201118359 六、發明說明： 【發明所屬之技術領域】 本啦明係關於檢測透鏡等 ,寻九于凡件之偏蕊之量的偏芯；ΙΑ 測裝置及偏蕊檢測方 的偏㈣檢 Ά目… 毛明Χ ’本發明係關於成為偏 .故檢測裝置檢測偏姑 吾 ^ , 偏μ之里之對象的光學元件、光學元件陳 列、及光學元件單元之發明。 【先前技術】 首先’於本發明中，所謂「偏蕊」，係指單 件中之光軸與機械軸的不一 予 「 尤其，於本發明中，所謂 透鏡之偏蕊」’係指於i個透鏡之表面背面兩面間所產： 之相對於未產生偏蕊的情形時之理想之光 軸之位置偏移。 夏丨/T、之先 面透鏡之^數係藉由使用模具之轉印而得到大量生 產。對於該等透鏡之製造公差 差之要求車父威格。針對作為該 θ U《重要因數之-的偏蕊，需要準確地評估偏蕊之 置之測定裝置。 於先前之偏蕊測定裝置及偏蕊測定方法中，首先，利用 眾所周知之聚焦技術調節自光源所出射之測定用的光，使 該光於成為測定對象之光學元件(被檢測物)之光軸上聚 光。 於上述光學元件之光軸上聚光之光於該光學元件之表面 被反射、或者透過該光學元件。 上述反射或透過之光被引導至偏蕊測定部（測定面”而 於该偏蕊測定部之表面上形成光點（亦稱為聚光點卜所謂 149829.doc 201118359 、'”係扣將較細之光照射於某一面上時，於該照射部分 所顯現之區域，即光之強度較其他部分更高之區域。 八、、:後於上述偏說'測定裝置及偏蕊測定方法中，使用光 偵測器等光位置檢測元件檢測偏蕊測定部之表面上所形成 之光點的位置。 ’、後求出纟二核測之上述光點之位置的相對於基準位置 (未產生光予元件之偏翁之情形時形成有光點的位置）之位 f偏移量，根據該位置偏移量’於上述偏蕊測定裝置及偏 蕊測定方&中測定上豸光學元件之偏蕊之量。 再者’使於上述光學元件之光軸上聚光之光在該光學元 件之表面反射的偏蕊測定之方法被稱為反射偏蕊測定。 又’:吏於上述光學元件之光軸上聚光之光透過該光學元件 的偏蕊測定之方法被稱為透過偏蕊測定。先前，於大部分 作為具有代表性之光學元件之透鏡的偏蕊測定中，實施反 射偏蕊測定或透過偏蕊測定。 除此以外’作為偏蕊敎之方法’於專利文獻^令揭示 有如下透鏡之偏蕊敎方法及敎裝置，即利用干涉儀觀 察透鏡之第1面並將干涉條紋調整成單色，另一方面，重 第2面及’或平面部照射雷射光，測定被第2面及/或平面:: 所反射之雷射光於透鏡旋轉時之振動量。 於專利文獻2中’揭示有如下之偏蕊量之測定方法，即 錯由使用纟準點之三維位置之測定結果測定透鏡之 面兩面的形狀，可精密地測定透鏡之偏蕊量。 於專利文獻3中，揭示有一種於透鏡之有效直徑之外部 I49829.doc 201118359 擠壓成形有環狀槽或突起的玻璃光學元件。又，專利文獻 3係藉由下述數式（1)求出玻璃光學元件之傾斜偏蕊之角度 Θ1 〇 θ 1 ^cos"1 b 1 /a 1 * * *( 1) ' 其中，al為玻璃光學元件之半徑，bl為表面形狀因偏贫 • 而變成橢圓形之該玻璃光學元件之短軸的長度。 [先前技術文獻] [專利文獻] [專利文獻1]曰本公開專利公報「日本專利特開2〇〇4_ 279075號公報（2004年10月7日公開）」 [專利文獻2]國際公開編號WO 2007/018118 Al(2007年2 月1 5曰公開） [專利文獻3]曰本公開專利公報「曰本專利特開平4_ 33〇4〇3號公報（1992年11月18日公開）」 【發明内容】 [發明所欲解決之問題] 但是’近年來’於具備光學元件之模組(具備透鏡之相 機模組等)之製造方法中，所謂晶圓級透鏡製程受到嗎 曰曰111級透鏡製程係 一 。珂於1之夕個光学 凡件—體地成形於包含樹脂之1片 板上而成之光學元件陣 裝"他構件後，對每i個模 。 紐。 稞、、且進仃早片化來製造模 、'於该晶圓級透鏡製程中，由於可_值制办 m # 田於T併製造多個模組， J待模組之製造時間之大幅縮短。 I49829.doc 201118359 此處’由於上述先前技術之各偏蕊檢測裝置均為使檢測 用之光於㈣s件之特定區域聚光的構成因此基本上， 每當使用1台裝置進行1次檢測時，只可對-個光學元件實 施檢測。 疋刖筏術之各偏蕊檢測裝置之任 一 w 私丑<一 者，檢測構成上述光學元件陣列之夂 1卞1平幻之各先學疋件之偏蕊的量 之情形時，按照以下之（Α)或（Β)之要領實施檢測。 (Α)將構成上述光學元件陣列之各光學元件單片化，對 每1個光學元件進行檢測。 (Β)準備台數與構成上述光學元件陣列之光學元件之個 數相同的偏蕊檢測裝置、或相當於其的裝置，不將構成光 學元件陣列之各光學元件單片化，而一併檢測所有光學元 件。 於按照（Α)之要領實施檢測之情形時，會產生如下之問 題，即由於在將其他構件安裝於光學元件陣列前之階段將 各光學元件單片化’因此難以藉由上述晶圓級透鏡製程一 併製造多個模組。又，於此情形時，會產生如下之問題， 即由於依序對各光學元件丨個丨個地進行檢測，因此檢測時 間變長。 於照（Β)之要領實施檢測之情形時’會產生如下之問 題’即越使多個光學元件成形於光學元件陣列上，用於檢 測偏蕊之量之裝置構成越複雜且大規模。 上述各問題可以說係亦可於專利文獻1中所揭示之透鏡 之偏蕊檢測裝置、專利文獻2中所揭示之實施偏蕊量之檢 149829.doc 201118359 測方法的裝置、冷& * a ^ 進而先前之偏蕊檢測裝置（實施上述反射 偏蕊檢測之裝署；^ @ , 教1及貫靶上述透過偏蕊檢測之裝置）之任一 種裝置中產生的問題。 又，於成為檢測對象之光學元件為1個之情形時，上述 先別技術之各偏蕊檢測裝置之任一者亦分別會產生以下之 問題。 文獻1中所揭示之透鏡之偏蕊檢測裝置會產生如下 之問題’即檢測對象之透鏡中之至少一面必需為非球面， 無法應用於兩面為球面之透鏡之偏蕊檢測。 於專利文獻2中所揭示之實施偏蕊量之檢測方法的裝置 中s產生如下之問題，即由於必需檢測基準點之三維位 置”透鏡之表面者面兩面之形狀’因此偏蕊檢測較煩雜。 :先前之偏蕊檢測裝置(實施上述反射偏蕊檢測之裝置 及實施上述透過偏蕊檢測之裝置）中，當檢測光轴附近較 平坦之光學元件之偏蕊的量時’會產生如下之問題，即由 於所形成之光點並不鮮明’因此檢測有可能變得困難。 專利文獻3原本並非為對經成形之透鏡實施利用裝置之 偏蕊之量的檢測者。 本發明係繁於上述胡i 上述問喊開發而成之發明，其目的在於4 供一種偏蕊檢測裝置及偏蕊檢測方法，該偏蕊檢測裝置. 偏蕊檢測方法無需將構成光學元件陣列之各光學元件 ^ 化’即可-併檢測所有光學元件，並且可藉由簡單且小力 模之裝置構成而實現。 又，本發明之另一 目的在於提供一種偏蕊檢測裝置及偏 149829.doc 201118359 蕊檢測方法，該偏蕊檢測裝置及偏蕊檢測方法可應用於兩 面為球面之透鏡之偏蕊檢測，可降低偏蕊檢測之煩雜性， 進而於檢測光軸附近較平坦之光學元件之偏蕊的量之情形 時，可降低檢測變得困難之可能性。 的在於提供藉由本發明之偏蕊檢 而易於檢測偏蕊之量之光學元 進而’本發明之又一目 測裝置及偏蕊檢測方法， 件、光學元件陣列、及光學元件單元。 [解決問題之技術手段] 為解決上述問題，本發明之偏蕊檢測裝置之特徵在於： 其係可使用入射至光學元件<光透過該光學％件之透過 光，檢測料學元件之偏蕊之量者，纟包括作為物體側遠 心光學系統或兩側遠心光學系統之元件成像光學系統上 述元件成像光學系統係藉由所入射之上述透過光，使上述 光學元件之兩面分別成像者，且該偏蕊檢測裝置係可根據 使上述光學元件之兩面分別成像而得之第丨及第2透過像之 對比度’檢測該光學元件之偏蕊之量者。 所謂物體側遠心光學系統，係指可認為入射光瞳處於無 限遠之光學系統。物體側遠心光學系統具有如下之特性， 即由於自被攝體（成為檢測對象之光學元件）之任意處均取 入平行於光軸之光束，因此即使至被攝體為止之距離變 化，像之形狀亦不會變化。 所谓兩側遠心光學系統，係指可認為入射光瞳及出射光 曈處於無限遠之光學系統。兩側遠心光學系統除具有上述 物體側遠心光學系統之特性以外，亦具有如下之特性，即 149829.doc 201118359 由於出射之光平行於光軸，因此即使像面相對於光軸方向 略微移動’主光線橫穿像面之位置亦幾乎不變，且即使像 產生聚焦偏移，亦不會產生形狀之變化。又，兩側遠心光 學系統具有即使像面相對於光軸略微傾斜，亦不會產生形 狀之變化之特性。 本申請案中之「透過像之對比度」係指不僅包含透過像 之明暗，亦包含透過像之形狀、透過像之位置、及透過像 之尺寸專的伴隨透過像之形成而變化之光量的分佈整體。 根據上述構成，本偏蕊檢測裝置使透過光入射至元件成 像光學系統，該元件成像光學系統出射該透過光，藉此進 行成為檢測對象之光學元件之成像。於透過光中，存在可 認為係自光學元件中之一面所出射之光線與可認為係自該 光學元件中之另一面所出射之光線之彼此不同的光線。因 此’於上述光學元件之成像中，出現使該光學元件之兩面 分別成像而得之第1及第2透過像。第1及第2透過像係透過 光穿過作為物體側遠心光學系統或兩側遠心光學系統之元 件成像光學系統而形成之像，因此分別變成與自上面觀察 光學元件中之相對應之一面及另一面所得的形狀大致相同 之形狀。除此以外，於垂直於元件成像光學系統之光軸之 方向相關的第1及第2透過像之相互之位置關係，係變成與 在該方向相關之光學元件中之相對應的一面與另一面之相 互之位置關係大致相同。因此，根據第1及第2透過像之對 比度’可知光學元件中之相對應之一面與另一面的形狀及 相互之位置關係，根據該等，可知光學元件之兩面間之位 149829.doc 201118359 置偏移’因此同樣可知光學元件之偏蕊之量。 ^ _述構成，本偏.热檢測裝置係無需使檢測用之光於 旦件之特定區域中聚光，即可檢測該光學元件之偏蕊 ^ 因此母备使用1台裝置進行1次檢測時，可對複數 個光予7L件實施檢測。因此，無需在將其他構件安裝於光 學元件陣列前之階段將各光學元件單片化，即可—併檢測 所有光學元件。 , 根據上述構成，於偏蕊檢測裝置欲一併檢測所有光 學元件之情形時，與成形於光學元件陣列之光學元件之個 數無關，成為必需之裝置構成仍然只有元件成像光學系 統。因此，尤其於多個光學元件成形於光學元件陣列之情 形時，與上述先前技術之各偏蕊檢測裝置相比，能夠以簡 單且小規模之裝置構成實現偏蕊檢測裝置。 又，根據上述構成，本偏蕊檢測裝置由於係可根據使光 學7C件之兩面成像而得之第i及第2透過像的對比度，檢測 该光學元件之偏蕊之量的單純之原理’因此不限定於至少 一面為非球面之透鏡，對於兩面為球面之透鏡，亦可無任 何問題地應用。 又’根據上述構成，於本偏蕊檢測裝置中，關於檢測作 業’只要根據第1及第2透過像之對比度檢測光學元件之偏 蕊之量便足夠’檢測作業變得簡易，因此可降低偏蕊檢測 之煩雜性。 又’根據上述構成，本偏蕊檢測裝置係可根據使光學元 件之兩面成像而得之第1及第2透過像的對比度，檢測該光 149829.doc •10· 201118359 學兀件之偏蕊之量者，只要相對應之光學元件中之一面或 另一面不平坦，第1及第2透過像之鮮明度便達到可進行檢 測之程度，因此即使於檢測光軸附近較平坦之光學元件之 偏蕊之量的情形時，亦可降低檢測變得困難之可能性。 為解決上述問題，本發明之偏蕊檢測方法之特徵在於： 其係使用人射至光學元件之光透過該光學元件之透過光， 檢測該光學元件之偏蕊之量者包括如下之步驟：使上 述透過光人射至作為物體側遠心光學系統或兩側遠心光學 系統之元件成像光學系统，藉由該元件成像光學系統使上 述光學元件之兩面分別成像；以及根據使上述光學元件之 兩面分別成像而得之約及第2透過像的對比《，檢測該光 學元件之偏蕊之量。 康述方法，本偏從檢測方法與本偏蕊檢測裝置同樣 地’無需將構成光學元件陣列之各光學元件單片化，即可 一併檢測所有光學元件，並且可藉由簡單且小規模之裝置 構成進仃榀測。又’本偏蕊檢測方法與本偏蕊檢測裝置同 樣地，可應用於兩面為球面之透鏡之偏蕊檢測，可降低偏 蕊檢測之煩雜性，進而，於檢測光轴附近較平坦之光學元 件之偏蕊的量之情形時，可降低檢測變得困難之可能性。 為解決上述問題，本發明之光學元件之特徵在於：其係 使用所入射之光透過之透過光，檢測偏蕊之量者，且 面中之有效口徑之外周部分、或者兩面中之各有效口徑之 外周部分設置有使上述所人射之光散射的突出部。 根據上述構成，於使用透過光，使本光學元件中之至少 149829.doc -11 - 201118359 一者之有效口徑之部分成像的情 ^ . A 寻將使所入射之光散 射之大出。p成像而得的像與其 ^ a 俅邛分相比變暗淡，因此 可更谷易地識別使有效口徑 仫之邠刀成像而得之像的輪廓， 且易於根據使該有效口經之邱 之口P刀成像而得之像的對比度進 行光學元件之偏蕊之量的檢測。 欢判所明有效口徑，係指於光 子系統或其構件之支架内之特定沾左^ 卞Μ之特疋的面上限制光線束之範圍 之開口。 因此，本光學元件係藉由可根據第1及第2透過像之對比 ㈣測光學元件之偏蕊之量的本發明之偏蕊檢測裝置及偏 蕊檢測方法，而易於檢測偏蕊之量者。 本發明之光學元件陣列之特徵在於：其係—體地成形有 複數個光學元件者’且複數個上述光學元件中之至少一個 係上述本光學TL件。本光學元件陣列所具備之本光學元件 取得與上述相同之效果。 本發明之光學元件單元之特徵在於：其包括作為上述光 學元件之第1光學元件、以及第2光學元件，且上述第1光 學元件之突出部抵接於上述第2光學元件。 根據上述構成’除與第2光學元件之抵接部分以外，可 對應於第1光學元件之突出部之高度，適當調整第丨及第2 光學元件之間隔。 [發明之效果] 如上所述’本發明之偏蕊檢測裝置係可使用入射至光學 元件之光透過該光學元件之透過光，檢測該光學元件之偏 .抵之量者’其包括作為物體側遠心光學系統或兩侧遠心光 149829.doc •12· 201118359 學系統之元件成像光學系統，上述元件成像光學系統係藉 由所入射之上述透過光，使上述光學元件之兩面分別成像 者，且該偏蕊檢測裝置係可根據使上述光學元件之兩面分 別成像而得之第1及第2透過像之對比度，檢測該光學元件 之偏蕊之量者。 本發明之偏蕊檢測方法係使用入射至光學元件之光透過 該光學元件之透過光，檢測該光學元件之偏蕊之量者，其 包括如下之步驟：使上述透過光入射至作為物體側遠心光 學系統或兩側遠心光學系統之元件成像光學系統，藉由該 元件成像光學系統使上述光學元件之兩面分別成像；以及 根據使上述光學元件之兩面分別成像而得之第1及第2透過 像的對比度’檢測該光學元件之偏蕊之量。 因此’本偏,游檢測裝置及本偏蕊檢測方法取得如下之效 果’即無需將構成光學元件陣列之各光學元件單片化，即 可一併檢測所有光學元件，並且可藉由簡單且小規模之裝 置構成進行檢測。 又，本偏蕊檢測裝置及本偏蕊檢測方法取得如下之效 可降低偏201118359 VI. Description of the invention: [Technical field to which the invention pertains] This is a eccentricity of the detection of a lens, etc., which is found in the amount of the yaw of the workpiece; the detection device and the partial detection of the yaw (4) Maoming's invention relates to the invention of an optical element, an optical element display, and an optical element unit for detecting a target in a biased manner. [Prior Art] First, in the present invention, the term "bias" refers to the difference between the optical axis and the mechanical axis in a single piece. "In particular, in the present invention, the so-called "bias of the lens"" means The positional deviation between the two sides of the surface of the i-lens: the ideal optical axis with respect to the case where no nucleus is produced. The number of the first lens of the summer/T, is obtained by mass transfer using a mold. The requirements for the manufacturing tolerances of these lenses are poor. For the nucleus which is the θ U "important factor", it is necessary to accurately evaluate the eccentricity. In the prior method of measuring the eccentricity and the method of measuring the eccentricity, first, the light for measurement emitted from the light source is adjusted by a well-known focusing technique, and the light is applied to the optical axis of the optical element (object to be detected) to be measured. Spotlight. Light concentrated on the optical axis of the optical element is reflected on or transmitted through the surface of the optical element. The reflected or transmitted light is guided to the nucleus measuring unit (measuring surface) to form a light spot on the surface of the yaw measuring unit (also referred to as a condensed spot), so-called 149829.doc 201118359, '" When the fine light is irradiated on a certain surface, the region where the irradiated portion appears, that is, the region where the intensity of the light is higher than that of the other portions. 八、,: After the above-mentioned partial measurement method, the measuring device and the method for measuring the partial core, The position of the light spot formed on the surface of the yaw measuring unit is detected by a light position detecting element such as a photodetector. The position of the light spot measured by the second nucleus is determined relative to the reference position (no light is generated). The offset of the position f of the position where the light spot is formed in the case of the element is measured, and the offset of the upper optical element is measured by the positional shift amount 'in the above-described partial measurement device and the partial measurement unit& Further, the method of measuring the eccentricity of the light concentrated on the optical axis of the optical element on the surface of the optical element is referred to as a reflection eccentricity measurement. Light collected by the optical axis passes through the optical element The method of measuring the apex is called the measurement of the eccentricity. Previously, in the measurement of the eccentricity of most of the lenses which are representative optical elements, the measurement of the yaw core or the measurement of the yaw core was performed. The method of the partial 敎 于 于 于 专利 专利 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利The surface and the 'or planar portion are irradiated with the laser light, and the amount of vibration of the reflected light by the second surface and/or the plane: the reflected light is rotated by the lens. Patent Document 2 discloses a method for measuring the amount of eccentricity as follows. The error is determined by measuring the shape of the two sides of the lens using the measurement result of the three-dimensional position of the punctual point, and the amount of the eccentricity of the lens can be accurately measured. In Patent Document 3, there is disclosed an external diameter of the lens I49829.doc 201118359 A glass optical element having an annular groove or a protrusion is formed by extrusion. Further, Patent Document 3 determines the angle of the oblique eccentricity of the glass optical element by the following formula (1) Θ1 〇 θ 1 ^cos&qu Ot;1 b 1 /a 1 * * *( 1) ' where al is the radius of the glass optic and bl is the length of the short axis of the glass optic that becomes elliptical due to the poor surface shape. [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 2-4-279075 (published on Oct. 7, 2004). [Patent Document 2] International Publication No. WO 2007/ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Problems to be Solved by the Invention] However, in the manufacturing method of a module having an optical element (a camera module having a lens, etc.), the so-called wafer-level lens process is subjected to a lens-level lens processing system. .珂 之 个 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一New Zealand.稞,, and 仃 仃 仃 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该shorten. I49829.doc 201118359 Here, since each of the eccentricity detecting devices of the above prior art is configured to condense light for detection in a specific region of (4) s, basically, whenever one device is used for one detection, Only one optical component can be tested. Any of the ugliness of each of the sinus detection devices of the scorpion technique, when detecting the amount of the eccentricity of each of the 先 卞 平 先 先 上述 上述 上述The following (Α) or (Β) essentials are tested. (Α) The optical elements constituting the optical element array described above are singulated, and each optical element is detected. (Β) The eccentricity detecting device having the same number of optical elements as the optical element array, or a device corresponding thereto, does not singulate the optical elements constituting the optical element array, and collectively detects All optical components. When the detection is performed according to the method of (Α), there arises a problem that each optical element is singulated at the stage before the other members are mounted on the optical element array, and thus it is difficult to pass the above wafer level lens. The process also manufactures multiple modules. Further, in this case, there is a problem that the detection time becomes long since each optical element is sequentially detected one by one. When the detection is performed in the manner of the photograph (Β), the following problem arises: the more the plurality of optical elements are formed on the optical element array, the more complicated and large-scale the apparatus for detecting the amount of the eccentric. The above-mentioned problems can be said to be the apparatus for measuring the eccentricity of the lens disclosed in Patent Document 1, and the apparatus for detecting the eccentricity disclosed in Patent Document 2, 149829.doc 201118359, the method of measuring, cold & * a ^ Further problems arising from any of the devices of the previous eccentricity detecting device (the device for performing the above-mentioned reflection yaw detection; ^ @, teaching 1 and the above-mentioned device for detecting the eccentricity). Further, in the case where one of the optical elements to be detected is one, each of the above-described prior art thief detecting devices may cause the following problems. The eccentricity detecting device of the lens disclosed in Document 1 has a problem that at least one of the lenses of the detecting object must be aspherical, and cannot be applied to the eccentricity detection of the lens having the spherical surface on both sides. In the apparatus for detecting the method of detecting the amount of eccentricity disclosed in Patent Document 2, s has a problem that it is necessary to detect the three-dimensional position of the reference point "the shape of both surfaces of the surface of the lens", so that the detection of the eccentricity is complicated. : In the previous eccentricity detecting device (the device for performing the above-described reflection eccentricity detection and the device for performing the above-described eccentricity detection), when detecting the amount of the eccentricity of the relatively flat optical element near the optical axis, the following problems occur. That is, since the formed light spot is not clear, the detection may become difficult. Patent Document 3 is not originally intended to detect the amount of the nucleus of the device used for the formed lens. The invention developed by the above-mentioned questioning is intended to provide a eccentricity detecting device and a eccentricity detecting method, and the eccentricity detecting device can detect the optical elements constituting the optical element array. - and detecting all optical components, and can be realized by a simple and small force mode device. Further, another object of the present invention is to provide a biased core Measuring device