TW200904935A - Pressure-sensitive self-adhesive tape - Google Patents
Pressure-sensitive self-adhesive tape Download PDFInfo
- Publication number
- TW200904935A TW200904935A TW097104289A TW97104289A TW200904935A TW 200904935 A TW200904935 A TW 200904935A TW 097104289 A TW097104289 A TW 097104289A TW 97104289 A TW97104289 A TW 97104289A TW 200904935 A TW200904935 A TW 200904935A
- Authority
- TW
- Taiwan
- Prior art keywords
- pressure
- adhesive tape
- adhesive layer
- sensitive adhesive
- adhesive
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
- H01L23/296—Organo-silicon compounds
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
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- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Chemical & Material Sciences (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Laminated Bodies (AREA)
Description
200904935 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種壓感性黏著帶。更詳細而言,本發明 係關於一種適合於使用金屬製引線框架之半導體裝置之製 造的壓感性黏著帶。 【先前技術】 近年來,在LSI(large-Scale integrati〇n ,大規模積體電 r 路)之安裝技術中,CSP(ChiP SiZe/Scale Package,晶片尺 寸封裝)技術引人注目。在CSP技術中,以QFN(Quad Flat Non-leaded Package,四側無引腳扁平封裝)為代表之將引 線端子引入到封裝内部之形態的封裝’係在小型化與高集 成方面特別引人注目之封裝形態之_。 於QFN之製造方法中,近年來倍受關;主之製造方法為, 將複數個QFN用之晶片整齊地排列於引線框架之封裝圖案 區域内的晶片焊墊(die pad)上,於模具之模穴(cavity)内;' “ 利用密封樹脂統-密封之後’將其切斷分開而成為個別 、 QFN構造物,藉此使得單位引線框架面積之生產性得到飛 躍性提高。 如上所述之將€數料導體晶片、统一密封之㈣的製造 方法中’由樹脂密封時之澆鑄模具所夾持的區域僅為比封 裝圖案區域更向外側擴展之樹脂密封區域的外側。因此, 於封裝圖案區域、尤其於其中央部,無法將外部引線面以 充分之壓力按壓到液锖模具上,從而非常難以抑制密 脂向外部引線㈣漏。由此產生QFN之端子等由樹脂包覆 128873.doc 200904935 之問題。 為解決上述問題,於QFN之製造方法中,以下製造方法 被認為特別有效,即,於引線框架之外部引線側貼附壓感 性黏著帶,利用該膠帶之自黏力(遮蔽’ masking)進行密 封,藉由此效果而防止樹脂密封時向外部引線側之樹脂洩 漏現象。 於上述製造方法中,在操作方面,實際上難以在將半導 體晶片安裝於引線框架上之後或者在打線接合之後貼合壓 感性黏著帶。因此,較理想的是’壓感性黏著帶於最初階 段貼合於引線框架之外部墊片面上,其後,經過半導體晶 片之安裝步驟或打線接合步驟後進行貼合,直至密㈣脂 之密封步驟為止。 