200832053 九、發明說明： 【發明所屬之技術領域】 明係關於—種在製造半導體裝置、印刷基板或液晶顯示 件時作為防塵器使用之微影用防護薄膜組件的製造方法， 3疋關於-種在防護薄膜框架上財、形成防護薄膜接合 方法。 … 【先前技術】 用參ftHLSI等半導體或是液晶顯示板等產品的製造中，係 導體晶圓或液晶用原板以製作形成圖案，惟若此時所 或初縮遮罩以下僅稱光罩）有灰塵附著的話，由於 及It光：5光¥曲’故除了會使轉印的圖案變形、使邊 緣雙^以外二运會使基底污黑，並損壞尺寸、品f、外觀等。 佯持通常係在無塵室内進行，惟即使如此欲經常 ί;ΐΐ==:ί==:Γ，異物並非直接附 響 防護薄膜組件上的異物就不會對轉 萨酸纖膜組件’係用透光性良好的槪纖維素、 ί，4物質構成透明防護薄膜，並以銘、不錄200832053 IX. Description of the Invention: [Technical Field] The invention relates to a method for manufacturing a lithographic protective film assembly used as a dustproof device in the manufacture of a semiconductor device, a printed substrate or a liquid crystal display device, A protective film bonding method is formed on the pellicle frame. [Prior Art] In the manufacture of products such as semiconductors such as ftHLSI or liquid crystal display panels, the conductor wafer or the liquid crystal original board is patterned to form a pattern, but the mask is only called a mask at this time or the initial mask. If there is dust, it will be due to the fact that it will be deformed by the light of the light and the light of the light, which will cause the substrate to be stained and the size, product f, appearance and the like to be damaged. It is usually carried out in a clean room, but even if it is so often; ΐΐ==: ί==:Γ, foreign matter is not directly attached to the foreign matter on the protective film module, it will not Use a transparent light-transmitting yttrium cellulose, ί, 4 material to form a transparent protective film, with the name, not recorded
著；^防防護薄膜組件框架’將該防護薄膜貼附黏 者於雜護溥膜組件框架的上端面。接著，在 H 的下端没置為裝著於光罩上而由聚了燁樹 細、煉= 層（隔離=貝所構成的黏著層，以及保護黏著層的脫模 框架型防護薄膜組件，由於其防護薄膜 土布亚不胃側難。然而’像液晶甩途所使用的大型防護薄膜^ 200832053 件，其防護薄膜框架寬度（膜接合面寬度）甚至可 故在未經塗俩面上塗布麟合舰會伴隨著很大的娜。又， 巧=’其長邊與短邊的防護薄膜框架 見度（麟a面見度）多不相同，此時_度 篇2?置大/相異的去角細^面i度以二 角會降;:=_。當= υν硬化型接導致框_性降低。特別是在 防=薄膜時:可能會有溢出到 媒量可以達到降低枯度妙加‘ 日，接合劑溶液的溶 均勻等問題，造成ί二 而流動變不 [專利文獻1]日本觸發生。 【發明内容】 填完=:導 空氣等加壓源從注射器5所$ ^ 53利用所連接的 溶液擠出。然後，使斜衣的針官51則端的吐出口 52將該 面移動，將防52 —面滴膜接合劑溶液-該方式係-般所使面，周圍塗布好。 簡便之外，吐出量控制容易也^優^機器構造單純，管理保管 200832053 ^針管51通常係係單獨使用中央且右-、畜:-官51前端連續滴下的膜接合劑溶^、貝的針狀導管，自針 膜層，其塗布寬度在針管51進行方^产散姑性適當擴張形成 膜接合劑擴散寶声相斜腺拉人俊万擴政。 管進行口慮相對針 這樣的情況下’當塗布之邊改變^二6 (a土]。然而’在 針管在進行方向上複數並行並沒有什麼3進仃方向改變9〇。後， 案㈣作為對應方 對角2個轉角部Α、c能^適i的被;4，防護薄膜组件其 B、㈣分64。;，63係轉角部 為了防止廷種問題發生，通當，口 ^木The protective film assembly is attached to the upper end surface of the frame of the composite film assembly. Then, at the lower end of H, it is not placed on the reticle and is covered by a eucalyptus fine layer, a layer of lining (isolation = an adhesive layer composed of shells, and a release-frame type protective film module for protecting the adhesive layer, The protective film is not difficult on the stomach side. However, the large protective film used in the liquid crystal system, 200832053, has a width of the protective film frame (width of the film joint surface) and can even be coated on both sides. The ship is accompanied by a large Na. In addition, Qiao = 'the length of the protective film frame of the long