TWI395950B - Reciprocating test module and test system thereof - Google Patents

Reciprocating test module and test system thereof Download PDF

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TWI395950B
TWI395950B TW098105501A TW98105501A TWI395950B TW I395950 B TWI395950 B TW I395950B TW 098105501 A TW098105501 A TW 098105501A TW 98105501 A TW98105501 A TW 98105501A TW I395950 B TWI395950 B TW I395950B
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linear reciprocating
test
device under
under test
test module
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TW098105501A
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TW201031922A (en
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Cheng Chin Ni
Mao Te Lai
Pei Luen Hsu
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King Yuan Electronics Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867Handlers or transport devices, e.g. loaders, carriers, trays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834Automated test systems [ATE]; using microprocessors or computers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836Fault-finding or characterising
    • G01R31/2837Characterising or performance testing, e.g. of frequency response
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2896Testing of IC packages; Test features related to IC packages

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

直線往復測試模組及其測試系統Linear reciprocating test module and test system thereof

本發明係有關測試系統,特別是有關一種適用於運動感測器(motion sensor)的直線往復測試模組及直線往復測試系統。The invention relates to a test system, in particular to a linear reciprocating test module and a linear reciprocating test system suitable for a motion sensor.

運動感測器(motion sensor,或稱動態感測器)係一種可將運動狀態(例如傾斜角度)轉換為相對應電子訊號的元件,其逐漸普遍應用於現代的電子或機電裝置中,例如遊戲控制器、行動電話、數位音樂播放器(MP3)、照相機、個人數位助理(PDA),可實施各種運動(例如直線往復、加速、旋轉等)相關的應用,以促進使用上的真實性、便利性或功能多樣性。A motion sensor (or dynamic sensor) is an element that converts a motion state (such as a tilt angle) into a corresponding electronic signal, which is gradually used in modern electronic or electromechanical devices, such as games. Controller, mobile phone, digital music player (MP3), camera, personal digital assistant (PDA), can implement various sports (such as linear reciprocating, acceleration, rotation, etc.) related applications to promote the authenticity and convenience of use Sexual or functional diversity.

現今的運動感測器一般係以半導體製程技術再配合機電技術(例如微機電系統(micro-electro-mechanical system,MEMS)技術)製作為積體電路。如同一般的積體電路,對已封裝完成之運動感測器需進行最終測試(final test),以確保其功能的正確性。於測試時,除了進行功能及電氣參數的測試外,還要測試其運動狀態(例如傾斜角度)的正確性。Today's motion sensors are generally fabricated as semiconductor circuits using semiconductor process technology coupled with electromechanical technologies such as micro-electro-mechanical systems (MEMS). As with the general integrated circuit, a final test is required for the packaged motion sensor to ensure its correct function. In addition to testing the function and electrical parameters, the correctness of the motion state (such as the tilt angle) is also tested.

然而,傳統運動感測器的測試系統對於運動狀態的測試,不但測試項目稀少,且對於每一種運動狀態測試項目,即需分別使用不同的運動測試機台。如此,不但造成測試系統設計的複雜化及成本的提高,且使得測試產能(throughput)無法提高。鑑於此,因此亟需提出運動感測器的各種運動狀態測試裝置,使其能整合於其他測試裝置,不但可降低成本、簡化設計,且可增加測試彈性,以利測試產能的提高。However, the test system of the traditional motion sensor has not only a few test items for the test of the motion state, but also a different motion test machine for each motion state test item. In this way, not only the complexity of the test system design and the cost increase, but also the test throughput cannot be improved. In view of this, it is urgent to propose various motion state testing devices of the motion sensor, so that it can be integrated into other testing devices, which not only reduces the cost, simplifies the design, but also increases the test flexibility to improve the test throughput.

本發明的目的之一在於提出一種適用於運動感測器的直線往復測試模組及直線往復測試系統。藉由模組化的設計,可將直線往復測試模組整合於傳統的測試系統中,且可與其他運動測試模組彈性置換使用。藉此,不但可降低成本、簡化設計,且可增加測試彈性及多樣性,以利測試產能的提高。One of the objects of the present invention is to provide a linear reciprocating test module and a linear reciprocating test system suitable for a motion sensor. Through the modular design, the linear reciprocating test module can be integrated into the traditional test system and can be elastically replaced with other motion test modules. This not only reduces costs, simplifies design, but also increases test flexibility and diversity for improved test throughput.

