201020552 六、發明說明： 【發明所屬之技術領域】 本發明是關於應用在液晶面板等的點亮檢查之探針單 元及檢查裝置。 【先前技術】 在液晶面板等的製造過程，必須檢查該面板是否具有 • 符合規格書的性能。在該檢查，一般是使用具備探針單元 (具有複數個探針）之檢查裝置。在此情況，是在檢查裝 置的各探針接觸檢查對象面板的全部端子（full contact) 的狀態下，施加檢查訊號使其點亮而進行檢查。 在這種檢查裝置，若在點亮檢査時發生線缺陷等的異 常’爲了判別該異常是起因於面板或是起因於探針單元， 須進行該點亮檢查步驟以外的其他檢査。具體而言，可採 取使用簡易點亮檢查用探針單元（使用導電性橡膠）的檢 ® 查方法、或使用1G1D檢查用探針單元的檢查方法，來判 別前述異常是起因於面板或是起因於探針單元。前述檢查 方法的例子包括專利文獻1。 〔專利文獻1〕日本特開平9- 1 3 8422號公報 【發明內容】 然而，在前述檢查裝置，由於是進行通常的點亮檢查 步驟以外的其他檢査，而必須經由2種檢查步驟，因此有 檢查效率不佳的問題。 -5- 201020552 本發明是爲了解決上述問題點而開發完成的，其目的 是爲了提供：在通常的點亮檢查步驟即可判別前述異常是 起因於面板或是起因於探針單元之探針單元及檢查裝置。 爲了解決前述課題之本發明的探針單元，其特徵在於 ，係具備：讓複數個探針分別接觸設置於檢查對象面板之 複數個端子而進行點亮檢查之探針塊、在讓前述各探針分 別接觸前述各端子而進行點亮檢查時使各端子短路之短路 裝置：前述短路裝置是具備：與前述各端子對置而同時接 @ 觸前述各端子以使全部端子短路之短路構件、在被前述探 針塊側支承的狀態下支承該短路構件而使其接觸前述各端 子之推壓機構。 本發明之檢査裝置，是用來檢查檢查對象面板之檢査 裝置，其特徵在於，係具備：將從外部插入的檢查對象面 板在檢査結束後往外部搬出之面板設置部、將從該面板設 置部送來的檢査對象面板予以支承而進行試驗之測定部； 作爲前述測定部的探針單元是使用前述探針單元。 ® 在前述構造，當前述檢查對象面板發生線缺陷等的異 常時，藉由前述推壓機構使前述短路構件接觸前述各端子 ，而對全部端子施加檢査訊號，藉此容易判別前述檢查對 象面板的異常是起因於面板或是起因於探針單元，而能提 昇檢査效率。 【實施方式】 以下，參照圖式來說明本發明的實施形態之探針單元 -6 - 201020552 及檢查裝置。 本實施形態之檢査裝置1，如第2圖所示’主要是由 面板設置部2及測定部3所構成。 面板設置部2，是用來將從外部插入的液晶面板5搬 運至測定部3並將檢查結束後的液晶面板5搬運至外部的 裝置。面板設置部2，在開口部6的裏側具有面板交接裝 置7，利用該面板交接裝置7來從外部接收液晶面板5, Ο 再藉由搬運臂8支承而搬運至測定部3。此外，面板交接 裝置7，是接收在測定部3檢查結束後的液晶面板5而搬 運至外部。 測定部3，是將從面板設置部2送來的液晶面板5予 以支承而進行試驗的裝置。測定部3，是具備工作台10 和探針單元1 1等。 工作台10，是用來支承液晶面板5並調整XYZ 0方 向的裝置。工作台1〇，是將藉由搬運臂8送來的液晶面 ® 板5予以支承，且讓該液晶面板5正確對準而接觸探針單 元1 1。液晶面板5，如第7圖所示係具備：顯示影像之面 板顯示部5A、位於面板顯示部5A的周圍之面板端子部 5B、設置在面板端子部5B而將訊號傳送給面板顯示部 5A之端子5C。探針單元U是正確地對準端子5C。 探針單元11，是用來接觸液晶面板5的端子5C而施 加檢查訊號來讓液晶面板5點亮（檢查用）的裝置。探針 單元11，如第1、3〜7圖所示係具備：探針座12、探針裝 置13、對準攝影機15、短路裝置15。 201020552 探針座12，是將探針裝置13和對準攝影機15 —體 地支承之板材。該探針座12，在固定於裝置本體側的狀 態下’支承探針裝置13和對準攝影機15等而讓其等面對 工作台1 〇上的液晶面板5。 探針裝置13，是用來進行通常的全部端子接觸（full contact )的點亮檢查的裝置。該探針裝置〗3，如第1、4 圖所示是由支承部16及探針組裝體17所構成。 前述支承部16’是以其基端側被前述探針座12支承 @ 的狀態下。藉由其前端側支承前述探針組裝體17的構件 。該支承部16係具備：直接安裝於前述探針座12而支承 全體之懸吊塊19、在該懸吊塊19的前端部透過導軌20 而被支承成可滑動之滑動塊21、在該滑動塊21的下側面 安裝成一體之探針板22。滑動塊21相對於懸吊塊19的 高度，是藉由調整螺絲2 3來調整。 探針組裝體17，是接觸液晶面板5的電路之端子5C 而施加檢查訊號的構件。探針組裝體17是安裝在探針板 ® 22的下側面。該探針組裝體17係具備探針塊24及探針 25。探針塊24是直接安裝在探針板22的下側面。在該探 針塊24安裝探針25。探針25，是接觸液晶面板5的電路 之端子5C而施加點亮檢査用的檢查訊號的針材。探針25 ，如第1圖所示是透過TCP27、連接FPC28、中繼基板 29及纜線30來連接至訊號產生器31。訊號產生器31是 用來產生檢查訊號的裝置。訊號產生器31是產生個別的 檢査訊號’而透過TCP27等發送至各探針25。 -8 - 201020552 對準攝影機14，如第3圖所示，是在使探針裝置13 的探針塊24的各探針25和液晶面板5的端子5C對準時 ，用來攝影設置在液晶面板5的表面之對準標記之攝影機 。對準攝影機1 4是分別設置在3個探針裝置1 3的兩側。 短路裝置15’是在液晶面板5發生線缺陷等的異常 時用來進行短路檢査的裝置。亦即，短路裝置15，是在 使探針塊24的各探針25分別接觸液晶面板5的各端子 Φ 5C而進行液晶面板5的點亮檢查之際，在該液晶面板5 發生異常時，用來讓液晶面板5的各端子5C成爲短路狀 態的裝置。短路裝置15，如第1、4〜7圖所示，是由短路 構件33和推壓機構34所構成。 短路構件33，是同時接觸前述液晶面板5的各端子 5C而使全部端子5C短路的構件。短路構件33,在藉由 推壓機構34支承的狀態下，是與前述液晶面板5的各端 子5C對置。短路構件33，是由豎板部33A及上部橫板部 ® 33B所構成，呈截面L字形。短路構件33的長度是設定 成與探針塊24的寬度大致相同。短路構件33是由導電性 橡膠所構成。如此，具有柔軟性之薄型的導電性橡膠製的 豎板部33A，可將各端子5C全體覆蓋而同時且確實的接 觸（第7圖的狀態），而使全部端子5C確實地成爲短路 狀態。 推壓機構34’是用來支承短路構件33,在液晶面板 5發生異常時，使短路構件33的豎板部33A接觸前述各 端子5C的機構。推壓機構34係具備：基板部35、支承 201020552 腕部36、滑動板部37、保持部38、移動支承部39。 基板部35，是用來支承支承腕部36等的構件。基板 部35，是固定在支承部16的懸吊塊19的上面側。在基 板部35設置複數個螺孔35A。對應於該基板部35的螺孔 35A，在懸吊塊19的上側面也設有螺孔19A。藉由將螺絲 40旋入螺孔35A、19A，而使基板部35固定在懸吊塊19 的上側面。 在基板部35的上側面設有鉸鏈41和支承台部42。 @ 鉸鏈41 (轉動機構），是用來將構成推壓機構34的支承 腕部36等藉由前述探針塊24側的懸吊塊19支承成可轉 動。具體而言，鉸鏈41，是用來將後述支承腕部36的水 平板部45的基端部藉由懸吊塊19支承成可轉動。支承台 部42，是用來將支承腕部36的水平板部45支承成水平 狀態。支承台部42的上側面是形成平坦面狀，該支承台 部42的上側面是抵接於支承腕部36的水平板部45的側 面（第1圖中的下側面）。而且，在支承腕部36的水平 e 板部45的基端部被鉸鏈41支承的狀態下，藉由使水平板 部45的中間部抵接於支承台部42，利用鉸鏈41和支承 台部42來將支承腕部36的水平板部45支承成水平狀態 。在支承台部42設有螺孔42A，藉由將螺絲43旋入該螺 孔42A和後述支承腕部36的水平板部45的螺孔45A，而 將支承腕部36固定在基板部35。 支承腕部36，是被前述探針裝置13的支承部16側 支承，用來將滑動板部37以面對液晶面板5的複數個端 -10- 201020552 子5C (與前述探針25接觸）側的方式支承成可滑動。支 承腕部36’是將滑動板部37支承成可滑動且能固定在設 定位置。支承腕部36，主要是由水平板部45和垂直板部 46所構成。水平板部45,在將滑動板部37支承成面對液 晶面板5之複數個端子5C側的狀態，是呈水平配設的構 件。水平板部45，其基端部被前述基板部35的鉸鏈41 支承成可轉動’其一側面（第1圖中的下側面）抵接於基 # 板部35的支承台部42，而被支承成水平狀態。水平板部 45當中，在與前述支承台部42的螺孔42A相對向的位置 ，設置與該支承台部42的螺孔42A同樣的螺孔45 A。 垂直板部46，是用來將滑動板部37支承成可滑動的 構件。垂直板部46，是和水平板部45設置成一體。垂直 板部46，是從被支承成水平狀態的水平板部45垂直往下 下垂而形成。在垂直板部46，沿垂直方向（水平板部45 被配設成水平狀態之垂直方向）設有導軌57。 ® 滑動板部37，是以將短路構件33支承成面對液晶面 板5的端子5C的狀態來滑動，而使短路構件33相對於端 子5C適當地進行裝卸的構件。滑動板部37，是由平板狀 構件所構成，在其一側面設置導件5 8。該導件5 8是以可 滑動的方式嵌合於前述垂直板部46的導軌57，如此藉由 垂直板部46將滑動板部37支承成可沿上下方向滑動》 在滑動板部37的基端部（第1圖的上端部）設有： 供後述的推桿49的螺桿部54旋入之螺孔37A。將推桿 49的螺桿部54旋入螺孔37A並將該推桿49適當地旋轉 -11 - 201020552 ，即可調整滑動板部37的位置。滑動板部37的前端部（ 第1圖的下端部）是呈凸緣狀擴大以安裝保持部38。 保持部38,是用來支承短路構件33的構件。保持部 38的基端部是被滑動板部37的前端部支承，保持部38 的前端部是將短路構件33支承成面對液晶面板5的端子 5C的狀態。 移動支承部39，是用來在設定位置（待機位置和短 路位置）支承滑動板部37的機構。該移動支承部39，如 @ 第5、6圖所不，是設置在水平板部45的前端部。該移動 支承部39是由推桿49和制動件50所構成。 推桿49，是透過滑動板部37等將短路構件33按壓 於端子5C的構件。在水平板部45的前端部，設有貫穿垂 直方向（在該水平板部45被水平支承的狀態下）之推桿 支承孔51。推桿49，是被該推桿支承孔51支承成可滑動 。推桿49，在上端設有頭部4 9A，在下端設有凸緣部49B ，以避免從推桿支承孔51脫落。再者，在推桿49的頭部 ® 49A側設置彈簧52。該彈簧52，是將推桿49往上方（在 支承腕部36的水平板部45呈水平狀態下之上方）彈壓。 再者，彈簧52也具備：避免被推桿支承孔51支承的推桿 49自由旋轉之旋轉抑制功能。如此，在旋轉推桿49而利 用後述的螺桿部54來對滑動板部37的高度進行微調後， 可避免推桿49旋轉而造成滑動板部37的高度改變。 在推桿49的中間部設置供制動件5 0嵌合之嵌合溝槽 53。該嵌合溝槽53是在推桿49的中間部形成環狀。嵌合 -12- 201020552 溝槽53是設置在：當制動件50嵌合於該嵌合溝槽53而 將推桿49定位支承的狀態下’透過滑動板部37的保持部 38而被支承的短路構件33能確實地接觸液晶面板5之複 數個端子5C的位置（短路位置）。在推桿49的下端部設 置螺桿部54，以旋入滑動板部37。如此，推桿49，藉由 將制動件50嵌合於嵌合溝槽53而被支承在短路位置，當 液晶面板5的端子5C接觸探針25時，是透過滑動板部 φ 37等將短路構件33按壓於端子5C。 制動件50，是將推桿49在待機位置和短路位置之間 進行切換的構件。該制動件5 0，是設置在水平板部45的 前端部。在水平板部45的前端部，沿水平方向（水平板 部45成爲水平狀態下之水平方向）設置制動件支承孔55 。該制動件支承孔55，是從水平板部45的前端部貫穿到 推桿支承孔5 1。在制動件支承孔5 5的內壁形成螺紋，以 供制動件50旋入。制動件50是由：嵌合爪部50A、螺紋 ® 部50B、旋鈕部50C所構成。嵌合爪部50A，是嵌合於推 桿49的嵌合溝槽53而在短路位置支承推桿49的部分。 螺紋部50B’是用來旋入制動件支承孔55的部分。旋鈕 部50C ’是用來旋轉制動件50使其在制動件支承孔55內 移動’而使嵌合爪部50A相對於推桿49的嵌合溝槽53 進行出入的部分。