TW200844686A - Exposing device - Google Patents

Abstract

This invention provides an exposing device adapted to perform a high yield exposing by effectively conducting a removal of dust from a substrate B, a photomask M and a platen 5. During the moving-in and retracting operation of a moving-in hand 3, a first cleaning head 1 is caused to come in contact with an upper surface of the platen 5 to conduct the dust removal operation, and a second cleaning head 2 conducts the dust removal on the photomask M. During the dust removal operation a pressurizing device 16 applies a load through a bearing 17 to an axis 22, and the load is transmitted through a hard connecting collar 23, a soft connecting collar 24, a roller core 21 to a cleaning part 20 so as to press the cleaning part 20 against a cleaning surface 8. the axis 22 will deflect by the load of the pressurizing device 16, however, the deflection of the axis 22 will be absorbed by the soft connecting collar, and the roller core 21 will be kept in a flat state without deflection. By such an arrangement the pressure distribution over the cleaning surface becomes uniform and an efficient cleaning is possible.

Description

200844686 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to an exposure apparatus. [Prior Art] Photolithography (phot〇mhographic meth〇) which forms a pattern on a substrate by exposure to a photosensitive fixing predetermined pattern on a surface of a substrate coated with a photosensitive material such as a photo resist and then an etching step d) It is widely used in various fields, and printed wiring boards and the like have been manufactured by an exposure apparatus in recent years. In an exposure device of a printed circuit board,

When there is dust between the photomask (Ph〇tomask) and the substrate, there is a problem that Z is exposed to cause a defect in the product.忒 dust contains 't; t: such as copper box itself + adhesive dust; and dry film photoresist (dry film ph〇t〇 (10) or solder resist) as its own adhesive dust In order to remove the above-mentioned dust, it is proposed to provide a dust removing device in the exposure apparatus. As the dust removing device, a configuration in which an adhesive roller or the like is used is known. [Patent Document 1] Japanese Patent No. 3533380 [Draft of the Invention] (Problems to be Solved by the Invention) However, in the case of using a dust removing device of a conventional dust removing roller, since the dust removing device is two for the roller shaft Apply a large load to the end, such as applying a load of 16〇N to the 640_wheel (10) ler) for cleaning. 5 319886 200844686 2: 冓成' will use the end of the roller as a fulcrum to produce on the roller, = two The distribution of the I force on the surface of the cleaning object for the roller will change. ^ The central portion of the cleaning direction will not contact the cleaning surface, which is dust removal; In addition, in the case of using the adhesive tape roller as the dust removing roller, it is easy to generate a sensitive fold due to the pressing of the roller, which is also to make the cleaning performance evil ^= and the part is occupied (the solution is to solve the problem of the above-mentioned conventional technology) In order to achieve the above object, the exposure apparatus of the present invention includes a substrate mask for mounting a printed wiring to be exposed, and a pattern to be exposed, and is characterized in that: a dust removing roller that rotates while contacting at least one of the substrate, the work, and the reticle to perform dust removal; and the shovel wheel has a roller core, a wheel core, and a connecting shaft a ring (co lar), a roller core; a pressurizing device 'connects the dust removing roller (4) to the object, and the shaft ' is inserted into the roller to be disposed on the shaft to support the roller And the above-mentioned addition (four) is connected to the handsome, and the dust-removing ring is pressed by the vehicle, and the dust-tight ring is attached to the central portion of the connecting shaft ring system having the central portion shaft; Department 319886 6 200844686 The soft material of the two central collars of the 5th sea is composed of D', and is softly inked by the central part of the collar, and the ^(4) is connected to the shaft, although the shaft will be The clock core of the roller core absorbs the smear and suppresses it, and can effectively perform dust removal::: The load of the surface will be uniformly hooked

