CN201535789U - Probe unit and checking device - Google Patents

Probe unit and checking device Download PDF

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Publication number
CN201535789U
CN201535789U CN2009202196374U CN200920219637U CN201535789U CN 201535789 U CN201535789 U CN 201535789U CN 2009202196374 U CN2009202196374 U CN 2009202196374U CN 200920219637 U CN200920219637 U CN 200920219637U CN 201535789 U CN201535789 U CN 201535789U
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CN
China
Prior art keywords
mentioned
short circuit
probe
terminal
probe unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2009202196374U
Other languages
Chinese (zh)
Inventor
安斋正行
三浦一佳
齐藤裕树
小山内康晃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
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Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2008-301299 priority Critical
Priority to JP2008301299A priority patent/JP2010127706A/en
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Application granted granted Critical
Publication of CN201535789U publication Critical patent/CN201535789U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/2872Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources

Abstract

The utility model provides a probe unit and a checking device. The utility model can strive for the efficiency of check working. The probe unit comprises a probe part and a short circuit device, wherein a plurality of probes are respectively contacted with a plurality terminals arranged on the panel of a checked object to carry out lightening check through the probe part; when each probe is respectively contacted with each terminal to carry out lightening check, each terminal is short-circuited through the short circuit device under the unfavorable conditions of linear defects occurring on the panel of the checked object and the like, and the short circuit device comprises a short circuit component and a pressing mechanism, wherein the short circuit component is arranged relatively to each terminal and simultaneously contacted with each terminal to enable all the terminals to be short-circuited; and the pressing mechanism is used for supporting the short circuit component in the state of being supported at the side of the probe part and enables the short circuit component to be contacted with each terminal under the unfavorable conditions. The short circuit component supported by the pressing mechanism is contacted with each terminal to judge whether the unfavorable conditions are caused by the panel or caused by the probe unit.

Description

Probe unit and testing fixture
Technical field
The utility model relates to a kind of liquid crystal panel etc. and lights and check employed probe unit and testing fixture.
Background technology
In the manufacturing process of liquid crystal panel etc., carry out the inspection whether this panel has performance such in the instructions etc.In this is checked, use testing fixture usually with the probe unit that comprises a plurality of probes.In this case, contact entirely under the state of (full contact) with the terminal of checking the object panel, check that signal is lighted it and check by applying at each probe that makes testing fixture.
In such testing fixture, when when lighting the unfavorable condition that produces line defect etc. when checking, for judge this unfavorable condition be cause by panel or cause by probe unit, additionally carry out lighting and check the different inspection of operation with this.Particularly, adopt used simple and easy light check with the inspection method of probe unit (having used conducting rubber) or used 1G1D check inspection method judgement the problems referred to above with probe unit be cause by panel or cause by probe unit.As the example of such inspection method, patent documentation 1 is arranged.
Patent documentation 1: Japanese kokai publication hei 9-138442 communique
But, in above-mentioned testing fixture,, therefore need two kinds to check operation owing to additionally carry out checking the different inspection of operation with common lighting, there is the such problem of checking efficiency difference.
Summary of the invention
The utility model makes in order to address the above problem, and its purpose is to provide a kind of can the inspection in common lighting to judge in the operation that above-mentioned unfavorable condition is probe unit and the testing fixture that is caused by panel or caused by probe unit.
In order to address the above problem, probe unit of the present utility model is characterised in that this probe unit comprises: probe member, its by make a plurality of probes respectively be located at a plurality of terminals of checking on the object panel and contact and light inspection; Short-circuiting means, it is lighted in that above-mentioned each probe is contacted with above-mentioned each terminal respectively and makes each short-circuit of terminals when checking, above-mentioned short-circuiting means comprises: the short circuit member, and itself and above-mentioned each terminal are oppositely arranged, and contact simultaneously with above-mentioned each terminal and make all short-circuits of terminals; Pressing mechanism, it is at this short circuit member of the state lower support that is supported in above-mentioned probe member side and this short circuit member is contacted with above-mentioned each terminal.
