201006566 六、發明說明： 【發明所屬之技術領域】 本發明係有關在塗佈對象物上塗佈糊料的糊料塗佈裝置及糊料塗佈方 法。 【先前技術】 ❹ ❹ 糊料塗佈裝置用於製造液晶顯示面板等的各種裝置。該糊料塗佈裝置 具有在塗佈對象物上吐出糊料後塗佈的塗佈頭，一邊移動該塗佈頭一邊在 塗佈對象物上塗佈糊料，在塗佈對象物上形成規㈣糊料圖案（例如參照 專利文獻1)。特別是在液晶顯示面板的製造中，為了貼合2張基板，糊& 塗佈裝置麵贿解具有密雛和接紐_料，在 基板上包圍液晶顯示面板的顯示區域。 伸τ泵物的 近幾年，液晶顯示面板的面板尺核行動電料行動収的小 =電視等大型面板’種類很多。並且，面板價格也降低，對提高面板生產 ^的要求也贿更祕。通常，為了生產必需量的必需面板進行從 多圖案配置。這時，在裝置上安裝與面板的取圖案 數量的塗佈頭，出示描畫條件後進行描畫，在改變面板尺寸和取圖 ’ ir齡透過絲或拆除塗_來增減塗佈糖，再次出示描 畫條件。通常，因該工程切換生產會中斷。 [專利文獻1]日本特開平9-323056號公報 但是，在習知的糊料塗佈裝置中，改變面板尺寸及取圖案數 分==裝==描畫條件’所以工程切換時間變為從幾十 但難以確保各機器的安裝空間，同時裝置價格也會上升。 等 【發明内容】 本發明是歷上制題而㈣的，其目的在於提供_抑制機器追加 201006566 及價格上升、同時縮短工程切換時間來提高生產性的糊料塗佈裝置及糊料 塗佈方法。 本發明的實施方式所涉及的第1特徵在於，糊料塗佈裝置備有：複數 個塗佈頭，其分別進行在塗佈對象物上吐出糊料後塗佈的塗佈動作及用於 維持塗佈性能的維持動作；以及控制部，其對複數個塗佈頭中的塗佈執行 對象的塗佈頭執行塗佈動作，對塗佈執行對象的塗佈頭執行維持動作，而 且在對塗佈執行對象的塗佈頭執行維持動作時，也對使複數個塗佈頭中的 非塗佈執行對象的塗佈頭執行維持動作。 本發明的實施方式所涉及的第2特徵在於，糊料塗佈方法具有：對分 別進行在塗佈對象物上吐出糊料後塗佈的塗佈動作及用於維持塗佈性能的 © 維持動作的複數個塗佈頭中的塗佈執行對象的塗佈頭執行塗佈動作的步 驟；對塗佈執行對象的塗佈頭執行維持動作的步驟；以及在對塗佈執行對 象的塗佈頭執行維持動作時，也對複數個塗佈頭中的非塗佈執行對象的塗 佈頭執行維持動作的步驟。 【實施方式】 下面參照附圖來說明本發明的一種實施方式。 如圖1所示’本發明實施方式涉及的糊料塗佈裝置1，具有：以水平狀 態（圖1中沿X軸方向及與其垂直的Y軸方向的狀態）載置作為塗佈對象 參 物的基板K的基板載物台2 ;在該基板載物台2上的基板κ上分別塗佈密 封劑等有密封性及接著性的糊料的複數個塗佈頭3A、3B ;在X軸方向（圖 1中）可移動地支撐這些塗佈頭3A、3B並使之沿X軸方向移動的χ軸移 動機構4 ;藉由該X軸移動機構4來支撐各塗佈頭3A、3B的支撐構件5 ; 在Y軸方向（圖1中）可移動地支撐該支援構件5並使之沿γ軸方向移動 的一對Y軸移動機構6A、6B;支撐基板載物台2和一對γ轴移動機構6a、 6B等的台座7 ;以及控制各部的控制部8。 基板載物台2是固定在台座7上面的所設置的載置台。該基板載物台2 上，在前後（Y軸方向）上2個載置面形成相同高度，内側的載置面上載 置有製造用的基板K ’前側的載置面上載置有作為捨棄塗佈用塗佈對象物 的捨棄畫佈基板Ka，製造用的基板K及捨棄塗佈基板{^係使用玻璃基板 201006566 ^。一基板載物台2備有吸附製造用基板κ及捨棄塗佈^^的吸附機構(未 圖不），由該吸附機構，將基板K及捨棄塗佈基板Ka固定在上面的載置面 上並保持之。並且’作為吸附機構，例如使用真空吸附麟等。 心ί塗佈頭3A、3B分別具有：容納糊料的注射筒等之容納筒3a ;與該 、吐出糊料的喷嘴3b。這些塗佈頭3A、3B藉由氣體供給管 納^ ’向乳供給部（均未圖示）連接。各塗佈頭3A、3B分別由供給到容 納筒，内的氣體，從対3b t"該容納筒3a内部的糊料。 4 I· 佈頭3A 3B藉由YZ轴移動機構3C分別設置在X轴移動機構 構，並且是在垂直於水平面的z軸方向(圖1中)，亦即是對 向使塗佈頭3A、3B接/離(接近分離)的接/離方向移動的移動 等。且’ YZ祕動機構3()係使闕如用職珠螺桿的進給螺桿機構 κ ^ ^ 與押制心㈣、“ 移°十等之距離測量器3d。該距離測量器3d 方向可移動地支禮2獅該χ軸移賴構4是在X軸 ❹ 即π支撞Μ ί 使這些塗佈頭3Α、3Β沿X軸方向、 Ρ。支撐構件5移動的移動機構。並且 線性馬達的線性5遠編：：5 X軸移動機構4使用例如使用了 ㈣2馬達機構使了滾珠螺桿魏給螺桿機構等。 嗲支樓5是藉由Χ轴移動機構4支撐2個塗佈頭3Α,的柱狀鍾。 謝向（γ財向）交術向、㈣直Ζ 於美例如分別形成為立方體形狀。並且，支撐構件5平行 6Β^ 台2的載置面設置。如此的支撐構件5由一對Υ轴移動機構6Α、 ° 袖方向移動’將各塗佈頭3Α、3Β姑，斜―甘> 的位置上。 ㈣3Α 3Β放在對者基板載物台2的載置面 對Υ軸移動機構6Α、6Β分別設署力成7 ^ 載物台2。Υ軸移動機構6Α具有 ^ ’從兩側夾著基板 和在Υ轴方向延伸的導轨C耒圖千、H支標構件5端部的支推台知 •敗伸的導軌（未圖不）等。支撐台如 5 201006566 =1 同樣’ γ轴移動機構6B也具有固定並載置支揮構件5端部的支援台 ^向Y軸方向延伸的導軌（未圖示）等。支撐台6b亦沿著導執可在γ 赵古《I上移動。也就是說，"'對γ軸移動機構6Α、6Β是各自協調、向Υ =向:移動地支撐支撑構件5，並沿γ軸方向移動該支樓構件5的移動 且’一對γ轴移動機構6Α、6Β使用例如使用線性馬達的線性馬 運機構和使用滾珠螺桿的進給螺桿機構等。[Technical Field] The present invention relates to a paste application device and a paste application method for applying a paste on an object to be coated. [Prior Art] The ❹ 糊 paste coating device is used for manufacturing various devices such as liquid crystal display panels. The paste application device has a coating head which is applied after the paste is discharged onto the object to be coated, and the paste is applied to the object to be coated while moving the coating head to form a rule on the object to be coated. (4) Paste pattern (for example, refer to Patent Document 1). In particular, in the manufacture of a liquid crystal display panel, in order to bond two substrates, the paste & coating apparatus has a cover and a contact, and surrounds the display area of the liquid crystal display panel on the substrate. In recent years, the panel nucleus of the liquid crystal display panel has a small mobile action device = a large panel such as a TV. Moreover, the price of the panel is also lowered, and the requirement for improving the production of the panel is also more secret. Usually, the multi-pattern configuration is performed in order to produce the necessary amount of necessary panels. At this time, the coating head with the number of patterns taken on the panel is mounted on the device, the drawing conditions are presented, and the drawing is performed. The panel size is changed and the drawing is taken, the er age is passed through the wire or the coating is removed to increase or decrease the coating sugar, and the drawing is again presented. condition. Usually, production switching will be interrupted due to the project. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 9-323056. However, in the conventional paste application device, the panel size and the pattern number are changed ==installation==drawing condition', so the engineering switching time becomes a few Ten, it is difficult to ensure the installation space of each machine, and the price of the device will also rise. [Description of the Invention] The present invention has been made in the prior art (4), and its object is to provide a paste coating device and a paste coating method which are capable of increasing the productivity by increasing the 2010-06566 and increasing the price while shortening the engineering switching time. . According to a first aspect of the present invention, a paste application device includes a plurality of coating heads that perform a coating operation and a maintenance for applying a paste after applying a paste to an object to be coated. And a control unit that performs a coating operation on a coating head of a coating execution target among a plurality of coating heads, performs a