TWI394950B - Rotary three-dimensional dynamic testing equipment - Google Patents

Description

Rotary 3D dynamic test equipment

The invention relates to a rotary three-dimensional dynamic testing device, in particular to a rotary three-dimensional dynamic testing device suitable for detecting a dynamic sensor.

In recent years, with the rapid development of MEMS, various miniaturized, high-performance and low-cost sensors have emerged, which has further enhanced the sensor from key components into the main components of innovative value, such as Apple's iPhone. Most of the three-axis accelerometers used in the new generation iPod and Nintendo's Wii are applied to the sensor using MEMS technology. The common dynamic sensor has an angular velocity sensor that can detect the rotation or vibration. Known as the Gyroscope.

In view of this, it is necessary to design a device capable of testing the three-axis motion signal of the dynamic sensor on a large scale to improve the test capacity and reduce the test cost.

The invention is a rotary three-dimensional dynamic testing device, comprising a rotating table, a three-dimensional turning device, a plurality of test sockets, a first wireless transmission module, and a main controller. The three-dimensional turning device comprises a fixing base, a turning frame and a carrying platform. The fixing base is disposed on the rotating table, and the rotating frame is pivoted on the fixed seat and rotates along a first axis, and the carrying platform is pivoted on the rotating frame and rotates along a second axis. The first axis and the second axis are perpendicular to each other. In addition, a plurality of test seats are arranged on the carrying platform. In addition, the first wireless transmission module is disposed on the three-dimensional inversion device and electrically coupled to the plurality of test sockets, and the first wireless transmission module is configured to transmit test information of the plurality of test sockets. The main controller includes a second wireless transmission module for receiving test information transmitted by the first wireless transmission module. Therefore, the present invention can provide three axial dynamic tests of a gyroscope, or other dynamic sensor, and further test its angular acceleration and centripetal acceleration.

Wherein, the carrying platform of the present invention may include a corresponding one of the first surface and a second surface, and the plurality of test seats may be respectively disposed on the first surface and the second surface. Accordingly, the present invention can perform double-sided testing, that is, the sensor to be tested can be tested on both sides of the carrying platform to increase the test scale and reduce the testing cost. Of course, it is not limited to double-sided testing, and the carrier can also be other geometric polygons to form a larger test scale.

Preferably, the three-dimensional turning device of the present invention further includes a controller and a power module. The controller can electrically connect the plurality of test sockets, the first wireless transmission module, and the power module. The controller is mainly used to control the plurality of test sockets and the first wireless transmission module, and includes information transmission control, test flow control, and even data transcoding. The power module is used to supply a plurality of test sockets and a power supply of the first wireless transmission module. Accordingly, the three-dimensional inversion device of the present invention can achieve full wireless, that is, without any wired electrical connection, which is more advantageous for the rotation of the rotary table during the detection process.

In addition, the main controller of the present invention can control the rotation of the flip frame relative to the fixed seat along the first axis, and control the rotation of the load table relative to the flip frame along the second axis. That is, the steering test of the flip frame and the carrying platform can also be reversed by the control of the main controller to achieve complete automation. The fixing seat of the three-dimensional inverting device may be a U-shaped fixing seat, and may of course be a frame-shaped fixing frame or other equivalent structure. The three-dimensional turning device further includes a rotating motor which can be assembled on the U-shaped fixing seat, and the rotating motor can be used to drive the turning frame to rotate along the first axis.

In addition, the inverting frame of the three-dimensional inverting device of the present invention may be a frame-shaped inverting frame, and may of course be a U-shaped inverting frame or other equivalent structure. Likewise, the three-dimensional turning device may further include another rotating motor that may be assembled on the frame flip frame, and another rotating motor may be used to drive the carrier to rotate along the second axis. Accordingly, the present invention can be fully automated flipped using a rotary motor for three dimensional testing.

Furthermore, the rotating table of the present invention can be provided with at least one centrifugal radius adjusting groove, and the fixing seat of the three-dimensional turning device can be slid and assembled and fixed in at least one centrifugal radius adjusting groove. Or, the rotating table of the present invention can be provided with a plurality of centrifugal radius adjusting holes, and the fixing seat of the three-dimensional inverting device can be assembled in one of the plurality of centrifugal radius adjusting holes. Accordingly, the present invention can adjust the distance parameter of the three-dimensional inverting device from the center of the circle by the centrifugal radius adjusting groove or the centrifugal radius adjusting hole, and can further change the centripetal force, the centripetal acceleration, or other detecting parameters.