When the roller is used, it can suppress the heart. § Let the (4) (4) roller be used for dust removal. Wrinkles are generated on the side of the tributary roller, and it is also effective (the effect of the invention). Therefore, the optical device can effectively perform the effect of removing the exposure. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, the overall configuration of the exposure apparatus for manufacturing a printed wiring board is used. In Fig. 1, a printed wiring board to which a photoresist is applied is placed on a table 5 and can be moved by an exposure stage (exp_re in XYZ and 0 direction. In the exposure section) In the crucible, an imoto mask M attached to the mask folder 6 is disposed above the substrate B, and a light source 9 is disposed above the mask M. Exposure from the light source 9 causes light to be drawn The pattern of the cover is exposed to the substrate Β. The loading unit 3 is provided on one side of the exposure unit 10, and the substrate is transported here by two systems. The loading unit 3 is provided with the carrying unit 3, and the loading unit 3 is used. The loading unit 3 adsorbs the fixed substrate β, and transports the substrate 至 to the working machine 7 319886 200844686. The carrying unit 40 is disposed on the other side of the exposure unit 1 , and is transported on the exposed substrate B in the exposure unit 1 . Here, the transport is carried out in the post-process. The carry-out unit 4G is provided with the carry-out hand 4, and the carry-out hand 4 is moved to the position of the board B on the table 5 to adsorb the μ-substrate B and transfer it to the carry-out unit; d The description of the move into the hand 3 is equipped with the first cleaning head (fim eieaning 1st head 1 1 women's clothing in the move 3 When the exposure unit is on the side of the side, and can be moved up and down (four)', and when the person 3 is moved and retracted, dust is removed from the upper surface of the table 5 and the substrate B. That is, when the hand 3 is moved to the exposure unit! When moving, the 'i-cleaning head! will be pre- or near the top of the workbench 5, and move along the workbench 5 as the moving hand 3 moves, while performing dust removal. When moving into the hand 3 arrives at the work: On the previous day, the H station 5 will rise and receive the substrate b, and then the hand 3 will be retracted to the loading unit 3〇, but will fall down while the second head 1 will be lowered to contact or approach the top surface of the substrate B, and the hand 3 The movement is performed while moving on the substrate B, and the pressure is removed. In the above operation, the first cleaning head 1 is configured to perform dust removal on the table 5 and the substrate B. Fig. 2 and 3 The figure shows the composition of the main body, the main decoration u Beidingdi " Yueli head 1. The latter 2 π head 2 also forms the same structure. The first cleaning head i and the second cleaning head 2 are equipped with vacuuming. Machine 12, and in addition to Lei Bie ^ hard private 11, Bu... Clean roller 11 is a sticky season between the two 'main line hunting' Dot, the Dream Wheel roller trap, such as a resist, has dust with a viscosity of 319886 8 200844686. The detailed composition of the cleaning roller 11 will be described later. The vacuum cleaner 12 is mainly used for suctioning non-adhesive As described above, by providing both the cleaning roller 11 and the vacuum cleaner 12, Pa has Ait's dust and non-adhesive dust removal. On the side of the exposure portion 1G of the loading unit 30, the system is configured. If there is a liftable/lower one with the roller portion 19' and when the carry-in hand 3 returns to the carry-in portion, the adhesive C-wheel portion 19 rises and contacts the cleaning roller n, so that the adhesive tape roller 2 is attached to the cleaning roller. The dust of 1 is transferred to the adhesive tape and rolled in the shape of the Benbe. The second cleaning brush has two removing brushes 13 to remove the surface of the workpiece or the substrate B (in the second cleaning head 2, the mask is a brush) The 13 series is arranged in front of the cleaning roller n and the vacuum cleaner η<': to remove static electricity before dust removal to enhance the dust removal effect, and 13 to remove static electricity after dust removal to prevent the dust from being attached again. The function. 1 :: Description moves out hand 4. A second cleaning head is installed in the carrying hand 4: Two =: The second system is attached to the side of the exposure unit 1 of the unloading hand 4, and is movable: and the moving hand 4 moves toward the exposure unit 1 and moves out: the dust is removed from the mask. That is, # Moved out and moved with the movement of the hand 4 - moving over the mask 〜 ~ far-end dust removal. When the carry-out hand 4 reaches the substrate stack, the substrate β is carried out, and the table 5 is lowered. After that, the unloading hand 4 moves to the unloading unit 40 and carries out the base δ. However, when the unloading is performed, 319886 9 200844686 = liter, and the contact or proximity to the mask Μ is performed, and the 光 于 于 搬 搬Dust removal. According to the above action, the first dust removal can be utilized.颂2Into two masksΜ