maintenance operation on the coating head of the coating execution target, and performs a coating operation on the coating head When the coating head of the cloth execution target performs the holding operation, the coating head of the non-coating execution target among the plurality of coating heads is also subjected to the maintaining operation. According to a second aspect of the present invention, the paste application method includes a coating operation for applying a paste onto the object to be coated, and a © maintaining operation for maintaining the coating performance. a step of performing a coating operation by a coating head of a coating execution target in a plurality of coating heads; a step of performing a maintenance operation on a coating head of a coating execution target; and performing a coating head on a coating execution target In the case of maintaining the operation, the step of maintaining the operation of the coating head of the non-coating execution target among the plurality of coating heads is also performed. [Embodiment] An embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1 , the paste application device 1 according to the embodiment of the present invention has a substrate to be coated as a coating target in a horizontal state (a state along the X-axis direction and a Y-axis direction perpendicular thereto in FIG. 1 ). On the substrate stage 2 of the substrate K, a plurality of coating heads 3A and 3B each having a sealing property such as a sealant and a sealant are applied to the substrate κ on the substrate stage 2; a direction (in FIG. 1) that movably supports the coating heads 3A, 3B and moves them in the X-axis direction; the X-axis moving mechanism 4 supports the respective coating heads 3A, 3B. Support member 5; a pair of Y-axis moving mechanisms 6A, 6B movably supporting the supporting member 5 in the Y-axis direction (in FIG. 1) and moving in the γ-axis direction; supporting substrate stage 2 and a pair of γ A pedestal 7 of the shaft moving mechanisms 6a, 6B, and the like; and a control unit 8 that controls each unit. The substrate stage 2 is an installed stage that is fixed to the upper surface of the pedestal 7. In the substrate stage 2, the two mounting surfaces are formed at the same height in the front and rear (Y-axis direction), and the mounting surface on the front side of the mounting substrate K on the inner mounting surface is placed on the mounting surface on the front side. The cloth substrate Ka for the object to be coated is discarded, the substrate K for production, and the coated substrate are discarded. The glass substrate 201006566 is used. The substrate stage 2 is provided with an adsorption mechanism (not shown) for adsorbing the substrate κ for application and the coating, and the substrate K and the coated substrate Ka are fixed on the upper surface by the adsorption mechanism. And keep it. Further, as the adsorption mechanism, for example, vacuum adsorption Lin or the like is used. Each of the core coating heads 3A and 3B has a housing tube 3a for holding a syringe or the like, and a nozzle 3b for discharging the paste. These coating heads 3A and 3B are connected to a milk supply unit (none of which is shown) by a gas supply tube. Each of the coating heads 3A, 3B is supplied with a gas supplied from the accommodating cylinder, and the rinsing of the inside of the accommodating cylinder 3a. 4 I· cloth heads 3A 3B are respectively disposed in the X-axis moving mechanism by the YZ-axis moving mechanism 3C, and are in the z-axis direction perpendicular to the horizontal plane (in FIG. 1), that is, the coating heads 3A, 3B are opposed to each other. Pick-up/off (close to separation) movement in the pick-up/off direction, etc. And 'YZ secret mechanism 3 () is such as the feed screw mechanism κ ^ ^ with the bead screw and the core (4), "shifting distance 10 measuring device 3d. The distance measuring device 3d direction movable branch The 2 lion's axis shifting structure 4 is a moving mechanism that moves the coating heads 3Α, 3Β along the X-axis direction, the support member 5 in the X-axis, that is, the π-branch 。 ί, and the linearity of the linear motor 5 Far-end:: 5 The X-axis moving mechanism 4 uses, for example, a (four) 2 motor mechanism to make the ball screw Wei screw mechanism, etc. The cymbal 5 is a columnar shape that supports the two coating heads 3 by the cymbal moving mechanism 4. The steering direction is formed in a cubic shape, for example, and the supporting member 5 is disposed in parallel with the mounting surface of the table 2. Such a supporting member 5 is provided by a pair of cymbals. The shaft moving mechanism 6Α, ° is moved in the sleeve direction to position the respective coating heads 3Α, 3Β, 斜“甘>. (4) 3Α 3Β placed on the opposite substrate stage 2 to face the Υ axis moving mechanism 6Α , 6Β separately set up the 7^ stage 2. The Υ axis moving mechanism 6Α has ^ 'clip the substrate from both sides and the Υ axis To the extended guide rail C, the guide rail of the end of the H-branch member 5, the guide rail of the support section (not shown), etc. The support table is 5 201006566 =1 The same 'the γ-axis movement mechanism 6B also has A support rail (not shown) extending in the Y-axis direction of the support table at the end of the support member 5 is fixed and placed, and the support table 6b is also movable along the guide in the γ- Zhao "I. " 'The γ-axis moving mechanisms 6Α, 6Β are respectively coordinated, Υ=direction: movably supporting the support member 5, and moving the movement of the branch member 5 in the γ-axis direction and 'a pair of γ-axis moving mechanisms 6Α, 6Β, for example, a linear motor transport mechanism using a linear motor and a feed screw mechanism using a ball screw, and the like.