Testing fixture of the present utility model is the testing fixture that is used to check the object panel, it is characterized in that, this testing fixture comprises: panel configuration portion, and it is used for should checking that the object panel takes out of to the outside after the inspection object panel inspection of inserting from the outside is finished; Measurement section, it is used to support and check the inspection object panel of taking over from this panel configuration portion, uses the probe unit of above-mentioned probe unit as above-mentioned measurement section.
In said structure, when on above-mentioned inspection object panel, producing unfavorable condition such as line defect, above-mentioned short circuit member is contacted with above-mentioned each terminal and all terminals are applied the inspection signal by above-mentioned pressing mechanism.Thus, the unfavorable condition that can easily judge above-mentioned inspection object panel be cause by panel or cause by probe unit, improved checking efficiency.
Description of drawings
Fig. 1 is the side view in partial cross-section of the probe unit of expression embodiment of the present utility model.
Fig. 2 is the stereographic map of expression testing fixture.
Fig. 3 is the stereographic map of the probe unit of expression embodiment of the present utility model.
Fig. 4 is the stereographic map that expression makes the state that the short-circuiting means of the probe unit of embodiment of the present utility model rotates.
Fig. 5 is the major part enlarged drawing with the short-circuiting means of the probe unit of the state representation embodiment of the present utility model of biopsy cavity marker devices.
Fig. 6 is the exploded perspective view of short-circuiting means of the probe unit of expression embodiment of the present utility model.
Fig. 7 is the vertical view with the probe unit of the state representation embodiment of the present utility model of having pulled down this short-circuiting means.
Fig. 8 is the stereographic map of expression the 1st variation.
Fig. 9 is the stereographic map of expression the 2nd variation.
Embodiment
Below, with reference to the probe unit and the testing fixture of description of drawings embodiment of the present utility model.
As shown in Figure 2, the testing fixture 1 of present embodiment mainly is made of panel configuration portion 2 and measurement section 3.
Panel configuration portion 2 is that the device that the liquid crystal panel 5 after finishing is carried to the outside is carried, also will be checked to the liquid crystal panel 5 that is used for inserting from the outside to measurement section 3.Panel configuration portion 2 has panel connection device 7 in the depths of peristome 6, utilizes this panel connection device 7 to receive liquid crystal panel 5 from the outside, utilizes conveying arm 8 supportings and carries this liquid crystal panel 5 to measurement section 3.In addition, panel connection device 7 receives by the liquid crystal panel 5 after the measurement section 3 inspection end and with it and carries to the outside.
Measurement section 3 is the devices that are used to support and check the liquid crystal panel of taking over from panel configuration portion 25.Measurement section 3 comprises work stage 10, probe unit 11 etc.
Work stage 10 is the devices that are used to support liquid crystal panel 5 and adjust XYZ θ direction.The liquid crystal panel 5 that work stage 10 supportings are transported by conveying arm 8, and liquid crystal panel 5 is contacted with probe unit 11 to contraposition exactly with probe unit 11.As shown in Figure 7, liquid crystal panel 5 by the 5B of panel terminal portion around the panel display part 5A that is used for display image, the panel display part 5A, be located at that the 5B of panel terminal portion goes up and constitute to the terminal 5C that panel display part 5A transmits signal.Probe unit 11 is with respect to terminal 5C contraposition exactly.
Probe unit 11 be contact with the terminal 5C of liquid crystal panel 5 and it is applied check signal, in order to check liquid crystal panel 5 with its device of lighting.Shown in Fig. 1,3~7, probe unit 11 comprises probe base portion 12, probe unit 13, calibration camera 14 and short-circuiting means 15.
Probe base portion 12 is the sheet material that is used for supporting integratedly probe unit 13, calibration camera 14.This probe base portion 12 makes probe unit 13, calibration camera 14 etc. and liquid crystal panel 5 on the work stage 10 relatively support probe unit 13, calibration camera 14 etc. being fixed under the state of apparatus main body side.
Probe unit 13 is the devices of lighting inspection that are used to carry out common full contact.Shown in Fig. 1,4, this probe unit 13 is made of support 16, assembled probe body 17.