如上所述,要求壓感性黏著帶具有如下各種特性,即, 不僅防止密封樹㈣漏,而且具有耐受半導體晶片之安裝 i,. 步驟的高度耐熱性,以及不會對打線接合步驟之細緻操作 性造成妨礙等。 為了防止半導體裝置之製造中的密封樹脂之浅漏,提出 =感:點著帶,該虔感性黏著帶係由具有特定 脹係數之基材層、及且有胜令 听皇4… 有特疋厚度之黏著劑層而構成(來 π專利文獻1)。然而,該塵感性 ^ „ 黏者帶令,由於黏著劑声 之健存彈性模數較低,故難 9 雜、4 文難以正常地進行打線接合,因此 難以有效地防止密封樹脂之洩漏。 然而,為了防止樹脂茂漏而利用重視高度黏著性 的壓感性黏著帶時,因黏著 叙 J層之彈性較低,故黏著劑層 128873.doc 200904935 較軟。因此,產生實際上無法進行打線接合等之問題。 另-方面’亦已知如下方法,即,使用具有開口部、端 子部、及外部墊片之配線樹脂基板來取代引線框架,其 中,上述開口部上配置有半導體晶片,上述端子部配置於 上述開口部之外側表面,上述外部墊片配置於上述端子部 之内侧面,將半導體晶片配置於上述開口部上,進行打線 接合步驟或岔封樹脂之密封步驟,以此製造半導體裝置。 上述製造方法中,並不拘泥於使用厚度大於引線框架之 配線樹脂基板,與使用引線框架時相同,會產生樹脂密封 時之向外部引線側的樹脂茂漏現象。x,由於使用配線樹 脂基板,因此打線接合步驟中的壓感性黏著帶之黏著劑層 的影響與使用引線框架時不同。 專利文獻1 .日本專利特開2002-184801號公報 【發明内容】 發明所欲解決之問題 本發明之課題在於提供一種壓感性黏著帶,其將黏著劑 層之儲存彈性模數之值控制於適當之範圍,從而可較好地 防止在使用金屬製引線框架之半導體裝置之製造中於密封 步驟產生之樹脂洩漏。 解決問題之技術手段 為解決上述課題,本發明者等進行潛心研究。其結果發 現,使特定之層狀黏土礦物分散於聚矽氧系黏著劑組成物 中,藉此可有效地達成上述課題,從而完成本發明。 本發明之壓感性黏著帶係於基材薄片上具有黏著劑層, 128873.doc 200904935 :黏著劑層包含聚碎氧系黏著劑組成物及分散於該聚石夕氧 系黏著劑組成物中之親油性層狀黏土礦物。 較l實施形態為,上述層狀黏土礦物係膨潤石系黏度礦 物及/或雲母系黏度礦物。 、 較佳實施形態為,於100重量份之上述聚石夕氧系黏著劑 、’且成物中,含有2〜20重量份之上述層狀黏土礦物。 較佳實施形態為,上述黏著劑層之儲存彈性模 0.3〜6.0 MPa。 較佺貝施形態為,上述黏著劑層之厚度為1〜乃。 ,較佳實施形態為,本發明之麼感性黏著帶用於使用金屬 製引線框架之半導體裝置之製造中。 發明之效果 根據本發明’可提供—種壓感性黏著帶,其將黏著劑層 之儲存彈性模數之值控制於適當之範圍,從而可較好地防 止在使用金屬製引線框架之半導體裝置之製造中於密封步 驟產生之樹脂洩漏。 使:寺定之層狀黏土礦物分散於聚石夕氧系黏著劑組成物 中’藉此可有效地體現上述效果。 【實施方式】 本發明之壓感性黏著帶於基材薄片上具有黏著劑層,该 黏著劑層包含聚石夕氧系黏著劑組成物及分散於該黏著劑组 士物中之親油性層狀黏土礦物。黏著劑層之厚度可採用任 意適當之厚度。黏著劑層之厚度較好的是2〜5〇 _,更好 的是2〜25 μΠ1。本發明之壓感性黏著帶的較佳實施形態之 128873.doc 200904935 —不於圖1中。如圖1所示,本發明之膠帶100於基材薄片 10上具有黏著劑層20,該黏著劑層20包含聚矽氧系黏著劑 組成物30及親油性層狀黏土礦物4〇。該親油性層狀黏土礦 物40可實際上排列在相對於基材薄片丨〇之平行方向上,亦 可實際上排列在相對於基材薄片丨〇之垂直方向上,其排列 狀態可為該等之混合狀態,亦可排列於隨機之方向上。當 ' 考慮剝離之難易度時,較好的是,親油性層狀黏土礦物40 , 實質上排列在相對於基材薄片10之垂直方向上。 上述親油性層狀黏土礦物之排列狀態可利用電子顯微鏡 (SEM(scanning electr〇n micr〇sc〇pe,掃描式電子顯微 鏡)TEM(transmission electron microscopy,穿透式電子 顯微鏡))進行剖面觀察而確認。 