藉由旋轉該旋鈕部50C而將嵌合爪部 5〇A從嵌合溝槽53拔出，利用彈簧52能使推桿49移動 至待機位置；藉由壓下推桿49而使嵌合爪部50A嵌合於 嵌合溝槽53，可將推桿49支承在短路位置。 -13- 201020552 以上構造之探針單元11可發揮以下的作用。此外， 由於檢査裝置整體的作用是與習知的檢查裝置相同，在此 是以探針單兀11的作用爲中心來作說明。 將被工作台10支承的液晶面板5正確地對準，而使 液晶面板5的端子5C和探針塊24的探針25互相接觸。 接著，將訊號產生器31所產生的檢查訊號透過纜線 30等而從探針25施加至液晶面板5的端子5C，以進行液 晶面板5的點亮檢査。 這時，若發生異常，將與發生該異常的位置對應之探 針單元11的短路裝置15從待機模式切換至進行短路檢查 的短路模式。 通常是成爲待機模式。亦即，制動件50的嵌合爪部 5 0A脫離推桿49的嵌合溝槽53而使滑動板部37被彈簧 52推向上方以在待機位置待機之待機模式。如此，短路 構件33是被支承在離開端子5C的位置。而從該待機模式 切換至短路模式。 @ 在短路模式’是將推桿49壓下，而使推桿49的嵌合 溝槽5 3和制動件5 0的嵌合爪部5 0 A的位置對齊以將制 動件50旋入，而使嵌合爪部50A嵌合於嵌合溝槽53。如 此’短路構件33的前端部（下端部）是被支承在：與探 針25的前端高度相同’或比探針25的前端更低的位置。 在此狀態下’若工作台1 0動作而使液晶面板5的端 子5C接觸探針25’在此同時探針25所接觸的全部端子 5C會和短路構件33接觸，而使該等端子5C全部成爲短 -14- 201020552 路狀態。 在此狀態下’若從訊號產生器31產生檢查訊號 使異常是起因於探針單元的情況，各探針25所發送 查訊號會施加至全部的端子5C(藉由短路構件33而 短路狀態）。亦即，可確實地對各端子5C施加檢査 〇 即使是短路模式下’在液晶面板5發生異常的情 © 可知異常是起因於面板。另一方面，在短路模式下， 晶面板5未發生異常的情況，可知異常是起因於探針 。據此即可進行隨後的處理。 在探針單元11，將制動件50旋鬆而使嵌合爪部 脫離嵌合溝槽53，以使滑動板部37返回待機位置。 在進行維修時，如第4圖所示，取下螺絲4 3， 動機構之鉸鏈41爲中心而使短路裝置15轉動。在此 下進行探針塊24等的維修。也能進行短路裝置1 5本 ❿維修。 如上述般，在探針裝置13設置短路裝置15，而 換成待機模式和短路模式，因此在點亮檢查步驟發生 時，可容易且確實地判別該異常是起因於面板或是起 探針單元。 如此，不須另外設置點亮檢查步驟以外的其他檢 驟，而能謀求檢查作業的效率化。 此外，由於短路裝置15能以轉動機構之鉸鏈41 心而轉動，故容易進行維修。 ，即 的檢 成爲 訊號 況， 在液 單元 50Α 以轉 狀態 身的 能切 異常 因於 查步 爲中 -15- 201020552 由於短路構件33是由將液晶面板5之複數個端子5C 全體覆蓋而同時接觸之導電性橡膠所構成’可容易且確實 地讓全部端子5C短路。 由於推壓機構34具備：將短路構件33以支承成面對 液晶面板5的端子5C的狀態滑動而使短路構件33相對於 端子5C進行裝卸之滑動板部37、以及讓該滑動板部37 移動至待機位置和短路位置並予以支承的移動支承部39 ，因此在發生異常時，經由手動能容易地切換至短路模式 ® ，而謀求檢查作業的效率化。 由於移動支承部39具備：透過滑動板部37而將短路 構件33按壓於各端子5C之推桿49、以及在前述滑動板 部37的待機位置和短路位置支承推桿49之制動件50， 因此經由手動能容易地在短路模式和待機模式之間進行切 換。[Technical Field] The present invention relates to a probe unit and an inspection apparatus which are applied to lighting inspection of a liquid crystal panel or the like. [Prior Art] In the manufacturing process of a liquid crystal panel or the like, it is necessary to check whether the panel has the performance of the specification. In this inspection, an inspection apparatus having a probe unit (having a plurality of probes) is generally used. In this case, when the probes of the inspection device are in contact with all the terminals of the inspection target panel, an inspection signal is applied to illuminate and inspect. In such an inspection apparatus, if an abnormality such as a line defect occurs during the lighting inspection, it is necessary to perform other inspections other than the lighting inspection step in order to determine whether the abnormality is caused by the panel or the probe unit. Specifically, it is possible to determine whether the abnormality is caused by a panel or a cause by using a test method using a simple light-emitting test probe unit (using conductive rubber) or an inspection method using a 1G1D test probe unit. In the probe unit. Examples of the aforementioned inspection method include Patent Document 1. [Patent Document 1] Japanese Unexamined Patent Application Publication No. Hei No. H------- Check for poor efficiency. -5- 201020552 The present invention has been developed to solve the above problems, and an object thereof is to provide that it is possible to determine whether the abnormality is caused by a panel or a probe unit caused by a probe unit in a normal lighting inspection step. And inspection equipment. In order to solve the above-mentioned problems, the probe unit of the present invention is characterized in that: a probe block that allows a plurality of probes to contact a plurality of terminals provided on the inspection target panel to perform lighting inspection, and to perform the above-described probes A short-circuiting device that short-circuits each terminal when the needle is in contact with each of the terminals, and the short-circuiting device includes a short-circuiting member that is opposed to the respective terminals and simultaneously contacts the respective terminals to short-circuit all the terminals. The pressing mechanism that supports the short-circuiting member while being supported by the probe block side and contacts the respective terminals. The inspection apparatus according to the present invention is an inspection apparatus for inspecting a panel to be inspected, and includes a panel installation unit that is externally carried out after the inspection of the inspection target panel inserted from the outside, and a panel installation unit that will be carried out from the panel The measurement unit that supports the test object panel that is fed and is tested is used; and the probe unit that is the measurement unit uses the probe unit. In the above-described structure, when an abnormality such as a line defect occurs in the inspection target panel, the short-circuit member is brought into contact with each of the terminals by the pressing mechanism, and an inspection signal is applied to all the terminals, thereby easily discriminating the inspection target panel. The abnormality is caused by the panel or caused by the probe unit, which can improve the inspection efficiency. [Embodiment] Hereinafter, a probe unit -6 - 201020552 and an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. The inspection apparatus 1 of the present embodiment is mainly constituted by the panel installation unit 2 and the measurement unit 3 as shown in Fig. 2 . The panel setting unit 2 is a device for transporting the liquid