❹ ^撐台6a上設置有接受塗佈頭3Α吐出的糊料的接受構件9a和用於清 於成佈頭3A的清掃構件伽。這些接受構件9a及清掃構件10a_設置在 :各塗佈頭3A、3B移動方向的χ轴方向上。同樣，支撐台你上設置有 =塗，頭3B吐出的糊料的接受構件％和用於清掃塗佈頭犯的清掃構件 。攻些接受構件9b及清掃構件1〇b排列設置在作為各塗佈頭3a、 移=方向的X轴方向上。各接受構件9a、％例如使用拖盤㈣)等器皿。又， 各清掃構件IGa、1Gb例如吸收除去殘留在喷嘴3b上的賊的吸收 件和擦栻該㈣的擦拭構件等（例如海雜或布狀魏構件和擦拭構件）。 台座7是設置在床面上、將基板載物台2和一董子γ轴移動機構6a '犯 支擇在距離床面規定高度位置上的台座。台座7的上面形成為平面該 台座7的上面載置有基板載物台2和一對γ軸移動機構6Α、6β等。 控制部8設置在台座7内，具有集中控制各部分的微型電腦、儲存關 於糊料塗佈的塗佈資訊和各難式料贿部（均未圖示）。输制部8上 連接^用於設定各種設定值等時由操作者輸入操作的輸入部(未圖示）。並且 塗佈貧訊包賴於規定的塗侧案（糊賴案）、描畫速度、糊料的塗 (吐出量）等的信息。 該控制部8根據塗佈資訊和各種程式，從各塗佈頭3A、3B中選擇塗佈 執行對象的_頭’鋪X軸移動機構4和__對γ軸移動機構6A 6b等， 將選擇的塗佈頭3A、3B的嘴嘴3b和基板載物台2上的製造用^^ κ沿平 行該於基板Κ的表面方向械移動’絲造用基板κ上向規定塗佈圖案塗 佈糊料。這時，㈣部8根據由距離測量器3d測量關隔距離進行回^控 制’且將基板K表面與喷嘴3b的間隙保持為規定間隙（間隙控制）。另外， 控制部8分別調整供給到各塗佈頭3A、3B的各容納筒3a的氣體壓力，吐 出糊料時控制施加於糊料上的吐出壓力（吐出量控制）。 201006566 這裡，控制部8根據取圖案赵 的塗佈頭（塗佈所使用的塗佈頭）、佈頭3A、3B中選擇塗佈執行對象 從各塗佈頭3A、3B t選擇塗佈頭3A —取圖案數設定為1時，控制部8 的塗佈頭Μ執行塗佈動作。由^^佈執行對象的塗佈頭，對選擇 佈框狀的！個糊料圖案P1。該^圖2,所示’在製造用的基板Κ上塗 的塗佈頭）的塗佈頭沌在不面對製造 ^布執订對象（塗佈未使用 在製^基板K鱗次錢時進行，重複所蚊的塗佈動作 ❹ 象的塗佈頭，使選擇的各塗佈頭 刪⑶獅嶋作St 度和塗佈量等的描畫條件）β τμ崎〔出材田畫速 勃的工程切換的製造步驟中，控制部8以規定的時間對塗佈 執订對象的塗佈頭（取圖案數為】時對塗佈頭3Α，取圖案數為 參 行用於維持塗佈性能的維持動作。這時'，控制部8也對各 的非塗佈執行對象的塗佈頭（取®案數為1時也對塗佈頭 !!： ° ^ ^ 3Α'3Β«« 不糊料後塗佈的塗佈動作，同時與取圖案數«，即與是 ==ΐ對象的塗顧無關，分別同時進行維持動作。由此，能夠常 吊良好地維持所有塗佈頭3Α、3Β的塗佈性能。 錯作包括：如圖4所示，向捨棄塗佈基板以吐出糊料後塗饰的捨 ^塗^動作，如圖5所示，向接受構件9a、％吐出糊料的捨棄塗佈吐出動 二’如圖6所示，使嗔嘴3b與清掃構件收、⑽接觸的清掃動作及將糊 枓引入碩内部的吸回動作（suekbaek，吸引動作）等。並且吸回動作在塗 佈動作_進行’在捨棄塗佈動作及捨棄塗佈吐出動作後也進行。另外，捨 棄塗佈基板Ka上塗佈的糊料由檢查用相機（例如CCD)等拍攝，從該圖 像中求出吐出量，判斷是否為規^量等。檢查用相機可拍攝捨棄塗佈^板 7 201006566The yoke support 6a is provided with a receiving member 9a for receiving the paste discharged from the coating head 3, and a cleaning member for clearing the sheet 3A. The receiving member 9a and the cleaning member 10a_ are provided in the z-axis direction in which the respective coating heads 3A and 3B move. Similarly, the support table is provided with a coating member, a receiving member % of the paste discharged from the head 3B, and a cleaning member for cleaning the coating head. The attack receiving member 9b and the cleaning member 1b are arranged in the X-axis direction as the respective coating heads 3a and the shift direction. For each of the receiving members 9a and %, for example, a tray (four) is used. Further, each of the cleaning members IGa and 1Gb absorbs, for example, the absorbent member of the thief remaining on the nozzle 3b and the wiping member or the like (for example, a sea-like or cloth-like member and a wiping member). The pedestal 7 is a pedestal that is placed on the bed surface and that is detached from the substrate stage 2 and a Dongzi γ-axis moving mechanism 6a' at a predetermined height from the bed surface. The upper surface of the pedestal 7 is formed in a plane. The substrate stage 2 and the pair of γ-axis moving mechanisms 6A, 6β and the like are placed on the upper surface of the pedestal 7. The control unit 8 is provided in the pedestal 7, and has a microcomputer that centrally controls each part, stores coating information on the application of the paste, and each of the difficult materials (not shown). The input unit 8 is connected to an input unit (not shown) that is input by an operator when setting various setting values and the like. And the information on the coating of the poor package depends on the prescribed side of the coating (the paste case), the drawing speed, and the coating (discharge amount) of the paste. The control unit 8 selects the _ head's X-axis moving mechanism 4 and the __ pair γ-axis moving mechanism 6A 6b, which are to be applied, from the respective coating heads 3A and 3B, based on the coating information and various programs, and selects The nozzles 3b of the coating heads 3A and 3B and the manufacturing yokes on the substrate stage 2 are applied in parallel to the surface of the substrate '. material. At this time, the (four) portion 8 performs the control of the separation distance by the distance measuring device 3d and maintains the gap between the surface of the substrate K and the nozzle 3b at a predetermined gap (gap control). Moreover, the control unit 8 adjusts the gas pressure supplied to each of the storage tubes 3a of the respective coating heads 3A and 3B, and controls the discharge pressure (discharge amount control) applied to the paste when the paste is discharged. 