所謂「實際上排列在相對於基材薄片之垂直方向上」, 係才曰相對於基材溥片之主面排列而成的角度較好的是⑼度 〜120度,更好的是70度〜Π0度,進而好的是80度〜100度。 L)所謂「實際上排列在相對於基材薄片之平行方向上」,係 指相對於基材薄片之主面排列而成的角度較好的是-3 0度 • 〜30度,更好的是_20度〜2〇度,進而好的是-10度〜10度。 作為述I石夕氧系黏著劑組成物,可採用市售之聚石夕氧 系黏著Μ等任意適當之組成物。在使用聚石夕氧系黏著劑組 ^物t & 了耐熱性高之外,高溫下之儲存彈性模數及黏 著力,成為適虽值。作為上述聚石夕氧系黏著劑組成物,較 好,是使用過氧化物交聯型黏著劑、加成反應型黏著劑、 脫氫反應型黏著劑、及濕氣硬化型黏著劑。尤其是加成反 128873.doc 10 200904935 應型黏著劑,因其雜質少而較佳。 在不損及本發明之效果之範圍内,於上述Μ氧系 劑組成物中亦可含有任意適當之添加劑。 ^ 上述親油性層狀黏土礦物係對結晶構造中具有交 離子之層”酸鹽礦物進行親油化處理而成者。、
作為上述層狀料鹽礦物,可採用任意適當之層狀石夕酸 鹽礦物。作為上述層狀料鹽礦物,可列舉例如:蒙脫 土、皂石、鋰蒙脫石、矽鎂石等膨潤石系黏土礦物;氟四 石夕雲母等雲母系黏土礦物。該等可僅使用旧,亦可將2種 以士併用。較好的是雲母系黏土礦物。其原因在於,該雲 母系黏土礦物可獲得良好之強韌性。 上述親油性層狀黏土礦物之形狀較好的是板狀。此時, 厚度較好的是約0.1〜10 nm,更好的是〇5〜5 nm。又,寬度 較好的是10〜10000 nm,更好的是2〇〜7000 nm,進而好的 是50〜5000 nm。此處所謂厚度或寬度係指平均長度。該平 均長度可藉由對電子顯微鏡(TEM)照片進行實測而求出。 若上述寬度超過10000 nm,則可能導致伸長率降低,若上 述寬度不足10 nm,則可能際致斷裂應力變高。 上述親油性層狀黏土礦物較好的是,利用有機陽離子等 對層間交換性陽離子進行離子交換處理,以實現層間親油 化0 上述交換性陽離子係指存在於層狀矽酸鹽礦物之結晶層 表面上的鈉或鈣等金屬離子。該等離子為親水性,故親油 性單體無法滲入至層狀矽酸鹽礦物之層間,因此無法獲得 128873.doc -11 - 200904935 物。為了使單體渗人至層間,必須利用親油性 =性界面活性劑等對交換性陽離子進行離子交換。 為上述陽離子性界面-¾ Μ·十丨 输 面/舌性劑,可列舉例如:四級銨 鹽、四級鱗鹽。 作為上述四級銨鹽,可 睡、山 歹]舉例如:十二烷基三甲基銨 瓜、十八烷基三甲基銨鹽、= —辛基鉍鹽、二(十八烷基)二 〒基叙鹽、二(十八惊其、_ # w 私加 土)—苄基銨鹽、具有取代環氧丙烷 月求之銨鹽。該等可僅使 仗用1種,亦可將2種以上併用。 作為上述四級鱗鹽,可別斑 甘一 τ列舉例如:癸基三苯基鱗鹽、甲 暴二本基鱗鹽、十二惊其=田甘 ±—甲基—鹽、十八烧基三甲基鱗 孤、二(十八烷基)二甲基鱗 ^ ^ 一(十八烷基)二苄基鱗 鹽。該等可僅使用1種,亦可將2種以上併用。 ::亡發明之壓感性黏著帶,較好的是於使用該壓感性 黏者f則,使上述親油性層狀黏土礦物之層彼此充分地剝 離。作為將層彼此進行剝離之方法,可採用任意適當之方 法。例如,使用超音波剝離、高壓切斷剝離、超高速攪 拌、超臨界CO成拌。尤其好的是高屢切斷剝離法,其原 因在於’該南塵切斷剝雜可尤 ㈣刺離了在不使親油性層狀黏土礦物破 碎之情況下將層彼此剝離。親油性層狀黏土礦物之剝離狀 態較好的是,將層狀黏土礦物之石夕酸鹽層剝離成平均重叠 達6層以下。若超過6層,則可能導致層狀黏土礦物之總表 面積減少’與有機成分之相互作用減少,從而黏著劑的強 ㈣降低。平均重叠之分析可利用電子顯微鏡(TEM)來進 行0 128873.doc 200904935 於100重量份之上述聚矽氧系黏著劑組 油性層狀黏土礦物之j 、 中,上述親 一重量份較好的是2,重量份,更好 董里伤進而好的是4〜10重量份 例不足2重量份,則可处包、+ — 上迷3有比 P +人 無法充分發揮本發明之效果。4 上述含有比例超過20重量份,則可能引起黏著劑H二 增大,從而導致塗佈外觀降低β θ '又 上述黏著劑層中,除了上述 r 述親油性層狀黏土礦物之外,於不者劑組成物及上 圍内,亦可包含任意適當之成分。 