crystal panel 5 inserted from the outside to the measuring unit 3 and transporting the liquid crystal panel 5 after the inspection to the outside. The panel installation unit 2 has a panel delivery device 7 on the back side of the opening 6, and the liquid crystal panel 5 is received from the outside by the panel delivery device 7, and is transported to the measurement unit 3 by the carrier arm 8. Further, the panel delivery device 7 is transported to the outside by receiving the liquid crystal panel 5 after the inspection by the measuring unit 3. The measuring unit 3 is a device that is tested by supporting the liquid crystal panel 5 sent from the panel installation unit 2. The measuring unit 3 includes a table 10, a probe unit 1 1 and the like. The table 10 is a device for supporting the liquid crystal panel 5 and adjusting the XYZ 0 direction. The table 1 is supported by the liquid crystal panel ® 5 fed from the transfer arm 8, and the liquid crystal panel 5 is properly aligned to contact the probe unit 1 1. As shown in FIG. 7, the liquid crystal panel 5 includes a panel display portion 5A for displaying an image, a panel terminal portion 5B located around the panel display portion 5A, and a panel terminal portion 5B for transmitting a signal to the panel display portion 5A. Terminal 5C. The probe unit U is correctly aligned with the terminal 5C. The probe unit 11 is a device for contacting the terminal 5C of the liquid crystal panel 5 and applying a check signal to illuminate the liquid crystal panel 5 (for inspection). As shown in Figs. 1 and 3 to 7, the probe unit 11 includes a probe holder 12, a probe device 13, an alignment camera 15, and a short-circuiting device 15. 201020552 The probe holder 12 is a plate material that supports the probe device 13 and the alignment camera 15 in a body. The probe holder 12 supports the probe device 13, the alignment camera 15, and the like in a state of being fixed to the apparatus main body side so as to face the liquid crystal panel 5 on the table 1 . The probe device 13 is a device for performing normal lighting inspection of all the terminal contacts. The probe device 3 is composed of a support portion 16 and a probe assembly 17 as shown in Figs. The support portion 16' is in a state in which the proximal end side thereof is supported by the probe holder 12. The member of the probe assembly 17 is supported by the front end side thereof. The support portion 16 includes a suspension block 19 that is directly attached to the probe holder 12 and supports the entire suspension block 19, and a slide block 21 that is slidably supported by the guide rail 20 at a distal end portion of the suspension block 19, and is slidable thereon. The lower side of the block 21 is mounted as an integral probe card 22. The height of the slider 21 relative to the suspension block 19 is adjusted by adjusting the screw 23. The probe assembly 17 is a member that applies an inspection signal to the terminal 5C of the circuit of the liquid crystal panel 5. The probe assembly 17 is mounted on the lower side of the probe card ® 22. The probe assembly 17 includes a probe block 24 and a probe 25. The probe block 24 is mounted directly on the underside of the probe card 22. A probe 25 is mounted on the probe block 24. The probe 25 is a needle member that contacts the terminal 5C of the circuit of the liquid crystal panel 5 and applies an inspection signal for lighting inspection. The probe 25, as shown in Fig. 1, is connected to the signal generator 31 via the TCP 27, the connection FPC 28, the relay substrate 29, and the cable 30. The signal generator 31 is means for generating a check signal. The signal generator 31 generates an individual inspection signal 'and transmits it to each of the probes 25 via TCP 27 or the like. -8 - 201020552 Aligning the camera 14, as shown in Fig. 3, is used to photographicly set the liquid crystal panel when the probes 25 of the probe block 24 of the probe device 13 and the terminals 5C of the liquid crystal panel 5 are aligned. The camera of the surface of the 5 is aligned with the mark. The alignment cameras 14 are disposed on both sides of the three probe devices 13 respectively. The short-circuiting device 15' is a device for performing a short-circuit inspection when an abnormality such as a line defect occurs in the liquid crystal panel 5. In other words, when the probes 25 of the probe block 24 are brought into contact with the respective terminals Φ 5C of the liquid crystal panel 5 to perform the lighting inspection of the liquid crystal panel 5, when the liquid crystal panel 5 is abnormal, A device for causing each terminal 5C of the liquid crystal panel 5 to be in a short-circuit state. The short-circuiting device 15 is constituted by the short-circuiting member 33 and the pressing mechanism 34 as shown in Figs. The short-circuiting member 33 is a member that simultaneously contacts the respective terminals 5C of the liquid crystal panel 5 and short-circuits all the terminals 5C. The short-circuiting member 33 is opposed to each terminal 5C of the liquid crystal panel 5 in a state of being supported by the pressing mechanism 34. The short-circuiting member 33 is composed of a riser portion 33A and an upper horizontal plate portion ® 33B, and has an L-shaped