TWI259266B - Appearance inspecting apparatus and appearance inspecting method - Google Patents

Abstract

Provided are an appearance inspecting apparatus and an appearance inspecting method. In a stage section (21), a stage surface for mounting thereon a thin plate-shaped object having flexibility to be inspected, while one main surface of the mounted object to be inspected is closely held on the stage surface. The objected to be inspected which has been closely held on the stage surface is imaged by an imaging camera (31). At least one of the stage surface and the imaging camera (31) is relatively moved in each direction by an X axis direction driving mechanism (35), a Y axis direction driving mechanism (23), and a Z axis direction driving mechanism (36) respectively. The X axis direction driving mechanism (35), the Y axis direction driving mechanism (23), and the Z axis direction driving mechanism (36) are controlled by a control section (4) based on displacement data at a plurality of positions in the stage surface, while an interval between the imaging camera (31) and the stage surface is kept in constant.

Description

1259266 IX. The present invention relates to an appearance inspection device and an appearance inspection method, and more particularly to a flexible thin plate member such as a printed circuit board or a film mask by a camera. Visual inspection device and visual inspection method for visual inspection. [Prior Art]

A conductor wiring pattern required to constitute a predetermined circuit is formed on a surface of a printed wiring board or the like for mounting an electronic component or the like. Further, the visual inspection device performs an appearance inspection to determine whether or not the wiring pattern formed on the printed wiring substrate is defective. For example, the printed circuit board is placed on the stage of the visual inspection device with the surface on which the pattern is formed as the upper surface. The space inspection device includes a camera such as a cCD (Charged Coupled Device) camera in a space placed on a printed circuit board on the stage surface. The visual inspection device moves the stage surface horizontally in the main scanning direction and photographs the printed circuit board under the camera one by one. When the appearance inspection is placed in the scanning of each completion-main scanning direction, the camera is sequentially displaced in the sub-scanning direction. Finally, the image area of the printed circuit board is finally taken to obtain image data. Then, the visual inspection device detects the defect 0 of the pattern by performing pattern control processing or the like on the image-poor material to be paid, and also uses a mask on the printed circuit board and is transferred to the image of the substrate. The surface of the surface forms a pattern such as a conductor wiring. The mask is an original made of glass or film. The pattern formed on the cover of the cover 317515 5 1259266 is also visually inspected by using the appearance inspection skirt as described above. The appearance of the inspection of the defect of the pattern by the wooden sturdy wjp brush circuit board or the mask, the focus of the camera as the two-image means and the upper surface of the object to be inspected I "use it!: It is more remarkable as the resolution of the inspection is improved, and it is more general; 2 use the camera with autofocus function to make the dance point = ground to the upper surface of the object to be inspected, - The method of checking the surface. The method of autofocus is based on the premise that it is not in contact with the object to be inspected, and the height information of the object to be inspected obtained by using the field displacement sensor or the image of the person to be taken is used. In addition, for example, Japanese special opening 0_26669 Japan (4) __ crane bulletin _ and 曰本特开 2003_177101 (hereinafter referred to as patent text = disclosed, revealing - use) The appearance inspection revealed by the height and shape of the object to be inspected, and the clothing is placed. The patent document 1 is used to measure the amount of displacement of the printed circuit based on the displacement of the printed circuit board. Root ^ ^ The majority moves in the direction of relative movement. The device disclosed in the special case 2 is shot according to the change of the focus position according to the [text diagram]. The patent point marking device detects the surface of the object to be inspected: The height of the object to be inspected, or the surface of the object to be inspected, or the surface of the object to be inspected, is measured by the height of the inspection. The displacement, the surface measurement results in the camera moving up and down in the focus direction, the focus distance (4) into the most recorded state and sweeping (four) inspection methods. However, in the visual inspection device, the use of the camera to capture the image itself, The method of focusing is not suitable for high-speed visual inspection because it requires a long calculation time. In addition, the method of measuring the upper surface of the object to be inspected by using the displacement sensor as described above is especially performed as a film mask. The separation of the surface (upper surface) and the back surface (lower surface) of the mask surface by the transparent thin plate member It will become difficult. In general, the displacement sensor is oriented. The film mask illuminates the light or the laser' and detects the surface of the film mask according to its reflection. The resolution of the surface is limited. Therefore, when scanning the film mask, the surface and the moon surface are mistaken. The erroneous detection 'must use a displacement sensor having a very high resolution, but it is a cause of high cost and an increase in the price of the visual inspection device itself. Moreover, the devices disclosed in the above Patent Documents 1 to 3 are all It is a technique of automatically determining the height of the object to be inspected in advance, and automatically focusing using the height information. Therefore, it is necessary to obtain height information in advance for each object to be inspected. [Invention] Therefore, the object of the present invention is Provided is an appearance inspection apparatus and an appearance inspection method which can perform an accurate inspection using an inexpensive apparatus. In order to achieve the above object, the present invention has the following features.

