TW200929207A - Cleaning method of heat mode type recording material layer, bumpy product manufacturing method, light emitting device manufacturing method, and optical device manufacturing method - Google Patents

Abstract

A cleaning method of a heat mode type recording material layer is provided for eliminating foreign particles (D) generated when a plurality of concave portions (15) is formed by irradiating a focused light on a heat mode deformable recording material layer (12). The cleaning method is characterized by eliminating the foreign particles (D) with liquid (L) unreacted with the recording material layer (12). The cleaning method is applicable to a bumpy product manufacturing method, a light emitting device manufacturing method, and a optical device manufacturing method.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of cleaning a thermal mode type recording material layer for removing foreign matter generated when a concave portion is formed on a thermal mode type recording material layer, using the method A method for producing an uneven product, a method for producing a light-emitting element, and a method for producing an optical element. [Prior Art] As a method for forming a predetermined object such as a light-emitting device (such as a 〇pticaI disk), a master for manufacturing an optical disk, or a light-emitting element having irregularities formed on a light-emitting surface, for example, a method is known. The method of using a photoresist (ph〇t〇resist) shown in the publication of Japanese Patent Laid-Open No. Hei. Specifically, the method is formed by performing a thin convex shape on the master disk as follows: a mother resisting agent and a side step; exposing the light by laser light, and removing the exposed portion by the developer a step of "predetermined recess"; a step of removing the remaining photoresist by the reaction of the sub-master of the f-master (hereinafter, also referred to as "jump"). The method of concavities and convexities is superior to the prior art method using a photoresist and a crucible: and the second method is to replace the above-mentioned photoresist by irradiating the collected laser barrier material, and performing two In the thief-type light method, only the laser light can be irradiated in the illuminating part of the occupant. Therefore, the development step of the prior art as described above can be made into a concave portion. However, the above-mentioned thermal mode photoresist material is used. 3 o'clock = shooting thunder c 200929207 The 4 knives of the illuminating light are shaped by decomposition or physical changes - & chemistry and other chemicals are left in formation: if the heat does not proceed well afterwards = On the top of the eight, there is a problem. People ..., the method forms a good concave-convex shape so that it is considered to be not smashed, but the foreign matter remains around the hole, and in the case of the above, the problem is as described above. Good concave-convex shape [Summary of the Invention] = This is an object of the present invention to provide a hetero-patterned == di-convex shape formed by removing a defect formed on a 敎 mode = recording material layer, a thermal mode type recording material layer A method for producing a cleaning product, a method for producing a light-emitting device, and a method for producing an optical device. The present invention relates to a method for producing a thermal pattern-type recording material layer, which is used for The foreign matter generated when the plurality of concave portions are formed by irradiating the collected light on the recording material layer which is deformed in the thermal mode is characterized in that the foreign matter is removed by the liquid which does not react with the recording material layer. According to the present invention, even if foreign matter is generated by forming a concave portion by irradiating the recording material layer with the collected light, the foreign matter can be removed by using a liquid. At this time, since the secret forest recording_layer occurs Therefore, 200929207 ===::= other than the recessed portion, when the mask is formed, the recording material layer can function well, so that it can be formed well in the axial direction. In the present invention, the above-mentioned (4): The suspicion is greater than or equal to. The field is less than or equal to; = ❹ Ο - Then, after the concave portion is formed, the removal of the foreign matter is performed after 0.1 second or more, so that the concave portion can be sufficiently cooled to form a concave ==_ portion:, in addition, By forming a concave portion, it is possible to use a liquid to satisfactorily remove the J material in the recording material layer. In the invention, the liquid may be composed of at least one of a hydrocarbon solvent, a Dunlopal agent, and water. In the present invention, after the recording material layer is described above, the recording material may be re-coated with the liquid from the above-mentioned layer; Thus, by supplying the liquid onto the recording material layer, the recording layer is rotated, and the liquid on the recording material layer is displaced from the inside by the centrifugal force. Further, since the foreign matter is washed from the inner side to the outer side by the liquid thus moved, the foreign matter can be favorably removed from the recording material layer. In addition, in the present invention, the recording material layer may be along the surface thereof.

According to the present invention, it is possible to form a good uneven shape by removing the liquid material from the recording type material layer and removing the material of the Lai type type. The above and other objects, features, and advantages of the present invention will become more apparent from the description of the preferred embodiments of the invention. The liquid is thereby washed from the inside of the recording material layer to the outside by the liquid. Thus, the supply of the liquid to the portion near the center of rotation of the recording material layer allows the liquid to spread over the entire surface of the recording material layer, so that the amount of liquid applied to the entire surface of the recording material layer can be reduced. Further, the liquid is moved by the rotation, whereby the foreign matter adhering to the recording material layer can be washed away. Therefore, when the liquid is applied to the entire surface of the recording material layer by the above method, the coating step and the step of rinsing the foreign matter are carried out in the same manner, so that the cleaning time can be shortened. Further, in the present invention, after the foreign matter is washed away, the recording material layer may be dried by continuing to suspect the transfer of the recording material layer. As a result, since the slag is continuously rotated after the foreign matter is washed away from the recording material layer, the recording material layer can be quickly dried as compared with the method of rinsing off the foreign matter and stopping the rotation to naturally dry it.

Further, the above-described method for cleaning a heat mode type recording material layer of the present invention is a method for producing a compact or semi-conductive concave-convex product, a method for producing a light-emitting member, or a method for producing an optical element. X 200929207 c [Embodiment] [First Embodiment] Next, a method of manufacturing a light-emitting element of the present invention will be described with reference to the drawings. As shown in Fig. 1 (a), as a light-emitting element of the present embodiment, a light-emitting diode (LED) package is used.

An LED element 1A as an example of an illuminant and a case for fixing and wiring the lED gin 10 are provided. The LED element 1 is a previously known element, and is not shown in detail, but has an n-type cladding layer 'p-type cladding layer, an active layer, and the like. In Fig. i(4), the upper surface is a light-emitting surface 18 that emits light to the outside. The LED element 10 is fixed to the casing 20. Wirings 21, 22, and the like for supplying electric power to the LED element 1A are formed in the casing 20. As shown in FIG. 1(b), the LED element 1 has, in order, a light-emitting portion n as a body portion for light emission, a recording material layer 12 formed on an upper surface ❹ (light-emitting surface 18) of the light-emitting portion η, and Barrier layer 13. The recording material layer 12 is a layer which can be changed into heat by irradiating a strong wire and which is deformed by the heat, which is a layer of a so-called thermal pattern recording material. The recording material may be, for example, a cyanine system, a phthalocyanine system, a quinone system, or a squary acid (zero ary Hum) system. Recording materials such as azulenimn, thiol (thi〇1), and merocyanine. 200929207 The color recording material layer 12 of the recorded matter preferably contains a dye as the recording material contained in the material layer 12 of the color 3, which may be listed as (4) for the organic material, and the material of the (four) layer 12 may be used. Composite material. Among them, if the machine: or no maternal and t) easy to form a film, 衮: bell,; bucket' by spin coating (spin e