201006566 Here, the control unit 8 selects the coating head 3A from each of the coating heads 3A, 3B t by selecting the coating execution target from the coating head (coating head used for coating) and the cloth heads 3A and 3B in which the pattern Zhao is taken. When the number of patterns to be taken is set to 1, the coating head of the control unit 8 performs a coating operation. The coating head of the object is executed by ^^ cloth, and the selection is framed! Paste pattern P1. In the second embodiment, the coating head of the coating head coated on the substrate for manufacturing is not faced with the object to be manufactured (the coating is not used when the substrate is used). The coating head of the coating action of the mosquitoes is repeated, and the selected coating heads are deleted. (3) The lion's eagle is used as the drawing condition of the St. and the coating amount.) β τμ崎 [The project of the field painting In the manufacturing step of the switching, the control unit 8 applies the coating head to be coated (the number of patterns is taken) to the coating head 3 for a predetermined period of time, and takes the number of patterns as a reference for maintaining the coating performance. In this case, the control unit 8 also applies the coating head to each of the non-coating execution targets (when the number of cases is 1 is also applied to the coating head!!: ° ^ ^ 3Α'3Β«« At the same time, the coating operation of the cloth is performed simultaneously with the application of the pattern number «, that is, the application of the == ΐ object, and the maintenance operation is simultaneously performed. Thereby, the coating of all the coating heads 3Α and 3Β can be maintained normally. Performance: Mistakes include: as shown in Figure 4, the coating substrate is discarded to smear the paste after the coating, as shown in Figure 5, to accept the structure 9a, %% of the discharge of the paste is discharged, and the discharge operation is performed as shown in Fig. 6. The cleaning operation of bringing the mouthpiece 3b into contact with the cleaning member and (10) and the suction operation for introducing the paste into the inside of the inside (suekbaek, suction operation) And the suction operation is also performed after the coating operation _ performing 'discarding operation and discarding the coating discharge operation. Further, the paste applied on the coated substrate Ka is discarded by the inspection camera (for example, CCD). When shooting, the amount of discharge is obtained from the image, and it is judged whether it is a gauge or the like. The camera for inspection can be used to discard the coating plate 7 201006566
Ka上的糊料，固定並設置在如γζ轴移動機構&上。 通常’糊·減特性隨著咖經過讀生變化 吐出糊料、在傳送的製造用基板〖上依次進行塗 從噴0^中 經過很長時間等情況’糊料有時會固化並堵在喷嘴兆二法m 料軟化，吐出量則超過規定量。為了避免 出反之糊 維持動作。因此，作為維持動作，進行捨棄“動行 防止因糊料固化和糊料軟化導朗塗佈性能降低。並且，維持動’ 因糊料固化職的塗雜_低。糾，_ 4==^止 ❹ 且、轉動作係經由進行吸回動作，能夠防止糊料滴垂和ΐίΓ的= 圖宰施例中’塗佈動作是指進行在製造嫩κ上塗佈矩形 根縣要在細細獅擬鄉_« 捨棄塗佈動作、捨棄塗佈吐出動作、清掃動作及吸回動^等。订的达 下面說明上述糊料塗佈裝置丨所進行的製造動作。糊料塗佈裝置 控制部8根據各種程式執行製造處理。 ❹ 产知產Γ前’崎作者等設轉向糊料塗佈裝置1輸入描畫速 “ ϋ量）等各種設定值。這些設定值容納在控制部8的儲存 部内並且’各種没定值也可以事先儲存在儲存部中這時，其等設 。嶋8根據各種細娜部分，在基板載物 = 規定描畫鋪。奴者確認（檢幻基板〖上 f t糊觸案’再次調整各種設定值。重錢次上述調整動作後進行描 畫條件提出（塗佈資訊的設定）。 出示描畫條件結束制始生產時，如圖7所示，鋪部8判斷製造用 2 κ的交換是否結束（步驟S1)，接著判斷是碰過規定時間（步驟2)， ，巧斷是否塗佈規定數量的製造用基板κ (步驟奶，將處理返回步驟 。=’例如製造用基板κ的交換結束是根據操作者是否按下交換結束 按紐（輸人部）和檢測基板κ的載置結束的感測器的關等來判斷。 步驟S1中’用於出示條件的基板從基板載物台2上運出，基板載物台 8 201006566 2上搬入製造用基板κ，在判斷出製造用基板〖的交換結束後（步驟si的 YES)，首先使各塗佈頭3A、3B執行清掃動作（步驟S4)，接著使各塗佈 頭3A、3B執行检棄塗佈動作（步驟⑻，然後使各塗佈頭3八、犯中的塗 =執行對象的塗佈頭執行塗佈動作（步驟s6)，將處理返回步驟這裏， 清掃動作和捨棄塗佈動作係在每次交換製造用基板£時設定，但並不限定 於此，例如也可以在每個規定時間或每個規定數量時設定。 步驟S2中，判斷出經過規定時間後（步驟S2的YES)，使各塗佈頭 3A、3B執行捨棄塗佈動作（步驟幻），將處理返回步驟si。這裡，規定時 ο 間例如為3〇秒’該規定時間設定為在下個基板κ未搬來時進行检棄塗佈動 作。因此’規定時間的經過從塗佈後的基板κ的拆卸 步驟S3中’判斷出塗佈了規定數量的製造用基板〖時（步驟十^的 ’使各塗佈頭3A、3B執行捨棄塗佈吐出動作（步驟S8)，將處理返 蚊她_ %張。捨棄塗触㈣倾定為每規定 進行。 不限定於此，例如也可以設定為每規定時間（例如3〇秒） 行捨棄塗佈時’ _部8由一對γ軸移動機構6八、紐使支撑構件$ =軸方向移動’由X轴移動機構4將各塗佈頭3A、3b分別向二 ❹ 案，所以能夠使用該糊料圖案進行糊料檢查，並且吐 科圖 狀態的糊料後除去之，所以在待射的^或軟化 夠防止掏料陶補軟化所導朗編頭中，也能 另外，進行捨棄塗佈吐出時，控制部8 从、犯分别向Χ轴方向移動，使^^構4使各塗佈頭 對著接受構件％。然後，與塗佈執行對象受構件办’塗佈頭3Β _塗佈頭Μ、3B的各喷嘴3b分別吐_猶：象二= 9 201006566 3B㈣_梅件9b上(參 -導致的塗佈性能降Γ 出後除去’所以能夠防止糊料固化 另外’進行清掃（喷嘴清潔）時，與 :關：部8由X轴移動機構4使各_ Μ、= Γ抽= 1〇；— Ζ轴移動機構3C使各塗佈頭3Α、3Β分別向Ζ為太*她 =:::r構件ioa接觸，使塗佈二=: H 由此’各喷嘴3b頂端上黏附且殘留的多餘糊 ❹起的塗佈性能H 以能夠防增外上因黏附的糊料所引 ’進行塗佈時，控制部8從各塗佈頭3Α、3Β μ擇出 =塗佈頭，由-對Υ軸移動機構6Α、6Β將支揮構件5向對 對象機構4將塗佈執行對象的塗佈頭向χ轴方向移動，使塗佈執行 對著基板載物台2 Λ的製造用基板κ的塗佈開始位置哪’ =部8根據作為描畫條件的塗佈資訊（吐_力、描畫速度及聰^ -邊使塗佈執行對象的_喷嘴3b吐出糊 =:使支撲構件5向γ袖方向移動'由X轴上構== χ㈣向移動，在基板餘台2上的製造岐板κ表面上 φ塗佈糊料，形成規定框狀的糊料圖案。 …在廷裡’取圖案數為i時’塗佈頭3Α係作為塗佈執行對象的塗佈頭進 行塗佈動作（參照圖2)。這時，非塗佈執行對象的塗佈頭犯在非對著製 造用基板K的待機位置（例如塗佈頭3B與接受構件％或清掃構件⑺匕相 對的位置）上待機（參照圖1)。而取圖案數為2時，各塗佈頭3八、係 作為塗佈執行對象的塗佈頭進行塗佈動作（參照圖3)。並且，吸回動作在 塗佈動作中進行，在捨棄塗佈動作及捨棄塗佈吐出動作後也進行。由該吸 回動作’能夠防止糊料吊垂和喷嘴3b的污染。 以 在上述製造步驟中，各塗佈頭3A、3B如上述，在規定的時間内與取圖 案數無關，即與塗佈執行對象或非塗佈執行對象無關，進行維持動作（捨 棄塗佈動作、捨棄塗佈吐出動作、清掃動作及吸回動作等）。因此，即使在 201006566 取圖案數為1時，不僅是作為塗佈執行對象的塗佈頭的塗佈頭3A，加= 塗佈頭3A ’作為非塗佈執行對象的塗佈頭的塗佈頭3B也進行 ^該 即，各塗佈頭3A、3B與是否為塗佈執行對象無關，同時進行維持動作。。 然後工程切換時，即使在面板尺寸改變、取圖案數設定為2時，予一 次作為非塗佈執行對象的塗佈頭的塗佈頭3B的塗佈性能與塗佈執行=· 的塗佈頭3八一樣良好地維持，所以這次能夠直接將塗佈 、 行對象的塗佈頭來使用。另外，各塗佈賴、3B中的描畫條件 前已出不—次，所以取圖案數變更為2時亦不需再次出示。