根據本發明實施例,直線往復測試模組包含至少一容置裝置(例如插槽),用以暫時容置受測元件(例如運動感測器)。直線往復測試模組還包含直線往復機構,用以對受測元件進行直線往復之運動。在本實施例中,直線往復機構包含轉盤、滑動座及連桿。轉盤於旋轉時,藉由連桿而帶動滑動座,使其得以於沿著軌道而作直線往復運動。直線往復測試模組結合檢選分類機台(handler)及測試機台(tester)以組合成直線往復測試系統。其中,檢選分類機台拾取及置放受測元件至直線往復測試模組,而測試機台則藉由傳輸線分別控制直線往復測試模組及檢選分類機台。According to an embodiment of the invention, the linear reciprocating test module includes at least one receiving device (for example, a slot) for temporarily accommodating a device under test (for example, a motion sensor). The linear reciprocating test module further includes a linear reciprocating mechanism for linearly reciprocating movement of the device under test. In this embodiment, the linear reciprocating mechanism includes a turntable, a sliding seat, and a connecting rod. When the turntable rotates, the sliding seat is driven by the connecting rod to make a linear reciprocating motion along the track. The linear reciprocating test module combines the sorting machine and the tester to form a linear reciprocating test system. Among them, the sorting machine picks up and places the tested components to the linear reciprocating test module, and the testing machine controls the linear reciprocating test module and the sorting machine by the transmission line.

在另一實施例中,直線往復機構更包含第一翻轉機構,其受控於第一驅動裝置(例如馬達),使得受測元件得以繞第一軸向作翻轉;且包含第二翻轉機構,其受控於第二驅動裝置(例如馬達),使得受測元件得以繞第二軸向作翻轉。藉此,使得受測元件可以在直線往復運動當中同時作角度的翻轉。In another embodiment, the linear reciprocating mechanism further includes a first inverting mechanism controlled by the first driving device (eg, a motor) such that the device under test is flipped about the first axis; and includes a second inverting mechanism, It is controlled by a second drive (such as a motor) such that the device under test is flipped about the second axis. Thereby, the device under test can be simultaneously flipped in angle during linear reciprocating motion.

第一圖之系統方塊圖顯示本發明實施例之直線往復測試系統1,用以測試封裝後的運動感測器(motion sensor,或稱動態感測器)之直線往復運動。運動感測器係一種可將運動狀態(例如傾斜角度)轉換為相對應電子訊號的元件。根據不同的應用,運動感測器可以為加速度計(accelerometer)、陀螺儀(Gyroscope)、壓力感測器等。運動感測器有多種構造原理,在本實施例中,係以微機電系統(MEMS)技術所製造之運動感測器作為例示。The system block diagram of the first figure shows a linear reciprocating test system 1 according to an embodiment of the present invention for testing a linear reciprocating motion of a packaged motion sensor (or dynamic sensor). A motion sensor is an element that converts a motion state (eg, a tilt angle) into a corresponding electronic signal. Depending on the application, the motion sensor can be an accelerometer, a gyroscope, a pressure sensor, or the like. Motion sensors have a variety of construction principles. In this embodiment, motion sensors manufactured by microelectromechanical systems (MEMS) technology are exemplified.

