TW201035671A - Lens fine-tuning mechanism of probe type test device - Google Patents

Abstract

A lens fine-tuning mechanism of probe type test device includes a circuit board, a lens base, a support unit, and a plurality of probes. The support unit is provided to fix the relative position of the circuit board and the probes and also electrically connect the plurality of probes to the circuit board. The fine-tuning mechanism is composed of the lens base and a carrying base of the support unit. At least one lens set is disposed at the lens base. The lens base is installed in the carrying base. By adjusting the position of the lens base, it is able to achieve the purpose of correcting the position for the lens of the probe type test device.

Description

201035671 VI. Description of the Invention: [Technical Field] The present invention is a lens-adjusting mechanism, which is mainly used as a probe type test device for an image sensing wafer. [Prior Art] The development of digital cameras or digital cameras is changing rapidly. The technologies used include photonic motors, electronics, etc. Among many parts, image sensing wafers can be regarded as critical parts. The image sensing wafer fabrication process is similar to the IC wafer mode, which is generally more time consuming than the IC wafer system. The image sensing wafer is better than it. In order to make the image sense in the production 4' more cost-effective, improve the process speed and product quality, Wei Shang hopes to test the needle in the front part of the image processing wafer, and use the lens (Lens) to assist the test and simulate the actual use. The sensitization state of the time, in order to brake off the defective products early, and achieve better economic efficiency disk control during the production process. , ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Needle (Spring pr〇be)··. Each of the different measuring devices will make a new lens group. As the rapid development of the circuit, there are more and more _ test type, if the probe test device can not be added to the mirror lion money on the woven _, it may not be able to: 3 201035671 like sensing = The θθ sheet tests the optical test area, or the image sensing wafer cannot react electrically to the light source. Therefore, the inventors thought about the design-type fine-tuning mechanism, and let the brother page be corrected; g| is installed on the test interface, and the relative position correction is adjusted. SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a lens fine adjustment mechanism for a face-and-needle type device, which mainly performs a horizontal direction (such as an X-axis direction, a y-axis direction) of the lens group, and a second and a slight rotation angle. Adjustment, and the lens group can also perform the focal length material to meet the purpose of the test device to fine-tune the lens group. For the above purposes, the probe type test set of the present invention mainly includes a circuit board, a two-seat base, a support unit, and a plurality of probes. The material element is used to shape the relative position of the plurality of pins and the circuit board, and the plurality of probes are electrically connected to the circuit board

It is composed of a bearing base and a lens holder of the supporting unit. This lens is used for the lens assembly. The lens mount has a plurality of solid horizontal walls in the vertical direction - with multiple bribes. The carrier can be mounted on the lens surface, the micro-solution of the mirror is::!Γ'------ and the fixing member can be used as the fixed seat for the fine adjustment. Further details and advantages of the present invention will be described in conjunction with the following drawings, the detailed description of the embodiments, and the patent application 4 201035671. [Embodiment] The figure is not a cross-sectional view of the lens group fine adjustment mechanism of the probe type test farm of the present invention. The probe flap of this (4) mainly includes - circuit board -, - mirror = 2, - continuation unit 3, (10) Wei _. The support unit 3 can fix the wooden needle 4 and the circuit board 丨, and electrically connect the probe 4 to the circuit on the circuit board ❹ϋ. The probe 4 is a cantilever probe type, but Not limited to this, the amount of money, _ style tear, but the size of the slaving unit 3 will also change relatively. The contact structure of the main body of the tilting material element 3 is 31 and the mirror 21 is not thinned by the tir. 21' lens group has two lens groups = the same structure. In this implementation, the single-image sensing wafer is tested. Can perform multiple shadows 22 22 5 The lens mount 2 _ open ~ w is near the edge of the circumference. The horizontal direction 2 =: ^24, under the 25 24 1 ^ 25_ unloading - (d) of the partial section of the annular wall 24. The mirror: == 5 201035671 The position of the group M is provided with a threaded hole 26 to match, so that the lens group 2i can be adjusted in the focal position (the vertical direction of the figure). The selection unit 3 mainly comprises a support base 3 and a support member. The support plate 32 is located on the circuit board! Above, the carrier & and the circuit board are in a screw-like manner under the branch 32. The boot 33 is an adhesive.