cross section. The length of the short-circuiting member 33 is set to be substantially the same as the width of the probe block 24. The short-circuiting member 33 is made of a conductive rubber. In the vertical plate portion 33A made of a flexible conductive rubber, the entire terminal 5C can be reliably brought into contact with each other (the state of Fig. 7), and all the terminals 5C can be reliably short-circuited. The pressing mechanism 34' is a mechanism for supporting the short-circuiting member 33 and bringing the vertical plate portion 33A of the short-circuiting member 33 into contact with the respective terminals 5C when an abnormality occurs in the liquid crystal panel 5. The pressing mechanism 34 includes a substrate portion 35, a support 201020552, a wrist portion 36, a slide plate portion 37, a holding portion 38, and a movement support portion 39. The substrate portion 35 is a member for supporting and supporting the arm portion 36 and the like. The substrate portion 35 is fixed to the upper surface side of the suspension block 19 of the support portion 16. A plurality of screw holes 35A are provided in the base plate portion 35. A screw hole 19A is also provided on the upper side surface of the suspension block 19 in correspondence with the screw hole 35A of the board portion 35. The board portion 35 is fixed to the upper side surface of the suspension block 19 by screwing the screw 40 into the screw holes 35A, 19A. A hinge 41 and a support base 42 are provided on the upper side surface of the substrate portion 35. The hinge 41 (rotation mechanism) is for supporting the support arm portion 36 or the like constituting the pressing mechanism 34 so as to be rotatable by the suspension block 19 on the probe block 24 side. Specifically, the hinge 41 is configured to rotatably support the base end portion of the water flat portion 45 of the support arm portion 36, which will be described later, by the suspension block 19. The support base portion 42 is for supporting the horizontal plate portion 45 of the support arm portion 36 in a horizontal state. The upper side surface of the support base portion 42 is formed into a flat surface shape, and the upper side surface of the support base portion 42 abuts against the side surface (the lower side surface in Fig. 1) of the horizontal plate portion 45 that supports the arm portion 36. Further, in a state where the base end portion of the horizontal e-plate portion 45 of the support arm portion 36 is supported by the hinge 41, the intermediate portion of the horizontal plate portion 45 abuts against the support base portion 42, and the hinge 41 and the support base portion are utilized. The horizontal plate portion 45 of the support arm portion 36 is supported in a horizontal state. The support base portion 42 is provided with a screw hole 42A, and the support arm portion 36 is fixed to the base plate portion 35 by screwing the screw 43 into the screw hole 42A and a screw hole 45A of the horizontal plate portion 45 of the support arm portion 36 which will be described later. The support arm portion 36 is supported by the support portion 16 side of the probe device 13 for facing the slide plate portion 37 to face the plurality of ends of the liquid crystal panel 5 - 201020552 5C (contacting the probe 25) The side is supported to be slidable. The support arm portion 36' supports the slide plate portion 37 so as to be slidable and fixable at a set position. The support arm portion 36 is mainly composed of a horizontal plate portion 45 and a vertical plate portion 46. The horizontal plate portion 45 is a horizontally disposed member in a state in which the sliding plate portion 37 is supported to face the plurality of terminals 5C of the liquid crystal panel 5. The horizontal plate portion 45 is supported by the hinge 41 of the substrate portion 35 so as to be rotatable "one side surface (lower side surface in FIG. 1) abuts against the support base portion 42 of the base plate portion 35, and is Supported in a horizontal state. In the horizontal plate portion 45, a screw hole 45A similar to the screw hole 42A of the support base portion 42 is provided at a position facing the screw hole 42A of the support base portion 42. The vertical plate portion 46 is a member for supporting the sliding plate portion 37 to be slidable. The vertical plate portion 46 is integrally formed with the horizontal plate portion 45. The vertical plate portion 46 is formed by vertically descending from the horizontal plate portion 45 supported in a horizontal state. In the vertical plate portion 46, a guide rail 57 is provided in the vertical direction (the vertical direction in which the horizontal plate portion 45 is disposed in a horizontal state). The sliding plate portion 37 is a member that slides the short-circuiting member 33 so as to face the terminal 5C of the liquid crystal panel 5, and appropriately detachably attaches the short-circuiting member 33 to the terminal 5C. The slide plate portion 37 is composed of a flat member, and a guide member 58 is provided on one side thereof. The guide member 58 is slidably fitted to the guide rail 57 of the vertical plate portion 46, so that the slide plate portion 37 is supported by the vertical plate portion 46 so as to be slidable in the