Above-mentioned support 16 is to be supported on the member that supports above-mentioned assembled probe body 17 under the state of above-mentioned probe base portion 12 with its tip side at its base end side.This support 16 comprises: directly be installed on the above-mentioned probe base portion 12 and be used to support whole suspension piece 19, can be bearing in the slide block 21 of the leading section of this suspension piece 19 slidably, be installed on probe card 22 on the downside of this slide block 21 integratedly by guide rail 20.Adjust the height of slide block 21 by adjusting bolt 23 with respect to suspension piece 19.
Assembled probe body 17 is to be used for contacting with the terminal 5C of the circuit of liquid crystal panel 5 and it being applied the member of checking signal.Assembled probe body 17 is installed on the downside of probe card 22.This assembled probe body 17 comprises probe member 24 and probe 25.Probe member 24 directly is installed on the downside of probe card 22.On this probe member 24, probe 25 is installed.Probe 25 is to be used for contacting with the terminal 5C of the circuit of liquid crystal panel 5 and to apply the needle member of the inspection signal that is used to light inspection.Probe 25 is located at the front of probe member 24, directly contacts with the terminal 5C of liquid crystal panel 5.As shown in Figure 1, probe 25 is connected with signal generator 31 with cable 30 via TCP27, connection FPC28, relaying substrate 29.Signal generator 31 is to be used to produce the device of checking signal.Signal generator 31 is one by one made and is checked behind the signal by TCP27 etc. and send to each probe 25.
As shown in Figure 3, calibration camera 14 is the cameras that are used to take the lip-deep alignment mark of being located at liquid crystal panel 5 when the terminal 5C of each probe 25 of the probe member 24 of probe unit 13 and liquid crystal panel 5 carries out contraposition.Calibration camera 14 is located at the both sides of 3 probe units 13 respectively.
Short-circuiting means 15 is the devices that carry out test for short-circuit when being used on liquid crystal panel 5 producing unfavorable condition such as line defect.That is, short-circuiting means 15 is to contact with each terminal 5C of liquid crystal panel 5 respectively and carry out lighting of liquid crystal panel 5 when checking, be used to make the device of each terminal 5C short circuit of liquid crystal panel 5 when producing unfavorable condition on this liquid crystal panel 5 at each probe 25 that makes probe member 24.Shown in Fig. 1,4~7, short-circuiting means 15 is made of short circuit member 33 and pressing mechanism 34.
Short circuit member 33 is to be used to make each terminal 5C of above-mentioned liquid crystal panel 5 to contact simultaneously and the member that makes all terminal 5C short circuits.Short circuit member 33 is oppositely arranged with each terminal 5C of above-mentioned liquid crystal panel 5 under the state of mechanism 34 supporting that is pressed.Short circuit member 33 is made of upright board 33A and top lateral piece 33B, and the cross section is the L font.The length of short circuit member 33 is set to the size roughly the same with the width of probe member 24.Short circuit member 33 is made of conducting rubber.Thus, have flexibility and the upright board 33A of thin conducting rubber system cover each terminal 5C integral body, simultaneously and contact (state of Fig. 7) with each terminal 5C reliably, thereby can make all terminal 5C short circuits reliably.
Pressing mechanism 34 is supporting short circuit member 33 and upright board 33A and above-mentioned each the contacted mechanism of terminal 5C that makes short circuit member 33 when producing unfavorable condition on liquid crystal panel 5.Pressing mechanism 34 is made of baseplate part 35, supporting arm 36, slide plate portion 37, cradle portion 38 and mobile support 39.
Baseplate part 35 is the members that are used to supporting arm 36 grades.Baseplate part 35 is fixed on the upper side of suspension piece 19 of support 16.On baseplate part 35, be provided with a plurality of screw 35A.On suspension piece 19 and the corresponding upper side of screw 35A this baseplate part 35, also be provided with screw 19A.In these screws 35A, 19A, be screwed into screw 40, thereby baseplate part 35 be fixed on the upper side of suspension piece 19.
