons to form a larger test scale. Preferably, the three-dimensional turning device of the present invention further comprises a controller and a power module. The controller can electrically connect the plurality of test sockets, the first wireless transmission module, and the power module. Among them, the controller is mainly used to control the plurality of test sockets and the first wireless transmission module, which includes information transmission control, and test flow control 'even coding and transcoding of data. The power module is used to supply the plurality of test sockets and the first wireless transmission module power supply. Accordingly, the three-dimensional inversion device of the present invention can achieve full wireless, i.e., complete thermal connection of any wired electrical connection, which is more advantageous for the rotation of the rotary table during the detection process. Further, the main controller of the present invention can control the flip frame to rotate along the first axis with respect to the fixed seat, and control the transfer table to rotate along the second axis with respect to the flip frame. That is, the flip frame and the carrier control are flipped 1 to fully automated. °: The fixed seat that can be controlled by the main control can be a dome-shaped mount, and the frying. ', medium, three-dimensional turning device and his equivalent structure . The three-dimensional turning device can be a frame-shaped fixing frame or it can be arranged on the u-shaped fixing seat, and the rotary motor can be rotated by a rotating motor. Depending on the first axis, the three-dimensional flipping three-dimensional turning device of the present invention may further include another two-effect. Similarly, on the flip frame, and another - rotating ... tumbling motor, which can be assembled in a frame motor, can be used to sway the carrier along the second axis 1 . According to this, the "four" rotary motor is fully automated flipped to perform two dimensions of testing. Furthermore, the rotating table of the present invention can be provided with at least one centrifugal radius adjusting groove ′, and the seat of the three-dimensional turning device can be slidably assembled and fixed in at least one of the radii adjusting grooves. Alternatively, the rotating table of the present invention can be provided with a plurality of centrifugal radius adjusting holes, and the fixing seat of the three-dimensional turning device can be assembled in one of the plurality of half-fe-fe adjustment holes. Accordingly, the present invention can further change the centripetal force, centripetal acceleration, or other detection parameter by adjusting the distance parameter of the three-dimensional inverting device from the center of the circle by the centrifugal radius adjusting groove or the centrifugal radius adjusting hole. Further, each of the test sockets of the present invention may include a body, a rotating fastener, and a torsion spring, the torsion spring being coupled between the base body and the rotating fastener. That is, using the recovery spring of the torsion spring, providing a fastening force to the rotating fastener to fasten the sensor to be tested in the body to avoid the test of the stage during the turning process or the rotation of the rotating table of 201128194 In the middle, the sensor to be tested is dropped. In addition, the first wireless transmission module and the second wireless transmission module of the present invention may be a Bluetooth transmission module, a radio frequency transmission module, or other equivalent wireless transmission module. Furthermore, the rotary three-dimensional dynamic testing apparatus of the present invention may further comprise a feeding device including a rotating wheel and at least one lifting and lowering head. At least one lifting suction 踔 can be set on the rotating wheel and selectively moved to the upper side of the test seat, the lifting suction head is used for picking up the sensor to be tested in the test seat, and the rotating wheel will rotate to drive the