In addition, the move out of the hand 4 in addition to the Bu Zhongzhuang, the main god 1 4 up to the women's clothing, the rest of the points system I

The cleaning head 1 is the same composition H, and the younger brother I. In addition, the dust is transferred to the adhesive tape roller portion i9, and the dust is transferred to the adhesive tape roller portion i9. Take 疋: η ίο Then 'Describe the exposure in the above structure. First, explain the first! Clean up the head of the narrative / righteous action. The substrate B is carried into the loading unit 3〇. First, the front loading process is performed by clamping the bottom plate 3 of the loading unit 30 by the front side process (adsorption fixing) of the substrate B, and at the start 3, T44r^. In this case, the moving hand 3 is moved. (Go #王) to the substrate on the workbench 5 is authorized (go to the predetermined position in the move 3) #生弟1π理头1 will be on the top of the loading. Move Λ 吏 Roller 11 touches the table 5 , while #绩移动, by moving to clean the wheel 11

Rotate to remove the dust collected from the table wheel U 12 and the de-sweeping brush η #队+同蚪, and carry out the vacuum cleaner to remove the power of the package brush 13. When the transfer table 5 rises and receives the substrate β. Erda = The rim system is located at the ^ / month of the work △ $, and is not in contact with the workbench 5. Connect 4, make the port 5 will adsorb the fixed substrate 3 and move it into the hand 3 will return to hang Λ · · ^ Λ / ' κ then ' 捣 C into the 30 (return). At this time, in addition to the dew-fixed work A 5 & the & β / 衮 wheel 11 will go to the Β 5 of the substrate 的 above the deer dust collector 12 to collect dust and use the surface: dust. At the same time, the 'Lei I cleaning head ^ will be torn into the year / to remove electricity. Next, the predetermined position in the moving hand 3 moves up, and returns to 319886 10 200844686 to the origin position. After moving the hand 3 back to the squadron Q Λ / after the mouth to the loading part 3 ,, the adhesive belt roller portion θ rises and comes into contact with the cleaning roller 1 , and the adhesive belt roller portion 19 rotates: The dust adhering to the cleaning roller u is transferred to the adhesive tape roller portion 19. During k, the table 5 will rise, the substrate B and the mask Μ will be in close contact with each other, and the light source 9 will be illuminated for exposure. Next, the operation of the second cleaning head 2 will be described.