and biasing method 149829.doc 201118359 Core detection method, the eccentricity detecting device and the eccentricity detecting method can be applied to the detection of the eccentricity of the spherical lens on both sides, which can reduce the cumbersomeness of the eccentricity detection, and further in the vicinity of the detecting optical axis In the case of the amount of the eccentricity of the flatter optical element, the possibility that the detection becomes difficult can be reduced. The optical element which is easy to detect the amount of the yaw core by the eccentricity detection of the present invention is further provided. A visual inspection device and a method for detecting a sinus, an optical element array, and an optical element unit. [Technical means for solving the problem] In order to solve the above problems, the eccentricity detecting device of the present invention is characterized in that it is incident to optical The component <transmits light transmitted through the optical component to detect the amount of the eccentricity of the material component, and includes the component imaging optical system as the object side telecentric optical system or the two-sided telecentric optical system. Forming the two sides of the optical element by the incident transmitted light, and the eccentricity detecting device can The contrast between the second and second transmitted images obtained by imaging the two sides of the optical element respectively is used to detect the amount of the eccentricity of the optical element. The so-called object-side telecentric optical system refers to an optical system in which the entrance pupil can be considered to be infinity. The object-side telecentric optical system has a characteristic that since the light beam parallel to the optical axis is taken from any position of the object (the optical element to be detected), even if the distance to the subject changes, the image The shape of the telecentric optical system refers to an optical system in which the entrance pupil and the exit pupil are considered to be infinite. The telecentric optical systems on both sides have the characteristics of the telecentric optical system on the object side as well. Has the following characteristics, namely 149829.doc 201118359 Since the emitted light is parallel to the optical axis, even if the image plane moves slightly with respect to the optical axis direction, the position of the principal ray crossing the image plane is almost constant, and even if the image produces a focus shift There will be no change in shape. Further, the two-sided telecentric optical system has a characteristic that no change in shape occurs even if the image plane is slightly inclined with respect to the optical axis. The "contrast of the transmitted image" in the present application refers to not only the brightness of the transmitted image but also the distribution of the amount of light transmitted through the shape of the transmitted image, the position of the transmitted image, and the size of the transmitted image. overall. According to the above configuration, the eccentricity detecting means causes the transmitted light to be incident on the element imaging optical system, and the element imaging optical system emits the transmitted light, thereby performing imaging of the optical element to be detected. Among the transmitted light, there are light rays which are considered to be different from each other from the light emitted from one side of the optical element and the light which can be considered to be emitted from the other side of the optical element. Therefore, in the imaging of the optical element described above, the first and second transmission images obtained by imaging the two surfaces of the optical element are respectively formed. The first and second transmission image transmission images are formed by the light passing through the component imaging optical system which is the object side telecentric optical system or the telecentric optical systems on both sides, and thus become opposite to the optical element observed from above. The shape obtained on the other side is substantially the same shape. In addition, the mutual positional relationship between the first and second transmission images in the direction perpendicular to the optical axis of the element imaging optical system becomes the corresponding side and the other side of the optical element associated with the direction. The mutual positional relationship is roughly the same. Therefore, based on the contrast of the first and second transmitted images, the shape and mutual positional relationship between the corresponding one surface and the other surface of the optical element can be known. According to these, it can be seen that the position between the two sides of the optical element is 149829.doc 201118359. Offset 'Therefore, the amount of the eccentricity of the optical element is also known. ^ _ constituting, the partial thermal detection device is capable of detecting the eccentricity of the optical component without concentrating the light for detection in a specific region of the denture. , can test a plurality of light to 7L pieces. Therefore, it is not necessary to singulate the optical elements at the stage before the other members are mounted on the optical element array, and all the optical elements can be detected. According to the above configuration, when the eccentricity detecting means is to detect all of the optical elements together, regardless of the number of optical elements formed in the optical element array, it is still necessary to have only the element imaging optical system. Therefore, in particular, when a plurality of optical elements are formed in an optical element array, the eccentricity detecting means can be realized in a simple and small-scale apparatus as compared with the above-described eccentricity detecting means of the prior art. Further, according to the above configuration, the eccentricity detecting device can detect the simple principle of the amount of the eccentricity of the optical element based on the contrast of the i-th and second transmitted images obtained by imaging the two faces of the optical 7C member. It is not limited to a lens having at least one aspherical surface, and a lens having a spherical surface on both sides can be applied without any problem. Further, according to the above configuration, in the eccentricity detecting device, it is sufficient to detect the amount of the eccentricity of the optical element based on the contrast of the first and second transmitted images, and the detection operation is simplified, so that the bias can be reduced. The trouble of the core detection. Further, according to the above configuration, the eccentricity detecting device can detect the contrast of the first and second transmitted images obtained by imaging the two surfaces of the optical element, and detect the light 149829.doc •10·201118359 As long as one or the other of the corresponding optical elements is not flat, the brightness of the first and second transmitted images is detectable, so that even the flat optical element is detected in the vicinity of the optical axis. In the case of the amount of the core, the possibility that the detection becomes difficult can also be reduced. In order to solve the above problems, the eccentricity detecting method of the present invention is characterized in that it uses light transmitted from a person to an optical element through the optical element, and detecting the amount of the eccentricity of the optical element includes the following steps: Transmitting the above-mentioned light to a component imaging optical system as an object side telecentric optical system or a telecentric optical system on both sides, by which the imaging optical system respectively images both sides of the optical component; and imaging the two sides of the optical component separately And the comparison between the second transmission image and the second transmission image is used to detect the amount of the eccentricity of the optical element. According to the Kang method, the partial detection method can detect all the optical elements together without singulating the optical elements constituting the optical element array, and can be detected by simple and small scale. The device constitutes a speculation. In addition, the method of detecting the eccentricity can be applied to the detection of the eccentricity of the lens having the spherical surface on both sides, which can reduce the cumbersomeness of the detection of the eccentricity, and further, the optical element which is relatively flat near the detection optical axis. In the case of the amount of eccentricity, the possibility that detection becomes difficult can be reduced. In order to solve the above problems, the optical element of the present invention is characterized in that it uses the transmitted light transmitted by the incident light to detect the amount of the eccentricity, and the effective diameter of the outer peripheral portion of the surface, or the effective caliber of both sides The outer peripheral portion is provided with a protruding portion that scatters the light emitted by the above-mentioned person. According to the above configuration, the portion of the effective aperture of at least 149829.doc -11 - 201118359 in the optical element is imaged by using the transmitted light, and the incident light is scattered. The image obtained by p imaging becomes darker than that of the ^ a 俅邛, so that the outline of the image obtained by imaging the scalpel of the effective aperture 更 can be more easily recognized, and it is easy to make the effective mouth The contrast of the image obtained by imaging the mouth P knife is used to detect the amount of the eccentricity of the optical element. The effective aperture is defined as the opening that limits the extent of the beam of light on a particular surface of the optical subsystem or its component. Therefore, the present optical element is easy to detect the amount of the eccentricity by the eccentricity detecting device and the eccentricity detecting method of the present invention which can measure the amount of the yaw of the optical element according to the comparison between the first and second transmitted images. . The optical element array of the present invention is characterized in that a plurality of optical elements are integrally formed, and at least one of the plurality of optical elements is the above-described present optical TL. The present optical element included in the optical element array achieves the same effects as described above. The optical element unit of the present invention includes the first optical element as the optical element and the second optical element, and the protruding portion of the first optical element abuts on the second optical element. According to the above configuration, in addition to the contact portion with the second optical element, the interval between the second and second optical elements can be appropriately adjusted in accordance with the height of the protruding portion of the first optical element. [Effects of the Invention] As described above, the eccentricity detecting device of the present invention can transmit the transmitted light of the optical element through the light transmitted through the optical element, and detects the deviation of the optical element. Telecentric optical system or telecentric light on both sides 149829.doc • 12·201118359 The component imaging optical system of the system, wherein the component imaging optical system images the two sides of the optical component by the incident transmitted light, and the image is The eccentricity detecting device detects the amount of the eccentricity of the optical element based on the contrast between the first and second transmitted images obtained by imaging the two surfaces of the optical element. In the eccentricity detecting method of the present invention, the light transmitted through the optical element is transmitted through the transmitted light of the optical element, and the amount of the eccentricity of the optical element is detected. The method includes the step of causing the transmitted light to be incident on the object side. An element imaging optical system of an optical system or a telecentric optical system on both sides, wherein the two sides of the optical element are respectively imaged by the element imaging optical system; and the first and second transmission images obtained by imaging the two sides of the optical element respectively The contrast 'detects the amount of the eccentricity of the optical element. Therefore, the present invention can detect all the optical components together without singulating the optical components constituting the optical element array, and can be easily and smallly The scale of the device constitutes a test. Moreover, the eccentricity detecting device and the eccentricity detecting method achieve the following effects, which can reduce the partiality
