201037304 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種依據帶電性之玻璃板之評價方法 使用其之玻璃板之製造方法、該評價所用之裝置。 【先前技術】 被稱為液晶顯示器或電漿顯示器之平板顯示器Ppd) 之基板，係使用玻璃板。於FPD之製造步驟中，係具有將 玻璃板載置於搬運裝置或加工裝置之台、或自台上提之步 驟，隨著台與玻璃板之間的接觸、剝離，於絕緣體之破璃 板會累積靜電。若玻璃板的帶電量過大，則於基板所形成 之電子電路等會容易產生阻礙（靜電破壞）。因此，目前需要 -種不易累積因與台接觸、剝離所產生之靜電，帶電性低 玻璃板為了開發帶電性低之玻璃板，或為了確認製造 出之玻璃板其帶電性是否合乎所需之規格，而有必要對戚 璃板的帶電性進行正確的評價。 日本專利特開20〇5·255478號公報中，已揭示―種關於 玻璃板H其不易產生起因於與台接觸以及剥離所產 生之帶電’並於其㈣陣7]〜_7]之中已記載—種評償 玻璃板帶電性之方法，係反覆進# 5次台與玻璃板之間的 接觸、剝離’將剝離後之最大帶電量測量5次，根據該結 果評價玻璃板的帶電性。 本發明者主意到如日本專利特開2〇〇5_255478號公雜 記載之以往類型之評價方法有時會無法適當評價出玻璃板 201037304 的帶電性。該缺點可能是因實施玻璃板與台之接觸以及剝 離之操作之前既存於玻璃板之表面電位（初期電位）所引 起作為用以將玻璃板電中和處理之ι§具雖已知有靜電除 去器（ionizer)等，但即使仔細地利用該器具中和電性，亦難 以將玻璃板之初期電位完全去除。 【發明内容】 發明的概要 〇 本發明係提供一種玻璃板之評價方法，係反覆實施剝 離循環，並根據反覆進行該剝離循環時所測定之該剝離板 的表面電位，來評價玻璃板；該剝離循環包含將玻璃板載 置於載置台之載置步驟、與使該玻璃板自該載置台分離之 分離步驟；該剝離循環係至少反覆實施至該剝離循環次數 增加所伴隨之該表面電位之絕對值仍持續增加為止；（i)該 剝離循環係進而反覆實施至該玻璃板之該表面電位達到飽 和帶電電位為止，並將該飽和帶電電位之絕對值較基準值A ◎ 為小之玻璃板評價為帶電性低之玻璃板；或（ii)將該表面 電位之絕對值持續增加之期間該表面電位之絕對值的增加 量除以該期間内實施之該剝離循環的次數，所得之值較基 準值B為小之玻璃板評價為帶電性低之玻璃板。 本說明書中，所謂「表面電位之絕對值仍持續增加」 之狀態，意指玻璃板表面電位的絕對值經過既定次數之剝 離循環而連續增加之狀態，更具體而言，係意指第η次剝 離循環之表面電位的絕對值較第n—丨次剝離循環之表面電 5 201037304 位的絕對值來得大的關係（其中n為整數），為至少經過5〇 次、較佳為1〇〇次以上之剝離猶環的持續狀態。此外，本 說明書中，所謂玻璃板之飽和帶電電位，意指即使剝離循 環的次數增加，玻璃板表面電位於實質上不再變化時之該 表面電位，更具體而言，意指至少經過5〇次剝離循環之表 面電位相對於至少經過5G次剥離循環之表面電位平均值之 變動落在下式範圍時之該平均值。 I Vave ~ Vn | ^50 vave : 50次剝離循環之表面電位的平均值[Technical Field] The present invention relates to a method for producing a glass plate using the method for evaluating a glass plate according to a chargeability, and a device for use in the evaluation. [Prior Art] A substrate of a flat panel display Ppd) called a liquid crystal display or a plasma display uses a glass plate. In the manufacturing step of the FPD, there is a step of placing the glass plate on the table of the conveying device or the processing device, or lifting it from the table, and the glass plate of the insulator is contacted and peeled off between the table and the glass plate. Static electricity will accumulate. If the amount of charge of the glass plate is too large, the electronic circuit or the like formed on the substrate is likely to be hindered (static breakdown). Therefore, it is currently required to accumulate static electricity generated by contact with the table and peeling off, and the low-charge glass plate is used to develop a glass plate having low chargeability, or to confirm whether the chargeability of the manufactured glass plate meets the required specifications. However, it is necessary to correctly evaluate the chargeability of the glass plate. In Japanese Patent Laid-Open Publication No. H20-255478, it is disclosed that the glass sheet H is less likely to be caused by contact with the stage and the charging generated by the peeling, and is described in the (four) array 7]~_7]. - A method for evaluating the chargeability of a glass plate, which is a reverse contact between the 5th stage and the glass plate, and the peeling of the maximum charge amount after peeling is measured 5 times, and the chargeability of the glass plate is evaluated based on the result. The present inventors have thought that the evaluation method of the conventional type described in Japanese Patent Laid-Open Publication No. Hei. This disadvantage may be caused by the surface potential (initial potential) existing in the glass plate before the operation of the contact between the glass plate and the table and the peeling operation, and the electrostatic cleaning is known as the method for electrically neutralizing the glass plate. Ionizer or the like, but even if the electrical properties of the device are carefully utilized, it is difficult to completely remove the initial potential of the glass plate. SUMMARY OF THE INVENTION The present invention provides a method for evaluating a glass sheet, which is to repeatedly perform a peeling cycle, and evaluate a glass sheet according to a surface potential of the peeling plate measured at the time of repeating the peeling cycle; The cycle includes a step of placing the glass plate on the mounting table and a separating step of separating the glass plate from the mounting table; the peeling cycle is performed at least repeatedly until the surface potential is increased by the number of times of the peeling cycle The value continues to increase; (i) the stripping cycle is further performed until the surface potential of the glass plate reaches a saturated charging potential, and the absolute value of the saturated charging potential