TW200746318A - Fabrication of three dimensional integrated circuit employing multiple die panels - Google Patents
Fabrication of three dimensional integrated circuit employing multiple die panelsInfo
- Publication number
- TW200746318A TW200746318A TW095125134A TW95125134A TW200746318A TW 200746318 A TW200746318 A TW 200746318A TW 095125134 A TW095125134 A TW 095125134A TW 95125134 A TW95125134 A TW 95125134A TW 200746318 A TW200746318 A TW 200746318A
- Authority
- TW
- Taiwan
- Prior art keywords
- panel
- die
- panels
- wafer
- fabrication
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
- Y10T156/1062—Prior to assembly
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/193,926 US7622313B2 (en) | 2005-07-29 | 2005-07-29 | Fabrication of three dimensional integrated circuit employing multiple die panels |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200746318A true TW200746318A (en) | 2007-12-16 |
TWI397132B TWI397132B (zh) | 2013-05-21 |
Family
ID=37693001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095125134A TWI397132B (zh) | 2005-07-29 | 2006-07-10 | 使用多晶粒面板之三維積體電路之製造 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7622313B2 (zh) |
JP (1) | JP2009503846A (zh) |
CN (1) | CN100587913C (zh) |
TW (1) | TWI397132B (zh) |
WO (1) | WO2007018850A2 (zh) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8084866B2 (en) | 2003-12-10 | 2011-12-27 | Micron Technology, Inc. | Microelectronic devices and methods for filling vias in microelectronic devices |
US7091124B2 (en) * | 2003-11-13 | 2006-08-15 | Micron Technology, Inc. | Methods for forming vias in microelectronic devices, and methods for packaging microelectronic devices |
US20050247894A1 (en) | 2004-05-05 | 2005-11-10 | Watkins Charles M | Systems and methods for forming apertures in microfeature workpieces |
US7232754B2 (en) | 2004-06-29 | 2007-06-19 | Micron Technology, Inc. | Microelectronic devices and methods for forming interconnects in microelectronic devices |
US7425499B2 (en) * | 2004-08-24 | 2008-09-16 | Micron Technology, Inc. | Methods for forming interconnects in vias and microelectronic workpieces including such interconnects |
SG120200A1 (en) * | 2004-08-27 | 2006-03-28 | Micron Technology Inc | Slanted vias for electrical circuits on circuit boards and other substrates |
US7300857B2 (en) | 2004-09-02 | 2007-11-27 | Micron Technology, Inc. | Through-wafer interconnects for photoimager and memory wafers |
US7271482B2 (en) | 2004-12-30 | 2007-09-18 | Micron Technology, Inc. | Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods |
US7795134B2 (en) | 2005-06-28 | 2010-09-14 | Micron Technology, Inc. | Conductive interconnect structures and formation methods using supercritical fluids |
US7863187B2 (en) | 2005-09-01 | 2011-01-04 | Micron Technology, Inc. | Microfeature workpieces and methods for forming interconnects in microfeature workpieces |
US7262134B2 (en) | 2005-09-01 | 2007-08-28 | Micron Technology, Inc. | Microfeature workpieces and methods for forming interconnects in microfeature workpieces |
US7622377B2 (en) * | 2005-09-01 | 2009-11-24 | Micron Technology, Inc. | Microfeature workpiece substrates having through-substrate vias, and associated methods of formation |
US7737003B2 (en) * | 2005-10-11 | 2010-06-15 | International Business Machines Corporation | Method and structure for optimizing yield of 3-D chip manufacture |
US7749899B2 (en) | 2006-06-01 | 2010-07-06 | Micron Technology, Inc. | Microelectronic workpieces and methods and systems for forming interconnects in microelectronic workpieces |
US7629249B2 (en) | 2006-08-28 | 2009-12-08 | Micron Technology, Inc. | Microfeature workpieces having conductive interconnect structures formed by chemically reactive processes, and associated systems and methods |
US7902643B2 (en) | 2006-08-31 | 2011-03-08 | Micron Technology, Inc. | Microfeature workpieces having interconnects and conductive backplanes, and associated systems and methods |
US7494846B2 (en) * | 2007-03-09 | 2009-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Design techniques for stacking identical memory dies |