up and down direction" at the base of the slide plate portion 37. The end portion (the upper end portion of Fig. 1) is provided with a screw hole 37A into which the screw portion 54 of the push rod 49 to be described later is screwed. The position of the slide plate portion 37 can be adjusted by screwing the screw portion 54 of the push rod 49 into the screw hole 37A and appropriately rotating the push rod 49 by -11 - 201020552. The front end portion (the lower end portion of the first drawing) of the slide plate portion 37 is expanded in a flange shape to attach the holding portion 38. The holding portion 38 is a member for supporting the short-circuiting member 33. The proximal end portion of the holding portion 38 is supported by the distal end portion of the sliding plate portion 37, and the distal end portion of the holding portion 38 is in a state in which the short-circuiting member 33 is supported to face the terminal 5C of the liquid crystal panel 5. The moving support portion 39 is a mechanism for supporting the slide plate portion 37 at the set position (the standby position and the short position). The moving support portion 39 is provided at the front end portion of the horizontal plate portion 45 as shown in the @5th and 6th views. The moving support portion 39 is composed of a push rod 49 and a brake member 50. The push rod 49 is a member that presses the short-circuit member 33 against the terminal 5C through the slide plate portion 37 or the like. The front end portion of the horizontal plate portion 45 is provided with a push rod support hole 51 penetrating in the vertical direction (in a state where the horizontal plate portion 45 is horizontally supported). The push rod 49 is slidably supported by the push rod support hole 51. The push rod 49 is provided with a head portion 49A at the upper end and a flange portion 49B at the lower end to avoid falling off from the push rod support hole 51. Further, a spring 52 is provided on the side of the head portion 49 of the push rod 49. The spring 52 biases the push rod 49 upward (above the horizontal plate portion 45 of the support arm portion 36 in a horizontal state). Further, the spring 52 is also provided with a rotation suppressing function for avoiding the free rotation of the push rod 49 supported by the push rod support hole 51. As described above, by rotating the push rod 49 and fine-adjusting the height of the slide plate portion 37 by the screw portion 54 which will be described later, the height of the slide plate portion 37 can be prevented from being changed by the rotation of the push rod 49. A fitting groove 53 into which the stopper 50 is fitted is provided at an intermediate portion of the push rod 49. The fitting groove 53 is formed in a ring shape at the intermediate portion of the push rod 49. The fitting -12 - 201020552 groove 53 is provided to be supported by the holding portion 38 of the sliding plate portion 37 in a state where the stopper 50 is fitted to the fitting groove 53 and the push rod 49 is positioned and supported. The short-circuiting member 33 can surely contact the position (short-circuit position) of the plurality of terminals 5C of the liquid crystal panel 5. A screw portion 54 is provided at a lower end portion of the push rod 49 to be screwed into the slide plate portion 37. In this manner, the pusher 49 is supported by the fitting groove 53 to be supported at the short-circuited position, and when the terminal 5C of the liquid crystal panel 5 contacts the probe 25, it is short-circuited by the sliding plate portion φ 37 or the like. The member 33 is pressed against the terminal 5C. The brake member 50 is a member that switches the push rod 49 between the standby position and the short-circuit position. The stopper 50 is provided at the front end portion of the horizontal plate portion 45. At the front end portion of the horizontal plate portion 45, a stopper support hole 55 is provided in the horizontal direction (the horizontal direction of the horizontal plate portion 45 in the horizontal state). The stopper support hole 55 penetrates from the front end portion of the horizontal plate portion 45 to the push rod support hole 51. A thread is formed on the inner wall of the stopper supporting hole 55 for screwing in the stopper 50. The brake 50 is composed of a fitting claw portion 50A, a threaded portion 50B, and a knob portion 50C. The fitting claw portion 50A is a portion that fits into the fitting groove 53 of the push rod 49 and supports the push rod 49 at the short-circuit position. The threaded portion 50B' is a portion for screwing into the stopper supporting hole 55. The knob portion 50C' is a portion for rotating the stopper 50 to move in the stopper supporting hole 55, and the fitting claw portion 50A is moved in and out with respect to the fitting groove 53 of the push rod 49. By rotating the knob portion 50C, the fitting claw portion 5A is pulled out from the fitting groove 53, and the push rod 49 can be moved to the standby position by the spring 52; the fitting claw is pressed by pressing the push rod 49. The portion 50A is fitted to the fitting groove 53, and the push rod 49 can be supported at the short-circuit position. -13- 201020552 The probe unit 11 of the above configuration can perform the