散射的突出部。 果，即可應用於兩面為球面之透鏡之偏蕊檢測 遂檢測之煩雜性，進而，於檢測光軸附近較平 149829.doc 13 201118359 因此’本光衫件取得如下之效果，即藉由本偏蕊檢測 裝置及本偏，游檢測方法，易於檢測偏蕊之量。本發明之光 學元件陣列及光學元件單元所具備之本光學元件取得^上 述相同之效果。 【實施方式】 [發明之背景] 首先，參考圖7之（a)〜(d)對先前一般之技術之具備光學 元件的模組（相機模組）136之製造方法之概要進行說明。 第1透鏡（光學元件）L1及第2透鏡（光學元件）12係藉由主 要使用熱塑性樹脂13 1之射出成形而製作。於使用熱塑性 樹脂13 1之射出成形中，一面對藉由加熱而軟化之熱塑性 樹脂131施加特定之射出壓（大約1〇〜3〇〇〇 kg f/c)，一面將 其壓入至模具132中，使熱塑性樹脂ι31填充於模具132中 而進行成形（參考圖7之（a))。 成形後，自模具132中取出熱塑性樹脂13ι，並將其切割 成母1片之透鏡（光學元件）。此處，表示將自模具132中取 出之熱塑性樹脂131切割成第1透鏡L1與第2透鏡L2之例（參 考圖7之（b))。 將第1透鏡L1及第2透鏡L2嵌入（或者壓入）至透鏡鏡筒 (框架）133中進行組裝（參考圖7之（c))。 將圖7之（c)所示之模組136之中間產物嵌入至鏡筒134中 進行組裝。進而，其後於鏡筒134之模組136中之像面（未 圖示）側的端部搭載感測器135 ^由此，製成模組136(參考 圖7之（d))。 149829.doc •14- 201118359 作為射出成形透鏡之第1秀 兄弟1透鏡L1及第2透鏡L2中所使用之 熱塑性樹脂131的熱變形溫度為攝氏m度左右。因此，執 塑性樹脂⑶對於實施作為表面安裝中主要應用之技術之 回流焊時的熱歷程（最大溫度為攝氏260度左右）之财受性並 不充分，故無法承受回流焊時所產生之熱。 因此，當將模組U6安裝於基板上時，先藉由回流輝僅 安裝感測器135#分。其後，採用藉由樹脂將第】透鏡^及 第2透鏡L2部分加以描_ |夕士、+ , 接者之方法、或者對第1透鏡L1及第2 透鏡L2之搭載部分進行局部加熱之安裝方法。 另-方面，近年來，於面向行動裝置等之相機模組之領 域中’開發出以實施晶圓級透鏡製程時所應用之晶圓級透 鏡為代表之陣列狀的透鏡（光學元件陣列）。陣列狀之透鏡 係體地成形有複數個透鏡者，更具體而言，係於包含樹 脂之1片板上一體地成形有多個透鏡者。 參考圖8之（a)〜(e)對本發明之背景之具備光學元件的模 組（相機模組）148之製造方法進行說明。 近年來，業界不斷進行使用熱硬化性樹脂或紫外線硬化 I"生树知作為第1透鏡L丨及/或第2透鏡L2之材料之所謂耐熱 相機模組的開發《此處所說明之模組148係該耐熱相機模 組’其使用熱硬化性樹脂（熱硬化性之樹脂）丨4丨代替熱塑性 樹脂13 1(參考圖7之（a))來作為第1透鏡li及第2透鏡L2之材 料。 使用熱硬化性樹脂141作為第1透鏡L1及/或第2透鏡L2之 材料之原因在於：藉由一併製造多個模組丨48，而謀求各 149829.doc 15 201118359 模組148之製造成本之降低。又，使用熱硬化性樹脂i4i作 為第1透鏡L1及第2透鏡L2之材料之原因在於：可對模組 148實施回流焊。 製造模組148之技術已提出有多種。其中，具有代表性 之技術係上述射出成形、以及晶圓級透鏡製程。尤其，最 近，於模組之製造時間及其他綜合性知識見解方面被視為 更有利之晶圓級透鏡（可回流焊之透鏡）製程受到矚目。 於實知as圓級透鏡製程時，必需抑制於第i透鏡L丨及第2 透鏡L2中產生由熱所引起之塑性變形。由於該必要性，因 此使用即使施加熱亦不易變形之耐熱性非常優異之熱硬化 性樹脂材料、或紫外線硬化性樹脂材料作為第丨透鏡以及 第2透鏡L2的晶圓級透鏡受到矚目。具體而言使用如下 之熱硬化性樹脂材料或紫外線硬化性樹脂材料之晶圓級透 鏡受到矚目，即具有即使施加攝氏260〜280度之熱丨〇秒以 上亦不會塑性變形之程度之耐熱性。於晶圓級透鏡製程 中，分別藉由陣列狀之模具l42及l43而使陣列狀之透鏡 (光學元件陣列）〗^及l45 一併成形後，將該等透鏡加以貼 合，進而搭載陣列狀之感測器l47後，個別地進行切割來 製造模組148。 以下，對晶圓級透鏡製程之詳細情況進行說明。 於曰曰圓級透鏡製程中’首先’藉由形成有多個凹部之陣 列狀之模具142、及形成有與該凹部之各者相對應之多個 凸。卩的陣列狀之模具丨43夾入熱硬化性樹脂Ml，使熱硬化 !·生樹肊141硬化，製作於每個相互對應之凹部及凸部之組 149829.doc •16- 201118359 合中成形有透鏡的陣列狀之透鏡（參考圖8之（a))。 藉由圖8之（a)所示之步驟所製作的陣列狀之透鏡係成形 有多個第1透鏡L1之陣列狀之透鏡144、以及成形有多個第 2透鏡L2之陣列狀之透鏡145。而且，關於各第1透鏡以及 各第2透鏡L2，以使穿過第i透鏡L1之光軸La(第1透鏡之光 軸）與穿過相對應之第2透鏡L2之光軸La(第2透鏡之光軸）位 於同一直線上的方式，將陣列狀之透鏡144與陣列狀之透 鏡145加以貼合（參考圖8之（b))。具體而言，進行陣列狀之 透鏡144及145之位置對準之調蕊方法除使光軸^彼此一致 以外’可列舉一面進行攝像一面進行調整等各種方法， 又，位置對準亦受到晶圓之間距形成精度影響。 於陣列狀之透鏡145之模組148中之像面（未圖示）側的端 部’以使各光軸La與相對應之各感測器146之中心146c位 於同一直線上的方式，搭載裝載有多個感測器146之陣列 狀之感測器147(參考圖8之（c))。 將藉由圖8之（c)所示之步驟而成為陣列狀之多個模組148 切割成每1個模組148(參考圖8之（d))，從而製成模組 148(參考圖8之。 藉由圖8之（a)〜(e)所示之晶圓級透鏡製程一併製造多個 模組148，藉此可降低模組148之製造成本。進而，為避免 將所製成之模組148安裝於未圖示之基板時，因由回流焊 所產生之熱（最大溫度為攝氏26〇度左右）而引起塑性變形， 第1透鏡L1及第2透鏡L2.更佳為使用對攝氏26〇〜28〇度之熱 具有1 〇秒以上之耐受性的熱硬化性樹脂或紫外線硬化性樹 149829.doc -17- 201118359 月曰°藉由將具有耐熱性之熱硬化性之樹脂或紫外線硬化性 之樹脂用於第1透鏡L1及第2透鏡L2，可對模組148實施回 流焊。於晶圓級透鏡製程中，進而應用具有耐熱性之樹脂 材料，藉此可廉價地製造可對應回流焊之具備光學元件之 模組。 然而’就提高開發及生產管理之自由度之觀點而言，較 佳為於陣列狀之透鏡中，以陣列狀檢測各透鏡之偏蕊之 量，即不將構成陣列狀之透鏡之各透鏡單片化，而檢測各 透鏡之偏蕊之量。關於晶圓級透鏡等陣列狀之透鏡，可想 到產生一次性製作大量透鏡，並檢測一體地成形於同一樹 脂之所有透鏡的必要性，因此業界期望一種可大量且高速 地檢測偏蕊之量之偏蕊檢測裝置。 本發明之主要目的可解釋為提供—種無需將構成上述陣 列狀之透鏡（光學元件陣列）之各透鏡（光學元件）單片化， 即可-併制所有透鏡，並且能夠以簡單且小規模之裝置 構f實現的偏蕊檢測裝置及偏蕊檢測方法，以及藉由該等 偏說檢測裝置及偏蕊檢測方法而易於檢測偏蕊之量之陣列 狀的透鏡。 [實施形態] ，圖1所示之偏蕊檢測裝置1係檢測構成陣列狀之透鏡 子兀件陣歹”4之各透鏡(光學元件的偏蕊之量之裝置 偏蕊檢測裝置1包括L元❹mm 像感測器（攝像元件）6、g 干川顯不部7、以及偏蕊檢測部8〇〇 元件成像光學李έ办s h > '、、’ 匕括：入射側透鏡50、孔徑光 149829.doc •18· 201118359 5 1、以及出射側透鏡5 2。 偏蕊檢測部80包括：中心位置偏蕊檢測料、直徑縮小 偏蕊檢測部8 2、第!像間距離檢测部8 3、以及第2像間距離 檢測部84。 光源2係對陣列狀之透鏡4照射光3之光源。光3可應用雷 射光及白色光等。因此，作為光源2，可應用眾所周知之 雷射振遭裝置或出射白色光之裝置…光源2並非必需 包含於偏蕊檢測裝置i中’亦可為獨立於偏蕊檢測裂置味 在之構成。於光3為雷射光之情形時，可提高偏蕊檢測農 置1中之分辨率。 自光源2所出射之光3係照射至陣列狀之透鏡4中的遠離 元件成像光學系統5之方向之整個面。於陣列狀之透鏡4中 之遠離元件成像光學系統5的方向之面上，成形有作為各 透鏡4〇之球面之第2面42。 其後，光3透過陣列狀之透鏡4,作為本發明之透過光而 出射。該透過光自陣列狀之透鏡4中之接近元件成像光學 系統5的方向之整個面出射’於該面上，成形有作為各透 鏡40之球面之第！面41。 亦即，上述透過光可解釋為人射至構成陣列狀之透鏡4 之各透鏡40的光3透過各透鏡⑽者。更具體而言，上述透 匕光可解釋為係光3自陣列狀之透鏡4巾之各透鏡⑽的第2 面42側入射至陣列狀之透鏡4，㈣透過包含各透鏡之 陣列狀之透鏡4整體，自陣列狀之透鏡4中之各透鏡4〇之第 1面41側出射者。 149829.doc 19 201118359 上述透過光入射至元件成像光學系統5之入射側透鏡 50。入射側透鏡50係一般之凸透鏡（聚焦透鏡），因此使所 入射之透過光聚焦於後（影像感測器6)側之焦點。 藉由入射側透鏡50而聚焦之光入射至孔徑光闌5丨。孔經 光闌51對所入射之光之元件成像光學系統5之光軸方向上 的光線束之直徑加以限制並出射該光。 此處，孔徑光闌5 1係配置於入射側透鏡50中之上述後側 之焦點。而且’藉此，於元件成像光學系統5中，自陣列 狀之透鏡4之任意處均可取入成為平行於光軸之光束的上 述透過光。於此情形時，即使自構成陣列狀之透鏡4之各 透鏡40至元件成像光學系統5(具體而言，入射側透鏡50)為 止的距離變化，由相對應之各透鏡40所形成之像（下述第J 透過像9 1及第2透過像92)的形狀亦不變化。 穿過孔徑光闌5 1之光入射至出射側透鏡52。出射側透鏡 52係一般之凸透鏡（聚焦透鏡）。 此處，孔徑光闌5 1進而配置於出射側透鏡52之前（光源 2)側之焦點。於此情形時，穿過孔徑光闌5 1之光以作為平 行於元件成像光學系統5之光軸的光束自出射側透鏡52出 射之方式，入射至射側透鏡52。換言之，出射側透鏡52若 入射有穿過孔徑光闌5 1之光，則將該光聚焦，藉此出射成 為平行於元件成像光學系統5之光軸之光束的光。 再者，於本實施形態中，元件成像光學系統5係如下之 構成，即入射側透鏡50中之後側之焦點與出射側透鏡52中 之前側之焦點的位置相同’且於該等彼此相同之各焦點之 149829.doc • 20· 201118359 位置上配置有孔徑光闌5 1。於該構成之情形時，元件成像 光學系統5係兩側遠心光學系統。 於衫像感測器6由cCD(Charge Coupled Device :電荷耗 δ 元件）或CM〇S(Complementary Metal Oxide Semiconductor '· 互補型金屬氧化膜半導體）構成之情形時，較佳為元件成 像光學系統5係兩側遠心光學系統。其原因在於：當於由 CCD或CMOS所構成之影像感測器6之各像素中安裝有微透 鏡（未圖示）時’若光束傾斜入射，則影像感測器6之受光效 率降低’為抑制該傾斜入射，有效的是使自元件成像光學 系統5所出射之光平行於光軸。 但疋’為了達成本發明之最低限度之功能，即使元件成 像光學系統5為物體侧遠心光學系統，亦不存在問題。為 了實現該物體側遠心光學系統，只要形成自圖丨所示之元 件成像光學系統5之構成中省略出射側透鏡52的構成即 可。只要滿足相對於影像感測器6之入射角度之規格，則 元件成像光學系統5既可為兩側遠心光學系統，亦可為物 體側遠心光學系統，但必需至少於物體側具有遠心特性。 亦即，元件成像光學系統5為物體側遠心光學系統，且為 如使物體像成像於影像感測器6之光學系統成為最低限度 之必需的構成要素。又，元件成像光學系統5之各透鏡較 佳為使用大口徑透鏡，且觀察視野範圍儘可能較寬廣。 由上述「大口徑」所規定之口徑之具體的值依存於構成 元件成像光學系統5之各透鏡之構成變更，因此難以利用 數值來表述。例如，於檢測！個透鏡4〇之情形時，藉由元 149829.doc 201118359 件成像光學系統5而可進行觀察之視野範圍必需為01〇 mm 左右。於檢測複數個透鏡40之情形時，藉由元件成像光學 系統5而可進行觀察之視野範圍較佳為02〇〜1〇〇爪爪左右。 可進行觀察之視野範圍越大，越可一併檢測多個透鏡4〇, 故較佳又，於元件成像光學系統5中，為擴大可進行觀 察之視野範圍而要求大口徑化者係入射側透鏡5〇。入射側 透鏡50有時係由複數個透鏡構成。根據以上所述由上述 「大口徑」所規定之口徑之具體例換言之係藉由構成元件 成像光學系統5之各透鏡，可實現#2〇〜1〇〇 mm左右之可進 行觀察之視野範圍的程度之口徑。 自光源2所照射之光3若入射至大致垂直於光線之陣列狀 之透鏡4中的平坦部分（即，各透鏡4〇之除第2面42以外之 第2面42側的面），則除某種程度之反射以外，不受陣列狀 之透鏡4之面的影響而直線前進，於元件成像光學系統5之 像面（未圖示）中，被觀察為明亮之像。另一方面，相對於 與光線垂直之面具有傾斜之陣列狀之透鏡4中的各透鏡4〇 之第1面41及第2面42使所照射之光3折射及散射，因此於 元件成像光學系統5之像面中，被觀察為與上述明亮之像 相比較暗淡之像。 又’於同一透鏡40之第1面41與第2面42上，所照射之光 3呈現彼此不同之折射及散射。因此，若嚴格來說，則於 上述透過光中，存在可認為係自陣列狀之透鏡4中之透鏡 40的第1面41所出射之光線、以及可認為係自陣列狀之透 鏡4中之該透鏡4〇的第2面42所出射之光線之與各透鏡4〇相 149829.doc -22- 201118359 關的彼此不同之光線。因此，於元件成像光學系統5藉由 所入射之上述透過光進行透鏡40之成像的情形時，作為由 該透鏡40所形成之像，出現使第1面41成像而得之第1透過 像91(參考圖2)、以及使第2面42成像而得之第2透過像 92(參考圖2)。 第1透過像91及第2透過像92係上述透過光穿過作為兩側 遠‘心光學系統之元件成像光學系統5而形成之像，因此分 別變成與自上面觀察相對應之第1面41及第2面42所得之形 狀大致相同的形狀。除此以外，於垂直於元件成像光學系 統5之光軸之方向相關的第1透過像91及第2透過像92之相 互之位置關係’係變成與在該方向相關之相對應之第1面 41及第2面42的相互之位置關係大致相同。此外，各第1透 過像91及各弟2透過像92，進而由透過上述平坦部分之透 過光所形成之明亮的像相互於元件成像光學系統5之像面 中，產生根據陣列狀之透鏡4中之相對應的各透鏡4〇之第j 面41及第2面42之各傾斜而變化的對比度差。 此處，本申請案中之「像之對比度」係指不僅包含像之 明暗，亦包含像之形狀、像之位置、及像之尺寸等的伴隨 像形成而變化之光量之分佈整體。 自出射側透鏡52所出射之光入射至影像感測器6。影像 感測器6係由CCD或CMOS等固體攝像元件所構成之攝像元 件’其將所入射之光轉換成電信號’並將該電信號供給至 顯示部7及偏蕊檢測部8 0。 此處，影像感測器6係配置於與元件成像光學系統5之像 149829.doc •23· 201118359 面相符之位置。因此， A m氐此 ”不關於各透鏡40之第1透過像91 及第2透過像92，谁而山、* „ ,^ aa . 進而由透過上述平坦部分之透過光所形 成之明焭的像之來自陳 皁列狀之透鏡4的所有上述透過光會 入射至影像感測器6中。 顯示部7根據自影像感 則益6所供給之上述電信號，將由 入射至影像感測器6之光所开彡杰夕Μ 斤$成之關於各透鏡40的第1透過 像91及第2透過像92作為 勹圃诼术顯不。再者，作為顯示部 ，可使用液晶顯示|置、„顯示器、咖(⑽。心_ Tube .陰極射線管）、以及有機卿丨⑽。· 電致發光)顯示裝置等公知之各種顯示襄置。 偏蕊檢測部8〇例如係根據表示開始動作之意思之來自未 圖不的cpu(centrai Pr()eessing Unit:巾央運算處理裝置） 之特定之輸人信號’檢測各透鏡4G之偏蕊之量者，或者係 將該電㈣之輸人作為.觸發，並根據該電信號檢測各透鏡 4〇之偏蕊之量者。偏蕊檢測部8〇可將檢測各透鏡4〇之偏蕊 之ϊ所獲得的結果如圖丨所示般顯示於顯示部7，除此以 外，亦可將該結果儲存於記憶體等未圖示之記憶媒體（記 錄媒體）。 圖2係說明未產生透鏡4〇之偏蕊之情形時的利用中心位 置偏蕊檢測部81檢測偏蕊之要領的圖。圖3係說明產生透 鏡40之偏蕊之情形時的利用中心位置偏蕊檢測部81檢測偏 之要領的圖。 將同一透鏡40之兩面分別成像而得之第i透過像91及第2 透過像92分別與自上面觀察相對應之第1面41及第2面42所 149829.doc -24- 201118359 得之形狀大致相同，且第1透過像91與第2透過像92之相對 之位置關係，係與在垂直於未產生透鏡40之偏蕊之情形時 的（以下，稱為「理想之」）光軸之方向相關之相對應的第1面 41與第2面42之相對之位置關係大致相同（參考圖2及圖3)。 中心位置偏蕊檢測部8 1根據自影像感測器6(參考圖丨）所 供給之電彳§號，獲得表示第1透過像91及第2透過像92之各 形狀，進而第1透過像91與第2透過像92之相對之位置關係 的資訊。 中心位置偏灰檢測部8 1根據所獲得之表示第1透過像9 i 之形狀的上述資訊’計算出第i透過像91之中心93，並且 根據表示第2透過像92之形狀之上述資訊，計算出第2透過 像92之中心94。 再者’作為計算出各中心93及94之方法，可考慮如下之 方法，即例如藉由最小平方法，根據表示第丨透過像9丨之 形狀之上述資訊計算出中心93，並且根據表示第2透過像 92之形狀之上述資訊計算出中心94。該方法係可應用之方 法之原因在於：自上面觀察作為球面之第！面41及第2面42 所得之形狀均明顯為圓形，故第i透過像9!及第2透過像92 之各形狀亦同樣明顯為圓形（圓形透過像）。 為了藉由最小平方法，根據表示第丨透過像91之形狀之 上述資訊計算出中心93，首先，於第i透過像91之内側設 定圓之中心93xy，並將其作為虛擬之中心點。其次，將中 心93xy作為原點座標，自中心93xy均等地分割第i透過像 91，即，例如以使角度a與角度b...彼此相等之方式分割第 149829.doc -25· 201118359 !透過像w。此時，作為進行分割之各線與第ι透過像^ 圓周的交點（點i、·點2、·..）之一的點i之座標（A，W分別變 成下述數式⑴及⑷。而且，此時，第i透過像9ι之中心座 標（《，β)、及第1透過像91之半徑R可藉由以下之數式 (5)〜（7)而求出。根據表示第2透過像％之形狀之上述資訊 計算出中心94的情形亦只要以相同之要領進行計算即可 (參考圖9)。 [數1]Scattered protrusions. Therefore, it can be applied to the detection of the eccentricity of the lens on both sides of the spherical surface, and further, it is flat near the detection optical axis. 149829.doc 13 201118359 Therefore, the present invention achieves the following effects, that is, by the partial bias The core detection device and the local bias detection method are easy to detect the amount of the eccentricity. The optical element array of the present invention and the optical element included in the optical element unit achieve the same effects as described above. [Embodiment] [Background of the Invention] First, an outline of a method of manufacturing a module (camera module) 136 having an optical element of the prior art will be described with reference to Figs. 7(a) to 7(d). The first lens (optical element) L1 and the second lens (optical element) 12 are produced by injection molding using a thermoplastic resin 13 1 mainly. In the injection molding using the thermoplastic resin 13 1 , a thermoplastic resin 131 softened by heating is applied to the mold while applying a specific ejection pressure (about 1 〇 to 3 〇〇〇 kg f/c). In the case of 132, the thermoplastic resin ι 31 is filled in the mold 132 to be molded (refer to (a) of Fig. 7). After the molding, the thermoplastic resin 13 i is taken out from the mold 132 and cut into a mother lens (optical element). Here, an example in which the thermoplastic resin 131 taken out from the mold 132 is cut into the first lens L1 and the second lens L2 is shown (refer to (b) of Fig. 7). The first lens L1 and the second lens L2 are fitted (or pressed) into the lens barrel (frame) 133 for assembly (refer to Fig. 7 (c)). The intermediate product of the module 136 shown in (c) of Fig. 7 is embedded in the lens barrel 134 for assembly. Further, the sensor 135 is mounted on the end of the module 136 of the lens barrel 134 on the image plane (not shown) side, whereby the module 136 is formed (refer to Fig. 7 (d)). 149829.doc •14-201118359 As the first show of the injection molded lens, the heat distortion temperature of the thermoplastic resin 131 used in the brother 1 lens L1 and the second lens L2 is about m degrees Celsius. Therefore, the plastic resin (3) is not sufficient for the heat history of reflow soldering (the maximum temperature is about 260 degrees Celsius) for performing the technique which is the main application in surface mounting, and therefore cannot withstand the heat generated during reflow soldering. . Therefore, when the module U6 is mounted on the substrate, only the sensor 135# is installed by reflow. Thereafter, the lenticular lens and the second lens L2 are partially resined by resin, or the mounting portions of the first lens L1 and the second lens L2 are locally heated. installation method. On the other hand, in recent years, in the field of camera modules for mobile devices and the like, an array-like lens (optical element array) represented by a wafer-level lens used in the implementation of a wafer-level lens process has been developed. The array lens is formed by integrally molding a plurality of lenses, and more specifically, a plurality of lenses are integrally formed on one plate including a resin. A method of manufacturing a module (camera module) 148 having an optical element according to the background of the present invention will be described with reference to Figs. 8(a) to 8(e). In recent years, the industry has continued to develop a so-called heat-resistant camera module using a thermosetting resin or an ultraviolet curing I"Sangshu as a material of the first lens L丨 and/or the second lens L2. In the heat-resistant camera module, a thermosetting resin (thermosetting resin) is used instead of the thermoplastic resin 13 1 (refer to FIG. 7( a )) as a material of the first lens li and the second lens L 2 . . The reason why the thermosetting resin 141 is used as the material of the first lens L1 and/or the second lens L2 is that the manufacturing cost of each of the 148829.doc 15 201118359 modules 148 is obtained by collectively manufacturing a plurality of modules 丨48. Reduced. Further, the reason why the thermosetting resin i4i is used as the material of the first lens L1 and the second lens L2 is that the module 148 can be reflowed. The technology for manufacturing module 148 has been proposed in a variety of ways. Among them, representative technologies are the above-described injection molding and wafer level lens processes. In particular, recently, wafer-level lenses (reflowable lenses) processes that are considered to be more advantageous in terms of module manufacturing time and other comprehensive knowledge insights have attracted attention. In the case of the known as a circular lens process, it is necessary to suppress the plastic deformation caused by heat in the ith lens L 丨 and the second lens L2. In view of the necessity, a thermosetting resin material or an ultraviolet curable resin material which is excellent in heat resistance which is not easily deformed by application of heat, and a wafer-level lens of the second lens L2 are attracting attention. Specifically, a wafer-level lens using a thermosetting resin material or an ultraviolet curable resin material as described below is attracting attention, that is, heat resistance which does not plastically deform even if a heat enthalpy of 260 to 280 degrees Celsius is applied. . In the wafer level lens process, array lenses (optical element arrays) and l45 are formed by array-shaped molds l42 and 144, respectively, and then the lenses are bonded together and arrayed. After the sensor 114, the module 148 is manufactured by individually cutting. The details of the wafer level lens process will be described below. In the 曰曰 round lens process, a first mold 142 in which a plurality of concave portions are formed and a plurality of convex portions corresponding to each of the concave portions are formed. The array of the molds 43 of the crucible is sandwiched between the thermosetting resin M1 to thermally harden it. The raw tree crucible 141 is hardened and formed in each of the corresponding concave and convex portions. 149829.doc •16- 201118359 An array of lenses having lenses (refer to (a) of Fig. 8). The array-shaped lens produced by the step shown in FIG. 8(a) is formed by arranging a plurality of lenses 144 of an array of the first lenses L1 and an array of lenses 145 having a plurality of second lenses L2. . Further, the first lens and each of the second lenses L2 are such that the optical axis La passing through the ith lens L1 (the optical axis of the first lens) and the optical axis La passing through the corresponding second lens L2 (the first lens) The array lens 144 is attached to the array lens 145 in such a manner that the optical axes of the lenses are on the same straight line (refer to (b) of FIG. 8). Specifically, the method of aligning the positions of the array-shaped lenses 144 and 145 is not limited by the optical axes, but various methods such as adjustment while imaging are performed, and the alignment is also performed by the wafer. The distance between the formations affects the accuracy. The end portion on the image plane (not shown) side of the module 148 of the array lens 145 is mounted such that each optical axis La is on the same line as the center 146c of each of the corresponding sensors 146. An array of sensors 147 loaded with a plurality of sensors 146 (refer to (c) of FIG. 8). A plurality of modules 148 which are arrayed by the steps shown in (c) of FIG. 8 are cut into each module 148 (refer to (d) of FIG. 8), thereby forming a module 148 (refer to FIG. 8. A plurality of modules 148 are collectively fabricated by the wafer level lens process shown in (a) to (e) of FIG. 8, whereby the manufacturing cost of the module 148 can be reduced. Further, in order to avoid When the module 148 is mounted on a substrate (not shown), it is plastically deformed by heat generated by reflow (maximum temperature is about 26 degrees Celsius), and the first lens L1 and the second lens L2 are preferably used. A thermosetting resin or an ultraviolet curable tree having a heat resistance of 26 〇 to 28 ° C with a tolerance of 1 sec. or more. 149829.doc -17- 201118359 曰 By thermosetting which has heat resistance Resin or ultraviolet curable resin is used for the first lens L1 and the second lens L2, and the module 148 can be reflowed. In the wafer level lens process, a resin material having heat resistance is further used, whereby the resin material can be inexpensively used. Manufacture of modules with optical components that can be used for reflow soldering. However, 'freedom in development and production management From the viewpoint of the array, it is preferable that the amount of the yaw of each lens is detected in an array shape, that is, the lenses of the lenses constituting the array are not singulated, and the yaw of each lens is detected. Regarding array lenses such as wafer-level lenses, it is conceivable to produce a large number of lenses at one time and to detect all the lenses integrally formed in the same resin. Therefore, it is desired in the industry to detect a large number of cores at high