On the upper side of baseplate part 35, be provided with hinge 41 and supporting station portion 42.Hinge 41 is that supporting arm 36 grades that are used for constituting pressing mechanism 34 can be bearing in the rotating mechanism on the suspension piece 19 of above-mentioned probe member 24 sides rotationally.Particularly, hinge 41 is to be used for base end part with the horizontal plate part 45 of supporting arm 36 described later can be bearing in member on the suspension piece 19 rotationally.Supporting station portion 42 is the members that are used for the horizontal plate part 45 of supporting arm 36 is bearing in horizontality.The upper side of supporting station portion 42 forms smooth planar, and the upper side of this supporting station portion 42 connects with the side (downside among Fig. 1) of the horizontal plate part 45 of supporting arm 36.And under the state that the base end part of horizontal plate part 45 of supporting arm 36 is supported by hinge 41, the pars intermedia of horizontal plate part 45 and supporting station portion 42 connect, and flatly support the horizontal plate part 45 of arm 36 by above-mentioned hinge 41 and supporting station portion 42.In supporting station portion 42, be provided with screw 42A.And,, be fixed on the baseplate part 35 and will support arm 36 by in the screw 45A of the horizontal plate part 45 of this screw 42A and supporting arm 36 described later, being screwed into screw 43.
Supporting arm 36 is supported on support 16 sides of above-mentioned probe unit 13, is to be used to make a plurality of terminal 5C sides of the liquid crystal panel 5 that slide plate portion 37 and above-mentioned probe 25 contacted to face mutually and the member of supporting plate portion 37 slidably.Supporting arm 36 is supporting plate portion 37 and fixing slide plate portion 37 at desired location slidably.Supporting arm 36 mainly is made of horizontal plate part 45 and vertical plate part 46.Horizontal plate part 45 is members of horizontal arrangement, and it makes slide plate portion 37 and a plurality of terminal 5C sides of the liquid crystal panel 5 supporting plate portion 37 over the ground of practising physiognomy.The base end part of horizontal plate part 45 can be supported on the hinge 41 of aforesaid substrate portion 35 rotationally, and one side (downside among Fig. 1) connects with the supporting station portion 42 of baseplate part 35, thereby horizontal plate part 45 is flatly supported.The position relative at the screw 42A with above-mentioned supporting station portion 42 of horizontal plate part 45 is provided with the screw 45A same with the screw 42A of this supporting station portion 2.
Vertical plate part 46 is to be used for the member of supporting plate portion 37 slidably.Vertical plate part 46 is set to one with horizontal plate part 45.Vertical plate part 46 forms to vertical lower from the horizontal plate part 45 that is flatly supported with hanging down.On the vertical plate part 46 vertically (vertical direction under the state of horizontal plate part 45 horizontal arrangement) be provided with guide rail 57.
Slide plate portion 37 practises physiognomy at the terminal 5C that makes short circuit member 33 with liquid crystal panel 5, and to support sliding in state of short circuit member 33 over the ground moving, is to be used to member that short circuit member 33 is is suitably loaded and unloaded with respect to terminal 5C.Slide plate portion 37 is made of flat member, is provided with guiding piece 58 on the one side.By making this guiding piece 58 can be slidably and guide rail 57 tablings of above-mentioned vertical plate part 46, slide plate portion 37 can be bearing on the vertical plate part 46 along the vertical direction slidably.
Be provided with the screw 37A that the threaded shank 54 for push rod 49 described later is screwed at the base end part (upper end of Fig. 1) of slide plate portion 37.Suitably rotate this push rod 49 by the threaded shank 54 that in this screw 37A, is screwed into push rod 49, thereby adjust the position of slide plate portion 37.The leading section of slide plate portion 37 (bottom of Fig. 1) expansion forms flange shape, and cradle portion 38 is installed.
Cradle portion 38 is the members that are used to support short circuit member 33.The base end part of cradle portion 38 is supported on the leading section of slide plate portion 37, and the leading section of cradle portion 38 is so that the state support short circuit member 33 that short circuit member 33 and the terminal 5C of liquid crystal panel 5 face mutually.
Mobile support 39 is the mechanisms that are used in desired location (position of readiness and location of short circuit) supporting plate portion 37.Shown in Fig. 5,6, this moves the leading section that support 39 is located at horizontal plate part 45.This mobile support 39 is made of push rod 49 and limiter 50.