SG149710A1 (en) | 2007-07-12 | 2009-02-27 | Micron Technology Inc | Interconnects for packaged semiconductor devices and methods for manufacturing such devices |
SG150410A1 (en) | 2007-08-31 | 2009-03-30 | Micron Technology Inc | Partitioned through-layer via and associated systems and methods |
US7884015B2 (en) | 2007-12-06 | 2011-02-08 | Micron Technology, Inc. | Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods |
US8796073B2 (en) | 2008-09-24 | 2014-08-05 | Qualcomm Incorporated | Low cost die-to-wafer alignment/bond for 3d IC stacking |
US20110300669A1 (en) * | 2010-06-07 | 2011-12-08 | Chi-Chih Shen | Method for Making Die Assemblies |
JPWO2012169168A1 (ja) | 2011-06-09 | 2015-02-23 | パナソニック株式会社 | 三次元集積回路、及びそのテスト方法 |
CN103714188B (zh) * | 2012-09-28 | 2018-03-23 | 恩智浦美国有限公司 | 用于优化在晶片上制造的管芯数目的系统 |
KR20140099604A (ko) | 2013-02-04 | 2014-08-13 | 삼성전자주식회사 | 적층 패키지 및 적층 패키지의 제조 방법 |
US9250288B2 (en) * | 2013-09-05 | 2016-02-02 | Powertech Technology Inc. | Wafer-level testing method for singulated 3D-stacked chip cubes |
CN105023877B (zh) | 2014-04-28 | 2019-12-24 | 联华电子股份有限公司 | 半导体晶片、封装结构与其制作方法 |
KR101544319B1 (ko) | 2014-06-24 | 2015-08-12 | 성균관대학교산학협력단 | 3차원 반도체의 제조방법 |
US10707138B1 (en) * | 2017-03-29 | 2020-07-07 | Xilinx, Inc. | High yield package assembly technique |
CN112563250B (zh) * | 2020-11-29 | 2022-07-22 | 中国电子科技集团公司第五十五研究所 | 一种多颗芯片同时制备封装使用的方法 |
Family Cites Families (16)
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US664132A (en) * | 1900-09-15 | 1900-12-18 | William D Denton | Mount for entomological specimens. |
KR900008647B1 (ko) | 1986-03-20 | 1990-11-26 | 후지쓰 가부시끼가이샤 | 3차원 집적회로와 그의 제조방법 |
US4954875A (en) | 1986-07-17 | 1990-09-04 | Laser Dynamics, Inc. | Semiconductor wafer array with electrically conductive compliant material |
JPH04340758A (ja) * | 1991-05-17 | 1992-11-27 | Fujitsu Ltd | 半導体装置およびその製造方法 |
US5426072A (en) | 1993-01-21 | 1995-06-20 | Hughes Aircraft Company | Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate |
KR970000214B1 (ko) * | 1993-11-18 | 1997-01-06 | 삼성전자 주식회사 | 반도체 장치 및 그 제조방법 |
DE4433845A1 (de) | 1994-09-22 | 1996-03-28 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer dreidimensionalen integrierten Schaltung |
US6049624A (en) * | 1998-02-20 | 2000-04-11 | Micron Technology, Inc. | Non-lot based method for assembling integrated circuit devices |
JP2000294724A (ja) * | 1999-04-09 | 2000-10-20 | Matsushita Electronics Industry Corp | 半導体装置及びその製造方法 |
DE19924935C1 (de) | 1999-05-31 | 2000-11-30 | Fraunhofer Ges Forschung | Verfahren zur Herstellung von dreidimensionalen Schaltungen |
KR100806060B1 (ko) * | 1999-11-29 | 2008-02-21 | 루센트 테크놀러지스 인크 | 멀티-칩 패키지들의 ic칩들의 클러스터 패키징 |
US6344401B1 (en) * | 2000-03-09 | 2002-02-05 | Atmel Corporation | Method of forming a stacked-die integrated circuit chip package on a water level |
TW497236B (en) * | 2001-08-27 | 2002-08-01 | Chipmos Technologies Inc | A soc packaging process |
US6611052B2 (en) | 2001-11-16 | 2003-08-26 | Micron Technology, Inc. | Wafer level stackable semiconductor package |
TW591237B (en) | 2002-07-31 | 2004-06-11 | Advanced Semiconductor Eng | Semiconductor wafer and testing method for the same |
US6888365B2 (en) | 2002-09-12 | 2005-05-03 | Infineon Technologies North America Corporation | Semiconductor wafer testing system |
-
2005
- 2005-07-29 US US11/193,926 patent/US7622313B2/en active Active
-
2006
- 2006-07-03 WO PCT/US2006/026256 patent/WO2007018850A2/en active Application Filing
- 2006-07-03 JP JP2008523903A patent/JP2009503846A/ja active Pending
- 2006-07-03 CN CN200680027834A patent/CN100587913C/zh active Active
- 2006-07-10 TW TW095125134A patent/TWI397132B/zh active
Also Published As
Publication number | Publication date |
---|---|
WO2007018850A3 (en) | 2008-01-03 |
CN101258583A (zh) | 2008-09-03 |
US20070023121A1 (en) | 2007-02-01 |
US7622313B2 (en) | 2009-11-24 |
CN100587913C (zh) | 2010-02-03 |
JP2009503846A (ja) | 2009-01-29 |
TWI397132B (zh) | 2013-05-21 |
WO2007018850A2 (en) | 2007-02-15 |
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