JP2005335277A - Manufacturing method of mold, manufacturing apparatus of mold, program, evaluation method of lens array, program for evaluating lens array, and evaluation apparatus of lens array - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a mold, a manufacturing apparatus of a mold and a program which are capable of speedily evaluating the accuracy of the arrangement of recesses of the mold, and an evaluation method of a lens array, a program and an evaluation apparatus of a lens array which are capable of quickly performing the evaluation of the accuracy of the arrangement of small lenses of the lens array. <P>SOLUTION: By a measured center acquisition means 524B, based on the coordinate values acquired by a coordinate value acquisition means 524A, there are acquired the coordinate values of the work centers of the recesses of the mold. By a calculation means 524C there are calculated the distances between the centers of each recess obtained by the measured center acquisition means 524B, and the design center distances of the recesses are also calculated. There are calculated differences of the distances between the work centers of all the recesses acquired by the measured center acquisition means 524B from the design-based center distances of all the recesses corresponding to the above. A judgement means 524D judges whether the above differences calculated by the calculation means 524C are below predetermined values. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a mold manufacturing method, a mold manufacturing apparatus, a program, a lens array evaluation method, a lens array evaluation program, and a lens array evaluation apparatus.

2. Description of the Related Art Conventionally, a lens array in which small lenses are arranged in a matrix is used in an optical apparatus such as a projector or a laser printer.
When this lens array is manufactured, a molten optical material that is a raw material of the lens array is pressed using a mold according to the shape of the lens array.
In such a lens array, in order to obtain desired optical characteristics, the optical centers of the small lenses must be arranged with high accuracy. For this reason, it is necessary to accurately arrange the concave portions corresponding to the small lenses of the mold for manufacturing the lens array, and conventionally, the accuracy of the arrangement of the concave portions of the manufactured mold has been evaluated.
As a method for evaluating the array of the concave portions of such a mold, for example, the center of the concave portion (the position corresponding to the optical center of the small lens) is actually measured, and the coordinate value (X-axis coordinate value, Y-axis coordinate value) is measured. Is detected, and a deviation from the coordinate value (X-axis coordinate value, Y-axis coordinate value) of the center of the recess in the design is detected (for example, see Patent Document 1).

JP 2002-254479 A (pages 6-7, FIG. 2)

However, since such a method is a method of directly comparing the measured coordinate value of the center of the recess with the coordinate value of the center of the designed recess, the X-axis coordinate value and the Y-axis coordinate in all the recesses Each value must be compared. Therefore, there is a problem that it is difficult to quickly determine whether or not the deviation is within an allowable range, and it takes time and effort for evaluation.
Note that, when evaluating the accuracy of the arrangement of the small lenses in the lens array, the same method is used, so the same problem occurs in the evaluation of the lens array.

  An object of the present invention is to provide a mold manufacturing method, a mold manufacturing apparatus, a program, and a lens array accuracy that can quickly evaluate the accuracy of the array of recesses in the mold. It is an object to provide a lens array evaluation method, a program for evaluating a lens array, and a lens array evaluation apparatus that can perform evaluation quickly.

  The mold manufacturing method of the present invention is a mold for molding a lens array, and a mold having a plurality of recesses corresponding to small lenses arranged in a lens array matrix on the molding surface. A method for obtaining a measured center by grasping the surface shape of each recess processed into a mold, detecting the center corresponding to the optical center of the small lens of the lens array, and acquiring the position of the center with respect to the reference position All obtained in the design center acquisition procedure for acquiring the center position corresponding to the optical center of the small lens of the designed lens array with respect to the reference position from the procedure and the design information of the mold, and the actual measurement center acquisition procedure The first calculation procedure for calculating the distance between the centers of the recesses, the second calculation procedure for calculating the distance between the centers of all the acquired recesses in the design center acquisition procedure, and the first calculation procedure A third calculation procedure for obtaining a difference between the output value and the calculated value calculated in the second calculation procedure corresponding to the calculated value; and determining whether or not the difference calculated in the third calculation procedure is equal to or less than a predetermined value. And a determination procedure to be performed.

Here, the reference position may be a point different from the center of the recess, and is not particularly limited. For example, the origin of the machine coordinates of the manufacturing apparatus that detects the center corresponding to the optical center of the small lens of the lens array of the mold It can be.
The production method of the present invention is performed as follows.
For example, assume that the coordinates of the center of the first recess acquired in the actual measurement center acquisition procedure are (Xn1, Yn1) and the coordinates of the center of the second recess are (Xn2, Yn2).
In the first calculation procedure, the distance between the center of the first recess and the center of the second recess is obtained, and the distance M is expressed by the following equation (1).

Further, it is assumed that the design coordinates of the center of the first recess acquired in the design center acquisition procedure are (Xd1, Yd1) and the design coordinates of the center of the second recess are (Xd2, Yd2).
In the second calculation procedure, the distance between the design center of the first recess and the center of the second recess is obtained, and the distance L is expressed by the following equation (2).

In the third calculation procedure, the absolute value of the difference between the distance M and the distance L is obtained, and in the determination procedure, it is determined whether the absolute value is equal to or less than a predetermined value. When it exceeds the predetermined value, it can be seen that the center of the first recess or the center of the second recess is displaced.
In the above-described procedure, the distance between the center of the third recess and the center of the second recess is sequentially determined, and the distance between the center of the third recess and the center of the first recess is sequentially determined for all the recesses. The distance between the centers is evaluated.

According to the present invention, the distance between the centers of the recesses obtained from the surface shape of the processed recesses (that is, actually measured) is compared with the distance between the centers of the designed recesses, Since the accuracy of the arrangement of the recesses is evaluated based on this difference, the coordinates (X coordinate value, Y coordinate value) of the centers of all the recesses and the design coordinates (X Compared with the case of comparing the coordinate value and the Y coordinate value), the evaluation can be performed quickly.
In the present invention, the measured distance and the design distance between the centers of all the recesses are calculated, and the measured distance and the design distance between the centers of all the recesses are compared. Therefore, for example, when the center of the first recess is greatly displaced, the difference between the measured distance and the design distance between the center of the first recess and the center of the other recess is a predetermined value. Will show a tendency to become larger. Based on this tendency, it can be easily grasped that the center of the first recess is shifted, and the evaluation can be performed more quickly.
Here, when the reference position is the origin of the machine coordinates of the manufacturing apparatus for detecting the center corresponding to the optical center of the small lens of the lens array of the mold, the actual measurement from this origin to the center of each recess of the mold It is also possible to detect the shift of the processing center of the concave portion by comparing the distance between the distance and the design distance. However, since it is difficult to attach the molding die to the manufacturing apparatus with high accuracy, the deviation caused by the mounting of the molding die affects the measured distance from the origin of the manufacturing device to the center of each recess as an error. . Therefore, it becomes difficult to perform highly accurate evaluation of the arrangement of the recesses.
According to the present invention, since the arrangement of the recesses is evaluated based on the distance between the centers of the recesses, such an error does not affect the actually measured distance, and more accurate evaluation is possible.

The molding die manufacturing apparatus of the present invention is a molding die for molding a lens array, and a molding die in which a plurality of concave portions corresponding to small lenses arranged in a matrix shape of a lens array is formed on a molding surface. The measurement center acquisition, which is a device, grasps the surface shape of each recess processed into a mold, detects the center corresponding to the optical center of the small lens of the lens array, and acquires the position of the center with respect to the reference position All acquired by means, a design center acquisition means for acquiring the center position corresponding to the optical center of the small lens of the designed lens array with respect to the reference position from the design information of the mold, and the measured center acquisition means The distance between the centers of the recesses is calculated as the first calculated value, and the distance between the centers of all the acquired recesses is calculated as the second calculated value by the design center acquisition means, and the first calculated value and A calculating means for obtaining a difference between the second calculated value corresponding to the first calculated value and a determining means for determining whether or not the difference calculated by the calculating means is equal to or less than a predetermined value. And
In such a manufacturing apparatus of the present invention, the above-described manufacturing method can be carried out, so that the same effects as the manufacturing method can be achieved. That is, the distance between the measured centers of the recesses obtained from the surface shape of the processed recesses is compared with the distance between the designed centers of the recesses. Since the accuracy is evaluated, the evaluation can be performed quickly.
Further, in the present invention, the actually measured distance (first calculated value) and the design distance (second calculated value) between the centers of all the concave portions are calculated, and the measured distance between the centers of all the concave portions is calculated. Since the upper distance and the design distance are compared, for example, when the center of the first recess is greatly shifted, the center of the first recess and the center of the other recess are measured. The difference between the distance and the design distance (third calculated value) tends to be larger than a predetermined value. Based on this tendency, it can be easily grasped that the center of the first recess is shifted, and the evaluation can be performed more quickly.
Further, when the reference position is the origin of the machine coordinates of the manufacturing apparatus that detects the center corresponding to the optical center of the small lens of the lens array of the mold, the actual measurement from this origin to the center of each recess of the mold It is also possible to detect the shift of the processing center of the recess by comparing the distance with the designed distance. However, since it is difficult to attach the molding die to the manufacturing apparatus with high accuracy, a deviation caused by the mounting of the molding die affects the measured distance from the origin of the manufacturing device to the center of each recess as an error. . Therefore, it becomes difficult to perform highly accurate evaluation of the arrangement of the recesses.
According to the present invention, since the arrangement of the recesses is evaluated based on the distance between the centers of the respective recesses, such an error does not affect the actually measured distance, and more accurate evaluation is possible.

