HK1115835A1 - Method of applying film adhesive to pellicle frame - Google Patents

Method of applying film adhesive to pellicle frame

Info

Publication number
HK1115835A1
HK1115835A1 HK08111853.5A HK08111853A HK1115835A1 HK 1115835 A1 HK1115835 A1 HK 1115835A1 HK 08111853 A HK08111853 A HK 08111853A HK 1115835 A1 HK1115835 A1 HK 1115835A1
Authority
HK
Hong Kong
Prior art keywords
film adhesive
pellicle frame
applying film
applying
pellicle
Prior art date
Application number
HK08111853.5A
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1115835A1 publication Critical patent/HK1115835A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Packaging Frangible Articles (AREA)
  • Coating Apparatus (AREA)
HK08111853.5A 2007-01-19 2008-10-29 Method of applying film adhesive to pellicle frame HK1115835A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007010025A JP4921184B2 (en) 2007-01-19 2007-01-19 Method of applying film adhesive to pellicle frame

Publications (1)

Publication Number Publication Date
HK1115835A1 true HK1115835A1 (en) 2008-12-12

Family

ID=39703167

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08111853.5A HK1115835A1 (en) 2007-01-19 2008-10-29 Method of applying film adhesive to pellicle frame

Country Status (5)

Country Link
JP (1) JP4921184B2 (en)
KR (1) KR101355906B1 (en)
CN (1) CN101224457B (en)
HK (1) HK1115835A1 (en)
TW (1) TWI378319B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011164402A (en) * 2010-02-10 2011-08-25 Shin-Etsu Chemical Co Ltd Method for manufacturing pellicle
JP5432855B2 (en) * 2010-08-04 2014-03-05 信越化学工業株式会社 Pellicle manufacturing method and apparatus
JP5455871B2 (en) * 2010-11-17 2014-03-26 信越化学工業株式会社 Pellicle manufacturing method
JP5746662B2 (en) * 2012-05-11 2015-07-08 信越化学工業株式会社 Pellicle frame
JP6861596B2 (en) 2017-08-07 2021-04-21 信越化学工業株式会社 Pellicle frame and pellicle
FR3115716B1 (en) 2020-11-05 2023-12-22 Exel Ind METHOD AND INSTALLATION FOR APPLYING A COATING PRODUCT TO A SURFACE

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273256A (en) * 1988-09-08 1990-03-13 Asahi Kasei Denshi Kk Structural body for pellicle frame
JPH03102274A (en) * 1989-05-17 1991-04-26 Mitsubishi Electric Corp Test circuit of serial access memory
JPH11262717A (en) * 1998-03-17 1999-09-28 Asahi Glass Co Ltd Method and device for applying adhesive to surface of platelike body held vertically
JP2001356473A (en) * 2000-06-16 2001-12-26 Mitsui Chemicals Inc Pellicle
JP2002136910A (en) * 2000-11-07 2002-05-14 Nitto Denko Corp Die coater and coating method using the same
JP3486619B2 (en) * 2000-12-27 2004-01-13 三井化学株式会社 Pellicle, pellicle manufacturing method, and pellicle adhesive
JP2004157229A (en) * 2002-11-05 2004-06-03 Shin Etsu Chem Co Ltd Pellicle for lithography and its manufacturing method
JP4330377B2 (en) * 2003-05-15 2009-09-16 旭化成イーマテリアルズ株式会社 Large pellicle assembly method and large pellicle assembly apparatus
JP2005021838A (en) * 2003-07-04 2005-01-27 Konica Minolta Opto Inc Needle and discharge outlet member of discharging device
TW200617129A (en) * 2004-09-10 2006-06-01 Mitsui Chemicals Inc Adhesive
JP2006178434A (en) * 2004-11-25 2006-07-06 Asahi Kasei Electronics Co Ltd Large pellicle
JP2006184704A (en) * 2004-12-28 2006-07-13 Asahi Kasei Electronics Co Ltd Large-sized pellicle for liquid crystal
JP2006323178A (en) * 2005-05-19 2006-11-30 Shin Etsu Chem Co Ltd Pellicle for lithography, and its manufacturing method

Also Published As

Publication number Publication date
CN101224457A (en) 2008-07-23
TW200832053A (en) 2008-08-01
CN101224457B (en) 2011-07-20
JP2008176102A (en) 2008-07-31
TWI378319B (en) 2012-12-01
JP4921184B2 (en) 2012-04-25
KR101355906B1 (en) 2014-01-28
KR20080068528A (en) 2008-07-23

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20220116