The first aspect is an visual inspection device that performs inspection by using a flexible thin plate-shaped member as an object to be inspected. The visual inspection device is equipped with a load A 317515 7 1259266 two-way imaging means, a relative moving means, a memory means, and a memory. The platform of the stage. The poor camera 3 is a camera that is placed on the stage load placed on the object to be inspected. In the memory control unit, the plurality of movement control units control the relative ► according to the displacement data, and maintain the equidistant distance between the cut image capturing means and the stage surface, and relatively move at least one of the object surface and the image capturing means. In the first aspect, the control unit maintains the distance between the enthalpy means and the stage surface as the other of the objects to be inspected at the distance between the imaging means and the surface of the object. The surface includes the first mode of the above, and the relative moving means is a camera 3 imaging direction (four) means and a horizontal direction moving means. The imaging q segment is such that at least one of the carrier table and the imaging means moves relative to the imaging means (four) in two directions. In the horizontal direction moving means, at least one of the target table surface and the imaging direction is moved relative to the direction perpendicular to the imaging direction, and the imaging means is based on the intensity of the imaging direction of the reference point set on the stage surface. Information on the displacement of the height of the other imaging direction of the stage. The fourth aspect is that in the above-described first aspect, the memory portion memorizes the displacement data for each of the intersections of the two adjacent to each other in the two directions orthogonal to each other on the stage.疋 317515 8 1259266 The fifth aspect is that the straight line and the object portion of the fourth sample main point and the gaze point are controlled according to the displacement data of the joint point. The sub-object is like the optical center of the means. The control department is taking photos at the straight (four) branches.

Straight green 14-loaded countertop I

What? When points are inconsistent. The displacement data of the intersection of the line and the loading surface is interpolated with respect to the displacement data of the intersection of the plurality of grids set to the line and the load: = parent point, and (4) the displacement after the interpolation Information to control relative movement means. According to the first state, it is a visual inspection method for the inspection of a thin plate with a flexible shape. The visual inspection method includes a loading step, a charging step, an imaging step, and a control step. The inspection object is placed on the loading surface. The close/琢疋 will be stepped to hold the placed - square main surface and the loading surface. The imaging step is performed by scanning by the imaging means while being held on the object to be inspected on the stage surface. The tweaking step is to maintain an equidistance between the respective imaging means and the stage based on a plurality of positions in the stage, and to scan on the object to be inspected. According to the above first sorrow, the displacement data of the loading table can be used to keep the distance between the imaging and the surface of the stage at the same distance and on the surface of the stage. Further, when a flexible sheet member such as a film mask is used as the object to be inspected, the object to be inspected is swept along the surface of the substrate. Therefore, the image pickup means can take a picture at a position that is always at an equal distance from the object to be inspected, and can perform correct shooting while scanning the object to be inspected to improve the inspection resolution. Further, in the visual inspection device, if the positional relationship between the stage portion and the imaging means is fixed, the displacement data is not required to be generated again by storing the displacement data once. Therefore, as long as the step of obtaining height information for each object to be inspected is performed, the time required for the visual inspection can be shortened. In addition, the visual inspection device does not require a sensor that is useful for obtaining displacement, thereby reducing the cost of the device. According to the second aspect described above, since the displacement of the substrate can be used to accurately align the focus of the imaging means with the upper surface of the object to be inspected, even a transparent sheet such as a film mask can be inspected. When the member, the upper surface, and the lower surface are not easily separated, the image can be accurately aligned with the upper surface. According to the third aspect described above, since the displacement data is created by the height of the moving direction (imaging direction) of the moving direction of the imaging direction, the displacement bead can be directly used for the movement control of the moving direction moving means, making the control easier. . According to the fourth aspect described above, since the displacement data is memorized only for the parent point of the grid set on the stage, the data to be memorized 1 can be restricted. Moreover, it is easier to detect the position where the displacement data is set in the stage. According to the fifth aspect described above, even if the position where the displacement data is not set in the stage surface, the distance between the imaging means and the stage surface can be kept constant. Further, according to the visual inspection method of the present invention, the same effects as the above-described external inspection device can be obtained. These and other objects, features, aspects and effects of the present invention will become apparent from the accompanying drawings and appended claims. [Embodiment] Hereinafter, a visual inspection device according to an embodiment of the present invention will be described (4). Further, the diagram is a top view and a front view which schematically show the overall configuration of the appearance inspection skirt. Here, in order to make the description more specific, a case where a film mask having a wiring pattern is inspected as an object to be inspected is described as an example. Further, the present invention is not limited to the film mask, and it is also effective for the inspection of the glass mask, the printed circuit board, the x-receivable thin-plate substrate, and the like.