side and the short side is different (Lin a face), at this time _ degree 2? Large / different The angle of the face is reduced by two angles::=_. When = υν hardened type leads to a decrease in the frame _. Especially in the case of anti-film: there may be overflow to the medium to reduce the In addition, the problem of uniform dissolution of the cement solution causes the flow to become unsatisfactory [Patent Document 1] Japanese touch occurs. [Summary of the Invention] Filling = = Pressurizing source such as air from the syringe 5 $ ^ 53 Extrusion by the connected solution. Then, the surface of the needle 51 of the oblique coat is made up of the discharge port 52. The anti-52-drip film adhesive solution is applied to the surface of the film. This method is applied to the surface and is coated around. It is easy to control the amount of discharge, and it is easy to control. The machine structure is simple, and the management is safe. 200832053 ^The needle tube 51 is usually The needle-shaped catheter of the membrane-bonding agent and the shellfish which are successively dropped from the front end of the center and the right side of the animal: - the official 51 is used alone, and the coating width is formed in the needle tube 51 by the needle width of the needle tube 51. The film-bonding agent diffuses the sound of the sound phase of the oblique gland and pulls the man to expand the government. The tube conducts the mouth with respect to the needle in the case of 'when the coating side changes ^ 2 6 (a soil). However 'the needle tube is in parallel in the direction of the needle There is no change in the direction of the 仃 〇 〇 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四In order to prevent the occurrence of the problem, the corner part
Li因為裝置成本會變高，且液量供給控制變得相 迫近轉角部時，必須在直線塗布=^^ 塗布液的吐出量使並不合沒有情況下欲控制好 難的。曰又有主布到或吐出太多而溢出是相當困 力而數針管吐出_合劑’會因為液體表面張 當防護薄膜框架的膜接合面寬度不同日寺，若不將其. 成符合最狹窄的寬度的話’膜接合劑便會溢出， ii困、:窄邊遠是寬廣邊兩者都不會發生沒有塗布到的情況是 LV βίΐ卜，如圖6 (c)所示，為了不用旋轉機構而在對庫轉角邻 二及垂直的兩邊上配置4根針管61時，由於針管通過位 登，使塗布液62分布明顯產生不均勻，且轉角部還是容易 200832053 塗布或溢出等不良:鲁況。 法，盆對胺前為止’吾人尚未得到一種安定的塗布方 護薄i框年，特別是對用於液晶用途而寬度較大的防 塗布適量的接合_不會產生沒有塗布到或溢出 [發明所欲解決的問題] 以並能形成』不會產 設有吐Γ^Γΐΐ5背一面使吐出口移動來進行塗布的，此時， ^_的^内頭(=^^在防護薄膜柩架膜接合面寬度的 該淹架其膜接合面寬度的長邊與短邊不同時， 直之Ϊ向的i声ίϋί邊寬度的6G〜12G%的範圍内，與 :;;?f布頭移動方向垂直的方向上的梅i動 為頂央設置吐出口，且呈财央部作 4)此％该凸出形狀更宜由一個或複數個曲面所形成（請求項 隙宜ίί:二中架表面之間的間 使其80%«上的細維持在處^餘布頭表面’ ^5) 作，而且不會產生沒有塗布到的情況。仃塗布工 200832053 [對照先前技術之功效] 加ftt發明’即使對具有寬度較大之膜接合面的防護薄膜框 無邊之雜合面寬度不_防護_框架、以及4角 ”S防護薄膜框架’也能均勻穩定的塗布適量的接合劑，^ 布或溢出的情況發生，如是便能形成外觀良好的膜接 【實施方式】 以下，以圖面詳細説明本發明，惟本發明並Li is difficult to control because the device cost is high and the liquid supply control is forced to approach the corner portion, and it is necessary to control the discharge amount of the coating liquid in a straight line =^^.