In the case of a pigmented tissue which is controlled by a molecular design to control the amount of the recording, it is not preferable to use two: as a preferred example of the recording material layer 12, a pigment (cyanine pigment, hemiCyanine pigment) is exemplified. , styryl pigment, oxonium (〇χ〇 = = macrocyclic pigment (10) pigment, lang (two L = f) =: porphyrin (P〇rphyrin) pigment, azo pigment (including azo) Metallic pigments, allylidene pigments, complex pigments, coumarin pigments, az〇le derivatives, triazine derivatives, μ amines a derivative of l amin〇butadiene, a cinnamic acid derivative, a quinophthalone-based pigment, etc. Among them, a pigment-based recording material layer capable of recording information at one time by laser light is preferred. 12. The reason is that the recording material of the organic substance is soluble in the granule and the film is formed by spin coating or spray coating (Spray C〇at), so that the productivity is excellent. It is good to have a pigment which is absorptive in the recording wavelength region. In particular, it means light. Yield extinction coefficient (extinction coefficient) of the upper limit value of k is preferably

200929207 is less than or equal to 〇 〇, cup, λ Μ t better 疋 is less than or equal to 5, more preferably less than or equal to one, 疋 less than or equal to 】. The reason for this is that if the extinction coefficient k is too high, the incident side of the light of the recording material layer 12 reaches the opposite side, and the lower limit value formed is preferably larger than the equal D 1 . Gan Temple π 于 is equal to G. (10), and more preferably is greater than or equal to. The right extinction coefficient k is too low, the light absorption is reduced, and the Γ x large laser power is reduced (iaserpc > wer) '10 results in processing speed Further, as described above, the recording material layer 12 must have a recording color at a recording wavelength, and the coloring matter can be appropriately selected depending on the wavelength of the laser light source, or the structure can be changed. + For example, 'When the oscillation wavelength of the laser source is near 〇nm, it is more advantageous from pemamethine cytosine, heptamethine 〇χ〇η〇ι pigment, five曱川氧°If (pentamethine oxonol) pigment, phthalocyanine pigment, phthalocyanine pigment, etc. are selected. When the vibration wavelength of the other field laser source is around 660 nm, it is more favorable from Sanjiachuan. Selection of trimethine eyanine pigment, pentamethine oxygen, azo dye, azo metal complex dye, and pyrromethene complex dye, etc. When the oscillation wavelength is around 405 nm, it is better from f曱chuan cyanine pigment, monomethine oxime pigment, Ziqichuan Chuanhua pigment, Si; cyanine pigment, azo pigment, azo metal complex pigment. , Linlin pigment, allyl dye, complex pigment, coumarin pigment, Jun 3] 200929207 c derivative, triazine derivative, benzotriazole derivative, 1-amino group * Τ 'dilute derivative The substance, the fluorenone dye, and the like are selected. Hereinafter, when the oscillation wavelength of the laser light source is near 78 〇 ηπι (near-infrared laser wavelength range), near 660 nm (visible laser wavelength ❹

An example of a preferred compound of the recording material layer 12 (recording layer compound) is shown in the case of a region, particularly a red laser wavelength region, in the vicinity of 4 〇 5 nm (near the ultraviolet laser wavelength region). Here, the object (1_1 to U.) represented by the following Chemical Formulas 1 and 2 is a conjugate of a laser light source having a wavelength of a laser light source. In addition, the compound represented by the chemical formulas 3 and 4 (W: and further, when it is grown in the vicinity of _la and the chemical formula 7 = _, 6 _ compound ((4) ~ m] 4) near 405 nm: the compound is a ray The oscillation wavelength of the light source is used for recording, == In addition, this (four) is set to the recording layer combination when the county wavelength of the source is > near the 780 touch.

12 200929207 [化i] (Μ)

(1-5)

<Record layer compound when the oscillation wavelength of the laser light source is around 780 nm> 13 200929207 [Chem. 2]

<Record layer compound when the oscillation wavelength of the laser light source is around 660 nm> 14 200929207

[Chemical 3] (H-1)

<Record layer compound when the oscillation wavelength of the laser light source is around 660 nm> 15 c 200929207

[Chemical 4]

<Record layer compound example when the oscillation wavelength of the laser light source is around 405 nm>

16 200929207

[Chemical 5]

<Record layer compound when the oscillation wavelength of the laser light source is around 405 nm> 17 200929207

[Chemical 6]

CsHn-t (111-13)

(111-12)

<Oscillation of a laser light source: a recording layer compound when the wavelength is around 405 nm > [Chem. 7]

In addition, Japanese Patent Laid-Open No. Hei 4-74690, Japanese Patent Laid-Open No. Hei 8-127174, Japanese Patent Laid-Open No. Hei 11-53758, and Japanese Patent Laid-Open No. Hei 11-334204,曰18 200929207 Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. 2000-43423, No. 334207, No. 2000-1085 No. The pigment described in the patent publications and the like. , shoulder 2卯〇_158818, the above-mentioned pigment type recording material layer 12

Pigment and Adhesive--Simplified (4) When the liquid is applied to the substrate to form the coating medium 1 = 2 at this time, the temperature of the surface of the coating liquid is preferably ι〇〜围. It is good that the lower limit is greater than or equal to l5〇c, 巳〇C, !!?丨丨拉 AA S丄λ汾. A good ruler is greater than or equal to 20 two = equal to c. In addition, as the upper limit, Better than 35. Oh, better is less than or equal to the machine, especially good anti-c. If the coated surface temperature is above the above-mentioned range, the coating may be unevenly coated or coated. Further, the upper limit value and the lower limit value may be arbitrarily combined. The recording material layer 12 may be a single layer or an overlapping layer, and in the case of an overlapping layer structure, The concentration of the pigment in the coating liquid is generally in the range of 0.01 to 30 mass% (mass%), preferably 0.1 to 20 mass%, more preferably 0.5 to 5. The range of 1 〇mass% is preferably 〇5 to 3 mass%. The solvent of the coating liquid includes butyl acetate and lactic acid. , esters such as cellosolve acetate; dihydromethane such as mercaptoethyl ketone, cyclohexanone or decyl isobutyl ketone; chlorinated hydrocarbons such as 1,2-dichloroethane and chloroform; dimercapto 19 19 200929207 c such as amines such as amines; hydrocarbons such as fluorenylcyclohexyl; tetraethers such as B-butyl, ethyl, and dioxin; alcohols such as ethanol, n-propanol, isopropanol, n-butanol, and diacetone; a fluorine-based solvent such as 2,2,3,3-tetrafluoropropanol; a glycol ether such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether or propylene glycol monomethyl scale; etc. Considering the solubility of the pigment used The above solvents may be used singly or in combination of two or more. In the coating liquid, it may also be visible.