因此 幵° ❹ 板尺寸和取圖案數改變，也不需要像以往那樣進行塗佈頭的安装 並且不需^次在改變其料出娜畫餅，所以能觸社程切’The paste on Ka is fixed and placed on a moving mechanism such as a gamma axis. In general, the paste-reducing characteristic is such that when the coffee is changed by the reading of the coffee, the paste is discharged, and the substrate for the transfer is sequentially applied, and the film is ejected from the spray for a long time. The paste sometimes solidifies and is blocked in the nozzle. The mega 2 method m softens and the amount of spit exceeds the specified amount. In order to avoid the opposite, maintain the action. Therefore, as a maintenance operation, it is discarded to prevent the paste from solidifying and the paste softening and the coating performance from being lowered. Moreover, the maintenance of the paste is caused by the paste curing. _ 4==^止 且 、 、 、 、 、 、 、 、 、 、 转 经由 经由 经由 经由 经由 经由 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = =拟乡_« Abandoning the coating operation, discarding the coating discharge operation, the cleaning operation, and the suction movement, etc. The following describes the manufacturing operation performed by the paste application device described below. The paste application device control unit 8 The manufacturing process is executed in accordance with various programs. Γ Before the production, the various types of setting values such as the drawing speed "quantity" are input to the turning paste application device. These setting values are accommodated in the storage portion of the control unit 8 and the various indefinite values may be stored in the storage unit in advance, and the like.嶋8 According to the various thin parts, the substrate is loaded = the specified drawing shop. The slave confirms (the illusion substrate 〖Up ft paste case' adjusts the various settings again. After the above adjustment action, the drawing conditions are raised (setting of the coating information). When the drawing condition is finished, the production is started, as shown in the figure. As shown in Fig. 7, the tiling unit 8 determines whether or not the exchange of the manufacturing BT is completed (step S1), and then determines whether or not the predetermined time has elapsed (step 2), and whether or not a predetermined number of manufacturing substrates κ are applied (step milk, In the process of returning the processing, for example, the end of the exchange of the manufacturing substrate κ is determined based on whether or not the operator presses the exchange end button (input unit) and the sensor of the detection substrate κ is completed. In S1, the substrate for the display condition is transported from the substrate stage 2, and the substrate AK is loaded onto the substrate stage 8 201006566 2, and after the exchange of the manufacturing substrate is judged to be completed (YES in step si) First, each of the coating heads 3A and 3B is subjected to a cleaning operation (step S4), and then each of the coating heads 3A and 3B is subjected to a coating and applying operation (step (8), and then each of the coating heads 3 and 8 is applied. = execution of the coating head execution of the object In the cloth operation (step s6), the process returns to the step. The cleaning operation and the dispensing operation are set each time the manufacturing substrate is exchanged. However, the present invention is not limited thereto. For example, each predetermined time or each may be used. When it is determined that the predetermined number of times has elapsed, it is determined that the predetermined time has elapsed (YES in step S2), and each of the coating heads 3A and 3B is subjected to the dispensing operation (step magic), and the processing returns to the step si. Here, the predetermined time For example, the predetermined time is set to be the time when the next substrate κ is not moved, and the coating operation is performed. Therefore, the passage of the predetermined time is judged from the detaching step S3 of the coated substrate κ. When a predetermined number of substrates for manufacturing are laid out (steps of step 10), each of the coating heads 3A and 3B is subjected to a dispensing and discharging operation (step S8), and the treatment is performed to return the mosquitoes _% sheets. Discarding the coating (four) For each of the regulations, the present invention is not limited thereto, and for example, it may be set to discard the coating every predetermined time (for example, 3 sec.). The _ portion 8 is separated by a pair of γ-axis moving mechanisms. Directional movement 'by X-axis moving mechanism 4 Since each of the coating heads 3A and 3b is in the second case, the paste pattern can be used for the paste inspection, and the paste in the state of the retort can be removed, so that the material to be shot is softened or prevented. In the softening of the splicing head, the control unit 8 may be moved in the direction of the yaw axis, and the coating heads may be placed in the receiving member %. And the coating execution target is subjected to the 'coating head 3 Β _ coating head Μ, 3B each nozzle 3b spit _ _: 2 = 9 201006566 3B (four) _ plum 9b (parameter-induced coating performance drop After the removal, it is removed, so that the paste can be prevented from solidifying and the cleaning is performed (nozzle cleaning), and the:: 8 portion is caused by the X-axis moving mechanism 4 to make each _ Μ, = Γ = = 1 〇; - Ζ axis moving mechanism 