JP2008216433A - Exposure device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve exposure in high yield by efficiently removing dust on a substrate, a photomask and a platen. <P>SOLUTION: A first cleaning head touches the upper face of a platen to remove dust while a carry-in hand is operated to carry in and retreat. A second cleaning head removes dust on a photomask. Upon removing dust, a shaft 22 is loaded through a bearing 17 by a pressing device 16, and the load is transmitted through a hard linking collar 23, a soft linking collar 24, a roller core 21 to a cleaning section 20, and the cleaning section 20 is pressed to the face 8 to be cleaned. Although the shaft 22 is bent by the load of the pressing device 16, the bend of the shaft 22 is absorbed by the soft linking collar 24, which prevents the roller core 21 from bending but keeps a flat state. Thus, the pressure distribution on the face to be cleaned is made uniform, and efficient cleaning can be performed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an exposure apparatus.

A photolithographic method is widely applied in various fields, in which a predetermined pattern is photo-baked by an exposure device on the surface of a substrate coated with a photosensitive material such as photoresist, and then a pattern is formed on the substrate by an etching process. In recent years, substrates and the like are also manufactured using an exposure apparatus.
In an exposure apparatus for a printed wiring board, if dust is present between the photomask and the board, there is a problem that the portion is unexposed and the product is defective.
This dust includes, for example, dust that is not sticky itself such as copper foil, and dust that is sticky itself such as dry film photoresist and solder resist. In order to remove, a configuration in which a dust removing device is provided in the exposure device has been proposed, and a configuration using a dust removing roller such as an adhesive roller as the dust removing device is known.

Japanese Patent No. 3533380

However, in the case of the dust removing device using the conventional dust removing roller, the roller is cleaned by applying a large load to both ends of the roller shaft (for example, a load of 160 N with respect to a 640 mm roller). As a result, the pressure distribution with respect to the surface to be cleaned of the roller becomes non-uniform, and the roller and the cleaning surface are not in contact with each other in the central portion in the axial direction, thereby deteriorating the cleaning performance. . Further, when an adhesive tape roll is used as the dust removing roller, wrinkles are likely to occur in the adhesive tape roll due to non-uniform pressure distribution, and this also causes the cleaning performance to deteriorate.
The object of the present invention is to solve the above-mentioned problems of the prior art.

In order to achieve the above object, the present invention provides an exposure apparatus comprising a platen on which a printed wiring board to be exposed is placed, and a photomask on which a pattern to be exposed is drawn. A dust removing roller that removes dust by rotating and contacting at least one object in a photomask; and a pressure device that presses the dust removing roller against the object; and the dust removing roller, A roller core, a shaft inserted into the roller core, and a connecting collar disposed on the shaft and supporting the roller core, and the pressure device is connected to the shaft and removes dust through the shaft. The roller is pressed, and the connecting collar is attached to the central collar made of a hard material attached to the central portion of the shaft and to both ends of the central collar, and is made of a material softer than the central collar. The end collar, To, characterized in that.
In the above configuration, the pressure device is connected to the shaft, and the shaft is bent by this pressurization, but the deflection of the shaft is absorbed by the end collar and the deflection of the roller core is suppressed. Therefore, the load applied to the cleaning surface of the roller is made uniform, and effective dust removal can be performed. Moreover, when using an adhesive tape roll for a roller, generation | occurrence | production of the wrinkle by the side of an adhesive tape roll is suppressed, and effective dust removal can be performed similarly.

  According to the exposure apparatus of the present invention, since dust removal is performed efficiently, there is an effect that exposure with a high yield can be realized.

Embodiments of the present invention will be described below with reference to the drawings.
First, the overall configuration of an exposure apparatus for manufacturing a printed wiring board will be described.
In FIG. 1, a printed wiring board B to which a photoresist is applied is placed on a platen 5 and can be moved in the XYZ and θ directions by an exposure stage 7. In the exposure unit 10, a photomask M mounted on the mask folder 6 is disposed above the substrate B, and a light source 9 is further provided thereon. The exposure light from the light source 9 exposes the pattern drawn on the photomask M onto the substrate B.