is smaller than the reference value A ◎ a glass plate having low chargeability; or (ii) dividing the increase in the absolute value of the surface potential during the period in which the absolute value of the surface potential is continuously increased by the number of times of the peeling cycle performed during the period, and the obtained value is compared with the reference A glass plate having a value B of a small size was evaluated as a glass plate having low chargeability. In the present specification, the state in which the "absolute value of the surface potential continues to increase" means a state in which the absolute value of the surface potential of the glass plate is continuously increased by a predetermined number of peeling cycles, and more specifically, the nth time The absolute value of the surface potential of the stripping cycle is greater than the absolute value of the surface electric 5 201037304 of the n-th peeling cycle (where n is an integer), which is at least 5 times, preferably 1 time. The above is the continuous state of the stripping of the ring. In addition, in the present specification, the saturated charged potential of the glass plate means that the surface potential of the glass plate is not substantially changed even if the number of times of the peeling cycle is increased, and more specifically, at least 5 turns. The average value of the surface potential of the secondary peeling cycle with respect to the average value of the surface potential of at least 5 G peeling cycles falls within the range of the following formula. I Vave ~ Vn | ^50 vave : average of surface potentials of 50 stripping cycles
Vn: 50次剝離循環之第n次循環之表面電位⑺ 此外，本發明於其他方面，係提供—種帶電性低之玻 璃板之製:係、具備由溶融之玻璃原料形成複數之玻 璃板之/冑肖利用上述評價方法來評價上述複數之玻璃 板的帶電性之步驟。 此外，本發明進而於其他方面係提供一種評價裝置， 係用以評價玻璃板的帶電 „ , 电往，其具備.载置台，係用以載 置玻璃板，升降部，得你、+. t 1 、使上述玻璃板相對於上述載上 行載置以及分離；測定部，^ ^ ^ ^ ^ ^ 係測疋上述玻璃板表面電位· 控制部，係對上述升降邻所、隹 > 电祖 與、分離上述測定部所進 戰置义及 制；上述控制部，係_邊；?述表面電位的測定加以控 、邊於上述測定部測定上述表面電位、 一邊以至 使得韌離循環、^ ^ ^ 值隨上述制離循環次數之^實施至上迷表面電位之絕對 控制上述升降部；上找幻& π万式來 上攻剝離循環包含使上述玻璃板相對於 ❹ Ο 201037304 上述載置台進行載置以及分離之操 部，係根據該表面電位來算出借運算 々宜准次 來算出在與用以評價玻璃板帶電* 之基準貝料比較上所應使用 、^κ 文用之貝科，ω上述控制部，俜— 邊於上述測定部測定上述表面電位、—邊以 進一步反覆至上述表面電 循環 恭即电诅幻違飽和帶電電位為止的方彳 來控制該升降部；上述運算部，係算出上述飽 : =值作為該資料；…述運算部，係藉由下述: 法异出之值做為上述資料：將上述表面電位之絕對值持續 增加之期間上述表面電位之絕對值的增加量，除以該期間 内實施之上述剝離循環的次數所得之值。 本發明中，係使剝離循環（包含將玻璃板載置於載置台 之步驟、與使該破璃板自載置台分離之步驟)至少反覆實施 至剝離循環次數增加所伴隨之玻璃板表面電位之絕對值仍 持續增加以。#由將㈣循環於上述程度為止反覆進 亍可適用於帶電性的評價並可測定不依存初期電位之物 理量，故可較以往正確評價玻璃板的帶電性。 【實施方式】 圖1係用以說明本發明之玻璃板之評價裝置的構成之 不意圖，圖2係表示該評價裝置1〇〇中載置台1〇附近之構 造之剖面圖。圖3係用以說明評價裝置100中玻璃板200 的升降動作之圖。評價裝置100係如圖1所示，具備用以 搭載玻璃板200之載置台1〇、升降部丨丨、測定部12、控制 部13、運算部14以及顯示部15。 7 201037304 升降部11係如圖2所示，具有可上下移動之升降軸 16、裝載於升降軸16之上端之升降17、與面向玻璃板 200(圖2中往上之方向）突出的方式於升降板17的上面所配 置之複數根頂料銷i 8(lifter pin)。玻璃板2〇〇係自載置於載 置台10之狀態，受升降部u的作用而自載置台1〇往上方 上升，之後下降而再次載置於載置台1〇。升降軸16的上下 動作係受控制部13而控制。載置台1〇之盤部分19形成有 貫通孔20,為了使升降板17接近載置台1〇之盤部分19而 移動升降轴16時，頂料銷18之上端會於貫通孔2〇内移動 而自盤部分19突出。 當實施將玻璃板200自載置台分離之分離步驟時，隨 著玻璃板200自盤部分1 9剝離，於玻璃板2〇〇會產生靜電。 藉由反覆實施由載置步驟（將玻璃板2〇〇載置於載置台 10)、分離步驟所構成之剝離循環，於玻璃板2〇〇會累積靜 電。 載置台10之盤部分19係由以鋁為代表之金屬所形 成，於盤部分19接觸於玻璃板200之表面係施有以防蝕鋁 (alumite)加工為代表之絕緣加工。頂料銷丨8係由以鋁為代 表之金屬所形成，其於接觸玻璃板200之上端部分係受到 以樹脂為代表之絕緣材料所包覆。載置台1〇之盤部分19 係形成有吸附孔（未圖示）’盤部分19係經由該吸附孔而發 揮用以將玻璃板200吸附固定於載置台1〇之吸附板的功 能。 測定部12係如圖1所示’具有用以測定玻璃板之 201037304 測定探針 12 ’係如圖2所示，係 表面電位的測定探針12’ 配置於自玻璃板200之表面21保拄〜 你锝既定距離（距離d)的位 置。測定部12係經由臂30而固定於斗政A Λ &於升降部11之升降板17。 藉此’如圖3所示，隨著升降板* 1牛似· 17的升降，測定探針12, 會相對於載置台10之盤部分19 通丨刀1 y而升降，故實施剝離循環 之間，玻璃板200的表面21盥測仝松w 一，則疋探針12,之間的距離dVn: Surface potential of the nth cycle of the 50th peeling cycle (7) In addition, the present invention provides, in other aspects, a glass plate having a low chargeability: a glass plate having a plurality of glass materials formed from a molten glass material. The step of evaluating the chargeability of the above plurality of glass sheets by the above evaluation method. In addition, the present invention further provides an evaluation device for evaluating the electrification of a glass plate, which is provided with a mounting table for mounting a glass plate, a lifting portion, and a +. 