In this case, in the present invention, it is preferable that a display unit that displays the difference calculated by the calculation unit and the determination result by the determination unit according to the arrangement of the concave portions of the mold is provided.
According to the present invention, by displaying the determination result on the display unit, the operator can evaluate the mold based on the display on the display unit, and is easy to use for the operator. Become.

In addition, the present invention can be established not only as the above-described mold manufacturing method but also as a program. That is, the program of the present invention is a mold for molding a lens array, and is for producing a mold having a plurality of concave portions corresponding to small lenses arranged in a lens array matrix on the molding surface. And the above-described manufacturing method is executed by a computer.
According to the present invention as described above, by installing the program of the present invention on a general-purpose computer, it is possible to cause the computer to execute the above-described mold manufacturing method. it can.

The lens array evaluation method of the present invention includes a measured optical center acquisition procedure for grasping a surface shape of each small lens, detecting an optical center of the small lens, and acquiring a position of the optical center with respect to a reference position; The design optical center acquisition procedure for acquiring the position of the optical center of the small lens of the designed lens array with respect to the reference position from the design information, and between the optical centers of all the small lenses acquired in the actual measurement optical center acquisition procedure A first calculation procedure for calculating the distance, a second calculation procedure for calculating the distance between the optical centers of all small lenses acquired in the design optical center acquisition procedure, and a calculated value calculated in the first calculation procedure And a third calculation procedure for obtaining a difference between the calculated value calculated in the second calculating procedure corresponding to the calculated value and whether the difference calculated in the third calculating procedure is equal to or less than a predetermined value. Judge Characterized in that it comprises and.
Here, the reference position may be a point different from the optical center of the small lens, and is not particularly limited. For example, the reference position is the machine coordinate origin of the apparatus that detects the optical center of the small lens of the lens array.
According to such this invention, there can exist an effect similar to the manufacturing method of a shaping | molding die. That is, the measured distance between the optical centers grasped from the surface shape of the small lens of the lens array is compared with the designed distance between the optical centers of the small lenses. Based on this difference, the lens array is compared. Since the accuracy of the arrangement of the small lenses is evaluated, the evaluation can be performed quickly.
In the present invention, the actual measurement distance and the design distance between the optical centers of all the small lenses are calculated, and the actual measurement distance and the design distance between the optical centers of all the small lenses are compared. Therefore, for example, when the optical center of the first small lens is largely deviated, the measured distance between the optical center of the first small lens and the optical center of the other small lens is A difference from the design distance tends to be larger than a predetermined value. Based on this tendency, it can be easily grasped that the optical center of the first small lens is shifted, and the evaluation can be performed more quickly.
Furthermore, when the reference position is the origin of the machine coordinates of the manufacturing apparatus that detects the optical center of the small lens of the lens array, the distance measured from the origin to the optical center of each small lens of the lens array, and the design It is also possible to detect the shift of the optical center of the small lens by comparing with the distance of the lens. However, since it is difficult to attach the lens array to the manufacturing apparatus with high accuracy, the deviation caused by the mounting of the lens array is an error in the measured distance from the origin of the manufacturing apparatus to the optical center of each small lens. Affect. For this reason, it is difficult to evaluate the arrangement of the lens array with high accuracy.
According to the present invention, since the array of the lens array is evaluated based on the distance between the optical centers of each lens array, such an error does not affect the actually measured distance, and more accurate evaluation is possible. is there.

Furthermore, the program of the present invention is a program for evaluating a lens array including a plurality of small lenses arranged in a matrix, and is characterized in that the evaluation method described above is executed by a computer.
According to the present invention as described above, the above-described lens array evaluation method can be executed by a computer by being installed in a general-purpose computer, so that the use of the present invention can be greatly promoted.

The lens array evaluation apparatus of the present invention is a lens array evaluation apparatus that evaluates a lens array having small lenses arranged in a matrix, and grasps the surface shape of each small lens and determines the optical center of the small lens. Measured center acquisition means for detecting and acquiring the position of the optical center with respect to the reference position, and the design center for acquiring the position of the optical center of the small lens of the designed lens array with respect to the reference position from the design information of the lens array The distance between the optical centers of all the small lenses acquired by the acquisition means and the measured center acquisition means is calculated as a first calculated value, and the optical centers of all the small lenses acquired by the design optical center acquisition means A calculation means for calculating a distance between the first calculation value and a second calculation value corresponding to the first calculation value; and calculating by the calculation means The difference was, characterized in that it comprises a determining means for determining whether or not it is less than a predetermined value.
Such an evaluation apparatus of the present invention can be used in the lens array evaluation method described above, and can exhibit the same effects as the evaluation method.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[1. Lens Array Structure and Manufacturing Method]
FIG. 1 shows a lens array 1. Specifically, FIG. 1A is a diagram of the lens array 1 viewed from the front, FIG. 1B is a diagram of the lens array 1 viewed from the side, and FIG. It is the figure which looked at from the side different from FIG. 1 (B).
The lens array 1 is mounted on an optical device such as a projector or a laser printer, and includes a base unit 11 and a lens unit 12.
The base portion 11 is formed as a rectangular plate-like body, and a lens portion 12 is formed on one surface. Moreover, the other surface of the base part 11 is substantially flat.
The lens unit 12 is formed so as to bulge out at a substantially central portion of one surface of the base unit 11, and includes a plurality of small lenses 121 that divide a light beam into a plurality of partial light beams.
The plurality of small lenses 121 are arranged in a matrix (for example, 6 rows × 4 columns, where rows are arranged in a row and columns are arranged in a row).
The small lens 121 may have a spherical shape or an aspherical shape.

The lens array 1 described above is manufactured by press-molding a molten glass lump 10 that is a molten optical material of the lens array 1 with a molding die 2 as shown in FIG.
The mold 2 includes a fixed mold 21 and a movable mold 22 configured to be movable forward and backward with respect to the fixed mold 21.
The fixed mold 21 is a substantially rectangular plate, and includes a molding surface 211 that molds a substantially flat surface of the lens array 1.
The movable die 22 has a substantially rectangular shape, but a plurality of concave portions 222 corresponding to the small lenses 121 of the lens array 1 are arranged in a matrix on the molding surface 221.

[2. Production of mold 2]
[2-1. Structure of processing machine 3]
The movable mold 22 of the mold 2 as described above is manufactured using a processing machine 3 as shown in FIG.
The processing machine 3 includes a holding portion 31 that holds the mother die 23 of the movable die 22 of the mold 2 and a working portion 32 that forms a recess 222 on the surface of the mother die 23.
Here, the mother die 23 refers to a state in which the concave portion 222 is not formed on the molding surface 221 of the movable die 22.
The holding unit 31 of the processing machine 3 is formed in a columnar shape extending toward the processing unit 32 side, and a jig in which a mother die 23 is attached to a circular surface 311 (see FIG. 5) on the processing unit 32 side. 4 is attached.
The holding portion 31 is provided with a drive portion 33 on the base end side (the side opposite to the surface 311), can advance and retreat along the Z axis, and advances and retreats with respect to the disc-type grindstone 321 of the processing portion 32. It has a configuration. In addition, the holding portion 31 is configured to be rotatable in the direction of the arrow R1 or the counter arrow R1 with the central axis passing through the center of the circular surface 311 of the holding portion 31 as the rotation axis 312. The rotating shaft 312 of the holding unit 31 is parallel to the Z axis.