  A carry-in unit 30 is provided on one side of the exposure unit 10, and the substrate B is transferred from the previous process. A carry-in hand 3 is provided in the carry-in unit 30, and the substrate B is sucked and fixed by the carry-in hand 3, and the substrate B is transported onto the platen 5.

  A carry-out unit 40 is provided on the other side of the exposure unit 10, and the substrate B exposed by the exposure unit 10 is transported here and sent to a subsequent process. The unloading unit 40 is provided with an unloading hand 4, and the unloading hand 4 moves to the position of the substrate B on the platen 5 so that the substrate B is sucked and fixed and transferred to the unloading unit 40.

A first cleaning head 1 is attached to the carry-in hand 3. The first cleaning head 1 is mounted on the exposure unit 10 side of the carry-in hand 3 and is movable in the vertical direction so that dust is removed from the platen 5 and the upper surface of the substrate B when the carry-in hand 3 is loaded and retracted. It has become. That is, when the carry-in hand 3 moves in the direction of the exposure unit 10, the first cleaning head 1 descends at a predetermined position to contact or approach the upper surface of the platen 5, and moves on the platen 5 as the carry-in hand 3 moves. Remove dust while moving. When the carry-in hand 3 reaches the top of the platen 5, the platen 5 rises to receive the substrate B, and is lowered by suction. Thereafter, the carry-in hand 3 retreats to the carry-in unit 30, but the first cleaning head 1 also descends during this retreat, contacts or approaches the upper surface of the substrate B, and moves over the substrate B as the carry-in hand 3 moves. Remove dust while moving.
With the above operation, the platen 5 and the substrate B are dedusted by the first cleaning head 1.

2 and 3 show the configuration of the first cleaning head 1. The second cleaning head 2 described later has the same configuration.
The first cleaning head 1 and the second cleaning head 2 include a cleaning roller 11, a suction dust collector 12, and a static elimination brush 13. The cleaning roller 11 is an adhesive roller, and mainly collects adhesive dust such as a resist by the adhesive roller. Details of the configuration of the cleaning roller 11 will be described later.
The suction dust collector 12 mainly removes dust by sucking dust having no adhesiveness. Thus, by providing both the cleaning roller 11 and the suction dust collector 12, it is possible to effectively remove both sticky dust and non-sticky dust.
An adhesive tape roll unit 19 is provided on the exposure unit 10 side of the carry-in unit 30 so as to be movable up and down. When the carry-in hand 3 returns to the carry-in unit 30, the adhesive tape roll unit 19 rises and contacts the cleaning roller 11. The roll unit 19 is configured to rotate and transfer dust adhering to the cleaning roller 11 to the adhesive tape roll unit 19.

  In this embodiment, two static elimination brushes 13 are further provided to remove static electricity on the surface of the platen 5 or the surface of the substrate B (photomask M in the second cleaning head 2). The neutralization brush 13 is provided in front of and behind the cleaning roller 11 and the suction dust collector 12, and one of them removes static electricity before the dust removal to improve the dust removal efficiency. The other static elimination brush 13 has a function of removing static electricity after dust removal and preventing reattachment of dust after dust removal.

Next, the carry-out hand 4 will be described. The second cleaning head 2 is attached to the carry-out hand 4. The second cleaning head 2 is mounted on the exposure unit 10 side of the carry-out hand 4 and can move in the vertical direction. When the carry-out hand 4 is moved to the exposure unit 10 and carried out, dust removal of the photomask M is performed. To do. That is, when the carry-out hand 4 moves in the direction of the exposure unit 10, the second cleaning head 2 rises at a predetermined position to contact or approach the photomask M, and moves over the photomask M as the carry-out hand 4 moves. Remove dust while moving. When the carry-out hand 4 reaches the substrate B, the carry-out hand 4 sucks and fixes the substrate B, and the platen 5 descends. Thereafter, the unloading hand 4 moves to the unloading unit 40 and unloads the substrate B. At the time of unloading, the second cleaning head 2 rises, contacts or approaches the photomask M, and the unloading hand 4 moves. The dust is removed while moving on the photomask M.
With the above operation, dust removal of the photomask M can be performed twice by the second cleaning head 2.
The carry-out hand 4 has the same configuration as that of the first cleaning head 1 except that it is mounted upward, and has the configuration shown in FIGS. Further, an adhesive tape roll unit 19 is provided, and dust from the exposure unit 10 is transferred to the adhesive tape roll unit 19 in the same manner.

