TW200735722A - Static eliminator with fine electrode ion generating element - Google Patents

Static eliminator with fine electrode ion generating element

Info

Publication number
TW200735722A
TW200735722A TW095108784A TW95108784A TW200735722A TW 200735722 A TW200735722 A TW 200735722A TW 095108784 A TW095108784 A TW 095108784A TW 95108784 A TW95108784 A TW 95108784A TW 200735722 A TW200735722 A TW 200735722A
Authority
TW
Taiwan
Prior art keywords
ion generating
static eliminator
electrode
generating element
discharge electrode
Prior art date
Application number
TW095108784A
Other languages
English (en)
Chinese (zh)
Inventor
Takafumi Seto
Makoto Hirasawa
Masaaki Tsuji
Akira Okuyama
Susumu Saito
Original Assignee
Nat Inst Of Advanced Ind Scien
Fisa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Inst Of Advanced Ind Scien, Fisa Corp filed Critical Nat Inst Of Advanced Ind Scien
Publication of TW200735722A publication Critical patent/TW200735722A/zh

Links

Landscapes

  • Elimination Of Static Electricity (AREA)
TW095108784A 2005-01-13 2006-03-15 Static eliminator with fine electrode ion generating element TW200735722A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005006115A JP4691691B2 (ja) 2005-01-13 2005-01-13 微細電極イオン発生素子を有する除電装置

Publications (1)

Publication Number Publication Date
TW200735722A true TW200735722A (en) 2007-09-16

Family

ID=36802196

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095108784A TW200735722A (en) 2005-01-13 2006-03-15 Static eliminator with fine electrode ion generating element

Country Status (2)

Country Link
JP (1) JP4691691B2 (enrdf_load_stackoverflow)
TW (1) TW200735722A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110719680A (zh) * 2018-07-11 2020-01-21 株式会社基恩士 除电装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547506B2 (ja) 2005-11-24 2010-09-22 株式会社司測研 エアロゾル荷電中和装置
JP5156993B2 (ja) * 2007-02-09 2013-03-06 独立行政法人産業技術総合研究所 イオン発生器及び除電器
EP2295959B1 (en) * 2008-06-27 2016-04-06 University of Yamanashi Ionization analysis method and device
JP5932592B2 (ja) * 2011-12-05 2016-06-08 東京エレクトロン株式会社 除電用治具及びそれを用いた基板処理装置並びに基板処理装置の除電方法
CN104505713A (zh) * 2014-10-28 2015-04-08 张义卿 一种网眼状氧化钛膜的电极材料及其制造方法及其用途
JP6778624B2 (ja) * 2017-01-31 2020-11-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、基板処理システムおよび基板処理方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794117B2 (ja) * 1989-04-25 1998-09-03 増田 佳子 除電装置
JP2003249327A (ja) * 2002-02-26 2003-09-05 Okabe Mica Co Ltd イオン発生装置
JP2004105517A (ja) * 2002-09-19 2004-04-08 Sharp Corp イオン発生素子、イオン発生素子の製造方法、イオン発生装置およびそれを備えた電気機器
JP4063784B2 (ja) * 2003-05-15 2008-03-19 シャープ株式会社 イオン発生素子、イオン発生装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110719680A (zh) * 2018-07-11 2020-01-21 株式会社基恩士 除电装置
CN110719680B (zh) * 2018-07-11 2024-04-23 株式会社基恩士 除电装置

Also Published As

Publication number Publication date
JP4691691B2 (ja) 2011-06-01
JP2006196291A (ja) 2006-07-27

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