在本實施例中,直線往復測試系統1主要包含直線往復測試模組10、檢選分類機台(handler)12及測試機台(tester)14。直線往復測試模組10具一或多個容置裝置100(例如插槽),用以暫時容置一或多個受測元件(device under test,DUT),並藉由直線往復機構101對受測元件進行直線往復運動。此外,直線往復測試模組10還可包含加熱裝置102,用以控制受測元件的溫度。檢選分類機台12包含拾取/置放(pick/place)裝置120,用以拾取及置放受測元件至直線往復測試模組10以進行測試,並於測試完成後取回受測元件;接著,分類裝置121根據測試結果將受測元件加以分類(bin)。測試機台14主要包含測試頭(test head)140,其內含有測試相關的電路,經由傳輸線16、18用以分別控制上述之直線往復測試模組10及檢選分類機台12。詳言之,測試機台14首先透過傳輸線18通知檢選分類機台12拾取受測元件並置放於直線往復測試模組10中;接著,測試機台14透過傳輸線16通知直線往復測試模組10進行直線往復運動;受測元件的輸出訊號則經由傳輸線16傳回給測試機台14;最後,測試機台14通知檢選分類機台12取回受測元件並進行分類。藉由直線往復測試系統1,可以量測得到受測元件的直線加速度(一般又稱為g力(g-force)或g值加速度,其代表一物體相對於重力加速度之加速度大小,一單位g力大約等於9.8米/秒平方)。關於加速度的量測,可以參閱本案申請人同時申請的另一專利申請案,題為「動態測試裝置及方法」,其細節不在此贅述。In the present embodiment, the linear reciprocating test system 1 mainly includes a linear reciprocating test module 10, a sorting sorting machine 12 and a tester 14. The linear reciprocating test module 10 has one or more accommodating devices 100 (for example, slots) for temporarily accommodating one or more device under test (DUT), and is subjected to a linear reciprocating mechanism 101. The measuring element performs a linear reciprocating motion. In addition, the linear reciprocating test module 10 can also include a heating device 102 for controlling the temperature of the device under test. The sorting sorting machine 12 includes a pick/place device 120 for picking up and placing the device under test to the linear reciprocating test module 10 for testing, and retrieving the device under test after the test is completed; Next, the sorting means 121 classifies the elements to be tested based on the test results. The test machine 14 mainly includes a test head 140 containing test-related circuits for controlling the linear reciprocating test module 10 and the sorting machine 12 described above via the transmission lines 16, 18. In detail, the testing machine 14 first informs the sorting sorting machine 12 through the transmission line 18 to pick up the tested component and place it in the linear reciprocating test module 10; then, the testing machine 14 notifies the linear reciprocating test module 10 through the transmission line 16. The linear reciprocating motion is performed; the output signal of the device under test is transmitted back to the testing machine 14 via the transmission line 16; finally, the testing machine 14 notifies the sorting machine 12 to retrieve the component under test and classify it. By linear reciprocating test system 1, the linear acceleration of the measured component (generally referred to as g-force or g-value acceleration), which represents the acceleration of an object relative to gravitational acceleration, is expressed in units of g. The force is approximately equal to 9.8 m/s square). For the measurement of acceleration, please refer to another patent application filed by the applicant at the same time, entitled "Dynamic Test Equipment and Method", the details of which are not described here.

與傳統運動測試系統作比較,本發明實施例所揭露之直線往復測試系統1至少具有下列優點。本實施例將直線往復測試模組10予以模組化後,當要進行其他種類的運動測試時,僅需以其他運動測試模組來置換直線往復測試模組10即可,幾乎或完全不需要變更檢選分類機台12的設計。換句話說,可以利用單一且為傳統(非運動測試)的檢選分類機台來搭配個別的運動測試模組,此不但具使用彈性及測試多樣性,且可降低成本(其他的運動測試模組可參閱本案申請人同時申請的其他專利申請案,題為「翻轉測試模組及其測試系統」、「旋轉測試模組及其測試系統」,其詳細內容不在此贅述)。反觀傳統運動測試系統,其檢選分類、運動測試及測試頭係為整體設計的,因此針對不同的運動測試即需使用不同的整個運動測試系統。Compared with the conventional exercise test system, the linear reciprocating test system 1 disclosed in the embodiment of the present invention has at least the following advantages. In this embodiment, after the linear reciprocating test module 10 is modularized, when other kinds of motion tests are to be performed, only the linear reciprocating test module 10 needs to be replaced by other motion test modules, which is almost or completely unnecessary. The design of the sorting sorting machine 12 is changed. In other words, you can use a single and traditional (non-sports test) sorting machine to match individual motion test modules, which not only has flexibility and test diversity, but also reduces costs (other motion test modules) The group can refer to other patent applications filed by the applicant at the same time, entitled "Flip test module and its test system", "Rotary test module and its test system", the details of which are not described here. In contrast to the traditional sports test system, the inspection classification, motion test and test head system are designed as a whole, so different motion test systems are required for different motion tests.

第二圖之透視圖顯示本發明實施例之直線往復測試系統1,而第三圖之透視圖顯示其中的直線往復測試模組10之細部結構,第四圖之透視圖則顯示直線往復測試模組10的局部更細部結構。這些圖式中與第一圖相同的組成要件係以相同符號來表示。The perspective view of the second diagram shows the linear reciprocating test system 1 of the embodiment of the present invention, and the perspective view of the third diagram shows the detailed structure of the linear reciprocating test module 10, and the perspective view of the fourth figure shows the linear reciprocating test mode. Partially finer structure of group 10. The same constituent elements of the drawings as those of the first figure are denoted by the same symbols.