ISI w T Ba Shuang Dan is equipped with a load, a framing unit 2, an imaging unit 3, and a control unit 4 (see the first transport mechanism unit 2, which has a load A qing motive, a wide rotating portion 22, and a shaft-axis driving structure). 23, and the base portion 24. The camera is supported by ramie. Art _. 卩 3 has a camera 31,

Too, the axial direction drive member 33, the camera support member 34, the X-axis direction drive mechanism 35, and the Z-axis direction drive mechanism 36. The stage portion 21 is configured such that the glass plate is horizontally mounted on the surface of the most glass plate to constitute a carrier table. The lower guard is covered by a 5 臈 臈 @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ @ The method can be used to attach the film mask to the surface of the loading table by any roller; to make the load =, to make a negative impact by the negative pressure; to fix it between the load surface by static electricity; from the film mask? The method of fixing the end of the film mask by the wide mask, so that the film is further covered by the jig, and the skin mask is closely attached to the mouth of the 317515 11 1259266, and if it is adhered by its own weight, The object to be inspected from the iron surface of the object to be inspected is adhered to the surface of the present invention; Among them, the institutions and so on. In the lower part of the stage portion 21, the lower part of the stage portion 21 is rotated by the rotation of the rotating portion to rotate the stage. The 丄= map below the imaging mechanism unit 3 is oriented in a direction parallel to the above-described substrate surface. The γ-axis direction drive mechanism 23 is a guide that is extended and fixed in the direction of the y-axis. The y-axis of the upper surface of the base portion 24 is yH, and the rotary portion 22 is fixed to the upper surface thereof. The mechanism 23 includes a x-axis drive motor 23 and a Y-axis NC driver 232 which will be described later (the reference mechanism 23 can be guided to the base portion 24 of the Shanghai by the driving force from the drive motor 1 to the drive unit 231). In the γ-axis direction (main scanning direction: the second scanning direction is moved toward the stage portion 21 supported by the rotating portion 22, and the horizontal movement is also performed. Further, the stage conveying mechanism portion 2 is on the stage glass. The lower side of the board has a light source for penetrating illumination (not shown). The second light source for the month is to illuminate the light film through the glass plate. The support member 32 is mounted horizontally on the base portion 24:" An upper space of the first member. The X-axis direction is provided in the support member %. The mechanism is such that the X-axis direction drive member 33 is oriented in the X-axis direction with respect to the above-mentioned carrier: two-phase and perpendicular to the γ-axis direction. In addition, the X-axis direction (four) mechanism 35 includes a moving motor 351 and a parallel shaft NC driver 352 (see FIG. 2) which will be described later. In the ".. area 3] 75] 5 12 1259266 direction driving member 33 A z-axis direction driving mechanism 36 is provided to make the camera support = member 34 oriented perpendicular to the X-axis and the γ-axis direction The z-axis direction drive mechanism 36 includes a z-axis drive motor 361 and a Z-axis NC driver 362 (see FIG. 2) which will be described later. The camera 31 is constituted by, for example, a CCD camera, and The camera support member 34 supports the imaging direction in such a manner that the imaging direction is formed in the downward direction of the Z-axis. The camera 31 converts the incident light into an electrical signal indicating the color and intensity thereof. In the example of the visual inspection device 1 shown, two cameras 31aA31b are provided, and the camera support member 34 is supported so that the field imaging direction of these cameras is formed in the downward direction of the Z-axis. For example, The camera 31a that obtains the image data for the pattern inspection in the visual inspection device, and the camera Mb/jin, which is used to obtain the visual inspection for the visual inspection by the user, are received separately. The penetrating light of the film mask is irradiated from the light source for penetrating illumination. In addition, the present invention may also fix a plurality of phases to the camera supporting member 34, or only one photo. The machine η solid " is also in the camera support member 34. The hunting is composed of the genus 'the camera 31 can move in the direction of the x-axis (sub-scanning direction) and the direction of the y-axis (imaging direction), and can be fixed in the camera 3 In the state of the position in the X-axis direction, the stage portion 21 is moved in the main scanning direction (Y-axis direction) to perform main scanning. Next, each time from the end of the thin: mask inspection region to the other end is completed. At the time of main scanning, the camera 31: moves a predetermined distance in the sub-scanning direction (x-axis direction). As a result, the camera 3 can obtain the image of the entire inspection area of the film mask 317515 13 1259266