speed. The main purpose of the present invention is to provide a lens that can form a single lens (optical element) constituting the array-shaped lens (optical element array), and can manufacture all the lenses. Further, the eccentricity detecting device and the eccentricity detecting method which can be realized by a simple and small-sized device configuration f, and an array-like lens which can easily detect the amount of eccentricity by the above-described partial detecting device and the yaw detecting method. [Embodiment] The eccentricity detecting device 1 shown in Fig. 1 detects the lenses of the array of lens sub-assemblies 歹4 (the amount of the eccentricity of the optical element is measured by the eccentricity) The measuring device 1 includes an L-ary ❹mm image sensor (image pickup device) 6, a gauze display portion 7, and a yaw detection portion 8 〇〇 element imaging optical έ έ & & & ' ' : : : : : : : : : : : : : The lens 50, the aperture light 149829.doc • 18· 201118359 5 1 , and the exit side lens 5 2 . The eccentricity detecting unit 80 includes: a center position yaw detecting material, a diameter reducing yaw detecting unit 8 2, and an inter-image distance The detecting unit 8.3 and the second inter-image distance detecting unit 84. The light source 2 is a light source that illuminates the array lens 4 with the light 3. The light 3 can be applied with laser light, white light, or the like. Therefore, as the light source 2, it can be applied. A well-known laser oscillating device or a device that emits white light...the light source 2 is not necessarily included in the yaw detecting device i', and may be configured to detect the flaking taste independently of the eccentricity. When Yuguang 3 is a laser light, the resolution of the eccentricity detection 1 can be improved. The light 3 emitted from the light source 2 is irradiated to the entire surface of the array-like lens 4 in the direction away from the element imaging optical system 5. On the surface of the array lens 4 which is away from the element imaging optical system 5, a second surface 42 which is a spherical surface of each lens 4 is formed. Thereafter, the light 3 passes through the array lens 4 and is emitted as the transmitted light of the present invention. The transmitted light is emitted from the entire surface of the array-like lens 4 in the direction of the proximity of the element imaging optical system 5, and the spherical surface as the respective mirrors 40 is formed on the surface. Face 41. That is, the transmitted light can be interpreted as a person who permeates the light 3 of each of the lenses 40 constituting the array-shaped lens 4 through the respective lenses (10). More specifically, the above-described light transmission can be interpreted as that the light 3 is incident on the second lens 42 side of the lens (10) of the array lens 4 to the array lens 4, and (iv) the array lens including the lenses. The whole of the four lenses is emitted from the first surface 41 side of each of the lenses 4 of the array lens 4. 149829.doc 19 201118359 The above-mentioned transmitted light is incident on the incident side lens 50 of the element imaging optical system 5. The incident side lens 50 is a general convex lens (focusing lens), so that the incident transmitted light is focused on the focus of the rear (image sensor 6) side. Light focused by the incident side lens 50 is incident on the aperture stop 5丨. The aperture stop 51 limits the diameter of the light beam in the optical axis direction of the component imaging optical system 5 of the incident light and emits the light. Here, the aperture stop 51 is disposed at the focus of the rear side of the incident side lens 50. Further, in the element imaging optical system 5, the above-mentioned transmitted light which is a light beam parallel to the optical axis can be taken in from any of the array-shaped lenses 4. In this case, even if the distance from each of the lenses 40 constituting the array-shaped lens 4 to the element imaging optical system 5 (specifically, the incident side lens 50) changes, the image formed by the corresponding lenses 40 ( The shapes of the Jth transmission image 9 1 and the second transmission image 92) described below do not change. Light passing through the aperture stop 51 is incident on the exit side lens 52. The exit side lens 52 is a general convex lens (focusing lens). Here, the aperture stop 51 is further disposed at the focus of the front side (light source 2) side of the exit side lens 52. In this case, the light passing through the aperture stop 51 is incident on the entrance side lens 52 in such a manner that the light beam which is parallel to the optical axis of the element imaging optical system 5 is emitted from the exit side lens 52. In other words, if the exit side lens 52 is incident on the light passing through the aperture stop 51, the light is focused, thereby emitting light which is a light beam parallel to the optical axis of the element imaging optical system 5. Further, in the present embodiment, the element imaging optical system 5 is configured such that the focus on the rear side of the incident side lens 50 is the same as the position of the focus on the front side of the exit side lens 52' and is identical to each other. 149829.doc • 20· 201118359 Each focus is equipped with an aperture stop 5 1 . In the case of this configuration, the element imaging optical system 5 is a telecentric optical system on both sides. In the case where the shirt image sensor 6 is composed of a cCD (Charge Coupled Device) or a CM 〇S (Complementary Metal Oxide Semiconductor 's complementary metal oxide film semiconductor), the component imaging optical system 5 is preferable. It is a telecentric optical system on both sides. The reason for this is that when a microlens (not shown) is mounted in each pixel of the image sensor 6 composed of a CCD or a CMOS, 'if the beam is obliquely incident, the light receiving efficiency of the image sensor 6 is lowered' In suppressing the oblique incidence, it is effective to make the light emitted from the element imaging optical system 5 parallel to the optical axis. However, in order to achieve the minimum function of the present invention, even if the component imaging optical system 5 is an object side telecentric optical system, there is no problem. In order to realize the object side telecentric optical system, the configuration of the element side imaging optical system 5 shown in Fig. 省略 is omitted, and the configuration of the exit side lens 52 is omitted. The component imaging optical system 5 can be either a telecentric optical system on both sides or a telecentric optical system on the object side as long as the specification of the incident angle with respect to the image sensor 6 is satisfied, but it is necessary to have telecentric characteristics at least on the object side. That is, the element imaging optical system 5 is an object side telecentric optical system, and is an essential component for minimizing an optical system such as imaging an object image on the image sensor 6. Further, it is preferable that each lens of the element imaging optical system 5 uses a large-diameter lens, and the viewing field range is as wide as possible. The specific value of the aperture defined by the "large aperture" described above is changed depending on the configuration of each lens constituting the element imaging optical system 5, and thus it is difficult to express it by numerical values. For example, in detection! In the case of a lens 4, the field of view that can be observed by the imaging optical system 5 of the element 149829.doc 201118359 must be about 01 〇 mm. In the case of detecting a plurality of lenses 40, the field of view which can be observed by the component imaging optical system 5 is preferably about 02 〇 1 to 1 〇〇 claws. The larger the field of view that can be observed, the more the plurality of lenses can be detected. Therefore, in the element imaging optical system 5, in order to expand the field of view that can be observed, the large diameter is required to be incident on the side. Lens 5〇. The incident side lens 50 is sometimes composed of a plurality of lenses. According to the specific example of the aperture defined by the above-mentioned "large diameter", in other words, by the respective lenses constituting the component imaging optical system 5, it is possible to realize a range of viewing angles of about #2〇1 to about 1 mm. The degree of caliber. When the light 3 emitted from the light source 2 is incident on a flat portion of the lens 4 that is substantially perpendicular to the array of light rays (that is, a surface on the second surface 42 side of each lens 4 other than the second surface 42), Except for a certain degree of reflection, it is linearly advanced without being affected by the surface of the array-shaped lens 4, and is observed as a bright image in the image plane (not shown) of the element imaging optical system 5. On the other hand, the first surface 41 and the second surface 42 of each of the lenses 4 in the array 4 having an oblique shape on the surface perpendicular to the light refract and scatter the irradiated light 3, thereby imaging the element In the image plane of the system 5, it is observed to be a dull image compared to the above-mentioned bright image. Further, on the first surface 41 and the second surface 42 of the same lens 40, the irradiated light 3 exhibits different refracting and scattering. Therefore, strictly speaking, in the above-mentioned transmitted light, there is a light which is considered to be emitted from the first surface 41 of the lens 40 in the array lens 4, and is considered to be in the array-like lens 4. The light emitted by the second surface 42 of the lens 4 is different from the light of each lens 4 149829.doc -22- 201118359. Therefore, when the element imaging optical system 5 images the lens 40 by the incident transmitted light, the first transmission image 91 obtained by imaging the first surface 41 appears as an image formed by the lens 40. (Refer to FIG. 2) and the second transmission image 92 obtained by imaging the second surface 42 (refer to FIG. 2). The first transmission image 91 and the second transmission image 92 are formed by the transmitted light passing through the element imaging optical system 5 which is a side optical system of both sides, and thus become the first surface 41 corresponding to the above observation. The shape obtained by the second surface 42 is substantially the same shape. In addition, the positional relationship between the first transmission image 91 and the second transmission image 92 in the direction perpendicular to the optical axis of the element imaging optical system 5 becomes the corresponding first surface associated with the direction. The positional relationship between the 41 and the second surface 42 is substantially the same. Further, each of the first transmission images 91 and the second transmission images 92 transmits a bright image formed by the transmitted light of the flat portion to the image plane of the element imaging optical system 5, and the lens 4 according to the array is produced. The contrast between the j-th surface 41 and the second surface 42 of each lens 4 corresponding to each of the lenses is different. Here, the "contrast of image" in the present application means not only the brightness of the image but also the distribution of the amount of light which changes with the formation of the image such as the shape of the image, the position of the image, and the size of the image. Light emitted from the exit side lens 52 is incident on the image sensor 6. The image sensor 6 is an imaging element constituting a solid-state imaging device such as a CCD or a CMOS, which converts incident light into an electrical signal, and supplies the electrical signal to the display unit 7 and the yaw detecting unit 80. Here, the image sensor 6 is disposed at a position corresponding to the image of the component imaging optical system 5, 149829.doc • 23·201118359. Therefore, A m 氐 does not relate to the first transmitted image 91 and the second transmitted image 92 of each lens 40, and the other is formed by the transparent light transmitted through the flat portion. All of the transmitted light, such as the lens 4 from the soap bar, is incident on the image sensor 6. The display unit 7 converts the first transmission image 91 and the second transmission lens 91 for each lens 40 by the light incident on the image sensor 6 based on the electric signal supplied from the image sensor 6 Through the like 92 as a sputum show no. Further, as the display unit, various known display devices such as a liquid crystal display, a display, a display, a coffee ((10), a heart tube, a cathode ray tube, and an organic 丨 (10).) electroluminescence display device can be used. The apex detecting unit 8 detects the eccentricity of each lens 4G based on, for example, a specific input signal from a cpu (centrai Pr()eessing Unit) that does not indicate the meaning of the start operation. The amount of the person, or the input of the electric (4) as a trigger, and according to the electrical signal to detect the amount of the yaw of each lens 4 。. The yaw detection part 8 〇 can detect the deflection of each lens 4 偏The result obtained after that is displayed on the display unit 7 as shown in FIG. 2, and the result can be stored in a memory medium (recording medium) not shown in the memory, etc. Fig. 2 is a view showing that no lens is produced. In the case of the case of the yaw of the ridge, the method of detecting the eccentricity by the center position detecting unit 81 is used. Fig. 3 is a view showing the case where the center position detecting unit 81 detects the eccentricity when the yaw of the lens 40 is generated. Figure of the essentials. Divide the two sides of the same lens 40 The i-th transmission image 91 and the second transmission image 92 obtained by imaging are substantially the same shape as the first surface 41 and the second surface 42 corresponding to the above-mentioned observation, and the first transmission is 149829.doc -24-201118359, and the first transmission is obtained. The relative positional relationship between the image 91 and the second transmission image 92 corresponds to the direction of the optical axis (hereinafter referred to as "ideal") when it is perpendicular to the nucleus where the lens 40 is not generated. The positional relationship between the one surface 41 and the second surface 42 is substantially the same (refer to FIGS. 2 and 3). The center position detecting unit 8 1 obtains the respective shapes indicating the first transmission image 91 and the second transmission image 92 based on the electric number supplied from the image sensor 6 (refer to FIG. ,), and further the first transmission image. Information on the relative positional relationship between 91 and the second transmitted image 92. The center position ash detecting unit 8.1 calculates the center 93 of the ith transmission image 91 based on the obtained information 'the shape indicating the shape of the first transmission image IX', and based on the information indicating the shape of the second transmission image 92, The center 94 of the second transmitted image 92 is calculated. Furthermore, as a method of calculating the centers 93 and 94, a method of calculating the center 93 based on the above information indicating the shape of the second transmission image 9丨, for example, by the least square method, and 2 The center 94 is calculated by the above information of the shape like 92. The reason why this method is applicable is that it is observed as the spherical surface from above! Since the shapes obtained by the surface 41 and the second surface 42 are both substantially circular, the shapes of the ith transmission image 9 and the second transmission image 92 are also substantially circular (circular transmission image). In order to calculate the center 93 based on the above information indicating the shape of the second transmitted image 91 by the least square method, first, the center 93xy of the circle is set inside the i-th transmitted image 91 as a virtual center point. Next, the center 93xy is used as the origin coordinate, and the i-th transmission image 91 is equally divided from the center 93xy, that is, for example, the angle a and the angle b are equal to each other, and the 149829.doc -25·201118359 is transmitted through Like w. At this time, the coordinates (A, W) of the point i which is one of the intersections (points i, ·2, . . . ) of the respective divided lines and the first transmission image (the point i, the following equations (1) and (4), respectively. Further, at this time, the center coordinates (", β) of the i-th transmission image 9 and the radius R of the first transmission image 91 can be obtained by the following equations (5) to (7). The case where the center 94 is calculated by the above information like the shape of % can be calculated by the same method (refer to Fig. 9).