The processing unit 32 includes a disc-type grindstone 321 as a tool, a grindstone shaft 322 to which the disc-type grindstone 321 is attached, and a bearing portion 323, and the grindstone shaft 322 is rotated at the end of the processing unit 32. A motor unit (not shown) is provided.
The processing unit 32 of the present embodiment includes a disk-type grindstone 321 and grinds the surface of the mother die 23 to form the concave portion 222. However, the present invention is not limited to this, for example, as shown in FIG. Instead of the disk-type grindstone 321, a processing unit 32 ′ including a cutting tool 321 ′ may be used. The cutting tool 321 ′ includes a substantially circular disk portion 321A ′ and a cutting portion 321B ′ provided on the disk portion 321A ′ and protruding outward. By using such a cutting tool 321 ′, it is possible to form the recess 222 on the surface of the mother die 23 by cutting.
Alternatively, the bite base may be fixed to the bearing portion 323 and the concave portion 222 may be cut.
The grindstone shaft 322 is movable in two directions orthogonal to the advancing / retreating direction of the holding portion 31, that is, in the Y-axis direction and the X-axis direction. Further, the axial direction of the grindstone shaft 322 and the Y-axis direction are parallel.
Therefore, the disc-type grindstone 321 attached to such a grindstone shaft 322 can move in the Y-axis direction and the X-axis direction, and the arrow R2 direction or the counter-arrow R2 direction (Y It can be rotated in the rotation direction with the axis along the axis as the rotation axis.
In such a processing machine 3, the mother die 23 is rotated by the holding unit 31 and the mother die 23 is moved along the Z-axis direction. Further, while rotating the disc type grindstone 321, the disc type grindstone 321 is brought into contact with the surface of the mother die 23, and the disc type grindstone 321 is moved in the Y axis direction and the X axis direction. That is, the holding unit 31 has a shaft configuration that can be positioned three-dimensionally with respect to the disc-type grindstone 321, and the disc-type grindstone 321 moves while being three-dimensionally positioned with respect to the holding unit 31. Become. In this way, the recess 222 is formed in the mother die 23.
When grinding is performed, a grinding liquid (not shown) is supplied between the disk-type grindstone 321 and the surface of the mother die 23.
The arrangement direction of the recesses 222 formed in a matrix by such a processing machine 3 is along the X-axis direction and the Y-axis direction.

[2-2. Jig structure]
3 and 5 to 8 show a jig 4 for attaching the mother die 23 to the holding portion 31 of the processing machine 3. FIG. 5 is a side view of FIG. 3 viewed from the front side (the drive unit 45Y side). FIG. 6 is a side view of the jig 4 as viewed from the lower side of FIG. FIG. 7 is an exploded perspective view of the disk portion 44 of the jig 4, and FIG. 8 is a plan view of the jig 4.
The jig 4 is fixed to the surface 311 of the holding portion 31 and has a base mounting plate 40 to which the base 41 is mounted, a base 41 to be mounted on the base mounting plate 40, and the base 41 on the Y axis direction. Y stage (first stage) 42 that slides in the X direction, X stage (second stage) 43 that slides on the Y stage 42 along the X-axis direction, and an attachment portion fixed on the X stage 43 A disk unit 44, a drive unit 45Y that drives the Y stage 42, and a drive unit 45X that drives the X stage 43 are provided.

The base mounting plate 40 has a substantially circular shape when viewed from the Z-axis direction, and the base 41 is fixed to the surface of the base mounting plate 40 on the side opposite to the surface 311 side with screws.
The base 41 has a substantially rectangular planar shape, and a groove 411 that extends along the Y-axis direction and is recessed toward the holding portion 31 is formed on the surface of the base 41 on the Y stage 42 side. The side surface of the base 41 is a surface substantially parallel to the X axis or the Y axis in FIG.
Similarly to the base portion 41, the Y stage 42 has a substantially rectangular shape when viewed from the Z-axis direction. The Y stage 42 includes a planar rectangular first member 42A installed on the base 41 and a planar rectangular second member 42B installed on the first member 42A. The first member 42A and the second member 42B are fixed and integrated with a screw.
A rail portion 421 that extends along the Y-axis direction and protrudes toward the base 41 side is formed on the surface of the first member 42A of the Y stage 42 on the base 41 side. The rail portion 421 is fitted into the groove portion 411 of the base portion 41 and slides in the groove portion 411. A groove 422 extending in the X-axis direction is formed on the surface of the second member 42B of the Y stage 42 on the X stage 43 side. The side surface of the Y stage 42 is a surface substantially parallel to the X axis or the Y axis in FIG.

Similarly to the Y stage 42 and the base portion 41, the X stage 43 has a planar rectangular shape when viewed from the Z-axis direction. A rail portion 431 that extends along the X-axis direction and protrudes toward the Y stage 43 is formed on the surface of the X stage 43 on the Y stage 42 side. The rail portion 431 is fitted in the groove portion 422 of the Y stage 42 and slides in the groove portion 422. The side surface of the X stage 43 is a surface substantially parallel to the X axis or the Y axis in FIG.
As shown in FIG. 6, a screw 47 as a fixing member is attached to one side surface 43 </ b> A (the lower surface in FIG. 3) along the sliding direction of the X stage 43. A screw 47 attached to the X stage 43 is formed on the side surface 43A and is inserted into a screw hole 43A1 (see FIG. 5) extending along the Y-axis direction of the X stage 43. The screw 47 is for bringing a positioning plate 48 for positioning the X stage 43 into contact with the side surface 43 </ b> A of the X stage 43. The positioning plate 48 is fixed to the side surface 42B1 of the second member 42B of the Y stage 42 along the sliding direction of the X stage 43, and the tip projects to the side surface 43A of the X stage 43. A long hole 481 along the sliding direction of the X stage 43 is formed at the tip of the positioning plate 48, and the screw 47 is inserted into the screw hole 43A1 through the long hole 481. Thereby, the positioning plate 48 fixed to the second member 42 </ b> B of the Y stage 42 comes into contact with the side surface 43 </ b> A of the X stage 43 so that the X stage 43 is fixed to the Y stage 42. .

  Similarly, the Y stage 42 is positioned by a screw 47 and a positioning plate 48. As shown in FIG. 6, the screw 47 is one side surface along the sliding direction of the first member 42A of the Y stage 42. Is inserted into the screw hole 42A1 formed in the above. The positioning plate 48 is fixed to the side surface of the base 41 along the sliding direction of the Y stage 42, and the tip protrudes to one side surface of the Y stage 42 along the sliding direction of the first member 42 </ b> A. . A long hole 481 is formed in the positioning plate 48 along the sliding direction of the Y stage 42, and the screw 47 is inserted into the screw hole 42A1 through the long hole 481. As a result, the positioning plate 48 fixed to the base 41 is pressed against the one side surface of the first member 42 </ b> A of the Y stage 42 so that the Y stage 42 is fixed to the base 41. .

The disk portion 44 has a planar circular shape when viewed from the Z-axis direction. As shown in FIG. 7, the disk portion 44 includes a columnar height adjustment unit 440A and a main body 440B attached to the columnar height adjustment unit 440A.
The height adjusting unit 440A is fixed on the X stage 43, and a pair of pins 440A1 are erected on a circular surface on the surface opposite to the X stage 43.
In addition, a flat reference surface 440A2 is formed on a cylindrical surface that is a side surface of the height adjusting portion 440A. Four reference surfaces 440A2 are formed on the cylindrical surface at equal intervals, and the reference surfaces 440A2 are substantially parallel to the side surfaces of the X stage 43 and the Y stage 42. That is, the reference surface 440A2 is a surface parallel to the X axis or the Y axis.
The main body 440B has a cylindrical shape, and is formed with a hole 440B1 that penetrates the opposing circular surfaces. A pair of pins 440A1 is inserted into the hole 440B1.

Of the pair of opposing circular surfaces of the main body 440B, a step portion 440B2 rising toward the mother die 23 is formed on one circular surface (mother die attaching surface) on the side where the mother die 23 is attached. Has been. The step portion 440B2 has a substantially fan-shaped flat surface, and the angle formed by the step surface rising toward the mother die 23 side is approximately 90 °. The step surface of the step portion 440B2 is formed along two orthogonal sides of the outer peripheral edge of the mother die 23 when the mother die 23 is installed at the center of the plane of the circular surface of the main body portion 440B.
As shown in FIG. 8, a mother die fixing member 441 for fixing the mother die 23 is attached to the one circular surface of the main body 440B. The mother die fixing member 441 is arranged along the step portion 440B2, and the first fixing member 441A and the second fixing member 441B fixed to the main body portion 440B and the side surfaces orthogonal to the mother die 23 are fixed to the first die fixing member 441. A third fixing member 441C for contacting and fixing the member 441A and the second fixing member 441B.
The third fixing member 441C includes a screw portion 441C1 with a screw engraved around it, a fixing member body 441C2 attached to the tip of the screw portion 441C1, and a screwing portion 441C3 into which the screw portion 441C1 is screwed. The distal end of the fixing member main body 441C2 is cut at a substantially right angle, and the notched portion 441C4 comes into contact with the corner portion of the mother die 23 by screwing the screw portion 441C1 into the screwing portion 441C3. Thereby, the mother die 23 is sandwiched between the third fixing member 441C, the first fixing member 441A, and the second fixing member 441B.
The screwing portion 441C3 is fixed to the main body portion 440B of the disk portion 44.
Of the surface of the mother die 23 fixed by such a mother die fixing member 441, the outer shape center position P1 of the portion for molding the lens array 1 and the center of the circular plane to which the mother die 23 of the disk portion 44 is attached. The position matches.