Further, various additives such as an antioxidant, an ultraviolet absorber, a plasticizer, and a lubricant are added. The main coating method may be a spray method, a spin coating method, a dip method, a light coating method, a blade coating method, a blade coating method, and a doctor blade method. Doctorroll) method, scraper (d〇ct〇rblade) method, Xiang 2 brush (screen print) method. Further, in terms of excellent productivity and thickness of the margin control film, it is preferred to adopt a (four) coating method. In terms of the formation of the '12f method, the recording material layer: 2 compound) is preferably in the read wt% and less than or equal to 3 T in the forest wt% and less than equal & 2〇wf0/^ better. The dissolution is greater than or equal to 〇.] The dissolution is greater than or equal to G5wtyH is in tetrafluoropropanol. The preferred thermal decomposition temperature of the compound. In addition, the 'recording layer assignment, more preferably greater than or equal to ^ at 150 (: and less than or equal to coating, coating liquid c and less than or equal to 40 (rc. Good Η?, good shirt is 23~5〇) °C's r円®: The range of '... particularly good spin-coating first f-side rotation--spray the coating liquid onto the substrate. 20 200929207's better speed is 20~700 rPm, more The good is 5〇~5〇, and the better is 100~400 rpm. After that, the 'dry speed is better than s~H)_ ah, better is 1〇〇〇~7_ _, better疋诵~5000 rpm When the coating liquid contains a binder, as an example of a binder, (gelatin), (cellulose } # ❹ ❹ 二i, Τ: ίη), rubber (gUm) and other natural organic high scores ^Bebei 4 Ethylene, Poly-, Polystyrene, Polyisobutylene, etc., such as sulphuric acid, polystyrene, polyvinylidene-ethylene oxide, polyvinyl chloride-polyvinyl acetate, etc. Polyacrylic acid, polymethyl ^ tree moon 曰 物 转 热 热 热 热 热 热 。 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 In the range of, preferably scope Huang ^ fold (mass ratio). In order to improve the recording material layer 12, 12 may contain various anti-fading agent. In single layer of material

As anti-fading (four), - shot material _ oxygen. Zero nq job cher). As singlet oxygen quenching, it is known that the singlet oxygen in the publications of Si:: Books and so on: No. =====Zhang Zhao-Japan·_# bulletin, Japanese patent special; ^=::Open 200929207 _c 曰本Japanese Patent No. 60-19587, No. 60-35054, Japanese Patent No. 2, Japanese Patent Special Open Patent, Special Open, No. 9 (No. 9), No. 6 No. _36190, Japanese Gazette, Japanese Patent Special Japanese Knife 6〇4 Japanese Patent Special Open 60_44554 W "No. 4555 Gazette, Sakamoto Patent Special η 曰口 =, 曰本专利特开昭·_号 公: Japanese Patent Unexamined 60-54892 60 -47069, Japanese Patent. Japanese Patent Special Opened by J-Kai Kai-zhao 63-209995, 瀚 ❹ ❹ 专 专 专 特 特 特 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 - Bulletin No. 26028, etc., = ^35G399, sighs the singlet oxygen quencher described in Japanese Chemicals, 1992, pp. 1, et al. The above-mentioned single-line energy killer, the amount of fading agent used, The range of the amount of the pigment 2 is preferably in the range of Q 5 to 45 ny%, more = 疋 3 to 4. The range of the domain is particularly good. It is 5 to 25 _s% or more, and the solvent coating is described when the recording material layer 12 is a color Hung recording layer. The recording material layer 12 may also be d, sputtering, or chemical gas handle depending on the physical properties of the recording material. The film is formed by a film formation method such as vapor deposition (CVD). In addition, the dye is used in a jade in which the concave portion ls is used: a dye having a light absorption rate from other wavelengths at a wavelength of light. In particular, it is expected that the absorption rate of light at a wavelength of laser light at the time of reinforcement is higher than that at the emission wavelength of a light-emitting element such as the LED element 10. The wavelength of the absorption peak of the pigment is not limited to the wavelength of visible light. In the region 22 200929207, it is also possible to be in the ultraviolet region or the infrared region. ^ = Yes: The refractive index of the material constituting the light-emitting surface of the light-emitting element is high = lower, preferably the recording material layer 12 constituting the concave portion 15 is = wall The refractive index of layer 13 is high. The secondary barrier is the peak wavelength of the absorption wavelength (t is conducive to the wavelength domain where the refractive index is high on the wave side, which coincides with the wavelength of the emission of the germanium element. For this reason, =^ is to make =^ and The luminescence is smaller than the illuminating element Is greater than or equal to, 2 = difference ^ is more than 50 nm. The reason is: if = the other: receive; the skin length will be close to the light-emitting element ^ one in = nm; f is less than the first element In terms of light, the refractive index is lowered. The tree hair is recorded by laser as the wavelength of the concave portion 15 and the relationship w is read. The reason is that it is sufficient and the amount of λ is appropriate and the recording efficiency is t tf4, '% pigment absorption A better shape of the concave and convex shape. In addition, the season:: is full of UW < AC relationship. It is the wavelength of the dye, so (4) the light-emitting element light is not absorbed by the pigment, and the light-emitting element is emitted. ^Aa<Aw< 23 200929207 c Further, the wavelength of the laser light for forming the concave portion 15 is a wavelength at which a large laser power can be obtained, for example, when the coloring matter is used in the recording material layer 12, it is preferably 193 nm. Wavelengths of less than or equal to 1000 nm such as 210 nm, 266 nm, 365 nm, 405 nm, 488 nm, 532 nm, 633 nm, 650 nm, 680 nm, 78 〇 nm, and 83 〇 nm.

Further, as the type of the laser light, it may be a gas laser, a solid laser, or a semiconductor laser. Among them, in order to simplify the optical system, it is preferable to pick the object (4) or the semiconductor laser. The laser system may be continuous light or pulse light. It is preferable to use f-light which can freely change the light-emitting interval. For example, it is better that the time-consuming conductor laser ^ cannot be directly applied to the f-shooting (change ((10).ffmGdulatk) n). In addition, in order to increase the processing speed, it is preferable that the laser power is higher than the laser power, and the scanning speed must be increased (w the speed of the (four) layer 12 is recorded; for example, the following disc brewing = ^: lZd: ZTslT> , m4s( sca:) ^ The upper limit of the FMi laser is better than 丨(8)w t 10W, better is ", the best is! w. = the better limit is 〇.lmW, more The good thing is .5mw, the second is better for the light source size of the emission wavelength width and the same (coherency), which can be shrunk to the wavelength.

