TW201112345A - Protection device for release film of wafer film laminator - Google Patents
Protection device for release film of wafer film laminator Download PDFInfo
- Publication number
- TW201112345A TW201112345A TW98133084A TW98133084A TW201112345A TW 201112345 A TW201112345 A TW 201112345A TW 98133084 A TW98133084 A TW 98133084A TW 98133084 A TW98133084 A TW 98133084A TW 201112345 A TW201112345 A TW 201112345A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- cavity
- film
- upper cavity
- release film
- Prior art date
Links
- 238000007664 blowing Methods 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims description 10
- 238000010030 laminating Methods 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 241000282320 Panthera leo Species 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000013265 extended release Methods 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 66
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000003475 lamination Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 210000000003 hoof Anatomy 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98133084A TW201112345A (en) | 2009-09-30 | 2009-09-30 | Protection device for release film of wafer film laminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98133084A TW201112345A (en) | 2009-09-30 | 2009-09-30 | Protection device for release film of wafer film laminator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201112345A true TW201112345A (en) | 2011-04-01 |
| TWI387036B TWI387036B (enExample) | 2013-02-21 |
Family
ID=44909239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98133084A TW201112345A (en) | 2009-09-30 | 2009-09-30 | Protection device for release film of wafer film laminator |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201112345A (enExample) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1174164A (ja) * | 1997-08-27 | 1999-03-16 | Canon Inc | 基板処理装置、基板支持装置及び基板処理方法並びに基板の製造方法 |
| JP4354029B2 (ja) * | 1998-09-04 | 2009-10-28 | 日清紡ホールディングス株式会社 | ラミネート装置における搬送装置 |
| JP3098003B2 (ja) * | 1998-09-24 | 2000-10-10 | 日清紡績株式会社 | 太陽電池におけるラミネート装置 |
| JP3742000B2 (ja) * | 2000-11-30 | 2006-02-01 | 富士通株式会社 | プレス装置 |
| JP4250488B2 (ja) * | 2003-09-16 | 2009-04-08 | キヤノン株式会社 | 熱圧着方法 |
-
2009
- 2009-09-30 TW TW98133084A patent/TW201112345A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI387036B (enExample) | 2013-02-21 |
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