As shown in FIGS. 3, 5, 6, and 8, the drive unit 45 </ b> Y is for sliding the Y stage 42 on the base 41, and follows the sliding direction of the Y stage 42 of the base 41. It is fixed to a block 412 attached to the side face.
The drive unit 45Y is a so-called micrometer head, and is a spindle 451 that abuts against a contact portion 423A of a block 423 fixed to a side surface along the sliding direction of the Y stage 42, and is integrated with the spindle 451. A thimble 452 provided rotatably and a sleeve 453 through which the spindle 451 is inserted are provided.
A female screw (not shown) is provided on the inner periphery of the sleeve 453, and the female screw is screwed to the spindle 451. Accordingly, the spindle 451 advances and retreats along the Y-axis direction by screwing rotation. Although not shown, a main scale is provided on the outer surface of the sleeve 453.
The thimble 452 has a cylindrical shape that covers the outside of the sleeve 453 in a cylindrical shape. The thimble 452 and the spindle 451 are configured to rotate integrally. A vernier scale (not shown) for equally dividing the circumference is provided on the outer surface on one end side of such a thimble 452.
In such a drive unit 45Y, the spindle 451 moves forward and backward by rotating the thimble 452. The tip of the spindle 451 is in contact with a hemispherical contact portion 423A of a block 423 fixed to the Y stage 42, and the Y stage 42 slides along the Y-axis direction by moving the spindle 451 back and forth. To do.
The Y stage 42 is urged by an urging means such as a spring (not shown) in a direction opposite to the extending direction of the spindle 451.

The drive unit 45X has the same configuration as the drive unit 45Y. The drive unit 45X is attached to a block 424 fixed to a side surface orthogonal to the sliding direction of the Y stage 42. Further, the spindle 451 of the drive unit 45X can advance and retreat in the X-axis direction, and abuts against 432A per hemispherical degree of the block 432 fixed to the side surface along the sliding direction of the X stage 43.
The X stage 43 is biased by a biasing means such as a spring (not shown) in a direction opposite to the extending direction of the spindle 451 of the driving unit 45X.

[3. Mold manufacturing method]
[3-1. Mold processing]
Next, a method for manufacturing the movable mold 22 of the mold 2 using the processing machine 3 and the jig 4 as described above will be described with reference to FIGS.
First, the mother die 23 is attached to the holding unit 31 of the processing machine 3 (processing S1).
Specifically, this will be described with reference to the flowchart of FIG.
First, the base attachment plate 40 of the jig 4 is attached to the holding part 31 of the processing machine 3 (Process S1-1).
Next, the base 41, the Y stage 42, and the X stage 43 are attached to the base mounting plate 40 and temporarily fixed (processing S1-2).
Thereafter, the inclination of the base 41, the Y stage 42, and the X stage 43 is examined. (Processing S1-3)
A dial gauge or the like is brought into contact with the side surfaces of the base 41, the Y stage 42, and the X stage 43, which are located on the upper side of FIG. 3 (a surface substantially parallel to the X axis). Move in the X-axis direction and watch the scale change. When the base 41, the Y stage 42, and the X stage 43 are attached at an inclination, the scale of the dial gauge or the like is greatly shaken, so that the inclination of the base 41, the Y stage 42, and the X stage 43 is corrected (processing S1). -Four).
Thereafter, the base 41, the Y stage 42, and the X stage 43 are fixed with screws and finally fixed (processing S1-5).
Further, thereafter, the height adjusting portion 440A of the disk portion 44 is temporarily fixed on the X stage 43 (processing S1-6). Next, the inclination of the height adjustment unit 440A is examined (processing S1-7). A dial gauge or the like is brought into contact with the upper surface in FIG. 3 of the reference surface 440A2 of the height adjusting portion 440A of the disk portion 44, and the dial gauge or the like is moved in the X-axis direction to see the change in the scale. When the height adjustment portion 440A of the disk portion 44 is attached with an inclination, the scale of the dial gauge or the like is greatly shaken, so that the inclination of the height adjustment portion 440A of the disk portion 44 is corrected (processing S1-8). ).
Thereafter, the height adjusting unit 440A is permanently fixed to the X stage 43 with screws (step S1-9).
Further, the main body portion 440B of the disk portion 44 to which the mother die 23 is attached is attached to the height adjusting portion 440A (processing S1-10). Specifically, the pin 440A1 of the height adjusting portion 440A is inserted into the hole 440B1 of the main body portion 440B, and further fixed with screws (not shown).
The mother die 23 is fixed to the main body 440B of the disk portion 44 as follows.
First, the first fixing member 441A and the second fixing member 441B are fixed along the step portion 440B2 of the main body portion 440B of the disk portion 44. Next, the orthogonal side surfaces of the matrix 23 are brought into contact with the first fixing member 441A and the second fixing member 441B and fixed by the third fixing member 441C. Thereafter, the mother die 23 is fixed to the main body 440B with screws.
Thereby, the plane center of the main body 440B and the outer shape center position P1 of the mother die 23 coincide with each other.

In order to check whether the position of the hole 440B1 of the main body 440B of the disk portion 44 and the position of the pin 440A1 of the height adjusting portion 440A are accurately formed, the mother die 23 is attached to the main body 440B. At the previous stage of attachment, the main body 440B is attached to the height adjustment part 440A, and a measuring instrument such as a dial gauge is applied to the orthogonal step surfaces of the step 440B2 of the main body 440B to slide in the X-axis direction and the Y-axis direction. It is possible to check the runout of the scale. When the position of the hole 440B1 of the main body 440B of the disk portion 44 and the position of the pin 440A1 of the height adjustment portion 440A are accurately formed, one step surface of the step portion 440B2 is parallel to the X axis. Thus, since the other step surface orthogonal to the one side surface is parallel to the Y-axis, the scale of the measuring instrument such as a dial gauge is constant.
On the other hand, when the position of the hole 440B1 of the main body 440B of the disk part 44 and the position of the pin 440A1 of the height adjustment part 440A are misaligned, the scale of the measuring instrument such as a dial gauge may be greatly shaken. Become. In such a case, the main body 440B or the height adjustment unit 440A is processed and corrected.

Next, whether or not the mother die 23 is attached to the reference position of the holding portion 31, that is, the lens array 1 of the rotation shaft 312 of the holding portion 31 and the surface of the mother die 23 attached to the jig 4. It is confirmed whether or not the outer shape center position P1 of the part to be formed matches (see FIG. 8). This position becomes the origin position of the mother die 23 with respect to the holding unit 31 (processing S2, origin retrieval step).
Specifically, a measuring instrument such as a dial gauge is brought into contact with the side surface of the main body 440B of the disk portion 44. Thereafter, the holding unit 31 is rotationally driven. When the rotation shaft 312 of the holding unit 31 and the outer shape center position P1 of the surface of the mother die 23 are deviated, the value indicated by a measuring instrument such as a dial gauge greatly fluctuates. In this case, the X stage 43 and / or the Y stage 42 of the jig 4 are slid to perform alignment, and the positioning plate 48 is brought into contact with the X stage 43 or the Y stage 42 with the screws 47. Thus, the X stage 43 and the Y stage 42 are fixed.
In addition, when the rotating shaft 312 of the holding part 31 and the outer shape center position P1 of the surface of the mother die 23 substantially coincide with each other, the value indicated by the dial gauge or the like is substantially constant.
Then, after the origin is finished, the scales of the drive units 45X and 45Y for driving the X stage 43 and the Y stage 42 are read and recorded. Here, for example, if the scale of the drive unit 45X is 7.308 mm (= X ₀ ) and the scale of the drive unit 45Y is 7.202 (= Y ₀ ), these values are the values of the origin position. .
Further, a measuring device such as a dial gauge is applied to the reference surface 440A2 of the disk portion 44, and the position on the X axis and the position on the Y axis of the disk portion 44 are measured.

Next, the X stage 43 and the Y stage 42 are driven, and as shown in FIG. 11, the design position P2 that is the processing center (center) of the rotating shaft 312 of the holding portion 31 and the first concave portion 222. That is, the design position P2 corresponding to the optical center of the small lens 121 of the lens array 1 on the surface of the matrix 23 is matched (processing S3, adjustment step).
Here, the mother die 23 is moved based on the positional relationship between the rotation shaft 312 of the holding portion 31 and the design position P2 that is the machining center of the first recess 222 of the mother die 23 at the origin position. .

After this adjustment process is completed, the scales of the drive units 45X and 45Y that drive the X stage 43 and the Y stage 42 are read and recorded. Here, for example, the scale of the drive unit 45X is 2.208 mm (= X ₁ ), and the scale of the drive unit 45Y is 0.202 mm (= Y ₁ ).
Next, the movement amount W of the master block 23 is calculated from the scale fluctuation amounts (X ₁ −X ₀ , Y ₁ −Y ₀ ) of the drive units 45X and 45Y (processing S4, calculation step). In the adjustment process, the mother die 23 is moved based on the positional relationship between the rotation shaft 312 of the holding portion 31 and the design position P2 that is the machining center of the first recess 222 of the mother die 23 at the origin position. Therefore, in this calculation step, the design movement amount of the mother die 23 based on the positional relationship is calculated.
Equation (3) for calculating the movement amount is as follows.