Light. Further, the recording strategy (the light pulse irradiation condition in which the recording strategy SP forms the concave portion 15) is preferably adopted by "" 24 c

200929207 The strategy used. That is, the preferred degree or =; the wave height value of the light, the pulse width, etc.: the recording speed used; 5 = the thickness of the material 12 is preferably such that it corresponds to the following concave portion, the thickness can be, for example, in (10) (four) (four) The degree of Z is better than equal..., is better? The equivalent of f is because the material is too thin, then the formed _ part 5 is shallow, and the second 2: the first effect. Another reason is that, as described below, it is difficult to obtain a rhyming effect when using the transcript as a _mask. Further, the upper limit of the thickness is preferably equal to or smaller than the surface nm, more preferably 500 nm. The reason for this is that if the thickness is too thick, the transmittance is difficult to form a deep hole, and the processing speed is high. The thickness t of the recording material layer 12 and the diameter of the concave portion 15 satisfy the following relationship. That is, the upper limit 厚度 of the thickness t of the recording material layer 12 is set to satisfy the value of t <:, and it is more preferable to set it to satisfy i. ! is set to satisfy the value of t<3d. Further, the lower limit of the thickness t of the recording material 曰2 is preferably set to a satisfactory value, and more preferably set to a value satisfying t > d / 1 ,, and more preferably set to satisfy the value of =. Further, the reason why the upper limit value and the lower limit value of the thickness t of the recording material layer 12 are set in accordance with the diameter d of the concave portion 15 is the same. ^, Small The upper limit of the diameter d of the concave portion is expected to be less than or equal to just _nm, preferably less than or equal to 1_nm, and more preferably less than or equal to the moving sac. The lower limit value is expected to be greater than or equal to 10 〇 nm, preferably greater than or equal to 5 〇, 25 200929207 c is preferably greater than or equal to 100 nm. When the material layer 12 is used as a material to be recorded, the coating liquid is prepared by dissolving the material in the bite, and then coating the coating surface on the hair surface 1 by applying a coating method such as extTMi Gn eGat. The surface of 8, whereby a layer of recording material can be formed. # ^ 12 I am concentrating on 5 again. If the early wall layer 13 is made of a transparent material, = there is no special ship. 'Preferably, the carbon is _, and the mass is =1. The oxides and sulfides such as S1〇2, 9ZnS, and Ga0 are used. jin. "Transparent moon" means that the transmissive LED element 10 is smoked. The degree of ί · · · 大于 大于 大于 大于 大于 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^骑 n 疋 ii ii ii ii ii ii ii ii ii ii ii ii ii TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA TA The range of 3, is = the recording material layer 12 and the periodically recessed portion 15 on the barrier layer 13. The concave portion 15 is made by irradiating the recorded light and illuminating the material (4) (including ==

26 200929207 = changed nine) and formed. It is expected that the concave portion 15 is formed on the light emitting surface. It is known that the inside of the target is dense. Further, the principle of forming the concave portion 15 is as follows. (4) Ϊ illuminating the recording material layer 12 (recording layer compound) by the material, and the long (the wavelength absorbed by the material) laser light is absorbed by the recording material layer 12, and the absorbed light is converted into the field irradiation. Part of the temperature rises. Thereby, the chemical and/or physical changes such as liquefaction, vaporization, sublimation, and decomposition of the rider 2 are moved and/or disappeared, thereby forming the concave portion 15. In addition, the early wall layer is a very thin layer, so it moves and/or disappears as the recording material layer 2 moves and/or disappears. Further, when the concave portion 15_ is formed, a part of the recording material layer 12 which undergoes chemical and/or physical changes becomes foreign matter and remains around the concave portion 15. In addition, as a method of forming the recessed portion 5, for example, a method of forming a known pit of a Write-Own Optical Disk or a recordable optical disc can be applied. Specifically, for example, a well-known Running Optimum P〇wer Control (R〇pC) technique (for example, Japanese Patent No. 3096239) can be applied: detecting a laser that changes according to the size of the pit The intensity of the reflected light is corrected to the output power of the laser so that the intensity of the reflected light is fixed to form a uniform pit. Further, it is preferable that the gasification, sublimation or decomposition of the recording material layer 12 (recording layer compound) as described above is large and imminent. Specifically, the weight reduction rate measured by the differential thermal balance (TG-DTA) at the time of gasification, sublimation or decomposition of the recording layer compound is preferably greater than or equal to 27, 200929207 to 5%, more preferably 1 or more. In addition, the recording layer compound is preferably 20% or more in gasification. The weight 2 measured by the scale (TG-DTA) or the weight reduction rate by the differential heat degree 分解 is preferably the ratio (the temperature is increased by 1 or more than 0.2H, and more preferably, it is softened, Liquefaction and crystallization are found in 〇.4/o/c. ❹ 变化 变化 变化 变化 变化 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The lower limit value is preferably a large laser power. In addition, it is equal to the loot, and more preferably greater than ^50 °c 'better than the shift temperature is too low, showing; t=: GG. : If it turns small, it is impossible to form a clear hole edge miscellaneous d (4) and will: ^上二:::部15 can also be used to form a point (-), ^ this piece is a lattice-like recess. In addition, the elongated groove a groove shape, and a _2 ' groove shape. However, although the name is abbreviated, it is also possible to form a continuous groove LED adjacent to the distance tH15 (_p is the LED element H of the illuminant). The center wavelength λ c is _~ just doubled.

The pitch p of the concave 15 is preferably the center wavelength 〇. Still ~ plus «, more preferably 0.1 to 5 times, the best is 〇. 2 The lower limit of the pitch p is preferably the center wavelength More than H, more preferably 365 times or more, more preferably (η times; 28 200929207 c 0.1 times or more ^ υ · 2 times or 0.2 times or more. In addition, the upper limit of __ is better 疋The center wavelength ❸ spacing Ρ is preferably 20 times or less, less than 1 time, and most preferably 2 times or less. '疋 times or less than 5 times, the diameter or groove of the recess 15 The width is ~25 times, preferably 〇〇25~1〇 times=λ c 〇.〇〇5 The best is 0.25~2 times. 疋〇.〇5~2.5 times, ❹ φ In addition, this The width of the so-called straight line at half the depth, the degree of g卩 means that the diameter of the recess 15 of the recess 15 or the width of the groove can be set to the size of the expected root distance P. The light emitting surface 18 i is positive so that the refractive index is macro, the diameter of the concave portion 15 or the width of the groove is also large; I is large; and the width (four) of the straight ball _ of the concave portion 15 is, for example, a diameter of 1 point or The width of the groove is recorded by the distance p 2 points, small, for example, the distance P is 2〇~ The right one is 40~6G%. Better 岐3G~7〇%, better ==5 The depth is better than the center wavelength _~2〇, better = 疋M5~H) times, better is Q1~. =. The upper limit of the expected depth is less than or equal to 2 〇〇〇〇 2 is 2 is less than or equal to 1000 nm, and the limit of 妊 amp amp amp 大于 大于 大于 大于 大于 大于 大于 大于 大于 大于 大于 大于 大于 限值 限值 限值 限值 限值 限值 限值 限值 限值 限值 限值 限值 限值 限值Expected to be greater than or equal to 1Gnm. The 疋 is larger than the secret 5 training, and it is better to refer to FIG. 4(4) to FIG. 4 (〇 〇 LED LED 2009 2009 2009 29 2009 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 29 In the light-emitting unit u which is a main body of the LED τ 件 制 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 a light-emitting portion corresponding to the size of the plurality of LED elements 10 (a wafer in which one LED element 1 can be formed). In this case, a bump is formed on the wafer (light-emitting portion 11) as follows After cleaning, a plurality of light-emitting portions n' corresponding to the plurality of LED elements 1G are respectively turned off, whereby a plurality of LED elements 1' are obtained, and after the light-emitting portion 11 is prepared, as shown in FIG. 4(b) The recording material layer 12 and the barrier layer 13 are sequentially formed. The recess 15 is formed, and the apparatus for forming the recess 15 can be configured in the same manner as the conventional optical disc drive. The above-mentioned optical disc drive is disclosed in Japanese Patent Laid-Open Publication No. 48