Moreover, each test stand of the present invention may include a body, a rotating fastener, and a torsion spring, the torsion spring being coupled between the base body and the rotating fastener. That is, using the recovery spring force of the torsion spring, a fastening pre-force is provided to the rotating fastener to fasten the sensor to be tested in the seat body, so as to avoid the test stage during the testing process of the turning process or the rotating table rotation, thereby causing The sensor to be tested is dropped. In addition, the first wireless transmission module and the second wireless transmission module of the present invention may be a Bluetooth transmission module, a radio frequency transmission module, or other equivalent wireless transmission module.

Furthermore, the rotary three-dimensional dynamic testing apparatus of the present invention may further include a feeding device including a rotating wheel and at least one lifting and lowering head. At least one lifting and lowering head can be assembled on the rotating wheel and selectively moved to the upper side of the test seat. The lifting and sucking head is used for picking up the sensor to be tested in the test seat, and the rotating wheel will rotate to drive the lifting and sucking head to move. Eli detection is carried out.

Alternatively, the feeding device can further include a feeding platform and a robot arm, at least one lifting and lowering head can be selectively moved over the feeding platform and the robot arm can be selectively moved to the feeding platform and the plurality of test seats. between. Wherein, the lifting and sucking head is used for picking up the sensor to be tested on the feeding platform, and the robot arm takes out the sensor to be tested from the feeding platform and places it in the plurality of test sockets. Wherein, the feeding platform can be a rotating platform, a conveyor belt, or other equivalent device.

Still alternatively, the rotary three-dimensional dynamic testing apparatus of the present invention may further include a dispensing device. The dispensing device includes at least one wafer carrier tray and at least one pick and place device. The at least one pick-and-place device is selectively movable between the at least one wafer carrier and the plurality of test pads. That is, at least one pick-and-place device mainly takes the sensor to be tested out of the wafer carrier tray and places it in a plurality of test sockets. In addition, after the detection is completed, at least one pick-and-place device takes out the sensor to be tested from the plurality of test sockets and places them in the wafer carrier tray. Accordingly, the rotary three-dimensional dynamic testing device of the present invention can use different feeding devices or dispensing devices according to actual needs to achieve the best test capacity.

1 and FIG. 2, FIG. 1 is a perspective view of an entire apparatus according to a first embodiment of the present invention, and FIG. 2 is a schematic view of the three-dimensional inverting apparatus according to the first embodiment of the present invention. The rotary three-dimensional dynamic test apparatus shown in FIG. 1 includes a rotary table 2, a three-dimensional inversion device 3, a main controller 5, a test head 6, and a dispensing device 7. The rotary table 2 is disposed on the test head 6. The test head 6 includes a drive motor 61 for driving the rotary table 2 to rotate. The dispensing device 7 is disposed above the three-dimensional inverting device 3. The dispensing device 7 is mainly used for feeding and screening and sorting after the test is completed.

The three-dimensional turning device 3 shown in FIG. 2 includes a fixing base 31, a turning frame 32, and a carrying table 33. The fixing base 31 is assembled on the rotating table 2, and the rotating frame 32 is pivotally mounted on the fixing base 31 and rotatable along a first axis X. The carrying platform 33 is pivotally mounted on the flip frame 32 and rotatable along a second axis Y. Moreover, the first axis X and the second axis Y are perpendicular to each other, that is, by the relative motion between the two orthogonal vertical axes X and the second axis Y, to form a three-dimensional relationship. Flip test. The fixing base 31 of the embodiment is a U-shaped fixing base 310, and the rotating frame 32 is a frame-shaped turning frame 320. Further, a rotary motor 34, 35 is disposed on the U-shaped mount 310 and the frame flip frame 320, respectively. However, the rotary motors 34, 35 may be servo motors that are primarily used to assist the frame flip frame 320 and the carrier table 33 to flip.