之犯 上述黏著劑層之儲存彈性模數較好的是0.3〜6.〇 MPa, 更好的是0.5〜5·〇 MPa,進而好的是1()〜5 () Mpa 劑層之儲存彈性模數為0.3 MPa以下,則黏著劑層會過分 柔軟’因此’例如在使用金屬製引線框架之半導體裝置之 製造中,可能會導致打線接合時引線框架活動而無^進行 打線接合。又’若黏著劑層之儲存彈性模數為6.〇奶以 上’則黏著劑層會過硬’使得點著力降低,從而可能導致 自引線框架上剝離。於本發明中,黏著劑層之儲存彈性模 數係根據ASTMSTP846,由黏彈性光儀所測定之值。 作為上述基材薄片’可採用任意適當之基材薄片。可列 舉例如:聚對苯二甲酸乙二醋(ρΕΤ,ρ〇ι”Μ_ terephthalate)薄膜、聚萘二甲酸乙二醋(pEN, polyethylene naphthaiate)薄膜、聚醚石風(pEs, ⑽lf〇ne)薄膜、聚醚醯亞胺(PEI, p〇lyetherimide)薄膜、聚 硬(PSF ’ polysulfone)薄膜、聚苯硫醚(pps, 128873.doc 200904935 sum㈣薄膜、聚㈣酮(PEEK,p〇lyestereste细。叫薄 膜、聚芳酉旨(PAR,P〇lyarylate)薄膜、芳香族聚酿胺薄膜、 聚酿亞胺薄膜、及液晶聚合物(咖,uquid crystal ㈣y叫薄膜。當考慮耐熱性時,較好的是由聚酿 料構成之薄膜。 作為基材薄片之厚度’可採用任意適當之厚度。為了防 止折f或斷裂’以良好地保持操作性,上述厚度較好的是 5 〜250 μιη。 本發明之壓感性黏著帶之製作方法可採用任意適當之方 法。例如,使用的方法為,將含有上述親油性層狀黏土礦 物之聚妙氧系、黏著劑組成物首先塗佈於任意基板上,並使 其乾燥’以此製作使上述親油性層狀黏土礦物分散於聚石夕 氧系黏著劑組成物中之黏著薄片,並使其形成於基材薄片 上,或者將含有上述親油性層狀黏土礦物之聚石夕氧系黏著 劑組成物塗佈於基材薄片上,,然後使其乾燥並固定化。 i.. 本發明之塵感性黏著帶中’亦可使用用以保護黏著劑層 之保護薄膜。作為保護薄膜,可列舉例如:利用聚石夕氧 系、長鏈烧基系、敦系、脂肪酸酿胺系、二氧化石夕系剝離 劑等進行義處理後之聚氯乙稀、氯、㈣苯 二甲酸乙二醋、聚對苯二曱酸丁二醋、聚胺基甲酸醋、乙 稀乙酸乙烯醋共聚物、離子鍵樹脂、乙烯_(甲基)丙婦酸共 聚物、乙烯-(甲基)丙烯酸_共聚物、聚苯乙稀、聚碳酸酯 等所構成之塑膠薄膜。又’對於聚乙稀' 聚丙稀、聚丁 烯、聚丁二烯、聚甲基戊烯等聚烯烴樹脂系薄膜而言,即 128873.doc • 14 - 200904935 便不使用脫模處理劑亦具有脫模性’因此亦可使用其單體 作為保護薄膜。此種保護薄膜之厚度較好的是10〜100 μηι 左右。 本發明之壓感性黏著帶可應用於任意適當之用途。尤其 可較好地防止使用金屬製引線框架之半導體裝置之製造中 於掛封步驟產生之樹脂茂漏,因此較好的是,應用於使用 金屬製引線框架之半導體裝置之製造中。 實施例 以下,利用實施例對本發明進行更具體之說明,但本發 明並不限定於該等實施例。又’實施例之「份」係重量基 準。 [實施例1] 以厚度25 μιη之聚醯亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使20重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於100重 量份之聚石夕氧系黏著劑(Toray Dowcorning製造,商品名: SD-4585)中,以此製作壓感性黏著帶(1)。該壓感性黏著帶 (1)之黏著劑層之厚度為10 μηι。 [實施例2] 以厚度25 μιη之聚醯亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層,該黏著劑層係使10重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於100重 128873.doc -15- 200904935 罝份之聚石夕氧系黏著劑(Toray Dowcorning製造,商品名: SD·4585)中,以此製作壓感性黏著帶(2)。