St the same shape, or attached to a blank heart: true to the first disc drive. And, according to the output power of the recording material layer 12 to deform the recording material layer 12, the pattern illuminated thereby conforms to FIG. 2(a) or FIG. 2 (b=the pattern of the groove pattern' The laser light source is turned in]: J. In addition, as shown in Fig. 3 (5), the duty cycle (dutyrati〇) at a predetermined period (lighting time w period "妒, : is lower than the actual formed recess The duty ratio of 15 (the length d/pitch P of the concave portion 15 of the laser light 2; see Fig. 3 (a)). This ^, ς 30 Fig. 3

❹ 200929207 l) It * _ The fixed speed of the laser light that is not circular is due to the fact that the pre-exposed laser light in the illuminating time r is advantageous for forming the ellipse 31-shaped recess 15 . Further, in the case of the concave portion 15 at the time of the operation, for example, when the pitch P of the concave portion 15 is set to 100, the irradiation depth d is 5 G, and the upper limit value of the duty is less than 50%. In this case, the duty ratio of #射光 is less than 35% t is written, better is less than the gene, and more preferably is greater than #w, the lower limit (four) is greater than or equal to 1%, better 10%. The concave portion 15 having a predetermined pitch can be formed correctly. The same focus of the technology, the two-disc drive (f, 11 on the right-hand gmatlcmethod), etc., even if the light-emitting part is converge on the surface of the light-emitting surface 18, the actuator can be secreted on the surface of the light-emitting surface 18 (G Show 'Self-hair 18_ with a disc. _ On the disc, 卩^ 3G gathers the laser light and illuminates it. In the way of illuminating the light-emitting part 11 30 is moved in the radial direction, whereby the concave portion 15 can be formed on the light-emitting surface. The processing conditions when forming the concave portion 15 are as follows. The numerical aperture of the optical system 30 is preferably greater than or equal to. More preferably, it is greater than or equal to Qe) 5NAJ is at = greater than or equal to 〇. 6. In addition, the upper limit of the numerical aperture NA is preferably small 1 temple at 2, more preferably less than or equal to}, and more preferably less than or equal to 〇 9. The reason is that if the numerical aperture NA is too small, microfabrication cannot be performed. 31 200929207 If the numerical aperture is too large, the margin of the angle at the time of recording (coffee) minus the optical system 30 is, for example, 4〇5±3. 〇nm, 532±Deng, 650±30nm, 7_0nm. The reason is: this is easy = large The wavelength of the output power. In addition, because the wavelength = work, it is better. Kick j into the micro-twist, the lower limit of the output power of the sample system is greater than or equal to 0, equal to _' is better than 5 The load is better than _ mw, the upper limit of the output power is 1 乂, the 疋 is less than or equal to 500 mW, and the better 疋 is less than 200 mW. The reason is that the power is too high, and the second = second speed is more Good is greater than or equal to 5 m / s, better ^ 疋 greater than or equal to 1 m / s, the upper limit is less than or equal to 500 m / s, preferably better than 2 〇 ^. Line catch better is less than or equal to 1 () ()_, ^^, ##2()() her, the reason is: if the line speed is too high, _ is ^; ^ is equal to 5Gm / s. If it is low, the processing is 'to the machining accuracy; if the line Speed _ can not form a good shape. If you can use Pult's (four) optical edging machine, an example of the shares (10) ___. 15 after that, Figure 5: has been formed on the material layer 12 and the barrier layer 13 in Figure 5 (4) In order to solve the problem of (4), the cleaning step of the ^. In addition, the solution is enlarged to show the recess 15. 32 200929207 Cleaning is first - the side is rotated while spraying the cleaning liquid To the substrate, at this time, the rotation speed is preferably 20 to 700 rpm, more preferably 5 〇 ~ ^ good is (10) ~ Yang pm. Thereafter, make it dry _ p is 500 ~ 诵 0 release, better It is drawn ~__, more 2000~5000 rpm. Spoon 疋❹ The amount of cleaning liquid is better than l.lml~5〇〇mi. Better = 00 m Bu is better 5~5G (five). It is in ^ cleaning liquid. Better is 1 second ~ second, better t fog "outside" can also consider dipping clean, mouth mist / month clean n material 'but better spin cleaning. After the recess 15 is formed as described above, the LED element 10 is optically processed 2 and placed on the spin coating apparatus 40 shown in Fig. 5(a). Pick up, drive this device 4〇佑τ υ smooth surface 1W so that 70 pieces of 1G along its surface (the part of the hair shaft RA side! ^: the condensing of the device 40 in the component 10 and the barrier layer ===, _ ~ Reaction liquid L. Thereby, as shown in Fig. 5 (b), Fig. 5, yT' is added to the liquid L rotation axis _ (see Fig. 5 (4)) on the light-emitting surface 18 of the LED tree 1G, and is shifted outward. The foreign matter D body [and the water adhering to the recording material layer 12 or the like = 2 is expected to be a liquid containing a tobacco solvent, a fluorine solvent, and a octane. Further, an example of a hydrocarbon solvent may be, for example, an octane) , decane (n〇nane); a fluorine-based solvent - for example, 33 200929207 For example, hydrofluoroether (manufactured by 3 Μ) can be used. As an example of the mixed solvent, for example, solvent petroleum brain (s〇lvent naphtha), EM CLEAN (registered trademark, manufactured by Nippon Energy Co., Ltd.), NS CLEAN (5 main book trademark, manufactured by Sakamoto Energy Co., Ltd.), Hc series (east) may be used. Made by Shuttle Company). Further, the solvents may be used singly or in combination. Ο 溥 The solvent is expected to be properly selected within the predetermined range. In this range, it is preferable to set the lower limit value to 3 (rt, more preferably to 5 〇ΐ, and it is preferable to set it. By setting the lower limit value in this way, it is possible to prevent the cleaning liquid from being instantaneous. , more =: blue = silk. In addition, the upper limit of the range is preferably 300, more preferably 疋〇〇C, and most preferably 150. By such a value, the solvent can be quickly evaporated after cleaning to improve Production efficiency Γ In addition, the fine shape of 12 when cleaning with liquid L is preferably a hydrocarbon-based solvent, and f is preferably octane or decane. Hummer liquid L·. Coating device MS-A100 (manufactured by Mikasa Co., Ltd.) For example, it is possible to use, in addition, after forming the concave portion 15