如第二圖所示,直線往復測試系統1主要包含直線往復測試模組10、檢選分類機台(handler)12及測試機台(tester)14。其中,直線往復測試模組10具元件插槽100,用以暫時容置受測元件(DUT)。位於插槽100與直線往復測試模組10其餘部分之間的是元件介面板(device interface board,DIB)103,一般又稱為受測元件板(DUT board)、功能板(performance board)或載板(load board)。此元件介面板(DIB)103主要係提供一電氣介面,用以將受測元件的訊號透過此電氣介面而得以傳送至直線往復測試模組10的其餘部分。As shown in the second figure, the linear reciprocating test system 1 mainly includes a linear reciprocating test module 10, a sorting sorting machine 12 and a tester 14. The linear reciprocating test module 10 has a component slot 100 for temporarily accommodating a device under test (DUT). Located between the slot 100 and the rest of the linear reciprocating test module 10 is a device interface board (DIB) 103, which is also commonly referred to as a DUT board, a performance board, or a load board. Board (load board). The component interface panel (DIB) 103 primarily provides an electrical interface for transmitting signals from the device under test through the electrical interface to the remainder of the linear reciprocating test module 10.

如第三圖所示,除了插槽100、元件介面板103之外,本發明實施例之直線往復測試模組10還包含基座104、升降機構105、測試載台106、直線往復機構101、支架108及對準栓109。其中,升降機構105設於基座104與測試載台106之間,用以升降測試載台106及設於其上的各要件。在本實施例中,於進行直線往復測試之前,升降機構105先升起測試載台106(及設於其上的各要件),以利檢選分類機台12將受測元件置放於插槽100內。當受測元件放置妥當後,升降機構105即將測試載台106降下。於直線往復測試完成後,升降機構105需再次升起測試載台106,以利檢選分類機台12將受測元件取回。上述升降機構105於升起及降下時,可以使用對準栓109來協助直線往復測試模組10和檢選分類機台12之間的對準。雖然本實施例以升、降直線往復測試模組10的方式來達成受測元件的取放,然而在其他實施例中,也可以採用升、降檢選分類機台12的方式,或者同時移動直線往復測試模組10、檢選分類機台12的方式來達成受測元件的取放。As shown in the third figure, in addition to the slot 100 and the component panel 103, the linear reciprocating test module 10 of the embodiment of the present invention further includes a base 104, a lifting mechanism 105, a test carrier 106, a linear reciprocating mechanism 101, Bracket 108 and alignment plug 109. The lifting mechanism 105 is disposed between the base 104 and the test stage 106 for lifting and lowering the test stage 106 and the components disposed thereon. In the present embodiment, before the linear reciprocating test is performed, the lifting mechanism 105 first raises the test stage 106 (and the various components disposed thereon) to facilitate the sorting machine 12 to place the device under test in the insertion. Inside the slot 100. When the device under test is placed properly, the lifting mechanism 105 lowers the test stage 106. After the linear reciprocating test is completed, the lifting mechanism 105 needs to raise the test stage 106 again to facilitate the sorting machine 12 to retrieve the device under test. When the lifting mechanism 105 is raised and lowered, the alignment pin 109 can be used to assist the alignment between the linear reciprocating test module 10 and the sorting machine 12 . Although the present embodiment achieves the pick-and-place of the device under test in the manner of raising and lowering the linear reciprocating test module 10, in other embodiments, the method of assuring and descending the sorting machine 12 may be employed, or may be simultaneously moved. The linear reciprocating test module 10 and the sorting machine 12 are selected to achieve the pick-and-place of the device under test.

繼續參閱第三圖並同時參閱第四圖所示,在本實施例中,測試載台106上設置有直線往復機構101,其為一種曲柄滑塊結構,主要包含轉盤(例如平衡錘)1010、滑動座1011及連桿1012。轉盤1010與滑動座1011分別透過活動軸1013A/1013B與連桿1012連接。滑動座1011上設有元件介面板103及容置裝置100。當進行直線往復運動時,轉盤1010受驅動裝置(例如馬達,未圖式)之驅動而繞轉軸1014旋轉,藉由連桿1012而帶動滑動座1011,使得滑動座1011(及其上的受測元件)得以沿著軌道1015作直線往復運動。換句話說,藉由此曲柄滑塊結構,可將轉盤1010的圓周運動轉換為滑動座1011的直線往復運動,使得滑動座1011上面的受測元件受到雙向的加速。Continuing to refer to the third figure and referring to the fourth figure, in the embodiment, the test stage 106 is provided with a linear reciprocating mechanism 101, which is a crank slider structure, mainly comprising a turntable (for example, a counterweight) 1010, The sliding seat 1011 and the connecting rod 1012. The turntable 1010 and the slide base 1011 are connected to the link 1012 through the movable shafts 1013A/1013B, respectively. The component panel 103 and the accommodating device 100 are disposed on the sliding base 1011. When the linear reciprocating motion is performed, the turntable 1010 is rotated about the rotating shaft 1014 by the driving device (for example, a motor, not shown), and the sliding seat 1011 is driven by the connecting rod 1012, so that the sliding seat 1011 (and the tested thereon) The component is capable of linear reciprocating motion along the track 1015. In other words, with the crank slider structure, the circular motion of the turntable 1010 can be converted into a linear reciprocating motion of the slide base 1011, so that the device under test on the slide base 1011 is accelerated in both directions.