1 . The glass plate is placed and separated with respect to the load carrier; and the measuring unit is configured to measure the surface potential of the glass plate and the control unit, and the pair of elevation neighbors, 隹 > 祖祖Separating the measurement unit from the measurement unit; the control unit controls the surface potential, and the surface potential is measured by the measurement unit, so that the toughness cycle, ^ ^ ^ The value is controlled by the above-mentioned number of separation cycles to the absolute control of the surface potential, and the above-mentioned lifting portion; the upper phantom & π million type up-up peeling cycle includes placing the glass plate on the above-mentioned mounting table with respect to ❹ Ο 201037304 And the operation unit for separation is calculated based on the surface potential, and the calculation is based on the reference material used to evaluate the charging of the glass plate*, and the KK on the ω The control unit is configured to control the surface of the surface by measuring the surface potential of the measuring unit, and further control the lifting unit by repeating the surface to the surface electrical cycle. Calculating the above-mentioned full: = value as the data; the calculation unit is based on the following: The value of the difference is the above-mentioned data: the increase of the absolute value of the surface potential during the period in which the absolute value of the surface potential is continuously increased The amount is divided by the number of times of the above-mentioned peeling cycle performed in the period. In the present invention, the peeling cycle (including the step of placing the glass plate on the mounting table and separating the glass plate from the mounting table) The step) is performed at least repeatedly until the absolute value of the surface potential of the glass sheet accompanying the increase in the number of peeling cycles is continuously increased. #Repeat the above-mentioned degree by repeating (4), which can be applied to the evaluation of the chargeability and can be used to determine the initial stage of non-dependency. Since the physical quantity of the potential is used, the chargeability of the glass plate can be accurately evaluated. [Embodiment] FIG. 1 is a view for explaining an evaluation device for a glass plate of the present invention. 2 is a cross-sectional view showing a structure in the vicinity of the mounting table 1 in the evaluation device 1A. Fig. 3 is a view for explaining a lifting operation of the glass plate 200 in the evaluation device 100. The evaluation device 100 is a diagram. As shown in Fig. 1, a mounting table 1 for mounting a glass sheet 200, a lifting portion 丨丨, a measuring unit 12, a control unit 13, a calculation unit 14, and a display unit 15 are provided. 7 201037304 The lifting unit 11 is as shown in Fig. 2 The plurality of the lifting shafts 16 that are movable up and down, the lifting and lowering 17 that is mounted on the upper end of the lifting shaft 16, and the upper surface of the lifting plate 17 that protrudes toward the glass plate 200 (upward in FIG. 2) are provided. The top plate pin i 8 (lifter pin). The glass plate 2 is placed on the mounting table 10 in a state of being placed on the mounting table 10, and is lifted upward from the mounting table 1 by the action of the lifting portion u, and then lowered and loaded again. Set 1 time. The vertical movement of the lifting shaft 16 is controlled by the control unit 13. The disk portion 19 of the mounting table 1 is formed with a through hole 20, and when the lifting plate 17 is moved closer to the disk portion 19 of the mounting table 1 , the upper end of the top pin 18 moves in the through hole 2〇. It protrudes from the disk portion 19. When the separation step of separating the glass sheet 200 from the mounting table is carried out, static electricity is generated in the glass sheet 2 as the glass sheet 200 is peeled off from the disc portion 19. The peeling cycle constituted by the placing step (the glass plate 2 is placed on the mounting table 10) and the separating step is repeatedly performed, and static electricity is accumulated in the glass plate 2 . The disk portion 19 of the mounting table 10 is formed of a metal typified by aluminum, and the surface of the disk portion 19 which is in contact with the glass plate 200 is subjected to an insulation process typified by alumite processing. The top pin 8 is formed of a metal represented by aluminum, and the upper end portion of the contact glass plate 200 is covered with an insulating material typified by a resin. The disk portion 19 of the mounting table 1 is formed with an adsorption hole (not shown). The disk portion 19 functions to adsorb and fix the glass plate 200 to the adsorption plate of the mounting table 1 through the adsorption hole. As shown in FIG. 1, the measuring unit 12 has