該壓感性黏著帶 (2) 之黏著劑層之厚度為1〇 μπ1。 [實施例3] 以厚度25 μηι之聚酸亞胺薄膜(Toray Dupont製造,商品 名:Kapt〇nl〇OH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使5重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於100 重 置份之聚石夕氧系黏著劑(Toray Dowcorning製造,商品名: SD-4585)中,以此製作壓感性黏著帶(3)。該壓感性黏著帶 (3) 之黏著劑層之厚度為 1 0 μηι。 [實施例4 ] 以厚度25 μηι之聚酸亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使20重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於 100 重 里份之聚石夕氧系黏著劑(Toray Dowcorning製造,商品名: SD-4585)中’以此製作壓感性黏著帶(4)。該壓感性黏著帶 (4) 之黏著劑層之厚度為 20 μηι 〇 [實施例5] 以厚度25 μηι之聚醯亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使1 〇重量份之親油性層狀黏土礦物 (Coopchemical製造’商品名:Somasif MAE)分散於100 重 128873.doc -16· 200904935 里伤之I碎氧糸黏著劑(Toray Dowcorning製造’商品名: SD-4585)中,以此製作壓感性黏著帶(5)。該壓感性黏著帶 (5) 之黏著劑層之厚度為20 μιη。 [實施例6] 以厚度25 μηι之聚醯亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使5重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於100 重 ϊ份之聚砂氧系黏著劑(Toray Dowcorning製造,商品名: SD-4585)中’以此製作壓感性黏著帶(6)。該壓感性黏著帶 (6) 之黏著劑層之厚度為2〇 μηι 〇 [實施例7] 以厚度25 μηι之聚醯亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使1重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於100重 夏份之聚石夕氧系黏著劑(Toray Dowcorning製造,商品名: SD-4585)中’以此製作壓感性黏著帶。該壓感性黏著帶 (7) 之黏著劑層之厚度為1 〇 μπ!。 [實施例8 ] 以厚度25 μηι之聚醯亞胺薄膜(Toray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使2 〇重量份之親油性層狀黏土礦物 (Coopchemical製造,商品名:Somasif MAE)分散於100重 128873.doc -17- 200904935 里伤之^^石夕氧系黏者劑(Toray Dowcorning製造,商品名: SD-4585)中,以此製作壓感性黏著帶(8)。該壓感性黏著帶 (8)之黏著劑層之厚度為5〇 μηι。 [比較例1] 以尽度25 μηι之聚醯亞胺薄膜(T〇ray Dupont製造,商品 名.KaptonlOOH)為基材薄片’於該基材薄片上設置黏著 幻層°亥黏著劑層係由聚石夕氧糸黏著劑(Toray Dowcorning 製造,商品名:SD-4585)所構成,以此製作壓感性黏著帶 (C 1)。該壓感性黏著帶(c 1)之黏著劑層之厚度為丨〇 μηι。 [比較例2] 以尽度25 μπι之聚醯亞胺薄臈(T〇ray Dupont製造,商品 名:KaptonlOOH)為基材薄片,於該基材薄片上設置黏著 劑層’該黏著劑層係使由聚矽氧系黏著劑(T〇ray D〇Wcorning製造,商品名:犯七85)所構成,以此製作壓 感性黏著帶(C2)。