Xj = if, X cos^ =Rtx sin^.Xj = if, X cos^ =Rtx sin^.
N 2Σχ- …⑹N 2Σχ- ...(6)
N 2S>,· …⑺ 再者’藉由最小平方法計算出圓（第i透過像91及第2透 過像92)之中心之技術本身係可利用先前眾所周知之慣用 技術而充分實現者，故較容易。 按照以上之要領而分別求出之中心93與中心94將透鏡40 之第1面41之中心、及透鏡40之第2面42之中心顯示於各自 所對應之第1透過像91及第2透過像92上。 其後’中心位置偏蕊檢測部8丨根據分別所計算出之中心 93及94 ’求出中心93與中心94之分離距離（第1及第2透過 149829.doc •26- 201118359 像之各中心間之分離距離）。 此處’於圖2中，中心93與中心94之位置相互一致。於 此情形時，在垂直於理想之光軸之方向上，透鏡4〇之第1 面41之中心與透鏡40之第2面42之中心成為相互相同之位 置。因此，穿過透鏡40之第1面41之中心的光軸41 a與穿過 透鏡40之第2面42之中心的光軸42a相互一致，於此情形 時’可忍為未產生透鏡4 0之偏蕊。 另一方面，於圖3中，中心93與中心94之位置相互不 同，3玄專之分離距離為d。於此情形時，在垂直於理想之 光軸之方向上’透鏡40之第1面41之中心與透鏡40之第2面 42之中心相互分離僅距離d。因此，在垂直於理想之光軸 之方向上，穿過透鏡40之第1面41之中心的光軸41a與穿過 透鏡40之第2面42之中心的光軸42a相互分離僅距離d而存 在’於此情形時’可認為已產生量為d之透鏡4〇之偏蕊。 元件成像光學系統5根據上述兩側遠心光學系統之特 性’自透鏡40中之兩面分別取入與光軸平行之光束。因 此，於透鏡40中之兩面之各中心在理想之光軸的方向上成 直線之情形時，將該等各中心顯示·於各自所對應之第1 透過像91及弟2透過像92上的第1透過像91之中心93與第2 透過像92之中心94成為相互相同之位置。另一方面，於透 鏡40中之兩面之各中心在理想之光軸的方向上未變成一直 線，而在垂直於該光軸之方向上呈現位置偏移之情形時， 對應於該位置偏移，第丨透過像91之中心93與第2透過像92 之中心94相互分離。因此，藉由將該分離距離視為透鏡4〇 149829.doc -27- 201118359 面之各中〜的位置偏移之量’而中心位置偏蕊檢測 部81可檢測透鏡40之偏蕊（所謂平行偏蕊）之量。 圖4係忒明利用直徑縮小偏蕊檢測部u檢測偏蕊之要領 的圖。 再者於以下之直徑縮小偏蕊檢測部82之詳細的說明 中作為透鏡40之偏蕊檢測之要領的一例，僅對直徑縮小 偏…檢測。p 82根據表示第！透過像91之形狀之資訊，檢測 透兄40之第1面41上之偏蕊之量θ的情形進行說明。但是， 即使於直徑縮小偏蕊檢測部82根據表示第2透過像％之形 狀之資訊’檢測透鏡40之第2面42上之偏蕊之量的情形， 進而檢測該等兩者之情形時，偏蕊檢測之基本原理（要領） 亦相同，若為熟悉此技藝者，則可根據以下之詳細之說 明，谷易地實施透鏡4〇之第1S41&/或第2面42之偏蕊之 量的檢測。 直徑縮小偏蕊檢測部8 2根據自影像感測器6 (圖i參考）所 供給之電信號，獲得表示第1透過像91之形狀之資訊。 直徑縮小偏蕊檢測部82根據所獲得之表示第i透過像91 之形狀的上述資訊，計算出第丨透過像91之直徑 再者，作為計算出直徑a之方法，可考慮例如藉由上述 最J平方法進行s十算之方法。該方法係可應用之方法之原 因在於··第1透過像91之形狀變成圓形（圓形透過像）。 藉由最小平方法，根據表示第丨透過像9〗之形狀之上述 貝矾計算出直徑a的方法於說明藉由最小平方法計算出中 心93之方法時已經敍述（即，上述數式（5)之解χ2)，故此處 149829.doc • 28 · 201118359 省略詳細之說明（參考圖9)。 再者’藉由最小平方法計算出圓（第1透過像91)之直徑 之技術本身係可利用先前眾所周知之慣用技術而充分實現 者’故較容易。 按照以上之要領所求出之直徑a將透鏡40之第1面41的直 徑顯示於第1透過像91上。 此處’於圖4所示之透鏡40(參考圖1)之第1面41上，藉 由直徑縮小偏蕊檢測部82所求出之第1 ‘過像91之直徑如 上所述為a ^於直徑為&之情形時，可認為於第i面41上未 產生偏蕊。 另一方面，圖4所示之透鏡40(參考圖丨）之第1面411表示 相對於第1面41，產生向上方傾斜了僅肖度θ之偏蕊（所謂 傾斜偏蕊）之情形。又，於圖4中，按照與第i面4ι之成像 相同之要領，將使第丨面41t成像而得之第丨透過像表示為 第1透過像91t。藉由直徑縮小偏蕊檢測部82所求出之第J 透過像91t之直徑變成較上述a更短之b。 然後，直徑縮小偏蕊檢測部82使用上述直徑a及直徑b， 藉由下述數式⑺求出產生偏蕊之角度0，藉此認為於第巧 川上已產生量為θ之透鏡4〇之偏蕊，結果，可檢測偏蕊之 〇=arccos(b/a) …⑺ 再者’即使圖4所示之透鏡40(參考圓υ之第ΐφ4ι產生 向下方傾斜了僅角度θ之偏蕊’直徑縮小偏蕊檢測部㈣ 同樣可藉由上述數式（2)檢測角度（偏蕊之量）θ。 149829.doc •29· 201118359 又，於第1面411並非圓形而為橢圓形之情形時，只要使 用該橢圓形之短軸代替上述直徑b即可。 圖5係說明利用第1像間距離檢測部8 3檢測各透鏡4 〇間之 間距之要領的圖。 透鏡401〜403表示3個透鏡40。但是，可應用藉由第“象 間距離檢測部83檢測各透鏡40間之間距之要領的透鏡4〇之 個數只要為2個以上，則並無特別限定。 於各透鏡401〜403中，設置有各自所對應之第1面 411〜413(第 1 面 41)及第 2 面 421-423(第 2 面 42)。 第1透過像911〜913(第1透過像91)係藉由元件成像光學 系統5 (參考圖1)使各自所對應之第1面411〜413成像而得 者。第2透過像921〜923(第2透過像92)係藉由元件成像光 學系統5(參考圖1)使各自所對應之第2面421〜423成像而得 者。 第1像間距離檢測部83根據自影像感測器6(圖1參考）所 供給之電信號’計算出各第1透過像911〜913之中心 931〜933 。 再者，第1像間距離檢測部83計算出各中心93 1〜933為止 之處理係只要對各透鏡401〜403實施中心位置偏蕊檢測部 81計算出中心93為止之處理（參考圖2及圖3)便足夠。 然後’第1像間距離檢測部83根據所計算出之各中心 93 1〜933中之2個中心間的分離距離，檢測相對應之2個各 透鏡401〜403之任一者之間距。 例如，第1像間距離檢測部83將中心93 1與中心932之分 149829.doc -30- 201118359 離距離作為透鏡4〇 1及402間之間距，將中心93 1與中心933 之分離距離作為透鏡4〇 1及403間之間距。 進而’亦可藉由第2像間距離檢測部84代替第1像間距離 檢測部83實施各透鏡40間之間距檢測。 於藉由第2像間距離檢測部84實施各透鏡40間之間距檢 測之情形時’第2像間距離檢測部84首先根據自影像感測 器6(參考圖1)所供給之電信號，計算出各第2透過像 921~923f 之中心 941〜943。 再者’第2像間距離檢測部84計算出各中心941〜943為止 之處理係只要對各透鏡401〜403實施中心位置偏蕊檢測部 81計算出中心94為止之處理（參考圖2及圖3)便足夠。 然後，雖然未圖示，但第2像間距離檢測部84根據所計 异出之各中心941〜943中之2個中心間的分離距離，檢測相 對應之2個各透鏡401〜403之任一者之間距。 例如，第2像間距離檢測部84將中心941與中心942之分 離距離作為透鏡401及402間之間距，將中心941與中心943 之分離距離作為透鏡401及403間之間距。 再者，即便係僅具備第1像間距離檢測部83及第2像間距 離檢測部84之一者之構成，亦可實施各透鏡40間之間距檢 測，故不存在問題。 將各第1面411〜413分別成像而得之各第1透過像911〜91 3 之位置係反映在垂直於元件成像光學系統5之光轴之方向 上的各第1面411〜413之位置關係。據此，若以於該方向分 散之方式而配置各透鏡401〜403，則關於計算出各中心 U9829.doc •31 - 201118359 931〜933為止之處理，只要單純地對各透鏡4〇1〜4〇3實施計 算出中心93為止之處理，便可無任何問題地實施。又，即 使各透鏡401〜403以於該方向上重疊之方式而設置，只要 可藉由伴隨重疊之對比度之變化，纟某種程度i明破地判 別各第1透過像911〜913，則於實施上述處理時，亦不會造 成較大之障礙。 同樣地，將各第2面421〜423分別成像而得之各第2透過 像921〜923之位置係反映在垂直於元件成像光學系統5之光 軸之方向上的各第2面421〜423之位置關係。據此，若以於 該方向分散之方式而配置各透鏡4〇1〜4〇3，則關於計算出 各中心941〜943為止之處理，只要單純地對各透鏡4〇1〜4〇3 實施計算出中心94為止之處理，便可無任何問題地實施。 又，即使各透鏡401〜403以於該方向上重疊之方式而設 置，只要可藉由伴隨重疊之對比度之變化，在某種程度上 明確地判別各第2透過像921〜923，則於實施上述處理時， 亦不會造成較大之障礙。 此外，於圖5中，進而組合中心位置偏蕊檢測部81(參考 圖2及圖3)，檢測各透鏡401〜403之偏蕊之量。再者，為藉 由中心位置偏蕊檢測部81檢測各透鏡401〜403之偏蕊之 量，只要對各透鏡401〜403實施檢測量為d之透鏡4〇之偏蕊 的上述一系列之要領（圖2及圖3參考）便足夠。 進而，雖然未圖示’但為藉由直徑縮小偏蕊檢測部82檢 測各透鏡401〜403之偏蕊之量，只要對各透鏡4〇1〜4〇3之第 1面411〜413(亦可為第2面421〜423)實施檢測量為θ之透鏡 I49829.doc -32· 201118359 40之第1面41之偏蕊的上述一系列之要領（參考圖4)便足 夠。 如此，中心位置偏蕊檢測部81、直徑縮小偏蕊檢測部 82、第1像間距離檢測部83、以及第2像間距離檢測部討可 任意地組合。進而，中心位置偏蕊檢測部81及直徑縮小偏 蕊檢測部82可對複數個透鏡4〇之各者檢測偏蕊之量。進 而，第1像間距離檢測部83及第2像間距離檢測部84可對複 數個透鏡40之各者檢測任意2個透鏡4〇間之間距。 再者，於透鏡40之偏蕊之量非常大之情形時，亦可考慮 如下之檢測方法，即無需實施利用偏蕊檢測部80之檢測， 而例如使用者目視投影於元件成像光學系統5之像面中所 設置之螢幕（未圖示）的第丄透過像91及第2透過像Μ，並根 據第1透過像91及第2透過像92之對比度，大概地計算透鏡 4〇之偏說之# 〇藉此，作為檢測，亦可實施粗略之檢測。 於此情形時，偏蕊檢測部8〇可省略。 偏蕊檢測裳置1係無需使檢測用之光3於透鏡40之特定區 域中聚光，即可檢測該透鏡4G之偏蕊之量者，因此每當使 用1台裝置進行1次檢測時’可對複數個透鏡40實施檢測。 因此’無需在將例如圖8之⑷所示之陣列狀之感測器147等 構件安裝於陣列狀之透鏡4前之階段，將構成陣列狀之透 各it鏡40單片化’即可__併檢測所有各透鏡心 再者於々人併檢測各透鏡4〇之偏蕊之量的情形時、 9要2對：個W個透鏡4。所形成之第i透過像91及第2透過像 併實施上述巾讀置偏蕊檢測部Μ及直徑縮小偏蕊 只 H9829.doc •33· 201118359 檢測部82中之各種檢測要領即可。若可將由各透鏡4〇所形 成之第1透過像91及第2透過像92區分為由1個透鏡40所形 成者’則只要對上述各個透過像同時實施上述中心位置偏 蕊檢測部8 1及直徑縮小偏蕊檢測部82中之各種檢測要領， 便可單純且簡單地實現一併檢測各透鏡4〇之偏蕊之量。尤 其，使用影像感測器6—併拍攝由構成陣列狀之透鏡4之所 有各透鏡40所形成的第1透過像91及第2透過像92，並對所 拍攝之各第1透過像91及第2透過像92進行圖像處理藉 此中’“位置偏淡檢測部8 1及直徑縮小偏蕊檢測部82實施 各種檢測要領，可對各透鏡4〇 一併實施偏蕊之量之檢測。 於偏蕊檢測裝置1欲一併檢測所有各透鏡4〇之情形時， 與透鏡40之個數無關，最低限度之必需之裝置構成仍然只 有兀件成像光學系統5。因此’尤其於陣列狀之透鏡4上成 形有多個透鏡40之㈣時’與上述先前技術之各偏蕊檢測 裝置相比’能夠以簡單且小規模之裝置構成實現偏蕊檢測 偏蕊檢測裝置1係可根據第1透過像91及第2透過像92之 對比度’檢測透鏡4G之偏蕊之㈣單純之原理，因此不限 定於至少一面為非球面之透鏡，對於兩面為球面之透鏡， 亦可無任何問題地應用。 透巧像二：仏’則裝置1中，關於檢測作業’只要根據第1 透過㈣及第2透過像92之對比度檢測透 便足夠，檢測作掌變得粹& m 询.如炙里 性。 ％㈣易’因此可降低偏蕊檢測之煩雜 I49829.doc -34- 201118359 又，只要相對應之透鏡40中之第1面41或第2面42不平 坦，第1透過像91及第2透過像92之鮮明度便達到可檢測之 程度，因此即使於檢測光軸附近較平坦之透鏡4〇之偏蕊之 量的情形時，亦可降低檢測變得困難之可能性。 再者，利用偏蕊檢測裝置1之偏蕊檢測之精度可對應於 具備元件成像光學系統5的觀察系統之分辨率而高精度 化。於元件成像光學系統5中，省略提昇第丨透過像91及第 2透過像92之分辨率之方法的詳細情況，但作為分辨率， 於藉由檢測系統進行第1透過像91及第2透過像92之各尺寸 之檢測的情形時，較佳為絕對精度為丨μ〇1以下。於此情形 時，第1透過像91及第2透過像92之各尺寸精度能夠以接近 絕對精度之值進行檢測。其結果，根據圓形之第丨透過像 91及第2透過像92之各中心間的相對距離，檢測偏蕊及透 鏡間之間距之結果亦同樣能夠以與絕對精度相同程度之精 度進行檢測。進而，於球面或非球面之形狀因成形製程能 力而變成旋轉非對稱、或者具有相對於設計值之誤差的情 形時，只要用作觀察像之部分之轉印性可良好地形成便可 進行檢測。另一方面，於先前技術_，面形狀為對象且形 狀誤差量較小成為必需。 圖6係表示作為透鏡4〇之變形例之透鏡4〇，的構成與由透 鏡4〇’所形成之第丨透過像91及第2透過像％之對比度的關係 之圖。 圖6所示之透鏡40,相對於透鏡4〇之構成之不同點在於·· 在與光3所入射之面相反侧之面中的有效口徑之外周部 149829.doc •35· 201118359 第面4 1之外周部分設置有突出部。該外周部分係 所渭之透鏡之邊緣。除此以外’ 1¾突出部亦可設置於第2 面42之外周部分（邊緣），’亦可設置於第1面41及第2面42之 兩外周部分（邊緣）。 上述犬出部於第1面41及/或第2面42之周圍，具有朝垂 直上方大出之突出區域45，且於突出區域45之周圍具有形 成相對於突出區域45之階差的階差區域46。於圖6中，由 於上述突出部設置於第1面41側，因此突出區域45於第工面 41之周圍朝垂直上方突出。 亦有時藉由成為檢測對象之透鏡之形狀來區分第1及第2 透過像並不簡單。 相對於藉由轉印形成透鏡之製程，例如於邊緣設置上述 突出部，進而使用使該突出部成像而得之像，藉此易於進 行檢測。 即’上述突出部之突出區域45使所入射之光3(參考圖1) 幾乎不散射而直線前進。藉此’使突出區域45成像而得之 像部分與其他像（第1透過像91及第2透過像92)部分相比變 明亮（參考圖6之符號95)。 另一方面’上述突出部之階差區域46使所入射之光3(參 考圖1)散射。藉此，使階差區域46成像而得之像部分與其 他像部分相比變暗淡（參考圖6之符號96)。 其結果’藉由明亮之區域95及暗淡之區域96，而易於識 別第1透過像91及第2透過像92之輪廓，因此易於根據第1 透過像91及第2透過像92之對比度進行透鏡40'之偏蕊之量 149829.doc -36- 201118359 的檢測。 再者，如圖6所示，當於第丄面“側設置上述突出部時， 於透鏡40'中之光3所入射之面中的有效口徑之外周部分， 即第2面42之外周部分，為減少由求出十心之面之求出環 . 中心之面的相反面之形狀所引起之使光線彎曲或散射的影 . 響，較佳為平面。 透鏡40'亦可為構成陣列狀之透鏡4(參考圖〇之各透鏡4〇 中之1個。 圖10係說明未產生將2個透鏡40p及40q貼合而成之透鏡 40r之偏蕊的情形時之利用中心位置偏蕊檢測部8丨檢測偏 蕊之要領的圖。圖11係說明產生透鏡40r之偏蕊之情形時 的利用中心位置偏蕊檢測部81檢測偏蕊之要領之圖。 圖10及圖11所示之透鏡40r中之2個透鏡40p及40q之貼合 併非必需，只要透鏡40p及40q相互於大致沿著透鏡40ι•之 理想之光轴的方向上重疊即可。 透鏡40p分別具有第1面41p與第2面42p。透鏡40q分別具 有第1面41q與第2面42q。 中心位置偏蕊檢測部81能夠以與圖2及圖3中所說明之要 . 領相同之要領，檢測透鏡40p與透鏡40q之間所產生之偏蕊 的量dd。 元件成像光學系統5使第1面41p、第2面42p、第1面 4lq、以及第2面42q成像而得之像分別成為第1透過像 91p、第2透過像92p、第1透過像91q、以及第2透過像 92q 〇 149829.doc -37- 201118359 中心位置偏蕊檢測部8 1例如藉由上述最小平方法，分別 計算出作為第1透過像91p、第2透過像92p、第1透過像 91q、以及第2透過像92q之各中心之中心93p、中心94p、 中心93q、以及中心94q。 然後，中心位置偏蕊檢測部8 1根據分別計算出之中心 93p、中心94p、中心93q、以及中心94q，求出可想到之所 有中心彼此之分離距離。 於中心93p、中心94p、中心93q、以及中心94q全部變成 相同之位置之情形時，透鏡40p間、透鏡40q間、進而透鏡 4〇p與透鏡40q之間均未產生偏蕊（參考圖1〇)。 當中心93p及94p與中心93q及94q相互分離距離dd之情形 時’於透鏡40p與透鏡4〇q之間產生量為dd之透鏡4〇r之偏 蕊（參考圖11)。 光軸41pa、光轴42pa、光轴41qa、以及光軸42qa分別對 應於穿過第1面41p之中心之光軸、穿過第2面42p之中心之 光軸、穿過第1面41 q之中心之光軸、穿過第2面42q之中心 之光軸。 於圖10之情形時，光軸4ipa、光軸42pa'光軸41qa、以 及光軸42qa相互一致，於此情形時，中心位置偏蕊檢測部 8 1可認定未產生透鏡4〇!：之偏蕊。 另一方面，於圖11之情形，光軸41pa及42pa與光軸41qa 及42qa在垂直於透鏡4〇Γ之理想之光軸的方向上相互分離 僅距離dd而存在，於此情形時，中心位置偏蕊檢測部8 j可 認定已產生量為dd之透鏡4〇r之偏蕊，具體而言為透鏡4〇p 149829.doc -38- 201118359 與透鏡40q之間之偏蕊。 再者，透鏡40p間及透鏡40q間之各偏蕊之量£1的檢測只 要以與圖2及圖3所示之要領相同之要領(求出偏蕊之量廿之 要領）實施即可（參考圖15及圖16)。即，只要將圖15及圖16 之符號「40p、41p、42p」「91P、92p ' 93p、94p」 「41pa、42pa」分別解釋為與圖2及圖3之符號「4〇、4i、 42」「91、92、93、94」「41a、42a」相對應者即可。此 處，為便於說明，僅表示檢測透鏡4〇p間之偏蕊之量d的情 形，但檢測透鏡40q間之偏蕊之量d的情形亦相同。 除透鏡40p間及透鏡4〇q間之各偏蕊之量以外，中心位置 偏蕊檢測部81可藉由檢測圖丨丨所示之透鏡4〇p與透鏡4叫之 間的偏蕊之量dd，而檢測透鏡4〇r之偏蕊之量。 圖10及圖11之偏蕊檢測之要領亦可同樣適用於使多個透 鏡4〇P—體地成形於包含樹脂之！片板上而成之陣列狀之透 鏡4p、以及使多個透鏡4〇q 一體地成形於包含樹脂之1片板 上而成之陣列狀之透鏡4q(參考圖12)。 進而，藉由同時或交替地實施圖1〇及圖丨丨之偏蕊檢測與 透鏡40p及40q之相對之位置關係的調整，可進行透鏡4〇r 之調(使2個透鏡之各光軸成一直線卜該調蕊可對1個透 鏡40r實施’同樣地，亦可對複數個透鏡4〇r實施。 進而，上述調蕊亦可實施圖12所示之陣列狀之透鏡4p及 4q的相對之位置關係之調整，以代替透鏡4〇p及之相對 之位置關係的調整。 圖13之（a) (c)表示上述調蕊之要領之概略。具體而言， 149829.doc -39- 201118359 圖13之（a)〜（c)表示實施圖12所示之陣列狀之透鏡邮及攰的 相對之位置關係之調整的情形。 首先，於僅使陣列狀之透鏡4p與陣列狀之透鏡句重疊而 不貼合之狀態下，藉由圖10及圖丨丨中所示之要領檢測各透 鏡40p與相對應之各透鏡40q之間的偏蕊之量dd(參考圖13 之⑷）。 於圖13之（a)之偏蕊檢測後，視需要使陣列狀之透鏡邮或 4q在相對於透鏡40r(參考圖1〇)之理想之光軸垂直、且相互 垂直之X方向及γ方向上移動，從而謀求調蕊（參考圖13之 (b) )。 又，於圖13之（a)之偏蕊檢測後，視需要使陣列狀之透鏡 4p或4q在相對於透鏡4〇r之理想之光軸垂直的方向上旋轉 (參考角度γ)，從而謀求調蕊（參考圖13之（(〇)。 再者，實施圖13之（b)及（c)之各調蕊的順序並無特別限 疋，可先貫施任一種調蕊。又，較佳為每次於圖丨3之（b)及 (c) 之各調蕊後，視需要適當地再次實施圖13之（&)之偏蕊 檢測。進而，亦可一面繼續實施圖13i(a)之偏蕊檢測，一 面實施圖13之（b)及（c)之各調蕊。 當於透鏡40r(參考圖1〇等）上設置有具有突出區域45及階 差區域46之上述突出部（參考圖6)之情形時，進而可對應於 該突出部之高度，調整透鏡4〇p與透鏡4〇q之間隔（參考圖 14)。 圖14所示之透鏡40r，係透鏡4〇r之變形例。於透鏡4心， 中，在透鏡40p及40q各自之於偏蕊檢測時成為接近元件成 149829.doc -40· 201118359 像光學系統5之側（圖丨4之剖面圖下側）的面中之有效口徑之 外周部分’設置有上述突出部（突出區域45及階差區域 46) ’並將該等透鏡分別稱為透鏡40p，及40q'(第1及第2光學 元件）。 此處’透鏡40P'與透鏡40q'係以使透鏡40p'之上述突出 部抵接於透鏡40q，之方式貼合。而且，藉此，於未抵接之 部分’透鏡40ρ·與透鏡4〇q，會分離固定間隔。可根據透鏡 40p'之上述突出部之高度，變更該固定間隔。因此’可藉 由透鏡40p’之上述突出部，調整透鏡4〇p，與透鏡4〇q，之間 隔。 於偏蕊檢測裝置1中，藉由具有即使至被攝體為止之距 離變化’像之形狀亦不變化之特性的元件成像光學系統 5，使成為檢測對象之透鏡之各面成像而分別形成像（第i 及第2透過像），並根據該等各像之對比度，進行該透鏡之 偏蕊檢測等。因此，於偏蕊檢測裝置丨中，不論成為檢測 對象之透鏡之各面中的哪一面成為接近元件成像光學系統 5之側（或者接近光源2之側），均能夠以與以上所說明之各 要領相同之各要領，進行該透鏡之偏蕊檢測等。於本實施 形態中，為便於說明，根據具體之實施例而適當考慮第j 面為接近元件成像光學系統5之側之面的情形、以及第2面 為接近元件成像光學系統5之側之面的情形兩者，但即使 該等面為接近光源2之側之面，所獲得之像之對比度亦幾 乎不變化’因此不會對檢測造成任何障礙。 再者，作為本發明之光學元件，除透鏡以外，可列舉存 149829.doc •41 · 201118359 在偏蕊之概念之所有透明光學元件。又，作為光學元件之 透鏡，存在攝像透鏡、聚光用透鏡、照明用透鏡等。 又，本發明之偏蕊檢測裝置之特徵在於包括偏蕊檢測 部，其根據上述第】及第2透過像之對比度，檢測上述光學 元件之偏蕊之量。 根據上述構成，本偏蕊檢測裝置可檢測光學元件之偏蕊 之量。 又’本發明之偏蕊檢測裝置之特徵在於：上述偏蕊檢測 部包括中讀置偏蕊檢測部，其將上述第丨及第2透過像之 各中心間之分離距離作為上述光學元件之偏蕊的量。 根據上述構成，本偏蕊檢測裝置將p及第2透過像之各 ▲]之刀離距離作為光學元件之偏蕊的量，藉此可檢測 該偏蕊之量。 本發明之偏蕊檢測裝置之特徵在N 2S >, (7) Further, the technique of calculating the center of the circle (the i-th transmission image 91 and the second transmission image 92) by the least square method can be fully realized by using a conventionally known conventional technique. It's easier. The center 93 and the center 94 which are respectively obtained according to the above method display the center of the first surface 41 of the lens 40 and the center of the second surface 42 of the lens 40 in the first transmission image 91 and the second transmission corresponding thereto. Like on 92. Thereafter, the center position detection unit 8 求出 determines the separation distance between the center 93 and the center 94 based on the centers 93 and 94 ' respectively calculated (the first and second transmission centers 149829.doc • 26 - 201118359) Separation distance between)). Here, in Fig. 2, the positions of the center 93 and the center 94 coincide with each other. In this case, the center of the first surface 41 of the lens 4 and the center of the second surface 42 of the lens 40 are at the same position in the direction perpendicular to the ideal optical axis. Therefore, the optical axis 41a passing through the center of the first surface 41 of the lens 40 and the optical axis 42a passing through the center of the second surface 42 of the lens 40 coincide with each other, and in this case, the lens 40 is not produced. The yin. On the other hand, in Fig. 3, the positions of the center 93 and the center 94 are different from each other, and the separation distance of the 3 Xuan special is d. In this case, the center of the first surface 41 of the lens 40 and the center of the second surface 42 of the lens 40 are separated from each other by a distance d only in the direction perpendicular to the ideal optical axis. Therefore, in the direction perpendicular to the ideal optical axis, the optical axis 41a passing through the center of the first face 41 of the lens 40 and the optical axis 42a passing through the center of the second face 42 of the lens 40 are separated from each other by only the distance d. The presence of 'in this case' can be considered to have produced a yaw of the lens 4 of the amount d. The element imaging optical system 5 takes in a light beam parallel to the optical axis from both sides of the lens 40 in accordance with the characteristics of the above-described two-sided telecentric optical system. Therefore, when the centers of the two faces of the lens 40 are in a straight line in the direction of the ideal optical axis, the centers are displayed on the respective first transmitted image 91 and the second transmitted image 92. The center 93 of the first transmission image 91 and the center 94 of the second transmission image 92 are at the same position. On the other hand, the centers of the two faces in the lens 40 do not become a straight line in the direction of the ideal optical axis, but correspond to the positional shift when a positional shift occurs in a direction perpendicular to