第五圖之透視圖顯示本發明另一實施例之直線往復測試模組10A。此實施例係結合翻轉機構於前一實施例之直線往復機構101中,使得受測元件可以在直線往復運動當中同時作角度的翻轉。翻轉機構之細節可參考本案申請人同時申請的另一專利申請案,題為「翻轉測試模組及其測試系統」。如第五圖所示,翻轉機構係設於滑動座1011上,其主要包含支架108、(第一/第二)翻轉機構101A/101B、(第一/第二)驅動裝置107A/107B,而容置於插槽100的受測元件藉由元件介面板103而固定於第二翻轉機構101B上。其中,第一翻轉機構101A受第一驅動裝置107A(例如步進馬達)之控制而得以繞第一軸向作翻轉。第二翻轉機構101B(設於第一翻轉機構101A內部)受第二驅動裝置107B(例如步進馬達)之控制而得以繞第二軸向作翻轉。The perspective view of the fifth diagram shows a linear reciprocating test module 10A according to another embodiment of the present invention. This embodiment incorporates the inverting mechanism in the linear reciprocating mechanism 101 of the previous embodiment so that the device under test can be simultaneously inverted in angle during linear reciprocating motion. For details of the flipping mechanism, refer to another patent application filed by the applicant at the same time, entitled "Flip Test Module and Test System". As shown in the fifth figure, the inverting mechanism is provided on the sliding base 1011, which mainly comprises a bracket 108, a (first/second) turning mechanism 101A/101B, and a (first/second) driving device 107A/107B, and The device under test that is housed in the slot 100 is fixed to the second inverting mechanism 101B by the component media panel 103. Wherein, the first inverting mechanism 101A is inverted by the first driving device 107A (for example, a stepping motor) around the first axial direction. The second inverting mechanism 101B (provided inside the first inverting mechanism 101A) is inverted about the second axial direction by the control of the second driving device 107B (for example, a stepping motor).

在本發明實施例中,於直線往復運動測試當中,更包含對受測元件予以加溫並維持於一預定溫度或溫度範圍。如前所述,由於本實施例將直線往復測試模組10予以模組化,使得受測元件不再如傳統測試系統般位於檢選分類機台12內,而是位於直線往復測試模組10內。為了提供高溫給受測元件,可以採用傳統的加熱平台來保持受測元件的溫度狀態。然而在本發明一較佳實施例中,則是在插槽100內裝設加熱裝置102,如第六A圖所示的透視圖,第六B圖則顯示第六A圖中沿剖面線6B-6B’的剖面視圖。在本實施例中,加熱裝置102設於受測元件19的下方,包含有加熱器102A(例如一或多條高阻材質之加熱線)。另外,於加熱器102A之間(或附近)設有溫度感測器102B(例如熱電偶(thermal couple)),用以感測溫度。In the embodiment of the present invention, in the linear reciprocating test, the component to be tested is further heated and maintained at a predetermined temperature or temperature range. As described above, since the linear reciprocating test module 10 is modularized in this embodiment, the device under test is no longer located in the sorting sorting machine 12 as in the conventional testing system, but in the linear reciprocating test module 10 Inside. In order to provide high temperature to the component under test, a conventional heating platform can be used to maintain the temperature state of the device under test. However, in a preferred embodiment of the present invention, the heating device 102 is installed in the slot 100, as shown in the perspective view of FIG. 6A, and the sixth B diagram shows the cross-sectional line 6B in the sixth A diagram. Sectional view of -6B'. In the present embodiment, the heating device 102 is disposed below the device under test 19 and includes a heater 102A (eg, one or more heater wires of high resistance material). Additionally, a temperature sensor 102B (eg, a thermal couple) is provided between (or near) the heater 102A for sensing temperature.

以上所述僅為本發明之較佳實施例而已,並非用以限定本發明之申請專利範圍;凡其它未脫離發明所揭示之精神下所完成之等效改變或修飾,均應包含在下述之申請專利範圍內。The above description is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; all other equivalent changes or modifications which are not departing from the spirit of the invention should be included in the following Within the scope of the patent application.