The hunting is moved in the Z-axis direction (imaging direction) by the two-axis direction drive mechanism 36. As will be described later, the drive mechanism 36 in the Z direction is based on the load AS as the moon white, the height of the Z axis, so that the camera supports the structure: 3:: mode is used for money, and the sample table can be obtained as long as the stage is available. Department & :: 疋 like. Therefore, the data of the degree and the information about the thickness of the film 迎 % ζ ζ ζ ζ ζ ζ ζ ζ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Further, the relative moving hand drive mechanism 35 of the present invention, the x-axis direction drive mechanism 23, the core direction: the direction_fundle 35, and the x-axis direction: the moving machine direction: the material section corresponds to the one-axis direction The moving means is equivalent to the x-axis motion = the imaging of the present invention is rarely driven by the universal drive mechanism 36. Next, refer to Fig. 2 for the visual inspection device! #二之:: A slight composition to explain. Among them, the second picture is outside; check; set the block diagram of the control function. One clothing 41,: two; medium " 2 outside: inspection center 1 has a main control unit 41 and 隹a batch neighbor 49 η mountain, & system 4 4 . The main control unit is constituted by, for example, a CPU board, and is connected to each other. Further, the main control unit 41 and the focus control unit 42 are connected to the memory unit 43 to perform the main control unit 41 and the focus control unit. Used as a memory area, and stored in the processing required (four) material group 317515 14 1259266 Part 43 stores the stage height table 431. The main control unit 41 mainly controls the operation of the x-axis control unit 42 from the slight NC driver 352 and the defect I 42.乂 axis (10) drive % and ..., control of the point to drive the X-axis drive motor 351 = according to the main control unit 4! The X-axis direction of the body movement u 4 vx axis drive motor 351 is! Figure (4):: Axis direction (sub-scanning Direction; the camera 31 is inscribed in the X-axis direction -, two ..., Ang, the main control ip 4 彳 γ 4 force. By these configurations. ρ 41 can control the camera 31 relative to the vice Scanning direction

The point control unit 42 mainly controls the operation of the (four) ¥ axis NC drive crying 4 ^ 232 and z-motion 362. The control of the cymbal Nc control unit 42 is _ ^ 232 焦点 according to the focus motor 23" (4) "shaft drive motor 231. Further, the Y-axis drive: the second portion 21 is moved horizontally in the W-axis direction (main scanning direction; reference to ', ', and 1'). The burial brakes and the sneak sneak hunting "some components, the focus control unit 42 can control the OT port 21 corresponding to the main scanning direction. And the 2: axis NC drive is 362 is the 隹 隹 上 Yang Qiu 丨 μ j, movement "First, the control of the technical Deng 42 to drive the Z-axis drive motor