lifting suction head to move, Alternatively, the feeding device may further include a feeding platform and a robot arm'. At least one lift suction head is selectively movable over the feed platform and the robot arm is selectively movable between the feed platform and the plurality of test seats. Wherein, the lifting and lowering suction head is used for picking up the sensor to be tested on the feeding platform, and the machine is arm and then taking out the sensor to be tested from the feeding platform and placing it in the plurality of test sockets. Wherein, the feeding platform can be a rotating platform conveyor belt or an equivalent device. Still alternatively, the rotary three-dimensional dynamic test apparatus of the present invention may further comprise a dosing device. The dispensing device includes at least one wafer carrier tray and a pick-and-place device. Wherein at least one pick and place device is selectively movable between at least the wafer carrier tray and the plurality of test pads. That is, the pick-and-place device mainly takes the sensor to be tested out of the wafer carrier and places it in a plurality of test sockets. In addition, at least one pick-and-place device after the detection is completed, the sensor to be tested is taken out from the plurality of test sockets and placed in the wafer carrier. According to the present invention, the rotary three-dimensional dynamic test equipment can use different feeding devices or dispensing devices according to the actual 201128194 requirements to achieve the best test capacity. [Embodiment] Referring to the drawings and FIG. 2, FIG. 1 is a perspective view of an entire apparatus according to a first embodiment of the present invention, and FIG. 2 is a schematic view showing the three-dimensional inverting apparatus of the first embodiment of the present invention placed on a rotary table. The rotary three-dimensional dynamic test apparatus shown in FIG. 1 includes a rotary table 2, a three-dimensional inversion device 3, a main controller 5, a test head 6, and a dispensing device 7 » wherein the rotary table 2 is set in the test head 6 Above, the test head 6 includes a drive motor 6A for driving the rotary table 2 to rotate. The dispensing device 7 sx is placed above the two-dimensional turning device 3, and the dispensing device 7 is mainly used for feeding and screening after classification. The three-dimensional turning device 3 is shown in Fig. 2 to include a fixed seat 3, a flip frame 32, and a carrying table 33. The fixing bases 3 1 are assembled on the rotating table 2, and the rotating frame 32 is pivotally mounted on the fixing base 31 and rotatable along a first axis. The carrying platform is pivoted on the flip frame 32 and rotatable along a second axis γ. And, the first axis X and the second axis Y are perpendicular to each other, that is, by two orthogonal vertical The relative movement between the first axis X and the first axis Y is used to form a flip test between the three dimensions. The fixing seat 3 of the embodiment is a U-shaped fixing seat 3丨〇, and the rotating frame 32 is a The frame flip frame 320. Moreover, a rotary motor 34 35 is respectively disposed on the u-shaped mount 3 1 〇 and the frame flip frame 320. However, the rotary motors 34, 35 may be servo motors 'mainly used to assist the pivot The rotating frame 3 2 0 and the carrying table 3 3 are turned over. 201128194 In addition, the rotating table 2 of the embodiment is provided with two centrifugal radius adjusting grooves 2 1 and a plurality of centrifugal radius adjusting holes 22, and the three-dimensional turning device 3 is fixed. The seat 31 can be slidably fixed in the centrifugal radius adjusting groove 21 or in one of the plurality of centrifugal radius adjusting holes 22. According to this, the three-dimensional turning can be adjusted by the centrifugal radius adjusting groove 21 or the centrifugal radius adjusting hole 22. The distance parameter of the device 3 from the center of the circle is the radius r, which can be Further change the centripetal force, centripetal acceleration, or