a measuring probe 12' for the measurement of the glass plate 2010a. The measuring probe 12' of the surface potential is disposed on the surface 21 of the glass plate 200. ~ You are at a given distance (distance d) position. The measuring unit 12 is fixed to the lifting plate 17 of the hoisting portion 11 via the arm 30 via the arm 30. Therefore, as shown in FIG. 3, the probe 12 is measured and lowered with respect to the disk portion 19 of the mounting table 10 by the boring tool 1 y as the lifting plate*1 is lifted and lowered, so that the peeling cycle is performed. Between, the surface 21 of the glass plate 200 is measured as the same as the loose w, then the distance d between the probes 12,
會保持固經由測定探針12，測定之玻璃板的表面電 位的測定值會隨著距離d而有所變動，但由於本發明之評 價裝置⑽如上所述其距離d會保持固定，故可避免該變 動所導致之測定不良的產生。 控制部13,係一邊於測定部12測定玻璃板鳩的表面 電位，一邊控制升降部u的動作（該動作係使玻璃板2⑻ 之剝離循％至少反覆實施至表面電位之絕對值隨剝離循環 次數之增加而仍增加為止）。控制部13係於玻璃板2〇〇自載 置。10为離之後，具體而言，係於玻璃板200自載置台1 〇 分離之後隨著下一個剝離循環而載置於載置台為止，對測 定邛12的動作進行控制，來測定玻璃板2〇〇的表面電位。 測定部12所進行的表面電位的測定（測定步驟），較佳為控 制成每一次剝離循環至少實施丨次，亦可控制成每既定次 數之剝離循環來實施。控制部13可於玻璃板200的表面電 位達到飽和帶電電位為止反覆進行剝離循環的方式來控制 升降部11的動作。 藉由測定部12所測定之玻璃板200的表面電位，係透 過控制部13而輪入至運算部14。運算部14係根據反覆實 9 201037304 施剝離循環後之玻璃板表面電位，算出在與用以評價玻璃 板的帶電性之基準資料比較上所應使用之以下至少—者：⑴ 玻璃板200的飽和帶電電位的絕對值；以及⑺表面電位之 絕對值持續增加之期間表面電位之絕對值的增加量，除以 該期間内實施之剝離循環的次數所得之值（表面電位的絕對 值的變化率）。飽和帶電電位的絕對值以及表面電位的絕對 值的 變化率係不依存初期電位之物理量。此外，表面電位 的絕對值的變化率 係根據間隔50次以上實施之2個剝離 循環之表面電位的絕對值而算出。藉由間隔至該程度之2 個剝離循環之表面電位表面電位的絕對值作為基準可幾 乎無視可能混入表面電位的測定值之雜訊的影響。 ί «· 藉由運算部14所算出之飽和帶電電位的絕對值以及表 面電位的絕對值的變化率，係透過控制部13而輸入至顯示 部15。評價裝置1 〇〇的使用者，可藉由將顯示部丨5所表示 之飽和帶電電位的絕對值以及表面電位的絕對值的變化 率，與對應之基準資料的值相比較，來評價玻璃板的 帶電性。更具體而言’飽和帶電電位的絕對值以及表面電 位的絕對值的變化率，較對應之基準資料之值為小時，評 價為帶電性低。對應飽和帶電電位的絕對值之基準資料之 基準值A，視玻璃板的用途來設定即可’例如玻璃板適用於 FPD基板的情形時，可設定為25〇〇v ^對應表面電位的絕對 值的變化率之基準資料之基準值B，視玻璃板的用途以及剝 離循環的實施條件來設定即可，例如玻璃板適用於FPD基 板、使用後述實施例所示之評價裝置1 〇〇來實施剝離循環 10 201037304 的情形時，可設定為8Ve 本發明之評價裝置亦可採取以下態樣：可進一步具備 汗價部’將飽和帶電電位的絕對值以及表面電位的絕對值 的變化率’與對應之基準資料相比較，藉此評價玻璃板200 的帶電性’自運算部14透過控制部1 3而將飽和帶電電位 , 的絕對值以及表面電位的絕對值的變化率輸入至評價部， 帶電性評價之信號透過控制部n輸入至顯示部1 5，評價結 果顯不於顯示部15的畫面。當評價裝置具備評價部時，以 〇 使用者可選擇基準值A以及基準值B之至少一者來作為帶 電性評價所使用之基準資料之狀態較佳。 關於本發明之玻璃板之評價方法，以使用評價裝置1〇〇 實施之情形作為例子進行說明。首先，將評價對象之玻璃 板載置於載置台1〇，透過吸附孔而吸附固定於盤部份19。 玻璃板200較佳為載置於載置台10之後立即使用公知之靜 電除去器中和電性。此外’實施電中和處理時，僅於最初 玻璃板200載置於載置台1〇時實施。 ® 接著’於吸附固定停止之狀態，驅動升降部U，一邊 以頂料銷18的上端支持玻璃板200，同時使其自載置台1〇 往上方上升。之後，降下升降部丨丨使玻璃板2〇〇再次载置 於載置台10 ’然後透過吸附孔使玻璃板2〇〇吸附固定於載 置台1〇。由玻璃板200對載置台10之載置步驟與分離步 驟所構成之剝離循環，係一邊實施測定步驟，一邊反覆實 施至至少該表面電位之絕對值隨剝離循環次數之增加而仍 持續增加為止（視情況反覆實施至玻璃板2〇〇的表面電位達 11 201037304 到飽和帶電電位為止）。然後，根據各測定步驟所得之玻璃 板200的表面電&，於測定部14算出飽和帶電電位的絕對 值以及表面電位的絕對值的變化率。 玻璃板200若為具有初期電位之狀態，則於剝離循環 初期之由玻璃板200所測定之表面電位的絕對值維持穩定 而不會增加，結果導致若以剝離循環初期的表面電位作為 指標時，將無法對玻璃板的帶電性進行適當的評價。然而， 藉由將剝離循環反覆實施至上述程度為止，可特定不依存 初期電位之物理量，即飽和帶電電位的絕對值以及表面電 位的絕對值的變化率。此外，由玻璃板2〇〇所得之飽和帶 電電位的絕對值係由玻璃板2〇〇的組成以及表面粗度（Ra) 而定，為玻璃板200所固有之值，不會隨著初期電位而變 動。由玻璃板200所得之表面電位的絕對值的變化率係由 玻璃板200與評價裝置1〇〇之組合而定，具體而言，係由 玻璃板200的組成以及表面粗度、載置台1〇的盤部分19 的表面粗度（Ra)與構成材料、以及剝離循環之剝離速度等組 合而定之值，不會隨著初期電位而變動。因此，藉由將飽 和帶電電位的絕對值以及表面電位的絕對值的變化率作為 指標，可不論有無初期電位而對玻璃板2〇〇的帶電性進行 適當的評價。玻璃板200的帶電性，可藉由將飽和帶電電 位的絕對值以及表面電位的絕對值的變化率，與對應之基 準資料相比較的方式進行評價。 此外，玻璃板的製造步驟中，會於各種步驟中產生表 面電位。例如，於熔解之玻璃原料形成為板狀後以輥輸送 12 201037304 ::之步驟中’因玻璃板與親之間的接觸、剝離所致 之輥與玻璃板表面之間的摩擦，而產生表面電位。此外， 例如於玻璃板之洗淨乾燥步驟中，因氣流與玻璃板表面之 間的摩擦，而產生表面電位。 f價對象之破璃板，可藉由熔融之玻璃原料加以形成 的方式自行準備，亦可以購買市售品的方式準備。 ❹ ❹ 此外’以上係針對使用本發明之評價裝置評價玻璃板 之態樣進行之說明，但本發明之許價方法亦可設為例如以 下之態樣：使用不具備運算部14之裝置，將敎之表面電 位以數值資料的形式輸出至裝置外，使裝置之使用者根據 該數值資料算出飽和帶電電位的絕對值以及表面電位的絕 對值的變化率，以此方式來取代藉由運算部14算出飽和帶 電電位的絕對值以及表面電位的絕對值的變化率。 根據本發明’可具備由熔融之玻璃原料形成複數之玻 璃板之步驟，與利用卜μ + μ ^ i 興扪用上述之坪價方法來評價該複數之玻璃 板的帶電性之步驟，來製造玻璃板。藉此，可對形成之玻 璃板其帶電性是否合乎既定之規格進行確認，並從形成之 複數之玻璃板中選出合乎該規格者，故可更確實地提供帶 電性低之玻璃板。 以下，藉由實施例對本發明進行更詳細的說明。 準備2種類玻璃板（68〇mmx88〇mm、厚度〇 ，其 具有以質量％表示之如下組成：Si〇2: 6〇 9、b2〇3: u 6、 Al2〇3： 16.9^ ： Mgo： 1.7^ Cao： 5.1 . SrO ： 2.6 ^ BaO ： 0.7、K2〇 . 0.25、Fe2〇3 : 〇 15、Sn〇2 : 〇 13，且表面粗度 13 201037304 各為0.2nm與0.5nm。下述說明，係將該等玻璃板中，表面 粗度為0.2nm者稱為試樣A、表面粗度為0_5mn者稱為試樣 B。此外，試樣B經確認與試樣A相比帶電性較低。 試樣A係藉由以下方法製得：使用具備耐火磚製溶解 槽與鉑製調整槽之連續熔解裝置，將原料批料於^肋^進 行熔解，並於165(TC進行澄清，再於1500。(：挽拌狀態下以 洩降法（downdraw)形成薄板狀後，切割成既定的大小，並洗 淨表面來獲得。試樣B係藉由以下方法製得：將玻璃板浸 潰於含有氟酸之玻璃蝕刻液12〇秒以下之範圍實施表面粗 面化步驟，然後洗淨玻璃板的表面，其餘以與試樣A相同 的方式來獲得。玻璃板的表面粗度以及後述之載置台的盤 部分的表面粗度（Ra)係使用原子力顯微鏡來測定。 於具有等級1000潔淨度之無塵室内設置本發明之評價 裝置100，利用上述方式對試樣A以及試樣B的帶電性進 行檢查。載置台1〇的盤部分19的表面粗度（1^)為i 6爪^。 無塵：室内之氣體環邊後祐制热、:s电，Λ。