Further, the Z-axis drive motor 361 moves the camera support member 34 toward Z-a a: (the imaging direction 苓 in the first figure), and causes the camera 31 to move toward the Z-axis. With these configurations, the focus control unit 42 can control the operation of the camera 1 with respect to the imaging direction (focus direction). Here, the focus control unit 42 prepares the stage height table 43j in advance for the visual inspection of the object to be inspected, and then stores it in the memory unit Μ. At this date, the displacement sensor 5 is attached to the visual inspection device 1. The displacement sensing state 5 is based on the height of the reference point set on the stage surface of the stage unit 21, and then detects the 317515 15 1259266 of the stage surface of each of the detection points of the stage surface, for example, , can use laser displacement sensor, light displacement sensor, super, 曰, Sense: Zejie, mechanical sensor # in contact with the surface of the load. The displacement sensor is configured such that the displacement detection direction is set to face the z-axis direction of the upper surface of the stage portion 21 (see FIG. 1) as in the imaging direction of the camera, and is fixed to the camera 31 or the camera. Support the construction of 4. In addition, the latter will understand more clearly that the displacement sensor 5 is based on the reference point set on the upper surface of the stage portion u, and then detects the area of the upper surface on which the inspection object is placed. The displacement in the axial direction can be fixed to other parts as long as it can move relative to the carrier::h in the X-axis direction and "from the direction, and the position can be fixed." Tian Zuocheng stage two degrees table 43 In the case of J, the displacement sensor 5 outputs the displacement information DL of the upper surface of the mouth portion to the focus control portion & the relative position of the sensor 5 and the axis direction of the stage portion 21: The feedback pulse PF 6 output from the γ-axis drive motor 231 is supplied to the focus control unit 42, and the focus control unit 4 can be displaced from the sensor 5 to the X-axis direction of the load a Qi 21 七 冉 # # 〇邛 21 The positional relationship main control unit 41 obtains the X-axis direction drive member 33 toward the X-axis point by two == control amount, and can be detected by the focus control unit 42. That is, the focus 'work 卩 卩 42 can be sensed according to the displacement The positional relationship between the device 5 and the stage portion 21 of the stage portion 21 is obtained by the displacement sensor 5, and: : the position on the surface of the load table. Moreover, the position of the focus control unit is the displacement DL of the position on the surface of the stage detected by the displacement sensor 5. Next, 'see Fig. 3 and Fig. 4' The displacement sensor 317515 16 1259266 5:10: the action of the displacement of the upper surface of the stage portion 21 is explained. The 苴I upshift sensor 5 measures the stage portion 2, ι 21 in the direction of the ¥ axis. Figure 4 is a schematic view of the third stage of the scanning stage. The surface of the upper surface is two: the fourth (inductive) sensor 5 is set on the stage of the stage 21, and The displacement of the surface of the y-axis is calculated every interval γρ. For example, assume that the distance from the displacement minus the second to the reference point in the 2-axis direction is ZQ. And the 'public :::: Μ from the Μ direction every interval YP Table 4 (4) Ζ 广 “ : : : : : : : : : : : : ° ° ° ° ° ° ° ° ° ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' (4) The respective points on the surface of the stage portion 21 are sequentially detected as displacements _ _ ζ ο, Ζ 2 Ζ 0, ..., and then output to the focus control portion 42. And the displacement sensing is crying 5 丫 丫 士 士 士 图 是 是 是 是 图 图 图 图 图 , 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图The object stage 21 faces the y-axis port ^ at the interval of the load::::: every other interval Υρ, the position of the x-axis and the x-axis of the displacement sensor 5 is measured at the same time. The stage unit 21 moves in the main scanning direction (γ-axis direction), and the displacement of the upper surface of the stage portion 21 in the direction of FIG. (4): The upper surface of the stage portion 21 drives the casing from one end of the displacement measurement S field to the other X axis direction. When the displacement in the eight-axis direction is measured, the dynamic mechanism 35 moves the direction of the drive member 33 in the direction of the sub-scanning direction (10) by the direction of the axis 317515 17 1259266, and the position of the measurement displacement is also shifted toward ==, the sense of displacement The detector is in the direction of the solid-sensor; == distance quot", and the state of the stage 21 toward the position of the opposite side/7 can be measured in the opposite direction to the previous door-to-door problem. The pad of the stool 21 corresponds to the stage in the main scanning direction to measure the crying utrr shift. By repeating this action, the displacement from the displacement can be obtained. _ 卜 纟 纟 所有 所有 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 巾 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移 位移In addition, the fourth table shift sensor 5 measures the displacement line, and the movement of each interval χρ in the (x-axis direction) by the dotted line. The displacement information from the displacement output by the pyrotechnic crying 吏 motion measurement The wind is used to make the stage altimeter 431. In addition, == a shorter interval for the sub-scanning direction (that is, γρ < χρ) / displacement of the j main % ^ direction. A schematic diagram of an example of 431. Here, the stage height table 431 of the figure is about the product a of the 方 axis square portion 21; * - the data of the orientation of the σ plane of the field, and the assumption of the pitch == distance 〜ρ~2 by direction position: 〇mm, Υ axis direction position: displacement of each measurement point of the 。. ^ In the middle view 5, the stage height table 431 is the upper surface of the respective portion 21, corresponding to The displacement between the X-axis directions from the position of the XgY axis 317515 18 1259266 is made. The stage altimeter 431. Further, the stage altimeter 431 is information indicating the height and undulation (flatness) of the stage of the stage relative to the imaging direction (axis direction) of the camera 31. The focus control unit will create The stage height table 43 1 is stored in the memory unit 43. The position at the intersection of the lattice shape formed by the distance Υρ and the displacement amount measured by the displacement sensor 5 are as described above, and the focus control unit 42 is based on the displacement. The relative positional relationship between the x-axis direction and the γ-axis direction of the sensor 5 and the stage portion 21 is obtained by the displacement of the position on the stage surface measured by the sensor 5. Further, the focus control portion 42 is a sense of displacement. The measuring device 5 derives the displacement amount using the displacement information DL* based on the reference point 。. Therefore, the focus control unit 42 can describe the stage corresponding to the displacement sensor 5 as described above.