Push rod 49 is to be used for by slide plate portion 37 grades short circuit member 33 being pressed on member on the terminal 5C.Leading section at horizontal plate part 45 is provided with the push rod support holes 51 that vertically connects horizontal plate part 45 under the state that this horizontal plate part 45 is flatly supported.Push rod 49 can be supported in this push rod support holes 51 slidably.Push rod 49 is provided with head 49A in the upper end, be provided with flange part 49B in the lower end, can avoid it to come off from push rod support holes 51.In addition, be provided with spring 52 in the head 49A of push rod 49 side.52 pairs of push rods 49 of this spring are (horizontal plate part 45 of supporting arm 36 is the top under the horizontal state) application of force upward.In addition, spring 52 also has and avoids being supported on the rotation stopping function that the push rod 49 in the push rod support holes 51 rotates freely.This is for fear of after making push rod 49 rotation, height by threaded shank described later 54 fine-tuning slide portions 37, and push rod 49 rotates and makes the Level Change of slide plate portion 37.
Be provided with for the chimeric embeded slot 53 of limiter 50 at the pars intermedia of push rod 49.This embeded slot 53 forms ring-type at the pars intermedia of push rod 49.Embeded slot 53 be located at limiter 50 and under the state of positioning support push rod 49 with these embeded slot 53 tablings, by the short circuit member 33 of cradle portion 38 supportings of slide plate portion 37 reliably with the contacted positions of a plurality of terminal 5C (location of short circuit) of liquid crystal panel 5.Be provided with threaded shank 54 in the bottom of push rod 49, this threaded shank 54 is screwed in the slide plate portion 37.Thus, push rod 49 is supported in location of short circuit by limiter 50 and embeded slot 53 tablings, when the terminal 5C of liquid crystal panel 5 contacts with probe 25, by slide plate portion 37 grades short circuit member 33 is pressed on the terminal 5C.
Limiter 50 is to be used to switch the position of readiness of push rod 49 and the member of location of short circuit.This limiter 50 is located at the leading section of horizontal plate part 45.Leading section along continuous straight runs (horizontal plate part 45 is the horizontal direction under the horizontal state) at horizontal plate part 45 is provided with limiter support holes 55.This limiter support holes 55 is configured to extend through the push rod support holes 51 from the leading section of horizontal plate part 45.On the inwall of limiter support holes 55, be formed with ridge, be screwed into for limiter 50.Limiter 50 is made of chimeric claw 50A, threaded portion 50B, handle portion 50C.Chimeric claw 50A is by push rod 49 being bearing in the part of location of short circuit with embeded slot 53 tablings of push rod 49.Threaded portion 50B is the part that is used for being screwed into limiter support holes 55.Thereby handle portion 50C makes limiter 50 rotation and moves limiter support holes 55 in and make the part of chimeric claw 50A with respect to embeded slot 53 discrepancy of push rod 49.Rotate this handle portion 50C and from embeded slot 53, extract chimeric claw 50A, thereby utilize spring 52 to make push rod 49 move to position of readiness, make chimeric claw 50A and embeded slot 53 tablings by lower push-rod 49, thereby push rod 49 is bearing in location of short circuit.
The probe unit 11 that below constitutes like that has effect as described below.In addition, because the effect of testing fixture integral body is identical with in the past testing fixture, therefore, describe at this center that act as with probe unit 11.
By making liquid crystal panel 5 contraposition exactly that is supported on the work stage 10, and the terminal 5C of liquid crystal panel 5 and the probe 25 of probe member 24 are in contact with one another.
Then, will carry out the inspection of lighting of liquid crystal panel 5 by cable 30 grades from the terminal 5C that probe 25 imposes on liquid crystal panel 5 by the inspection signal that signal generator 31 produces.
At this moment, when unfavorable condition took place, the corresponding short-circuiting means 15 in position with producing this unfavorable condition of probe unit 11 switched to the short-circuit mode that carries out test for short-circuit from standby mode.
