JP4854967B2 - Peeling charge measuring device - Google Patents

Description

  The present invention relates to a measuring apparatus and method for measuring the amount of charge generated when a protective film is peeled off from an adherend. This measurement apparatus and method can suitably measure the amount of charge generated when a protective film is peeled off from a plastic film, which is an adherend used for electronic parts such as liquid crystal displays.

  It is widely known that a phenomenon called peeling charging occurs when a protective film is peeled off from an adherend. This phenomenon was not particularly problematic as long as the peeled protective film caused minor problems such as clinging to the hand. However, in recent years, semiconductors in semiconductor and liquid crystal display driving devices are peeled off due to the peeling charge generated by the adherend with protective film or the protective film itself used in the manufacturing process of semiconductors and liquid crystal displays. A serious problem that malfunction occurred due to insulation breakdown came to occur. Therefore, it has become necessary to examine the charge amount due to peeling charging.

  In order to measure the degree of charge generated when the protective film is peeled off from the adherend, it is common to use a charged voltage measuring device that measures the charged voltage charged on the adherend from which the protective film has been peeled off. is there.

  When measuring using this measuring apparatus, there exists a fault that a charged voltage changes with the distance with a to-be-adhered thing. Since this is measured by the method of measuring the induced current in principle, it is inevitable that the charged voltage measured changes due to the change in the distance to the adherend. As can be seen from the expression Q = CV, where V is the voltage of the object to be adhered, C is the capacitance of the object to be adhered, and Q is the charge amount of the object to be adhered. There is a problem that the amount of charge that the adherend is actually charged varies depending on the electrostatic capacity. Further, there is a problem that the measurable range is narrow, and it is impossible to quantitatively measure how much the peeling charge amount generated in the entire adherend to be measured is. And there exists a problem that it cannot be known by what profile the peeling electrification amount which has generate | occur | produced in the middle of peeling in the whole to-be-adhered thing is changing.

  In the present invention, it is possible to measure the peeling charge amount generated in the entire adherend without being affected by the influence of the distance or the capacitance of the adherend, and during the peeling of the protective film from the adherend. It is an object of the present invention to provide a measuring apparatus capable of measuring the profile of the peeled charge amount generated in the substrate.

  The present invention is an apparatus and a method for measuring the amount of charge when a protective film is peeled off from an adherend, and further characterized in that it is possible to sequentially measure the amount of charge peeled off when the protective film is peeled off from an adherend. Measuring device and method thereof.

  When the peeling charge amount measuring apparatus of the present invention is used, it is possible to stably measure the peeling charge amount of the entire adherend that could not be measured by a conventional measuring instrument and to obtain a profile of the peeling charge amount in the peeling process. It can be used to grasp the change in charge amount that occurs during peeling.

  FIG. 3 shows an example of the peeling charge amount measuring apparatus of the present invention. The adherend 1 is placed on the metal plate 4 and stopped by the fastener 13 so that the adherend 1 does not move.

The material 1 and the shape of the adherend 1 are not particularly limited as long as the protective film is attached thereto, and examples thereof include a conductive material such as a plastic film, a semiconductor wafer, or a metal. It can measure suitably about nonelectroconductive substances like the film made from a triacetyl cellulose resin currently used with the liquid crystal display. A plastic film mixed with a conductive material such as carbon black or a surface coated with an antistatic agent can also be measured. However, if the non-conductive material is thick, it is difficult in principle to measure all of the charge amount generated on the peeled surface of the protective film.

  The metal plate 4 may be anything as long as it is a metal plate. However, in consideration of long-term use, a metal of a material that does not generate rust is preferable, and a stainless plate or the like is preferably used. Moreover, it is preferable that the metal plate 4 has an area larger than an adherend. This is to increase the measurement accuracy by capturing all the lines of electric force generated by the peeling electrification on the side of the adherend 1 in contact with the metal plate 4.

  A metal wire 4 and a measuring probe 7 of a coulomb meter 6 which is a charge amount measuring device are connected by a conducting wire 5. The coulomb meter 6 is always connected to the ground by a conducting wire 8. The coulomb meter is a measuring device based on the principle that the detected charge is temporarily stored in a capacitor and the amount of stored charge is measured. Commercially available products can be used as they are.

  The metal plate 4 is connected to the ground via the switch 10 by the conducting wire 9. Further, a metal neutralizing plate 11 that maintains an area equal to or larger than the area of the adherend 1 connected to the ground is prepared separately. The neutralization plate 11 may be anything as long as it is a metal plate. It is preferable that the neutralization plate 11 has an area where all of the objects to be adhered and the protective film can be in contact with each other.

  The metal plate 4 is fixed to a metal measuring table 15 without an electrical connection through an insulator 14. The insulator 14 may be anything as long as it can be electrically insulated and hardly charged. For example, ceramics or glass can be used, and ceramics is preferable.