After the exposure of the substrate B is completed, the stage 5 and the substrate 6 are lowered, and the substrate 4 is moved (outward) by the carry-out unit 4 to the substrate on the table 5. At the predetermined position in which the hand 4 is moved, the second cleaning head 2 contacts the mask M' with the m wheel, and moves the hand 4 to continue moving, and moves the cleaning roller u to move to remove the light. Cover the dust. At the same time, the dust collection of the vacuum cleaner 12 and the removal of the static brush are performed. After the shot 4 reaches the substrate-receiving position, the exposure table 7 and the table $ will rise, and the carry-out hand 4 will hold (adsorb the fixed) on the table 5: the exposed substrate Β. Then, after the table 5 is lowered, the moving machine 4 is moved (returned) to the carry-out unit 40. At this time, in the same manner as in the case of the departure, the dust removal and dust removal of the photoconductor 滚轮 of the roller 11 and the vacuum cleaner 12 are performed. According to the configuration described above, the substrate Β and the table 5 can be dedusted, and each time The mask 进行 will perform two times of dust when performing one exposure. In particular, it is possible to prevent the dry film photoresist or the solder resist from adhering to the opposite surface of the exposed surface of the substrate by dust removal by the table 5. In addition, since both the cleaning roller u and the vacuum cleaner 12 are provided, it is possible to remove dust with adhesive dust and non-adhesive dust by removing 1 319886 200844686. Further, since the static eliminating brush 13 can be used to remove static electricity, the dust removing effect can be removed and the adhesion of dust after dust removal can be prevented. In addition, due to the 1st cleaning head! Since the second cleaning head 2 is attached to the transport t3 and the carry-out hand 4, there is no need to arrange a new drive mechanism or the like. v The wheel core system has a cleaning part ", the roller has a fixed:: the pre-shaft bearing!! Two main and the bearing plate B or the first cover cleaning surface of the bearing 17: force set will be > month handle roller 四 (four) The gap to the substrate is inserted into the roller core 2^, and the axial direction of the roller core and the shaft coupling shaft 23 and the soft coupling collar 24 thin shaft 22 is fixed by the hard 22 enamel coupling collar 24. And the structure is configured such that the small dead nails can be fixed to an arbitrary position, and the position in the axial direction can be adjusted. The rigid connecting collar 23 is attached to the shaft 22. The rigid connecting collar 23 It is made of hard: the central #衣 has two plus, the load generated by the device 16 is used by the borrower. For example, the hardness of the yoke that is not deformed here is in the male and yoke, and the stainless steel is used. On the other hand, the soft connecting shaft is connected to the hard connecting shaft. The soft material is set to be softer than the hard connecting ring 23, and is used by a predetermined amount. To change the weight of the shape and shape of the object. For example, here 319886 12 200844686 1' is a polyamine rubber (a coffee maker). In the above embodiment, the central portion 23 and the soft connecting collars 24 and 25 on both sides are attached to each other. The reason is as follows. The meeting, the party of the 'PM Μ P, although you want to use only the hard part of the central part of the gentleman to make the pressure distribution uniform, because only the central:: i force θ • Jiaoda, so in order to Pressure: the length of the scoop ring 23; # n * to lengthen the length of the hard connecting shaft. However, when the length of the hard connecting shaft at the center portion is lengthened, the shaft 22 is curved, and the hard f connecting = is transmitted to the roller core 21, and The problem of unevenness of the heart of the face 8 is cleaned. 'In this way, only the soft joints of the collar U are not added, and the soft joint collars 24 and 24 are provided on both sides to seek pressure. =, quality one ^ The cleaning portion 2 is provided on the outer side of the roller core 21, and the dust is removed by the cleaning portion 8 of the cleaning portion. As the cleaning portion 2, a Shishi rubber roller or a sticky roller can be used. Explain the action of cleaning the roller 1 1. First, S is applied by the pressing device 16 through the bearing 17 The load applied to the shaft 22 by the shaft is transmitted to the soft f-connecting collar 24, the roller core 21, and the cleaning portion 20' so that the cleaning portion 2〇 is pressed to 8 〇 - Figure 4 shows the state before the load is applied. As shown in Fig. 5, when the load is applied by the pressurizing device 16, the shaft 22 will be slightly bent, however, since the warpage of 319886 200844686, 22 will break the soft joint collar and warp, and maintain the flat state. Wheel center 2! Does not connect the length of the collar 23. Iron II:::Chemical one's need to lengthen the hard Μ Μ Η 加 加 Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η The curved, rigid connecting collar 23 also warps. In addition, the hard far έ 23 also

2 Bu-fruit, the closed warp will be transmitted to the roller core '; ° ^ θ ¥ The pressure distribution of the cleaning surface 8 becomes uneven. In order to solve the above problem, as described above, in the present embodiment, the I-structure w is a portion in which the rigid connecting collar 23 and the soft connecting member (four) are placed on the side of the center portion, and different materials are used. The configuration is firstly made by the soft connecting shafts of the hard joint shafts at the central part of the salt, and the soft joints 24, ... 23 and the two sides of the garments 4, so that the tightening of the collars is hard and easy to follow. The warp of the shaft 22 is interesting.乂..., the material of the outer hard connecting collar 23 is made of a hard material. Because of the soft material, the shaft 22 is too trapped in the central hard joint collar 23, and the shaft 22 is hindered to the roller core. The end of the 21th part of the soft connecting shaft i use soft material, so as shown in Figure 5, even if the car is warped by 22, it will not affect the roller core 2, so the roller core 21 will not The warping surface can maintain a flat state. ^ As described above, the rigid connecting collar 23 and the soft connecting collar 24 can be positioned in the axial direction on the circumferential positive shaft 22. By this position adjustment, the pressure distribution of the cleaning portion 20 can be made uniform. In order to actually achieve a uniform distribution of the pressure distribution, while measuring the distribution of the force applied to the cleaning surface 8, the 319886 14 200844686 can also be used to adjust the position by sliding the soft connection shaft 3 and the soft coupling collar 24 to the position. In addition, it is also because the cymbal cymbal 24 is close to the center and slowly moves to the end. The direction of the t-turn 21, the mass of the whole, and the load are uniformly applied. Red, and in the standard configuration, the pressure distribution cannot be changed to the number of 24. 1 Pong plus hard connecting collar 23 and soft connecting collar are required to be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS The _f 1 diagram shows a schematic front view of an embodiment of the present invention. The structure of the structure of the Lishu 2 is a front view. Fig. 3 is a schematic plan view showing the configuration of the first cleaning head 1 and the moon 2 of the embodiment of the present invention. 8. Fig. 4 is a schematic front view showing the cleaning roller u according to the embodiment of the present invention. Fig. 5 is a view showing the operation of the cleaning roller u according to the embodiment of the present invention. [Main component symbol description] 2 3 1st cleaning head 2nd cleaning head Handed in Handed out Work table Work stand Mask stand Exposure stage 15 319886 200844686