广> a,、„ i _The measurement value of the surface potential of the glass plate measured by the measurement probe 12 is kept constant with the distance d. However, since the evaluation device (10) of the present invention maintains the distance d as described above, it can be avoided. The occurrence of measurement failure caused by this change. The control unit 13 controls the operation of the elevating unit u while measuring the surface potential of the glass plate ( in the measuring unit 12 (this operation causes the peeling of the glass plate 2 (8) to be performed at least until the absolute value of the surface potential is changed with the number of peeling cycles. The increase is still increasing). The control unit 13 is mounted on the glass plate 2 from the top. After the separation of the glass plate 200 from the mounting table 1 is carried out, the glass plate 200 is placed on the mounting table with the next peeling cycle, and the operation of the measurement crucible 12 is controlled to measure the glass plate 2〇. The surface potential of 〇. The measurement of the surface potential (measurement step) by the measurement unit 12 is preferably carried out by controlling the peeling cycle to be performed at least once per peeling cycle or by a predetermined number of times. The control unit 13 can control the operation of the elevating unit 11 so that the peeling cycle is repeated until the surface potential of the glass plate 200 reaches the saturation electrification potential. The surface potential of the glass plate 200 measured by the measuring unit 12 is passed through the control unit 13 to the calculation unit 14. The calculation unit 14 calculates at least the following values to be used in comparison with the reference material for evaluating the chargeability of the glass sheet based on the surface potential of the glass sheet after the peeling cycle of the reversed coating 9 201037304: (1) saturation of the glass sheet 200 The absolute value of the charged potential; and (7) the increase in the absolute value of the surface potential during the period in which the absolute value of the surface potential continues to increase, divided by the number of times of the peeling cycle performed during the period (the rate of change of the absolute value of the surface potential) . The absolute value of the saturated charged potential and the rate of change of the absolute value of the surface potential are not dependent on the physical quantity of the initial potential. Further, the rate of change of the absolute value of the surface potential was calculated from the absolute value of the surface potential of the two peeling cycles which were carried out 50 times or more. By using the absolute value of the surface potential surface potential of the two peeling cycles spaced to this extent as a reference, the influence of noise which may be mixed into the measured value of the surface potential can be almost ignored. ί « The rate of change of the absolute value of the saturated charged potential and the absolute value of the surface potential calculated by the calculation unit 14 is input to the display unit 15 through the control unit 13. The user of the evaluation device 1 can evaluate the glass plate by comparing the absolute value of the saturated charged potential indicated by the display unit 5 and the rate of change of the absolute value of the surface potential with the value of the corresponding reference data. Chargeability. More specifically, the absolute value of the saturated charged potential and the rate of change of the absolute value of the surface potential are smaller than the values of the corresponding reference data, and the evaluation is low in chargeability. The reference value A of the reference data corresponding to the absolute value of the saturated charged potential can be set depending on the application of the glass plate. For example, when the glass plate is applied to the FPD substrate, the absolute value of the surface potential can be set to 25 〇〇v ^ The reference value B of the reference data of the rate of change may be set depending on the use of the glass plate and the conditions for the peeling cycle. For example, the glass plate is applied to the FPD substrate, and the peeling is performed using the evaluation device 1 shown in the examples described later. In the case of the cycle 10 201037304, it can be set to 8Ve. The evaluation device of the present invention can also adopt the following aspect: the sweat price portion can be further provided with the corresponding value of the absolute value of the saturated electrification potential and the absolute value of the surface potential. When the reference data is compared, the chargeability of the glass plate 200 is