Here, W = 8.6608 mm. Furthermore, a measuring instrument such as a dial gauge is applied to the reference surface 440A2 of the disk portion 44 of the jig 4 to which the master block 23 is fixed, and the X-axis direction and the Y-axis direction are set. The amount of movement is measured, and the amount of movement (actual value) of the disk portion 44 is obtained from the measurement result (processing S5, actual measurement step). Here, for example, the actual measurement value is 8.661 mm.
The disk portion 44 is moved as the X stage 43 and the Y stage 42 are driven, and the moving amount of the disk portion 44 is equal to the moving amount of the mother die 23.
Next, the movement amount (measured value) obtained in the actual measurement step is compared with the movement amount (calculated value) calculated in the calculation step (processing S6, comparison determination step).
It is determined whether or not the difference between the movement amount (measured value) obtained in the actual measurement process and the movement amount (calculated value) calculated in the calculation process is a predetermined value or less, for example, 0.01 mm or less.
Here, if it is below a predetermined value, the recess 222 is formed. Here, rough grinding is performed (processing S7, rough grinding step).

  When the difference between the actual measurement value and the calculated value exceeds a predetermined range value, the X stage 43 and the Y stage 42 are driven again without forming the recess 222, and the rotation shaft 312 of the holding unit 31 is driven. The design position P2 which is the processing center of the first concave portion 222, that is, the design position P2 corresponding to the optical center of the small lens 121 of the lens array 1 on the surface of the matrix 23 is matched (processing S3). The adjustment step) again calculates the movement amount of the disk portion 44 (movement amount of the master block 23) (processing S4), and actually measures the movement amount of the disk portion 44 (movement amount of the master block 23) (processing S5). The calculated value is compared with the actual measurement value (processing S6). This operation is repeated until the calculated value and the actually measured value fall below a predetermined value.

Next, in order to form the second recess 222, the X stage 43 and the Y stage 42 are driven to design the rotation axis 312 of the holding portion 31 and the processing center of the second recess 222. The position, that is, the design position corresponding to the optical center of the small lens 121 of the lens array 1 on the surface of the matrix 23 is matched (processing S3, adjustment step).
Then, the calculation process (process S4), the actual measurement process (process S5), and the comparison determination process (process S6) are performed again. When the difference between the actual measurement value and the calculated value falls within a predetermined range, rough grinding is performed. The concave portion 222 of the eye is formed (processing S7).
Such a process is repeated until the 24th recessed part 222 is formed (process S8).

Next, finish grinding of the recess 222 is performed (finish grinding step).
Here, as in the case of rough grinding, the adjustment process (process S9), the calculation process (process S10), the actual measurement process (process S11), and the comparison determination process (process S12) are performed, and the actual measurement value and the calculated value are calculated. If the difference is equal to or smaller than the predetermined value, finish grinding of the recess 222 is performed (processing S13). If the difference between the measured value and the calculated value is not less than the predetermined range, the adjustment process (process S9), the calculation process (process S10), the actual measurement process (process S11), and the comparison determination process (process S12) are performed again. Repeat the above process until it is within a predetermined range. Such an operation is performed until the 24th recess 222 is finish-ground (processing S14).
Thereafter, the surface roughness, shape accuracy, and the like of the concave portion 222 of the movable mold 22 of the mold 2 finish-ground in this way are measured (processing S15).
Here, the measurement result and the design dimension of the movable mold 22 are compared to determine whether or not the difference is equal to or smaller than a predetermined value (processing S16, surface roughness, shape accuracy determination step).
If the difference between the measurement result and the design dimension exceeds a predetermined value, the adjustment process (process S9), the calculation process (process S10), the actual measurement process (process S11), and the comparison determination process (process S12) are performed again. Then, finish grinding (processing S13) is performed. This is repeated until the difference between the measured value and the design dimension becomes a predetermined value or less.

[3-2. Mold Evaluation]
Next, the alignment accuracy of the concave portions 222 of the movable mold 22 of the mold 2 is evaluated using the manufacturing apparatus 5 shown in FIG. 12 (Process S17).
Here, the alignment accuracy of the recesses 222, that is, the alignment accuracy of the position corresponding to the optical center of the small lens 121 of the lens array 1 of the movable mold 22 (processing center of the recesses 222) is evaluated.
The manufacturing apparatus 5 includes an apparatus main body 51 and an arithmetic processing unit 52.
The apparatus main body 51 includes a surface plate 511, a table 512 installed on the surface plate 511, a frame 513 installed on the table 512, a laser measuring optical system 514 installed on the frame 513, Measuring means 515.
On the surface plate 511, an installation table 511A is provided for installing the movable mold 22 of the mold 2 to be measured.

The table 512 includes an X table 512X that slides along the X-axis direction and a Y table 512Y that slides along the Y-axis direction.
On the gantry 513, Z-axis moving means 516 that moves up and down in the vertical direction is provided, and a probe 517 is attached to the tip of the Z-axis moving means 516. By driving the X table 512X, the Y table 512Y, and the Z-axis moving means 516, the probe 517 is driven while following the inner surface shape of the concave portion 222 of the mold 2. The probe 517, for example, approaches the concave portion 222 of the mold 2 to a region where the atomic force acts, and measures an inclined surface up to 60 ° while keeping the atomic force constant. Is possible.

An X reference mirror 518X and a Y reference mirror 518Y are installed on the frame 513. The X reference mirror 518X and the Y reference mirror 518Y are supported by a support member 518A.
Further, a support (not shown) is installed on the gantry 513, and a Z reference mirror 518Z is installed on this support.
The laser length measurement optical system 514 measures the X coordinate value, the Y coordinate value, and the Z coordinate value of the probe 517 based on the Z reference mirror 518Z, the Y reference mirror 518Y, and the X reference mirror 518X by a known optical interference method. To do.

Although not shown, the laser length measurement optical system 514 includes a transmission frequency stabilized He-Ne Zeeman laser serving as a light source, a mirror for guiding the laser from the light source to the mold 2 and the reference mirrors 518X, 518Y, and 518Z. A prism and the like.
Measurement light and reference light are emitted from the light source, the measurement light is guided to the mold 2, and the reference light is guided to the reference mirrors 518X, 518Y, and 518Z. The measurement light and the reference light reflected by the mold 2 and the reference mirrors 518X, 518Y, and 518Z are introduced into the measurement unit 515. The measurement means 515 is a pulse counter, and the difference in frequency between the measurement light and the reference light is converted into a numerical value. This numerical value is output to the arithmetic processing unit 52, which will be described later, and the arithmetic processing unit 52 calculates the X coordinate value, the Y coordinate value, and the Z coordinate value based on this numerical value. These X coordinate value, Y coordinate value, and Z coordinate value are coordinate values with the machine origin of the manufacturing apparatus 5 as a reference position.

As shown in FIG. 13, the arithmetic processing device 52 includes an input / output unit 521 that controls input / output of data and the like, and an arithmetic processing device main body 522.
The input / output unit 521 is connected to an input unit 520A for inputting data such as a keyboard and a mouse, and a display unit 520B such as a display for outputting data from the arithmetic processing unit main body 522.

The arithmetic processing unit main body 522 includes a storage unit 523 and an arithmetic processing unit 524.
The arithmetic processing unit 524 includes a CPU, a coordinate value acquisition unit 524A as a program developed on an OS (Operating System) having a multitask function for controlling the CPU, an actual measurement center acquisition unit 524B, Calculation means 524C and determination means 524D are provided.
The coordinate value acquisition unit 524A calculates an X coordinate value, a Y coordinate value, and a Z coordinate value based on numerical values from the measurement unit 515 input via the input / output unit 521.
Based on the coordinate value acquired by the coordinate value acquisition unit 524A, the actual measurement center acquisition unit 524B determines the processing center of the recess 222 relative to the reference position that is the machine origin of the manufacturing apparatus 5, that is, the small lens 121 of the lens array 1. The coordinate value of the position corresponding to the optical axis is acquired.

The calculation means 524C calculates the distance between the centers of the respective recesses 222 acquired by the measured center acquisition means 524B. For example, assume that the processing center coordinates of the first recess 222 acquired by the measured center acquisition means 524B are (Xn1, Yn1) and the processing center coordinates of the second recess 222 are (Xn2, Yn2). A distance M (first calculated value) between the processing center of the first recess 222 and the processing center of the second recess 222 is expressed by the following formula (4).

  Next, the distance between the center of the first recess 222 and the center of the third recess 222 is calculated, and further, the distance between the centers of the second recess 222 and the third recess 222 is calculated. Such a calculation is performed between all the concave portions 222, and the distance M is sequentially calculated.

  Further, the calculation means 524C also calculates the distance between the design centers of the recesses 222. For example, if the design coordinates of the center of the first recess 222 are (Xd1, Yd1) and the design coordinates of the center of the second recess are (Xd2, Yd2), the distance L (second calculated value) ) Is represented by the following equation (5).

Such a calculation is performed between all the concave portions 222, and the distance L is sequentially calculated.
Further, in the calculation means 524C, the distance M between the processing centers of all the recesses 222 acquired by the measured center acquisition means 524B and the distance L between the centers of all the recesses 222 corresponding to the design are calculated. Calculate the absolute value of the difference.