the optical axis. The third pass is separated from the center 94 of the second transmitted image 92 by the center 93 of the image 91. Therefore, by the separation distance is regarded as the amount of positional shift of each of the faces of the lens 4〇149829.doc -27-201118359, the center position yaw detecting portion 81 can detect the yaw of the lens 40 (so-called parallel The amount of partial core). Fig. 4 is a view showing the method of detecting the eccentricity by using the diameter reducing nucleus detecting portion u. Further, in the following description of the diameter-reducing sinus detection unit 82, as an example of the method of detecting the eccentricity of the lens 40, only the diameter reduction is detected. p 82 according to the indication! The case where the amount of the eccentricity θ on the first surface 41 of the brother 40 is detected by the information of the shape of the 91 will be described. However, even when the diameter-reduced sinus detection unit 82 detects the amount of the eccentricity on the second surface 42 of the lens 40 based on the information indicating the shape of the second transmission image %, the two are detected. The basic principle (method) of the detection of the eccentricity is also the same. If you are familiar with the art, you can implement the amount of the first S41 & / or the second surface 42 of the lens 4 according to the detailed description below. Detection. The diameter-reduced ridge detecting unit 282 obtains information indicating the shape of the first transmitted image 91 based on the electric signal supplied from the image sensor 6 (referenced in Fig. i). The diameter reduction sinus detection unit 82 calculates the diameter of the second transmission image 91 based on the obtained information indicating the shape of the ith transmission image 91. As a method of calculating the diameter a, for example, the above-mentioned maximum is considered. The J-flat method performs the s-calculation method. The reason why this method is applicable is that the shape of the first transmission image 91 becomes a circular shape (a circular transmission image). By the least squares method, the method of calculating the diameter a from the above-described bellows indicating the shape of the second pass image 9 is described in the description of the method of calculating the center 93 by the least square method (ie, the above equation (5). The solution is 2), so here 149829.doc • 28 · 201118359 The detailed description is omitted (refer to Figure 9). Further, the technique of calculating the diameter of the circle (the first transmission image 91) by the least square method itself can be sufficiently realized by the conventionally known conventional technique. The diameter a of the first surface 41 of the lens 40 is displayed on the first transmission image 91 in accordance with the diameter a obtained by the above method. Here, on the first surface 41 of the lens 40 (refer to FIG. 1) shown in FIG. 4, the diameter of the first 'over image 91 obtained by the diameter reducing ridge detecting portion 82 is a ^ as described above. In the case where the diameter is &, it is considered that no eccentricity is generated on the i-th surface 41. On the other hand, the first surface 411 of the lens 40 (refer to FIG. 4) shown in FIG. 4 indicates a state in which the eccentricity (so-called slanted core) which is inclined only upward by θ is generated with respect to the first surface 41. Further, in Fig. 4, the first transmission image obtained by imaging the second pupil surface 41t is shown as the first transmission image 91t in the same manner as the imaging of the i-th surface 4i. The diameter of the J-transmission image 91t obtained by the diameter-reducing apex detecting unit 82 becomes b which is shorter than the above a. Then, the diameter-reduced sinus detection unit 82 uses the diameter a and the diameter b to obtain the angle 0 at which the eccentricity is generated by the following equation (7), and it is considered that the lens having the amount θ has been generated on the syllabus. As a result, it is possible to detect the yaw of the yaw=arccos(b/a) (7) Furthermore, even the lens 40 shown in Fig. 4 (the reference ΐφ4ι of the reference circle produces a slanted angle of the angle θ only downward) The diameter-reducing yaw detecting unit (4) can also detect the angle (the amount of the yaw) θ by the above formula (2). 149829.doc •29· 201118359 Further, the first surface 411 is not circular but elliptical. In this case, the short axis of the ellipse may be used instead of the diameter b. Fig. 5 is a view for explaining the method of detecting the distance between the turns of the lenses 4 by the first inter-image distance detecting unit 83. The lenses 401 to 403 indicate 3 The lens 40 is not particularly limited as long as the number of the lenses 4 to detect the distance between the lenses 40 by the inter-image distance detecting unit 83 is two or more. In ～403, the first faces 411 to 413 (the first face 41) and the second face corresponding to each are provided. 421-423 (the second surface 42). The first transmission images 911 to 913 (the first transmission image 91) image the respective first surfaces 411 to 413 by the element imaging optical system 5 (refer to FIG. 1). The second transmission images 921 to 923 (second transmission image 92) are obtained by imaging the respective second surfaces 421 to 423 by the element imaging optical system 5 (refer to FIG. 1). The distance detecting unit 83 calculates the centers 931 to 933 of the respective first transmission images 911 to 913 based on the electric signal ' supplied from the image sensor 6 (referenced in Fig. 1). Further, the first inter-image distance detecting unit 83 calculates The processing of each of the centers 93 1 to 933 is sufficient for the processing of the center 93 by the center position detecting unit 81 for each of the lenses 401 to 403 (refer to Figs. 2 and 3). The distance detecting unit 83 detects the distance between any two of the corresponding lenses 401 to 403 based on the calculated separation distance between the two centers of the centers 93 1 to 933. For example, the first inter-image distance The detecting unit 83 divides the distance between the center 93 1 and the center 932 by 149829.doc -30- 201118359 as the distance between the lenses 4〇1 and 402, and The separation distance between the center 93 1 and the center 933 is defined as the distance between the lenses 4〇1 and 403. Further, the distance between the lenses 40 may be performed by the second inter-image distance detecting unit 84 instead of the first inter-image distance detecting unit 83. When the second inter-image distance detecting unit 84 detects the distance between the lenses 40, the second inter-image distance detecting unit 84 firstly supplies the electric power from the image sensor 6 (refer to FIG. 1). The signal calculates the centers 941 to 943 of the respective second transmission images 921 to 923f. In addition, the processing system in which the second inter-image distance detecting unit 84 calculates the centers 941 to 943 is a process in which the central position detecting unit 81 calculates the center 94 for each of the lenses 401 to 403 (refer to FIG. 2 and FIG. 3) It is enough. Then, although not shown, the second inter-image distance detecting unit 84 detects the corresponding two lenses 401 to 403 based on the separation distance between the centers of the centers 941 to 943 of the different centers. The distance between one. For example, the second inter-image distance detecting unit 84 sets the separation distance between the center 941 and the center 942 as the distance between the lenses 401 and 402, and the separation distance between the center 941 and the center 943 as the distance between the lenses 401 and 403. Further, even if only one of the first inter-image distance detecting unit 83 and the second inter-image distance detecting unit 84 is provided, the distance between the lenses 40 can be detected, so that there is no problem. The positions of the respective first transmission images 911 to 91 3 obtained by imaging the respective first surfaces 411 to 413 are reflected in the positions of the respective first surfaces 411 to 413 in the direction perpendicular to the optical axis of the element imaging optical system 5. relationship. According to this, when the lenses 401 to 403 are arranged so as to be dispersed in the direction, the processing for calculating the respective centers U9829.doc • 31 - 201118359 931 to 933 is simply performed for each of the lenses 4〇1 to 4 〇3 The process of calculating the center 93 can be carried out without any problem. Further, even if the lenses 401 to 403 are provided so as to overlap each other in the direction, it is possible to discriminate each of the first transmission images 911 to 913 with a certain degree i by the change in the contrast of the overlap. When the above treatment is implemented, it will not cause a major obstacle. Similarly, the positions of the respective second transmission images 921 to 923, which are formed by imaging the respective second surfaces 421 to 423, are reflected in the respective second faces 421 to 423 in the direction perpendicular to the optical axis of the element imaging optical system 5. The positional relationship. According to this, when the lenses 4〇1 to 4〇3 are arranged so as to be dispersed in the direction, the processing for calculating the respective centers 941 to 943 is simply performed for each of the lenses 4〇1 to 4〇3. The processing up to the center 94 can be performed without any problem. Further, even if the lenses 401 to 403 are provided so as to overlap each other in the direction, it is possible to clearly determine the respective second transmission images 921 to 923 to some extent by the change in contrast with the overlap. The above treatment will not cause a major obstacle. Further, in Fig. 5, the center position detecting unit 81 (refer to Figs. 2 and 3) is further combined, and the amount of the yaw of each of the lenses 401 to 403 is detected. Further, in order to detect the amount of the yaw of each of the lenses 401 to 403 by the center position detecting unit 81, the above-described series of methods for the nucleus of the lens 4 检测 of the detection amount d are applied to the respective lenses 401 to 403. (Refer to Figure 2 and Figure 3) is sufficient. Further, although not shown in the figure, the diameter of each of the lenses 401 to 403 is detected by the diameter reducing ridge detecting unit 82, and the first faces 411 to 413 of the respective lenses 4〇1 to 4〇3 are also It is sufficient to carry out the above-described series of methods (refer to FIG. 4) of the first surface 41 of the lens I49829.doc-32·201118359 40 of the second surface 421 to 423). In this manner, the center position yaw detecting unit 81, the diameter reducing yaw detecting unit 82, the first inter-image distance detecting unit 83, and the second inter-image distance detecting unit can be arbitrarily combined. Further, the center position yaw detecting unit 81 and the diameter reducing yoke detecting unit 82 can detect the amount of the yaw core for each of the plurality of lenses 4 。. Further, the first inter-image distance detecting unit 83 and the second inter-image distance detecting unit 84 can detect the distance between any two lenses 4〇 for each of the plurality of lenses 40. Further, in the case where the amount of the yoke of the lens 40 is extremely large, a detection method in which the detection by the eccentricity detecting portion 80 is not required, for example, the user visually projects onto the component imaging optical system 5 can be considered. The first transmission image 91 and the second transmission image of the screen (not shown) provided in the image plane are roughly calculated based on the contrast of the first transmission image 91 and the second transmission image 92. By using this, as a test, a rough test can also be performed. In this case, the apex detecting unit 8A can be omitted. The eccentricity detection 1 system does not need to converge the detection light 3 in a specific area of the lens 40, and can detect the amount of the eccentricity of the lens 4G, so when using one device for one detection' Detection can be performed on a plurality of lenses 40. Therefore, it is not necessary to singulate the array-shaped through-the-lens 40 at the stage before the components such as the array-shaped sensor 147 shown in FIG. 8 (4) are attached to the array-shaped lens 4. _ and detecting all the lenticular hearts in the case of squatting and detecting the amount of yaw of each lens 4, 9 pairs of 2 lenses: 4 lenses 4. The ith transmission image 91 and the second transmission image are formed, and the above-described detection methods of the detection unit 82 can be performed by performing the above-described embossing detection unit Μ and the diameter reduction nucleus. If the first transmission image 91 and the second transmission image 92 formed by the respective lenses 4A can be divided into one lens 40, the center position detection unit 8 1 can be simultaneously applied to each of the transmission images. The various detection methods in the diameter-reducing sinus detection unit 82 can be used to detect the amount of the yaw of each lens 4 单纯 simply and simply. In particular, the image sensor 6 is used to capture the first transmission image 91 and the second transmission image 92 formed by all the lenses 40 constituting the array lens 4, and the first transmission images 91 and the captured first transmission images 91 and The second transmission image 92 performs image processing, whereby the "position fading detecting unit 8 1 and the diameter reducing thief detecting unit 82" perform various detection methods, and the amount of eccentricity can be detected for each lens 4 。. When the eccentricity detecting device 1 wants to detect all of the lenses 4 一, regardless of the number of the lenses 40, the minimum necessary device configuration is still only the sputum imaging optical system 5. Therefore, it is especially in the array form. When the lens 4 is formed with a plurality of lenses 40 (in comparison with the above-described prior art thief detecting devices), it is possible to realize the eccentricity detecting device 1 with a simple and small-scale device configuration. Since the contrast of the 91 and the second transmission image 92 is a simple principle of detecting the yaw of the lens 4G, it is not limited to a lens having at least one aspherical surface, and the lens having both surfaces may be applied without any problem. Throughout Secondly, in the device 1, in the detection operation, it is sufficient to detect the transparency according to the contrast between the first transmission (four) and the second transmission image 92, and the detection is made to be ruthless. Therefore, it is possible to reduce the trouble of the detection of the eccentricity. I49829.doc -34- 201118359 Further, as long as the first surface 41 or