  When the protective film 12 stuck on the adherend 1 is peeled off, the charge generated by the peeling is generated in the adherend 1. At this time, the metal plate 4 that is in close contact with the adherend 1 generates a charge having the opposite polarity, and at the same time, the charge having the same polarity as the charge generated on the adherend 1 passes through the lead wire 5 and passes through the conductor 5. It is transmitted to the measurement probe 7 and is displayed on the coulomb meter 6 as the amount of peeled charge at that time.

  By using the metal plate 4, it is possible to capture the charge generated in the entire adherend 1 generated by the peeling electrification as described above, and thus the peel charge amount generated in the entire adherend 1 can be measured.

  FIG. 5 is also an example of the peeling charge amount measuring apparatus of the present invention. The measuring probe 7 of the coulomb meter 6 which is a measuring device for the amount of electric charge is connected to the metal plate 4 through the switch 20 by the conducting wires 5 and 25. The coulomb meter 6 is connected to the chart recorder 22 by a conducting wire 8 and is always connected to the ground 23. The metal plate 4 can also be connected to ground via a switch 20 via a conductor 24.

  The metal plate 15 is connected to the ground via a conducting wire 21. The metal plate 15 is placed on a non-conductive material (not shown). The non-conductive material is a non-conductive material, and examples thereof include wood, but are not limited thereto.

  When the protective film 12 stuck on the adherend 1 is peeled off, the charge generated by the peeling is generated in the adherend 1. At this time, on the side of the metal plate 4 that is in close contact with the object 1 to be adhered, a charge of the opposite polarity is generated on the side close to the object 1 and at the same time, a charge having the same polarity as the charge generated on the object 1 is conducted. 5 and 25 and transmitted to the measurement probe 7 of the coulomb meter 6, and is displayed on the coulomb meter 6 as the peeled charge amount at that time. Since the charge is generated as the protective film 12 is peeled off, the charge amount can be plotted against the time axis on the chart recorder 22 connected to the coulomb meter 6 via the lead wire 8. You can know your profile.

  Preferably, the measuring device is shielded from the surrounding electrical influence by a shield 16 made of a conductive material connected to ground by a conductor 17 on the metal plate 15. The conductive material is a conductive material, and for example, a metal or a metal having a hole that does not affect the measurement can be used, but is not limited thereto. Of the measuring devices, the products using the above-mentioned coulomb meter 6, measuring probe 7, switch 10 and the like are preferably placed outside the shield 16, and if unavoidably placed inside the shield 16, they are surrounded by a conductive material. It is preferable to cover.

  When measuring the peel charge amount by peeling off the protective film 12 in the shield 16, the protective film 12 is held by sandwiching the protective film 12 with a protective film holding jig 18 such as a clip made of a conductive material, This is performed by pulling a string 19 made of a non-conductive material connected to the protective film carrying jig 18. The conductive material is a conductive material, and for example, a metal can be used, but is not limited thereto. The non-conductive material is a non-conductive material, and for example, cotton can be used, but is not limited thereto. The string 19 made of a non-conductive material connected to the protective film holding jig 18 does not have to be in a string shape, and is particularly a means that can peel the protective film 12 in the shield 16 from the outside of the shield. The present invention is not limited to the above-described method. For example, the string 19 is directly attached to the protective film 12 without using the protective film holding jig 18.

  Before fixing the adherend 1 and the protective film 12 to the metal plate 4 using the fastener 13, it is desirable to remove the charge beforehand and confirm that the charged voltage is 0V. At this time, the object to be adhered 1 and the protective film 12 can be neutralized while being held with a tweezer made of ceramics, glass, or the like that can be electrically insulated so as not to be charged again. desirable. Even if this operation is not performed, it is possible to measure the peel charge amount using this measuring apparatus, but this operation is preferably performed when the accuracy of the measurement result is required.

  By using the measuring device of the present invention, unlike the device for measuring the charged voltage conventionally used, it occurs in the entire adherend without being affected by the distance or the capacitance of the adherend. The peel charge amount can be measured, and the profile of the peel charge amount generated while the protective film protecting the adherend is being peeled can be measured. As a result, in a semiconductor manufacturing process or a liquid crystal display manufacturing process, an adherend with a protective film used in the process, or in a semiconductor or liquid crystal display driving device due to peeling charging generated by the protective film itself. It is an object of the present invention to provide a measuring apparatus capable of measuring a minute amount of charge that causes a serious problem that a malfunction occurs due to dielectric breakdown of a semiconductor.