曰 曰 曰 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 主 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是 是The width of the film adhesive will overflow, ii sleepy: the narrow side is wide and the wide side will not occur without coating is LV βίΐ, as shown in Figure 6 (c), in order to avoid the rotating mechanism When four needles 61 are arranged on the two sides of the library corner and the vertical side, the distribution of the coating liquid 62 is obviously uneven due to the passage of the needle tube, and the corner portion is still easy to be coated or overflowed in 200832053: Lu. The method, before the amine to the amine, 'we have not yet obtained a stable coating method, in particular, for the liquid crystal use, the large width of the anti-coating amount of the joint _ will not produce no coating or overflow [invention The problem to be solved] can be formed without the production of spitting, Γΐΐ5, back, and the spout is moved to apply. At this time, the inner end of ^_^ (=^^ in the protective film truss film The width of the joint surface is different from the short side of the width of the film joint surface, and the width of the straight edge is 6G~12G%, and the direction of the cloth head is perpendicular to In the direction of the Mei, the action is set to the top of the center, and the outlet is made by the Ministry of Finance. 4) The convex shape is preferably formed by one or a plurality of curved surfaces (the request gap is ίί: the surface of the second middle frame The interval between the two is 80% «the fineness is maintained at the surface of the remaining cloth head '^5), and there is no case where it is not applied.仃Coater 200832053 [Controlling the efficacy of the prior art] Adding ftt invention 'Even if the width of the hybrid film frame with a wide film joint surface is not edged _ protective _ frame, and 4 angle "S protective film frame" It is also possible to apply an appropriate amount of the bonding agent uniformly and stably, and it is possible to form a film having a good appearance. [Embodiment] Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is
=示設置了本發明之吐出口的塗布頭其前端構造的一 婦_平面圖以及剖面概略圖。又，圖2係表示對長邊盘短 达之艇接合面寬度不同的防護薄膜框架實施本發明—實施形態 平面圖以及剖面概略圖。 ^ ⑽會出液體的方式絲在裝滿膜接合劑溶液的 = 16的則端，且利用機械裝置所構成的移動機構（未經圖示） 而月b在水平面上以及互相垂直的3個軸方向上自由移動。塗布頭 ij ^面從所設置的吐出σ u滴下膜接合劑溶液1S，一面在防護 薄膜框架14上移動’並繞防護薄膜框架14的膜接合面丨圈 膜接合劑塗布在框架上。 、在此，除了空氣加壓、氮氣加壓等氣體加壓之外，還可以利 用东射粟、柱塞泵、導管泵等可控制供給量以及吐出停止動作的 各種不移職構作為麟合躺移送機構（未經圖示）。 ^日守，塗布頭11的外徑寬度a宜在防護薄膜框架14其膜接 舍面寬度b的60〜120%的顧内。又，當膜接合面寬度其長邊與 短邊相異時，如圖2之平關所示的，塗布頭其—方向的寬度e 形成在長邊寬度的60〜120%的範谓内，與其垂直的方向上的寬度 f开=成t短邊寬度的60〜120%的範圍内，吾人宜以長邊塗布時對 應長邊寬度的外徑e以及短邊塗布時對應短邊寬度的外徑f均在 與塗布頭_方㈣直的方向上的方式，設置塗布頭並使其移動。 200832053 為吐:二’pffj11之前端13與防護薄膜框架14之間隙，因 結果，即使劑f細毛細管縣而齡液注滿。 不會__。減@ 難合継 猎所使狀膜接合劑的赌將表面塗滿而沒 因此，膜接合劑的粘度（濃度）以及塗布 ― 酿架膜接合面寬度、乾燥後的膜厚、、外觀^素 人的’塗布頭11的外徑寬度也應考量膜接合面寬度、膜接 與膜接合面之間的距離等因素，而在膜接合 =度60〜120%的範圍内’特別宜在8〇〜1〇〇%的範圍内適當決 °又’ ® 2所tf縱横外徑不_塗布頭21，可触合徑 長該侧製作出_物件後，再平面切難—方向 望的形狀，㈣賴便，實際顧上也不會有储=付到所希 塗布頭11宜在前端中央設置吐出口 12,並形成以中央部為頂 部的凸出形狀。再者’該凸出形狀宜由一個或複數個曲面形威更 好。 … 、吐出口 13又置在中央部，無論在互相垂直的2邊之中的哪一邊 ，布情況都能穩定，且因為設置在頂部故塗布前其前端液滴穩 定’再者吐出口也不容易變乾燥。 又，塗布頭11其前端13的形·狀，即使幾乎是平面狀的也能 塗布，但若欲使塗布開始/結束點的接連處不會太醒目，而使轉 角部的塗布情況穩定的話，還是只有凸形狀效果會比較好。 又’该凸形狀宜形成曲面形狀’特別是旋轉體的曲面，這樣 200832053 要亦可組合使用數種曲面。 