following functions. Further, since the function of the entire inspection apparatus is the same as that of the conventional inspection apparatus, the operation of the probe unit 11 will be mainly described. The liquid crystal panel 5 supported by the table 10 is properly aligned, and the terminal 5C of the liquid crystal panel 5 and the probe 25 of the probe block 24 are brought into contact with each other. Then, the inspection signal generated by the signal generator 31 is applied from the probe 25 to the terminal 5C of the liquid crystal panel 5 through the cable 30 or the like to perform the lighting inspection of the liquid crystal panel 5. At this time, if an abnormality occurs, the short-circuiting device 15 of the probe unit 11 corresponding to the position at which the abnormality occurs is switched from the standby mode to the short-circuit mode in which the short-circuit check is performed. Usually it is in standby mode. In other words, the fitting claw portion 50A of the brake member 50 is separated from the fitting groove 53 of the push rod 49, and the slide plate portion 37 is pushed upward by the spring 52 to stand by in the standby position. Thus, the short-circuiting member 33 is supported at a position away from the terminal 5C. Switch from this standby mode to the short-circuit mode. @ In the short-circuit mode ' is to push the push rod 49, and the fitting groove 5 3 of the push rod 49 and the fitting claw portion 50 A of the brake member 50 are aligned to screw the brake member 50 into, The fitting claw portion 50A is fitted to the fitting groove 53. The front end portion (lower end portion) of the short-circuiting member 33 is supported at a position "the same height as the front end of the probe 25" or lower than the front end of the probe 25. In this state, if the table 10 is operated, the terminal 5C of the liquid crystal panel 5 is brought into contact with the probe 25', and at the same time, all the terminals 5C that the probe 25 contacts are in contact with the short-circuiting member 33, and all of the terminals 5C are made. Become a short-14- 201020552 road state. In this state, 'If the check signal is generated from the signal generator 31 so that the abnormality is caused by the probe unit, the inquiry number sent from each probe 25 is applied to all the terminals 5C (short-circuit state by the short-circuit member 33) . In other words, it is possible to surely apply a check to each terminal 5C. 〇 Even in the short-circuit mode, an abnormality occurs in the liquid crystal panel 5. It is known that the abnormality is caused by the panel. On the other hand, in the short-circuit mode, no abnormality occurred in the crystal panel 5, and it was found that the abnormality was caused by the probe. According to this, the subsequent processing can be performed. In the probe unit 11, the stopper 50 is loosened, and the fitting claw portion is separated from the fitting groove 53 to return the slide plate portion 37 to the standby position. When the maintenance is performed, as shown in Fig. 4, the screw 4 3 is removed, and the hinge 41 of the moving mechanism is centered to rotate the short-circuiting device 15. Repair of the probe block 24 or the like is performed here. It is also possible to perform short-circuit device maintenance. As described above, the short-circuiting device 15 is provided in the probe device 13, and is replaced with the standby mode and the short-circuit mode. Therefore, when the lighting inspection step occurs, it can be easily and surely determined whether the abnormality is caused by the panel or the probe unit. . In this way, it is not necessary to separately provide another test other than the lighting inspection step, and it is possible to improve the efficiency of the inspection work. Further, since the short-circuiting device 15 can be rotated by the hinge 41 of the rotating mechanism, maintenance is easy. , that is, the detection becomes a signal condition, and the liquid element 50 Α is in a state of being able to turn abnormally because the step is -15-201020552. Since the short-circuit member 33 is covered by the plurality of terminals 5C of the liquid crystal panel 5, the contact is simultaneously contacted. The conductive rubber is configured to easily and reliably short all the terminals 5C. The pressing mechanism 34 includes a sliding plate portion 37 that slides the short-circuiting member 33 in a state of being supported to face the terminal 5C of the liquid crystal panel 5, and detaches the short-circuiting member 33 from the terminal 5C, and moves the sliding plate portion 37. Since the movement support portion 39 is supported to the standby position and the short-circuit position, it is possible to easily switch to the short-circuit mode® by manual operation when an abnormality occurs, thereby improving the efficiency of the inspection work. The moving support portion 39 includes a push rod 49 that presses the short-circuit member 33 against the respective terminals 5C through the slide plate portion 37, and a stopper 50 that supports the push rod 49 at the standby position of the slide plate portion 37 and the short-circuit position. Switching between the short-circuit mode and the standby mode can be easily performed manually.