The overall operation of the exposure apparatus having the above configuration will be described.
First, the operation of the first cleaning head 1 will be described. First, the substrate B is carried into the carry-in unit 30 from the previous process. The carry-in hand 3 waiting in the carry-in unit 30 chucks (adsorbs and fixes) the substrate B, and the carry-in hand 3 moves to the substrate delivery position on the platen 5 (outward path). At a predetermined position during movement of the carry-in hand 3, the first cleaning head 1 is lowered and the cleaning roller 11 comes into contact with the upper surface of the platen 5. The carry-in hand 3 continues to move, and the cleaning roller 11 rotates with the movement to remove dust adhering to the platen 5. At the same time, dust collection by the suction dust collector 12 and static elimination by the static elimination brush 13 are performed. When the carry-in hand 3 reaches the substrate delivery position, the platen 5 rises and receives the substrate B. At this time, the cleaning roller 11 is located outside the platen 5 and is not in contact with the platen 5.

Next, the platen 5 sucks and fixes the substrate B and moves down. Then, the carry-in hand 3 returns to the carry-in section 30 (return path), and at this time, the cleaning roller 11 removes dust on the upper surface of the substrate B that is attracted and fixed to the platen 5. At the same time, dust collection by the suction dust collector 12 and static elimination by the static elimination brush 13 are performed. Then, at a predetermined position during movement of the carry-in hand 3, the first cleaning head 1 moves up and returns to the origin position. When the carry-in hand 3 returns to the carry-in unit 30, the adhesive tape roll unit 19 rises and comes into contact with the cleaning roller 11, the adhesive tape roll unit 19 rotates and the cleaning roller 11 is rotated, and dust adhered to the cleaning roller 11. Is transferred to the adhesive tape roll unit 19.
During this time, the platen 5 rises, the substrate B and the photomask M are brought into close contact with each other, the light source 9 is turned on, and exposure is performed.

Next, the operation of the second cleaning head 2 will be described.
When the exposure of the substrate B is completed, the platen 5 and the substrate B are lowered, and the carry-out hand 4 moves (outward) from the carry-out unit 40 to the substrate delivery position on the platen 5. At a predetermined position during movement of the carry-out hand 4, the second cleaning head 2 is raised, the cleaning roller 11 comes into contact with the photomask M, the carry-out hand 4 continues to move, and the cleaning roller 11 is rotated by the movement. Dust adhering to the photomask M is removed. At the same time, dust collection by the suction dust collector 12 and static elimination by the static elimination brush 13 are performed. When the carry-out hand 4 reaches the substrate delivery position, the exposure stage 7 and the platen 5 are raised, and the carry-out hand 4 chucks (adsorbs and fixes) the exposed substrate B on the platen 5. Then, the platen 5 descends and retreats, and the carry-out hand 4 moves (returns) to the carry-out unit 40. At this time as well, the dust removal of the photomask M by the cleaning roller 11 and the suction dust collector 12 and the charge removal by the charge removal brush 13 are performed as in the forward path.

According to the configuration described above, dust can be removed from the substrate B and the platen 5, and with respect to the photomask M, dust can be removed twice for each exposure. In particular, dust removal of the platen 5 has an effect of preventing adhesion of a dry film photoresist, a solder resist or the like to the opposite surface of the exposure surface of the substrate B. In addition, since both the cleaning roller 11 and the suction dust collector 12 are provided, sticky dust and non-sticky dust can be effectively removed, and reliable dust removal is possible. Further, since static electricity is removed by the charge eliminating brush 13, dust removal efficiency is improved, and adhesion of dust after dust removal can be prevented.
Further, since the first cleaning head 1 and the second cleaning head 2 are attached to the carry-in hand 3 and the carry-out hand 4, there is an effect that it is not necessary to provide a new drive mechanism or the like.