other detection parameters. The physical formula of the circular motion according to the special rate (unjf〇rrn cjrcuiar moti〇n), as shown in Equation 1. When the object is wound at a certain rate The motion of a circular path, although the velocity of the object remains fixed, but the direction of the velocity has been changing 'so the mass point is actually making the acceleration motion' and the direction of the acceleration is always pointing to the center of the circular motion trajectory. It is called the centripetal acceleration a. The relationship between the magnitude of the acceleration a and the velocity ν and the radius of the circle is: V2 ·, a = - (Formula 1) r According to Newton's second law of motion, if there is acceleration in the object, there must be one The centripetal force acts on the object particle, and the direction of the centripetal force F is the same as the direction of the centripetal acceleration a. Because the force is always directed to the center of the circular motion, it is called the Centripetal Force. The magnitude of the centripetal force F and the mass of the moving object The relationship between m, rate ν (= Γ ω), radius of rotation 1_, and angular rate 1 is as shown in the following formula 2: F = iiXl = mr02 (Formula 2) 201128194 Therefore, this embodiment The centroid acceleration a and the centripetal force F can be changed by changing the radius Γ ' of the three-dimensional inverting device 3 from the center of the circle. According to this, the embodiment is more flexible', and the detection parameters can be changed according to actual needs. The loading platform 33 of the present embodiment also includes a corresponding surface 313 and a second surface 332. The plurality of test sockets 4 are respectively disposed on the first surface 33 and the second surface 332. According to this 'this implementation ^ can be double-sided test' to increase the test scale to reduce the cost of testing.
4不以雙面測試為限，承載台33亦可為其他幾何多邊形， 來擴大更大的測試規模。 再請一併參閱圖3，圖3係本發明第一實施例之系統架 構圖。圖中顯示有一控制器8、及一電源模組9設置於固定 座1而控制器8係電性連接測試座4 '第一無線傳輪模組 4】奴轉馬達34,35、及電源模組9。其中，電源模組9用以 供給控制器8、複數測試座4、旋轉馬達34 35、及第_無線 傳輸模組41電源。而控制器8除了用以控制複數測試座4、 第-無線傳輸模組41之資訊傳輸控制測試流程控制資4 Not limited to double-sided testing, the carrier 33 can also be other geometric polygons to expand the scale of the test. Referring again to Fig. 3, Fig. 3 is a system architecture diagram of the first embodiment of the present invention. The figure shows a controller 8 and a power module 9 disposed on the fixed base 1 and the controller 8 is electrically connected to the test stand 4 'the first wireless transfer module 4}, the slave motor 34, 35, and the power module. Group 9. The power module 9 is used to supply the controller 8, the plurality of test sockets 4, the rotary motor 34 35, and the _ wireless transmission module 41 power supply. The controller 8 is used to control the information transmission control test flow control of the plurality of test sockets 4 and the first wireless transmission module 41.
料的編碼轉碼等相關檢測控制，還可控制旋轉馬達 行翻轉，亦即主控制器5控制翻轉架32相對於固定座Η沿第 輛X旋轉，控制承載台33相對於翻轉架^沿第二紐Y旋 轉。 再者，圖中又顯示有 踝傳輸模組41，1係 置於，維翻轉裝置3上，並電性耗接至複數測試座4。、其 第—無線傳輸模組41係用以發射複數測試座4之測試資 丁| ’其可以是檢測结果。此外，主控制器5包括有一第二 10 201128194 線傳輸模組51 ’其係用以接收第一魚線傳輸模組4i所發射 之測。式貝。fl Τι >更進一步’本實施例之主控制器5可透過第 一無線傳輸模組4丨、及第二無線傳輸模組5丨來控制三維翻 轉裝置3上所有檢測之進行，包括翻轉、測試流程、及測試 資Λ Τι之傳輸等。❿電源模組9則貞責三維翻轉裝置3上所 有電源之供給。因此，本實施例可達到完全地無線化，如 此更有利於旋轉檢測之進行。其中，本實施例之第一無線 傳輸模组41、及第二無線傳輸模組5〗分別為一藍芽傳輸模 組，當然其亦可為射頻傳輸模組、或其他等效之無線傳輸 模組。 3月參閱圖4，圖4係本發明第一實施例之測試座設置於 承載台的分解圖。圖中顯示有複數測試座4佈設於承載台33 上，每一測試座4容設有一待測感測器42 ^其中，每一測試 座4包括有一座體4〇、一旋轉扣件43、及一扭簧料。扭簧44 連結於座體40、與旋轉扣件43之間。進一步說明，旋轉扣 件43用以抵壓固定待測感測器42於座體4〇内而扭簧料則 提供彈力使旋轉扣件43具旋轉回復力，來抵壓固定待測感 測器42，以避免承載台33於翻轉過程或旋轉台2於旋轉過程 中，造成待測感測器42掉落。 再凊一併參閱圖5、及圖6 ’圖5係本發明第一實施例之 翻轉架沿第一軸旋轉的立體圖。圖6係本發明第一實施例之 承載σ /σ第_轴旋轉的立體圖。圖5中顯示翻轉架3 2在相對 於固疋座3 1沿第一軸X旋轉90度，以產生第二個維度之測 試。另外，圖6則顯示翻轉架32沿第一軸X旋轉90度後，承 201128194 載台33再相對於翻轉架32沿第二軸Y旋轉90度’如此可產生 第三個維度之測試。據此，即可達到完整三個維度的測試 規格。 請一併參閱圖7a係係本發明之旋轉台另一較佳實施例 之示意圖’圖7b係本發明之旋轉台又一較佳實施例之示意 圖。圖7a所示之實施例與第一實施例之主要差別在於本實 施例於相對應之1 80度處，分別設置有一組三維翻轉裝置 3’故有二組三維翻轉裝置3;而圖7b所示之實施例於每9〇 度處’分別設置有一組三維翻轉裝置3，故共有四組三維翻 轉裝置3。