Be generally standby mode.That is, the chimeric claw 50A of limiter 50 breaks away from from the embeded slot 53 of push rod 49, and slide plate portion 37 is by spring 52 pull-up and become standby mode in the position of readiness standby upward.Thus, short circuit member 33 is supported in the position of leaving from terminal 5C.Switch to short-circuit mode from this standby mode.
Under short-circuit mode, press lower push-rod 49, make the embeded slot 53 of push rod 49 and limiter 50 chimeric claw 50A aligned in position and be screwed into limiter 50, make chimeric claw 50A and embeded slot 53 tablings.Thus, the top ends of short circuit member 33 (bottom) is supported in and the position of the top equal height of probe 25 or the position lower than the top of probe 25.
Under this state, make work stage 10 action, when the terminal 5C of liquid crystal panel 5 was contacted with probe 25, all terminal 5C that short circuit member 33 is contacted with probe 25 contacted, and make these terminals 5C short circuit all.
Under this state, when producing the inspection signal by signal generator 31, even in unfavorable condition is under the situation about being caused by probe unit, be sent to all the terminal 5C under the state that inspection signal on each probe 25 also can impose on by 33 short circuits of short circuit member.That is, will check that signal imposes on each terminal 5C reliably.
Under this short-circuit mode, when on liquid crystal panel 5, producing unfavorable condition, be the unfavorable condition that causes by panel as can be known.On the other hand, under short-circuit mode, not producing unfavorable condition following time on liquid crystal panel 5, is the unfavorable condition that is caused by probe unit as can be known.Carry out later processing based on this.
In probe unit 11, loosen limiter 50 and chimeric claw 50A is broken away from from embeded slot 53, make slide plate portion 37 be returned to position of readiness.
When maintenance, as shown in Figure 4, pull down screw 43, making short-circuiting means 15 is that rotate at the center with the hinge 41 as rotating mechanism.Under this state, carry out the maintenance of probe member 24 grades.Also carry out the maintenance of short-circuiting means 15 self.
As mentioned above, short-circuiting means 15 is set on probe unit 13, can switches standby mode and short-circuit mode, therefore, check when producing unfavorable condition in the operation lighting, can be easily and judge reliably this unfavorable condition be cause by panel or cause by probe unit.
Thus, do not need setting in addition and light the different inspection operation of inspection operation, can seek to check efficiency of operationization.
In addition, because short-circuiting means 15 is that rotate at the center with the hinge 41 as rotating mechanism, therefore can easily keep in repair.
Because short circuit member 33 is by the integral body of a plurality of terminal 5C of covering liquid crystal panel 5, and constitutes with the contacted conducting rubber of a plurality of terminal 5C of liquid crystal panel 5 simultaneously, therefore, can be easily and make all terminal 5C short circuits reliably.
Pressing mechanism 34 comprises slide plate portion 37 and mobile support 39, it is moving that sliding in state of short circuit member 33 relatively supported at the terminal 5C that makes short circuit member 33 with liquid crystal panel 5 by this slide plate portion 37, and short circuit member 33 can be loaded and unloaded with respect to terminal 5C, this mobile support 39 makes this slide plate portion 37 support this slide plate portion 37 movably between position of readiness and location of short circuit, therefore, when producing unfavorable condition, can seek to check efficiency of operationization by manually easily switching to short-circuit mode.
Mobile support 39 comprises push rod 49 and limiter 50, this push rod 49 presses on short circuit member 33 on each terminal 5C by slide plate portion 37, this limiter 50 is bearing in this push rod 49 position of readiness and the location of short circuit of above-mentioned slide plate portion 37, therefore, can be by manually easily switching short-circuit mode and standby mode.
The 1st variation
In the above-described embodiment, mobile support 39 is constituted the mobile support of the hand that is made of push rod 49 and limiter 50, but also can be the mobile support of self-action.Particularly, also can be for constituting as illustrated in fig. 8.
Fig. 8 is the example that a driving cylinder only is set.Because the one-piece construction of testing fixture is identical with above-mentioned embodiment, therefore, is that the center describes at this short-circuiting means with probe unit.In the probe unit of Fig. 8, short-circuiting means 59 comprises supporting arm 60, slide plate portion 61, driving cylinder 62 and control part 63.