evaluated. The self-calculation unit 14 transmits the absolute value of the saturated electrification potential and the change rate of the absolute value of the surface potential to the evaluation unit through the control unit 13, and the chargeability evaluation is performed. The signal is input to the display unit 15 through the control unit n, and the evaluation result is not displayed on the screen of the display unit 15. When the evaluation device includes the evaluation unit, it is preferable that the user selects at least one of the reference value A and the reference value B as the reference data used for the chargeability evaluation. The evaluation method of the glass plate of the present invention will be described by using the evaluation device 1A as an example. First, the glass plate to be evaluated is placed on the mounting table 1 and is adsorbed and fixed to the disk portion 19 through the adsorption holes. The glass plate 200 is preferably placed in the well-known static electricity remover and electrically charged immediately after being placed on the mounting table 10. Further, when the electric neutralization process is performed, it is carried out only when the first glass plate 200 is placed on the mounting table 1 . Then, the glass plate 200 is supported by the upper end of the top pin 18 while the adsorption unit is stopped, and the upper portion of the top pin 18 is supported. Thereafter, the lifting and lowering portion is lowered, and the glass plate 2 is placed on the mounting table 10' again, and then the glass plate 2 is sucked and fixed to the mounting table 1 through the adsorption holes. The peeling cycle formed by the glass plate 200 on the mounting step and the separating step of the mounting table 10 is performed while the measurement step is performed until at least the absolute value of the surface potential continues to increase as the number of peeling cycles increases. Repeat as appropriate until the surface potential of the glass plate 2〇〇 reaches 11 201037304 to the saturated charged potential). Then, based on the surface electric power of the glass plate 200 obtained in each measurement step, the measurement unit 14 calculates the absolute value of the saturated charging potential and the rate of change of the absolute value of the surface potential. When the glass plate 200 has a state of an initial potential, the absolute value of the surface potential measured by the glass plate 200 at the initial stage of the peeling cycle is kept stable and does not increase, and as a result, when the surface potential at the initial stage of the peeling cycle is used as an index, The chargeability of the glass plate cannot be properly evaluated. However, by repeating the peeling cycle to the above-described extent, it is possible to specify the physical quantity that does not depend on the initial potential, that is, the absolute value of the saturated charged potential and the rate of change of the absolute value of the surface potential. Further, the absolute value of the saturated electrification potential obtained from the glass plate 2 is determined by the composition of the glass plate 2 and the surface roughness (Ra), and is a value inherent to the glass plate 200, and does not follow the initial potential. And change. The rate of change of the absolute value of the surface potential obtained by the glass plate 200 is determined by the combination of the glass plate 200 and the evaluation device 1A, specifically, the composition of the glass plate 200, the surface roughness, and the mounting table 1〇. The surface roughness (Ra) of the disk portion 19 is a combination of the constituent material and the peeling speed of the peeling cycle, and the like, and does not vary with the initial potential. Therefore, by using the absolute value of the saturated electrification potential and the rate of change of the absolute value of the surface potential as an index, the chargeability of the glass plate 2 can be appropriately evaluated regardless of the presence or absence of the initial potential. The chargeability of the glass plate 200 can be evaluated by comparing the absolute value of the saturated charged potential and the rate of change of the absolute value of the surface potential with the corresponding reference data. Further, in the manufacturing steps of the glass plate, the surface potential is generated in various steps. For example, after the molten glass raw material is formed into