根據圖7a及圖7b所示之實施例設計，其除可擴大 測試規格外’即增加待測感測器42的數量外：更重要的是， 可以維持旋轉台2運轉之重量平衡，因此可延長設備的使用 壽命、及減少因材料疲勞所產生的誤差。 請參閱圖8 ’圖8係本發明第二實施例之進料裝置的示 意圖。於本實施例中，旋轉式三維動態測試設備更包括有 一進料裝置1，其具有一旋轉輪10、固定輪12、複數氣壓缸 13、及多組升降吸取頭π。升降吸取頭n組設於旋轉輪ι〇 上並藉由旋轉輪1〇的帶動可選擇式地移動至三維翻轉裝 置j上之，則忒座4上方或其他位置。其中，升降吸取頭丨1在 本實％例中為—真空吸取頭’其可取放待測感測器於三 維翻轉裝置3上之測試座4内或其他位置。^卜圖中顯示 之固定輪12上又組設有複數氣壓虹13，當升降吸取頭⑽ 動到預 < 位置時’氣壓缸丨3會驅㈣降吸取頭丨丨進行升降 201128194 ' 再請參閱圖9,圖9係本發明第二實施例之進料裝置的 週邊設備示意圖，亦即圖8所示之進料裝置〖之整體設備。 圖9中顯不進料裝置又包括有一震動盤丨6、—攝影模組丨7、 一定位模組丨8、及一轉向模組丨9。震動盤丨6包括有一螺旋 導軌160、進料區161、光電感測元件丨62、吹氣管“] ' 及 進料槽164。震動盤16另連接有一震動機構（圖中未示），使 待測感測器42從進料區161震動落到震動盤丨6中。震動盤16 為一個中央突出之盤狀結構，故待測感測器42掉落後，隨 Φ 即落到震動盤16之環週。 同時，震動盤16藉由震動機構之震動，使待測感測器 42隨著環週側壁之螺旋導轨16〇順勢上爬。其中，會經過光 電感測元件162，光電感測元件162藉由待測感測器“正反 面光之反射度不同，進行感應判斷待測感測器42之正反 面。若正反面錯誤則吹氣管163會將其吹入震動盤丨6内，再 次循環重複上述步驟繼續進料。若為正確之正反面時待 測感測器42繼續往前送入進料槽164中。 • 接著，進料槽164内之待測感測器42順勢被推送，而升 降吸取頭11在進料槽1 64尾端吸取待測感測器42後，藉由旋 轉輪12之帶動，而移至外觀檢驗區之平台上。於此區域主 要係利用攝影模組17來檢驗待測感測器42之印刷文字是否 正媒或有無瑕庇。若有錯誤或瑕疲，升降吸取頭Η可將待 測感測器42送至回收管2〇中。而回收管2〇可設置於各模組 之間，以收集有問題之待測感測器42。 201128194 再請一併參閱圖10，圖10係本發明第二實施例之進料 裝置的疋位模組示意.圖，亦即圖9中定位模組18的放大圖。 當待測感測器42之外觀印刷檢測完畢後，便進入定位模組 18其主要用以彳父對待測感測器42之方位 '及位置。如圖 1 1中.4示疋位模組1 8包括有四個換形塊α卜當升降吸取 頭"吸取待測感測器42並置於四個楔形塊丨8丨所包圍之中 央區域，藉由四個楔形塊丨8丨以將先前傳送過程造成之χγ 平面角度或位置之偏移歸零，使待測感測器精準定位 後再送入下一個模組。 再請-併參閱圖η，圖！！係本發明第二實施例之進料 裝置的轉向模組示意圖，亦即圖9中轉向模組19的放大圖。 當4測感測器42經定位模組18定位完畢後便進入轉向模 組19，其主要用以轉向待測感測器42之角度。如圖12中顯 不轉向換組19包括有-旋轉平台〗91、吹氣管192、回收管 ==胞17之檢驗裝置檢測出待測感測器Ο之 有誤時，升降吸取頭11可吸取待測感測器42 置於紅轉平台19丨上’視實際狀 或刚度之旋轉，以利後續捭.心夺針或逆時針90度、 態測試設備。㈣.，相感職似㈣轉式三維勤 測器❿以吹氣管,92吹氣之方二…㈣之待測感 札足万式运至回收管一 收。據此，本發明之旋K 仃回 之實際需要，彈性增減上诚^ 可依使用者 杨組、改變其順序、或另外新 201128194 增其他檢_組’以符合各制試規模 態測試程序。 〗取值化之動The related detection control of the code transcoding and the like can also control the rotation of the rotary motor, that is, the main controller 5 controls the flip frame 32 to rotate along the first X with respect to the fixed seat, and the control carrier 33 is opposite to the flip frame. Two New Y rotations. Furthermore, the figure also shows that the 踝 transmission module 41, 1 is placed on the undulating device 3, and is electrically connected to the plurality of test sockets 4. The first wireless transmission module 41 is used to transmit the test resources of the plurality of test sockets 4', which may be the detection result. In addition, the main controller 5 includes a second 10 201128194 line transmission module 51 ′ for receiving the measurements transmitted by the first fishing line transmission module 4i. Style shell. Fl Τι > Further, the main controller 5 of the present embodiment can control the progress of all detections on the three-dimensional inverting device 3 through the first wireless transmission module 4丨 and the second wireless transmission module 5丨, including flipping, Test process, and test resources, transfer of Τι, etc. The power supply module 9 is responsible for the supply of all the power supplies on the three-dimensional reversing device 3. Therefore, the present embodiment can achieve complete wirelessization, which is more advantageous for the rotation detection. The first wireless transmission module 41 and the second wireless transmission module 5 of the embodiment are respectively a Bluetooth transmission module, and of course, it may also be a radio frequency transmission module or other equivalent wireless transmission mode. group. Referring to Figure 4 in March, Figure 4 is an exploded view of the test stand of the first embodiment of the present invention disposed on a carrier. The figure shows that a plurality of test sockets 4 are disposed on the carrying platform 33. Each of the test sockets 4 houses a sensor 42 to be tested. Each of the test sockets 4 includes a body 4〇 and a rotating fastener 43. And a twisted spring material. The torsion spring 44 is coupled between the base 40 and the rotating fastener 43. Further, the rotating fastener 43 is used for pressing and fixing the sensor 42 to be tested in the seat body 4, and the torsion spring material provides elastic force to rotate the rotating member 43 to restore the fixed sensor to be tested. 