The time between 0.1 and 2 seconds is less than or equal to the second and second foreign matter D of Khan is greater than or equal to sec., and the lower limit of the time of better! is better than or equal to. . second. By 10 seconds, it is preferable that the large recording material layer 12 or the like is sufficiently cold (it is possible to form the recessed portion 15 and the material: 2), etc., and the liquid L is added: the f is made of a high temperature, and the other is self-shaped. Part 15 to the beginning of the removal of the different deformation. The time between the upper 34 200929207 c = value?; is less than or equal to 24 hours, more preferably less than or equal to 1 small suppression ^ 1Q minutes ° by setting the upper limit ' The foreign matter d caused by the interposition is fixed to the recording material layer 12, and the foreign matter D can be well removed by the liquid L. e ❹ In addition, the amount of the liquid L to be dropped is expected to be 〇5 to 2 cc, preferably The lower limit of the slave can be used to flush the foreign matter D between the liquids. The U can be shortened by the set upper limit value. The inside of the crucible 1 is rotated, thereby completely blowing off the liquid L remaining on the LED element 1 to rapidly dry the LED element 10. Thereafter, although not shown, the coffee element is fixed by the casing 2 10, and carry out the necessary wiring, can manufacture LED package]. The LED package thus formed is formed by The glossy surface = the political concavo-convex shape 'the near-twisting of the light-emitting surface 18 causes the refractive index to be macroscopically graded'. The light emitted by the fine-emitting light-emitting surface 18 is reflected on the inner surface of the light-emitting surface (4), thereby improving the LED package] The luminous efficiency is greatly and inexpensively obtained by the same configuration such as coating, etc., using a well-known focusing technique, and the concave portion 15 is formed even if the material is not flat. The above steps are the same as the previous ones. Early lichens: the method of the agent, or the coating material is extremely simple compared to the method of baking (baki:g), 3: baking, making complicated steps, etc. Attachment = 35 200929207 Simple lighting of the light-emitting element A fine uneven shape is formed on the surface to improve the light-emitting efficiency. Further, since the foreign matter D adhering to the recording material layer 12 or the like is removed by the liquid L, a favorable uneven shape (recessed portion 5) can be formed. By the portion on the side of the rotation axis RA of the LED element 1A, the liquid L can be spread over the entire surface of the LED element 1〇, so that the amount of the applied liquid can be reduced. Further, since the liquid 1 is moved by the rotation, At the same time, the liquid L is L The entire surface of the ED element 10 is coated, and the foreign matter D attached to the recording material layer 12 or the like is removed, so that the cleaning time can be shortened. Since the foreign matter d is washed away from the δ recording material layer 12, the rotation is continued. By drying, the recording material layer 12 and the like can be dried relatively quickly, and the coating method is employed in comparison with the natural drying method. The spin coating method 'supplied from the application to the drying can be carried out by the same apparatus, so that the apparatus can be simplified. In addition, when the recording material layer 12 or the like is cleaned, the LED element 10 is transferred from the optical processing machine to another rotation. Since the coating device 4 is attached, the forming step and the cleaning step of the concave portion can be simultaneously performed, and the processing ability (calving) can be improved. Further, by thus transferring the LED element 1 from the optical processing machine to the other spin coating device 40, it is possible to prevent the cleaning liquid from escaping to the lens surface of the optical processing machine during the cleaning step. [Second Embodiment] Next, a method of manufacturing an optical element 36 200929207 according to a second embodiment of the present invention will be described with reference to Fig. 6 . The optical element 1GA is a member having high light transmittance and is used from the light-emitting surface of the light-emitting element. For example, it can be manufactured on the surface of a light-emitting tube of a bamboo shooter, which is exemplified in the above-described embodiment. ^ Surface of surface 18 or 〇 As shown in Figure 6, the optical component is on the transparent support - above and there are two! The recording material layer η U having the same embodiment is formed, and the concave portion 15 is further formed. It is sufficient that the light emitted from the light-emitting element has sufficient transmittance (for example, a transmittance of about 8 G% or more), for example, a resin such as an ester or a glass material. Person ^ When the concave portion 15 is formed, the output power is adjusted in the same manner as the embodiment of the county 11 Δi $ !, and the following can be formed by ====. When the two photos are read on the side of the first side (the opposite side of the recording material layer 12), the same side of the recording material layer 12 is irradiated with the laser light, and 9 Is is swung the following effect: the borrowing material is not recorded. The material ejected from layer 12 contaminates the Rayfield source. After the α-cleaning method, the foreign matter D on the recording material layer 12 or the like is removed by the same cloud as the first embodiment. The optical component ι consisting of 1 can be improved by attaching it to the LED package ==== or the surface of the light pipe, etc. [3rd Embodiment]

37. In the following, a method of manufacturing a light-emitting device according to a third embodiment of the present invention will be described with reference to FIGS. 7(4) to 7 (a method of manufacturing the LED element 1A of the third embodiment) i the same steps as in the embodiment (refer to Fig. 4 (a) ❹ 4 (C) and Figs. 5 (a) to 5 (e)), and as shown in Fig. 7 (a), on the recording material layer 12 and the barrier layer The recording material layer 12 and the barrier (4) for forming the concave portion 15 on the recording material layer 12 and the like 15 by the liquid L are formed as shown in Fig. 7 (8), and are used as a mask for the mask. Further, as shown in the figure, the light-emitting surface 18 corresponding to the concave portion 15 to remove the recording material layer and the second liquid is exposed. 3 'Hunting to make the shape of the concave and convex shape dry = 'two 乍 lightly' can be used in wet rice carving (-(10)ng) or dry etching (dry etching) and other etching gases are more advanced and can be - X, preferably, is used as a recording material and a patterned jump. Further, in the dry- or material-filament method, the material of the layer of the material of the collectable layer 12 is glass, the material of the recording material is the pigment, and the material of the barrier layer 13 is: y: using Rm using SF6 as the gas Liquid thirsty uu^ For example, if using ethanol as LED element; fln removal method. Here, a layer including a light-emitting surface, a liquid such as water, or the like, and a layer which forms an interface with a gas such as air or a brother may be a layer of any sound 38 200929207 _ ο . In the manufacturing method according to the third embodiment, since the unevenness is formed on the surface (light-emitting surface 18) of the LED element 10, it is not necessary to pay attention to the difference in refractive index between the Led element 10 and the recording material layer 12, and the uneven shape can be easily designed. . Further, in the present embodiment, a plurality of concave portions 15 are formed on the recording material layer 12 formed on the surface of the LED element 10 in advance by a focusing technique or the like, thereby being adhered to the surface of the LED element 1〇 and Set the mask correctly. Therefore, in the present embodiment, there is no problem that the surface of the LED element 1 is warped and the mask cannot be closely covered as described above, and the uneven shape can be easily formed. Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and can be implemented as appropriate. For example, in the above embodiment, the LED element is not disclosed as an example of the light-emitting element, but the light-emitting element is not limited to the LED element, and is a plasma display element, a laser, or a surface conduction electron-emitting display ( Surface-conduction Electron-emitter