1...直線往復測試系統1. . . Linear reciprocating test system

10...直線往復測試模組10. . . Linear reciprocating test module

100...容置裝置(插槽)100. . . Storing device (slot)

101...直線往復機構101. . . Linear reciprocating mechanism

1010...轉盤(平衡錘)1010. . . Turntable (balance hammer)

1011...滑動座1011. . . Sliding seat

1012...連桿1012. . . link

1013A/1013B...活動軸1013A/1013B. . . Active axis

1014...轉軸1014. . . Rotating shaft

1015...軌道1015. . . track

101A...第一翻轉機構101A. . . First turning mechanism

101B...第二翻轉機構101B. . . Second turning mechanism

102...加熱裝置102. . . heating equipment

102A...加熱器102A. . . Heater

102B...溫度感測器(熱電偶)102B. . . Temperature sensor (thermocouple)

103...元件介面板(DIB)103. . . Component Interface Panel (DIB)

104...基座104. . . Pedestal

105...升降機構105. . . Lifting mechanism

106...測試載台106. . . Test stage

107A...第一驅動裝置107A. . . First drive

107B...第二驅動裝置107B. . . Second drive

108...支架108. . . support

109...對準栓109. . . Alignment bolt

12...檢選分類機台(handler)12. . . Check sorting machine (handler)

120...拾取/置放(pick/place)裝置120. . . Pick/place device

121...分類裝置121. . . Sorting device

14...測試機台(tester)14. . . Test machine

140...測試頭(test head)140. . . Test head

16...(第一)傳輸線16. . . (first) transmission line

18...(第二)傳輸線18. . . (second) transmission line

19...受測元件19. . . Measured component

第一圖之系統方塊圖顯示本發明實施例之直線往復測試系統。The system block diagram of the first diagram shows a linear reciprocating test system in accordance with an embodiment of the present invention.

第二圖之透視圖顯示本發明實施例之直線往復測試系統。The perspective view of the second diagram shows a linear reciprocating test system of an embodiment of the present invention.

第三圖之透視圖顯示第二圖的直線往復測試模組之細部結構。The perspective view of the third figure shows the detailed structure of the linear reciprocating test module of the second figure.

第四圖之透視圖顯示第三圖直線往復測試模組的局部更細部結構。The perspective view of the fourth figure shows a partial finer structure of the linear reciprocating test module of the third figure.

第五圖之透視圖顯示本發明另一實施例之直線往復測試模組。The perspective view of the fifth diagram shows a linear reciprocating test module according to another embodiment of the present invention.

第六A圖之透視圖顯示內裝設有加熱裝置的插槽。The perspective view of Figure 6A shows the slot in which the heating device is built.

第六B圖顯示第六A圖中沿剖面線6B-6B’的剖面視圖Figure 6B shows a cross-sectional view along section line 6B-6B' in Figure 6A

1...直線往復測試系統1. . . Linear reciprocating test system

10...直線往復測試模組10. . . Linear reciprocating test module

100...容置裝置(插槽)100. . . Storing device (slot)

101...直線往復機構101. . . Linear reciprocating mechanism

102...加熱裝置102. . . heating equipment

12...檢選分類機台(handler)12. . . Check sorting machine (handler)

120...拾取/置放(pick/place)裝置120. . . Pick/place device

121...分類裝置121. . . Sorting device

14...測試機台(tester)14. . . Test machine

140...測試頭(test head)140. . . Test head

16...傳輸線16. . . Transmission line

18...傳輸線18. . . Transmission line

Claims (21)