42. In order to avoid the loading stage 33 during the turning process or the rotating table 2 during the rotation, the sensor 42 to be tested is dropped. Referring to Fig. 5 and Fig. 6', Fig. 5 is a perspective view showing the flip frame of the first embodiment of the present invention rotated along the first axis. Fig. 6 is a perspective view showing the __axis rotation of the bearing σ / σ of the first embodiment of the present invention. In Fig. 5, the flip frame 3 2 is rotated 90 degrees along the first axis X with respect to the shackle 3 1 to produce a second dimension. In addition, Fig. 6 shows that after the flip frame 32 is rotated 90 degrees along the first axis X, the stage 201128194 is rotated 90 degrees along the second axis Y with respect to the flip frame 32. Thus, a third dimension test can be produced. Based on this, the test specifications of the complete three dimensions can be achieved. Referring to Figure 7a, there is shown a schematic view of another preferred embodiment of the rotary table of the present invention. Figure 7b is a schematic view of still another preferred embodiment of the rotary table of the present invention. The main difference between the embodiment shown in FIG. 7a and the first embodiment is that the present embodiment is provided with a set of three-dimensional inverting devices 3' at two corresponding degrees of 80 degrees, so that there are two sets of three-dimensional inverting devices 3; The illustrated embodiment is provided with a set of three-dimensional inverting devices 3 at every 9 degrees, so that there are four sets of three-dimensional inverting devices 3. According to the embodiment shown in FIG. 7a and FIG. 7b, in addition to the expansion of the test specification, that is, the number of sensors 42 to be tested is increased: more importantly, the weight balance of the operation of the rotary table 2 can be maintained, so Extend the life of the equipment and reduce the errors caused by material fatigue. Referring to Figure 8, Figure 8 is a schematic illustration of a feeding device in accordance with a second embodiment of the present invention. In the present embodiment, the rotary three-dimensional dynamic testing apparatus further includes a feeding device 1 having a rotating wheel 10, a fixed wheel 12, a plurality of pneumatic cylinders 13, and a plurality of sets of lifting suction heads π. The lifting and lowering suction heads n are disposed on the rotating wheel ι and are selectively moved to the three-dimensional reversing device j by the rotation of the rotating wheel 1 ,, above the sley 4 or at other positions. Among them, the lifting and lowering head 1 is in the present embodiment, a vacuum suction head which can take the sensor to be tested in the test seat 4 on the three-dimensional inverting device 3 or other positions. ^The fixed wheel 12 shown in the figure is further provided with a plurality of air pressure rainbows 13. When the lifting and lowering head (10) moves to the pre- < position, the 'pneumatic cylinder 丨3 will drive (four) to lower the suction head and lift it up 201128194 ' Referring to FIG. 9, FIG. 9 is a schematic diagram of the peripheral device of the feeding device according to the second embodiment of the present invention, that is, the overall device of the feeding device shown in FIG. The display device of FIG. 9 further includes a vibrating plate 丨 6, a photographic module 丨 7, a positioning module 丨 8, and a steering module 丨 9. The vibrating plate 6 includes a spiral guide 160, a feeding region 161, a photo-sensing element 丨62, a blowing pipe "]', and a feeding groove 164. The vibrating plate 16 is further connected with a vibration mechanism (not shown) to be The sensor 42 is shocked from the feeding zone 161 and falls into the vibrating tray 6. The vibrating disk 16 is a centrally protruding disk-like structure, so that the sensor 42 to be tested falls behind, and falls to the vibrating plate 16 with Φ. At the same time, the vibrating plate 16 causes the sensor 42 to be tested to climb up with the spiral guide 16 of the circumferential side wall by the vibration of the vibrating mechanism. Among them, the photo-inductance measuring element 162, the optical