Display, SED) Light-emitting devices such as components, fluorescent tubes, and electroluminescence (EL) elements can be used. Further, in the above embodiments, the concave portion forming method of the present invention is applied to the production of a light-emitting element or an optical element. However, the present invention is not limited thereto, and the present invention may be applied to the material method of the product. As shown in Fig. 8 (a) and Fig. 8 (8), a hole portion is formed on a substrate (base) made of an inorganic material as information, and a protective layer 52 is provided on the side of the hole portion 16 of the substrate 39 200929207 51. The present invention can also be applied to an optical recording information recording medium (disc 5) which is an example of an uneven product. Specifically, the recording material layer and the barrier layer 13 are formed on the substrate 51 by the same method as the method shown in FIGS. 4(a) to 4(c), for the recording material layer 12 and the like. The output power* is adjusted to illuminate the concentrated light to form the concave portion 15. Next, the foreign matter adhering to the substrate 51 is cleaned by the liquid by the same method as the method shown in Fig. 5 to Fig. 5(c). Thereafter, the recording material layer 12 or the like is formed as a mask on the substrate 51 by the same method as that shown in Figs. 7(a) to 7(C) to form the hole portion 16 corresponding to the concave portion 15. According to the above inner valley, the hole portion 16 can be favorably formed on the substrate 51. Further, as the material of the substrate 51, it is preferable to contain & 1 material, for example, Si or Si 〇 2, octagonal or the like is preferable. Further, as the material of the protective layer 52, a material such as a zirconia such as a zirconia such as a zirconia such as a zirconia or a material such as a nitriding material may be used alone or in combination. Among them, in view of the long life of the optical disk, it is preferable that the protective layer 52 is also formed of an inorganic material. In addition, as the embossed product, it is not limited to the optical disc 50, for example, a flat panel display (10) PaneldiSplay) (organic a, liquid (surface conduction electron emission display), circuit substrate, semiconductor and its package, interposer (in —e〇, : '土反,f storage media (storagemedia), biochip (bi. 寻. η In addition, as a mass production of the above-mentioned high-density micro-concave 200929207 =Λ *. The so-called nanoimprint technology in the temple refers to the use of molds for the use of molds === molding on the material to be processed, and the use of electronic (four) diagrams for the shape of the mold. The method of resisting materials. 4 factory,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, In the case of a surface or a lens, the surface of such a protective layer or lens (in the case where the recording layer is provided on the surface of the scale on the surface of the protective layer or the wire, the laser beam is used when the concave portion 15 is formed, but the light is used. , 'turned Μ , , , , , , , , , , 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷/15 is larger than the minimum processing shape (hereinafter referred to as "laser"". 4 It is sufficient to form the concave portion 15 by connecting the laser spot. Here, if 200929207 is used for the thermal mode type recording material layer 12, the temperature reaches the transfer temperature. Part of the change is the strongest' and gradually weakens to the outside, so = hole (the laser shouts straight, the fineness of the money for riding the light 'When the fine holes are connected to form the concave portion 15, the shape of the It ί Accuracy, and if it is a photon mode - Φ ❹ == shape: the hole (laser point) is large, it is a mode type material. Preferably, as in the present invention, the heat is used in the above embodiment, and is in the recording material layer. The barrier θ ' is formed on the top of 12, but this (4) and * is limited to sand. It can also be as shown in Fig. 9(^)1Fig. 9(c) = no barrier layer 13. In particular, as in the third embodiment, (b) It is preferable that the riding layer 12 is free from obstacles (four) 13. In the third embodiment described above, it is in the coffee pot portion 16 ' The present invention is not limited thereto, and may be formed on the surface of the optical element 10A in the state (the support body UA is formed as the etching mask to form the hole portion, etc.). The surface on which the cavity portion 16 is formed (the surface of the light-emitting surface 18 or the base, and the recording material layer 12 or the like is directly used as the etching mask surface) is not limited thereto. For example, 'the gas layer 2 is etched by the etching gas. In the case of the same, as shown in FIG. 1G (4), the mask layer 7 which can be left by the side gas having almost no influence such as the recording material layer 2, 200929207 can be disposed on the light-emitting surface 18 and Record material layer between 2]. Further, in the drawings, 〇(4) to ίο(4) indicate that the hole portion 6 is formed on the light-emitting surface. However, the mask layer 17 may be similarly formed in the case where the hole portion 16 is formed on the surface of the substrate 51. Thus, in the same manner as in the first embodiment, the concave portion 15 is formed on the recording material layer 12 and the barrier layer 13 by laser light, and the recording material layer 12 or the like is cleaned by the liquid L (see Fig. (4)). Next, =10 (b) does not use the first rhyme gas to cover the side of the mask, and this = the through hole 对应 corresponding to the recess 15 is formed in the cover layer 17. This S and: S gas? It is selected that the recording material layer 12 and the barrier layer 13 are masked so that the mask layer opening is etched without removing the gas of the recording material layer 12. Thereafter, as shown in Fig. 10(e), the layer of the light-emitting surface 18 is used by the corpse, and the dream is formed by the embossing of the breast. Eight 4 16 At this time, the recording material 12 is etched by the etching gas, and the mask layer 3 is 良好2 (4) well ended, and thereafter; if = the mask layer 17 is removed by a predetermined stripping liquid or the like. Face 18 is exposed. For example, the shape of the concavo-convex shape is as follows: ΓΓ包 =) to Fig. 10 (4), ^, for example, the material containing the material n is 18 = saPPhlre, and the material of the recording material layer 12 is the material of the i 13 is inorganic. For the layer, the Tokyo Chemical Industry Co., Ltd. can be used: the double layer (9) of 43 ❹ 2009 200929207 ^nsi is used as the mask layer π, dV, gas, and ch is used as the second gas. (4) The 形态ίΪ form is spin-coated on the recording material layer 12 =;!: the cleaning liquid l, but the present invention is not limited thereto, and the second embodiment; = coating, die coating, dip coating, or the like. Further, after the liquid is applied by the surface of the recording material layer 12 or the like with ===, the surface of the above-mentioned crucible, i.e., the workpiece (wwk) (having the recording material layer in rotating to move the liquid, is washed away). The surface is different from dip coating, and during the process of immersing the workpiece in the liquid, the foreign matter on the surface is washed away due to the moving workpiece in the liquid. The upper part is used to rotate the workpiece to make the surface of the workpiece The present invention is not limited thereto, and may be dried, for example, by natural drying or by blowing air through a blower. In each of the above embodiments, a coating of the liquid L is additionally provided in addition to the optical processing machine. The attached and dried t are placed, but the present invention is not limited thereto, and the liquid can be applied and dried on the rotary table of the optical processing machine. In order to prevent the processing head (light exit surface) of the optical processing machine In the above-described embodiments, an apparatus for coating and drying is additionally provided in addition to the optical processing machine. Embodiments Next, an embodiment in which the effects of the present invention are confirmed will be described. A 1 μ· thick pigment layer (recording material layer) is formed on a disk-shaped substrate (support), and the substrate has a radius of 25 mm to 4 mm and a diameter of 0. Circumferential direction

44 S 200929207 has a recess formed at a pitch of 1 / zm. Further, after the concave portion is formed, the surface of the pigment layer is cleaned, and irregularities are formed on the substrate by dry etching. The details of each layer are as follows. • Substrate material Si Xi (silicon) thickness 0.5 mm outer diameter 101.6 mm (4 inches)

Inner diameter 15 mm • Pigment layer (recording material layer) 2 g of a pigment material of the following chemical formula was dissolved in 100 ml of TFP (tetrafluoropropanol) solvent and spin-coated. At the time of spin coating, the coating start rotation speed was set to 500 rpm, the coating end rotation speed was set to 1000 rpm, and the coating liquid was dispensed onto the inner peripheral portion of the substrate, and the rotation speed was gradually increased to 2,200 rpm. Further, the refractive index η of the pigment material was 1.986, and the extinction coefficient k was 0.0418. [化8]