The determination unit 524D determines whether or not the absolute value of the difference calculated by the calculation unit 524C is equal to or less than a predetermined value. For example, it is determined whether the absolute value is 10 μm or less.
The determination unit 524D also has a function of causing the display unit 520B to output a table T5 generated by an absolute value storage unit 523F, which will be described later, and the color setting table T6 of the color storage unit 523G is output at the time of output. The cell area of the table T5 to which a numerical value exceeding the predetermined value is input is output in a color different from other cell areas. That is, the determination result by the determination unit 524D is output to the display unit 520B via the input / output unit 521 and displayed.

The storage unit 523 includes measured coordinate value storage means 523A, measured center storage means 523B, design center storage means 523C, measured center distance storage means 523D, design center distance storage means 523E, and absolute value storage means 523F. And a color storage means 523G.
The measured coordinate value storage unit 523A stores the X coordinate value, the Y coordinate value, and the Z coordinate value of the recess 222 acquired by the coordinate value acquisition unit 524A of the arithmetic processing unit main body 522. The measured coordinate value storage means 523A only needs to store the coordinate value of the recess 222 until the center of the recess 222 is detected, and the measurement of the first recess 222 is completed. After the coordinate value of the machining center 222 is detected, the coordinate value of the second recess 222 to be measured may be overwritten next.

The measured center storage unit 523B stores the X coordinate value and the Y coordinate value of the machining center of the recess 222 acquired by the measured center acquisition unit 524B of the arithmetic processing unit main body 522. For example, the table T1 shown in FIG. 14 is generated. In this table T1, numbers 1 to 24 of the respective concave portions 222 are stored in association with X coordinate values and Y coordinate values.
Each recess 222 is numbered as shown in FIG.

The design center storage means 523C stores the X-coordinate value and Y-coordinate value (design value) of the design center of the recess 222 based on the design information of the movable mold 22 of the molding die 2, and FIG. As shown, a table T2 similar to the table T1 stored in the measured center storage means 523B is generated.
Note that the X coordinate value and Y coordinate value of the machining center in the design of the concave portion 222 are input to the arithmetic processing unit main body 522 from the input unit 520A via the input / output unit 521. Therefore, in this embodiment, the input / output unit 521 and the design center storage unit 523C correspond to the design center acquisition unit of the present invention.

The measured center-to-center distance storage unit 523D stores a distance M (first calculated value) between the processing centers based on the actual measurement of each recess 222 calculated by the calculation unit 524C. Here, a table T3 as shown in FIG. 17 is generated.
This table T3 is partitioned in a matrix, and the numbers 1 to 24 written in the leftmost column and the top row indicate the numbers of the respective recesses 222. For example, the numerical values described in the cell in which the second column in the leftmost column and the first column in the uppermost row intersect are the processing center of the second recess 222 and the processing of the first recess 222. It is a value indicating the distance from the center.

  The design center distance storage means 523E stores the distance L (second calculated value) between the machining centers on the design of each recess 222 calculated by the calculation means 524C. Here, as shown in FIG. 18, a table T4 similar to the table T3 stored in the actually measured center distance storage means 523D is generated.

  The absolute value storage unit 523F stores the absolute value calculated by the calculation unit 524C of the arithmetic processing unit main body 522. A table T5 as shown in FIG. 19 is generated, and absolute values are stored. In this table T5, the numbers 1 to 24 entered in the leftmost column and the top row indicate the numbers of the respective recesses 222. For example, the numerical value (0.2) described in the cell in which the second column in the leftmost column and the first column in the uppermost row intersect each other is the processing center of the first concave portion 222 measured and This is the absolute value of the difference between the distance M between the machining centers of the second recess 222 and the distance L between the designed machining center of the first recess 222 and the machining center of the second recess 222.

  As shown in FIG. 20, the color storage unit 523G includes a color setting table T6. This color setting table T6 stores the numerical value in the cell of the table T5 generated by the absolute value storage means 523F and the color of the cell area corresponding to this numerical value. For example, the numerical value in the cell is 10 In the case of (μm) or less, when the color of the cell region is white and the numerical value in the cell exceeds 10 (μm), it is set as red.

A method for evaluating the mold 2 using the manufacturing apparatus 5 as described above will be described. Here, a description will be given with reference to the flowchart of FIG.
Here, the concave portion 222 of the mold 2 is measured in order from the first, but is not limited to this, and the order of measurement is arbitrary.
First, the mold 2 is installed on the installation table 511 </ b> A of the manufacturing apparatus 5. Next, the probe 517 of the manufacturing apparatus 5 is driven to follow the shape of the first recess 222. At this time, a predetermined signal is sent from the measuring unit 515 to the arithmetic processing unit 52, and the coordinate value acquisition unit 524A of the arithmetic processing unit 524 of the arithmetic processing unit 52 outputs the X coordinate value, the Y coordinate value, and the Z coordinate value. By calculating, the shape of the recess 222 is grasped. Then, this coordinate value is stored in the measured coordinate value storage means 523A of the storage unit 523.

Next, when the driving of the probe 517 is completed, the actual measurement center acquisition unit 524B of the arithmetic processing unit 524 of the arithmetic processing unit 52 reads the coordinate value stored in the actual measurement coordinate value storage unit 523A, and from among these coordinate values. Then, a coordinate value corresponding to the processing center of the recess 222 is selected and acquired (processing S17-1, actual measurement center acquisition procedure). And the coordinate value of the processing center of this recessed part 222 is memorize | stored in the measurement center memory | storage means 523B. In the present embodiment, since the purpose is to evaluate the alignment accuracy of the processing centers of the concave portions 222 of the mold 2, only the X coordinate value and Y coordinate value of the processing center of each concave portion 222 are stored in the measured center storage unit 523B. Need only be stored.
Thereafter, the X coordinate value and Y coordinate value of the machining center of each recess 222 stored in the measured center storage unit 523B are read out by the calculation unit 524C. Then, the distance between the processing centers of all the concave portions 222 is calculated (processing S17-2, first calculation procedure), and the calculation result is stored in the measured center distance storage means 523D.

On the other hand, the X coordinate value and the Y coordinate value of the machining center of each recess 222 in the design are input to the input means 520A, and these values are stored in the design center storage means 523C (processing S17-3, design center acquisition procedure).
Then, the calculation means 524C reads the coordinate value stored in the design center storage means 523C, calculates the distance between the design centers of the recess 222 (processing S17-4, second calculation procedure), and calculates the calculated value. Stored in the design center distance storage means 523E.
Thereafter, the calculation unit 524C reads out the calculated value (first calculated value) stored in the measured center-to-center distance storage unit 523D and the calculated value (second calculated value) stored in the design center-to-center distance storage unit 523E. Then, the absolute value of the difference between these calculated values is calculated (processing S17-5, third calculation procedure). And this is memorize | stored in the absolute value memory | storage means 523F.

  The determination unit 524D reads the calculated value stored in the absolute value storage unit 523F and determines whether this value is equal to or less than a predetermined value (processing S17-6, determination procedure). Further, the determination unit 524D outputs the table T5 generated by the absolute value storage unit 523F to the display unit 520B. At this time, referring to the color setting table T6 of the color storage means 523G, the cell area to which the numerical value exceeding the predetermined value is input is displayed in red, for example, and the other cell areas are displayed in white.

The worker refers to the table T5 displayed on the display unit 520B, for example, when the cell region where the second row in the leftmost column and the first row in the top row intersect is red. It can be seen that the distance between the processing center of the first recess 222 and the processing center of the second recess 222 is abnormal. Therefore, the shape of the concave portion 222 is corrected with reference to the actually measured coordinate values and the designed coordinate values of the processing centers of the first concave portion 222 and the second concave portion 222.
Further, for example, when the absolute value at the processing center of the first recess 222 and the processing centers of all the other recesses 222 tends to exceed a predetermined value, the processing of the first recess 222 is performed. It is thought that the center has shifted. Accordingly, in this case, the shape of the recess 222 is corrected by referring to the actually measured coordinate value of the machining center of the first recess 222 and the design coordinate value.
Specifically, the correction is performed again by performing the processes S9 to S16, and then the process 17 (process S17-1 to S17-6) is performed again. The operations of Steps S9 to S17 are repeated until the numerical value stored in the absolute value storage unit 523F is equal to or less than a predetermined value.

[3-3. Mold surface treatment and inspection]
When the evaluation of the position accuracy of the center of the recess 222 as described above is completed, the surface of the movable mold 22 on which the recess 222 is formed (molded surface) is subjected to surface treatment (Process S18).
Then, finally, the movable mold 22 is inspected.
The mold 2 is assembled by the movable mold 22 and the fixed mold 21 (process S19) (see FIG. 2). And the molten glass 10 used as the raw material of the lens array 1 is inject | poured between the movable mold | type 22 and the fixed mold | type 21, and it press-molds (process S20).