  (Example 1) Using a peeling charge amount measuring apparatus having the structure shown in FIG. 3, a polyethylene terephthalate resin film SL (manufactured by Teijin DuPont) is used as an adherend, and Sumilon E-2035 (manufactured by Sumilon) is used as a protective film. did. The metal plate 4 placed on the insulator 14 (ceramics) with the same area (125 mm × 50 mm) as the adherend using the fastener 13, and the thickness of the stainless steel described in JIS G 4305 is 1.5 mm, surface condition is 280 water-resistant abrasive paper described in JIS R 6253, lightly indexed with abrasive paper in the width direction of the test plate, and polished uniformly in the length direction over the entire length until this index disappeared completely And a protective film of 125 mm x 50 mm (the actual part to be attached is 100 mm x 50 mm) is attached at a speed of 300 mm / min with a JIS Z-0237 compliant roller (protected on the object to be adhered in advance) A film-laminated plate can also be used), a neutralizing plate 11 (JIS G 4305 stainless steel thickness is 1.5 mm, surface condition is JIS R No. 280 water-resistant abrasive paper described in H.253, with a light index in the width direction of the test plate with a polishing paper, and uniformly polished in the length direction over the entire length until this index disappeared completely)) on the protective film. At the same time, the switch 10 is switched to connect the metal plate 4 to the ground and leave for 30 seconds. Thereafter, the neutralization plate 11 is quickly removed, and the switch 10 is switched to disconnect the metal plate 4 from the ground. The peeling charge amount was measured by peeling the protective film with ceramic tweezers at a speed of about 2,000 mm / min. NK-1001 of Kasuga Electric Co., Ltd. was used as a coulomb meter. FIG. 4 shows a plot of integrated values of measured peel charges over time.

  (Example 2) Using a peeling charge amount measuring apparatus having the structure shown in FIG. 5, a polyethylene terephthalate resin film SL (manufactured by Teijin DuPont) is used as an adherend, and Sumilon E-2035 (manufactured by Sumilon) is used as a protective film. did. In the measurement, the switch 20 is switched to the conductive wire 24 side connected to the ground, and the metal plate 4 is connected to the ground. The object to be adhered 1 (125 mm × 50 mm) is neutralized using an ionized air static eliminator (Keyence SJ-S020), and the charged voltage is 0 V using a charged voltage measuring device (Keyence SK200). To confirm. Similarly, the protective film 12 (125 mm × 25 mm) is neutralized using an ionized air static neutralizer, and it is confirmed that the charged voltage is 0V. The protective film 12 that has been neutralized is pasted on the adherend 1 at a speed of 300 mm / min with a roller conforming to JIS Z-0237 in a range of 100 mm × 25 mm (the one having a protective film previously pasted on the adherend is used. It is possible to remove static electricity with an ionized air static eliminator again and confirm that the charged voltage is 0 V. Then, using the fastener 13, the insulator 14 has the same area (125 mm × 50 mm) as the adherend. Metal plate 4 placed on (ceramics) (the thickness of stainless steel described in JIS G 4305 is 1.5 mm, and the surface condition is polished in the width direction of the test plate with No. 280 water-resistant abrasive paper described in JIS R 6253 Lightly attach an index with paper, and fix it to the length evenly polished over the entire length until the index disappears completely. Thereafter, the non-sticking portion of the protective film 12 is carried using the protective film carrying jig 18 and shielded by the shield 16, and then the switch 20 is switched to disconnect the metal plate 4 from the ground. The peel charge amount was measured by peeling the string 19 at a speed of about 300 mm / sec. NK-1001 of Kasuga Electric Co., Ltd. was used as a coulomb meter. Moreover, in the operation which removes static electricity to the to-be-adhered thing 1 and the protective film 12, the method which used the tweezers made from a ceramic and did not touch directly with the hand was taken.

FIG. 1 is a schematic view of a conventional voltage measuring device. FIG. 2 is a schematic view of a measurement range of an adherend with a conventional charged voltage measuring device. FIG. 3 is a schematic view of an example of the peeling charge amount measuring apparatus of the present invention. FIG. 4 shows an example of a profile of the peel charge amount during the peel obtained by the charge amount measuring method according to the present invention. Schematic of an example of the peeling charge amount measuring apparatus of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, Adhering object 2, Measuring apparatus 3, Observation window 4, Metal plate 5, Conductor 6, Coulomb meter 7, Measuring probe 8, Conductor 9, Conductor 10, Switch 11, Static elimination board 12, Protective film 13, Fastener 14 , Insulator 15, metal measurement base plate 16, shield 17, conductor 18, protective film holding jig 19, string 20, switch 21, conductor 22, chart recorder 23, conductor 24, conductor 26, conductor

Claims (6)

A metal plate for placing an adherend and a protective film, and a coulomb meter connected to the metal plate by a conductive wire, and the metal plate is on an insulator, the amount of electrostatic charge when peeling the protective film from the adherend (Q) Measuring device. The measuring apparatus according to claim 1, wherein a peeling charge amount (Q) generated when the protective film is peeled from the adherend can be sequentially measured with a coulomb meter. The apparatus according to claim 1, wherein the metal plate has a larger area than the adherend and the protective film. The measuring apparatus according to any one of claims 1 to 3, wherein the metal plate and the coulomb meter are grounded. 5. The measuring apparatus according to claim 1, wherein the measuring apparatus is covered with a conductive material that is grounded. Charge amount (Q generated when the protective film is peeled off from the adherend to be adhered and the protective film placed on the metal plate using the measuring device according to any one of claims 1 to 5. ) How to measure.

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