inductor The measuring component 162 performs sensing to determine the front and back sides of the sensor 42 to be tested by the difference in the reflectance of the front and back lights of the sensor to be tested. If the front and back are wrong, the blow pipe 163 will blow it into the vibrating plate 6 and repeat the above steps to continue the feed. The sensor 42 is continuously fed into the feed slot 164 if it is the correct front and back. • Next, the sensor 42 to be tested in the feed tank 164 is pushed forward, and the lift suction head 11 is sucked by the rotating wheel 12 after sucking the sensor 42 to be tested at the end of the feed slot 1 64. Move to the platform of the visual inspection area. In this area, the photography module 17 is mainly used to check whether the printed characters of the sensor 42 to be tested are positive or not. If there is an error or fatigue, the lift suction head can send the sensor 42 to be sent to the recovery tube 2〇. A recovery tube 2 can be disposed between the modules to collect the problematic sensor 42 to be tested. Referring again to FIG. 10, FIG. 10 is a schematic diagram of a clamping module of a feeding device according to a second embodiment of the present invention, that is, an enlarged view of the positioning module 18 of FIG. After the appearance of the sensor 42 to be tested is printed, the positioning module 18 is used to mainly use the position and position of the sensor 42 for the sensor. As shown in Fig. 11. The position of the clamp module 18 includes four shape-changing blocks α, when the lift-and-drop head " absorbs the sensor 42 to be tested and is placed in the central area surrounded by four wedge-shaped blocks 丨8丨The four wedge blocks 丨8丨 are used to zero the offset of the χ γ plane angle or position caused by the previous transmission process, so that the sensor to be tested is accurately positioned and then sent to the next module. Please - and see Figure η, figure! ! A schematic view of a steering module of a feeding device according to a second embodiment of the present invention, that is, an enlarged view of the steering module 19 of FIG. When the 4 sense sensor 42 is positioned by the positioning module 18, it enters the steering module 19, which is mainly used to turn the angle of the sensor 42 to be tested. As shown in FIG. 12, when the inspection device including the -rotating platform 91, the blowing pipe 192, the recovery pipe==cell 17 detects that the sensor to be tested is in error, the lifting and sucking head 11 can absorb The sensor 42 to be tested is placed on the red-turning platform 19丨' to rotate according to the actual shape or rigidity, so as to facilitate the subsequent smashing or counterclockwise 90 degree state test equipment. (4). The sense of position is similar. (4) The three-dimensional divergence detector is used to blow the air pipe, and the air blowing is 92. (4) The feeling to be tested is sent to the recovery pipe. Accordingly, the actual needs of the K-turnback of the present invention, the flexibility increase or decrease can be determined according to the user Yang group, change the order, or another new 201128194 additional inspection group to meet the test scale test procedure . 〗
_請參閱圖丨2,圖丨2係本發明第三實施例之進料裝置的 :意圖方疋轉式二維動態測試設備，其進料裝置】與第前述 貫把例大致相同，其主要差異在於進料裝置ι另包括有一進 料平台⑷及-機器手臂15β其中，進料平台听為旋轉 平台或輸送帶，其主要用以將升降吸取頭11傳送過來之待 測感測器42提供給機器手㈣。進—步說明，升降吸取頭 11將待測晶片42置於-側’而進料平台刚以旋轉或輸送 帶手段移到另—側。料，機器手臂Μ可選擇式地移動於 進料平台14與二維翻轉裝置3上之測試座4之間，將待測感 測器4 2從進料平台14上—_吸取至三維翻轉裝置3上之測 試座4内。而當待測感測器42全部置放完成後便可開始進 行旋轉式三維動態測試設備。 。月參閱圖1 3，圖1 3係本發明第四實施例之進料裝置的 不意圖，本實施例之旋轉式三維動態測試設備，其進料裝 置1與前述實施例大致相同，主要差異在於其不具有旋轉 台’且二維翻轉裝置3上可設置一個測試座4，然本實施例 不限於此’本實施例之旋轉式三維動態測試設備亦可設置 分設多組單獨之測試座4，藉以連續測試一個待測感測器 42 ’以提高測試之產能。 請一併參閱圖1 4及圖1 5，圖14係本發明第第五實施例 之分料裝置的示意圖’圖1 5係本發明第五實施例之分料裝 置的内部俯視圖。於本實施例中，分料裝置7與前述實施例 201128194 ，致相同’主要差異在於三維翻轉裝置3係直接整合於分料 义置7(Handler)中’而分料裝置7内部不具有旋轉台2，以節 省空間及其他多餘之搬運手段。#中，如圖中所示分料裝 置7。括有四個晶片承載盤7丨⑽丫)、及二個取放裝置72。 取放裝置72可選擇式地移動於晶片承載盤7丨與測試座4之 間。其中，四個晶片承栽盤71分包括二進料承載盤7u、及 二出，承載盤712。進料承載盤7Π係承載未經測試之待測 感測益42’而出料承載盤7|2則承載經測試過後之待測 器42。 在本實施财，出料承鐘712可分別包括合格及不 合格之出料承載盤712，用以分辨經測試後之合格感測器、 及不合格感測器。