45 200929207 The DDU1000 (wavelength: 405 nm, numerical aperture NA: 〇 65) manufactured by Pulstec Industrial Co., Ltd. equipped with a spherical aberration correction plate was used to record the fine concave portion on the surface of the above-mentioned optical recording medium. The formation conditions of the recess are as follows. Laser output power 2 m from

After the rectangular wave recording signal of the line 4 5 m/s 5 MHz is formed into the concave portion, the rotation speed of the main shaft of the above device is set to 3, and the concave portion is formed for 2 minutes, and then the radius of the substrate is 2 附. Add xinxin. In detail, only 3 ee of the sensation was added to the soil plate in 3 seconds. Further, after the completion of the octane dropwise addition, the rotation speed of the main shaft was increased to 1000 rpm' and the substrate was rotated for 20 seconds, and then further increased to rpm, and the substrate was rotated for 2 seconds to dry the substrate. Then, after the substrate was dried, the pigment layer was used as a mask, and irregularities were formed on the substrate by dry etching (Rffi), and the layer was removed by a stripping solution. In addition, the conditions for dry money engraving are as follows. The residual gas stripping solution SF6 + CHF3 (1:1) Ethanol was produced by the above-described method by SEM (scanning electron fiber-optic) observation, and the surface of the substrate was used. In addition, in the comparative example, the above-mentioned cleaning step was not performed, and the same as above. The color was cut, a concave portion was formed on the pigment layer, and a pigment was used as a mask to form a substrate, and the SEM was observed by SEM. y, 46 200929207 c The result is confirmed: in the range of the beginning of the ,, the formation of the straight ~ 4 is substantially uniform. It was confirmed that in the comparative example, it was 0.3 (10). Memory in the future, the radius of the substrate is 25~40mm. Plate, eight, knife. It was confirmed from the above that the substrate can be cut into a good shave shape by the cleaning of the board. ^基定=发揭露如如' However, it is not used for ❹, depending on the application; the protection of the present invention [Simple description of the diagram] == (4) is the diagram of the coffee seal, Figure 1 (8) is Figure 1 (4) The "-", "2" (1) in plan view of the light-emitting surface is shown in Fig. 3, (a) is a view illustrating the relationship between the diameter of the concave portion and the pitch, and Fig. 3) is a view for explaining the relationship between the light-emitting and the correction of the laser light. 4(a) to 4(e) are diagrams showing the steps of manufacturing the coffee package. Fig. 5(a) to Fig. 5(c) are diagrams showing the cleaning step. Fig. 6 is a view showing a method of manufacturing an optical element according to a second embodiment; The LED element of Fig. 8U is a three-dimensional s of a material produced by the manufacturing method including the cleaning method of the present invention. Figure 8 (b) is a cross-sectional view of the optical disk of Figure 8 (a) 47 200929207. Fig. 9 (a) to Fig. 9 (c) are views showing a step of removing the barrier layer formed in the manufacturing step of the first embodiment. (a) to (d) of FIG. 10 are views showing a state in which the manufacturing steps of the LED element of the third embodiment are partially changed. ' [Main component symbol description] 1 : LED package '10 : LED element ® 10A: Optical element ' 11 : Light-emitting portion 11A : Support. 12 : Recording material layer 13 : Barrier layer 15 : Concave portion 16 : Hole portion 17 : Mask layer 10 17a : through hole. 18 : light emitting surface ' 20 : box body 21 , 22 : wiring 30 : optical system 40 : spin coating device 50 : optical disk 51 : substrate 48 200929207 52 : protective layer d : recording material Layer 12 thickness D foreign body L: liquid

P : the pitch of the recess 15 T : period RA : rotation axis r: lighting time

49

Claims (1)

200929207 X. Patent application scope: The cleaning method of the h type thermal pattern type recording material layer, which is used for the deformation of the recording material layer on the de-mode, by the illumination, the foreign matter generated when the concave portion is formed, and the characteristics thereof It is to remove foreign matter by using a liquid that does not react with the material layer. The heat mode type recording material layer according to the first aspect of the invention, wherein the time 5 after the formation of the concave portion and the start of the removal of the foreign matter ❹ is 0.1 second or more and 72 hours or less. In the heat mode type recording material layer ^' a according to the first aspect of the invention, the liquid contains at least one of a flue solvent, a gas solvent, and water τ. The heat mode type recording material layer method according to the item 1, wherein the liquid is supplied onto the recording material layer, and the material layer is rotated along the surface thereof, thereby utilizing the liquid special fascia from the above The inside of the recording material layer is rinsed to the outside. 5. In the enthusiasm for riding and cleaning according to item 4 of the patent scope, in which the foreign matter is washed out in the lion (a) ί 材 科 狮 龄 龄 , , , , , , , , This causes the above recording material layer to be dried. The thermal pattern type recording material layer described in the first paragraph of the patent scope will be: wherein the recording material layer is rotated along its surface, and the liquid portion of the (four) layer is recorded by using the above liquid. The material is rinsed from the _ layer of the above recording (four) to the outside. , 4= please t? The thermal mode type recording material layer/method described in item 6, after rinsing off the foreign matter, _ the above-mentioned recording material 50 ❹ 200929207 Rotation of the layer ' thereby drying the layer (4) above. 8. A method for producing a embossed product, a method for producing a concave-convex product having irregularities, wherein the surface of the substrate having a 1H surface is formed by the following steps: a step of material layer; a recording concave portion of a deformation of the 仃 type On the recording material layer, a plurality of cleaning layers separated by the foreign matter are removed by irradiating the collected light to form a plurality of cleaning methods by the layer of the recording material of the first to third types of the patent application. As a fresh method, a dream manufacturing method of forming a component 9 corresponding to a hole portion of the above-mentioned concave portion on the surface of the above-mentioned substrate, which is a k-method of a light-emitting element having an illuminant, is characterized by including the following Step: Step on the light-emitting surface to form a concave portion of the heat-generating mode (four)-shaped impurity material layer = record on the material layer by irradiating the collected light to form a plurality of transition ranges from item 1 to item 7 The method of cleaning the layer of the material described in the item to remove the foreign matter. 〇 如 如 如 如 如 如 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 发光 发光 发光 发光 发光The cavity of the recess. 51 200929207 η* The manufacturing half of an optical component, the light-emitting surface of the 苴 件 以 以 福 福 福 福 福 福 疋 疋 疋 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装The surface of the cut surface of the light that is transmitted by the material is: the step of the deformed recording material layer in the heat mode; the step of the recess = the layer is formed by irradiating the collected light to form a plurality of flaws The method of cleaning the recording material layer to remove the foreign matter as described in any one of the items 1 to 7 of the invention. The manufacturing of the optical element described in item n of the patent application, the second recording material layer is etched as a mask, thereby forming six portions corresponding to the concave portion on the surface of the upper support. Φ 52