the second surface 42 of the corresponding lens 40 is not flat, the first transmission image 91 and the second transmission image 92 The degree of sharpness is detectable, so that even when detecting the amount of the flatness of the lens 4 which is relatively flat near the optical axis, the possibility of detection becomes difficult. The accuracy of the detection of the eccentricity of the device 1 can be made highly accurate in accordance with the resolution of the observation system including the component imaging optical system 5. In the component imaging optical system 5, the elevation of the second transmission image 91 and the second transmission image 92 is omitted. In the case of the resolution method, when the detection system performs the detection of the respective sizes of the first transmission image 91 and the second transmission image 92, the absolute accuracy is preferably 丨μ〇1 or less. In this case, the first transmission image 91 and 2 The dimensional accuracy of the image 92 can be detected with a value close to the absolute accuracy. As a result, the relative distance between the centers of the circular second transmission image 91 and the second transmission image 92 is detected. The result of the distance can also be detected with the same degree of accuracy as the absolute accuracy. Further, when the shape of the spherical or aspherical surface becomes rotationally asymmetrical or has an error with respect to the design value due to the forming process capability, The transferability as a part of the observation image can be well formed and can be detected. On the other hand, in the prior art, the surface shape is an object and the amount of shape error is small. Fig. 6 shows the lens 4 as a lens. The relationship between the configuration of the lens 4A of the modification and the contrast between the second transmission image 91 and the second transmission image % formed by the lens 4'. The difference between the configuration of the lens 40 shown in Fig. 6 and the lens 4 is that the outer surface of the lens 40 on the opposite side to the surface on which the light 3 is incident is 149829.doc • 35· 201118359 A protrusion is provided in the outer peripheral portion. The peripheral portion is the edge of the lens that is attached. Other than this, the 133⁄4 protruding portion may be provided on the outer peripheral portion (edge) of the second surface 42, and may be provided on both outer peripheral portions (edges) of the first surface 41 and the second surface 42. The dog-out portion has a protruding portion 45 that is formed vertically upwards around the first surface 41 and/or the second surface 42 and has a step difference with respect to the stepped portion 45 with respect to the protruding portion 45 around the protruding portion 45. Area 46. In Fig. 6, since the protruding portion is provided on the first surface 41 side, the protruding portion 45 protrudes vertically upward around the first working surface 41. It is also not easy to distinguish the first and second transmitted images by the shape of the lens to be detected. With respect to the process of forming a lens by transfer, for example, the above-mentioned projecting portion is provided at the edge, and an image obtained by imaging the projecting portion is used, whereby the detection is easy. That is, the protruding portion 45 of the above-mentioned protruding portion advances the incident light 3 (refer to Fig. 1) with almost no scattering. Thereby, the image portion obtained by imaging the protruding region 45 becomes brighter than the portions of the other images (the first transmission image 91 and the second transmission image 92) (refer to reference numeral 95 in Fig. 6). On the other hand, the stepped region 46 of the above-mentioned protruding portion scatters the incident light 3 (refer to Fig. 1). Thereby, the image portion obtained by imaging the step region 46 becomes darker than the other image portion (refer to symbol 96 of Fig. 6). As a result, the outline of the first transmission image 91 and the second transmission image 92 can be easily recognized by the bright region 95 and the dim region 96, so that it is easy to perform the lens based on the contrast between the first transmission image 91 and the second transmission image 92. The detection of the amount of 40's 149829.doc -36- 201118359. Further, as shown in FIG. 6, when the above-mentioned protruding portion is provided on the side of the second side, the outer peripheral portion of the effective aperture in the surface on which the light 3 in the lens 40 is incident, that is, the outer peripheral portion of the second surface 42 In order to reduce the effect of bending or scattering the light caused by the shape of the opposite surface of the surface of the center of the ten-centered surface, the lens 40' may be formed into an array. The lens 4 (refer to one of the lenses 4 of the figure 图. Fig. 10 is a view showing the use of the center position yaw detection when the eccentricity of the lens 40r in which the two lenses 40p and 40q are bonded is not produced. Fig. 11 is a view for explaining the method of detecting the eccentricity by the center position yaw detecting portion 81 when the yaw of the lens 40r is generated. Fig. 10 and Fig. 11 The bonding of the two lenses 40p and 40q in 40r is not necessary, as long as the lenses 40p and 40q overlap each other substantially in the direction of the ideal optical axis of the lens 40. The lenses 40p have the first surface 41p and the first Two faces 42p. The lens 40q has a first surface 41q and a second surface 42q, respectively. 81 can detect the amount Δ of the nucleus generated between the lens 40p and the lens 40q in the same manner as described in FIGS. 2 and 3. The element imaging optical system 5 makes the first surface 41p, the second The image formed by the surface 42p, the first surface 41q, and the second surface 42q is the first transmission image 91p, the second transmission image 92p, the first transmission image 91q, and the second transmission image 92q 〇149829.doc -37, respectively. - 201118359 The center position detecting unit 8 1 calculates the respective centers of the first transmission image 91p, the second transmission image 92p, the first transmission image 91q, and the second transmission image 92q by the least square method, for example. The center 93p, the center 94p, the center 93q, and the center 94q. Then, the center position detecting unit 8 1 finds all the centers that can be conceived based on the center 93p, the center 94p, the center 93q, and the center 94q respectively calculated. Separation distance. When the center 93p, the center 94p, the center 93q, and the center 94q all become the same position, no yaw is generated between the lenses 40p, between the lenses 40q, and further between the lenses 4〇p and 40q (refer to Figure 1〇). When the center 93p and 94p and center When 93q and 94q are separated from each other by the distance dd, a yaw of the lens 4〇r having a quantity of dd is generated between the lens 40p and the lens 4〇q (refer to FIG. 11). The optical axis 41pa, the optical axis 42pa, and the optical axis 41qa And the optical axis 42qa corresponds to an optical axis passing through the center of the first surface 41p, an optical axis passing through the center of the second surface 42p, an optical axis passing through the center of the first surface 41q, and passing through the second surface. The optical axis of the center of 42q. In the case of Fig. 10, the optical axis 4ipa, the optical axis 42pa' optical axis 41qa, and the optical axis 42qa coincide with each other. In this case, the central position yaw detecting portion 81 can be determined that the lens 4 〇! Rui. On the other hand, in the case of Fig. 11, the optical axes 41pa and 42pa and the optical axes 41qa and 42qa are separated from each other by a distance dd in a direction perpendicular to the ideal optical axis of the lens 4A. In this case, the center The position apex detecting portion 8 j can recognize that the yoke of the lens 4 〇r having the amount dd has been generated, specifically, the yaw between the lens 4 〇p 149829.doc -38 - 201118359 and the lens 40q. Furthermore, the detection of the amount of each of the knuckles between the lenses 40p and the lens 40q can be carried out by the same method as the method shown in Figs. 2 and 3 (the method of determining the amount of the yaw). Refer to Figure 15 and Figure 16). In other words, the symbols "40p, 41p, 42p", "91P, 92p '93p, 94p" and "41pa, 42pa" in Fig. 15 and Fig. 16 are respectively interpreted as "4", 4i, 42 in Fig. 2 and Fig. 3, respectively. "91, 92, 93, 94" "41a, 42a" can be used. Here, for convenience of explanation, only the case where the amount d of the nucleus between the lenses 4 〇p is detected is shown, but the case where the amount d of the nucleus between the lenses 40q is detected is also the same. The central position yaw detecting portion 81 can detect the amount of yaw between the lens 4 〇 p and the lens 4 as shown in the figure, except for the amount of yaw between the lenses 40 p and the lens 4 〇 q. Dd, and the amount of the yaw of the lens 4〇r is detected. The method of detecting the eccentricity of Figs. 10 and 11 can also be applied to form a plurality of lenses 4 to be formed of a resin. The array-shaped lens 4p formed on the sheet and the lens 4q (see Fig. 12) in which the plurality of lenses 4〇q are integrally formed on one plate including the resin are formed. Further, by simultaneously or alternately performing the adjustment of the relative positional relationship between the apex of FIG. 1 and FIG. 1 and the lenses 40p and 40q, the adjustment of the lens 4〇r can be performed (the optical axes of the two lenses are made). The alignment can be performed on one lens 40r. Similarly, the plurality of lenses 4〇r can be implemented. Further, the adjustment can also be performed by performing the relative orientation of the array lenses 4p and 4q shown in FIG. The positional relationship is adjusted to replace the adjustment of the relative positional relationship of the lens 4〇p. Fig. 13(a) and (c) show the outline of the above-mentioned method of adjusting the core. Specifically, 149829.doc -39- 201118359 Fig. 13 (a) to (c) show the case where the relative positional relationship of the array of lenses and the cymbal shown in Fig. 12 is adjusted. First, only the array lens 4p and the array lens are used. In the state of being overlapped and not fitted, the amount der between the respective lenses 40p and the corresponding lenses 40q is detected by the method shown in Figs. 10 and ( (refer to (4) of Fig. 13). After the detection of the eccentricity of Fig. 13(a), the array lens is affixed or 4q in relation to the lens as needed. 40r (refer to Fig. 1A), the ideal optical axis is perpendicular to each other and moves in the X direction and the γ direction perpendicular to each other, thereby seeking to adjust the core (refer to Fig. 13 (b)). Further, in Fig. 13 (a) After the eccentricity is detected, the array-shaped lens 4p or 4q is rotated in the direction perpendicular to the ideal optical axis of the lens 4〇r as needed (reference angle γ), thereby seeking to adjust the core (refer to FIG. 13 ((〇 Furthermore, the order in which each of the adjustments of (b) and (c) of Fig. 13 is carried out is not particularly limited, and any adjustment may be applied first. Further, preferably each time in Fig. 3 ( After adjusting each of b) and (c), the eccentricity detection of (&) of Fig. 13 may be appropriately performed as needed. Further, the eccentricity detection of Fig. 13i(a) may be continued while the stipulation is performed. 13(b) and (c), when the lens 40r (refer to FIG. 1A, etc.) is provided with the above-mentioned protruding portion having the protruding region 45 and the step region 46 (refer to FIG. 6), Further, the distance between the lens 4〇p and the lens 4〇q can be adjusted in accordance with the height of the protruding portion (refer to Fig. 14). The lens 40r shown in Fig. 14 is a modification of the lens 4〇r. In the center of the lens 40p and 40q, the effective aperture in the plane of the side of the optical system 5 (the lower side of the cross-sectional view of Fig. 4) is obtained as the proximity element 149829.doc -40·201118359 The outer peripheral portion 'the above-mentioned protruding portion (protruding region 45 and step region 46)' is provided and these lenses are referred to as lenses 40p and 40q', respectively (first and second optical elements). Here, 'lens 40P' The lens 40q' is attached so that the protruding portion of the lens 40p' abuts against the lens 40q. Further, by this, the lens 40p· and the lens 4〇q are separated from each other by a fixed interval. The fixed interval can be changed in accordance with the height of the above-mentioned protruding portion of the lens 40p'. Therefore, the lens 4〇p can be adjusted by the above-mentioned protruding portion of the lens 40p' to be spaced apart from the lens 4〇q. In the eccentricity detecting device 1, the element imaging optical system 5 having the characteristic that the shape of the image does not change even if the distance to the subject changes is formed, and each surface of the lens to be detected is imaged to form an image. (i-th and second-pass transmission images), and the eccentricity detection of the lens or the like is performed based on the contrast of the respective images. Therefore, in the eccentricity detecting device ,, regardless of which of the faces of the lens to be detected is closer to the side of the element imaging optical system 5 (or closer to the side of the light source 2), it is possible to The essentials of the same method, the detection of the eccentricity of the lens, and the like. In the present embodiment, for convenience of explanation, a case where the j-th surface is closer to the side of the element imaging optical system 5 and the second surface is closer to the side of the element imaging optical system 5 are appropriately considered according to the specific embodiment. In both cases, even if the faces are close to the side of the light source 2, the contrast of the obtained image hardly changes 'and thus does not cause any obstacle to detection. Further, as the optical element of the present invention, in addition to the lens, all of the transparent optical elements of the concept of 149829.doc • 41 · 201118359 can be cited. Further, as the lens of the optical element, there are an imaging lens, a collecting lens, an illumination lens, and the like. Further, the eccentricity detecting device of the present invention is characterized in that it includes a yaw detecting portion that detects the amount of the eccentricity of the optical element based on the contrast between the first and second transmitted images. According to the above configuration, the eccentricity detecting means can detect the amount of the eccentricity of the optical element. Further, in the eccentricity detecting device of the present invention, the yaw detecting unit includes a middle reading yoke detecting unit that sets a separation distance between respective centers of the second and second transmission images as a deviation of the optical element The amount of the core. According to the above configuration, the eccentricity detecting means can detect the amount of the nucleus by using the distance of the knives of each of the p and the second transmitted image as the yaw of the optical element. The feature of the eccentricity detecting device of the present invention is
