TW200738350A - Preliminary discharge device and preliminary discharge method - Google Patents

Preliminary discharge device and preliminary discharge method

Info

Publication number
TW200738350A
TW200738350A TW096108313A TW96108313A TW200738350A TW 200738350 A TW200738350 A TW 200738350A TW 096108313 A TW096108313 A TW 096108313A TW 96108313 A TW96108313 A TW 96108313A TW 200738350 A TW200738350 A TW 200738350A
Authority
TW
Taiwan
Prior art keywords
preliminary discharge
coating liquid
slit nozzle
discharge device
discharge surface
Prior art date
Application number
TW096108313A
Other languages
Chinese (zh)
Inventor
Hirotsugu Kumazawa
Hidenori Miyamoto
Yoshiaki Masu
Kenji Yoshizawa
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200738350A publication Critical patent/TW200738350A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/04—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/10—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed before the application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application

Abstract

To realize a preliminary discharge device which doesn't require a enlarged size and a high machining accuracy for roller itself, and an amount of consumption of a washing fluid can be relatively smaller and the running cost can be lowered. In a preliminary discharge device for discharging a coating liquid from a slit nozzle (3) prior to coating of a substrate (W) with the coating liquid, a preliminary discharge surface (20) is disposed to face the slit nozzle (3) and extends in the same direction as the extending direction of the slit opening in the slit nozzle (3), and a removal mechanism (21) for removing the coating liquid existing on the surface of the preliminary discharge surface (20) is installed near the preliminary discharge surface (20).
TW096108313A 2006-03-31 2007-03-09 Preliminary discharge device and preliminary discharge method TW200738350A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006096270A JP4986490B2 (en) 2006-03-31 2006-03-31 Pre-discharge device

Publications (1)

Publication Number Publication Date
TW200738350A true TW200738350A (en) 2007-10-16

Family

ID=38580911

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096108313A TW200738350A (en) 2006-03-31 2007-03-09 Preliminary discharge device and preliminary discharge method

Country Status (4)

Country Link
JP (1) JP4986490B2 (en)
KR (1) KR101005955B1 (en)
TW (1) TW200738350A (en)
WO (1) WO2007116609A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5338071B2 (en) * 2007-12-27 2013-11-13 東レ株式会社 Coating method, coating apparatus, and method for manufacturing liquid crystal display member
KR101007685B1 (en) 2008-11-18 2011-01-13 세메스 주식회사 Apparatus of coating photo resist composition in a Flat Panel Display manufacturing
JP2010240550A (en) 2009-04-03 2010-10-28 Dainippon Screen Mfg Co Ltd Apparatus for treating substrate
KR101303395B1 (en) 2010-09-17 2013-09-05 주식회사 케이씨텍 Preparatory photoresist discharging device for substrate coater apparatus and method of coating photoresist on substrate using same
JP5288383B2 (en) * 2010-12-20 2013-09-11 東京エレクトロン株式会社 Coating processing apparatus and coating processing method
KR101249307B1 (en) 2011-02-28 2013-04-01 주식회사 케이씨텍 Preliminary discharge thin plate device in substrate coater apparatus and substrate coater apparatus using same
KR101206773B1 (en) * 2011-02-28 2012-11-30 주식회사 케이씨텍 Substrate coater apparatus having minimized slit nozzle path
JP2014231043A (en) * 2013-05-29 2014-12-11 東京エレクトロン株式会社 Coating applicator and washing method for encapsulation part
JP2015142905A (en) * 2013-12-25 2015-08-06 芝浦メカトロニクス株式会社 Adhesive application device, cleaning method of adhesive application member, display panel manufacturing apparatus, and manufacturing method of display panel
JP6577290B2 (en) * 2015-08-20 2019-09-18 トヨタ自動車九州株式会社 Viscous material recovery device
FR3045422B1 (en) * 2015-12-22 2019-07-19 Psa Automobiles Sa. DEVICE FOR LAUNDRYING A SEAL CORD
DE102019111200A1 (en) * 2019-04-30 2020-11-05 Airbus Operations Gmbh Device for paint application

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015121A1 (en) * 1979-02-23 1980-09-03 Crosrol Limited Apparatus for cleaning the surface of a rotating roller
JP3442930B2 (en) * 1995-12-28 2003-09-02 シャープ株式会社 How to clean the LCD panel
JPH09218625A (en) * 1996-02-09 1997-08-19 Canon Inc Cleaning member and image forming method using the member and device used for the method
KR20030011463A (en) * 2001-08-03 2003-02-11 도쿄 오카 고교 가부시키가이샤 Pre-discharging apparatus and method for a slit coater
JP4091372B2 (en) * 2002-07-16 2008-05-28 大日本スクリーン製造株式会社 Substrate processing equipment
JP2004081983A (en) * 2002-08-27 2004-03-18 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
JP3877719B2 (en) * 2002-11-07 2007-02-07 東京応化工業株式会社 Pre-discharge device for slit coater
JP2004230315A (en) * 2003-01-31 2004-08-19 Toshiba Corp Cleaning apparatus and cleaning method for optical window glass
JP4409930B2 (en) * 2003-12-22 2010-02-03 株式会社ヒラノテクシード Coating nozzle cleaning device

Also Published As

Publication number Publication date
KR101005955B1 (en) 2011-01-05
JP4986490B2 (en) 2012-07-25
JP2007268391A (en) 2007-10-18
KR20080094825A (en) 2008-10-24
WO2007116609A1 (en) 2007-10-18

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