Next, the arrangement accuracy of the optical axis position (optical center) of the small lens 121 of the lens array 1 manufactured in this way is confirmed (processing S21).
Here, the arrangement accuracy of the optical axis position (optical center) of the small lens 121 is evaluated by the same method as the case where the arrangement accuracy of the concave portions 222 of the movable mold 22 is evaluated using the manufacturing apparatus 5 described above. That is, the manufacturing apparatus 5 also serves as the lens array evaluation apparatus of the present invention.
The actual measurement center acquisition unit 524B of the arithmetic processing unit 524 of the manufacturing apparatus 5 acquires the coordinate value of the optical center of the small lens 121 based on the coordinate value acquired by the coordinate value acquisition unit 524A.
The calculating unit 524C calculates the distance (first calculated value) between the optical centers of the small lenses 121 acquired by the actually measured center acquiring unit 524B. Also, the distance (second calculated value) between the design centers of the small lenses 121 is calculated. Further, the difference between the first calculated value and the second calculated value is calculated.
The measured coordinate value storage unit 523A of the storage unit 523 stores the X coordinate value, Y coordinate value, and Z coordinate value of the optical center of the small lens 121 acquired by the coordinate value acquisition unit 524A of the arithmetic processing unit main body 522.
The measured center storage unit 523B stores the X coordinate value and the Y coordinate value of the optical center of the small lens 121 acquired by the measured center acquisition unit 524B.
The design center storage unit 523C stores the X coordinate value and the Y coordinate value of the optical center in design of the small lens 121 based on the design information of the lens array 1.
The measured center-to-center distance storage unit 523D stores the calculated value of the distance between the optical centers of the small lenses acquired by the measured center acquisition unit 524B.
Further, the design center distance storage unit 523E stores a calculated value of the distance between the optical centers in design of each small lens 121.

Specifically, the evaluation is performed as follows.
First, the lens array 1 is installed on the installation table 511 </ b> A of the manufacturing apparatus 5. Next, the probe 517 of the manufacturing apparatus 5 is driven to follow the shape of the small lens 121 of the first lens array 1. At this time, a predetermined signal is sent from the measuring unit 515 to the arithmetic processing unit 52, and the coordinate value acquisition unit 524A of the arithmetic processing unit 524 of the arithmetic processing unit 52 obtains the X coordinate value, the Y coordinate value, and the Z coordinate value. calculate. This coordinate value is stored in the measured coordinate value storage means 523A of the storage unit 523.
Next, when the driving of the probe 517 is completed, the actual measurement center acquisition unit 524B of the arithmetic processing unit 524 of the arithmetic processing unit 52 reads the coordinate value stored in the actual measurement coordinate value storage unit 523A, and from among these coordinate values. Then, the coordinate value corresponding to the optical center of the small lens 121 is selected and acquired (measured optical center acquisition procedure). The coordinate value of the optical center of the small lens 121 is stored in the measured center storage unit 523B.

Thereafter, the X coordinate value and the Y coordinate value of the optical axis position of each small lens 121 stored in the measured center storage unit 523B are read out by the calculation unit 524C. Then, the distance (first calculated value) between the optical centers of each small lens 121 is calculated (first calculation procedure), and the calculation result is stored in the measured center distance storage means 523D.
On the other hand, the X coordinate value and the Y coordinate value of the optical center of the designed small lens 121 are input to the input unit 520A, and these values are stored in the design center storage unit 523C (design center acquisition procedure).
Then, the calculation means 524C calculates the distance (second calculation value) between the optical centers in design of the small lens 121 from the coordinate values stored in the design center storage means 523C (second calculation procedure). The value is stored in the design center distance storage means 523E.

Thereafter, the calculation unit 524C reads the calculated value stored in the measured center-to-center distance storage unit 523D and the calculated value stored in the design center-to-center distance storage unit 523E, and calculates the absolute value of the difference between these calculated values. Is calculated (third calculation procedure). And this is memorize | stored in the absolute value memory | storage means 523F.
The determination unit 524D reads the calculated value stored in the absolute value storage unit 523F and determines whether this value is equal to or less than a predetermined value (determination procedure). Further, the determination unit 524D causes the display unit 520B to output the table generated by the absolute value storage unit 523F (the same table as the table T5). At this time, referring to the color setting table T6 of the color storage means 523G, the cell area to which the numerical value exceeding the predetermined value is input is displayed in red, for example, and the other cell areas are displayed in white.

The operator refers to the table displayed on the display unit 520B, and confirms the concave portion 222 having a number in which the cell region is red. Then, the actually measured coordinate value and the designed coordinate value of the concave portion 222 are confirmed, and the concave portion 222 of the movable mold 22 is corrected (processing S9 to processing S16).
Then, the manufacturing apparatus 5 is used again to evaluate the concave portion 222 of the movable mold 22 and the processes S17 to S21 are repeated.
When all the cell areas of the table displayed on the display unit 520B are white, that is, when the absolute value is equal to or less than a predetermined value, the manufacture of the movable mold 22 is completed.

[4. Effects of the embodiment]
Therefore, according to this embodiment, the following effects can be produced.
(1) When evaluating the arrangement of the centers of the concave portions 222, the processing centers of the concave portions 222 of the mold 2 are measured, and the distances between all the processing centers are calculated. On the other hand, the coordinate value of the design processing center of the recess 222 of the mold 2 is obtained, and the distance between the processing centers of the design recess 222 is calculated. Then, a difference between these distances is obtained, it is determined whether or not this difference is equal to or less than a predetermined value, and the accuracy of the arrangement of the recesses 222 is evaluated, so that the evaluation can be performed quickly.
For example, when the difference between the measured distance between the machining centers of the numbered recess 222 and the numbered recess 222 and the design distance exceeds a predetermined value, the numbered recess 222 The coordinate value of No. 2 and the coordinate value of the second concave portion 222 may be reviewed and corrected. As in the past, the measured coordinate values (X coordinate value, Y coordinate value) of the processing centers of all the concave portions 222, The evaluation can be performed more quickly than in the case of comparing design coordinate values (X coordinate value, Y coordinate value).
The same applies to the evaluation of the small lens 121 of the lens array 1, and the evaluation can be performed quickly.

(2) Further, in the present embodiment, the measured distance and the design distance between the processing centers of all the concave portions 222 are calculated, and the measured distance between the processing centers of all the concave portions 222 and Since the design distances are compared, for example, when the processing center of the first recess 222 is greatly shifted, the processing center of the first recess 222 and the processing center of another recess 222 are measured. The difference between the upper distance and the designed distance tends to be larger than a predetermined value. Therefore, it can be easily grasped that the processing center of the first recess 222 is shifted, and the evaluation can be performed more quickly.
The same effect can be obtained when the small lens 121 of the lens array 1 is evaluated.

(3) The deviation of the processing center of the recess 222 can also be detected by comparing the measured distance from the origin of the manufacturing apparatus 5 to the center of each recess 222 of the mold 2 and the design distance. Is possible. However, since it is difficult to attach the molding die 2 to the manufacturing apparatus 5 with high accuracy, a deviation that occurs due to the mounting of the molding die 2 is measured at an actually measured distance from the origin of the manufacturing apparatus 5 to the center of each recess 222. Affects as an error. For this reason, it is difficult to evaluate the arrangement of the recesses 222 with high accuracy.
On the other hand, in this embodiment, since the array of the recesses 222 is evaluated based on the actually measured distance between the centers of the respective recesses 222, the error due to the attachment of the mold 2 does not affect the actually measured distance. More accurate evaluation is possible.
The same effect can be obtained when the small lens 121 of the lens array 1 is evaluated.

(4) In this embodiment, since the table T5 generated by the absolute value storage means 523F is output to the display unit 520B, the operator can see the numerical values of the table T5 displayed on the display unit 520B. The alignment accuracy of the concave portions 222 and the alignment accuracy of the small lenses 121 can be evaluated.
Further, the manufacturing apparatus 5 includes a determination unit 524D. The determination unit 524D reads the calculated value stored in the absolute value storage unit 523F and determines whether this value is equal to or less than a predetermined value. Then, the determination unit 524D refers to the color setting table T6 of the color storage unit 523G, displays the cell area in which the numerical value exceeding the predetermined value is input, for example, in red, and displays the other cell areas in white. Since the display is performed, the operator can immediately determine which concave portion 222 or which small lens 121 is abnormal and evaluate the mold 2 only by looking at the display on the display unit 520B. It is easy to use for workers.

(5) In this embodiment, since the probe 517 of the apparatus main body 51 of the manufacturing apparatus 5 can measure an inclined surface up to 60 °, the radius of curvature of the surface of the concave portion 222 or the small lens 121 can be measured. Even in such a case, the coordinate values of the center of the recess 222 and the optical center of the small lens 121 can be accurately detected.