3C, each of the coating heads 3Α, 3Β is brought into contact with the *为太*她=:::r member ioa, so that the coating two =: H is coated with the excess paste adhered to the top end of each nozzle 3b and remaining. When the cloth performance H is applied to prevent the coating from being adhered by the adhesion, the control unit 8 selects from the respective coating heads 3, 3, and In the cloth head, the branching member 5 moves the coating head of the application target object in the z-axis direction to the target mechanism 4 by the counter-axis moving mechanism 6Α, 6Β, and the coating is performed against the substrate stage 2 The coating start position of the manufacturing substrate κ is determined by the coating information as the drawing conditions (sp_ force, drawing speed, and squeezing - the _nozzle 3b of the coating execution target is sprinkled =: The member 5 is moved in the γ-sleeve direction to move by the X-axis upper structure == χ (4), and the paste is applied to the surface of the yoke plate κ on the substrate table 2 to form a predetermined frame-shaped paste pattern. When the number of patterns is i, the coating head 3 is applied as a coating head to be applied to the coating (see Fig. 2). At this time, the coating head to be applied to the non-coating target is placed on standby position (e.g., the position where the coating head 3B is opposed to the receiving member % or the cleaning member (7) 非) (see Fig. 1). When the number of patterns is 2, each of the coating heads 3 is applied as a coating head to be applied to the coating (see Fig. 3). Further, the suction operation is performed during the coating operation, and is also performed after the coating operation is discarded and the coating discharge operation is discarded. By the suction operation ', the paste sag and the contamination of the nozzle 3b can be prevented. In the above-described manufacturing step, each of the coating heads 3A and 3B is subjected to the maintenance operation regardless of the number of the patterns to be taken, for example, regardless of the application target or the non-coating execution target, as described above. , and discard the coating discharge operation, the cleaning operation, and the suction operation. Therefore, even when the number of patterns taken in 201006566 is 1, not only the coating head 3A which is a coating head to be applied, but also the coating head of the coating head which is a non-coating execution target is added. 3B is also performed, that is, each of the coating heads 3A and 3B performs a maintenance operation regardless of whether or not it is a coating execution target. . At the time of the engineering switching, even when the panel size is changed and the number of patterns taken is set to 2, the coating performance of the coating head 3B which is the coating head of the non-coating execution target and the coating head of the coating execution =· Since it is maintained in the same manner as the three, it is possible to use the coating head of the coating and the object directly. In addition, since the drawing conditions in each of the coatings and 3B have not occurred before, the number of patterns is changed to two, and it is not necessary to display them again. Therefore, the size of the 幵° 和 plate and the number of patterns are changed, and it is not necessary to install the coating head as in the past, and it is not necessary to change the material to be painted, so it can be touched by the society.
間’可提高生產性。制是*需要下述縮短卫程切換咖的方法在 描畫條件之際的塗佈量調整時’增加測量塗佈_料_量的 Z 器來同時測量多麵_案，以及在進行連撕查時，增賴像處理裝 所以不需要確保各機器的安裝空間，並且_抑繼置價袼上升。 一如上述說明，根據本發明的實施方式，對各塗佈頭3A、犯 行對象的塗佈頭3A執行維持動作時，已對塗佈頭3A、3B中的非 ❹ 3B執行維持動作，由此，紅程切換之際改變面板尺寸及^ 圖案數時’别一次作為非塗佈執㈣象的塗_ 3Β的塗佈性能與塗佈執杆 對象的塗佈頭3Α-樣良好地維持，所以這次能夠直接將塗佈頭3β作 佈執行對象的塗佈頭來使用。由此，即使面板尺寸和取圖案數改變，^ 需要像以往那樣進行塗佈頭的安裝或拆卸，並且不需要每次在改變這 板尺和取Η案數改變）時出示描畫條件’所雄觸短工程切換時間， ，约提高生舰。並且不需要下述脑工购換時_方法：在出示 ^件之際的塗佈量調整時’增加塗佈量測量器來同時測量複數個糊料圖 til進行連接檢查時’增加圖像處理裝置，所以不需要確保各機器的 :裝工間’能狗抑制裝置價格上升。其結果，能夠抑制機器追加及價格上 升，並且能夠由縮短工程切換時間來提高生產性。 以往’取圖案數的變化差越大，卫程切換時_長（例如，與取圖案 ’變化差為4時’塗佈頭的安裝或拆卸時間及出示描 畫條件時間會變長，所以工程切換時間會變長），事先安裝與最大取圖案數 11 201006566 頭’即使塗純行對㈣塗顧數4比_馳數少， 述加上塗佈執域象的塗俩，若_執行職之外的_頭 象ί塗佈頭）也進行維持動作，塗佈執行對象之外的塗佈頭的塗 佈性此也和塗佈執行對象的塗佈頭一樣地維持之故 ==塗^行對象之外的塗細_直接作為塗伟二= 化差越大，以往的招能夠實現工程切換時間的縮短。特別是取圖案數變 升。由此，嶋概’咖爾_驗的效果會提 ❹ 另外’設置有支樓各塗佈頭3Α、3Β的支樓構件5、支援該支 的兩端部並移動支撐構件5的一對γ軸移動機構6Α、6β、沿支 Ϊ===軸移動機構4、可與支撐構件5共同移動、分別 t Si!接受構件如、外，使塗佈執行對㈣_ 及非塗佈執仃職_制分卿著各錢構件％、外，並 塗佈吐出動作，所以不需要設置將各接受構件9a、9b“到對 者塗佈頭的位置的移動機構，能夠共用將各塗佈頭3八、犯移動 動機構4，因此能夠抑制裝置的複雜化和裝置價格 麵及輕佈執行縣的塗麵/mi 構件10a、10b，使這些塗佈賴行清掃動作，所以 ❹ =、_輯著到塗佈頭的位置的移動機構，能夠共用將=構 置價i的移上動升的x軸移賴構4 夠更進—步抑難置的複雜化和裝 另外’因為待機位置上設置有接受構件知、％ 所以即使塗佈執行對象的塗佈頭在謝也能夠進行維 =在塗佈執行聽的塗俩在對基衫塗佈描畫___，由非塗佈 ^對象佈頭在每她過預先設定树間時執 捨棄塗佈吐出動作。 牧又傅1干ya叩π (其他實施方式） 有各1ΓΓ不限定於上述實施方式’只要在不脫離其宗旨之範圍内可以 12 201006566 例如’在上述實施方式中，支援構件5上分別設置二個塗佈頭3A、3B， 但並不限定於此，支援構件5上可以分別設置三個塗佈頭，其數量沒有限 定。 再者’在上述實施方式中設置了 一個支撐構件5，但並不限定於此，也 可以設置二個支撐構件5，其數量沒有限定。並且，二個支援構件5上· 也可以分別設定多個塗佈頭。 更且，在上述實施方式中，糊料係使用具有密封性及接著性的密封劑， 但並不是必須一定要有密封劑和接著性，可以使用僅有密封性或接著性之 其中一者的糊料等、和具有其他性質和狀態的糊料。 再加上，在上述實施方式中，將基板載物台2固定在台座7上移動 ❺各塗佈頭3A、3B及支撐構件5，在基板K表面上塗佈糊料，但並不限定於 此，也可以是將基板載物台2向Υ轴方向和X轴方向、θ方向（含χ轴及 Υ軸的平面中的轉動方向）等移動的結構，例如可以是將基板載物台2向 與支援構件5之移動方向（Υ軸方向）相同的方向移動的結構。