G 献 The vibrating pin 4 is fixed to the bottom of the carrier 31. The foregoing structure is mainly a relative design according to the probe 4 type. For example, the present embodiment is a surface probe. When the probes are of different types, the partial structure of the support unit 3 will also change relatively. In the special feature of the present invention, the carrier 31 allows the lens holder 2 to be placed there and is placed in position. The input 31 is formed with -_31(). The shape of the bearing _(10) fits the shape of the mirror 2, but the size is large. (10) The bottom is not closed. When the light source is illuminated above the circuit board 1, light can be concentrated through the lens group 21 to the area under the circuit board. The carrier 1 additionally has a plurality of threaded holes 311 in a position and number corresponding to the fasteners 22. As shown in the third and fourth figures, the top view of the present invention and the cross-section of the adjustment 2 = are fine adjustment mechanisms, so the gap presented in the figure is not very large, and the range of #4__ is only _. The fine adjustment mechanism of the present invention mainly changes the position of the lens group 21 for the lens holder (such as the X-axis amount, the y-axis direction and the oblique direction), and the micro-rotation degree α: The second lens is: (4) The receiving groove of the bearing seat 31 is inside, and when the horizontal direction is to be adjusted, the 6-way rotation of the lens holder 2 on the single-direction fine adjustment member 25, so that each micro-cake 25 in a single direction All of them are placed on the side wall of the carrier 31, that is, the lens holder 2 can be unidirectionally offset. If the lens mount 2 is to produce a slight rotation degree of 0, 部份 rotate some of the fine adjustment parts out, and part of _, it will be _ _ effect. After the microscopic formation, the fixing member 22 is locked to the screw hole 311 of the bearing seat 31 (as shown in the first figure), and the relative position of the lens holder 2 and the bearing 31 can be fixed. The fine adjustment member 25 can then be removed and removed directly. The present invention provides a lens micro- "circumference mechanism' for a probe type test device that satisfies the purpose of fine-tuning the lens group. However, 'the above' is only an enumerated example of the present invention, and the scope of the present implementation cannot be limited thereby. That is to say, the equal changes and modifications made by the special application for the creation of the special fiber should still be within the scope covered by the mine patent. 〇 [Simplified description of the drawings] The first figure is a cross-sectional view of the present invention, but the lens group in the figure is not shown in cross section; the second figure is a perspective view of the frontal mirror of the present invention; The top view of the invention and the lens holder; the fourth figure is a schematic cross-sectional view of the invention when fine-tuning. 7 201035671 [Description of main components] 1 circuit board 2 lens holder 21 lens unit 22 fixing parts 24 ring wall 25 fine adjustment parts 3 support unit ❹ 31 carrier '310 bearing groove' 311 screw hole 32 support plate 33 fixing object 4 probe

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Claims (1)

201035671 VII. Patent application scope: 1. - The lens of the probe device __, including the electric position, the lens holder, the selection unit, and the plurality of probes, the position of the cutting board and the position of the aforementioned circuit board And electrically connecting the plurality of probes to the circuit board, the special feature is: = the lens holder has at least a mirror disposed thereon, the lens holder has a plurality of fixing members thereon, and the surrounding ring wall is With a plurality of fine-tuning pieces; and ο 财 元 纠 - 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承 承The seat is offset, and the fixed piece can be used to lock the lens holder to the carrier after the micro-touch is completed. 2. The structure is as follows: 申 专 _1 顾 顾 探针 探针 探针 切 切 切 顾 顾 顾 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置After the disassembly : 3. := _ The probe type test described in the first item of the lens fine-tuning machine, the 疋 疋 is the fixing screw 'and the relative position of the carrier also has a purpose of the screw 4 hole 'Long cake Can be fine-grained with the carrier. 4_:=The lens fine-tuning machine of the probe type test device described in item 1 of the profit range, /Weiwei Office is distributed in the horizontal direction in the wall of the different directions. The paste is the target of the job. The bribe _ set is placed in the vertical position in the mirror position, and the position is flat and the knife is close to the edge of the circumference. 9 201035671 6. The shed _ _ _ _ _ test device structure, which has a number of threaded holes in the lens holder, the threaded hole can provide the mirror 2 placed here, and enable the lens to perform _ _. " 7. The lens fine-tuning machine of the slave-type test device of the first application hall of the first application hall has a bearing groove, and the bearing lion is matched with the mirror but has a large size, and the bottom of the bearing groove is not _, when the light source is powered When the _ is above _, the light can be focused by the lens group and projected on the area below the board. 10