Next, an operation when the camera 31 of the visual inspection device 1 photographs an object to be inspected will be described with reference to Fig. 6 . In addition, Fig. 6 is a schematic view showing the operation of the camera 31 to photograph the object to be inspected placed on the upper surface of the stage portion 21 in the x-axis direction. Further, the object to be inspected (film mask) placed on the upper surface of the stage portion 21 is omitted in the 筮 & In the figure, the camera 31 is movable in the x-axis direction (sub-scanning direction) and the z-axis direction (imaging direction). In the state in which the position of the camera 31 in the axial direction is fixed, 'the stage portion 21 is moved in the main scanning direction (the yaw axis direction) to perform the anchor 仃 main dance 彳 field, for example, the focus control unit 42 controls ζ The axial direction driving mechanism 36 is dipped from the upper surface of the thin J 蹲 遮 载 载 载 载 载 载 载 载 载 载 载 载 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机 相机The position in the axial direction is the rabbit one, 隹 > $7 position as the reference temperature. For the ¥ 出 of this reference , degree, the focal point of the camera _ (10) can be calculated from the distance from the stage to the surface of the phase, and the thickness of the 317515 19 1259266. Further, the camera Μ and // directions can be moved to the height (reference height) of the Z-axis which can be used by the camera 31, and then the upper surface of the mask can be adjusted by > . The rhyme function is used to focus on the film ":" as the film mask of the object to be inspected along the stage portion. == The thickness of the close-contact film mask and the depth of focus are twenty', that is, the upper surface of the object mask is formed to be the same as the undulation of the stage portion 21. According to the present invention, the H (four) stage altimeter 431 is formed on the scanning stage, and the two-axis direction driving mechanism 36 is controlled by the focus control 2 to move the two axes of the camera 31, so that the focus position of the camera 31 is often The film control unit 42 indicates that the reference degree of the reference point is 'reference', and then the position of the camera Μ in the axial direction is equally spaced in the γ-axis direction according to the stage height table 431. Υρ changes. For example, the stage of the stage portion 21 is the same as that described in the third drawing. In other words, in the stage height table 43A, each of the upper surfaces of the stage portion 21 having a pitch ρ from the reference point p〇 toward the x-axis direction is respectively described as follows: Ζ0, Ζ2-Ζ0,...,Ζη-ΖΟ. Then, the point control unit 42 moves the stage unit 21 in the main scanning direction (the x-axis direction) while the position of the position of the camera 31 in the X-axis direction is fixed, and scans the camera to make the camera 31 The position in the x-axis direction raises and lowers the displacement amount described in the stage height table 431 every interval γρ. When the above displacement amount is described in the 20 317515 1259266 stage height gauge 431, the zinc 71 71 每隔 每隔 71 每隔 每隔 朝 朝 朝 朝 Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ Ζ The Zn_7 〇mfl machine 31 raises and lowers the masculine phase in the Z-axis direction from the above-mentioned reference high-sound fineness Z0. Therefore, the distance between the upper surface 1 y ... of the film mask and the surface of the substrate (the surface of the stage 21) is: the surface. The focus position of the eyepiece 31 can be The main control unit 41, which is often controlled in the film mask field, controls the age 35 every time the housewife from the inspection area of the film mask or the other end of the film is controlled to make the camera 31 1 1 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒 勒21;:==The target is moved in the opposite direction of the axis and scanned. At this time, the focus control unit 42 causes the phase difference Yp to be subtracted, and the position of the axis direction is increased in accordance with the position of the side camera 3 1 Station side; ^ v 4 gentleman /, A glaze direction and ¥ axis direction of the stage height table 431 5 loaded displacement. By this, it is possible to perform scanning of the upper surface of the film mask for the predetermined distance of one of the previous eight + dings. By repeating this =: during the scanning of the film mask, the focus position of the camera 31, the 'hanger' is located on the upper surface of the diaphragm mask, and the z-axis of the camera 31 is controlled to be set to and from The camera 31 outputs image data of the entire inspection area of the film mask. In addition, the position of the correct X-axis direction axis direction of the camera 31 in the above description is determined by the intersection of the straight line connecting the principal point and the fixation point (hereinafter referred to as the 2 line of sight direction) and the stage surface of the stage portion 21, and This principal point is the optical center of the lens of the camera 31. As described above, the camera 31 is supported by the camera supporting member 34 such that the imaging direction thereof is in the z-axis downward direction, so that the line of sight direction is also fixed in the two-axis downward direction. Therefore, the positions of the x-axis direction and the Y-axis direction where the principal point of the camera 31 is located are the X-axis direction and the γ-axis direction position of the camera 31. On the other hand, the displacement amount of the stage height table 43A is described as the pumping direction corresponding to the position of the lattice-shaped intersection formed by the distance between the X-axis direction and the γ-axis direction. And the position of the ¥ axis. Therefore, the position of the camera 31 in the axial direction and the x-axis direction is higher than that on the stage, and the table 431 α has a displacement! The x-axis direction and the γ-axis direction are sometimes not the same. For example, when the imaging is started, the position in the X-axis direction indicated by the direction altimeter is inconsistent; the load is controlled by the X-axis direction driving mechanism 35, and the distance when the camera 31 is moved in the axial direction is different from the pitch χρ. Inconsistencies can occur in situations and the like. At this time, the f control unit 42 calculates the displacement amount by interpolating the pin axis direction in order to obtain the displacement amount of each of the stage height table and the recorded pitch (10) in the x-axis direction. Μ Figure 7 is used to illustrate the interpolation process for the interpolation direction of the x-axis: it is relative to the distance (X〇f<Xp) recorded in the X-axis direction of the stage height table 431. Location line drawing. At this time, when the camera 31 is placed at the position of the stage: the axis direction (point Ps shown in Fig. 7), there is a stage (10) (four) = 1 in the milk of the music sheet 7 The displacement of the altimeter (4) and = Λ point P2. The focus control unit 42 uses the displacement amount of ... and 2, and performs linear interpolation processing for the displacement 317515 22 1259266 among the points Ps. In the case of the example, it is as shown in the following formula. π" as shown in Fig. 7 ZPs-Zp 1+(Zp2-Ζρ 1) * (Xof/do) is