In addition, the rotating table 2 of the embodiment is provided with two centrifugal radius adjusting grooves 21 and a plurality of centrifugal radius adjusting holes 22, and the fixing seat 31 of the three-dimensional inverting device 3 can be slid and fixed in the centrifugal radius adjusting groove 21, or The group is disposed in one of the plurality of centrifugal radius adjusting holes 22. Accordingly, the centripetal force, the centripetal acceleration, or other detection parameters can be further changed by adjusting the distance parameter of the three-dimensional inverting device 3 from the center O, that is, the radius r, by the centrifugal radius adjusting groove 21 or the centrifugal radius adjusting hole 22.

In detail, according to the physical formula of the uniform circular motion, that is, as shown in Equation 1. When an object moves around a circular path at a certain rate, although the velocity of the object remains fixed, the direction of the velocity is always changing, so the particle is actually moving in a variable acceleration, and the direction of the acceleration is always directed to the circular motion. The center of the trajectory is called the centripetal acceleration a. The relationship between the magnitude a of the acceleration and the velocity v and the radius r of the circumference is:

According to Newton's second law of motion, if the object has acceleration, it must have a centripetal force acting on the object's mass point. The direction of the centripetal force F is the same as the direction of the centripetal acceleration a. Since the force is always directed to the center of the circular motion, it is called Centripetal Force. The relationship between the magnitude of the centripetal force F and the mass m, velocity v (=rω), radius of gyration r, and angular velocity ω of the moving object is as shown in the following Equation 2:

Therefore, in the present embodiment, the magnitudes of the centripetal acceleration a and the centripetal force F can be changed by changing the radius r of the three-dimensional inverting device 3 from the center O. Accordingly, the embodiment is more flexible, and the detection parameters can be changed according to actual needs.

In addition, FIG. 2 also shows that the carrying platform 33 of the present embodiment includes a corresponding first surface 331 and a second surface 332. The plurality of test sockets 4 are disposed on the first surface 331 and the second surface 332, respectively. Accordingly, the present embodiment can perform double-sided testing to increase the test scale and reduce the test cost. Of course, not limited to double-sided testing, the carrier 33 can also be other geometric polygons to expand the scale of the test.

Referring to FIG. 3 again, FIG. 3 is a system architecture diagram of the first embodiment of the present invention. The figure shows a controller 8 and a power module 9 disposed on the fixed base 31, and the controller 8 is electrically connected to the test seat 4, the first wireless transmission module 41, the rotary motor 34, 35, and the power module. 9. The power module 9 is configured to supply the controller 8, the plurality of test sockets 4, the rotary motors 34, 35, and the first wireless transmission module 41. In addition to controlling the information transmission control of the first wireless transmission module 41, the test flow control, the encoding and transcoding of the data, and the like, the controller 8 can also control the rotation motor 34, 35 to perform the flipping. That is, the main controller 5 controls the flip frame 32 to rotate along the first axis X with respect to the fixed seat 31, and the control stage 33 rotates relative to the flip frame 32 along the second axis Y.

Furthermore, a first wireless transmission module 41 is shown in the figure, which is disposed on the three-dimensional inversion device 3 and electrically coupled to the plurality of test sockets 4. The first wireless transmission module 41 is configured to transmit the test information Ti of the plurality of test sockets 4, which may be the detection result. In addition, the main controller 5 includes a second wireless transmission module 51 for receiving the test information Ti transmitted by the first wireless transmission module 41. Further, the main controller 5 of the embodiment can control all the detections on the three-dimensional inverting device 3 through the first wireless transmission module 41 and the second wireless transmission module 51, including the inversion, the testing process, and the test information. Transmission of Ti, etc. The power module 9 is responsible for the supply of all power sources on the three-dimensional turning device 3. Therefore, the present embodiment can achieve complete wirelessization, which is more advantageous for the rotation detection to proceed. The first wireless transmission module 41 and the second wireless transmission module 51 of the embodiment are respectively a Bluetooth transmission module, and of course, it may also be a radio frequency transmission module or other equivalent wireless transmission module. .