8 Cleaning surface 9 Light source 10 Exposure part 11 Cleaning roller 12 Vacuum cleaner 13 Removing brush 16 Pressing device 17 Bearing 19 Adhesive belt roller 20 Cleaning part 21 Roller core 22 Shaft 23 Hard connecting collar 24 Soft connecting collar 30 Loading part 40 Carry out part B substrate Μ Photomask 16 319886

Claims (1)

200844686 X. Patent application scope: .1 · An exposure device, comprising: a workbench, which is a printed wiring board on which exposure should be performed; and a photomask, which has a pattern to be exposed; There is: a dust removing roller that rotates while contacting at least one of the substrate, the gt, and the reticle to perform dust removal; and the device 系 presses the dust removing roller to the object uranium dust removing roller system Equipped with: roller core; pregnancy, inserted into the aforementioned roller core The knot ring is disposed on the shaft (four) to cut the roll. The pressurizing device is connected to the shaft and passes through the second dust removing roller; n the aforementioned connecting collar system has the central portion of the hard material of the central portion The shaft collar is composed of a middle material attached to the shaft; and the end collars are respectively attached to the central portion side, and the ends of the day + A, +, rb clothing are compared to the central portion The soft material of the collar is also soft. - The type of exposure device is equipped with: The workbench' is to mount the substrate to be exposed; 319886 17 200844686 is to place the substrate on the workbench: the board is carried out, the board is removed from the guard station; and the mask is mounted. a pattern for performing exposure, characterized in that: the first dust removing roller is moved in conjunction with the substrate carrying device, and the table is dusted when the substrate is carried in, and When the substrate is moved and then retracted, the substrate that has been placed on the table is dedusted; the first and second dust removing rollers are moved in conjunction with the substrate carrying device and the dust is removed; and Pressing device, the dust removing roller is pressed against the substrate or the reticle; wherein, the dust removing roller is provided with: a roller core; The substrate is loaded into the device and carried into the substrate; the shaft ' is inserted into the roller core; and the wires are connected. a collar disposed on the shaft for supporting the roller and the dust removing roller; the pressurizing skirt is coupled to the shaft, and the connecting collar is connected via the shaft: the central collar is installed The material is formed in the center of the shaft; and the end shafts are respectively attached to the both end portions of the center portion (four), and are made of a soft material softer than the central portion collar. 1 0 2 319886 200844686 • The exposure apparatus of the first or second page of the patent scope of claim 4, wherein the number of the joint collars can be increased or decreased. 4. The exposure apparatus of claim 1, 2 or 3, wherein the connecting collar is movable on the shaft. The exposure device of claim 1 or 2, wherein the central portion collar is formed so as not to be deformed by the pressing of the pressing device; It is formed in such a manner as to be deformed by the pressing of the pressurizing device. For example, the exposure apparatus of the first or the second item of the patent, wherein ^ ^ the central part of the collar is composed of steel; the end of the month is composed of polyurethane rubber. 319886 19