啟I易准右有必 合劑e，可蝴接 等因素後適當決定之，惟宜大約在Q. 3 m b =:加”處之理前端13與膜接合劑的 /34F^f-14 * 會旦m是，防護_框架通常邊框的中央部 :有k;;接合劑在平坦且外觀良好的狀態下顯 使塗布中賴接合劑吐出n 保 ，饥點不用說當然是报重要 呆 態，對於良好的塗布來說是很重要的保持讀的狀 如罔ΐ:塗'巧貝二如圖3(a)中31所示的，一體製作成型也可以 34的前端也可以。又，32係表示注射^籌^，、文衣你通常針管 气r 的材貝’宜使用碳鋼、不銹鋼、黃銅等金屬、PTFECm 二劑^溶劑具有耐性的材質，欲在該等材質上加 如ιί/rt度良好且平滑的細小捏孔相當耗費工時。因此，比起 屮所不—體製作成型的物件而言，如圖3 (b〉那樣的吐 件，：/刀3^市面販售的針管並組合安裝使用，製作出獨立構 「垂〆工業衣造觀點來看，是較佳的選擇。 1貫施例] 200832053 [實^Γυ説明本發明的實施例，惟本發明並非僅限於此。 1199^^9，以^機械加卫製作*外寸1146xl366inm、内寸 1122x134=;度6mm、轉角部内寸R2、外寸—、膜接合面寬 ϋΓ ΐ馳合金製防護薄膜框架，用弧細珠進行喷砂處 if °二二〜G. 9程度左右後’再對表面實施黑色氧皮銘處 tJSi溥膜㈣搬人等級1的無塵室中’用中性洗劑與純 7 4二，卞後，便在端面上進行塗布膜接合劑的測試。 “Λ 表示本發明所使用之膜接合劑塗布裝置的概略圖。架 P口Ρ ϊίίί 4有3門型XYZ垂直3輛機械裝置42，其Z轴前端安裝有 PP製注射器43連接於空氣加壓式塗布器[Iwashita= A plan view and a schematic cross-sectional view showing the structure of the front end of the coating head of the discharge port of the present invention. Further, Fig. 2 is a plan view and a cross-sectional schematic view showing a pellicle frame having different widths of the joint surface of the boat which is short in the long side disk. ^ (10) The way the liquid is discharged is filled with the end of the film cement solution = 16 and the moving mechanism (not shown) composed of mechanical means and the monthly b on the horizontal plane and the three axes perpendicular to each other Move freely in the direction. The coating head ij ^ surface was dropped from the film sizing agent solution 1S from the discharge σ u provided, and moved on the film frame 14 and coated on the frame around the film joint surface of the pellicle frame 14 . Here, in addition to gas pressurization such as air pressurization or nitrogen pressurization, it is also possible to use various types of unsupported structures such as the east shot miller, the plunger pump, and the catheter pump to control the supply amount and the discharge stop operation. Lying transfer mechanism (not shown). The outer diameter width a of the coating head 11 is preferably within 60 to 120% of the width b of the film-facing surface of the pellicle frame 14. Moreover, when the width of the film joint surface is different from the short side, as shown in the horizontal view of FIG. 2, the width e of the coating head is formed within a range of 60 to 120% of the width of the long side. In the range of 60 to 120% of the width of the short side in the direction perpendicular to the width of the short side, the outer diameter e corresponding to the long side width and the short side width when the short side is applied are suitable. The diameter f is set in a direction perpendicular to the coating head _ square (four), and the coating head is set and moved. 200832053 is spit: the gap between the front end 13 of the second 'pffj11 and the pellicle frame 14, as a result, even if the agent f is fine capillary county, the liquid is filled. will not__.