a plate shape, in the step of roller transport 12 201037304:: 'the surface is rubbed by the contact between the glass plate and the pro, and the surface of the glass plate is rubbed to generate a surface. Potential. Further, for example, in the washing and drying step of the glass plate, the surface potential is generated due to the friction between the gas flow and the surface of the glass plate. The glass plate of the f-price object can be prepared by the method of forming the molten glass material, or can be prepared by purchasing a commercially available product. ❹ ❹ In addition, the above description has been made on the evaluation of the glass plate using the evaluation device of the present invention, but the method of the present invention may be, for example, the following: using a device not including the calculation unit 14, The surface potential of the crucible is outputted to the outside of the device as a numerical data, so that the user of the device calculates the absolute value of the saturated electrification potential and the rate of change of the absolute value of the surface potential based on the numerical data, instead of the calculation unit 14 The absolute value of the saturated charged potential and the rate of change of the absolute value of the surface potential are calculated. According to the present invention, a step of forming a plurality of glass sheets from a molten glass raw material, and a step of evaluating the chargeability of the plurality of glass sheets by the above-mentioned valence method by using the above-mentioned valence method can be used. glass plate. Thereby, it is possible to confirm whether or not the chargeability of the formed glass plate conforms to a predetermined specification, and to select one of the plurality of formed glass sheets to meet the specifications, it is possible to more reliably provide a glass sheet having low chargeability. Hereinafter, the present invention will be described in more detail by way of examples. Two kinds of glass plates (68 〇 mm x 88 〇 mm, thickness 〇, which have the following composition in mass %: Si〇2: 6〇9, b2〇3: u 6, Al2〇3: 16.9^: Mgo: 1.7 ^ Cao: 5.1 . SrO : 2.6 ^ BaO : 0.7, K2〇. 0.25, Fe2〇3 : 〇15, Sn〇2 : 〇13, and the surface roughness 13 201037304 is 0.2 nm and 0.5 nm each. Among these glass plates, the surface roughness of 0.2 nm is referred to as sample A, and the surface roughness is 0_5 mn. It is referred to as sample B. Further, sample B is confirmed to have lower chargeability than sample A. Sample A was obtained by the following method: using a continuous melting device equipped with a refractory brick dissolution tank and a platinum adjustment tank, the raw material batch was melted at ribs, and clarified at 165 (TC). 1500. (: After forming a thin plate shape by downdraw in a state of being mixed, cutting into a predetermined size and washing the surface to obtain it. Sample B was obtained by immersing the glass plate in the following method: The glass etchant containing fluoric acid is subjected to a surface roughening step in a range of 12 sec or less, and then the surface of the glass plate is washed, and the rest is sample A The surface roughness of the glass plate and the surface roughness (Ra) of the disk portion of the mounting table described later are measured using an atomic force microscope. The evaluation device of the present invention is installed in a clean room having a degree of cleanliness of 1000 degrees. 100. The chargeability of the sample A and the sample B was examined by the above-described method. The surface roughness (1^) of the disk portion 19 of the mounting table 1 was i 6 claws ^. No dust: after the gas ring inside the chamber Blessing heat, :s electricity, Λ.guang> a,, „ i _
為止的時間設為3 3秒；停止吸附 14 201037304 杈準玻璃板的時間設為2秒；升高頂料銷使玻璃板上升至 距離載置台5Gmm之位置的時間設為7秒；上升後校準玻璃 板的時間設為2秒。此外，所謂玻璃板的校準’意指將頂 料銷的上升以及下降操作所導致之玻璃板位置的偏移加以 調整之操作。玻璃板表面電位係以每2.95秒測定-次，玻 璃板自載置台分離後至下一個剝離循環而載置於載置台為 止’此期間取得之資料之中與Qv相差最大者係選出作為各 剥離循環之表面電位。 Ο ® 4、® 5係表示試樣A與試樣B +反覆進行剝離循 所引起之表面電位的變動之圖。如圖4、圖5所示，於任一 试樣中，於反覆剝離循環的初期階段（例如剝離循環反覆進 仃5〜1〇次左右），因初期電位的影響表面電位的絕對值穩 疋而並未增加。然而，若進一步反覆實施剝離循環，於任 試樣中反覆次數超過25次起表面電位的絕對值幾乎呈直 線增加。 試樣A的飽和帶電電位的絕對值為7134V，試樣B的 〇 飽和帶電電位的絕對值為2322V。試樣A以及試樣B的飽 和帶電電位的絕對值，係於玻璃板表面電位的絕對值無法 持續增加之後的特定期間内實施之剝離循環之表面電位的 絕對值的平均值，更具體而言，關於試樣A的飽和帶電電 位的絕對值，係第337次至第428次為止之剝離循環之表 面電位的絕對值的平均值；關於試樣B的飽和帶電電位的 絕對值，係第351次至第403次為止之剝離循環之表面電 位的絕對值的平均值。該期間之剝離循環之表面電位的變 15 201037304 動為位於-50V以上50v以下之範圍。第119次與第237次 之剝離循環的表面電位，試樣A為_254〇v與_5〇〇5v，試樣 B為-855V與-1565V。