Please refer to FIG. 4. FIG. 4 is an exploded view of the test stand according to the first embodiment of the present invention. The figure shows that a plurality of test sockets 4 are disposed on the carrying platform 33, and each of the test sockets 4 houses a sensor 42 to be tested. Each test stand 4 includes a body 40, a rotating fastener 43, and a torsion spring 44. The torsion spring 44 is coupled between the base 40 and the rotating fastener 43. Further, the rotating fastener 43 is used to press and fix the sensor 42 to be tested in the base 40, and the torsion spring 44 provides elastic force to rotate the rotating fastener 43 to restore the fixed sensor to be tested. 42. In order to avoid the loading stage 33 during the turning process or the rotating table 2 during the rotation, the sensor 42 to be tested is dropped.

Referring to FIG. 5 and FIG. 6, FIG. 5 is a perspective view of the flip frame according to the first embodiment of the present invention rotating along the first axis. Figure 6 is a perspective view of the stage of the first embodiment of the present invention rotated along a second axis. A test in which the flip frame 32 is rotated 90 degrees along the first axis X relative to the mount 31 to produce a second dimension is shown in FIG. In addition, FIG. 6 shows that after the flip frame 32 is rotated 90 degrees along the first axis X, the carrier 33 is rotated 90 degrees along the second axis Y with respect to the flip frame 32, so that a third dimension test can be produced. Based on this, the test specifications of the complete three dimensions can be achieved.

7a is a schematic view of another preferred embodiment of the rotary table of the present invention, and FIG. 7b is a schematic view of still another preferred embodiment of the rotary table of the present invention. The main difference between the embodiment shown in FIG. 7a and the first embodiment is that the present embodiment is provided with a set of three-dimensional inverting devices 3 at 180 degrees, so that there are two sets of three-dimensional inverting devices 3; and FIG. 7b shows The embodiment is provided with a set of three-dimensional inverting devices 3 at every 90 degrees, so that there are four sets of three-dimensional inverting devices 3. According to the embodiment shown in FIG. 7a and FIG. 7b, in addition to expanding the test specifications, the number of sensors 42 to be tested is increased; more importantly, the weight balance of the operation of the rotary table 2 can be maintained, so Extend the life of the equipment and reduce the errors caused by material fatigue.

Please refer to FIG. 8. FIG. 8 is a schematic view of a feeding device according to a second embodiment of the present invention. In the embodiment, the rotary three-dimensional dynamic testing device further includes a feeding device 1 having a rotating wheel 10, a fixed wheel 12, a plurality of pneumatic cylinders 13, and a plurality of sets of lifting and sucking heads 11. The lifting and lowering suction head 11 is disposed on the rotating wheel 10, and is selectively moved to the upper side of the test seat 4 on the three-dimensional inverting device 3 or other position by the driving of the rotating wheel 10. The lift suction head 11 is a vacuum suction head in the embodiment, which can take the sensor 42 to be tested in the test seat 4 on the three-dimensional inverting device 3 or other positions. In addition, a plurality of pneumatic cylinders 13 are further disposed on the fixed wheel 12 shown in the figure. When the lifting and lowering suction head 11 is moved to a predetermined position, the pneumatic cylinder 13 drives the lifting and lowering suction head 11 to perform lifting and lowering operations.

Referring to FIG. 9, FIG. 9 is a schematic diagram of the peripheral device of the feeding device according to the second embodiment of the present invention, that is, the overall device of the feeding device 1 shown in FIG. The feeding device of FIG. 9 further includes a vibrating plate 16, a photographic module 17, a positioning module 18, and a steering module 19. The vibrating plate 16 includes a spiral guide 160, a feed zone 161, a photo-sensing element 162, a blow pipe 163, and a feed chute 164. The vibrating plate 16 is further connected with a vibrating mechanism (not shown) to cause the sensor 42 to be tested to vibrate from the feeding zone 161 into the vibrating plate 16. The vibrating plate 16 is a disc-shaped structure with a central protrusion, so that the sensor 42 to be tested falls behind, and then falls to the circumference of the vibrating plate 16.

At the same time, the vibrating plate 16 causes the sensor 42 to be tested to climb up with the spiral guide 160 of the circumferential side wall by the vibration of the vibrating mechanism. The photo-sensing element 162 is passed through the photo-sensing element 162. The photo-inductance sensor 162 senses the front and back of the sensor 42 to be tested by the difference in reflectivity between the front and back sides of the sensor 42 to be tested. If the front and back sides are wrong, the blow pipe 163 will blow it into the vibrating plate 16, and repeat the above steps to continue the feeding. If it is the correct front and back, the sensor 42 to be tested continues to feed into the feed slot 164.