the displacement of point Ps' Zpl is the displacement of point P1 疋4 P2. Although the above example is explained, in the case where the interpolation process between (4) and the fourth (4) calculation/sub-interpolation is performed, it is also possible to describe the operation of the object to be inspected by the camera 31. = The point is aligned with the upper surface of the film mask placed at the reference point p〇 and the reference height of her camera, but the camera 3 is the same as the "4" of the camera. Even if the focus of the camera 31 is aligned with the upper surface of the film mask at the position other than the reference point PG, the difference between the displacement amount of the position and the base is not necessary; the reference height can be set. ^ ^ This appearance check I set 1 can be used to measure the load beforehand. The height of the cymbal plane of the Ρ 21 is the same as the distance between the camera Η and the surface of the stage, and is scanned on the surface of the stage. Further, as long as a flexible sheet-like member such as a film mask is used as the object to be inspected, the object to be inspected is sealed along the surface of the substrate, and the camera 31 can be often used with the object to be inspected. The upper surface is photographed in an equidistant state, and the focus is often aligned with the upper surface of the object to be inspected once. Even if the entire inspection area of the object to be inspected is scanned, the focus is often correctly aligned with the upper surface, and The inspection resolution of the visual inspection device i can be improved. Further, even if the line-of-sight direction of the camera 31 and the displacement sensing direction 317515 23 1259266 are 5, the displacement detecting direction is inclined from the vertical direction with respect to the stage surface, and the displacement amount described in the stage height table 431 includes the tilt. = the measurer, so that the focus of the camera 31 can be aligned with the upper surface of the object to be inspected due to the inclination. Further, in the visual inspection device 1, if the positional relationship between the cargo portion 21 and the camera 31 in the z-axis direction is fixed, as long as the stage height table 431 is created at one time, it is not necessary to make a daily inspection. Stage height meter 431. Therefore, the step of obtaining the height information for each of the objects to be inspected is not required, so that the time required for the visual inspection can be shortened. Further, the stage height table 431 may be previously stored in the memory unit 43 only after the I5 white I after the stage 21 is manufactured, or may be in front of the object to be inspected. The time is measured (for example, daily or for each inspection lot) and is memorized in the memory unit 43. Further, in the case where the measurement is made only after the manufacture, it is not necessary to re-create the stage height table 431. Therefore, the external inspection device 1 does not require the displacement sensor 5, so that the #面面' can be lowered each time. When the position of the object to be inspected is immediately changed to the stage height table 431, even if the positional relationship between the carrier and the camera 31 in the two-axis direction is changed after the manufacture, the change can be appropriately adjusted according to the change. Focus position. Further, the upper phase (4) is an example in which a plurality of cameras 31a and 31b are supported by the camera support member 34. In this case, it is also possible to use a representative camera in the main point group of the plurality of makeup cameras 3 1 , and then scan the y by the same operation as described above. Moreover, in the case where a plurality of cameras 31 (1) and J-inch are photographed and scanned, 317515 24 1259266 may also use a plurality of cameras 3 averaging), 铗祛兹士,,,, the neutral position in the group. (For example, ten sentences) Then, the same action as the above-mentioned several cameras 31 is performed simultaneously. #4再者' In the case of hard filming, and it is possible to make a plurality of cameras 31 In this way, the action of forming the same position on the surface of the surface is performed by sweeping: the branch supporting member 34, and then by the above-mentioned "the same", the camera 31 is received from the glass plate provided under the load port. An example of the penetrating light that is irradiated with the light source by the illumination is "cut" or "the upper part of the stage portion 21". In the case of the moon, the camera 31 receives the reflected light reflected from the object to be inspected from the light source provided on the upper portion of the stage portion 21. Further, in the present embodiment, the main scanning is performed by moving the stage portion 21 in the γ-axis direction. However, the present invention is not limited thereto, and the camera 31 may be moved in the main scanning direction. Main scan. Similarly, instead of moving the camera 31 in the sub-scanning direction, the stage portion 移动 is moved in the sub-scanning direction. The visual inspection device and method of the present invention can be effectively used as an appearance inspection device and a view in which a high-precision inspection can be performed using an inexpensive device and a thin plate-shaped member having a wrap property is placed on the stage surface as an inspection object. Inspection methods, etc. The present invention has been described in detail above, but all the aspects described above are merely illustrative of the invention and are not intended to limit the scope of the invention. It is a matter of course that various modifications and changes can be made without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 317515 is a top view and a front view schematically showing the overall configuration of an appearance inspection device according to an embodiment of the present invention. FIG. 3 is a block diagram of the control function of the visual inspection device 1 of FIG. 1 and FIG. 3 is a displacement sensor 5 of FIG. 2 for measuring the displacement of the upper surface of the carrier 0°卩2 1 in the γ-axis direction. Action diagram. The figure is a schematic view of the position at which the displacement of the displacement is measured by scanning the upper surface of the stage portion 21. Fig. 5 is a schematic view showing an example of the stage height table 431 of Fig. 2 . Fig. 6 is a schematic view showing the operation of the camera 31 of the i-th image in the γ-axis direction to inspect the object to be inspected on the upper surface of the table portion 21. Fig. 7 is a diagram showing an interpolation process in the X-axis direction of the 帛1 diagram. L main component symbol description] 1 3 5 22 24 3la 32 34 36 42 231 2 4 21 23 31 31b 33 35 41 43 232 Appearance inspection device Camera mechanism displacement sensor Rotary base Base camera support member Camera support member Z Axis direction drive mechanism focus control unit Y-axis drive motor stage transport mechanism unit control unit stage unit Y-axis direction drive mechanism camera camera Χ-axis direction drive member Χ-axis direction drive mechanism main control unit § 忆 部 γ axis NC Drive 317515 26 1259266 351 X-axis drive motor 352 X-axis NC drive 361 Z-axis drive motor 362 Z-axis NC drive 431 Stage altimeter DL Displacement information PF Feedback signal 27 317515