根據該等資料計算表面電位的絕對值 的變化率時，試樣A為2〇 9V與_5〇〇5V，試樣B為6 〇v。 如上所述’不易帶電之玻璃板之試樣B其表面電位的 、·邑對值的I化率低於8V的範圍，且飽和帶電電位的絕對值 低於2500V的範圍。 【圖式簡單說明】 圖1係用以說明本發明之玻璃板之評價裝置的構成之 示意圖。 圖2係表示圖丨之裝置中載置台附近之構造之剖面圖。 圖3係用以說明圖1之裴置中玻璃板的升降動作之圖。 圖4係表示試樣a中剝離循環數與表面電位之間的關 係之圖。 圖5係表示試樣B中剝離循環數與表面電位之間的關 係之圖。 【主要元件符號說明】 10 載置台 11 升降部 12 測定部 測定探針 控制部 16 201037304 14 運算部 15 顯示部 16 升降軸 17 升降板 18 頂料銷 19 載置台之盤部分 20 貫通孔 21 與玻璃板之載置台相反側之表面 30 臂 100 玻璃板之評價裝置 200 玻璃板The time until the time is set to 3 3 seconds; the time for stopping the adsorption 14 201037304 杈 glass plate is set to 2 seconds; the time for raising the top material pin to raise the glass plate to the position of 5Gmm from the mounting table is set to 7 seconds; The time of the glass plate is set to 2 seconds. Further, the so-called "calibration of the glass plate" means an operation of adjusting the offset of the position of the glass plate caused by the raising and lowering operations of the top pin. The surface potential of the glass plate was measured once every 2.95 seconds, and the glass plate was separated from the mounting table to the next peeling cycle and placed on the mounting table. The data obtained during this period differed from the Qv as the largest. The surface potential of the cycle. Ο ® 4 and ® 5 are graphs showing changes in the surface potential caused by the peeling of the sample A and the sample B + repeatedly. As shown in Fig. 4 and Fig. 5, in any of the samples, in the initial stage of the reverse peeling cycle (for example, the peeling cycle is repeated about 5 to 1 times), the absolute value of the surface potential is stabilized by the influence of the initial potential. It has not increased. However, if the peeling cycle is further repeated, the absolute value of the surface potential increases almost linearly in the number of times of overlap in any of the samples. The absolute value of the saturated charged potential of sample A was 7134V, and the absolute value of the 〇 saturated charged potential of sample B was 2322V. The absolute value of the saturated charged potential of the sample A and the sample B is the average value of the absolute value of the surface potential of the peeling cycle which is performed in a specific period after the absolute value of the surface potential of the glass plate cannot be continuously increased, and more specifically The absolute value of the saturated charged potential of the sample A is the average value of the absolute value of the surface potential of the stripping cycle from the 337th to the 428th time; the absolute value of the saturated charged potential of the sample B is 351th. The average value of the absolute values of the surface potentials of the peeling cycles up to the 403th time. The surface potential change of the stripping cycle during this period 15 201037304 is in the range of -50V or more and 50v or less. The surface potential of the 119th and 237th peeling cycles, sample A was _254〇v and _5〇〇5v, and sample B was -855V and -1565V. When the rate of change of the absolute value of the surface potential was calculated from the data, the sample A was 2 〇 9 V and _ 5 〇〇 5 V, and the sample B was 6 〇 v. As described above, in the sample B of the glass sheet which is not easily charged, the surface electric potential of the surface potential is lower than the range of 8 V, and the absolute value of the saturated electrification potential is lower than the range of 2,500 V. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the configuration of an evaluation apparatus for a glass sheet of the present invention. Fig. 2 is a cross-sectional view showing the structure in the vicinity of the mounting table in the apparatus of the drawing. Fig. 3 is a view for explaining the lifting operation of the glass sheet in the stack of Fig. 1. Fig. 4 is a graph showing the relationship between the number of peeling cycles and the surface potential in the sample a. Fig. 5 is a graph showing the relationship between the number of peeling cycles and the surface potential in the sample B. [Main component code description] 10 Mounting table 11 Lifting unit 12 Measuring unit measuring probe control unit 16 201037304 14 Calculation unit 15 Display unit 16 Lifting shaft 17 Lifting plate 18 Top material pin 19 Disk portion 20 of the mounting table Through hole 21 and glass Surface of the opposite side of the mounting table of the plate 30 Arm 100 Evaluation device for glass plate 200 Glass plate
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