〔第1變形例〕 Q 在前述實施形態，移動支承部39是採用推桿49和制 動件50所構成的手動式的移動支承部，但也能採用自動 式的移動支承部。具體而言，可採用第8圖所示的構造。 第8圖係顯示僅設置1個驅動缸的例子。由於檢查裝 置的整體構造是與前述實施形態相同，在此是以探針單元 的短路裝置爲中心來作說明。在第8圖的探針單元，短路 裝置59是具備：支承腕部60、滑動板部61、驅動缸62 和控制部63。 -16- 201020552 支承腕部60，是被探針座12支承成可轉動。該支承 腕部60是形成寬廣的板狀，而能覆蓋5個探針塊24。支 承腕部60的基端部是透過鉸鏈65而被探針座12支承成 可轉動。在鉸鏈65的端部設置制動件66。該制動件66 是形成銷狀，而安裝在長方體狀的銷收容部67 (固定在 鉸鏈65的旋轉軸）。在銷收容部67，沿正交方向設有2 個銷孔68。對應於該銷孔68，在探針座12設有銷支承孔 Ο 69。使制動件66貫穿銷收容部67的銷孔68而嵌合固定 在探針座12的銷支承孔69，而將支承腕部60固定成無 法轉動。而且，藉由拔出制動件66，可將支承腕部60轉 動以進行維修等。 支承腕部60的側面形狀呈L字形，其豎板部60A配 設成可覆蓋各探針塊24，在豎板部60A設置縱向的導軌 7 1° 滑動板部61是由1片板材所構成，分別對應於5個 ® 滑動塊24而設有5個枝部61A。在滑動板部61的背面設 置導件（未圖示），以嵌合於導軌71而將滑動板部61支 承成可上下滑動。 在各枝部61A的前端（下端）設置與前述實施形態 同樣的保持部38，在該保持部38安裝短路構件33。如此 ’藉由1個滑動板部61可同時支承全部的短路構件33。 驅動缸62，是用來使滑動板部61在上下方向移動的 驅動裝置。驅動缸62，是在延伸位置和縮回位置支承滑 動板部61，而使其在短路位置和待機位置移動。在藉由 -17- 201020552 驅動缸62使滑動板部61延伸而處於短路位置的狀態下， 藉由工作台10讓液晶面板5的端子5C接觸探針25，而 使短路構件33按壓於各端子5C。 控制部63,是控制驅動缸62而使滑動板部61移動 至待機位置和短路位置的裝置。控制部63，可利用能控 制檢查裝置1整體的控制部，也能設置驅動缸62專用的 控制部。 依據以上的構造，若液晶面板5發生異常，控制部 Q 63會使驅動缸62動作而讓滑動板部61從待機狀態移動 至短路狀態。在此狀態下，藉由工作台10讓液晶面板5 的端子5C接觸探針25，而進行與上述實施形態同樣的判 斷。 如此，可發揮與前述實施形態同樣的作用效果，且在 液晶面板5的檢查作業線上可自動判斷異常的原因。結果 可謀求檢査作業的效率化。 〔第2變形例〕 在前述第1變形例，是僅設置1個驅動缸62，而驅 動1個滑動板部61使全部的短路構件33同時移動，但也 能對應於各探針塊24而設置複數個。由於本變形例之探 針單元的整體構造是與前述第1變形例的探針單元大致相 同，在此以短路裝置爲中心來作說明。 本實施例的短路裝置，是對每個探針塊24設置驅動 缸。 -18- 201020552 滑動板部73，是對應於各探針塊24而設置5個。透 過導軌71而被支承腕部60的豎板部60A支承成可滑動 〇 驅動缸74，是對前述各個滑動板部73分別設置，以 將各滑動板部73予以個別驅動。各驅動缸74分別連接於 控制部63 (參照第8圖），而藉由控制部63來進行個別 控制。而且，藉由控制部63，僅在各驅動缸74當中驅動 Φ 對應於發生異常的位置之驅動缸74，而進行短路檢查》 在此情況也是，可發揮與前述實施形態及第1變形例 同樣的作用效果。再者，在本變形例，由於藉由各驅動缸 74使各短路構件33個別接觸端子5C，而能迅速地進行檢 查作業。 〔其他變形例〕 前述實施形態之具備探針單元11的檢查裝置1，並 © 不限於前述檢查裝置1，本發明能適用於可具備探針單元 11之所有的檢査裝置。 【圖式簡單說明】 第1圖係顯示本發明的實施形態之探針單元的局部透 視側視圖。 第2圖係顯示檢查裝置的立體圖。 第3圖係顯示本發明的實施形態之探針單元的立體圖 -19- 201020552 第4圖係顯示本發明的實施形態之探針單元的短路裝 置轉動後的狀態之立體圖。 第5圖係顯示本發明的實施形態之探針單元的短路裝 置之局部透視狀態的主要部位放大圖。 第6圖係顯示本發明的實施形態之探針單元的短路裝 置之分解立體圖。 第7圖係顯示本發明的實施形態之採針單元之將短路 裝置卸除的狀態之俯視圖。 第8圖係顯示第1變形例的立體圖。 第9圖係顯示第2變形例的立體圖。 [主要元件符號說明】 1 :檢査裝置 2 :面板設置部 3 :測定部 5 :液晶面板 5A :面板顯示部 1 0 :工作台 1 1 :探針單元 12 :探針座 13 :探針裝置 1 4 :對準攝影機 15 :短路裝置 16 :支承部 -20- 201020552 :探針組裝體 :短路裝置 :懸吊塊 :導軌 :滑動塊 :探針板 =調整螺絲 :探針塊 :探針 :訊號產生器 :短路構件 :推壓機構 :基板部 :支承腕部 :滑動板部 :保持部 :移動支承部 :鉸鏈 •支承台部 :水平板部 :垂直板部 :位置調整部 :推桿 :制動件 -21 201020552 5 1 :推桿支承孔 53 :嵌合溝槽 54 :螺桿部 5 5 :制動件支承孔 57 :導軌 5 8 :導件 59 :短路裝置 60 :支承腕部 Θ 6 1 :滑動板部 62 :驅動缸 63 :控制部 65 :鉸鏈 6 6 :制動件 67 :銷收容部 6 8 :銷孔 69 :銷支承孔 β 71 :導軌 73 :滑動板部 7 4 :驅動缸 -22-[First Modification] Q In the above embodiment, the movement support portion 39 is a manual movement support portion including a push rod 49 and a brake 50. However, an automatic movement support portion can also be employed. Specifically, the configuration shown in Fig. 8 can be employed. Fig. 8 shows an example in which only one drive cylinder is provided. Since the overall structure of the inspection apparatus is the same as that of the above-described embodiment, the description will be made focusing on the short-circuiting means of the probe unit. In the probe unit of Fig. 8, the short circuit device 59 includes a support arm portion 60, a slide plate portion 61, a drive cylinder 62, and a control portion 63. -16- 201020552 The support arm 60 is rotatably supported by the probe holder 12. The support arm portion 60 is formed in a wide plate shape and can cover five probe blocks 24. The base end portion of the support arm portion 60 is rotatably supported by the probe holder 12 via the hinge 65. A stopper 66 is provided at the end of the hinge 65. The stopper 66 is formed in a pin shape and is attached to a rectangular parallelepiped pin housing portion 67 (fixed to the rotation shaft of the hinge 65). In the pin housing portion 67, two pin holes 68 are provided in the orthogonal direction. Corresponding to the pin hole 68, a pin supporting hole Ο 69 is provided in the probe holder 12. The stopper 66 is fitted and fixed to the pin hole 68 of the probe holder 12 through the pin hole 68 of the pin housing portion 67, and the support arm portion 60 is fixed so as not to rotate. Moreover, by pulling out the brake member 66, the support arm portion 60 can be rotated for maintenance or the like. The side surface of the support arm portion 60 has an L-shape, and the riser portion 60A is disposed to cover each of the probe blocks 24, and the vertical guide portion 7 is provided at the riser portion 60A. The slide plate portion 61 is composed of one sheet material. There are five branches 61A corresponding to the five ® sliders 24, respectively. A guide (not shown) is provided on the back surface of the slide plate portion 61 so as to be fitted to the guide rail 71 to support the slide plate portion 61 so as to be vertically slidable. A holding portion 38 similar to that of the above-described embodiment is provided at the front end (lower end) of each branch portion 61A, and the short-circuit member 33 is attached to the holding portion 38. Thus, all of the short-circuit members 33 can be simultaneously supported by one sliding plate portion 61. The drive cylinder 62 is a drive device for moving the slide plate portion 61 in the vertical direction. The drive cylinder 62 supports the slide plate portion 61 in the extended position and the retracted position to move in the short-circuited position and the standby position. When the slide plate portion 61 is extended by the drive cylinder 62 at -17-201020552 and is in the short-circuit position, the terminal 5C of the liquid crystal panel 5 is brought into contact with the probe 25 by the table 10, and the short-circuit member 33 is pressed against each terminal. 