同樣地，本實施例包括有二套取放裝置 72,其分別為進料取放裝置72丨、出料取放裝置η?。其中， 進料取放裝置72丨負責將進料承載盤7 1丨上的待測感測器 搬運至三維翻轉裝置3上的複數測試座4。而待測試完畢 後，出料取放裝置722再將複數測試座4上的感測器裝載至 出料承載盤爪内。據此，本發明之旋轉式三維動態測試設 備：依據實際需求使用不同之進料裝置或分料裝置，以達 到最佳之測試產能。上述實施例僅係為了方便說明而舉例 而已，本發明所主張之權利範圍自應以巾請專利範圍所述 為準，而非僅限於上述實施例。 【圖式簡單說明】 圖1係本發明第一實施例之整體設備的立體圖。 201128194 ' 圖2係本發明第一實施例之三維翻轉裝置設置於旋轉台之 示意圖。 圖3係本發明第一實施例之系統架構圖。 圖4係本發明第一實施例之測試座設置於承載台的分解圖。 圖5係本發明第一實施例之翻轉架沿第一軸旋轉的立體圖。 圖6係本發明第一實施例之承載台沿第二軸旋轉的立體圖。 圖7a係本發明之旋轉台另一較佳實施例之示意圖。 圖7b係本發明之旋轉台又一較佳實施例之示意圖。 • 圖8係本發明第二實施例之進料裝置的示意圖。 圖9係本發明第二實施例之進料裝置的週邊設備示意圖。 圖10係本發明第二實施例之進料裝置的定位模組示意圖。 圖11係本發明第二實施例之進料裝置的轉向模組示意圖。 圖12係本發明第三實施例之進料裝置的示意圖。 圖1 3係本發明第四實施例之進料裝置的示意圖。 圖14係本發明第五實施例之分料裝置的示意圖。 圖15係本發明第五實施例之分料裝置的内部俯視圖。 【主要元件符號說明】 進料裝置1 旋轉輪 固定輪12 氣壓缸 機器手臂1 5 震動盤 進料區1 61 光電感 進料槽丨64 攝影模 楔形塊1 81 轉向模 10 升降吸取頭1 1 13 進料平台14 16 螺旋導轨1 60 測元件1 62 吹氣管163 組17 定位模組1 8 組19 旋轉平台1 9 1 201128194 吹氣管192 離心半徑調整櫓2 1 固定座3 1 U形固定座3 10 第二表面332 座體40 旋轉扣件43 第二無線傳輸模組5 1 分料裝置7 出料承載盤71 2 出料取放裝置722 半徑r 回收管193,20 離心半徑調整孔22 翻轉架32 才匡形翻轉架320 旋轉馬達34,35 第一無線傳輸模組41 扭著44 測試頭6 晶片承载盤71 取放裝置72 控制器8 測試資訊Ti 旋轉台2 三維翻轉裝置3 承載台33 第一表面33 1 測試座4 待測感測器42 主控制器5 驅動馬達6 1 進料承載盤7 1 1 進料取放裝置721 電源模組9 圓心0_Please refer to FIG. 2, which is a schematic diagram of the feeding device of the third embodiment of the present invention: the intended two-dimensional dynamic testing device, the feeding device thereof is substantially the same as the first embodiment, and the main The difference is that the feeding device ι further comprises a feeding platform (4) and a robot arm 15β. The feeding platform is regarded as a rotating platform or a conveyor belt, which is mainly used to provide the sensor 42 to be tested transmitted from the lifting and lowering suction head 11 Give the robot (four). Further, the lift suction head 11 places the wafer 42 to be tested on the side, and the feed platform has just moved to the other side by means of rotation or conveyor belt. The robot arm is selectively moved between the feeding platform 14 and the test socket 4 on the two-dimensional turning device 3, and the sensor to be tested is sucked from the feeding platform 14 to the three-dimensional turning device. 3 on the test seat 4 inside. When the sensor 42 to be tested is fully placed, the rotary three-dimensional dynamic test equipment can be started. . Referring to FIG. 13 , FIG. 1 is a schematic diagram of a feeding device according to a fourth embodiment of the present invention. The rotating three-dimensional dynamic testing device of the present embodiment has a feeding device 1 which is substantially the same as the foregoing embodiment, and the main difference is that It is not provided with a rotating table', and a test stand 4 can be disposed on the two-dimensional inverting device 3. However, the embodiment is not limited to the same. The rotating three-dimensional dynamic testing device of the present embodiment can also be provided with multiple sets of separate test seats. In order to continuously test a sensor 42 to be tested to increase the productivity of the test. Referring to Fig. 14 and Fig. 15, a schematic view of a dispensing device according to a fifth embodiment of the present invention is shown in Fig. 15. Fig. 15 is an internal plan view of a dispensing device according to a fifth embodiment of the present invention. In the present embodiment, the dispensing device 7 is the same as the previous embodiment 201128194, the main difference is that the three-dimensional turning device 3 is directly integrated into the Handler, and the dispensing device 7 does not have a rotating table. 