Then, the sensor 42 to be tested in the feeding trough 164 is pushed forward, and the lifting and lowering head 11 is sucked by the rotating wheel 12 after the suction sensor 12 is sucked at the end of the feeding trough 164, and then moved to On the platform of the visual inspection area. In this area, the photographic module 17 is mainly used to check whether the printed characters of the sensor 42 to be tested are correct or flawless. If there is an error or flaw, the lifting and lowering head 11 can send the sensor 42 to be tested to the recovery pipe 20. The recovery tube 20 can be disposed between the modules to collect the problematic sensor 42 to be tested.

Please refer to FIG. 10 again. FIG. 10 is a schematic diagram of a positioning module of the feeding device according to the second embodiment of the present invention, that is, an enlarged view of the positioning module 18 of FIG. After the appearance of the sensor 42 to be tested is printed, the positioning module 18 is entered, which is mainly used to measure the orientation and position of the sensor 42. As shown in FIG. 11, the positioning module 18 includes four wedge blocks 181. When the lifting and lowering head 11 sucks the sensor 42 to be tested and placed in the central area surrounded by the four wedge blocks 181, the four wedge blocks 181 are used to zero the XY plane angle or the position offset caused by the previous transmission process. The sensor 42 to be tested is accurately positioned and then sent to the next module.

Referring to FIG. 11, FIG. 11 is a schematic diagram of a steering module of a feeding device according to a second embodiment of the present invention, that is, an enlarged view of the steering module 19 of FIG. When the sensor 42 to be tested is positioned by the positioning module 18, it enters the steering module 19, which is mainly used to turn the angle of the sensor 42 to be tested. As shown in FIG. 12, the steering module 19 includes a rotating platform 191, a blowing pipe 192, and a recovery pipe 193. When the inspection device of the camera module 17 detects that the XY plane angle of the sensor 42 to be tested is incorrect, the lifting and lowering head 11 can suck the sensor 42 to be tested on the rotating platform 191, and clockwise according to the actual situation. Or 90 degrees counterclockwise, or 180 degrees of rotation, in order to facilitate the subsequent sensor 42 to perform a rotating three-dimensional dynamic test equipment.

In addition, the steering module 19 of the present embodiment can also send the problematic sensor 42 to be sent to the recovery pipe 193 for blowing by the blowing pipe 192. Accordingly, the rotary three-dimensional dynamic testing device of the present invention can flexibly increase or decrease the above-mentioned modules, change the order thereof, or add other detecting modules according to actual needs of the user, so as to meet various test scales and achieve optimization. Dynamic test program.

Please refer to FIG. 12, which is a schematic view of a feeding device according to a third embodiment of the present invention. The rotary three-dimensional dynamic test apparatus has the same feeding device 1 as the first embodiment, and the main difference is that the feeding device 1 further includes a feeding platform 14 and a robot arm 15. The feeding platform 14 can be a rotating platform or a conveyor belt, and is mainly used for supplying the sensor 42 to be tested transmitted from the lifting and lowering head 11 to the robot arm 15. Further, the lift suction head 11 places the wafer 42 to be tested on one side, and the feed platform 14 moves to the other side by means of a rotating or conveyor belt. In addition, the robot arm 15 is selectively moved between the feeding platform 14 and the test socket 4 on the three-dimensional inverting device 3, and the sensors 42 to be tested are sucked from the feeding platform 14 one by one onto the three-dimensional inverting device 3. Inside the test seat 4. When the sensor 42 to be tested is completely placed, the rotary three-dimensional dynamic test device can be started.

Referring to FIG. 13, FIG. 13 is a schematic diagram of a feeding device according to a fourth embodiment of the present invention. The rotating three-dimensional dynamic testing device of the present embodiment has a feeding device 1 which is substantially the same as the foregoing embodiment, and the main difference is that it does not have A rotating table is provided, and a test stand 4 can be disposed on the three-dimensional inverting device 3. However, the embodiment is not limited thereto, and the rotating three-dimensional dynamic testing device of the embodiment can also be provided with multiple sets of separate test seats 4 for continuous testing. A sensor 42 to be tested to increase the throughput of the test.