........... l /5L Z A過像中之至少—者係®形之透過像，上述偏蕊檢測 :包括直徑縮小偏蕊檢測部，其根據相對於未產生上述光 子兀件之偏蕊之情形時的上述圓形透過像之直徑，實際上 :成像之上述圓形透過像之直徑所縮小之尺寸，檢測上述 光學元件之偏蕊之量。 —康上述構成，本偏蕊檢測裝置根據對應於光學元件之 偏&之有無及量而變化的圓形透過像之直徑所縮小之尺 、 、光元件之偏疏之量，藉此可檢測該偏蕊之量。 本發明之偏蕊檢測裝置之特徵在於：上述第1及第2 ’過像分別存在複數個，且包括第i像間距離檢測部與第2 149829.doc -42· 201118359 像間距離檢測部之中$ $卜 1心甲之至；一者，上述第1像間距離檢測 部係檢測2個上述第1透過像之各中心間之分離距離者，上 述第2像間距離檢測部係檢測2個i述第2透過像之各中心 間之分離距離者。 於針對複數個光學元件之各者形成有第〗及第2透過像之 . ㈣時成個數分別與該光學元件之個數㈣之複數個 第1及第2透過像。 根據上述構成，藉由檢測2個第丨透過像之各中心間之分 離距離，可檢測分別對應於2個第i透過像之2個光學元件 之間距。該間距不僅可於檢測第丨透過像之各中心間之分 離距離的情形時進行檢測，同樣亦可於檢測第2透過像之 各中心間之分離距離的情形時進行檢測。 又’本發明之偏蕊檢測裝置之特徵在於：上述第1及第2 透過像分別存在複數個，且上述中心位置偏蕊檢測部將各 第1及第2透過像之中心間之分離距離中的至少一者作為上 述光學元件之偏蕊之量。 根據上述構成，可檢測複數個光學元件彼此之間之偏蕊 之量。此種構成於檢測將複數個光學元件重疊之構成（組 • 合透鏡）中之各光學元件彼此之間的偏蕊之量時較適合。 又’本.發明之偏蕊檢測裝置之特徵在於包括攝像元件， 其用於將至少各1個之上述第1及第2透過像作為圖像來顯 示。 根據上述構成，可將第1及第2透過像作為圖像來顯示。 藉由將第1及第2透過像作為圖像來顯示，可利用相對於該 149829.doc • 43- 201118359 圖像之圖像處理，簡單地且-併對各複數個第i及第2透過 像實施上述偏蕊之各種檢測。 又，本發明之偏蕊檢測方法之特徵在於n體地成 形有複數個上述光學元件之光學元件陣列，進行相對於構 成上述光學元件陣列之各光學元件之使兩面分㈣像的上 述步驟、以及檢測偏蕊之量之上述步驟。 根據上述構成，本偏蕊檢測方法可檢_成光學元㈣ 列之各光衫件之偏蕊的量。再者，於本偏蕊檢測方法 中’疋件成像光學系統可對位於可自被攝體取入光之該被 攝體之位置的範圍内之所有光學元件並行進行檢測。 又，本發明之偏蕊檢測方法之特徵在於包括：使2個上 述光學元件陣列重疊之步驟：針對藉由使2個上述光學元 件陣列重疊之上述步驟而重疊之2個上述光學元件，使兩 面刀別成像之--^述步驟；拾、、目丨丨/由μ 1 /鄉，檢測偏蕊之量之上述步驟；以及 根據所檢測之各偏蕊之量，以使經重疊之2個上述光學元 件之各光軸彼此成-直線的方式，調整各光學元件陣列之 相對之位置關係的步驟。 根據上述方法’可基於偏蕊之量之檢測結果，進行2個 光學元件間之調蕊(使2個光學元件之各光軸成一直線卜 又’本發明之偏蕊檢測方法之特徵在於包括如下步驟： 預先對至v彳ϋ上述光學元件，於該光學元件之—面之外 :部分或兩面之各外周部分設置使所入射之光散射的突出 根據上述方法’由於將使所入射之光散射之突出部成像 149829.doc • 44 - 201118359 而得之像與其他像部分相比變暗淡，因此可更容易地識別 第1及第2透過像之輪廓，且易於根據該第丨及第2透過像之 對比度進行光學元件之偏蕊之量的檢測。於因原來之光學 元件之形狀而導致第〗及第2透過像之對比度不鮮明之情形 時，上述方法可應用於透鏡（光學元件）之表面背面之任一 面0 又，本發明之偏蕊檢測方法之特徵在於：使用2個上述 光學元件，進行如下之步驟：對一個上述光學元件，於該 光學元件之一面之外周部分或兩面之各外周部分設置使所 入射之光散射的突出部；以及以使上述突出部抵接於Μ 個上述光學it件之方式貼合—個及另—個各光學元件的步 驟。 —根據上述方法，除上述抵接部分以外，可根據—個光學 疋件之突出部之高度，適當調整各光學元件之間隔。 本發明並不限定於上述實施形態，可於請求項所示之範 圍内進行各種變更。即，將於請求項所示之範圍内進行適 當變更之技術方法加以址合而獲得的實施形態亦包含於本 發明之技術範圍。 [產業上之可利用性] 本發明可應用於檢測透料光學元件之偏蕊之 置及偏蕊檢測方法…本發明可應用於成為偏； 对冢的光學凡件、光學元件陣 列、以及光學元件單元。 【圖式簡單說明】 149829.doc -45- 201118359 圖1係表示本發明之實施形態之偏蕊檢測裝置之構成的 俯視圖。 圖2係說明未產生光學.元件之偏蕊之情形時的利用中心 位置偏蕊檢測部檢測偏蕊之要領的圖。 圖3係說明產生光學元件之偏蕊之情形時的利用中心位 置偏蕊檢測部檢測偏蕊之要領的圖。 圖4係說明利用直徑縮小偏蕊檢測部檢測偏蕊之要領的 圖。 圖5係說明利用第丨像間距離檢測部檢測透鏡間之間距之 要領的圖。 圖6係表示本發明之光學元件之構成與由該光學元件所 形成之第1及第2透過像之對比度的關係之圖。 圖7之（a)〜（d)係表示具備光學元件之模組之製造方法的 剖面圖。 圖8之（a)〜（e)係表示具備光學元件之模組之其他製造方 法的剖面圖。 圖9係說明藉由最小平方法求出圓之中心及半徑之方法 的圖。 圖10係說明未產生將2個透鏡貼合而成之透鏡之偏蕊的 情形時之利用中心位置偏蕊檢測部檢測偏蕊之要領的圖。 圖11係說明產生將2個透鏡貼合而成之透鏡之偏蕊的情 形時之利用中心位置偏蕊檢測部檢測偏蕊之要領的圖。 圖⑵系表示對成形有各透鏡之陣列狀之透鏡之各者應用 圖10及圖11之偏蕊檢測之要領之情況的圓。 149829.doc -46- 201118359 圖13之（a)〜(c)係表示調蕊之要領之概略的圖。 圖Μ表示本發明t其他光學元件之構成與由該光學元件 所形成之第1及第2透過像之對比度的關係之圖。 圖15係說明未產生其他光學元件之偏蕊之情形時之利用 • 中心位置偏蕊檢測部檢測偏蕊之要領的圖。 圖16係說明產生其他光學元件之偏蕊之情形時之利用中 心位置偏,路檢測部檢測偏蕊之要領的圖。 【主要元件符號說明】 1 偏蕊檢測裝置 2 光源 3 光（入射至光學元件之光） 4、4p、4q、 陣列狀之透鏡（光學元件陣列） 144 、 145 5 6 7 40 ' 40' ' 40r、 元件成像光學系統 影像感測器（攝像元件） 顯示部 透鏡（光學元件） 40r，、40p、40p|、 40q、40q'、401、 402 、 403 41、41t、411、 第 1面 412 、 413 41a、42a、41pa、光軸 42pa、41qa、42qa 149829.doc • 47 - 201118359 42 、 421 、 第2面 422 、 423 45 突出區域（突出部） 46 階差區域（突出部） 50 入射側透鏡 51 孔徑光闌 52 出射側透鏡 80 偏蕊檢測部 81 中心位置偏蕊檢測部 82 直徑縮小偏蕊檢測部 83 第1像間距離檢測部 84 第2像間距離檢測部 9 1、91 p、91 q、 第1透過像 91t 、 911 、 912 、 913 92 ' 92p、92q、 第2透過像 92t、921 ' 922、 923 93、93p、93q ' 第1透過像之中心 931 ' 932 > 933 93xy 圓之中心 94、94p、94q、 第2透過像之中心 941 、 942 、 943 95 ' 96 像 149829.doc -48- 201118359 131 熱塑性樹脂 132 、 142 、 143 模具 133 透鏡鏡筒 134 鏡筒 135 、 146 、 147 感測器 136 、 148 模組 141 熱硬化性樹脂 146c 感測器146之中心 a ' b 直徑 d ' dd 距離（分離距離） LI 第1透鏡 L2 第2透鏡 Θ 角度 149829.doc .49-........... l /5L ZA over image - at least the transmitted image of the shape of the keel, the above-mentioned eccentricity detection: including a diameter-reducing eccentricity detecting portion, which is based on the relative photon The diameter of the circular transmission image in the case of the eccentricity of the element is actually the size of the circular shape of the circular transmission image, and the amount of the eccentricity of the optical element is detected. In the above configuration, the eccentricity detecting device can detect the scale of the circular transmission image which is changed according to the presence or absence of the optical element, and the amount of the optical element which is reduced by the amount of the optical element. The amount of the yaw. In the eccentricity detecting device of the present invention, the first and second 'over-images are respectively plural, and include an ith inter-image distance detecting unit and a second 149829.doc -42·201118359 inter-image distance detecting unit. One of the first inter-image distance detecting units detects the separation distance between the centers of the two first transmission images, and the second inter-image distance detecting unit detects 2 The distance between the centers of the second transmission image is described. The first and second transmission images are formed for each of the plurality of optical elements. (4) The plurality of first and second transmission images are respectively formed in a number and the number (4) of the optical elements. According to the above configuration, by detecting the separation distance between the centers of the two second transmission images, the distance between the two optical elements corresponding to the two i-th transmission images can be detected. This spacing can be detected not only when detecting the separation distance between the centers of the second transmission images, but also when detecting the separation distance between the centers of the second transmission images. Further, in the eccentricity detecting device of the present invention, the first and second transmitted images are respectively plural, and the center position yaw detecting unit separates the distance between the centers of the first and second transmitted images. At least one of them is the amount of the eccentricity of the optical element. According to the above configuration, the amount of the ridges between the plurality of optical elements can be detected. Such a configuration is suitable for detecting the amount of eccentricity between optical elements in a configuration (group lens) in which a plurality of optical elements are superimposed. Further, the eccentricity detecting device of the present invention is characterized by comprising an image pickup element for displaying at least one of the first and second transmission images as one image. According to the above configuration, the first and second transmission images can be displayed as images. By displaying the first and second transmitted images as images, it is possible to use image processing with respect to the image of 149829.doc • 43-201118359, simply and - and for each of the plurality of ith and second transmissions It is like performing various tests of the above-mentioned partial core. Further, the eccentricity detecting method of the present invention is characterized in that the optical element array in which a plurality of the optical elements are formed n is formed, and the above-described steps of forming a two-sided (four) image with respect to each of the optical elements constituting the optical element array, and The above steps of detecting the amount of eccentricity. According to the above configuration, the eccentricity detecting method can detect the amount of the eccentricity of each of the illuminating members in the optical element (four). Further, in the method of detecting the eccentricity, the component imaging optical system can detect all the optical elements in the range of the position of the subject at which the light can be taken in from the subject in parallel. Further, the eccentricity detecting method of the present invention includes the step of superimposing two optical element arrays on two sides of the optical element which are superposed by the above-described steps of superimposing the two optical element arrays The knives are imaged--the steps are described; the pick-up, the gaze/by μ 1 / township, the above steps of detecting the amount of eccentricity; and according to the amount of the nucleus detected, so that the two overlaps The step of adjusting the relative positional relationship of each of the optical element arrays in such a manner that the optical axes of the optical elements are linear with each other. According to the above method, the adjustment between the two optical elements can be performed based on the detection result of the amount of the eccentricity (the optical axes of the two optical elements are aligned). The method for detecting the eccentricity of the present invention is characterized by including the following Step: pre-aligning the optical element to the above-mentioned optical element, and providing a protrusion for scattering the incident light according to the outer peripheral portion of the optical element: part or both of the outer surfaces of the optical element according to the above method 'because the incident light is scattered The image of the protrusion is 149829.doc • 44 - 201118359 The image is dimmed compared to other image parts, so the outline of the first and second transmitted images can be more easily identified, and it is easy to pass the first and second transmissions. The contrast is used to detect the amount of the eccentricity of the optical element. When the contrast between the first and second transmitted images is not clear due to the shape of the original optical element, the above method can be applied to the surface of the lens (optical element). Any one of the back faces of the present invention is characterized in that, by using the above two optical elements, the following steps are performed: for one of the above optical elements, a peripheral portion of one of the outer surfaces of the optical element or a peripheral portion of both surfaces is provided with a protruding portion for scattering the incident light; and the protruding portion abuts against the one of the optical members, and the other Step of the optical element - According to the above method, in addition to the abutting portion, the interval between the optical elements can be appropriately adjusted according to the height of the protruding portion of the optical element. The present invention is not limited to the above embodiment, and can be Various changes are made within the scope of the claims. That is, the embodiments obtained by arranging the technical methods that are appropriately changed within the scope of the claims are also included in the technical scope of the present invention. The invention can be applied to the detection of the eccentricity of the transmissive optical element and the detection method of the eccentricity. The invention can be applied to the optical component, the optical component array, and the optical component unit which are polarized; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing a configuration of a eccentricity detecting device according to an embodiment of the present invention. In the case of the optical element of the element, the method of detecting the eccentricity by the center position yaw detecting portion in the case of the eccentricity of the element. Fig. 3 is a view showing the detection of the eccentricity by the center position detecting unit when the eccentricity of the optical element is generated. Fig. 4 is a view for explaining the method of detecting the eccentricity by the diameter reducing yaw detecting portion. Fig. 5 is a view for explaining the method of detecting the distance between the lenses by the inter-threshold distance detecting portion. A diagram showing the relationship between the configuration of the optical element of the present invention and the contrast between the first and second transmitted images formed by the optical element. (a) to (d) of FIG. 7 show a method of manufacturing a module including an optical element. Fig. 8 (a) to (e) are cross-sectional views showing another manufacturing method of a module including an optical element. Fig. 9 is a view showing a method of obtaining a center and a radius of a circle by a least square method. . Fig. 10 is a view for explaining the method of detecting the eccentricity by the center position yaw detecting portion when the yaw of the lens in which the two lenses are bonded is not produced. Fig. 11 is a view for explaining the method of detecting the eccentricity by the center position yaw detecting portion when the eccentricity of the lens in which the two lenses are bonded is generated. Fig. 2 shows a circle in which the method of detecting the eccentricity of Figs. 10 and 11 is applied to each of the lenses in which the array of lenses is formed. 149829.doc -46- 201118359 Figure 13 (a) ~ (c) is a schematic diagram showing the essentials of the adjustment of the core. The graph shows the relationship between the configuration of the other optical elements of the present invention and the contrast between the first and second transmitted images formed by the optical elements. Fig. 15 is a view for explaining the case where the eccentricity of the other optical element is not generated. Fig. 16 is a view for explaining the method of detecting the eccentricity by the path detecting portion when the center positional deviation is generated in the case where the yoke of the other optical element is generated. [Description of main component symbols] 1 Polarization detection device 2 Light source 3 Light (light incident on the optical element) 4, 4p, 4q, array lens (optical element array) 144, 145 5 6 7 40 ' 40' ' 40r Component imaging optical system image sensor (image pickup device) display portion lens (optical element) 40r, 40p, 40p|, 40q, 40q', 401, 402, 403 41, 41t, 411, first surface 412, 413 41a, 42a, 41pa, optical axis 42pa, 41qa, 42qa 149829.doc • 47 - 201118359 42 , 421 , 2nd surface 422 , 423 45 protruding area (protrusion) 46 step area (protrusion) 50 incident side lens 51 Aperture stop 52 Exit side lens 80 Center detecting unit 81 Center position center detecting unit 82 Diameter reducing center detecting unit 83 First inter-image distance detecting unit 84 Second inter-image distance detecting unit 9 1 , 91 p, 91 q The first transmission images 91t, 911, 912, 913 92' 92p, 92q, the second transmission images 92t, 921 '922, 923 93, 93p, 93q ' the center of the first transmission image 931 ' 932 > 933 93xy Center 94, 94p, 94q, second transmission image Center 941, 942, 943 95 '96 Like 149829.doc -48- 201118359 131 Thermoplastic Resin 132, 142, 143 Mold 133 Lens Tube 134 Lens Tube 135, 146, 147 Sensor 136, 148 Module 141 Thermal Hardening Resin 146c Center of sensor 146 a ' b Diameter d ' dd Distance (separation distance) LI L1 lens L2 2nd lens 角度 Angle 149829.doc .49-