Supporting arm 60 can be supported on probe base portion 12 rotationally.This supporting arm 60 forms the tabular of broad, can cover 5 probe members 24.The base end part of supporting arm 60 can be supported on probe base portion 12 rotationally by hinge 65.Be provided with limiter 66 in the end of hinge 65.This limiter 66 forms the pin shape, is installed on the rectangular-shaped key seat 67 on the turning axle that is fixed on hinge 65.On key seat 67, vertically be provided with two pin-and-holes 68.With these pin-and-hole 68 corresponding probe base portions 12 on be provided with pin support holes 69.Limiter 66 runs through the pin-and-hole 68 of key seat 67, is fixed by pin support holes 69 tablings with probe base portion 12, will support arm 60 and be fixed as and can't rotate.Then, supporting arm 60 is rotated by pulling up limiter 66, thereby can keep in repair etc.
The side view of supporting arm 60 forms the L font, and its upright board 60A is configured to cover each probe member 24.On upright board 60A, longitudinally be provided with guide rail 71.
Slide plate portion 61 is made of 1 sheet material, is provided with respectively and 5 probe members, 24 corresponding 5 61A of branch.Be provided with guiding piece (figure does not show) at the back side of slide plate portion 61, make slide plate portion 61 can slide up and down to supporting plate portion 61 by making guiding piece and guide rail 71 tablings.
Top (lower end) at each 61A of branch is provided with the cradle portion 38 identical with above-mentioned embodiment, on this cradle portion 38 short circuit member 33 is installed.Thus, support all short circuit members 33 simultaneously with 1 slide plate portion 61.
Driving cylinder 62 is the drive units that are used to make slide plate portion 61 to move along the vertical direction.Driving cylinder 62 is bearing in slide plate portion 61 extended position and draws in these two positions, position, and slide plate portion 61 is moved between location of short circuit and position of readiness.Utilizing this driving cylinder 62 to make slide plate portion 61 stretch out and be positioned under the state of location of short circuit, utilize work stage 10 that the terminal 5C of liquid crystal panel 5 is contacted with probe 25, thereby short circuit member 33 is pressed on each terminal 5C.
Control part 63 is to be used for controlling and driving cylinder 62 and device that slide plate portion 61 is moved between position of readiness and location of short circuit.Control part 63 utilizes the control part of the integral body of controlling testing fixture 1 or the control part of driving cylinder 62 special uses is set.
Adopt abovely to constitute, when producing unfavorable condition on liquid crystal panel 5, control part 63 makes driving cylinder 62 actions and makes slide plate portion 61 move to short-circuit condition from holding state.Under this state, utilize work stage 10 that the terminal 5C of liquid crystal panel 5 is contacted with probe 25, similarly judge with above-mentioned embodiment.
Thus, effect, the effect identical can be played, and in the inspection line of liquid crystal panel 5, the reason that produces unfavorable condition can be automatically judged with above-mentioned embodiment.As a result, can seek to check the high efficiency of operation.
The 2nd variation
In above-mentioned the 1st variation, 1 driving cylinder 62 only is set, drive 1 slide plate portion 61 and all short circuit members 33 are moved simultaneously, but also can a plurality of driving cylinders be set accordingly with each probe member 24.The probe unit of the one-piece construction of the probe unit of this variation and above-mentioned the 1st variation is roughly the same, therefore, is that the center describes with the short-circuiting means at this.
The short-circuiting means of this variation is the structure that each probe member 24 all is provided with driving cylinder.
With each probe member 24 5 slide plate portions 73 are set accordingly respectively.Can be bearing in slidably by guide rail 71 on the upright board 60A of supporting arm 60.
Driving cylinder 74 is located at respectively in above-mentioned each slide plate portion 73 and is driven each slide plate portion 73 respectively.Each driving cylinder 74 is connected with control part 63 (with reference to Fig. 8) respectively, and is controlled respectively by control part 63.And, utilize control part 63 only drive in each driving cylinder 74 with the corresponding driving cylinder 74 in position that produces unfavorable condition, carry out test for short-circuit.
In this case, also can play effect, the effect identical with above-mentioned embodiment and the 1st variation.In addition, in this variation,, therefore, can promptly check operation owing to utilize each driving cylinder 74 that each short circuit member 33 is contacted with terminal 5C respectively.