這時，使 基板Κ和各塗佈頭3Α、3Β向Υ軸方向相對移動時，若使基板载物台2和 支撐構件5向互相相反的方向移動，則與僅移動支撐構件5的情況相比， 能夠使基板載物台2及支援構件5的移動速度減半。因此，基板載物台2 和支撐構件5的移動所伴隨的慣性力變小，所以能夠降低因基板載物:2 及支援構件5的加速或減速所導致的振動。其結果，能夠以所希望的形狀、 〇 峨好的精度塗佈沿Υ軸方向的糊料圖案的起點和終點的形狀以及塗佈方 向轉換的糊料圖案的角部形狀，且能夠製造品質良好的液晶顯示面板。 最後’在上述實施方式中’列舉了各種數值，而這些數值為例示，並 沒有限定。 [產業上的利用可能行] 以上說明了本發明的實施方式，但只是例示的具體例子，並沒有限定 本發明，各部分的具縣構等可以有適當變更。並且，本實财摘記載 的作用及效果只是列舉了本發明職生的最合適的作用和效果本發明的 作用和效果並沒雜定於本發_實财式中所記載_容。本發明例如 用於在塗佈對象物上塗佈糊料的糊料塗佈裝置及糊料塗佈方法等。 13 201006566 【圖式簡單說明】 圖1疋表4發明實施方式涉及_料塗佈裝 圖2是用於說明圖〗所示_料塗佈裝 4的立體圖’ 的模式圖； $觸《所進仃之取圖酬！時的塗佈 圖3是用於說明圖 的模式圖； 所示的糊料塗佈裝置所進行之取_數為2時的塗饰 圖4是用於說_丨所示_料塗佈裝置具有的塗佈頭所進行的捨棄塗佈 (waste coating)動作的模式圖；Between can improve productivity. The system is *The following method is required to shorten the servo switching coffee. When the coating amount is adjusted at the time of drawing conditions, the Z measuring the coating amount is increased to simultaneously measure the multi-faceted case, and the continuous tearing is performed. At the time of the addition, it is not necessary to ensure the installation space of each machine, and the price is increased. As described above, according to the embodiment of the present invention, when the application head 3A and the application head 3A of the target object are subjected to the maintenance operation, the maintenance operation is performed on the non-❹ 3B in the coating heads 3A and 3B. When changing the panel size and the number of patterns at the time of the red shift, the coating performance of the coating _ 3 作为 as the non-coating (four) image is maintained well, and the coating head of the coating target object is well maintained. This time, the coating head 3β can be directly used as a coating head to be subjected to cloth printing. Therefore, even if the panel size and the number of patterns are changed, it is necessary to install or disassemble the coating head as in the past, and it is not necessary to present the drawing conditions every time the board is changed and the number of cases is changed. Short-circuit engineering switching time, about to improve the ship. It is not necessary to purchase the following brains. _ Method: When the coating amount is adjusted at the time of presentation, 'increasing the coating amount measuring device to simultaneously measure a plurality of paste patterns til for connection inspection' The device does not need to ensure that the price of the dog restraint device increases for each machine: As a result, it is possible to suppress the addition of the machine and the price increase, and it is possible to improve the productivity by shortening the engineering switching time. In the past, the larger the difference in the number of patterns taken, the longer the guard switching time (for example, when the difference between the pattern and the pattern is changed to 4), the installation or disassembly time of the coating head and the time for drawing the drawing become longer, so the project switching The time will be longer), pre-installed and the maximum number of patterns taken 11 201006566 head 'even if the pure line pair (four) coated the number 4 ratio _ the number of the number is small, the application of the coated domain image, if _ executive position The outer _ head image ί coating head) also performs the holding operation, and the coating property of the coating head other than the application target is also maintained in the same manner as the coating head of the coating execution target == The coating outside the object _ directly as Tu Wei 2 = the greater the difference, the previous move can achieve the shortening of the project switching time. In particular, the number of patterns is increased. Therefore, the effect of the "Gal" test will be improved. In addition, the branch member 5 provided with the coating heads 3Α and 3Β of the branch, the both ends supporting the both ends of the branch and moving the support member 5 The shaft moving mechanism 6Α, 6β, along the support ====the shaft moving mechanism 4, can move together with the support member 5, respectively, the t Si! receiving member, for example, the coating execution (4) _ and the non-coating 仃 _ Since the dispensing unit has a % of the components and the other components, and the discharge operation is applied, it is not necessary to provide a moving mechanism for "receiving the respective receiving members 9a, 9b to the position of the coating head, and it is possible to share the respective coating heads. Since the movement mechanism 4 is erroneous, it is possible to suppress the complication of the apparatus, the price of the apparatus, and the coating surface/mi members 10a and 10b of the implementation of the county, so that these coatings can be cleaned, so ❹ =, _ The moving mechanism of the position of the coating head can share the shift of the x-axis of the shifting price i, which is more complicated, and the complication of the step-by-step, and the installation of the other By accepting the member, % can be performed even if the coating head of the application target is applied The two-layered smear is painted on the basecoat ___, and the non-coated ^ object cloth head discards the coating spitting action every time she passes between the preset trees. Mu and Fu 1 dry ya叩π (Other embodiments In addition, the present invention is not limited to the above-described embodiment'. It is possible to provide a coating head 3A, 3B, respectively Here, three coating heads may be separately provided on the support member 5, and the number thereof is not limited. Further, in the above embodiment, one support member 5 is provided, but it is not limited thereto, and two support members may be provided. 