2, to save space and other unnecessary means of transportation. #中, the dispensing device 7 is shown in the figure. Four wafer carrying trays 7丨(10)丫) and two pick-and-place devices 72 are included. The pick and place device 72 is selectively movable between the wafer carrier tray 7 and the test socket 4. The four wafer carrier trays 71 include two feed trays 7u and two outlet trays 712. The feed carrier tray 7 carries the untested test sense 42' and the discharge carrier tray 7|2 carries the tested tester 42. In this implementation, the discharge syrup 712 may include a qualified and unqualified discharge carrier 712 for distinguishing the tested qualified sensor and the failed sensor. Similarly, the present embodiment includes two sets of pick-and-place devices 72, which are respectively a feed pick-and-place device 72, and a discharge pick-and-place device η. The feed pick-and-place device 72 is responsible for transporting the sensor to be tested on the feed carrier 7 1丨 to the plurality of test seats 4 on the three-dimensional inverting device 3. After the test is completed, the discharge pick-and-place device 722 loads the sensors on the plurality of test sockets 4 into the discharge carrier jaws. Accordingly, the rotary three-dimensional dynamic test device of the present invention uses different feed devices or dosing devices according to actual needs to achieve the best test throughput. The above-described embodiments are merely examples for convenience of description, and the scope of the claims of the present invention is determined by the scope of the claims, and is not limited to the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of an overall apparatus according to a first embodiment of the present invention. 201128194' Fig. 2 is a schematic view showing the three-dimensional inverting device of the first embodiment of the present invention disposed on a rotary table. 3 is a system architecture diagram of a first embodiment of the present invention. Figure 4 is an exploded view of the test stand of the first embodiment of the present invention disposed on a carrier. Figure 5 is a perspective view of the flip frame of the first embodiment of the present invention rotated along a first axis. Figure 6 is a perspective view of the stage of the first embodiment of the present invention rotated along a second axis. Figure 7a is a schematic illustration of another preferred embodiment of the rotary table of the present invention. Figure 7b is a schematic illustration of yet another preferred embodiment of the rotary table of the present invention. • Fig. 8 is a schematic view of a feeding device according to a second embodiment of the present invention. Figure 9 is a schematic view of the peripheral device of the feeding device of the second embodiment of the present invention. Figure 10 is a schematic view of a positioning module of a feeding device according to a second embodiment of the present invention. Figure 11 is a schematic view of a steering module of a feeding device according to a second embodiment of the present invention. Figure 12 is a schematic illustration of a feeding device in accordance with a third embodiment of the present invention. Figure 13 is a schematic view of a feeding device of a fourth embodiment of the present invention. Figure 14 is a schematic illustration of a dispensing device in accordance with a fifth embodiment of the present invention. Figure 15 is a plan view showing the interior of a dispensing device according to a fifth embodiment of the present invention. [Main component symbol description] Feeding device 1 Rotating wheel fixed wheel 12 Pneumatic cylinder Robot arm 1 5 Vibrating plate feeding area 1 61 Photoinductive feeding groove 摄影 Photographic die wedge block 1 81 Steering die 10 Lifting suction head 1 1 13 Feeding platform 14 16 Spiral guide 1 60 Measuring element 1 62 Blowing pipe 163 Group 17 Positioning module 1 8 Group 19 Rotating platform 1 9 1 201128194 Blowing pipe 192 Centrifugal radius adjustment 1 2 1 Mounting seat 3 1 U-shaped seat 3 10 Second surface 332 Seat 40 Rotating fastener 43 Second wireless transmission module 5 1 Dispensing device 7 Discharge carrier 71 2 Discharge and pick-up device 722 Radius r Recovery tube 193, 20 Centrifugal radius adjustment hole 22 Flip frame 32 翻转 翻转 320 320 rotating motor 34, 35 first wireless transmission module 41 twisted 44 test head 6 wafer carrier 71 pick and place device 72 controller 8 test information Ti rotary table 2 three-dimensional turning device 3 carrying platform 33 A surface 33 1 test stand 4 sensor to be tested 42 main controller 5 drive motor 6 1 feed carrier 7 1 1 feed pick and place device 721 power module 9 center 0