(6) In this embodiment, after evaluating the alignment accuracy of the concave portions 222 of the mold 2, the lens array 1 is manufactured using the mold 2, and the array of the small lenses 121 of the lens array 1 is arranged. The accuracy is evaluated. Then, based on the evaluation result of the arrangement accuracy of the small lenses 121, the processing center of the concave portion 222 is corrected.
Therefore, after evaluating the alignment accuracy of the recesses 222, for example, even when the manufacturing number or the like is imprinted on the surface of the movable mold 22 and the processing center of the recesses 222 is shifted, the small lens 121 is used. By evaluating the alignment accuracy of the optical centers, it is possible to detect the shift of the processing center of the recess 222, and it is possible to manufacture the movable mold 22 in which the recess 222 is formed more accurately.

[5. Modified example]
It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the embodiment, the determination unit 524D causes the display unit 520B to output the table T5 generated by the absolute value storage unit 523F, refers to the color setting table T6 of the color storage unit 523G, and the absolute value is a predetermined value. For example, the cell area in which a numerical value exceeding 1 is input is displayed in red and the other cell areas are displayed in white. However, the present invention is not limited to this, and all the cell areas may be displayed in the same color. In this case, the operator may look at the table displayed on the display unit 520B and determine whether or not the absolute value exceeds a predetermined value. In this case, since the color storage means 523G is not necessary, the structure of the manufacturing apparatus 5 can be simplified.

Furthermore, in the said embodiment, although the probe 517 of the apparatus main body 51 of the manufacturing apparatus 5 was able to measure an inclined surface up to 60 degrees at the maximum, the angle of the inclined surface which can be measured is not limited to this. The angle may be less than 60 ° or greater than 60 °.
Further, the structure of the apparatus main body 51 that detects the processing center of the recess 222 and the optical center of the small lens 121 is not limited to the structure described above, and is arbitrary. However, since it is necessary to accurately detect the processing center and the optical center, it is preferable that the measurement error is 0.05 μm or less.

  Furthermore, in the embodiment, in the first calculation procedure and the second calculation procedure, the distance between the processing centers of the concave portions 222 is calculated based on the X coordinate value and the Y coordinate value of the processing center of the concave portion 222. However, the present invention is not limited to this, and the distance between the processing centers of the recesses 222 may be calculated based on the X coordinate value, the Y coordinate value, and the Z coordinate value. However, since the number of coordinate values increases by doing in this way, a calculation procedure will be troublesome. In the embodiment, since the distance is calculated based on the two coordinate values of the X coordinate value and the Y coordinate value, the calculation procedure does not require labor.

Moreover, in the said embodiment, when processing the recessed part 222, the calculation process, the measurement process, and the comparison determination process were performed, However, You may abbreviate | omit a calculation process, a measurement process, and a comparison determination process. By doing in this way, the process of the recessed part 222 can be simplified.
Further, in the above embodiment, the jig 4 provided with the X stage 43 and the Y stage 42 is used when attaching the concave portion 222 to the holding part 31. However, the present invention is not limited to this, and a jig having another structure is used. The structure of the jig may be arbitrary.

  The present invention can be used for manufacturing a mold and evaluating small lenses of a lens array.

The figure which shows the lens array concerning 1st embodiment of this invention. Sectional drawing which shows the shaping | molding die of the said lens array. The perspective view which shows the processing machine and jig | tool for manufacturing a shaping | molding die. The schematic diagram which shows the modification of the said processing machine. The side view which shows the jig | tool for attaching the mother die of the said shaping | molding die to a processing machine. The side view which looked at the jig | tool from the direction different from FIG. The perspective view which shows the disk part of the said jig | tool. The top view which shows the said jig | tool. The flowchart which shows the manufacturing method of a shaping | molding die. The flowchart which shows the manufacturing method of a shaping | molding die. The top view which shows the state different from FIG. 8 of the said jig | tool. The schematic diagram which shows the apparatus which evaluates the array precision of the process center of the recessed part of a shaping | molding die, and the array precision of the optical center of the small lens of a lens array. The block diagram which shows the said apparatus. The figure which shows the table memorize | stored in the measurement center memory | storage means. The figure which shows the number attached | subjected to each recessed part. The figure which shows the table memorize | stored in the design center memory | storage means. The figure which shows the table memorize | stored by the measurement center distance storage means. The figure which shows the table memorize | stored in the design center distance storage means. The figure which shows the table memorize | stored in the absolute value memory | storage means. The figure which shows the color setting table memorize | stored in the color memory means. The flowchart which shows the evaluation method of a shaping | molding die.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Lens array, 2 ... Mold, 5 ... Manufacturing apparatus, 121 ... Small lens, 222 ... Recessed part, 441 ... Mother mold fixing member, 520B ... Display part, 521 ... Input / output part (design center acquisition means), 523C ... Design center storage means (design center acquisition means), 524B ... measurement center acquisition means, 524C ... calculation means, 524D ... determination means, L ... distance (second calculated value), M ... distance (first calculated value)

Claims (7)

A molding die for molding a lens array, wherein the molding surface has a plurality of recesses corresponding to small lenses arranged in a matrix of the lens array on the molding surface,
An actual measurement center acquisition procedure for grasping the surface shape of each recess processed into the mold, detecting the center corresponding to the optical center of the small lens of the lens array, and acquiring the position of the center with respect to the reference position;
A design center acquisition procedure for acquiring a center position corresponding to the optical center of the small lens of the designed lens array with respect to the reference position from the design information of the mold,
In the actual measurement center acquisition procedure, a first calculation procedure for calculating the distance between the centers of all the acquired recesses,
In the design center acquisition procedure, a second calculation procedure for calculating the distance between the centers of all the acquired recesses,
A third calculation procedure for obtaining a difference between the calculated value calculated in the first calculating procedure and the calculated value calculated in the second calculating procedure corresponding to the calculated value;
And a determination procedure for determining whether or not the difference calculated in the third calculation procedure is equal to or less than a predetermined value. A mold for molding a lens array, a molding die manufacturing apparatus in which a plurality of concave portions corresponding to small lenses arranged in a lens array matrix is formed on a molding surface,
An actual measurement center acquisition means for grasping the surface shape of each recess processed into the mold, detecting the center corresponding to the optical center of the small lens of the lens array, and acquiring the position of the center with respect to the reference position;
Design center acquisition means for acquiring a center position corresponding to the optical center of the small lens of the designed lens array with respect to the reference position from the design information of the mold;
The measured center acquisition unit calculates the distance between the centers of all the acquired recesses as a first calculated value, and the design center acquisition unit calculates the distance between the centers of all the recesses acquired as a second calculated value. Calculate
Calculating means for obtaining a difference between the first calculated value and a second calculated value corresponding to the first calculated value;
An apparatus for manufacturing a mold, comprising: a determination unit that determines whether the difference calculated by the calculation unit is equal to or less than a predetermined value. In the manufacturing apparatus of the shaping | molding die of Claim 2,
An apparatus for manufacturing a mold, comprising: a display unit that displays the difference calculated by the calculation unit and displays a determination result by the determination unit according to an arrangement of the concave portions of the mold. A mold for molding a lens array, a program for manufacturing a mold having a plurality of recesses corresponding to small lenses arranged in a matrix shape of the lens array on a molding surface,
A program for causing a computer to execute the manufacturing method according to claim 1. A method for evaluating a lens array comprising a plurality of small lenses arranged in a matrix,
An actual measurement optical center acquisition procedure for grasping the surface shape of each small lens, detecting the optical center of the small lens, and acquiring the position of the optical center with respect to a reference position;
A design optical center acquisition procedure for acquiring the position of the optical center of the small lens of the designed lens array with respect to the reference position from the design information of the lens array;
In the actual measurement optical center acquisition procedure, a first calculation procedure for calculating the distance between the optical centers of all acquired small lenses,
In the design optical center acquisition procedure, a second calculation procedure for calculating the distance between the optical centers of all acquired small lenses,
A third calculation procedure for obtaining a difference between the calculated value calculated in the first calculating procedure and the calculated value calculated in the second calculating procedure corresponding to the calculated value;
And a determination procedure for determining whether or not the difference calculated in the third calculation procedure is equal to or less than a predetermined value.   6. A program for evaluating a lens array having a plurality of small lenses arranged in a matrix, wherein the program executes the evaluation method according to claim 5. A lens array evaluation apparatus for evaluating a lens array having small lenses arranged in a matrix,
An actual measurement center acquisition unit that grasps the surface shape of each small lens, detects the optical center of the small lens, and acquires the position of the optical center with respect to a reference position;
Design center acquisition means for acquiring the position of the optical center of the small lens of the designed lens array with respect to the reference position from the design information of the lens array;
The measured center acquisition means calculates the distance between the optical centers of all the acquired small lenses as a first calculated value, and the designed optical center acquisition means calculates the distance between the optical centers of all the acquired small lenses. Calculate as the second calculated value,
Calculating means for obtaining a difference between the first calculated value and a second calculated value corresponding to the first calculated value;
A lens array evaluation apparatus comprising: a determination unit that determines whether or not the difference calculated by the calculation unit is equal to or less than a predetermined value.

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