5C. The control unit 63 is a device that controls the drive cylinder 62 to move the slide plate portion 61 to the standby position and the short-circuit position. The control unit 63 can also provide a control unit dedicated to the drive cylinder 62 by using a control unit that can control the entire inspection apparatus 1. According to the above configuration, when an abnormality occurs in the liquid crystal panel 5, the control unit Q63 operates the drive cylinder 62 to move the slide plate portion 61 from the standby state to the short-circuit state. In this state, the terminal 5C of the liquid crystal panel 5 is brought into contact with the probe 25 by the table 10, and the same judgment as in the above embodiment is performed. As described above, the same operational effects as those of the above-described embodiment can be exerted, and the cause of the abnormality can be automatically determined on the inspection line of the liquid crystal panel 5. As a result, the efficiency of inspection work can be improved. [Second Modification] In the first modification, only one drive cylinder 62 is provided, and one slide plate portion 61 is driven to simultaneously move all of the short-circuit members 33, but it is also possible to correspond to each probe block 24. Set a plurality of. The overall structure of the probe unit of the present modification is substantially the same as that of the probe unit of the first modification, and the short-circuiting device will be mainly described. In the short-circuiting device of this embodiment, a drive cylinder is provided for each probe block 24. -18- 201020552 The slide plate portion 73 is provided in five pieces corresponding to each probe block 24. The vertical plate portion 60A of the support arm portion 60 is supported by the guide rails 71 so as to be slidable. The drive cylinders 74 are provided for the respective slide plate portions 73 to individually drive the respective slide plate portions 73. Each of the drive cylinders 74 is connected to the control unit 63 (see Fig. 8), and the control unit 63 performs individual control. In addition, the control unit 63 drives the drive cylinder 74 corresponding to the position where the abnormality has occurred in each of the drive cylinders 74, and performs the short-circuit check. In this case, the same as in the first embodiment and the first modification. The effect of the effect. Further, in the present modification, the respective short-circuit members 33 are individually brought into contact with the terminals 5C by the respective drive cylinders 74, whereby the inspection operation can be quickly performed. [Other Modifications] The inspection apparatus 1 including the probe unit 11 of the above-described embodiment is not limited to the inspection apparatus 1, and the present invention can be applied to all inspection apparatuses that can include the probe unit 11. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial perspective side view showing a probe unit according to an embodiment of the present invention. Fig. 2 is a perspective view showing the inspection device. Fig. 3 is a perspective view showing a probe unit according to an embodiment of the present invention. -19- 201020552 Fig. 4 is a perspective view showing a state in which the short-circuiting device of the probe unit according to the embodiment of the present invention is rotated. Fig. 5 is an enlarged view of a main part showing a partial perspective state of the short-circuiting device of the probe unit according to the embodiment of the present invention. Fig. 6 is an exploded perspective view showing the short-circuiting device of the probe unit according to the embodiment of the present invention. Fig. 7 is a plan view showing a state in which the short-circuiting device of the needle taking unit according to the embodiment of the present invention is removed. Fig. 8 is a perspective view showing a first modification. Fig. 9 is a perspective view showing a second modification. [Explanation of main component symbols] 1 : Inspection device 2 : Panel installation unit 3 : Measurement unit 5 : Liquid crystal panel 5A : Panel display portion 1 0 : Table 1 1 : Probe unit 12 : Probe holder 13 : Probe device 1 4: Alignment camera 15: Short-circuit device 16: Support portion -20- 201020552: Probe assembly: Short-circuit device: Suspension block: Guide rail: Slide block: Probe plate = Adjustment screw: Probe block: Probe: Signal Generator: Short-circuit member: Pushing mechanism: Base plate: Supporting wrist: Sliding plate: Holding: Moving support: Hinge • Supporting table: Horizontal plate: Vertical plate: Position adjustment: Putter: Brake团-21 201020552 5 1 : Push rod support hole 53 : fitting groove 54 : screw portion 5 5 : brake member support hole 57 : guide rail 5 8 : guide 59 : short-circuiting device 60 : support arm Θ 6 1 : sliding Plate portion 62: drive cylinder 63: control portion 65: hinge 66: brake member 67: pin housing portion 6 8: pin hole 69: pin support hole β 71: guide rail 73: sliding plate portion 7 4 : drive cylinder 22-