减 @ 継 継 継 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 使 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状 状The outer diameter of the coating head 11 should also take into account factors such as the width of the film joint surface, the distance between the film joint and the film joint surface, and the like in the range of film joint = degree 60 to 120% 'especially in 8 〇~ 1〇〇% of the range is appropriate ° ° ' ® 2 tf vertical and horizontal outer diameter is not _ coating head 21, the length of the contact can be made on the side of the _ object, then the plane is difficult to cut - the shape of the direction, (four) Lai Therefore, the actual application of the coating head 11 is preferably such that the discharge opening 12 is provided at the center of the front end, and a convex shape having a center portion as a top portion is formed. Further, the convex shape is preferably made by one or a plurality of curved shapes. ... and the spout 13 is placed in the center, and the cloth can be stabilized on either side of the two sides perpendicular to each other, and because it is placed at the top, the front end of the droplet is stable before application. It is easy to dry. Moreover, the shape of the tip end 13 of the coating head 11 can be applied even if it is almost planar, but if the joint of the application start/end point is not too conspicuous, and the coating of the corner portion is stabilized, Or only the convex shape effect will be better. Further, the convex shape is preferably formed into a curved shape, in particular, a curved surface of the rotating body, so that 200832053 can also be used in combination with several curved surfaces. Kai Yi Yi right must have a mixture e, can be decided after the selection of factors, etc., only about Q. 3 mb =: plus "the front end of the 13 and the film bonding agent /34F^f-14 * will Once m is, the protective frame is usually in the central part of the frame: there is k; the bonding agent is in a flat and good appearance, so that the bonding agent in the coating is spit out n, and the hungry point is of course an important state of stay. Good coating is very important to keep reading like 罔ΐ: coating 'Qiaobei two as shown in 31 of Figure 3 (a), integrated molding can also be the front end of 34. Also, 32 series Injecting ^^^,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, A fine and smooth pinch hole is quite time-consuming. Therefore, compared to the case where the body is not formed, the nozzle is as shown in Fig. 3 (b>: / knife 3^ commercially available needle) And the combination of installation and use, to create an independent structure "coveted industrial clothing manufacturing point of view, is a better choice. 1 through the example] 200832053 [ The embodiment of the present invention is described, but the present invention is not limited thereto. 