5. The number of the coating heads is not limited, and a plurality of coating heads may be separately provided on the two supporting members 5. Further, in the above embodiment, the sealing material is a sealing agent having sealing property and adhesion property, but It is not necessary to have a sealant and an adhesive property, and a paste or the like having only one of sealing property or adhesion property, and a paste having other properties and states may be used. Further, in the above embodiment The substrate stage 2 is fixed to the pedestal 7 to move the respective coating heads 3A and 3B and the support member 5, and the paste is applied onto the surface of the substrate K. However, the present invention is not limited thereto, and the substrate stage may be used. The configuration in which the movement in the x-axis direction, the X-axis direction, the θ direction (the rotation direction in the plane including the x-axis and the x-axis), and the like is performed in the direction in which the substrate stage 2 is moved to the support member 5 (Υ In the axial direction, the structure moves in the same direction. When the substrate Κ and the respective coating heads 3Α and 3Β are relatively moved in the z-axis direction, when the substrate stage 2 and the support member 5 are moved in opposite directions, The moving speed of the substrate stage 2 and the supporting member 5 can be reduced by half compared to the case where only the supporting member 5 is moved. Therefore, the inertial force accompanying the movement of the substrate stage 2 and the supporting member 5 is small, so that the inertial force accompanying the movement of the substrate stage 2 and the supporting member 5 is reduced. Vibration due to acceleration or deceleration of the substrate load 2 and the support member 5 can be reduced. As a result, the shape of the start point and the end point of the paste pattern in the z-axis direction and the corner shape of the paste pattern in the coating direction can be applied with a desired shape and high precision, and the quality can be manufactured with good quality. LCD panel. Finally, various numerical values are recited in the above embodiments, and these numerical values are exemplified and are not limited. [Industrial Applicability] The embodiments of the present invention have been described above, but are merely illustrative examples, and the present invention is not limited thereto, and each part may be appropriately changed. Further, the functions and effects described in the present fiscal summary are merely the most suitable actions and effects of the present inventors. The functions and effects of the present invention are not limited to those described in the present invention. The present invention is, for example, a paste application device, a paste application method, and the like for applying a paste to an object to be coated. 13 201006566 [Simplified illustration of the drawings] Fig. 1 is a schematic view of a fourth embodiment of the invention, and Fig. 2 is a schematic view for explaining a perspective view of the material coating device 4 shown in the figure; Take a picture of the reward! FIG. 3 is a schematic view for explaining the drawing; the coating of the paste application device shown in FIG. 4 is a coating application shown in FIG. a pattern diagram of a waste coating operation performed by a coating head;
圖5是用於說明圖i所示的糊料塗佈裝置具有的塗佈頭所進行的捨棄塗佈 吐出動作的模式圖； 圖6是用於說明圖1所示的糊料塗佈裝置具有的塗佈頭所進行的清掃動作 的模式圖；以及 圖7是表示圖1所示的糊料塗佈裝置進行製造處理的流程的流程圖。 【主要元件符號說明】 1 糊料塗佈裝置 2 基板載物台 3A、3B 塗佈頭 3a 容納筒 3b 噴嘴 3c YZ軸移動機構 3d 距離測量器 4 X軸移動機構 5 支撐構件 6A、6B Y轴移動機構 6a、6b 支撐台 7 台座 8 控制部 9a、9b 接受構件 ❹ 201006566 10a、10b 清掃構件 Ka 捨棄塗佈基板 K 基板Fig. 5 is a schematic view for explaining a dispensing coating discharge operation performed by a coating head provided in the paste application device shown in Fig. i; Fig. 6 is a view for explaining that the paste application device shown in Fig. 1 has A schematic diagram of the cleaning operation performed by the coating head; and FIG. 7 is a flow chart showing the flow of the manufacturing process of the paste coating apparatus shown in FIG. [Description of main component symbols] 1 Paste coating device 2 Substrate stage 3A, 3B Coating head 3a Storage cylinder 3b Nozzle 3c YZ axis moving mechanism 3d Distance measuring device 4 X-axis moving mechanism 5 Supporting members 6A, 6B Y-axis Movement mechanism 6a, 6b support table 7 pedestal 8 control portion 9a, 9b receiving member ❹ 201006566 10a, 10b cleaning member Ka discarding coated substrate K substrate
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