一種直線往復測試模組,包含:至少一容置裝置,用以暫時容置一受測元件;一直線往復機構,用以對該受測元件進行直線往復之運動;及一元件介面板(DIB),其提供一電氣介面用以讓該受測元件的訊號得以傳送至該直線往復測試模組的其餘部分。 A linear reciprocating test module comprises: at least one receiving device for temporarily accommodating a device under test; a linear reciprocating mechanism for linearly reciprocating movement of the device under test; and a component interface panel (DIB) It provides an electrical interface for transmitting the signal of the device under test to the rest of the linear reciprocating test module. 如申請專利範圍第1項所述之直線往復測試模組,其中上述之容置裝置包含一插槽。 The linear reciprocating test module of claim 1, wherein the receiving device comprises a slot. 如申請專利範圍第1項所述之直線往復測試模組,其中上述之受測元件為運動感測器(motion sensor)。 The linear reciprocating test module of claim 1, wherein the device under test is a motion sensor. 如申請專利範圍第1項所述之直線往復測試模組,其中上述之直線往復機構包含:一轉盤,其可受驅動而旋轉;一滑動座,可沿一軌道運動;一連桿,以活動軸分別和該轉盤及該滑動座連接;其中上述之轉盤於旋轉時,藉由該連桿而帶動該滑動座,使其得以沿著該軌道而作直線往復運動。 The linear reciprocating test module of claim 1, wherein the linear reciprocating mechanism comprises: a turntable that can be driven to rotate; a sliding seat that can move along an orbit; and a connecting rod to move The shaft is respectively connected with the turntable and the sliding seat; wherein when the rotating wheel is rotated, the sliding seat is driven by the connecting rod to linearly reciprocate along the track. 如申請專利範圍第4項所述之直線往復測試模組,其中上述之直線往復機構更包含:第一驅動裝置;及第一翻轉機構,設於該滑動座上,該第一翻轉機構受該第一驅動裝置之控制而使得該受測元件得以繞第一軸向翻轉。 The linear reciprocating test module of claim 4, wherein the linear reciprocating mechanism further comprises: a first driving device; and a first inverting mechanism disposed on the sliding seat, the first inverting mechanism is The control of the first drive device causes the device under test to be turned around the first axis. 如申請專利範圍第5項所述之直線往復測試模組,其中上述之直線往復機構更包含:第二驅動裝置;及第二翻轉機構,設於該滑動座上,該第二翻轉機構受該第二驅動裝置之控制而使得該受測元件得以繞第二軸向翻轉。 The linear reciprocating test module of claim 5, wherein the linear reciprocating mechanism further comprises: a second driving device; and a second inverting mechanism disposed on the sliding seat, the second inverting mechanism is Control of the second drive means causes the device under test to be flipped about the second axis. 如申請專利範圍第1項所述之直線往復測試模組,更包含一升降機構,用以升起或降下該直線往復機構。 The linear reciprocating test module of claim 1, further comprising a lifting mechanism for raising or lowering the linear reciprocating mechanism. 如申請專利範圍第1項所述之直線往復測試模組,更包含一加熱裝置,用以控制受測元件的溫度。 The linear reciprocating test module according to claim 1 further includes a heating device for controlling the temperature of the device under test. 如申請專利範圍第8項所述之直線往復測試模組,其中上述之加熱裝置設於該容置裝置內,並包含: 至少一加熱器;及一溫度感測器,用以感測溫度。 The linear reciprocating test module of claim 8, wherein the heating device is disposed in the accommodating device and includes: At least one heater; and a temperature sensor for sensing temperature. 一種直線往復測試系統,包含:一直線往復測試模組,其包含至少一容置裝置,用以暫時容置一受測元件,及一直線往復機構,用以對該受測元件進行直線往復之運動;一元件介面板(DIB),其提供一電氣介面用以讓該受測元件的訊號得以傳送至該直線往復測試模組的其餘部分;一檢選分類機台(handler),用以拾取及置放該受測元件至該直線往復測試模組;及一測試機台(tester),用以分別控制該直線往復測試模組及該檢選分類機台。 A linear reciprocating test system comprising: a linear reciprocating test module, comprising at least one receiving device for temporarily accommodating a device under test, and a linear reciprocating mechanism for linearly reciprocating movement of the device under test; a component interface panel (DIB) that provides an electrical interface for transmitting signals of the device under test to the rest of the linear reciprocating test module; a selection sorter for picking up and placing And placing the tested component to the linear reciprocating test module; and a tester for respectively controlling the linear reciprocating test module and the sorting and sorting machine. 如申請專利範圍第10項所述之直線往復測試系統,其中上述之檢選分類機台包含:一拾取/置放(pick/place)裝置,用以拾取及置放該受測元件至該直線往復測試模組以進行測試,並於測試完成後取回該受測元件;及一分類裝置,其根據測試結果將該受測元件加以分類。 The linear reciprocating test system of claim 10, wherein the above-mentioned sorting and sorting machine comprises: a pick/place device for picking up and placing the device under test to the straight line Reciprocating the test module for testing, and retrieving the device under test after the test is completed; and a sorting device that classifies the device under test according to the test result. 如申請專利範圍第10項所述之直線往復測試系統,其中上述之測試機台包含測試頭(test head)。 