1199^^9, by mechanical reinforcement, the outer dimension is 1146xl366inm, the inner dimension is 1122x134=; the degree is 6mm, the inner corner of the corner is R2, the outer inch is - Membrane joint surface width ΐ ΐ 合金 alloy protective film frame, with arc beads for sandblasting if ° 22 ~ G. 9 degrees or so 'and then the surface of the black oxygen skin tJSi 溥 film (four) moving level 1 In the clean room, the test of the coating film bonding agent was carried out on the end surface with a neutral detergent and pure suffix. "Λ" shows a schematic view of the film bonding agent coating device used in the present invention. P port Ρ ϊ ί ί ί 4 There are 3 door type XYZ vertical 3 mechanical devices 42 with a PP syringe 43 attached to the front end of the Z axis to be connected to the air pressure applicator [Iwashita
InC. 〇EI)製’未經圖示]，並利用3軸機械裝置 =私制部控職械裝置動作無布液吐出動作。紐，將上述 輯酿架44轉合齡布端面朝上麟水平的方式固 =在^衣置上。又，為了防止防護薄膜框架.44因為本身重量而彎 膜接合面水平’遂在防護薄膜框架下各邊以大約2〇〇_ 的間隔没置pom樹脂製的支持部。 μ务射11 43械填用T苯_成15%㈣祕接劑[信 二工，（股）製，商品名：Χ—40~3004Α]作為膜接合劑溶液。 杏女θ’主射裔43的前端部上安裝著如圖1所示形狀的塗布頭11。 U係由黃舰機械加工所製_成，其表面為了防鱗而鍛 I一層鎳。惟在吐出口 12部分將SUS304的管子加工壓入較大徑 長的開孔内。 q塗布頭Π的外徑a與防護薄膜框架14的接合面寬度b同樣 认為12mm，前端13的形狀係曲率R30的球面，吐出口 12的徑長 f 〇. 3mra。又，在塗布中塗布頭n的前端13與防護薄膜框 表面之間的間隙設定成大約〇.8麵。 然後，利用自動運轉實施膜接合劑塗布，直到膜接合劑風乾 12 200832053 力:’1再利用高頻率誘導加熱裝置(未經圖示） ^7" ^£7Κ 120〇c J^ 將如疋減作之测试樣品搬運到 ；：^ί2ί^ ί ΚϊΐΙΓ ί面以及去角部分的膜接合劑也沒有發現 變成具有光澤的平滑表面，沒有任何 弓曲起伏或偏斜，外觀看起來相當良好。 [實施例2] 41^JV利古用機械加工製作出外寸436x745·5腫、内寸 县、^1麵:轉角部内寸R2mm、外寸R9mm、膜接合面之 隹邊見度5.5醜的長方形銘合金製防護薄膜框架， ϋ ff ΐ珠進行贺砂處理到Ra0. 8〜〇. 9左右程度後，再對表 A二色減域理。將該防護薄膜框架搬 =劑與純水徹底洗淨、乾燥後，進行在端面上塗： 使用與上述貫施例1完全相同的物件作為塗布裝置，只涂 布頭係使用像圖2所示郭樣形狀的構件。 土 π.,ΐΐΐ21，長軸外徑e為9mm，短轴外徑f為5.5麵，前端 23=狀為曲竿R25mm的球面，吐出口 22的直徑為Q. 3_。又， ΐΐΐΐΐί頭21的頂點與防護薄膜框架24表面之間的間隙設 疋马大約ϋ· 8mm。 *然後，進行與上述實施例丨完全相同的膜接合劑塗布以及評 價。結果、’無論短邊、長邊膜接合端面完全被膜接合劑塗布到°， 轉角部也沒有發現未塗布到的部分。又，塗布於防護薄膜框架内 面、外面以及去角部分的膜接合劑也沒有發現有溢出的情況’。、再 者，表面變成具有光澤的平滑表面，沒有任何f 外觀看起來相當良好。 々μ偏斜， 13 200832053 [比較例] 、、以，用與上述實施例1相同的防護薄膜框架、塗布裝置，只有 管口部分係使用如圖6 (b)所示那樣配置2根針 吕bi之形狀的構件，並進行臈接合劑塗布評價。 距離\各針管材質SUS3G4、内徑G.25x外徑0·46刪、針管間 巨_ 8mm、相對移動方向錯開的角度為奶。。 坪價了進實施例1、2完全同樣的膜接合劑塗布以及 轉角部β、D外側發現最Α寬度約2醜左右程度的 声0 1 f部分64，又，在長邊内側邊緣的數個處所發現寬 ^。·〜lmm的長條狀延伸的未塗布部分，很難說是合格的塗布品 【產業上利用性】 附面上以不會殘留未塗布部分、均勻、均質 貝、；㈣接合劑’對湘微影技術的產業領域裨益甚大。 【圖式簡單說明】 個實ΐί發明之設有吐出口的塗布頭，其前端構造的一 概略圖，（a)係平面説明圖，^^ 膜框1=對巧邊與短邊之膜接合面寬度、;.的防言ΐ薄 圖，崎峨的説明 前端透過螺栓安H塗布。々’（b)係分別在針管 圖。[圖4]係表示本發明利用之膜接合劑塗布裝置的概略説明 [圖3]係表示習知利用1板針營斟^ β ^ 劑之方法的説明I 塗布膜接合 200832053 [圖6]係表示習知 » 劑之方法的説明圖，（=^針管對防護薄_架塗布膜接合 在斜方向上_2根以上排列，針管，（b) i 明圖。 （c)係曼形排列4根針管為例示的説 【主要元件符號說明】 11 塗布頭 12吐出口 13塗布頭的前端（頂 14防護薄膜框架一； 15膜接合劑溶液 W注射器 21 塗布頭 22吐出口 Μ塗布頭前端 24防護薄膜框架 31塗布頭（一體加工型） 32注射器 33塗布頭（針管安裝型） 34針管 35安裝螺栓 41架台 42 ΧΥΖ垂直3軸機械裝置 43注射器 44防護薄膜框架 51針管 52吐出口 53注射器 54防護薄膜框架 15 200832053 55膜接合劑 61針管 62膜接合劑（塗布液） Θ3防護薄膜框架 64 未塗布部分 a塗布頭外徑寬度 b膜接合面寬度 c塗布頭的前端與寬度方向最外侧的端部之間的高度差 . d塗布頭的前端與防護薄膜框架表面之間的距離 e塗布頭外徑寬度（長轴） ’ f塗布頭外徑寬度（短轴) A，B，C，D轉角部 A-A、B-B剖面線 大箭號塗布方向 16InC. 〇EI) system 'not shown', and using 3-axis mechanical device = private department control device device operation without cloth discharge operation. New, the above-mentioned series of brewing racks 44 turn the end of the cloth face up to the level of the upper level of solid = in the clothing. Further, in order to prevent the pellicle frame 44 from being bent due to its own weight, the support portion of the pom resin is not disposed at intervals of about 2 〇〇 _ on the sides of the pellicle frame.