該壓感性黏著帶(C2)之黏著劑層之厚度 為 20 μιη。 [評價] 將實施例1〜實施例8及比較例1〜比較例2中製作之壓感性 黏著帶貼合於銅製引線框架的外部墊片側,於該銅製引線 之端子部經鍍銀之一邊,16引腳類型之qFN排列成4個χ4 個。 使用壞氧紛系銀漿將半導體晶片黏接於該引線框架之晶 片焊墊部分,於18CTC之溫度下固化i時間左右,以將其固 定。 128873.doc -18- 200904935 其次,引線框架從壓感性黏著帶側以真空吸氣之形態而 固定於加熱至之加熱塊上,進而以窗式定位器壓住 引線框架之周邊部分而進行固定。 使用115 KHz焊線機(新川製造,商品名:utc_ 3〇〇BIsUper),利用衫5 μπι之金線(田中貴金屬製造,商品 名:GMG-25)’在以下述條件下進行打線接合。 快速接合加壓:13 0 g 快速接合超音波強度:550 mW 快速接合施加時間:8 msec 第-一接合加麼· 13 0 g 第一接合超音波強度:5〇〇 mw 第二接合施加時間:7 msec 進而,利用環氧系密封樹脂(日東電工製造,商品名: HC-300B) ’使用鑄模機(T〇WA製造,商品名:M〇dei_Y_ sense) ’於175 C時,預熱2〇秒、射出時間12秒、固化時間 12〇秒來進行鑄模後,剝離壓感性黏著帶。 再者進而於175 C時進行3小時左右之壓模後烘烤(post
Ure)以使樹脂充分硬化後,利用切塊機(dicer)切 斷而獲得各個QFN型半導體裝置。 以此方式’對使用實施例丨〜實施例8及比較例卜比較例2 所衣作之壓感性黏著帶而獲得的qfn樹脂之洩漏情況進行 了 °平^貝。5平價方法係以引線墊片上附著有樹脂之狀態的引 線塾片為不良’根據1 0〇個引線墊片中產生不良之引線墊 片之數目而求出不良率。 128873.doc -19· 200904935 評價結果示於表1 [表1]
根據表1可判斷,本發明之壓烕性斑 门< ~ u r生黏考帶可較好地防止
使用金屬製引線框架之半導體裝置 I
丁〒虹衣κ製造中於密封步驟產 生之樹脂洩漏。 產業上之可利用性 本發明之壓感性黏著帶尤其可較好地防止使用金屬製引 線框架之半導體裝置之製造中於密封步驟產生之樹脂洩 漏,因此較好的是,應用於使用金屬製引線框架之半導體 裝置之製造中。 【圖式簡單說明】 圖1係本發明之較佳實施形態之壓感性黏著帶的概略剖 128873.doc -20- 200904935 面圖。 【主要元件符號說明】 10 基材薄片 20 黏著劑層 30 聚矽氧系黏著劑組成物 40 親油性層狀黏土礦物 100 膠帶 128873.doc -21 -
Claims (1)
- 200904935 十、申請專利範圍: -種壓感性黏著帶,其係於基材薄片 該黏著劑層包含聚發氧系黏著劑組成物;八散:劑層, 氧t黏著劑組成物中之親油性層狀黏土^。“亥聚石夕 2. 如凊求項丨之壓感性黏著帶,1 g±, .«a _ ^ 、〒上逑層狀黏土礦物係 ^糸黏度礦物及7或雲母系黏度礦物。 、Μ 3. 如請求項1或2之壓感性 ^ L 其中相對於100重量份 含有2〜20重量份之上述 其中上述黏著劑層之儲 其中上述黏著劑層之厚 其係用於使用金屬製引 之上述聚矽氧系黏著劑組成物 層狀黏土礦物。 4. 如凊求項1或2之壓感性黏著帶 存彈性模數為0.3〜6.0 MPa。 5. 如凊求項1或2之壓感性黏著帶 度為2〜5 〇 μηι。 6. 如凊求項1或2之壓感性黏著帶 線框架之半導體裝置之製造中 128873.doc
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JP2007027481A JP2008189858A (ja) | 2007-02-07 | 2007-02-07 | 感圧性粘着テープ |
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JP (1) | JP2008189858A (zh) |