The linear reciprocating test system of claim 10, wherein the test machine comprises a test head. 如申請專利範圍第10項所述之直線往復測試系統,更包含:第一傳輸線,讓該測試機台可藉以控制該直線往復測試模組;及第二傳輸線,讓該測試機台可藉以控制該檢選分類機台。 The linear reciprocating test system according to claim 10, further comprising: a first transmission line, wherein the test machine can control the linear reciprocating test module; and a second transmission line, so that the test machine can be controlled The sorting machine is selected. 如申請專利範圍第10項所述之直線往復測試系統,其中上述之直線往復機構包含:一轉盤,其可受驅動而旋轉;一滑動座,可沿一軌道運動;一連桿,以活動軸分別和該轉盤及該滑動座連接;其中上述之轉盤於旋轉時,藉由該連桿而帶動該滑動座,使其得以沿著該軌道而作直線往復運動。 The linear reciprocating test system of claim 10, wherein the linear reciprocating mechanism comprises: a turntable that can be driven to rotate; a sliding seat movable along an orbit; and a connecting rod to the movable shaft And connecting to the turntable and the sliding seat respectively; wherein when the rotating wheel is rotated, the sliding seat is driven by the connecting rod to linearly reciprocate along the track. 如申請專利範圍第14項所述之直線往復測試系統,其中上述之直線往復機構更包含:第一驅動裝置;及 第一翻轉機構,設於該滑動座上,該第一翻轉機構受該第一驅動裝置之控制而使得該受測元件得以繞第一軸向翻轉。 The linear reciprocating test system of claim 14, wherein the linear reciprocating mechanism further comprises: a first driving device; The first turning mechanism is disposed on the sliding seat, and the first turning mechanism is controlled by the first driving device to cause the device under test to be turned around the first axial direction. 如申請專利範圍第15項所述之直線往復測試系統,其中上述之直線往復機構更包含:第二驅動裝置;及第二翻轉機構,設於該滑動座上,該第二翻轉機構受該第二驅動裝置之控制而使得該受測元件得以繞第二軸向翻轉。 The linear reciprocating test system of claim 15, wherein the linear reciprocating mechanism further comprises: a second driving device; and a second inverting mechanism disposed on the sliding seat, the second inverting mechanism being subjected to the The control of the two driving means causes the device under test to be turned around the second axis. 如申請專利範圍第10項所述之直線往復測試系統,更包含一升降機構,用以升起或降下該直線往復機構。 The linear reciprocating test system according to claim 10, further comprising a lifting mechanism for raising or lowering the linear reciprocating mechanism. 如申請專利範圍第10項所述之直線往復測試系統,更包含一加熱裝置,用以控制受測元件的溫度。 The linear reciprocating test system according to claim 10, further comprising a heating device for controlling the temperature of the device under test. 如申請專利範圍第18項所述之直線往復測試系統,其中上述之加熱裝置設於該容置裝置內,並包含:至少一加熱器;及一溫度感測器,用以感測溫度。 The linear reciprocating test system of claim 18, wherein the heating device is disposed in the receiving device and comprises: at least one heater; and a temperature sensor for sensing the temperature. 一種直線往復測試模組,包含: 一基座;一測試載台;一升降機構,設於該基座與該測試載台之間,用以升降該測試載台;一元件介面板(DIB),設於該測試載台上,該元件介面板上設有至少一插槽,用以暫時容置一受測元件,該元件介面板提供一電氣介面用以讓該受測元件的訊號得以傳送至該直線往復測試模組的其餘部分;一轉盤,其可受驅動而旋轉;一滑動座,可沿一軌道運動;及一連桿,以活動軸分別和該轉盤及該滑動座連接;其中上述之轉盤於旋轉時,藉由該連桿而帶動該滑動座,使其得以沿著該軌道而作直線往復運動。 A linear reciprocating test module comprising: a susceptor; a test cradle; a lifting mechanism disposed between the pedestal and the test gantry for lifting the test gantry; a component dielectric panel (DIB) disposed on the test gantry The component panel is provided with at least one slot for temporarily accommodating a device under test, and the component panel provides an electrical interface for transmitting the signal of the device under test to the rest of the linear reciprocating test module. a turntable that is driven to rotate; a slide seat movable along an orbit; and a link connected to the turntable and the slide base by a movable shaft; wherein the turntable is rotated by The link drives the sliding seat to linearly reciprocate along the track. 如申請專利範圍第20項所述之直線往復測試模組,更包含:第一翻轉機構及第一馬達,設於該滑動座上,其中該第一翻轉機構受該第一馬達之控制而使得該受測元件得以繞第一軸向作翻轉;及第二翻轉機構及第二馬達,設於該滑動座上,其中該第二翻轉機構受該第二馬達之控制而使得該受測元件得以繞第二軸向作翻轉。The linear reciprocating test module of claim 20, further comprising: a first inverting mechanism and a first motor disposed on the sliding seat, wherein the first inverting mechanism is controlled by the first motor The device under test is turned around the first axial direction; and the second inverting mechanism and the second motor are disposed on the sliding seat, wherein the second inverting mechanism is controlled by the second motor to enable the device under test to be Flip around the second axis.
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