Referring to FIG. 14 and FIG. 15, FIG. 14 is a schematic view of a dispensing device according to a fifth embodiment of the present invention, and FIG. 15 is a plan view showing the interior of the dispensing device according to the fifth embodiment of the present invention. In the present embodiment, the dispensing device 7 is substantially the same as the previous embodiment, the main difference is that the three-dimensional inverting device 3 is directly integrated into the dispensing device 7 (Handler), and the dispensing device 7 does not have the rotating table 2 inside, Save space and other unnecessary handling methods. Among them, the dispensing device 7 shown in the figure includes four wafer carrying trays 71 (tray) and two pick-and-place devices 72. The pick and place device 72 is selectively movable between the wafer carrier tray 71 and the test socket 4. The four wafer carrier trays 71 include two feeding trays 711 and two discharging trays 712. The feed carrier 711 carries the untested sensor 42 to be tested, and the discharge carrier 712 carries the tested sensor 42 after testing.

In this embodiment, the discharge carrier tray 712 can include a qualified and unqualified discharge carrier tray 712 for distinguishing the tested qualified sensor and the failed sensor. Similarly, the present embodiment includes two sets of pick-and-place devices 72, which are respectively a feed pick-and-place device 721 and a discharge pick-and-place device 722. The feeding and picking device 721 is responsible for carrying the sensor 42 to be tested on the feeding carrier 711 to the plurality of test sockets 4 on the three-dimensional inverting device 3. After the test is completed, the discharge pick-and-place device 722 loads the sensors on the plurality of test sockets 4 into the discharge carrier tray 712. Accordingly, the rotary three-dimensional dynamic testing device of the present invention can use different feeding devices or dispensing devices according to actual needs to achieve the best test capacity. The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

1. . . Feeding device

10. . . Rotating wheel

11. . . Lifting suction head

12. . . Fixed wheel

13. . . Pneumatic cylinder

14. . . Feeding platform

15. . . Robotic arm

16. . . Vibrating plate

160. . . Spiral guide

161. . . Feeding area

162. . . Photoelectric sensing component

163. . . Blowing tube

164. . . Feed trough

17. . . Photography module

18. . . Positioning module

181. . . Wedge block

19. . . Steering module

191. . . Rotating platform

192. . . Blowing tube

193,20. . . Recovery tube

2. . . Rotary table

twenty one. . . Centrifugal radius adjustment slot

twenty two. . . Centrifugal radius adjustment hole

3. . . Three-dimensional turning device

31. . . Fixed seat

32. . . Flip frame

33. . . Carrying platform

310. . . U-shaped mount

320. . . Frame flip frame

331. . . First surface

332. . . Second surface

34,35. . . Rotary motor

4. . . Test stand

40. . . Seat

41. . . First wireless transmission module

42. . . Sensor to be tested

43. . . Rotating fastener

44. . . Torsion spring

5. . . main controller

51. . . Second wireless transmission module

6. . . Test head

61. . . Drive motor

7. . . Dispensing device

71. . . Wafer carrier

711. . . Feed carrier

712. . . Discharge carrier

72. . . Pick and place device

721. . . Feed pick-and-place device

722. . . Discharge pick-and-place device

8. . . Controller

9. . . Power module

r. . . radius

Ti. . . Test information

O. . . Center of mind

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of an entire apparatus of a first embodiment of the present invention.

2 is a schematic view showing the three-dimensional inverting device of the first embodiment of the present invention disposed on a rotary table.

3 is a system architecture diagram of a first embodiment of the present invention.

Figure 4 is an exploded view of the test stand of the first embodiment of the present invention disposed on a carrier.

Figure 5 is a perspective view of the flip frame of the first embodiment of the present invention rotated along a first axis.

Figure 6 is a perspective view of the stage of the first embodiment of the present invention rotated along a second axis.

Figure 7a is a schematic illustration of another preferred embodiment of the rotary table of the present invention.

Figure 7b is a schematic illustration of yet another preferred embodiment of the rotary table of the present invention.

Figure 8 is a schematic illustration of a feeding device in accordance with a second embodiment of the present invention.

Figure 9 is a schematic view of the peripheral device of the feeding device of the second embodiment of the present invention.