Claims (1)

1259266 X. Scope of application for patents·· 1 · An appearance inspection of a dream to quit the object to be inspected; a thin plate-shaped member having a flexible coffee as ^ ^ - the visual inspection device has a surface; the μ portion is formed There is a main square seat for placing the object to be inspected, and the +1 system is for reading and holding the main surface of the object to be inspected and the stage surface of the object stage; And at least one of: a: a moving object holding surface and the imaging means: the means for memorizing the displacement of each of the carrier surfaces; and placing = Controlling the relative movement means based on the displacement data, and moving the above-mentioned imaging means, /, and 1 relatively while maintaining a distance between the imaging means and the above-mentioned stage. At least the square of the warfare and other means of imaging. 2. The visual inspection control unit of the jth item of the patent application scope is kept equal to the distance of the door of the door. The focus position of the above-mentioned imaging means of the object fabric is separated. ^The distance from the other side of the object to be inspected on the other side of the object is as follows: 3. The appearance of the 1JM of the patent application scope includes: ,, A, 317515 28 1259266 & At least one of the carrier table surface and the camera slave is relatively moved toward the imaging direction of the imaging device, and the horizontal direction moving means is such that the carrier table surface and the imaging spoon are oriented in a direction perpendicular to the imaging direction. The relative movement of the direction; /, the middle) describes the displacement data, based on the height of the imaging direction set to the reference point of the front Lu a, the object surface, and the other: Information on the displacement of the position at the height of the imaging direction. (If the application for patent scope 帛i is to be visually checked, the intersection of the grids arranged at the predetermined interval on the surface of the above-mentioned carrier table should be set separately. The visual inspection device of the item /4, wherein the lattice line of the intersection of the control surfaces and the displacement data of the carrier system relative to the parent point are used to control the center, ^main", and the system is a video The light of the means, when the intersection of the straight line and the front lattice is different, is a plurality of the lattices of the parent point of the object surface and the parent point of the = surface, for the line The carrier table is handed over, and the relative 317515 29 1259266 moving means is controlled according to the value of the edge interpolation. 6. The visual inspection method is performed by having the object to be inspected, and the appearance inspection: The square::::: component is used as a placing step of placing the object to be inspected on the surface of the object, and the bonding step of the object to be placed is closely adhered to the surface of the object to be inspected; Carrier camera An imaging step of scanning and imaging the segment on the object to be inspected and held on the surface of the substrate; and the imaging means and the carrier according to the displacement data of the plurality of positions in the carrier surface A control step of scanning on the aforementioned object while maintaining an equal distance therebetween. 317515 30