As shown in FIG. 4, the cleaning roller 11 includes a cleaning unit 20, a roller core 21, and a shaft 22.
Both ends of the shaft 22 are supported by a bearing 17, and a pressure device 16 is attached to the bearing 17 so that the cleaning roller 11 is pressed against the cleaning surface 8 such as the substrate B or the mask M with a predetermined force. .

The shaft 22 is inserted into the roller core 21 with a predetermined gap, and the roller core 21 and the shaft 22 are fixed by a hard connection collar 23 and a soft connection collar 24. The positions of the hard connecting collar 23 and the soft connecting collar 24 are movable in the axial direction of the shaft 22 and are configured to be fixed with screws or the like at arbitrary positions, so that the position in the axial direction can be adjusted. ing.
The hard connecting collar 23 is attached to the substantially central portion of the shaft 22, and two identical ones are attached. The hard connecting collar 23 is made of a hard material, and has a hardness that does not substantially deform due to a load applied by the pressure device 16. For example, in this embodiment, a stainless steel material is used.
On the other hand, the soft connecting collar 24 is provided on both sides of the hard connecting collar 23 at a predetermined distance, and is made of a softer material than the hard connecting collar 23, and is deformed by a predetermined amount due to a load applied by the pressure device 16. What has hardness is used. For example, in this embodiment, a urethane rubber material is used.

In the above embodiment, the configuration in which a total of three connecting collars of the central hard connecting collar 23 and the soft connecting collars 24 and 24 on both sides is mounted is as follows. That is, if the pressure distribution is made uniform by supporting the hard connection collar 23 only in the central portion, only the pressure in the central portion is increased. Therefore, in order to make the pressure uniform, it is necessary to increase the length of the hard connection collar 23. There is. However, when the length of the central hard connecting collar 23 is increased, the hard connecting collar 23 is also bent following the bending of the shaft 22, and this bending is transmitted to the roller core 21, so that it is not uniform with respect to the cleaning surface 8. There is a problem in that the pressure distribution becomes uneven.
In this embodiment, instead of increasing the length of the hard connecting collar 23, instead of providing the soft connecting collars 24, 24 on both sides, the pressure is made uniform, and at the same time, the deflection of the shaft is reduced. 24 is configured to absorb the deformation.

  A cleaning unit 20 is provided outside the roller core 21, and the cleaning surface 20 removes dust from the cleaning unit 20. As the cleaning unit 20, a silicon rubber roller, an adhesive tape roll, or the like can be used.

The operation of the cleaning roller 11 will be described.
First, a load is applied to the shaft 22 through the bearing 17 by the pressurizing device 16. The load applied to the shaft 22 is transmitted to the hard connecting collar 23, the soft connecting collar 24, the roller core 21, and the cleaning unit 20, and the cleaning unit 20 is pressed against the cleaning surface 8.
FIG. 4 shows a state before a load is applied. When a load is applied by the pressure device 16, the shaft 22 bends as shown in FIG. However, since the bending of the shaft 22 is absorbed by the soft connecting collar 24, the roller core 21 is kept flat without being bent.

  As described above, when the pressure distribution is made uniform by supporting only the central portion of the roller core 21 by the hard connection collar 23, the length of the hard connection collar 23 needs to be increased. However, when the length of the hard connecting collar 23 at the center is increased, the hard connecting collar 23 is also bent following the bending of the roller core 21. Further, the bending of the hard connecting collar 23 is transmitted to the roller core 21, and as a result, the pressure distribution is non-uniform with respect to the cleaning surface 8.

In order to solve the above problem, as described above, in the present embodiment, the hard connecting collar 23 and the soft connecting collar 24 are divided into the central portion and the end portions on both sides thereof, and each has a structure using different materials. is there.
First, by dividing the hard connection collar 23 at the center and the soft connection collar 24 at the ends on both sides, the length of the hard connection collar 23 can be shortened, and it becomes difficult to follow the bending of the shaft 22.