Figure 10 is a schematic view of a positioning module of a feeding device according to a second embodiment of the present invention.

Figure 11 is a schematic view of a steering module of a feeding device according to a second embodiment of the present invention.

Figure 12 is a schematic illustration of a feeding device in accordance with a third embodiment of the present invention.

Figure 13 is a schematic view of a feeding device of a fourth embodiment of the present invention.

Figure 14 is a schematic illustration of a dispensing device in accordance with a fifth embodiment of the present invention.

Figure 15 is a plan view showing the interior of a dispensing device according to a fifth embodiment of the present invention.

2. . . Rotary table

3. . . Three-dimensional turning device

5. . . main controller

51. . . Second wireless transmission module

6. . . Test head

61. . . Drive motor

7. . . Dispensing device

Claims (13)

A rotary three-dimensional dynamic testing device includes: a rotating table; a three-dimensional turning device comprising a fixing base, a turning frame, and a carrying platform, the fixing seat is set on the rotating table, and the rotating frame is The first shaft and the second shaft are perpendicular to each other; the first shaft and the second shaft are perpendicular to each other; and the first shaft and the second shaft are perpendicular to each other; a plurality of test sockets are disposed on the carrier; a first wireless transmission module is disposed on the three-dimensional inversion device and electrically coupled to the plurality of test sockets, wherein the first wireless transmission module is configured to transmit the The test information of the plurality of test sockets; and a main controller includes a second wireless transmission module for receiving the test information transmitted by the first wireless transmission module. The rotary three-dimensional dynamic testing device of claim 1, wherein the carrying platform comprises a corresponding one of the first surface and a second surface, and the plurality of test seats are respectively disposed on the first surface. And the second surface. The rotary three-dimensional dynamic testing device of claim 1, wherein the three-dimensional inverting device further comprises a controller and a power module, the controller electrically connecting the plurality of test sockets, the first wireless transmission Module, and the power module. The rotary three-dimensional dynamic test apparatus of claim 1, wherein the main controller controls the flip frame to rotate along the first axis X with respect to the mount, the main controller controls the mount relative to The flip frame rotates along the second axis Y. The rotary three-axis dynamic testing device of claim 1, wherein the three-dimensional turning device further comprises a rotating motor, which is assembled on the fixing base, and the rotating motor is used to drive the rotating frame. Rotate along the first axis. The rotary three-axis dynamic testing device of claim 1, wherein the three-dimensional turning device further comprises another rotating motor, which is assembled on the rotating frame, and the other rotating motor is used for The carrier is driven to rotate along the second axis. The rotary three-dimensional dynamic testing device according to claim 1, wherein the rotating table is provided with at least one centrifugal radius adjusting groove, and the fixing seat of the three-dimensional turning device is slidably assembled and fixed to the at least one The centrifugal radius is adjusted in the groove. The rotary three-dimensional dynamic testing device according to claim 1, wherein the rotating table is provided with a plurality of centrifugal radius adjusting holes, and the fixed seat of the three-dimensional turning device is disposed in one of the plurality of centrifugal radius adjusting holes. . The rotary triaxial dynamic testing device of claim 1, wherein each test socket comprises a body, a rotating fastener, and a torsion spring, the torsion spring is coupled to the base body, and the Between the rotating fasteners. The rotary three-dimensional dynamic test device of claim 1, wherein the first wireless transmission module and the second wireless transmission module are respectively a Bluetooth transmission module. The rotary three-axis dynamic testing device of claim 1, further comprising a feeding device comprising a rotating wheel and at least one lifting and lowering head, the at least one lifting and lowering head group It is disposed on the rotating wheel and selectively moves above the plurality of test seats. The rotary three-axis dynamic testing device according to claim 1, further comprising a feeding device comprising a rotating wheel, at least one lifting suction head, a feeding platform, and a robot arm The at least one lifting suction head is assembled on the rotating wheel and selectively moves over the feeding platform, and the robot arm is selectively moved between the feeding platform and the plurality of test seats. The rotary triaxial dynamic testing device of claim 1, further comprising a dispensing device, the dispensing device comprising at least one wafer carrier tray, and at least one pick and place device, the at least one pick and place device The device is selectively moved between the at least one wafer carrier and the plurality of test pads.