务 射 11 11 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 43 A coating head 11 having a shape as shown in Fig. 1 is attached to the front end portion of the apricot θ' main-spring 43. The U system is made by the Yellow Ship Machining Center, and its surface is forged with a layer of nickel for the purpose of preventing scales. However, the SUS304 tube is machined into the larger diameter opening in the 12-port outlet. The outer diameter a of the coating head 与 is similar to the width b of the joint surface of the pellicle frame 14, and is 12 mm. The shape of the front end 13 is a spherical surface having a curvature R30, and the diameter of the discharge opening 12 is f 〇. 3 mra. Further, the gap between the leading end 13 of the coating head n and the surface of the pellicle frame during application is set to about 0.88. Then, the film bonding agent is applied by automatic operation until the film bonding agent is air-dried 12 200832053 Force: '1 Reuse the high frequency induction heating device (not shown) ^7" ^£7Κ 120〇c J^ The test sample was transferred to the ::^ί2ί^ ί ΚϊΐΙΓ ί ί 以及 and the peeling part of the film bond was not found to become a smooth surface with a luster, without any bowing undulations or skew, the appearance looks quite good. [Embodiment 2] 41^JV Ligu used mechanical processing to produce an outer inch 436x745·5 swollen, inner inch county, ^1 face: R2mm in the corner, R9mm in the outer ring, and 5.5 ugly in the film joint. Alloy protective film frame, ϋ ff ΐ 进行 进行 贺 贺 贺 贺 贺 贺 贺 贺 Ra Ra Ra Ra Ra Ra Ra Ra Ra 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 The protective film frame was thoroughly washed and dried with pure water, and then applied to the end surface. The same thing as the above-mentioned Example 1 was used as a coating device, and only the head system was used as shown in FIG. A component of a shape. The soil π., ΐΐΐ21, the major axis outer diameter e is 9 mm, the short axis outer diameter f is 5.5 faces, the front end 23 = the spherical surface of the curved circle R25 mm, and the diameter of the discharge port 22 is Q. 3_. Further, the gap between the apex of the 头ί head 21 and the surface of the pellicle frame 24 is set to be about 8 mm. * Then, the same film bonding agent coating and evaluation as in the above Example 进行 was carried out. As a result, the short-side and long-side film joining end faces were completely coated with the film bonding agent to °, and the uncoated portion was not found in the corner portion. Further, no film overflow was observed in the film bonding agent applied to the inner surface, the outer surface, and the chamfered portion of the pellicle frame. Furthermore, the surface becomes a smooth, shiny surface that looks quite good without any f appearance. 