  The hard connecting collar 23 is made of a hard material. This is because if a soft material is used, the shaft 22 sinks too much in the central hard connecting collar 23 and the shaft 22 interferes with the end of the roller core 21. Further, since the soft connecting collar 24 at the end is soft, the roller core 21 is not affected by being crushed even if the shaft 22 is bent as shown in FIG. First, a flat state can be maintained.

  As described above, the position of the hard connecting collar 23 and the soft connecting collar 24 on the shaft 22 can be adjusted. This position adjustment makes it possible to make the pressure of the cleaning unit 20 uniform. In order to actually arrange the pressure distribution to be uniform, the hard connection collar 23 and the soft connection collar 24 are slid to adjust the position while measuring the pressure distribution applied to the cleaning surface 8. At first, it is preferable that the soft connecting collar 24 is also moved to the center and gradually moved to the end. In addition, the pressure distribution may not be uniform in the standard configuration depending on conditions such as the length of the roller core 21, the entire mass, and the direction in which the load is applied. At that time, the number of the hard connecting collars 23 and the soft connecting collars 24 may be increased and adjusted.

1 is a schematic front view showing an embodiment of the present invention. FIG. 2 is a schematic front view illustrating the configuration of a first cleaning head 1 and a second cleaning head 2 according to an embodiment of the present invention. FIG. 2 is a schematic plan view showing the configuration of a first cleaning head 1 and a second cleaning head 2 according to an embodiment of the present invention. 1 is a schematic front view illustrating a configuration of a cleaning roller 11 according to an embodiment of the present invention. Operation | movement explanatory drawing of the cleaning roller 11 of one Embodiment of this invention.

Explanation of symbols

1: first cleaning head, 2: second cleaning head, 3: carry-in hand, 4: carry-out hand, 5: platen, 6: mask folder, 7: exposure stage, 8: cleaning surface 8, 9: light source, 10: Exposure unit, 11: cleaning roller, 12: suction dust collector, 13: static elimination brush, 16: pressure device, 17: bearing, 19: adhesive tape roll unit, 20: cleaning unit, 21: roller core, 22: shaft, 23 : Hard connection collar, 24: Soft connection collar, 30: Loading part, 40: Unloading part.

Claims (4)

In an exposure apparatus comprising a platen on which a printed wiring board to be exposed is placed and a photomask on which a pattern to be exposed is drawn,
A dust removing roller for removing dust by rotating and contacting at least one object in the substrate, platen and photomask;
A pressure device that presses the dust removing roller against the object,
The dust removal roller;
A roller core,
A shaft inserted into the roller core;
A connecting collar disposed on the shaft and supporting the roller core,
The pressure device is connected to the shaft and presses the dust removing roller through the shaft;
Said connecting collar;
A central collar made of a hard material attached to the central portion of the shaft, and an end collar made of a material softer than the central collar, each attached to both ends of the central collar.
An exposure apparatus characterized by that. A platen for placing a substrate to be exposed, a substrate carry-in device for carrying in the substrate to place the substrate on the platen, a substrate carry-out device for carrying out the substrate from the platen, and a photo depicting a pattern to be exposed An exposure apparatus comprising a mask,
A first dust removing roller that moves in conjunction with the substrate carry-in device, removes the platen when carrying the substrate, and removes the substrate placed on the platen when retracted after carrying the substrate;
A second dust removal roller that moves in conjunction with the substrate carry-out device and removes the photomask;
A pressure device that presses the dust removing roller against the substrate or photomask;
The dust removal roller;
A roller core,
A shaft inserted into the roller core;
A connecting collar disposed on the shaft and supporting the roller core,
The pressure device is connected to the shaft and presses the dust removing roller through the shaft;
Said connecting collar;
A central collar made of a hard material attached to the central portion of the shaft, and an end collar made of a material softer than the central collar, each attached to both ends of the central collar.
An exposure apparatus characterized by that. The quantity of the connecting color can be increased or decreased.
The exposure apparatus according to claim 1 or 2. The connecting collar is movable on the axis;
The exposure apparatus according to claim 1, 2 or 3.

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