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US8048690B2 (en) * | 2007-11-08 | 2011-11-01 | Nitto Denko Corporation | Pressure-sensitive adhesive sheet and process for producing semiconductor device having same |
EP2639278A1 (en) * | 2012-03-13 | 2013-09-18 | Nitto Denko Corporation | Heat-resistant pressure-sensitive adhesive tape for production of semiconductor device and method for producing seminconductor device using the tape |
US20180111777A1 (en) | 2016-10-26 | 2018-04-26 | Cpfilms Inc. | Packaged flexible film and flexible film packaging system therefor |
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AU615730B2 (en) * | 1988-04-07 | 1991-10-10 | Kanegafuchi Chemical Industry Co. Ltd. | Pressure-sensitive adhesive material |
JP2002167557A (ja) * | 2000-12-01 | 2002-06-11 | Sekisui Chem Co Ltd | 粘着剤用組成物、粘着剤及び粘着シート |
JP2002294209A (ja) * | 2001-03-30 | 2002-10-09 | Sekisui Chem Co Ltd | 粘着剤組成物及びその製造方法、並びに粘着テープ |
US6617020B2 (en) * | 2001-04-04 | 2003-09-09 | 3M Innovative Properties Company | Hot melt processable pressure sensitive adhesive comprising organophilic clay plate-like particles, a method of making, and articles made therefrom |
US6884833B2 (en) * | 2001-06-29 | 2005-04-26 | 3M Innovative Properties Company | Devices, compositions, and methods incorporating adhesives whose performance is enhanced by organophilic clay constituents |
JP4213887B2 (ja) * | 2001-10-26 | 2009-01-21 | 日東電工株式会社 | 透明性粘着剤組成物とその粘着シート |
JP3888679B2 (ja) * | 2002-04-23 | 2007-03-07 | 日東電工株式会社 | 両面粘着テープおよび固定方法 |
JP3849978B2 (ja) * | 2002-06-10 | 2006-11-22 | 日東電工株式会社 | 半導体装置の製造方法及びこれに用いる耐熱性粘着テープ |
JP2005344008A (ja) * | 2004-06-03 | 2005-12-15 | Nitto Denko Corp | 剥離可能な感圧性接着シート |
JP4718146B2 (ja) * | 2004-09-01 | 2011-07-06 | 株式会社Shindo | 多孔質シート用エマルション型シリコーン粘着剤組成物および再剥離性粘着シート |
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