々μ skew, 13 200832053 [Comparative Example] With the same pellicle frame and coating device as in the above-described first embodiment, only the nozzle portion is provided with two needles as shown in Fig. 6(b). The member of the shape of bi was evaluated for the enamel coating. Distance \ Each needle tube material SUS3G4, inner diameter G.25x outer diameter 0·46 deletion, needle _ 8mm between the needles, the angle of the relative movement direction is milk. . In the first and second embodiments, the film bonding agent was applied in the same manner as in the first and second embodiments, and the sound 0 1 f portion 64 having the maximum width of about 2 ugs on the outer side of the corner portions β and D was found, and several of the inner edges of the long sides were further formed. The location was found to be wide ^. · ~1mm long strip-shaped uncoated part, it is difficult to say that it is a qualified coated product [industrial use] on the side of the surface so that no uncoated part remains, uniform, homogeneous shell, and (4) cementing agent 'Xiang Wei The industry of shadow technology is of great benefit. [Simplified description of the drawings] A practical view of the coating head with a spout, a schematic diagram of the front end structure, (a) a plan view, ^^ film frame 1 = film bonding between the edge and the short side The width of the face, the ruthlessness of the ruthlessness, and the rugged description of the front end are coated by bolts H. 々’(b) is in the needle tube diagram. [Fig. 4] is a schematic view showing a film bonding agent coating apparatus used in the present invention. Fig. 3 is a view showing a conventional method of using a one-plate needle β^β^ agent. The coating film bonding 200832053 [Fig. 6] An illustration showing the method of the conventional agent. (=^The needle tube is attached to the protective film _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The root needle tube is exemplified [the main component symbol description] 11 The coating head 12 spout 13 the front end of the coating head (top 14 protective film frame 1; 15 film cement solution W syringe 21 coating head 22 spout outlet Μ coating head front end 24 protection Film frame 31 coating head (integral processing type) 32 syringe 33 coating head (needle tube mounting type) 34 needle tube 35 mounting bolt 41 mounting table 42 ΧΥΖ vertical 3-axis mechanical device 43 syringe 44 protective film frame 51 needle tube 52 discharge port 53 syringe 54 protective film Frame 15 200832053 55 film bonding agent 61 needle tube 62 film bonding agent (coating liquid) Θ3 protective film frame 64 uncoated portion a coating head outer diameter width b film joint surface width c coating head front end and width direction outermost The difference in height between the ends of the d. The distance between the front end of the coating head and the surface of the pellicle frame. e. The outer diameter of the coating head (long axis) 'f coating head outer diameter width (short axis) A, B, C, D corner part AA, BB section line large arrow coating direction 16