Another variation
Testing fixture 1 with probe unit 11 of above-mentioned embodiment is not limited to above-mentioned testing fixture 1, and the utility model can be applicable to all testing fixtures that probe unit 11 can be set.

Claims (9)

1. a probe unit is characterized in that, this probe unit comprises:
Probe member, its by make a plurality of probes respectively be located at a plurality of terminals of checking on the object panel and contact and light inspection;
Short-circuiting means, it is lighted in that above-mentioned each probe is contacted with above-mentioned each terminal respectively and makes each short-circuit of terminals when checking,
Above-mentioned short-circuiting means comprises: the short circuit member, and itself and above-mentioned each terminal are oppositely arranged, and contact simultaneously with above-mentioned each terminal and make all short-circuits of terminals; Pressing mechanism, it is at this short circuit member of the state lower support that is supported in above-mentioned probe member side and this short circuit member is contacted with above-mentioned each terminal.
2. probe unit according to claim 1 is characterized in that,
Above-mentioned short circuit member by a plurality of terminal integral body that cover above-mentioned inspection object panel, and constitute with the contacted conducting rubber of a plurality of terminals of above-mentioned inspection object panel simultaneously.
3. probe unit according to claim 1 is characterized in that,
Above-mentioned pressing mechanism comprises slide plate portion and mobile support, and it is moving that sliding in state of above-mentioned short circuit member relatively supported at the terminal that makes above-mentioned short circuit member and above-mentioned inspection object panel by this slide plate portion, and makes the above-mentioned short circuit member can be with respect to above-mentioned terminal loading and unloading; This mobile support makes this slide plate portion support this slide plate portion movably between position of readiness and location of short circuit.
4. probe unit according to claim 3 is characterized in that,
Above-mentioned mobile support comprises push rod and limiter, and this push rod presses on above-mentioned terminal by above-mentioned slide plate portion with above-mentioned short circuit member; This limiter is bearing in this push rod the position of readiness and the location of short circuit of above-mentioned slide plate portion.
5. probe unit according to claim 3 is characterized in that,
Above-mentioned mobile support comprises driving cylinder and control part, and this driving cylinder presses on above-mentioned terminal by above-mentioned slide plate portion with above-mentioned short circuit member; This control part is controlled this driving cylinder and above-mentioned slide plate portion is moved between position of readiness and location of short circuit.
6. probe unit according to claim 5 is characterized in that,
This probe unit only is provided with 1 above-mentioned slide plate portion, and has a plurality of with configuration respectively corresponding branches of above-mentioned probe member, supports all short circuit members simultaneously,
1 above-mentioned driving cylinder only is set, drives above-mentioned slide plate portion and all short circuit members are moved simultaneously.
7. probe unit according to claim 5 is characterized in that,
With a plurality of above-mentioned probe member of configuration a plurality of above-mentioned slide plate portion is set accordingly respectively,
Above-mentioned driving cylinder is located in the above-mentioned a plurality of slide plate portion respectively and is driven each slide plate portion respectively, only drive in each driving cylinder with the corresponding driving cylinder in position that produces unfavorable condition.
8. probe unit according to claim 1 is characterized in that,
This probe unit also comprises the rotating mechanism that above-mentioned pressing mechanism can be bearing in rotationally above-mentioned probe member side.
9. testing fixture, it is used for checking the object panel, it is characterized in that,
This testing fixture comprises: panel configuration portion, and it is used for should checking that the object panel takes out of to the outside after the inspection object panel inspection of inserting from the outside is finished; Measurement section, it is used to support and check the inspection object panel of taking over from this panel configuration portion,
Each described probe unit is as the probe unit of above-mentioned measurement section in the use claim 1~8.
CN2009202196374U 2008-11-26 2009-10-30 Probe unit and checking device Expired - Lifetime CN201535789U (en)

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CN105976742A (en) * 2015-03-13 2016-09-28 卢肯科技公司 Push structure and auto probe inspection apparatus using the same

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KR20100059672A (en) 2010-06-04

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